[go: up one dir, main page]

ATE486668T1 - Kapazitiver mikrobearbeiteter ultraschallwandler und zugehöriges betriebsverfahren - Google Patents

Kapazitiver mikrobearbeiteter ultraschallwandler und zugehöriges betriebsverfahren

Info

Publication number
ATE486668T1
ATE486668T1 AT01964960T AT01964960T ATE486668T1 AT E486668 T1 ATE486668 T1 AT E486668T1 AT 01964960 T AT01964960 T AT 01964960T AT 01964960 T AT01964960 T AT 01964960T AT E486668 T1 ATE486668 T1 AT E486668T1
Authority
AT
Austria
Prior art keywords
cells
diaphragm plate
base plate
ultrasonic transducer
fabricated
Prior art date
Application number
AT01964960T
Other languages
English (en)
Inventor
John Fraser
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE486668T1 publication Critical patent/ATE486668T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT01964960T 2000-06-15 2001-06-08 Kapazitiver mikrobearbeiteter ultraschallwandler und zugehöriges betriebsverfahren ATE486668T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/596,759 US6443901B1 (en) 2000-06-15 2000-06-15 Capacitive micromachined ultrasonic transducers
PCT/EP2001/006479 WO2001097562A2 (en) 2000-06-15 2001-06-08 Capacitive micromachined ultrasonic transducers

Publications (1)

Publication Number Publication Date
ATE486668T1 true ATE486668T1 (de) 2010-11-15

Family

ID=24388581

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01964960T ATE486668T1 (de) 2000-06-15 2001-06-08 Kapazitiver mikrobearbeiteter ultraschallwandler und zugehöriges betriebsverfahren

Country Status (6)

Country Link
US (4) US6443901B1 (de)
EP (1) EP1294494B1 (de)
JP (1) JP5192114B2 (de)
AT (1) ATE486668T1 (de)
DE (1) DE60143391D1 (de)
WO (1) WO2001097562A2 (de)

Families Citing this family (252)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8021666B2 (en) * 1997-02-18 2011-09-20 Sloan-Kettering Institute For Cancer Research Method and compositions for stimulation of an immune response to CD20 using a xenogeneic CD20 antigen
US6605043B1 (en) * 1998-11-19 2003-08-12 Acuson Corp. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6645145B1 (en) 1998-11-19 2003-11-11 Siemens Medical Solutions Usa, Inc. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6413789B2 (en) * 2000-01-24 2002-07-02 University Of South Florida Method of detecting and monitoring stresses in a semiconductor wafer
JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
US6448604B1 (en) * 2000-09-12 2002-09-10 Robert Bosch Gmbh Integrated adjustable capacitor
WO2002043593A1 (en) * 2000-12-01 2002-06-06 The Cleveland Clinic Foundation Miniature ultrasound transducer
US6558330B1 (en) * 2000-12-06 2003-05-06 Acuson Corporation Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems
US20050167188A1 (en) * 2001-02-15 2005-08-04 Integral Technologies, Inc. Low cost acoustical structures manufactured from conductive loaded resin-based materials
SE518395C2 (sv) * 2001-03-15 2002-10-01 Electrolux Ab Närhetsavkännande system för en autonom anordning och ultraljudgivare
FR2827149B1 (fr) * 2001-07-13 2003-10-10 Technomed Medical Systems Sonde de traitement par ultrasons focalises
US6835591B2 (en) 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6924538B2 (en) 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US7563711B1 (en) * 2001-07-25 2009-07-21 Nantero, Inc. Method of forming a carbon nanotube-based contact to semiconductor
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US6574130B2 (en) * 2001-07-25 2003-06-03 Nantero, Inc. Hybrid circuit having nanotube electromechanical memory
US6643165B2 (en) 2001-07-25 2003-11-04 Nantero, Inc. Electromechanical memory having cell selection circuitry constructed with nanotube technology
US7566478B2 (en) 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6592525B2 (en) * 2001-07-31 2003-07-15 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) having improved sensitivity
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
KR20100057903A (ko) * 2001-10-23 2010-06-01 임머숀 코퍼레이션 감촉 피드백을 사용하여 전자 디바이스의 사용자에게 사일런트 상태 정보를 전달하는 방법
US6784028B2 (en) 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US7176505B2 (en) 2001-12-28 2007-02-13 Nantero, Inc. Electromechanical three-trace junction devices
US6584848B1 (en) * 2002-04-11 2003-07-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Non-destructive evaluation method employing dielectric electrostatic ultrasonic transducers
US7335395B2 (en) 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6831394B2 (en) * 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7560136B2 (en) 2003-01-13 2009-07-14 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
JP3964334B2 (ja) * 2003-02-06 2007-08-22 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波診断装置
US7332850B2 (en) * 2003-02-10 2008-02-19 Siemens Medical Solutions Usa, Inc. Microfabricated ultrasonic transducers with curvature and method for making the same
US7618373B2 (en) 2003-02-14 2009-11-17 Siemens Medical Solutions Usa, Inc. Microfabricated ultrasonic transducer array for 3-D imaging and method of operating the same
US7780597B2 (en) 2003-02-14 2010-08-24 Siemens Medical Solutions Usa, Inc. Method and apparatus for improving the performance of capacitive acoustic transducers using bias polarity control and multiple firings
US7635332B2 (en) * 2003-02-14 2009-12-22 Siemens Medical Solutions Usa, Inc. System and method of operating microfabricated ultrasonic transducers for harmonic imaging
US7087023B2 (en) * 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US7443765B2 (en) * 2003-03-06 2008-10-28 General Electric Company Reconfigurable linear sensor arrays for reduced channel count
US6865140B2 (en) * 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
US7353056B2 (en) * 2003-03-06 2008-04-01 General Electric Company Optimized switching configurations for reconfigurable arrays of sensor elements
US7280435B2 (en) * 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
US7313053B2 (en) * 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US20040225220A1 (en) * 2003-05-06 2004-11-11 Rich Collin A. Ultrasound system including a handheld probe
EP1631812A4 (de) 2003-05-14 2010-12-01 Nantero Inc Sensorplattform mit einem horizontal ausgerichteten nanoröhrchenelement
JP2004350701A (ja) * 2003-05-26 2004-12-16 Olympus Corp 超音波内視鏡装置
CA2528804A1 (en) * 2003-06-09 2005-01-06 Nantero, Inc Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
CN100504375C (zh) * 2003-06-16 2009-06-24 财团法人工业技术研究院 可挠式基板的微型超声波换能器
EP1644639B1 (de) * 2003-06-30 2009-02-11 Nxp B.V. Vorrichtung zur erzeugung lauten mit hilfe einer erzeugten medienströmung
US20050043627A1 (en) * 2003-07-17 2005-02-24 Angelsen Bjorn A.J. Curved ultrasound transducer arrays manufactured with planar technology
US7115960B2 (en) * 2003-08-13 2006-10-03 Nantero, Inc. Nanotube-based switching elements
US20080086056A1 (en) * 2003-08-25 2008-04-10 Industrial Technology Research Institute Micro ultrasonic transducers
US7416993B2 (en) * 2003-09-08 2008-08-26 Nantero, Inc. Patterned nanowire articles on a substrate and methods of making the same
JP2005106529A (ja) * 2003-09-29 2005-04-21 Hosiden Corp 圧電型振動センサ
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
JP4688213B2 (ja) * 2003-10-02 2011-05-25 株式会社日立メディコ 超音波探触子、超音波撮像装置および超音波撮像方法
JP4528917B2 (ja) * 2003-10-03 2010-08-25 シーメンス メディカル ソリューションズ ユーエスエー インコーポレイテッド ３ｄイメージングのためのマイクロ加工超音波トランスデューサ・アレイ及びその操作方法
WO2005046443A2 (en) * 2003-11-07 2005-05-26 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
JP2007528153A (ja) * 2004-02-06 2007-10-04 ジョージア テック リサーチ コーポレイション Ｃｍｕｔデバイス及び製造方法
EP1761998A4 (de) * 2004-02-27 2011-05-11 Georgia Tech Res Inst Harmonische cmut-vorrichtungen und herstellungsverfahren
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US20050215909A1 (en) * 2004-03-19 2005-09-29 Siemens Medical Solutions Usa, Inc. Electric field control for capacitive micromachined ultrasound transducers
US7530952B2 (en) * 2004-04-01 2009-05-12 The Board Of Trustees Of The Leland Stanford Junior University Capacitive ultrasonic transducers with isolation posts
US20050219953A1 (en) * 2004-04-06 2005-10-06 The Board Of Trustees Of The Leland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
US20060058667A1 (en) * 2004-05-06 2006-03-16 Lemmerhirt David F Integrated circuit for an ultrasound system
JP2005340536A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 可変容量コンデンサ
US7545075B2 (en) * 2004-06-04 2009-06-09 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
EP1762182B1 (de) 2004-06-10 2011-08-03 Olympus Corporation Ultraschallsonde vom elektrostatischen kapazitätstyp
WO2005120359A1 (ja) 2004-06-11 2005-12-22 Olympus Corporation 超音波プローブ装置及び超音波診断装置
JP3867716B2 (ja) * 2004-06-18 2007-01-10 セイコーエプソン株式会社 超音波トランスデューサ、超音波スピーカ、及び超音波トランスデューサの駆動制御方法
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
JP4632728B2 (ja) * 2004-09-10 2011-02-16 株式会社東芝 超音波プローブおよび超音波画像診断装置
US8658453B2 (en) * 2004-09-15 2014-02-25 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US7888709B2 (en) * 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
US8309428B2 (en) * 2004-09-15 2012-11-13 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US8471238B2 (en) 2004-09-16 2013-06-25 Nantero Inc. Light emitters using nanotubes and methods of making same
US7967754B2 (en) * 2004-10-14 2011-06-28 Scimed Life Systems, Inc. Integrated bias circuitry for ultrasound imaging devices configured to image the interior of a living being
US8333703B2 (en) * 2004-10-15 2012-12-18 Hitachi Medical Corporation Ultrasonic diagnostic apparatus
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
JP2006165380A (ja) * 2004-12-09 2006-06-22 Kyocera Corp 可変容量コンデンサ
US7493821B2 (en) * 2005-04-16 2009-02-24 Yunlong Wang Micromachined acoustic transducer and method of operating the same
TWI260940B (en) * 2005-06-17 2006-08-21 Ind Tech Res Inst Method for producing polymeric capacitive ultrasonic transducer
US7928521B1 (en) 2005-05-31 2011-04-19 Nantero, Inc. Non-tensioned carbon nanotube switch design and process for making same
US7915122B2 (en) * 2005-06-08 2011-03-29 Nantero, Inc. Self-aligned cell integration scheme
US7589456B2 (en) * 2005-06-14 2009-09-15 Siemens Medical Solutions Usa, Inc. Digital capacitive membrane transducer
GB0513253D0 (en) * 2005-06-29 2005-08-03 Oceanscan Ltd Improved acoustic sensor and method
US7538040B2 (en) * 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
US20070038088A1 (en) * 2005-08-04 2007-02-15 Rich Collin A Medical imaging user interface and control scheme
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
CN101227863B (zh) * 2005-09-05 2011-08-31 株式会社日立医药 超声波摄像装置
CA2621500A1 (en) 2005-09-06 2007-03-15 Nantero, Inc. Carbon nanotube resonators
JP4880275B2 (ja) * 2005-10-03 2012-02-22 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子装置
TWI268183B (en) * 2005-10-28 2006-12-11 Ind Tech Res Inst Capacitive ultrasonic transducer and method of fabricating the same
US7626891B2 (en) * 2006-01-04 2009-12-01 Industrial Technology Research Institute Capacitive ultrasonic transducer and method of fabricating the same
EP1952767B1 (de) * 2005-11-18 2015-07-15 Hitachi Medical Corporation Ultraschall-diagnosegerät und kalibrationsverfahren dafür
US8764664B2 (en) * 2005-11-28 2014-07-01 Vizyontech Imaging, Inc. Methods and apparatus for conformable medical data acquisition pad and configurable imaging system
JP4804961B2 (ja) 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
JP4839099B2 (ja) 2006-03-03 2011-12-14 オリンパスメディカルシステムズ株式会社 マイクロマシンプロセスにより製造された超音波振動子、超音波振動子装置、その体腔内超音波診断装置、及びその制御方法
US7828734B2 (en) * 2006-03-09 2010-11-09 Slender Medical Ltd. Device for ultrasound monitored tissue treatment
US20090048514A1 (en) * 2006-03-09 2009-02-19 Slender Medical Ltd. Device for ultrasound monitored tissue treatment
US9107798B2 (en) * 2006-03-09 2015-08-18 Slender Medical Ltd. Method and system for lipolysis and body contouring
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
US7745973B2 (en) * 2006-05-03 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion
US9867530B2 (en) 2006-08-14 2018-01-16 Volcano Corporation Telescopic side port catheter device with imaging system and method for accessing side branch occlusions
US20080071149A1 (en) * 2006-09-20 2008-03-20 Collin Rich Method and system of representing a medical event
US20080071292A1 (en) * 2006-09-20 2008-03-20 Rich Collin A System and method for displaying the trajectory of an instrument and the position of a body within a volume
JP4800170B2 (ja) * 2006-10-05 2011-10-26 株式会社日立製作所 超音波トランスデューサおよびその製造方法
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
JP4294678B2 (ja) * 2006-10-30 2009-07-15 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡
US7721397B2 (en) * 2007-02-07 2010-05-25 Industrial Technology Research Institute Method for fabricating capacitive ultrasonic transducers
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
JP5134277B2 (ja) * 2007-03-30 2013-01-30 三菱重工業株式会社 超音波検査装置
US8115187B2 (en) * 2007-05-22 2012-02-14 Nantero, Inc. Triodes using nanofabric articles and methods of making the same
WO2009008282A1 (ja) * 2007-07-11 2009-01-15 Hitachi Medical Corporation 超音波探触子及び超音波診断装置
US9596993B2 (en) 2007-07-12 2017-03-21 Volcano Corporation Automatic calibration systems and methods of use
US9622706B2 (en) 2007-07-12 2017-04-18 Volcano Corporation Catheter for in vivo imaging
WO2009009802A1 (en) 2007-07-12 2009-01-15 Volcano Corporation Oct-ivus catheter for concurrent luminal imaging
EP2170531A2 (de) * 2007-07-31 2010-04-07 Koninklijke Philips Electronics N.V. Cmuts mit einem hoch-k-dielektrikum
JP5260130B2 (ja) * 2007-08-10 2013-08-14 三菱重工業株式会社 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法
US20100274161A1 (en) * 2007-10-15 2010-10-28 Slender Medical, Ltd. Implosion techniques for ultrasound
US7745248B2 (en) * 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
US20100256498A1 (en) * 2007-11-16 2010-10-07 Hiroki Tanaka Ultrasonic imaging device
US8483014B2 (en) * 2007-12-03 2013-07-09 Kolo Technologies, Inc. Micromachined ultrasonic transducers
JP5497657B2 (ja) * 2007-12-03 2014-05-21 コロ テクノロジーズ インコーポレイテッド 超音波システム用ｃｍｕｔパッケージング
US8850893B2 (en) * 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
EP2229242B1 (de) * 2008-01-09 2011-05-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ultraschallwandler zur erzeugung asymmetrischer schallfelder
JP2009232615A (ja) * 2008-03-24 2009-10-08 Sanyo Electric Co Ltd 静電動作装置
US20090236932A1 (en) * 2008-03-24 2009-09-24 Sanyo Electric Co., Ltd. Electrostatic acting device
JP2009272824A (ja) * 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
CN101632984B (zh) * 2008-07-24 2014-09-17 Ge医疗系统环球技术有限公司 电压产生电路及超声波诊断装置
US20110178541A1 (en) * 2008-09-12 2011-07-21 Slender Medical, Ltd. Virtual ultrasonic scissors
CN102333485B (zh) * 2009-02-27 2014-12-10 皇家飞利浦电子股份有限公司 具有机械塌陷保持的预塌陷cmut
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
JP5409138B2 (ja) * 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
JP5578810B2 (ja) 2009-06-19 2014-08-27 キヤノン株式会社 静電容量型の電気機械変換装置
US8531919B2 (en) * 2009-09-21 2013-09-10 The Hong Kong Polytechnic University Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
JP5473579B2 (ja) * 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
EP2452627B1 (de) 2010-04-15 2018-08-29 Olympus Corporation Ultraschalldiagnosesystem
DE102010042875A1 (de) * 2010-10-25 2012-04-26 Siemens Aktiengesellschaft Verfahren zur Regelung einer Vorspannung für einen kapazitiven mikromechanischen Ultraschallwandler
US11141063B2 (en) 2010-12-23 2021-10-12 Philips Image Guided Therapy Corporation Integrated system architectures and methods of use
US11040140B2 (en) 2010-12-31 2021-06-22 Philips Image Guided Therapy Corporation Deep vein thrombosis therapeutic methods
JP5252016B2 (ja) * 2011-03-18 2013-07-31 横河電機株式会社 振動式トランスデューサ
JP5961246B2 (ja) * 2011-03-22 2016-08-02 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5921079B2 (ja) * 2011-04-06 2016-05-24 キヤノン株式会社 電気機械変換装置及びその作製方法
US9505031B2 (en) * 2011-04-21 2016-11-29 Rensselaer Polytechnic Institute Ultrasonic high temperature and pressure housing for piezoelectric-acoustic channels
WO2013033592A1 (en) 2011-08-31 2013-03-07 Volcano Corporation Optical-electrical rotary joint and methods of use
US8630429B2 (en) 2011-12-16 2014-01-14 Robert Bosch Gmbh Preventing electrostatic pull-in in capacitive devices
JP5892595B2 (ja) 2012-02-06 2016-03-23 株式会社ワコム 位置指示器
EP2825856B1 (de) * 2012-03-13 2023-09-27 Koninklijke Philips N.V. Mikrobearbeiteter kapazitiver ultraschallwandler mit ladespannungsquelle
KR101383298B1 (ko) * 2012-04-25 2014-04-09 삼성전자주식회사 초음파 프로브 장치 및 초음파 프로브 장치의 제조 방법
EP2904671B1 (de) 2012-10-05 2022-05-04 David Welford Systeme und verfahren zum verstärken von licht
US9292918B2 (en) 2012-10-05 2016-03-22 Volcano Corporation Methods and systems for transforming luminal images
US9286673B2 (en) 2012-10-05 2016-03-15 Volcano Corporation Systems for correcting distortions in a medical image and methods of use thereof
US10070827B2 (en) 2012-10-05 2018-09-11 Volcano Corporation Automatic image playback
US10568586B2 (en) 2012-10-05 2020-02-25 Volcano Corporation Systems for indicating parameters in an imaging data set and methods of use
US11272845B2 (en) 2012-10-05 2022-03-15 Philips Image Guided Therapy Corporation System and method for instant and automatic border detection
US9324141B2 (en) 2012-10-05 2016-04-26 Volcano Corporation Removal of A-scan streaking artifact
US20140100454A1 (en) 2012-10-05 2014-04-10 Volcano Corporation Methods and systems for establishing parameters for three-dimensional imaging
US9307926B2 (en) 2012-10-05 2016-04-12 Volcano Corporation Automatic stent detection
US9858668B2 (en) 2012-10-05 2018-01-02 Volcano Corporation Guidewire artifact removal in images
US9367965B2 (en) 2012-10-05 2016-06-14 Volcano Corporation Systems and methods for generating images of tissue
US9840734B2 (en) 2012-10-22 2017-12-12 Raindance Technologies, Inc. Methods for analyzing DNA
US9364862B2 (en) 2012-11-02 2016-06-14 University Of Windsor Ultrasonic sensor microarray and method of manufacturing same
US9035532B2 (en) * 2012-11-02 2015-05-19 University Of Windsor Ultrasonic sensor microarray and method of manufacturing same
EP2931132B1 (de) 2012-12-13 2023-07-05 Philips Image Guided Therapy Corporation Vorrichtung zur gezielten kanülierung
US10939826B2 (en) 2012-12-20 2021-03-09 Philips Image Guided Therapy Corporation Aspirating and removing biological material
US10942022B2 (en) 2012-12-20 2021-03-09 Philips Image Guided Therapy Corporation Manual calibration of imaging system
JP6785554B2 (ja) 2012-12-20 2020-11-18 ボルケーノ コーポレイション 平滑遷移カテーテル
US11406498B2 (en) 2012-12-20 2022-08-09 Philips Image Guided Therapy Corporation Implant delivery system and implants
JP2016506276A (ja) 2012-12-20 2016-03-03 ジェレミー スティガール， 血管内画像の位置の特定
WO2014107287A1 (en) 2012-12-20 2014-07-10 Kemp Nathaniel J Optical coherence tomography system that is reconfigurable between different imaging modes
JP2016501623A (ja) 2012-12-21 2016-01-21 アンドリュー ハンコック， 画像信号のマルチ経路処理のためのシステムおよび方法
WO2014100530A1 (en) 2012-12-21 2014-06-26 Whiseant Chester System and method for catheter steering and operation
US10058284B2 (en) 2012-12-21 2018-08-28 Volcano Corporation Simultaneous imaging, monitoring, and therapy
CA2895993A1 (en) 2012-12-21 2014-06-26 Jason Spencer System and method for graphical processing of medical data
JP2016507892A (ja) 2012-12-21 2016-03-10 デイビッド ウェルフォード， 光の波長放出を狭幅化するためのシステムおよび方法
US9612105B2 (en) 2012-12-21 2017-04-04 Volcano Corporation Polarization sensitive optical coherence tomography system
CA2895990A1 (en) 2012-12-21 2014-06-26 Jerome MAI Ultrasound imaging with variable line density
EP2934653B1 (de) 2012-12-21 2018-09-19 Douglas Meyer Rotierender ultraschallbildgebungskatheter mit einem erweiterten katheterkörperteleskop
US9486143B2 (en) 2012-12-21 2016-11-08 Volcano Corporation Intravascular forward imaging device
JP2016508233A (ja) 2012-12-21 2016-03-17 ナサニエル ジェイ． ケンプ， 光学スイッチを用いた電力効率のよい光学バッファリング
WO2014123922A1 (en) 2013-02-05 2014-08-14 Butterfly Network, Inc. Cmos ultrasonic transducers and related apparatus and methods
US9375850B2 (en) * 2013-02-07 2016-06-28 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer devices with metal-semiconductor contact for reduced capacitive cross-talk
US10226597B2 (en) 2013-03-07 2019-03-12 Volcano Corporation Guidewire with centering mechanism
CN105103163A (zh) 2013-03-07 2015-11-25 火山公司 血管内图像中的多模态分割
US11154313B2 (en) 2013-03-12 2021-10-26 The Volcano Corporation Vibrating guidewire torquer and methods of use
WO2014164696A1 (en) 2013-03-12 2014-10-09 Collins Donna Systems and methods for diagnosing coronary microvascular disease
WO2014159819A1 (en) 2013-03-13 2014-10-02 Jinhyoung Park System and methods for producing an image from a rotational intravascular ultrasound device
US9301687B2 (en) 2013-03-13 2016-04-05 Volcano Corporation System and method for OCT depth calibration
US11026591B2 (en) 2013-03-13 2021-06-08 Philips Image Guided Therapy Corporation Intravascular pressure sensor calibration
US10426590B2 (en) 2013-03-14 2019-10-01 Volcano Corporation Filters with echogenic characteristics
US10292677B2 (en) 2013-03-14 2019-05-21 Volcano Corporation Endoluminal filter having enhanced echogenic properties
US10219887B2 (en) 2013-03-14 2019-03-05 Volcano Corporation Filters with echogenic characteristics
US12343198B2 (en) 2013-03-14 2025-07-01 Philips Image Guided Therapy Corporation Delivery catheter having imaging capabilities
US9857457B2 (en) 2013-03-14 2018-01-02 University Of Windsor Ultrasonic sensor microarray and its method of manufacture
WO2014151362A2 (en) 2013-03-15 2014-09-25 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
TWI663706B (zh) 2013-03-15 2019-06-21 美商蝴蝶網路公司 互補式金屬氧化物半導體（ｃｍｏｓ）超音波換能器以及用於形成其之方法
US9667889B2 (en) 2013-04-03 2017-05-30 Butterfly Network, Inc. Portable electronic devices with integrated imaging capabilities
US9187316B2 (en) 2013-07-19 2015-11-17 University Of Windsor Ultrasonic sensor microarray and method of manufacturing same
TWI682817B (zh) 2013-07-23 2020-01-21 美商蝴蝶網路公司 可互連的超音波換能器探頭以及相關的方法和設備
WO2015028949A2 (en) 2013-08-27 2015-03-05 Koninklijke Philips N.V. A cmut-based ultrasound imaging system for wide frequency range imaging
WO2015028945A2 (en) 2013-08-27 2015-03-05 Koninklijke Philips N.V. Variable frequency control of collapsed mode cmut transducer
KR102126033B1 (ko) * 2013-10-23 2020-06-23 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
WO2015161157A1 (en) 2014-04-18 2015-10-22 Butterfly Network, Inc. Architecture of single substrate ultrasonic imaging devices, related apparatuses, and methods
JP6636502B2 (ja) 2014-04-18 2020-01-29 バタフライ ネットワーク，インコーポレイテッド 相補型金属酸化膜半導体（ｃｍｏｓ）ウェーハにおける超音波トランスデューサ並びに関連装置及び方法
TWI671059B (zh) 2014-04-18 2019-09-11 美商蝴蝶網路公司 超音波成像壓縮方法和設備
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US10898924B2 (en) 2014-07-16 2021-01-26 Koninklijke Philips N.V. Tiled CMUT dies with pitch uniformity
KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
CN106714903B (zh) 2014-09-11 2020-12-18 皇家飞利浦有限公司 宽带过身体超声通信系统
JP6684817B2 (ja) 2014-11-25 2020-04-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び方法
CN106999984B (zh) * 2014-12-11 2019-06-28 皇家飞利浦有限公司 两端子cmut设备
US11358174B2 (en) * 2015-03-03 2022-06-14 Koninklijke Philips N.V. CMUT array comprising an acoustic window layer
CN104907241B (zh) * 2015-06-17 2017-10-10 河南大学 满足多频率需求的宽频带超声换能器复合机构
WO2017001636A1 (en) 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US11766237B2 (en) 2015-07-02 2023-09-26 Philips Image Guided Therapy Corporation Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities
US9997425B2 (en) 2015-07-14 2018-06-12 University Of Windsor Layered benzocyclobutene interconnected circuit and method of manufacturing same
US11097312B2 (en) 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
WO2017025856A1 (en) 2015-08-11 2017-02-16 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with overcurrent protection
EP3334539B1 (de) 2015-08-11 2023-06-14 Koninklijke Philips N.V. Mikrobearbeitete kapazitive ultraschallwandler mit erhöhter patientensicherheit
WO2017027789A1 (en) 2015-08-12 2017-02-16 Sonectics Ultrasound, Inc. Method and system for measuring pressure using ultrasound
WO2017042304A1 (en) 2015-09-10 2017-03-16 Koninklijke Philips N.V. An ultrasound system with wide depth and detailed viewing
DE102015221193B4 (de) * 2015-10-29 2018-05-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Steuerung einer Intensität eines transmittierenden Anteils von auf die Vorrichtung einfallender elektromagnetischer Strahlung und Verfahren zur Herstellung der Vorrichtung
WO2017076758A1 (en) 2015-11-02 2017-05-11 Koninklijke Philips N.V. An ultrasound system for providing ultrasound images at variable frequencies of a volumetric region comprising an interferer analyzer
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
WO2017149421A1 (en) 2016-03-03 2017-09-08 Koninklijke Philips N.V. Ultrasonic cmut transducer array with improved depth of field
WO2017182416A1 (en) 2016-04-19 2017-10-26 Koninklijke Philips N.V. Ultrasound transducer positioning
WO2017182344A1 (en) 2016-04-19 2017-10-26 Koninklijke Philips N.V. Ultrasound transducer positioning
WO2017186796A1 (en) 2016-04-26 2017-11-02 Koninklijke Philips N.V. Cmut transducer array with impedance matching lens
EP3448261B1 (de) 2016-04-26 2020-06-10 Koninklijke Philips N.V. Ultraschallvorrichtungskontaktierung
JP6873156B2 (ja) 2016-04-26 2021-05-19 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 接触する超音波装置
CN109890296B (zh) 2016-10-27 2022-05-27 皇家飞利浦有限公司 具有组织类型分析器的超声系统
CN110325293B (zh) 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
US10814493B2 (en) * 2017-01-12 2020-10-27 Robotiq Inc. Tactile sensor and a method of manufacturing thereof
EP3366221A1 (de) 2017-02-28 2018-08-29 Koninklijke Philips N.V. Intelligentes ultraschallsystem
US10196261B2 (en) 2017-03-08 2019-02-05 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US10284963B2 (en) * 2017-03-28 2019-05-07 Nanofone Ltd. High performance sealed-gap capacitive microphone
TW201908021A (zh) 2017-06-21 2019-03-01 美商蝴蝶網路公司 具有電性隔離的電極部分的個別單元的微加工超音波換能器
CN111742199B (zh) * 2017-12-19 2023-01-06 大不列颠哥伦比亚大学 分层结构及其制造方法
KR20210005208A (ko) * 2018-05-03 2021-01-13 버터플라이 네트워크, 인크. Cmos 센서 상의 초음파 트랜스듀서를 위한 압력 포트
US12303324B2 (en) 2018-05-31 2025-05-20 Faction Imaging Inc. Method of medical imaging using multiple arrays
CN108982291B (zh) * 2018-07-09 2020-05-22 西安交通大学 一种梳齿式CMUTs流体密度传感器及其制备方法
CN113316486B (zh) 2018-11-16 2022-10-18 维蒙股份公司 电容式微机械超声换能器及其制造方法
EP3733309A1 (de) * 2019-04-30 2020-11-04 Koninklijke Philips N.V. Kapazitive mikrobearbeitete ultraschallwandler (cmut)-vorrichtungen
EP3858498A1 (de) 2020-02-03 2021-08-04 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Ultraschallwandler mit gestapelten membranen
KR102253210B1 (ko) * 2020-08-06 2021-05-18 한국과학기술원 전하 포획층을 가지는 정전용량형 미세가공 초음파 트랜스듀서 및 이의 제조 방법
US12246348B2 (en) 2021-03-04 2025-03-11 BFLY Operations, Inc Capacitive Micromachined ultrasonic transducers (CMUTs) having non-uniform pedestals
TW202240165A (zh) 2021-03-04 2022-10-16 美商蝴蝶營運公司 具有柱腳的微加工超音波換能器
US20230372970A1 (en) * 2022-05-18 2023-11-23 Taiwan Semiconductor Manufacturing Co., Ltd. Transducer device and method of manufacture

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182055A (en) * 1988-04-18 1993-01-26 3D Systems, Inc. Method of making a three-dimensional object by stereolithography
US5965079A (en) * 1995-04-25 1999-10-12 3D Systems, Inc. Method and apparatus for making a three-dimensional object by stereolithography
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
US5436452A (en) * 1992-06-15 1995-07-25 California Institute Of Technology Uncooled tunneling infrared sensor
JP3136853B2 (ja) * 1993-08-16 2001-02-19 ソニー株式会社 スピーカユニット
US6049158A (en) 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
US5894452A (en) 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5542001A (en) * 1994-12-06 1996-07-30 Reiffin; Martin Smart amplifier for loudspeaker motional feedback derived from linearization of a nonlinear motion responsive signal
US5512856A (en) * 1994-12-23 1996-04-30 At&T Corp. Method and apparatus for nonlinear compensation
US5608690A (en) 1995-03-02 1997-03-04 Acuson Corporation Transmit beamformer with frequency dependent focus
US5980457A (en) * 1997-11-17 1999-11-09 Atl Ultrasound, Inc. Ultrasonic transmit pulses for nonlinear ultrasonic imaging
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
US6115326A (en) * 1998-10-22 2000-09-05 Integrated Medical Systems, Inc. Ultrasonic micro-machined selectable transducer array

Also Published As

Publication number Publication date
JP5192114B2 (ja) 2013-05-08
JP2004503313A (ja) 2004-02-05
WO2001097562A2 (en) 2001-12-20
EP1294494A2 (de) 2003-03-26
WO2001097562A3 (en) 2002-04-18
US6443901B1 (en) 2002-09-03
US6632178B1 (en) 2003-10-14
EP1294494B1 (de) 2010-11-03
DE60143391D1 (de) 2010-12-16
US6328696B1 (en) 2001-12-11
US6328697B1 (en) 2001-12-11

Similar Documents

Publication Publication Date Title
ATE486668T1 (de) Kapazitiver mikrobearbeiteter ultraschallwandler und zugehöriges betriebsverfahren
WO2001097559A3 (en) Capacitive micromachined ultrasonic transducers.
WO2001023105A8 (en) An array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
ES2194156T3 (es) Perceptor ultrasonico de velocidad de flujo y metodo para medir la velocidad de un flujo de fluido.
DK265388A (da) Akustisk transducer med forbedret elektrodeafstand
IT1229874B (it) Procedimento per migliorare il trasporto di materia ad un elettrodo in una cella a diaframma e mezzi idrodinamici relativi.
FR2648277B1 (fr) Batterie d'accumulateurs au plomb etanche, a electrodes bipolaires
FI922655A0 (fi) Foerfarande foer framstaellning av av faktor beroende human b-cell-linjer.
ATE19303T1 (de) Lagerstatt fuer einen patienten mit piezoelektrischen kraftsignalgeber.
GB1293670A (en) Improvements in or relating to electro-acoustical transducers
JPS5535558A (en) Sounding material
WO1989004581A1 (en) Electro-acoustic transducers
MY135700A (en) Surface acoustic wave device
JPS52102494A (en) Cell culturing device
JPS56152399A (en) Transparent plane plate speaker
JPS5797300A (en) Ultrasonic prober
CN204958928U (zh) 一种智能生物培养皿
SU1835913A1 (ru) Интегральный полупроводниковый преобразователь давления и способ его изготовления
JPS57191547A (en) Ultrasonic probe
JPS55123297A (en) Composite vibrator
JPS55137800A (en) Piezo-electric electroacoustic transducer
JPS57108712A (en) Flow rate detecting element
JPS57136898A (en) Dynamic type speaker
JPS5252983A (en) Resin compositions for fixing physiologically active substances
JPS5574299A (en) Piezoelectric speaker

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties