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AU2002338254A1 - Electrostatically actuated micro-electro-mechanical devices and method of manufacture - Google Patents

Electrostatically actuated micro-electro-mechanical devices and method of manufacture

Info

Publication number
AU2002338254A1
AU2002338254A1 AU2002338254A AU2002338254A AU2002338254A1 AU 2002338254 A1 AU2002338254 A1 AU 2002338254A1 AU 2002338254 A AU2002338254 A AU 2002338254A AU 2002338254 A AU2002338254 A AU 2002338254A AU 2002338254 A1 AU2002338254 A1 AU 2002338254A1
Authority
AU
Australia
Prior art keywords
electro
manufacture
mechanical devices
electrostatically actuated
actuated micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002338254A
Inventor
Mirela Gabriela Bancu
James Ching-Ming Hsiao
Gregory A. Kirkos
Thomas David Kudrle
Carlos Horacio Mastrangelo
Gordon M. Shedd
Marc Waelti
Chanche Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Intellisense LLC
Original Assignee
Corning Intellisense LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Intellisense LLC filed Critical Corning Intellisense LLC
Publication of AU2002338254A1 publication Critical patent/AU2002338254A1/en
Abandoned legal-status Critical Current

Links

AU2002338254A 2001-03-16 2002-03-15 Electrostatically actuated micro-electro-mechanical devices and method of manufacture Abandoned AU2002338254A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/276,814 2001-03-16

Publications (1)

Publication Number Publication Date
AU2002338254A1 true AU2002338254A1 (en) 2002-10-15

Family

ID=

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