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MX352535B - Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma. - Google Patents

Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma.

Info

Publication number
MX352535B
MX352535B MX2015014529A MX2015014529A MX352535B MX 352535 B MX352535 B MX 352535B MX 2015014529 A MX2015014529 A MX 2015014529A MX 2015014529 A MX2015014529 A MX 2015014529A MX 352535 B MX352535 B MX 352535B
Authority
MX
Mexico
Prior art keywords
electrode
plasma
stream
process gas
effective area
Prior art date
Application number
MX2015014529A
Other languages
English (en)
Other versions
MX2015014529A (es
Inventor
Hähnel Marcel
Original Assignee
Tesa Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesa Se filed Critical Tesa Se
Publication of MX2015014529A publication Critical patent/MX2015014529A/es
Publication of MX352535B publication Critical patent/MX352535B/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32807—Construction (includes replacing parts of the apparatus)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • B05D3/144—Pretreatment of polymeric substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3322—Problems associated with coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Un aparato para el tratamiento con plasma de superficies (2) con un primer electrodo (4) y un segundo electrodo (7) y una fuente de tensión alterna (6) entre el primer electrodo (4) y el segundo electrodo (7), y un campo eléctrico, que forma por lo menos entre el primer electrodo (4) y el segundo electrodo (7), un área efectiva (9), la cual está dispuesta en el frente del primer electrodo (4) y en la cual se puede colocar la superficie (2) a ser tratada, y el segundo electrodo (7) está dispuesto más cerca del área efectiva (9) que el primer electrodo (4), caracterizado porque se proporciona por lo menos un canal de gas de proceso (3) para por lo menos una corriente de gas de proceso con por lo menos una salida (5) en el primer electrodo (4) y la por lo menos una salida (5) señala en la dirección del área efectiva (9) y la por lo menos una corriente de gas de proceso tiene efecto en el campo eléctrico y el campo eléctrico convierte la por lo menos una corriente de gas de proceso en una corriente de plasma y la corriente de plasma tiene efecto sobre el área efectiva (9).
MX2015014529A 2014-10-23 2015-10-15 Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma. MX352535B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014221521.8A DE102014221521A1 (de) 2014-10-23 2014-10-23 Vorrichtung zur Plasmabehandlung von Oberflächen und ein Verfahren zum Behandeln von Oberflächen mit Plasma

Publications (2)

Publication Number Publication Date
MX2015014529A MX2015014529A (es) 2016-06-10
MX352535B true MX352535B (es) 2017-11-29

Family

ID=54292626

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015014529A MX352535B (es) 2014-10-23 2015-10-15 Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma.

Country Status (9)

Country Link
US (1) US10256080B2 (es)
EP (1) EP3012090A1 (es)
JP (1) JP2016085971A (es)
KR (1) KR20160047989A (es)
CN (1) CN105551924B (es)
CA (1) CA2907303A1 (es)
DE (1) DE102014221521A1 (es)
MX (1) MX352535B (es)
TW (1) TW201628047A (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110292896B (zh) * 2018-03-23 2020-10-27 中国科学技术大学 一种等离子体反应装置及不饱和烃的制备方法
CN112804954B (zh) * 2018-07-31 2024-06-07 莱雅公司 远离皮肤生成冷等离子体以及相关联的系统
CN114701154B (zh) * 2021-12-27 2023-12-01 南京苏曼等离子科技有限公司 高分子材料管道的内外表面连续处理装置与方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2443753A1 (fr) 1978-12-07 1980-07-04 Antoine Antoine Dispositif pour le traitement de surface par effet corona
DK0497996T3 (da) 1991-02-02 1994-05-16 Softal Elektronik Gmbh Koronabehandling af materialer
DE19532412C2 (de) * 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
JP2002151480A (ja) * 2000-07-10 2002-05-24 Sekisui Chem Co Ltd 半導体素子の処理方法及びその装置
GB0424532D0 (en) * 2004-11-05 2004-12-08 Dow Corning Ireland Ltd Plasma system
KR101192974B1 (ko) * 2004-11-05 2012-10-22 다우 코닝 아일랜드 리미티드 플라즈마 시스템
US20070104610A1 (en) * 2005-11-01 2007-05-10 Houston Edward J Plasma sterilization system having improved plasma generator
FR2918293B1 (fr) * 2007-07-06 2009-09-25 Ecole Polytechnique Etablissem Traitement de gaz par plasma de surface
DE102009025065A1 (de) * 2009-03-17 2010-09-30 Plasmatreat Gmbh Verfahren und Folie zum temporären Konservieren einer vorbehandelten Oberfläche
JP2011181238A (ja) * 2010-02-26 2011-09-15 Ngk Insulators Ltd プラズマ処理装置
KR101880622B1 (ko) * 2011-12-16 2018-07-24 한국전자통신연구원 플라즈마 젯 어셈블리 및 그를 구비하는 플라즈마 브러시
GB201215095D0 (en) * 2012-08-24 2012-10-10 Gyrus Medical Ltd Electrosurgical system

Also Published As

Publication number Publication date
CN105551924B (zh) 2019-08-09
KR20160047989A (ko) 2016-05-03
EP3012090A1 (de) 2016-04-27
CA2907303A1 (en) 2016-04-23
TW201628047A (zh) 2016-08-01
CN105551924A (zh) 2016-05-04
US20160118230A1 (en) 2016-04-28
DE102014221521A1 (de) 2016-05-12
MX2015014529A (es) 2016-06-10
US10256080B2 (en) 2019-04-09
JP2016085971A (ja) 2016-05-19

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