EP2675577A2 - Module de buses et dispositif de lavage comportant un module de buse - Google Patents
Module de buses et dispositif de lavage comportant un module de buseInfo
- Publication number
- EP2675577A2 EP2675577A2 EP12700671.6A EP12700671A EP2675577A2 EP 2675577 A2 EP2675577 A2 EP 2675577A2 EP 12700671 A EP12700671 A EP 12700671A EP 2675577 A2 EP2675577 A2 EP 2675577A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- nozzle
- module
- fluid
- nozzle chamber
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, e.g. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Definitions
- the invention relates to a nozzle module, in particular for the flood washing of workpieces in a cleaning container filled with a liquid cleaning medium, with a module body having at least one nozzle chamber.
- the nozzle chamber has at least one nozzle opening for generating at least one fluid jet.
- the nozzle module includes means for supplying pressurized fluid through a fluid channel into the at least one nozzle chamber connected to the module body.
- the invention relates to a device for cleaning workpieces by flood washing with at least one nozzle module.
- By an inventive flood washing of workpieces such impurities can be eliminated.
- the workpieces are completely or partially immersed in a fluid bath (in particular in liquid under normal conditions and possibly largely stationary cleaning medium) and acted upon in a fluid flow, which has a high flow velocity.
- nozzle modules are preferred during flood washing as the workpieces are operated wholly or partly below a liquid level of said fluid bath.
- the nozzle modules are used, which can provide a fluid jet with a large mass flow by the high velocity is given to the fluid flowing out of the nozzle module.
- Such nozzle modules should therefore be designed for a comparatively large throughput of fluid per unit of time.
- a device for cleaning workpieces by flood washing which contains a nozzle module of the type mentioned, is known from WO 2009/44073 A2.
- a cleaning device having a cleaning chamber for receiving a workpiece to be cleaned.
- a nozzle module is arranged.
- the nozzle module has a module body with a nozzle chamber.
- the nozzle chamber is connected to a pipeline as a means for introducing pressurized cleaning fluid.
- the nozzle chamber in the module body has a slit-shaped nozzle opening.
- the object of the invention is to provide a nozzle module for a device for cleaning workpieces, with which one or more fluid jets can be generated which not only have a high flow velocity but also a large mass flow.
- a nozzle module of the type mentioned in which the means for supplying pressurized fluid has a hollow body extending into the nozzle chamber, which has at least one opening for the inflow of fluid into the nozzle chamber.
- the nozzle module according to the invention is based on the idea that the flow rate of fluid per unit of time through a nozzle module has physical limits.
- the hollow chamber extending into the nozzle chamber. body to homogenize the fluid flow in the nozzle chamber and / or adjust as needed.
- the hollow body in the nozzle chamber is extended in a longitudinal direction and the fluid from the hollow body passes through the at least one opening with a substantially in a plane perpendicular to the longitudinal direction extending flow to the at least one nozzle opening.
- the nozzle chamber may have a plurality of nozzle openings arranged in succession in the longitudinal direction or at least have a slot-shaped nozzle opening which extends in the longitudinal direction.
- a device for supplying fluid into a nozzle chamber not only for the supply of fluid into the nozzle chamber, but also to mechanically stabilize the nozzle chamber. Then, namely, the nozzle chamber can be acted upon with comparatively low material thicknesses and correspondingly reduced weight with very high pressures. It can be provided in particular that the hollow body carries the module body.
- An idea of the invention is also that the mechanical stabilization of a nozzle module with a device for supplying fluid into the nozzle chamber in a cleaning device allows different installation positions for the nozzle module, without causing excessive mechanical loads on the interfaces of the means for supplying fluid and module bodies come in the nozzle module.
- the module body is rotatably received on the device for supplying fluid into the at least one nozzle chamber and can be moved about an axis of rotation, it is possible to produce a fluid jet with a variable jet direction.
- This measure makes it possible in particular for a fluidically favorable operating state to be achieved in the Nozzle module can be adjusted. In particular, it is also possible to minimize vortex formation within the nozzle chamber (s).
- first receiving area for the carrier section in the module body and the second receiving area for the hollow body in the module body in each case as a pivot bearing.
- bearing points for the module body are provided at the means for supplying fluid into the nozzle chamber on opposite sides of the nozzle chamber. This ensures that the rotary bearing accommodating the module body is not subjected to unfavorable torques. In particular, torques are thus avoided with a force component perpendicular to the axis of rotation of the pivot bearing.
- the hollow body is designed as a hollow shaft having a wall with a plurality of openings for the passage of fluid into the at least one nozzle chamber between the first and the second receiving area for the module body, a particularly stable design of the nozzle module can be achieved.
- the openings are preferably arranged between the first and the second receiving region for the module body with a uniform distance from one another. It is advantageous if the shaft axis of the hollow shaft is aligned with the axis of rotation of the rotary bearing.
- the nozzle chamber may have a section with a trough-shaped, perpendicular to the axis perpendicular cross-section, which opens into an opening slot.
- This opening slot is formed in the wall of the module body between the nozzle mouth and the nozzle chamber In the nozzle mouth while the fluid is supplied through at least two wall sections of the nozzle chamber, which is the redirect fluid emerging from two opposing openings in the hollow body.
- the wall of the nozzle chamber then directs the flow path into the section with a trough-shaped or trough-shaped cross section of the nozzle chamber, which opens into the opening slot.
- the gap axis runs parallel to the axis of rotation of the module body. It is advantageous if the module body has adjustable adjustment elements by means of which the geometry of the gap, in particular the width of the gap, can be varied. This measure allows the fluid jet to be configurable with the nozzle module and adapted to the type of soiling and the degree of soiling of workpieces.
- a drive For driving the module body relative to the device for supplying fluid into the at least one nozzle chamber, a drive may be provided.
- the drive is z.
- a pneumatic drive which can be operated reliably even in the caused by cleaning media moist and / or chemically aggressive atmosphere.
- the at least one (first) nozzle chamber in the module body can be connected to at least one further nozzle chamber in the module body.
- the nozzle chambers preferably each have a nozzle opening for generating a respective Fiuidstrahis (or more, substantially rectified fluid jets).
- the beam direction of the Fiuidstrahis emerging from the at least one nozzle opening of the at least one (first) nozzle chamber and the jet direction of the nozzle jet emerging from the nozzle opening of the further fluid chamber at an acute angle to each other or are skewed.
- the beam directions are arranged perpendicular to each other.
- the at least one (first) nozzle chamber in the module body is connected to at least two further nozzle chambers in the module body.
- the further nozzle chambers each have a nozzle opening for generating a first and a second further fluid jet with an acute-angled or perpendicular jet direction skewed to the jet direction of a fluid jet emerging from the at least one nozzle opening of the at least one (first) nozzle chamber.
- first and the second further fluid jet are mirror-symmetrically aligned relative to the fluid jet emerging from the at least one (first) nozzle chamber, the fluid jet emerging from the at least one (first) nozzle chamber extending in a mirror plane.
- the nozzle openings of the further nozzle chambers may also have a gap shape and extend along a gap axis. It is particularly advantageous if the nozzle opening of at least one further nozzle chamber for generating a further fluid jet has a center which is at a distance from the center of a nozzle opening of the at least one (first) nozzle chamber.
- the nozzle opening of the further nozzle chamber is displaced in the longitudinal direction and arranged laterally offset.
- one or more nozzle modules according to the invention can be arranged in a cleaning container which is preferably completely or partly filled with a cleaning fluid be operated for picking up workpieces.
- at least one nozzle module according to the invention can be arranged such that a fluid jet emerging from a nozzle opening of the nozzle module strikes a workpiece which is positioned below a liquid level of the cleaning fluid in the cleaning container.
- the nozzle modules are operated in particular with a cleaning fluid (for example water) which is liquid under normal conditions, the cleaning fluid in particular containing certain cleaning additives (eg surfactants, bases or the like), a temperature preferably between 50 ° C and 120 ° C and is pressurized, preferably at a pressure between 2 bar and 200 bar, more preferably at a pressure between 5 bar and 20 bar.
- a cleaning fluid for example water
- certain cleaning additives eg surfactants, bases or the like
- Fig. 1 is a perspective view of a nozzle module
- FIG. 2 is a first side view of the nozzle module;
- FIG. a second side view of the nozzle module; 4 shows a section of the nozzle module along the line IV-IV in Fig. 2.
- FIG. 5 shows a partial section of the nozzle module along the line VV in FIG. 3 with a fluid flow
- FIG. 6 shows a section of the nozzle module along the line VI-VI in FIG. 2 with a fluid flow
- FIG. 7 shows a section of the nozzle module along the line VII-VII in FIG. 4;
- FIG. 8 shows a section of the nozzle module along the line VII l-VI II in Fig. 7. and FIG. 9 shows a cleaning device with a plurality of nozzle modules.
- FIGS. 1 to 8 show a nozzle module 2 for the flood washing of workpieces in a cleaning container.
- the nozzle module 2 has a module body 4.
- a first nozzle chamber 6 is formed in the module body 4.
- the nozzle chamber 6 extends between a bottom section 3 and a ceiling section 5 in a longitudinal direction corresponding to the axis 8.
- the nozzle chamber 10 is formed with a slit-shaped nozzle mouth 9, which extends along a gap axis 35.
- the nozzle chamber 6 has a gap-shaped nozzle opening 0.
- the width B of the opening gap of the nozzle opening 10 shown in FIG. 6 is defined by means of adjusting elements in the form of nozzle plates 12, 14, 16 and 18 which are fixed to the module body 4 with fastening screws 20, 22.
- the fastening screws 20, 22 have a thread 21, which engages in a thread 5, which is formed in the module body 4.
- On a thread 23 of the fastening screws 20, 22 a nut 25 is guided.
- the fastening screws 20, 22 pass through the nozzle plates 12, 14, 16 and 18 with through holes 24, 26 whose diameter is greater than the diameter of the fastening screws 20, 22.
- the nozzle plates 20, 22 corresponding to the double arrow 28, 30 on the module body 4 are moved perpendicular to the axes 32, 34 of the fastening screws. This makes it possible to adjust the width B of the opening gap of the nozzle opening 10 extending along the slot axis 33, by displacing the nozzle plates 2, 4, 16 and 8 on the module body 4.
- the module body 4 is connected to a connection pipe 36 for supplying pressurized fluid into the nozzle chamber 6.
- the fluid used may be any type of gaseous or liquid cleaning medium under standard conditions, in particular water, aqueous solutions of acids, bases, alcohols or the like, as well as gases enriched with surfactants or gases, as well as gaseous or liquid hydrocarbons pure or mixed form.
- a pressure to be provided according to the invention is preferably constant between 2 bar and 200 bar (absolute), the delivery pressure of the fluid also being able to be adjusted pulsating during operation, ie changing abruptly with a frequency between 0.5 Hz and 50 Hz, to achieve particularly good cleaning results.
- the connecting pipe 36 is connected to a support section 38.
- the connection pipe 36 defines a fluid channel 37, which is guided through the hollow shaft 38.
- the hollow shaft 38 extends through the nozzle chamber 6.
- the hollow shaft 38 has an open wall 40 with a plurality of openings 42 which are arranged in the wall 40 along the direction 44 of the shaft axis 46.
- the connecting tube 36 with the hollow shaft 38 acts as a device 39 for supplying fluid into the nozzle chamber 6.
- the connecting tube 36 and the hollow shaft 38 form a hollow body 35.
- the hollow body 35 extends through the nozzle chamber 6.
- the hollow body 35 carries the Module body 4.
- the module body 4 is mounted on both sides of the nozzle chamber 6 on the hollow body 35 in a first pivot bearing 48 and a second pivot bearing 50.
- the hollow body 35 carries the module body 4.
- the shaft axis 46 of the hollow shaft 38 is aligned with the axes of rotation of the pivot bearing 48, 50.
- the shaft axis 46 is an axis of rotation.
- the shaft axis 46 runs parallel to the slot axis 35 of the opening gap of the nozzle opening 10.
- the pivot bearing 48 and the pivot bearing 50 each includes a sealing ring 52, 54 made of an elastomeric plastic. With the sealing ring 52, 54, the pivot bearing 48, 50 is sealed.
- a fluid jet 56 emerging from the opening gap of the nozzle opening 10 can be produced with a line-shaped cross section.
- the fluid flow shown in FIGS. 5 and 6 is formed in the nozzle module 2.
- the fluid flows in the direction of the arrow 55 through the connecting tube 36 into the hollow shaft 38. There, it is guided with a arrows 57, 59 corresponding flow direction through the openings 41, 42 in the wall 40 of the hollow shaft 38 into the nozzle chamber 6. There, the fluid flows with a flow which is in a plane perpendicular to the longitudinal direction 8, to the gap-shaped nozzle opening 10th
- openings 41, 42 By the fluid is supplied through the plurality of openings 41, 42 in the wall 40 of the hollow shaft 38 of the nozzle chamber 6 between the bottom portion 43 and the ceiling portion 5, form in front of the slit-shaped nozzle opening 10 in the nozzle chamber 6 while flow conditions, between the Floor and ceiling portion 35 at the nozzle chamber 6 are approximately equal or at least similar.
- openings 41, 42 circular or oval bores are provided according to the invention, which are arranged at a uniform distance from each other. Preferably, the centers of all holes lie in a common plane. Alternatively, stadium-shaped or slot-shaped openings are provided. All edges of the openings 41, 42 are preferably provided with deburred and / or rounded edges, wherein edge radii of 0.5 mm and more are provided.
- the nozzle chamber 6 has a portion 7, whose cross-section perpendicular to the slot axis 35 has a trough or gutter shape.
- the trough or trough conveyor Mige section 7 opens into an opening slot 1 1, which is formed in the wall 1 of the module body 4 between the nozzle mast 10 and the nozzle chamber 6.
- the flowing from the openings 41, 42 in the wall 40 of the hollow body 35 in the nozzle chamber 6 fluid is at the Wandungsabismeen 15, 17 of the nozzle chamber 6, which are the openings 41, 42 opposite, with the arrows 19, 21 corresponding flow path in directed the section 7 of the nozzle chamber 6.
- the fluid were not passed through the openings 41, 42 in the wall 40 of the hollow shaft 38 but directly through the connecting pipe 36 into the nozzle chamber 6, the front of the opening slit 1 1 in the nozzle chamber 6 would result in a dynamic pressure resulting from the Floor section 3 to the ceiling portion 5 of the nozzle chamber 6 increases towards. Then, the flow velocity of the fluid jet 56 emerging from the nozzle opening 10 would be different along the gap axis 33.
- a further, second nozzle chamber 58 is formed, which is shown in Fig. 5.
- the additional nozzle chamber 58 has a nozzle opening 60.
- the nozzle opening 60 is also slit-shaped and extends along a gap axis 59.
- the nozzle opening 60 also generates a fluid jet 62 which has a linear cross-section.
- the direction 61 of the fluid jet 62 emerging from the nozzle opening 60 and the direction 55 of the fluid jet 56 from the nozzle opening 10 are skewed and perpendicular to one another.
- the nozzle opening 60 has a center 63.
- the center 63 is spaced in the center 65 of the nozzle opening 10 along the line A. With respect to the center 65 of the nozzle opening 10, the center 63 of the nozzle opening 60 is displaced in the longitudinal direction of the gap axis 33 of the nozzle opening 10 and offset laterally relative to the gap axis 33.
- two or more additional nozzle chambers may be provided, each having a slit-shaped nozzle opening for generating a slit-shaped fluid jet. These nozzle chambers are then connected to the nozzle chamber through which the hollow shaft extends. It is advantageous to arrange the nozzle openings of these nozzle chambers in such a way that they produce fluid jets with opposite flow components. This allows the simultaneous cleaning of opposite workpiece surfaces.
- the nozzle module 2 includes a drive 64.
- the drive 64 is designed as a pneumatic drive.
- the module body 4 can be moved with the slot-shaped nozzle opening 10 about the shaft axis 46 of the hollow shaft 38 between two or more pivotal positions.
- the module body if necessary, also with a frequency between 0.1 Hz and 10 Hz between predefined pivot positions moved back and forth. This may prove to be particularly advantageous if pressurization of the cleaning medium located in the nozzle chamber (also) is made pulsating.
- the module body is pivoted during an exchange of a workpiece to be cleaned from a predetermined cleaning position in a likewise predetermined rest position. That way it can be realized be immersed in the cleaning position in a workpiece-side recess the nozzle module.
- the device 100 has a cleaning container 102 into which a cleaning medium (liquid fluid) in the form of (possibly warmed to standard conditions) water is filled.
- a cleaning medium liquid fluid
- a plurality of nozzle modules 104, 106, 108 are arranged, which can be acted upon by a line system 0 via a pump 2 with further cleaning medium can.
- a device for cleaning workpieces may also be provided with a single nozzle module as described above.
- the device for cleaning workpieces has a heating and / or cooling module, by means of which the cleaning medium within the cleaning container 102 can be tempered (to a temperature raised or lowered in relation to standard conditions).
- a nozzle module alternative liquid or gaseous fluids such as compressed air or organic solvents (liquid or gaseous hydrocarbons) can be supplied.
- a plurality of nozzle modules in a cleaning container it is intended to supply at least two nozzle modules with different cleaning media. It is intended to use at least two different aqueous solutions with additives of different concentration and / or different chemical composition. More preferably, it is provided that as a first aqueous solution tempered water and as a second aqueous solution with surfactants or bases mixed water is used. Further alternatively, a combination of water as the first cleaning medium and (diluted with water) alcohol is provided as a second cleaning medium.
- a combination of a first cleaning medium (for example water) which is liquid under standard conditions is provided with a second cleaning medium (for example compressed air) which is gaseous under standard conditions.
- a first cleaning medium for example water
- a second cleaning medium for example compressed air
- liquid or gaseous cleaning media under standard conditions to which particulate solids have been added (plastic granules, glass beads, ceramic particles or the like). It goes without saying that even more types of liquid or gaseous cleaning media (fluids) can be supplied in any combination via different, optionally spaced from each other arranged nozzle modules according to the invention.
- a cleaning medium in particular water and / or alcohol which is liquid under standard conditions is used, on the one hand, and the same cleaning medium with an addition of inert solid particles, on the other hand.
- substantially the same cleaning medium is again held unmoved in a cleaning container in order to immerse workpieces therein.
- the further cleaning medium should flow under pressure, pulsed or continuously out of a nozzle module according to the invention.
- the cleaning medium above and / or below a liquid level of the cleaning medium located in the cleaning container 102 flows against a workpiece likewise located in the container 102 and dissolves particles and / or other contaminants therefrom.
- the further cleaning medium is sprayed onto the respective workpiece for realizing a flood-washing operation below the liquid level of the cleaning medium in the cleaning container, the workpiece also being positioned below the liquid level.
- the container 102 has a closable with a valve 1 16 outlet 1 14 for the discharge of fluid, with the detached from the workpiece impurities can be removed.
- a nozzle module 2 has a module body 4 which has at least one Nozzle chamber 6 has.
- the nozzle chamber 6 contains at least one nozzle opening 10 for generating at least one fluid jet 56.
- the nozzle module contains a device 39 for supplying pressurized fluid through a fluid channel 37 into the at least one nozzle chamber 6.
- the means 39 for feeding pressurized fluid is connected to the module body 4.
- the device 39 for supplying fluid into the at least one nozzle chamber 6 of the module body 4 has a hollow body 35.
- the hollow body 35 extends into the nozzle chamber 6.
- the hollow body 35 has at least one opening 41, 42 for the inflow of fluid into the nozzle chamber 6.
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
Abstract
L'invention concerne un module de buses (2) comportant un corps de module (4) présentant au moins une chambre de buses (6). La chambre de buses (6) comporte au moins une ouverture de buse (10) pour produire au moins un jet de fluide (56). Le module de buses comporte un dispositif (39) pour amener un fluide sous pression à travers un canal de fluide (37) dans la ou les chambres de buses (6). Le dispositif (39) pour amener le fluide sous pression est relié au corps de module (4). Selon l'invention, le dispositif (39) pour amener le fluide dans la ou les chambres de buses (6) du corps de module (4) comporte un corps creux (35). Le corps creux (35) s'étend dans la chambre de buses (6). Le corps creux (35) comporte au moins une ouverture (41, 42) pour l'entrée de fluide dans la chambre de buses (6).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011004232.6A DE102011004232B4 (de) | 2011-02-16 | 2011-02-16 | Düsenmodul und Reinigungsvorrichtung mit Düsenmodul |
| PCT/EP2012/050631 WO2012110271A2 (fr) | 2011-02-16 | 2012-01-17 | Module de buses et dispositif de lavage comportant un module de buse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2675577A2 true EP2675577A2 (fr) | 2013-12-25 |
Family
ID=45509491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP12700671.6A Withdrawn EP2675577A2 (fr) | 2011-02-16 | 2012-01-17 | Module de buses et dispositif de lavage comportant un module de buse |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9409212B2 (fr) |
| EP (1) | EP2675577A2 (fr) |
| CN (1) | CN103370146B (fr) |
| DE (1) | DE102011004232B4 (fr) |
| WO (1) | WO2012110271A2 (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015001534A1 (de) | 2015-02-06 | 2016-08-11 | Jürgen Burkhard | Sprühvorrichtung |
| KR20160106831A (ko) * | 2015-03-02 | 2016-09-13 | 주식회사 탑 엔지니어링 | 노즐 청소 장치 |
| DE102015215932A1 (de) * | 2015-08-20 | 2017-02-23 | Robert Bosch Gmbh | Düsensystem zum Reinigen einer Scheibe |
| CN106238373A (zh) * | 2015-11-03 | 2016-12-21 | 无锡市三立轴承有限公司 | 新型轴承快速清洗装置 |
| US10639653B1 (en) * | 2017-02-09 | 2020-05-05 | AirBTU, Inc. | Air outlet device |
| DE102019101930A1 (de) * | 2018-12-27 | 2020-07-02 | Gema Switzerland Gmbh | Pulverabgabevorrichtung mit einer Pulverdünnstrompumpe |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2409544A1 (de) * | 1973-03-01 | 1974-09-12 | Nippon Steel Corp | Vorrichtung zum verspruehen eines fliessfaehigen mediums |
| DE2855906A1 (de) | 1978-12-23 | 1980-07-10 | Lechler Gmbh & Co Kg | Spritzvorrichtung |
| FR2540082B1 (fr) | 1982-09-23 | 1987-02-06 | Vuillaume Andre | Appareil rinceur universel, notamment pour l'industrie papetiere, les convoyeurs a bande et analogues |
| US4515313A (en) * | 1982-12-27 | 1985-05-07 | Marshall And Williams Company | Air knife apparatus |
| US4508274A (en) * | 1983-11-15 | 1985-04-02 | Eichfeld Timothy J | Adjustable flow coolant nozzle |
| DE8703114U1 (de) | 1987-02-25 | 1987-04-09 | Schering AG, 1000 Berlin und 4709 Bergkamen | Einrichtung zur Reinigung oder chemischen Behandlung von Werkstücken |
| US5000795A (en) * | 1989-06-16 | 1991-03-19 | At&T Bell Laboratories | Semiconductor wafer cleaning method and apparatus |
| DE4331496C2 (de) | 1992-10-07 | 1998-03-19 | Monforts Gmbh & Co A | Ebenes Düsensystem |
| DE9320624U1 (de) | 1993-09-09 | 1994-10-27 | Dürr GmbH, 70435 Stuttgart | Einrichtung zum Reinigen eines Werkstücks mit einer wässrigen Reinigungsflüssigkeit |
| JP2912538B2 (ja) * | 1993-12-08 | 1999-06-28 | 大日本スクリーン製造株式会社 | 浸漬型基板処理装置 |
| US6199568B1 (en) | 1997-10-20 | 2001-03-13 | Dainippon Screen Mfg. Co., Ltd. | Treating tank, and substrate treating apparatus having the treating tank |
| DE102008019456B4 (de) | 2008-04-18 | 2019-09-26 | Ecoclean Gmbh | Reinigungsvorrichtung und Verfahren zur Reinigung eines Werkstücks |
| DE102008047266A1 (de) * | 2008-09-12 | 2010-04-15 | Nordson Corp., Westlake | Vorrichtung zum Auftragen von Fluiden |
-
2011
- 2011-02-16 DE DE102011004232.6A patent/DE102011004232B4/de active Active
-
2012
- 2012-01-17 WO PCT/EP2012/050631 patent/WO2012110271A2/fr not_active Ceased
- 2012-01-17 EP EP12700671.6A patent/EP2675577A2/fr not_active Withdrawn
- 2012-01-17 CN CN201280009332.5A patent/CN103370146B/zh active Active
-
2013
- 2013-08-13 US US13/965,744 patent/US9409212B2/en active Active
Non-Patent Citations (2)
| Title |
|---|
| None * |
| See also references of WO2012110271A2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102011004232A1 (de) | 2012-08-16 |
| US20130333732A1 (en) | 2013-12-19 |
| CN103370146B (zh) | 2016-07-27 |
| WO2012110271A3 (fr) | 2012-11-15 |
| DE102011004232B4 (de) | 2024-04-18 |
| CN103370146A (zh) | 2013-10-23 |
| WO2012110271A2 (fr) | 2012-08-23 |
| US9409212B2 (en) | 2016-08-09 |
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