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DE2212977A1 - Plasma generator - using multiphase ac supply - Google Patents

Plasma generator - using multiphase ac supply

Info

Publication number
DE2212977A1
DE2212977A1 DE19722212977 DE2212977A DE2212977A1 DE 2212977 A1 DE2212977 A1 DE 2212977A1 DE 19722212977 DE19722212977 DE 19722212977 DE 2212977 A DE2212977 A DE 2212977A DE 2212977 A1 DE2212977 A1 DE 2212977A1
Authority
DE
Germany
Prior art keywords
electrodes
electrode
plasma
individual
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722212977
Other languages
German (de)
Inventor
Erich Dipl-Phys Dr Kranz
Wolfgang Dipl-Phys Dr Rother
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PETROLCHEMISCHES KOMBINAT
Original Assignee
PETROLCHEMISCHES KOMBINAT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PETROLCHEMISCHES KOMBINAT filed Critical PETROLCHEMISCHES KOMBINAT
Publication of DE2212977A1 publication Critical patent/DE2212977A1/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/18—Heating by arc discharge
    • H05B7/185—Heating gases for arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)

Abstract

Plasma generator, partic for the production of plasma for chemical reactions or for gas heating, with directly or indirectly cooled, mutually insulated, annular electrodes arranged side by side or one above the other along the same axis, comprises a generator in which the electrical energy for the plasma generating arcs is provided by connecting each electrode to multiphase, partic. six-phase, current, with the exception of the current required for the spark generators which provide the necessary repeated striking of the arc, the phases being connected to the electrodes in the same order as the direction of rotation of the electromagnetic field, and the working gas being injected tangentially between the electrodes and the plasma leaving at one or both ends of the system.

Description

Aufstellung der verwendeten Bezugezeichen List of the reference symbols used

1 1 Elektrode 2 Lichtbogen 3 Transformator (Spannungsquelle) 4 Vorwiderstand 5 elektrische Leitungen 6 elektrische Spulen 7 Abschiusskappe 8 Einblasoeffnungen fuer Betribsgas 9 Hochfrequenzerzeuger 10 Hochfrequenz-Entladungsstrecke 11 Plasma - Ausstroemoeffnung 12 Plasma 13 innerste Elektrode 24 der Abschlusskappe benachbarte Elektrode 15 Lichtbogenansatzstelie R, S, , Drehstromphasen1 1 electrode 2 arc 3 transformer (voltage source) 4 series resistor 5 electrical lines 6 electrical coils 7 closing cap 8 injection openings for operating gas 9 high-frequency generator 10 high-frequency discharge section 11 plasma - Ausstroemoeffnung 12 plasma 13 innermost electrode 24 adjacent to the end cap Electrode 15 arc attachment point R, S,, three-phase current

Claims (2)

PatentanspruecheClaims 1. Plasmaerzeuger insbesondere fuer die Zwecke der Plas chemie und der Gaserhitzung nit direkt oder indirekt gekuehlten, ringfoermigen, auf gleicher Mittenachase neben- oder uebereinander augeordneten, von einander elektrisch isolierten Elektroden dadurch gekennzeich net, dass zur Zufuhr elektrischer Energie fuer die d Plasma erzeugenden Lichtboegen (2) mit Ausnahme des Zuend- und Wiederzuendvorganges jede Elektrode (1) a schliesslich an vor einem geeigenten Transformator ( oder einer anderen Spannungsquelle (3) erzeugten Meh phasenstrom, insbesondere Sechsphasenstrom, mit oder ohne zwischengeschalteten Vorwiderstaenden (4) mitte in Stern- oder Dreieckschaltung angeschlossenen elek trischen Leitungen (5) angeschaltet ist, dass die im drehsinn des elektromagnetischen Feldes aufeinander folgenden Phasen R, S, T, ... in bekannter Weise in gleicher Folge an benachbarte Elektroden (1) angeschlossen sind, dass konzentrisch um eine Elektrode ( meherere Elektroden (1) oder jede Elektrode (1) elektr sche Spulen (6) mit oder ohne direkt fluessigkeitsgekuehelten elektrischen Leitern angeordnet und zwischen der Spannungsquelle (3) und den Elektroden (1) se geschaltet sind, dass der durch die einzelne Spule (6) fliessende elektrische Strom auch durch die konzentrisch zu ihr angeordnete Elektrode (1) fliesst, dass eine der Beiden aeusseren Elektroden (1), durch die je ein Plasmastrahl ausströemen kann, an ihrem aeusseren Ende durch eine Abschlusskappe (7) geschlossen ist, dass zwischen den einzelnen Elektroden (1) und zwischen der aeusseren Elektrode (1) und der Abschlusskappe (7) tangential zu den Lichtboegen (2) mehrere jeweils um einen Lichtbogenquerschnit angeordnete Einblasoeffnungen (8) in bekannter Weise fuer Betriebsgas, insbensondere Wasserstoff oder ein Wassertstoff-Stickstoff-Gemisch, angebracht sind, dass di. einzelnen Elektroden unterschiedliche Laenge besitzen, so dass die aeussersten, die Ausstroemoeffnungen (11) des Plasmas (12) aus dem gesamten Plasmaerzeuger bildenden Elektroden (1) am laengsten, die innerste Elektrode (13) oder der Abschlusskanne (7) benachbarte Elektrode (14) am kuerzesten ausgefuehert ist, dass die einzelnen Elektrodenlaengen entsprechend den angewendenten Elektrodenlochdurchmessern, elektrischen Leistungen. Betriebsgasarten und den Betriebgasdurchsaetzen durch die einzelen Einblasoeffnungen (8) zur Bewengung der einzelnen Lichtboegenansatzstellen (15) innerhalb der einzelnen Elektrodenbohrungen in geeigneter Weise abgestuft sind.1. Plasma generator in particular for the purposes of plas chemistry and the gas heating with directly or indirectly cooled, ring-shaped, on the same Central achase arranged next to or one above the other, electrically isolated from one another Electrodes characterized in that the supply of electrical energy for the d plasma-generating arcs (2) with the exception of the ignition and restart process each electrode (1) a finally in front of a suitable transformer (or a other voltage source (3) generated multi-phase current, in particular six-phase current, with or without intermediate series resistors (4) in the middle in star or delta connection connected electrical lines (5) is switched on so that the direction of rotation of the electromagnetic field successive phases R, S, T, ... in known Way in the same sequence to adjacent electrodes (1) are connected that concentrically around an electrode (several electrodes (1) or each electrode (1) electrical cal Coils (6) arranged with or without direct liquid-cooled electrical conductors and between the voltage source (3) and the electrodes (1) se are connected, that the electrical current flowing through the individual coil (6) also through the Electrode (1) arranged concentrically to it flows so that one of the two flows outside Electrodes (1), through each of which a plasma jet can flow, on the outside End is closed by an end cap (7) that between each Electrodes (1) and between the outer electrode (1) and the end cap (7) tangential to the arcs (2) several each around an arc cross-section arranged injection openings (8) in a known manner for operating gas, in particular hydrogen or a mixture of hydrogen and nitrogen are appropriate, that di. individual electrodes have different lengths, so that the outermost, forming the outflow openings (11) of the plasma (12) from the entire plasma generator Electrodes (1) the longest, the innermost electrode (13) or the jug (7) adjacent electrode (14) is the shortest that the individual Electrode lengths according to the applied electrode hole diameters, electrical Services. Operating gas types and the operating gas throughput through the individual injection openings (8) to move the individual arc attachment points (15) within the individual Electrode holes are stepped in a suitable manner. 2. Plasmaerzeuger nach Anspruch 1, dadurch gekennzeichnet, ass zur erstmaligen Zuladung oder zur scheren Wiederzuendung der einzelnen Lichtboegen (2) zwischen mindestens zwei benachbarten oder nicht benachbarten Elektroden (1) von einem geeigneten Hochfrequenzerzeuger (9) oder von mehreren geeigneten Hochfrequenzerzeugern (9) erzeugte Hochfrequenzentladungsstrecke (10) angedornet sind.2. Plasma generator according to claim 1, characterized in that ass for initial loading or for shearing re-ignition of the individual arcs (2) between at least two adjacent or non-adjacent electrodes (1) of a suitable high-frequency generator (9) or several suitable high-frequency generators (9) generated high-frequency discharge path (10) are angedornet.
DE19722212977 1971-04-15 1972-03-17 Plasma generator - using multiphase ac supply Pending DE2212977A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD154481A DD95058A1 (en) 1971-04-15 1971-04-15

Publications (1)

Publication Number Publication Date
DE2212977A1 true DE2212977A1 (en) 1972-10-19

Family

ID=5483715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722212977 Pending DE2212977A1 (en) 1971-04-15 1972-03-17 Plasma generator - using multiphase ac supply

Country Status (4)

Country Link
BE (1) BE780366A (en)
CS (1) CS152411B2 (en)
DD (1) DD95058A1 (en)
DE (1) DE2212977A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device
AT389027B (en) * 1983-03-15 1989-10-10 Skf Steel Eng Ab DEVICE FOR ELECTRICALLY HEATING GASES

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device
AT389027B (en) * 1983-03-15 1989-10-10 Skf Steel Eng Ab DEVICE FOR ELECTRICALLY HEATING GASES

Also Published As

Publication number Publication date
BE780366A (en) 1972-07-03
CS152411B2 (en) 1973-12-19
DD95058A1 (en) 1973-01-12

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