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WO2025237537A1 - Procédé de production d'éléments optiques - Google Patents

Procédé de production d'éléments optiques

Info

Publication number
WO2025237537A1
WO2025237537A1 PCT/EP2024/063740 EP2024063740W WO2025237537A1 WO 2025237537 A1 WO2025237537 A1 WO 2025237537A1 EP 2024063740 W EP2024063740 W EP 2024063740W WO 2025237537 A1 WO2025237537 A1 WO 2025237537A1
Authority
WO
WIPO (PCT)
Prior art keywords
structures
optical elements
optical material
micrometers
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/EP2024/063740
Other languages
German (de)
English (en)
Inventor
Martin EIBELHUBER
Robert BREYER
Mikhail BEGEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EV Group E Thallner GmbH
Original Assignee
EV Group E Thallner GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EV Group E Thallner GmbH filed Critical EV Group E Thallner GmbH
Priority to PCT/EP2024/063740 priority Critical patent/WO2025237537A1/fr
Publication of WO2025237537A1 publication Critical patent/WO2025237537A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00432—Auxiliary operations, e.g. machines for filling the moulds

Definitions

  • the present invention relates to a method for producing optical elements, in particular lenses, preferably microlenses, for the semiconductor industry.
  • coating and/or imprinting processes are used to manufacture optical elements, particularly individual microlenses.
  • lenses used for sensors or emitters were produced using reflow processes.
  • the raw material for the lenses, especially microlenses was placed in a die and the lenses were embossed.
  • the finished lens is produced using pressure and heat.
  • the optical elements are treated using post-melting processes.
  • different process steps are applied to pre-formed blanks.
  • a heat treatment is used which melts the respective lens surface.
  • the surface of a lens after heat treatment has a lower roughness and therefore a better surface quality than the surface of the lens before heat treatment.
  • lenses are manufactured using so-called reflow processes. This limits their use to thermoplastic materials. A remelting process negatively impacts the achievable surface quality of the embossed lenses.
  • Self-forming lenses are produced, in particular, on special substrates with holes, where the shape and depth of the hole determine the lower part of the lens shape.
  • drops consisting of a liquid lens material, especially diluted with solvent are individually dispensed into the holes.
  • the droplets wet the downward- or inwardly curved surface of the hole.
  • a force equilibrium develops between the lens material, the atmosphere, and the substrate, resulting in a convex curvature of the lens material extending beyond the substrate surface.
  • the upper part of the lens shape is determined by the edge of the hole. This results in a disproportionately large amount of embossing material being used through the hole, and the hole being filled with embossing compound beyond its edge. Furthermore, residues and other unwanted particles can accumulate in the holes, which is detrimental.
  • these manufacturing processes are limited to circular lenses, particularly circular biconvex lenses, since the final lens shape is determined solely by the hole's edge—in addition to the volume of the embossing material within the hole.
  • Variable lens shapes such as rectangular, are not achievable with the hole's edge alone.
  • the lenses are preferably cured using UV radiation.
  • microcontact imprinting involves transferring a coating material applied to a carrier substrate, particularly through contact with the product substrate. This transfer is partial and localized to the product substrate, specifically to the areas to be coated. When the carrier substrate is separated from the product substrate, a portion of the coating material remains and adheres to the product substrate, again specifically to the areas to be coated.
  • Microcontact imprinting is used to transfer adhesives in small quantities. According to current scientific opinion, this technology is not suitable for dispensing sufficient material for volumetric objects such as lenses.
  • the invention relates to a method for producing optical elements, in particular lenses, preferably microlenses, comprising the following steps, particularly in the following order: i) providing a support substrate with a plurality of structures, each having a contact surface for receiving liquid optical material; ii) providing an auxiliary substrate coated with the liquid optical material; iii) contacting the contact surfaces of the plurality of structures of the support substrate with the liquid optical material of the auxiliary substrate, so that the contact surfaces are wetted with the liquid optical material; iv) separating the auxiliary substrate from the support substrate, wherein the liquid optical material is at least partially transferred to the contact surfaces of the plurality of structures, wherein, after separation in step iv), the transferred liquid optical material self-aligns on the contact surfaces of the plurality of structures, so that the optical elements are produced by hardening of the self-aligned liquid optical material on the contact surfaces.
  • the invention relates to a manufacturing method for the simultaneous and parallel production of several individual optical elements, in particular microlenses
  • the method can be advantageously adapted to the specific application for particular requirements regarding the shape and form of the microlenses to be produced. Furthermore, the contact angle of the liquid optical material on the surface of the topographic structure is decisive for the respective optical element produced.
  • the necessary and predetermined volume quantities of a liquid optical material are transferred from a charged auxiliary substrate to the contact surfaces of the structures by means of microcontact imprinting, preferably with microcontact transfer. This is achieved by immersing or bringing into contact several small structures on the support substrate with an auxiliary substrate coated with the liquid optical material.
  • the liquid optical material self-aligns into a desired shape determined by the structure or the contact surface of the structure.
  • Material parameters of the liquid optical material and the desired shape after self-alignment are predefined, making the process reproducible and variable.
  • a structure and contact surface can be selected for specific viscous liquids or liquid optical materials, enabling the production of desired lens shapes and, in particular, self-aligning microlenses.
  • the auxiliary substrate can be coated over its entire surface or only in specific areas.
  • the auxiliary substrate is preferably a flexible film.
  • the effect of the self-alignment of the liquid optical material on the contact surface to a desired optical element, which only needs to be cured in the aligned shape, lies, among other things, in the geometry of the structures and the nature of the contact surface of the structures.
  • the liquid optical material can form and solidify in a droplet-like shape on the contact surface, or it can lie flat on a contact surface. Depending on its size, surface texture, and surface properties, the liquid optical material can assume any lens shape. Particularly with a small structure diameter and a large volume of liquid optical material, spherical optical elements are formed in the self-aligning direction.
  • piano-convex optical elements can be created. If the structure has a convex or outwardly curved surface shape, it is possible to produce piano-concave or convex-concave optical elements in self-alignment. Since the liquid optical material is formed depending on the size, surface texture and surface properties and especially the shape of the contact surface, any lens shapes, especially non-cylindrical lenses, can advantageously be produced in self-alignment.
  • the shape of the optical elements can be predetermined or utilized within the liquid in a self-alignment step.
  • a measure of hydrophobicity or hydrophilicity is the contact angle that forms between a test liquid droplet, especially water, and the surface being measured. Hydrophilic surfaces flatten the liquid droplet because the adhesive forces between the liquid and the surface dominate over the cohesive forces of the liquid, resulting in low contact angles. Hydrophobic surfaces lead to a more spherical shape of the liquid droplet because the cohesive forces of the liquid dominate over the adhesive forces between the liquid and the surface.
  • An advantage of the process besides the high surface quality of the lenses with UV-curing material in self-organization, is the flexibility in designing the lens geometry.
  • an important aspect of the present disclosure is that, with the disclosed process, given material parameters and depending on the formation of the contact surface of the structures of the support substrate, several identical lenses, individually unique lenses, or groups of identical lenses with several different lens types can be produced simultaneously on a support substrate in a single transfer step.
  • the method offers the advantage that the serial dosing of the liquid optical material is eliminated for each individual optical element.
  • the disclosed method offers faster cycle times in the fabrication of optical elements compared to so-called step-and-repeat methods.
  • the advantage of this method and device compared to parallel dispensing devices or methods lies in the flexibility of the dispensing process.
  • the same material dispenser can produce different self-aligned optical elements.
  • Parallel dispensing devices must be individually adjusted to the changed dispensing quantities and/or dispensing positions, which further increases the changeover time and thus represents a more complex and error-prone process.
  • multiple individual lenses can be continuously produced on a single substrate. The required amount of liquid optical material for forming the desired lens is automatically transferred via the contacting mechanism, eliminating the need for manual dispensing.
  • the volume uptake during the contacting and transfer of the liquid optical material of a structure during contacting is determined by the surface area, in addition to the viscosity.
  • the contact surface is designed such that, after contact with a specific or predetermined amount of liquid optical material, only a specific and sufficient amount of material remains on the contact surface for the self-forming optical element.
  • This allows for savings in liquid optical material and enables automated and predetermined dosing for lens production.
  • Gravity plays only a minor role, so the self-alignment principle is also applicable to a process in which the liquid optical material adheres to and aligns itself against gravity.
  • the rotationally symmetric optical elements are lenses.
  • the structures can also be elongated, allowing, for example, the fabrication of cylindrical lenses.
  • An additional advantage of this method is that further alignment of the finished optical elements is unnecessary, as the lenses automatically align themselves centrally within the specified area of the structure without requiring active alignment. Therefore, an alignment step is also saved during the installation of the corresponding lenses, microlenses, or optical elements.
  • Microcontact imprinting allows all structures of the substrate to be coated simultaneously and in parallel, eliminating the need for individual dosing of optical elements, especially individual lenses. Compared to parallel dosing devices or methods, the advantage lies in the flexibility of the dosing process, enabling the same material dispenser to produce different self-aligned optical elements simply by changing the structured substrate.
  • Parallel dosing devices must be individually adjusted to the changed dosing quantities and/or dosing positions, which additionally increases the changeover time of the device and thus represents a more complex and error-prone process.
  • the method further includes the additional step: v) extracting the optical elements from the structures of the support substrate. After the self-formed optical material has hardened, each optical element produced is removed from the contact surfaces of the numerous structures. This is a finished optical element that can be directly used in further assembly. Re-forming is not required. Preferably, all produced optical elements, especially identical ones, are removed simultaneously.
  • At least 10, preferably at least 20, even more preferably at least 50 optical elements are produced simultaneously.
  • the curing of the self-aligned liquid optical material is achieved by irradiating it with electromagnetic radiation, particularly UV radiation. While curing can also occur without UV radiation, it is significantly accelerated by it, depending on the material. This advantageously allows the self-aligned shape of the liquid optical material to be solidified on the structures by UV radiation. Furthermore, the cycle time of the process can be significantly increased. Preferably, all structures, or the self-aligned liquid optical material on them, are irradiated simultaneously and across their entire surface with UV radiation.
  • the hardened and produced optical elements on the support substrate are processed before removal in step v). Further processing steps are therefore carried out while the optical elements remain attached to the structures of the substrate. This allows for the advantageous performance of further processing steps before removal from the substrate.
  • the structures are designed as raised areas. These raised areas protrude from the surface of the substrate.
  • the optical elements are thus formed on the contact surfaces of the raised areas and, due to their elevated position relative to the substrate, can later be removed more easily.
  • contacting and transferring the liquid optical material is simplified, as only the contact surfaces are brought into contact with the liquid optical material. This also reduces contamination. It is not a hole, as in the prior art, into which embossing material is introduced beyond the hole's edge until the surface tension causes the embossing material to rise above the hole's edge.
  • the material is transferred onto a plurality of raised areas, preferably each with a continuous contact surface, by means of micro-contact imprinting. In this way, material inclusions and other embossing defects are avoided, as, for example, less dirt or residue can accumulate in the holes.
  • the structures are designed in a columnar shape. It has been found that columnar structures are particularly advantageous for lens production in the semiconductor industry. Furthermore, round elements are ideally suited for contacting, exhibit high strength, and are easy to manufacture.
  • the structures are columnar, but not circular in cross-section. It has surprisingly been found that polygonal structures are suitable for the production of non-rotationally symmetric optical elements. Thus, special lens shapes can be manufactured for the semiconductor industry.
  • the structures are polygonal in cross-section. This allows, for example, the advantageous production of square or hexagonal optical elements.
  • the cross-section of the structures is preferably constant over the height and is determined parallel to the substrate.
  • the diameter of the structures is less than 1000 micrometers, preferably less than 500 micrometers, particularly preferably less than 250 micrometers, most preferably less than 100 micrometers, in the optimal case less than 10 micrometers, and ideally less than 2 micrometers.
  • the method has surprisingly proven to be particularly suitable for the defect-free mass production of microlenses. If the structures are not columnar, the diameter specifications are to be understood as the maximum extent in one direction of the transmission structure.
  • the height of the column-shaped structures is more than 5 micrometers, preferably more than 10 micrometers, particularly preferably more than 25 micrometers, and most preferably more The height is less than 50 micrometers, and in other cases more than 100 micrometers. Surprisingly, it has been found that these heights are particularly suitable for use and maintain sufficient distance from the substrate holder surface, thus preventing contamination.
  • the structures have a ratio of their respective structure height to their respective structure diameter of 1:1, preferably 1.2:1, and particularly preferably 2:1. It has been found that particularly good results could be achieved with these structure size ratios.
  • the structures have a ratio of their respective height to their respective diameter of 1:2. This size ratio has proven to be particularly suitable for the application of the method.
  • all structures within the plurality of structures have the same height. It has been found that a uniform height of the structures, or the same distance between the contact surfaces of the structures and the surface of the substrate, has a positive influence on lens quality. Furthermore, it is advantageous to simultaneously establish contact in the plane of the contact surfaces with the coated auxiliary substrate, so that the structures remain in contact with the liquid optical material for the same duration.
  • the contact surfaces of the plurality of structures are planar. This allows for the advantageous production of a piano-convex lens, particularly a microlens. Furthermore, a predetermined residue of liquid optical material can advantageously remain on the planar contact surface.
  • the characteristic of flatness refers to a flat contact surface of the structures, which in particular does not have a hole-like depression on the underside.
  • the contact surfaces of the plurality of structures are curved towards the side facing away from the substrate.
  • the contact surface always protrudes for contacting.
  • the contact surface is additionally curved upwards towards the liquid optical material.
  • the structure with the curved contact surface can be advantageously immersed and wetted easily in the liquid optical material.
  • the curvature advantageously allows the shape of the lens that forms itself on the curved contact surface to be adjusted.
  • the optical elements are rotationally symmetric, preferably rotationally symmetric microlenses. Since a simple round shape is preferred for self-alignment, round optical elements, such as round microlenses, can be manufactured particularly easily and effectively using this method. While cylindrical lenses, for example, can also be manufactured, this is more cumbersome due to their more complex geometry.
  • the optical elements are lenses, in particular microlenses, in the form of a piano-convex lens. Plano-convex lenses can be produced particularly reliably and easily using the proposed method.
  • convex-convex lenses can be created by combining them.
  • the liquid optical material has a viscosity of less than 10,000 cp, preferably less than 1,000 cp, particularly preferably less than 1,000 cp, and most preferably less than 500 cp, ideally less than 200 cp, and ideally less than 100 cp. This particularly dynamic viscosity has proven to be optimal for the material used to produce optical elements.
  • the liquid optical material is provided to have a viscosity between 500 cp and 1000 cp.
  • the liquid optical material comprises one or more components of epoxides, acrylates, silicones, BCB, SU8, optical polymers, optical hybrid polymers, spin-on-glass, sol-gel optical material, and/or ormocers. These materials are particularly suitable for self-alignment. Furthermore, these materials are compatible with common materials used in semiconductor applications.
  • Optical hybrid polymers are understood as mixtures of organic and inorganic optical polymers. In other words, the process of creating optical elements can be applied to any curable optical material.
  • Ormocers are understood as organically modified optical ceramics.
  • the liquid optical material is benzocyclobutene (BCB) or SU-8. Both materials have proven to be particularly advantageous for self-alignment.
  • the liquid optical material consists of at least 10% by weight of solvent, preferably at least 50% by weight, and even more preferably at least 90% by weight. In this way, a highly viscous liquid can be provided for self-alignment.
  • the method does not include any reshaping of the self-aligned liquid optical material or the cured optical elements, particularly by heat input or pressure. Specifically, no remelting is involved. In other words, it is not shaped by pressure or heat. It is shaped solely by material transfer and self-alignment. Rather, alignment is achieved solely through self-alignment, directly determining the final shape of the lens or optical element, so that a finished product is directly produced by curing.
  • the contact surfaces of the plurality of structures are hydrophilized. The contact surfaces themselves can consist of a hydrophilic material or be coated with a hydrophilic material. Alternatively, only regions of the contact surfaces can be hydrophilic.
  • the optical material bonds more readily to hydrophilic areas and is repelled by other, especially hydrophobic, areas. This allows for the fabrication of self-aligning spherical lenses on the reduced contact surfaces. Furthermore, hydrophilic contact surfaces and structures also improve and support the shaping of other forms. This measure of creating a hydrophobic contact surface also influences the final shape of the optical element, allowing for advantageous adjustments.
  • the contact surfaces of the multitude of structures are hydrophilic.
  • the contact surfaces thus preferably have a full-surface coating, which allows for further shaping with respect to self-alignment.
  • the potential receiving volume of the contact surfaces of the structures is increased.
  • the structures are made of a polymer or an elastomer. These materials have surprisingly proven to be particularly suitable for structures with contact surfaces for self-alignment.
  • a key aspect of the invention is a method for microcontact imprinting of at least one optical element, preferably at least one lens, in particular a microlens, preferably simultaneous microcontact imprinting of several optical elements, in particular lenses, particularly preferably simultaneous microcontact imprinting of several microlenses, wherein optical elements, in particular the microlenses, are produced on a structured substrate by means of self-alignment.
  • the process for producing, in particular microcontact imprints of, optical elements, especially lenses includes process steps such as the preparation of a material dispenser, in particular in the form of a film coated with liquid optical material, as well as the provision of a support substrate with a structured base and the alignment of the material dispenser and the support substrate relative to each other.
  • a microlens is a small lens, generally with a diameter of less than one millimeter (mm) and often only 10 micrometers (pm).
  • a microlens, as defined in the invention, does not necessarily have to be circular.
  • liquid optical material is locally supplied to the material dispenser to align the support substrate and the material dispenser, so that a sufficient quantity of the liquid optical material for self-organizing lens fabrication can be absorbed by the structured substrate in a contact transfer step.
  • the relative position of the material dispenser containing liquid material and the respective support substrate are aligned, and the material is locally transferred during the transfer step. It is possible that a further support substrate is contacted after the contact surfaces of the structures of a previous support substrate have come into contact with the auxiliary substrate or the material donor, so that a support substrate does not necessarily contact a freshly and homogeneously coated material donor.
  • the support substrate is oriented towards the areas, regions, or islands of the material donor that have not released any lens material and thus locally provide sufficient material for transfer.
  • a particular advantage is that the method is suitable for the simultaneous production of several individual, self-aligning optical elements on a substrate.
  • moving devices are used for contacting and aligning the carrier substrate in the plane. These devices perform a planar (x-y) alignment with the regions containing sufficient material from the material dispenser, a (z-) height adjustment for contacting and transferring the material, and a linear movement of the material dispenser to provide a continuous supply of lens material, particularly homogeneously dosed material. Furthermore, feed and adjustment movements in and/or around all coordinate directions are also conceivable.
  • the transfer of the liquid optical material to the structures can also be carried out by completely immersing the structure surfaces in a bath of the liquid optical material.
  • a particularly important aspect of the present invention is that the disclosed method for manufacturing or producing optical elements enables both high surface quality of the lenses with UV-curing material in self-organization, as well as flexibility in the design of the lens geometry.
  • an important aspect of the present invention is that, with the disclosed method, given material parameters and depending on the formation of the contact surface of the structures of the support substrate, several identical lenses, individually unique lenses, or groups of identical lenses with several different lens types can be produced on a support substrate in a single contact transfer step.
  • This method allows all optical elements to be fabricated simultaneously on a structured substrate.
  • the method offers the advantage that the serial dispensing of the liquid optical material individually for each optical element is eliminated.
  • the disclosed method offers faster cycle times in the fabrication of optical elements compared to so-called step-and-repeat methods.
  • the invention is based on the idea of producing several individual lenses in a transfer process on a protruding substrate (contact surfaces of the structures) by means of self-alignment in a transfer and primary forming step.
  • the phenomenon of liquids self-aligning with defined structures due to surface tension has been described in the literature, particularly for measuring the contact angle of a liquid. Utilizing this self-alignment of liquids with defined structures due to surface tension for the manufacturing, especially mass production, of lenses and/or other optical elements is an important aspect of the present disclosure.
  • the lenses are produced by layer transfer from a liquid, which is transferred in a contact process from a material donor or from the auxiliary substrate, in particular a film coated with liquid optical material, to the structures or the contact surfaces.
  • optical elements In the present disclosure, optical elements, lenses, or microlenses are mentioned.
  • the method is ideally suited for the production of microlenses.
  • the terms “lenses” and “microlenses” generally refer to the optical elements.
  • These optical elements are preferably rotationally symmetrical structures, which are semi-spherical refractive and transmissive (or radiation-directing and radiation-transmissive) optical elements.
  • the support substrates have circular structures and thus also contact surfaces, which define a diameter of the manufactured optical elements.
  • cylindrical lenses for example, are formed.
  • the precise lens shape is determined by the choice of material and consequently by the viscosity, contact angle, and surface tension.
  • the lens shape is predictable and reproducible for the same structured substrate and materials. This enables simple and cost-effective mass production of optical elements with high surface quality using a self-aligning process.
  • the liquid optical material and the structures with contact surfaces are selected accordingly to obtain optimal results or defect-free optical elements.
  • the structures or elevations preferably have sharp edges, and/or high aspect ratios, and/or large angles to the transmission surface and/or high contact angles of the optical material in the area of the contact surfaces.
  • the listed constructive features of the structures with contact surfaces minimize the contact area of the optical elements to the contact surfaces of the structures of the support substrate and simultaneously increase the uncontacted free surfaces of the optical elements.
  • the surface quality of the optical elements is advantageously not significantly dependent on the nature of the structured substrate.
  • This method allows for the advantageous fabrication of optical elements, particularly microlenses, for sensors and emitters, improving efficiency without the need for remelting or serial embossing processes.
  • the process is self-organizing, and thus the optical elements are aligned, in particular centered, on the underlying contact surface of the respective structure of the support substrate without active alignment.
  • a support substrate which has been structured with a coating technology, so that a multitude of preferably identical structures are created on the support substrate, which, when locally coated with the liquid optical material, form a multitude of individual optical elements in a self-alignment.
  • the formed optical elements are cured, in particular with radiation of a specific wavelength. After curing, the optical elements can be detached from the structures and mounted.
  • the substrates in particular the support substrate, can have any shape, but are preferably circular.
  • the diameter of the substrates is, in particular, industrially standardized.
  • the industry-standard diameters are 1 inch, 2 inches, 3 inches, 4 inches, 5 inches, 6 inches, 8 inches, 12 inches, and 18 inches.
  • Rectangular panels, which can be used especially for display manufacturing, are also considered substrates.
  • the method according to the invention can, in principle, handle any substrate, regardless of its diameter, size, and/or shape.
  • a product substrate with the structures can be produced and used solely for the fabrication of the optical elements, from which the optical elements are not removed after curing.
  • the structures of the product wafer on which the optical elements are locally self-aligned can be, in particular, optical elements such as optical fibers.
  • a first exemplary embodiment of a manufacturing process for optical elements comprises the following steps, in particular those carried out at least successively and/or simultaneously, especially with the following sequence:
  • the elevations or structures can be islands, knobs, columns, or cylinders.
  • the structure on the support substrate preferably consists of a polymer or elastomer, in particular they are produced using a thick resist technology.
  • the structures, and thus the contact surfaces on the support substrate, form the structured substrate of the support substrate.
  • the manufacturing process utilizes established methods from the semiconductor industry, particularly microsystems technology. For example, coating methods for liquid and thin films are employed, especially for materials used in optical lithography, generally known under the umbrella term "coating".
  • the coating process includes spin coating, spray coating, chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PE-CVD), physical vapor deposition (PVD), dip coating, and doctor blade coating, in which the material is coated either by reaction of volatile starting materials or by condensation from the vapor phase onto an existing layer or substrate surface.
  • CVD chemical vapor deposition
  • PE-CVD plasma-enhanced chemical vapor deposition
  • PVD physical vapor deposition
  • dip coating dip coating
  • doctor blade coating in which the material is coated either by reaction of volatile starting materials or by condensation from the vapor phase onto an existing layer or substrate surface.
  • liquid optical materials can be advantageously applied to the substrate using spin coating or spray coating.
  • the substrate can also be structured, or the structures created, using conventional and/or imprint lithography.
  • Second process step A material dispenser or auxiliary substrate is coated with the liquid optical material.
  • the material dispenser can be a rigid substrate, a film, or a flexible bellows, which is then wetted with the liquid optical material.
  • the material dispenser and the support substrate are separated.
  • the material dispenser is lifted off the support substrate.
  • the liquid optical material remains locally attached to or on the structures of the support substrate.
  • the liquid optical material adheres sufficiently to the structures of the support substrate that it does not bead up or fall off. In this way, optical elements, in particular spherical lenses or piano-convex lens shapes, are produced depending on the material properties.
  • the outer geometry of the liquid optical material is created in the self-flow direction.
  • the self-aligned liquid optical material is exposed to crosslinking radiation.
  • Crosslinking solidifies the shape of the liquid optical material and forms a network.
  • UV radiation is used for crosslinking, initiating and/or rapidly achieving complete curing of the optical material.
  • the curing time depends on factors such as the thickness, geometry, and/or material properties of the individual optical elements, as well as environmental conditions like solvent saturation, temperature, flow rates, and/or partial vapor pressures of the surrounding medium.
  • the curing wavelength depends on the absorbance of the photoinitiator of the liquid optical material and is preferably adjusted to the wavelength of the curing radiation.
  • Sixth process step The finished optical elements, especially microlenses, are detached from the structures of the support substrate, particularly simultaneously with a support.
  • optical column structures are produced on a product substrate in a multi-stage process.
  • the structures with contact surfaces are produced on a product substrate, in particular by means of lithography.
  • a material dispenser (or film or elastic auxiliary substrate) is coated with liquid optical material.
  • the material dispenser and the structures of the product substrate are brought into contact, so that the liquid optical material wets the surface of the structures of the product substrate.
  • the material dispenser and the structures of the product substrate are separated from each other, with the intended amount of liquid optical material adhering to the structures.
  • the initial shaping of the optical elements takes place in a self-alignment step.
  • the shaped liquid optical material of the optical elements is cross-linked onto the structures.
  • self-aligned elements bond with the structures of the product substrate, creating functionally and materially integrated, composite optical elements.
  • the carrier substrate is fully reusable, as the structuring can be removed from the carrier substrate without residue, especially using thermal-oxidative cleaning processes.
  • substrates do not require any specific properties, so inexpensive substrates such as glass or polysilicon can be used. It is advantageous if the chemical composition of the substrate does not contain any materials harmful to the optical elements; in other words, if it is safe for manufacturing the optical elements.
  • the geometry and/or the size and/or the nature of the optical elements, especially lenses, are determined via the photomasks of lithography and with the structured layer on the substrate.
  • the material of the optical elements is transferred as a liquid to the structures of the carrier, therefore processed product substrates can be directly equipped with optical elements, so that a carrier flip-flop can be avoided.
  • the shape of the optical elements is formed from the liquid in a self-aligning step. This prevents surface contamination of the embossing dies and increases the optical quality.
  • a measure of hydrophobicity or hydrophilicity is the contact angle that forms between a test liquid droplet, especially water, and the surface being measured. Hydrophilic surfaces flatten the liquid droplet because the adhesive forces between the liquid and the surface dominate over the cohesive forces of the liquid, resulting in low contact angles. Hydrophobic surfaces lead to a more spherical shape of the liquid droplet because the cohesive forces of the liquid dominate over the adhesive forces between the liquid and the surface.
  • the liquid optical material preferably contains one or more components from the material list listed here:
  • the liquid optical material particularly preferably comprises one or more components preferably made of epoxides, and/or acrylates and/or silicones and/or BCB and/or SU8 and/or hybrid polymers.
  • the auxiliary substrate or material dispenser consists of a film or film web, enabling the material dispenser to perform a local step-and-repeat coating.
  • the material dispenser is coated section by section and continuously conveyed.
  • the structures or the structured substrate consist of the material SU8.
  • the structures are column-shaped, in particular with a preferably flat contact surface for receiving the liquid optical material.
  • the diameter of the columns is preferably less than 1000 micrometers, preferably less than 500 micrometers, particularly preferably less than 250 micrometers, most preferably less than 100 micrometers, in the optimal case less than 10 micrometers, ideally less than 1 micrometer.
  • the diameter of the individual column-shaped structures is between 1 micrometer and 100 micrometers, preferably between 10 micrometers and 90 micrometers.
  • the height of the columnar structures is more than 5 micrometers, preferably more than 10 micrometers, particularly preferably more than 25 micrometers, most preferably more than 50 micrometers, and in other cases more than 100 micrometers.
  • the structural height of the columns is equal to or greater than 10 micrometers to equal to or greater than 100 micrometers.
  • the structures have the same structural height.
  • the structures have a slenderness ratio defined as the ratio of structural height to structural diameter of 1:1, preferably 1.2:1, and particularly preferably 2:1.
  • FIG. 1a to 1e schematically illustrate the process steps of the method according to the invention.
  • identical components or components with the same function are identified by the same reference numerals, and components or features with the same or equivalent function are identified by identical reference numerals. All sketches may be exaggerated for illustrative purposes; therefore, the figures do not necessarily reflect the proportions of the actual embodiments.
  • Fig. 1a shows a preparatory step of the process for manufacturing optical elements. At least one structure 2 is provided on a support substrate 1.
  • the geometry of structure 2 or the contact surface 7 of structures 2 determines the shape of the optical elements to be produced, which are manufactured in a self-alignment step in the further process steps.
  • a material dispenser 3 or auxiliary substrate is coated with a liquid optical material 4.
  • the liquid optical material 4 can be understood as a liquid consisting of up to 99% solvent, such that the liquid optical material can wet the material dispenser 3 and be locally transferred to the structures 2 of the support substrate in a further process step.
  • a material dispenser 3 or an auxiliary substrate is coated with a liquid optical material of a controlled viscosity. The viscosity of the liquid optical material is controlled either by the solvent content or, preferably, by its chemical composition, so that transfer and self-alignment can occur.
  • Figure 1c illustrates the local transfer of the liquid optical material 4 from the material dispenser to the contact surfaces 7 of the structures 2 of the support substrate.
  • the contact surfaces 7 of the structures 2 of the support substrate 1 and the liquid optical material 4 applied to the material dispenser 3 are brought into contact with each other. Specifically, the contact surfaces 7 of the structures 2 and the liquid optical material 4 touch each other, so that the structures 2 are locally wetted by means of surface tension, and a certain volume of the liquid optical material 4 can be transferred.
  • Fig. I d predetermined and determined volumes of the liquid optical material 4 were transferred to the contact surfaces 7 of the structures 2 of the support substrate 1.
  • the optical elements are formed.
  • the optical elements are generated on the structures 2 in a self-alignment step depending on the predetermined, set geometric and material parameters. The generated optical elements can also remain on the structures for further processing.
  • the cured optical elements 5 were separated from the structures 2 of the substrate 1 by means of a further support 6.
  • This process step is optional.
  • Supports 6 with the optical elements 5 can thus be further processed and/or assembled to substrate size.
  • the support 6 is a coated film, in particular an elastic film with appropriately adjusted adhesive properties, so that the optical elements can be separated from the structures by means of the support 6.

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)

Abstract

L'invention concerne un procédé de fabrication d'éléments optiques, en particulier de lentilles, de préférence de microlentilles, pour l'industrie des semi-conducteurs.
PCT/EP2024/063740 2024-05-17 2024-05-17 Procédé de production d'éléments optiques Pending WO2025237537A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2024/063740 WO2025237537A1 (fr) 2024-05-17 2024-05-17 Procédé de production d'éléments optiques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2024/063740 WO2025237537A1 (fr) 2024-05-17 2024-05-17 Procédé de production d'éléments optiques

Publications (1)

Publication Number Publication Date
WO2025237537A1 true WO2025237537A1 (fr) 2025-11-20

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ID=91193418

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2024/063740 Pending WO2025237537A1 (fr) 2024-05-17 2024-05-17 Procédé de production d'éléments optiques

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WO (1) WO2025237537A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040257660A1 (en) * 2003-05-16 2004-12-23 Seiko Epson Corporation Method of manufacturing micro lens, micro lens, optical device, optical transmission device, head for laser printer, and laser printer
US20050052751A1 (en) * 2000-12-27 2005-03-10 Yue Liu Wafer integration of micro-optics
WO2019072324A1 (fr) * 2017-10-12 2019-04-18 Docter Optics Se Procédé servant à fabriquer un micro-projecteur pour un écran de projection
US20230286233A1 (en) * 2020-10-02 2023-09-14 Ams-Osram Asia Pacific Pte. Ltd. Optical module production

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050052751A1 (en) * 2000-12-27 2005-03-10 Yue Liu Wafer integration of micro-optics
US20040257660A1 (en) * 2003-05-16 2004-12-23 Seiko Epson Corporation Method of manufacturing micro lens, micro lens, optical device, optical transmission device, head for laser printer, and laser printer
WO2019072324A1 (fr) * 2017-10-12 2019-04-18 Docter Optics Se Procédé servant à fabriquer un micro-projecteur pour un écran de projection
US20230286233A1 (en) * 2020-10-02 2023-09-14 Ams-Osram Asia Pacific Pte. Ltd. Optical module production

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