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EP3916225B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3916225B1
EP3916225B1 EP21199985.9A EP21199985A EP3916225B1 EP 3916225 B1 EP3916225 B1 EP 3916225B1 EP 21199985 A EP21199985 A EP 21199985A EP 3916225 B1 EP3916225 B1 EP 3916225B1
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum pump
ballast
gas
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP21199985.9A
Other languages
German (de)
English (en)
Other versions
EP3916225A3 (fr
EP3916225A2 (fr
Inventor
Jan Hofmann
Jonas Becker
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21199985.9A priority Critical patent/EP3916225B1/fr
Publication of EP3916225A2 publication Critical patent/EP3916225A2/fr
Publication of EP3916225A3 publication Critical patent/EP3916225A3/fr
Priority to JP2022134087A priority patent/JP7492999B2/ja
Application granted granted Critical
Publication of EP3916225B1 publication Critical patent/EP3916225B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/09—Flow through the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/04—Settings
    • F04B2207/043—Settings of time

Definitions

  • the present invention relates to a vacuum pump with a pump chamber and an inlet connected to the pump chamber and an outlet connected to the pump chamber.
  • a gas to be pumped can be pumped from the inlet to the outlet in the pump chamber, in particular by means of a pump body.
  • a chamber to be evacuated can be connected to the inlet.
  • the vacuum pump is designed to supply gas ballast into the pump chamber.
  • a vacuum pump according to the preamble of claim 1 is from DE 102 55 792 A1 known. Vacuum pumps that allow the supply of gas ballast are in the EP 2 071 186 A2 , the DE 702 480 C , EP 2 821 650 A1 and DE 10 2007 043 350 B3 disclosed.
  • a chamber connected to the inlet of the vacuum pump When operating vacuum pumps, a chamber connected to the inlet of the vacuum pump is usually evacuated.
  • the vacuum pump sucks in gas present in the chamber at the inlet and pumps this gas to be pumped through the outlet, whereby the chamber is evacuated.
  • the gas initially present in the chamber is further compressed within the vacuum pump as it approaches the outlet, so that any moisture contained in the gas to be pumped condenses and precipitates in the area of the outlet. It is undesirable for (condensed) water to remain in the pump room.
  • ballast gas or gas ballast removes the water from the pump room.
  • the problem with conventional methods can be that it is not guaranteed that there is actually no more moisture in the pump chamber of the vacuum pump.
  • the vacuum pump according to the invention comprises a control device which is designed to calculate a ballast pumping duration, which indicates how long gas ballast must be pumped in order to pump out water present or suspected in the pumping chamber, wherein the control device is further designed to supply the gas ballast for a supply duration effect, whereby the feeding time depends on the calculated ballast pumping time.
  • the invention is based on the knowledge that the ballast pumping duration can be calculated (or at least estimated using reasonable assumptions), so that a ballast pumping duration can be specified for the respective operating parameters or the respective operating state, which ensures that water present or suspected in the pumping room is within the ballast pumping time can be completely pumped out.
  • the calculation can also be based on assumptions so that an assumed amount of water can be calculated.
  • the calculated amount of water can preferably be chosen so that the calculated amount of water usually exceeds the amount of water actually present in the pumping room.
  • the ballast pumping duration calculated from the calculated amount of water can then be used to introduce gas ballast into the pumping room for the supply duration.
  • the calculations and/or determinations of quantities (e.g. the amount of water) described herein may also be estimates, as the calculations are based at least in part on assumptions and/or measurements (with inaccuracies).
  • the feeding time can in particular correspond to the ballast pumping time or can also differ from it, as will be explained later.
  • the vacuum pump is in operation during the supply period, conveys the supplied gas ballast towards the outlet and releases it through the outlet.
  • the gas ballast also called ballast gas or additional gas load
  • the gas ballast can be a different gas than the gas to be conveyed, for example the gas ballast can come from a different source (not from the chamber to be evacuated), have a different temperature and/or a different humidity, and the like.
  • An inert gas or, for example, air can be provided as gas ballast.
  • the gas ballast can in particular have a low relative humidity (of, for example, less than 40% or less than 30% or 20%).
  • the gas ballast can also be, for example, dry nitrogen. Gases with low humidity can easily absorb water present in the pump room and lead to the water being discharged from the pump room.
  • the control device can in particular be designed to automatically effect the supply of the gas ballast, as will be explained in more detail later.
  • the control device can also output a signal, which then instructs an operator to manually open a valve or the like.
  • the control device is designed to calculate the amount of water present in the pump room.
  • the amount of water can in principle include evaporated and/or condensed water. Accordingly, instead of the amount of water, one could also speak of the amount of moisture.
  • the amount of water present in the pump room is determined based on the volume of a chamber connected to the inlet.
  • the volume of the chamber is determined based on a previous pump-out time, the pumping speed of the pump and/or a pressure difference over the pump-out time.
  • the amount of water present in the pump room can be determined based on the volume of the chamber, assuming that all water from the volume of the chamber remains in the pump room.
  • the volume of the chamber can, for example, be a maximum volume of a chamber to be connected specified by the manufacturer. This maximum volume can also be used if a smaller chamber is connected if necessary.
  • the volume of the chamber can, for example, be permanently stored in the control device. This ensures that the amount of water in the pump room is not too low.
  • the control unit can record the previous pump-out time.
  • the pumping speed of the pump (unit m 3 /h) is inherent to the pump and can therefore also be stored in the control unit.
  • the pumping speed of the pump can also be determined by measuring the power consumed by the vacuum pump. In this way, chambers of different sizes can be recognized and different pump-out times can be taken into account. If a larger chamber volume is calculated than the chamber volume stored in the control unit, the larger chamber volume can be used.
  • the gas to be pumped in the connected chamber has the maximum permitted temperature for the vacuum pump and/or the maximum permitted humidity for the vacuum pump. It is also preferably assumed that all moisture in the gas to be pumped or in the (already) pumped gas remains as water in the pump room.
  • the maximum temperature and the maximum (relative) humidity of the gas in the chamber are also fixed for a respective vacuum pump and are therefore known. In order to ensure that the water is completely pumped out of the pump chamber, it can be assumed that the gas in the chamber actually has the maximum humidity and temperature permitted for the vacuum pump.
  • the maximum temperature may be 40°C and the maximum relative humidity may be 80% for the gas to be conveyed.
  • air can absorb a maximum of 50 g/m 3 of water. If it is now assumed that the chamber has a volume of 200 liters, these 200 liters contain 8 g of water. The amount of water in the pump room after evacuating such a chamber is therefore assumed to be 8 g.
  • the control device is designed to calculate the ballast pumping duration from the water vapor capacity of the vacuum pump and the amount of water in the pump chamber.
  • the water vapor capacity is the largest amount of water that a vacuum pump can continuously suck in and pump in the form of water vapor per unit of time under ambient conditions of 20°C and 1,013 hPa.
  • the water vapor capacity can be specified, for example, in g/h.
  • the water vapor capacity is a quantity for a water vapor mass flow.
  • the water vapor capacity indicates the highest water vapor pressure at which a vacuum pump can continuously suck in and pump pure water vapor under normal ambient conditions (20°C, 1,013 hPa).
  • q pV,Ballast is the gas ballast flow
  • S is the pumping speed of the vacuum pump
  • p s is the saturation vapor pressure of the water vapor at the exhaust gas temperature (ie at the outlet)
  • p A is the partial pressure of the water vapor when the gas ballast is supplied
  • p 0 is the atmospheric pressure of the environment
  • ⁇ is a dimensionless one Correction factor that takes into account the fact that a pressure greater than atmospheric pressure is required to open an exhaust valve, if present.
  • ⁇ can take a value of 1.1.
  • the water vapor compatibility has the dimension of a pressure and is usually given in hPa. If the above-mentioned pressures p are not measured, maximum values can be assumed that are just permissible for the vacuum pump and that lead to a maximum amount of water or ballast pumping time or to a low water vapor compatibility.
  • the water vapor capacity increases as the partial pressure of the water vapor in the gas ballast decreases and also increases at a higher temperature at the outlet, since the saturation vapor pressure of the water vapor then increases at the exhaust gas temperature.
  • control device can be designed to determine the water vapor capacity of the vacuum pump based on the moisture of the gas ballast and/or based on the partial pressure of the water vapor in the gas ballast and/or based on the temperature at the outlet. For a low humidity or a low partial pressure of the water vapor in the gas ballast or a high temperature at the outlet, a higher water vapor capacity can be determined accordingly.
  • the humidity of the gas ballast, the partial pressure of the water vapor in the gas ballast and/or the temperature at the outlet can each be determined by measurement or by specifying set values.
  • the supply time corresponds to between 70% and 110%, preferably between 80% and 100%, particularly preferably between 90% and 100% of the ballast pumping time.
  • the supply duration is in particular the period in which gas ballast is actually supplied and pumped through the outlet by the vacuum pump in order to discharge the amount of water from the pump room.
  • the feeding time can correspond exactly to the calculated ballast pumping time. However, it is also possible for the feeding time to be chosen to be longer or shorter than the ballast pumping time. Using the worst-case assumptions, it can be assumed, for example, that all water can be removed from the pump room during the supply period, even if the time is shortened to 70%.
  • a gas ballast valve of the vacuum pump can be open during the supply period. While the gas ballast valve is open, the gas to be evacuated can Chamber must be separated in particular in order to avoid a subsequent increase in pressure in the chamber.
  • control device is designed to cause the opening of a gas ballast valve and thus the supply of the gas ballast, the gas ballast valve preferably being opened when the pressure falls below a predetermined pressure at the inlet.
  • the gas ballast valve can therefore be opened automatically by the control unit.
  • the control unit can also instruct an operator to open the gas ballast valve using a signal.
  • the gas ballast valve can in particular be opened or the supply period can begin when the chamber has been sufficiently evacuated and the pressure at the inlet falls below 10 mbar or 1 mbar, for example.
  • the gas ballast is ambient air, with the ambient air having the maximum temperature and/or humidity permitted for the (environment of the) vacuum pump (e.g. 40° C and 30% relative humidity).
  • control device is designed to close the inlet while supplying the gas ballast or to fundamentally separate the chamber from the pump space.
  • closing the inlet while supplying the gas ballast only a small change in the minimum pressure in the chamber can be achieved.
  • Such operation can also be referred to as clocked operation.
  • the inlet can be open while simultaneously supplying gas ballast (gas ballast valve open).
  • gas ballast gas ballast valve open
  • it can then be continuously calculated how much new moisture was introduced from the chamber into the pump room and what amount of water was pumped out.
  • the calculated one Ballast pumping time can then be extended during operation, so that the delivery time can also be extended.
  • a channel for supplying the gas ballast opens into the pump chamber, the channel preferably opening between the inlet and the outlet in the pump chamber and in particular being arranged closer to the outlet than to the inlet.
  • the channel is therefore a separate access to the pump room for the inlet and outlet.
  • the channel can be located closer to the outlet because the moisture precipitates or condenses there due to the higher pressure.
  • the vacuum pump is a scroll pump.
  • the vacuum pump can have two parallel chambers that compress the gas to be pumped towards the interior or towards the outlet of the vacuum pump.
  • the vacuum pump can have two interlocking spirals, which compress and convey the gas to be pumped and also the supplied gas ballast in the direction of the outlet by moving in opposite directions.
  • the pump body can accordingly comprise one or more of the spirals.
  • a gas ballast bore connected to the gas ballast valve can be positioned so that at least one of the two parallel chambers or both chambers can be supplied with the gas ballast at a time.
  • the vacuum pump can also be a rotary vane vacuum pump, preferably an oil-lubricated rotary vane vacuum pump.
  • the pump body can be formed by a rotor shaft and at least one rotary valve.
  • the vacuum pump can be designed in one or more stages, for example in two stages.
  • a further subject of the invention is a method for operating a vacuum pump according to claim 10.
  • the invention also relates to a vacuum pumping system with a vacuum pump as described herein, the vacuum pumping system comprising a chamber to be evacuated, which is coupled to the inlet of the vacuum pump.
  • Fig. 1 shows a vacuum pump 10, which is designed as a scroll pump.
  • a pump chamber 12 is arranged in the vacuum pump 10, in which a gas to be pumped is pumped or conveyed from an inlet 16 to an outlet 18 by means of a spiral-shaped pump body 14 (not explicitly shown).
  • a chamber 20 to be evacuated is connected to the inlet 16, in which in the present example there are 200 liters of air at 40 ° C and 80% humidity.
  • a pressure sensor 22 is arranged, which determines the pressure of the air flowing in from the chamber 20 via the inlet 16.
  • the pressure sensor 22 is coupled to a control device 24 of the vacuum pump 10 and transmits its measurement results to the control device 24.
  • the control device 24 also receives measurement results from a temperature sensor 26, which is arranged at the outlet 18.
  • a gas ballast valve 28 is also arranged on the vacuum pump 10, which can introduce ambient air 30 between the inlet 16 and the outlet 18 into the pump chamber 12.
  • the control device 24 is coupled to the gas ballast valve 28 in order to be able to open the gas ballast valve 28.
  • control device 24 is connected to a power measurement 32, the power measurement 32 recording the power currently required by the vacuum pump 10, so that the control device 24 can draw conclusions about the respective pumping speed and the pumping time/pump-out time of the vacuum pump 10.
  • step 100 the pump-out time begins.
  • the initial pressure at the inlet 16 or in the chamber 20 is first determined via the pressure sensor 22 and the vacuum pump 10 begins pumping the gas to be pumped out of the chamber 20.
  • the chamber 20 is further evacuated, with the gas ballast valve 28 is closed.
  • the pumping out time ends with step 120.
  • the pressure then present at the inlet is measured via the pressure sensor 22 determined.
  • the temperature of the pump at the outlet 18 can be measured via the temperature sensor 26. Based on the performance measurement 32, the control unit 24 can also determine at what suction speed the vacuum pump 10 was operated and for how long. In this way, the control device 24 can determine the volume of the chamber 20 connected to the inlet 16 or the volume pumped out. The pressure difference between steps 100 and 120 is also used for this determination.
  • control device 24 calculates in step 130 the amount of water potentially present (in particular suspected) in the pump chamber 12.
  • the ballast pumping duration is then calculated from the amount of water in step 140 using the water vapor capacity of the vacuum pump. If the water vapor capacity of the vacuum pump 10 is, for example, 44.7 g/h and the amount of water was calculated as 8 g, the ballast pumping time is 11 minutes.
  • step 150 the control device 24 then opens the gas ballast valve 28 and closes the inlet 16.
  • gas ballast in this Example ambient air
  • the duration of the pumping of gas ballast i.e. the supply time, can be selected according to the ballast pumping time of 11 minutes, so that the pumping of gas ballast is stopped after 11 minutes. At this point it can be assumed that all water or moisture has been removed from the pump room 12. You can then start again at step 100.
  • worst-case assumptions ensure that practically all water is removed from the pump room during the supply period of the gas ballast.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (11)

  1. Pompe à vide (10) présentant un espace de pompage (12), une entrée (16) reliée à l'espace de pompage (12), et une sortie (18) reliée à l'espace de pompage (12), un gaz à refouler pouvant être refoulé dans l'espace de pompage (12) de l'entrée (16) à la sortie (18), une chambre (20) à évacuer pouvant être raccordée à l'entrée (16),
    la pompe à vide (10) étant conçue pour amener un ballast de gaz jusque dans l'espace de pompage (12),
    caractérisée en ce que
    la pompe à vide (10) comprend un appareil de commande (24) qui est conçu pour calculer une durée de pompage de ballast indiquant combien de temps le ballast de gaz doit être pompé pour évacuer l'eau présente ou supposée être présente dans l'espace de pompage (12), l'appareil de commande (24) étant en outre conçu pour provoquer une amenée du ballast de gaz pendant une durée d'amenée, la durée d'amenée dépendant de la durée calculée de pompage du ballast,
    l'appareil de commande (24) étant conçu pour calculer la quantité d'eau présente dans l'espace de pompage (12),
    la quantité d'eau présente dans l'espace de pompage (12) étant déterminée en se basant sur le volume d'une chambre (20) raccordée à l'entrée (16), et le volume de la chambre (20) étant déterminé de préférence à l'aide d'un temps de pompage précédent, de la capacité d'aspiration de la pompe et/ou d'une différence de pression sur le temps de pompage.
  2. Pompe à vide (10) selon la revendication 1,
    dans laquelle, pour déterminer la quantité d'eau présente dans l'espace de pompage (12), on suppose que le gaz à refouler dans la chambre (20) raccordée présente la température maximale admissible pour la pompe à vide (10) et/ou l'humidité maximale admissible pour la pompe à vide (10), de préférence, on suppose également que toute l'humidité du gaz à refouler ou du gaz refoulé reste sous forme d'eau dans l'espace de pompage (12).
  3. Pompe à vide (10) selon l'une des revendications 1 à 2,
    dans laquelle l'appareil de commande (24) est conçu pour calculer la durée de pompage de ballast à partir de la capacité de vapeur d'eau de la pompe à vide (10) et de la quantité d'eau.
  4. Pompe à vide (10) selon la revendication 3,
    dans laquelle l'appareil de commande (24) est conçu pour définir la capacité de vapeur d'eau de la pompe à vide (10) en se basant sur l'humidité du ballast de gaz et/ou en se basant sur la pression partielle de la vapeur d'eau dans le ballast de gaz et/ou en se basant sur la température à la sortie (18).
  5. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle la durée d'amenée est comprise entre 70 % et 110 %, de préférence entre 80 % et 100 %, de manière particulièrement préférée entre 90 % et 100 % de la durée de pompage de ballast.
  6. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle l'appareil de commande (24) est conçu pour provoquer l'ouverture d'une vanne de ballast de gaz (28) et ainsi l'amenée du ballast de gaz, la vanne de ballast de gaz (28) étant ouverte de préférence dès que la pression à l'entrée (16) est inférieure à une pression prédéterminée.
  7. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle l'appareil de commande (24) est conçu pour fermer l'entrée (16) et/ou séparer la chambre (20) de l'espace de pompage (12) pendant l'amenée du ballast de gaz.
  8. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle un canal d'amenée du ballast de gaz débouche dans l'espace de pompage (12), le canal débouchant dans l'espace de pompage (12) de préférence entre l'entrée (16) et la sortie (18) et étant en particulier disposé plus près de la sortie (18) que de l'entrée (16).
  9. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle la pompe à vide (10) est une pompe à spirale.
  10. Procédé de fonctionnement d'une pompe à vide (10) présentant un espace de pompage (12), dans lequel
    on calcule une durée de pompage de ballast indiquant combien de temps le ballast de gaz doit être pompé pour évacuer l'eau présente ou supposée être présente dans l'espace de pompage (12), et on provoque une amenée du ballast de gaz pendant une durée d'amenée, la durée d'amenée dépendant de la durée calculée de pompage du ballast,
    on calcule la quantité d'eau présente dans l'espace de pompage (12),
    on détermine la quantité d'eau présente dans l'espace de pompage (12) en se basant sur le volume d'une chambre (20) raccordée à l'entrée (16), et on détermine le volume de la chambre (20) à l'aide d'un temps de pompage précédent, de la capacité d'aspiration de la pompe et/ou d'une différence de pression sur le temps de pompage.
  11. Système de pompage à vide comprenant une pompe à vide (10) selon l'une des revendications 1 à 9, le système de pompage à vide présentant une chambre (20) à évacuer couplée à l'entrée (16) de la pompe à vide (10).
EP21199985.9A 2021-09-29 2021-09-29 Pompe à vide Active EP3916225B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP21199985.9A EP3916225B1 (fr) 2021-09-29 2021-09-29 Pompe à vide
JP2022134087A JP7492999B2 (ja) 2021-09-29 2022-08-25 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21199985.9A EP3916225B1 (fr) 2021-09-29 2021-09-29 Pompe à vide

Publications (3)

Publication Number Publication Date
EP3916225A2 EP3916225A2 (fr) 2021-12-01
EP3916225A3 EP3916225A3 (fr) 2022-03-09
EP3916225B1 true EP3916225B1 (fr) 2023-12-13

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EP21199985.9A Active EP3916225B1 (fr) 2021-09-29 2021-09-29 Pompe à vide

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JP (1) JP7492999B2 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102598332B1 (ko) * 2023-07-31 2023-11-03 한국표준과학연구원 진공펌프의 수증기 배기 성능평가 시스템 및 방법
JP7777167B2 (ja) * 2024-03-28 2025-11-27 本田技研工業株式会社 二酸化炭素回収装置

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Publication number Priority date Publication date Assignee Title
DE702480C (de) * 1935-12-22 1941-02-08 Wolfgang Gaede Dr Ein- oder mehrstufige Vakuumpumpe zur Erzeugung tiefer Druecke zum Absaugen von Daempfen und Gas-Dampf-Gemischen
JP3858667B2 (ja) * 2001-10-29 2006-12-20 日立工機株式会社 スクロール形真空ポンプ
DE10255792C5 (de) * 2002-11-28 2008-12-18 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem
DE102007043350B3 (de) * 2007-09-12 2009-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zur Steuerung einer Gasballastzufuhr zu einer Vakuumpumpe
DE102007059938A1 (de) * 2007-12-12 2009-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb
JP2014238020A (ja) * 2013-06-06 2014-12-18 エドワーズ株式会社 真空ポンプ
DE102013213257B4 (de) * 2013-07-05 2024-09-19 Pfeiffer Vacuum Gmbh Membranvakuumpumpe mit Gasballastventil und Pumpenanordnung

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JP2023050104A (ja) 2023-04-10
JP7492999B2 (ja) 2024-05-30
EP3916225A3 (fr) 2022-03-09
EP3916225A2 (fr) 2021-12-01

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