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EP2191137A1 - Pompe a vide et procede de commande d'une alimentation en gaz de ballast d'une pompe a vide - Google Patents

Pompe a vide et procede de commande d'une alimentation en gaz de ballast d'une pompe a vide

Info

Publication number
EP2191137A1
EP2191137A1 EP08803546A EP08803546A EP2191137A1 EP 2191137 A1 EP2191137 A1 EP 2191137A1 EP 08803546 A EP08803546 A EP 08803546A EP 08803546 A EP08803546 A EP 08803546A EP 2191137 A1 EP2191137 A1 EP 2191137A1
Authority
EP
European Patent Office
Prior art keywords
pressure
vacuum pump
gas
chamber
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08803546A
Other languages
German (de)
English (en)
Other versions
EP2191137B1 (fr
Inventor
Jean-Luc Abraham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2191137A1 publication Critical patent/EP2191137A1/fr
Application granted granted Critical
Publication of EP2191137B1 publication Critical patent/EP2191137B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a vacuum pump, in particular a rotary vane pump or screw pump. Furthermore, the invention relates to a method for controlling a gas baliast feed to a vacuum pump, in particular a rotary vane pump or screw pump.
  • Such vacuum pumps have a compression chamber r in which a compression element is arranged.
  • the compression element has a plurality of slides, wherein by rotating the relative to the compression chamber eccentrically mounted slide compressing and conveying the gas present in the compression chamber, in particular the air takes place.
  • a screw pump has rotating screw elements, by means of which the gas and the air are conveyed or compressed.
  • the compression chamber has a chamber inlet which is connected to the space to be vacuumed.
  • the compression chamber has a chamber outlet, from which the conveyed gas, in particular the air is ejected.
  • the Gasbaliasteinlass is usually provided with a check valve, so that in the compression chamber gas is sucked as long as the pressure in the compression chamber is lower than atmospheric pressure overall.
  • Vacuum pumps are divided into different classes for the use of vacuum pumps that are exposed to the risk of fire in critical processes.
  • the classes are specified in the Artex standard. For example, vacuum pumps are classified in class T3 if it is ensured that the pump can not heat above 200 ° C. in all areas. For class T4 the limit is 135 ° C
  • a temperature increase occurs due to the compression sound.
  • the temperature increase can be done in a few seconds.
  • a temperature increase to about 170 0 C - 180 0 C arise within a few seconds.
  • the object of the invention is to provide a vacuum pump and a method for controlling a gas ballast supply to a vacuum pump, in which heating above a limit temperature, in particular beyond the limit temperature of the Artex standard T4 is avoided.
  • the object is achieved according to the invention by a vacuum pump according to claim 1 or a method according to claim 9.
  • the vacuum pump according to the invention which is in particular a rotary vane pump or a screw pump, has a compression chamber which has a chamber inlet and a chamber outlet. Further, the compression chamber for supplying gas ballast, such as air, nitrogen or dg !, is connected to a gas-building inlet. According to the gas ballast inlet with a According to the invention, the gas in the gas ballast space is kept under a pressure which is higher than the atmospheric pressure or higher than the pressure in the compression chamber. This ensures that in each operating state of the vacuum pump, gas flows through the gas ballast inlet into the compression chamber. Due to this gas supply, the heating of the vacuum pump can be reduced due to the compression of the gas in the compression chamber. According to the invention, this makes it possible to easily create a vacuum pump whose temperature does not exceed predetermined limit temperatures. It is particularly advantageous that it is thus possible to implement the Artex standard T4, so that corresponding vacuum pumps can also be used in temperature-critical devices or environments.
  • the vacuum pump has a control device. With the aid of the control device, it is possible to regulate the gas pressure in the gas ballast chamber.
  • the regulation preferably takes place as a function of the pressure at the chamber inlet of the compression chamber.
  • a pressure sensor which is preferably connected to the control device. Measuring the pressure within the compression chamber would be considerably more expensive. Since, starting from the pressure measured at the chamber inlet, the pressure conditions of the compression chamber are known, or can be determined in sufficient approximation, a corresponding regulation of the pressure in the gas ballast space can take place.
  • a pressure sensor is also arranged within the gas ballast space in a preferred embodiment, or connected to the gas ballast space.
  • the vacuum pump is connected to a flow regulator for controlling the volume of gas supplied via the gas bailaste inlet of the compression chamber or gas weight.
  • a corresponding quantity regulator is preferably arranged between the gas bubble compartment and the gas bailaste inlet.
  • a flow regulator for example, a relaxation nozzle can be provided. This is a simple mechanical quantity control, which, however, in order always to supply a constant Gasvoiumen, requires that a pressure ratio of the pressures before and after the expansion nozzle is maintained.
  • the flow regulator can therefore also have a flow measuring device, such as a mass flow sensor. This can then be connected to a controllable passage valve. Since usually at the Gasbaliastetnlass a check valve is provided to prevent the escape of lubricant from the compression chamber, it is possible in a preferred embodiment, the check valve in addition to design as a controllable valve to control the amount of gas supplied to the compression chamber.
  • the inventive method for controlling a Gasbaliastzuschreib to a vacuum pump is particularly suitable for the vacuum pump according to the invention described above. As described above with reference to the vacuum pump, the method according to the invention can be developed advantageously.
  • a regulation of a gas ballast pressure takes place.
  • additional flow regulators may be provided in the region of the gas bubble inlet.
  • the amount of gas ballast supplied, d. H. the supplied volume and / or the added weight can be determined, for example, via a flow-through measuring device.
  • a flow measuring device is preferably arranged in the region of the gas bailaste inlet.
  • control of the gas ballast pressure is such that the gas ballast pressure is higher than the measured inlet pressure.
  • a regulation of the Gasbaliastikis or Gasballastmenge for example by means of the control device described above, in a preferred embodiment from reaching, in particular exceeding a limit pressure of the Einiasstiks.
  • a control takes place from a limiting pressure of 500 mbar (500 Pa).
  • the figure shows a schematic sectional view of a schematic diagram of a rotary vane pump with gas ballast supply.
  • a rotary vane pump has a housing 10.
  • a shaft 12 is arranged eccentrically to the cylindrically shaped housing.
  • slide 16 are arranged in three slots 14 in the illustrated embodiment.
  • the sliders 16 are designed, for example, spring-loaded, that they always rest against an inner wall 18 of the compression chamber.
  • the compression chamber 20 is located " * D""
  • the housing has a chamber inlet 22, which is connected to a space to be vacuumed. Through the inlet 22, the air is sucked in the direction of an arrow 24 in the compression chamber 20.
  • a chamber outlet 26 is connected to the housing 10.
  • the compression chamber 20 is further provided with a GasbalSasteinlass 32.
  • a gasbalSasteinlass 32 In the illustrated embodiment, a gearschtagventi in the Gasbaüasteinlass 32! 34, through which leakage of medium from the compression chamber 20 through the gas ballast inlet 32 is avoided.
  • the gas ballast inlet 32 is connected to a gas ballast chamber 36.
  • Gas in the gas ballast chamber 36 for example, air, nitrogen or other suitable gas is arranged and pressurized.
  • the gas ballast space can be filled via a line 38 with gas.
  • gas flows against the closing direction of the check valve 34 through the gas ballast inlet 32 into the space 40.
  • a control device 42 is provided.
  • the control device 42 is connected in the illustrated embodiment via an electrical line 44 to a first pressure sensor 46.
  • the pressure sensor 46 is in the range of Kammereiniasses 22 arranged and rnisst the inlet pressure.
  • Via a further electrical line 48 the control device 42 is connected to a second pressure sensor 50.
  • the pressure sensor 50 measures the pressure prevailing in the gas ballast chamber 36.
  • the control device 42 is further connected to a device, not shown, for pressure control, which may be, for example, a piston connected.
  • control device 42 is connected to a flow measuring device 52 via an electrical line 54.
  • a flow measuring device 52 With the help of Naturalfiu ⁇ smess owned 52, the amount of gas, d. H. the weight or volume flowing into the chamber 40 from the gas ballast space is measured.
  • a flash nozzle 56 is disposed between the gas ballast space 36 and the gas ballast inlet 32.
  • an inlet pressure which is greater than 500 mbar is measured by means of the first pressure sensor 36
  • the pressure in the gas ballast space 36 is increased by corresponding signals from the control device 42.
  • This measure according to the invention ensures that a defined amount of gas ballast always flows through the inlet Gas building throat 32 flows into the chamber 40. This ensures that there is no critical temperature during the compression of the gas, in particular immediately before the compression outlet 26. It can thus be ensured, for example, that even in this temperature-critical region of the vacuum pump, a temperature of less than 135 ° C. always prevails and the vacuum pump thus fulfills the Artex standard T 4.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide, notamment une pompe à palettes ou à vis, comportant une chambre de compression (20) dotée d'une entrée (22) et d'une sortie (26) et reliée à une entrée de gaz de ballast (32). L'entrée de gaz de ballast (32) est reliée à un réservoir de gaz de ballast (36) pour que du gaz s'écoule en permanence à travers l'entrée de gaz de ballast (32) lorsque des différences de pression règnent à l'intérieur de la chambre de compression (20). Dans le réservoir de gaz de ballast (36), le gaz est soumis à une pression supérieure à la pression atmosphérique et/ou à la pression régnant dans la chambre de compression (20), ce qui permet d'éviter une surchauffe de la pompe à vide.
EP08803546.4A 2007-09-12 2008-09-02 Pompe a vide et procede de commande d'une alimentation en gaz de ballast d'une pompe a vide Not-in-force EP2191137B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710043350 DE102007043350B3 (de) 2007-09-12 2007-09-12 Vakuumpumpe sowie Verfahren zur Steuerung einer Gasballastzufuhr zu einer Vakuumpumpe
PCT/EP2008/061575 WO2009033986A1 (fr) 2007-09-12 2008-09-02 Pompe à vide et procédé de commande d'une alimentation en gaz de ballast d'une pompe à vide

Publications (2)

Publication Number Publication Date
EP2191137A1 true EP2191137A1 (fr) 2010-06-02
EP2191137B1 EP2191137B1 (fr) 2014-06-18

Family

ID=40228923

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08803546.4A Not-in-force EP2191137B1 (fr) 2007-09-12 2008-09-02 Pompe a vide et procede de commande d'une alimentation en gaz de ballast d'une pompe a vide

Country Status (3)

Country Link
EP (1) EP2191137B1 (fr)
DE (1) DE102007043350B3 (fr)
WO (1) WO2009033986A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011078816B3 (de) * 2011-07-07 2012-12-20 Ford Global Technologies, Llc Elektrisch angetriebene Vakuumpumpe eines Kraftfahrzeuges
DE102015007760A1 (de) 2014-06-21 2015-12-24 Hubert Bellm Einrichtung zum Einblasen eines Gases
GB2603209A (en) * 2021-01-07 2022-08-03 Leybold Tianjin Int Trade Co Ltd Rotary vane vacuum pump with gas ballast assembly
EP3916225B1 (fr) * 2021-09-29 2023-12-13 Pfeiffer Vacuum Technology AG Pompe à vide

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE702480C (de) * 1935-12-22 1941-02-08 Wolfgang Gaede Dr Ein- oder mehrstufige Vakuumpumpe zur Erzeugung tiefer Druecke zum Absaugen von Daempfen und Gas-Dampf-Gemischen
AT207989B (de) * 1958-05-03 1960-03-10 Micafil Ag Drehkolben- oder Drehschieber- Vakuumpumpe zum Absaugen von Gasen und Dämpfen mit Luftballasteinrichtung sowie Ölabdichtung
DE1123076B (de) 1959-04-18 1962-02-01 Leybolds Nachfolger E Rotierende mechanische Vakuumpumpe
GB1364854A (en) * 1971-08-23 1974-08-29 Cenco Inc Vacuum pump
US4268230A (en) * 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
GB8625337D0 (en) * 1986-10-22 1986-11-26 Utile Eng Co Ltd Pumps
DE4327583A1 (de) * 1993-08-17 1995-02-23 Leybold Ag Vakuumpumpe mit Ölabscheider
DE19962445A1 (de) 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10212940A1 (de) 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Exzenterpumpe und Verfahren zum Betrieb dieser Pumpe
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009033986A1 *

Also Published As

Publication number Publication date
EP2191137B1 (fr) 2014-06-18
DE102007043350B3 (de) 2009-05-28
WO2009033986A1 (fr) 2009-03-19

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