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EP1017944B1 - Pompe compound - Google Patents

Pompe compound Download PDF

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Publication number
EP1017944B1
EP1017944B1 EP98954252A EP98954252A EP1017944B1 EP 1017944 B1 EP1017944 B1 EP 1017944B1 EP 98954252 A EP98954252 A EP 98954252A EP 98954252 A EP98954252 A EP 98954252A EP 1017944 B1 EP1017944 B1 EP 1017944B1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
vacuum pump
friction vacuum
webs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98954252A
Other languages
German (de)
English (en)
Other versions
EP1017944A1 (fr
Inventor
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1017944A1 publication Critical patent/EP1017944A1/fr
Application granted granted Critical
Publication of EP1017944B1 publication Critical patent/EP1017944B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with at least one turbomolecular pump stage, one adjoining the pressure pump stage on the pressure side and one between the turbomolecular pump stage and the filling pump stage.
  • turbomolecular pumps with downstream thread stages also called compound pumps
  • Delivery space delivery gap
  • thread is located.
  • Known Designs of this transition area have the Disadvantage that flow stalls occur. These affect to a considerable extent the pumping speed of the Pump.
  • the present invention is based on the object to significantly simplify the design of the filling level, without an effective loading of the thread pump stage to have to do without.
  • the filling stage is designed as a centrifugal stage. ingredients the centrifugal stage are rotating bars, which is at the level of the suction-side area of the thread pump stage are located.
  • the centrifugal pump has the effect that exiting from the turbomolecular pump stage Gases redirected, compressed and the delivery room be fed to the thread pump. The gas flow is largely continuously, so that it is no longer one of the disruptive stalls.
  • stator of the turbomolecular pump in a manner known per se from spacer rings and bucket half rings there is the possibility that Stator of both pump stages without dismantling the rotor to assemble or disassemble the turbomolecular pump stage.
  • FIG. 1 In the embodiment of Figure 1 are the pump itself with 1, its inlet with 2 and its outlet with 3.
  • the housing of the pump 1 comprises the two sections 4 and 5.
  • the housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage.
  • the stator 6 comprises the only schematically indicated bucket half rings 8 and the spacer rings 9, which together a form a self-centering stator package.
  • the rotor 7 is equipped with the rotor blades 10.
  • the housing section 4 also surrounds the stator 11 and the rotor 12 of the thread pump stage, the delivery chamber or conveyor gap is designated 13.
  • the thread 14 of this stage can be arranged on the stator or rotor side his. In the illustrated embodiment is it arranged on the stator side and part of an independent stator sleeve mountable from the housing section 15.
  • the rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the thread pump stage 11, 12 are components of a jointly rotating system 7, 12.
  • the rotor 12 of the threaded pump stage 11, 12 forms the pressure side End of this system and can be as a disc or bell-shaped (as shown in Figure 1) his.
  • the housing section 5 surrounds the drive motor 16, the stator with 17 and the rotor with 18 are.
  • the housing section 5 is part of a Chassis 19 with an interior in which the drive motor 16 and other components are located.
  • the chassis 19 In the chassis 19 is also the rotors 7 and 12 of the compound pump supporting shaft 21 mounted. Only the upper camp 22 is visible. Otherwise, the chassis is 19 carriers all other components of pump 1.
  • the stator sleeve 15 is based on the chassis 19.
  • the inside diameter is slightly larger than the outer diameter of the rotor 7 the turbomolecular pump stage so that the stator sleeve 15 - With the housing section 4 removed and demounted Stator 6 of the turbomolecular pump stage 6.7 - removable is. This gives everyone the opportunity Stator components 8,9,15 only after assembly and also after balancing the rotating system 7, 12.
  • the suction end of the stator sleeve 15 is located a ring 23, the inner edge of the inner diameter corresponds to the spacer rings 2. In the complained state of Pump, the stator 6 is supported on the ring 23.
  • a filling level that is designed as a centrifugal stage 24. It includes extending substantially radially outward Crosspieces 25 facing the last row of rotor blades Form pockets 26. Different embodiments of the Centrifugal stage 24 are shown in Figures 2 to 5. The pockets are located between the webs 25 26, which are open upwards and outwards. The Arrow 27 indicates the direction of rotation.
  • the centrifugal stage 24 part of the rotor 12 of the thread pump stage. It is on the blades 10 of the turbomolecular pump stage 7,10 facing side of the disc or Bell-shaped rotor 12 is formed.
  • the depth of the pockets 26 can increase radially outwards (Fig.1). Their location is chosen so that the peripheral Openings of the pockets 26 at the entrance the thread pump stage 11,12.
  • the bridges at the embodiment of Figure 2 extend radially.
  • the webs 25 in the embodiments according to the Firgures 3 and 4 are 27 with respect to the direction of rotation inclined to the rear, in the embodiment according to FIG. 5 Forward.
  • the exit angle of the webs determines the static and dynamic Proportion of the pressure level. Is the jetty backwards curved, there is a high static component. Moreover is the degree of deflection in the circumferential direction a backward curvature is enhanced. If the bridge is curved forward there is a high dynamic share.
  • Figure 1 shows that the radial dimensions of pockets 26 is essentially the active pumping length of the blades 10 of the last located on the pressure side Rotor blade row corresponds.
  • the centrifugal stage 24 will be those leaving the turbomolecular pump stage Gases due to the action of the webs 26 and pockets 27 deflected, specifically in the direction of the conveyor gap 13 the thread pump stage 11.12.
  • Compression instead, so that stalls largely are avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)

Claims (10)

  1. Pompe à vide à friction (1) comprenant au moins un étage de pompe turbomoléculaire (6, 7), un étage de pompe à vis (11, 12) raccordé à celui-ci du côté refoulement et un étage de remplissage (24) inséré entre l'étage de pompe turbomoléculaire (6, 7) et l'étage de pompe à vis (11, 12), caractérisée en ce que l'étage de remplissage (24) est sous la forme d'un étage centrifuge.
  2. Pompe à vide à friction (1) selon la revendication 1, caractérisée en ce que l'étage centrifuge (24) comporte des nervures (25) s'étendant essentiellement radialement qui forment des poches (26) ouvertes sur la périphérie et qui se trouvent au niveau de la zone du côté admission de l'étage de pompe à vis (11, 12).
  3. Pompe à vide à friction (1) selon la revendication 2, caractérisée en ce que les nervures (25) de l'étage de remplissage se raccordent à la dernière rangée d'aubes du rotor du côté refoulement et que l'extension radiale des nervures (25) correspond à la longueur active des aubes de cette dernière rangée d'aubes du rotor.
  4. Pompe à friction (1) selon une des revendications 1 à 3, caractérisée en ce que la profondeur des poches (26) se trouvant entre les nervures (25) augmente avec le rayon.
  5. Pompe à friction (1) selon une des revendications 2 à 4, caractérisée en ce que les nervures (25) s'étendant essentiellement radialement sont inclinées vers l'arrière par rapport au sens de rotation du système rotatif (7, 12).
  6. Pompe à friction (1) selon une des revendications 2 à 4, caractérisée en ce que les nervures (25) s'étendant essentiellement radialement sont inclinées vers l'avant par rapport au sens de rotation du système rotatif (7, 12).
  7. Pompe à friction (1) selon une des revendications 2 à 6, caractérisée en ce que le rotor (12) de l'étage de pompe à vis (11, 12) est en forme de disque ou de cloche et que l'étage de remplissage (24) fait partie du rotor (12).
  8. Pompe à friction (1) selon une des revendications précédentes, caractérisée en ce que les stators (6, 11) sont démontables indépendamment de leurs rotors (7, 12).
  9. Pompe à friction (1) selon la revendication 8, caractérisée en ce que les stators (6, 11) sont constitués d'éléments (8, 9, 15) entourant un boítier (6).
  10. Pompe à friction (1) selon la revendication 8 ou 9, caractérisée en ce que le stator (11) de l'étage de pompe à vis (11, 12) est sous la forme d'une douille (15) séparée.
EP98954252A 1997-09-24 1998-09-04 Pompe compound Expired - Lifetime EP1017944B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE29717079U DE29717079U1 (de) 1997-09-24 1997-09-24 Compoundpumpe
DE29717079U 1997-09-24
PCT/EP1998/005611 WO1999015793A1 (fr) 1997-09-24 1998-09-04 Pompe compound

Publications (2)

Publication Number Publication Date
EP1017944A1 EP1017944A1 (fr) 2000-07-12
EP1017944B1 true EP1017944B1 (fr) 2003-06-25

Family

ID=8046394

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98954252A Expired - Lifetime EP1017944B1 (fr) 1997-09-24 1998-09-04 Pompe compound

Country Status (5)

Country Link
US (1) US6422829B1 (fr)
EP (1) EP1017944B1 (fr)
JP (1) JP2001517757A (fr)
DE (2) DE29717079U1 (fr)
WO (1) WO1999015793A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10046766A1 (de) 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (fr) 2012-01-27 2019-03-13 Edwards Limited Pompe à vide de transfert gazeux
CN104791264A (zh) * 2015-04-20 2015-07-22 东北大学 一种带有过渡结构的复合分子泵
JP7672849B2 (ja) * 2021-03-17 2025-05-08 エドワーズ株式会社 真空ポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
US5020969A (en) 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
US5513951A (en) * 1993-03-29 1996-05-07 Nippondenso Co., Ltd. Blower device
DE19632874A1 (de) 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
US5681146A (en) * 1996-10-04 1997-10-28 Future Sea Farms Inc. Low head pumping system for fish farms

Also Published As

Publication number Publication date
EP1017944A1 (fr) 2000-07-12
JP2001517757A (ja) 2001-10-09
US6422829B1 (en) 2002-07-23
DE59808840D1 (en) 2003-07-31
WO1999015793A1 (fr) 1999-04-01
DE29717079U1 (de) 1997-11-06

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