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EP0053784A1 - Cryostat combiné avec une machine frigorifique - Google Patents

Cryostat combiné avec une machine frigorifique Download PDF

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Publication number
EP0053784A1
EP0053784A1 EP81110025A EP81110025A EP0053784A1 EP 0053784 A1 EP0053784 A1 EP 0053784A1 EP 81110025 A EP81110025 A EP 81110025A EP 81110025 A EP81110025 A EP 81110025A EP 0053784 A1 EP0053784 A1 EP 0053784A1
Authority
EP
European Patent Office
Prior art keywords
stage
refrigerator
pump
cold head
pump surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP81110025A
Other languages
German (de)
English (en)
Other versions
EP0053784B1 (fr
Inventor
Hans-Joachim Dr. Forth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of EP0053784A1 publication Critical patent/EP0053784A1/fr
Application granted granted Critical
Publication of EP0053784B1 publication Critical patent/EP0053784B1/fr
Expired legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Definitions

  • a Refrigerator cryostat 1 selected with a two-stage refrigerator which is housed in a housing.
  • Known drive devices for the refrigerator cold head are accommodated in the lower part 3 of the housing in a manner not shown in detail. They are supplied with power via the connecting cable 4.
  • the connecting pieces 5 and 6 are also provided for the supply and discharge of the working gas.
  • the lower housing part carries a temperature display 7 for the temperature of the second stage.
  • the actual two-stage cold head 10 of the refrigerator is located in the housing parts 8 and 13.
  • the first stage 9 of the cold head 10 of the refrigerator is located in the middle housing part, designated 8.
  • the embodiment is shown as a section.
  • the cylindrical sections 11 and 12 of the cold head 10 of the refrigerator are visible, in which the displacers of the first and second stages of the two-stage refrigerator are located.
  • the upper part 13 of the cryostat housing is shown closed again.
  • the second stage of the refrigerator is located in this area, on which the sample is held in a manner that is not known and is known per se.
  • the housing part 13 is provided with removable windows 14, so that the sample can be observed on the one hand.
  • the visible first stage 9 of the refrigerator has a flange 16 on which a further flange 17 is fastened, which carries a cylindrical shield 18 for the sample.
  • the first stage 9 of the refrigerator is equipped with a pump surface 19, which consists essentially of a cylindrically shaped copper sheet, which is also fastened to the flange 16 via four bent tabs 20, so that there is good thermal contact with the first stage.
  • the pump surface 19 is on its outside highly nickel-plated and covered with several grams of activated carbon on the inside towards the first stage. When the first stage is cooled, the outside of the sheet serves as a cryocondensation pump and the inside serves as a cryosorption pump.
  • the first stage 9 of the refrigerator is additionally equipped with a heating sleeve 21. This heating is only switched on when it is necessary to regenerate the sorption surfaces.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP81110025A 1980-12-10 1981-12-01 Cryostat combiné avec une machine frigorifique Expired EP0053784B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3046458 1980-12-10
DE19803046458 DE3046458A1 (de) 1980-12-10 1980-12-10 Refrigerator-kryostat

Publications (2)

Publication Number Publication Date
EP0053784A1 true EP0053784A1 (fr) 1982-06-16
EP0053784B1 EP0053784B1 (fr) 1984-08-08

Family

ID=6118758

Family Applications (1)

Application Number Title Priority Date Filing Date
EP81110025A Expired EP0053784B1 (fr) 1980-12-10 1981-12-01 Cryostat combiné avec une machine frigorifique

Country Status (3)

Country Link
US (1) US4408469A (fr)
EP (1) EP0053784B1 (fr)
DE (1) DE3046458A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2572794A1 (fr) * 1984-11-06 1986-05-09 Commissariat Energie Atomique Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee
WO1988005500A1 (fr) * 1987-01-27 1988-07-28 Helix Technology Corporation Cryopompe a etagement optimal
US5001903A (en) * 1987-01-27 1991-03-26 Helix Technology Corporation Optimally staged cryopump
FR2674578A1 (fr) * 1988-11-09 1992-10-02 Mitsubishi Electric Corp Pompe cryogenique comportant un dispositif de refrigeration du type a accumulation du froid a etages multiples.
US5251456A (en) * 1988-11-09 1993-10-12 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
US5293752A (en) * 1988-11-09 1994-03-15 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
WO1995011381A1 (fr) * 1993-10-22 1995-04-27 Leybold Aktiengesellschaft Procede d'exploitation d'une pompe cryogenique et systeme de pompes a vide comprenant une pompe cryogenique et une pompe a vide preliminaire
EP2646692B1 (fr) 2010-11-30 2016-06-15 GE Energy Power Conversion Technology Ltd Procédés et systèmes pour maintenir un vide poussé dans une enceinte à vide

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4719938A (en) * 1985-01-22 1988-01-19 Helix Technology Corporation Self-cleaning valve and cryopump utilizing the same
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
DE3836884C2 (de) * 1988-10-29 1997-10-02 Leybold Ag Verfahren zur Untersuchung einer auf dem Kaltkopf eines Kryostaten befindlichen Probe und Refrigerator-Kryostat
US5144805A (en) * 1988-11-09 1992-09-08 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
DE3936914C2 (de) * 1988-11-09 1996-06-27 Mitsubishi Electric Corp Mehrstufige Gaskältemaschine
DE3943640C2 (de) * 1988-11-09 1996-02-22 Mitsubishi Electric Corp Mehrstufige Gaskältemaschine
US5144810A (en) * 1988-11-09 1992-09-08 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
USD323895S (en) 1989-04-13 1992-02-11 Lifecell Corporation Cryo slammer for cooling tissue samples
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
USD342792S (en) 1991-01-29 1993-12-28 Charm Sciences, Inc. Microbial test machine for sequentially timed heating, cooling and incubation of test samples
US5857342A (en) * 1998-02-10 1999-01-12 Superconductor Technologies, Inc. Temperature controlling cryogenic package system
US7293426B2 (en) * 2004-10-05 2007-11-13 Washington University Apparatus for freezing a biological sample
US20110283737A1 (en) * 2010-05-20 2011-11-24 Siemens Medical Solutions Usa, Inc. Process for separating gases at cryogenic temperatures

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus
DE1963969A1 (de) * 1968-12-27 1970-07-09 Air Liquide Vorrichtung zur Sorption bei tiefer Temperatur
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
DE2536005A1 (de) * 1975-08-13 1977-02-24 Eckhard Kellner Hochvakuum-pumpensystem
FR2391376A1 (fr) * 1977-05-16 1978-12-15 Air Prod & Chem Appareil de pompage cryoscopique
FR2396879A1 (fr) * 1977-07-05 1979-02-02 Air Liquide Cryopompe
DE2912856A1 (de) * 1978-04-18 1979-10-31 Balzers Hochvakuum Kryopumpe
DE2830943A1 (de) * 1978-07-14 1980-01-24 Leybold Heraeus Gmbh & Co Kg Sorptionsvakuumpumpe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2736491C2 (de) * 1977-08-12 1986-04-30 Linde Ag, 6200 Wiesbaden Verfahren zum Evakuieren eines Vakuumbehälters für eine Verflüssigungsanlage für tiefsiedende Gase
US4143520A (en) * 1977-12-23 1979-03-13 The United States Of America As Represented By The Secretary Of The Navy Cryogenic refrigeration system
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus
DE1963969A1 (de) * 1968-12-27 1970-07-09 Air Liquide Vorrichtung zur Sorption bei tiefer Temperatur
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
DE2536005A1 (de) * 1975-08-13 1977-02-24 Eckhard Kellner Hochvakuum-pumpensystem
FR2391376A1 (fr) * 1977-05-16 1978-12-15 Air Prod & Chem Appareil de pompage cryoscopique
FR2396879A1 (fr) * 1977-07-05 1979-02-02 Air Liquide Cryopompe
DE2912856A1 (de) * 1978-04-18 1979-10-31 Balzers Hochvakuum Kryopumpe
DE2830943A1 (de) * 1978-07-14 1980-01-24 Leybold Heraeus Gmbh & Co Kg Sorptionsvakuumpumpe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2572794A1 (fr) * 1984-11-06 1986-05-09 Commissariat Energie Atomique Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee
WO1988005500A1 (fr) * 1987-01-27 1988-07-28 Helix Technology Corporation Cryopompe a etagement optimal
US5001903A (en) * 1987-01-27 1991-03-26 Helix Technology Corporation Optimally staged cryopump
FR2674578A1 (fr) * 1988-11-09 1992-10-02 Mitsubishi Electric Corp Pompe cryogenique comportant un dispositif de refrigeration du type a accumulation du froid a etages multiples.
US5251456A (en) * 1988-11-09 1993-10-12 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
US5293752A (en) * 1988-11-09 1994-03-15 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
US5293749A (en) * 1988-11-09 1994-03-15 Mitsubishi Denki Kabushiki Kaisha Multi-stage cold accumulation type refrigerator and cooling device including the same
WO1995011381A1 (fr) * 1993-10-22 1995-04-27 Leybold Aktiengesellschaft Procede d'exploitation d'une pompe cryogenique et systeme de pompes a vide comprenant une pompe cryogenique et une pompe a vide preliminaire
EP2646692B1 (fr) 2010-11-30 2016-06-15 GE Energy Power Conversion Technology Ltd Procédés et systèmes pour maintenir un vide poussé dans une enceinte à vide

Also Published As

Publication number Publication date
DE3046458A1 (de) 1982-07-15
EP0053784B1 (fr) 1984-08-08
US4408469A (en) 1983-10-11

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