AU2003280332A8 - Device and method for connecting objects - Google Patents
Device and method for connecting objectsInfo
- Publication number
- AU2003280332A8 AU2003280332A8 AU2003280332A AU2003280332A AU2003280332A8 AU 2003280332 A8 AU2003280332 A8 AU 2003280332A8 AU 2003280332 A AU2003280332 A AU 2003280332A AU 2003280332 A AU2003280332 A AU 2003280332A AU 2003280332 A8 AU2003280332 A8 AU 2003280332A8
- Authority
- AU
- Australia
- Prior art keywords
- connecting objects
- objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manufacturing Of Electrical Connectors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10242402.0 | 2002-09-12 | ||
| DE10242402A DE10242402A1 (en) | 2002-09-12 | 2002-09-12 | Device and method for connecting objects |
| PCT/EP2003/010178 WO2004026531A2 (en) | 2002-09-12 | 2003-09-12 | Device and method for connecting objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU2003280332A8 true AU2003280332A8 (en) | 2004-04-08 |
| AU2003280332A1 AU2003280332A1 (en) | 2004-04-08 |
Family
ID=31969100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003280332A Abandoned AU2003280332A1 (en) | 2002-09-12 | 2003-09-12 | Device and method for connecting objects |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1558425A2 (en) |
| AU (1) | AU2003280332A1 (en) |
| DE (1) | DE10242402A1 (en) |
| WO (1) | WO2004026531A2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004034421A1 (en) | 2004-07-15 | 2006-02-09 | Pac Tech - Packaging Technologies Gmbh | Method and device for mutual contacting of two wafers |
| DE102006058493B4 (en) * | 2006-12-12 | 2012-03-22 | Erich Thallner | Method and apparatus for bonding wafers |
| DE102011080929B4 (en) * | 2011-08-12 | 2014-07-17 | Infineon Technologies Ag | Process for producing a composite and a power semiconductor module |
| JP5756429B2 (en) | 2011-10-21 | 2015-07-29 | 東京エレクトロン株式会社 | Bonding apparatus and bonding position adjusting method using the bonding apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4316757A (en) * | 1980-03-03 | 1982-02-23 | Monsanto Company | Method and apparatus for wax mounting of thin wafers for polishing |
| JPH07264B2 (en) * | 1987-08-10 | 1995-01-11 | 住友電気工業株式会社 | Method and apparatus for sticking semiconductor wafer |
| JPH081898B2 (en) * | 1988-11-02 | 1996-01-10 | 三菱電機株式会社 | Wafer sticker |
| JP2648638B2 (en) * | 1990-11-30 | 1997-09-03 | 三菱マテリアル株式会社 | Wafer bonding method and apparatus |
| JP2534196B2 (en) * | 1993-12-21 | 1996-09-11 | 株式会社エンヤシステム | Wafer sticking method |
| DE19610112C2 (en) * | 1996-03-14 | 2000-04-06 | Tech Gmbh Antriebstechnik Und | Process for soldering semiconductor chips |
| JPH1012578A (en) * | 1996-06-26 | 1998-01-16 | Mitsubishi Electric Corp | Wafer / support substrate bonding method and wafer / support substrate bonding apparatus |
| DE10048881A1 (en) * | 2000-09-29 | 2002-03-07 | Infineon Technologies Ag | Device for planar joining of two wafers e.g. for thin grinding and separation of product-wafer, has product wafer arranged surface-congruently over carrier wafer |
-
2002
- 2002-09-12 DE DE10242402A patent/DE10242402A1/en not_active Ceased
-
2003
- 2003-09-12 WO PCT/EP2003/010178 patent/WO2004026531A2/en not_active Ceased
- 2003-09-12 AU AU2003280332A patent/AU2003280332A1/en not_active Abandoned
- 2003-09-12 EP EP03770941A patent/EP1558425A2/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004026531A3 (en) | 2004-05-27 |
| DE10242402A1 (en) | 2004-04-01 |
| WO2004026531A2 (en) | 2004-04-01 |
| EP1558425A2 (en) | 2005-08-03 |
| AU2003280332A1 (en) | 2004-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |