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EP0366005A1 - Verfahren und Vorrichtung zur Führung und Übertragung eines abgeschreckten Metallbandes - Google Patents

Verfahren und Vorrichtung zur Führung und Übertragung eines abgeschreckten Metallbandes Download PDF

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Publication number
EP0366005A1
EP0366005A1 EP89119433A EP89119433A EP0366005A1 EP 0366005 A1 EP0366005 A1 EP 0366005A1 EP 89119433 A EP89119433 A EP 89119433A EP 89119433 A EP89119433 A EP 89119433A EP 0366005 A1 EP0366005 A1 EP 0366005A1
Authority
EP
European Patent Office
Prior art keywords
transfer guide
metallic tape
tape
air
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89119433A
Other languages
English (en)
French (fr)
Other versions
EP0366005B1 (de
Inventor
Kiyoshi Technical Research Division Shibuya
Toru Technical Research Division Sato
Nobuyuki Technical Research Division Morito
Seiko Technical Research Division Nara
Teruo Chiba Works Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63264215A external-priority patent/JPH02112858A/ja
Priority claimed from JP63264216A external-priority patent/JPH02112859A/ja
Priority claimed from JP63287519A external-priority patent/JPH02137650A/ja
Priority claimed from JP1211420A external-priority patent/JPH0620615B2/ja
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Publication of EP0366005A1 publication Critical patent/EP0366005A1/de
Application granted granted Critical
Publication of EP0366005B1 publication Critical patent/EP0366005B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/06—Continuous casting of metals, i.e. casting in indefinite lengths into moulds with travelling walls, e.g. with rolls, plates, belts, caterpillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/06—Continuous casting of metals, i.e. casting in indefinite lengths into moulds with travelling walls, e.g. with rolls, plates, belts, caterpillars
    • B22D11/0637—Accessories therefor
    • B22D11/0694—Accessories therefor for peeling-off or removing the cast product

Definitions

  • This invention relates to a method and an apparatus for guiding and transferring a rapidly quenched metallic tape (referred to "tape” hereinafter), particularly an amorphous metallic tape produced by a single roll method from a single cooling roll (referred to “cooling roll” hereinafter) to a winder.
  • tape rapidly quenched metallic tape
  • cooling roll a single cooling roll
  • amorphous metallic tapes In case of amorphous metallic tapes, on the other hand, the thickness is very thin as less than 50 ⁇ m and the feeding speed of the tapes is not lower than 20 m/sec. Therefore, means disclosed in the above Japanese Publication could not be applied without any modifications. With the amorphous metallic tapes, moreover, the characteristics of the materials tend to change depending upon producing speeds so that mechanical strengths are often spoilt. Therefore, it is more difficult to accomplish taking-up technique because the producing speed could not be changed in taking up on a reel and taking off.
  • a method of guiding and transferring a rapidly quenched metallic tape including steps of peeling the rapidly quenched metallic tape produced by solidification through rapid quenching on a circumferential surface of a single cooling roll rotating at a high speed, introducing the metallic tape into a cylindrical transfer guide to a pinch roll unit arranged at a terminal end of the transfer guide to catch the metallic tape by the pinch roll unit, and moving the pinch roll unit to a winder for the metallic tape, according to the invention the metallic tape is fed in the transfer guide substantially without being in contact with the transfer guide.
  • the transfer guide is preferably arranged in a flying direction of the metallic tape peeled from the single cooling roll to feed the metallic tape substan­tially without being in contact with the transfer guide.
  • an apparatus for guiding and transferring a rapidly quenched metallic tape comprising a cylindrical transfer guide for introducing thereinto and guiding therein the rapidly quenched metallic tape produced by solidification through rapidly quenching on a circumfer­ential surface of a single cooling roll and peeled therefrom by an air knife, the transfer guide being arranged on a normal line of the single cooling roll at a position where the metallic tape is peeled, a pinch roll unit arranged at a terminal end of the transfer guide for catching the metallic tape, a blower for increasing air flow rate in a downstream half of the transfer guide, and a transfer trolley for transferring the pinch roll unit and the blower to a winder for the metallic tape, and the transfer guide having at an upper surface an air adjusting plate and at a lower surface a deflector roll.
  • Fig. 1 a preferable apparatus for guiding and transferring the rapidly quenched metallic tape according to the invention, wherein numeral 1 is a cooling roll rotating at a high speed.
  • a metallic tape 2 prepared by solidifying through rapid quenching on the surface of the cooling roll 1 is peeled off from the cooling roll 1 with an air knife 3 and guided into a cylindrical transfer guide 4, at where the tape 2 is caught by a pinch roll unit 5 (combination of brush roll 5a and solid roll 5b) placed on a transfer trolley 6. Then, the transfer trolley 6 is moved together with the pinch roll unit 5 toward a winder (not shown), whereby the tape 2 is taken up on the winder.
  • a winder not shown
  • a deflector roll 7 is arranged at an entrance side of the transfer guide 4, which functions to form an adequate pass line when tension is applied to the metallic tape. Moreover, a high speed air flow is formed inside the transfer guide 4 by means of a blower 8 arranged behind the pinch roll unit 5. Numeral 9 is a pouring nozzle.
  • the transfer guide 4 is arranged so that the axial line of the guide locates on a normal line at a peeling point of the metallic tape 2 from the cooling roll 1, whereby the flying metallic tape 2 is not contacted with the inner wall of the transfer guide 4.
  • the metallic tape 2 could be introduced from the cooling roll 1 through the transfer guide 4 into the entrance side of the pinch roll unit 5, but tension could not be applied to the metallic tape 2.
  • the behavior of the metallic tape flying inside the transfer guide was recorded by means of VTR or the like, but in this case, only the continued metallic tape was observed.
  • the tape forming rate is usually 25-30 m/sec, an apparently static image can not be obtained by a general picture system, so that the detail movement of the metallic tape can not be analyzed.
  • the picturing was carried out by making the whole of the apparatus dark and conducting stroboradiation at 1/50000 sec, an apparently static image of the metallic tape flying inside the transfer guide could be recorded by VTR.
  • the mechanical strength of the amorphous alloy tape is very high.
  • the metallic tape flying at a high rate of 25-30 m/sec collides with the inner wall face of the guide, the cracks are generated or the tape is broken. This is considered to result from such a characteristic of the amorphous metallic tape that the tape is strong to uniaxial tension but is weak to shearing force.
  • the transfer guide is arranged in a direction that the metallic tape peeled off from the cooling roll with the air knife flies freely, whereby it is avoided to contact the metallic tape flying inside the transfer guide with the inner wall face of the transfer guide to realize the transferring of the metallic tape without impact.
  • the transfer guide 4 as shown in Fig. 1 is not arranged between the cooling roll and the pinch roll unit, the rapture of the metallic tape by collision is never caused, but the metallic tape can not stably be guided into the pinch roll unit. Therefore, the arrangement of the transfer guide is essential in the invention.
  • the metallic tape peeled off from the cooling roll with the air knife tends to fly in a direction of a normal line at the peeling position on the roll surface, so that the metallic tape flies as if it springs out from the center of the roll. Therefore, when the transfer guide is arranged in such a direction, the metallic tape is hardly subjected to impact by contacting with the inner wall face of the guide, and consequently there is caused no cracking nor rapture of the metallic tape.
  • a distance (width) of a clearance 10 can be adjusted by an adjusting plate 11 arranged on an upper edge portion of an inlet port 4a of the transfer guide 4 and freely moved to the cooling roll 1, whereby the width of air flow passage is increased or decreased to change a blowing amount of air to the metallic tape 2 to thereby control the flying direction of the metallic tape 2.
  • the inventors have examined the influence of air flow inside the transfer guide 4 on the flying trajectory of the metallic tape 2 flying at high speed inside the transfer guide and found the following knowledges.
  • the air flow in the vicinity of the inlet port of the transfer guide does not advance toward the pinch roll unit in the transfer guide but flows downward toward the bottom face inside the transfer guide. Therefore, the metallic tape 2 peeled off from the cooling roll 1 collides with the bottom face of the inner wall of the transfer guide under an influence of such a downward air flow and then takes a flying trajectory in horizontal direction together with air flow gradually directing toward the pinch roll unit inside the transfer guide.
  • the air knife 3 acts to give a pressure enough to completely peel the metallic tape 2, so that there is a restriction for reducing the quantity and pressure of the air flow.
  • the flying trajectory of the metallic tape 2 is analyzed from the image of VTR, it has been confirmed that if the air flow from the air knife 3 contacts with the flying metallic tape over a wide area, the trajectory of the tape 2 directs downward to collide with the inner wall of the transfer guide.
  • Fig. 3 shows the rapture number of the metallic tape inside the transfer guide (A) when the clearance between the transfer guide 4 and the cooling roll 1 is narrowed to direct the tape toward the pinch roll unit and (B) when the clearance is widened to direct the tape toward the bottom face of the guide.
  • the metallic tape 2 can be guided into the pinch roll unit 5 by adjusting the clearance between the transfer guide 4 and the cooling roll 1 without rapturing the tape inside the transfer guide.
  • the optimum value of the clearance 10 between the transfer guide 4 and the cooling roll 1 is desirable to be determined by confirming the flying trajectory of the metallic tape because this value is varied by physical adhesion force between the tape 2 and the cooling roll 1, suction force at the inlet of the transfer guide 4, relative arrangement between the peeling position of the tape and the clearance 10 and the like.
  • the flying posture of the metallic tape 2 just after the peeling does not necessarily take the horizontal flying trajectory. In this case, it is sufficient to change the distance of the clearance 10 in the widthwise direction of the metallic tape.
  • a high speed air flow is formed inside the transfer guide 4 by suction of air through the blower 8 arranged behind the pinch roll unit 5.
  • the flow rate of the high speed air flow inside the transfer guide 4 is measured by means of a flow meter (not shown), while the tape passing rate of the metallic tape 2 is measured by means of a tachometer (not shown) based on the rotating rate of the cooling roll 1, whereby the flow rate of the high speed air flow is set above the measured tape feeding speed.
  • Such a flow rate of the high speed air flow inside the transfer guide 4 can be adjusted and set to a given value by changing at least one of suction amount of the blower 8, air jetting quantity of the air knife 3, clearance 10 between the cooling roll 1 and the transfer guide 4 and inner shape of the transfer guide 4.
  • the rapture of the rapidly quenched metallic tape on the inner wall face of the transfer guide can be prevented by limiting the length of the transfer guide to a range of 10 cm - 100 cm. The reason on such a limitation of the transfer guide length will be described with respect to the following concrete experimental data.
  • the transfer guide 4 was arranged as shown in Fig. 1, and the length of the transfer guide was varied over a range of 10 cm to 200 cm. While, the high speed air flow of about 35 m/sec was formed inside the transfer guide 4 by means of the blower 8 behind the pinch roll unit 5.
  • the amorphous alloy tape peeled off with the air knife 3 was smoothly guided into the transfer guide 4 and caught by the pinch roll unit 5 after the confirma­tion of passing the tape between the brush roll 5a and the solid roll 5b constituting the pinch roll unit 5 at an open state, during which the time for catching the tape was measured to obtain results as shown in Fig. 6.
  • Fig. 6 when the transfer guide length is not more than 100 cm, the catching of the tape is in 10 seconds. If the length exceeds 100 cm, the catching becomes considerably difficult, because it is considered that as the length of the transfer guide becomes long, the probability of rapturing the tape on the inner wall of the transfer guide through collision becomes high. While, when the transfer guide length is less than 10 cm, the high speed air flow required for the catching through the pinch roll unit 5 can not stably be formed.
  • the metallic tape peeled off from the cooling roll is passed through the transfer guide to the pinch roll unit at substantially non-contact state to the inner wall of the transfer guide by means of a deflector roll having a function as an air floater located at the entrance side of the transfer guide.
  • the deflector roll is arranged at the entrance side of the transfer guide at such a certain space upward from the bottom of the transfer guide that air sufficiently passes between the deflector roll and the bottom of the transfer guide so as not to disturb the air flow required for controlling the flying posture of the metallic tape flying inside the transfer guide.
  • the deflector roll is constructed so as to make constant the formation of pass line between the peeling point from the cooling roll and the pinch roll unit when tension is applied to the metallic tape peeled off from the cooling roll by the action of the pinch roll unit and to serve as an air floater for eliminating the friction with the deflector roll. Furthermore, in order to provide good flying posture of the metallic tape before the catching by the pinch roll unit, there is a space between the deflector roll and the transfer guide that air flow sufficiently flows toward the delivery side of the transfer guide. Moreover, the deflector roll is provided with air jet ports 14 jetting air as an air floater for causing no friction between the pass line of the metallic tape after the catching and the deflector roll. If necessary, an apron (guide plate) 15 smoothly flowing air flow inside the transfer guide may effectively be arranged on the lower face of the deflector roll in order to make the disturbance of air flow inside the transfer guide through the deflector roll.
  • the deflector roll 7 acts to form an adequate pass line when tension is applied to the caught metallic tape. Particularly, it can be said that the deflector roll 7 is effective to form the adequate pass line when the setting position of the transfer guide 4 changes in the height direction of the cooling roll.
  • the deflector roll is essential to form the pass line between the pinch roll unit and the cooling roll, but brings about the rapture of the metallic tape, which is a cause that tension is not applied to the amorphous alloy tape through the pinch roll unit.
  • a clearance is formed between the deflector roll and the bottom of the transfer guide to form an air flow therebetween.
  • air flowing through the clearance has an air flow rate enough to push the metallic tape upward and cause no rapture.
  • the air flowing through the clearance largely acts to push the posture of the metallic tape flying inside the transfer guide upward at the initial stage between the peeling from the cooling roll and the catching through the pinch roll unit, and consequently the inconvenience of colliding the flying metallic tape onto the bottom of the transfer guide before the catching is considerably improved.
  • an apron 15 is attached to the deflector roll, which is effective to solve a wavy phenomenon of the metallic tape due to discontinuous tension change.
  • a molten alloy having a composition of 10 atomic % (hereinafter referred to as "at%") of B, 9 at% of Si, 1 at% of C and the balance being Fe was kept at 1,300°C, and ejected onto an uppermost portion of a cooling roll made of a copper alloy and rotating at a high speed (25 m/sec) through a slit-like nozzle having a width of 100 mm to produce an amorphous alloy tape of 25 ⁇ m in thickness.
  • the axis of a transfer guide 4 was substantially directed toward the center of the cooling roll 1.
  • a high speed air flow was formed inside the guide by means of a blower behind a pinch roll unit.
  • the alloy tape was peeled off from the cooling roll with an air knife, and introduced into the transfer guide. While the peeled alloy tape was smoothly guided inside the transfer guide, it was led to an opened state pinch roll unit constituted by a brush roll and a solid roll. After the tape passed between the rolls, it was caught by pressing down the brush roll against the solid roll.
  • the metallic tape flying inside the transfer guide did not contact upper and lower faces and side faces of an inner wall of the transfer guide at least with impact.
  • a molten alloy having a composition of 10 at% of B, 9 at% of Si, 1 at% of C and the balance being Fe was kept at 1,300°C, and ejected onto an uppermost portion of the copper alloy cooling roll rotating at a high speed (25 m/sec) through the slit-like nozzle having a width of 100 mm to produce an amorphous alloy tape of 25 ⁇ m in thickness.
  • the alloy tape was peeled off from the cooling roll with the air knife, and guided into the transfer guide.
  • the width of an air flow from the air knife was adjusted by advancing or retracting an adjusting plate so that the alloy tape might smoothly fly inside the guide at a substantially non-contact state.
  • the alloy tape was guided to the opened state pinch roll unit constituted by the brush roll and the solid roll. After the alloy tape was passed through the rolls, it was caught by pressing down the brush roll against the solid roll.
  • the alloy tape flying inside the transfer guide did not contact the upper and lower faces and the side faces of the inner wall of the transfer guide at least with impact.
  • a molten alloy having a composition of 10 at% of B, 9 at% of Si, 1 at% of C and the balance being Fe was kept at 1,300°C, and ejected onto an uppermost portion of the copper alloy cooling roll rotating at a high speed (25 m/sec) through the slit-like nozzle having a width of 100 mm to produce an amorphous alloy tape of 25 ⁇ m in thickness.
  • Fig. 4a shows the shape of the transfer guide and planes at which the flow rate of the air stream was measured.
  • Figs. 4b, 4c and 4d show flow rates at the planes ⁇ , ⁇ and ⁇ and respectively, by lengths of arrows and figures (m/s) given thereunder.
  • the maximum flow rate of the air flow was 30 m/sec at the rear half portion of the transfer guide as shown in Figs 4b to 4d.
  • the amorphous alloy tape peeled with the air knife was smoothly guided inside the transfer guide. After it was confirmed that the amorphous alloy tape passed through the opened state pinch roll unit constituted by the brush roll and the solid roll, the tape was caught by pressing down lowering the brush roll against the solid roll.
  • the alloy tape flying inside the transfer guide did not contact the upper and lower faces and the side faces of the inner wall of the transfer guide at least with impact.
  • a static image of the alloy tape introduced into the transfer guide was shown at a scale of 1/50,000 in Fig. 5a.
  • Fig. 5b shows a static image of the alloy tape which contacted the bottom face of the tape transfer guide when the flow rate of the air flow was smaller than that of passing the amorphous alloy tape.
  • a molten alloy having a composition of Fe80B10Si9C1 (at%) was kept at 1,300°C, and ejected onto an uppermost portion of the copper alloy cooling roll rotating at a high speed of 25 m/sec through the slit-­like nozzle having a width of 100 mm to produce an amorphous alloy tape of 25 ⁇ m in thickness.
  • the transfer guide 4 was arranged as shown in Fig. 1, and had a length of 60 cm. An air flow at a high speed of about 33 m/sec was formed inside the transfer guide 4 by the blower 8 behind the pinch roll unit 5.
  • the amorphous alloy tape was peeled off with the air knife, and smoothly guided inside the transfer guide. Then, after the tape was passed through the opened state pinch roll constituted by the brush roll and the solid roll, the tape was surely caught within 2 seconds by pressing down the brush roll against the solid roll.
  • a molten alloy having a composition of 10 at% of B, 9 at% of Si, 1 at% of C and the balance being Fe was kept at 1,300°C, and ejected onto an uppermost portion of the copper alloy cooling roll rotating at a high speed of 25 m/sec through the slit-like nozzle having a width of 100 mm to produce an amorphous alloy tape of 25 ⁇ m in thickness.
  • a deflector roll had air jet ports on the side along which the tape passed, and an air inflow opening was provided between the bottom plate of the transfer guide and the deflector roll.
  • a high speed air flow was formed inside the transfer guide by sucking with the blower behind the pinch roll unit.
  • the tape was peeled off from the cooling roll with the air knife, and guided to the opened state pinch roll unit constituted by the brush roll and the solid roll. After the tape passed through the pinch roll unit, the tape was caught by pressing down the brush roll against the solid roll. Immediately after the tape was caught, a tension was applied to the flying tape at a stretch so that a pass line was formed between the pinch roll unit and the deflector. The tape was guided without rapture, while the pass line was stabilized and the tape did not contact the deflector with impact.
  • the amorphous alloy tape produced by the single roll method can be transferred and taken up without rapture.
  • the invention has great significance as a producing technique of metallic tapes.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Continuous Casting (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
EP89119433A 1988-10-21 1989-10-19 Verfahren und Vorrichtung zur Führung und Übertragung eines abgeschreckten Metallbandes Expired - Lifetime EP0366005B1 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP264215/88 1988-10-21
JP63264215A JPH02112858A (ja) 1988-10-21 1988-10-21 急冷金属薄帯の誘導、搬送方法およびその装置
JP63264216A JPH02112859A (ja) 1988-10-21 1988-10-21 急冷金属薄帯の誘導、搬送方法およびその装置
JP264216/88 1988-10-21
JP63287519A JPH02137650A (ja) 1988-11-16 1988-11-16 急冷金属薄帯の誘導、搬送方法およびその装置
JP287519/88 1988-11-16
JP1211420A JPH0620615B2 (ja) 1989-08-18 1989-08-18 急冷金属薄帯の搬送装置
JP211420/88 1989-08-18

Publications (2)

Publication Number Publication Date
EP0366005A1 true EP0366005A1 (de) 1990-05-02
EP0366005B1 EP0366005B1 (de) 1994-07-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP89119433A Expired - Lifetime EP0366005B1 (de) 1988-10-21 1989-10-19 Verfahren und Vorrichtung zur Führung und Übertragung eines abgeschreckten Metallbandes

Country Status (4)

Country Link
EP (1) EP0366005B1 (de)
KR (1) KR0144576B1 (de)
CA (1) CA2001148C (de)
DE (1) DE68916613T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0463224A3 (en) * 1990-06-22 1992-12-02 Armco Inc. Method and apparatus for separating continuous cast strip from a rotating substrate
EP0629459A1 (de) * 1993-06-18 1994-12-21 Kawasaki Steel Corporation Verfahren und Vorrichtung zur Herstellung eines dünnen Bandes
US6853143B2 (en) 2002-01-09 2005-02-08 Ebara Corporation Electron beam system and method of manufacturing devices using the system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4190095A (en) * 1976-10-28 1980-02-26 Allied Chemical Corporation Chill roll casting of continuous filament
EP0255674A2 (de) * 1986-08-06 1988-02-10 Sundwiger Eisenhütte Maschinenfabrik Grah & Co Vorrichtung zum Herstellen eines gegossenen Metallbandes mit amorph und/oder feinkristallinem Gefüge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4190095A (en) * 1976-10-28 1980-02-26 Allied Chemical Corporation Chill roll casting of continuous filament
EP0255674A2 (de) * 1986-08-06 1988-02-10 Sundwiger Eisenhütte Maschinenfabrik Grah & Co Vorrichtung zum Herstellen eines gegossenen Metallbandes mit amorph und/oder feinkristallinem Gefüge

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, vol. 11, no. 347 (M-641)[2794], 13th November 1987; & JP-A-62 127 145 (KAWASAKI STEEL CORP.) 09-06-1987 *
PATENT ABSTRACTS OF JAPAN, vol. 11, no. 380 (M-650)[2827], 11th December 1987; & JP-A-62 151 251 (KAWASAKI STEEL CORP.) 06-07-1987 *
PATENT ABSTRACTS OF JAPAN, vol. 12, no. 302 (M-732)[3149], 17th August 1988; & JP-A-63 076 741 (KAWASAKI STEEL CORP.) 07-04-1988 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0463224A3 (en) * 1990-06-22 1992-12-02 Armco Inc. Method and apparatus for separating continuous cast strip from a rotating substrate
EP0629459A1 (de) * 1993-06-18 1994-12-21 Kawasaki Steel Corporation Verfahren und Vorrichtung zur Herstellung eines dünnen Bandes
US6853143B2 (en) 2002-01-09 2005-02-08 Ebara Corporation Electron beam system and method of manufacturing devices using the system
US7312449B2 (en) 2002-01-09 2007-12-25 Ebara Corporation Electron beam system and method of manufacturing devices using the system

Also Published As

Publication number Publication date
DE68916613D1 (de) 1994-08-11
CA2001148C (en) 1999-03-30
DE68916613T2 (de) 1994-12-22
KR900006032A (ko) 1990-05-07
EP0366005B1 (de) 1994-07-06
CA2001148A1 (en) 1990-04-21
KR0144576B1 (ko) 1998-08-17

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