ATE360597T1 - Ventil zur verwendung in mikrofluiden strukturen - Google Patents
Ventil zur verwendung in mikrofluiden strukturenInfo
- Publication number
- ATE360597T1 ATE360597T1 AT03707678T AT03707678T ATE360597T1 AT E360597 T1 ATE360597 T1 AT E360597T1 AT 03707678 T AT03707678 T AT 03707678T AT 03707678 T AT03707678 T AT 03707678T AT E360597 T1 ATE360597 T1 AT E360597T1
- Authority
- AT
- Austria
- Prior art keywords
- valve
- fluid
- aperture
- flow
- relatively
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 7
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
- F16K2099/0088—Implanted devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2191—By non-fluid energy field affecting input [e.g., transducer]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2202—By movable element
- Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Fluid Mechanics (AREA)
- Micromachines (AREA)
- Temperature-Responsive Valves (AREA)
- Flow Control (AREA)
- Fluid-Driven Valves (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Lift Valve (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/075,416 US6561224B1 (en) | 2002-02-14 | 2002-02-14 | Microfluidic valve and system therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE360597T1 true ATE360597T1 (de) | 2007-05-15 |
Family
ID=22125583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03707678T ATE360597T1 (de) | 2002-02-14 | 2003-02-03 | Ventil zur verwendung in mikrofluiden strukturen |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6561224B1 (de) |
| EP (1) | EP1476393B1 (de) |
| JP (1) | JP4199127B2 (de) |
| AT (1) | ATE360597T1 (de) |
| AU (1) | AU2003208953B2 (de) |
| CA (1) | CA2475805A1 (de) |
| DE (1) | DE60313435T2 (de) |
| ES (1) | ES2285102T3 (de) |
| WO (1) | WO2003068670A2 (de) |
Families Citing this family (58)
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| US6561479B1 (en) * | 2000-08-23 | 2003-05-13 | Micron Technology, Inc. | Small scale actuators and methods for their formation and use |
| WO2003017301A1 (en) * | 2001-08-20 | 2003-02-27 | Honeywell International Inc. | Snap action thermal switch |
| US20070065808A1 (en) * | 2002-04-17 | 2007-03-22 | Cytonome, Inc. | Method and apparatus for sorting particles |
| US6808075B2 (en) | 2002-04-17 | 2004-10-26 | Cytonome, Inc. | Method and apparatus for sorting particles |
| US6877528B2 (en) * | 2002-04-17 | 2005-04-12 | Cytonome, Inc. | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
| US6976590B2 (en) | 2002-06-24 | 2005-12-20 | Cytonome, Inc. | Method and apparatus for sorting particles |
| US9943847B2 (en) | 2002-04-17 | 2018-04-17 | Cytonome/St, Llc | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
| US7867193B2 (en) * | 2004-01-29 | 2011-01-11 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
| TW553734B (en) * | 2002-11-18 | 2003-09-21 | Rossmax Int Ltd | Air pressure adjustment device |
| US20080257754A1 (en) * | 2003-06-27 | 2008-10-23 | Pugia Michael J | Method and apparatus for entry of specimens into a microfluidic device |
| EP1498795A1 (de) * | 2003-07-17 | 2005-01-19 | Rossmax International LTD. | Druckregelvorrichtung |
| US7315109B1 (en) * | 2003-08-15 | 2008-01-01 | Medrad, Inc. | Actuators and fluid delivery systems using such actuators |
| US20050129568A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Environmental system including a micromechanical dispensing device |
| US20050127207A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Micromechanical dispensing device and a dispensing system including the same |
| US20050127206A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Device and system for dispensing fluids into the atmosphere |
| US20050130747A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Video game system including a micromechanical dispensing device |
| US7100453B2 (en) * | 2003-12-30 | 2006-09-05 | Honeywell International Inc. | Modified dual diaphragm pressure sensor |
| US7867194B2 (en) | 2004-01-29 | 2011-01-11 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
| TWI547431B (zh) * | 2004-06-09 | 2016-09-01 | 史密斯克萊美占公司 | 生產藥物之裝置及方法 |
| US20060002594A1 (en) * | 2004-06-09 | 2006-01-05 | Clarke Allan J | Method for producing a pharmaceutical product |
| US8101244B2 (en) * | 2004-06-09 | 2012-01-24 | Smithkline Beecham Corporation | Apparatus and method for producing or processing a product or sample |
| US20060002986A1 (en) * | 2004-06-09 | 2006-01-05 | Smithkline Beecham Corporation | Pharmaceutical product |
| US20060018795A1 (en) * | 2004-07-23 | 2006-01-26 | General Electric Company | Fabrication methods and multifunctional substrate materials for chemical and biological analysis in microfluidic systems |
| US9260693B2 (en) | 2004-12-03 | 2016-02-16 | Cytonome/St, Llc | Actuation of parallel microfluidic arrays |
| US8172375B2 (en) * | 2004-12-17 | 2012-05-08 | Brother Kogyo Kabushiki Kaisha | Valve and actuator employing capillary electrowetting phenomenon |
| US7328882B2 (en) * | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
| US20060153745A1 (en) * | 2005-01-11 | 2006-07-13 | Applera Corporation | Fluid processing device for oligonucleotide synthesis and analysis |
| US7540469B1 (en) | 2005-01-25 | 2009-06-02 | Sandia Corporation | Microelectromechanical flow control apparatus |
| US20060245933A1 (en) * | 2005-05-02 | 2006-11-02 | General Electric Company | Valve and pump for microfluidic systems and methods for fabrication |
| JP2007239737A (ja) * | 2006-02-13 | 2007-09-20 | Nidec Sankyo Corp | ミキシングポンプ装置および燃料電池 |
| JP5260836B2 (ja) * | 2006-02-15 | 2013-08-14 | パナソニック株式会社 | 燃料電池システム |
| US7505110B2 (en) * | 2006-03-14 | 2009-03-17 | International Business Machines Corporation | Micro-electro-mechanical valves and pumps |
| US7598091B2 (en) * | 2006-04-04 | 2009-10-06 | Micropoint Bioscience, Inc. | Micromachined diagnostic device with controlled flow of fluid and reaction |
| US7632698B2 (en) | 2006-05-16 | 2009-12-15 | Freescale Semiconductor, Inc. | Integrated circuit encapsulation and method therefor |
| KR100904310B1 (ko) | 2006-06-12 | 2009-06-23 | 신병철 | 비전도성유체 내에서 밀도차에 의한 위치에너지를 갖는전도성액체의 이동을 일렉트로웨팅으로 통제하는 방법 및그에 따른 게이트 장치 |
| US7959876B2 (en) * | 2006-07-17 | 2011-06-14 | Industrial Technology Research Institute | Fluidic device |
| US20080021364A1 (en) * | 2006-07-17 | 2008-01-24 | Industrial Technology Research Institute | Fluidic device |
| US7794665B2 (en) * | 2006-07-17 | 2010-09-14 | Industrial Technology Research Institute | Fluidic device |
| US20080061163A1 (en) * | 2006-08-28 | 2008-03-13 | Xerox Corporation | Device and system for dispensing fluids into the atmosphere |
| WO2008094672A2 (en) | 2007-01-31 | 2008-08-07 | Charles Stark Draper Laboratory, Inc. | Membrane-based fluid control in microfluidic devices |
| WO2008124046A1 (en) | 2007-04-04 | 2008-10-16 | Micropoint Bioscience Inc.. | Micromachined electrowetting microfluidic valve |
| US8622987B2 (en) * | 2008-06-04 | 2014-01-07 | The University Of Chicago | Chemistrode, a plug-based microfluidic device and method for stimulation and sampling with high temporal, spatial, and chemical resolution |
| US8703358B2 (en) * | 2008-11-20 | 2014-04-22 | Mti Microfuel Cells, Inc. | Fuel cell feed systems |
| US20100122733A1 (en) * | 2008-11-20 | 2010-05-20 | Mti Microfuel Cells, Inc. | Pressure biased micro-fluidic valve |
| WO2012036627A1 (en) * | 2010-09-17 | 2012-03-22 | Agency For Science, Technology And Research | A microfluidic device for altering a fluid flow and a microfluidic system including the microfluidic device |
| CA2825757C (en) | 2011-02-02 | 2019-09-03 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
| CN105008895B (zh) | 2012-10-15 | 2019-02-15 | 纳诺赛莱克特生物医药股份有限公司 | 颗粒分选的系统、设备和方法 |
| EP2972185A4 (de) | 2013-03-14 | 2017-02-22 | The Board of Trustees of The Leland Stanford Junior University | Kapillarbarrieren zum stufenweisen laden von mikrofluidvorrichtungen |
| CN105940249B (zh) | 2014-01-29 | 2018-05-29 | 惠普发展公司,有限责任合伙企业 | 微流体阀 |
| NL2014801B1 (en) * | 2015-05-13 | 2017-01-27 | Berkin Bv | Fluid flow device, comprising a valve unit, as well as method of manufacturing the same. |
| EP3408389B1 (de) | 2016-01-29 | 2021-03-10 | Purigen Biosystems, Inc. | Isotachophorese zur reinigung von nukleinsäuren |
| US11454563B2 (en) * | 2016-08-05 | 2022-09-27 | Encite Llc | Micro pressure sensor |
| US11982611B2 (en) | 2017-03-20 | 2024-05-14 | Nanocellect Biomedical, Inc. | Systems, apparatuses, and methods for cell sorting and flow cytometry |
| CA3071816A1 (en) | 2017-08-02 | 2019-02-07 | Purigen Biosystems, Inc. | Systems, devices, and methods for isotachophoresis |
| TWI636775B (zh) * | 2017-10-27 | 2018-10-01 | 研能科技股份有限公司 | 微型泵浦 |
| US11198125B1 (en) | 2019-02-19 | 2021-12-14 | Facebook Technologies, Llc | Microfluidic valves, systems, and related methods |
| US11084031B1 (en) | 2019-02-19 | 2021-08-10 | Facebook Technologies, Llc | Methods of fabricating microfluidic valves and systems |
| EP3845790B1 (de) | 2019-12-30 | 2024-04-17 | Imec VZW | Mikrofluidische vorrichtung zur steuerung von pneumatischen mikroventilen |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417786A (en) | 1981-02-19 | 1983-11-29 | Bell Telephone Laboratories, Incorporated | Devices based on surface tension changes |
| US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
| US5082242A (en) * | 1989-12-27 | 1992-01-21 | Ulrich Bonne | Electronic microvalve apparatus and fabrication |
| US5271724A (en) * | 1990-08-31 | 1993-12-21 | Westonbridge International Limited | Valve equipped with a position detector and a micropump incorporating said valve |
| DE4119955C2 (de) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniatur-Betätigungselement |
| US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
| JP3005972B2 (ja) | 1992-05-19 | 2000-02-07 | 株式会社 セル・コーポレーション | 閾動作式半導体型静電力装置 |
| US6227809B1 (en) | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
| SE9502258D0 (sv) | 1995-06-21 | 1995-06-21 | Pharmacia Biotech Ab | Method for the manufacture of a membrane-containing microstructure |
| US6048734A (en) | 1995-09-15 | 2000-04-11 | The Regents Of The University Of Michigan | Thermal microvalves in a fluid flow method |
| ATE174406T1 (de) | 1995-09-15 | 1998-12-15 | Hahn Schickard Ges | Rückschlagventillose fluidpumpe |
| DE19546570C1 (de) | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
| US5810325A (en) * | 1996-06-25 | 1998-09-22 | Bcam International, Inc. | Microvalve |
| US6136212A (en) | 1996-08-12 | 2000-10-24 | The Regents Of The University Of Michigan | Polymer-based micromachining for microfluidic devices |
| US6143248A (en) | 1996-08-12 | 2000-11-07 | Gamera Bioscience Corp. | Capillary microvalve |
| US5971355A (en) | 1996-11-27 | 1999-10-26 | Xerox Corporation | Microdevice valve structures to fluid control |
| IL120858A (en) * | 1997-05-19 | 2001-01-11 | Q Core Ltd | Magnetic flow controller |
| US6073482A (en) | 1997-07-21 | 2000-06-13 | Ysi Incorporated | Fluid flow module |
| US6106245A (en) | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
| US6098661A (en) * | 1997-12-19 | 2000-08-08 | Xerox Corporation | Unstable flap valve for fluid flow control |
| US6126140A (en) | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
| US6056269A (en) | 1999-01-15 | 2000-05-02 | Hewlett-Packard Company | Microminiature valve having silicon diaphragm |
| DE60031540T2 (de) * | 1999-06-28 | 2007-05-16 | California Institute Of Technology, Pasadena | Mikromechanische pump- und ventilsysteme |
-
2002
- 2002-02-14 US US10/075,416 patent/US6561224B1/en not_active Expired - Fee Related
-
2003
- 2003-02-03 JP JP2003567814A patent/JP4199127B2/ja not_active Expired - Fee Related
- 2003-02-03 AU AU2003208953A patent/AU2003208953B2/en not_active Ceased
- 2003-02-03 EP EP03707678A patent/EP1476393B1/de not_active Expired - Lifetime
- 2003-02-03 ES ES03707678T patent/ES2285102T3/es not_active Expired - Lifetime
- 2003-02-03 DE DE2003613435 patent/DE60313435T2/de not_active Expired - Fee Related
- 2003-02-03 WO PCT/US2003/003154 patent/WO2003068670A2/en not_active Ceased
- 2003-02-03 AT AT03707678T patent/ATE360597T1/de not_active IP Right Cessation
- 2003-02-03 CA CA 2475805 patent/CA2475805A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CA2475805A1 (en) | 2003-08-21 |
| ES2285102T3 (es) | 2007-11-16 |
| JP2005525514A (ja) | 2005-08-25 |
| WO2003068670A2 (en) | 2003-08-21 |
| JP4199127B2 (ja) | 2008-12-17 |
| EP1476393A2 (de) | 2004-11-17 |
| AU2003208953A1 (en) | 2003-09-04 |
| AU2003208953B2 (en) | 2008-12-11 |
| US6561224B1 (en) | 2003-05-13 |
| EP1476393B1 (de) | 2007-04-25 |
| WO2003068670A3 (en) | 2004-07-01 |
| DE60313435D1 (de) | 2007-06-06 |
| DE60313435T2 (de) | 2008-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |