[go: up one dir, main page]

AU2001286745A1 - Magnetically actuated micro-electro-mechanical apparatus and method of manufacture - Google Patents

Magnetically actuated micro-electro-mechanical apparatus and method of manufacture

Info

Publication number
AU2001286745A1
AU2001286745A1 AU2001286745A AU8674501A AU2001286745A1 AU 2001286745 A1 AU2001286745 A1 AU 2001286745A1 AU 2001286745 A AU2001286745 A AU 2001286745A AU 8674501 A AU8674501 A AU 8674501A AU 2001286745 A1 AU2001286745 A1 AU 2001286745A1
Authority
AU
Australia
Prior art keywords
electro
manufacture
mechanical apparatus
magnetically actuated
actuated micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001286745A
Inventor
Jonathan Bernstein
Gregory A. Kirkos
William P. Taylor
Marc Waelti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Intellisense LLC
Original Assignee
Corning Intellisense LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Intellisense LLC filed Critical Corning Intellisense LLC
Publication of AU2001286745A1 publication Critical patent/AU2001286745A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/015—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being integrated on the same substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0109—Bonding an individual cap on the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/033—Thermal bonding
    • B81C2203/035—Soldering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001286745A 2000-08-27 2001-08-24 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture Abandoned AU2001286745A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US22833200P 2000-08-27 2000-08-27
US60/228,332 2000-08-27
US27681501P 2001-03-16 2001-03-16
US60/276,815 2001-03-16
PCT/US2001/026529 WO2002018979A2 (en) 2000-08-27 2001-08-24 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture

Publications (1)

Publication Number Publication Date
AU2001286745A1 true AU2001286745A1 (en) 2002-03-13

Family

ID=26922274

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001286745A Abandoned AU2001286745A1 (en) 2000-08-27 2001-08-24 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture

Country Status (4)

Country Link
US (1) US6989921B2 (en)
AU (1) AU2001286745A1 (en)
GB (1) GB2384060B (en)
WO (1) WO2002018979A2 (en)

Families Citing this family (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506620B1 (en) * 2000-11-27 2003-01-14 Microscan Systems Incorporated Process for manufacturing micromechanical and microoptomechanical structures with backside metalization
US6760511B2 (en) 2001-03-19 2004-07-06 Capella Photonics, Inc. Reconfigurable optical add-drop multiplexers employing polarization diversity
US6625346B2 (en) 2001-03-19 2003-09-23 Capella Photonics, Inc. Reconfigurable optical add-drop multiplexers with servo control and dynamic spectral power management capabilities
US20070047113A1 (en) * 2001-06-02 2007-03-01 Capella Photonics, Inc. High fill-factor bulk silicon mirrors with reduced effect of mirror edge diffraction
US6720682B2 (en) * 2001-06-14 2004-04-13 Lightbay Networks Corporation Actuator assembly for tilting a mirror or like object
US20040240034A1 (en) * 2001-11-30 2004-12-02 Scharf Bruce R. Diffraction compensation using a patterned reflector
US6791162B2 (en) * 2002-03-16 2004-09-14 Memx, Inc. Unit cell architecture for electrical interconnects
US6706619B2 (en) 2002-03-16 2004-03-16 Memx, Inc. Method for tiling unit cells
JP4140816B2 (en) 2002-05-24 2008-08-27 富士通株式会社 Micro mirror element
ITTO20020515A1 (en) 2002-06-14 2003-12-15 Infm Istituto Naz Per La Fisi EQUIPMENT FOR DETERMINING THE INTERNAL PROFILE OF A DUCT OR CAVITY, AND IN PARTICULAR FOR THE DETERMINATION OF THE IMPRESSION IN
US6760145B1 (en) 2003-01-23 2004-07-06 Corning Incorporated Actuator for dual-axis rotation micromirror
US20050018322A1 (en) * 2003-05-28 2005-01-27 Terraop Ltd. Magnetically actuated fast MEMS mirrors and microscanners
GB0320180D0 (en) * 2003-08-28 2003-10-01 Univ Southampton An electromagnetic device for converting mechanical vibrational energy into electrical energy
EP1665505A1 (en) 2003-08-28 2006-06-07 University Of Southampton An electromagnetic device for converting mechanical vibrational energy into electrical energy, and manufacture thereof
US20050093818A1 (en) * 2003-11-05 2005-05-05 Lightbay Networks Corporation Dynamic laser projection display
JP2005164859A (en) * 2003-12-01 2005-06-23 Olympus Corp Optical deflector array
JP4729289B2 (en) * 2003-12-04 2011-07-20 オリンパス株式会社 Optical deflector
JP4544972B2 (en) * 2003-12-04 2010-09-15 オリンパス株式会社 Optical deflector
US6972913B2 (en) * 2004-01-29 2005-12-06 Hewlett-Packard Development Company, L.P. Two axis tip-tilt platform
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
TWI235735B (en) * 2004-06-18 2005-07-11 Walsin Lihwa Corp Two-axis element and manufacturing method thereof
CN100409064C (en) * 2004-07-16 2008-08-06 华新丽华股份有限公司 Resonant assembly and biaxial assembly, method for making biaxial assembly and microsystem assembly
US20060119925A1 (en) * 2004-12-03 2006-06-08 Orcutt John W Single torsional hinge mirror package
US7092141B2 (en) * 2004-12-16 2006-08-15 Samsung Electro-Mechanics Co., Ltd. Actuator for tilting reflecting mirror of digital micromirror device for digital light processing type projection
US7279812B2 (en) * 2005-01-18 2007-10-09 Hewlett-Packard Development Company, L.P. Light direction assembly shorted turn
JP5135567B2 (en) * 2005-04-26 2013-02-06 クーパー タイヤ アンド ラバー カンパニー RFID transmitter for tire and manufacturing method
US20080237349A1 (en) * 2006-02-09 2008-10-02 Microvision, Inc. Scanning Light Collection
US7489433B2 (en) * 2006-02-09 2009-02-10 Microvision, Inc. Method and apparatus for making and using 1D and 2D magnetic actuators
US20080230611A1 (en) * 2006-02-09 2008-09-25 Microvision, Inc. Variable Laser Beam Focus
ATE549708T1 (en) * 2006-04-28 2012-03-15 Cooper Tire & Rubber Co LARGE RANGE RFID TRANSPONDER
KR100738114B1 (en) * 2006-05-18 2007-07-12 삼성전자주식회사 Actuator and two-dimensional scanner
US7521842B2 (en) * 2006-06-22 2009-04-21 Cooper Tire & Rubber Co. Magnetostrictive / piezo remote power generation, battery and method
DE102006029627B4 (en) * 2006-06-28 2015-05-13 Robert Bosch Gmbh Micromechanical system with adjustable vibration behavior and method of operation
US8581678B2 (en) * 2006-07-19 2013-11-12 University Of Florida Research Foundation, Inc. Method and apparatus for electromagnetic actuation
KR100829563B1 (en) * 2006-09-01 2008-05-14 삼성전자주식회사 Electromagnetic Micro Actuator and Manufacturing Method Thereof
JP4525652B2 (en) * 2006-09-19 2010-08-18 セイコーエプソン株式会社 Actuator, optical scanner, and image forming apparatus
KR100911144B1 (en) * 2007-03-27 2009-08-06 삼성전자주식회사 2-axis driven electromagnetic actuator
US20100039687A1 (en) * 2008-08-18 2010-02-18 Karthik Kumar Apparatus for Performing Confocal Endoscopy
WO2010001613A1 (en) * 2008-07-02 2010-01-07 富士通株式会社 Micro-mirror array and optical switch
DE102008042346A1 (en) * 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetic yoke, micromechanical component and manufacturing method for a magnetic yoke and a micromechanical component
US20100077860A1 (en) * 2008-09-30 2010-04-01 Honeywell International Inc. Systems and methods for integrated isolator and transducer components in an inertial sensor
TW201024901A (en) * 2008-12-16 2010-07-01 Ind Tech Res Inst Optical scanner
FR2951713B1 (en) 2009-10-27 2012-04-13 Centre Nat Rech Scient MICRO-SHUTTER WITH ELECTROMAGNETIC ACTUATION
EP2534523B1 (en) * 2010-02-08 2017-08-16 Intel Corporation Method and apparatus for controlling a mems micro-mirror device
JP2011186422A (en) * 2010-02-10 2011-09-22 Sanyo Electric Co Ltd Beam irradiation device
US8456724B2 (en) * 2010-06-17 2013-06-04 Touch Micro-System Technology Corp. Biaxial scanning mirror for image forming apparatus
US8305671B2 (en) * 2010-06-21 2012-11-06 Touch Micro-System Technology Corp. Biaxial scanning mirror for image forming apparatus and method for operating the same
US8636911B2 (en) * 2010-10-07 2014-01-28 Magic Technologies, Inc. Process for MEMS scanning mirror with mass remove from mirror backside
DE102010062591A1 (en) * 2010-12-08 2012-06-14 Robert Bosch Gmbh Magnetic actuator
WO2012130612A1 (en) 2011-03-25 2012-10-04 Lemoptix Sa A reflective device
TW201243287A (en) * 2011-04-28 2012-11-01 Hon Hai Prec Ind Co Ltd Laser range finder
EP2823695B1 (en) * 2012-03-08 2018-10-24 Intel Corporation A mems micro-mirror assembly
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
CN102707435A (en) * 2012-05-29 2012-10-03 重庆大学 Bipolar electromagnetic scanning micro lens
US9523625B2 (en) 2012-12-13 2016-12-20 Apple Inc. Detecting failure of scanning mirror
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
US20140300440A1 (en) * 2013-04-05 2014-10-09 Hamilton Sundstrand Corporation Inductor gap spacer
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
JP6250323B2 (en) * 2013-08-01 2017-12-20 浜松ホトニクス株式会社 Mirror drive device
WO2015078482A1 (en) * 2013-11-22 2015-06-04 Intel Corporation Methods and devices for detecting open and/or shorts circuits in mems micro-mirror devices
KR20160140698A (en) * 2014-04-04 2016-12-07 멤스 스타트 엘엘씨 Actuator for moving an optoelectronic device
EP3006975A3 (en) * 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
US9854226B2 (en) 2014-12-22 2017-12-26 Google Inc. Illuminator for camera system having three dimensional time-of-flight capture with movable mirror element
WO2016124253A1 (en) * 2015-02-06 2016-08-11 Optotune Ag Optical device for enhancing resolution of an image
JP2016206458A (en) * 2015-04-23 2016-12-08 株式会社フジクラ Optical device and manufacturing method of optical device
US9664897B1 (en) * 2015-10-14 2017-05-30 Intel Corporation Apparatus with a rotatable MEMS device
US10574100B2 (en) * 2016-03-31 2020-02-25 Intel Corporation Magnetic circuits for MEMS devices
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
JP6463447B2 (en) * 2017-11-22 2019-02-06 浜松ホトニクス株式会社 Mirror drive device
JP7000874B2 (en) 2018-01-19 2022-01-19 船井電機株式会社 Vibration element
US10678046B2 (en) 2018-03-21 2020-06-09 Infineon Technologies Ag Packages for microelectromechanical system (MEMS) mirror and methods of manufacturing the same
CH715874A1 (en) * 2019-02-26 2020-08-31 Sercalo Microtechnology Ltd Micromechanical coil device.
EP4492125A3 (en) 2020-01-16 2025-04-09 Magic Leap, Inc. Scanning mirror systems and methods of manufacture
WO2021150781A1 (en) 2020-01-22 2021-07-29 Magic Leap, Inc. Two mirror scanning relay optics
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US12061333B2 (en) 2020-06-04 2024-08-13 Magic Leap, Inc. Two-dimensional micro-electrical mechanical system mirror and actuation method
US11733510B2 (en) * 2020-06-10 2023-08-22 Nokia Technologies Oy Electromagnetic microactuator apparatus and method
CN112083567A (en) * 2020-10-14 2020-12-15 中冶赛迪技术研究中心有限公司 Push-pull type scanning grating
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11802945B2 (en) 2021-03-10 2023-10-31 Allegro Microsystems, Llc Photonic ROIC having safety features
US11581697B2 (en) 2021-03-10 2023-02-14 Allegro Microsystems, Llc Detector system comparing pixel response with photonic energy decay
US11815406B2 (en) 2021-04-14 2023-11-14 Allegro Microsystems, Llc Temperature sensing of an array from temperature dependent properties of a PN junction
US11770632B2 (en) 2021-04-14 2023-09-26 Allegro Microsystems, Llc Determining a temperature of a pixel array by measuring voltage of a pixel
US11601733B2 (en) 2021-04-14 2023-03-07 Allegro Microsystems, Llc Temperature sensing of a photodetector array
CN115236640A (en) * 2021-04-23 2022-10-25 上海禾赛科技有限公司 Angle measuring device and angle measuring method of scanning device of lidar
US11619914B2 (en) 2021-06-03 2023-04-04 Allegro Microsystems, Llc Arrayed time to digital converter
US11252359B1 (en) 2021-06-21 2022-02-15 Allegro Microsystems, Llc Image compensation for sensor array having bad pixels
US11600654B2 (en) 2021-07-15 2023-03-07 Allegro Microsystems, Llc Detector array yield recovery
US11885646B2 (en) 2021-08-12 2024-01-30 Allegro Microsystems, Llc Programmable active pixel test injection
US11585910B1 (en) 2021-08-13 2023-02-21 Allegro Microsystems, Llc Non-uniformity correction of photodetector arrays
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US11933669B2 (en) 2022-02-16 2024-03-19 Allegro Microsystems, Llc Optical system for improved reliability and performance
US12306701B2 (en) 2022-03-30 2025-05-20 Allegro Microsystems, Llc Data stream watchdog injection
US11722141B1 (en) 2022-04-22 2023-08-08 Allegro Microsystems, Llc Delay-locked-loop timing error mitigation
US20230375678A1 (en) * 2022-05-18 2023-11-23 Allegro Microsystems, Llc Photoreceiver having thresholded detection
CN115268060B (en) * 2022-07-27 2024-08-16 杭州士兰微电子股份有限公司 MEMS micro-mirror and preparation method thereof
CN119731573A (en) * 2022-08-29 2025-03-28 图达通智能美国有限公司 Film electromagnetic mirror
CN115524843B (en) * 2022-10-20 2024-08-30 中国科学院光电技术研究所 A micro switch array based on electromagnetic drive and its manufacturing method
US12140702B1 (en) 2023-09-12 2024-11-12 Allegro Microsystems, Llc LIDAR having wavelength discrimination

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) * 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
JPS60107017A (en) 1983-11-16 1985-06-12 Hitachi Ltd light deflection element
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US6467345B1 (en) * 1993-10-18 2002-10-22 Xros, Inc. Method of operating micromachined members coupled for relative rotation
JP2722314B2 (en) * 1993-12-20 1998-03-04 日本信号株式会社 Planar type galvanometer mirror and method of manufacturing the same
KR100343219B1 (en) * 1995-02-25 2002-11-23 삼성전기주식회사 Apparatus for driving mirror
JP2987750B2 (en) * 1995-05-26 1999-12-06 日本信号株式会社 Planar type electromagnetic actuator
US6430332B1 (en) * 1998-06-05 2002-08-06 Fiber, Llc Optical switching apparatus
DE69838327T2 (en) * 1998-10-30 2008-05-21 International Business Machines Corp. Magnetic scanning or positioning system with at least two degrees of freedom
US6593677B2 (en) * 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6483962B1 (en) * 2000-05-24 2002-11-19 Vlad J. Novotny Optical cross connect switching array system with optical feedback

Also Published As

Publication number Publication date
US20020050744A1 (en) 2002-05-02
GB2384060B (en) 2004-12-15
WO2002018979A2 (en) 2002-03-07
US6989921B2 (en) 2006-01-24
GB2384060A (en) 2003-07-16
WO2002018979A3 (en) 2003-11-06
GB0306620D0 (en) 2003-04-30

Similar Documents

Publication Publication Date Title
AU2001286745A1 (en) Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
AU2001239089A1 (en) Method and device for producing drops of equal size
AU2002356806A1 (en) Methods of and apparatus for making high aspect ratio microelectromechanical structures
AU2002356062A1 (en) Micro-electro mechanical system and method of making
AU2001256933A1 (en) Apparatus and method
AU2001290670A1 (en) Etched micro lens and method and apparatus for fabricating
AU2002248236A1 (en) Method of forming nano-crystalline particles and produrct formed thereof
AU2001296581A1 (en) Micromachined component and method of manufacture
AU2002221373A1 (en) Apparatus and method for magnetic separation of materials
AU2001278002A1 (en) Micromechanical optical switch and method of manufacture
AU2001259527A1 (en) Method and apparatus for manufacture of magnetizable microparticles
AU2002365732A1 (en) Method and device for forming an isolated visualization of body structures
AU2000239097A1 (en) Manufacturing apparatus and method
AUPQ952100A0 (en) Membranes and method of manufacture thereof
AU2001249433A1 (en) Ceramic guide block and method of manufacture
AU2001277802A1 (en) Apparatus and method of manufacturing filters
AU2002309200A1 (en) Microelctronic device and method of its manufacture
AU2001253491A1 (en) Masking apparatus and method
AU2002320225A1 (en) Structural apparatus and method
AU2002327469A1 (en) Mems and method of manufacturing mems
AU2002348323A1 (en) Exhaust-treatment core apparatus and method of making
AU2002228389A1 (en) Method of activation and apparatus therefor
AU2002346898A1 (en) Method and device for the production of hollow sections
AU2001288282A1 (en) Structure forming method and apparatus
AU2002324682A1 (en) Permanent magnet for electromagnetic device and method of making