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AU2001259566A1 - Method and apparatus for end-point detection - Google Patents

Method and apparatus for end-point detection

Info

Publication number
AU2001259566A1
AU2001259566A1 AU2001259566A AU5956601A AU2001259566A1 AU 2001259566 A1 AU2001259566 A1 AU 2001259566A1 AU 2001259566 A AU2001259566 A AU 2001259566A AU 5956601 A AU5956601 A AU 5956601A AU 2001259566 A1 AU2001259566 A1 AU 2001259566A1
Authority
AU
Australia
Prior art keywords
point detection
detection
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001259566A
Inventor
Hui Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACM Research Inc
Original Assignee
ACM Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACM Research Inc filed Critical ACM Research Inc
Publication of AU2001259566A1 publication Critical patent/AU2001259566A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C25F3/22—Polishing of heavy metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Weting (AREA)
AU2001259566A 2000-05-12 2001-05-03 Method and apparatus for end-point detection Abandoned AU2001259566A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/570,566 US6447668B1 (en) 1998-07-09 2000-05-12 Methods and apparatus for end-point detection
US09570566 2000-05-12
PCT/US2001/014652 WO2001088229A1 (en) 2000-05-12 2001-05-03 Method and apparatus for end-point detection

Publications (1)

Publication Number Publication Date
AU2001259566A1 true AU2001259566A1 (en) 2001-11-26

Family

ID=24280146

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001259566A Abandoned AU2001259566A1 (en) 2000-05-12 2001-05-03 Method and apparatus for end-point detection

Country Status (6)

Country Link
US (1) US6447668B1 (en)
EP (1) EP1290249A4 (en)
AU (1) AU2001259566A1 (en)
CA (1) CA2409755A1 (en)
TW (1) TW494049B (en)
WO (1) WO2001088229A1 (en)

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Also Published As

Publication number Publication date
EP1290249A4 (en) 2006-09-13
WO2001088229A1 (en) 2001-11-22
TW494049B (en) 2002-07-11
US6447668B1 (en) 2002-09-10
CA2409755A1 (en) 2001-11-22
EP1290249A1 (en) 2003-03-12

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