[go: up one dir, main page]

NO20035669D0 - Kvartsglassdigel og fremgangsmåte for fremstilling derav - Google Patents

Kvartsglassdigel og fremgangsmåte for fremstilling derav

Info

Publication number
NO20035669D0
NO20035669D0 NO20035669A NO20035669A NO20035669D0 NO 20035669 D0 NO20035669 D0 NO 20035669D0 NO 20035669 A NO20035669 A NO 20035669A NO 20035669 A NO20035669 A NO 20035669A NO 20035669 D0 NO20035669 D0 NO 20035669D0
Authority
NO
Norway
Prior art keywords
manufacture
quartz glass
glass crucible
crucible
quartz
Prior art date
Application number
NO20035669A
Other languages
English (en)
Inventor
Gabriele Korus
Hilmar Laudahn
Martin Arndt
Manfred Schwarzbauer
Original Assignee
Wacker Siltronic Halbleitermat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic Halbleitermat filed Critical Wacker Siltronic Halbleitermat
Publication of NO20035669D0 publication Critical patent/NO20035669D0/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0009—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing silica as main constituent
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/54—Doped silica-based glasses containing metals containing beryllium, magnesium or alkaline earth metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
NO20035669A 2002-04-22 2003-12-18 Kvartsglassdigel og fremgangsmåte for fremstilling derav NO20035669D0 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10217946A DE10217946A1 (de) 2002-04-22 2002-04-22 Quarzglastiegel und Verfahren zur Herstellung desselben
PCT/EP2003/003459 WO2003089693A1 (de) 2002-04-22 2003-04-03 Quarzglastiegel und verfahren zur herstellung desselben

Publications (1)

Publication Number Publication Date
NO20035669D0 true NO20035669D0 (no) 2003-12-18

Family

ID=29224657

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20035669A NO20035669D0 (no) 2002-04-22 2003-12-18 Kvartsglassdigel og fremgangsmåte for fremstilling derav

Country Status (10)

Country Link
US (1) US7226508B2 (no)
EP (1) EP1497484B8 (no)
JP (1) JP4430949B2 (no)
KR (1) KR100818679B1 (no)
CN (1) CN1316073C (no)
AU (1) AU2003229599A1 (no)
DE (2) DE10217946A1 (no)
NO (1) NO20035669D0 (no)
TW (1) TWI261634B (no)
WO (1) WO2003089693A1 (no)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005255488A (ja) * 2004-03-12 2005-09-22 Komatsu Electronic Metals Co Ltd 石英るつぼおよび石英るつぼを用いた半導体単結晶製造方法
US7497907B2 (en) * 2004-07-23 2009-03-03 Memc Electronic Materials, Inc. Partially devitrified crucible
JP2006213556A (ja) * 2005-02-02 2006-08-17 Japan Siper Quarts Corp シリコン単結晶引上げ用石英ガラスルツボとその製造方法、および取り出し方法
DE102005047112A1 (de) * 2005-09-30 2007-04-05 Wacker Chemie Ag In Teilbereichen oder vollständig verglaster amorpher SiO2-Formkörper, der bei höheren Temperaturen im verglasten Bereich kristallin wird, Verfahren zu seiner Herstellung und Verwendung
US20070084400A1 (en) * 2005-10-19 2007-04-19 General Electric Company Quartz glass crucible and method for treating surface of quartz glass crucible
EP1811064A1 (fr) 2006-01-12 2007-07-25 Vesuvius Crucible Company Creuset pour le traitement de silicium à l'état fondu
TWI408259B (zh) * 2006-09-28 2013-09-11 Shinetsu Quartz Prod 具有鋇摻雜內壁的矽玻璃坩堝
JP4717771B2 (ja) * 2006-09-28 2011-07-06 コバレントマテリアル株式会社 シリカガラスルツボ
US9139932B2 (en) * 2006-10-18 2015-09-22 Richard Lee Hansen Quartz glass crucible and method for treating surface of quartz glass crucible
US7716948B2 (en) 2006-12-18 2010-05-18 Heraeus Shin-Etsu America, Inc. Crucible having a doped upper wall portion and method for making the same
JP5234526B2 (ja) * 2008-02-29 2013-07-10 株式会社Ｓｕｍｃｏ シリコン単結晶引上げ用石英ルツボ及びその製造方法
DE102008030310B3 (de) * 2008-06-30 2009-06-18 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglastiegels
US8163083B2 (en) * 2008-07-09 2012-04-24 Japan Super Quartz Corporation Silica glass crucible and method for pulling up silicon single crystal using the same
ATE553235T1 (de) * 2008-07-10 2012-04-15 Japan Super Quartz Corp Verfahren zum hochziehen von siliziumeinkristallen unter verwendung von quarzglastiegeln.
DE102008061871B4 (de) * 2008-12-15 2012-10-31 Heraeus Quarzglas Gmbh & Co. Kg Schmelztiegel für den Einsatz in einem Tiegelziehverfahren für Quarzglas
EP2460911B1 (en) * 2009-07-31 2014-04-16 Japan Super Quartz Corporation Silica glass crucible for pulling of silicon single crystal
JP5191003B2 (ja) * 2009-09-28 2013-04-24 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボ
WO2011063795A1 (de) 2009-11-24 2011-06-03 Forschungsverbund Berlin E. V. Verfahren und vorrichtung zur herstellung von einkristallen aus halbleitermaterial
CN101811832B (zh) * 2010-05-10 2012-10-03 宁波宝斯达坩埚保温制品有限公司 石英坩埚内表面处理工艺
JP5344767B2 (ja) * 2010-06-21 2013-11-20 信越石英株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP5517868B2 (ja) * 2010-09-29 2014-06-11 コバレントマテリアル株式会社 シリカガラスルツボ
CN102031488A (zh) * 2010-12-23 2011-04-27 福建福晶科技股份有限公司 一种提高膜层损伤阈值的坩埚
CN102061515B (zh) * 2011-01-06 2012-10-10 杭州先进石英材料有限公司 一种石英玻璃坩埚及其制备方法
JP5741163B2 (ja) * 2011-04-11 2015-07-01 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
US20130087094A1 (en) * 2011-10-05 2013-04-11 Siemens Medical Solutions Usa, Inc. Composite Crucible For Crystal Growth
JP5762945B2 (ja) * 2011-12-30 2015-08-12 株式会社Sumco シリカガラスルツボ
CN105239159A (zh) * 2015-09-10 2016-01-13 上海超硅半导体有限公司 直拉法生长单晶硅用石英坩埚的设计及制备方法
WO2017165128A1 (en) * 2016-03-23 2017-09-28 Momentive Performance Materials Inc. Devitrification agent for quartz glass crucible crystal growing process
CN107604437A (zh) * 2016-07-12 2018-01-19 上海新昇半导体科技有限公司 在石英坩埚中制备硅熔融体的方法
SG11201811126SA (en) 2016-09-23 2019-01-30 Sumco Corp Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal using quartz glass crucible
CN106591942B (zh) * 2016-12-30 2019-06-11 江西赛维Ldk太阳能高科技有限公司 多晶硅铸锭用坩埚及其制备方法和多晶硅锭及其制备方法
WO2018203454A1 (ja) 2017-05-02 2018-11-08 株式会社Sumco 石英ガラスルツボ及びその製造方法
EP3428132B1 (de) * 2017-07-10 2023-08-30 Heraeus Quarzglas GmbH & Co. KG Quarzglasbauteil mit hoher thermischer stabilität, halbzeug dafür und verfahren zur herstellung desselben
WO2019163593A1 (ja) * 2018-02-23 2019-08-29 株式会社Sumco 石英ガラスルツボ
JP7349779B2 (ja) * 2018-08-09 2023-09-25 信越石英株式会社 石英ガラスるつぼ
KR102243264B1 (ko) * 2018-12-13 2021-04-21 쿠어스택 가부시키가이샤 실리카 유리 도가니 및 그의 제조 방법
WO2021140729A1 (ja) * 2020-01-10 2021-07-15 株式会社Sumco 石英ガラスルツボ
DE102020000701A1 (de) 2020-02-03 2021-08-05 Siltronic Ag Quarzglastiegel zur Herstellung von Siliciumkristallen und Verfahren zur Herstellung von Quarzglastiegel
CN112210676A (zh) * 2020-10-19 2021-01-12 重庆国际复合材料股份有限公司 一种电磁感应发热复合坩埚
JP7673758B2 (ja) 2020-12-18 2025-05-09 株式会社Sumco 石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
CN120829242B (zh) * 2025-09-17 2025-12-05 华陆工程科技有限责任公司 一种石英坩埚及其制备方法和单晶炉

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102666A (en) * 1968-02-22 1978-07-25 Heraeus-Schott Quarzschmelze Gmbh Method of surface crystallizing quartz
US5389582A (en) * 1985-11-06 1995-02-14 Loxley; Ted A. Cristobalite reinforcement of quartz glass
US5976247A (en) * 1995-06-14 1999-11-02 Memc Electronic Materials, Inc. Surface-treated crucibles for improved zero dislocation performance
US5968259A (en) * 1997-08-27 1999-10-19 Shin-Etsu Quartz Products Co., Ltd. High-purity quartz glass and method for the preparation thereof
EP0911429A1 (en) 1997-09-30 1999-04-28 Heraeus Quarzglas GmbH Quartz glass crucible for producing silicon single crystal and method for producing the crucible
US6187089B1 (en) * 1999-02-05 2001-02-13 Memc Electronic Materials, Inc. Tungsten doped crucible and method for preparing same
DE19917288C2 (de) * 1999-04-16 2001-06-28 Heraeus Quarzglas Quarzglas-Tiegel
DE19962449C2 (de) * 1999-12-22 2003-09-25 Heraeus Quarzglas Quarzglastiegel und Verfahren für seine Herstellung
DE10041582B4 (de) * 2000-08-24 2007-01-18 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel sowie Verfahren zur Herstellung desselben
US6755049B2 (en) * 2001-03-08 2004-06-29 Heraeus Quarzglas Gmbh & Co. Kg Method of producing a quartz glass crucible

Also Published As

Publication number Publication date
AU2003229599A8 (en) 2003-11-03
CN1662680A (zh) 2005-08-31
EP1497484B1 (de) 2007-01-03
US7226508B2 (en) 2007-06-05
KR20050005454A (ko) 2005-01-13
JP4430949B2 (ja) 2010-03-10
AU2003229599A1 (en) 2003-11-03
DE50306189D1 (de) 2007-02-15
WO2003089693A1 (de) 2003-10-30
TW200400284A (en) 2004-01-01
DE10217946A1 (de) 2003-11-13
US20050178319A1 (en) 2005-08-18
EP1497484A1 (de) 2005-01-19
EP1497484B8 (de) 2007-06-13
TWI261634B (en) 2006-09-11
CN1316073C (zh) 2007-05-16
KR100818679B1 (ko) 2008-04-01
JP2005523229A (ja) 2005-08-04

Similar Documents

Publication Publication Date Title
NO20035669D0 (no) Kvartsglassdigel og fremgangsmåte for fremstilling derav
NO20041298L (no) Kvartsglassdigel for trekking av silisiumenkeltkrystall og fremgangsmate for fremstilling derav
NO20034212L (no) Kvartsglasskomponent og fremstilling derav
NO20035391D0 (no) Glassforsterket gipsplate og fremgangsmåte for fremstilling
EP1408015B8 (en) Quartz glass crucible, its process of manufacture and use
DK1458564T3 (da) Fremgangsmåde og apparat til fremstilling af glas
DK1657246T3 (da) Fremgangsmåde til forbedring af renhed og udbytte af sucralose
NO20006376L (no) Kvartsdigler og deres fremstilling
NO20044148L (no) Sammensetning og fremgangsmate for bronnrensing
DK1667986T3 (da) Acetonesolvat af dimethoxydocetaxel og fremgangsmåde til fremstilling heraf
DE502004005867D1 (de) Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
DK1127854T3 (da) Flint/ravgul lamineret glasbeholder og fremgangsmåde til fremstilling heraf
NO20033746L (no) Fremgangsmåte og blanding for syrebehandling av en underjordisk formasjon
NO20020936L (no) Fremgangsmåte for fremstilling av rotasjonssymmetrisk kvartssmeltedigel og anordning for utföring av fremgangsmåten
DE60317417D1 (de) Reformierverfahren eines Quarzglastiegels
NO20042012L (no) Sammensetning og fremgangsmate for behandling av diabetes
NO20030843D0 (no) Anordning og fremgangsmåte for kultivering
NO20033920L (no) Fremgangsmåte for fremstilling av en kvartsglassdigel
EP1623963A4 (en) METHOD FOR PRODUCING SILICATED GLASS AND SILICATED GLASS
EP1649758A4 (en) CHUCKLES AND METHOD FOR THEIR MANUFACTURE
EP1403001A4 (en) GRINDING FOIL AND MANUFACTURING METHOD THEREFOR
DK1266870T3 (da) Form til formning af glasvarer og fremgangsmåde til fremstilling
NO20052188D0 (no) System og fremgangsmate for fremstilling av polysulfid
AU2003242057A1 (en) Glass and method for production of glass
EP1321439A3 (en) Optical quartz glass as well as method and furnace for producing it

Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application