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AU2003280332A1 - Device and method for connecting objects - Google Patents

Device and method for connecting objects

Info

Publication number
AU2003280332A1
AU2003280332A1 AU2003280332A AU2003280332A AU2003280332A1 AU 2003280332 A1 AU2003280332 A1 AU 2003280332A1 AU 2003280332 A AU2003280332 A AU 2003280332A AU 2003280332 A AU2003280332 A AU 2003280332A AU 2003280332 A1 AU2003280332 A1 AU 2003280332A1
Authority
AU
Australia
Prior art keywords
connecting objects
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003280332A
Other versions
AU2003280332A8 (en
Inventor
Daniel Kappes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUSS MicroTec Laboratory Equipment GmbH
Original Assignee
SUSS MicroTec Laboratory Equipment GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUSS MicroTec Laboratory Equipment GmbH filed Critical SUSS MicroTec Laboratory Equipment GmbH
Publication of AU2003280332A8 publication Critical patent/AU2003280332A8/en
Publication of AU2003280332A1 publication Critical patent/AU2003280332A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/94Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
AU2003280332A 2002-09-12 2003-09-12 Device and method for connecting objects Abandoned AU2003280332A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10242402.0 2002-09-12
DE10242402A DE10242402A1 (en) 2002-09-12 2002-09-12 Device and method for connecting objects
PCT/EP2003/010178 WO2004026531A2 (en) 2002-09-12 2003-09-12 Device and method for connecting objects

Publications (2)

Publication Number Publication Date
AU2003280332A8 AU2003280332A8 (en) 2004-04-08
AU2003280332A1 true AU2003280332A1 (en) 2004-04-08

Family

ID=31969100

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003280332A Abandoned AU2003280332A1 (en) 2002-09-12 2003-09-12 Device and method for connecting objects

Country Status (4)

Country Link
EP (1) EP1558425A2 (en)
AU (1) AU2003280332A1 (en)
DE (1) DE10242402A1 (en)
WO (1) WO2004026531A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004034421A1 (en) 2004-07-15 2006-02-09 Pac Tech - Packaging Technologies Gmbh Method and device for mutual contacting of two wafers
DE102006058493B4 (en) * 2006-12-12 2012-03-22 Erich Thallner Method and apparatus for bonding wafers
DE102011080929B4 (en) * 2011-08-12 2014-07-17 Infineon Technologies Ag Process for producing a composite and a power semiconductor module
JP5756429B2 (en) 2011-10-21 2015-07-29 東京エレクトロン株式会社 Bonding apparatus and bonding position adjusting method using the bonding apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4316757A (en) * 1980-03-03 1982-02-23 Monsanto Company Method and apparatus for wax mounting of thin wafers for polishing
JPH07264B2 (en) * 1987-08-10 1995-01-11 住友電気工業株式会社 Method and apparatus for sticking semiconductor wafer
JPH081898B2 (en) * 1988-11-02 1996-01-10 三菱電機株式会社 Wafer sticker
JP2648638B2 (en) * 1990-11-30 1997-09-03 三菱マテリアル株式会社 Wafer bonding method and apparatus
JP2534196B2 (en) * 1993-12-21 1996-09-11 株式会社エンヤシステム Wafer sticking method
DE19610112C2 (en) * 1996-03-14 2000-04-06 Tech Gmbh Antriebstechnik Und Process for soldering semiconductor chips
JPH1012578A (en) * 1996-06-26 1998-01-16 Mitsubishi Electric Corp Wafer / support substrate bonding method and wafer / support substrate bonding apparatus
DE10048881A1 (en) * 2000-09-29 2002-03-07 Infineon Technologies Ag Device for planar joining of two wafers e.g. for thin grinding and separation of product-wafer, has product wafer arranged surface-congruently over carrier wafer

Also Published As

Publication number Publication date
WO2004026531A3 (en) 2004-05-27
DE10242402A1 (en) 2004-04-01
WO2004026531A2 (en) 2004-04-01
EP1558425A2 (en) 2005-08-03
AU2003280332A8 (en) 2004-04-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase