[go: up one dir, main page]

AU2001237339A1 - Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods - Google Patents

Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods

Info

Publication number
AU2001237339A1
AU2001237339A1 AU2001237339A AU3733901A AU2001237339A1 AU 2001237339 A1 AU2001237339 A1 AU 2001237339A1 AU 2001237339 A AU2001237339 A AU 2001237339A AU 3733901 A AU3733901 A AU 3733901A AU 2001237339 A1 AU2001237339 A1 AU 2001237339A1
Authority
AU
Australia
Prior art keywords
layer
arrangements
detection methods
sample containers
waveguide plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001237339A
Other languages
English (en)
Inventor
Gert Duveneck
Johannes Edlinger
Claus Heine
Bernd Maisenholder
Michael Pawlak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeptosens AG
Original Assignee
Zeptosens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeptosens AG filed Critical Zeptosens AG
Publication of AU2001237339A1 publication Critical patent/AU2001237339A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
    • G01N21/7743—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure the reagent-coated grating coupling light in or out of the waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7776—Index
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Optical Measuring Cells (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
AU2001237339A 2000-01-27 2001-01-25 Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods Abandoned AU2001237339A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH1602000 2000-01-27
CH20000160/00 2000-01-27
PCT/EP2001/000782 WO2001055691A2 (fr) 2000-01-27 2001-01-25 Plaque de guide d'ondes et plates-formes de capteurs obtenues a partir d'une telle plaque, systemes de recipients d'echantillonnage et procedes de mise en evidence

Publications (1)

Publication Number Publication Date
AU2001237339A1 true AU2001237339A1 (en) 2001-08-07

Family

ID=4413835

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2001237339A Abandoned AU2001237339A1 (en) 2000-01-27 2001-01-25 Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods
AU26608/01A Ceased AU782096B2 (en) 2000-01-27 2001-01-26 Method for producing a grid structure, an optical element, an evanescence field sensor plate, a microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelength

Family Applications After (1)

Application Number Title Priority Date Filing Date
AU26608/01A Ceased AU782096B2 (en) 2000-01-27 2001-01-26 Method for producing a grid structure, an optical element, an evanescence field sensor plate, a microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelength

Country Status (12)

Country Link
US (2) US6510263B1 (fr)
EP (3) EP1250582A2 (fr)
JP (2) JP2003521684A (fr)
KR (2) KR100966984B1 (fr)
CN (1) CN1295530C (fr)
AT (1) ATE307348T1 (fr)
AU (2) AU2001237339A1 (fr)
CA (1) CA2399651A1 (fr)
DK (1) DK1250618T3 (fr)
HK (1) HK1048663A1 (fr)
TW (1) TWI292856B (fr)
WO (2) WO2001055691A2 (fr)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6961490B2 (en) * 2000-01-27 2005-11-01 Unaxis-Balzers Aktiengesellschaft Waveguide plate and process for its production and microtitre plate
US6510263B1 (en) * 2000-01-27 2003-01-21 Unaxis Balzers Aktiengesellschaft Waveguide plate and process for its production and microtitre plate
US20030138208A1 (en) * 2000-05-06 2003-07-24 Michael Pawlak Grating optical waveguide structure for multi-analyte determinations and the use thereof
US6917726B2 (en) * 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
US6785433B2 (en) 2000-08-09 2004-08-31 Artificial Sensing Instruments Asi Ag Waveguide grid array and optical measurement arrangement
FR2818287B1 (fr) * 2000-12-14 2003-01-17 Commissariat Energie Atomique Support solide pour l'immobilisation d'oligonucleotides
US6903815B2 (en) * 2001-11-22 2005-06-07 Kabushiki Kaisha Toshiba Optical waveguide sensor, device, system and method for glucose measurement
US7545494B2 (en) * 2003-07-23 2009-06-09 Bayer Technology Services Gmbh Analytical system and method for analyzing nonlinear optical signals
US7785672B2 (en) * 2004-04-20 2010-08-31 Applied Materials, Inc. Method of controlling the film properties of PECVD-deposited thin films
US8083853B2 (en) * 2004-05-12 2011-12-27 Applied Materials, Inc. Plasma uniformity control by gas diffuser hole design
US20050233092A1 (en) * 2004-04-20 2005-10-20 Applied Materials, Inc. Method of controlling the uniformity of PECVD-deposited thin films
US20060005771A1 (en) * 2004-07-12 2006-01-12 Applied Materials, Inc. Apparatus and method of shaping profiles of large-area PECVD electrodes
US8328939B2 (en) * 2004-05-12 2012-12-11 Applied Materials, Inc. Diffuser plate with slit valve compensation
US8074599B2 (en) * 2004-05-12 2011-12-13 Applied Materials, Inc. Plasma uniformity control by gas diffuser curvature
US7102824B2 (en) 2004-05-13 2006-09-05 The Boeing Company Optical element for efficient sensing at large angles of incidence
US7170050B2 (en) 2004-09-17 2007-01-30 Pacific Biosciences Of California, Inc. Apparatus and methods for optical analysis of molecules
WO2006044078A2 (fr) * 2004-09-17 2006-04-27 Pacific Biosciences Of California, Inc. Appareil et procede d'analyse de molecules
US7429410B2 (en) * 2004-09-20 2008-09-30 Applied Materials, Inc. Diffuser gravity support
US9050615B2 (en) 2005-04-26 2015-06-09 Bayer Intellectual Property Gmbh Apparatus and method for coating substrates for analyte detection by means of an affinity assay method
US7588668B2 (en) 2005-09-13 2009-09-15 Applied Materials, Inc. Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers
US20070056845A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Multiple zone sputtering target created through conductive and insulation bonding
US20070056843A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones
US7218802B1 (en) 2005-11-30 2007-05-15 Corning Incorporated Low drift planar waveguide grating sensor and method for manufacturing same
US20070172745A1 (en) * 2006-01-26 2007-07-26 Smith Bruce W Evanescent wave assist features for microlithography
US20070196863A1 (en) * 2006-02-17 2007-08-23 Hanson Technologies, Inc. Prion protein detection
US8288157B2 (en) 2007-09-12 2012-10-16 Plc Diagnostics, Inc. Waveguide-based optical scanning systems
US9976192B2 (en) 2006-03-10 2018-05-22 Ldip, Llc Waveguide-based detection system with scanning light source
US9423397B2 (en) 2006-03-10 2016-08-23 Indx Lifecare, Inc. Waveguide-based detection system with scanning light source
US9528939B2 (en) 2006-03-10 2016-12-27 Indx Lifecare, Inc. Waveguide-based optical scanning systems
FR2902226B1 (fr) * 2006-06-12 2010-01-29 Commissariat Energie Atomique Composant optique fonctionnant en transmission en champ proche
WO2008022099A2 (fr) * 2006-08-15 2008-02-21 Api Nanofabrication And Research Corp. Films polarisants et procédés de fabrication associés
WO2008022097A2 (fr) * 2006-08-15 2008-02-21 Api Nanofabrication And Research Corp. procédés de formation de structures mises en motifs
US20080266549A1 (en) * 2007-04-26 2008-10-30 Ese Inc. Chemical Constituent Analyzer
US20080317973A1 (en) * 2007-06-22 2008-12-25 White John M Diffuser support
JP2009157353A (ja) * 2007-12-26 2009-07-16 Nitto Denko Corp 感知用導波路センサー
KR100919366B1 (ko) * 2007-12-28 2009-09-25 주식회사 하이닉스반도체 반도체 소자의 패턴 형성 방법
US8371705B2 (en) * 2008-03-11 2013-02-12 The United States Of America As Represented By The Secretary Of The Army Mirrors and methods of making same
US20090231702A1 (en) * 2008-03-17 2009-09-17 Qihong Wu Optical films and methods of making the same
CN102084001B (zh) 2008-03-28 2015-03-18 加利福尼亚太平洋生物科学股份有限公司 用于核酸测序的组合物和方法
DE102008016652B3 (de) * 2008-04-01 2009-10-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Erzeugung eines Laserstrahles
EP2110694B1 (fr) 2008-04-18 2013-08-14 Sony DADC Austria AG Procédé de fabrication d'un guide d'onde optique, guide d'onde optique, et agencement de capteur
US8097082B2 (en) * 2008-04-28 2012-01-17 Applied Materials, Inc. Nonplanar faceplate for a plasma processing chamber
GB2461026B (en) 2008-06-16 2011-03-09 Plc Diagnostics Inc System and method for nucleic acids sequencing by phased synthesis
KR100989130B1 (ko) 2008-08-19 2010-10-20 삼성모바일디스플레이주식회사 레이저 조사 장치 및 그를 이용한 유기전계발광표시장치의 제조 방법
US9778188B2 (en) 2009-03-11 2017-10-03 Industrial Technology Research Institute Apparatus and method for detection and discrimination molecular object
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
CA2759396A1 (fr) 2009-04-29 2010-11-04 Plc Diagnostics Inc. Systeme de detection a guide d'ondes a source de lumiere a balayage
US9482615B2 (en) 2010-03-15 2016-11-01 Industrial Technology Research Institute Single-molecule detection system and methods
CN101846621B (zh) * 2010-05-17 2011-09-28 中国科学院长春光学精密机械与物理研究所 无标泄漏模光纤消逝场生物传感器系统及光纤制作方法
US8865078B2 (en) * 2010-06-11 2014-10-21 Industrial Technology Research Institute Apparatus for single-molecule detection
WO2016020630A2 (fr) 2014-08-08 2016-02-11 Milan Momcilo Popovich Illuminateur laser en guide d'ondes comprenant un dispositif de déchatoiement
EP2618130A1 (fr) * 2012-01-17 2013-07-24 F. Hoffmann-La Roche AG Dispositif à utiliser pour la détection des affinités de liaison
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
US9360618B2 (en) * 2013-02-21 2016-06-07 Ofs Fitel, Llc Index matched grating inscription
US10018566B2 (en) 2014-02-28 2018-07-10 Ldip, Llc Partially encapsulated waveguide based sensing chips, systems and methods of use
JP6411080B2 (ja) * 2014-06-06 2018-10-24 キヤノンメディカルシステムズ株式会社 光学測定システム
US9618693B2 (en) * 2014-06-13 2017-04-11 Infineon Technologies Ag Liquid sensing systems and methods using a ring resonator sensor
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
WO2016113534A1 (fr) 2015-01-12 2016-07-21 Milan Momcilo Popovich Affichage à guide d'ondes isolé de l'environnement
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
US11181479B2 (en) 2015-02-27 2021-11-23 Ldip, Llc Waveguide-based detection system with scanning light source
WO2016170890A1 (fr) * 2015-04-24 2016-10-27 技術研究組合光電子融合基盤技術研究所 Coupleur à réseau
DE102015214414B4 (de) * 2015-07-29 2020-10-22 Berthold Technologies Gmbh & Co. Kg Verfahren und System zur Ermittlung biologischer Eigenschaften von Proben
TWI541493B (zh) * 2015-09-01 2016-07-11 國立交通大學 一種分光器及其光譜儀
EP3359999A1 (fr) 2015-10-05 2018-08-15 Popovich, Milan Momcilo Afficheur à guide d'ondes
US11513350B2 (en) 2016-12-02 2022-11-29 Digilens Inc. Waveguide device with uniform output illumination
WO2018129398A1 (fr) 2017-01-05 2018-07-12 Digilens, Inc. Dispositifs d'affichage tête haute vestimentaires
KR102768598B1 (ko) 2018-01-08 2025-02-13 디지렌즈 인코포레이티드. 도파관 셀 내의 홀로그래픽 격자의 높은 처리능력의 레코딩을 위한 시스템 및 방법
WO2019136473A1 (fr) 2018-01-08 2019-07-11 Digilens, Inc. Procédés de fabrication de guides d'ondes optiques
US10914954B2 (en) * 2018-08-03 2021-02-09 Facebook Technologies, Llc Rainbow reduction for waveguide displays
CN110885195A (zh) * 2018-09-10 2020-03-17 广州市辉乐医药科技有限公司 一种防激光眼镜的制造方法
US11131929B2 (en) 2018-11-07 2021-09-28 Waymo Llc Systems and methods that utilize angled photolithography for manufacturing light guide elements
WO2020149956A1 (fr) 2019-01-14 2020-07-23 Digilens Inc. Affichage de guide d'ondes holographique avec couche de commande de lumière
WO2020163524A1 (fr) 2019-02-05 2020-08-13 Digilens Inc. Procédés de compensation de non-uniformité de surface optique
US20220283377A1 (en) 2019-02-15 2022-09-08 Digilens Inc. Wide Angle Waveguide Display
EP3924759B1 (fr) 2019-02-15 2025-07-30 Digilens Inc. Procédés et appareils pour fournir un affichage de guide d'ondes holographique à l'aide de réseaux intégrés
US11982813B2 (en) 2019-03-12 2024-05-14 Magic Leap, Inc. Waveguides with high index materials and methods of fabrication thereof
EP4439156A3 (fr) * 2019-03-12 2024-12-18 Magic Leap, Inc. Procédé de fabrication d'un dispositif d'affichage ayant un oxyde de métal de transition à base de lithium à motifs
KR102615905B1 (ko) * 2019-04-28 2023-12-21 레이아 인코포레이티드 회절성 백라이트 제작 방법
CN114207492A (zh) 2019-06-07 2022-03-18 迪吉伦斯公司 带透射光栅和反射光栅的波导及其生产方法
KR102775783B1 (ko) 2019-08-29 2025-02-28 디지렌즈 인코포레이티드. 진공 격자 및 이의 제조 방법
US11131934B2 (en) 2019-10-29 2021-09-28 Waymo Llc Non-telecentric light guide elements
DE102019134172A1 (de) * 2019-12-12 2021-06-17 Dr. Johannes Heidenhain Gmbh Vorrichtung und Verfahren zur Einkopplung von Licht mit verschiedenen Wellenlängen in einen Wellenleiter
KR102389546B1 (ko) * 2020-04-22 2022-04-22 삼성전자주식회사 노광 각도가 조절된 근접장 패터닝을 이용한 나노구조의 조절 및 제작
WO2021233877A1 (fr) * 2020-05-18 2021-11-25 Interdigital Ce Patent Holdings, Sas Réseaux de diffraction transmissifs et réfléchissants en matériau à indice de réfraction élevé à uniformité élevée
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
CN216434426U (zh) * 2020-09-11 2022-05-03 意法半导体有限公司 光学滤波器、电子设备以及车辆
FR3114169B1 (fr) 2020-09-11 2023-06-23 St Microelectronics Crolles 2 Sas Filtre optique et procédé de fabrication correspondant
US12259552B2 (en) * 2020-12-17 2025-03-25 Google Llc Spatial variance along waveguide incoupler
WO2022150841A1 (fr) 2021-01-07 2022-07-14 Digilens Inc. Structures de réseau pour guides d'ondes de couleur
JP2024508926A (ja) 2021-03-05 2024-02-28 ディジレンズ インコーポレイテッド 真空周期的構造体および製造の方法
US20240201456A1 (en) * 2021-04-30 2024-06-20 Magic Leap, Inc. Thin illumination layer waveguide and methods of fabrication
CN113671692A (zh) * 2021-08-27 2021-11-19 北京润和微光科技有限公司 一种平顶光斑整形元件制备方法、元件和激光加工设备

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60241287A (ja) * 1984-05-16 1985-11-30 Nec Corp 高密度格子パタ−ンの製作方法
JPS61156003A (ja) 1984-12-27 1986-07-15 Sharp Corp 回折格子の製造方法
JPH0627703B2 (ja) * 1985-05-29 1994-04-13 アーティフィシャル センシング インスツルメンツ エイエスアイ アクチェンゲゼルシャフト 物質の選択的検出および測定物質内の屈折率変化検知を行なう光学センサ
US5004673A (en) 1987-04-20 1991-04-02 Environmental Research Institute Of Michigan Method of manufacturing surface relief patterns of variable cross-sectional geometry
JPH0196605A (ja) * 1987-10-08 1989-04-14 Nec Corp 波長多重分波素子
JPH02262366A (ja) * 1989-04-03 1990-10-25 Canon Inc 光検出装置および光検出器を備えた半導体レーザ
US5082629A (en) * 1989-12-29 1992-01-21 The Board Of The University Of Washington Thin-film spectroscopic sensor
DE59109246D1 (de) * 1990-05-03 2003-04-03 Hoffmann La Roche Mikrooptischer Sensor
ATE144004T1 (de) 1991-04-12 1996-10-15 Balzers Hochvakuum Verfahren und anlage zur beschichtung mindestens eines gegenstandes
US5225039A (en) * 1991-05-14 1993-07-06 Canon Kabushiki Kaisha Method for producing a diffraction grating
DE4228853C2 (de) 1991-09-18 1993-10-21 Schott Glaswerke Optischer Wellenleiter mit einem planaren oder nur geringfügig gewölbten Substrat und Verfahren zu dessen Herstellung sowie Verwendung eines solchen
JP2738623B2 (ja) 1992-04-23 1998-04-08 三菱電機株式会社 回折格子の形成方法
US5413884A (en) * 1992-12-14 1995-05-09 American Telephone And Telegraph Company Grating fabrication using electron beam lithography
CH686747A5 (de) 1993-04-01 1996-06-14 Balzers Hochvakuum Optisches Schichtmaterial.
GB9314991D0 (en) * 1993-07-20 1993-09-01 Sandoz Ltd Mechanical device
CH688165A5 (de) 1993-07-26 1997-05-30 Balzers Hochvakuum Verfahren zur Herstellung eines optischen Wellenleiters und darnach hergestellter optischer Wellenleiter
JPH0743511A (ja) * 1993-08-02 1995-02-14 Matsushita Electric Ind Co Ltd 回折格子の製造方法および光波長変換素子の製造方法
PL317379A1 (en) * 1994-05-27 1997-04-01 Ciba Geigy Ag Supercritically excited luminescence detecting process
US5501925A (en) * 1994-05-27 1996-03-26 Litel Instruments High power masks and methods for manufacturing same
JPH0844042A (ja) * 1994-07-29 1996-02-16 Olympus Optical Co Ltd 透過率変調型フォトマスク及びその製造方法及びそれを用いた光学素子の製造方法
CH693368A5 (de) * 1994-12-09 2003-06-30 Unaxis Balzers Ag Verfahren zur Herstellung eines Beugungsgitters, Lichtleiterbauteil sowie deren Verwendungen.
US5814565A (en) * 1995-02-23 1998-09-29 University Of Utah Research Foundation Integrated optic waveguide immunosensor
US5759744A (en) 1995-02-24 1998-06-02 University Of New Mexico Methods and apparatus for lithography of sparse arrays of sub-micrometer features
JP2924707B2 (ja) * 1995-04-13 1999-07-26 日本電気株式会社 光導波路型蛍光免疫センサとその製造方法
WO1996036892A1 (fr) * 1995-05-19 1996-11-21 Cornell Research Foundation, Inc. Holographie auto-induite en cascade
GB2302599B (en) * 1995-06-20 1998-08-26 Northern Telecom Ltd Forming Bragg gratings in photosensitive optical waveguides
JP3236199B2 (ja) * 1995-08-25 2001-12-10 日本電気株式会社 平面光導波路型バイオケミカルセンサ
GB9602542D0 (en) * 1996-02-08 1996-04-10 Fisons Plc Analytical device
JP3022300B2 (ja) * 1996-02-19 2000-03-15 日立電線株式会社 グレーティングが形成された光デバイス及びそれを用いたＡｄｄ／Ｄｒｏｐフィルタ
US5786116A (en) * 1997-02-14 1998-07-28 Micron Technology, Inc. Atom lithographic mask having diffraction grating aligned with primary mask pattern
US20020028390A1 (en) * 1997-09-22 2002-03-07 Mohammad A. Mazed Techniques for fabricating and packaging multi-wavelength semiconductor laser array devices (chips) and their applications in system architectures
US5982963A (en) 1997-12-15 1999-11-09 University Of Southern California Tunable nonlinearly chirped grating
US6013396A (en) * 1998-10-30 2000-01-11 Advanced Micro Devices, Inc. Fabrication of chrome/phase grating phase shift mask by interferometric lithography
US6510263B1 (en) * 2000-01-27 2003-01-21 Unaxis Balzers Aktiengesellschaft Waveguide plate and process for its production and microtitre plate

Also Published As

Publication number Publication date
CA2399651A1 (fr) 2001-08-02
EP1250618B1 (fr) 2005-10-19
AU2660801A (en) 2001-08-07
CN1295530C (zh) 2007-01-17
EP1250582A2 (fr) 2002-10-23
KR20020073511A (ko) 2002-09-26
KR100809802B1 (ko) 2008-03-04
KR100966984B1 (ko) 2010-06-30
JP2003521684A (ja) 2003-07-15
AU782096B2 (en) 2005-06-30
HK1048663A1 (zh) 2003-04-11
US20030091284A1 (en) 2003-05-15
KR20070118191A (ko) 2007-12-13
US6873764B2 (en) 2005-03-29
US6510263B1 (en) 2003-01-21
JP2003521728A (ja) 2003-07-15
WO2001055760A1 (fr) 2001-08-02
DK1250618T3 (da) 2006-03-06
EP1605288A1 (fr) 2005-12-14
WO2001055691A3 (fr) 2002-03-14
EP1250618A1 (fr) 2002-10-23
WO2001055691A2 (fr) 2001-08-02
ATE307348T1 (de) 2005-11-15
TWI292856B (en) 2008-01-21
CN1419658A (zh) 2003-05-21

Similar Documents

Publication Publication Date Title
AU2001237339A1 (en) Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods
DE3779362D1 (de) Verfahren zur abbildenden laserinterferometrie.
EP0699375A1 (fr) Procede de gravure par laser
CA1290601C (fr) Methode pour produire un reseau a decalage en surface d'un substrat
AU5824300A (en) Sensor platform, apparatus incorporating the platform, and process using the platform
EP0768512A3 (fr) Procédé de fabrication utilisant la lumière polarisée pour la détermination de l'épaisseur d'une couche mince
WO2005035435A3 (fr) Systemes et procedes de matriçage de microstructures au travers d'un substrat au moyen de photoresine negative, et matrices microstructurees ainsi obtenues
EP0386643A3 (fr) Séparateur de faisceau
EP1439418A3 (fr) Couche d'arrêt de gravure enfouie pour masques à décalage de phase, ainsi que masques à décalage de phase plans pour réduire les effets dûs à la topographie et les effets du type guide d'ondes
CA2283403A1 (fr) Masque de phase destine a la fabrication d'un reseau de diffraction et procede de fabrication
EP1132772A4 (fr) Masque photographique dephase trame en demi-teintes, preformes pour un tel masque photographique et methode de formation de modeles
DE3564619D1 (en) Reflection phase grating and process for its manufacture
DE69515571D1 (de) Verfahren zur Herstellung eines mit einer feinstrukturierten Nesa-Glas-Membrane beschichteten Glassubstrats
EP0372790A3 (fr) Solution de développement et procédé de fabrication d'un patron avec cette solution
KR100387456B1 (en) Method for fabricating semiconductor device
Moshrezadeh et al. Efficient grating couplers for polymer waveguides
EP0984328A3 (fr) Procédé pour la gravure de verre en silice, particulièrement pour produire des masques à phase
EP0886181A3 (fr) Microstructure et procédé pour sa fabrication
EP0178654A3 (fr) Procédé pour la fabrication d'un dispositif semi-conducteur comportant une méthode pour configurer un matériau organique
AU5052299A (en) Pattern formation method using light-induced suppression of etching
KR910010424A (ko) 광회절격자 소자의 제조방법
ATE446849T1 (de) Verfahren zur herstellung von beugungsstrukturen in sicherheitsdokumenten
JP3979225B2 (ja) 光導波路の製造方法
EP0282201A3 (fr) Procédé pour réaliser des patrons
Eisenberg et al. Arrays of micro-prisms and micro-mirrors for infrared light based on As2S3-As2Se3 photoresists