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AU2001279047A1 - Control of position and orientation of sub-wavelength aperture array in near-field microscopy - Google Patents

Control of position and orientation of sub-wavelength aperture array in near-field microscopy

Info

Publication number
AU2001279047A1
AU2001279047A1 AU2001279047A AU7904701A AU2001279047A1 AU 2001279047 A1 AU2001279047 A1 AU 2001279047A1 AU 2001279047 A AU2001279047 A AU 2001279047A AU 7904701 A AU7904701 A AU 7904701A AU 2001279047 A1 AU2001279047 A1 AU 2001279047A1
Authority
AU
Australia
Prior art keywords
orientation
sub
control
aperture array
field microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001279047A
Inventor
Henry Allen Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Publication of AU2001279047A1 publication Critical patent/AU2001279047A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU2001279047A 2000-07-27 2001-07-27 Control of position and orientation of sub-wavelength aperture array in near-field microscopy Abandoned AU2001279047A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22128700P 2000-07-27 2000-07-27
US60/221,287 2000-07-27
PCT/US2001/023656 WO2002010828A2 (en) 2000-07-27 2001-07-27 Control of position and orientation of sub-wavelength aperture array in near-field microscopy

Publications (1)

Publication Number Publication Date
AU2001279047A1 true AU2001279047A1 (en) 2002-02-13

Family

ID=22827165

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001279047A Abandoned AU2001279047A1 (en) 2000-07-27 2001-07-27 Control of position and orientation of sub-wavelength aperture array in near-field microscopy

Country Status (5)

Country Link
US (1) US6552805B2 (en)
EP (1) EP1303777A2 (en)
JP (1) JP2004505312A (en)
AU (1) AU2001279047A1 (en)
WO (1) WO2002010828A2 (en)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6403124B1 (en) * 1997-04-16 2002-06-11 Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. Storage and maintenance of blood products including red blood cells and platelets
TW579435B (en) * 1999-08-02 2004-03-11 Zetetic Inst Scanning interferometric near-field confocal microscopy
US6667809B2 (en) * 2000-07-27 2003-12-23 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
JP2004505313A (en) * 2000-07-27 2004-02-19 ゼテティック・インスティチュート Differential interference scanning near-field confocal microscopy
GB2381851A (en) 2001-11-06 2003-05-14 Caithness Dev Ltd A pedal mechanism
US6858436B2 (en) * 2002-04-30 2005-02-22 Motorola, Inc. Near-field transform spectroscopy
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
KR20060011938A (en) 2003-01-27 2006-02-06 제테틱 인스티튜트 Interferometric confocal microscopy incorporating a pinhole array beam-splitter
WO2004068065A2 (en) * 2003-01-27 2004-08-12 Zetetic Institute Leaky guided-wave modes used in interferometric confocal microscopy to measure properties of trenches
WO2004070434A2 (en) * 2003-02-04 2004-08-19 Zetetic Institute Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
WO2004072688A2 (en) * 2003-02-07 2004-08-26 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
US7046372B2 (en) * 2003-02-13 2006-05-16 Zetetic Institute Transverse differential interferometric confocal microscopy
KR20050098940A (en) * 2003-02-19 2005-10-12 제테틱 인스티튜트 Method and apparatus for dark field interferometric confocal microscopy
JP2006518487A (en) * 2003-02-19 2006-08-10 ゼテテック インスティテュート Vertical differential interference confocal microscope
KR20050108422A (en) 2003-04-01 2005-11-16 제테틱 인스티튜트 Method for constructing a catadioptric lens system
JP2006522339A (en) * 2003-04-01 2006-09-28 ゼテテック インスティテュート Apparatus and method for simultaneous measurement of orthogonally polarized beam fields scattered / reflected or transmitted by interferometric objects
US7064838B2 (en) * 2003-04-03 2006-06-20 Zetetic Institute Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry
WO2005008334A2 (en) 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
US7324209B2 (en) * 2003-07-07 2008-01-29 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
WO2005026810A2 (en) * 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US20050111007A1 (en) * 2003-09-26 2005-05-26 Zetetic Institute Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
US7312877B2 (en) * 2003-10-01 2007-12-25 Zetetic Institute Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
WO2005078382A1 (en) * 2004-01-22 2005-08-25 Mosong Cheng Apparatus and method for super-resolution optical microscopy
TW200538703A (en) * 2004-05-06 2005-12-01 Zetetic Inst Apparatus and methods for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
US7298496B2 (en) * 2004-05-21 2007-11-20 Zetetic Institute Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
US7161680B2 (en) * 2004-08-16 2007-01-09 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
WO2006034065A2 (en) * 2004-09-20 2006-03-30 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and /or adaptive catoptric surfaces
JP4423168B2 (en) 2004-11-02 2010-03-03 株式会社ミツトヨ Surface texture measuring device
US7808023B2 (en) * 2005-08-24 2010-10-05 Aptina Imaging Corporation Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers
US7799491B2 (en) * 2006-04-07 2010-09-21 Aptina Imaging Corp. Color filter array and imaging device containing such color filter array and method of fabrication
US20080204580A1 (en) * 2007-02-28 2008-08-28 Micron Technology, Inc. Method, apparatus and system providing imaging device with color filter array
MX389850B (en) 2018-01-22 2025-03-20 Federico Amezcua Amezcua Synergistic pharmaceutical composition originated from the active enantiomer s-ketorolac tromethamine and tramadol hydrochloride
US20240167813A1 (en) * 2022-11-23 2024-05-23 Kla Corporation System and method for suppression of tool induced shift in scanning overlay metrology

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) * 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US4681451A (en) 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus
US5105403A (en) 1988-01-27 1992-04-14 Hitachi, Ltd. Optical information reading apparatus with waveguide and diffraction grating
US5105408A (en) 1988-05-12 1992-04-14 Digital Equipment Corporation Optical head with flying lens
DE69022318T2 (en) 1989-07-19 1996-05-15 Matsushita Electric Ind Co Ltd Flying optical head.
US5150338A (en) 1989-08-10 1992-09-22 Hewlett-Packard Company Optical disk reading and writing system having magnetic write head mounted on an air-bearing slider
JP2626115B2 (en) 1990-01-10 1997-07-02 松下電器産業株式会社 Optical head
US5004307A (en) 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
US5125750A (en) 1991-03-14 1992-06-30 The Board Of Trustees Of The Leland Stanford Junior University Optical recording system employing a solid immersion lens
US5121256A (en) 1991-03-14 1992-06-09 The Board Of Trustees Of The Leland Stanford Junior University Lithography system employing a solid immersion lens
DE69121201D1 (en) * 1991-08-27 1996-09-05 Ibm Method and device for generating high-resolution optical images
JPH0573980A (en) 1991-09-12 1993-03-26 Ricoh Co Ltd Optical head for optical disk drive device
JP2922698B2 (en) 1991-12-25 1999-07-26 京セラ株式会社 Slider for optical head
JP3135389B2 (en) 1992-10-23 2001-02-13 松下電器産業株式会社 Information reproducing method, information recording / reproducing method, information reproducing apparatus, recording medium, and optical head
US5349443A (en) 1992-11-25 1994-09-20 Polaroid Corporation Flexible transducers for photon tunneling microscopes and methods for making and using same
US5442443A (en) 1993-04-08 1995-08-15 Polaroid Corporation Stereoscopic photon tunneling microscope
JP3303436B2 (en) 1993-05-14 2002-07-22 キヤノン株式会社 Projection exposure apparatus and method for manufacturing semiconductor element
EP0722574B1 (en) 1993-10-04 1998-09-09 International Business Machines Corporation Near-field optical microscope
US5371588A (en) * 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
US5497359A (en) 1994-08-30 1996-03-05 National Business Machines Corporation Optical disk data storage system with radiation-transparent air-bearing slider
DE69625292T2 (en) * 1995-08-04 2003-09-04 International Business Machines Corp., Armonk Near field interferometric apparatus and method
US5602820A (en) 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
JPH09210629A (en) 1996-02-02 1997-08-12 Canon Inc Surface position detecting apparatus and device manufacturing method using the same
US5602643A (en) 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
US5689480A (en) 1996-08-13 1997-11-18 The Board Of Trustees Of The Leland Stanford Junior University Magneto-optic recording system employing near field optics
US5666197A (en) 1996-08-21 1997-09-09 Polaroid Corporation Apparatus and methods employing phase control and analysis of evanescent illumination for imaging and metrology of subwavelength lateral surface topography
US5760901A (en) 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
US5883872A (en) 1997-05-29 1999-03-16 The Board Of Trustees Of The Leland Stanford Junior University Near field magneto-optical recording system employing slit illumination
DE19858490A1 (en) * 1998-12-18 2000-06-21 Laser & Med Tech Gmbh Near-field optical analysis of biological objects employs matrix of light micro- or nano-sources excited by scanning laser or free electron beam, causing secondary optical emissions

Also Published As

Publication number Publication date
WO2002010828A3 (en) 2003-01-03
JP2004505312A (en) 2004-02-19
EP1303777A2 (en) 2003-04-23
US20020033952A1 (en) 2002-03-21
WO2002010828A2 (en) 2002-02-07
WO2002010828A9 (en) 2004-05-06
US6552805B2 (en) 2003-04-22

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