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AU2002358703A1 - Gas sensor and method for detecting substances according to the work function principle - Google Patents

Gas sensor and method for detecting substances according to the work function principle

Info

Publication number
AU2002358703A1
AU2002358703A1 AU2002358703A AU2002358703A AU2002358703A1 AU 2002358703 A1 AU2002358703 A1 AU 2002358703A1 AU 2002358703 A AU2002358703 A AU 2002358703A AU 2002358703 A AU2002358703 A AU 2002358703A AU 2002358703 A1 AU2002358703 A1 AU 2002358703A1
Authority
AU
Australia
Prior art keywords
gas sensor
work function
substances according
function principle
detecting substances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002358703A
Inventor
Markus Burgmair
Ignaz Eisele
Martin Zimmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VOIGT WOLFGANG M
Original Assignee
VOIGT WOLFGANG M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VOIGT WOLFGANG M filed Critical VOIGT WOLFGANG M
Publication of AU2002358703A1 publication Critical patent/AU2002358703A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G01N27/4143—Air gap between gate and channel, i.e. suspended gate [SG] FETs

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AU2002358703A 2001-12-13 2002-12-13 Gas sensor and method for detecting substances according to the work function principle Abandoned AU2002358703A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2001161213 DE10161213B4 (en) 2001-12-13 2001-12-13 Gas sensor and method for the detection of one or more components of a gas mixture and / or gases in a liquid according to the principle of work function measurement
DE10161213.3 2001-12-13
PCT/EP2002/014231 WO2003050525A1 (en) 2001-12-13 2002-12-13 Gas sensor and method for detecting substances according to the work function principle

Publications (1)

Publication Number Publication Date
AU2002358703A1 true AU2002358703A1 (en) 2003-06-23

Family

ID=7709051

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002358703A Abandoned AU2002358703A1 (en) 2001-12-13 2002-12-13 Gas sensor and method for detecting substances according to the work function principle

Country Status (3)

Country Link
AU (1) AU2002358703A1 (en)
DE (1) DE10161213B4 (en)
WO (1) WO2003050525A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004019639A1 (en) * 2004-04-22 2005-11-17 Siemens Ag FET-based gas sensor
DE102007034330A1 (en) * 2007-07-24 2009-01-29 Robert Bosch Gmbh Apparatus and method for detecting substances
DE102008042859A1 (en) 2008-10-15 2010-04-22 Robert Bosch Gmbh Electronic component
DE102009018364A1 (en) * 2009-04-23 2010-11-25 Micronas Gmbh Device for detecting a gas or gas mixture and method for producing such
DE102012205398A1 (en) 2012-04-03 2013-10-10 Robert Bosch Gmbh A sensor device and method for analyzing a component of a fluid
CN105588856A (en) * 2014-10-19 2016-05-18 吴振武 Flexible printed manure-urine sensor
DE102014017194B4 (en) * 2014-11-21 2022-08-18 Tdk-Micronas Gmbh semiconductor gas sensor
DE102015220909A1 (en) * 2015-10-27 2017-04-27 Robert Bosch Gmbh Use of an ion sensitive field effect transistor to measure a concentration of hydrogen peroxide in a fluid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4730479A (en) * 1986-06-23 1988-03-15 The Standard Oil Company Temperature and humidity compensation for gas detection apparatus
DE4239319C2 (en) * 1992-11-23 1996-10-02 Ignaz Prof Dr Eisele Process for the spacer-free, hybrid construction of air gap and gate of suspended gate field effect transistors (SGFET) as well as components manufactured according to the process
DE4333875C2 (en) * 1993-10-05 1995-08-17 Zenko Dipl Ing Gergintschew Semiconductor gas sensor based on a capacitive controlled field effect transistor (CCFET)
ES2212407T3 (en) * 1998-04-02 2004-07-16 Siemens Aktiengesellschaft GAS SENSOR TO DETECT CARBON DIOXIDE BY MEASURING THE WORK OF CARBON EXTRACTION OR PHOSPHATES.
DE19814857C2 (en) * 1998-04-02 2000-09-28 Siemens Ag Gas sensor based on the principle of work function measurement
EP1085319B1 (en) * 1999-09-13 2005-06-01 Interuniversitair Micro-Elektronica Centrum Vzw A device for detecting an analyte in a sample based on organic materials

Also Published As

Publication number Publication date
WO2003050525A1 (en) 2003-06-19
DE10161213B4 (en) 2004-02-19
DE10161213A1 (en) 2003-07-03

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase