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EP1946623B1 - Dispositif pour amorcer et produire un plasma a micro-ondes diffus qui s'etend, et dispositif pour traiter des surfaces et des matieres au moyen de ce plasma - Google Patents

Dispositif pour amorcer et produire un plasma a micro-ondes diffus qui s'etend, et dispositif pour traiter des surfaces et des matieres au moyen de ce plasma Download PDF

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Publication number
EP1946623B1
EP1946623B1 EP06793298.8A EP06793298A EP1946623B1 EP 1946623 B1 EP1946623 B1 EP 1946623B1 EP 06793298 A EP06793298 A EP 06793298A EP 1946623 B1 EP1946623 B1 EP 1946623B1
Authority
EP
European Patent Office
Prior art keywords
plasma
wave
inner conductor
microwave
resonant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06793298.8A
Other languages
German (de)
English (en)
Other versions
EP1946623A2 (fr
Inventor
Udo Krohmann
Torsten Neumann
Jörg EHLBECK
Kristian Rackow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INP Institut fur Niedertemperatur-Plasmaphysik eV
Original Assignee
INP Institut fur Niedertemperatur-Plasmaphysik eV
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Filing date
Publication date
Priority claimed from DE200510043278 external-priority patent/DE102005043278B4/de
Application filed by INP Institut fur Niedertemperatur-Plasmaphysik eV filed Critical INP Institut fur Niedertemperatur-Plasmaphysik eV
Publication of EP1946623A2 publication Critical patent/EP1946623A2/fr
Application granted granted Critical
Publication of EP1946623B1 publication Critical patent/EP1946623B1/fr
Not-in-force legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Definitions

  • the present invention relates to a device for igniting and generating a propagating, diffuse microwave plasma.
  • the device is suitable for generating microwave plasmas for the purpose of plasma treatment of surfaces and substances, in particular of three-dimensional objects, as well as of particles under atmospheric pressure.
  • Plasmajets of various designs ( DE19605518 . EP0968524 . US5798146 ) generally require a high gas flow to drive out the plasma, usually a special working gas and are problematic in the ignition behavior. In addition, they only generate a small plasma volume with a small diameter. As a result, they are not suitable for mass applications and too expensive to manufacture and operate.
  • US-A-6 0430608 describes a plasma treatment apparatus in which the plasma is RF-powered by using a multi-element antenna symmetrically disposed on an antenna holder, two antennas forming a resonant circuit with each other.
  • the antenna assembly is electrically connected to the RF source via a coaxial line.
  • the antenna structure is separated from the process chamber and the substrate by a dielectric barrier.
  • the substrate is in a vacuum chamber at a lower pressure. The entire power is transmitted to the plasma via the antenna arrangement.
  • a plasma treatment under atmospheric pressure is not possible.
  • the plasma can be influenced in its properties (eg temperature, expansion) by pulsation and modulation of the energy supply.
  • the wave-limiting hollow structure 1 is designed in this case as a tube with an open end 9.
  • the diameter of the tube is selected according to the frequency used (2.45 GHz) so that wave propagation is not possible ( ⁇ / 2 - small lambda / 2).
  • a surface 13 to be treated is now placed in the effective area of the plasma 2 such that a desired treatment effect, e.g. an activation of the surface 13 is achieved.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)

Claims (6)

  1. Dispositif pour allumer et générer un plasma à micro-ondes diffus qui se propage, composé d'un câble coaxial qui est formé par une structure d'allumage (3) résonante dans la prolongation d'un conducteur interne (14) et d'une structure creuse (1) de délimitation des ondes faisant office de conducteur externe, d'un générateur de micro-ondes (4) et d'une injection de micro-ondes (5), laquelle s'effectue dans le câble coaxial formé par le conducteur interne (14) ayant la structure d'allumage résonante (3) et la structure creuse (1) de délimitation des ondes, caractérisé en ce
    a) que la structure creuse (1) de délimitation des ondes est réalisée de forme tubulaire et ouverte à une extrémité (9) afin de parvenir à une sortie du plasma hors de la structure creuse de délimitation des ondes, le diamètre du tube étant < λ/2 (lambda/2) de la fréquence utilisée du générateur de micro-ondes,
    b) que l'extrémité (9) ouverte est prolongée au-delà de l'extrémité du conducteur interne (14) réalisé en tant que structure d'allumage (3) résonante, et
    c) que la structure d'allumage (3) résonante elle-même est réalisée sous la forme d'une structure coaxiale ayant une extrémité (7a) ouverte et une longueur de surface résonante égale à λ/2, le conducteur interne (3b) de la structure d'allumage (3) résonante et le conducteur externe (3a) de la structure d'allumage (3) résonante de la structure coaxiale ayant, avec λ/4, des longueurs approximativement égales.
  2. Dispositif pour allumer et générer un plasma à micro-ondes diffus qui se propage, composé d'un conducteur interne (14) et d'une structure creuse (1) de délimitation des ondes faisant office de conducteur externe, d'un générateur de micro-ondes (4) et d'une injection de micro-ondes (5), laquelle s'effectue dans le câble coaxial formé par le conducteur interne (14) et la structure creuse (1) de délimitation des ondes, caractérisé en ce
    a) qu'une structure d'allumage (3) résonante est disposée dans la structure creuse (1) de délimitation des ondes et se compose d'un conducteur interne (3b) et d'un conducteur externe (3a) de la structure d'allumage (3) résonante, le conducteur interne (14) et le conducteur interne (3b) de la structure d'allumage (3) résonante formant le câble coaxial,
    b) que la structure creuse (1) de délimitation des ondes est réalisée sous forme tubulaire et ouverte à une extrémité (9) afin de parvenir à une sortie du plasma hors de la structure creuse de délimitation des ondes, le diamètre du tube étant < λ/2 (lambda/2) de la fréquence utilisée du générateur de micro-ondes,
    c) que l'extrémité (9) ouverte est prolongée au-delà de l'extrémité du conducteur interne (14) et au-delà de l'extrémité du conducteur interne (3b) de la structure d'allumage (3) résonante, et
    d) que le conducteur interne (3b) de la structure d'allumage résonante et le conducteur externe (3a), dont la longueur électriquement efficace est déterminée par la longueur du conducteur interne (3b) de la structure d'allumage résonante, de la structure d'allumage (3) résonante forment la structure coaxiale avec une extrémité (7a) ouverte et une longueur de surface résonante égale à λ/2.
  3. Dispositif selon la revendication 1 ou 2, caractérisé en ce que l'injection de micro-ondes (5) s'effectue par le biais d'un câble à micro-ondes souple (8).
  4. Dispositif selon la revendication 1 ou 2, caractérisé en ce que des récipients pour des substances (10) munis d'un dispositif d'acheminement (12) sont disposés directement sur la structure creuse (1) de délimitation des ondes.
  5. Dispositif selon la revendication 1 ou 2, caractérisé en ce que des récipients pour des substances (10) munis de dispositifs d'acheminement (12) sont reliés avec la structure creuse (1) de délimitation des ondes par le biais d'un câble souple (8, 11).
  6. Dispositif selon l'une des revendications 1 à 4, caractérisé en ce que l'injection de micro-ondes (5) s'effectue de manière modulée et impulsionnelle.
EP06793298.8A 2005-09-09 2006-09-07 Dispositif pour amorcer et produire un plasma a micro-ondes diffus qui s'etend, et dispositif pour traiter des surfaces et des matieres au moyen de ce plasma Not-in-force EP1946623B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200510043278 DE102005043278B4 (de) 2005-09-09 2005-09-09 Verfahren und Vorrichtung zum Erzeugen eines sich ausdehnenden, diffusen Mikrowellenplasmas
DE102005045825 2005-09-24
PCT/EP2006/066100 WO2007028813A2 (fr) 2005-09-09 2006-09-07 Procede et dispositif pour amorcer et produire un plasma a micro-ondes diffus qui s'etend, et procede et dispositif pour traiter des surfaces et des matieres au moyen de ce plasma

Publications (2)

Publication Number Publication Date
EP1946623A2 EP1946623A2 (fr) 2008-07-23
EP1946623B1 true EP1946623B1 (fr) 2014-06-11

Family

ID=37428863

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06793298.8A Not-in-force EP1946623B1 (fr) 2005-09-09 2006-09-07 Dispositif pour amorcer et produire un plasma a micro-ondes diffus qui s'etend, et dispositif pour traiter des surfaces et des matieres au moyen de ce plasma

Country Status (3)

Country Link
US (1) US8232728B2 (fr)
EP (1) EP1946623B1 (fr)
WO (1) WO2007028813A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008036766B4 (de) * 2008-08-07 2013-08-01 Alexander Gschwandtner Vorrichtung und Verfahren zum Erzeugen dielektrischer Schichten im Mikrowellenplasma
DE102008045187A1 (de) * 2008-08-30 2010-03-04 Krones Ag Elektronenstrahlsterilisation für Behältnisse
DE102012004034A1 (de) * 2012-03-02 2013-09-05 Johannes Gartzen HF-Plasma-Zündkopf, -Strahlerkopf und -Strahler insbesondere zum Zünden und Betreiben eines Plasmas im MHz- und GHz-Bereich
US9736920B2 (en) 2015-02-06 2017-08-15 Mks Instruments, Inc. Apparatus and method for plasma ignition with a self-resonating device
WO2016205729A1 (fr) * 2015-06-19 2016-12-22 Applied Materials, Inc. Traitement de surface dans la fabrication par couches avec un laser et un flux de gaz
EP3536348B1 (fr) * 2018-03-07 2025-10-29 Leibniz-Institut für Plasmaforschung und Technologie e.V. Procédé de décontamination biologique, de désinfection ou de stérilisation des produits à traiter au moyen d'un gaz réactif

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583250B1 (fr) * 1985-06-07 1989-06-30 France Etat Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique
JPH03110798A (ja) 1989-09-25 1991-05-10 Ryohei Itaya マイクロ波プラズマ発生装置
DE4235914A1 (de) * 1992-10-23 1994-04-28 Juergen Prof Dr Engemann Vorrichtung zur Erzeugung von Mikrowellenplasmen
JP2972477B2 (ja) * 1993-01-27 1999-11-08 日本電気株式会社 Ｒｆ・ｅｃｒプラズマエッチング装置
US5798146A (en) * 1995-09-14 1998-08-25 Tri-Star Technologies Surface charging to improve wettability
DE19605518C2 (de) 1996-02-15 2000-01-27 Dornier Gmbh Vorrichtung zur Herstellung von Hochdruck/Hochtemperatur-Plasmajets
JPH10134996A (ja) * 1996-10-31 1998-05-22 Nec Corp プラズマ処理装置
US5767627A (en) * 1997-01-09 1998-06-16 Trusi Technologies, Llc Plasma generation and plasma processing of materials
US5961772A (en) * 1997-01-23 1999-10-05 The Regents Of The University Of California Atmospheric-pressure plasma jet
DE19726663A1 (de) 1997-06-23 1999-01-28 Sung Spitzl Hildegard Dr Ing Vorrichtung zur Erzeugung von homogenen Mikrowellenplasmen
DE19802971C2 (de) * 1998-01-27 1999-12-02 Fraunhofer Ges Forschung Plasmareaktor
US6841201B2 (en) * 2001-12-21 2005-01-11 The Procter & Gamble Company Apparatus and method for treating a workpiece using plasma generated from microwave radiation
WO2003096766A1 (fr) * 2002-05-08 2003-11-20 Dana Corporation Regulation de plasma reposant sur l'utilisation de la phase et / ou de la frequence de sources de rayonnement multiples

Also Published As

Publication number Publication date
EP1946623A2 (fr) 2008-07-23
US20100001647A1 (en) 2010-01-07
US8232728B2 (en) 2012-07-31
WO2007028813A3 (fr) 2007-11-22
WO2007028813A2 (fr) 2007-03-15

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