AU2003229025A1 - Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations - Google Patents
Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operationsInfo
- Publication number
- AU2003229025A1 AU2003229025A1 AU2003229025A AU2003229025A AU2003229025A1 AU 2003229025 A1 AU2003229025 A1 AU 2003229025A1 AU 2003229025 A AU2003229025 A AU 2003229025A AU 2003229025 A AU2003229025 A AU 2003229025A AU 2003229025 A1 AU2003229025 A1 AU 2003229025A1
- Authority
- AU
- Australia
- Prior art keywords
- plasting
- operations
- methods
- quality during
- contact mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000008021 deposition Effects 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000012544 monitoring process Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/003—3D structures, e.g. superposed patterned layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/243—Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrochemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37913202P | 2002-05-07 | 2002-05-07 | |
| US60/379,132 | 2002-05-07 | ||
| PCT/US2003/014859 WO2003095715A1 (fr) | 2002-05-07 | 2003-05-07 | Procedes et appareil de surveillance de la qualite de depot au cours d'operations de galvanoplastie effectuees a l'aide d'un masque de contact adaptable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2003229025A1 true AU2003229025A1 (en) | 2003-11-11 |
Family
ID=29420492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003229025A Abandoned AU2003229025A1 (en) | 2002-05-07 | 2003-05-07 | Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20040000489A1 (fr) |
| EP (1) | EP1506329A1 (fr) |
| JP (2) | JP4434013B2 (fr) |
| KR (1) | KR100994887B1 (fr) |
| CN (2) | CN101724875A (fr) |
| AU (1) | AU2003229025A1 (fr) |
| WO (1) | WO2003095715A1 (fr) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003049514A2 (fr) | 2001-12-03 | 2003-06-12 | Memgen Corporation | Composants rf et hyperfrequence miniatures et procedes de fabrication desdits composants |
| US7109118B2 (en) | 2003-05-07 | 2006-09-19 | Microfabrica Inc. | Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures |
| US9614266B2 (en) | 2001-12-03 | 2017-04-04 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
| US7239219B2 (en) | 2001-12-03 | 2007-07-03 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
| US20050184748A1 (en) * | 2003-02-04 | 2005-08-25 | Microfabrica Inc. | Pin-type probes for contacting electronic circuits and methods for making such probes |
| US20050067292A1 (en) * | 2002-05-07 | 2005-03-31 | Microfabrica Inc. | Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures |
| US20060108678A1 (en) | 2002-05-07 | 2006-05-25 | Microfabrica Inc. | Probe arrays and method for making |
| US20050104609A1 (en) * | 2003-02-04 | 2005-05-19 | Microfabrica Inc. | Microprobe tips and methods for making |
| EP1576206A2 (fr) * | 2002-05-07 | 2005-09-21 | Microfabrica Inc. | Procede et appareil pour former des structures tridimensionnelles integrees dans des circuits a semiconducteurs |
| AU2003228977A1 (en) * | 2002-05-07 | 2003-11-11 | University Of Southern California | Method of and apparatus for forming three-dimensional structures integral with semiconductor based circuitry |
| US8070931B1 (en) | 2002-05-07 | 2011-12-06 | Microfabrica Inc. | Electrochemical fabrication method including elastic joining of structures |
| US9919472B1 (en) | 2002-05-07 | 2018-03-20 | Microfabrica Inc. | Stacking and bonding methods for forming multi-layer, three-dimensional, millimeter scale and microscale structures |
| WO2003095710A2 (fr) | 2002-05-07 | 2003-11-20 | Memgen Corporation | Procedes et appareil de fabrication electrochimique de structures par couches entrelacees ou par gravure selective et remplissage des vides |
| US20050142739A1 (en) * | 2002-05-07 | 2005-06-30 | Microfabrica Inc. | Probe arrays and method for making |
| CN101724875A (zh) * | 2002-05-07 | 2010-06-09 | 南加州大学 | 在适形接触掩模电镀操作期间监测沉积质量的方法和装置 |
| US20050202660A1 (en) * | 2002-05-07 | 2005-09-15 | Microfabrica Inc. | Electrochemical fabrication process including process monitoring, making corrective action decisions, and taking appropriate actions |
| WO2003095711A2 (fr) | 2002-05-07 | 2003-11-20 | Memgen Corporation | Structures de fabrication electrochimique a bases dielectriques ou actives et procede et appareil de production de ces structures |
| US20110092988A1 (en) * | 2002-10-29 | 2011-04-21 | Microfabrica Inc. | Microdevices for Tissue Approximation and Retention, Methods for Using, and Methods for Making |
| US8454652B1 (en) | 2002-10-29 | 2013-06-04 | Adam L. Cohen | Releasable tissue anchoring device, methods for using, and methods for making |
| US20100094320A1 (en) * | 2002-10-29 | 2010-04-15 | Microfabrica Inc. | Atherectomy and Thrombectomy Devices, Methods for Making, and Procedures for Using |
| US20080211524A1 (en) * | 2003-02-04 | 2008-09-04 | Microfabrica Inc. | Electrochemically Fabricated Microprobes |
| US20080106280A1 (en) * | 2003-02-04 | 2008-05-08 | Microfabrica Inc. | Vertical Microprobes for Contacting Electronic Components and Method for Making Such Probes |
| US10416192B2 (en) | 2003-02-04 | 2019-09-17 | Microfabrica Inc. | Cantilever microprobes for contacting electronic components |
| US10297421B1 (en) | 2003-05-07 | 2019-05-21 | Microfabrica Inc. | Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures |
| US20050045484A1 (en) * | 2003-05-07 | 2005-03-03 | Microfabrica Inc. | Electrochemical fabrication process using directly patterned masks |
| US20050109622A1 (en) * | 2003-11-26 | 2005-05-26 | Peter Peumans | Method for controlling electrodeposition of an entity and devices incorporating the immobilized entity |
| US20080105355A1 (en) * | 2003-12-31 | 2008-05-08 | Microfabrica Inc. | Probe Arrays and Method for Making |
| GB0416600D0 (en) | 2004-07-24 | 2004-08-25 | Univ Newcastle | A process for manufacturing micro- and nano-devices |
| US8216931B2 (en) * | 2005-03-31 | 2012-07-10 | Gang Zhang | Methods for forming multi-layer three-dimensional structures |
| US7696102B2 (en) * | 2005-03-31 | 2010-04-13 | Gang Zhang | Methods for fabrication of three-dimensional structures |
| JP5249040B2 (ja) | 2005-11-18 | 2013-07-31 | レプリソールス グループ エスアーエス | 電極およびその形成方法 |
| US7247560B1 (en) * | 2006-03-01 | 2007-07-24 | Gary Neal Poovey | Selective deposition of double damascene metal |
| CN100395374C (zh) * | 2006-04-10 | 2008-06-18 | 南京航空航天大学 | 三维微细结构电铸方法及装置 |
| EP2104948A2 (fr) * | 2007-02-20 | 2009-09-30 | Qualcomm Mems Technologies, Inc. | Équipement et procédés d'attaque chimique de mems |
| US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
| CA2694044C (fr) * | 2007-07-25 | 2017-02-28 | Qualcomm Mems Technologies, Inc. | Dispositifs d'affichage mems et procedes de fabrication de ceux-ci |
| US8023191B2 (en) * | 2008-05-07 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Printable static interferometric images |
| US7719754B2 (en) * | 2008-09-30 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Multi-thickness layers for MEMS and mask-saving sequence for same |
| US8262916B1 (en) | 2009-06-30 | 2012-09-11 | Microfabrica Inc. | Enhanced methods for at least partial in situ release of sacrificial material from cavities or channels and/or sealing of etching holes during fabrication of multi-layer microscale or millimeter-scale complex three-dimensional structures |
| US20140262794A1 (en) * | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Electrochemical deposition processes for semiconductor wafers |
| TWI503847B (zh) * | 2013-10-16 | 2015-10-11 | Taiwan Green Point Entpr Co | Plastic body with conductive line layer and its making method |
| CN104152979B (zh) * | 2014-09-04 | 2017-02-01 | 蒙家革 | 一种电解蚀刻头和数控电解蚀刻系统及蚀刻方法 |
| DE102015201927A1 (de) | 2015-02-04 | 2016-08-04 | Siemens Aktiengesellschaft | Verfahren zum Kaltgasspritzen mit Maske |
| JP2017053008A (ja) * | 2015-09-10 | 2017-03-16 | 株式会社東芝 | 電気めっき装置、電気めっき方法、及び半導体装置の製造方法 |
| US10961967B1 (en) | 2017-12-12 | 2021-03-30 | Microfabrica Inc. | Fuel injector systems, fuel injectors, fuel injector nozzles, and methods for making fuel injector nozzles |
| US11262383B1 (en) | 2018-09-26 | 2022-03-01 | Microfabrica Inc. | Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making |
| US11611097B2 (en) | 2018-11-06 | 2023-03-21 | Utility Global, Inc. | Method of making an electrochemical reactor via sintering inorganic dry particles |
| US11557784B2 (en) | 2018-11-06 | 2023-01-17 | Utility Global, Inc. | Method of making a fuel cell and treating a component thereof |
| US11603324B2 (en) | 2018-11-06 | 2023-03-14 | Utility Global, Inc. | Channeled electrodes and method of making |
| US11539053B2 (en) | 2018-11-12 | 2022-12-27 | Utility Global, Inc. | Method of making copper electrode |
| US11761100B2 (en) | 2018-11-06 | 2023-09-19 | Utility Global, Inc. | Electrochemical device and method of making |
| EP3881377A4 (fr) * | 2018-11-17 | 2022-09-28 | Utility Global, Inc. | Procédé de fabrication de réacteurs électrochimiques |
| WO2020102634A1 (fr) * | 2018-11-17 | 2020-05-22 | Utility Global, Inc. | Procédé de fabrication de réacteurs électrochimiques |
| KR102636830B1 (ko) | 2018-12-31 | 2024-02-14 | 엘지디스플레이 주식회사 | 전기 도금 장치 및 이를 이용한 전기 도금 방법 |
| CN110054147A (zh) * | 2019-03-26 | 2019-07-26 | 中国科学院微电子研究所 | 一种微米级金属件三维成型方法 |
| CN109822356B (zh) * | 2019-04-10 | 2024-01-30 | 福州大学 | 一种涂胶-钻孔-电磁铆接复合装置及其使用方法 |
| US11867721B1 (en) | 2019-12-31 | 2024-01-09 | Microfabrica Inc. | Probes with multiple springs, methods for making, and methods for using |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321048A (en) * | 1976-08-10 | 1978-02-27 | Nippon Electric Co | Constant current density plating device |
| JPS62190722A (ja) * | 1986-02-17 | 1987-08-20 | Nippon Denso Co Ltd | 半導体ウエハ−の電気メツキ用電圧モニタ− |
| JPS63138246A (ja) * | 1986-11-29 | 1988-06-10 | Oki Electric Ind Co Ltd | メツキ液撹拌状態試験方法 |
| US4920639A (en) * | 1989-08-04 | 1990-05-01 | Microelectronics And Computer Technology Corporation | Method of making a multilevel electrical airbridge interconnect |
| US5011580A (en) * | 1989-10-24 | 1991-04-30 | Microelectronics And Computer Technology Corporation | Method of reworking an electrical multilayer interconnect |
| US5190637A (en) * | 1992-04-24 | 1993-03-02 | Wisconsin Alumni Research Foundation | Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers |
| US5605615A (en) * | 1994-12-05 | 1997-02-25 | Motorola, Inc. | Method and apparatus for plating metals |
| KR100397227B1 (ko) * | 1997-04-04 | 2003-09-13 | 유니버시티 오브 써던 캘리포니아 | 전기화학적 제조를 위한 전기도금 물품, 방법 및 장치 |
| US6551483B1 (en) * | 2000-02-29 | 2003-04-22 | Novellus Systems, Inc. | Method for potential controlled electroplating of fine patterns on semiconductor wafers |
| US6428673B1 (en) * | 2000-07-08 | 2002-08-06 | Semitool, Inc. | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology |
| US6458263B1 (en) * | 2000-09-29 | 2002-10-01 | Sandia National Laboratories | Cantilevered multilevel LIGA devices and methods |
| JP3664669B2 (ja) * | 2001-06-27 | 2005-06-29 | 株式会社荏原製作所 | 電解めっき装置 |
| CN101724875A (zh) * | 2002-05-07 | 2010-06-09 | 南加州大学 | 在适形接触掩模电镀操作期间监测沉积质量的方法和装置 |
-
2003
- 2003-05-07 CN CN200910246087A patent/CN101724875A/zh active Pending
- 2003-05-07 CN CN03813332A patent/CN100582318C/zh not_active Expired - Fee Related
- 2003-05-07 WO PCT/US2003/014859 patent/WO2003095715A1/fr not_active Ceased
- 2003-05-07 KR KR1020047017799A patent/KR100994887B1/ko not_active Expired - Lifetime
- 2003-05-07 US US10/434,494 patent/US20040000489A1/en not_active Abandoned
- 2003-05-07 EP EP03726805A patent/EP1506329A1/fr not_active Withdrawn
- 2003-05-07 JP JP2004503699A patent/JP4434013B2/ja not_active Expired - Fee Related
- 2003-05-07 AU AU2003229025A patent/AU2003229025A1/en not_active Abandoned
-
2007
- 2007-04-13 US US11/735,393 patent/US20070181431A1/en not_active Abandoned
-
2009
- 2009-11-12 JP JP2009259258A patent/JP5198413B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4434013B2 (ja) | 2010-03-17 |
| CN100582318C (zh) | 2010-01-20 |
| CN1659317A (zh) | 2005-08-24 |
| KR100994887B1 (ko) | 2010-11-16 |
| EP1506329A1 (fr) | 2005-02-16 |
| KR20050012738A (ko) | 2005-02-02 |
| JP2005524775A (ja) | 2005-08-18 |
| JP2010059550A (ja) | 2010-03-18 |
| US20040000489A1 (en) | 2004-01-01 |
| CN101724875A (zh) | 2010-06-09 |
| US20070181431A1 (en) | 2007-08-09 |
| JP5198413B2 (ja) | 2013-05-15 |
| WO2003095715A1 (fr) | 2003-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase | ||
| TH | Corrigenda |
Free format text: IN VOL 18, NO 2, PAGE(S) 606 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME UNIVERSITY OF SOUTHERN CALIFORNIA, APPLICATION NO. 2003229025, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003 |