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CN114716707A - Polyimide film, copper sheet laminate and circuit substrate - Google Patents

Polyimide film, copper sheet laminate and circuit substrate Download PDF

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Publication number
CN114716707A
CN114716707A CN202210504040.4A CN202210504040A CN114716707A CN 114716707 A CN114716707 A CN 114716707A CN 202210504040 A CN202210504040 A CN 202210504040A CN 114716707 A CN114716707 A CN 114716707A
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mol
residue
diamine
weight
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CN114716707B (en
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安藤智典
西山哲平
须藤芳树
森亮
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Nippon Steel Chemical and Materials Co Ltd
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Nippon Steel and Sumikin Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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    • B32B7/02Physical, chemical or physicochemical properties
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    • B32B7/04Interconnection of layers
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    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
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    • H05K1/0313Organic insulating material
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    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
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    • B32LAYERED PRODUCTS
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    • B32B2270/00Resin or rubber layer containing a blend of at least two different polymers
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    • B32LAYERED PRODUCTS
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    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
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    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
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Abstract

一种具有非热塑性聚酰亚胺层的聚酰亚胺膜、铜张层叠板及电路基板,构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺优选为相对于四羧酸残基的100摩尔份而合计包含80摩尔份以上的由3,3',4,4'‑联苯四羧酸二酐(BPDA)所衍生的BPDA残基及由1,4‑亚苯基双(偏苯三甲酸单酯)二酐(TAHQ)所衍生的TAHQ残基中的至少一种以及由均苯四甲酸二酐(PMDA)所衍生的PMDA残基及由2,3,6,7‑萘四羧酸二酐(NTCDA)所衍生的NTCDA残基中的至少一种,且优选为介电正切(Df)为0.004以下。通过以特定的酸酐作为原料来形成非热塑性聚酰亚胺层,可实现作为基质树脂层的物性的确保及低吸湿率化的并存,且可实现低介电正切化。A polyimide film, a copper sheet laminate and a circuit substrate having a non-thermoplastic polyimide layer, the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is preferably relative to tetracarboxylic acid residues. 100 parts by mole and 80 parts by mole or more of BPDA residues derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,4-phenylene bis(partial) At least one of TAHQ residues derived from trimellitic acid monoester) dianhydride (TAHQ) and PMDA residues derived from pyromellitic dianhydride (PMDA) and 2,3,6,7-naphthalene At least one of the NTCDA residues derived from tetracarboxylic dianhydride (NTCDA) preferably has a dielectric tangent (Df) of 0.004 or less. By forming the non-thermoplastic polyimide layer using a specific acid anhydride as a raw material, the physical properties as a matrix resin layer can be ensured and the moisture absorption rate can be reduced, and the dielectric tangent can be reduced.

Description

聚酰亚胺膜、铜张层叠板及电路基板Polyimide film, copper sheet laminate and circuit substrate

本发明是2017年09月11日所提出的申请号为201780059180.2、发明名称为《聚酰亚胺膜、铜张层叠板及电路基板》的发明专利申请的分案申请。The present invention is a divisional application for an invention patent application filed on September 11, 2017 with the application number of 201780059180.2 and the invention name of "polyimide film, copper sheet laminate and circuit substrate".

相关申请的交叉引用CROSS-REFERENCE TO RELATED APPLICATIONS

本申请主张基于2016年9月29日提出申请的日本专利申请2016-191786号、2016年9月29日提出申请的日本专利申请2016-191787号、2016年12月28日提出申请的日本专利申请2016-256927号及2016年12月28日提出申请的日本专利申请2016-256928号的优先权,且将所述申请的全部内容引用至本申请中。This application claims based on Japanese Patent Application No. 2016-191786 filed on September 29, 2016, Japanese Patent Application No. 2016-191787 filed on September 29, 2016, and Japanese Patent Application filed on December 28, 2016 Priority is given to Japanese Patent Application No. 2016-256928 filed on December 28, 2016 and Japanese Patent Application No. 2016-256928 filed on December 28, 2016, and the entire contents of the applications are incorporated herein by reference.

技术领域technical field

本发明涉及一种聚酰亚胺膜、铜张层叠板及电路基板。The invention relates to a polyimide film, a copper sheet laminate and a circuit substrate.

背景技术Background technique

近年来,伴随着电子设备的小型化、轻量化、省空间化的进展,对于薄且轻量、具有可挠性并且即便反复弯曲也具有优异的耐久性的挠性印刷配线板(挠性印刷电路板(Flexible Printed Circuits,FPC))的需要增大。关于FPC,即便在有限的空间也可实现立体性且高密度的安装,因此例如在硬式磁盘机(Hard Disk Drive,HDD)、数字影音光盘(Digital Video Disk,DVD)、智能手机等电子设备的可动部分的配线、或者电缆、连接器等零件中其用途逐渐扩大。In recent years, with the progress of miniaturization, weight reduction, and space saving of electronic devices, flexible printed wiring boards (flexible printed wiring boards (flexible printed wiring boards) that are thin and lightweight, have flexibility, and have excellent durability even if they are repeatedly bent have been developed. The demand for printed circuit boards (Flexible Printed Circuits, FPC) is increasing. As for FPC, three-dimensional and high-density installation can be realized even in a limited space. Therefore, for example, in electronic devices such as Hard Disk Drive (HDD), Digital Video Disk (DVD), and smart phones. Its use is gradually expanding in the wiring of moving parts, or parts such as cables and connectors.

除了所述高密度化以外,设备的高性能化得到推进,因此也需要对于传输信号的高频化的应对。在传输高频信号时,在信号的传输路径的传输损失大的情况下,会产生电信号的损耗或信号的推迟时间变长等不良情况。因此,FPC的传输损失的减少变得重要。为了应对高频化,使用将以低介电常数、低介电正切为特征的液晶聚合物作为介电层的FPC。然而,液晶聚合物虽介电特性优异,但耐热性或与金属箔的接着性存在改善的余地。In addition to the above-mentioned densification, the performance of equipment has been advanced, and accordingly, it is also necessary to cope with the increase in the frequency of transmission signals. When a high-frequency signal is transmitted, when the transmission loss of the signal transmission path is large, problems such as loss of an electrical signal and a longer delay time of the signal occur. Therefore, reduction of the transmission loss of the FPC becomes important. In order to cope with the increase in frequency, FPCs using liquid crystal polymers characterized by low dielectric constant and low dielectric tangent as dielectric layers are used. However, although liquid crystal polymers are excellent in dielectric properties, there is room for improvement in heat resistance and adhesion to metal foils.

为了改善耐热性或接着性,提出了使聚酰亚胺为绝缘层的金属张层叠板(专利文献1)。根据专利文献1可知通常通过高分子材料的单体使用脂肪族系单体而介电常数下降,使用脂肪族(链状)四羧酸二酐而获得的聚酰亚胺的耐热性显著低,因此无法供于焊接等加工而在实用上存在问题,但若使用脂环族四羧酸二酐,则与链状四羧酸二酐相比可获得耐热性提高的聚酰亚胺。然而,关于由所述聚酰亚胺形成的聚酰亚胺膜,虽然10GHz下的介电常数为3.2以下,但介电正切超过0.01,介电特性尚不充分。另外,关于使用所述脂肪族单体的聚酰亚胺,存在如下课题:线膨胀系数大者多、聚酰亚胺膜的尺寸变化率大、或者阻燃性下降。In order to improve heat resistance or adhesiveness, a metal sheet laminate in which polyimide is used as an insulating layer has been proposed (Patent Document 1). According to Patent Document 1, it is found that the dielectric constant is generally lowered by using an aliphatic monomer as a monomer of a polymer material, and the heat resistance of a polyimide obtained by using an aliphatic (chain) tetracarboxylic dianhydride is remarkably low. Therefore, it cannot be used for processing such as welding, and there is a problem in practice, but when an alicyclic tetracarboxylic dianhydride is used, a polyimide having improved heat resistance can be obtained compared with a chain tetracarboxylic dianhydride. However, in the polyimide film formed of the polyimide, although the dielectric constant at 10 GHz is 3.2 or less, the dielectric tangent exceeds 0.01, and the dielectric properties are still insufficient. Moreover, regarding the polyimide using the said aliphatic monomer, there exists a problem that the linear expansion coefficient is large, the dimensional change rate of a polyimide film is large, or flame retardance falls.

现有技术文献prior art literature

专利文献Patent Literature

专利文献1:日本专利特开2004-358961号公报Patent Document 1: Japanese Patent Laid-Open No. 2004-358961

发明内容SUMMARY OF THE INVENTION

发明所要解决的问题The problem to be solved by the invention

本发明的目的在于提供一种聚酰亚胺膜,其尺寸稳定性高且具有低吸湿性,并且可通过使绝缘层的介电正切小而减少传输损失,并可优选地用于高频用电路基板。An object of the present invention is to provide a polyimide film which has high dimensional stability and low hygroscopicity, and which can reduce transmission loss by making the dielectric tangent of an insulating layer small, and which can be preferably used for high-frequency applications circuit board.

解决问题的技术手段technical solutions to problems

本发明人等人进行了努力研究,结果发现在电路基板中,关于主要承担控制尺寸变化率的功能的非热塑性聚酰亚胺层,进而关于视需要承担与铜箔的接着的功能的热塑性聚酰亚胺层,通过选择作为聚酰亚胺的原料的单体,可实现确保作为电路基板的必要的尺寸稳定性、以及通过控制聚酰亚胺的有序性(结晶性)所带来的低吸湿率化及低介电正切化,从而完成了本发明。As a result of diligent research conducted by the present inventors, it was found that in the circuit board, the non-thermoplastic polyimide layer mainly responsible for the function of controlling the dimensional change rate, and the thermoplastic polyimide layer, which has the function of adhering to the copper foil as necessary, In the imide layer, by selecting the monomer as the raw material of the polyimide, it is possible to ensure the necessary dimensional stability as a circuit board, and to control the order (crystallinity) of the polyimide. The present invention has been completed by lowering the moisture absorption rate and lowering the dielectric tangent.

即,本发明的第1观点的聚酰亚胺膜是在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一面具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层的聚酰亚胺膜。That is, the polyimide film of the first aspect of the present invention is a polyimide film having a thermoplastic polyimide layer including a thermoplastic polyimide on at least one surface of a non-thermoplastic polyimide layer including a non-thermoplastic polyimide. imide film.

而且,本发明的第1观点的聚酰亚胺膜满足下述条件(a-i)~条件(a-iv)。And the polyimide film of the 1st viewpoint of this invention satisfies the following condition (a-i) - condition (a-iv).

(a-i)构成所述非热塑性聚酰亚胺层的非热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,且(a-i) the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer comprises a tetracarboxylic acid residue and a diamine residue, and

相对于所述四羧酸残基的100摩尔份,With respect to 100 mole parts of the tetracarboxylic acid residue,

由3,3',4,4'-联苯四羧酸二酐(3,3',4,4'-biphenyl tetracarboxylicdianhydride,BPDA)所衍生的四羧酸残基(BPDA残基)及由1,4-亚苯基双(偏苯三甲酸单酯)二酐(1,4-phenylene bis(trimellitic acid monoester)dianhydride,TAHQ)所衍生的四羧酸残基(TAHQ残基)中的至少一种以及由均苯四甲酸二酐(pyromellitic dianhydride,PMDA)所衍生的四羧酸残基(PMDA残基)及2,3,6,7-萘四羧酸二酐(2,3,6,7-naphthalenetetracarboxylic dianhydride,NTCDA)所衍生的四羧酸残基(NTCDA残基)中的至少一种的合计为80摩尔份以上,Tetracarboxylic acid residues (BPDA residues) derived from 3,3',4,4'-biphenyl tetracarboxylic dianhydride (3,3',4,4'-biphenyl tetracarboxylicdianhydride, BPDA) and 1 At least one of the tetracarboxylic acid residues (TAHQ residues) derived from ,4-phenylene bis(trimellitic acid monoester) dianhydride (1,4-phenylene bis(trimellitic acid monoester) dianhydride, TAHQ) and tetracarboxylic acid residues (PMDA residues) derived from pyromellitic dianhydride (PMDA) and 2,3,6,7-naphthalenetetracarboxylic dianhydride (2,3,6, 7-naphthalenetetracarboxylic dianhydride, NTCDA) derived at least one of the tetracarboxylic acid residues (NTCDA residues) in total is 80 mole parts or more,

所述BPDA残基及所述TAHQ残基中的至少一种、与所述PMDA残基及所述NTCDA残基中的至少一种的摩尔比{(BPDA残基+TAHQ残基)/(PMDA残基+NTCDA残基)}处于0.6~1.3的范围内。Molar ratio of at least one of the BPDA residue and the TAHQ residue to at least one of the PMDA residue and the NTCDA residue {(BPDA residue+TAHQ residue)/(PMDA residue + NTCDA residue)} in the range of 0.6 to 1.3.

(a-ii)构成所述热塑性聚酰亚胺层的热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,且相对于所述二胺残基的100摩尔份,(a-ii) The thermoplastic polyimide constituting the thermoplastic polyimide layer contains a tetracarboxylic acid residue and a diamine residue, and is based on 100 mole parts of the diamine residue,

由选自下述通式(B1)~通式(B7)表示的二胺化合物中的至少一种二胺化合物所衍生的二胺残基为70摩尔份以上,且由下述通式(A1)表示的二胺化合物所衍生的二胺残基为1摩尔份以上且30摩尔份以下的范围内。The amount of diamine residues derived from at least one diamine compound selected from the group consisting of diamine compounds represented by the following general formula (B1) to (B7) is 70 mole parts or more, and the amount of the diamine residue derived from the following general formula (A1 The amount of the diamine residue derived from the diamine compound represented by ) is in the range of 1 part by mol or more and 30 parts by mol or less.

(a-iii)热膨胀系数为10ppm/K~30ppm/K的范围内。(a-iii) The thermal expansion coefficient is in the range of 10 ppm/K to 30 ppm/K.

(a-iv)10GHz下的介电正切(Dissipation factor,Df)为0.004以下。(a-iv) The dielectric tangent (Dissipation factor, Df) at 10 GHz is 0.004 or less.

[化1][hua 1]

Figure BDA0003636631740000031
Figure BDA0003636631740000031

[式(B1)~式(B7)中,R1独立地表示碳数1~6的一价烃基或烷氧基,连结基A独立地表示选自-O-、-S-、-CO-、-SO-、-SO2-、-COO-、-CH2-、-C(CH3)2-、-NH-或-CONH-中的二价基,n1独立地表示0~4的整数。其中,自式(B3)中去除与式(B2)重复者,自式(B5)中去除与式(B4)重复者][In formula (B1) to formula (B7), R 1 independently represents a monovalent hydrocarbon group or alkoxy group having 1 to 6 carbon atoms, and the linking group A independently represents a group selected from -O-, -S-, -CO- A divalent group among , -SO-, -SO 2 -, -COO-, -CH 2 -, -C(CH 3 ) 2 -, -NH- or -CONH-, n 1 independently represents 0-4 Integer. Among them, from the formula (B3), remove the duplicate with the formula (B2), from the formula (B5) remove the duplicate with the formula (B4)]

[化2][hua 2]

Figure BDA0003636631740000032
Figure BDA0003636631740000032

式(A1)中,连结基X表示单键或-COO-,Y独立地表示氢、碳数1~3的一价烃基或烷氧基,n表示0~2的整数,p及q独立地表示0~4的整数。In formula (A1), the linking group X represents a single bond or -COO-, Y independently represents hydrogen, a monovalent hydrocarbon group having 1 to 3 carbon atoms or an alkoxy group, n represents an integer of 0 to 2, and p and q independently Indicates an integer from 0 to 4.

关于本发明的第1观点的聚酰亚胺膜,相对于构成所述非热塑性聚酰亚胺层的非热塑性聚酰亚胺中的二胺残基的100摩尔份,由所述通式(A1)表示的二胺化合物所衍生的二胺残基可为80摩尔份以上。Regarding the polyimide film of the first aspect of the present invention, the general formula ( The diamine residue derived from the diamine compound represented by A1) may be 80 mole parts or more.

本发明的第1观点的聚酰亚胺膜亦可为:相对于构成所述热塑性聚酰亚胺层的热塑性聚酰亚胺中的所述二胺残基的100摩尔份,由选自所述通式(B1)~通式(B7)表示的二胺化合物中的至少一种二胺化合物所衍生的二胺残基为为70摩尔份以上且99摩尔份以下的范围内。The polyimide film of the first aspect of the present invention may be selected from the group consisting of 100 mol parts of the diamine residue in the thermoplastic polyimide constituting the thermoplastic polyimide layer. The amount of the diamine residue derived from at least one of the diamine compounds represented by the general formula (B1) to (B7) is within a range of 70 mol parts or more and 99 mol parts or less.

本发明的第2观点的聚酰亚胺膜是在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一面具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层的聚酰亚胺膜。The polyimide film of the second aspect of the present invention is a polyimide having a thermoplastic polyimide layer containing thermoplastic polyimide on at least one surface of a non-thermoplastic polyimide layer containing non-thermoplastic polyimide Amine film.

而且,本发明的第2观点的聚酰亚胺膜满足下述条件(b-i)~条件(b-iv)。Furthermore, the polyimide film of the second aspect of the present invention satisfies the following conditions (b-i) to (b-iv).

(b-i)热膨胀系数为10ppm/K~30ppm/K的范围内。(b-i) The thermal expansion coefficient is in the range of 10 ppm/K to 30 ppm/K.

(b-ii)构成所述非热塑性聚酰亚胺层的非热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,且(b-ii) the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer comprises a tetracarboxylic acid residue and a diamine residue, and

相对于所述四羧酸残基的100摩尔份,With respect to 100 mole parts of the tetracarboxylic acid residue,

由选自3,3',4,4'-联苯四羧酸二酐(BPDA)及1,4-亚苯基双(偏苯三甲酸单酯)二酐(TAHQ)中的至少一种四羧酸二酐所衍生的四羧酸残基为30摩尔份以上且60摩尔份以下的范围内,At least one selected from 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,4-phenylene bis(trimellitic acid monoester) dianhydride (TAHQ) The tetracarboxylic acid residue derived from tetracarboxylic dianhydride is in the range of 30 mole parts or more and 60 mole parts or less,

由均苯四甲酸二酐(PMDA)所衍生的四羧酸残基为40摩尔份以上且70摩尔份以下的范围内。The tetracarboxylic acid residue derived from pyromellitic dianhydride (PMDA) is in the range of 40 mole parts or more and 70 mole parts or less.

(b-iii)相对于构成所述非热塑性聚酰亚胺层的非热塑性聚酰亚胺中的二胺残基的100摩尔份,(b-iii) with respect to 100 mole parts of diamine residues in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer,

由下述通式(A1)表示的二胺化合物所衍生的二胺残基为80摩尔份以上。The amount of the diamine residue derived from the diamine compound represented by the following general formula (A1) is 80 mole parts or more.

(b-iv)构成所述热塑性聚酰亚胺层的热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,且相对于所述二胺残基的100摩尔份,(b-iv) The thermoplastic polyimide constituting the thermoplastic polyimide layer contains a tetracarboxylic acid residue and a diamine residue, and relative to 100 mole parts of the diamine residue,

由选自下述通式(B1)~通式(B7)表示的二胺化合物中的至少一种二胺化合物所衍生的二胺残基为70摩尔份以上且99摩尔份以下的范围内,The amount of the diamine residue derived from at least one diamine compound selected from the group consisting of diamine compounds represented by the following general formula (B1) to (B7) is in the range of 70 mole parts or more and 99 mole parts or less,

由下述通式(A1)表示的二胺化合物所衍生的二胺残基为1摩尔份以上且30摩尔份以下的范围内。The diamine residue derived from the diamine compound represented by the following general formula (A1) is in the range of 1 part by mol or more and 30 parts by mol or less.

[化3][hua 3]

Figure BDA0003636631740000041
Figure BDA0003636631740000041

[式(A1)中,连结基X表示单键或-COO-,Y独立地表示氢、碳数1~3的一价烃基或烷氧基,n表示0~2的整数,p及q独立地表示0~4的整数][In formula (A1), the linking group X represents a single bond or -COO-, Y independently represents hydrogen, a monovalent hydrocarbon group having 1 to 3 carbon atoms or an alkoxy group, n represents an integer of 0 to 2, and p and q independently ground represents an integer from 0 to 4]

[化4][hua 4]

Figure BDA0003636631740000051
Figure BDA0003636631740000051

[式(B1)~式(B7)中,R1独立地表示碳数1~6的一价烃基或烷氧基,连结基A独立地表示选自-O-、-S-、-CO-、-SO-、-SO2-、-COO-、-CH2-、-C(CH3)2-、-NH-或-CONH-中的二价基,n1独立地表示0~4的整数。其中,自式(B3)中去除与式(B2)重复者,自式(B5)中去除与式(B4)重复者][In formula (B1) to formula (B7), R 1 independently represents a monovalent hydrocarbon group or alkoxy group having 1 to 6 carbon atoms, and the linking group A independently represents a group selected from -O-, -S-, -CO- A divalent group among , -SO-, -SO 2 -, -COO-, -CH 2 -, -C(CH 3 ) 2 -, -NH- or -CONH-, n 1 independently represents 0-4 Integer. Among them, from the formula (B3), remove the duplicate with the formula (B2), from the formula (B5) remove the duplicate with the formula (B4)]

本发明的第1观点或第2观点的聚酰亚胺膜亦可为:所述非热塑性聚酰亚胺及所述热塑性聚酰亚胺的酰亚胺基浓度均为33重量%以下。In the polyimide film of the first aspect or the second aspect of the present invention, the imide group concentration of both the non-thermoplastic polyimide and the thermoplastic polyimide may be 33% by weight or less.

本发明的第3观点的聚酰亚胺膜是具有至少一层非热塑性聚酰亚胺层的聚酰亚胺膜,且所述聚酰亚胺膜满足下述条件(c-i)~条件(c-iii)。The polyimide film of the third aspect of the present invention is a polyimide film having at least one non-thermoplastic polyimide layer, and the polyimide film satisfies the following conditions (c-i) to (c) -iii).

(c-i)构成所述非热塑性聚酰亚胺层的非热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,且(c-i) the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer comprises a tetracarboxylic acid residue and a diamine residue, and

相对于所述四羧酸残基的100摩尔份,在30摩尔份~60摩尔份的范围内含有由3,3',4,4'-联苯四羧酸二酐(BPDA)及1,4-亚苯基双(偏苯三甲酸单酯)二酐(TAHQ)中的至少一种所衍生的四羧酸残基,在40摩尔份~70摩尔份的范围内含有由均苯四甲酸二酐(PMDA)及2,3,6,7-萘四羧酸二酐(NTCDA)中的至少一种所衍生的四羧酸残基,Contains 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) in a range of 30 to 60 mole parts relative to 100 mole parts of the tetracarboxylic acid residue. A tetracarboxylic acid residue derived from at least one of 4-phenylene bis(trimellitic acid monoester) dianhydride (TAHQ), containing pyromellitic acid in a range of 40 to 70 mole parts A tetracarboxylic acid residue derived from at least one of dianhydride (PMDA) and 2,3,6,7-naphthalenetetracarboxylic dianhydride (NTCDA),

相对于所述二胺残基的100摩尔份,含有70摩尔份以上的由下述通式(A1)表示的二胺化合物所衍生的二胺残基,且在2摩尔份~15摩尔份的范围内含有由下述通式(C1)~通式(C4)表示的二胺化合物所衍生的二胺残基。The diamine residue derived from the diamine compound represented by the following general formula (A1) is contained in 70 mol parts or more with respect to 100 mol parts of the diamine residue, and is contained in 2 mol parts to 15 mol parts The diamine residue derived from the diamine compound represented by following general formula (C1) - general formula (C4) is contained in the range.

(c-ii)玻璃化温度为300℃以上。(c-ii) The glass transition temperature is 300°C or higher.

(c-iii)10GHz下的介电正切(Df)为0.004以下。(c-iii) The dielectric tangent (Df) at 10 GHz is 0.004 or less.

[化5][hua 5]

Figure BDA0003636631740000061
Figure BDA0003636631740000061

[式(A1)中,连结基X表示单键或-COO-,Y独立地表示氢、碳数1~3的一价烃基或烷氧基,n表示1或2的整数,p及q独立地表示0~4的整数][In formula (A1), the linking group X represents a single bond or -COO-, Y independently represents hydrogen, a monovalent hydrocarbon group having 1 to 3 carbon atoms or an alkoxy group, n represents an integer of 1 or 2, and p and q independently ground represents an integer from 0 to 4]

[化6][hua 6]

Figure BDA0003636631740000071
Figure BDA0003636631740000071

[式(C1)~式(C4)中,R2独立地表示碳数1~6的一价烃基、烷氧基或烷硫基,连结基A’独立地表示选自-O-、-SO2-、-CH2-或-C(CH3)2-中的二价基,连结基X1独立地表示-CH2-、-O-CH2-O-、-O-C2H4-O-、-O-C3H6-O-、-O-C4H8-O-、-O-C5H10-O-、-O-CH2-C(CH3)2-CH2-O-、-C(CH3)2-、-C(CF3)2-或-SO2-,n3独立地表示1~4的整数,n4独立地表示0~4的整数,但在式(C3)中,连结基A’不含-CH2-、-C(CH3)2-、-C(CF3)2-或-SO2-的情况下,n4的任一者为1以上][In formula (C1) to formula (C4), R 2 independently represents a monovalent hydrocarbon group, alkoxy group or alkylthio group having 1 to 6 carbon atoms, and the linking group A' independently represents a group selected from -O-, -SO A divalent group in 2 -, -CH 2 - or -C(CH 3 ) 2 -, and the linking group X1 independently represents -CH 2 -, -O-CH 2 -O-, -OC 2 H 4 -O- , -OC 3 H 6 -O-, -OC 4 H 8 -O-, -OC 5 H 10 -O-, -O-CH 2 -C(CH 3 ) 2 -CH 2 -O-, -C ( CH 3 ) 2 -, -C(CF 3 ) 2 - or -SO 2 -, n 3 independently represents an integer of 1 to 4, and n 4 independently represents an integer of 0 to 4, but in formula (C3), When the linking group A' does not contain -CH 2 -, -C(CH 3 ) 2 -, -C(CF 3 ) 2 - or -SO 2 -, any one of n 4 is 1 or more]

本发明的第1观点、第2观点或第3观点的铜张层叠板具备绝缘层,并且在所述绝缘层的至少一个面具备铜箔,且所述铜张层叠板的所述绝缘层包含所述任一观点所述的聚酰亚胺膜。The copper sheet laminate of the first aspect, the second aspect, or the third aspect of the present invention includes an insulating layer, and copper foil is provided on at least one surface of the insulating layer, and the insulating layer of the copper sheet laminate includes The polyimide film according to any one of the above viewpoints.

本发明的第1观点、第2观点或第3观点的电路基板是将所述铜张层叠板的铜箔加工成配线而成者。The circuit board of the 1st viewpoint, the 2nd viewpoint or the 3rd viewpoint of this invention is what processed the copper foil of the said copper sheet laminated board into wiring.

发明的效果effect of invention

本发明的第1观点~第3观点的聚酰亚胺膜通过以特定的酸酐作为原料来形成非热塑性聚酰亚胺层,可实现作为基质树脂层的物性的确保及低吸湿率化的并存,且可实现低介电正切化。The polyimide films of the first to third aspects of the present invention can achieve the coexistence of ensuring physical properties as a matrix resin layer and reducing moisture absorption by forming a non-thermoplastic polyimide layer using a specific acid anhydride as a raw material , and can achieve low dielectric tangent.

另外,本发明的第1观点或第2观点的聚酰亚胺膜可通过利用导入了特定的二胺化合物的热塑性聚酰亚胺形成热塑性聚酰亚胺层而实现低吸湿率化及低介电正切化。而且,关于将两树脂层组合的多层膜,吸湿性及介电正切低,且铜箔的热压接后的尺寸稳定性也优异。In addition, the polyimide film of the first aspect or the second aspect of the present invention can realize low moisture absorption and low dielectric by forming a thermoplastic polyimide layer using a thermoplastic polyimide into which a specific diamine compound is introduced. Electrical tangentization. Moreover, about the multilayer film combining two resin layers, moisture absorption and dielectric tangent are low, and the dimensional stability after thermocompression bonding of copper foil is also excellent.

因此,通过利用本发明的聚酰亚胺膜及使用其的铜张层叠板来作为FPC材料,可在电路基板中实现可靠性与良率的提高,例如也可应用于传输10GHz以上的高频信号的电路基板等中。Therefore, by using the polyimide film of the present invention and the copper sheet laminate using the same as the FPC material, it is possible to improve the reliability and yield in the circuit board, for example, it can also be applied to the transmission of high frequencies above 10 GHz signal circuit boards, etc.

具体实施方式Detailed ways

其次,对本发明的实施方式进行说明。Next, embodiments of the present invention will be described.

[聚酰亚胺膜][Polyimide film]

本发明的第1实施方式的聚酰亚胺膜是在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一面具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层,且满足所述条件(a-i)~条件(a-iv)者。The polyimide film of the first embodiment of the present invention has a thermoplastic polyimide layer containing thermoplastic polyimide on at least one surface of a non-thermoplastic polyimide layer containing non-thermoplastic polyimide, and satisfies The above conditions (a-i) to conditions (a-iv).

另外,本发明的第2实施方式的聚酰亚胺膜是在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一面具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层,且满足所述条件(b-i)~条件(b-iv)者。Moreover, the polyimide film of 2nd Embodiment of this invention has a thermoplastic polyimide layer containing thermoplastic polyimide on at least one surface of a non-thermoplastic polyimide layer containing non-thermoplastic polyimide, And those that satisfy the above-mentioned conditions (b-i) to (b-iv).

再者,第1实施方式或第2实施方式中,热塑性聚酰亚胺层设置于非热塑性聚酰亚胺层的单面或两面。例如,在层叠第1实施方式或第2实施方式的聚酰亚胺膜与铜箔而制成铜张层叠板的情况下,铜箔可层叠于热塑性聚酰亚胺层的面上。于在非热塑性聚酰亚胺层的两侧具有热塑性聚酰亚胺层的情况下,只要其中一侧的热塑性聚酰亚胺层满足所述条件(a-ii)或条件(b-iv)即可,但优选为两侧的热塑性聚酰亚胺层均满足所述条件(a-ii)或条件(b-iv)。In addition, in 1st Embodiment or 2nd Embodiment, a thermoplastic polyimide layer is provided in the single side|surface or both surfaces of a non-thermoplastic polyimide layer. For example, when laminating|stacking the polyimide film and copper foil of 1st Embodiment or 2nd Embodiment, and making a copper sheet laminated board, a copper foil can be laminated|stacked on the surface of a thermoplastic polyimide layer. In the case of having thermoplastic polyimide layers on both sides of the non-thermoplastic polyimide layer, as long as the thermoplastic polyimide layer on one side satisfies the condition (a-ii) or condition (b-iv) That is, but it is preferable that the thermoplastic polyimide layers on both sides satisfy the above-mentioned condition (a-ii) or condition (b-iv).

另外,本发明的第3实施方式的聚酰亚胺膜是具有至少一层包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层,且满足所述条件(c-i)~条件(c-iii)者。In addition, the polyimide film of the third embodiment of the present invention has at least one non-thermoplastic polyimide layer containing a non-thermoplastic polyimide, and satisfies the above-mentioned conditions (c-i) to (c-iii) )By.

以下,关于第1实施方式~第3实施方式,对共通的方面汇总进行说明,对不同的方面分别进行说明。Hereinafter, regarding the first to third embodiments, the common points will be collectively described, and the different points will be described separately.

所谓“非热塑性聚酰亚胺”通常是即便进行加热也不会显示出软化、接着性的聚酰亚胺,但在本发明中是指使用动态粘弹性测定装置(动态机械分析仪(Dynamic MechanicalAnalysis,DMA))而测定的30℃下的储存弹性系数为1.0×109Pa以上、280℃下的储存弹性系数为3.0×108Pa以上的聚酰亚胺。The term "non-thermoplastic polyimide" is usually a polyimide that does not show softening and adhesiveness even when heated, but in the present invention, refers to the use of a dynamic viscoelasticity measuring device (Dynamic Mechanical Analysis). , DMA)), the storage elastic modulus at 30°C is 1.0×10 9 Pa or more, and the storage elastic modulus at 280°C is 3.0×10 8 Pa or more.

另外,所谓“热塑性聚酰亚胺”通常是可明确确认玻璃化温度(glass transitiontemperature,Tg)的聚酰亚胺,但在本发明中是指使用DMA而测定的30℃下的储存弹性系数为1.0×109Pa以上、280℃下的储存弹性系数为未满3.0×108Pa的聚酰亚胺。In addition, the "thermoplastic polyimide" is usually a polyimide whose glass transition temperature (Tg) can be clearly confirmed, but in the present invention, it means that the storage elastic coefficient at 30° C. measured using DMA is: A polyimide whose storage elastic modulus at 280° C. is 1.0×10 9 Pa or more and less than 3.0×10 8 Pa.

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜中,非热塑性聚酰亚胺层的树脂成分优选为包含非热塑性聚酰亚胺,第1实施方式或第2实施方式中,热塑性聚酰亚胺层的树脂成分优选为包含热塑性聚酰亚胺。另外,非热塑性聚酰亚胺层构成低热膨胀性的聚酰亚胺层,热塑性聚酰亚胺层构成高热膨胀性的聚酰亚胺层。此处,低热膨胀性的聚酰亚胺层是指热膨胀系数(Coefficient of Thermal Expansion,CTE)优选为1ppm/K以上且25ppm/K以下的范围内、更优选为3ppm/K以上且25ppm/K以下的范围内的聚酰亚胺层。另外,高热膨胀性的聚酰亚胺层是指CTE优选为35ppm/K以上、更优选为35ppm/K以上且80ppm/K以下的范围内、进而优选为35ppm/K以上且70ppm/K以下的范围内的聚酰亚胺层。聚酰亚胺层可通过适当变更所使用的原料的组合、厚度、干燥·硬化条件而制成具有所需的CTE的聚酰亚胺层。In the polyimide film of the first embodiment, the second embodiment, or the third embodiment, the resin component of the non-thermoplastic polyimide layer preferably contains a non-thermoplastic polyimide, and the first embodiment or the second embodiment In the form, the resin component of the thermoplastic polyimide layer preferably contains thermoplastic polyimide. In addition, the non-thermoplastic polyimide layer constitutes a low thermal expansion polyimide layer, and the thermoplastic polyimide layer constitutes a high thermal expansion polyimide layer. Here, the low thermal expansion polyimide layer means that the thermal expansion coefficient (Coefficient of Thermal Expansion, CTE) is preferably in the range of 1 ppm/K or more and 25 ppm/K or less, more preferably 3 ppm/K or more and 25 ppm/K The polyimide layer in the following range. In addition, the polyimide layer with high thermal expansion refers to one whose CTE is preferably 35 ppm/K or more, more preferably 35 ppm/K or more and 80 ppm/K or less, and still more preferably 35 ppm/K or more and 70 ppm/K or less. range of polyimide layers. The polyimide layer can be a polyimide layer having a desired CTE by appropriately changing the combination of the raw materials used, the thickness, and drying and curing conditions.

通常聚酰亚胺可通过使四羧酸二酐与二胺化合物在溶媒中反应且在生成聚酰胺酸后进行加热闭环而加以制造。例如,使大致等摩尔的四羧酸二酐与二胺化合物溶解于有机溶媒中,在0℃~100℃的范围内的温度下进行30分钟~24小时搅拌而进行聚合反应,由此可获得作为聚酰亚胺前体的聚酰胺酸。在反应时,以所生成的前体在有机溶媒中成为5重量%~30重量%的范围内、更优选为10重量%~20重量%的范围内的方式溶解反应成分。作为聚合反应中使用的有机溶媒,例如可列举:N,N-二甲基甲酰胺(N,N-dimethylformamide,DMF)、N,N-二甲基乙酰胺(N,N-dimethyl acetamide,DMAc)、N,N-二乙基乙酰胺、N-甲基-2-吡咯烷酮(N-methyl-2-pyrrolidone,NMP)、2-丁酮、二甲基亚砜(Dimethylsulfoxide,DMSO)、六甲基磷酰胺、N-甲基己内酰胺、硫酸二甲酯、环己酮、二噁烷、四氢呋喃、二甘醇二甲醚(diglyme)、三甘醇二甲醚、甲酚等。也可将这些溶媒并用使用两种以上,进而也可并用如二甲苯、甲苯那样的芳香族烃。另外,作为所述有机溶媒的使用量,并无特别限制,但优选为调整为通过聚合反应而获得的聚酰胺酸溶液的浓度成为5重量%~30重量%左右的使用量而加以使用。Usually a polyimide can be manufactured by making a tetracarboxylic dianhydride and a diamine compound react in a solvent, and heating ring-closure after generating a polyamic acid. For example, it can be obtained by dissolving approximately equimolar amounts of tetracarboxylic dianhydride and diamine compound in an organic solvent, and stirring at a temperature in the range of 0°C to 100°C for 30 minutes to 24 hours to carry out the polymerization reaction. Polyamic acid as a polyimide precursor. During the reaction, the reaction components are dissolved so that the produced precursor is in the range of 5% by weight to 30% by weight, more preferably in the range of 10% by weight to 20% by weight, in the organic solvent. As the organic solvent used in the polymerization reaction, for example, N,N-dimethylformamide (N,N-dimethylformamide, DMF), N,N-dimethylacetamide (N,N-dimethylacetamide, DMAc) can be mentioned. ), N,N-diethylacetamide, N-methyl-2-pyrrolidone (N-methyl-2-pyrrolidone, NMP), 2-butanone, dimethylsulfoxide (DMSO), hexamethylene phosphoramide, N-methylcaprolactam, dimethyl sulfate, cyclohexanone, dioxane, tetrahydrofuran, diglyme, triglyme, cresol and the like. Two or more of these solvents may be used in combination, and aromatic hydrocarbons such as xylene and toluene may be used in combination. Moreover, although the usage-amount of the said organic solvent is not specifically limited, It is preferable to adjust and use so that the density|concentration of the polyamic acid solution obtained by a polymerization reaction may become about 5 weight% - 30weight%.

所合成的聚酰胺酸通常有利的是作为反应溶媒溶液而使用,但可视需要进行浓缩、稀释或置换为其他有机溶媒。另外,聚酰胺酸通常溶媒可溶性优异,因此可有利地使用。聚酰胺酸的溶液的粘度优选为500cps~100,000cps的范围内。若脱离所述范围,则在利用涂布机等进行的涂敷作业时膜容易发生厚度偏差、条纹等不良情况。使聚酰胺酸酰亚胺化的方法并无特别限制,例如可优选地采用在所述溶媒中在80℃~400℃的范围内的温度条件下花1小时~24小时进行加热的热处理。The synthesized polyamic acid is usually advantageously used as a reaction solvent solution, but can be concentrated, diluted or replaced with other organic solvents as necessary. Moreover, since polyamic acid is generally excellent in solvent solubility, it can be used advantageously. The viscosity of the solution of the polyamic acid is preferably in the range of 500 cps to 100,000 cps. When it deviates from the said range, in the coating operation by a coater etc., the film becomes easy to generate|occur|produce troubles, such as thickness deviation and a streak. The method in particular of imidizing a polyamic acid is not restrict|limited, For example, the heat processing of heating under the temperature conditions in the range of 80 degreeC - 400 degreeC in the said solvent for 1 hour - 24 hours can be preferably used.

聚酰亚胺是对所述聚酰胺酸进行酰亚胺化而成者,且是使特定的酸酐与二胺化合物反应而加以制造,因此通过对酸酐与二胺化合物进行说明,第1实施方式、第2实施方式或第3实施方式的非热塑性聚酰亚胺及第1实施方式或第2实施方式的热塑性聚酰亚胺的具体例得以理解。The polyimide is obtained by imidizing the above-mentioned polyamic acid, and is produced by reacting a specific acid anhydride and a diamine compound. Therefore, the first embodiment will be described by describing the acid anhydride and the diamine compound. , Specific examples of the non-thermoplastic polyimide of the second embodiment or the third embodiment and the thermoplastic polyimide of the first embodiment or the second embodiment can be understood.

<非热塑性聚酰亚胺><Non-thermoplastic polyimide>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜中,构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺为包含四羧酸残基及二胺残基者。再者,本发明中,所谓四羧酸残基表示由四羧酸二酐所衍生的四价基,所谓二胺残基表示由二胺化合物所衍生的二价基。第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜优选为包含由芳香族四羧酸二酐所衍生的芳香族四羧酸残基及由芳香族二胺所衍生的芳香族二胺残基。In the polyimide film of the first embodiment, the second embodiment, or the third embodiment, the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer contains a tetracarboxylic acid residue and a diamine residue . In addition, in the present invention, the term "tetracarboxylic acid residue" refers to a tetravalent group derived from tetracarboxylic dianhydride, and the term "diamine residue" refers to a divalent group derived from a diamine compound. The polyimide film of the first embodiment, the second embodiment, or the third embodiment preferably contains an aromatic tetracarboxylic acid residue derived from an aromatic tetracarboxylic dianhydride and an aromatic diamine derived Aromatic diamine residues.

(四羧酸残基)(tetracarboxylic acid residue)

第1实施方式、第2实施方式或第3实施方式中,含有由3,3',4,4'-联苯四羧酸二酐(BPDA)及1,4-亚苯基双(偏苯三甲酸单酯)二酐(TAHQ)中的至少一种所衍生的四羧酸残基以及由均苯四甲酸二酐(PMDA)及2,3,6,7-萘四羧酸二酐(NTCDA)中的至少一种所衍生的四羧酸残基作为构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺中所含的四羧酸残基。In the first embodiment, the second embodiment, or the third embodiment, the mixture is composed of 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA) and 1,4-phenylenebis(trimene) A tetracarboxylic acid residue derived from at least one of tricarboxylic acid monoester) dianhydride (TAHQ) and a tetracarboxylic acid residue derived from pyromellitic acid dianhydride (PMDA) and 2,3,6,7-naphthalenetetracarboxylic dianhydride ( The tetracarboxylic acid residue derived from at least one of NTCDA) is used as the tetracarboxylic acid residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer.

由BPDA所衍生的四羧酸残基(以下,也称为“BPDA残基”)及由TAHQ所衍生的四羧酸残基(以下,也称为“TAHQ残基”)容易形成聚合物的有序结构,可通过抑制分子的运动而使介电正切或吸湿性下降。但是,另一方面,BPDA残基可赋予作为聚酰亚胺前体的聚酰胺酸的凝胶膜的自支持性,但出现使酰亚胺化后的CTE增大且使玻璃化温度降低并使耐热性下降的倾向。Tetracarboxylic acid residues derived from BPDA (hereinafter, also referred to as "BPDA residues") and tetracarboxylic acid residues derived from TAHQ (hereinafter also referred to as "TAHQ residues") tend to form polymers. The ordered structure can reduce the dielectric tangent or hygroscopicity by inhibiting the movement of molecules. However, on the other hand, BPDA residues can impart self-supporting properties to the gel film of polyamic acid, which is a polyimide precursor, but appear to increase the CTE after imidization and lower the glass transition temperature and cause problems. Tendency to decrease heat resistance.

就所述观点而言,第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜以构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺相对于四羧酸残基的100摩尔份而在合计优选为30摩尔份以上且60摩尔份以下的范围内、更优选为40摩尔份以上且50摩尔份以下的范围内含有BPDA残基及TAHQ残基的方式进行控制。若BPDA残基及TAHQ残基的合计未满30摩尔份,则聚合物的有序结构的形成变得不充分,耐吸湿性下降,或者介电正切的减少变得不充分,若超过60摩尔份,则除了CTE的增加或面内延迟(RO)的变化量的增大以外,有耐热性下降之虞。From this viewpoint, the polyimide film of the first embodiment, the second embodiment, or the third embodiment is the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer with respect to the tetracarboxylic acid residue. 100 mol parts of BPDA residues and TAHQ residues are contained in a total of preferably 30 mol parts or more and 60 mol parts or less, more preferably 40 mol parts or more and 50 mol parts or less. If the total of BPDA residues and TAHQ residues is less than 30 mol parts, the formation of the ordered structure of the polymer becomes insufficient, the moisture absorption resistance decreases, or the dielectric tangent decreases insufficiently. If it exceeds 60 mol parts In addition to an increase in CTE or an increase in the amount of change in in-plane retardation (RO), there is a possibility that the heat resistance may decrease.

另外,由均苯四甲酸二酐所衍生的四羧酸残基(以下,也称为“PMDA残基”)及由2,3,6,7-萘四羧酸二酐所衍生的四羧酸残基(以下,也称为“NTCDA残基”)具有刚直性,因此是提高面内取向性、较低地抑制CTE且承担RO的控制、或者玻璃化温度的控制的作用的残基。另一方面,PMDA残基由于分子量小,因此若其量变得过多,则聚合物的酰亚胺基浓度变高,极性基增加而吸湿性变大,由于分子链内部的水分的影响而介电正切增加。另外,NTCDA残基出现因刚直性高的萘骨架而膜容易变脆且使弹性系数增大的倾向。In addition, a tetracarboxylic acid residue (hereinafter, also referred to as "PMDA residue") derived from pyromellitic dianhydride and a tetracarboxylic acid derived from 2,3,6,7-naphthalenetetracarboxylic dianhydride The acid residue (hereinafter, also referred to as "NTCDA residue") has rigidity, and thus is a residue that improves in-plane orientation, suppresses CTE to a low level, and plays a role in RO control or glass transition temperature control. On the other hand, since the molecular weight of the PMDA residue is small, if the amount is too large, the imide group concentration of the polymer increases, the polar group increases, and the hygroscopicity increases, and the hygroscopicity increases due to the influence of the moisture inside the molecular chain. The dielectric tangent increases. In addition, the NTCDA residue tends to become fragile due to the highly rigid naphthalene skeleton and to increase the elastic modulus.

因此,第1实施方式、第2实施方式或第3实施方式中,构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺相对于四羧酸残基的100摩尔份而在合计优选为40摩尔份以上且70摩尔份以下的范围内、更优选为50摩尔份以上且60摩尔份以下的范围内、进而优选为50摩尔份~55摩尔份的范围内含有PMDA残基及NTCDA残基。若PMDA残基及NTCDA残基的合计未满40摩尔份,则有CTE增加或者耐热性下降之虞,若超过70摩尔份,则有聚合物的酰亚胺基浓度变高,极性基增加且低吸湿性受损,介电正切增加之虞,或者有膜变脆且膜的自支持性下降之虞。Therefore, in the first embodiment, the second embodiment, or the third embodiment, the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is preferably 40 parts by mole in total with respect to 100 parts by mole of the tetracarboxylic acid residue. PMDA residues and NTCDA residues are contained within a range of not less than 70 parts by mol and not more than 70 parts by mol, more preferably not less than 50 parts by mol and not more than 60 parts by mol, and still more preferably within a range of 50 parts by mol to 55 parts by mol. If the total of PMDA residues and NTCDA residues is less than 40 mol parts, the CTE may increase or the heat resistance may decrease, and if it exceeds 70 mol parts, the imide group concentration of the polymer may increase and the polar group increase and the low hygroscopicity is impaired, the dielectric tangent increases, or the film becomes brittle and the self-supporting property of the film decreases.

另外,第1实施方式中,如所述条件(a-i)规定那样,BPDA残基及TAHQ残基中的至少一种以及PMDA残基及NTCDA残基中的至少一种的合计相对于四羧酸残基的100摩尔份而为80摩尔份以上,优选为90摩尔份以上。In addition, in the first embodiment, as specified in the condition (a-i), the sum of at least one of BPDA residues and TAHQ residues and at least one of PMDA residues and NTCDA residues is relative to the tetracarboxylic acid 100 mol parts of a residue is 80 mol parts or more, Preferably it is 90 mol parts or more.

另外,第1实施方式中,如所述条件(a-i)规定那样,将BPDA残基及TAHQ残基中的至少一种、与PMDA残基及NTCDA残基中的至少一种的摩尔比{(BPDA残基+TAHQ残基)/(PMDA残基+NTCDA残基)}设为0.6以上且1.3以下的范围内、优选为0.7以上且1.3以下的范围内、更优选为0.8以上且1.2以下的范围内,控制CTE与聚合物的有序结构的形成。In addition, in the first embodiment, as specified in the conditions (a-i), the molar ratio of at least one of the BPDA residue and the TAHQ residue to at least one of the PMDA residue and the NTCDA residue {( BPDA residue+TAHQ residue)/(PMDA residue+NTCDA residue)} is within the range of 0.6 or more and 1.3 or less, preferably 0.7 or more and 1.3 or less, more preferably 0.8 or more and 1.2 or less range, control the formation of the ordered structure of the CTE with the polymer.

第1实施方式、第2实施方式或第3实施方式中,PMDA及NTCDA具有刚直骨架,因此与其他一般的酸酐成分相比,可控制聚酰亚胺中的分子的面内取向性,具有热膨胀系数(CTE)的抑制与玻璃化温度(Tg)的提高效果。另外,与PMDA相比,BPDA及TAHQ的分子量大,因此由于装入比率的增加酰亚胺基浓度下降,由此对于介电正切的下降或吸湿率的下降具有效果。另一方面,若BPDA及TAHQ的装入比率增加,则聚酰亚胺中的分子的面内取向性下降,而导致CTE的增加。进而,分子内的有序结构的形成得到推进,雾度值增加。就所述观点而言,PMDA及NTCDA的合计装入量相对于原料的所有酸酐成分的100摩尔份,可为40摩尔份~70摩尔份的范围内、优选为50摩尔份~60摩尔份的范围内、更优选为50摩尔份~55摩尔份的范围内。若相对于原料的所有酸酐成分的100摩尔份,PMDA及NTCDA的合计装入量未满40摩尔份,则分子的面内取向性下降,且低CTE化变得困难,另外Tg的下降所引起的加热时的膜的耐热性或尺寸稳定性下降。另一方面,若PMDA及NTCDA的合计装入量超过70摩尔份,则出现因酰亚胺基浓度的增加而吸湿率变差,或者使弹性系数增大的倾向。In the first embodiment, the second embodiment, or the third embodiment, since PMDA and NTCDA have a rigid skeleton, compared with other general acid anhydride components, the in-plane orientation of the molecules in the polyimide can be controlled, and they have thermal expansion. Inhibition of coefficient (CTE) and improvement of glass transition temperature (Tg). In addition, since the molecular weight of BPDA and TAHQ is larger than that of PMDA, the imide group concentration decreases due to the increase of the loading ratio, which is effective in reducing the dielectric tangent or the moisture absorption rate. On the other hand, when the incorporation ratio of BPDA and TAHQ is increased, the in-plane orientation of the molecules in the polyimide is lowered, resulting in an increase in CTE. Furthermore, the formation of an ordered structure in the molecule is promoted, and the haze value is increased. From this viewpoint, the total amount of PMDA and NTCDA charged may be in the range of 40 to 70 parts by mol, preferably 50 to 60 parts by mol, based on 100 parts by mol of all acid anhydride components in the raw material. within the range, more preferably within the range of 50 to 55 parts by mole. If the total loading amount of PMDA and NTCDA is less than 40 mol parts with respect to 100 mol parts of all the acid anhydride components in the raw material, the in-plane orientation of the molecules decreases, and it becomes difficult to reduce the CTE, and the decrease in Tg is also caused. The heat resistance or dimensional stability of the film upon heating decreases. On the other hand, when the total loading amount of PMDA and NTCDA exceeds 70 mol parts, there exists a tendency for the moisture absorption rate to worsen by the increase of the imide group density|concentration, or to increase the elastic modulus.

另外,BPDA及TAHQ对分子运动的抑制或酰亚胺基浓度的下降所引起的低介电正切化、吸湿率下降具有效果,但会使作为酰亚胺化后的聚酰亚胺膜的CTE增大。就所述观点而言,BPDA及TAHQ的合计装入量相对于原料的所有酸酐成分的100摩尔份,可为30摩尔份~60摩尔份的范围内、优选为40摩尔份~50摩尔份的范围内、更优选为40摩尔份~45摩尔份的范围内。In addition, BPDA and TAHQ have effects on the inhibition of molecular motion or on the reduction of the dielectric tangent and the decrease in the moisture absorption rate due to the decrease in the concentration of imide groups, but they degrade the CTE of the imidized polyimide film. increase. From this viewpoint, the total charged amount of BPDA and TAHQ may be in the range of 30 to 60 parts by mol, preferably 40 to 50 parts by mol, based on 100 parts by mol of all the acid anhydride components of the raw material. within the range, more preferably within the range of 40 to 45 parts by mole.

作为构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺中所含的所述BPDA残基、TAHQ残基、PMDA残基、NTCDA残基以外的四羧酸残基,例如可列举由3,3',4,4'-二苯基砜四羧酸二酐、4,4'-氧基二邻苯二甲酸酐、2,3',3,4'-联苯四羧酸二酐、2,2',3,3'-二苯甲酮四羧酸二酐、2,3,3',4'-二苯甲酮四羧酸二酐或3,3',4,4'-二苯甲酮四羧酸二酐、2,3',3,4'-二苯基醚四羧酸二酐、双(2,3-二羧基苯基)醚二酐、3,3”,4,4”-对三联苯四羧酸二酐、2,3,3”,4”-对三联苯四羧酸二酐或2,2”,3,3”-对三联苯四羧酸二酐、2,2-双(2,3-二羧基苯基)-丙烷二酐或2,2-双(3,4-二羧基苯基)-丙烷二酐、双(2,3-二羧基苯基)甲烷二酐或双(3,4-二羧基苯基)甲烷二酐、双(2,3-二羧基苯基)砜二酐或双(3,4-二羧基苯基)砜二酐、1,1-双(2,3-二羧基苯基)乙烷二酐或1,1-双(3,4-二羧基苯基)乙烷二酐、1,2,7,8-菲-四羧酸二酐、1,2,6,7-菲-四羧酸二酐或1,2,9,10-菲-四羧酸二酐、2,3,6,7-蒽四羧酸二酐、2,2-双(3,4-二羧基苯基)四氟丙烷二酐、2,3,5,6-环己烷二酐、1,2,5,6-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氢萘-1,2,5,6-四羧酸二酐、2,6-二氯萘-1,4,5,8-四羧酸二酐或2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-(或1,4,5,8-)四氯萘-1,4,5,8-(或2,3,6,7-)四羧酸二酐、2,3,8,9-苝-四羧酸二酐、3,4,9,10-苝-四羧酸二酐、4,5,10,11-苝-四羧酸二酐或5,6,11,12-苝-四羧酸二酐、环戊烷-1,2,3,4-四羧酸二酐、吡嗪-2,3,5,6-四羧酸二酐、吡咯烷-2,3,4,5-四羧酸二酐、噻吩-2,3,4,5-四羧酸二酐、4,4'-双(2,3-二羧基苯氧基)二苯基甲烷二酐、乙二醇双偏苯三酸酐等芳香族四羧酸二酐所衍生的四羧酸残基。Examples of tetracarboxylic acid residues other than the BPDA residue, TAHQ residue, PMDA residue, and NTCDA residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer include, for example, 3 ,3',4,4'-diphenylsulfone tetracarboxylic dianhydride, 4,4'-oxydiphthalic anhydride, 2,3',3,4'-biphenyltetracarboxylic dianhydride , 2,2',3,3'-benzophenone tetracarboxylic dianhydride, 2,3,3',4'-benzophenone tetracarboxylic dianhydride or 3,3',4,4' - Benzophenone tetracarboxylic dianhydride, 2,3',3,4'-diphenyl ether tetracarboxylic dianhydride, bis(2,3-dicarboxyphenyl) ether dianhydride, 3,3" ,4,4"-p-terphenyltetracarboxylic dianhydride, 2,3,3",4"-p-terphenyltetracarboxylic dianhydride or 2,2",3,3"-p-terphenyltetracarboxylic acid dianhydride, 2,2-bis(2,3-dicarboxyphenyl)-propane dianhydride or 2,2-bis(3,4-dicarboxyphenyl)-propane dianhydride, bis(2,3-di Carboxyphenyl)methane dianhydride or bis(3,4-dicarboxyphenyl)methane dianhydride, bis(2,3-dicarboxyphenyl)sulfone dianhydride or bis(3,4-dicarboxyphenyl)sulfone dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethanedianhydride or 1,1-bis(3,4-dicarboxyphenyl)ethanedianhydride, 1,2,7,8 -phenanthrene-tetracarboxylic dianhydride, 1,2,6,7-phenanthrene-tetracarboxylic dianhydride or 1,2,9,10-phenanthrene-tetracarboxylic dianhydride, 2,3,6,7-anthracene Tetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)tetrafluoropropane dianhydride, 2,3,5,6-cyclohexanedianhydride, 1,2,5,6-naphthalene Tetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5 ,6-tetracarboxylic dianhydride, 2,6-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride or 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic acid Dianhydride, 2,3,6,7-(or 1,4,5,8-)tetrachloronaphthalene-1,4,5,8-(or 2,3,6,7-)tetracarboxylic dianhydride , 2,3,8,9-perylene-tetracarboxylic dianhydride, 3,4,9,10-perylene-tetracarboxylic dianhydride, 4,5,10,11-perylene-tetracarboxylic dianhydride or 5 ,6,11,12-perylene-tetracarboxylic dianhydride, cyclopentane-1,2,3,4-tetracarboxylic dianhydride, pyrazine-2,3,5,6-tetracarboxylic dianhydride, Pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-2,3,4,5-tetracarboxylic dianhydride, 4,4'-bis(2,3-dicarboxyphenoxy) Tetracarboxylic acid residues derived from aromatic tetracarboxylic dianhydrides such as diphenylmethane dianhydride and ethylene glycol bis-trimellitic anhydride.

(二胺残基)(diamine residue)

第1实施方式、第2实施方式或第3实施方式中,作为构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺中所含的二胺残基,优选为由通式(A1)所表示的二胺化合物所衍生的二胺残基。In the first embodiment, the second embodiment or the third embodiment, the diamine residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is preferably represented by the general formula (A1). A diamine residue derived from the indicated diamine compound.

[化7][hua 7]

Figure BDA0003636631740000111
Figure BDA0003636631740000111

式(A1)中,连结基X表示单键或-COO-,Y独立地表示氢、碳数1~3的一价烃基或烷氧基,n表示0~2的整数,p及q独立地表示0~4的整数。此处,所谓“独立地”表示所述式(A1)中多个连结基X、多个取代基Y、进而整数p、q可相同也可不同。再者,所述式(A1)中,末端的两个氨基中的氢原子可经取代,例如也可为-NR3R4(此处,R3、R4独立地表示烷基等任意的取代基)。In formula (A1), the linking group X represents a single bond or -COO-, Y independently represents hydrogen, a monovalent hydrocarbon group having 1 to 3 carbon atoms or an alkoxy group, n represents an integer of 0 to 2, and p and q independently Indicates an integer from 0 to 4. Here, "independently" means that the plurality of linking groups X, the plurality of substituents Y, and the integers p and q in the formula (A1) may be the same or different. Furthermore, in the formula (A1), the hydrogen atoms in the two amino groups at the terminal may be substituted, for example, -NR 3 R 4 (here, R 3 and R 4 independently represent an arbitrary group such as an alkyl group). substituent).

通式(A1)所表示的二胺化合物(以下,有时表述为“二胺(A1)”)是具有两个苯环的芳香族二胺。二胺(A1)具有刚直结构,故具有对聚合物整体赋予有序结构的作用。因此,可获得透气性低、低吸湿性的聚酰亚胺,可减少分子链内部的水分,故可降低介电正切。此处,作为连结基X,优选为单键。The diamine compound represented by the general formula (A1) (hereinafter, it may be expressed as "diamine (A1)") is an aromatic diamine having two benzene rings. Since the diamine (A1) has a rigid structure, it has a function of imparting an ordered structure to the entire polymer. Therefore, a polyimide with low air permeability and low hygroscopicity can be obtained, and the moisture in the molecular chain can be reduced, so that the dielectric tangent can be reduced. Here, as the linking group X, a single bond is preferable.

作为二胺(A1),例如可列举:1,4-二氨基苯(对苯二胺(p-phenylenediamine,p-PDA))、2,2'-二甲基-4,4'-二氨基联苯(2,2'-dimethyl-4,4'-diamino biphenyl,m-TB)、2,2'-正丙基-4,4'-二氨基联苯(2,2'-n-propyl-4,4'-diamino biphenyl,m-NPB)、4-氨基苯基-4'-氨基苯甲酸酯(4-amino phenyl-4'-amino benzoate,APAB)等。As the diamine (A1), for example, 1,4-diaminobenzene (p-phenylenediamine (p-PDA)), 2,2'-dimethyl-4,4'-diamino Biphenyl (2,2'-dimethyl-4,4'-diamino biphenyl, m-TB), 2,2'-n-propyl-4,4'-diaminobiphenyl (2,2'-n-propyl -4,4'-diamino biphenyl, m-NPB), 4-aminophenyl-4'-amino benzoate (4-amino phenyl-4'-amino benzoate, APAB) and the like.

构成第1实施方式或第2实施方式的非热塑性聚酰亚胺层的非热塑性聚酰亚胺可相对于二胺残基的100摩尔份而含有优选为80摩尔份以上、更优选为85摩尔份以上由二胺(A1)所衍生的二胺残基。以所述范围内的量来使用二胺(A1),由此利用源自单体的刚直结构而容易对聚合物整体形成有序结构,容易获得透气性低、低吸湿性且低介电正切的非热塑性聚酰亚胺。The non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer of the first embodiment or the second embodiment can be contained in an amount of preferably 80 mol parts or more, and more preferably 85 mol parts with respect to 100 mol parts of the diamine residue. part or more of the diamine residue derived from the diamine (A1). By using the diamine (A1) in an amount within the above range, it is easy to form an ordered structure in the polymer as a whole by utilizing the rigid structure derived from the monomer, and it is easy to obtain low air permeability, low hygroscopicity, and low dielectric tangent of non-thermoplastic polyimide.

另外,第1实施方式或第2实施方式中,在相对于非热塑性聚酰亚胺中的二胺残基的100摩尔份,由二胺(A1)所衍生的二胺残基为80摩尔份以上且85摩尔份以下的范围内的情况下,就为更刚直、面内取向性优异的结构的观点而言,作为二胺(A1),优选为使用1,4-二氨基苯。In addition, in the first embodiment or the second embodiment, the amount of the diamine residue derived from the diamine (A1) is 80 parts by mole with respect to 100 parts by mole of the diamine residue in the non-thermoplastic polyimide. In the range of more than or equal to 85 mol parts, it is preferable to use 1, 4- diaminobenzene as a diamine (A1) from a viewpoint of a structure which is more rigid and excellent in in-plane orientation.

第1实施方式或第2实施方式中,作为构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺中所含的其他二胺残基,例如可列举由2,2-双-[4-(3-氨基苯氧基)苯基]丙烷、双[4-(3-氨基苯氧基)苯基]砜、双[4-(3-氨基苯氧基)]联苯、双[1-(3-氨基苯氧基)]联苯、双[4-(3-氨基苯氧基)苯基]甲烷、双[4-(3-氨基苯氧基)苯基]醚、双[4-(3-氨基苯氧基)]二苯甲酮、9,9-双[4-(3-氨基苯氧基)苯基]芴、2,2-双-[4-(4-氨基苯氧基)苯基]六氟丙烷、2,2-双-[4-(3-氨基苯氧基)苯基]六氟丙烷、3,3'-二甲基-4,4'-二氨基联苯、4,4'-亚甲基二-邻甲苯胺、4,4'-亚甲基二-2,6-二甲苯胺、4,4'-亚甲基-2,6-二乙基苯胺、3,3'-二氨基二苯基乙烷、3,3'-二氨基联苯、3,3'-二甲氧基联苯胺、3,3”-二氨基-对三联苯、4,4'-[1,4-亚苯基双(1-甲基亚乙基)]双苯胺、4,4'-[1,3-亚苯基双(1-甲基亚乙基)]双苯胺、双(对氨基环己基)甲烷、双(对-β-氨基-叔丁基苯基)醚、双(对-β-甲基-δ-氨基戊基)苯、对-双(2-甲基-4-氨基戊基)苯、对-双(1,1-二甲基-5-氨基戊基)苯、1,5-二氨基萘、2,6-二氨基萘、2,4-双(β-氨基-叔丁基)甲苯、2,4-二氨基甲苯、间二甲苯-2,5-二胺、对二甲苯-2,5-二胺、间二甲苯二胺、对二甲苯二胺、2,6-二氨基吡啶、2,5-二氨基吡啶、2,5-二氨基-1,3,4-噁二唑、哌嗪、2'-甲氧基-4,4'-二氨基苯酰替苯胺、4,4'-二氨基苯酰替苯胺、1,3-双[2-(4-氨基苯基)-2-丙基]苯、6-氨基-2-(4-氨基苯氧基)苯并噁唑等芳香族二胺化合物所衍生的二胺残基、由二聚酸的两个末端羧酸基经取代为一级氨基甲基或氨基的二聚酸型二胺等脂肪族二胺化合物所衍生的二胺残基。In the first embodiment or the second embodiment, as another diamine residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer, for example, 2,2-bis-[4- (3-Aminophenoxy)phenyl]propane, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(3-aminophenoxy)]biphenyl, bis[1- (3-Aminophenoxy)]biphenyl, bis[4-(3-aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]ether, bis[4- (3-Aminophenoxy)]benzophenone, 9,9-bis[4-(3-aminophenoxy)phenyl]fluorene, 2,2-bis-[4-(4-aminophenoxy) base)phenyl]hexafluoropropane, 2,2-bis-[4-(3-aminophenoxy)phenyl]hexafluoropropane, 3,3'-dimethyl-4,4'-diaminobiphenyl Benzene, 4,4'-methylenebis-o-toluidine, 4,4'-methylenebis-2,6-xylidine, 4,4'-methylene-2,6-diethyl Aniline, 3,3'-diaminodiphenylethane, 3,3'-diaminobiphenyl, 3,3'-dimethoxybenzidine, 3,3"-diamino-p-terphenyl, 4 ,4'-[1,4-phenylenebis(1-methylethylene)]dianiline, 4,4'-[1,3-phenylenebis(1-methylethylene)] Dianiline, bis(p-aminocyclohexyl)methane, bis(p-β-amino-tert-butylphenyl) ether, bis(p-β-methyl-δ-aminopentyl)benzene, p-bis(2 -Methyl-4-aminopentyl)benzene, p-bis(1,1-dimethyl-5-aminopentyl)benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2, 4-bis(β-amino-tert-butyl)toluene, 2,4-diaminotoluene, m-xylene-2,5-diamine, p-xylene-2,5-diamine, m-xylene diamine, p-xylylenediamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1,3,4-oxadiazole, piperazine, 2'-methoxy-4 ,4'-Diaminobenzoic anilide, 4,4'-diaminobenzoic anilide, 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene, 6-amino- Diamine residues derived from aromatic diamine compounds such as 2-(4-aminophenoxy)benzoxazole, diamine residues derived from two terminal carboxylic acid groups of dimer acid substituted with primary aminomethyl or amino groups A diamine residue derived from an aliphatic diamine compound such as dimer acid diamine.

另外,在构成第3实施方式的非热塑性聚酰亚胺层的非热塑性聚酰亚胺中,二胺(A1)如所述条件(c-i)规定那样相对于原料的所有二胺成分的100摩尔份可为70摩尔份以上、例如70摩尔份~90摩尔份的范围内、优选为80摩尔份~90摩尔份的范围内。另一方面,若二胺(A1)的装入量超过90摩尔份,则有时膜的伸长率下降。In addition, in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer of the third embodiment, the diamine (A1) is defined as the condition (c-i) with respect to 100 mol of all the diamine components in the raw material. The part may be 70 parts by mol or more, for example, in the range of 70 parts by mol to 90 parts by mol, preferably in the range of 80 parts by mol to 90 parts by mol. On the other hand, when the charging amount of the diamine (A1) exceeds 90 mol parts, the elongation of the film may decrease.

另外,第3实施方式中使用的非热塑性聚酰亚胺优选为使用选自由通式(C1)~通式(C4)所表示的芳香族二胺所组成的群组中的至少一种芳香族二胺作为原料的二胺成分。二胺(C1)~二胺(C4)具有体积大的取代基或弯曲性的部位,因此可对聚酰亚胺赋予柔软性。另外,二胺(C1)~二胺(C4)可提高透气性,因此具有抑制制造多层膜及金属张层叠板时的发泡的效果。就所述观点而言,优选为相对于原料的所有二胺成分的100摩尔份而在2摩尔份~15摩尔份的范围内使用选自二胺(C1)~二胺(C4)中的一种以上的芳香族二胺。若二胺(C1)~二胺(C4)的装入量未满2摩尔份,则有时在制造多层膜及金属张层叠板的情况下会发生发泡。另外,若二胺(C1)~二胺(C4)的装入量超过15摩尔份,则分子的取向性下降,低CTE化变得困难。Moreover, it is preferable that the non-thermoplastic polyimide used in 3rd Embodiment uses the at least 1 sort(s) of aromatics chosen from the group which consists of the aromatic diamines represented by general formula (C1) - general formula (C4). Diamine is a diamine component of a raw material. Since the diamines (C1) to (C4) have bulky substituents or flexible sites, flexibility can be imparted to the polyimide. Moreover, since the diamine (C1) - diamine (C4) can improve air permeability, it has the effect of suppressing foaming at the time of manufacture of a multilayer film and a metal sheet laminate. From this viewpoint, it is preferable to use one selected from the group consisting of diamine (C1) to diamine (C4) in the range of 2 to 15 mol parts with respect to 100 mol parts of all the diamine components of the raw material. more than one aromatic diamine. When the charged amount of diamine (C1) - diamine (C4) is less than 2 mol parts, foaming may generate|occur|produce when manufacturing a multilayer film and a metal sheet laminate. Moreover, when the charging amount of diamine (C1) - diamine (C4) exceeds 15 mol parts, the orientation of a molecule will fall, and it will become difficult to reduce CTE.

[化8][hua 8]

Figure BDA0003636631740000131
Figure BDA0003636631740000131

所述式(C1)~式(C4)中,R2独立地表示碳数1~6的一价烃基、烷氧基或烷硫基,连结基A’独立地表示选自-O-、-SO2-、-CH2-或-C(CH3)2-中的二价基,优选为表示选自-O-、-CH2-或-C(CH3)2-中的二价基,连结基X1独立地表示-CH2-、-O-CH2-O-、-O-C2H4-O-、-O-C3H6-O-、-O-C4H8-O-、-O-C5H10-O-、-O-CH2-C(CH3)2-CH2-O-、-C(CH3)2-、-C(CF3)2-或-SO2-,n3独立地表示1~4的整数,n4独立地表示0~4的整数,但在式(C3)中,连结基A’不含-CH2-、-C(CH3)2-、-C(CF3)2-或-SO2-的情况下,n4的任一者为1以上。此处,所谓“独立地”表示在所述式(C1)~式(C4)内的一个式或两个以上式中多个连结基A’、多个连结基X1、多个取代基R2或多个n3、n4可相同也可不同。再者,所述式(C1)~式(C4)中,末端的两个氨基中的氢原子可经取代,例如也可为-NR3R4(此处,R3、R4独立地表示烷基等任意的取代基)。In the above formulas (C1) to (C4), R 2 independently represents a monovalent hydrocarbon group, alkoxy group or alkylthio group having 1 to 6 carbon atoms, and the linking group A' independently represents a group selected from -O-, - A divalent group in SO 2 -, -CH 2 - or -C(CH 3 ) 2 -, preferably a divalent group selected from -O-, -CH 2 - or -C(CH 3 ) 2 - , the linking group X1 independently represents -CH 2 -, -O-CH 2 -O-, -OC 2 H 4 -O-, -OC 3 H 6 -O-, -OC 4 H 8 -O-, -OC 5 H 10 -O-, -O-CH 2 -C(CH 3 ) 2 -CH 2 -O-, -C(CH 3 ) 2 -, -C(CF 3 ) 2 - or -SO 2 -, n 3 independently represents an integer of 1 to 4, and n 4 independently represents an integer of 0 to 4, but in formula (C3), the linking group A' does not contain -CH 2 -, -C(CH 3 ) 2 -, - In the case of C(CF 3 ) 2 - or -SO 2 -, any one of n 4 is 1 or more. Here, "independently" means a plurality of linking groups A', a plurality of linking groups X1, and a plurality of substituents R 2 in one formula or two or more formulae in the above formulas (C1) to (C4). A plurality of n 3 and n 4 may be the same or different. In addition, in the above formulas (C1) to (C4), the hydrogen atoms in the two amino groups at the terminal may be substituted, for example, -NR 3 R 4 (here, R 3 and R 4 independently represent arbitrary substituents such as alkyl).

作为通式(C1)所表示的芳香族二胺,例如可列举2,6-二氨基-3,5-二乙基甲苯、2,4-二氨基-3,5-二乙基甲苯等。As the aromatic diamine represented by general formula (C1), 2,6-diamino-3,5-diethyltoluene, 2,4-diamino-3,5-diethyltoluene, etc. are mentioned, for example.

作为通式(C2)所表示的芳香族二胺,例如可列举2,4-二氨基-3,3'-二乙基-5,5'-二甲基二苯基甲烷、双(4-氨基-3-乙基-5-甲基苯基)甲烷等。Examples of the aromatic diamine represented by the general formula (C2) include 2,4-diamino-3,3'-diethyl-5,5'-dimethyldiphenylmethane, bis(4- Amino-3-ethyl-5-methylphenyl)methane, etc.

作为通式(C3)所表示的芳香族二胺,例如可列举:1,3-双[2-(4-氨基苯基)-2-丙基]苯、1,4-双[2-(4-氨基苯基)-2-丙基]苯、1,4-双(4-氨基苯氧基)-2,5-二-叔丁基苯等。Examples of the aromatic diamine represented by the general formula (C3) include 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene, 1,4-bis[2-( 4-Aminophenyl)-2-propyl]benzene, 1,4-bis(4-aminophenoxy)-2,5-di-tert-butylbenzene, etc.

作为通式(C4)所表示的芳香族二胺,例如可列举2,2-双[4-(4-氨基苯氧基)苯基]丙烷等。As the aromatic diamine represented by general formula (C4), 2,2-bis[4-(4-aminophenoxy)phenyl]propane etc. are mentioned, for example.

如上所述,构成第3实施方式的聚酰亚胺膜的非热塑性聚酰亚胺可以相对于二胺残基的100摩尔份而在70摩尔份以上、优选为70摩尔份~90摩尔份的范围内含有由二胺(A1)所衍生的残基,且在2摩尔份~15摩尔份的范围内含有由二胺(C1)~二胺(C4)所衍生的残基的方式进行控制。As described above, the non-thermoplastic polyimide constituting the polyimide film of the third embodiment may be 70 parts by mol or more, preferably 70 parts by mol to 90 parts by mol relative to 100 parts by mol of the diamine residue. It controls so that the residue derived from diamine (A1) is contained in the range, and the residue derived from diamine (C1)-diamine (C4) is contained in the range of 2-15 mol part.

第3实施方式中,作为可用作聚酰亚胺的原料的其他二胺,例如可列举:2,2-双-[4-(3-氨基苯氧基)苯基]丙烷、2,2-双[4-(4-氨基苯氧基)苯基]六氟丙烷、2,2-双[4-(2-三氟-4-氨基苯氧基)苯基]六氟丙烷、1,4-双(4-氨基苯氧基)2,3,6-三甲基-苯、1,4-双(4-氨基苯氧基甲基)丙烷、1,3-双(4-氨基苯氧基)苯、1,4-双(4-氨基苯氧基)苯、1,3-双(3-氨基苯氧基)苯、1,4-双(4-氨基苯氧基)甲烷、1,4-双(4-氨基苯氧基)乙烷、1,4-双(4-氨基苯氧基)丙烷、1,4-双(4-氨基苯氧基)丁烷、1,4-双(4-氨基苯氧基)戊烷、双[4-(3-氨基苯氧基)苯基]砜、双[4-(4-氨基苯氧基)苯基]砜、双[4-(3-氨基苯氧基)]联苯、双[1-(3-氨基苯氧基)]联苯、双[4-(3-氨基苯氧基)苯基]甲烷、1,4-双(4-氨基苯氧基)2-苯基-苯、1,4-双(2-三氟甲基-4-氨基苯氧基)苯、双[4-(3-氨基苯氧基)苯基]醚、双[4-(3-氨基苯氧基)]二苯甲酮、9,9-双[4-(3-氨基苯氧基)苯基]芴、2,2-双-[4-(3-氨基苯氧基)苯基]六氟丙烷、3,3'-二甲基-4,4'-二氨基联苯、4,4'-亚甲基二-邻甲苯胺、4,4'-亚甲基二-2,6-二甲代苯胺、4,4'-亚甲基-2,6-二乙基苯胺、3,3'-二氨基二苯基乙烷、2-三氟甲基-4,4'-二氨基二苯基醚、2,2'-二-三氟甲基-4,4'-二氨基二苯基醚、3,3'-二氨基联苯、3,3'-二甲氧基联苯胺、3,3”-二氨基-对三联苯、4,4'-[1,4-亚苯基双(1-甲基亚乙基)]双苯胺、4,4'-[1,3-亚苯基双(1-甲基亚乙基)]双苯胺、双(对氨基环己基)甲烷、双(对-β-氨基-叔丁基苯基)醚、双(对-β-甲基-δ-氨基戊基)苯、对-双(2-甲基-4-氨基戊基)苯、对-双(1,1-二甲基-5-氨基戊基)苯、1,5-二氨基萘、2,6-二氨基萘、2,4-双(β-氨基-叔丁基)甲苯、2,4-二氨基甲苯、间二甲苯-2,5-二胺、对二甲苯-2,5-二胺、间二甲苯二胺、对二甲苯二胺、2,6-二氨基吡啶、2,5-二氨基吡啶、2,5-二氨基-1,3,4-噁二唑、哌嗪、2'-甲氧基-4,4'-二氨基苯酰替苯胺、4,4'-二胺基苯酰替苯胺等芳香族二胺化合物。In 3rd Embodiment, as another diamine which can be used as a raw material of polyimide, 2,2-bis-[4-(3-aminophenoxy)phenyl]propane, 2,2-bis-[4-(3-aminophenoxy)phenyl]propane, -Bis[4-(4-Aminophenoxy)phenyl]hexafluoropropane, 2,2-Bis[4-(2-trifluoro-4-aminophenoxy)phenyl]hexafluoropropane, 1, 4-Bis(4-aminophenoxy)2,3,6-trimethyl-benzene, 1,4-bis(4-aminophenoxymethyl)propane, 1,3-bis(4-aminobenzene) oxy)benzene, 1,4-bis(4-aminophenoxy)benzene, 1,3-bis(3-aminophenoxy)benzene, 1,4-bis(4-aminophenoxy)methane, 1,4-bis(4-aminophenoxy)ethane, 1,4-bis(4-aminophenoxy)propane, 1,4-bis(4-aminophenoxy)butane, 1,4 - bis(4-aminophenoxy)pentane, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(4-aminophenoxy)phenyl]sulfone, bis[4 -(3-Aminophenoxy)]biphenyl, bis[1-(3-aminophenoxy)]biphenyl, bis[4-(3-aminophenoxy)phenyl]methane, 1,4- Bis(4-aminophenoxy)2-phenyl-benzene, 1,4-bis(2-trifluoromethyl-4-aminophenoxy)benzene, bis[4-(3-aminophenoxy) Phenyl] ether, bis[4-(3-aminophenoxy)]benzophenone, 9,9-bis[4-(3-aminophenoxy)phenyl]fluorene, 2,2-bis- [4-(3-Aminophenoxy)phenyl]hexafluoropropane, 3,3'-dimethyl-4,4'-diaminobiphenyl, 4,4'-methylenedi-o-toluidine , 4,4'-methylenebis-2,6-dimethylaniline, 4,4'-methylene-2,6-diethylaniline, 3,3'-diaminodiphenylethane , 2-trifluoromethyl-4,4'-diaminodiphenyl ether, 2,2'-di-trifluoromethyl-4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether Aminobiphenyl, 3,3'-dimethoxybenzidine, 3,3"-diamino-p-terphenyl, 4,4'-[1,4-phenylenebis(1-methylethylene) )] bisaniline, 4,4'-[1,3-phenylene bis(1-methylethylene)] bisaniline, bis(p-aminocyclohexyl)methane, bis(p-β-amino-tertiary Butylphenyl) ether, bis(p-β-methyl-δ-aminopentyl)benzene, p-bis(2-methyl-4-aminopentyl)benzene, p-bis(1,1-di) Methyl-5-aminopentyl)benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2,4-bis(β-amino-tert-butyl)toluene, 2,4-diaminotoluene , m-xylene-2,5-diamine, p-xylene-2,5-diamine, m-xylene diamine, p-xylene diamine, 2,6-diaminopyridine, 2,5-diaminopyridine , 2,5-diamino-1,3,4-oxadiazole, piperazine, 2'-methoxy-4,4'-diaminobenzoic anilide, 4,4'-diaminobenzoyl Aromatic diamine compounds such as aniline.

第3实施方式中,通过分别以所述摩尔比使用作为成为聚酰亚胺的原料的酸酐成分的BPDA、TAHQ、PMDA及NTCDA、作为二胺成分的二胺(A1)及二胺(C1)~二胺(C4),可控制由这些原料化合物所衍生的残基的量,使介电正切及吸湿率的减少、与制造多层膜及金属张层叠板时的发泡抑制并存。In the third embodiment, BPDA, TAHQ, PMDA, and NTCDA, which are acid anhydride components used as raw materials of polyimide, and diamine (A1) and diamine (C1), which are diamine components, are used in the above molar ratios, respectively. - Diamine (C4), the amount of residues derived from these raw material compounds can be controlled, and the reduction of dielectric tangent and moisture absorption can be combined with the suppression of foaming in the production of multilayer films and metal sheet laminates.

关于第3实施方式的聚酰亚胺膜,由于低介电常数及低介电正切与低吸湿性并存,因此例如作为成为FPC的原料的铜张层叠板的绝缘树脂层中的基质树脂而优选。另外,作为成为聚酰亚胺的原料的单体,由于使用芳香族四羧酸酐与芳香族二胺,因此不易产生加热所引起的尺寸变化的问题,且具有阻燃性,而无需调配阻燃剂。因此,通过利用第3实施方式的聚酰亚胺膜及使用其的铜张层叠板,可实现FPC等电路基板的可靠性与良率的提高。The polyimide film of the third embodiment has low dielectric constant, low dielectric tangent, and low hygroscopicity. Therefore, for example, it is preferable as a matrix resin in an insulating resin layer of a copper sheet laminate serving as a raw material of FPC. . In addition, since aromatic tetracarboxylic acid anhydride and aromatic diamine are used as monomers used as raw materials of polyimide, the problem of dimensional change due to heating is not easily caused, and it has flame retardancy, and it is not necessary to prepare flame retardancy agent. Therefore, by using the polyimide film of 3rd Embodiment and the copper sheet laminated board using the same, the reliability and yield improvement of circuit boards, such as FPC, can be aimed at.

第1实施方式、第2实施方式或第3实施方式的非热塑性聚酰亚胺中,通过选定所述四羧酸残基及二胺残基的种类、或者应用两种以上的四羧酸残基或二胺残基时各自的摩尔比,可控制热膨胀系数、储存弹性系数、拉伸弹性系数等。另外,非热塑性聚酰亚胺中,在具有多个聚酰亚胺的结构单元的情况下,可以嵌段的形式存在,也可无规存在,但就抑制面内延迟(RO)的偏差的观点而言,优选为无规存在。In the non-thermoplastic polyimide of the first embodiment, the second embodiment, or the third embodiment, the types of the tetracarboxylic acid residues and the diamine residues are selected, or two or more kinds of tetracarboxylic acids are used. The molar ratio of the residues or the diamine residues can control the thermal expansion coefficient, storage elasticity coefficient, tensile elasticity coefficient, and the like. In addition, in the non-thermoplastic polyimide, in the case of having a plurality of polyimide structural units, it may exist in the form of a block or may exist randomly, but the variation in in-plane retardation (RO) is suppressed. From a viewpoint, random presence is preferable.

再者,第1实施方式或第2实施方式中,通过将非热塑性聚酰亚胺中所含的四羧酸残基及二胺残基均设为芳香族基,可提高聚酰亚胺膜在高温环境下的尺寸精度,且减少面内延迟(RO)的变化量,因此优选。Furthermore, in the first embodiment or the second embodiment, the polyimide film can be improved by making both the tetracarboxylic acid residue and the diamine residue contained in the non-thermoplastic polyimide an aromatic group. Dimensional accuracy in a high temperature environment and reduction in the amount of variation in in-plane retardation (RO) are preferable.

第1实施方式或第2实施方式中,非热塑性聚酰亚胺的酰亚胺基浓度优选为33重量%以下。此处,“酰亚胺基浓度”表示聚酰亚胺中的酰亚胺基部(-(CO)2-N-)的分子量除以聚酰亚胺的结构整体的分子量而得的值。若酰亚胺基浓度超过33重量%,则树脂自身的分子量减小,且因极性基的增加而低吸湿性也变差。第1实施方式或第2实施方式中,通过选择所述酸酐与二胺化合物的组合而控制非热塑性聚酰亚胺中的分子的取向性,由此抑制伴随酰亚胺基浓度下降的CTE的增加,确保低吸湿性。In the first embodiment or the second embodiment, the imide group concentration of the non-thermoplastic polyimide is preferably 33% by weight or less. Here, the "imide group concentration" means the value obtained by dividing the molecular weight of the imide group part (-(CO) 2 -N-) in the polyimide by the molecular weight of the entire structure of the polyimide. When the imide group concentration exceeds 33% by weight, the molecular weight of the resin itself decreases, and the low hygroscopicity also deteriorates due to an increase in polar groups. In the first embodiment or the second embodiment, by selecting the combination of the acid anhydride and the diamine compound, the orientation of the molecules in the non-thermoplastic polyimide is controlled, thereby suppressing the change of CTE accompanying the decrease in the imide group concentration. increase to ensure low hygroscopicity.

第1实施方式、第2实施形体或第3实施方式中,非热塑性聚酰亚胺的重量平均分子量例如优选为10,000~400,000的范围内,更优选为50,000~350,000的范围内。若重量平均分子量未满10,000,则出现膜的强度下降而容易变脆的倾向。另一方面,若重量平均分子量超过400,000,则出现粘度过度增加且涂敷作业时容易发生膜厚度不均、条纹等不良情况的倾向。In the first embodiment, the second embodiment, or the third embodiment, the weight average molecular weight of the non-thermoplastic polyimide is preferably in the range of, for example, 10,000 to 400,000, and more preferably in the range of 50,000 to 350,000. When the weight-average molecular weight is less than 10,000, the strength of the film decreases and tends to become brittle. On the other hand, when the weight-average molecular weight exceeds 400,000, the viscosity tends to increase excessively and problems such as uneven film thickness and streaks tend to occur during the coating operation.

<热塑性聚酰亚胺><Thermoplastic polyimide>

第1实施方式或第2实施方式的聚酰亚胺膜中,构成热塑性聚酰亚胺层的热塑性聚酰亚胺为包含四羧酸残基及二胺残基者,优选为包含由芳香族四羧酸二酐所衍生的芳香族四羧酸残基及芳香族二胺所衍生的芳香族二胺残基。In the polyimide film of the first embodiment or the second embodiment, the thermoplastic polyimide constituting the thermoplastic polyimide layer contains a tetracarboxylic acid residue and a diamine residue, and preferably contains an aromatic An aromatic tetracarboxylic acid residue derived from tetracarboxylic dianhydride and an aromatic diamine residue derived from an aromatic diamine.

(四羧酸残基)(tetracarboxylic acid residue)

作为构成热塑性聚酰亚胺层的热塑性聚酰亚胺中使用的四羧酸残基,可使用与所述作为构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺中的四羧酸残基而例示者相同者。As the tetracarboxylic acid residue used in the thermoplastic polyimide constituting the thermoplastic polyimide layer, the same tetracarboxylic acid residue in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer described above can be used The base and the exemplified are the same.

(二胺残基)(diamine residue)

作为构成热塑性聚酰亚胺层的热塑性聚酰亚胺中所含的二胺残基,优选为由通式(B1)~通式(B7)所表示的二胺化合物所衍生的二胺残基。As the diamine residue contained in the thermoplastic polyimide constituting the thermoplastic polyimide layer, diamine residues derived from diamine compounds represented by general formulae (B1) to (B7) are preferred .

[化9][Chemical 9]

Figure BDA0003636631740000151
Figure BDA0003636631740000151

式(B1)~式(B7)中,R1独立地表示碳数1~6的一价烃基或烷氧基,连结基A独立地表示选自-O-、-S-、-CO-、-SO-、-SO2-、-COO-、-CH2-、-C(CH3)2-、-NH-或-CONH-中的二价基,n1独立地表示0~4的整数。其中,自式(B3)中去除与式(B2)重复者,自式(B5)中去除与式(B4)重复者。此处,所谓“独立地”表示所述式(B1)~式(B7)内的一个式或两个以上式中多个连结基A、多个R1或多个n1可相同也可不同。再者,所述式(B1)~式(B7)中,末端的两个氨基中的氢原子可经取代,例如也可为-NR3R4(此处,R3、R4独立地表示烷基等任意的取代基)。In formulas (B1) to (B7), R 1 independently represents a monovalent hydrocarbon group or alkoxy group having 1 to 6 carbon atoms, and the linking group A independently represents a group selected from -O-, -S-, -CO-, A divalent group in -SO-, -SO 2 -, -COO-, -CH 2 -, -C(CH 3 ) 2 -, -NH- or -CONH-, and n 1 independently represents an integer of 0 to 4 . Among them, those repeating with formula (B2) are removed from formula (B3), and those repeating with formula (B4) are removed from formula (B5). Here, "independently" means that a plurality of linking groups A, a plurality of R 1 , or a plurality of n 1 may be the same or different in one or two or more of the formulas (B1) to (B7). . In addition, in the above formulas (B1) to (B7), the hydrogen atoms in the two amino groups at the terminal may be substituted, for example, -NR 3 R 4 (here, R 3 and R 4 independently represent arbitrary substituents such as alkyl).

式(B1)所表示的二胺(以下,有时表述为“二胺(B1)”)是具有两个苯环的芳香族二胺。认为所述二胺(B1)通过直接键结于至少一个苯环上的氨基与二价连结基A处于间位,聚酰亚胺分子链所具有的自由度增加且具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B1),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-、-CH2-、-C(CH3)2-、-CO-、-SO2-、-S-。The diamine represented by formula (B1) (hereinafter, it may be expressed as "diamine (B1)") is an aromatic diamine having two benzene rings. It is considered that the diamine (B1) is in the meta position through the amino group directly bonded to at least one benzene ring and the divalent linking group A, and the polyimide molecular chain has an increased degree of freedom and high flexibility, which helps Due to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B1), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O-, -CH 2 -, -C(CH 3 ) 2 -, -CO-, -SO 2 -, and -S- are preferable.

作为二胺(B1),例如可列举:3,3'-二氨基二苯基甲烷、3,3'-二氨基二苯基丙烷、3,3'-二氨基二苯基硫醚、3,3'-二氨基二苯基砜、3,3'-二氨基二苯基醚、3,4'-二氨基二苯基醚、3,4'-二氨基二苯基甲烷、3,4'-二氨基二苯基丙烷、3,4'-二氨基二苯基硫醚、3,3'-二氨基二苯甲酮、(3,3'-双氨基)二苯基胺等。As the diamine (B1), for example, 3,3'-diaminodiphenylmethane, 3,3'-diaminodiphenylpropane, 3,3'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 3'-diaminodiphenylsulfone, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,4'-diaminodiphenylmethane, 3,4' -Diaminodiphenylpropane, 3,4'-diaminodiphenyl sulfide, 3,3'-diaminobenzophenone, (3,3'-bisamino)diphenylamine, etc.

式(B2)所表示的二胺(以下,有时表述为“二胺(B2)”)是具有三个苯环的芳香族二胺。认为所述二胺(B2)通过直接键结于至少一个苯环上的氨基与二价连结基A处于间位,聚酰亚胺分子链所具有的自由度增加且具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B2),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-。The diamine represented by formula (B2) (hereinafter, it may be expressed as "diamine (B2)") is an aromatic diamine having three benzene rings. It is considered that the diamine (B2) is in the meta position through the amino group directly bonded to at least one benzene ring and the divalent linking group A, and the polyimide molecular chain has an increased degree of freedom and high flexibility, which helps Due to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B2), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferable.

作为二胺(B2),例如可列举:1,4-双(3-氨基苯氧基)苯、3-[4-(4-氨基苯氧基)苯氧基]苯胺、3-[3-(4-氨基苯氧基)苯氧基]苯胺等。As the diamine (B2), for example, 1,4-bis(3-aminophenoxy)benzene, 3-[4-(4-aminophenoxy)phenoxy]aniline, 3-[3- (4-Aminophenoxy)phenoxy]aniline and the like.

式(B3)所表示的二胺(以下,有时表述为“二胺(B3)”)是具有三个苯环的芳香族二胺。认为所述二胺(B3)通过直接键结于一个苯环上的两个二价连结基A彼此处于间位,聚酰亚胺分子链所具有的自由度增加且具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B3),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-。The diamine represented by formula (B3) (hereinafter, it may be expressed as "diamine (B3)") is an aromatic diamine having three benzene rings. It is considered that the diamine (B3) is in the meta position with each other through the two divalent linking groups A directly bonded to one benzene ring, and the polyimide molecular chain has an increased degree of freedom and high flexibility, which helps Due to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B3), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferable.

作为二胺(B3),例如可列举:1,3-双(4-氨基苯氧基)苯(1,3-Bis(4-aminophenoxy)benzene,TPE-R)、1,3-双(3-氨基苯氧基)苯(1,3-Bis(3-aminophenoxy)benzene,APB)、4,4'-[2-甲基-(1,3-亚苯基)双氧基]双苯胺、4,4'-[4-甲基-(1,3-亚苯基)双氧基]双苯胺、4,4'-[5-甲基-(1,3-亚苯基)双氧基]双苯胺等。As the diamine (B3), for example, 1,3-bis(4-aminophenoxy)benzene (1,3-Bis(4-aminophenoxy)benzene, TPE-R), 1,3-bis(3 -Aminophenoxy)benzene (1,3-Bis(3-aminophenoxy)benzene, APB), 4,4'-[2-methyl-(1,3-phenylene)bisoxy]dianiline, 4,4'-[4-Methyl-(1,3-phenylene)dioxy]bisaniline, 4,4'-[5-methyl-(1,3-phenylene)dioxy ] Dianiline, etc.

式(B4)所表示的二胺(以下,有时表述为“二胺(B4)”)是具有四个苯环的芳香族二胺。认为所述二胺(B4)通过直接键结于至少一个苯环上的氨基与二价连结基A处于间位,而具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B4),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-、-CH2-、-C(CH3)2-、-SO2-、-CO-、-CONH-。The diamine represented by formula (B4) (hereinafter, it may be expressed as "diamine (B4)") is an aromatic diamine having four benzene rings. It is considered that the diamine (B4) has high flexibility because the amino group directly bonded to at least one benzene ring is in the meta position with the divalent linking group A, and contributes to the improvement of the flexibility of the polyimide molecular chain . Therefore, by using the diamine (B4), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O-, -CH 2 -, -C(CH 3 ) 2 -, -SO 2 -, -CO-, and -CONH- are preferable.

作为二胺(B4),可列举:双[4-(3-氨基苯氧基)苯基]甲烷、双[4-(3-氨基苯氧基)苯基]丙烷、双[4-(3-氨基苯氧基)苯基]醚、双[4-(3-氨基苯氧基)苯基]砜、双[4-(3-氨基苯氧基)]二苯甲酮、双[4,4'-(3-氨基苯氧基)]苯酰替苯胺等。As the diamine (B4), bis[4-(3-aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]propane, bis[4-(3 -Aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(3-aminophenoxy)]benzophenone, bis[4, 4'-(3-aminophenoxy)] benzoic anilide, etc.

式(B5)所表示的二胺(以下,有时表述为“二胺(B5)”)是具有四个苯环的芳香族二胺。认为所述二胺(B5)通过直接键结于至少一个苯环上的两个二价连结基A彼此处于间位,聚酰亚胺分子链所具有的自由度增加且具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B5),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-。The diamine represented by formula (B5) (hereinafter, it may be expressed as "diamine (B5)") is an aromatic diamine having four benzene rings. It is considered that the diamine (B5) is in the meta position with each other through the two divalent linking groups A directly bonded to at least one benzene ring, and the polyimide molecular chain has an increased degree of freedom and high flexibility. Contribute to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B5), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferable.

作为二胺(B5),可列举4-[3-[4-(4-氨基苯氧基)苯氧基]苯氧基]苯胺、4,4'-[氧基双(3,1-亚苯氧基)]双苯胺等。As the diamine (B5), 4-[3-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline, 4,4'-[oxybis(3,1-idene) phenoxy)] dianiline, etc.

式(B6)所表示的二胺(以下,有时表述为“二胺(B6)”)是具有四个苯环的芳香族二胺。认为所述二胺(B6)通过具有至少两个醚键而具有高弯曲性,有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B6),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-C(CH3)2-、-O-、-SO2-、-CO-。The diamine represented by formula (B6) (hereinafter, it may be expressed as "diamine (B6)") is an aromatic diamine having four benzene rings. It is considered that the diamine (B6) has high flexibility by having at least two ether bonds and contributes to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B6), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -C(CH 3 ) 2 -, -O-, -SO 2 -, and -CO- are preferable.

作为二胺(B6),例如可列举:2,2-双[4-(4-氨基苯氧基)苯基]丙烷(2,2-Bis[4-(4-aminophenoxy)phenyl]propane,BAPP)、双[4-(4-氨基苯氧基)苯基]醚(Bis[4-(4-aminophenoxy)phenyl]ether,BAPE)、双[4-(4-氨基苯氧基)苯基]砜(Bis[4-(4-aminophenoxy)phenyl]sulfone,BAPS)、双[4-(4-氨基苯氧基)苯基]酮(Bis[4-(4-aminophenoxy)phenyl]ketone,BAPK)等。As the diamine (B6), for example, 2,2-bis[4-(4-aminophenoxy)phenyl]propane (2,2-Bis[4-(4-aminophenoxy)phenyl]propane, BAPP) may be mentioned. ), bis[4-(4-aminophenoxy)phenyl]ether (Bis[4-(4-aminophenoxy)phenyl]ether, BAPE), bis[4-(4-aminophenoxy)phenyl] Sulfone (Bis[4-(4-aminophenoxy)phenyl]sulfone, BAPS), Bis[4-(4-aminophenoxy)phenyl]ketone (BAPK) Wait.

式(B7)所表示的二胺(以下,有时表述为“二胺(B7)”)是具有四个苯环的芳香族二胺。所述二胺(B7)在二苯基骨架的两侧分别具有弯曲性高的二价连结基A,因此认为有助于聚酰亚胺分子链的柔软性的提高。因此,通过使用二胺(B7),聚酰亚胺的热塑性提高。此处,作为连结基A,优选为-O-。The diamine represented by formula (B7) (hereinafter, it may be expressed as "diamine (B7)") is an aromatic diamine having four benzene rings. Since the diamine (B7) has a highly flexible bivalent linking group A on both sides of the diphenyl skeleton, it is considered that it contributes to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine (B7), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferable.

作为二胺(B7),例如可列举双[4-(3-氨基苯氧基)]联苯、双[4-(4-氨基苯氧基)]联苯等。As diamine (B7), bis[4-(3-aminophenoxy)]biphenyl, bis[4-(4-aminophenoxy)]biphenyl, etc. are mentioned, for example.

第1实施方式或第2实施方式中,构成热塑性聚酰亚胺层的热塑性聚酰亚胺相对于二胺残基的100摩尔份,在70摩尔份以上、优选为70摩尔份以上且99摩尔份以下的范围内、更优选为80摩尔份以上且95摩尔份以下的范围内含有由选自二胺(B1)~二胺(B7)中的至少一种二胺化合物所衍生的二胺残基。二胺(B1)~二胺(B7)含有具有弯曲性的分子结构,因此通过以所述范围内的量来使用选自这些化合物中的至少一种二胺化合物,可提高聚酰亚胺分子链的柔软性,且赋予热塑性。若二胺(B1)~二胺(B7)的合计量相对于所有二胺成分的100摩尔份而未满70摩尔份,则聚酰亚胺树脂的柔软性不足而无法获得充分的热塑性。In the first embodiment or the second embodiment, the thermoplastic polyimide constituting the thermoplastic polyimide layer is 70 mol parts or more, preferably 70 mol parts or more and 99 mol parts with respect to 100 mol parts of the diamine residue. Diamine residues derived from at least one diamine compound selected from the group consisting of diamine (B1) to diamine (B7) are contained within a range of part or less, more preferably within a range of 80 parts by mol or more and 95 parts by mol or less base. Since the diamines (B1) to (B7) contain a flexible molecular structure, by using at least one diamine compound selected from these compounds in an amount within the above range, the polyimide molecule can be increased in size. Chain flexibility and imparts thermoplasticity. If the total amount of diamines (B1) to (B7) is less than 70 parts by mol with respect to 100 parts by mol of all the diamine components, the flexibility of the polyimide resin is insufficient and sufficient thermoplasticity cannot be obtained.

另外,作为构成热塑性聚酰亚胺层的热塑性聚酰亚胺中所含的二胺残基,也优选为由通式(A1)表示的二胺化合物所衍生的二胺残基。关于式(A1)表示的二胺化合物[二胺(A1)],如在非热塑性聚酰亚胺的说明中所述那样。二胺(A1)具有刚直结构,且具有对聚合物整体赋予有序结构的作用,因此可通过抑制分子的运动而使介电正切或吸湿性下降。进而,通过用作热塑性聚酰亚胺的原料,可获得透气性低、长期耐热接着性优异的聚酰亚胺。Moreover, as a diamine residue contained in the thermoplastic polyimide which comprises a thermoplastic polyimide layer, the diamine residue derived from the diamine compound represented by General formula (A1) is also preferable. The diamine compound [diamine (A1)] represented by the formula (A1) is as described in the description of the non-thermoplastic polyimide. The diamine (A1) has a rigid structure and has a function of imparting an ordered structure to the entire polymer, and thus can reduce the dielectric tangent and hygroscopicity by suppressing the movement of molecules. Furthermore, by using it as a raw material of thermoplastic polyimide, the polyimide which is low in air permeability and excellent in long-term heat-resistant adhesiveness can be obtained.

第1实施方式或第2实施方式中,构成热塑性聚酰亚胺层的热塑性聚酰亚胺可在优选为1摩尔份以上且30摩尔份以下的范围内、更优选为5摩尔份以上且20摩尔份以下的范围内含有由二胺(A1)所衍生的二胺残基。通过以所述范围内的量来使用二胺(A1),利用源自单体的刚直结构而聚合物整体形成有序结构,因此可获得为热塑性且透气性及吸湿性低、长期耐热接着性优异的聚酰亚胺。In the first embodiment or the second embodiment, the thermoplastic polyimide constituting the thermoplastic polyimide layer may be preferably in a range of 1 part by mol or more and 30 parts by mol or less, more preferably 5 parts by mol or more and 20 parts by mol. The diamine residue derived from diamine (A1) is contained in the range below a molar part. By using the diamine (A1) in an amount within the above-mentioned range, the polymer as a whole forms an ordered structure due to the rigid structure derived from the monomer, so that it is thermoplastic and has low air permeability and hygroscopicity, and a long-term heat-resistant adhesive can be obtained. Excellent polyimide.

构成热塑性聚酰亚胺层的热塑性聚酰亚胺可在不损及发明的效果的范围内包含由二胺(A1)、二胺(B1)~二胺(B7)以外的二胺化合物所衍生的二胺残基。The thermoplastic polyimide constituting the thermoplastic polyimide layer may contain diamine compounds other than diamine (A1) and diamine (B1) to diamine (B7) within a range that does not impair the effects of the invention. the diamine residue.

热塑性聚酰亚胺中,通过选定所述四羧酸残基及二胺残基的种类、或者应用两种以上的四羧酸残基或二胺残基时各自的摩尔比,可控制热膨胀系数、拉伸弹性系数、玻璃化温度等。另外,热塑性聚酰亚胺中,在具有多个聚酰亚胺的结构单元的情况下,可以嵌段的形式存在,也可无规存在,但优选为无规存在。In thermoplastic polyimide, thermal expansion can be controlled by selecting the type of the tetracarboxylic acid residue and the diamine residue, or the molar ratio of each when two or more tetracarboxylic acid residues or diamine residues are used. coefficient, tensile elastic coefficient, glass transition temperature, etc. Moreover, in a thermoplastic polyimide, when it has several structural units of polyimide, it may exist in the form of a block or may exist randomly, but it is preferable that it exists randomly.

再者,第1实施方式或第2实施方式中,通过将热塑性聚酰亚胺中所含的四羧酸残基及二胺残基均设为芳香族基,可提高聚酰亚胺膜在高温环境下的尺寸精度,且抑制面内延迟(RO)的变化量。Furthermore, in the first embodiment or the second embodiment, by making both the tetracarboxylic acid residue and the diamine residue contained in the thermoplastic polyimide aromatic groups, the polyimide film can be improved in Dimensional accuracy in a high temperature environment and suppression of in-plane retardation (RO) variation.

热塑性聚酰亚胺的酰亚胺基浓度优选为33重量%以下。此处,“酰亚胺基浓度”表示聚酰亚胺中的酰亚胺基部(-(CO)2-N-)的分子量除以聚酰亚胺的结构整体的分子量而得的值。若酰亚胺基浓度超过33重量%,则树脂自身的分子量减小,且因极性基的增加而低吸湿性也变差。第1实施方式或第2实施方式中,通过选择所述二胺化合物的组合而控制热塑性聚酰亚胺中的分子的取向性,由此抑制伴随酰亚胺基浓度下降的CTE的增加,确保低吸湿性。The imide group concentration of the thermoplastic polyimide is preferably 33% by weight or less. Here, the "imide group concentration" means the value obtained by dividing the molecular weight of the imide group part (-(CO) 2 -N-) in the polyimide by the molecular weight of the entire structure of the polyimide. When the imide group concentration exceeds 33% by weight, the molecular weight of the resin itself decreases, and the low hygroscopicity also deteriorates due to an increase in polar groups. In the first embodiment or the second embodiment, the orientation of the molecules in the thermoplastic polyimide is controlled by selecting the combination of the diamine compounds, thereby suppressing the increase in CTE accompanying the decrease in the imide group concentration and ensuring that the Low hygroscopicity.

热塑性聚酰亚胺的重量平均分子量例如优选为10,000~400,000的范围内,更优选为50,000~350,000的范围内。若重量平均分子量未满10,000,则出现膜的强度下降而容易变脆的倾向。另一方面,若重量平均分子量超过400,000,则出现粘度过度增加且涂敷作业时容易发生膜厚度不均、条纹等不良情况的倾向。The weight average molecular weight of the thermoplastic polyimide is, for example, preferably in the range of 10,000 to 400,000, and more preferably in the range of 50,000 to 350,000. When the weight-average molecular weight is less than 10,000, the strength of the film decreases and tends to become brittle. On the other hand, when the weight-average molecular weight exceeds 400,000, the viscosity tends to increase excessively and problems such as uneven film thickness and streaks tend to occur during the coating operation.

第1实施方式或第2实施方式的聚酰亚胺膜中,构成热塑性聚酰亚胺层的热塑性聚酰亚胺可使与铜箔的密接性提高。所述热塑性聚酰亚胺的玻璃化温度为200℃以上且350℃以下的范围内,优选为200℃以上且320℃以下的范围内。In the polyimide film of 1st Embodiment or 2nd Embodiment, the thermoplastic polyimide which comprises a thermoplastic polyimide layer can improve the adhesiveness with copper foil. The glass transition temperature of the thermoplastic polyimide is in the range of 200°C or higher and 350°C or lower, preferably in the range of 200°C or higher and 320°C or lower.

构成热塑性聚酰亚胺层的热塑性聚酰亚胺例如成为电路基板的绝缘树脂中的接着层,因此为了抑制铜的扩散,最优选为完全经酰亚胺化的结构。其中,聚酰亚胺的一部分也可成为酰胺酸。所述酰亚胺化率是使用傅立叶变换红外分光光度计(市售品:日本分光制造的FT/IR620),并利用一次反射衰减全反射(Attenuated Total Reflectance,ATR)法测定聚酰亚胺薄膜的红外线吸收光谱,由此以1015cm-1附近的苯环吸收体为基准,根据源自1780cm-1的酰亚胺基的C=O伸缩的吸光度而算出。Since the thermoplastic polyimide constituting the thermoplastic polyimide layer is, for example, an adhesive layer in an insulating resin of a circuit board, it is most preferable to have a completely imidized structure in order to suppress the diffusion of copper. However, a part of polyimide may be an amic acid. The imidization ratio was measured using a Fourier transform infrared spectrophotometer (commercial product: FT/IR620 manufactured by JASCO), and the polyimide film was measured by the Attenuated Total Reflectance (ATR) method. The infrared absorption spectrum of , was calculated from the absorbance derived from the C=O expansion and contraction of the imide group at 1780 cm -1 on the basis of the benzene ring absorber near 1015 cm -1 .

<聚酰亚胺膜的形态><Form of polyimide film>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜只要为满足所述条件者,则并无特别限定,可为包含绝缘树脂的膜(片),也可为层叠于铜箔、玻璃板、聚酰亚胺系膜、聚酰胺系膜、聚酯系膜等的树脂片等的基材上的状态下的绝缘树脂的膜。The polyimide film of the first embodiment, the second embodiment, or the third embodiment is not particularly limited as long as it satisfies the above conditions, and may be a film (sheet) containing an insulating resin, or may be laminated on The film of insulating resin in the state on the base material, such as a resin sheet, such as a copper foil, a glass plate, a polyimide-type film, a polyamide-type film, and a polyester-type film.

<厚度><Thickness>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜的厚度可根据所使用的目的而设定为规定范围内的厚度。聚酰亚胺膜的厚度例如优选为8μm~50μm的范围内,更优选为11μm~26μm的范围内。若聚酰亚胺膜的厚度小于所述下限值,则有时会产生无法确保电绝缘性、或者因处理(handling)性的下降而在制造步骤中操作变得困难等问题。另一方面,若聚酰亚胺膜的厚度超过所述上限值,则例如需要对用以控制面内延迟(RO)的制造条件进行高精度控制,而产生生产性下降等不良状况。The thickness of the polyimide film of the first embodiment, the second embodiment, or the third embodiment can be set to a thickness within a predetermined range according to the purpose of use. The thickness of the polyimide film is, for example, preferably in the range of 8 μm to 50 μm, and more preferably in the range of 11 μm to 26 μm. When the thickness of the polyimide film is less than the lower limit, problems such as failure to secure electrical insulating properties, or difficulty in handling in manufacturing steps due to deterioration in handling properties may occur. On the other hand, when the thickness of the polyimide film exceeds the upper limit value, for example, the manufacturing conditions for controlling the in-plane retardation (RO) need to be controlled with high precision, resulting in problems such as a drop in productivity.

另外,第1实施方式或第2实施方式的聚酰亚胺膜中,非热塑性聚酰亚胺层与热塑性聚酰亚胺层的厚度比(非热塑性聚酰亚胺层/热塑性聚酰亚胺层)可为1.5~6.0的范围内。若所述比的值小于1.5,则非热塑性聚酰亚胺层相对于聚酰亚胺膜整体变薄,因此面内延迟(RO)的偏差容易变大,若超过6.0,则热塑性聚酰亚胺层变薄,因此聚酰亚胺膜与铜箔的接着可靠性容易下降。所述面内延迟(RO)的控制与构成聚酰亚胺膜的各聚酰亚胺层的树脂构成及其厚度相关。关于作为赋予接着性即高热膨胀性或软化的树脂构成的热塑性聚酰亚胺层,其厚度越大,越会对聚酰亚胺膜的RO的值造成显著影响,因此使非热塑性聚酰亚胺层的厚度的比率增大,且减小热塑性聚酰亚胺层的厚度的比率,并减小聚酰亚胺膜的RO的值与其偏差。In addition, in the polyimide film of the first embodiment or the second embodiment, the thickness ratio of the non-thermoplastic polyimide layer to the thermoplastic polyimide layer (non-thermoplastic polyimide layer/thermoplastic polyimide layer) layer) can be in the range of 1.5 to 6.0. When the value of the ratio is less than 1.5, the non-thermoplastic polyimide layer becomes thinner with respect to the entire polyimide film, so that the variation in in-plane retardation (RO) tends to increase, and when it exceeds 6.0, the thermoplastic polyimide Since the amine layer becomes thinner, the adhesion reliability between the polyimide film and the copper foil tends to decrease. The control of the in-plane retardation (RO) is related to the resin composition and thickness of each polyimide layer constituting the polyimide film. Regarding the thermoplastic polyimide layer, which is a resin that imparts adhesiveness, that is, high thermal expansion or softening, the larger the thickness of the thermoplastic polyimide layer, the more remarkably affects the RO value of the polyimide film. Therefore, the non-thermoplastic polyimide The ratio of the thickness of the amine layer is increased, and the ratio of the thickness of the thermoplastic polyimide layer is decreased, and the value of RO of the polyimide film and its deviation are decreased.

<膜宽><Film width>

第2实施方式中,就更显著地显现出聚酰亚胺膜的尺寸精度的改善效果的观点而言,聚酰亚胺膜优选为膜宽为490mm以上且1100mm以下的范围内、长条状的长度为20m以上者。在连续制造第2实施方式的聚酰亚胺膜的情况下,宽度方向(以下,也称为TD方向)越广的膜,发明的效果越变得特别显著。再者,在连续制造第2实施方式的聚酰亚胺膜的情况下,将长条的聚酰亚胺膜的长边方向称为MD方向。In the second embodiment, the polyimide film preferably has a film width in the range of 490 mm or more and 1100 mm or less, and has a long shape from the viewpoint of more remarkably showing the effect of improving the dimensional accuracy of the polyimide film. The length of 20m or more. In the case where the polyimide film of the second embodiment is continuously produced, the effect of the invention becomes particularly remarkable as the film is wider in the width direction (hereinafter, also referred to as the TD direction). In addition, when manufacturing the polyimide film of 2nd Embodiment continuously, the longitudinal direction of the long polyimide film is called MD direction.

<面内延迟(RO)><In-plane retardation (RO)>

关于第2实施方式的聚酰亚胺膜,面内延迟(RO)的值为5nm以上且50nm以下的范围内,优选为5nm以上且20nm以下的范围内,更优选为5nm以上且15nm以下的范围内。另外,TD方向的RO的偏差(ΔRO)为10nm以下,优选为5nm以下,更优选为3nm以下,由于控制为所述范围内,因此尤其即便为厚度25μm以上的膜,尺寸精度也高。Regarding the polyimide film of the second embodiment, the value of the in-plane retardation (RO) is within the range of 5 nm or more and 50 nm or less, preferably 5 nm or more and 20 nm or less, and more preferably 5 nm or more and 15 nm or less. within the range. In addition, the deviation (ΔRO) of RO in the TD direction is 10 nm or less, preferably 5 nm or less, and more preferably 3 nm or less. Since it is controlled within the above-mentioned range, the dimensional accuracy is particularly high even for a film having a thickness of 25 μm or more.

第2实施方式的聚酰亚胺膜在温度320℃的环境下、压力340MPa/m2、保持时间15分钟的加压前后的面内延迟(RO)的变化量为20nm以下,优选为10nm以下,更优选为5nm以下。第2实施方式的聚酰亚胺膜即便为超过构成热塑性聚酰亚胺层的聚酰亚胺的玻璃化温度的温度,RO的变化量也被控制为所述上限值以下,例如在通过热层压将第2实施方式的聚酰亚胺膜与铜箔贴合的步骤的前后,RO也不易发生变化,因此成为尺寸稳定性优异的聚酰亚胺膜。In the polyimide film of the second embodiment, the amount of change in in-plane retardation (RO) before and after pressing at a temperature of 320° C., a pressure of 340 MPa/m 2 , and a holding time of 15 minutes is 20 nm or less, preferably 10 nm or less. , more preferably 5 nm or less. Even if the polyimide film of the second embodiment is at a temperature exceeding the glass transition temperature of the polyimide constituting the thermoplastic polyimide layer, the amount of change in RO is controlled to be equal to or less than the upper limit. Even before and after the step of bonding the polyimide film of the second embodiment to the copper foil by thermal lamination, RO is not easily changed, so it becomes a polyimide film excellent in dimensional stability.

<热膨胀系数><Coefficient of Thermal Expansion>

第1实施方式或第2实施方式的聚酰亚胺膜例如在作为电路基板的绝缘层而应用的情况下,为了防止翘曲的发生或尺寸稳定性的下降,如所述条件(a-iii)或条件(b-i)规定那样,重要的是膜整体的热膨胀系数(CTE)为10ppm/K以上且30ppm/K以下的范围内,优选为10ppm/K以上且25ppm/K以下的范围内,更优选为10ppm/K~20ppm/K的范围内。若CTE未满10ppm/K、或者超过30ppm/K,则会发生翘曲,或者尺寸稳定性下降。另外,关于第3实施方式的聚酰亚胺膜的热膨胀系数(CTE),也与第1实施方式或第2实施方式相同。When the polyimide film of the first embodiment or the second embodiment is applied as an insulating layer of a circuit board, for example, in order to prevent the occurrence of warpage and the reduction of dimensional stability, the above-mentioned condition (a-iii) ) or condition (b-i), it is important that the coefficient of thermal expansion (CTE) of the entire film is within the range of 10 ppm/K or more and 30 ppm/K or less, preferably 10 ppm/K or more and 25 ppm/K or less, and more It is preferably within the range of 10 ppm/K to 20 ppm/K. When CTE is less than 10 ppm/K or exceeds 30 ppm/K, warpage occurs or dimensional stability decreases. In addition, the coefficient of thermal expansion (CTE) of the polyimide film of the third embodiment is also the same as that of the first embodiment or the second embodiment.

<介电正切><Dielectric tangent>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜例如如所述条件(a-iv)或条件(c-iii)规定那样,例如在作为电路基板的绝缘层而应用的情况下,为了确保阻抗匹配性,作为绝缘层整体,在通过分离介电质共振器(分离介质谐振器(split postdielectric resonator,SPDR))进行测定时的10GHz下的介电正切(Tanδ)可为0.004以下、更优选为0.001以上且0.004以下的范围内、进而优选为0.002以上且0.003以下的范围内。为了改善电路基板的介电特性,尤其重要的是控制绝缘层的介电正切,通过将介电正切设为所述范围内,而增大使传输损失下降的效果。因此,在将聚酰亚胺膜例如作为高频电路基板的绝缘层而应用的情况下,可效率良好地减少传输损失。若绝缘层的10GHz下的介电正切超过0.004,则在用于FPC等电路基板中时,在高频信号的传输路径上容易产生电信号的损失等不良情况。绝缘层的10GHz下的介电正切的下限值并无特别限制,但考虑到将聚酰亚胺作为电路基板的绝缘层而应用时的物性控制。The polyimide film of the first embodiment, the second embodiment, or the third embodiment is applied to, for example, an insulating layer of a circuit board as defined in the above-mentioned condition (a-iv) or condition (c-iii). In this case, in order to ensure impedance matching, the dielectric tangent (Tanδ) at 10 GHz when measured by a split dielectric resonator (split postdielectric resonator (SPDR)) as a whole insulating layer can be obtained. It is 0.004 or less, more preferably, it is in the range of 0.001 or more and 0.004 or less, and still more preferably, it is in the range of 0.002 or more and 0.003 or less. In order to improve the dielectric properties of the circuit board, it is particularly important to control the dielectric tangent of the insulating layer, and by setting the dielectric tangent within the above-mentioned range, the effect of reducing the transmission loss is increased. Therefore, when the polyimide film is applied, for example, as an insulating layer of a high-frequency circuit board, transmission loss can be efficiently reduced. When the dielectric tangent of the insulating layer at 10 GHz exceeds 0.004, when it is used in a circuit board such as an FPC, problems such as loss of electrical signals are likely to occur in the transmission path of high-frequency signals. The lower limit value of the dielectric tangent at 10 GHz of the insulating layer is not particularly limited, but physical property control when polyimide is applied as an insulating layer of a circuit board is considered.

<介电常数><Dielectric constant>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜例如在作为电路基板的绝缘层而应用的情况下,为了确保阻抗匹配性,作为绝缘层整体,优选为10GHz下的介电常数为4.0以下。若绝缘层的10GHz下的介电常数超过4.0,则在用于FPC等电路基板中时,会导致绝缘层的介电损失的恶化,在高频信号的传输路径上容易产生电信号的损失等不良情况。For example, when the polyimide film of the first embodiment, the second embodiment, or the third embodiment is applied as an insulating layer of a circuit board, in order to ensure impedance matching, the insulating layer as a whole is preferably 10 GHz. The dielectric constant is 4.0 or less. When the dielectric constant of the insulating layer at 10 GHz exceeds 4.0, when used in a circuit board such as an FPC, the dielectric loss of the insulating layer is deteriorated, and the loss of electrical signals is likely to occur in the transmission path of high-frequency signals. bad condition.

<吸湿率><Moisture absorption rate>

关于第1实施方式或第2实施方式的聚酰亚胺膜,为了减少在用于FPC等电路基板时的湿度所带来的影响,优选为在23℃、50%RH下的吸湿率为0.7重量%以下。若聚酰亚胺膜的吸湿率超过0.7重量%,则在用于FPC等电路基板中时,容易受到湿度的影响,容易产生高频信号的传输速度的变动等不良情况。即,若聚酰亚胺膜的吸湿率超出所述范围,则容易吸收介电常数及介电正切高的水,因此导致介电常数及介电正切的上升,容易在高频信号的传输路径上产生电信号的损失等不良情况。The polyimide film of the first embodiment or the second embodiment preferably has a moisture absorption rate of 0.7 at 23° C. and 50% RH in order to reduce the influence of humidity when used for circuit boards such as FPC. % by weight or less. When the moisture absorption rate of a polyimide film exceeds 0.7 weight%, when it is used for circuit boards, such as FPC, it is easy to be affected by humidity, and troubles, such as a fluctuation|variation of the transmission speed of a high frequency signal, are easy to arise. That is, if the moisture absorption rate of the polyimide film exceeds the above-mentioned range, it is easy to absorb water with high dielectric constant and dielectric tangent, so that the dielectric constant and dielectric tangent increase, and it is easy to be used in the transmission path of high-frequency signals. There are other problems such as loss of electrical signals.

另外,考虑对聚酰亚胺膜的尺寸稳定性或介电特性的影响,第3实施方式的聚酰亚胺膜优选为在23℃、50%RH下进行24小时调湿时的吸湿率为0.65重量%以下。若吸湿率超过0.65重量%,则有时会使聚酰亚胺膜的尺寸稳定性或介电特性恶化。关于吸湿率为0.65重量%以下这一情况,认为聚酰亚胺中的极性基浓度低,且容易形成高分子链的有序结构,因此对于尺寸稳定性或介电特性的改善而言优选。其中,若吸湿率变低,则存在伴随着高分子链的有序结构的形成而雾度(HAZE)值变高的倾向,因此优选为也考虑后述的雾度值。In addition, in consideration of the influence on the dimensional stability and dielectric properties of the polyimide film, the polyimide film of the third embodiment preferably has a moisture absorption rate when subjected to humidity conditioning at 23° C. and 50% RH for 24 hours. 0.65 wt% or less. When the moisture absorption rate exceeds 0.65% by weight, the dimensional stability and dielectric properties of the polyimide film may be deteriorated. Regarding the moisture absorption rate of 0.65% by weight or less, it is considered that the concentration of polar groups in the polyimide is low and the ordered structure of the polymer chain is easily formed, which is preferable for the improvement of dimensional stability and dielectric properties. . Among them, when the moisture absorption rate is low, the haze value (HAZE) tends to be high along with the formation of the ordered structure of the polymer chain, so it is preferable to also consider the haze value described later.

<拉伸弹性系数><tensile elastic modulus>

另外,第2实施方式的聚酰亚胺膜的拉伸弹性系数优选为3.0GPa~10.0GPa的范围内,可为4.5GPa~8.0GPa的范围内。若聚酰亚胺膜的拉伸弹性系数小于3.0GPa,则有时由于聚酰亚胺自身的强度下降而在将铜张层叠板加工为电路基板时产生膜的破裂等处理上的问题。反之,若聚酰亚胺膜的拉伸弹性系数超过10.0GPa,则相对于铜张层叠板的弯折的刚性上升,结果在将铜张层叠板弯折时施加至铜配线的弯曲应力上升,且耐弯折性下降。通过将聚酰亚胺膜的拉伸弹性系数设为所述范围内,而确保聚酰亚胺膜的强度与柔软性。Moreover, it is preferable that the tensile elastic modulus of the polyimide film of 2nd Embodiment exists in the range of 3.0GPa-10.0GPa, and it may exist in the range of 4.5GPa-8.0GPa. When the tensile modulus of elasticity of the polyimide film is less than 3.0 GPa, the strength of the polyimide itself may decrease, which may cause problems in handling such as film breakage when the copper sheet laminate is processed into a circuit board. Conversely, when the tensile modulus of elasticity of the polyimide film exceeds 10.0 GPa, the rigidity with respect to the bending of the copper-stretched laminate increases, and as a result, the bending stress applied to the copper wiring when the copper-stretched laminate is bent increases. , and the bending resistance decreases. By setting the tensile modulus of elasticity of the polyimide film to be within the above range, the strength and flexibility of the polyimide film are ensured.

<玻璃化温度><Glass transition temperature>

第3实施方式的聚酰亚胺膜如所述条件(c-ii)规定那样玻璃化温度为300℃以上。若玻璃化温度未满300℃,则在制造使用了第3实施方式的聚酰亚胺膜的覆铜板(copper-clad plate,CCL)或FPC时,容易产生膜的膨胀或自配线的剥离等问题。另一方面,通过将玻璃化温度设为300℃以上,聚酰亚胺膜的焊料耐热性或尺寸稳定性提高。The polyimide film of the third embodiment has a glass transition temperature of 300° C. or higher as prescribed by the above-mentioned condition (c-ii). When the glass transition temperature is less than 300° C., when a copper-clad plate (CCL) or FPC using the polyimide film of the third embodiment is produced, expansion of the film and peeling of the wiring are likely to occur. And other issues. On the other hand, by setting the glass transition temperature to be 300° C. or higher, the solder heat resistance and dimensional stability of the polyimide film are improved.

<雾度值><Haze value>

另外,第3实施方式的聚酰亚胺膜优选为在加工为如下的厚度为25μm的聚酰亚胺膜时,基于日本工业标准(Japanese Industrial Standards,JIS)K 7136的雾度(HAZE)值为62%~75%的范围内,所述聚酰亚胺膜是通过蚀刻去除将作为聚酰亚胺的前体的聚酰胺酸的溶液涂敷于十点平均粗糙度(Rz)为0.6μm的铜箔上并进行酰亚胺化而形成的层叠板的所述铜箔而获得。若雾度值超过75%,则经由第3实施方式的聚酰亚胺膜的视认性变低。因此,在对使用聚酰亚胺膜而获得的铜张层叠板(CCL)的光微影步骤、或者使用所述CCL的FPC(挠性印刷基板)安装的过程中,有设置于CCL上的对准标记的视认性下降,且与对准标记的位置对准变得困难,实用性下降的情况。另一方面,若雾度值低于62%,则视认性变高,未推进聚酰亚胺高分子链的有序结构的形成,因此有吸湿特性或介电特性受损之虞。第3实施方式中,为了使有序结构的形成所带来的低介电正切化及低吸湿率化、与视认性的维持并存,将雾度值的优选值设为62%~75%的范围内。The polyimide film of the third embodiment preferably has a haze (HAZE) value based on Japanese Industrial Standards (JIS) K 7136 when processed into a polyimide film having a thickness of 25 μm as follows In the range of 62% to 75%, the polyimide film is removed by etching, and a solution of polyamic acid, which is a precursor of polyimide, is applied to a ten-point average roughness (Rz) of 0.6 μm. The copper foil of the laminated board formed by imidization on the copper foil is obtained. When the haze value exceeds 75%, the visibility through the polyimide film of the third embodiment will be lowered. Therefore, in a photolithography step of a copper sheet laminate (CCL) obtained by using a polyimide film, or a process of mounting an FPC (flexible printed circuit board) using the CCL, there is a When the visibility of the alignment mark is lowered, the position alignment with the alignment mark becomes difficult, and the practicality is lowered. On the other hand, when the haze value is less than 62%, the visibility becomes high and the formation of the ordered structure of the polyimide polymer chain is not promoted, so that the hygroscopic properties and the dielectric properties may be impaired. In the third embodiment, the preferable value of the haze value is set to 62% to 75% in order to achieve a lower dielectric tangent and a lower moisture absorption rate due to the formation of an ordered structure and to maintain visibility. In the range.

<膜伸长率><Film elongation>

第3实施方式的聚酰亚胺膜优选为膜伸长率为30%以上。于将第3实施方式的聚酰亚胺膜例如用作FPC的绝缘层时,需要弯折收纳于移动设备等框体内的小空间内。所述使用方式中,若膜伸长率低,则成为配线的断线的原因。因此,关于第3实施方式的聚酰亚胺膜,将优选的膜伸长率设为30%以上。The polyimide film of the third embodiment preferably has a film elongation of 30% or more. When the polyimide film of the third embodiment is used, for example, as an insulating layer of an FPC, it needs to be folded and stored in a small space in a casing of a mobile device or the like. In the above-mentioned usage mode, when the film elongation rate is low, it becomes a cause of disconnection of the wiring. Therefore, about the polyimide film of 3rd Embodiment, the preferable film elongation is made into 30 % or more.

<填料><Packing>

第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜也可视需要在非热塑性聚酰亚胺层或热塑性聚酰亚胺层中含有无机填料。具体而言,例如可列举:二氧化硅、氧化铝、氧化镁、氧化铍、氮化硼、氮化铝、氮化硅、氟化铝、氟化钙等。这些可使用一种或者混合使用两种以上。The polyimide film of 1st Embodiment, 2nd Embodiment, or 3rd Embodiment may contain an inorganic filler in a non-thermoplastic polyimide layer or a thermoplastic polyimide layer as needed. Specifically, for example, silica, alumina, magnesia, beryllium oxide, boron nitride, aluminum nitride, silicon nitride, aluminum fluoride, calcium fluoride, etc. are mentioned. These can be used alone or in combination of two or more.

[制造方法][Manufacturing method]

作为第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜的制造方法的态样,例如有[1]于在支持基材上涂布聚酰胺酸溶液并干燥后,进行酰亚胺化而制造聚酰亚胺膜的方法;[2]于在支持基材上涂布聚酰胺酸溶液并干燥后,自支持基材剥离聚酰胺酸的凝胶膜,进行酰亚胺化而制造聚酰亚胺膜的方法。另外,第1实施方式或第2实施方式的聚酰亚胺膜为包含多层聚酰亚胺层的聚酰亚胺膜,因此作为其制造方法的态样,例如可列举[3]重复进行多次在支持基材上涂布聚酰胺酸溶液并干燥的操作,然后进行酰亚胺化的方法(以下,流延法);[4]在通过多层挤压,同时将聚酰胺酸层叠为多层的状态下进行涂布并干燥,然后进行酰亚胺化的方法(以下,多层挤压法)等。关于将第3实施方式的聚酰亚胺膜作为包含多层聚酰亚胺层的多层聚酰亚胺膜中的一层而应用的情况,也相同。作为将聚酰亚胺溶液(或聚酰胺酸溶液)涂布于基材上的方法,并无特别限制,例如可利用缺角轮、模具、刮刀、模唇等涂布机进行涂布。在形成多层聚酰亚胺层时,优选为重复进行将聚酰亚胺溶液(或聚酰胺酸溶液)涂布于基材上并干燥的操作。As an aspect of the manufacturing method of the polyimide film of the first embodiment, the second embodiment, or the third embodiment, for example, [1] after applying a polyamic acid solution on a support substrate and drying, performing A method of producing a polyimide film by imidization; [2] After coating a polyamic acid solution on a support substrate and drying, peeling off the gel film of the polyamic acid from the support substrate to carry out imide A method of producing a polyimide film by chemistry. In addition, since the polyimide film of 1st Embodiment or 2nd Embodiment is a polyimide film containing a multilayer polyimide layer, as an aspect of the manufacturing method, for example, [3] Repeating A method of applying a polyamic acid solution to a support substrate multiple times and drying it, followed by a method of imidization (hereinafter, casting method); [4] Laminate the polyamic acid while extruding through multiple layers A method of applying and drying in a multilayered state, followed by imidization (hereinafter, a multilayer extrusion method) or the like. The same applies to the case where the polyimide film of the third embodiment is applied as one layer in the multilayer polyimide film including the multilayer polyimide layer. It does not specifically limit as a method to apply|coat a polyimide solution (or a polyamic acid solution) to a base material, For example, it can apply|coat using a coater, such as a cutout wheel, a die, a doctor blade, and a die lip. When forming a multilayer polyimide layer, it is preferable to repeat the operation of applying a polyimide solution (or a polyamic acid solution) to a base material and drying it.

所述[1]的方法例如可包括下述步骤1a~步骤1c:For example, the method of [1] may include the following steps 1a to 1c:

(1a)在支持基材上涂布聚酰胺酸溶液并干燥的步骤;(1a) the step of coating the polyamic acid solution on the support substrate and drying;

(1b)通过在支持基材上对聚酰胺酸进行热处理并进行酰亚胺化而形成聚酰亚胺层的步骤;(1b) a step of forming a polyimide layer by heat-treating and imidizing a polyamic acid on a support substrate;

(1c)通过将支持基材与聚酰亚胺层分离而获得聚酰亚胺膜的步骤。(1c) A step of obtaining a polyimide film by separating the support substrate from the polyimide layer.

所述[2]的方法例如可包括下述步骤2a~步骤2c:For example, the method of [2] may include the following steps 2a to 2c:

(2a)在支持基材上涂布聚酰胺酸溶液并干燥的步骤;(2a) the step of coating the polyamic acid solution on the support substrate and drying;

(2b)将支持基材与聚酰胺酸的凝胶膜分离的步骤;(2b) the step of separating the support substrate from the gel film of polyamic acid;

(2c)通过对聚酰胺酸的凝胶膜进行热处理并进行酰亚胺化而获得聚酰亚胺膜的步骤。(2c) The step of obtaining a polyimide film by heat-treating and imidizing the gel film of polyamic acid.

关于所述[3]的方法,除了在所述[1]的方法或[2]的方法中重复进行多次步骤1a或步骤2a而在支持基材上形成聚酰胺酸的层叠结构体以外,可与所述[1]的方法或[2]的方法同样地实施。With regard to the method of the above [3], except that in the method of the above [1] or the method of [2], the step 1a or the step 2a is repeatedly performed a plurality of times to form the laminated structure of the polyamic acid on the support substrate, It can be implemented in the same manner as the method of [1] or the method of [2].

关于所述[4]的方法,除了在所述[1]的方法的步骤1a或者[2]的方法的步骤2a中通过多层挤压并同时涂布聚酰胺酸的层叠结构体且进行干燥以外,可与所述[1]的方法或[2]的方法同样地实施。Regarding the method of the above [4], except that in the step 1a of the method of the [1] or the step 2a of the method of the [2], the laminated structure of the polyamic acid is simultaneously coated and dried by multi-layer extrusion Other than that, it can be implemented in the same manner as the method of [1] or the method of [2].

第1实施方式、第2实施方式或第3实施方式中制造的聚酰亚胺膜优选为在支持基材上完成聚酰胺酸的酰亚胺化。由于聚酰胺酸的树脂层在被固定于支持基材上的状态下进行酰亚胺化,因此可抑制酰亚胺化过程中的聚酰亚胺层的伸缩变化,维持聚酰亚胺膜的厚度或尺寸精度。另外,在将第3实施方式的聚酰亚胺膜作为包含多层聚酰亚胺层的多层聚酰亚胺膜中的一层而应用的情况下,在自例如120℃至360℃的范围内的温度下阶段性地进行用以酰亚胺化的热处理,并且将热处理时间控制为5分钟以上、优选为10分钟~20分钟的范围内,由此可有效地抑制发泡,防止聚酰亚胺层的膨胀等不良状况。In the polyimide film produced in the first embodiment, the second embodiment, or the third embodiment, it is preferable that the imidization of the polyamic acid is completed on the support substrate. Since the resin layer of the polyamic acid is imidized in a state of being fixed on the support substrate, the change in expansion and contraction of the polyimide layer during the imidization process can be suppressed, and the polyimide film can be maintained. thickness or dimensional accuracy. In addition, when applying the polyimide film of 3rd Embodiment as one layer of the multilayer polyimide film including the multilayer polyimide layer, for example, at a temperature from 120° C. to 360° C. The heat treatment for imidization is performed stepwise at a temperature within the range, and the heat treatment time is controlled within a range of 5 minutes or more, preferably within a range of 10 minutes to 20 minutes, thereby effectively suppressing foaming and preventing polymerization. Defects such as swelling of the imide layer.

关于在支持基材上完成聚酰胺酸的酰亚胺化的聚酰亚胺膜,通过自支持基材分离聚酰亚胺膜时所施加的对聚酰亚胺膜的张力、或者例如在使用了刀刃等的剥离时发生的对聚酰亚胺膜的应力等,聚酰亚胺膜延伸,容易产生聚酰亚胺膜的面内延迟(RO)的偏差。尤其,关于第2实施方式的聚酰亚胺膜,构成非热塑性聚酰亚胺层及热塑性聚酰亚胺层的聚酰亚胺中的任一者均容易形成有序结构,因此通过使剥离所需要的应力分散于聚酰亚胺膜的各层,可控制RO。Regarding the polyimide film in which the imidization of the polyamic acid is completed on the supporting substrate, the tension applied to the polyimide film when the polyimide film is separated from the supporting substrate, or, for example, using The polyimide film stretches due to the stress to the polyimide film that occurs when the blade or the like is peeled off, and the variation in the in-plane retardation (RO) of the polyimide film tends to occur. In particular, with regard to the polyimide film of the second embodiment, since any of the polyimides constituting the non-thermoplastic polyimide layer and the thermoplastic polyimide layer easily forms an ordered structure, it is easy to form an ordered structure by peeling off The required stress is dispersed in each layer of the polyimide film, and RO can be controlled.

另外,即便为如下方法也可控制面内延迟(RO),所述方法是将支持基材上的聚酰胺酸的凝胶膜分离,与单轴延伸或双轴延伸同时或连续地对聚酰胺酸的凝胶膜进行酰亚胺化。此时,为了更高精度地控制RO,优选为适当调整延伸操作及酰亚胺化时的升温速度、酰亚胺化的完成温度、负荷等条件。In addition, in-plane retardation (RO) can be controlled even by a method of separating a gel film of polyamic acid on a support substrate, and applying uniaxial stretching or biaxial stretching to polyamide simultaneously or continuously The acid gel film undergoes imidization. In this case, in order to control RO more accurately, it is preferable to appropriately adjust conditions such as the stretching operation and the temperature increase rate during imidization, the completion temperature of imidization, and the load.

[铜张层叠板][Copper sheet laminate]

第1实施方式、第2实施方式或第3实施方式的铜张层叠板具备绝缘层,且在所述绝缘层的至少一个面上具备铜箔,绝缘层的一部分或全部只要使用第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜而形成即可。另外,为了提高绝缘层与铜箔的接着性,绝缘层中的与铜箔相接的层优选为热塑性聚酰亚胺层。因此,关于第3实施方式的聚酰亚胺膜,优选为在与热塑性聚酰亚胺层层叠的状态下用作铜张层叠板。铜箔设置于绝缘层的单面或两面上。即,第1实施方式、第2实施方式或第3实施方式的铜张层叠板可为单面铜张层叠板(单面CCL),也可为两面铜张层叠板(两面CCL)。在单面CCL的情况下,将层叠于绝缘层的单面上的铜箔设为本发明的“第1铜箔层”。在两面CCL的情况下,将层叠于绝缘层的单面上的铜箔设为本发明的“第1铜箔层”,在绝缘层中,将层叠于与层叠有第1铜箔的面为相反侧的面上的铜箔设为本发明的“第2铜箔层”。关于第1实施方式、第2实施方式或第3实施方式的铜张层叠板,对铜箔进行蚀刻等并进行配线电路加工而形成铜配线,从而用作FPC。The copper sheet laminate of the first embodiment, the second embodiment, or the third embodiment includes an insulating layer, and includes a copper foil on at least one surface of the insulating layer, and only uses the first embodiment for part or all of the insulating layer. , the polyimide film of the second embodiment or the third embodiment may be formed. Moreover, in order to improve the adhesiveness of an insulating layer and a copper foil, it is preferable that the layer in contact with the copper foil among the insulating layers is a thermoplastic polyimide layer. Therefore, it is preferable that the polyimide film of 3rd Embodiment is used as a copper sheet laminated board in the state laminated|stacked with the thermoplastic polyimide layer. The copper foil is arranged on one side or both sides of the insulating layer. That is, the copper sheet laminate of the first embodiment, the second embodiment, or the third embodiment may be a single-sided copper sheet laminate (single-sided CCL) or a double-sided copper sheet laminate (double-sided CCL). In the case of single-sided CCL, the copper foil laminated on one surface of the insulating layer is referred to as the "first copper foil layer" of the present invention. In the case of a double-sided CCL, the copper foil laminated on one side of the insulating layer is referred to as the “first copper foil layer” of the present invention, and the insulating layer has the surface laminated on the first copper foil layered as the “first copper foil layer” of the present invention. The copper foil on the opposite side is referred to as the "second copper foil layer" of the present invention. About the copper sheet laminated board of 1st Embodiment, 2nd Embodiment, or 3rd Embodiment, copper foil is etched etc., wiring circuit processing is performed, and copper wiring is formed, and it is used as an FPC.

铜张层叠板例如可通过如下方式制备:准备包含第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜而构成的树脂膜,对其溅镀金属而形成种晶层后,例如通过镀铜而形成铜箔层。The copper sheet laminate can be prepared, for example, by preparing a resin film including the polyimide film of the first embodiment, the second embodiment, or the third embodiment, and sputtering metal to form a seed layer. , for example, a copper foil layer is formed by copper plating.

另外,铜张层叠板也可通过如下方式制备:准备包含第1实施方式、第2实施方式或第3实施方式的聚酰亚胺膜而构成的树脂膜,对其利用热压接等方法层压铜箔。In addition, the copper sheet laminate can also be prepared by preparing a resin film including the polyimide film of the first embodiment, the second embodiment, or the third embodiment, and layering it by a method such as thermocompression bonding. Pressed copper foil.

进而,铜张层叠板也可通过如下方式制备:将含有作为聚酰亚胺的前体的聚酰胺酸的涂布液流延至铜箔上,进行干燥而制成涂布膜后,进行热处理并进行酰亚胺化,而形成聚酰亚胺层。Furthermore, a copper sheet laminate can also be produced by casting a coating liquid containing a polyamic acid as a precursor of a polyimide on a copper foil, drying it to obtain a coating film, and then heat-treating and forming a coating film. The imidization is performed to form a polyimide layer.

<第1铜箔层><1st copper foil layer>

第1实施方式、第2实施方式或第3实施方式的铜张层叠板中,第1铜箔层中使用的铜箔(以下,有时记述为“第1铜箔”)并无特别限定,例如可为压延铜箔也可为电解铜箔。作为第1铜箔,可使用市售的铜箔。In the copper sheet laminate of the first embodiment, the second embodiment, or the third embodiment, the copper foil (hereinafter, sometimes referred to as "first copper foil") used in the first copper foil layer is not particularly limited. For example, It can be rolled copper foil or electrolytic copper foil. As the first copper foil, a commercially available copper foil can be used.

第1实施方式、第2实施方式或第3实施方式中,第1铜箔的厚度优选为18μm以下,更优选为6μm~13μm的范围内,进而优选为6μm~12μm的范围内。通过将第1铜箔的厚度设为18μm以下、优选为13μm以下、进而优选为12μm以下,可提高铜张层叠板(或FPC)的弯折性。另外,就生产稳定性及处理性的观点而言,第1铜箔的厚度的下限值优选为设为6μm。In the first embodiment, the second embodiment or the third embodiment, the thickness of the first copper foil is preferably 18 μm or less, more preferably in the range of 6 μm to 13 μm, and still more preferably in the range of 6 μm to 12 μm. By setting the thickness of the first copper foil to be 18 μm or less, preferably 13 μm or less, and more preferably 12 μm or less, the bendability of the copper sheet laminate (or FPC) can be improved. Moreover, it is preferable to make the lower limit of the thickness of a 1st copper foil into 6 micrometers from a viewpoint of production stability and handleability.

另外,第1实施方式、第2实施方式或第3实施方式中,第1铜箔的拉伸弹性系数例如优选为10GPa~35GPa的范围内,更优选为15GPa~25GPa的范围内。在使用压延铜箔作为第1铜箔的情况下,若通过热处理进行退火,则柔软性容易变高。因此,若铜箔的拉伸弹性系数小于所述下限值,则于在长条的第1铜箔上形成绝缘层的步骤中,第1铜箔自身的刚性因加热而下降。另一方面,若拉伸弹性系数超过所述上限值,则在将FPC弯折时利用铜配线施加大的弯曲应力,所述耐弯折性下降。再者,压延铜箔存在如下倾向:通过在铜箔上形成绝缘层时的热处理条件、或者形成绝缘层后的铜箔的退火处理等而其拉伸弹性系数发生变化。因此,第1实施方式、第2实施方式或第3实施方式中,在最终所得的铜张层叠板中,只要第1铜箔的拉伸弹性系数为所述范围内即可。Moreover, in 1st Embodiment, 2nd Embodiment, or 3rd Embodiment, it is preferable to exist in the range of 10GPa-35GPa, and it is more preferable to exist in the range of 15GPa-25GPa as the tensile elastic modulus of the 1st copper foil, for example. When the rolled copper foil is used as the first copper foil, when annealing is performed by heat treatment, the flexibility tends to increase. Therefore, when the tensile modulus of elasticity of the copper foil is less than the lower limit value, in the step of forming the insulating layer on the long first copper foil, the rigidity of the first copper foil itself is reduced by heating. On the other hand, when the tensile elastic modulus exceeds the upper limit value, a large bending stress is applied by the copper wiring when the FPC is bent, and the bending resistance decreases. In addition, the rolled copper foil tends to change its tensile elastic modulus by the heat treatment conditions when forming the insulating layer on the copper foil, or the annealing treatment of the copper foil after forming the insulating layer, and the like. Therefore, in the first embodiment, the second embodiment, or the third embodiment, in the finally obtained copper sheet laminate, the tensile modulus of elasticity of the first copper foil may be within the above-described range.

<第2铜箔层><Second copper foil layer>

第1实施方式、第2实施方式或第3实施方式中,第2铜箔层层叠于绝缘层中的与第1铜箔层为相反侧的面上。作为第2铜箔层中使用的铜箔(第2铜箔),并无特别限定,例如可为压延铜箔也可为电解铜箔。另外,作为第2铜箔,也可使用市售的铜箔。再者,作为第2铜箔,也可使用与第1铜箔相同者。In 1st Embodiment, 2nd Embodiment, or 3rd Embodiment, the 2nd copper foil layer is laminated|stacked on the surface on the opposite side to the 1st copper foil layer among the insulating layers. It does not specifically limit as a copper foil (2nd copper foil) used for a 2nd copper foil layer, For example, a rolled copper foil may be sufficient as an electrolytic copper foil. Moreover, a commercially available copper foil can also be used as a 2nd copper foil. In addition, as a 2nd copper foil, the same thing as a 1st copper foil can also be used.

[电路基板][circuit board]

第1实施方式、第2实施方式或第3实施方式的铜张层叠板主要作为FPC等的电路基板材料有用。即,可利用常法将第1实施方式、第2实施方式或第3实施方式的铜张层叠板的铜箔加工成图案状而形成配线层,由此制造作为本发明的一实施方式的FPC。The copper sheet laminate of the first embodiment, the second embodiment, or the third embodiment is mainly useful as a circuit board material such as FPC. That is, the copper foil of the copper sheet laminate according to the first embodiment, the second embodiment, or the third embodiment can be processed into a pattern by an ordinary method to form a wiring layer, thereby producing the copper foil which is one embodiment of the present invention. FPC.

实施例Example

以下示出实施例,并对本发明的特征进行更具体的说明。其中,本发明的范围并不限定于实施例。再者,以下的实施例中,只要无特别说明,各种测定、评价为利用下述者。An Example is shown below, and the characteristic of this invention is demonstrated more concretely. However, the scope of the present invention is not limited to the Examples. In addition, in the following examples, unless otherwise specified, various measurements and evaluations were performed by the following ones.

[粘度的测定][Measurement of Viscosity]

使用E型粘度计(博勒飞(Brookfield)公司制造、商品名:DV-II+Pro),测定25℃下的粘度。以扭矩成为10%~90%的方式设定转速,在开始测定后经过2分钟后,读取粘度稳定时的值。The viscosity at 25°C was measured using an E-type viscometer (manufactured by Brookfield, trade name: DV-II+Pro). The rotational speed was set so that the torque would be 10% to 90%, and the value when the viscosity was stabilized was read after 2 minutes elapsed after the measurement was started.

[玻璃化温度(Tg)的测定][Measurement of glass transition temperature (Tg)]

关于玻璃化温度,使用动态粘弹性测定装置(DMA:UBM公司制造、商品名:E4000F),在自30℃起至400℃为止在升温速度为4℃/分钟、频率为11Hz下对5mm×20mm的尺寸的聚酰亚胺膜进行测定,将弹性系数变化(tanδ)为最大的温度设为玻璃化温度。再者,将显示使用DMA测定的30℃下的储存弹性系数为1.0×109Pa以上且280℃下的储存弹性系数未满3.0×108Pa者设为“热塑性”,将显示30℃下的储存弹性系数为1.0×109Pa以上且280℃下的储存弹性系数为3.0×108Pa以上者设为“非热塑性”。Regarding the glass transition temperature, using a dynamic viscoelasticity measuring apparatus (DMA: UBM Co., Ltd., trade name: E4000F), from 30° C. to 400° C. at a temperature increase rate of 4° C./min and a frequency of 11 Hz, 5 mm×20 mm The polyimide film of the size was measured, and the temperature at which the elastic modulus change (tan δ) became the largest was set as the glass transition temperature. In addition, those showing that the storage elastic modulus at 30°C measured by DMA is 1.0×10 9 Pa or more and the storage elastic modulus at 280° C. is less than 3.0×10 8 Pa are regarded as “thermoplastic”, A storage elastic modulus of 1.0×10 9 Pa or more and a storage elastic modulus at 280° C. of 3.0×10 8 Pa or more were defined as “non-thermoplastic”.

[热膨胀系数(CTE)的测定][Measurement of Coefficient of Thermal Expansion (CTE)]

使用热机械分析仪(布鲁克(Bruker)公司制造、商品名:4000SA),一面对3mm×20mm的尺寸的聚酰亚胺膜施加5.0g的负荷一面以一定的升温速度自30℃起升温至265℃为止,进而在所述温度下保持10分钟后,以5℃/分钟的速度进行冷却,求出自250℃起至100℃为止的平均热膨胀系数(热膨胀系数)。Using a thermomechanical analyzer (manufactured by Bruker, trade name: 4000SA), the polyimide film having a size of 3 mm×20 mm was heated from 30° C. to a temperature of 5.0 g at a constant temperature increase rate. 265 degreeC, after holding at the said temperature for 10 minutes, it cooled at the rate of 5 degreeC/min, and calculated|required the average thermal expansion coefficient (thermal expansion coefficient) from 250 degreeC to 100 degreeC.

[吸湿率测定][Measurement of moisture absorption rate]

准备两片聚酰亚胺膜的试验片(宽度4cm×长度25cm),在80℃下干燥1小时。在干燥后立即放入23℃/50%RH的恒温恒湿室内,静置24小时以上,根据其前后的重量变化并通过下式求出。Two test pieces of polyimide film (width 4 cm×length 25 cm) were prepared, and were dried at 80° C. for 1 hour. Immediately after drying, it was placed in a constant temperature and humidity room of 23°C/50% RH, left to stand for 24 hours or more, and was obtained by the following formula from the weight change before and after.

吸湿率(重量%)=[(吸湿后重量-干燥后重量)/干燥后重量]×100Moisture absorption rate (% by weight)=[(weight after moisture absorption-weight after drying)/weight after drying]×100

[介电常数及介电正切的测定][Determination of dielectric constant and dielectric tangent]

使用向量网路分析仪(安捷伦(Agilent)公司制造、商品名E8363C)及分离介电质共振器(SPDR共振器),测定频率10GHz下的树脂片的介电常数及介电正切。再者,测定中使用的材料是在温度:24℃~26℃、湿度:45%~55%的条件下放置24小时者。Using a vector network analyzer (manufactured by Agilent, trade name E8363C) and a separation dielectric resonator (SPDR resonator), the dielectric constant and dielectric tangent of the resin sheet at a frequency of 10 GHz were measured. In addition, the material used for the measurement was left to stand for 24 hours under the conditions of temperature: 24°C to 26°C and humidity: 45% to 55%.

[酰亚胺基浓度的计算][Calculation of imide group concentration]

将酰亚胺基部(-(CO)2-N-)的分子量除以聚酰亚胺的结构整体的分子量所得的值设为酰亚胺基浓度。The value obtained by dividing the molecular weight of the imide group part (-(CO) 2 -N-) by the molecular weight of the entire structure of the polyimide was defined as the imide group concentration.

[铜箔的表面粗糙度的测定][Measurement of Surface Roughness of Copper Foil]

关于铜箔的表面粗糙度,使用原子力显微镜(Atomic Force Microscope,AFM)(布鲁克AXS(Bruker AXS)公司制造、商品名:迪蒙苏仪科(Dimension Icon)型SPM)、探针(布鲁克AXS(Bruker AXS)公司制造、商品名:TESPA(NCHV)、前端曲率半径为10nm、弹簧常数为42N/m),利用敲击模式(Tapping Mode),对铜箔表面的80μm×80μm的范围进行测定,求出十点平均粗糙度(Rz)。For the surface roughness of the copper foil, an atomic force microscope (Atomic Force Microscope, AFM) (manufactured by Bruker AXS, trade name: Dimension Icon type SPM), a probe (Bruker AXS (Bruker AXS) Manufactured by Bruker AXS), trade name: TESPA (NCHV), tip curvature radius: 10 nm, spring constant: 42 N/m), using the tapping mode (Tapping Mode), the copper foil surface was measured in the range of 80 μm × 80 μm, The ten-point average roughness (Rz) was obtained.

[剥离强度的测定][Measurement of peel strength]

将两面铜张层叠板(铜箔/树脂层/铜箔)的热压接侧与流延侧的两面的铜箔进行电路加工成宽度为0.8mm(以两面的铜箔成为相同位置的方式进行配线加工)后,切断为宽度:8cm×长度:4cm,而制备测定样品。测定样品的流延侧及热压接侧的剥离强度是使用滕喜龙测试仪(Tensilon Tester)(东洋精机制作所制造、商品名:斯特罗格拉夫(Strograph)VE-1D),通过双面胶带将测定样品的热压接侧或流延侧的铜箔面固定于铝板上,沿90°方向以50mm/分钟的速度剥离另一个铜箔,而求出自树脂层剥离10mm时的中央值强度。此时,将剥离强度为1.0kN/m以上者设为◎(优异)、0.7kN/m以上且未满1.0kN/m者设为○(良好)、0.4kN/m以上且未满0.7kN/m者设为△(合格)、未满0.4kN/m者设为×(不合格)。The copper foil on both sides of the thermocompression bonding side and the casting side of the double-sided copper sheet laminate (copper foil/resin layer/copper foil) was circuit-processed to have a width of 0.8mm (the copper foil on both sides was at the same position. After wiring processing), it was cut into width: 8 cm x length: 4 cm, and a measurement sample was prepared. The peel strength on the casting side and the thermocompression bonding side of the sample was measured by using a Tensilon Tester (manufactured by Toyo Seiki Co., Ltd., trade name: Strograph VE-1D). Tape to fix the copper foil surface on the thermocompression bonding side or the casting side of the measurement sample to an aluminum plate, peel off the other copper foil in the 90° direction at a speed of 50 mm/min, and obtain the median value when peeling 10 mm from the resin layer strength. At this time, the peel strength was 1.0 kN/m or more as ⊚ (excellent), 0.7 kN/m or more and less than 1.0 kN/m as ○ (good), and 0.4 kN/m or more and less than 0.7 kN /m was set as △ (pass), and those less than 0.4kN/m were set as × (failure).

[面内延迟(RO)的测定][Measurement of in-plane retardation (RO)]

面内延迟(RO)是使用双折射率计(福特尼克莱迪思(photonic-lattice)公司制造、商品名:宽量程(Wide Range)双折射评价系统WPA-100),求出聚酰亚胺膜的面内方向的延迟。测定波长为543nm。The in-plane retardation (RO) was determined using a birefringence meter (manufactured by Photonic-lattice Co., Ltd., trade name: Wide Range Birefringence Evaluation System WPA-100). Retardation in the in-plane direction of the film. The measurement wavelength was 543 nm.

[雾度值的测定][Measurement of haze value]

雾度值的测定是使用雾度测定装置(浊度计:日本电色工业公司制造、商品名:NDH5000),并通过JIS K 7136中记载的测定方法对5cm×5cm的尺寸的聚酰亚胺膜进行。The haze value was measured by using a haze measuring apparatus (turbidity meter: Nippon Denshoku Kogyo Co., Ltd., trade name: NDH5000), and using the measurement method described in JIS K 7136 on a polyimide having a size of 5 cm×5 cm membrane.

[膜伸长率的测定][Measurement of film elongation]

关于切成为宽度12.7mm×长度127mm的聚酰亚胺膜,使用拉力测试仪(tensiontester)(艾安德(Orientec)制造的滕喜龙(Tensilon)),以50mm/min进行拉伸试验,而求出25℃下的膜伸长率。The polyimide film cut into a width of 12.7 mm×length of 127 mm was obtained by performing a tensile test at 50 mm/min using a tension tester (Tensilon manufactured by Orientec). Film elongation at 25°C.

实施例及参考例中使用的缩略词表示以下的化合物。Abbreviations used in Examples and Reference Examples represent the following compounds.

BPDA:3,3',4,4'-联苯四羧酸二酐BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride

PMDA:均苯四甲酸二酐PMDA: pyromellitic dianhydride

NTCDA:2,3,6,7-萘四羧酸二酐NTCDA: 2,3,6,7-naphthalenetetracarboxylic dianhydride

TAHQ:1,4-亚苯基双(偏苯三甲酸单酯)二酐TAHQ: 1,4-phenylene bis(trimellitic acid monoester) dianhydride

TMEG:乙二醇双偏苯三酸酐TMEG: Ethylene Glycol Ditrimellitic Anhydride

m-TB:2,2'-二甲基-4,4'-二氨基联苯m-TB: 2,2'-dimethyl-4,4'-diaminobiphenyl

TPE-R:1,3-双(4-氨基苯氧基)苯TPE-R: 1,3-bis(4-aminophenoxy)benzene

TPE-Q:1,4-双(4-氨基苯氧基)苯TPE-Q: 1,4-bis(4-aminophenoxy)benzene

APB:1,3-双(3-氨基苯氧基)苯APB: 1,3-bis(3-aminophenoxy)benzene

3,3'-DAPM:3,3'-二氨基-二苯基甲烷3,3'-DAPM: 3,3'-Diamino-diphenylmethane

DTBAB:1,4-双(4-氨基苯氧基)-2,5-二-叔丁基苯DTBAB: 1,4-bis(4-aminophenoxy)-2,5-di-tert-butylbenzene

BAPP:2,2-双[4-(4-氨基苯氧基)苯基]丙烷BAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]propane

APAB:4-氨基苯基-4'-氨基苯甲酸酯APAB: 4-Aminophenyl-4'-aminobenzoate

双苯胺-M:1,3-双[2-(4-氨基苯基)-2-丙基]苯Dianiline-M: 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene

双苯胺-P:1,4-双[2-(4-氨基苯基)-2-丙基]苯(三井精细化学公司制造、商品名:双苯胺-P)Dianiline-P: 1,4-bis[2-(4-aminophenyl)-2-propyl]benzene (manufactured by Mitsui Fine Chemicals, trade name: Dianiline-P)

AABOZ:6-氨基-2-(4-氨基苯氧基)苯并噁唑AABOZ: 6-amino-2-(4-aminophenoxy)benzoxazole

DTAm:2,6-二氨基-3,5-二乙基甲苯及2,4-二氨基-3,5-二乙基甲苯的混合物(依原化学工业(Ihara Chemical Industry)公司制造、商品名:哈德屈尔(Hardcure)10、胺价:629KOHmg/g)DTAm: A mixture of 2,6-diamino-3,5-diethyltoluene and 2,4-diamino-3,5-diethyltoluene (manufactured by Ihara Chemical Industry, trade name : Hardcure 10, Amine value: 629KOHmg/g)

BAPM:双(4-氨基-3-乙基-5-甲基苯基)甲烷(依原化学工业(Ihara ChemicalIndustry)公司制造、商品名:屈尔哈德(Curehard)MED)BAPM: bis(4-amino-3-ethyl-5-methylphenyl)methane (manufactured by Ihara Chemical Industry, trade name: Curehard MED)

DMAc:N,N-二甲基乙酰胺DMAc: N,N-Dimethylacetamide

(合成例A-1)(Synthesis Example A-1)

在氮气流下,在300ml的分离式烧瓶中投入1.335g的m-TB(0.0063摩尔)及10.414g的TPE-R(0.0356摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加0.932g的PMDA(0.0043摩尔)及11.319g的BPDA(0.0385摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-1。聚酰胺酸溶液A-1的溶液粘度为1,420cps。Under a nitrogen stream, 1.335 g of m-TB (0.0063 mol), 10.414 g of TPE-R (0.0356 mol), and DMAc in such an amount that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 0.932 g of PMDA (0.0043 mol) and 11.319 g of BPDA (0.0385 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-1. The solution viscosity of the polyamic acid solution A-1 was 1,420 cps.

其次,在将聚酰胺酸溶液A-1以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-1(热塑性、Tg:256℃、吸湿率:0.36重量%)。另外,构成聚酰亚胺膜A-1的聚酰亚胺的酰亚胺基浓度为26.4重量%。Next, after the polyamic acid solution A-1 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-1 (thermoplastic, Tg: 256 degreeC, moisture absorption rate: 0.36weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-1 was 26.4% by weight.

(合成例A-2)(Synthesis Example A-2)

在氮气流下,在300ml的分离式烧瓶中投入0.451g的m-TB(0.0021摩尔)及11.794g的TPE-R(0.0403摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.834g的PMDA(0.0130摩尔)及8.921g的BPDA(0.0303摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-2。聚酰胺酸溶液A-2的溶液粘度为1,510cps。Under a nitrogen stream, 0.451 g of m-TB (0.0021 mol), 11.794 g of TPE-R (0.0403 mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 2.834 g of PMDA (0.0130 mol) and 8.921 g of BPDA (0.0303 mol), the polymerization reaction was continued at room temperature for 3 hours while stirring to obtain a polyamic acid solution A-2. The solution viscosity of the polyamic acid solution A-2 was 1,510 cps.

其次,在将聚酰胺酸溶液A-2以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-2(热塑性、Tg:242℃、吸湿率:0.35重量%)。另外,构成聚酰亚胺膜A-2的聚酰亚胺的酰亚胺基浓度为26.5重量%。Next, after the polyamic acid solution A-2 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-2 (thermoplastic, Tg: 242 degreeC, moisture absorption rate: 0.35weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-2 was 26.5% by weight.

(合成例A-3)(Synthesis Example A-3)

在氮气流下,在300ml的分离式烧瓶中投入0.908g的m-TB(0.0043摩尔)及11.253g的TPE-R(0.0385摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.855g的PMDA(0.0131摩尔)及8.985g的BPDA(0.0305摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-3。聚酰胺酸溶液A-3的溶液粘度为1,550cps。Under a nitrogen stream, 0.908 g of m-TB (0.0043 mol), 11.253 g of TPE-R (0.0385 mol), and DMAc in such an amount that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 2.855 g of PMDA (0.0131 mol) and 8.985 g of BPDA (0.0305 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-3. The solution viscosity of the polyamic acid solution A-3 was 1,550 cps.

其次,在将聚酰胺酸溶液A-3以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-3(热塑性、Tg:240℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜A-3的聚酰亚胺的酰亚胺基浓度为26.9重量%。Next, the polyamic acid solution A-3 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-3 (thermoplastic, Tg: 240 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-3 was 26.9% by weight.

(合成例A-4)(Synthesis Example A-4)

在氮气流下,在300ml的分离式烧瓶中投入1.372g的m-TB(0.0065摩尔)及10.704g的TPE-R(0.0366摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.875g的PMDA(0.0132摩尔)及9.049g的BPDA(0.0308摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-4。聚酰胺酸溶液A-4的溶液粘度为1,580cps。Under a nitrogen stream, 1.372 g of m-TB (0.0065 mol), 10.704 g of TPE-R (0.0366 mol), and DMAc in an amount such that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 2.875 g of PMDA (0.0132 mol) and 9.049 g of BPDA (0.0308 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-4. The solution viscosity of the polyamic acid solution A-4 was 1,580 cps.

其次,在将聚酰胺酸溶液A-4以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-4(热塑性、Tg:240℃、吸湿率:0.29重量%)。另外,构成聚酰亚胺膜A-4的聚酰亚胺的酰亚胺基浓度为27.1重量%。Next, after the polyamic acid solution A-4 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-4 (thermoplastic, Tg: 240 degreeC, moisture absorption rate: 0.29weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-4 was 27.1% by weight.

(合成例A-5)(Synthesis Example A-5)

在氮气流下,在300ml的分离式烧瓶中投入1.842g的m-TB(0.0087摩尔)及10.147g的TPE-R(0.0347摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.896g的PMDA(0.0133摩尔)及9.115g的BPDA(0.0310摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-5。聚酰胺酸溶液A-5的溶液粘度为1,610cps。Under a nitrogen stream, 1.842 g of m-TB (0.0087 mol), 10.147 g of TPE-R (0.0347 mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 2.896 g of PMDA (0.0133 mol) and 9.115 g of BPDA (0.0310 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-5. The solution viscosity of the polyamic acid solution A-5 was 1,610 cps.

其次,在将聚酰胺酸溶液A-5以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-5(热塑性、Tg:244℃、吸湿率:0.27重量%)。另外,构成聚酰亚胺膜A-5的聚酰亚胺的酰亚胺基浓度为27.4重量%。Next, the polyamic acid solution A-5 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-5 (thermoplastic, Tg: 244 degreeC, moisture absorption rate: 0.27weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-5 was 27.4% by weight.

(合成例A-6)(Synthesis Example A-6)

在氮气流下,在300ml的分离式烧瓶中投入2.804g的m-TB(0.0132摩尔)及9.009g的TPE-R(0.0308摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.938g的PMDA(0.0135摩尔)及9.249g的BPDA(0.0314摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-6。聚酰胺酸溶液A-6的溶液粘度为1,720cps。Under a nitrogen stream, 2.804 g of m-TB (0.0132 mol), 9.009 g of TPE-R (0.0308 mol), and DMAc in such an amount that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 2.938 g of PMDA (0.0135 mol) and 9.249 g of BPDA (0.0314 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-6. The solution viscosity of the polyamic acid solution A-6 was 1,720 cps.

其次,在将聚酰胺酸溶液A-6以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-6(热塑性、Tg:248℃、吸湿率:0.27重量%)。另外,构成聚酰亚胺膜A-6的聚酰亚胺的酰亚胺基浓度为27.8重量%。Next, after the polyamic acid solution A-6 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-6 (thermoplastic, Tg: 248 degreeC, moisture absorption rate: 0.27weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-6 was 27.8% by weight.

(合成例A-7)(Synthesis Example A-7)

在氮气流下,在300ml的分离式烧瓶中投入1.469g的APAB(0.0064摩尔)及10.658g的TPE-R(0.0365摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.863g的PMDA(0.0131摩尔份)及9.011g的BPDA(0.0306摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-7。聚酰胺酸溶液A-7的溶液粘度为1,280cps。Under a nitrogen stream, 1.469 g of APAB (0.0064 mol), 10.658 g of TPE-R (0.0365 mol), and DMAc were put into a 300-ml separable flask in such an amount that the solid content concentration after polymerization was 12% by weight, and the mixture was heated at room temperature. Stir and dissolve. Next, after adding 2.863 g of PMDA (0.0131 mol part) and 9.011 g of BPDA (0.0306 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-7. The solution viscosity of the polyamic acid solution A-7 was 1,280 cps.

其次,在将聚酰胺酸溶液A-7以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-7(热塑性、Tg:239℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜A-7的聚酰亚胺的酰亚胺基浓度为27.0重量%。Next, the polyamic acid solution A-7 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-7 (thermoplastic, Tg: 239 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-7 was 27.0% by weight.

(合成例A-8)(Synthesis Example A-8)

在氮气流下,在300ml的分离式烧瓶中投入1.372g的m-TB(0.0065摩尔)及10.704g的APB(0.0366摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.875g的PMDA(0.0132摩尔)及9.049g的BPDA(0.0308摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-8。聚酰胺酸溶液A-8的溶液粘度为1,190cps。Under a nitrogen stream, 1.372 g of m-TB (0.0065 mol), 10.704 g of APB (0.0366 mol), and DMAc after polymerization were put into a 300-ml separable flask in such an amount that the solid content concentration after polymerization was 12% by weight, and the mixture was heated at room temperature. Stir and dissolve. Next, after adding 2.875 g of PMDA (0.0132 mol) and 9.049 g of BPDA (0.0308 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-8. The solution viscosity of the polyamic acid solution A-8 was 1,190 cps.

其次,在将聚酰胺酸溶液A-8以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-8(热塑性、Tg:235℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜A-8的聚酰亚胺的酰亚胺基浓度为27.1重量%。Next, the polyamic acid solution A-8 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-8 (thermoplastic, Tg: 235 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-8 was 27.1% by weight.

(合成例A-9)(Synthesis Example A-9)

在氮气流下,在300ml的分离式烧瓶中投入1.162g的m-TB(0.0055摩尔)及12.735g的BAPP(0.0310摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.436g的PMDA(0.0112摩尔)及7.667g的BPDA(0.0261摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-9。聚酰胺酸溶液A-9的溶液粘度为1,780cps。Under a nitrogen stream, 1.162 g of m-TB (0.0055 mol), 12.735 g of BAPP (0.0310 mol), and DMAc in an amount such that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask at room temperature. Stir and dissolve. Next, after adding 2.436 g of PMDA (0.0112 mol) and 7.667 g of BPDA (0.0261 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-9. The solution viscosity of the polyamic acid solution A-9 was 1,780 cps.

其次,在将聚酰胺酸溶液A-9以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-9(热塑性、Tg:278℃、吸湿率:0.34重量%)。另外,构成聚酰亚胺膜A-9的聚酰亚胺的酰亚胺基浓度为22.6重量%。Next, the polyamic acid solution A-9 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-9 (thermoplastic, Tg: 278 degreeC, moisture absorption rate: 0.34weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-9 was 22.6% by weight.

(合成例A-10)(Synthesis Example A-10)

在氮气流下,在300ml的分离式烧瓶中投入1.411g的m-TB(0.0066摩尔)及11.011g的TPE-R(0.0377摩尔)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加4.929g的PMDA(0.0226摩尔)及6.649g的BPDA(0.0226摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-10。聚酰胺酸溶液A-10的溶液粘度为2,330cps。Under a nitrogen stream, 1.411 g of m-TB (0.0066 mol), 11.011 g of TPE-R (0.0377 mol), and DMAc in an amount such that the solid content concentration after polymerization was 12% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 4.929 g of PMDA (0.0226 mol) and 6.649 g of BPDA (0.0226 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-10. The solution viscosity of the polyamic acid solution A-10 was 2,330 cps.

其次,在将聚酰胺酸溶液A-10以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-10(热塑性、Tg:276℃、吸湿率:0.41重量%)。另外,构成聚酰亚胺膜A-10的聚酰亚胺的酰亚胺基浓度为28.0重量%。Next, the polyamic acid solution A-10 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-10 (thermoplastic, Tg: 276 degreeC, moisture absorption rate: 0.41weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-10 was 28.0% by weight.

(合成例A-11)(Synthesis Example A-11)

在氮气流下,在300ml的分离式烧瓶中投入12.327重量份的TPE-R(0.0422摩尔)及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加2.815g的PMDA(0.0129摩尔)及8.858g的BPDA(0.0301摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-11。聚酰胺酸溶液A-11的溶液粘度为1,530cps。Under a nitrogen stream, 12.327 parts by weight of TPE-R (0.0422 mol) and DMAc after polymerization were put into a 300-ml separable flask, and the mixture was stirred and dissolved at room temperature. Next, after adding 2.815 g of PMDA (0.0129 mol) and 8.858 g of BPDA (0.0301 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-11. The solution viscosity of the polyamic acid solution A-11 was 1,530 cps.

其次,在将聚酰胺酸溶液A-11以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-11(热塑性、Tg:244℃、吸湿率:0.39重量%)。另外,构成聚酰亚胺膜A-11的聚酰亚胺的酰亚胺基浓度为26.5重量%。Next, after the polyamic acid solution A-11 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-11 (thermoplastic, Tg: 244 degreeC, moisture absorption rate: 0.39weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-11 was 26.5% by weight.

(合成例A-12)(Synthesis Example A-12)

在氮气流下,在300ml的分离式烧瓶中投入12.128g的m-TB(0.0571摩尔)及1.856g的TPE-R(0.0063摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.819g的PMDA(0.0313摩尔)及9.198g的BPDA(0.0313摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-12。聚酰胺酸溶液A-12的溶液粘度为29,100cps。Under a nitrogen stream, 12.128 g of m-TB (0.0571 mol), 1.856 g of TPE-R (0.0063 mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 6.819 g of PMDA (0.0313 mol) and 9.198 g of BPDA (0.0313 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-12. The solution viscosity of the polyamic acid solution A-12 was 29,100 cps.

其次,在将聚酰胺酸溶液A-12以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-12(非热塑性、Tg:322℃、吸湿率:0.57重量%)。另外,构成聚酰亚胺膜A-12的聚酰亚胺的酰亚胺基浓度为31.8重量%。Next, after the polyamic acid solution A-12 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-12 (non-thermoplastic, Tg: 322 degreeC, moisture absorption rate: 0.57weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-12 was 31.8% by weight.

(合成例A-13)(Synthesis Example A-13)

在氮气流下,在300ml的分离式烧瓶中投入13.707g的m-TB(0.0646摩尔)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.936g的PMDA(0.0318摩尔)及9.356g的BPDA(0.0318摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-13。聚酰胺酸溶液A-13的溶液粘度为29,900cps。Under a nitrogen stream, 13.707 g of m-TB (0.0646 mol) and DMAc after polymerization were put into a 300-ml separable flask, and the mixture was stirred and dissolved at room temperature. Next, after adding 6.936 g of PMDA (0.0318 mol) and 9.356 g of BPDA (0.0318 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-13. The solution viscosity of the polyamic acid solution A-13 was 29,900 cps.

其次,在将聚酰胺酸溶液A-13以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-13(非热塑性、Tg:332℃、吸湿率:0.63重量%)。另外,构成聚酰亚胺膜A-13的聚酰亚胺的酰亚胺基浓度为32.4重量%。Next, after the polyamic acid solution A-13 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-13 (non-thermoplastic, Tg: 332 degreeC, moisture absorption rate: 0.63 weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-13 was 32.4% by weight.

(合成例A-14)(Synthesis Example A-14)

在氮气流下,在300ml的分离式烧瓶中投入12.061g的m-TB(0.0568摩尔)、0.923g的TPE-Q(0.0032摩尔)及1.0874g的双苯胺-M(0.0032摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.781g的PMDA(0.0311摩尔)及9.147g的BPDA(0.0311摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-14。聚酰胺酸溶液A-14的溶液粘度为29,800cps。Under nitrogen flow, 12.061 g of m-TB (0.0568 mol), 0.923 g of TPE-Q (0.0032 mol), 1.0874 g of dianiline-M (0.0032 mol), and the polymerized solid were put into a 300-ml separable flask. DMAc in an amount of a component concentration of 15% by weight was stirred and dissolved at room temperature. Next, after adding 6.781 g of PMDA (0.0311 mol) and 9.147 g of BPDA (0.0311 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-14. The solution viscosity of the polyamic acid solution A-14 was 29,800 cps.

其次,在将聚酰胺酸溶液A-14以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-14(非热塑性、Tg:322℃、吸湿率:0.61重量%)。另外,构成聚酰亚胺膜A-14的聚酰亚胺的酰亚胺基浓度为31.6重量%。Next, after the polyamic acid solution A-14 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-14 (non-thermoplastic, Tg: 322 degreeC, moisture absorption rate: 0.61weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-14 was 31.6% by weight.

(合成例A-15)(Synthesis Example A-15)

在氮气流下,在300ml的分离式烧瓶中投入11.978g的m-TB(0.0564摩尔)、0.916g的TPE-Q(0.0031摩尔)及1.287g的BAPP(0.0031摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.735g的PMDA(0.0309摩尔)及9.084g的BPDA(0.0309摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-15。聚酰胺酸溶液A-15的溶液粘度为29,200cps。Under a nitrogen stream, 11.978 g of m-TB (0.0564 mol), 0.916 g of TPE-Q (0.0031 mol), 1.287 g of BAPP (0.0031 mol part), and the solid content concentration after polymerization were put into a 300-ml separable flask. DMAc in an amount of 15% by weight was stirred and dissolved at room temperature. Next, after adding 6.735 g of PMDA (0.0309 mol) and 9.084 g of BPDA (0.0309 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-15. The solution viscosity of the polyamic acid solution A-15 was 29,200 cps.

其次,在将聚酰胺酸溶液A-15以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-15(非热塑性、Tg:324℃、吸湿率:0.58重量%)。另外,构成聚酰亚胺膜A-15的聚酰亚胺的酰亚胺基浓度为31.4重量%。Next, after the polyamic acid solution A-15 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-15 (non-thermoplastic, Tg: 324 degreeC, moisture absorption rate: 0.58weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-15 was 31.4% by weight.

(合成例A-16)(Synthesis Example A-16)

在氮气流下,在300ml的分离式烧瓶中投入12.128g的m-TB(0.0571摩尔)及1.856g的TPE-Q(0.0063摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.819g的PMDA(0.0313摩尔)及9.198g的BPDA(0.0313摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-16。聚酰胺酸溶液A-16的溶液粘度为32,800cps。Under a nitrogen stream, 12.128 g of m-TB (0.0571 mol), 1.856 g of TPE-Q (0.0063 mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 6.819 g of PMDA (0.0313 mol) and 9.198 g of BPDA (0.0313 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-16. The solution viscosity of the polyamic acid solution A-16 was 32,800 cps.

其次,在将聚酰胺酸溶液A-16以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-16(非热塑性、Tg:330℃、吸湿率:0.59重量%)。另外,构成聚酰亚胺膜A-16的聚酰亚胺的酰亚胺基浓度为31.8重量%。Next, the polyamic acid solution A-16 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-16 (non-thermoplastic, Tg: 330 degreeC, moisture absorption rate: 0.59weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-16 was 31.8% by weight.

(合成例A-17)(Synthesis Example A-17)

在氮气流下,在300ml的分离式烧瓶中投入12.323g的m-TB(0.0580摩尔)及1.886g的TPE-R(0.0064摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加8.314g的PMDA(0.0381摩尔)及7.477g的BPDA(0.0254摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-17。聚酰胺酸溶液A-17的溶液粘度为31,500cps。Under a nitrogen stream, 12.323 g of m-TB (0.0580 mol), 1.886 g of TPE-R (0.0064 mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 8.314 g of PMDA (0.0381 mol) and 7.477 g of BPDA (0.0254 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-17. The solution viscosity of the polyamic acid solution A-17 was 31,500 cps.

其次,在将聚酰胺酸溶液A-17以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-17(非热塑性、Tg:342℃、吸湿率:0.56重量%)。另外,构成聚酰亚胺膜A-17的聚酰亚胺的酰亚胺基浓度为32.3重量%。Next, the polyamic acid solution A-17 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-17 (non-thermoplastic, Tg: 342 degreeC, moisture absorption rate: 0.56weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-17 was 32.3% by weight.

(合成例A-18)(Synthesis Example A-18)

在氮气流下,在300ml的分离式烧瓶中投入13.434g的m-TB(0.0633摩尔)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加6.118g的PMDA(0.0281摩尔)、9.170g的BPDA(0.0312摩尔)及1.279g的TMEG(0.0031摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-18。聚酰胺酸溶液A-18的溶液粘度为14,100cps。Under a nitrogen stream, 13.434 g of m-TB (0.0633 mol) and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into a 300 ml separable flask, and the mixture was stirred and dissolved at room temperature. Next, after adding 6.118 g of PMDA (0.0281 mol), 9.170 g of BPDA (0.0312 mol), and 1.279 g of TMEG (0.0031 mol), stirring was continued at room temperature for 3 hours to carry out the polymerization reaction to obtain a polyamic acid solution A-18. The solution viscosity of the polyamic acid solution A-18 was 14,100 cps.

其次,在将聚酰胺酸溶液A-18以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-18(非热塑性、Tg:314℃、吸湿率:0.59重量%)。另外,构成聚酰亚胺膜A-18的聚酰亚胺的酰亚胺基浓度为31.7重量%。Next, after the polyamic acid solution A-18 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-18 (non-thermoplastic, Tg: 314 degreeC, moisture absorption rate: 0.59weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-18 was 31.7% by weight.

(合成例A-19)(Synthesis Example A-19)

在氮气流下,在300ml的分离式烧瓶中投入12.003g的m-TB(0.0565摩尔)及1.836g的TPE-R(0.0063摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加5.399g的PMDA(0.0248摩尔)、9.103g的BPDA(0.0309摩尔)及1.659g的NTCDA(0.0062摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-19。聚酰胺酸溶液A-19的溶液粘度为31,200cps。Under a nitrogen stream, 12.003 g of m-TB (0.0565 mol), 1.836 g of TPE-R (0.0063 mol), and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 5.399 g of PMDA (0.0248 mol), 9.103 g of BPDA (0.0309 mol), and 1.659 g of NTCDA (0.0062 mol), the polymerization reaction was continued at room temperature for 3 hours to obtain a polyamic acid solution. A-19. The solution viscosity of the polyamic acid solution A-19 was 31,200 cps.

其次,在将聚酰胺酸溶液A-19以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-19(非热塑性、Tg:311℃、吸湿率:0.58重量%)。另外,构成聚酰亚胺膜A-19的聚酰亚胺的酰亚胺基浓度为31.4重量%。Next, after the polyamic acid solution A-19 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-19 (non-thermoplastic, Tg: 311 degreeC, moisture absorption rate: 0.58weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-19 was 31.4% by weight.

(合成例A-20)(Synthesis example A-20)

在氮气流下,在300ml的分离式烧瓶中投入8.778g的m-TB(0.0414摩尔)、1.860g的TPE-R(0.0064摩尔)及3.582g的AABOZ(0.0159摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加8.309g的PMDA(0.0381摩尔)及7.472g的BPDA(0.0254摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-20。聚酰胺酸溶液A-20的溶液粘度为42,300cps。Under a nitrogen stream, 8.778 g of m-TB (0.0414 mol), 1.860 g of TPE-R (0.0064 mol), and 3.582 g of AABOZ (0.0159 mol) were put into a 300-ml separable flask, and the solid content concentration after polymerization was DMAc in an amount of 15% by weight was stirred and dissolved at room temperature. Next, after adding 8.309 g of PMDA (0.0381 mol) and 7.472 g of BPDA (0.0254 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-20. The solution viscosity of the polyamic acid solution A-20 was 42,300 cps.

其次,在将聚酰胺酸溶液A-20以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-20(非热塑性、Tg:312℃、吸湿率:0.61重量%)。另外,构成聚酰亚胺膜A-20的聚酰亚胺的酰亚胺基浓度为32.1重量%。Next, the polyamic acid solution A-20 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-20 (non-thermoplastic, Tg: 312 degreeC, moisture absorption rate: 0.61weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-20 was 32.1% by weight.

(合成例A-21)(Synthesis Example A-21)

在氮气流下,在300ml的分离式烧瓶中投入5.365g的m-TB(0.0253摩尔)、1.847g的TPE-R(0.0063摩尔)及7.116g的AABOZ(0.0316摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加8.252g的PMDA(0.0378摩尔)及7.421g的BPDA(0.0252摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-21。聚酰胺酸溶液A-21的溶液粘度为22,700cps。Under a nitrogen stream, 5.365 g of m-TB (0.0253 mol), 1.847 g of TPE-R (0.0063 mol), and 7.116 g of AABOZ (0.0316 mol) were charged into a 300-ml separable flask, and the solid content concentration after polymerization was DMAc in an amount of 15% by weight was stirred and dissolved at room temperature. Next, after adding 8.252 g of PMDA (0.0378 mol) and 7.421 g of BPDA (0.0252 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-21. The solution viscosity of the polyamic acid solution A-21 was 22,700 cps.

其次,在将聚酰胺酸溶液A-21以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-21(非热塑性、Tg:320℃、吸湿率:0.65重量%)。另外,构成聚酰亚胺膜A-21的聚酰亚胺的酰亚胺基浓度为31.9重量%。Next, the polyamic acid solution A-21 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-21 (non-thermoplastic, Tg: 320 degreeC, moisture absorption rate: 0.65weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-21 was 31.9% by weight.

(合成例A-22)(Synthesis Example A-22)

在氮气流下,在300ml的分离式烧瓶中投入8.110g的m-TB(0.0382摩尔)、1.861g的TPE-R(0.0064摩尔)及4.360g的APAB(0.0191摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加8.250g的PMDA(0.0378摩尔)及7.419g的BPDA(0.0252摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-22。聚酰胺酸溶液A-22的溶液粘度为24,500cps。Under a nitrogen stream, 8.110 g of m-TB (0.0382 mol), 1.861 g of TPE-R (0.0064 mol), and 4.360 g of APAB (0.0191 mol) were put into a 300-ml separable flask, and the solid content concentration after polymerization was DMAc in an amount of 15% by weight was stirred and dissolved at room temperature. Next, after adding 8.250 g of PMDA (0.0378 mol) and 7.419 g of BPDA (0.0252 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-22. The solution viscosity of the polyamic acid solution A-22 was 24,500 cps.

其次,在将聚酰胺酸溶液A-22以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-22(非热塑性、Tg:322℃、吸湿率:0.57重量%)。另外,构成聚酰亚胺膜A-22的聚酰亚胺的酰亚胺基浓度为32.0重量%。Next, the polyamic acid solution A-22 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-22 (non-thermoplastic, Tg: 322 degreeC, moisture absorption rate: 0.57weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-22 was 32.0% by weight.

(合成例A-23)(Synthesis example A-23)

在氮气流下,在300ml的分离式烧瓶中投入11.755g的m-TB(0.0554摩尔)及1.799g的TPE-R(0.0062摩尔)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加3.966g的PMDA(0.0182摩尔)及12.481g的BPDA(0.0424摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-23。聚酰胺酸溶液A-23的溶液粘度为26,800cps。Under a nitrogen stream, 11.755 g of m-TB (0.0554 mol), 1.799 g of TPE-R (0.0062 mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 3.966 g of PMDA (0.0182 mol) and 12.481 g of BPDA (0.0424 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-23. The solution viscosity of the polyamic acid solution A-23 was 26,800 cps.

其次,在将聚酰胺酸溶液A-23以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-23(非热塑性、Tg:291℃、吸湿率:0.59重量%)。另外,构成聚酰亚胺膜A-23的聚酰亚胺的酰亚胺基浓度为30.7重量%。Next, after the polyamic acid solution A-23 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-23 (non-thermoplastic, Tg: 291 degreeC, moisture absorption rate: 0.59weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-23 was 30.7% by weight.

(合成例A-24)(Synthesis example A-24)

在氮气流下,在300ml的分离式烧瓶中投入14.405g的m-TB(0.0679摩尔)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加11.663g的PMDA(0.0535摩尔)及3.933g的BPDA(0.0134摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-24。聚酰胺酸溶液A-24的溶液粘度为33,600cps。Under nitrogen flow, 14.405 g of m-TB (0.0679 mol) and DMAc after polymerization were put into a 300-ml separable flask, and the mixture was stirred and dissolved at room temperature. Next, after adding 11.663 g of PMDA (0.0535 mol) and 3.933 g of BPDA (0.0134 mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to obtain a polyamic acid solution A-24. The solution viscosity of the polyamic acid solution A-24 was 33,600 cps.

其次,在将聚酰胺酸溶液A-24以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-24(非热塑性、Tg:400℃以上、吸湿率:0.78重量%)。另外,构成聚酰亚胺膜A-24的聚酰亚胺的酰亚胺基浓度为34.2重量%。Next, the polyamic acid solution A-24 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-24 (non-thermoplastic, Tg: 400 degreeC or more, moisture absorption rate: 0.78weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-24 was 34.2% by weight.

(合成例A-25)(Synthesis example A-25)

在氮气流下,在300ml的分离式烧瓶中投入12.201g的m-TB(0.0575摩尔)及1.042g的双苯胺-M(0.0030摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加7.991g的NTCDA(0.0298摩尔)及8.766g的BPDA(0.0298摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-25。聚酰胺酸溶液A-25的溶液粘度为30,100cps。Under a nitrogen stream, 12.201 g of m-TB (0.0575 mol), 1.042 g of bisaniline-M (0.0030 mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into a 300-ml separable flask. Stir and dissolve at room temperature. Next, after adding 7.991 g of NTCDA (0.0298 mol) and 8.766 g of BPDA (0.0298 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-25. The solution viscosity of the polyamic acid solution A-25 was 30,100 cps.

其次,在将聚酰胺酸溶液A-25以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-25(非热塑性、Tg:400℃以上、吸湿率:0.57重量%)。另外,构成聚酰亚胺膜A-25的聚酰亚胺的酰亚胺基浓度为30.2重量%。Next, the polyamic acid solution A-25 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-25 (non-thermoplastic, Tg: 400 degreeC or more, moisture absorption rate: 0.57weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-25 was 30.2% by weight.

(合成例A-26)(Synthesis example A-26)

在氮气流下,在300ml的分离式烧瓶中投入11.204g的m-TB(0.0528摩尔)及0.670g的BAPP(0.0016摩尔)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加5.845g的PMDA(0.0268摩尔)及12.281g的TAHQ(0.0268摩尔)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液A-26。聚酰胺酸溶液A-26的溶液粘度为26,600cps。Under a nitrogen stream, 11.204 g of m-TB (0.0528 mol), 0.670 g of BAPP (0.0016 mol), and DMAc were put into a 300-ml separable flask in such an amount that the solid content concentration after polymerization was 15% by weight. Stir and dissolve. Next, after adding 5.845 g of PMDA (0.0268 mol) and 12.281 g of TAHQ (0.0268 mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution A-26. The solution viscosity of the polyamic acid solution A-26 was 26,600 cps.

其次,在将聚酰胺酸溶液A-26以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜A-26(非热塑性、Tg:304℃、吸湿率:0.49重量%)。另外,构成聚酰亚胺膜A-26的聚酰亚胺的酰亚胺基浓度为26.9重量%。Next, after the polyamic acid solution A-26 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film A-26 (non-thermoplastic, Tg: 304 degreeC, moisture absorption rate: 0.49weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film A-26 was 26.9% by weight.

[实施例A-1][Example A-1]

在将聚酰胺酸溶液A-1以硬化后的厚度成为约2μm~3μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:0.6μm)后,在120℃下进行加热干燥并去除溶媒。其次,在其上将聚酰胺酸溶液A-15以硬化后的厚度成为约21μm的方式均匀地进行涂布,在120℃下进行加热干燥并去除溶媒。进而,在其上将聚酰胺酸溶液A-1以硬化后的厚度成为约2μm~3μm的方式均匀地进行涂布后,在120℃下进行加热干燥并去除溶媒。如此,在形成三层聚酰胺酸层后,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备多层聚酰亚胺膜A-1(CTE:22ppm/K、吸湿率:0.54重量%、介电常数:3.58、介电正切:0.0031)。After the polyamic acid solution A-1 was uniformly applied to one side (surface roughness Rz: 0.6 μm) of an electrolytic copper foil with a thickness of 12 μm so that the thickness after curing was about 2 μm to 3 μm, it was heated at 120° C. drying under heat and solvent removal. Next, the polyamic acid solution A-15 was uniformly coated thereon so that the thickness after curing was about 21 μm, and the solvent was removed by heating and drying at 120°C. Further, the polyamic acid solution A-1 was uniformly coated thereon so that the thickness after curing was about 2 μm to 3 μm, and then heated and dried at 120° C. to remove the solvent. In this way, after forming the three-layer polyamic acid layer, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was removed by etching using an aqueous ferric chloride solution to prepare a multilayer polyimide film A-1 (CTE: 22 ppm/K, moisture absorption rate: 0.54 wt %, dielectric constant: 3.58, dielectric tangent: 0.0031).

[实施例A-2~实施例A-21、参考例A-1~参考例A-2][Example A-2 to Example A-21, Reference Example A-1 to Reference Example A-2]

除了使用表1~表4中所示的聚酰胺酸溶液以外,与实施例A-1同样地获得实施例A-2~实施例A-21、参考例A-1~参考例A-2的多层聚酰亚胺膜A-2~多层聚酰亚胺膜A-23。求出所得的多层聚酰亚胺膜A-2~多层聚酰亚胺膜A-23的CTE、吸湿率、介电常数、介电正切。将各测定结果示于表1~表4中。Except having used the polyamic acid solutions shown in Table 1-Table 4, it carried out similarly to Example A-1, and obtained Example A-2-Example A-21, Reference Example A-1-Reference Example A-2 Multilayer polyimide film A-2 to multilayer polyimide film A-23. The CTE, moisture absorption rate, dielectric constant, and dielectric tangent of the obtained multilayer polyimide films A-2 to A-23 were determined. The respective measurement results are shown in Tables 1 to 4.

[表1][Table 1]

Figure BDA0003636631740000341
Figure BDA0003636631740000341

[表2][Table 2]

Figure BDA0003636631740000342
Figure BDA0003636631740000342

[表3][table 3]

Figure BDA0003636631740000343
Figure BDA0003636631740000343

[表4][Table 4]

Figure BDA0003636631740000351
Figure BDA0003636631740000351

[实施例A-22~实施例A-23][Example A-22 to Example A-23]

除了使用表5中所示的聚酰胺酸溶液以外,与实施例A-1同样地获得实施例A-22~实施例A-23的多层聚酰亚胺膜A-24~多层聚酰亚胺膜A-25。求出所得的多层聚酰亚胺膜A-24~多层聚酰亚胺膜A-25的CTE、吸湿率、介电常数、介电正切。将各测定结果示于表5中。Except having used the polyamic acid solution shown in Table 5, it carried out similarly to Example A-1, and obtained the multilayer polyimide film A-24 - multilayer polyamide of Example A-22 - Example A-23 Imine film A-25. The CTE, moisture absorption rate, dielectric constant, and dielectric tangent of the obtained multilayer polyimide films A-24 to A-25 were determined. Each measurement result is shown in Table 5.

[表5][table 5]

Figure BDA0003636631740000352
Figure BDA0003636631740000352

(合成例B-1)(Synthesis Example B-1)

在氮气流下,在反应槽中投入66.727重量份的m-TB(0.314摩尔份)及520.681重量份的TPE-R(1.781摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加46.620重量份的PMDA(0.214摩尔份)及565.972重量份的BPDA(1.924摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-1。聚酰胺酸溶液B-1的溶液粘度为1,420cps。Under a nitrogen stream, 66.727 parts by weight of m-TB (0.314 parts by mol), 520.681 parts by weight of TPE-R (1.781 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 46.620 parts by weight of PMDA (0.214 parts by mol) and 565.972 parts by weight of BPDA (1.924 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-1. The solution viscosity of the polyamic acid solution B-1 was 1,420 cps.

其次,在将聚酰胺酸溶液B-1以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-1(热塑性、Tg:256℃、吸湿率:0.36重量%)。另外,构成聚酰亚胺膜B-1的聚酰亚胺的酰亚胺基浓度为26.4重量%。Next, the polyamic acid solution B-1 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-1 (thermoplastic, Tg: 256 degreeC, moisture absorption rate: 0.36weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-1 was 26.4% by weight.

(合成例B-2)(Synthesis Example B-2)

在氮气流下,在反应槽中投入22.538重量份的m-TB(0.106摩尔份)及589.682重量份的TPE-R(2.017摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加141.722重量份的PMDA(0.650摩尔份)及446.058重量份的BPDA(1.516摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-2。聚酰胺酸溶液B-2的溶液粘度为1,510cps。Under a nitrogen stream, 22.538 parts by weight of m-TB (0.106 parts by mol), 589.682 parts by weight of TPE-R (2.017 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 141.722 parts by weight of PMDA (0.650 parts by mol) and 446.058 parts by weight of BPDA (1.516 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-2. The solution viscosity of the polyamic acid solution B-2 was 1,510 cps.

其次,在将聚酰胺酸溶液B-2以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-2(热塑性、Tg:242℃、吸湿率:0.35重量%)。另外,构成聚酰亚胺膜B-2的聚酰亚胺的酰亚胺基浓度为26.5重量%。Next, the polyamic acid solution B-2 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-2 (thermoplastic, Tg: 242 degreeC, moisture absorption rate: 0.35weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-2 was 26.5% by weight.

(合成例B-3)(Synthesis Example B-3)

在氮气流下,在反应槽中投入45.398重量份的m-TB(0.214摩尔份)及562.630重量份的TPE-R(1.925摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加142.733重量份的PMDA(0.654摩尔份)及449.239重量份的BPDA(1.527摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-3。聚酰胺酸溶液B-3的溶液粘度为1,550cps。Under nitrogen flow, 45.398 parts by weight of m-TB (0.214 parts by mol), 562.630 parts by weight of TPE-R (1.925 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 142.733 parts by weight of PMDA (0.654 parts by mol) and 449.239 parts by weight of BPDA (1.527 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-3. The solution viscosity of the polyamic acid solution B-3 was 1,550 cps.

其次,在将聚酰胺酸溶液B-3以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-3(热塑性、Tg:240℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜B-3的聚酰亚胺的酰亚胺基浓度为26.9重量%。Next, the polyamic acid solution B-3 was uniformly coated on one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-3 (thermoplastic, Tg: 240 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-3 was 26.9% by weight.

(合成例B-4)(Synthesis Example B-4)

在氮气流下,在反应槽中投入68.586重量份的m-TB(0.323摩尔份)及535.190重量份的TPE-R(1.831摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加143.758重量份的PMDA(0.659摩尔份)及452.466重量份的BPDA(1.538摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-4。聚酰胺酸溶液B-4的溶液粘度为1,580cps。Under nitrogen flow, 68.586 parts by weight of m-TB (0.323 parts by mol), 535.190 parts by weight of TPE-R (1.831 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 143.758 parts by weight of PMDA (0.659 parts by mol) and 452.466 parts by weight of BPDA (1.538 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-4. The solution viscosity of the polyamic acid solution B-4 was 1,580 cps.

其次,在将聚酰胺酸溶液B-4以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-4(热塑性、Tg:240℃、吸湿率:0.29重量%)。另外,构成聚酰亚胺膜B-4的聚酰亚胺的酰亚胺基浓度为27.1重量%。Next, the polyamic acid solution B-4 was uniformly coated on one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-4 (thermoplastic, Tg: 240 degreeC, moisture absorption rate: 0.29weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-4 was 27.1% by weight.

(合成例B-5)(Synthesis Example B-5)

在氮气流下,在反应槽中投入92.110重量份的m-TB(0.434摩尔份)及507.352重量份的TPE-R(1.736摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加144.798重量份的PMDA(0.664摩尔份)及455.740重量份的BPDA(1.549摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-5。聚酰胺酸溶液B-5的溶液粘度为1,610cps。Under a nitrogen stream, 92.110 parts by weight of m-TB (0.434 parts by mol), 507.352 parts by weight of TPE-R (1.736 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 144.798 parts by weight of PMDA (0.664 parts by mol) and 455.740 parts by weight of BPDA (1.549 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-5. The solution viscosity of the polyamic acid solution B-5 was 1,610 cps.

其次,在将聚酰胺酸溶液B-5以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-5(热塑性、Tg:244℃、吸湿率:0.27重量%)。另外,构成聚酰亚胺膜B-5的聚酰亚胺的酰亚胺基浓度为27.4重量%。Next, after the polyamic acid solution B-5 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-5 (thermoplastic, Tg: 244 degreeC, moisture absorption rate: 0.27weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-5 was 27.4% by weight.

(合成例B-6)(Synthesis Example B-6)

在氮气流下,在反应槽中投入140.193重量份的m-TB(0.660摩尔份)及450.451重量份的TPE-R(1.541摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加146.924重量份的PMDA(0.674摩尔份)及462.431重量份的BPDA(1.572摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-6。聚酰胺酸溶液B-6的溶液粘度为1,720cps。Under a nitrogen stream, 140.193 parts by weight of m-TB (0.660 parts by mol), 450.451 parts by weight of TPE-R (1.541 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 146.924 parts by weight of PMDA (0.674 parts by mol) and 462.431 parts by weight of BPDA (1.572 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-6. The solution viscosity of the polyamic acid solution B-6 was 1,720 cps.

其次,在将聚酰胺酸溶液B-6以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-6(热塑性、Tg:248℃、吸湿率:0.27重量%)。另外,构成聚酰亚胺膜B-6的聚酰亚胺的酰亚胺基浓度为27.8重量%。Next, the polyamic acid solution B-6 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-6 (thermoplastic, Tg: 248 degreeC, moisture absorption rate: 0.27weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-6 was 27.8% by weight.

(合成例B-7)(Synthesis Example B-7)

在氮气流下,在反应槽中投入73.427重量份的APAB(0.322摩尔份)及532.900重量份的TPE-R(1.823摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加143.143重量份的PMDA(0.656摩尔份)及450.530重量份的BPDA(1.531摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-7。聚酰胺酸溶液B-7的溶液粘度为1,280cps。Under a nitrogen stream, 73.427 parts by weight of APAB (0.322 parts by mol), 532.900 parts by weight of TPE-R (1.823 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, and the mixture was heated at room temperature. Stir and dissolve. Next, after adding 143.143 parts by weight of PMDA (0.656 parts by mol) and 450.530 parts by weight of BPDA (1.531 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-7. The solution viscosity of the polyamic acid solution B-7 was 1,280 cps.

其次,在将聚酰胺酸溶液B-7以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-7(热塑性、Tg:239℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜B-7的聚酰亚胺的酰亚胺基浓度为27.0重量%。Next, the polyamic acid solution B-7 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-7 (thermoplastic, Tg: 239 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-7 was 27.0% by weight.

(合成例B-8)(Synthesis Example B-8)

在氮气流下,在反应槽中投入68.586重量份的m-TB(0.323摩尔份)及535.190重量份的APB(1.831摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加143.758重量份的PMDA(0.659摩尔份)及452.466重量份的BPDA(1.538摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-8。聚酰胺酸溶液B-8的溶液粘度为1,190cps。Under a nitrogen stream, 68.586 parts by weight of m-TB (0.323 parts by mol), 535.190 parts by weight of APB (1.831 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank. Stir and dissolve. Next, after adding 143.758 parts by weight of PMDA (0.659 parts by mol) and 452.466 parts by weight of BPDA (1.538 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-8. The solution viscosity of the polyamic acid solution B-8 was 1,190 cps.

其次,在将聚酰胺酸溶液B-8以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-8(热塑性、Tg:235℃、吸湿率:0.31重量%)。另外,构成聚酰亚胺膜B-8的聚酰亚胺的酰亚胺基浓度为27.1重量%。Next, after the polyamic acid solution B-8 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-8 (thermoplastic, Tg: 235 degreeC, moisture absorption rate: 0.31weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-8 was 27.1% by weight.

(合成例B-9)(Synthesis Example B-9)

在氮气流下,在反应槽中投入58.109重量份的m-TB(0.274摩尔份)及636.745重量份的BAPP(1.551摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加121.798重量份的PMDA(0.558摩尔份)及383.348重量份的BPDA(1.303摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-9。聚酰胺酸溶液B-9的溶液粘度为1,780cps。Under a nitrogen stream, 58.109 parts by weight of m-TB (0.274 parts by mol), 636.745 parts by weight of BAPP (1.551 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 121.798 parts by weight of PMDA (0.558 parts by mol) and 383.348 parts by weight of BPDA (1.303 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-9. The solution viscosity of the polyamic acid solution B-9 was 1,780 cps.

其次,在将聚酰胺酸溶液B-9以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-9(热塑性、Tg:278℃、吸湿率:0.34重量%)。另外,构成聚酰亚胺膜B-9的聚酰亚胺的酰亚胺基浓度为22.6重量%。Next, the polyamic acid solution B-9 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-9 (thermoplastic, Tg: 278 degreeC, moisture absorption rate: 0.34weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-9 was 22.6% by weight.

(合成例B-10)(Synthesis Example B-10)

在氮气流下,在反应槽中投入70.552重量份的m-TB(0.332摩尔份)及550.530重量份的TPE-R(1.883摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加246.465重量份的PMDA(1.130摩尔份)及332.454重量份的BPDA(1.130摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-10。聚酰胺酸溶液B-10的溶液粘度为2,330cps。Under nitrogen flow, 70.552 parts by weight of m-TB (0.332 parts by mol), 550.530 parts by weight of TPE-R (1.883 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 246.465 parts by weight of PMDA (1.130 parts by mol) and 332.454 parts by weight of BPDA (1.130 parts by mol), stirring was continued for 3 hours at room temperature, and a polymerization reaction was performed to obtain a polyamic acid solution B-10. The solution viscosity of the polyamic acid solution B-10 was 2,330 cps.

其次,在将聚酰胺酸溶液B-10以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-10(热塑性、Tg:276℃、吸湿率:0.41重量%)。另外,构成聚酰亚胺膜B-10的聚酰亚胺的酰亚胺基浓度为28.0重量%。Next, after the polyamic acid solution B-10 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-10 (thermoplastic, Tg: 276 degreeC, moisture absorption rate: 0.41weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-10 was 28.0% by weight.

(合成例B-11)(Synthesis Example B-11)

在氮气流下,在反应槽中投入616.353重量份的TPE-R(2.108摩尔份)及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加140.726重量份的PMDA(0.645摩尔份)及442.921重量份的BPDA(1.505摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-11。聚酰胺酸溶液B-11的溶液粘度为1,530cps。Under nitrogen flow, 616.353 parts by weight of TPE-R (2.108 parts by mol) and DMAc after polymerization were charged in an amount such that the solid content concentration after polymerization was 12% by weight, and stirred and dissolved at room temperature. Next, after adding 140.726 parts by weight of PMDA (0.645 parts by mol) and 442.921 parts by weight of BPDA (1.505 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-11. The solution viscosity of the polyamic acid solution B-11 was 1,530 cps.

其次,在将聚酰胺酸溶液B-11以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-11(热塑性、Tg:244℃、吸湿率:0.39重量%)。另外,构成聚酰亚胺膜B-11的聚酰亚胺的酰亚胺基浓度为26.5重量%。Next, the polyamic acid solution B-11 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-11 (thermoplastic, Tg: 244 degreeC, moisture absorption rate: 0.39weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-11 was 26.5% by weight.

(合成例B-12)(Synthesis Example B-12)

在氮气流下,在反应槽中投入240.725重量份的m-TB(1.134摩尔份)及331.485重量份的TPE-R(1.134摩尔份)以及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加151.369重量份的PMDA(0.694摩尔份)及476.421重量份的BPDA(1.619摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-12。聚酰胺酸溶液B-12的溶液粘度为3,240cps。Under nitrogen flow, 240.725 parts by weight of m-TB (1.134 parts by mol), 331.485 parts by weight of TPE-R (1.134 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 12 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 151.369 parts by weight of PMDA (0.694 parts by mol) and 476.421 parts by weight of BPDA (1.619 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-12. The solution viscosity of the polyamic acid solution B-12 was 3,240 cps.

其次,在将聚酰胺酸溶液B-12以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-12(热塑性、Tg:260℃、吸湿率:0.28重量%)。另外,构成聚酰亚胺膜B-12的聚酰亚胺的酰亚胺基浓度为28.7重量%。Next, the polyamic acid solution B-12 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-12 (thermoplastic, Tg: 260 degreeC, moisture absorption rate: 0.28weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-12 was 28.7% by weight.

(合成例B-13)(Synthesis Example B-13)

在氮气流下,在反应槽中投入596.920重量份的m-TB(2.812摩尔份)及91.331重量份的TPE-R(0.312摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加268.495重量份的PMDA(1.231摩尔份)及543.255重量份的BPDA(1.846摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-13。聚酰胺酸溶液B-13的溶液粘度为27,310cps。Under nitrogen flow, 596.920 parts by weight of m-TB (2.812 parts by mol), 91.331 parts by weight of TPE-R (0.312 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 268.495 parts by weight of PMDA (1.231 parts by mol) and 543.255 parts by weight of BPDA (1.846 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-13. The solution viscosity of the polyamic acid solution B-13 was 27,310 cps.

其次,在将聚酰胺酸溶液B-13以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-13(非热塑性、Tg:305℃、吸湿率:0.52重量%)。另外,构成聚酰亚胺膜B-13的聚酰亚胺的酰亚胺基浓度为31.2重量%。Next, the polyamic acid solution B-13 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-13 (non-thermoplastic, Tg: 305 degreeC, moisture absorption rate: 0.52weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-13 was 31.2% by weight.

(合成例B-14)(Synthesis Example B-14)

在氮气流下,在反应槽中投入606.387重量份的m-TB(2.856摩尔份)及92.779重量份的TPE-R(0.317摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加340.941重量份的PMDA(1.563摩尔份)及459.892重量份的BPDA(1.563摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-14。聚酰胺酸溶液B-14的溶液粘度为29,100cps。Under nitrogen flow, 606.387 parts by weight of m-TB (2.856 parts by mol), 92.779 parts by weight of TPE-R (0.317 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 340.941 parts by weight of PMDA (1.563 parts by mol) and 459.892 parts by weight of BPDA (1.563 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-14. The solution viscosity of the polyamic acid solution B-14 was 29,100 cps.

其次,在将聚酰胺酸溶液B-14以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-14(非热塑性、Tg:322℃、吸湿率:0.57重量%)。另外,构成聚酰亚胺膜B-14的聚酰亚胺的酰亚胺基浓度为31.8重量%。Next, after the polyamic acid solution B-14 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-14 (non-thermoplastic, Tg: 322 degreeC, moisture absorption rate: 0.57weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-14 was 31.8% by weight.

(合成例B-15)(Synthesis Example B-15)

在氮气流下,在反应槽中投入685.370重量份的m-TB(3.228摩尔份)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加346.815重量份的PMDA(1.590摩尔份)及467.815重量份的BPDA(1.590摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-15。聚酰胺酸溶液B-15的溶液粘度为29,900cps。Under a nitrogen stream, 685.370 parts by weight of m-TB (3.228 parts by mol) and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, and the mixture was stirred and dissolved at room temperature. Next, after adding 346.815 parts by weight of PMDA (1.590 parts by mol) and 467.815 parts by weight of BPDA (1.590 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-15. The solution viscosity of the polyamic acid solution B-15 was 29,900 cps.

其次,在将聚酰胺酸溶液B-15以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-15(非热塑性、Tg:332℃、吸湿率:0.63重量%)。另外,构成聚酰亚胺膜B-15的聚酰亚胺的酰亚胺基浓度为32.4重量%。Next, the polyamic acid solution B-15 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-15 (non-thermoplastic, Tg: 332 degreeC, moisture absorption rate: 0.63 weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-15 was 32.4% by weight.

(合成例B-16)(Synthesis Example B-16)

在氮气流下,在反应槽中投入603.059重量份的m-TB(2.841摩尔份)、46.135重量份的TPE-Q(0.158摩尔份)及54.368重量份的双苯胺-M(0.158摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加339.070重量份的PMDA(1.555摩尔份)及457.368重量份的BPDA(1.555摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-16。聚酰胺酸溶液B-16的溶液粘度为29,800cps。Under nitrogen flow, 603.059 parts by weight of m-TB (2.841 parts by mol), 46.135 parts by weight of TPE-Q (0.158 parts by mol) and 54.368 parts by weight of dianiline-M (0.158 parts by mol) were put into the reaction tank, and the polymerization The resulting solid content concentration was DMAc in an amount of 15% by weight, and the mixture was stirred and dissolved at room temperature. Next, after adding 339.070 parts by weight of PMDA (1.555 parts by mol) and 457.368 parts by weight of BPDA (1.555 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-16. The solution viscosity of the polyamic acid solution B-16 was 29,800 cps.

其次,在将聚酰胺酸溶液B-16以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-16(非热塑性、Tg:322℃、吸湿率:0.61重量%)。另外,构成聚酰亚胺膜B-16的聚酰亚胺的酰亚胺基浓度为31.6重量%。Next, after the polyamic acid solution B-16 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-16 (non-thermoplastic, Tg: 322 degreeC, moisture absorption rate: 0.61weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-16 was 31.6% by weight.

(合成例B-17)(Synthesis Example B-17)

在氮气流下,在反应槽中投入598.899重量份的m-TB(2.821摩尔份)、45.817重量份的TPE-Q(0.157摩尔份)及64.339重量份的BAPP(0.157摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加336.731重量份的PMDA(1.544摩尔份)及454.214重量份的BPDA(1.544摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-17。聚酰胺酸溶液B-17的溶液粘度为29,200cps。Under nitrogen flow, 598.899 parts by weight of m-TB (2.821 parts by mol), 45.817 parts by weight of TPE-Q (0.157 parts by mol), 64.339 parts by weight of BAPP (0.157 parts by mol) and the polymerized solid were put into the reaction tank DMAc in an amount of a component concentration of 15% by weight was stirred and dissolved at room temperature. Next, after adding 336.731 parts by weight of PMDA (1.544 parts by mol) and 454.214 parts by weight of BPDA (1.544 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-17. The solution viscosity of the polyamic acid solution B-17 was 29,200 cps.

其次,在将聚酰胺酸溶液B-17以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-17(非热塑性、Tg:324℃、吸湿率:0.58重量%)。另外,构成聚酰亚胺膜B-17的聚酰亚胺的酰亚胺基浓度为31.4重量%。Next, the polyamic acid solution B-17 was uniformly coated on one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-17 (non-thermoplastic, Tg: 324 degreeC, moisture absorption rate: 0.58weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-17 was 31.4% by weight.

(合成例B-18)(Synthesis Example B-18)

在氮气流下,在反应槽中投入606.387重量份的m-TB(2.856摩尔份)及92.779重量份的TPE-Q(0.317摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加340.941重量份的PMDA(1.563摩尔份)及459.892重量份的BPDA(1.563摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-18。聚酰胺酸溶液B-18的溶液粘度为32,800cps。Under a nitrogen stream, 606.387 parts by weight of m-TB (2.856 parts by mol), 92.779 parts by weight of TPE-Q (0.317 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 340.941 parts by weight of PMDA (1.563 parts by mol) and 459.892 parts by weight of BPDA (1.563 parts by mol), stirring was continued for 3 hours at room temperature, and a polymerization reaction was performed to obtain a polyamic acid solution B-18. The solution viscosity of the polyamic acid solution B-18 was 32,800 cps.

其次,在将聚酰胺酸溶液B-18以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-18(非热塑性、Tg:330℃、吸湿率:0.59重量%)。另外,构成聚酰亚胺膜B-18的聚酰亚胺的酰亚胺基浓度为31.8重量%。Next, the polyamic acid solution B-18 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-18 (non-thermoplastic, Tg: 330 degreeC, moisture absorption rate: 0.59weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-18 was 31.8% by weight.

(合成例B-19)(Synthesis Example B-19)

在氮气流下,在反应槽中投入616.159重量份的m-TB(2.902摩尔份)及94.275重量份的TPE-R(0.322摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加415.723重量份的PMDA(1.906摩尔份)及373.843重量份的BPDA(1.271摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-19。聚酰胺酸溶液B-19的溶液粘度为31,500cps。Under nitrogen flow, 616.159 parts by weight of m-TB (2.902 parts by mol), 94.275 parts by weight of TPE-R (0.322 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 415.723 parts by weight of PMDA (1.906 parts by mol) and 373.843 parts by weight of BPDA (1.271 parts by mol), stirring was continued for 3 hours at room temperature, and a polymerization reaction was performed to obtain a polyamic acid solution B-19. The solution viscosity of the polyamic acid solution B-19 was 31,500 cps.

其次,在将聚酰胺酸溶液B-19以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-19(非热塑性、Tg:342℃、吸湿率:0.56重量%)。另外,构成聚酰亚胺膜B-19的聚酰亚胺的酰亚胺基浓度为32.3重量%。Next, after the polyamic acid solution B-19 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-19 (non-thermoplastic, Tg: 342 degreeC, moisture absorption rate: 0.56weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-19 was 32.3% by weight.

(合成例B-20)(Synthesis Example B-20)

在氮气流下,在反应槽中投入626.252重量份的m-TB(2.950摩尔份)及95.819重量份的TPE-R(0.328摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加492.954重量份的PMDA(2.260摩尔份)及284.975重量份的BPDA(0.969摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-20。聚酰胺酸溶液B-20的溶液粘度为34,100cps。Under nitrogen flow, 626.252 parts by weight of m-TB (2.950 parts by mol), 95.819 parts by weight of TPE-R (0.328 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 492.954 parts by weight of PMDA (2.260 parts by mol) and 284.975 parts by weight of BPDA (0.969 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-20. The solution viscosity of the polyamic acid solution B-20 was 34,100 cps.

其次,在将聚酰胺酸溶液B-20以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-20(非热塑性、Tg:364℃、吸湿率:0.68重量%)。另外,构成聚酰亚胺膜B-20的聚酰亚胺的酰亚胺基浓度为32.9重量%。Next, the polyamic acid solution B-20 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing was about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-20 (non-thermoplastic, Tg: 364 degreeC, moisture absorption rate: 0.68weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-20 was 32.9% by weight.

(合成例B-21)(Synthesis Example B-21)

在氮气流下,在反应槽中投入517.831重量份的m-TB(2.439摩尔份)及79.230重量份的TPE-R(0.271摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加291.151重量份的PMDA(1.335摩尔份)及611.788重量份的TAHQ(1.335摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-21。聚酰胺酸溶液B-21的溶液粘度为33,200cps。Under nitrogen flow, 517.831 parts by weight of m-TB (2.439 parts by mol), 79.230 parts by weight of TPE-R (0.271 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 291.151 parts by weight of PMDA (1.335 parts by mol) and 611.788 parts by weight of TAHQ (1.335 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution B-21. The solution viscosity of the polyamic acid solution B-21 was 33,200 cps.

其次,在将聚酰胺酸溶液B-21以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-21(非热塑性、Tg:296℃、吸湿率:0.54重量%)。另外,构成聚酰亚胺膜B-21的聚酰亚胺的酰亚胺基浓度为26.8重量%。Next, the polyamic acid solution B-21 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after hardening would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-21 (non-thermoplastic, Tg: 296 degreeC, moisture absorption rate: 0.54weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-21 was 26.8% by weight.

(合成例B-22)(Synthesis Example B-22)

在氮气流下,在反应槽中投入587.744重量份的m-TB(2.769摩尔份)及89.927重量份的TPE-R(0.308摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加198.275重量份的PMDA(0.909摩尔份)及624.054重量份的BPDA(2.121摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-22。聚酰胺酸溶液B-22的溶液粘度为26,800cps。Under a nitrogen stream, 587.744 parts by weight of m-TB (2.769 parts by mol), 89.927 parts by weight of TPE-R (0.308 parts by mol), and DMAc with a solid content concentration of 15 wt % were charged into the reaction tank, Stir and dissolve at room temperature. Next, after adding 198.275 parts by weight of PMDA (0.909 parts by mol) and 624.054 parts by weight of BPDA (2.121 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-22. The solution viscosity of the polyamic acid solution B-22 was 26,800 cps.

其次,在将聚酰胺酸溶液B-22以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-22(非热塑性、Tg:291℃、吸湿率:0.59重量%)。另外,构成聚酰亚胺膜B-22的聚酰亚胺的酰亚胺基浓度为30.7重量%。Next, the polyamic acid solution B-22 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-22 (non-thermoplastic, Tg: 291 degreeC, moisture absorption rate: 0.59weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-22 was 30.7% by weight.

(合成例B-23)(Synthesis Example B-23)

在氮气流下,在反应槽中投入456.183重量份的m-TB(2.149摩尔份)及269.219重量份的TPE-R(0.921摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加329.772重量份的PMDA(1.512摩尔份)及444.826重量份的BPDA(1.512摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-23。聚酰胺酸溶液B-23的溶液粘度为26,400cps。Under nitrogen flow, 456.183 parts by weight of m-TB (2.149 parts by mol), 269.219 parts by weight of TPE-R (0.921 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 329.772 parts by weight of PMDA (1.512 parts by mol) and 444.826 parts by weight of BPDA (1.512 parts by mol), stirring was continued at room temperature for 3 hours and a polymerization reaction was performed to obtain a polyamic acid solution B-23. The solution viscosity of the polyamic acid solution B-23 was 26,400 cps.

其次,在将聚酰胺酸溶液B-23以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-23(非热塑性、Tg:285℃、吸湿率:0.53重量%)。另外,构成聚酰亚胺膜B-23的聚酰亚胺的酰亚胺基浓度为30.7重量%。Next, after the polyamic acid solution B-23 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, it was heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-23 (non-thermoplastic, Tg: 285 degreeC, moisture absorption rate: 0.53weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-23 was 30.7% by weight.

(合成例B-24)(Synthesis Example B-24)

在氮气流下,在反应槽中投入720.230重量份的m-TB(3.393摩尔份)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加583.127重量份的PMDA(2.673摩尔份)及196.644重量份的BPDA(0.668摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而获得聚酰胺酸溶液B-24。聚酰胺酸溶液B-24的溶液粘度为33,600cps。Under a nitrogen stream, 720.230 parts by weight of m-TB (3.393 parts by mol) and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, and stirred and dissolved at room temperature. Next, after adding 583.127 parts by weight of PMDA (2.673 parts by mol) and 196.644 parts by weight of BPDA (0.668 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to obtain a polyamic acid solution B-24. The solution viscosity of the polyamic acid solution B-24 was 33,600 cps.

其次,在将聚酰胺酸溶液B-24以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:2.1μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。对于所得的金属张层叠板,使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜B-24(非热塑性、Tg:400℃以上、吸湿率:0.78重量%)。另外,构成聚酰亚胺膜B-24的聚酰亚胺的酰亚胺基浓度为34.2重量%。Next, the polyamic acid solution B-24 was uniformly applied to one side (surface roughness Rz: 2.1 μm) of a 12 μm-thick electrolytic copper foil so that the thickness after curing would be about 25 μm, and then heated at 120° C. drying under heat and solvent removal. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. About the obtained metal sheet laminate, the copper foil was etched and removed using the ferric chloride aqueous solution, and the polyimide film B-24 (non-thermoplastic, Tg: 400 degreeC or more, moisture absorption rate: 0.78weight%) was prepared. In addition, the imide group concentration of the polyimide constituting the polyimide film B-24 was 34.2% by weight.

[实施例B-1][Example B-1]

使用多歧管式的3层共挤压多层模具,以聚酰胺酸溶液B-2/聚酰胺酸溶液B-18/聚酰胺酸溶液B-2的顺序的三层结构连续挤压并涂布于环状带形状的不锈钢制的支持基材上,在130℃下进行3分钟加热干燥并去除溶媒。其后,自130℃至360℃为止进行阶段性的热处理,完成酰亚胺化,而制备热塑性聚酰亚胺层/非热塑性聚酰亚胺层/热塑性聚酰亚胺层的厚度分别为2.0μm/21μm/2.0μm的聚酰亚胺膜B-1'。通过刀口法将支持基材上的聚酰亚胺膜B-1'剥离,而制备宽度方向的长度为1100mm的长条状聚酰亚胺膜B-1。Using a multi-manifold type 3-layer co-extrusion multi-layer die, the three-layer structure in the order of polyamic acid solution B-2/polyamic acid solution B-18/polyamic acid solution B-2 was continuously extruded and coated. It was clothed on an endless belt-shaped stainless-steel support substrate, heated and dried at 130° C. for 3 minutes, and the solvent was removed. Thereafter, stepwise heat treatment was performed from 130° C. to 360° C. to complete imidization, and the thicknesses of the thermoplastic polyimide layer/non-thermoplastic polyimide layer/thermoplastic polyimide layer were prepared to be 2.0 respectively. μm/21 μm/2.0 μm polyimide film B-1′. The polyimide film B-1' on the support substrate was peeled off by a knife-edge method to prepare a long polyimide film B-1 having a length in the width direction of 1100 mm.

长条状聚酰亚胺膜B-1的评价结果为如下所述。The evaluation results of the elongated polyimide film B-1 are as follows.

CTE:19ppm/KCTE: 19ppm/K

面内延迟(RO):9nmIn-plane retardation (RO): 9nm

宽度方向(TD方向)的面内延迟(RO)的偏差(ΔRO):2nmVariation (ΔRO) of in-plane retardation (RO) in the width direction (TD direction): 2 nm

在温度320℃的环境下、压力340MPa/m2、保持期间15分钟的加压前后的面内延迟(RO)的变化量:13nmVariation in in-plane retardation (RO) before and after pressurization with a temperature of 320°C, a pressure of 340MPa/m 2 and a holding period of 15 minutes: 13 nm

吸湿率:0.56重量%Moisture absorption rate: 0.56% by weight

介电常数(10GHz):3.56、介电正切(10GHz):0.0032Dielectric Constant (10GHz): 3.56, Dielectric Tangent (10GHz): 0.0032

[实施例B-2~实施例B-18、参考例B-1~参考例B-5][Example B-2 to Example B-18, Reference Example B-1 to Reference Example B-5]

除了使用表6~表9中所示的聚酰胺酸溶液以外,与实施例B-1同样地获得实施例B-2~实施例B-18、参考例B-1~参考例B-5的长条状聚酰亚胺膜B-2~长条状聚酰亚胺膜B-23。求出所得的长条状聚酰亚胺膜B-2~长条状聚酰亚胺膜B-23的CTE、面内延迟(RO)、宽度方向(TD方向)的面内延迟(RO)的偏差(ΔRO)、在温度320℃的环境下、压力340MPa/m2、保持期间15分钟的加压前后的面内延迟(RO)的变化量、吸湿率。将各测定结果示于表6~表9中。Except having used the polyamic acid solution shown in Table 6-Table 9, it carried out similarly to Example B-1, and obtained Example B-2-Example B-18, Reference Example B-1-Reference Example B-5 Long polyimide film B-2 to long polyimide film B-23. CTE, in-plane retardation (RO), and in-plane retardation (RO) in the width direction (TD direction) of the obtained elongated polyimide films B-2 to B-23 were determined deviation (ΔRO), change in in-plane retardation (RO) before and after pressurization with a temperature of 320° C., pressure of 340 MPa/m 2 , and a holding period of 15 minutes, and moisture absorption rate. The respective measurement results are shown in Tables 6 to 9.

[表6][Table 6]

Figure BDA0003636631740000441
Figure BDA0003636631740000441

[表7][Table 7]

Figure BDA0003636631740000442
Figure BDA0003636631740000442

[表8][Table 8]

Figure BDA0003636631740000451
Figure BDA0003636631740000451

[表9][Table 9]

Figure BDA0003636631740000452
Figure BDA0003636631740000452

[实施例B-19][Example B-19]

将聚酰胺酸溶液B-2以硬化后的厚度成为2.0μm的方式均匀地涂布于长条状的铜箔(压延铜箔、JX金属股份有限公司制造、商品名:GHY5-93F-HA-V2箔、厚度:12μm、热处理后的拉伸弹性系数:18GPa)的表面,在120℃下进行1分钟加热干燥并去除溶媒。在其上将聚酰胺酸溶液B-18以硬化后的厚度成为21μm的方式均匀地进行涂布后,在120℃下进行3分钟加热干燥并去除溶媒。进而,在其上将聚酰胺酸溶液B-2以硬化后的厚度成为2.0μm的方式均匀地进行涂布后,在120℃下进行1分钟加热干燥并去除溶媒。其后,自130℃至360℃为止进行阶段性的热处理,完成酰亚胺化,而制备单面铜张层叠板B-1。在所述单面铜张层叠板B-1的聚酰亚胺层侧重叠铜箔,在温度320℃、压力340MPa/m2的条件下进行15分钟热压接,而制备两面铜张层叠板B-1。The polyamic acid solution B-2 was uniformly applied to a long copper foil (rolled copper foil, manufactured by JX Metal Co., Ltd., trade name: GHY5-93F-HA- The surface of V2 foil, thickness: 12 μm, tensile elastic modulus after heat treatment: 18 GPa) was heated and dried at 120° C. for 1 minute to remove the solvent. After the polyamic acid solution B-18 was uniformly coated thereon so that the thickness after hardening might be 21 μm, it was heated and dried at 120° C. for 3 minutes to remove the solvent. Further, the polyamic acid solution B-2 was uniformly coated thereon so that the thickness after curing was 2.0 μm, and then heated and dried at 120° C. for 1 minute to remove the solvent. After that, stepwise heat treatment was performed from 130°C to 360°C, imidization was completed, and a single-sided copper sheet laminate B-1 was prepared. Copper foil was stacked on the polyimide layer side of the single-sided copper sheet laminate B-1, and thermocompression bonding was performed for 15 minutes under the conditions of a temperature of 320° C. and a pressure of 340 MPa/m 2 to prepare a double-sided copper sheet laminate. B-1.

流延面侧剥离强度:◎,压接面侧剥离强度:○Casting surface side peel strength: ◎, Crimping surface side peel strength: ○

[实施例B-20~实施例B-36、参考例B-6~参考例B-10][Example B-20 to Example B-36, Reference Example B-6 to Reference Example B-10]

除了使用表10~表13中所示的聚酰胺酸溶液以外,与实施例B-19同样地获得实施例B-20~实施例B-36、参考例B-6~参考例B-10的两面铜张层叠板B-2~两面铜张层叠板B-23。求出所得的两面铜张层叠板B-2~两面铜张层叠板B-23的流延面侧剥离强度、压接面侧剥离强度。将各测定结果示于表10~表13中。Except having used the polyamic acid solution shown in Table 10 - Table 13, it carried out similarly to Example B-19, obtained Example B-20 - Example B-36, the reference example B-6 - the reference example B-10 Double-sided copper sheet laminate B-2 to double-sided copper sheet laminate B-23. The casting surface side peeling strength and the pressure-bonding surface side peeling strength of the obtained double-sided copper sheet laminate B-2 to double-sided copper sheet laminate B-23 were determined. The respective measurement results are shown in Tables 10 to 13.

[表10][Table 10]

Figure BDA0003636631740000461
Figure BDA0003636631740000461

[表11][Table 11]

Figure BDA0003636631740000462
Figure BDA0003636631740000462

[表12][Table 12]

Figure BDA0003636631740000471
Figure BDA0003636631740000471

[表13][Table 13]

Figure BDA0003636631740000472
Figure BDA0003636631740000472

(合成例C-1)(Synthesis example C-1)

在氮气流下,在反应槽中投入606.387重量份的m-TB(2.856摩尔份)及92.779重量份的TPE-R(0.317摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加340.941重量份的PMDA(1.563摩尔份)及459.892重量份的BPDA(1.563摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-1。聚酰胺酸溶液C-1的溶液粘度为29,100cps。Under nitrogen flow, 606.387 parts by weight of m-TB (2.856 parts by mol), 92.779 parts by weight of TPE-R (0.317 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 340.941 parts by weight of PMDA (1.563 parts by mol) and 459.892 parts by weight of BPDA (1.563 parts by mol), stirring was continued at room temperature for 3 hours and a polymerization reaction was performed to prepare a polyamic acid solution C-1. The solution viscosity of the polyamic acid solution C-1 was 29,100 cps.

(合成例C-2)(Synthesis example C-2)

在氮气流下,在反应槽中投入606.387重量份的m-TB(2.856摩尔份)及92.779重量份的TPE-Q(0.317摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加340.941重量份的PMDA(1.563摩尔份)及459.892重量份的BPDA(1.563摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-2。聚酰胺酸溶液C-2的溶液粘度为32,800cps。Under a nitrogen stream, 606.387 parts by weight of m-TB (2.856 parts by mol), 92.779 parts by weight of TPE-Q (0.317 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 340.941 parts by weight of PMDA (1.563 parts by mol) and 459.892 parts by weight of BPDA (1.563 parts by mol), stirring was continued at room temperature for 3 hours and a polymerization reaction was performed to prepare a polyamic acid solution C-2. The solution viscosity of the polyamic acid solution C-2 was 32,800 cps.

(合成例C-3)(Synthesis example C-3)

在氮气流下,在反应槽中投入616.159重量份的m-TB(2.902摩尔份)及94.275重量份的TPE-R(0.322摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加415.723重量份的PMDA(1.906摩尔份)及373.843重量份的BPDA(1.271摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-3。聚酰胺酸溶液C-3的溶液粘度为31,500cps。Under nitrogen flow, 616.159 parts by weight of m-TB (2.902 parts by mol), 94.275 parts by weight of TPE-R (0.322 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 415.723 parts by weight of PMDA (1.906 parts by mol) and 373.843 parts by weight of BPDA (1.271 parts by mol), stirring was continued at room temperature for 3 hours and a polymerization reaction was performed to prepare a polyamic acid solution C-3. The solution viscosity of the polyamic acid solution C-3 was 31,500 cps.

(合成例C-4)(Synthesis example C-4)

在氮气流下,在反应槽中投入637.503重量份的m-TB(3.003摩尔份)及64.882重量份的BAPP(0.158摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加339.571重量份的PMDA(1.557摩尔份)及458.044重量份的BPDA(1.557摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-4。聚酰胺酸溶液C-4的溶液粘度为24,100cps。Under a nitrogen stream, 637.503 parts by weight of m-TB (3.003 parts by mol), 64.882 parts by weight of BAPP (0.158 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 339.571 parts by weight of PMDA (1.557 parts by weight) and 458.044 parts by weight of BPDA (1.557 parts by weight), stirring was continued for 3 hours at room temperature and polymerization was performed to prepare a polyamic acid solution C-4. The solution viscosity of the polyamic acid solution C-4 was 24,100 cps.

(合成例C-5)(Synthesis Example C-5)

在氮气流下,在反应槽中投入591.594重量份的m-TB(2.787摩尔份)及127.109重量份的BAPP(0.310摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加332.624重量份的PMDA(1.525摩尔份)及448.673重量份的BPDA(1.525摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-5。聚酰胺酸溶液C-5的溶液粘度为23,200cps。Under a nitrogen stream, 591.594 parts by weight of m-TB (2.787 parts by mol), 127.109 parts by weight of BAPP (0.310 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 332.624 parts by weight of PMDA (1.525 parts by weight) and 448.673 parts by weight of BPDA (1.525 parts by weight), stirring was continued for 3 hours at room temperature and polymerization was performed to prepare a polyamic acid solution C-5. The solution viscosity of the polyamic acid solution C-5 was 23,200 cps.

(合成例C-6)(Synthesis example C-6)

在氮气流下,在反应槽中投入641.968重量份的m-TB(3.024摩尔份)及54.830重量份的双苯胺-M(0.159摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加341.950重量份的PMDA(1.568摩尔份)及461.252重量份的BPDA(1.568摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-6。聚酰胺酸溶液C-6的溶液粘度为26,500cps。Under a nitrogen stream, 641.968 parts by weight of m-TB (3.024 parts by mol), 54.830 parts by weight of dianiline-M (0.159 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were charged into the reaction tank. , stirred and dissolved at room temperature. Next, after adding 341.950 parts by weight of PMDA (1.568 parts by weight) and 461.252 parts by weight of BPDA (1.568 parts by weight), stirring was continued for 3 hours at room temperature and polymerization was performed to prepare a polyamic acid solution C-6. The solution viscosity of the polyamic acid solution C-6 was 26,500 cps.

(合成例C-7)(Synthesis Example C-7)

在氮气流下,在反应槽中投入538.432重量份的m-TB(2.536摩尔份)及185.359重量份的TPE-R(0.634摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加408.690重量份的PMDA(1.874摩尔份)及367.519重量份的BPDA(1.249摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-7。聚酰胺酸溶液C-7的溶液粘度为31,100cps。Under nitrogen flow, 538.432 parts by weight of m-TB (2.536 parts by mol), 185.359 parts by weight of TPE-R (0.634 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 408.690 parts by weight of PMDA (1.874 parts by weight) and 367.519 parts by weight of BPDA (1.249 parts by weight), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-7. The solution viscosity of the polyamic acid solution C-7 was 31,100 cps.

(合成例C-8)(Synthesis Example C-8)

在氮气流下,在反应槽中投入674.489重量份的m-TB(3.177摩尔份)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加273.047重量份的PMDA(1.252摩尔份)及552.465重量份的BPDA(1.878摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-8。聚酰胺酸溶液C-8的溶液粘度为26,400cps。Under a nitrogen stream, 674.489 parts by weight of m-TB (3.177 parts by mol) and DMAc after polymerization were put into the reaction tank in such an amount that the solid content concentration after polymerization was 15% by weight, and the mixture was stirred and dissolved at room temperature. Next, after adding 273.047 parts by weight of PMDA (1.252 parts by weight) and 552.465 parts by weight of BPDA (1.878 parts by weight), stirring was continued for 3 hours at room temperature and polymerization was performed to prepare a polyamic acid solution C-8. The solution viscosity of the polyamic acid solution C-8 was 26,400 cps.

(合成例C-9)(Synthesis Example C-9)

在氮气流下,在反应槽中投入463.290重量份的m-TB(2.182摩尔份)及273.414重量份的TPE-R(0.935摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加401.891重量份的PMDA(1.843摩尔份)及361.405重量份的BPDA(1.228摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-9。聚酰胺酸溶液C-9的溶液粘度为29,000cps。Under nitrogen flow, 463.290 parts by weight of m-TB (2.182 parts by mol), 273.414 parts by weight of TPE-R (0.935 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 401.891 parts by weight of PMDA (1.843 parts by weight) and 361.405 parts by weight of BPDA (1.228 parts by weight), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-9. The solution viscosity of the polyamic acid solution C-9 was 29,000 cps.

(合成例C-10)(Synthesis example C-10)

在氮气流下,在反应槽中投入589.033重量份的m-TB(2.775摩尔份)及111.762重量份的APAB(0.490摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加420.798重量份的PMDA(1.929摩尔份)及378.407重量份的BPDA(1.286摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-10。聚酰胺酸溶液C-10的溶液粘度为22,700cps。Under a nitrogen stream, 589.033 parts by weight of m-TB (2.775 parts by mol), 111.762 parts by weight of APAB (0.490 parts by mol), and DMAc in an amount of 15% by weight of solid content after polymerization were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 420.798 parts by weight of PMDA (1.929 parts by mol) and 378.407 parts by weight of BPDA (1.286 parts by mol), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-10. The solution viscosity of the polyamic acid solution C-10 was 22,700 cps.

(合成例C-11)(Synthesis example C-11)

在氮气流下,在反应槽中投入500.546重量份的m-TB(2.358摩尔份)及229.756重量份的TPE-R(0.786摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加405.262重量份的PMDA(1.858摩尔份)及364.436重量份的BPDA(1.239摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-11。聚酰胺酸溶液C-11的溶液粘度为29,600cps。Under a nitrogen stream, 500.546 parts by weight of m-TB (2.358 parts by mol), 229.756 parts by weight of TPE-R (0.786 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, Stir and dissolve at room temperature. Next, after adding 405.262 parts by weight of PMDA (1.858 parts by weight) and 364.436 parts by weight of BPDA (1.239 parts by weight), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-11. The solution viscosity of the polyamic acid solution C-11 was 29,600 cps.

(合成例C-12)(Synthesis example C-12)

在氮气流下,在反应槽中投入779.571重量份的BAPP(1.899摩尔份)及聚合后的固体成分浓度成为12重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加420.430重量份的PMDA(1.928摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-12。聚酰胺酸溶液C-12的溶液粘度为2,210cps。Under a nitrogen stream, 779.571 parts by weight of BAPP (1.899 parts by mol) and DMAc in an amount such that the solid content concentration after polymerization was 12% by weight were put into the reaction tank, and stirred and dissolved at room temperature. Next, after adding 420.430 parts by weight of PMDA (1.928 parts by mol), stirring was continued at room temperature for 3 hours, and a polymerization reaction was performed to prepare a polyamic acid solution C-12. The solution viscosity of the polyamic acid solution C-12 was 2,210 cps.

(合成例C-13)(Synthesis Example C-13)

在氮气流下,在反应槽中投入616.159重量份的m-TB(2.902摩尔份)及94.275重量份的APB(0.322摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加415.723重量份的PMDA(1.906摩尔份)及373.843重量份的BPDA(1.271摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-13。聚酰胺酸溶液C-13的溶液粘度为12,700cps。Under a nitrogen stream, 616.159 parts by weight of m-TB (2.902 parts by mol), 94.275 parts by weight of APB (0.322 parts by mol), and DMAc in an amount of 15% by weight of solid content after polymerization were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 415.723 parts by weight of PMDA (1.906 parts by mol) and 373.843 parts by weight of BPDA (1.271 parts by mol), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-13. The solution viscosity of the polyamic acid solution C-13 was 12,700 cps.

(合成例C-14)(Synthesis Example C-14)

在氮气流下,在反应槽中投入628.877重量份的m-TB(2.962摩尔份)及65.261重量份的3,3'-DAPM(0.329摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加424.303重量份的PMDA(1.945摩尔份)及381.559重量份的BPDA(1.297摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-14。聚酰胺酸溶液C-14的溶液粘度为31,400cps。Under nitrogen flow, 628.877 parts by weight of m-TB (2.962 parts by mol) and 65.261 parts by weight of 3,3'-DAPM (0.329 parts by mol) and the solid content concentration after polymerization were charged into the reaction tank in an amount of 15% by weight DMAc, stirred and dissolved at room temperature. Next, after adding 424.303 parts by weight of PMDA (1.945 parts by weight) and 381.559 parts by weight of BPDA (1.297 parts by weight), stirring was continued for 3 hours at room temperature and polymerization was performed to prepare a polyamic acid solution C-14. The solution viscosity of the polyamic acid solution C-14 was 31,400 cps.

(合成例C-15)(Synthesis Example C-15)

在氮气流下,在反应槽中投入613.786重量份的m-TB(2.891摩尔份)、28.652重量份的DTAm(0.161摩尔份)及46.956重量份的TPE-Q(0.161摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加345.102重量份的PMDA(1.582摩尔份)及465.504重量份的BPDA(1.582摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-15。聚酰胺酸溶液C-15的溶液粘度为24,400cps。Under nitrogen flow, 613.786 parts by weight of m-TB (2.891 parts by mol), 28.652 parts by weight of DTAm (0.161 parts by mol), 46.956 parts by weight of TPE-Q (0.161 parts by mol) and the polymerized solid were put into the reaction tank DMAc in an amount of a component concentration of 15% by weight was stirred and dissolved at room temperature. Next, after adding 345.102 parts by weight of PMDA (1.582 parts by weight) and 465.504 parts by weight of BPDA (1.582 parts by weight), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-15. The solution viscosity of the polyamic acid solution C-15 was 24,400 cps.

(合成例C-16)(Synthesis example C-16)

在氮气流下,在反应槽中投入607.034重量份的m-TB(2.859摩尔份)、44.840重量份的BAPM(0.159摩尔份)及46.439重量份的TPE-Q(0.159摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加341.305重量份的PMDA(1.565摩尔份)及460.383重量份的BPDA(1.565摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-16。聚酰胺酸溶液C-16的溶液粘度为27,100cps。Under nitrogen flow, 607.034 parts by weight of m-TB (2.859 parts by mol), 44.840 parts by weight of BAPM (0.159 parts by mol), 46.439 parts by weight of TPE-Q (0.159 parts by mol) and the polymerized solid were put into the reaction tank DMAc in an amount of a component concentration of 15% by weight was stirred and dissolved at room temperature. Next, after adding 341.305 parts by weight of PMDA (1.565 parts by mol) and 460.383 parts by weight of BPDA (1.565 parts by mol), stirring was continued at room temperature for 3 hours and a polymerization reaction was performed to prepare a polyamic acid solution C-16. The solution viscosity of the polyamic acid solution C-16 was 27,100 cps.

(合成例C-17)(Synthesis Example C-17)

在氮气流下,在反应槽中投入603.059重量份的m-TB(2.841摩尔份)、54.368重量份的双苯胺-P(0.158摩尔份)及46.135重量份的TPE-Q(0.158摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加339.070重量份的PMDA(1.555摩尔份)及457.368重量份的BPDA(1.555摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-17。聚酰胺酸溶液C-17的溶液粘度为29,200cps。Under nitrogen flow, 603.059 parts by weight of m-TB (2.841 parts by mol), 54.368 parts by weight of dianiline-P (0.158 parts by mol), and 46.135 parts by weight of TPE-Q (0.158 parts by mol) were put into the reaction tank, and the polymerization The resulting solid content concentration was DMAc in an amount of 15% by weight, and the mixture was stirred and dissolved at room temperature. Next, after adding 339.070 parts by weight of PMDA (1.555 parts by mol) and 457.368 parts by weight of BPDA (1.555 parts by mol), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction to prepare a polyamic acid solution C-17. The solution viscosity of the polyamic acid solution C-17 was 29,200 cps.

(合成例C-18)(Synthesis Example C-18)

在氮气流下,在反应槽中投入599.272重量份的m-TB(2.823摩尔份)、63.445重量份的DTBAB(0.157摩尔份)及45.845重量份的TPE-Q(0.157摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加336.941重量份的PMDA(1.545摩尔份)及454.497重量份的BPDA(1.545摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-18。聚酰胺酸溶液C-18的溶液粘度为28,800cps。Under a nitrogen stream, 599.272 parts by weight of m-TB (2.823 parts by mol), 63.445 parts by weight of DTBAB (0.157 parts by mol), 45.845 parts by weight of TPE-Q (0.157 parts by mol) and the polymerized solid were put into the reaction tank DMAc in an amount of a component concentration of 15% by weight was stirred and dissolved at room temperature. Next, after adding 336.941 parts by weight of PMDA (1.545 parts by mol) and 454.497 parts by weight of BPDA (1.545 parts by mol), stirring was continued for 3 hours at room temperature to carry out a polymerization reaction, and a polyamic acid solution C-18 was prepared. The solution viscosity of the polyamic acid solution C-18 was 28,800 cps.

(合成例C-19)(Synthesis Example C-19)

在氮气流下,在反应槽中投入610.050重量份的m-TB(2.874摩尔份)及52.104重量份的双苯胺-M(0.151摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加399.526重量份的NTCDA(1.490摩尔份)及438.320重量份的BPDA(1.490摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-19。聚酰胺酸溶液C-19的溶液粘度为29,200cps。Under a nitrogen flow, 610.050 parts by weight of m-TB (2.874 parts by mol), 52.104 parts by weight of dianiline-M (0.151 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were charged into the reaction tank. , stirred and dissolved at room temperature. Next, after adding 399.526 parts by weight of NTCDA (1.490 parts by mol) and 438.320 parts by weight of BPDA (1.490 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to prepare a polyamic acid solution C-19. The solution viscosity of the polyamic acid solution C-19 was 29,200 cps.

(合成例C-20)(Synthesis example C-20)

在氮气流下,在反应槽中投入560.190重量份的m-TB(2.639摩尔份)及33.503重量份的BAPP(0.082摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下进行搅拌并加以溶解。其次,在添加292.237重量份的PMDA(1.340摩尔份)及614.071重量份的TAHQ(1.340摩尔份)后,在室温下继续搅拌3小时并进行聚合反应,而制备聚酰胺酸溶液C-20。聚酰胺酸溶液C-20的溶液粘度为26,100cps。Under a nitrogen stream, 560.190 parts by weight of m-TB (2.639 parts by mol), 33.503 parts by weight of BAPP (0.082 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, and the reaction was carried out at room temperature. Stir and dissolve. Next, after adding 292.237 parts by weight of PMDA (1.340 parts by mol) and 614.071 parts by weight of TAHQ (1.340 parts by mol), stirring was continued at room temperature for 3 hours to carry out a polymerization reaction to prepare a polyamic acid solution C-20. The solution viscosity of the polyamic acid solution C-20 was 26,100 cps.

[实施例C-1][Example C-1]

在将聚酰胺酸溶液C-1以硬化后的厚度成为约25μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:0.6μm)后,在120℃下进行加热干燥并去除溶媒。进而,在30分钟以内自120℃至360℃为止进行阶段性的热处理,完成酰亚胺化。使用氯化铁水溶液来将铜箔蚀刻去除,而制备聚酰亚胺膜C-1(CTE:18.1ppm/K、Tg:322℃、吸湿率:0.57重量%、雾度:74.5%、膜伸长率:48%、介电常数:3.42、介电正切:0.0028)。After the polyamic acid solution C-1 was uniformly applied to one side (surface roughness Rz: 0.6 μm) of an electrolytic copper foil having a thickness of 12 μm so that the thickness after curing would be about 25 μm, it was carried out at 120° C. Heat to dry and remove solvent. Furthermore, stepwise heat treatment is performed from 120° C. to 360° C. within 30 minutes to complete imidization. The copper foil was removed by etching using an aqueous ferric chloride solution to prepare a polyimide film C-1 (CTE: 18.1 ppm/K, Tg: 322° C., moisture absorption rate: 0.57% by weight, haze: 74.5%, film elongation Length: 48%, dielectric constant: 3.42, dielectric tangent: 0.0028).

[实施例C-2~实施例C-9及参考例C-1~参考例C-2][Example C-2 to Example C-9 and Reference Example C-1 to Reference Example C-2]

除了使用表14及表15中所示的聚酰胺酸溶液以外,与实施例C-1同样地制备聚酰亚胺膜C-2~聚酰亚胺膜C-11。关于聚酰亚胺膜C-2~聚酰亚胺膜C-11,求出CTE、Tg、吸湿率、雾度、膜伸长率、介电常数及介电正切。将这些测定结果示于表14及表15中。Except having used the polyamic acid solution shown in Table 14 and Table 15, it carried out similarly to Example C-1, and produced the polyimide film C-2 - the polyimide film C-11. Regarding the polyimide films C-2 to C-11, CTE, Tg, moisture absorption, haze, film elongation, dielectric constant, and dielectric tangent were determined. These measurement results are shown in Table 14 and Table 15.

[表14][Table 14]

Figure BDA0003636631740000511
Figure BDA0003636631740000511

[表15][Table 15]

Figure BDA0003636631740000512
Figure BDA0003636631740000512

[实施例C-10][Example C-10]

除了使用聚酰胺酸溶液C-11并自120℃至360℃为止进行5小时阶段性的热处理以外,与实施例C-1同样地制备聚酰亚胺膜C-12(CTE:10.2ppm/K、Tg:307℃、吸湿率:0.61重量%、雾度:74.2%、膜伸长率:41%)。A polyimide film C-12 (CTE: 10.2 ppm/K) was prepared in the same manner as in Example C-1, except that the polyamic acid solution C-11 was used and the heat treatment was performed stepwise from 120°C to 360°C for 5 hours. , Tg: 307°C, moisture absorption rate: 0.61% by weight, haze: 74.2%, film elongation: 41%).

[实施例C-11][Example C-11]

在将聚酰胺酸溶液C-15以硬化后的厚度成为约2μm~3μm的方式均匀地涂布于厚度为12μm的电解铜箔的单面(表面粗糙度Rz:0.6μm)后,在120℃下进行加热干燥并去除溶媒。其次,在其上将聚酰胺酸溶液C-1以硬化后的厚度成为约21μm的方式均匀地进行涂布,在120℃下进行加热干燥并去除溶媒。进而,在其上将聚酰胺酸溶液C-15以硬化后的厚度成为约2μm~3μm的方式均匀地进行涂布后,在120℃下进行加热干燥并去除溶媒。如此,在形成三层聚酰胺酸层后,自120℃至360℃为止进行30分钟阶段性的热处理,完成酰亚胺化,而制备金属张层叠板C-11。未确认到金属张层叠板C-11中的聚酰亚胺层的膨胀等不良状况。After the polyamic acid solution C-15 was uniformly applied to one side (surface roughness Rz: 0.6 μm) of an electrolytic copper foil with a thickness of 12 μm so that the thickness after curing would be about 2 μm to 3 μm, it was heated at 120° C. drying under heat and solvent removal. Next, the polyamic acid solution C-1 was uniformly coated thereon so that the thickness after curing was about 21 μm, and the solvent was removed by heating and drying at 120°C. Further, the polyamic acid solution C-15 was uniformly coated thereon so that the thickness after curing was about 2 μm to 3 μm, and then heated and dried at 120° C. to remove the solvent. In this way, after forming the three-layer polyamic acid layer, stepwise heat treatment was performed from 120° C. to 360° C. for 30 minutes, imidization was completed, and metal sheet laminate C-11 was prepared. Inconveniences such as expansion of the polyimide layer in the sheet metal laminate C-11 were not confirmed.

[实施例C-12~实施例C-17][Example C-12 to Example C-17]

除了使用聚酰胺酸溶液C-2~聚酰胺酸溶液C-7来代替聚酰胺酸溶液C-1以外,与实施例C-11同样地制备金属张层叠板C-12~金属张层叠板C-17。在金属张层叠板C-12~金属张层叠板C-17中的任一者中均未确认到聚酰亚胺层的膨胀等不良状况。Metal sheet laminate C-12 to metal sheet laminate C were prepared in the same manner as in Example C-11, except that polyamic acid solution C-2 to polyamic acid solution C-7 were used instead of polyamic acid solution C-1 -17. In any of sheet metal laminate C-12 to sheet metal laminate C-17, defects such as expansion of the polyimide layer were not confirmed.

(参考例C-3)(Reference Example C-3)

除了实施例C-11中的自120℃至360℃为止进行15分钟阶段性的热处理以外,与实施例C-11同样地制备金属张层叠板,但在聚酰亚胺层中确认到膨胀。A metal tension laminate was prepared in the same manner as in Example C-11 except that the heat treatment was performed stepwise from 120° C. to 360° C. for 15 minutes in Example C-11, but swelling was observed in the polyimide layer.

[实施例C-18~实施例C-20][Example C-18 to Example C-20]

除了使用聚酰胺酸溶液C-4~聚酰胺酸溶液C-6来代替实施例C-11中的聚酰胺酸溶液C-1并自120℃至360℃为止进行15分钟阶段性的热处理以外,与实施例C-11同样地制备金属张层叠板C-18~金属张层叠板C-20。在金属张层叠板C-18~金属张层叠板C-20的任一者中均未确认到聚酰亚胺层的膨胀等不良状况。Except that the polyamic acid solution C-4 to the polyamic acid solution C-6 were used instead of the polyamic acid solution C-1 in Example C-11, and the stepwise heat treatment was performed from 120°C to 360°C for 15 minutes, Metal sheet laminates C-18 to metal sheet laminates C-20 were prepared in the same manner as in Example C-11. In any of the sheet metal laminates C-18 to C-20, a defect such as expansion of the polyimide layer was not confirmed.

(参考例C-4~参考例C-6)(Reference Example C-4 to Reference Example C-6)

除了使用聚酰胺酸溶液C-2、聚酰胺酸溶液C-3及聚酰胺酸溶液C-7来代替实施例C-11中的聚酰胺酸溶液C-1并自120℃至360℃为止进行15分钟阶段性的热处理以外,与实施例C-11同样地制备金属张层叠板,但在任一金属张层叠板中在聚酰亚胺层中均确认到膨胀。Except using the polyamic acid solution C-2, the polyamic acid solution C-3 and the polyamic acid solution C-7 instead of the polyamic acid solution C-1 in Example C-11, it was carried out from 120°C to 360°C Except for the stepwise heat treatment for 15 minutes, a metal tension laminate was prepared in the same manner as in Example C-11, but swelling was observed in the polyimide layer in any of the metal tension laminates.

[实施例C-21~实施例C-26][Example C-21 to Example C-26]

除了使用表16中所示的聚酰胺酸溶液以外,与实施例C-1同样地制备聚酰亚胺膜C-13~聚酰亚胺膜C-18。关于聚酰亚胺膜C-13~聚酰亚胺膜C-18,求出CTE、Tg、介电常数及介电正切。将这些测定结果示于表16中。Except having used the polyamic acid solution shown in Table 16, it carried out similarly to Example C-1, and produced the polyimide film C-13 - the polyimide film C-18. About the polyimide film C-13 - the polyimide film C-18, CTE, Tg, a dielectric constant, and a dielectric tangent were calculated|required. These measurement results are shown in Table 16.

[表16][Table 16]

Figure BDA0003636631740000521
Figure BDA0003636631740000521

[实施例C-27~实施例C-30][Example C-27 to Example C-30]

除了使用聚酰胺酸溶液C-15~聚酰胺酸溶液C-18来代替实施例C-11中的聚酰胺酸溶液C-1并自120℃至360℃为止进行15分钟阶段性的热处理以外,与实施例C-11同样地制备金属张层叠板C-27~金属张层叠板C-30。在金属张层叠板C-27~金属张层叠板C-30的任一者中均未确认到聚酰亚胺层的膨胀等不良状况。Except for using polyamic acid solution C-15 to polyamic acid solution C-18 instead of polyamic acid solution C-1 in Example C-11, and performing stepwise heat treatment from 120°C to 360°C for 15 minutes, Metal sheet laminates C-27 to C-30 were prepared in the same manner as in Example C-11. In any of metal sheet laminate C-27 to metal sheet laminate C-30, defects such as expansion of the polyimide layer were not confirmed.

(参考例C-7~参考例C-8)(Reference Example C-7 to Reference Example C-8)

除了使用聚酰胺酸溶液C-13及聚酰胺酸溶液C-14来代替实施例C-11中的聚酰胺酸溶液C-1并自120℃至360℃为止进行15分钟阶段性的热处理以外,与实施例C-11同样地制备金属张层叠板,但在任一金属张层叠板中在聚酰亚胺层中均确认到膨胀。Except that the polyamic acid solution C-13 and the polyamic acid solution C-14 were used instead of the polyamic acid solution C-1 in Example C-11, and the stepwise heat treatment was performed from 120°C to 360°C for 15 minutes, A metal sheet laminate was prepared in the same manner as in Example C-11, but swelling was observed in the polyimide layer in any of the metal sheet laminates.

[实施例C-31~实施例C-32][Example C-31 to Example C-32]

除了使用表17中所示的聚酰胺酸溶液以外,与实施例C-1同样地制备聚酰亚胺膜C-19~聚酰亚胺膜C-20。关于聚酰亚胺膜C-19~聚酰亚胺膜C-20,求出CTE、Tg、介电常数及介电正切。将这些测定结果示于表17中。Except having used the polyamic acid solution shown in Table 17, it carried out similarly to Example C-1, and produced the polyimide film C-19 - polyimide film C-20. About the polyimide film C-19 - the polyimide film C-20, CTE, Tg, a dielectric constant, and a dielectric tangent were calculated|required. These measurement results are shown in Table 17.

[表17][Table 17]

Figure BDA0003636631740000531
Figure BDA0003636631740000531

以上,以例示的目的来对本发明的实施方式进行了详细说明,但本发明并不受到所述实施方式制约,可进行各种变形。As mentioned above, although embodiment of this invention was described in detail for the purpose of illustration, this invention is not limited by the said embodiment, Various deformation|transformation is possible.

Claims (8)

1. A polyimide film having a thermoplastic polyimide layer containing a thermoplastic polyimide on at least one side of a non-thermoplastic polyimide layer containing a non-thermoplastic polyimide, and characterized in that the following conditions (a-i) to (a-iv) are satisfied:
(a-i) the residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is an aromatic tetracarboxylic acid residue and an aromatic diamine residue, and
relative to 100 mole parts of the aromatic tetracarboxylic acid residue,
the total of at least one of a tetracarboxylic acid residue (BPDA residue) derived from 3,3',4,4' -biphenyltetracarboxylic dianhydride (BPDA), a tetracarboxylic acid residue (TAHQ residue) derived from 1, 4-phenylenebis (trimellitic acid monoester) dianhydride (TAHQ), and at least one of a tetracarboxylic acid residue (PMDA residue) derived from pyromellitic dianhydride (PMDA) and a tetracarboxylic acid residue (NTCDA residue) derived from 2,3,6, 7-naphthalenetetracarboxylic dianhydride (NTCDA) is 80 parts by mole or more,
the molar ratio of at least one of the BPDA residue and the TAHQ residue to at least one of the PMDA residue and the NTCDA residue { (BPDA residue + TAHQ residue)/(PMDA residue + NTCDA residue) } is in the range of 0.6 to 1.3;
(a-ii) the thermoplastic polyimide constituting the thermoplastic polyimide layer is an aromatic tetracarboxylic acid residue and an aromatic diamine residue, and
relative to 100 mole parts of the aromatic diamine residue,
a diamine residue derived from at least one diamine compound selected from diamine compounds represented by general formulae (B1) to (B7) is 70 parts by mole or more, and a diamine residue derived from a diamine compound represented by general formula (a1) is in a range of 1 part by mole or more and 30 parts by mole or less;
(a-iii) a coefficient of thermal expansion in the range of 10ppm/K to 30 ppm/K;
(a-iv) a dielectric tangent (Df) at 10GHz of 0.004 or less,
Figure FDA0003636631730000021
in the formulae (B1) to (B7), R1Independently represents a C1-6 monovalent hydrocarbon group or an alkoxy group, and the linking group A independently represents a group selected from-O-, -S-, -CO-, -SO-, -SO2-、-COO-、-CH2-、-C(CH3)2A divalent radical of-NH-or-CONH-, n1Independently represent an integer of 0 to 4; wherein the duplication with the formula (B2) is removed from the formula (B3), the duplication with the formula (B4) is removed from the formula (B5),
Figure FDA0003636631730000022
in the formula (A1), the linking group X represents a single bond or-COO-, Y independently represents hydrogen, C1-3 monovalent hydrocarbon group or alkoxy group, n represents an integer of 0-2, and p and q independently represent an integer of 0-4.
2. The polyimide film according to claim 1, wherein the diamine residue derived from the diamine compound represented by the general formula (a1) is 80 parts by mole or more per 100 parts by mole of the aromatic diamine residue in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer.
3. The polyimide film according to claim 1, wherein a diamine residue derived from at least one diamine compound selected from the group consisting of the diamine compounds represented by the general formulae (B1) to (B7) is in a range of 70 parts by mole or more and 99 parts by mole or less with respect to 100 parts by mole of the aromatic diamine residue in the thermoplastic polyimide constituting the thermoplastic polyimide layer.
4. A polyimide film having a thermoplastic polyimide layer containing a thermoplastic polyimide on at least one side of a non-thermoplastic polyimide layer containing a non-thermoplastic polyimide, and characterized in that the following conditions (b-i) to (b-iv) are satisfied:
(b-i) a thermal expansion coefficient in the range of 10ppm/K to 30 ppm/K;
(b-ii) the residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is an aromatic tetracarboxylic acid residue and an aromatic diamine residue, and
relative to 100 mole parts of the aromatic tetracarboxylic acid residue,
the amount of the tetracarboxylic acid residue derived from at least one tetracarboxylic acid dianhydride selected from the group consisting of 3,3',4,4' -biphenyltetracarboxylic acid dianhydride (BPDA) and 1, 4-phenylenebis (trimellitic acid monoester) dianhydride (TAHQ) is in the range of 30 parts by mole or more and 60 parts by mole or less,
a tetracarboxylic acid residue derived from pyromellitic dianhydride (PMDA) in a range of 40 to 70 parts by mole;
(b-iii) relative to 100 mole parts of aromatic diamine residues in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer,
80 parts by mole or more of diamine residues derived from a diamine compound represented by the following general formula (A1);
(b-iv) the thermoplastic polyimide constituting the thermoplastic polyimide layer is one containing an aromatic tetracarboxylic acid residue and an aromatic diamine residue and is present in an amount of 100 parts by mole based on the aromatic diamine residue,
the diamine residue derived from at least one diamine compound selected from the group consisting of diamine compounds represented by the following general formulae (B1) to (B7) is in the range of 70 parts by mole or more and 99 parts by mole or less,
the diamine residue derived from the diamine compound represented by the following general formula (A1) is in the range of 1 to 30 parts by mole,
Figure FDA0003636631730000031
in the formula (A1), the linking group X represents a single bond or-COO-, Y independently represents hydrogen, C1-3 monovalent hydrocarbon group or alkoxy group, n represents an integer of 0-2, p and q independently represent an integer of 0-4,
Figure FDA0003636631730000041
in the formulae (B1) to (B7), R1Independently represents a C1-6 monovalent hydrocarbon group or an alkoxy group, and the linking group A independently represents a group selected from-O-, -S-, -CO-, -SO-, -SO2-、-COO-、-CH2-、-C(CH3)2A divalent radical of-NH-or-CONH-, n1Independently represent an integer of 0 to 4; wherein the duplication of formula (B2) is removed from formula (B3), and the duplication of formula (B4) is removed from formula (B5).
5. The polyimide film according to claim 1 or 4, wherein the imide group concentration of each of the non-thermoplastic polyimide and the thermoplastic polyimide is 33% by weight or less.
6. A polyimide film having at least one non-thermoplastic polyimide layer, and characterized by satisfying the following conditions (c-i) to (c-iii):
(c-i) the residue contained in the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is an aromatic tetracarboxylic acid residue and an aromatic diamine residue, and
a tetracarboxylic acid residue derived from at least one of 3,3',4,4' -biphenyltetracarboxylic dianhydride and 1, 4-phenylenebis (trimellitic acid monoester) dianhydride in the range of 30 to 60 parts by mole based on 100 parts by mole of the aromatic tetracarboxylic acid residue, a tetracarboxylic acid residue derived from at least one of pyromellitic dianhydride and 2,3,6, 7-naphthalenetetracarboxylic dianhydride in the range of 40 to 70 parts by mole,
a diamine residue derived from a diamine compound represented by the following general formula (a1) in an amount of 70 parts by mole or more per 100 parts by mole of the aromatic diamine residue, and a diamine residue derived from a diamine compound represented by the following general formula (C1) to general formula (C4) in an amount of 2 to 15 parts by mole;
(c-ii) a glass transition temperature of 300 ℃ or higher;
(c-iii) a dielectric tangent (Df) at 10GHz of 0.004 or less,
Figure FDA0003636631730000051
in the formula (A1), the linking group X represents a single bond or-COO-, Y independently represents hydrogen, C1-3 monovalent hydrocarbon group or alkoxy group, n represents an integer of 1 or 2, p and q independently represent an integer of 0-4,
Figure FDA0003636631730000052
in the formulae (C1) to (C4), R2Independently represents a C1-6 monovalent hydrocarbon group, alkoxy group or alkylthio group, and the linking group A' independently represents a group selected from-O-, -SO2-、-CH2-or-C (CH)3)2The divalent group in (A), the linking group X1 independently represent-CH2-、-O-CH2-O-、-O-C2H4-O-、-O-C3H6-O-、-O-C4H8-O-、-O-C5H10-O-、-O-CH2-C(CH3)2-CH2-O-、-C(CH3)2-、-C(CF3)2-or-SO2-,n3Independently represents an integer of 1 to 4, n4Independently represents an integer of 0 to 4, but in the formula (C3), the linking group A' does not contain-CH2-、-C(CH3)2-、-C(CF3)2-or-SO2In the case of-n4Is 1 or more.
7. A copper sheet laminated plate comprising an insulating layer and a copper foil on at least one side of the insulating layer, and characterized in that:
the insulating layer comprises the polyimide film according to any one of claims 1,4, or 6.
8. A circuit board obtained by processing the copper foil of the copper-clad laminate according to claim 7 into wiring.
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