[go: up one dir, main page]

NL6709464A - - Google Patents

Info

Publication number
NL6709464A
NL6709464A NL6709464A NL6709464A NL6709464A NL 6709464 A NL6709464 A NL 6709464A NL 6709464 A NL6709464 A NL 6709464A NL 6709464 A NL6709464 A NL 6709464A NL 6709464 A NL6709464 A NL 6709464A
Authority
NL
Netherlands
Application number
NL6709464A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6709464A publication Critical patent/NL6709464A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
NL6709464A 1966-07-13 1967-07-07 NL6709464A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US564811A US3360600A (en) 1966-07-13 1966-07-13 Vapor source assembly

Publications (1)

Publication Number Publication Date
NL6709464A true NL6709464A (en) 1968-01-15

Family

ID=24255989

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6709464A NL6709464A (en) 1966-07-13 1967-07-07

Country Status (10)

Country Link
US (1) US3360600A (en)
AT (1) AT294511B (en)
BE (1) BE701306A (en)
CH (1) CH463232A (en)
ES (1) ES342858A1 (en)
GB (1) GB1151126A (en)
LU (1) LU53955A1 (en)
NL (1) NL6709464A (en)
NO (1) NO127425B (en)
SE (1) SE335269B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3613633A (en) * 1970-03-18 1971-10-19 Schjeldahl Co G T Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
DE2519537C2 (en) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Electron beam device for heating, melting and evaporation purposes with deflection systems
DE3228311C2 (en) * 1982-07-29 1984-07-05 Leybold-Heraeus GmbH, 5000 Köln Evaporation crucible for vacuum evaporation systems
KR101785562B1 (en) * 2010-10-18 2017-10-18 삼성디스플레이 주식회사 Thin film depositing apparatus for continuous depositing and mask unit and crucible unit included in the thin film depositing apparatus

Also Published As

Publication number Publication date
LU53955A1 (en) 1967-08-28
DE1621203B2 (en) 1972-12-28
DE1621203A1 (en) 1971-06-03
AT294511B (en) 1971-11-25
BE701306A (en) 1967-12-18
GB1151126A (en) 1969-05-07
SE335269B (en) 1971-05-17
US3360600A (en) 1967-12-26
CH463232A (en) 1968-09-30
NO127425B (en) 1973-06-18
ES342858A1 (en) 1968-08-16

Similar Documents

Publication Publication Date Title
AU428063B2 (en)
AU424443B2 (en)
BE689977A (en)
AU433222B2 (en)
AU417216B2 (en)
AU421822B2 (en)
AU1144366A (en)
AU6703465A (en)
BE675084A (en)
BE701306A (en)
BE693264A (en)
BE693101A (en)
BE692789A (en)
BE692390A (en)
BE692108A (en)
BE691992A (en)
BE688809A (en)
BE688470A (en)
BE683213A (en)
BE677885A (en)
BE675173A (en)
BE675139A (en)
BE693856A (en)
BE674987A (en)
BE674882A (en)