[go: up one dir, main page]

AU2001288228A1 - Multiple-source arrays for confocal and near-field microscopy - Google Patents

Multiple-source arrays for confocal and near-field microscopy

Info

Publication number
AU2001288228A1
AU2001288228A1 AU2001288228A AU8822801A AU2001288228A1 AU 2001288228 A1 AU2001288228 A1 AU 2001288228A1 AU 2001288228 A AU2001288228 A AU 2001288228A AU 8822801 A AU8822801 A AU 8822801A AU 2001288228 A1 AU2001288228 A1 AU 2001288228A1
Authority
AU
Australia
Prior art keywords
confocal
source arrays
field microscopy
microscopy
arrays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001288228A
Inventor
Kyle B. Ferrio
Henry Allen Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Publication of AU2001288228A1 publication Critical patent/AU2001288228A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001288228A 2000-07-27 2001-07-27 Multiple-source arrays for confocal and near-field microscopy Abandoned AU2001288228A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22101900P 2000-07-27 2000-07-27
US60/221,019 2000-07-27
PCT/US2001/023746 WO2002010830A2 (en) 2000-07-27 2001-07-27 Multiple-source arrays for confocal and near-field microscopy

Publications (1)

Publication Number Publication Date
AU2001288228A1 true AU2001288228A1 (en) 2002-02-13

Family

ID=22826000

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001288228A Abandoned AU2001288228A1 (en) 2000-07-27 2001-07-27 Multiple-source arrays for confocal and near-field microscopy

Country Status (5)

Country Link
US (1) US20020074493A1 (en)
EP (1) EP1303780A2 (en)
JP (1) JP2004505257A (en)
AU (1) AU2001288228A1 (en)
WO (1) WO2002010830A2 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6403124B1 (en) * 1997-04-16 2002-06-11 Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. Storage and maintenance of blood products including red blood cells and platelets
JP3668779B2 (en) * 2002-07-25 2005-07-06 国立大学法人岐阜大学 Optical waveguide device
GB0228533D0 (en) * 2002-12-06 2003-01-15 Glaxo Group Ltd Crystalline form
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
EP1588119A4 (en) * 2003-01-27 2007-03-07 Zetetic Inst APPARATUS AND METHODS FOR THE JOINT MEASUREMENT OF CONJUGATED QUADRATURES OF REFLECTED / DIFFUSED BEAM FIELD FIELDS AND TRANSMITTED THROUGH AN INTERFEROMETRY OBJECT
US7009712B2 (en) * 2003-01-27 2006-03-07 Zetetic Institute Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches
EP1590626A4 (en) * 2003-02-04 2007-01-10 Zetetic Inst COMPENSATION OF SHIFT EFFECTS IN REFRACTION INDICES AT THE SUBSTRATE-MIDDLE INTERFACE IN NON-CONFOCAL, CONFOCAL AND INTERFEROMETRIC MICROSCOPY
US7263259B2 (en) * 2003-02-07 2007-08-28 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
KR20050101335A (en) * 2003-02-13 2005-10-21 제테틱 인스티튜트 Transverse differential interferometric confocal microscopy
KR20050098940A (en) * 2003-02-19 2005-10-12 제테틱 인스티튜트 Method and apparatus for dark field interferometric confocal microscopy
EP1595108A4 (en) * 2003-02-19 2007-01-24 Zetetic Inst LONGITUDINAL DIFFERENTIAL INTERFEROMETRIC CONFOCAL MICROSCOPY
JP2006522339A (en) * 2003-04-01 2006-09-28 ゼテテック インスティテュート Apparatus and method for simultaneous measurement of orthogonally polarized beam fields scattered / reflected or transmitted by interferometric objects
JP2006522371A (en) 2003-04-01 2006-09-28 ゼテテック インスティテュート Method for constructing a catadioptric optical lens system
EP1608933A4 (en) * 2003-04-03 2007-03-21 Zetetic Inst APPARATUS AND METHOD FOR MEASURING FIELDS OF BACK-UP AND FRONT-DIFFUSING BEAMS / REFLECTED BY INTERFEROMETRY OBJECT
WO2005008214A2 (en) * 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
WO2005008334A2 (en) 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
WO2005026810A2 (en) * 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
WO2005031397A2 (en) * 2003-09-26 2005-04-07 Zetetic Institute Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
JP4347009B2 (en) * 2003-09-26 2009-10-21 キヤノン株式会社 Near-field light generation method, near-field exposure mask, near-field exposure method, near-field exposure apparatus, near-field light head
WO2005033747A2 (en) * 2003-10-01 2005-04-14 Zetetic Institute Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
TW200538703A (en) 2004-05-06 2005-12-01 Zetetic Inst Apparatus and methods for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
TW200538704A (en) * 2004-05-21 2005-12-01 Zetetic Inst Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
US7161680B2 (en) * 2004-08-16 2007-01-09 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
WO2006034065A2 (en) * 2004-09-20 2006-03-30 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and /or adaptive catoptric surfaces
US8143601B2 (en) 2007-08-14 2012-03-27 Massachusetts Institute Of Technology Nanoscale imaging via absorption modulation
WO2016146411A1 (en) * 2015-03-19 2016-09-22 Koninklijke Philips N.V. Illumination in digital pathology scanning

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3300734A (en) * 1963-01-07 1967-01-24 Ment Jack De Method of separating light energy from shock wave energy including the pumping of a laser with an exploding wire
US3808549A (en) * 1972-03-30 1974-04-30 Corning Glass Works Optical waveguide light source
US4076375A (en) * 1975-12-24 1978-02-28 Bell Telephone Laboratories, Incorporated Directional optical waveguide coupler and power tap arrangement
US4212512A (en) * 1978-02-21 1980-07-15 Trw Inc. Fiber optic coupler for tapping into fiber optic line
US4400053A (en) * 1980-07-10 1983-08-23 Ghaffar Kazkaz Optical fiber coupler
US4659429A (en) * 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
EP0185782B1 (en) * 1984-12-28 1989-03-15 International Business Machines Corporation Waveguide for an optical near-field microscope
EP0418928B1 (en) * 1989-09-22 1996-05-01 Fuji Photo Film Co., Ltd. Scanning microscope and scanning mechanism for the same
US5074633A (en) * 1990-08-03 1991-12-24 At&T Bell Laboratories Optical communication system comprising a fiber amplifier
US5272330A (en) * 1990-11-19 1993-12-21 At&T Bell Laboratories Near field scanning optical microscope having a tapered waveguide
JPH04333808A (en) * 1991-05-10 1992-11-20 Nec Corp Photosemiconductor module
WO1994010595A1 (en) * 1992-10-23 1994-05-11 Monash University Confocal microscope and endoscope
JPH0894938A (en) * 1994-09-21 1996-04-12 Sony Corp Confocal microscope and optical recording / reproducing device
CA2215975A1 (en) * 1995-03-24 1996-10-03 Optiscan Pty. Ltd. Optical fibre confocal imager with variable near-confocal control
US5796909A (en) * 1996-02-14 1998-08-18 Islam; Mohammed N. All-fiber, high-sensitivity, near-field optical microscopy instrument employing guided wave light collector and specimen support
AU6184196A (en) * 1996-06-26 1998-01-14 Morphometrix Technologies Inc. Confocal ultrasonic imaging system
US5847867A (en) * 1996-07-03 1998-12-08 Yokogawa Electric Corporation Confocal microscope
DE19714221A1 (en) * 1997-04-07 1998-10-08 Zeiss Carl Fa Confocal microscope with a motorized scanning table
DE69841614D1 (en) * 1997-06-20 2010-05-27 Univ New York ELECTROSUBLING SOLUTIONS FOR MASS PRODUCTION OF CHIPS AND MOLECULAR LIBRARIES
US5973316A (en) * 1997-07-08 1999-10-26 Nec Research Institute, Inc. Sub-wavelength aperture arrays with enhanced light transmission
US6121603A (en) * 1997-12-01 2000-09-19 Hang; Zhijiang Optical confocal device having a common light directing means
WO1999047041A1 (en) * 1998-03-19 1999-09-23 Board Of Regents, The University Of Texas System Fiber-optic confocal imaging apparatus and methods of use
US6154326A (en) * 1998-03-19 2000-11-28 Fuji Xerox Co., Ltd. Optical head, disk apparatus, method for manufacturing optical head, and optical element
US6236033B1 (en) * 1998-12-09 2001-05-22 Nec Research Institute, Inc. Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
JP2003506741A (en) * 1999-08-02 2003-02-18 ゼテティック・インスティチュート Scanning interferometer near-field confocal microscope
US6285020B1 (en) * 1999-11-05 2001-09-04 Nec Research Institute, Inc. Enhanced optical transmission apparatus with improved inter-surface coupling
US6320174B1 (en) * 1999-11-16 2001-11-20 Ikonisys Inc. Composing microscope
DE20122791U1 (en) * 2000-06-17 2007-11-29 Leica Microsystems Cms Gmbh scanning microscope
US6747795B2 (en) * 2000-06-30 2004-06-08 The General Hospital Corporation Fiber-coupled multiplexed confocal microscope

Also Published As

Publication number Publication date
WO2002010830A2 (en) 2002-02-07
JP2004505257A (en) 2004-02-19
US20020074493A1 (en) 2002-06-20
EP1303780A2 (en) 2003-04-23
WO2002010830A3 (en) 2003-02-13

Similar Documents

Publication Publication Date Title
AU2001288228A1 (en) Multiple-source arrays for confocal and near-field microscopy
AU2001294585A1 (en) Fabrication of nanotube microscopy tips
AU2001281361A1 (en) Differential interferometric scanning near-field confocal microscopy
AU2002351260A1 (en) Force scanning probe microscope
AU2001284516A1 (en) Confocal point microscope and height measuring method using this
AU2002248163A1 (en) High-resolution optical microscope
GB2352827B (en) Laser-scanning microscope
AU2001252853A1 (en) Acoustic microscope
GB2360162B (en) Scanning microscope
GB2363025B (en) Z sharpening for fibre confocal microscopes
AU4099799A (en) Heterodyne confocal microscopy
AU1659001A (en) Composing microscope
AU4821200A (en) Integrated microcolumn and scanning probe microscope arrays
AU2001268608A1 (en) Fiber-coupled multiplexed confocal microscope
AU2001257371A1 (en) Sleeve media holder
AU2001279047A1 (en) Control of position and orientation of sub-wavelength aperture array in near-field microscopy
AU2001285044A1 (en) Writing instrument
AUPQ932200A0 (en) Environmental scanning electron microscope
AU6674801A (en) Visual-servoing optical microscopy
AU4277601A (en) Microscope unit
GB2363026B (en) Double confocal scanning microscope
AU3266999A (en) Nanotribological probe microscope
AU1061599A (en) Scanning evanescent electro-magnetic microscope
AU4039701A (en) Measuring microscope
IL134095A0 (en) Optical near-field microscope