EP0815582A1 - Installation radiographique a microfoyer - Google Patents
Installation radiographique a microfoyerInfo
- Publication number
- EP0815582A1 EP0815582A1 EP96907493A EP96907493A EP0815582A1 EP 0815582 A1 EP0815582 A1 EP 0815582A1 EP 96907493 A EP96907493 A EP 96907493A EP 96907493 A EP96907493 A EP 96907493A EP 0815582 A1 EP0815582 A1 EP 0815582A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- target
- electron beam
- layer
- ray
- brake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract 2
- 230000005855 radiation Effects 0.000 claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000008646 thermal stress Effects 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 3
- 206010000210 abortion Diseases 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 230000000979 retarding effect Effects 0.000 abstract 5
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000013077 target material Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000012876 carrier material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005291 magnetic effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 241000252505 Characidae Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 206010039740 Screaming Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Definitions
- the invention relates to a device according to the preamble of claim 1.
- a device is known from US Pat. No. 4,344,013 (LedLey).
- Image plane is shown enlarged.
- microfocus X-ray devices have not really been able to establish themselves in practice, particularly in medical diagnostics. This seems to be mainly due to the fact that they can only work with limited X-ray power. Because the very close focus of the electric tetras on the brake target results in a focal spot (focus) of very small diameter with a correspondingly very high energy density. This large specific load leads quickly to the fact that the target, which is usually irradiated in a direction of 10 ° to 45 °, causes a disadvantageous change in its conversion to convert the incident electron energy into x-ray radiation to be emitted Topography with an early malfunction of the brake layer is experienced.
- the exposure time per x-ray exposure would have to be extended if low-power x-ray beams were used, which would contradict the requirement for short exposure times in the range from tenths to hundredths of a second, in order to increase the unnecessarily high radiation exposure and to blur the object movement avoid.
- the smaller the thermal focal spot on the target anode the lower the electrical power that can be absorbed by the small target area before it begins to melt. This behavior contradicts the demand for a higher density of the electron beams hitting the target for higher power of the X-rays. From the above-mentioned US Pat. No. 4,344,013 (Ledley), a microfocus X-ray device is known which already works with a fused target.
- the electron beam falls on a slanted target, so that the generated X-ray radiation is also emitted at an angle from the target.
- a rapidly progressing crater formation leads to the optical axis of the emitted x-ray groove being exposed to shadowing from the swelling crater rim, which largely x-rays absorbed.
- the result is a diffuse X-ray light that cannot be regarded as starting from a point-like source. Therefore, such a device with an inclined to the incident E lekt ronenst rah L position of the target has not proven.
- DE-OS 34 01 749 A1 (Siemens) relates to an X-ray device in which the electron beam on the braking material is deflected continuously and, for example, meanderingly. However, this increases the effective focal spot, causing - as described above - the image sharpness to suffer.
- 1 is a schematic longitudinal section through a Mi Krofocus-Röntgenei device
- FIG. 3 shows the target according to FIG. 2 with a measurement of the target current
- 3A shows the course of the target current as a function of the irradiation time
- Fig. 4 shows a target with a braking volume
- FIG. 4A shows a support with support material doping.
- the microfocus X-ray device 1 consists of an evacuated housing 11, 12 made of glass or non-ferro-magnetic material.
- the tube 12 has an arbitrary, generally round cross section.
- electrical feed wires 13 protrude for a hair Lade ge cathode 14 into the interior of the tube 12.
- the heated cathode 14 acts as an E Lekt ronenque L le, from whose radiation by means of a lattice 15 in the form of a cap, a narrow, di erecting E lekt ronenstrah L 16 is hidden.
- the beam 16 passes through the central opening of a perforated disk anode 17 and is thereby bundled to form a virtual focal spot 18.
- the beam 16 which then widens again, passes through the cross-sectional zone of a deflection coil 19 arranged outside the tube 12 and is im magnetic gap 20 of a subsequent focus they rspu le 21 bundled.
- the focussing coil 21 images as an e-romagnitical lens a reduced image of the virtual focal spot 18 as focal spot 22 on a transmission target 23 which is located in the outlet opening 24 of the tube 12.
- the focus spot 21 generates an extremely flat focal spot 22 of the order of magnitude of typically 0.5 to 100 ⁇ m.
- the target 23 consists of a thin brake layer 32 made of a metal of a high atomic number in the periodic system of the elements, such as tungsten, gold, copper or molybdenum, and a weakly x-ray absorbing but good heat-conducting carrier rs ci cht 33, preferably made of aluminum or beryllium.
- a thin brake layer 32 made of a metal of a high atomic number in the periodic system of the elements, such as tungsten, gold, copper or molybdenum, and a weakly x-ray absorbing but good heat-conducting carrier rs ci cht 33, preferably made of aluminum or beryllium.
- the structure of the sample 26, insofar as it is more or less impermeable to the X-ray beam 25, is correspondingly enlarged as a silhouette to a distance behind the sample 26 parallel to the transmission target 23 and thus perpendicular to the beam direction 28 Projected in the picture plane 29.
- a suction system 37 for maintaining the vacuum in the tube 12 and for removing vaporous material from the burning cathode 14 also causes the interior of the tube 12 to be kept clean of melted material from the furnace Leak hole 31 in target 23.
- the particularly high yield of X-ray steel L 25 results from the extremely small-area excited brake volume 40 (FIG. 4) in the transmission target 23.
- the high power density, that is to say the high surface-specific physical stress with the micro focus, the electric light beam L 16 leads to the burning of a Brennf Lee k hole 31 in the target 23, so that in the outgoing direction 28 of the X-ray beams 25 the remaining target material and thus its beam-weakening self-absorption is continuously reduced.
- the brake layer 32 is melted off in a targeted manner by the reflecting electron beam L 16, which in terms of its aggregate state represents a dynamically changing X-ray beam Lungsque l Le.
- the brake material is stored as a thin layer 32, for example made of tungsten, on a carrier layer 33, on the other hand, which is thick and is made of a good heat-conducting material, such as beryllium or aluminum, then it is hardly avoidable but also uncritical that at the bottom of the hole 31 in the brake layer
- the irradiation of the target 23 must be ended at this point, that is, in the application of this X-ray device 1, the recording must have ended; because the exposure of the wearer 33 to electron beams 16 only leads to very soft X-ray radiation 25 and thus to diffuse shadow images of the sample 26 to be illuminated that can hardly be used in the image plane 29.
- the transmission target 23 is again irradiated for a very short time with a microfocused electron beam L 16, for which again the cathode 14 only operated briefly and / or the beam 16 via a ve rs c hwenkba re, not shown in the drawing. Aperture only released for a short time or the beam 16 is briefly pivoted from an inoperative waiting direction into the device and Wi rk axis 10 of the beam device 28 via a corresponding control of the deflection coil 19.
- a spot must not be irradiated again at which a hole 31 had previously been burned in, otherwise the carrier chic chic 33 instead of the brake layer would be used immediately or even immediately
- an offset control 34 is provided, which ensures that the focal spots 22 that follow one another only along a meandering or spiral-arc-shaped path by the above-described beam deflection by means of the deflection coil 19 out of the device axis 10 and / or by displacement of the target 23 relative to the device axis 10 are caused. This ensures that only unused areas of the target 23 are used one after the other and thus destruction of the carrier layer
- the target 23 is thus by the vertical exposure to electrons in the
- a positioning motor 35 is shown in the drawing in the tube.
- the target 23 together with the positioning motor 35 can in principle also be held in a vacuum-tight manner on the end face in front of the outlet opening 24 of the tube 12; or from an external arrangement of the positioning motor 35, a linkage engages through the wall on a rotating or viewing holder 36 for the target in the interior of the tube 12.
- the displacement of the target 23 must always take place when the electric ronst rah L 16 has burned the micro-hole 31 so deep into the brake layer 32 that it reaches the carrier layer 33.
- a simple method for determining this point in time is to end the generation of the focal spot on the target 23 after a short irradiation time of the order of milliseconds or microseconds which can be estimated in terms of power or can be more easily empirically determined, for which purpose the electron beam, as already described above, can be switched off, dimmed or swung out of the target area.
- this procedure does not take into account the individual condition of the micro. Hole 31. It may well be that with this method the carrier 33 is already irradiated or, on the other hand, the micro-hole 31 has not yet reached the boundary between the brake layer 32 and carrier 33.
- a much more precise method for determining the point in time t a at which the brake layer 32 has melted and the electrons strike the carrier 33 is the measurement of the target current I Bec shown in FIG. 3, as shown in FIG. 3 , the target current I measured as a function of the irradiation time, then this has the course shown in FIG. 3A.
- the target quantity increases abruptly.
- the point in time t a is the point in time at which the electrons have penetrated the brake layer 32 and the micro-hole 31 extends to the carrier layer 33.
- an electron accelerated in a high voltage penetrates the surface of matter, it experiences in interaction with the matter a series of elastic impacts, during which it loses a part of its kinetic energy, which is converted into radiation. Part of this radiation consists of X-rays.
- the electron passes through a braking volume 40 (FIG. 4) within the target material, the expansion of which is primarily determined by the atomic number Z of the target material, the energy E 0 of the electrons and by the electron beam diameter is.
- the x-ray radiation is generated within the Bremsvo Lumens 40 described.
- the extent of the steel Lenque l Le is thus determined by the size of the B remsvo Lumens 40. Even if an e-ect ron Lahdurc me s rd is assumed, a finite braking volume 40 remains due to the spread of the electrons. Thus, a minimum beam Lenque l length, essentially determined by E 0 and Z, cannot be fallen below in principle.
- target material doping 41 (FIG. 4A) must be introduced into the carrier material ri a L, the volume of each of which is significantly smaller than the above-described braking volume 40 of the electrons in a coherent target ateri al.
- the usable X-ray radiation only arises in the target material with a high atomic number.
- the low ordinal number from the target material dopings 41 into the carrier material penetrated electrons do not contribute to the usable X-ray radiation, just as the electrons that penetrate directly into the carrier material in addition to the dopings 41 do not make any significant contribution to the usable radiation.
- the electron beam Since in the small doping volume na according to FIG. 4A, with the same electron beam, fewer x-ray photons are generated per time than in the larger brake volume Lumi na 40 in a brake layer 32 (FIG. 2), the electron beam must be dic ht e (current) can be increased. Although this leads to a faster melting of the target material dopings 41 and their surrounding of the carrier material, the X-radiation generated during the melting process can also be used. For the next x-ray exposure, the electron beam 16 is directed in a known manner onto a still unused doping point 41, etc.
- the doping 41 can be arranged, for example, in a defined grid.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- X-Ray Techniques (AREA)
- Radiation-Therapy Devices (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19509516 | 1995-03-20 | ||
| DE19509516A DE19509516C1 (de) | 1995-03-20 | 1995-03-20 | Mikrofokus-Röntgeneinrichtung |
| PCT/EP1996/001145 WO1996029723A1 (fr) | 1995-03-20 | 1996-03-16 | Installation radiographique a microfoyer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0815582A1 true EP0815582A1 (fr) | 1998-01-07 |
| EP0815582B1 EP0815582B1 (fr) | 1999-09-22 |
Family
ID=7756825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP96907493A Expired - Lifetime EP0815582B1 (fr) | 1995-03-20 | 1996-03-16 | Installation radiographique a microfoyer |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5857008A (fr) |
| EP (1) | EP0815582B1 (fr) |
| JP (1) | JP3150703B2 (fr) |
| AT (1) | ATE185021T1 (fr) |
| DE (2) | DE19509516C1 (fr) |
| WO (1) | WO1996029723A1 (fr) |
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| RU2161843C2 (ru) * | 1999-02-17 | 2001-01-10 | Кванта Вижн, Инк. | Точечный высокоинтенсивный источник рентгеновского излучения |
| GB9906886D0 (en) * | 1999-03-26 | 1999-05-19 | Bede Scient Instr Ltd | Method and apparatus for prolonging the life of an X-ray target |
| JP2001035428A (ja) * | 1999-07-22 | 2001-02-09 | Shimadzu Corp | X線発生装置 |
| JP3934836B2 (ja) | 1999-10-29 | 2007-06-20 | 浜松ホトニクス株式会社 | 非破壊検査装置 |
| JP3934837B2 (ja) | 1999-10-29 | 2007-06-20 | 浜松ホトニクス株式会社 | 開放型x線発生装置 |
| UA59495C2 (uk) * | 2000-08-07 | 2003-09-15 | Мурадін Абубєкіровіч Кумахов | Рентгенівський вимірювально-випробувальний комплекс |
| DE10391780D2 (de) * | 2002-03-26 | 2005-02-17 | Fraunhofer Ges Forschung | Röntgenstrahlquelle mit einer kleinen Brennfleckgrösse |
| US7180981B2 (en) * | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
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| JP2005276760A (ja) * | 2004-03-26 | 2005-10-06 | Shimadzu Corp | X線発生装置 |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE243171C (fr) * | ||||
| FR2333344A1 (fr) * | 1975-11-28 | 1977-06-24 | Radiologie Cie Gle | Tube radiogene a cathode chaude avec anode en bout et appareil comportant un tel tube |
| US4344013A (en) * | 1979-10-23 | 1982-08-10 | Ledley Robert S | Microfocus X-ray tube |
| DE3307019A1 (de) * | 1983-02-28 | 1984-08-30 | Scanray Scandinavian X-Ray Deutschland GmbH, 3050 Wunstorf | Roentgenroehre mit mikrofokus |
| DE3401749A1 (de) * | 1984-01-19 | 1985-08-01 | Siemens AG, 1000 Berlin und 8000 München | Roentgendiagnostikeinrichtung mit einer roentgenroehre |
| US4896341A (en) * | 1984-11-08 | 1990-01-23 | Hampshire Instruments, Inc. | Long life X-ray source target |
| EP0319912A3 (fr) * | 1987-12-07 | 1990-05-09 | Nanodynamics, Incorporated | Procédé et dispositif pour analyser des matériaux avec des rayons X |
| JPH07119837B2 (ja) * | 1990-05-30 | 1995-12-20 | 株式会社日立製作所 | Ct装置及び透過装置並びにx線発生装置 |
-
1995
- 1995-03-20 DE DE19509516A patent/DE19509516C1/de not_active Expired - Fee Related
-
1996
- 1996-03-16 DE DE59603163T patent/DE59603163D1/de not_active Expired - Fee Related
- 1996-03-16 EP EP96907493A patent/EP0815582B1/fr not_active Expired - Lifetime
- 1996-03-16 JP JP52806796A patent/JP3150703B2/ja not_active Expired - Fee Related
- 1996-03-16 AT AT96907493T patent/ATE185021T1/de not_active IP Right Cessation
- 1996-03-16 WO PCT/EP1996/001145 patent/WO1996029723A1/fr not_active Ceased
- 1996-03-16 US US08/913,714 patent/US5857008A/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| See references of WO9629723A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US5857008A (en) | 1999-01-05 |
| WO1996029723A1 (fr) | 1996-09-26 |
| ATE185021T1 (de) | 1999-10-15 |
| EP0815582B1 (fr) | 1999-09-22 |
| DE19509516C1 (de) | 1996-09-26 |
| JP3150703B2 (ja) | 2001-03-26 |
| JPH10503618A (ja) | 1998-03-31 |
| DE59603163D1 (de) | 1999-10-28 |
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