[go: up one dir, main page]

AU2002213400A1 - Microvalve - Google Patents

Microvalve

Info

Publication number
AU2002213400A1
AU2002213400A1 AU2002213400A AU1340002A AU2002213400A1 AU 2002213400 A1 AU2002213400 A1 AU 2002213400A1 AU 2002213400 A AU2002213400 A AU 2002213400A AU 1340002 A AU1340002 A AU 1340002A AU 2002213400 A1 AU2002213400 A1 AU 2002213400A1
Authority
AU
Australia
Prior art keywords
microvalve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002213400A
Other languages
English (en)
Inventor
Thomas J Cassar
Imon Kao
Robert P. Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Foundation of the State University of New York
Original Assignee
Research Foundation of the State University of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Foundation of the State University of New York filed Critical Research Foundation of the State University of New York
Publication of AU2002213400A1 publication Critical patent/AU2002213400A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7771—Bi-directional flow valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Fluid-Driven Valves (AREA)
AU2002213400A 2000-10-18 2001-10-18 Microvalve Abandoned AU2002213400A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24139000P 2000-10-18 2000-10-18
US60/241,390 2000-10-18
PCT/US2001/032594 WO2002033268A2 (fr) 2000-10-18 2001-10-18 Micro-soupape

Publications (1)

Publication Number Publication Date
AU2002213400A1 true AU2002213400A1 (en) 2002-04-29

Family

ID=22910521

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002213400A Abandoned AU2002213400A1 (en) 2000-10-18 2001-10-18 Microvalve

Country Status (3)

Country Link
US (1) US6592098B2 (fr)
AU (1) AU2002213400A1 (fr)
WO (1) WO2002033268A2 (fr)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6627159B1 (en) * 2000-06-28 2003-09-30 3M Innovative Properties Company Centrifugal filling of sample processing devices
US8097471B2 (en) * 2000-11-10 2012-01-17 3M Innovative Properties Company Sample processing devices
US6981518B2 (en) * 2002-03-15 2006-01-03 Cytonome, Inc. Latching micro-regulator
NO20022699D0 (no) * 2002-06-06 2002-06-06 Abb Research Ltd MEMS pilotventil
US7198759B2 (en) * 2002-07-26 2007-04-03 Applera Corporation Microfluidic devices, methods, and systems
US7135147B2 (en) * 2002-07-26 2006-11-14 Applera Corporation Closing blade for deformable valve in a microfluidic device and method
US7201881B2 (en) * 2002-07-26 2007-04-10 Applera Corporation Actuator for deformable valves in a microfluidic device, and method
JP3970226B2 (ja) 2002-09-10 2007-09-05 キヤノン株式会社 液体微細搬送装置
US6883774B2 (en) * 2002-10-21 2005-04-26 Lockheed Martin Corporation Microelectromechanical high pressure gas microvalve
US7195026B2 (en) * 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
US7192001B2 (en) * 2003-05-08 2007-03-20 The Regents Of The University Of Michigan Office Of Technology Transfer Thermopneumatic microvalve
US20050211937A1 (en) * 2003-12-29 2005-09-29 Popadiuc Peter O Method of sealing machine components
US20060057520A1 (en) * 2004-09-16 2006-03-16 Saia Richard J Control valve assembly for controlling gas flow in gas combustion systems
JP2006090414A (ja) * 2004-09-22 2006-04-06 Toshiba Corp スライドバルブ装置及びスライドバルブ装置の製造方法
US7263838B2 (en) * 2004-10-27 2007-09-04 Raytheon Corporation Pulse tube cooler with internal MEMS flow controller
US8220777B2 (en) * 2005-04-29 2012-07-17 Georgia Tech Research Corporation Compliant rotary mechanism and method
US7438030B1 (en) 2005-08-26 2008-10-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actuator operated microvalves
US7186158B1 (en) * 2005-12-07 2007-03-06 Barber Gerald L Life saving necklace
US7899713B2 (en) * 2006-06-20 2011-03-01 Reagan Inventions, Llc System and method for creating a personalized consumer product
WO2008121691A1 (fr) * 2007-03-28 2008-10-09 University Of Florida Research Foundation, Inc. Dispositif de réseau microfluidique et système pour la détection de multiples analytes
US20090084115A1 (en) * 2007-09-28 2009-04-02 Yuan Sidney W K Controlled and variable gas phase shifting cryocooler
US20090084114A1 (en) * 2007-09-28 2009-04-02 Yuan Sidney W K Gas phase shifting inertance gap pulse tube cryocooler
US20090084116A1 (en) * 2007-09-28 2009-04-02 Yuan Sidney W K Gas phase shifting multistage displacer cryocooler
US8075855B2 (en) * 2008-06-20 2011-12-13 Silverbrook Research Pty Ltd MEMS integrated circuit comprising peristaltic microfluidic pump
US8062612B2 (en) * 2008-06-20 2011-11-22 Silverbrook Research Pty Ltd MEMS integrated circuit comprising microfluidic diaphragm valve
US8080220B2 (en) 2008-06-20 2011-12-20 Silverbrook Research Pty Ltd Thermal bend actuated microfluidic peristaltic pump
US20090314368A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising Pinch Valve and On-Chip MEMS Pump
US8092761B2 (en) * 2008-06-20 2012-01-10 Silverbrook Research Pty Ltd Mechanically-actuated microfluidic diaphragm valve
US20090317301A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Bonded Microfluidics System Comprising MEMS-Actuated Microfluidic Devices
US20090315126A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Bonded Microfluidic System Comprising Thermal Bend Actuated Valve
US20090317302A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising MEMS Integrated Circuit
US9267618B2 (en) 2010-05-18 2016-02-23 Samsung Electronics Co., Ltd. Microvalve device and method of manufacturing the same
WO2012092394A1 (fr) 2010-12-29 2012-07-05 Cardinal Health 414, Llc Système fermé de remplissage de flacon pour distribution aseptique
US20130102772A1 (en) 2011-07-15 2013-04-25 Cardinal Health 414, Llc Systems, methods and devices for producing, manufacturing and control of radiopharmaceuticals-full
WO2013012813A1 (fr) 2011-07-15 2013-01-24 Cardinal Health 414, Llc Unité de synthèse à cassettes modulaire
US9417332B2 (en) 2011-07-15 2016-08-16 Cardinal Health 414, Llc Radiopharmaceutical CZT sensor and apparatus
US20130032210A1 (en) * 2011-08-02 2013-02-07 Teledyne Dalsa Semiconductor, Inc. Integrated microfluidic device with actuator
FR2984756B1 (fr) * 2011-12-27 2014-02-21 Commissariat Energie Atomique Dispositif nano et micro fluidique pour la separation et concentration de particules presentes dans un fluide
US8456028B1 (en) 2012-02-06 2013-06-04 Elwha Llc Method and apparatus for storing energy
US8581446B2 (en) * 2012-02-06 2013-11-12 Elwha Llc Method and apparatus for removal of harmonic noise
US10323772B2 (en) * 2015-10-01 2019-06-18 Corporation For National Research Initiatives Three-way microvalve device and method of fabrication
DE102018222758A1 (de) * 2018-12-21 2020-06-25 Robert Bosch Gmbh MEMS-Sensor mit einer Membran sowie Verfahren zur Herstellung eines MEMS-Sensors
USD919833S1 (en) 2019-03-06 2021-05-18 Princeton Biochemicals, Inc Micro valve for controlling path of fluids in miniaturized capillary connections
US11440786B2 (en) 2021-02-05 2022-09-13 Cana Technology, Inc. Systems and methods for dispensing fluid mixtures

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2638127A (en) 1943-09-09 1953-05-12 Clayton Manufacturing Co Molded diaphragm structure
US2394911A (en) 1943-09-09 1946-02-12 Clayton Manufacturing Co Automatic vacuum breaker
GB1120037A (en) 1964-11-10 1968-07-17 British Telecomm Res Ltd Improvements in fluid control devices
CA987290A (en) 1972-08-24 1976-04-13 Homberger, Rudolf Felix Valve assembly
US3897041A (en) 1973-08-20 1975-07-29 Leesona Corp Fluid flow control elements with area dividing inserts
CH590520A5 (fr) 1975-02-26 1977-08-15 Inventa Ag
GB1595240A (en) 1977-11-28 1981-08-12 Kay F X Fluid control valves
US4190045A (en) 1978-04-24 1980-02-26 Bourns Medical Systems, Inc. Noise reducing exhalation valve and diaphragm
US4241756A (en) 1978-11-29 1980-12-30 C. R. Bard, Inc. Exhalation valve assembly
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4664146A (en) 1986-04-25 1987-05-12 Ray V. Bussell Combination economizer valve and locking means for oxygen supply system
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US4981157A (en) 1989-11-09 1991-01-01 Steve Denkinger Shut off valve
US5076322A (en) 1990-10-15 1991-12-31 Pradip Choksi Vacuum limiting, regulating device
US5161775A (en) 1991-04-15 1992-11-10 Borg-Warner Automotive Electronic & Mechanical Systems Corporation High pressure, high flow fast response control valve
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5541016A (en) * 1992-05-20 1996-07-30 Schumm, Jr.; Brooke Electrical appliance with automatic valve especially for fluid depolarized electrochemical battery
DE4221089A1 (de) * 1992-06-26 1994-01-05 Bosch Gmbh Robert Mikroventil
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat
WO1994028318A1 (fr) 1993-05-27 1994-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microvanne
US5441231A (en) 1994-05-17 1995-08-15 Payne; Barrett M. M. Valve closing actuator
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
JPH08128389A (ja) 1994-11-01 1996-05-21 Hitachi Ltd バルブ駆動制御方法およびバルブ駆動制御装置ならびに流動体供給制御装置
US5727594A (en) 1995-02-09 1998-03-17 Choksi; Pradip Low actuation pressure unidirectional flow valve
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
US5785295A (en) 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
JP2002504977A (ja) * 1997-05-21 2002-02-12 レッドウッド マイクロシステムズ インコーポレイテッド 低電力の熱空気圧マイクロ弁
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces

Also Published As

Publication number Publication date
US20020043638A1 (en) 2002-04-18
WO2002033268A3 (fr) 2002-11-21
US6592098B2 (en) 2003-07-15
WO2002033268A2 (fr) 2002-04-25

Similar Documents

Publication Publication Date Title
AU2002213400A1 (en) Microvalve
AU5499201A (en) Microfluidic devices
AU2001262847A1 (en) Language-understanding
AU2001292739A1 (en) 1-oxorapamycins
AU2002211620A1 (en) Autoanastomosis
AU2001286051A1 (en) Microfluidic
AU2000267458A1 (en) Hypercomputer
AU2001254546A1 (en) Aminopiperidines
AU2001220246A1 (en) Neckphone
AU2001239310A1 (en) Decahydro-isoquinolines
AU2001296577A1 (en) Chlorophyllases
AU2002212104A1 (en) Operating element
AU2001258349A1 (en) Bisacylguanidine
AU2001279754A1 (en) Indoloquinazolinones
AU2002211128A1 (en) Step-bike
AU2001290931A1 (en) Ski-snowboard
AU2001285886A1 (en) 2-guanidino-4-aryl-quinazoline
AU2001293852A1 (en) Sulfonylguanidine
AU2001258924A1 (en) Microsatellite-aflp
AU2001272651A1 (en) Valves
AU2002226346A1 (en) 2-aryl-5-trifluoromethylpyridines
AU2001281921A1 (en) Bdellosomes
AU2001291876A1 (en) Triazolo-epothilones
AU2001246864A1 (en) Hypotensors
AU2002214354A1 (en) Neck-phone