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AU2003229025A1 - Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations - Google Patents

Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations

Info

Publication number
AU2003229025A1
AU2003229025A1 AU2003229025A AU2003229025A AU2003229025A1 AU 2003229025 A1 AU2003229025 A1 AU 2003229025A1 AU 2003229025 A AU2003229025 A AU 2003229025A AU 2003229025 A AU2003229025 A AU 2003229025A AU 2003229025 A1 AU2003229025 A1 AU 2003229025A1
Authority
AU
Australia
Prior art keywords
plasting
operations
methods
quality during
contact mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003229025A
Other languages
English (en)
Inventor
Adam L. Cohen
Gang Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Southern California USC
Original Assignee
University of Southern California USC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Southern California USC filed Critical University of Southern California USC
Publication of AU2003229025A1 publication Critical patent/AU2003229025A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/0033D structures, e.g. superposed patterned layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H01L21/2885Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4857Multilayer substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
AU2003229025A 2002-05-07 2003-05-07 Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations Abandoned AU2003229025A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37913202P 2002-05-07 2002-05-07
US60/379,132 2002-05-07
PCT/US2003/014859 WO2003095715A1 (fr) 2002-05-07 2003-05-07 Procedes et appareil de surveillance de la qualite de depot au cours d'operations de galvanoplastie effectuees a l'aide d'un masque de contact adaptable

Publications (1)

Publication Number Publication Date
AU2003229025A1 true AU2003229025A1 (en) 2003-11-11

Family

ID=29420492

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003229025A Abandoned AU2003229025A1 (en) 2002-05-07 2003-05-07 Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations

Country Status (7)

Country Link
US (2) US20040000489A1 (fr)
EP (1) EP1506329A1 (fr)
JP (2) JP4434013B2 (fr)
KR (1) KR100994887B1 (fr)
CN (2) CN101724875A (fr)
AU (1) AU2003229025A1 (fr)
WO (1) WO2003095715A1 (fr)

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US8454652B1 (en) 2002-10-29 2013-06-04 Adam L. Cohen Releasable tissue anchoring device, methods for using, and methods for making
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US10416192B2 (en) 2003-02-04 2019-09-17 Microfabrica Inc. Cantilever microprobes for contacting electronic components
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US7696102B2 (en) * 2005-03-31 2010-04-13 Gang Zhang Methods for fabrication of three-dimensional structures
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US7247560B1 (en) * 2006-03-01 2007-07-24 Gary Neal Poovey Selective deposition of double damascene metal
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US10961967B1 (en) 2017-12-12 2021-03-30 Microfabrica Inc. Fuel injector systems, fuel injectors, fuel injector nozzles, and methods for making fuel injector nozzles
US11262383B1 (en) 2018-09-26 2022-03-01 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
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Also Published As

Publication number Publication date
JP4434013B2 (ja) 2010-03-17
CN100582318C (zh) 2010-01-20
CN1659317A (zh) 2005-08-24
KR100994887B1 (ko) 2010-11-16
EP1506329A1 (fr) 2005-02-16
KR20050012738A (ko) 2005-02-02
JP2005524775A (ja) 2005-08-18
JP2010059550A (ja) 2010-03-18
US20040000489A1 (en) 2004-01-01
CN101724875A (zh) 2010-06-09
US20070181431A1 (en) 2007-08-09
JP5198413B2 (ja) 2013-05-15
WO2003095715A1 (fr) 2003-11-20

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 18, NO 2, PAGE(S) 606 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME UNIVERSITY OF SOUTHERN CALIFORNIA, APPLICATION NO. 2003229025, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003