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EP0116010A2 - Arrangement for protecting a capillar part serving to weld wires in a semiconductor element against sparking - Google Patents

Arrangement for protecting a capillar part serving to weld wires in a semiconductor element against sparking Download PDF

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Publication number
EP0116010A2
EP0116010A2 EP84810001A EP84810001A EP0116010A2 EP 0116010 A2 EP0116010 A2 EP 0116010A2 EP 84810001 A EP84810001 A EP 84810001A EP 84810001 A EP84810001 A EP 84810001A EP 0116010 A2 EP0116010 A2 EP 0116010A2
Authority
EP
European Patent Office
Prior art keywords
layer
arrangement according
capillary
arrangement
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP84810001A
Other languages
German (de)
French (fr)
Other versions
EP0116010B1 (en
EP0116010A3 (en
Inventor
Peter Glutz
Kenneth W. Ellett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APROVA General Jewels Co Ltd
Original Assignee
APROVA General Jewels Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by APROVA General Jewels Co Ltd filed Critical APROVA General Jewels Co Ltd
Priority to AT84810001T priority Critical patent/ATE33354T1/en
Publication of EP0116010A2 publication Critical patent/EP0116010A2/en
Publication of EP0116010A3 publication Critical patent/EP0116010A3/en
Application granted granted Critical
Publication of EP0116010B1 publication Critical patent/EP0116010B1/en
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
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Definitions

  • the present invention relates to the capillary organs used for welding the wires which connect the contact pads of a chip to the poles of its envelope or support, and it relates to the protection of these organs against sparking and carbon deposits resulting from the electric arc.
  • connection wires are generally made of gold or aluminum.
  • thermocompression of a smooth gold ball and solder point (2) thermosonic fixation of a smooth gold ball and solder point and (3) fixation thermosonic or ultrasonic of a smooth aluminum ball and solder point.
  • the wire after being welded to the contact pad of the chip and to the output terminal of its envelope, is broken in line with the last weld, then a ball is formed at its end for the next connection.
  • the ball is formed by means of a charcoal electric arc, as described below.
  • the weaker hydrogen arc was used. With the latter, the main cause of wear of the capillary organs was due to abrasion. The lifetime of such a body, made of ceramic, was commonly one million welds. By switching to a charcoal arc, however, this lifespan fell below half a million solders. The main reason for this fall, however, was no longer abrasion, but, on the one hand, sparking, which damages the end of the capillary organ, and, on the other hand, carbon deposits, which form inside the duct of this organ.
  • the present invention tends to reduce sparking damage and carbon deposits during the formation of the balls using the carbon arc. It achieves this by coating the opening of the capillary member and at least part of its outer surface with a layer of an electrically conductive material and by connecting this layer to a reference potential. This has the effect of rapidly eliminating the arc discharge current from the capillary organ, avoiding damage due to sparking and the formation of carbon deposits.
  • Fig. 1 is a section of a capillary member, which illustrates the formation of a ball using a discharge generator or an electric arc.
  • Fig. 2 is a section on a larger scale of the end of a capillary, similar to that of FIG. 1, which shows the erosion due to sparking.
  • Fig. 3 is a section similar to that of FIG. 2, which shows how far sparking can wear out the end of a ca unprotected pillar.
  • Fig. 4 is a section similar to that of FIGS. 2 and 3, which illustrates how the arc burns inside a capillary member made of an electrically conductive material.
  • Fig. 5 is a section on a smaller scale of a capillary member, which constitutes the said embodiment.
  • Fig. 1 represents a capillary member 23, of known type, which is made of fine-grained alumina ceramic, containing approximately 99.8% of A1 2 0 3 , of beryllium oxide, of glass, of quartz, of ruby or sapphire polycrystalline, in precious stone of the corundum group, such as ruby or sapphire or in other known materials.
  • the member 23 is fixed to a heating support or to an ultrasonic transducer 24 of a welding machine.
  • a wire 25, preferably made of gold, passes through the central duct of the member 23, which has a frustoconical part 15 and a capillary hole 17.
  • This wire could also be made of another metal, such as aluminum, an aluminum alloy, palladium, copper, a copper alloy.
  • the wire 25 and the support or transducer 24 are earthed 28 by conductors 1, 2, 3.
  • a terminal of the generator 26 is earthed 28 by the conductor 3, while its other terminal is connected to a mobile electrode 27. At rest, the latter is separated from the member 23. When it comes to forming a ball 31, the electrode 27 is brought below the member 23, then brought closer to the latter, but without touching the end 29 of the wire 25, which leaves the member 23. When this electrode has reached the desired position, the generator 26 is activated so as to produce a discharge 30 against the end 29 of the wire 25.
  • the welding face 22 at the end of the member 23 enters normally in contact with the wire 25 and the metal of the envelope output terminals, possibly also with the metallized chip of the chip during welding, a thin metal film 32 is formed on the face 22.
  • the wire 25 is fed through the member 23, it rubs against the frustoconical part 15 of its conduit, which has the effect of producing a thin film 33 of the metal of the wire on this surface 15 of the member 23.
  • the metallic films 32 and 33 offer a path of least resistance to the electric current of the discharge. When the latter occurs, the wire 25 and the ball 31 are strongly electrically charged.
  • a spark or an electric arc 35 then occurs from the ball 31 and / or the wire 25 towards the film 32, as well as at 37, towards the film 33.
  • a spark or an electric arc 36 can also occur directly between the electrode 27 and the film 32.
  • the latter is heated and destroyed.
  • the non-conductive material of the member 23 under this film is also destroyed by each spark, so that this results in a progressive erosion of the chamfer 18.
  • the nature of this erosion is similar to that which is produced in machines. with EDM.
  • Fig. 2 shows the damage 39 caused by sparking on the face 22 of a member 23 similar to that of FIG. 1 and made of non-conductive material.
  • the main erosion normally occurs in the region of the chamfer 18 and in a part of the face 22, shown in broken lines.
  • the chamfer 18 is hollowed out by erosion along the curvature of the ball 31, as is apparent from the eroded area 39.
  • the spark or electric arc 37 (Fig. 1), which occurs where the wire 25 has rubbed against the surface 15, is less intense than that occurring against the face 22.
  • the film 33 is much less important than that which forms on the face 22.
  • the surface 15 is also more distant from the electrode 27 than the face 22.
  • the spark 37 does not erode much the surface 15. However, it produces a burn and consequently a carbon deposit which tends to reduce the diameter of the conduit of the member 23 and ends up hampering the supply of the wire 25 through this conduit.
  • this face becomes a good conductor. Direct sparking of the electrode 27 on this face becomes more important. The erosion then extends to all of this face 22 (shown in broken lines in FIG. 3), which flattens as shown at 42 in this figure.
  • a capillary member made of an electrically conductive material such as tungsten carbide or titanium, such as member 43 of FIG. 4 erosion by sparking of this member occurs mainly in the hole 17, as shown in 44.
  • the electric current seeks the path of least resistance and finds it in this case between the wire 25 and the walls of the hole 17 shown in broken lines in this figure.
  • the resulting erosion therefore produces a widening of the outlet duct 17 of the member 23, which compromises the precision of the positioning of the welding points of the wire 25.
  • Fig. 5 is a diametrical section of a capillary member according to the present invention. It has a body 45 which can be made of one or other of the materials mentioned above. Preferably, however, it will be made of a non-conductive material. This body is coated or plated with a conductive layer 46. In the case of a body 45 made of conductive material, a layer 46 will be chosen whose conductivity is significantly higher than that of the body 45. In general, the thickness of layer 46 does not need to exceed 0.0025 mm. This layer 46 must in particular be thin enough to adhere properly to the body 45, but still thick enough to constitute a good electrical conductor.
  • the part of the layer 46 on the outer surface of the body 45 constitutes a path of low resistance to discharges from the electrode 27 through the part 16 of the layer 46, which covers the frustoconical part of the body 45 and which adjoins the face 22.
  • the current of these discharges is thus conducted without damage to the ground 28 (Fig. 1).
  • the capillary organ of FIG. 5 is intended to replace purely and simply that of FIG. 1.
  • the path of the current coming from the electrode 27 is therefore composed of the layer 46 and of the support or of the ultrasonic transducer 24.
  • the layer 46 consequently attracts the electric discharges far from the face 22 and protects the latter from the erosion.
  • the layer 46 formed inside the body 45 has the same effect on the sparking shown at 37 in FIG. 1.
  • the return to earth of this current from the wire 25 occurs through the part of the layer 46 lining the walls of the capillary duct of the member 45, 46, the part of this layer which covers the face 14 of the body. 45, its part on the external surface of the body 45 and finally the support or the ultrasonic transducer 24 of the welding machine.
  • the carbon deposits on the walls of the capillary organ duct are thus practically eliminated.
  • the layer 46 is applied to all the surfaces of the body 45. However, it would not need to line the walls of the hole 17 nor the welding face 22, comprising the chamfer 18 and the end 20 of the member. capillary, nor the external rounded part 21. As it would be difficult to spare these surfaces during the formation of the layer 46, it is deposited everywhere. Following the first uses of this member, the electrical discharges will have eliminated the coating of the walls of the hole 17 and of the face 22 and exposed the body 45. The layer 46 covering the frusto-conical part 16 which adjoins the face 22 will then act as a lightning rod and will attract electrical discharges away from the face 22.
  • a preferred embodiment of the capillary member according to the invention consists of a body made of fine-grained alumina ceramic, containing 99.8% Al 2 O 3 and a conductive layer of titanium nitride applied to this body.

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Abstract

L'organe capillaire, qui sert, dans les semi-conducteurs, au soudage des fils connectant les pastilles de contact de la puce aux bornes de sortie de son enveloppe, comprend un corps (45) en céramique d'alumine à grains fins, qui est revêtu d'une fine couche (46) de nitrure de titane. Cette couche (46) est bonne conductrice d'électricité; elle est mise à la terre et tient ainsi lieu de paratonnerre en attirant le courant des décharges qui servent à former une boule à l'extrémité du fil passant à travers l'élément (45, 46); elle protège donc cet élément en évitant l'érosion par étincelage de son extrémité (18, 20, 21) et les dépôts charbonneux résultant des brûlures des parois internes de son conduit axial.The capillary member, which is used, in semiconductors, for welding the wires connecting the contact pads of the chip to the output terminals of its envelope, comprises a body (45) of fine-grained alumina ceramic, which is coated with a thin layer (46) of titanium nitride. This layer (46) is a good conductor of electricity; it is earthed and thus acts as a lightning rod by attracting the current of discharges which serve to form a ball at the end of the wire passing through the element (45, 46); it therefore protects this element by preventing spark erosion of its end (18, 20, 21) and the carbon deposits resulting from burns of the internal walls of its axial duct.

Description

La présente invention concerne les organes capillaires servant au soudage des fils qui relient les pastilles de contact d'une puce aux pôles de son enveloppe ou support, et elle a trait à la protection de ces organes contre l'étincelage et les dépôts charbonneux résultant de l'arc électrique.The present invention relates to the capillary organs used for welding the wires which connect the contact pads of a chip to the poles of its envelope or support, and it relates to the protection of these organs against sparking and carbon deposits resulting from the electric arc.

Dans la fabrication des éléments semiconducteurs, il est d'usage courant de loger les puces dans des enveloppes. Les connexions électriques entre une puce et son enveloppe sont réalisées par des fils soudés aux pastilles de contact de la puce et aux bornes de sortie de son enve- loppe. Selon le type d'élément semiconducteur, ces connexions sont faites à l'aide de fils très fins, dont le diamètre, dans les éléments semiconducteurs courants, est de l'ordre de 25 microns. Ce diamètre peut toutfois aller jusqu'à 500 microns dans les éléments de grande puissance. Ces fils de connexion sont généralement en or ou en aluminium. Plusieurs techniques sont connues pour souder un tel fil à une pastille de contact de la puce et à une borne de sortie de son enveloppe. On se limitera ici aux trois types spécifiques de soudage: (1) thermocompression d'une boule d'or lisse et point de soudure, (2) fixation thermosonique d'une boule d'or lisse et point de soudure et (3) fixation thermosonique ou par ultrasons d'une boule d'aluminium lisse et point de soudure. Ces trois techniques bien connues sont décrites dans "Precision 79 Semiconductor Bond- ing Handbook", édité par "Small Precision Tools, Inc., San Rafael, Cali- fornie, USA.In the manufacture of semiconductor elements, it is common practice to house the chips in envelopes. The electrical connections between a chip and its envelope are made by son welded to the contact pads of the chip and to the output of its envelope terminals. Depending on the type of semiconductor element, these connections are made using very fine wires, the diameter of which, in common semiconductor elements, is of the order of 25 microns. This diameter can however go up to 500 microns in high power elements. These connection wires are generally made of gold or aluminum. Several techniques are known for soldering such a wire to a contact pad of the chip and to an output terminal of its envelope. We will limit ourselves here to the three specific types of welding: (1) thermocompression of a smooth gold ball and solder point, (2) thermosonic fixation of a smooth gold ball and solder point and (3) fixation thermosonic or ultrasonic of a smooth aluminum ball and solder point. These three well-known techniques are described in "Precision 79 Semiconductor Bonding Handbook", published by "Small Precision Tools, Inc., San Rafael, California, USA.

. Lors du soudage selon les techniques susmentionnées, le fil, après avoir été soudé à la pastille de contact de la puce et à la borne de sortie de son enveloppe, est cassé au droit de la dernière soudure, puis une boule est formée à son extrémité en vue d'effectuer la connexion suivante.. During welding according to the abovementioned techniques, the wire, after being welded to the contact pad of the chip and to the output terminal of its envelope, is broken in line with the last weld, then a ball is formed at its end for the next connection.

Actuellement, la boule est formée au moyen d'un arc électrique au charbon, comme décrit ci-après. Auparavant, on utilisait l'arc d'hydrogène, plus faible. Avec ce dernier, la principale cause d'usure des organes capillaires était due à l'abrasion. La durée de vie d'un tel organe, fait en céramique, était communément de un million de soudures. En passant à l'arc au charbon, cette durée de vie est toutefois tombée au-dessous d'un demi-million de soudures. La principale raison de cette chute n'a cependant plus été l'abrasion, mais, d'une part, l'étincelage, qui endommage l'extrémité de l'organe capillaire, et, d'autre part, les dépôts charbonneux, qui se forment à l'intérieur du conduit de cet organe.Currently, the ball is formed by means of a charcoal electric arc, as described below. Previously, the weaker hydrogen arc was used. With the latter, the main cause of wear of the capillary organs was due to abrasion. The lifetime of such a body, made of ceramic, was commonly one million welds. By switching to a charcoal arc, however, this lifespan fell below half a million solders. The main reason for this fall, however, was no longer abrasion, but, on the one hand, sparking, which damages the end of the capillary organ, and, on the other hand, carbon deposits, which form inside the duct of this organ.

La présente invention tend à réduire les dommages dus à l'étincelage et les dépôts charbonneux pendant la formation des boules à l'aide de l'arc au charbon. Elle y parvient en revêtant l'ouverture de l'organe capillaire et au moins une partie de sa surface extérieure d'une couche en un matériau conducteur électriquement et en branchant cette couche à un potentiel de référence. Cela a pour effet d'éliminer rapidement de l'organe capillaire le courant de décharge de l'arc, en évitant les dommages dus à l'étincelage ainsi que la formation de dépôts charbonneux.The present invention tends to reduce sparking damage and carbon deposits during the formation of the balls using the carbon arc. It achieves this by coating the opening of the capillary member and at least part of its outer surface with a layer of an electrically conductive material and by connecting this layer to a reference potential. This has the effect of rapidly eliminating the arc discharge current from the capillary organ, avoiding damage due to sparking and the formation of carbon deposits.

Une forme d'exécution de l'arrangement selon l'invention est représentée schématiquement et à simple titre d'exemple au dessin.An embodiment of the arrangement according to the invention is shown schematically and simply by way of example in the drawing.

La Fig. 1 est une coupe d'un organe capillaire, qui illustre la formation d'une boule à l'aide d'un générateur de décharge ou d'un arc électrique.Fig. 1 is a section of a capillary member, which illustrates the formation of a ball using a discharge generator or an electric arc.

La Fig. 2 est une coupe à plus grande échelle de l'extrémité d'un capillaire, semblable à celui de la Fig. 1, qui fait voir l'érosion due à l'étincelage.Fig. 2 is a section on a larger scale of the end of a capillary, similar to that of FIG. 1, which shows the erosion due to sparking.

La Fig. 3 est une coupe semblable à celle de la Fig. 2, qui montre jusqu'à quel point l'étincelage peut user l'extrémité d'un organe capillaire non protégé.Fig. 3 is a section similar to that of FIG. 2, which shows how far sparking can wear out the end of a ca unprotected pillar.

La Fig. 4 est une coupe semblable à celle des Fig. 2 et 3, qui illustre comment l'arc brûle l'intérieur d'un organe capillaire fait en un matériau conducteur électriquement.Fig. 4 is a section similar to that of FIGS. 2 and 3, which illustrates how the arc burns inside a capillary member made of an electrically conductive material.

La Fig. 5 est une coupe à plus petite échelle d'un organe capillaire, qui constitue la dite forme d'exécution.Fig. 5 is a section on a smaller scale of a capillary member, which constitutes the said embodiment.

La Fig. 1 représente un organe capillaire 23, de type connu, qui est fait en céramique d'alumine à grain fin, contenant environ 99,8% de A1203, en oxyde de béryllium, en verre, en quartz, en rubis ou saphir polycristallin, en pierre précieuse du groupe corindon, tel que rubis ou saphir ou en d'autres matériaux connus. L'organe 23 est fixé à un support chauffant ou à un transducteur ultrasonique 24 d'une machine à souder. Un fil 25, de préférence en or, passe à travers le conduit central de l'organe 23, qui présente une partie tronconique 15 et un trou capillaire 17. Ce fil pourrait aussi être fait en un autre métal, tel que l'aluminium, un alliage d'aluminium, le palladium, le cuivre, un alliage de cuivre.Fig. 1 represents a capillary member 23, of known type, which is made of fine-grained alumina ceramic, containing approximately 99.8% of A1 2 0 3 , of beryllium oxide, of glass, of quartz, of ruby or sapphire polycrystalline, in precious stone of the corundum group, such as ruby or sapphire or in other known materials. The member 23 is fixed to a heating support or to an ultrasonic transducer 24 of a welding machine. A wire 25, preferably made of gold, passes through the central duct of the member 23, which has a frustoconical part 15 and a capillary hole 17. This wire could also be made of another metal, such as aluminum, an aluminum alloy, palladium, copper, a copper alloy.

Le fil 25 et le support ou transducteur 24 sont mis à la terre 28 par des conducteurs 1, 2, 3. Un générateur électrique 26 à arc, généralement du type à décharge capacitive, produit des décharges de courant continu à des tensions allant de 700 à 2000 volts. Une borne du générateur 26 est mise à la terre 28 par le conducteur 3, tandis que son autre borne est connectée à une électrode mobile 27. Au repos, cette dernière est écartée de l'organe 23. Lorsqu'il s'agit de former une boule 31, l'électrode 27 est amenée au-dessous de l'organe 23, puis rapprochée de celui-ci, mais sans toucher l'extrémité 29 du fil 25, qui sort de l'organe 23. Quand cette électrode a atteint la position voulue, le générateur 26 est activé de façon à produire une décharge 30 contre l'extrémité 29 du fil 25. La chaleur engendrée par le courant électrique de cette décharge fait fondre cette extrémité 29 du fil 25 au point que le matériel de cette extrémité forme une boule 31 à l'extrémité du fil 25. Dans le dessin, cette extrémité 29 a été représentée en traits interrompus, car elle n'existe plus après que la boule 31 a été formée.The wire 25 and the support or transducer 24 are earthed 28 by conductors 1, 2, 3. An electric arc generator 26, generally of the capacitive discharge type, produces dc discharges at voltages ranging from 700 at 2000 volts. A terminal of the generator 26 is earthed 28 by the conductor 3, while its other terminal is connected to a mobile electrode 27. At rest, the latter is separated from the member 23. When it comes to forming a ball 31, the electrode 27 is brought below the member 23, then brought closer to the latter, but without touching the end 29 of the wire 25, which leaves the member 23. When this electrode has reached the desired position, the generator 26 is activated so as to produce a discharge 30 against the end 29 of the wire 25. The heat generated by the electric current of this discharge melts this end 29 of the wire 25 to the point that the material of this end forms a ball 31 at the end of the wire 25. In the drawing, this end 29 has been shown in broken lines, because it no longer exists after the ball 31 has been formed.

Comme la face de soudage 22 à l'extrémité de l'organe 23 entre normalement en contact avec le fil 25 et le métal des bornes de sortie de l'enveloppe, éventuellement aussi avec la pastille métallisée de la puce pendant le soudage, un mince film métallique 32 se forme sur la face 22. En outre, lorsque le fil 25 est alimenté à travers l'organe 23, il frotte contre la partie tronconique 15 de son conduit, ce qui a pour effet de produire un mince film 33 du métal du fil sur cette surface 15 de l'organe 23. Bien que ce dernier soit fait en matériau non conducteur, les films métalliques 32 et 33 offrent un chemin de moindre résistance au courant électrique de la décharge. Au moment où cette dernière se produit, le fil 25 et la boule 31 sont fortement chargés électriquement. Un étincelage ou un arc électrique 35 se produit alors de la boule 31 et/ou du fil 25 vers le film 32, de même qu'en 37, vers le film 33. Un étincelage ou un arc électrique 36 peuvent aussi se produire directement entre l'électrode 27 et le film 32. A l'endroit où une étincelle atteint le film 32, celui-ci est échauffé et détruit. Le matériau non conducteur de l'organe 23 se trouvant sous ce film est aussi détruit par chaque étincelle, de sorte qu'il en résulte une érosion progressive du chanfrein 18. La nature de cette érosion est semblable à celle qui est produite dans les machines à électro-érosion.As the welding face 22 at the end of the member 23 enters normally in contact with the wire 25 and the metal of the envelope output terminals, possibly also with the metallized chip of the chip during welding, a thin metal film 32 is formed on the face 22. In addition, when the wire 25 is fed through the member 23, it rubs against the frustoconical part 15 of its conduit, which has the effect of producing a thin film 33 of the metal of the wire on this surface 15 of the member 23. Although the latter either made of non-conductive material, the metallic films 32 and 33 offer a path of least resistance to the electric current of the discharge. When the latter occurs, the wire 25 and the ball 31 are strongly electrically charged. A spark or an electric arc 35 then occurs from the ball 31 and / or the wire 25 towards the film 32, as well as at 37, towards the film 33. A spark or an electric arc 36 can also occur directly between the electrode 27 and the film 32. At the place where a spark reaches the film 32, the latter is heated and destroyed. The non-conductive material of the member 23 under this film is also destroyed by each spark, so that this results in a progressive erosion of the chamfer 18. The nature of this erosion is similar to that which is produced in machines. with EDM.

La Fig. 2 montre le dommage 39 causé par l'étincelage à la face 22 d'un organe 23 semblable à celui de la Fig. 1 et fait en matériau non conducteur. L'érosion principale se produit normalement dans la région du chanfrein 18 et dans une partie de la face 22, représentés en traits interrompus. En général, le chanfrein 18 est creusé par l'érosion selon la courbure de la boule 31, ainsi que cela ressort de la zone érodée 39.Fig. 2 shows the damage 39 caused by sparking on the face 22 of a member 23 similar to that of FIG. 1 and made of non-conductive material. The main erosion normally occurs in the region of the chamfer 18 and in a part of the face 22, shown in broken lines. In general, the chamfer 18 is hollowed out by erosion along the curvature of the ball 31, as is apparent from the eroded area 39.

L'étincelage ou l'arc électrique 37 (Fig. 1), qui se produit à l'endroit où le fil 25 a frotté contre la surface 15, est moins intense que celui se produisant contre la face 22. Le film 33 est beaucoup moins important que celui qui se forme sur la face 22. La surface 15 est aussi plus éloignée de l'électrode 27 que la face 22. En général, l'étincelage 37 n'érode pas beaucoup la surface 15. Toutefois, il produit une brûlure et par conséquent un dépôt charbonneux qui tend à réduire le diamètre du conduit de l'organe 23 et finit par entraver l'alimentation du fil 25 à travers ce conduit.The spark or electric arc 37 (Fig. 1), which occurs where the wire 25 has rubbed against the surface 15, is less intense than that occurring against the face 22. The film 33 is much less important than that which forms on the face 22. The surface 15 is also more distant from the electrode 27 than the face 22. In general, the spark 37 does not erode much the surface 15. However, it produces a burn and consequently a carbon deposit which tends to reduce the diameter of the conduit of the member 23 and ends up hampering the supply of the wire 25 through this conduit.

Si le film 32 sur la face 22 est plus important (ce qui peut se produire en effectuant par exemple des soudures sur des circuits imprimés), cette face devient bonne conductrice. L'étincelage direct de l'électrode 27 sur cette face en devient plus important. L'érosion s'étend alors à toute cette face 22 (représentée en traits interrompus dans la Fig. 3), qui s'aplatit comme montré en 42 dans cette figure.If the film 32 on the face 22 is larger (which can happen, for example, by welding on printed circuits mes), this face becomes a good conductor. Direct sparking of the electrode 27 on this face becomes more important. The erosion then extends to all of this face 22 (shown in broken lines in FIG. 3), which flattens as shown at 42 in this figure.

En utilisant un organe capillaire fait en un matériau conducteur électriquement tel que le carbure de tungstène ou de titane, comme l'organe 43 de la Fig. 4, l'érosion par étincelage de cet organe se produit principalement dans le trou 17, comme montré en 44. Le courant électrique cherche le chemin de moindre résistance et le trouve en l'occurrence entre le fil 25 et les parois du trou 17 représenté en traits interrompus dans cette figure. L'érosion qui en résulte produit donc un élargissement du conduit de sortie 17 de l'organe 23, ce qui compromet la précision du positionnement des points de soudage du fil 25.Using a capillary member made of an electrically conductive material such as tungsten carbide or titanium, such as member 43 of FIG. 4, erosion by sparking of this member occurs mainly in the hole 17, as shown in 44. The electric current seeks the path of least resistance and finds it in this case between the wire 25 and the walls of the hole 17 shown in broken lines in this figure. The resulting erosion therefore produces a widening of the outlet duct 17 of the member 23, which compromises the precision of the positioning of the welding points of the wire 25.

La Fig. 5 est une coupe diamétrale d'un organe capillaire selon la présente invention. Il présente un corps 45 qui peut être fait en l'un ou l'autre des matériaux mentionnés ci-dessus. De préférence, il sera fait toutefois en un matériau non conducteur. Ce corps est revêtu ou plaqué d'une couche conductrice 46. Dans le cas d'un corps 45 fait en matériau conducteur, on choisira une couche 46 dont la conductibilité est nettement supérieure à celle du corps 45. En général, l'épaisseur de la couche 46 n'a pas besoin d'excéder 0,0025 mm. Cette couche 46 doit notamment être assez mince pour adhérer convenablement au corps 45, mais tout de même assez épaisse pour constituer un bon conducteur électrique.Fig. 5 is a diametrical section of a capillary member according to the present invention. It has a body 45 which can be made of one or other of the materials mentioned above. Preferably, however, it will be made of a non-conductive material. This body is coated or plated with a conductive layer 46. In the case of a body 45 made of conductive material, a layer 46 will be chosen whose conductivity is significantly higher than that of the body 45. In general, the thickness of layer 46 does not need to exceed 0.0025 mm. This layer 46 must in particular be thin enough to adhere properly to the body 45, but still thick enough to constitute a good electrical conductor.

La partie de la couche 46 sur la surface extérieure du corps 45 constitue un chemin de faible résistance aux décharges en provenance de l'électrode 27 à travers la partie 16 de la couche 46, qui revêt la partie tronconique du corps 45 et qui jouxte la face 22. Le courant de ces décharges est ainsi conduit sans dommage à la terre 28 (Fig. 1).The part of the layer 46 on the outer surface of the body 45 constitutes a path of low resistance to discharges from the electrode 27 through the part 16 of the layer 46, which covers the frustoconical part of the body 45 and which adjoins the face 22. The current of these discharges is thus conducted without damage to the ground 28 (Fig. 1).

Il convient d'observer que l'organe capillaire de la fig. 5 est destiné à se substituer purement et simplement à celui de la Fig. 1. Le chemin du courant provenant de l'électrode 27 est donc composé de la couche 46 et du support ou du transducteur ultrasonique 24. La couche 46 attire par conséquent les décharges électriques loin de la face 22 et protège celle-ci de l'érosion.It should be observed that the capillary organ of FIG. 5 is intended to replace purely and simply that of FIG. 1. The path of the current coming from the electrode 27 is therefore composed of the layer 46 and of the support or of the ultrasonic transducer 24. The layer 46 consequently attracts the electric discharges far from the face 22 and protects the latter from the erosion.

La couche 46 formée à l'intérieur du corps 45 a le même effet sur l'étincelage représenté en 37 dans la Fig. 1. Le retour à la terre de ce courant provenant du fil 25 se produit à travers la partie de la couche 46 garnissant les parois du conduit capillaire de l'organe 45, 46, la partie de cette couche qui revêt la face 14 du corps 45, sa partie sur la surface extérieure du corps 45 et enfin le support ou le transducteur ultrasonique 24 de la machine à souder. Les dépôts charbonneux sur les parois du conduit de l'organe capillaire sont ainsi pratiquement éliminés.The layer 46 formed inside the body 45 has the same effect on the sparking shown at 37 in FIG. 1. The return to earth of this current from the wire 25 occurs through the part of the layer 46 lining the walls of the capillary duct of the member 45, 46, the part of this layer which covers the face 14 of the body. 45, its part on the external surface of the body 45 and finally the support or the ultrasonic transducer 24 of the welding machine. The carbon deposits on the walls of the capillary organ duct are thus practically eliminated.

En pratique, la couche 46 est appliquée sur toutes les surfaces du corps 45. Elle n'aurait toutefois pas besoin de garnir les parois du trou 17 ni la face de soudage 22, comprenant le chanfrein 18 et l'extrémité 20 de l'organe capillaire, ni non plus la partie arrondie externe 21. Comme il serait malaisé d'épargner ces surfaces lors de la formation de la couche 46, celle-ci est déposée partout. A la suite des premières utilisations de cet organe, les décharges électriques auront éliminé le revêtement des parois du trou 17 et de la face 22 et mis le corps 45 à nu. La couche 46 revêtant la partie tronconique 16 qui jouxte la face 22 agira alors comme paratonnerre et attirera les décharges électriques loin de la face 22.In practice, the layer 46 is applied to all the surfaces of the body 45. However, it would not need to line the walls of the hole 17 nor the welding face 22, comprising the chamfer 18 and the end 20 of the member. capillary, nor the external rounded part 21. As it would be difficult to spare these surfaces during the formation of the layer 46, it is deposited everywhere. Following the first uses of this member, the electrical discharges will have eliminated the coating of the walls of the hole 17 and of the face 22 and exposed the body 45. The layer 46 covering the frusto-conical part 16 which adjoins the face 22 will then act as a lightning rod and will attract electrical discharges away from the face 22.

Il suffirait donc en principe de revêtir l'extrémité de la partie tronconique 16 du corps 45 adjacente à la face 22, pourvu que cette partie de revêtement soit mise à la terre, ce qui pourrait être réalisé par d'autres moyens que le support 24.It would therefore suffice in principle to coat the end of the frustoconical part 16 of the body 45 adjacent to the face 22, provided that this coating part is earthed, which could be achieved by other means than the support 24 .

Une réalisation préférée de l'organe capillaire selon l'invention consiste en un corps fait en céramique d'alumine à grains fins, contenant 99,8% de Al203 et en une couche conductrice de nitrure de titane appliquée sur ce corps.A preferred embodiment of the capillary member according to the invention consists of a body made of fine-grained alumina ceramic, containing 99.8% Al 2 O 3 and a conductive layer of titanium nitride applied to this body.

Claims (7)

1. Agencement pour protéger contre l'étincelage un organe capillaire servant au soudage des fils dans un semi-conducteur, caractérisé - en ce que l'organe capillaire comprend un corps (45) fait en matière dure et présentant un conduit axial le traversant de part en part - et en ce qu'une couche (46), consistant en un matériau dont la conductibilité électrique est nettement supérieure à celle du dit corps (45), est déposée sur au moins une partie de la surface extérieure (16) de ce corps. 1. Arrangement for protecting against capillary action a capillary member used for welding the wires in a semiconductor, characterized - in that the capillary member comprises a body (45) made of hard material and having an axial duct passing right through it - And in that a layer (46), consisting of a material whose electrical conductivity is significantly higher than that of said body (45), is deposited on at least part of the outer surface (16) of this body. 2. Agencement selon la revendication 1,
caractérisé
en ce que pour assurer l'adhérence de la dite couche (46) au dit corps (45), celle-ci a une épaisseur juste suffisante pour constituer un bon conducteur d'électricité.2. Arrangement according to claim 1,
characterized
in that to ensure the adhesion of said layer (46) to said body (45), it has a thickness just sufficient to constitute a good conductor of electricity. 3. Agencement selon la revendication 2,
caractérisé
en ce que l'épaisseur de la dite couche (46) est de l'ordre de 0,0025 mm.3. Arrangement according to claim 2,
characterized
in that the thickness of said layer (46) is of the order of 0.0025 mm. 4. Agencement selon la revendication 1, 2 ou 3,
caractérisé
en ce qu'il comprend des moyens (24) reliant la dite couche (46) à un potentiel de référence.4. Arrangement according to claim 1, 2 or 3,
characterized
in that it comprises means (24) connecting said layer (46) to a reference potential. 5. Agencement selon la revendication 1, 2, 3 ou 4,
caractérisé
en ce que le dit corps (45) est fait en un matériau non conducteur.5. Arrangement according to claim 1, 2, 3 or 4,
characterized
in that said body (45) is made of a non-conductive material. 6. Agencement selon la revendication 1, 2, 3 ou 4
caractérisé - en ce que le dit corps (45) est fait en céramique d'alumine à grains fins - et en ce que la dite couche (46) est composée de nitrure de titane. 6. Arrangement according to claim 1, 2, 3 or 4
characterized - in that said body (45) is made of fine-grained alumina ceramic - And in that said layer (46) is composed of titanium nitride. 7. Agencement selon l'une ou l'autre des revendications précédentes, caractérisé - en ce que le conduit axial du dit corps (45) présente une section cylindrique (17) à chacune de ses extrémités, ces deux sections cylindriques étant raccordées l'une à l'autre par une section médiane tronconique (15) - et en ce que la surface extérieure de ce corps présente une section cylindrique à laquelle une section tronconique (16) fait suite, cette dernière étant terminée par une face arrondie (18, 20, 21). 7. Arrangement according to either of the preceding claims, characterized - in that the axial duct of said body (45) has a cylindrical section (17) at each of its ends, these two cylindrical sections being connected to each other by a frustoconical middle section (15) - And in that the outer surface of this body has a cylindrical section to which a frustoconical section (16) follows, the latter being terminated by a rounded face (18, 20, 21).
EP84810001A 1983-01-03 1984-01-03 Arrangement for protecting a capillar part serving to weld wires in a semiconductor element against sparking Expired EP0116010B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT84810001T ATE33354T1 (en) 1983-01-03 1984-01-03 ARRANGEMENT FOR PROTECTION AGAINST SPARKS OF A CAPILLARY PART USED FOR WELDING WIRES IN A SEMICONDUCTOR ELEMENT.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/455,038 US4513190A (en) 1983-01-03 1983-01-03 Protection of semiconductor wire bonding capillary from spark erosion
US455038 1983-01-03

Publications (3)

Publication Number Publication Date
EP0116010A2 true EP0116010A2 (en) 1984-08-15
EP0116010A3 EP0116010A3 (en) 1986-04-16
EP0116010B1 EP0116010B1 (en) 1988-04-06

Family

ID=23807116

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84810001A Expired EP0116010B1 (en) 1983-01-03 1984-01-03 Arrangement for protecting a capillar part serving to weld wires in a semiconductor element against sparking

Country Status (5)

Country Link
US (1) US4513190A (en)
EP (1) EP0116010B1 (en)
JP (1) JPS59135738A (en)
AT (1) ATE33354T1 (en)
DE (1) DE3470290D1 (en)

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EP0417468A1 (en) * 1989-09-11 1991-03-20 Aluminum Company Of America Welding apparatus coated with spatter-resistant and electrically conductive film
WO2008005684A3 (en) * 2006-07-03 2008-05-29 Kulicke & Soffa Ind Inc Bonding tool with improved finish

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US5147082A (en) * 1987-08-17 1992-09-15 Siemens Aktiengesellschaft Tool configuration for ultrasonic welding
EP0417468A1 (en) * 1989-09-11 1991-03-20 Aluminum Company Of America Welding apparatus coated with spatter-resistant and electrically conductive film
WO2008005684A3 (en) * 2006-07-03 2008-05-29 Kulicke & Soffa Ind Inc Bonding tool with improved finish

Also Published As

Publication number Publication date
ATE33354T1 (en) 1988-04-15
DE3470290D1 (en) 1988-05-11
US4513190A (en) 1985-04-23
EP0116010B1 (en) 1988-04-06
JPS59135738A (en) 1984-08-04
EP0116010A3 (en) 1986-04-16

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