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WO2025220693A1 - Lens unit and coating liquid - Google Patents

Lens unit and coating liquid

Info

Publication number
WO2025220693A1
WO2025220693A1 PCT/JP2025/014943 JP2025014943W WO2025220693A1 WO 2025220693 A1 WO2025220693 A1 WO 2025220693A1 JP 2025014943 W JP2025014943 W JP 2025014943W WO 2025220693 A1 WO2025220693 A1 WO 2025220693A1
Authority
WO
WIPO (PCT)
Prior art keywords
lens
lens unit
fine particles
film
coating liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2025/014943
Other languages
French (fr)
Japanese (ja)
Inventor
寿雄 今井
勝秀 新毛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Publication of WO2025220693A1 publication Critical patent/WO2025220693A1/en
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/111Anti-reflection coatings using layers comprising organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses

Definitions

  • the present invention relates to a lens unit and a coating liquid.
  • Patent Document 1 describes a substrate on whose surface a coating containing specific hollow spherical silica-based microparticles and a matrix for forming a coating is formed. These silica-based microparticles have pores inside their outer shells, and the pores contain a solvent or gas. Because the silica-based microparticles have a low refractive index, the coating also has a low refractive index, resulting in excellent anti-reflection performance.
  • Patent Document 2 describes an anti-reflection film having, from the bottom layer, a hard coat layer, a high refractive index layer, and a low refractive index layer on the surface of an organic film.
  • the high refractive index layer is a synthetic resin thin film containing fine particles of a metal oxide such as ZrO2 .
  • the synthetic resin is a UV- or electron beam-curable synthetic resin.
  • Patent Document 3 describes an anti-reflection laminate including a coating film formed in one coat using a coating composition in which low refractive index particles and medium to high refractive index particles are dispersed in a binder resin. Silica particles treated with a fluorine-based compound are used as the low refractive index particles. As a result, due to the difference in specific gravity, the low refractive index particles are unevenly distributed in the upper and middle parts of the coating film, and the medium to high refractive index particles are unevenly distributed in the middle and lower parts.
  • Patent Document 1 describes that the above-mentioned anti-reflection film is formed on a lens.
  • lenses have been used for a variety of purposes, such as in lens units for photography in smartphones, tablet PCs, etc.
  • Such lens units are sometimes provided with a black light-blocking layer around the periphery of the lens surface to prevent unwanted light from entering from outside.
  • the present invention has been made to solve the above problems, and aims to provide a lens unit and coating liquid that can suppress reflected light caused by a light-shielding layer.
  • a lens unit for a mobile device capable of condensing external light onto an imaging element includes a plurality of lenses arranged at predetermined intervals, the lens has a pair of opposing surfaces; Each of the faces has a central region including a lens surface that functions as a lens; a peripheral region including an uneven region around the central region, in which unevenness having a height difference of 50 nm or more is provided on at least a part of the surface; and an anti-reflection film is provided on the surface of the concave-convex region of the central region and the peripheral region; Lens unit.
  • the concave-convex region of the peripheral region is formed by a light-shielding film containing a particulate pigment capable of blocking external light.
  • Item 1 The lens unit according to item 1.
  • Item 3 The portable device is housed in a transparent cover member and is built into the portable device. Item 3. The lens unit according to item 1 or 2.
  • Item 4 The lens unit described in any one of items 1 to 3, wherein the lens unit includes a lens having a center thickness of 1 mm or less.
  • Item 5 The lens unit described in any one of Items 1 to 4, wherein the lens unit includes lenses each having an outer diameter of 20 mm or less.
  • Item 6 The lens unit described in any one of Items 1 to 5, wherein the lens unit includes a lens having at least one surface that includes an axially symmetric concave curved surface and a convex curved surface.
  • Item 7 The lens unit described in any one of items 1 to 6, wherein the anti-reflection film contains functional fine particles and a binder.
  • Item 8 The lens unit described in Item 7, wherein the fine particle layer in which the functional fine particles are aligned in the surface direction is a two-layer laminate.
  • Item 9 The lens unit described in Item 7 or 8, wherein the functional fine particles have a particle size of 55 ⁇ 10 nm.
  • Item 10 The lens unit according to Item 8, wherein R>5r.
  • R is the diameter of the functional fine particles
  • r is the cross-sectional diameter of the binder.
  • Item 11 A lens unit described in any one of Items 1 to 10, wherein the anti-reflection film is a film made of an inorganic material having a fine uneven structure on its surface.
  • Item 12 The lens unit described in Item 11, wherein the inorganic substance is an oxide.
  • Item 13 The lens unit described in Item 12, wherein the oxide is aluminum oxide.
  • Item 15 The coating liquid according to Item 14, wherein the solvent includes a solvent having a boiling point of 60°C or higher and 140°C or lower.
  • Item 16 The coating liquid according to Item 14 or 15, wherein the mass ratio of the functional fine particles to the total of the functional fine particles and binder component is 80% or more.
  • Item 17 The coating solution according to any one of Items 14 to 16, wherein the particle size variation of the functional fine particles is within ⁇ 10%.
  • Item 18 The coating liquid according to any one of Items 14 to 17, wherein the total mass ratio of the functional fine particles and the binder component to the coating liquid is 20% or less.
  • the composition includes fine particles and a binder that fixes the fine particles, the ratio of the binder to the fine particles is 0.5 or less by mass; The number of defects is 5 or less, Optical thin film.
  • the present invention is advantageous from the perspective of anti-reflection performance.
  • FIG. 1 is a cross-sectional view of an imaging unit to which an anti-reflection film according to the present invention is applied.
  • FIG. 2 is a cross-sectional view of an anti-reflection film.
  • 1 is a photograph of a cross section of an anti-reflection film taken by an SEM.
  • FIG. 1 is a cross-sectional view showing an example of a nozzle used for spray coating.
  • FIG. 10 is a diagram showing lenses before coating arranged on a mounting surface.
  • FIG. 2 is a cross-sectional view showing a lens after a coating liquid composition has been applied. This is a photo taken from the outside of the smartphone's camera unit.
  • FIG. 8 is an enlarged view of the area indicated by the square in FIG.
  • FIG. 7 is a photograph showing a case where an anti-reflection film is not formed on the black resist layer.
  • FIG. 8 is an enlarged view of the area indicated by the square in FIG. 7, and is a photograph of the case where an anti-reflection film is formed on a black resist layer.
  • an imaging unit including a lens unit according to the present invention will be described with reference to the drawings.
  • the imaging unit and anti-reflection film optical thin film
  • FIG. 1 is a cross-sectional view of an imaging unit according to this embodiment.
  • This imaging unit is installed in a device (sometimes referred to as a mobile device) such as a smartphone, tablet PC, or laptop PC, and includes a lens unit 100, an imaging element (here, a solid-state imaging element) D, and a sensor substrate W on which the solid-state imaging element D is installed.
  • a device sometimes referred to as a mobile device
  • FIG. 1 is a schematic diagram for explaining the various parts and features included in the imaging unit, and does not accurately depict the number, shape, size, and arrangement of lenses, the distance between each component, and other aspects of the actual configuration.
  • FIG. 1 illustrates three lenses (L1, L2, and L3), but it should be noted that the present invention is not limited to this and may include a greater or lesser number of lenses.
  • Lens unit 100 consists of three or more lenses L1, L2, and L3 (hereinafter referred to as the first to third lenses) stacked in this order from the light incident side (top side in Figure 1) via spacers 12. As shown in the figure, the surface of each lens is curved.
  • the first lens L1 has a first upper lens surface 10A and a first lower lens surface 10B. More specifically, the first lens L1 has a convex first upper lens surface 10A formed on its upper surface, and a concave first lower lens surface 20A formed on its lower surface. A black light-shielding film 14 is provided on the first lens L1 to shield the area of the first upper lens surface 10A from light, excluding the lens surface. Similarly, the first lower lens surface 20A is provided with a black light-shielding film 14 in the area excluding the lens surface.
  • the shape of the pattern of the black light-shielding film 14 is not limited; it is sufficient that the black light-shielding film 14 is formed in a pattern that has openings where it intersects with the optical axes of the two lenses 10A and 10B. Similar black light-shielding films 14 are also provided on the second and third lenses L2 and L3. However, the black light-shielding film 14 is formed from the lens surface to the vicinity of the spacer 12, which will be described later, and is separated from the spacer 12.
  • the second lens L2 has a second upper lens surface 20A and a second lower lens surface 20B. More specifically, the upper surface of the second lens L2 has a second upper lens surface 10B with a concave lens surface, and the lower surface has a second lower lens surface 20B with a convex lens surface.
  • a black light-shielding film 14 is provided on the light-incident surface of the second lens L2, in the area excluding the lens surface of the second upper lens surface 10B, i.e., on the lens edge. In the example shown in FIG. 1, the black light-shielding film 14 is not provided on the lower surface of the second lens L2, but a patterned black light-shielding film 14 may be provided on the area excluding the lens surface of the second lower lens surface 20B.
  • the third lens L3 has a third upper lens surface 30A and a third lower lens surface 30B. More specifically, the upper surface of the third lens L3 is formed with a third upper lens surface 30A having a lens surface with a curved shape such as an aspherical surface, and the lower surface is formed with a third lower lens surface 30B having a lens surface with a curved shape such as an aspherical surface.
  • the area of the third upper lens surface 30A close to the optical axis is convex on the image side (upper side of the drawing) and symmetrical about the optical axis, while the peripheral area is concave on the image side and symmetrical about the optical axis.
  • the third lower lens surface 30B has the opposite shape to the third upper lens surface 30A. Because the peripheral area of a lens with this shape is concave, the coating liquid described below tends to accumulate in this area, preventing a uniform film from being formed, and there is a risk of not achieving an effective reflection effect. In contrast, as described below, a uniform film can be formed by using a solvent with a surface energy of 30 dyne/cm or more, for example. Note that the aspherical shape of the third lens L3 shown in Figure 1 is just an example, and other shapes may also be used.
  • a black light-shielding film 14 is provided on both surfaces of the third lens L3, excluding the lens surfaces of each of the lenses 30A and 30B.
  • the six lens surfaces 10A, 10B, 10C, 20A, 20B, 30A, and 30B described above are all formed in shapes that are rotationally symmetrical about the center of the optical axis.
  • Each lens L1, L2, and L3 is supported by a spacer 12 so that the optical axes of all lens surfaces 10A, 10B, 10C, 20A, 20B, 30A, and 30B coincide.
  • the lenses are arranged so that their optical axes approximately coincide, and the schematic diagram shown in Figure 1 shows a cross section including the optical axis.
  • a sensor substrate W is arranged below the spacer 12. Therefore, the sensor substrate W is arranged with a gap between it and the third lens L3.
  • the sensor substrate W is formed by cutting out a wafer made of a semiconductor material such as silicon into a generally rectangular shape in plan view.
  • the solid-state imaging element D is provided near the center of the sensor substrate W.
  • the solid-state imaging element D may be, for example, a CCD image sensor or CMOS image sensor, which may be formed into a chip and then bonded onto a semiconductor substrate on which wiring and the like are formed.
  • the solid-state imaging element D may be formed by subjecting the sensor substrate W to well-known film formation processes, photolithography processes, etching processes, impurity addition processes, and the like, and forming electrodes, insulating films, wiring, and the like on the sensor substrate W.
  • the spacer 12 is cylindrical, with three annular grooves 121 formed on its inner surface at intervals in the axial direction. The outer periphery of each lens L1, L2, and L3 fits into each groove 121, thereby holding each lens L1, L2, and L3 at a distance on the spacer 12.
  • the spacer 12 may also be a component shaped to surround the solid-state imaging element D. By surrounding the solid-state imaging element D with the spacer 12 and isolating it from the outside, it is possible to block light other than light that passes through the lenses from entering the solid-state imaging element D.
  • the spacer 12 corresponds to the cover member of the present invention, and prevents external light and dust from entering the lens unit. Furthermore, by sealing the solid-state imaging element D from the outside, it is possible to prevent dust from adhering to the solid-state imaging element D.
  • the spacer 12 is designed so that the lens surfaces 10A, 10B, 20A, 20B, 30A, and 30B of the lenses L1, L2, and L3 form a subject image on the solid-state imaging device D.
  • the configuration of the spacer 12 is not particularly limited, and its shape is not particularly limited and can be modified as appropriate, as long as it can maintain a predetermined distance between the lenses L1, L2, and L3, or between the lens L3 and the sensor substrate W.
  • the spacer 12 can be bonded outside the lens area (area that functions as a lens) of each lens L1, L2, and L3, but in addition to attaching each lens to a single spacer as described above, spacers can also be attached between each lens L1, L2, and L3 to form a gap.
  • a housing may be provided to house the imaging unit, and the lens may be held by this housing.
  • the housing is used as a spacer.
  • the outer periphery of the lens itself, outside the lens area may be made thicker and used as a spacer.
  • the thickness outside the lens area may be combined with a light-shielding film to function as a spacer.
  • the housing corresponds to the cover member of the present invention, and prevents external light and dust from entering the lens unit.
  • An infrared cut filter or cover glass may be placed between the lens module and the sensor substrate W.
  • the position of each filter or cover glass is determined by the spacer or housing. If there are three or more lenses, the sensor substrate can be placed outside the lowest lens.
  • the imaging unit configured as described above is reflow mounted on a circuit board (not shown) built into a smartphone or similar device. Paste solder is printed on the circuit board in advance at the location where the imaging unit will be mounted, and the imaging unit is placed on top of it. The circuit board containing the imaging unit is then subjected to a heating process such as infrared irradiation or hot air blowing, and the imaging unit is welded to the circuit board.
  • a heating process such as infrared irradiation or hot air blowing
  • Each of the lenses L1, L2, and L3 can be formed from resin.
  • resins examples include UV-curable resin, thermosetting resin, and thermoplastic resin.
  • resins with a relatively high glass transition point such as 110°C or higher, are preferred, and those with a glass transition point of 250°C or higher are even more preferred.
  • Specific resins that can be used include acrylic (methacrylic) resins, styrene resins, polycarbonate resins, polyolefin resins, cycloolefin resins, epoxy resins, polyethylene resins, polypropylene resins, ABS resins, polyamide resins, polyacetal resins, and polyethylene terephthalate resins.
  • the black light-shielding film 14 contains a black material.
  • the black material can be a colorant, metal particles, or metal-containing particles.
  • the colorant can be, for example, a black pigment or dye.
  • the metal particles or metal-containing particles can be, for example, at least one selected from copper, silver, gold, platinum, tin, and alloys thereof.
  • black light-shielding film composition After dissolving and dispersing the black material described above in a solvent, known additives such as a photopolymerization initiator are added to form a liquid black light-shielding film composition.
  • the black light-shielding film composition is then patterned on a lens module using a known method to form the black light-shielding film 14 described above.
  • This type of black light-shielding film 14 generally has a height difference between the protrusions and recesses of 50 nm or more.
  • a film-like black light-shielding film 14 may also be used. The height of the protrusions and recesses in the light-shielding film can be measured using conventional methods.
  • the height of the protrusions and recesses in the light-shielding film can be calculated by observing the cross section of the film using a scanning electron microscope (SEM) and performing fluorescent X-ray analysis of the field of view (SEM-EDX method) to map each element in the thickness direction of the film, and measuring the thickness of the elements that make up the protrusions and recesses in the light-shielding film.
  • SEM scanning electron microscope
  • SEM-EDX method fluorescent X-ray analysis of the field of view
  • the refractive index n SB of each lens at the D line is, for example, 1.20 to 2.50, may be 1.30 to 2.30, or may be 1.35 to 2.00.
  • the thickness (center thickness) (H1, H2, H3) of each of the lenses L1, L2, and L3 on the optical axis is preferably 1 mm or less, and more preferably 0.5 mm or less. Furthermore, the outer diameter K of each lens is preferably 20 mm or less, and more preferably 10 mm or less.
  • the area (central area) where the anti-reflection film is formed in each of the lenses L1 to L3 is the lens surface 10A, 10B, 20A, 20B, 30A, and 30B.
  • the black light-shielding film 14 is formed in at least a portion of the area outside the central area (peripheral area).
  • the anti-reflection film is also formed on the black light-shielding film 14.
  • the anti-reflection film formed on the lens surfaces 10A, 10B, 20A, 20B, 30A, and 30B and the anti-reflection film formed on the black light-shielding film 14 are the same and can be formed simultaneously, as described below.
  • the black light-shielding film 14 does not have to be formed over the entire peripheral area; it is sufficient to form the black light-shielding film 14 according to the required performance.
  • the anti-reflection film is formed on the black light-shielding film 14, and it is not necessary to form it in other areas. In particular, it is preferable not to form the anti-reflection film in the area fixed to the spacer 12.
  • the coating liquid composition constituting the coating liquid contains at least functional fine particles, a binder precursor (binder component), and a solvent. Each material constituting the coating liquid composition will be described below.
  • the fine particles may be inorganic fine particles or organic fine particles.
  • inorganic fine particles include oxide fine particles and halide fine particles, particularly oxide fine particles.
  • oxide fine particles include silica fine particles, alumina fine particles, zirconia fine particles, and titania fine particles.
  • the oxide fine particles may contain oxides of multiple elements, such as aluminosilicate fine particles.
  • halide fine particles include chloride fine particles and fluoride fine particles.
  • fluoride fine particles include magnesium fluoride fine particles and calcium fluoride fine particles.
  • the organic fine particles may be resin fine particles.
  • resins contained in the resin fine particles include (meth)acrylic resins, styrene resins, and urethane resins.
  • a treatment such as plasma irradiation (plasma treatment), which will be described later, is applied to the film, it is desirable that the fine particles be inorganic fine particles.
  • the fine particles for example, hollow fine particles can be used. Hollow fine particles are advantageous for lowering the refractive index of the anti-reflection film.
  • hollow fine particles for example, hollow silica fine particles and hollow magnesium fluoride fine particles can be used.
  • the fine particles may have voids formed inside, for example, fine particles whose voids are exposed to the outside. Porous fine particles are also possible.
  • the average particle size of the microparticles is, for example, in the range of 10 to 300 nm, 10 to 200 nm, 10 to 150 nm, or in some cases 10 to 100 nm.
  • the average particle size may be in the range of 15 to 100 nm, or even 20 to 100 nm, or 30 to 100 nm.
  • the average particle size may be in the range of 30 to 80 nm.
  • the average particle size of the microparticles can be measured using a transmission electron microscope or a scanning electron microscope. This measurement is performed by calculating the average maximum particle size of 50 randomly selected microparticles.
  • the average particle size mentioned here is based on the so-called primary particle size.
  • the variation in particle size of the microparticles is preferably ⁇ 20% or less, and more preferably ⁇ 10% or less.
  • the variation in the average particle size of the microparticles can be measured using a transmission electron microscope or a scanning electron microscope, and can be calculated by dividing the difference between the maximum and minimum particle sizes of 50 randomly selected microparticles by the average particle size.
  • the refractive index of the microparticle at the wavelength of the D line (589.3 nm) is smaller than the refractive index n SB of the lens, and is, for example, 1.10 to 1.40, preferably 1.15 to 1.40, and more preferably 1.17 to 1.35. Note that the refractive index of the microparticle is not the refractive index of the material that forms the microparticle's outer shell, but the actual refractive index of the microparticle, including the effect of the hollow portion a.
  • the refractive index of a microparticle at a specific wavelength may be widely known, or it can be calculated by, for example, the effective medium approximation method using the Bruggemann equation, by obtaining representative or average values for the approximate spherical size of the microparticle, the material and thickness of the microparticle's outer shell, etc.
  • the number of functional microparticles contained in the anti-reflection coating 2 can be, for example, ⁇ 3S/2R or more, where S is the surface area of the lens to which the coating liquid is applied, and R is the diameter of the microparticles. Note that the diameter R of the microparticles is the average particle size of the microparticles mentioned above.
  • the anti-reflection coating 2 to be formed in multiple layers, as described below.
  • the fine particles are prone to peeling, but if the fine particles are arranged in a single layer, the optical properties (anti-reflection function) will be impaired when the fine particles peel off.
  • the impact on the optical properties can be minimized even if one fine particle peels off.
  • the number of particles can be ⁇ 3S/R or less. This allows the particles to form two layers after film formation, and the film thickness will be 90-130 nm due to the particle size range. Within this range, an anti-reflection effect can be achieved in the visible light band due to optical interference.
  • Binder and its precursor> The binder functions to bind the fine particles to each other and to the underlying structure, such as the substrate (in this embodiment, the lens).
  • the binder fixes the fine particles in the anti-reflection coating and improves the abrasion resistance of the coating.
  • the binder is added as a precursor to the coating liquid composition.
  • the binder includes, for example, an oxide component, more specifically, a metal oxide component.
  • the binder precursor that supplies the metal oxide component may be a metal alkoxide.
  • the metal alkoxide provides the metal oxide component using a technique known as the sol-gel method. For example, silicon alkoxide provides the silica component through a hydrolysis reaction and a condensation polymerization reaction.
  • the metal alkoxide is not limited to silicon alkoxide, but may also be aluminum alkoxide, zirconium alkoxide, titanium alkoxide, niobium alkoxide, tantalum alkoxide, etc.
  • the boiling point of the binder precursor (binder component) is higher than the boiling point of the solvent described below.
  • the binder may contain an organic component in addition to the metal oxide component.
  • the organic component may be a component derived from a metal alkoxide, more specifically, a component derived from an organic group bonded to a metal atom constituting the metal alkoxide. That is, the binder may be an inorganic-organic composite containing a metal oxide component and an organic component.
  • An inorganic-organic composite binder may be provided, for example, from a silicon alkoxide represented by the formula R 2 n Si(OR 1 ) 4-n .
  • R 1 is an alkyl group having 1 to 4 carbon atoms
  • R 2 is an organic group that provides the organic component to the binder
  • n is 1 or 2, particularly 1.
  • R 2 is not particularly limited and may be an aliphatic group or an aromatic group, or may contain a heteroatom.
  • R 2 may be a hydrocarbon group having 1 to 10 carbon atoms, particularly an alkyl group having 1 to 10 carbon atoms, or even 1 to 4 carbon atoms.
  • Silicon alkoxides (trialkoxysilanes) in which n is 1 provide binders called silsesquioxanes.
  • the binder precursor is primarily composed of Si-O-R as described above, the organic components volatilize after the anti-reflective coating is formed, leaving fewer organic components in the film, although the detailed mechanism is not yet understood. As a result, lens fogging can be suppressed.
  • the binder may be supplied from only one type of precursor, but can also be supplied from two or more types of precursors.
  • One example of a combination of two types of precursors is an alkyltrialkoxysilane and a tetraalkoxysilane.
  • the number of carbon atoms in the alkyl group is not particularly limited; for example, the alkyl group contained in the alkoxy group has 1 to 4 carbon atoms, and for example, the alkyl group bonded to the silicon atom has 1 to 10 carbon atoms, particularly 1 to 4 carbon atoms.
  • Metal alkoxides such as silicon alkoxides may be contained in the coating liquid composition as a hydrolysate.
  • the hydrolysate may be a partial hydrolysate in which hydrolysis has progressed partially.
  • the binder precursor may be a metal alkoxide or a hydrolysate thereof, in particular an alkoxysilane or a hydrolysate thereof.
  • the ratio of fine particles to the solid content (binder precursor and fine particles) in the coating solution is preferably 80% or more, more preferably 90% or more, and particularly preferably 95% or more. This reduces the amount of binder between the fine particles, allowing for the formation of a flexible anti-reflective coating.
  • the total mass ratio of the functional fine particles and binder precursor to the coating liquid is preferably 20% or less, and more preferably 10% or less. This increases the amount of solvent in the coating liquid, making it easier to create a porous structure in the anti-reflective coating.
  • the particle adhesion inhibitor may have a boiling point of, for example, 300°C or higher, or even 400°C or higher.
  • the boiling point of the particle adhesion inhibitor is desirably higher than the curing temperature of the binder precursor.
  • the curing temperature of the binder precursor is the maximum temperature in the heating process applied to produce the binder from the binder precursor.
  • the particle adhesion inhibitor also desirably has a boiling point higher than that of the solvent.
  • the coating liquid composition contains multiple compounds as solvents
  • the particle adhesion inhibitor may have a boiling point higher than the boiling points of all of the compounds contained as solvents.
  • the boiling point of the particle adhesion inhibitor may be higher than the boiling point of the second solvent.
  • the particle adhesion inhibitor may have a viscosity of, for example, 1000 mPa ⁇ s or more, 1200 mPa ⁇ s or more, 1400 mPa ⁇ s or more, 1600 mPa ⁇ s or more, or even 1800 mPa ⁇ s or more.
  • the particle adhesion inhibitor may have a viscosity higher than the viscosity of all of the compounds contained as solvents.
  • the relatively high viscosity of the particle adhesion inhibitor is particularly useful when applying the coating liquid composition to a curved surface.
  • the viscosity of the particle adhesion inhibitor may be higher than the viscosity of the second solvent.
  • Viscosity can be measured at room temperature (25°C) using a vibration viscometer (e.g., Sekonic Corporation, probe: PR-10L, controller: VM-10A).
  • the particle adhesion inhibitor contains a solvent
  • the viscosity is measured after removing the solvent.
  • the particulate adhesion inhibitor may be a polymer, particularly a thermoplastic polymer.
  • the particulate adhesion inhibitor may also be a dispersant.
  • Dispersants It is desirable to add at least one dispersant selected from the group consisting of anionic polymer dispersants and polymer dispersants to the coating liquid composition.
  • the dispersant can function as a particulate adhesion inhibitor.
  • the dispersant can have a boiling point as exemplified for the particulate adhesion inhibitor.
  • the dispersant can have a viscosity as exemplified for the particulate adhesion inhibitor.
  • Anionic polymer dispersants have anionic groups, such as carboxylate and sulfonate groups. Furthermore, anionic polymer dispersants have a polymeric molecular structure, i.e., a molecular structure containing repeating units. Anionic polymer dispersants may be either homopolymers or copolymers. It is desirable for anionic polymer dispersants to have anionic groups in the repeating units.
  • anionic polymer dispersants include polyacrylates, polystyrene sulfonates, styrene-maleic anhydride copolymers, olefin-maleic anhydride copolymers, acrylamide-acrylate copolymers, alginates, and carboxymethylcellulose salts.
  • salts include alkali metal salts such as sodium salts and potassium salts.
  • Carboxylic acids derived from maleic anhydride can also exist as sodium salts, etc.
  • Polymer dispersants have an average molecular weight of 2000 or more, which is relatively larger than the low-molecular-weight dispersants that are general-purpose surfactants, and they act effectively on fine particles.
  • the molecular weight of polymer dispersants may be 3000 or more, 4000 or more, 5000 or more, 6000 or more, 7000 or more, 8000 or more, 9000 or more, or even 10,000 or more. There is no particular upper limit to the molecular weight, but it is, for example, 200,000 or less, or even 100,000 or less.
  • Polymer dispersants may be anionic, nonionic, or cationic, but anionic or nonionic dispersants are preferable.
  • anionic polymer dispersants are the same as those of anionic polymer dispersants.
  • nonionic polymer dispersants include polyvinyl alcohol, polyethylene glycol, and polyacrylamide.
  • cationic polymer dispersants include polyethyleneimine and polyvinylimidazoline.
  • Amount of fine particle contact inhibitor The amount of the fine particle adhesion inhibitor or dispersant blended relative to the fine particles may be, on a mass basis, 0.4 or more, 0.5 or more, 2 or more, 4 or more, 5 or more, 6 or more, 7 or more, 8 or more, 9 or more, or even 10 or more.
  • the upper limit of this ratio is not particularly limited, and may be 1,000 or less, particularly 100 or less. Examples of this ratio are 4 or more and 100 or less, 6 or more and 100 or less, 8 or more and 100 or less, and even 10 or more and 100 or less.
  • a particle adhesion inhibitor or dispersant can function to maintain the spacing between particles.
  • the ratio of the total amount of binder and particle adhesion inhibitor or dispersant to the amount of particles is desirably 0.5 or more. This ratio is also stated on a mass basis. This ratio may be 0.8 or more, 1.0 or more, 1.1 or more, 1.2 or more, 1.5 or more, 1.7 or more, or even 1.8 or more. There is no particular upper limit to this ratio, and it may be 1000 or less, and in particular 100 or less. Examples of this ratio are 0.5 or more and 100 or less, and 1.0 or more and 100 or less.
  • the solvent may be composed of a single type of solvent, but it is desirable to include two or more solvents with different boiling points.
  • the solvent may include a first solvent and a second solvent, both of which are organic solvents, particularly polar organic solvents.
  • the boiling point of the first solvent is preferably 60 to 150°C, more preferably 80 to 140°C, and particularly preferably 90 to 130°C.
  • the boiling point of the second solvent is preferably higher than 150°C, more preferably 165°C or higher, and particularly preferably 170°C or higher.
  • An example of the boiling point of the second solvent is 150 to 280°C.
  • the boiling point of the second solvent may be lower than the boiling point of the particulate adhesion inhibitor or dispersant.
  • the difference in boiling point between the first solvent and the second solvent may be, for example, 50 to 100°C.
  • the first and second solvents are preferably blended so that the ratio of the second solvent to the first solvent is less than 1, 0.8 or less, preferably 0.6 or less, and particularly preferably 0.4 or less, by mass.
  • the lower limit of this ratio may be 0.03 or more, 0.05, or even 0.07 or more.
  • This ratio is, for example, 0.03 or more and 0.8 or less, 0.05 or more and 0.5 or less, or even 0.07 or more and 0.4 or less.
  • These ratios are titrated into a coating liquid composition to be applied by spray coating, particularly to a curved surface by spray coating.
  • the boiling point and surface energy of the solvents contained in the coating liquid composition are important when forming a film.
  • the first solvent has a lower boiling point than the second solvent, so when a film is formed by spray coating, as described below, it will volatilize before reaching the lens.
  • the second solvent has a higher boiling point than the first solvent, so when it is ejected from the nozzle by spray coating, it reaches the lens and adheres to the lens as droplets. The droplets that adhere to the lens then spread over the lens surface and form a film. In this case, if the surface energy of the second solvent is not high, the liquid will not spread sufficiently, which can cause defects such as color unevenness.
  • the boiling point and surface energy of the second solvent are important properties.
  • the surface energy of the second solvent should be 30 dyne/cm or more, 35 dyne/cm or more, 40 dyne/cm or more, 45 dyne/cm or more, or even 70 dyne/cm or more.
  • High boiling point solvents can be broadly divided into (A) those with a high molecular weight and a high boiling point, and (B) those with a smaller molecular weight than (A) but with strong hydrogen bonds.
  • (B) solvents have a high surface energy and are suitable for spreading the liquid over the lens surface.
  • a typical example of (A) solvent is butoxyethanol (boiling point 171°C, surface energy 24.8 dyne/cm), and a typical example of (B) solvent is propylene glycol 400 (boiling point 188°C, surface energy 71.6 dyne/cm).
  • any ordinary surface energy measurement method can be used to measure the surface energy of a solvent.
  • it can be measured using the lubrication method, where a platinum ring is placed horizontally on the liquid surface, then pulled up and the force that balances the surface tension acting on the ring at the moment it tries to fall off the liquid surface is measured using a balance.
  • the coating liquid composition may further contain a thickener, a thixotropy imparting agent, a surfactant, a crosslinking agent, a leveling agent, etc.
  • the leveling agent is effective in improving the wetting of the fine particles.
  • the coating liquid composition may further contain a leveling agent.
  • Fig. 2 is a cross-sectional view of an anti-reflection film laminated on a lens.
  • the anti-reflection film 2 is an example of a film provided on a substrate 3 (each of the above-mentioned lenses).
  • the anti-reflection film 2 is formed of two layers of fine particles 21 fixed with a binder 31. Furthermore, both the fine particles 21 and the substrate 3 are fixed with the binder 31.
  • the coating liquid according to this embodiment has a low mass of solids relative to the solvent, and a low mass ratio of binder to fine particles, allowing the anti-reflection coating 2 to have a porous structure.
  • the porosity be 50% or more.
  • the antireflection coating 2 has a refractive index n L1 of 1.10 to 1.35 and a thickness t L1 of 80 nm to 150 nm. With this configuration, the antireflection coating 2 can exhibit high antireflection performance.
  • the refractive index n L1 is the refractive index at the D-line (wavelength 589.3 nm). Note that, for the sake of convenience, the substrate 3 is depicted as flat in FIG. 2, but in reality it is a lens having a curved surface.
  • the minimum reflectance r min 300-1200 within the wavelength range of 300 nm to 1200 nm can be 1% or less.
  • the reflectance r min 300-1200 is preferably 0.5% or less, and more preferably 0.2% or less.
  • the reflectance of an antireflection coating or the like refers to the reflectance determined from the reflection spectrum when light with a wavelength of 300 nm to 1200 nm is incident at an incident angle of 5°.
  • the minimum reflectance r min 400-800 within the wavelength range of 400 nm to 800 nm is not limited to a specific value.
  • the reflectance r min 400-800 is, for example, 0.5% or less. In this case, the antireflection coating 2 is more likely to exhibit high antireflection performance.
  • the reflectance r min 400-800 is preferably 0.2% or less.
  • the range ⁇ range/2.5 within which the reflectance is 2.5% or less within the wavelength range of 300 nm to 1200 nm, is not limited to a specific value.
  • the range ⁇ range /2.5 is, for example, 400 nm or greater. This allows the antireflection coating 2 to more easily exhibit high antireflection performance.
  • the range ⁇ range/2.5 may be 450 nm or greater, or may be 500 nm or greater.
  • the wavelength and wavelength range corresponding to a given reflectance also refer to the wavelength determined from the reflection spectrum.
  • the range ⁇ range/1.0 in which the reflectance is 1.0% or less in the wavelength range of 300 nm to 1200 nm, is not limited to a specific value.
  • the range ⁇ range /1.0 is, for example, 250 nm or more. This makes it easier for the antireflection coating 2 to exhibit high antireflection performance.
  • the range ⁇ range/1.0 may be 300 nm or more, 350 nm or more, or 400 nm or more.
  • the refractive index of the substrate (lens) is n sb and the refractive index of the antireflection coating is n L1 , it is possible to adjust the optical thickness of the antireflection coating to 1 ⁇ 4 of a predetermined wavelength ⁇ .
  • the smaller the absolute value of n sb -n L1 2 the lower the reflectance at the wavelength ⁇ corresponding to that refractive index.
  • a low effective refractive index of the antireflection coating 2 may be desirable from the perspective of reducing reflectance.
  • the substrate (lens) 3 and the anti-reflection coating 2 are in direct contact, but this is not limited thereto, and another film may be interposed between the substrate 3 and the anti-reflection coating 2.
  • another film is polyvinyl butyral resin (PVB).
  • PVB polyvinyl butyral resin
  • R is the diameter of the fine particles and r is the cross-sectional diameter of the binder
  • R>5r it is preferable that R>5r (see Figure 2). This reduces the amount of binder, allowing the anti-reflection film to have a porous structure.
  • the cross-sectional diameter r of the binder may be determined by measuring the maximum thickness of the part where fine particles connect when observing the cross-section of the film with a transmission electron microscope or scanning electron microscope, as shown in the schematic diagram of Figure 2. In this case, the thickness of the part where recognizable fine particles connect within the observation field may be measured, and the average value of these may be used as the value of r.
  • the arrangement of the microparticles in each layer 21, 22 is not particularly limited, but can be, for example, square closest packing. This allows the porosity to be 50% or more.
  • the coating liquid composition of this embodiment can be subjected to various coating processes, but is suitable for application by spray coating.
  • Spray coating is a well-known coating process in which a coating liquid composition is sprayed from a spray nozzle.
  • the lens targeted in this embodiment is small, and the coating liquid composition cannot be applied by methods such as spin coating, so spray coating is suitable.
  • Anti-reflective coatings formed by spray coating using a coating liquid composition containing fine particles, a binder precursor, and a solvent are more likely to develop micro-defects than optical thin films formed by other coating processes.
  • One cause of this is thought to be the adhesion of aggregates of fine particles.
  • Spray coating itself is a coating method that is highly suitable for mass production and can be used on curved surfaces, and is also a coating process that can continuously form films on multiple substrates.
  • the black light-shielding film 14 is formed on the substrate 3 as described above. Then, a coating liquid composition is applied to the central and peripheral regions, including on the black light-shielding film 14, and then baked. This evaporates the solvent, produces a binder from the binder precursor, and forms an anti-reflection film.
  • the baking temperature is lower than the boiling point of the solvent, for example, 80 to 110°C, and the baking time can be, for example, 5 to 400 minutes. Because the lens according to this embodiment is made of resin, the baking temperature cannot be high, so the temperature range described above is used.
  • the coating liquid composition contains the first solvent and the second solvent
  • the coating liquid composition when the coating liquid composition is applied to the substrate 3 by spray coating, it is possible to reduce unevenness in the thickness of the anti-reflection film formed, although the detailed mechanism is unknown.
  • the action of the second solvent causes the coating liquid composition to spread over the curved substrate 3.
  • the second solvent then evaporates during the baking process.
  • the binder can be made to barely evaporate during the baking process.
  • a metal alkoxide which is a binder precursor, as a hydrolyzate
  • the binder precursor contained in the coating liquid composition can be made to barely evaporate during the baking process. This increases the controllability of the formation of the anti-reflective film.
  • At least a portion of the particle adhesion inhibitor or dispersant contained in the formed anti-reflective coating may then be removed. Removal of the particle adhesion inhibitor or dispersant can be achieved by various treatments of the anti-reflective coating. Examples of such treatments include plasma treatment, corona treatment, UV cleaning, high-temperature treatment, organic cleaning, acid cleaning, and alkaline cleaning. Plasma treatment can be achieved by irradiating the anti-reflective coating with an oxidizing active species, such as oxygen plasma.
  • Figure 3 shows an example of an anti-reflective coating formed by the above-described method, depicting a cross-section of an anti-reflective coating with two layers of hollow particles, photographed with an SEM.
  • the anti-reflective coatings shown in Figures 2 and 3 are merely examples, and multiple layers of anti-reflective coating can be laminated.
  • the refractive index of the anti-reflective layer closest to the lens is close to that of the lens, and the refractive index of the outermost anti-reflective coating layer can be gradually reduced toward the outermost layer, as described above, to 1.10 to 1.35.
  • Figure 4 is a cross-sectional view showing an example of a spray nozzle used for spray coating.
  • this spray nozzle has a storage section 91 that stores the coating liquid composition, and an annular liquid flow path 93 is formed that extends from this storage section 91 toward the nozzle's discharge outlet 92.
  • This liquid flow path 93 is provided with an air swirler (not shown) for swirling the coating liquid composition within the liquid flow path 93. Therefore, the coating liquid composition that passes through the liquid flow path 93 and is discharged from the discharge outlet 92 is discharged downward while swirling.
  • annular air flow path 94 extending toward the nozzle outlet 92 is formed outside the storage section 91 and the liquid flow path 93.
  • This air flow path 94 is provided with an air swirler (not shown) for swirling the coating liquid composition within the air flow path 94.
  • the air flowing through the air flow path 94 becomes a swirling flow, and merges with the liquid flow path 93 from the outside of the liquid flow path 93 near the outlet 92.
  • the coating liquid composition is pressed against the outside of the liquid flow path 93 by the swirling air flow, and reaches the outlet 92 in the form of a thin film.
  • the coating liquid composition is then discharged downward from the outlet 92 while swirling.
  • the coating liquid composition discharged from the outlet 92 via the air flow path 94 swirls, its outer diameter increasing as it travels downward, and is applied to the lens to be coated.
  • An example of such a nozzle that can be used is one manufactured by SHIMADA APPLI.
  • the discharge outlet 92 of the spray nozzle 9 configured as described above is preferably at a height of 25 mm to 35 mm from the lens to be coated. Furthermore, the amount of coating liquid composition discharged per unit time is preferably 0.1 ml/min to 0.3 ml/min. The amount of liquid discharged per unit time may also be determined by collecting the liquid discharged from the spray nozzle for one minute and measuring its volume.
  • the swirling flow of the coating liquid composition is strong because it is close to the discharge port 92.
  • the droplets that make up the mist within the swirling flow are swept inward by the swirling flow.
  • droplets that fall outside the swirling flow are repelled further out by the swirling flow.
  • the repelled droplets do not adhere to the lens.
  • droplets that adhere to the lens spread over the lens surface and form a film. Therefore, if a lens is placed in this region N1 and the coating liquid composition is applied, an appropriate coating film will be formed.
  • multiple lenses L e.g., 5-20 mm in diameter
  • a mounting surface e.g., a stage or pallet
  • front-to-back and left-to-right spacing of 5-30 mm
  • the spray nozzle 9 is moved over each lens in turn to apply the coating.
  • the coating liquid composition is continuously applied to multiple lenses L. Therefore, the following problems may occur, particularly if the height of the spray nozzle 9 is outside the above-mentioned range or the amount of coating is small.
  • the spacing and arrangement of the lenses L are not as critical as the height of the spray nozzle 9 and the appropriate amount of coating, and therefore the arrangement does not have to be grid-like and is arbitrary.
  • the lens diameter and spacing described above are examples, the inventors have confirmed that, at least within these ranges, appropriate film formation is possible within the preferred ranges of the spray nozzle outlet height and discharge amount described above.
  • the solvent becomes more likely to volatilize. As a result, less liquid reaches the lens, and less liquid flows to the center of the concave surface. As a result, although splash marks can be observed, color unevenness is less likely to occur.
  • the following measures can be taken, for example. (1) Adding a certain amount of a microparticle adhesion inhibitor to the coating liquid composition prevents drying and reduces uneven discoloration even if some of the liquid composition adheres to the surface of the lens L before coating. (2) By setting the distance between the discharge port 92 of the spray nozzle 9 and the lens L to the appropriate distance described above, uneven discoloration can be reduced.
  • the area where the coating liquid composition is applied is narrow because the distance between the spray nozzle 9 and the lens L is small. If the discharge amount is constant, if the area of the applied area is small, the film thickness immediately after application (immediately after the coating liquid composition adheres to the lens L) will be thick. (2) The solvent contained in the coating liquid composition does not evaporate sufficiently due to the small distance between the spray nozzle 9 and the lens L. This results in a thick film thickness immediately after coating.
  • the lens unit according to this embodiment has the following advantages. (1) Because the anti-reflection coating contains fine particles such as hollow fine particles having voids, it is possible to form an anti-reflection coating with a porous structure, which allows a low refractive index to be achieved. (2) Since the ratio of the fine particles to the solid content (binder precursor and fine particles) in the coating liquid is low, the amount of binder between the fine particles 21 is small, and an anti-reflection film that is easily deformed can be formed.
  • the black light-shielding film 14 By forming the black light-shielding film 14 as described above, it is possible to prevent light unnecessary for photography from entering the photographing unit. However, there is a problem in that light reflected by the black light-shielding film 14 is visible from the subject side when photographing. To explain in more detail, for example, materials such as pigments contained in the black light-shielding film 14 normally absorb light from outside, but if the film has a flat reflective surface, light may be reflected from that reflective surface. When the subject is a person, this reflected light is visible during photography and can be distracting. Therefore, in this embodiment, an anti-reflection film is formed on the black light-shielding film 14 as described above, thereby preventing such reflections.
  • Figure 7 is a photograph of a smartphone's camera unit taken from the outside.
  • Figures 8 and 9 are enlarged views of the area surrounded by a square in Figure 7.
  • Figure 7 shows an example in which no anti-reflection film is formed on the black light-shielding film 14, while Figure 9 shows an example in which an anti-reflection film is formed on the black light-shielding film 14.
  • Figure 8 when no anti-reflection film is formed, reflected light is observed on the periphery of the black light-shielding film 14.
  • Figure 7 when an anti-reflection film is formed, reflected light on the periphery of the black light-shielding film 14 is suppressed.
  • the lens unit on which the anti-reflection film of the present invention is laminated is not particularly limited, and Figure 1 is merely one example. That is, the lens unit covered by the present invention may be, for example, a lens unit in which multiple resin lenses each having an outer diameter of 20 mm or less are stacked. Furthermore, the shape, number, spacer, and configuration of the lens module are not particularly limited. The curved surface that constitutes the lens surface of each lens may be formed so that there is at least one inflection point.
  • a black light-shielding film 14 is formed to prevent light from entering the imaging unit.
  • it may be formed of materials other than those mentioned above, or of a color other than black.
  • colored organic pigments such as red, blue, yellow, green, white, and purple may be included as necessary.
  • red pigments When colored organic pigments are used in combination, it is preferable to use 1 to 40% by mass of red pigment relative to the black pigment, and a preferred red pigment is Pigment Red 254.
  • white pigments include titanium dioxide, magnesium oxide, barium sulfate, zirconium oxide, zinc oxide, and white lead, but titanium dioxide is preferred because of its excellent shielding properties and ease of industrial use. Pigments other than these black pigments can also be used.
  • the anti-reflection coating 2 does not have to be a film containing hollow microparticles as described above, and various configurations are possible.
  • the anti-reflection coating can be formed from an aluminum oxide film having an uneven surface. This point will be described in more detail below.
  • an Al2O3 film is formed in the central region of the lens module by ALD.
  • an Al-containing gas and an oxidizer are sequentially supplied to form thin unit films of Al2O3 .
  • This operation is repeated multiple times, i.e., the Al-containing gas and the oxidizer are alternately supplied, to form an Al2O3 film with a predetermined thickness.
  • a substrate is placed in a processing chamber, the substrate is heated to a predetermined temperature, and the processing chamber is evacuated to a predetermined vacuum level. In this state, one cycle of "supply of Al-containing gas ⁇ purging of the processing chamber ⁇ supply of oxidizer ⁇ purging of the processing chamber" is repeated multiple times to form a unit film.
  • the Al-containing gas is not particularly limited and may be any commonly used gas, such as trimethylaluminum (TMA): Al( CH3 ) 3 .
  • TMA trimethylaluminum
  • Al( CH3 ) 3 oxidizing agent
  • H2O , O3 , or O2 plasma may be used.
  • the thickness of the Al 2 O 3 film at this time is preferably a thickness that allows a desired anti-reflection structure to be obtained by the hydrothermal treatment described below, and from this point of view, it is preferably 100 nm or less, more preferably 10 to 50 nm.
  • the depth of the fine irregularities is preferably, for example, 100 to 500 nm.
  • the fine convexities and concaves are preferably formed at a pitch of, for example, about 100 nm. This allows for a pitch shorter than the wavelength of the irradiated light, and the shape of the fine irregularities is needle-like or spindle-like, so the refractive index changes continuously in the depth direction, thereby achieving anti-reflection functionality.
  • the depth of the Al2O3 fine irregularities can be measured by conventional methods.
  • the depth of the Al 2 O 3 fine irregularities can be calculated, for example, by observing the cross section of the film with a SEM (scanning electron microscope) and analyzing the field of view with fluorescent X-rays (SEM-EDX method), thereby mapping each element (including Al, for example) in the thickness direction of the film, and measuring the thickness of the layer in which that specific element (e.g., Al) is continuously contained.
  • SEM scanning electron microscope
  • SEM-EDX method fluorescent X-rays
  • the hydrothermal treatment method is not particularly limited, but can be carried out by, for example, immersing in hot water or a high-temperature alkaline aqueous solution, or by exposing to water vapor.
  • the immersion time depends on the thickness of the Al2O3 film, but is preferably about 1 second to 30 minutes, more preferably 10 seconds to 10 minutes.
  • the treatment time is preferably 1 minute to 24 hours.
  • the film material is made of an inorganic material that can be formed by the ALD method.
  • inorganic materials include oxides, nitrides, sulfides, and elemental metals .
  • oxides include Al2O3 , CoO, Er2O3 , Fe2O3 , Ga2O3 , HfO2 , ITO , In2O3 , MgO , Nb2O5 , NiO , SiO2 , SnO2 , Ta2O5 , TiO2 , WO3 , ZnO, Al-doped ZnO, and ZrO2 .
  • nitrides include AlN, CoNx, FeNx, Hf3N4 , HfSiON, NbN, NiNx, TiN, WN, etc.
  • metal elements include Co, Ni, Pt, Ru, etc.
  • sulfides include ZnS , etc.
  • an oxide film is particularly preferable.
  • an Al2O3 film is particularly preferable.
  • the anti-reflection film is formed on the surfaces of each lens 10A, 10B, 10C, 20A, 20B, 30A, and 30B and on the black light-shielding film 14.
  • the anti-reflection film may be formed in an area other than the black light-shielding film 14.
  • an anti-reflection film is formed on the black light-shielding film 14, but reflection is not limited to the black light-shielding film 14, and it is believed that visible reflected light occurs in areas where the difference in height between the protrusions and recesses is 50 nm or more. Therefore, in the peripheral area, it is preferable to form an anti-reflection film in areas other than the black light-shielding film 14 where protrusions and recesses have a difference in height between the protrusions and recesses of 50 nm or more.

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Abstract

A lens unit according to the present invention is for a portable device and is capable of condensing light from outside onto an imaging element. The lens unit comprises a plurality of lenses disposed at prescribed intervals. Each of the lenses has a pair of opposing surfaces, and each of the surfaces has a central region including a lens surface functioning as a lens, and a peripheral region surrounding the central region, the peripheral region including, in at least a portion of the surface, an uneven region in which projections/recesses are provided in which the height difference between the recesses and projections is 50 nm or greater. An anti-reflection film is provided on the surface of the central region and the uneven region in the peripheral region.

Description

レンズユニット及び塗布液Lens unit and coating liquid

 本発明は、レンズユニット及び塗布液に関する。 The present invention relates to a lens unit and a coating liquid.

 従来、物品の表面からの光の反射を防止又は低減するための技術が知られている。 Technologies for preventing or reducing light reflection from the surface of an article are known.

 例えば、特許文献1には、中空球状の所定のシリカ系微粒子と、被膜形成用マトリクスとを含む皮膜が基材表面上に形成された基材が記載されている。このシリカ系微粒子において細孔を有する外殻の内部に空洞が形成されており、空洞内に溶媒又は気体が包含されている。シリカ系微粒子が低屈折率であるので、被膜も低屈折率であり、被膜が反射防止性能に優れる。 For example, Patent Document 1 describes a substrate on whose surface a coating containing specific hollow spherical silica-based microparticles and a matrix for forming a coating is formed. These silica-based microparticles have pores inside their outer shells, and the pores contain a solvent or gas. Because the silica-based microparticles have a low refractive index, the coating also has a low refractive index, resulting in excellent anti-reflection performance.

 特許文献2には、有機フィルムの表面に、下層側からハードコート層と、高屈折率層と、低屈折率層とを有する反射防止フィルムが記載されている。高屈折率層は、ZrO2等の金属酸化物の微粒子を含んだ合成樹脂系薄膜である。合成樹脂は、紫外線又は電子線硬化型合成樹脂である。 Patent Document 2 describes an anti-reflection film having, from the bottom layer, a hard coat layer, a high refractive index layer, and a low refractive index layer on the surface of an organic film. The high refractive index layer is a synthetic resin thin film containing fine particles of a metal oxide such as ZrO2 . The synthetic resin is a UV- or electron beam-curable synthetic resin.

 特許文献3には、バインダ樹脂中に低屈折率微粒子と中乃至高屈折率微粒子が分散されているコーティング組成物を用いてワンコートにて形成された塗膜を含む反射防止積層体が記載されている。低屈折率微粒子としてフッ素系化合物により処理されているシリカ微粒子が用いられている。これにより、比重の差により塗膜の上部乃至中間部において低屈折率微粒子が偏在し、且つ中間部乃至下部において中乃至高屈折率微粒子が偏在している。 Patent Document 3 describes an anti-reflection laminate including a coating film formed in one coat using a coating composition in which low refractive index particles and medium to high refractive index particles are dispersed in a binder resin. Silica particles treated with a fluorine-based compound are used as the low refractive index particles. As a result, due to the difference in specific gravity, the low refractive index particles are unevenly distributed in the upper and middle parts of the coating film, and the medium to high refractive index particles are unevenly distributed in the middle and lower parts.

特開2001-233611号公報Japanese Patent Application Laid-Open No. 2001-233611 特開2001-350001号公報Japanese Patent Application Laid-Open No. 2001-350001 特開2007-272132号公報Japanese Patent Application Laid-Open No. 2007-272132

 ところで、特許文献1には、上記のような反射防止膜は、レンズに成膜されることが記載されている。近年レンズは種々の用途に用いれ、例えば、スマートフォン、タブレットPC等の撮影用のレンズユニットに用いられている。このようなレンズユニットには、外部からの不要な光の進入を防止するため、レンズ面の周縁に黒色の遮光層が設けられることがある。 Incidentally, Patent Document 1 describes that the above-mentioned anti-reflection film is formed on a lens. In recent years, lenses have been used for a variety of purposes, such as in lens units for photography in smartphones, tablet PCs, etc. Such lens units are sometimes provided with a black light-blocking layer around the periphery of the lens surface to prevent unwanted light from entering from outside.

 しかしながら、このような遮光層の表面性状によっては、外部からの光が遮光層によって反射し、その反射光が被写体側から見え、見栄えが悪いという問題が本発明者によって確認されている。 However, the inventors have confirmed that, depending on the surface properties of such a light-shielding layer, external light can be reflected by the light-shielding layer, and this reflected light can be seen from the subject side, resulting in an unattractive appearance.

 本発明は、上記問題を解決するためになされたものであり、遮光層によって生じる反射光を抑制することができる、レンズユニット及び塗布液を提供することを目的とする。 The present invention has been made to solve the above problems, and aims to provide a lens unit and coating liquid that can suppress reflected light caused by a light-shielding layer.

項1.外部からの光を撮像素子へ集光可能な携帯デバイス用のレンズユニットであって、
 前記レンズユニットは、所定間隔をおいて配置された複数のレンズを備え、
 前記レンズは、対向する一組の面を有し、
 前記各面は、レンズとして機能するレンズ表面を含む中央領域と、
 前記中央領域の周囲において、表面の少なくとも一部に高さの差が50nm以上である凹凸が設けられた凹凸領域を含む周辺領域と、
 を有し、
 前記中央領域及び前記周辺領域の凹凸領域の表面の上に反射防止膜が設けられている、
レンズユニット。
Item 1. A lens unit for a mobile device capable of condensing external light onto an imaging element,
The lens unit includes a plurality of lenses arranged at predetermined intervals,
the lens has a pair of opposing surfaces;
Each of the faces has a central region including a lens surface that functions as a lens;
a peripheral region including an uneven region around the central region, in which unevenness having a height difference of 50 nm or more is provided on at least a part of the surface;
and
an anti-reflection film is provided on the surface of the concave-convex region of the central region and the peripheral region;
Lens unit.

項2.前記周辺領域の凹凸領域は、前記外部からの光を遮蔽可能な粒子状の顔料を含む遮光膜によって形成されている、
項1に記載のレンズユニット。
Item 2. The concave-convex region of the peripheral region is formed by a light-shielding film containing a particulate pigment capable of blocking external light.
Item 1. The lens unit according to item 1.

項3.透明のカバー部材に収容された状態で、前記携帯デバイスに内蔵されている、
項1または2に記載のレンズユニット。
Item 3. The portable device is housed in a transparent cover member and is built into the portable device.
Item 3. The lens unit according to item 1 or 2.

項4.前記レンズユニットは、1mm以下の中心厚を有するレンズを含む、請項1から3のいずれかに記載のレンズユニット。 Item 4. The lens unit described in any one of items 1 to 3, wherein the lens unit includes a lens having a center thickness of 1 mm or less.

項5.前記レンズユニットは、各レンズの外径は20mm以下の外径を有するレンズを含む、項1から4のいずれかに記載のレンズユニット。 Item 5. The lens unit described in any one of Items 1 to 4, wherein the lens unit includes lenses each having an outer diameter of 20 mm or less.

項6.前記レンズユニットは、軸対称の凹状の曲面と凸状の曲面と、を含む、少なくとも一つの表面を有するレンズを含む、項1から5のいずれかに記載のレンズユニット。 Item 6. The lens unit described in any one of Items 1 to 5, wherein the lens unit includes a lens having at least one surface that includes an axially symmetric concave curved surface and a convex curved surface.

項7.前記反射防止膜は、機能性微粒子とバインダとを含有している、項1から6のいずれかに記載のレンズユニット。 Item 7. The lens unit described in any one of items 1 to 6, wherein the anti-reflection film contains functional fine particles and a binder.

項8.前記機能性微粒子が面方向に並ぶ微粒子層が、2層積層されている、項7に記載のレンズユニット。 Item 8. The lens unit described in Item 7, wherein the fine particle layer in which the functional fine particles are aligned in the surface direction is a two-layer laminate.

項9.前記機能性微粒子は、55±10nmの粒径を有する、項7または8に記載のレンズユニット。 Item 9. The lens unit described in Item 7 or 8, wherein the functional fine particles have a particle size of 55±10 nm.

項10.R>5rである、項8に記載のレンズユニット。
 但し、Rは前記機能性微粒子の径、rは前記バインダの断面径である。
Item 10. The lens unit according to Item 8, wherein R>5r.
Here, R is the diameter of the functional fine particles, and r is the cross-sectional diameter of the binder.

項11.前記反射防止膜は、表面に微細凹凸構造を有する無機物からなる膜である、項1から10のいずれかに記載のレンズユニット。 Item 11. A lens unit described in any one of Items 1 to 10, wherein the anti-reflection film is a film made of an inorganic material having a fine uneven structure on its surface.

項12.前記無機物は酸化物である、項11に記載のレンズユニット。 Item 12. The lens unit described in Item 11, wherein the inorganic substance is an oxide.

項13.前記酸化物は酸化アルミニウムである、項12に記載のレンズユニット。 Item 13. The lens unit described in Item 12, wherein the oxide is aluminum oxide.

項14.項1から13のいずれかに記載のレンズユニットに含まれる少なくとも一つのレンズの、少なくとも一つの面の上に形成される反射防止膜用の塗布液であって、
 前記レンズのレンズ表面より小さい屈折率を有する複数の機能性微粒子と、
 前記反射防止膜中で前記機能性微粒子間を固定可能であって、前記反射防止膜と前記レンズとを固定可能な、バインダの前駆体であるバインダ成分と、
 前記バインダ成分よりも低い沸点を有する、少なくとも1種の溶媒と、
を含有する塗布液。
Item 14. A coating liquid for an antireflection film formed on at least one surface of at least one lens included in the lens unit according to any one of Items 1 to 13, comprising:
a plurality of functional fine particles having a refractive index lower than that of the lens surface of the lens;
a binder component that is a precursor of a binder that can fix the functional fine particles in the anti-reflection film and fix the anti-reflection film and the lens together;
At least one solvent having a boiling point lower than that of the binder component;
A coating solution containing the above.

項15.前記溶媒は、60℃以上140℃以下である沸点を有する溶媒を含む、項14に記載の塗布液。 Item 15. The coating liquid according to Item 14, wherein the solvent includes a solvent having a boiling point of 60°C or higher and 140°C or lower.

項16.前記機能性微粒子の前記機能性微粒子及びバインダ成分の合計に対する質量比は、80%以上である、項14または15に記載の塗布液。 Item 16. The coating liquid according to Item 14 or 15, wherein the mass ratio of the functional fine particles to the total of the functional fine particles and binder component is 80% or more.

項17.前記機能性微粒子の粒径のばらつきは±10%以内である、項14から16のいずれかに記載の塗布液。 Item 17. The coating solution according to any one of Items 14 to 16, wherein the particle size variation of the functional fine particles is within ±10%.

項18.前記塗布液に対する、前記機能性微粒子と前記バインダ成分の合計の質量比は、20%以下である、項14から17のいずれかに記載の塗布液。 Item 18. The coating liquid according to any one of Items 14 to 17, wherein the total mass ratio of the functional fine particles and the binder component to the coating liquid is 20% or less.

項19.光制御部材上の光学薄膜であって、
 微粒子と、前記微粒子を固定するバインダとを含み、
 前記微粒子に対する前記バインダの比が質量基準で0.5以下であり、
 欠陥数が5以下である、
光学薄膜。
Item 19. An optical thin film on a light control member,
The composition includes fine particles and a binder that fixes the fine particles,
the ratio of the binder to the fine particles is 0.5 or less by mass;
The number of defects is 5 or less,
Optical thin film.

 本発明は、反射防止性能の観点から有利である。 The present invention is advantageous from the perspective of anti-reflection performance.

本発明に係る反射防止膜が適用される撮像ユニットの断面図である。1 is a cross-sectional view of an imaging unit to which an anti-reflection film according to the present invention is applied. 反射防止膜の断面図である。FIG. 2 is a cross-sectional view of an anti-reflection film. 反射防止膜の断面をSEMにより撮影した写真である。1 is a photograph of a cross section of an anti-reflection film taken by an SEM. スプレーコーティングに用いるノズルの例を示す断面図である。FIG. 1 is a cross-sectional view showing an example of a nozzle used for spray coating. 設置面上に並べられた塗布前のレンズを示す図である。FIG. 10 is a diagram showing lenses before coating arranged on a mounting surface. コーティング液組成物が塗布された後のレンズを示す断面図である。FIG. 2 is a cross-sectional view showing a lens after a coating liquid composition has been applied. スマートフォンの撮影ユニットを外部から撮影した写真である。This is a photo taken from the outside of the smartphone's camera unit. 図7の四角で示した領域の拡大図であり、黒色レジスト層上に反射防止膜を形成していない場合の写真である。FIG. 8 is an enlarged view of the area indicated by the square in FIG. 7, and is a photograph showing a case where an anti-reflection film is not formed on the black resist layer. 図7の四角で示した領域の拡大図であり、黒色レジスト層上に反射防止膜を形成した場合の写真である。FIG. 8 is an enlarged view of the area indicated by the square in FIG. 7, and is a photograph of the case where an anti-reflection film is formed on a black resist layer.

 以下、本発明に係るレンズユニットを含む撮像ユニットの一実施形態について図面を参照しつつ説明する。以下では、まず、撮像ユニット及び反射防止膜(光学薄膜)について説明し、その後、塗布液について説明する。 Below, one embodiment of an imaging unit including a lens unit according to the present invention will be described with reference to the drawings. First, the imaging unit and anti-reflection film (optical thin film) will be described, followed by a description of the coating liquid.

 <1.撮像ユニット>
 図1は、本実施形態に係る撮像ユニットの断面図である。この撮像ユニットは、スマートフォン、タブレットPC、ノートPC等の機器(携帯デバイスということがある)に設けられるものであり、レンズユニット100と、撮像素子(ここでは、固体撮像素子)Dと、固体撮像素子Dが設けられたセンサ基板Wと、を備えている。なお、図1は、撮像ユニットに含まれる各パーツや特徴を説明するための模式図であり、レンズの個数、形状、大きさ、配置、各部材間の距離等を実際の構成に即して正確に示すものではない。また、図1には説明の便宜上、3個のレンズ(L1、L2、L3)を例示しているが、本発明はこれに限定されるものではなく、レンズの個数がこれより多い場合や少ない場合も含まれることに留意されたい。
<1. Imaging unit>
FIG. 1 is a cross-sectional view of an imaging unit according to this embodiment. This imaging unit is installed in a device (sometimes referred to as a mobile device) such as a smartphone, tablet PC, or laptop PC, and includes a lens unit 100, an imaging element (here, a solid-state imaging element) D, and a sensor substrate W on which the solid-state imaging element D is installed. Note that FIG. 1 is a schematic diagram for explaining the various parts and features included in the imaging unit, and does not accurately depict the number, shape, size, and arrangement of lenses, the distance between each component, and other aspects of the actual configuration. Also, for convenience of explanation, FIG. 1 illustrates three lenses (L1, L2, and L3), but it should be noted that the present invention is not limited to this and may include a greater or lesser number of lenses.

 レンズユニット100は、3つ以上のレンズL1,L2,L3(以下、第1~第3レンズという)をスペーサ12を介して光の入射側(図1の上側)からのこの順に重ね合わせたものである。また、図の通り、各レンズの表面は曲面で構成されている。 Lens unit 100 consists of three or more lenses L1, L2, and L3 (hereinafter referred to as the first to third lenses) stacked in this order from the light incident side (top side in Figure 1) via spacers 12. As shown in the figure, the surface of each lens is curved.

 第1レンズL1は、第1上側レンズ表面10Aと、第1下側レンズ表面10Bと、を備えている。より詳細には、第1レンズL1の上面には凸状の第1上側レンズ表面10Aが形成され、下面には凹状の第1下側レンズ表面20Aが形成されている。第1レンズL1には、第1上側レンズ表面10Aのレンズ面を除く領域を遮光する目的で黒色遮光膜14が設けられている。同様に、第1下側レンズ表面20Aには、レンズ面を除く領域に、黒色遮光膜14が設けられている。黒色遮光膜14のパターンの形状は限定されず、黒色遮光膜14は、2つのレンズ10A,10Bの光軸と交差する部分が開口するパターンで形成されていればよい。同様の黒色遮光膜14は、第2及び第3レンズL2,3にも設けられている。但し、黒色遮光膜14は、レンズ面から後述するスペーサ12の近傍まで形成されており、スペーサ12からは離れている。 The first lens L1 has a first upper lens surface 10A and a first lower lens surface 10B. More specifically, the first lens L1 has a convex first upper lens surface 10A formed on its upper surface, and a concave first lower lens surface 20A formed on its lower surface. A black light-shielding film 14 is provided on the first lens L1 to shield the area of the first upper lens surface 10A from light, excluding the lens surface. Similarly, the first lower lens surface 20A is provided with a black light-shielding film 14 in the area excluding the lens surface. The shape of the pattern of the black light-shielding film 14 is not limited; it is sufficient that the black light-shielding film 14 is formed in a pattern that has openings where it intersects with the optical axes of the two lenses 10A and 10B. Similar black light-shielding films 14 are also provided on the second and third lenses L2 and L3. However, the black light-shielding film 14 is formed from the lens surface to the vicinity of the spacer 12, which will be described later, and is separated from the spacer 12.

 第2レンズL2は、第2上側レンズ面20Aと、第2下側レンズ面20Bと、を備えている。より詳細には、第2レンズL2の上面には、凹状のレンズ面を有する第2上側レンズ表面10Bが形成され、下面には凸状の第2下側レンズ表面20Bが形成されている。第2レンズL2の光入射側の表面における、第2上側レンズ表面10Bのレンズ面を除く領域、つまり、レンズ縁部には黒色遮光膜14が設けられている。図1に示す例では、第2レンズL2の下側の表面には黒色遮光膜14を設けていないが、第2下側レンズ表面20Bのレンズ面を除く領域に、パターニングされた黒色遮光膜14を設けてもよい。 The second lens L2 has a second upper lens surface 20A and a second lower lens surface 20B. More specifically, the upper surface of the second lens L2 has a second upper lens surface 10B with a concave lens surface, and the lower surface has a second lower lens surface 20B with a convex lens surface. A black light-shielding film 14 is provided on the light-incident surface of the second lens L2, in the area excluding the lens surface of the second upper lens surface 10B, i.e., on the lens edge. In the example shown in FIG. 1, the black light-shielding film 14 is not provided on the lower surface of the second lens L2, but a patterned black light-shielding film 14 may be provided on the area excluding the lens surface of the second lower lens surface 20B.

 第3レンズL3は、第3上側レンズ表面30Aと、第3下側レンズ表面30Bと、を備えている。より詳細には、第3レンズL3の上面には非球面などの曲面形状のレンズ面を有する第3上側レンズ表面30Aが形成され、下面には非球面などの曲面形状のレンズ面を有する第3下側レンズ表面30Bが形成されている。第3上側レンズ表面30Aにおいて光軸に近い領域では像側(図面上側)に光軸に対称な凸面、その周辺部では像側に光軸に対称な凹面となっている。一方、第3下側レンズ表面30Bは、第3上側レンズ表面30Aとは反対の形状となっている。このような形状のレンズでは周辺部が凹状になっているので、後述する塗布液がこの部分にたまりやすく均一に成膜をすることができず、効果的な反射効果を得られないおそれがある。これに対して、後述するように、例えば、表面エネルギが30dyne/cm以上の溶媒を用いれば、均一な膜を成膜することができる。なお、図1に示す第3レンズL3の非球面形状は一例であり、他の形状であってもよい。 The third lens L3 has a third upper lens surface 30A and a third lower lens surface 30B. More specifically, the upper surface of the third lens L3 is formed with a third upper lens surface 30A having a lens surface with a curved shape such as an aspherical surface, and the lower surface is formed with a third lower lens surface 30B having a lens surface with a curved shape such as an aspherical surface. The area of the third upper lens surface 30A close to the optical axis is convex on the image side (upper side of the drawing) and symmetrical about the optical axis, while the peripheral area is concave on the image side and symmetrical about the optical axis. On the other hand, the third lower lens surface 30B has the opposite shape to the third upper lens surface 30A. Because the peripheral area of a lens with this shape is concave, the coating liquid described below tends to accumulate in this area, preventing a uniform film from being formed, and there is a risk of not achieving an effective reflection effect. In contrast, as described below, a uniform film can be formed by using a solvent with a surface energy of 30 dyne/cm or more, for example. Note that the aspherical shape of the third lens L3 shown in Figure 1 is just an example, and other shapes may also be used.

 また、第3レンズL3の両面においては、各レンズ30A,30Bのレンズ面を除く領域に、黒色遮光膜14が設けられている。 In addition, a black light-shielding film 14 is provided on both surfaces of the third lens L3, excluding the lens surfaces of each of the lenses 30A and 30B.

 上述した6つのレンズ表面10A,10B,10C,20A,20B,30A,30Bは、いずれも光軸中心に対して回転対称となる形状に形成されている。各レンズL1,L2,L3は、全てのレンズ表面10A,10B,10C,20A,20B,30A,30Bの光軸が一致するように、スペーサ12に支持されている。なお、各レンズはそれぞれの光軸が略一致するように配列されていて、図1に示す模式図はその光軸を含む断面を示していることに留意する。 The six lens surfaces 10A, 10B, 10C, 20A, 20B, 30A, and 30B described above are all formed in shapes that are rotationally symmetrical about the center of the optical axis. Each lens L1, L2, and L3 is supported by a spacer 12 so that the optical axes of all lens surfaces 10A, 10B, 10C, 20A, 20B, 30A, and 30B coincide. Note that the lenses are arranged so that their optical axes approximately coincide, and the schematic diagram shown in Figure 1 shows a cross section including the optical axis.

 また、スペーサ12の下方向にはセンサ基板Wが配置されている。したがって、センサ基板Wは、第3レンズL3と間隔を開けて配置されている。例えばシリコンなどの半導体材料で形成されたウェハを平面視略矩形状に切り出して成形されている。固体撮像素子Dは、センサ基板Wの中央付近に設けられている。固体撮像素子Dは、例えばCCDイメージセンサやCMOSイメージセンサであり、チップ化された後で、配線等が形成された半導体基板上にボンディングされたものとすることができる。あるいは、固体撮像素子Dは、センサ基板Wに対して周知の成膜工程、フォトリソグラフィ工程、エッチング工程、不純物添加工程等を行い、センサ基板Wに電極、絶縁膜、配線等を形成して構成されたものであってもよい。 Furthermore, a sensor substrate W is arranged below the spacer 12. Therefore, the sensor substrate W is arranged with a gap between it and the third lens L3. For example, the sensor substrate W is formed by cutting out a wafer made of a semiconductor material such as silicon into a generally rectangular shape in plan view. The solid-state imaging element D is provided near the center of the sensor substrate W. The solid-state imaging element D may be, for example, a CCD image sensor or CMOS image sensor, which may be formed into a chip and then bonded onto a semiconductor substrate on which wiring and the like are formed. Alternatively, the solid-state imaging element D may be formed by subjecting the sensor substrate W to well-known film formation processes, photolithography processes, etching processes, impurity addition processes, and the like, and forming electrodes, insulating films, wiring, and the like on the sensor substrate W.

 スペーサ12は、円筒状に形成され、その内周面には環状の3つ溝121が軸方向に間隔を開けて形成されている。そして、各溝121には各レンズL1,L2,L3の外周縁がはめ込まれ、これによって各レンズL1,L2,L3はスペーサ12に間隔をおいて保持されている。また、スペーサ12は、固体撮像素子Dの周囲を取り囲むような形状の部材であってもよい。固体撮像素子Dをスペーサ12によって取り囲むことで外部から隔絶すれば、固体撮像素子Dにレンズを透過する光以外の光が入射しないように遮光することができる。この場合のスペーサ12が本発明のカバー部材に相当し、外部からの光や埃がレンズユニットに侵入するのを防止する。また、固体撮像素子Dを外部から密封することで、固体撮像素子Dに塵埃が付着することを防止できる。 The spacer 12 is cylindrical, with three annular grooves 121 formed on its inner surface at intervals in the axial direction. The outer periphery of each lens L1, L2, and L3 fits into each groove 121, thereby holding each lens L1, L2, and L3 at a distance on the spacer 12. The spacer 12 may also be a component shaped to surround the solid-state imaging element D. By surrounding the solid-state imaging element D with the spacer 12 and isolating it from the outside, it is possible to block light other than light that passes through the lenses from entering the solid-state imaging element D. In this case, the spacer 12 corresponds to the cover member of the present invention, and prevents external light and dust from entering the lens unit. Furthermore, by sealing the solid-state imaging element D from the outside, it is possible to prevent dust from adhering to the solid-state imaging element D.

 以上の構成により、スペーサ12は、レンズL1,L2,L3のレンズ表面10A,10B,20A,20B,30A,30Bが固体撮像素子D上で被写体像を結像させるように設計されている。 With the above configuration, the spacer 12 is designed so that the lens surfaces 10A, 10B, 20A, 20B, 30A, and 30B of the lenses L1, L2, and L3 form a subject image on the solid-state imaging device D.

 なお、スペーサ12の構成は特には限定されず、レンズL1,L2,L3同士を、又は、レンズL3とセンサ基板Wとの間隔を所定の距離を隔てた位置関係で保持できるのであれば、その形状は特に限定されず適宜変形することができる。スペーサ12は、各レンズL1,L2,L3のレンズ領域(レンズとして機能する領域)の外に接合することができるが、上記のように1つのスペーサに各レンズを取り付けるほか、各レンズL1,L2,L3の間にスペーサを取り付けて間隔を形成してもよい。 The configuration of the spacer 12 is not particularly limited, and its shape is not particularly limited and can be modified as appropriate, as long as it can maintain a predetermined distance between the lenses L1, L2, and L3, or between the lens L3 and the sensor substrate W. The spacer 12 can be bonded outside the lens area (area that functions as a lens) of each lens L1, L2, and L3, but in addition to attaching each lens to a single spacer as described above, spacers can also be attached between each lens L1, L2, and L3 to form a gap.

 また、撮像ユニットを収容する筐体を設け、この筐体によってレンズを保持してもよい。この場合、筐体がスペーサとして使用される。あるいは、レンズ自身の外周のレンズ領域外を肉厚にし、これをスペーサとして用いることもできる。さらには、レンズ領域の外の肉厚と遮光膜を合せてスペーサの役割を持たせてもよい。この場合の筐体が本発明のカバー部材に相当し、外部からの光や埃がレンズユニットに侵入するのを防止する。 Alternatively, a housing may be provided to house the imaging unit, and the lens may be held by this housing. In this case, the housing is used as a spacer. Alternatively, the outer periphery of the lens itself, outside the lens area, may be made thicker and used as a spacer. Furthermore, the thickness outside the lens area may be combined with a light-shielding film to function as a spacer. In this case, the housing corresponds to the cover member of the present invention, and prevents external light and dust from entering the lens unit.

 レンズモジュールとセンサ基板Wとの間に赤外線カットフィルターやカバーガラスを介在しても良い。その場合、各フィルターやカバーガラスの位置はスペーサや筐体により規定される。レンズが3枚以上存在する場合は、最下段のレンズの外側にセンサ基板を配置することができる。 An infrared cut filter or cover glass may be placed between the lens module and the sensor substrate W. In this case, the position of each filter or cover glass is determined by the spacer or housing. If there are three or more lenses, the sensor substrate can be placed outside the lowest lens.

 以上のように構成された撮像ユニットは、スマートフォン等に内蔵される図示しない回路基板にリフロー実装される。回路基板には、撮像ユニットが実装される位置に予めペースト状の半田が適宜印刷されており、そこに撮像ユニットが載せられ、この撮像ユニットを含む回路基板に赤外線の照射や熱風の吹付けといった加熱処理が施され、撮像ユニットが回路基板に溶着される。 The imaging unit configured as described above is reflow mounted on a circuit board (not shown) built into a smartphone or similar device. Paste solder is printed on the circuit board in advance at the location where the imaging unit will be mounted, and the imaging unit is placed on top of it. The circuit board containing the imaging unit is then subjected to a heating process such as infrared irradiation or hot air blowing, and the imaging unit is welded to the circuit board.

 各レンズL1,L2,L3は、樹脂により形成することができる。そのような樹脂としては、例えば、紫外線硬化性樹脂、熱硬化性樹脂、熱可塑性樹脂を用いることができるが、上述した撮像ユニットのリフロー実装を考慮すると、ガラス転移点が例えば110℃以上と比較的高いものが好ましく、250℃以上のものがより好ましい。 Each of the lenses L1, L2, and L3 can be formed from resin. Examples of such resins that can be used include UV-curable resin, thermosetting resin, and thermoplastic resin. However, considering the reflow mounting of the imaging unit described above, resins with a relatively high glass transition point, such as 110°C or higher, are preferred, and those with a glass transition point of 250°C or higher are even more preferred.

 具体的な樹脂としては、アクリル(メタクリル)系樹脂、スチレン系樹脂、ポリカーボネート樹脂、ポリオレフィン系樹脂、シクロオレフィン系樹脂、エポキシ樹脂、ポリエチレン系樹脂、ポリプロピレン系樹脂、ABS樹脂、ポリアミド樹脂、ポリアセタール樹脂、及びポリエチレンテレフタレート樹脂を用いることができる。 Specific resins that can be used include acrylic (methacrylic) resins, styrene resins, polycarbonate resins, polyolefin resins, cycloolefin resins, epoxy resins, polyethylene resins, polypropylene resins, ABS resins, polyamide resins, polyacetal resins, and polyethylene terephthalate resins.

 黒色遮光膜14は、黒色材料が含有されている。黒色材料としては、着色剤、金属粒子または金属を含有する粒子を用いることができる。着色剤としては、例えば、黒色顔料や染料を用いることができる。金属粒子また金属を含有する粒子としては、例えば、銅、銀、金、白金、錫、及びこれらの合金から選ばれる少なくとも1種とすることができる。 The black light-shielding film 14 contains a black material. The black material can be a colorant, metal particles, or metal-containing particles. The colorant can be, for example, a black pigment or dye. The metal particles or metal-containing particles can be, for example, at least one selected from copper, silver, gold, platinum, tin, and alloys thereof.

 上記のような黒色材料を溶剤に溶かして分散させた後、光重合開始剤などの公知の添加物を添加して液状の黒色遮光膜組成物を形成する。そして、黒色遮光膜組成物をレンズモジュール上に公知の方法でパターン形成し、上記のような黒色遮光膜14を形成する。なお、このような黒色遮光膜14は、一般的には、凹凸の高さの差が50nm以上である。また上記のようなパターニングの他にフィルム状の黒色遮光膜14を用いてもよい。なお、遮光膜における凹凸の高さは、慣用な方法で測定可能である。遮光膜における凹凸の高さは、例えば、膜の断面をSEM(走査型電子顕微鏡)で像観察を行いながら、その視野に対して蛍光X線による分析を行うこと(SEM-EDX法)により、膜の厚み方向に各元素のマッピングを行い、その遮光膜の凹凸を構成する元素の厚みを測定することで凹凸の高さを算出できる。 After dissolving and dispersing the black material described above in a solvent, known additives such as a photopolymerization initiator are added to form a liquid black light-shielding film composition. The black light-shielding film composition is then patterned on a lens module using a known method to form the black light-shielding film 14 described above. This type of black light-shielding film 14 generally has a height difference between the protrusions and recesses of 50 nm or more. In addition to the patterning described above, a film-like black light-shielding film 14 may also be used. The height of the protrusions and recesses in the light-shielding film can be measured using conventional methods. For example, the height of the protrusions and recesses in the light-shielding film can be calculated by observing the cross section of the film using a scanning electron microscope (SEM) and performing fluorescent X-ray analysis of the field of view (SEM-EDX method) to map each element in the thickness direction of the film, and measuring the thickness of the elements that make up the protrusions and recesses in the light-shielding film.

 また、各レンズのD線(波長589.3nm)における屈折率nSBは、例えば1.20~2.50であり、1.30~2.30であってもよく、1.35~2.00であってもよい。 The refractive index n SB of each lens at the D line (wavelength 589.3 nm) is, for example, 1.20 to 2.50, may be 1.30 to 2.30, or may be 1.35 to 2.00.

 L1、L2及びL3の各レンズの光軸上の肉厚(中心厚)(H1,H2,H3)は、例えば、1mm以下であることが好ましく、0.5mm以下であることがさらに好ましい。また、各レンズの外径Kは、20mm以下であることが好ましく、10mm以下であることがさらに好ましい。 The thickness (center thickness) (H1, H2, H3) of each of the lenses L1, L2, and L3 on the optical axis is preferably 1 mm or less, and more preferably 0.5 mm or less. Furthermore, the outer diameter K of each lens is preferably 20 mm or less, and more preferably 10 mm or less.

 また、各レンズL1~L3において反射防止膜が形成されている領域(中央領域)は、各レンズ表面10A,10B,20A,20B,30A,30Bである。そして、黒色遮光膜14が形成されているのは、中央領域の外側の領域(周辺領域)の少なくとも一部であり、本実施形態では、黒色遮光膜14の上にも反射防止膜が形成されている。レンズ表面10A,10B,20A,20B,30A,30Bに形成されている反射防止膜と、黒色遮光膜14に形成されている反射防止膜は同じであり、後述するように同時に形成することができる。なお、周辺領域の全体に黒色遮光膜14を形成しなくてもよく、要求される性能に応じて黒色遮光膜14を形成すればよい。そして、周辺領域において、反射防止膜を形成するのは、黒色遮光膜14の上であり、その他の領域にまで形成する必要はない。特に、スペーサ12に固定されている領域には、反射防止膜は形成されないことが好ましい。 Furthermore, the area (central area) where the anti-reflection film is formed in each of the lenses L1 to L3 is the lens surface 10A, 10B, 20A, 20B, 30A, and 30B. The black light-shielding film 14 is formed in at least a portion of the area outside the central area (peripheral area). In this embodiment, the anti-reflection film is also formed on the black light-shielding film 14. The anti-reflection film formed on the lens surfaces 10A, 10B, 20A, 20B, 30A, and 30B and the anti-reflection film formed on the black light-shielding film 14 are the same and can be formed simultaneously, as described below. Note that the black light-shielding film 14 does not have to be formed over the entire peripheral area; it is sufficient to form the black light-shielding film 14 according to the required performance. In the peripheral area, the anti-reflection film is formed on the black light-shielding film 14, and it is not necessary to form it in other areas. In particular, it is preferable not to form the anti-reflection film in the area fixed to the spacer 12.

 <2.反射防止膜用塗布液>
 本実施形態において、塗布液を構成するコーティング液組成物は、少なくとも、機能性微粒子と、バインダ前駆体(バインダ成分)と、溶媒とを含む。以下、コーティング液組成物を構成する各材料について説明する。
<2. Coating liquid for anti-reflection film>
In the present embodiment, the coating liquid composition constituting the coating liquid contains at least functional fine particles, a binder precursor (binder component), and a solvent. Each material constituting the coating liquid composition will be described below.

 <2-1.微粒子>
 微粒子(機能性微粒子)は、無機物微粒子であっても有機物微粒子であってもよい。無機物微粒子は、例えば、酸化物微粒子、ハロゲン化物微粒子であり、特に酸化物微粒子である。酸化物微粒子としては、シリカ微粒子、アルミナ微粒子、ジルコニア微粒子、チタニア微粒子等が挙げられる。酸化物微粒子は、アルミノシリケート微粒子のように、複数の元素の酸化物を含んでいてもよい。ハロゲン化物微粒子は、例えば、塩化物微粒子、フッ化物微粒子である。フッ化物微粒子としては、フッ化マグネシウム微粒子、フッ化カルシウム微粒子等が挙げられる。有機物微粒子は、樹脂微粒子であってもよい。樹脂微粒子に含まれる樹脂としては、(メタ)アクリル系樹脂、スチレン系樹脂、ウレタン系樹脂等が挙げられる。ただし、後述するプラズマ照射(プラズマ処理)に代表される処理を膜に適用する場合は、微粒子は、無機物微粒子であることが望ましい。
<2-1. Fine particles>
The fine particles (functional fine particles) may be inorganic fine particles or organic fine particles. Examples of inorganic fine particles include oxide fine particles and halide fine particles, particularly oxide fine particles. Examples of oxide fine particles include silica fine particles, alumina fine particles, zirconia fine particles, and titania fine particles. The oxide fine particles may contain oxides of multiple elements, such as aluminosilicate fine particles. Examples of halide fine particles include chloride fine particles and fluoride fine particles. Examples of fluoride fine particles include magnesium fluoride fine particles and calcium fluoride fine particles. The organic fine particles may be resin fine particles. Examples of resins contained in the resin fine particles include (meth)acrylic resins, styrene resins, and urethane resins. However, when a treatment such as plasma irradiation (plasma treatment), which will be described later, is applied to the film, it is desirable that the fine particles be inorganic fine particles.

 微粒子としては、例えば、中空微粒子を用いることができる。中空微粒子は反射防止膜の低屈折率化に有利である。中空微粒子としては、例えば、シリカ中空微粒子、フッ化マグネシウム中空微粒子を用いることができる。その他、微粒子としては、内部に空隙が形成されたものであってもよく、例えば、空隙が外部に露出するような微粒子でもよい。また、多孔質のような微粒子でもよい。 As the fine particles, for example, hollow fine particles can be used. Hollow fine particles are advantageous for lowering the refractive index of the anti-reflection film. As hollow fine particles, for example, hollow silica fine particles and hollow magnesium fluoride fine particles can be used. In addition, the fine particles may have voids formed inside, for example, fine particles whose voids are exposed to the outside. Porous fine particles are also possible.

 微粒子の平均粒径は、例えば、10~300nm、10~200nm、10~150nm、場合によっては10~100nmの範囲である。平均粒径は、15~100nm、さらに20~100nm、30~100nmの範囲にあってもよい。平均粒径は、30~80nmの範囲にあってもよい。微粒子の平均粒径は、透過型電子顕微鏡又は走査型電子顕微鏡を用いて測定できる。この測定は、任意に選択した50個の微粒子について各微粒子の最大粒径の平均値を求めることにより実施される。ここで述べた平均粒径は、いわゆる一次粒径に基づいている。 The average particle size of the microparticles is, for example, in the range of 10 to 300 nm, 10 to 200 nm, 10 to 150 nm, or in some cases 10 to 100 nm. The average particle size may be in the range of 15 to 100 nm, or even 20 to 100 nm, or 30 to 100 nm. The average particle size may be in the range of 30 to 80 nm. The average particle size of the microparticles can be measured using a transmission electron microscope or a scanning electron microscope. This measurement is performed by calculating the average maximum particle size of 50 randomly selected microparticles. The average particle size mentioned here is based on the so-called primary particle size.

 微粒子の粒径のばらつきは±20%以下であることが好ましく、±10%以下であることがより好ましい。微粒子の平均粒径のばらつきは、透過型電子顕微鏡又は走査型電子顕微鏡を用いて測定でき、この測定値において、任意に選択した50個の微粒子について各微粒子の最大粒径について、各粒子の最大値と最小値の差分を平均粒径で割ることで算出できる。 The variation in particle size of the microparticles is preferably ±20% or less, and more preferably ±10% or less. The variation in the average particle size of the microparticles can be measured using a transmission electron microscope or a scanning electron microscope, and can be calculated by dividing the difference between the maximum and minimum particle sizes of 50 randomly selected microparticles by the average particle size.

 微粒子のD線の波長(589.3nm)における屈折率は、レンズの屈折率nSBよりも小さく、例えば1.10~1.40であり、望ましくは1.15~1.40であり、より望ましくは1.17~1.35である。なお、微粒子の屈折率は、微粒子の外殻をなす材料の屈折率ではなく、中空部aの作用も含めた微粒子の実質的な屈折率である。微粒子の特定の波長の屈折率は、広く知られている場合もあるし、又は、微粒子の近似球体の大きさ、微粒子の外殻の材質や厚み、等の代表的又は平均的な数値を得て、例えばBruggemannの式を用いた有効媒質近似法によって求めることができる。 The refractive index of the microparticle at the wavelength of the D line (589.3 nm) is smaller than the refractive index n SB of the lens, and is, for example, 1.10 to 1.40, preferably 1.15 to 1.40, and more preferably 1.17 to 1.35. Note that the refractive index of the microparticle is not the refractive index of the material that forms the microparticle's outer shell, but the actual refractive index of the microparticle, including the effect of the hollow portion a. The refractive index of a microparticle at a specific wavelength may be widely known, or it can be calculated by, for example, the effective medium approximation method using the Bruggemann equation, by obtaining representative or average values for the approximate spherical size of the microparticle, the material and thickness of the microparticle's outer shell, etc.

 反射防止膜2に含まれる機能性微粒子の個数は、例えば、√3S/2R以上とすることができる。但し、Sは塗布液が塗布されるレンズの表面積、Rは微粒子の径である。なお、微粒子の径Rは、前掲の微粒子の平均粒径の値である。 The number of functional microparticles contained in the anti-reflection coating 2 can be, for example, √3S/2R or more, where S is the surface area of the lens to which the coating liquid is applied, and R is the diameter of the microparticles. Note that the diameter R of the microparticles is the average particle size of the microparticles mentioned above.

 これにより、後述するように、反射防止膜2を複数層で形成することができる。低屈折率を実現するには微粒子粒が剥がれやすいが、微粒子が単層で並んでいれば、微粒子が剥がれた時に光学特性(反射防止機能)は損なわれてしまう。これに対して、微粒子が複数層に亘って積層されていれば、例え微粒子が1粒剥がれても、光学特性に対する影響を小さくすることができる。 This allows the anti-reflection coating 2 to be formed in multiple layers, as described below. To achieve a low refractive index, the fine particles are prone to peeling, but if the fine particles are arranged in a single layer, the optical properties (anti-reflection function) will be impaired when the fine particles peel off. In contrast, if the fine particles are stacked in multiple layers, the impact on the optical properties can be minimized even if one fine particle peels off.

 微粒子の径Rが55±10nmである場合には、微粒子の個数は、√3S/R以下とすることができる。これにより、成膜後に微粒子を2層にすることができ、粒径の範囲から膜厚は90~130nmとなる。この範囲では、可視光帯域で光干渉作用により反射防止効果を得ることができる。 When the particle diameter R is 55±10 nm, the number of particles can be √3S/R or less. This allows the particles to form two layers after film formation, and the film thickness will be 90-130 nm due to the particle size range. Within this range, an anti-reflection effect can be achieved in the visible light band due to optical interference.

 <2-2.バインダ及びその前駆体>
 バインダは、微粒子を互いに結着し、微粒子を基材等の下部構造(本実施形態ではレンズ)に結着させる作用を奏する。バインダは、反射防止膜において微粒子を固定し、膜の耐摩耗性を改善する。バインダは、コーティング液組成物において前駆体として添加される。バインダは、例えば酸化物成分、より具体的には金属酸化物成分を含む。金属酸化物成分を供給するバインダ前駆体は、金属アルコキシドであってもよい。ゾルゲル法と呼ばれる手法により、金属アルコキシドは、金属酸化物成分を提供する。例えば、シリコンアルコキシドは、加水分解反応及び縮重合反応を経てシリカ成分を提供する。金属アルコキシドは、シリコンアルコキシドに限らず、アルミニウムアルコキシド、ジルコニウムアルコキシド、チタニウムアルコキシド、ニオブアルコキシド、タンタルアルコキシド等であってもよい。また、バインダ前駆体(バインダ成分)の沸点は、後述する溶媒の沸点よりも高くなっている。
<2-2. Binder and its precursor>
The binder functions to bind the fine particles to each other and to the underlying structure, such as the substrate (in this embodiment, the lens). The binder fixes the fine particles in the anti-reflection coating and improves the abrasion resistance of the coating. The binder is added as a precursor to the coating liquid composition. The binder includes, for example, an oxide component, more specifically, a metal oxide component. The binder precursor that supplies the metal oxide component may be a metal alkoxide. The metal alkoxide provides the metal oxide component using a technique known as the sol-gel method. For example, silicon alkoxide provides the silica component through a hydrolysis reaction and a condensation polymerization reaction. The metal alkoxide is not limited to silicon alkoxide, but may also be aluminum alkoxide, zirconium alkoxide, titanium alkoxide, niobium alkoxide, tantalum alkoxide, etc. The boiling point of the binder precursor (binder component) is higher than the boiling point of the solvent described below.

 バインダは、金属酸化物成分と共に有機成分を含んでいてもよい。有機成分は、金属アルコキシドに由来する成分、より具体的には金属アルコキシドを構成する金属原子に結合した有機基に由来する成分であってもよい。すなわち、バインダは、金属酸化物成分と有機成分とを含む無機有機複合体であってもよい。無機有機複合体であるバインダは、例えば、R2 nSi(OR14-nにより示されるシリコンアルコキシドから供給されうる。ここで、R1は炭素数1~4のアルキル基であり、R2はバインダに有機成分を供給する有機基であり、nは1又は2、特に1である。R2は、特に限定されず、脂肪族基であっても芳香族基であってもよく、ヘテロ原子を含んでいてもよい。R2は、炭素数1~10の炭化水素基、特に炭素数1~10、さらに1~4のアルキル基であってもよい。nが1であるシリコンアルコキシド(トリアルコキシシラン)からは、シルセスキオキサンと呼ばれるバインダが供給される。 The binder may contain an organic component in addition to the metal oxide component. The organic component may be a component derived from a metal alkoxide, more specifically, a component derived from an organic group bonded to a metal atom constituting the metal alkoxide. That is, the binder may be an inorganic-organic composite containing a metal oxide component and an organic component. An inorganic-organic composite binder may be provided, for example, from a silicon alkoxide represented by the formula R 2 n Si(OR 1 ) 4-n . Here, R 1 is an alkyl group having 1 to 4 carbon atoms, R 2 is an organic group that provides the organic component to the binder, and n is 1 or 2, particularly 1. R 2 is not particularly limited and may be an aliphatic group or an aromatic group, or may contain a heteroatom. R 2 may be a hydrocarbon group having 1 to 10 carbon atoms, particularly an alkyl group having 1 to 10 carbon atoms, or even 1 to 4 carbon atoms. Silicon alkoxides (trialkoxysilanes) in which n is 1 provide binders called silsesquioxanes.

 バインダ前駆体が上記のようなSi-O-Rを主成分とすると、詳細な原理はわかっていないものの反射防止膜を形成後に有機成分が揮発し、膜中に有機成分が少ない。その結果、レンズが曇るのを抑制することができる。 When the binder precursor is primarily composed of Si-O-R as described above, the organic components volatilize after the anti-reflective coating is formed, leaving fewer organic components in the film, although the detailed mechanism is not yet understood. As a result, lens fogging can be suppressed.

 バインダは、1種のみの前駆体から供給してもよいが、2種以上の前駆体から供給することもできる。2種の前駆体の組み合わせの一例は、アルキルトリアルコキシシラン及びテトラアルコキシシランである。ここでも、アルキル基の炭素数は、特に限定されず、アルコキシ基に含まれるアルキル基については、例えば1~4であり、シリコン原子に結合しているアルキル基については、例えば1~10、特に1~4である。テトラアルコキシシランは、上述の一般式においてn=0が成立する化合物に相当する。 The binder may be supplied from only one type of precursor, but can also be supplied from two or more types of precursors. One example of a combination of two types of precursors is an alkyltrialkoxysilane and a tetraalkoxysilane. Here, too, the number of carbon atoms in the alkyl group is not particularly limited; for example, the alkyl group contained in the alkoxy group has 1 to 4 carbon atoms, and for example, the alkyl group bonded to the silicon atom has 1 to 10 carbon atoms, particularly 1 to 4 carbon atoms. Tetraalkoxysilane corresponds to a compound in which n = 0 in the above general formula.

 シリコンアルコキシド等の金属アルコキシドは、コーティング液組成物に加水分解物として含まれていてもよい。加水分解物は、部分的に加水分解が進行した部分加水分解物であってもよい。バインダ前駆体は、金属アルコキシド又はその加水分解物、特にアルコキシシラン又はその加水分解物であってもよい。 Metal alkoxides such as silicon alkoxides may be contained in the coating liquid composition as a hydrolysate. The hydrolysate may be a partial hydrolysate in which hydrolysis has progressed partially. The binder precursor may be a metal alkoxide or a hydrolysate thereof, in particular an alkoxysilane or a hydrolysate thereof.

 <2-3.バインダ前駆体及び微粒子の割合>
 以降の記載で示す比は、すべて質量基準である。また、この比は、前駆体ではなく、膜に供給される成分に基づいて算出される。したがって、例えば上記一般式におけるR1の相違は比に影響を与えない。塗布液中の固形分(バインダ前駆体と微粒子)に対する微粒子の割合は、80%以上が好ましく、90%以上がさらに好ましく、95%以上が特に好ましい。これにより、微粒子間のバインダの量が小さくなり、柔軟な反射防止膜を形成することができる。
<2-3. Ratio of binder precursor and fine particles>
All ratios shown below are based on mass. Furthermore, these ratios are calculated based on the components supplied to the film, not the precursor. Therefore, for example, differences in R1 in the above general formula do not affect the ratio. The ratio of fine particles to the solid content (binder precursor and fine particles) in the coating solution is preferably 80% or more, more preferably 90% or more, and particularly preferably 95% or more. This reduces the amount of binder between the fine particles, allowing for the formation of a flexible anti-reflective coating.

 また、塗布液に対する、機能性微粒子とバインダ前駆体の合計の質量比は、20%以下であることが好ましく、10%以下であることがさらに好ましい。これにより塗布液における溶媒の量が多くなるため、反射防止膜をポーラス構造にしやすくなる。 Furthermore, the total mass ratio of the functional fine particles and binder precursor to the coating liquid is preferably 20% or less, and more preferably 10% or less. This increases the amount of solvent in the coating liquid, making it easier to create a porous structure in the anti-reflective coating.

 <2-4.微粒子密接抑制剤>
 コーティング液組成物には、微粒子密接抑制剤を添加することが望ましい。
<2-4. Fine particle contact inhibitor>
It is desirable to add a fine particle adhesion inhibitor to the coating liquid composition.

 微粒子密接抑制剤は、例えば、300℃以上、さらに400℃以上の沸点を有していてもよい。微粒子密接抑制剤の沸点は、バインダ前駆体の硬化温度よりも高いことが望ましい。バインダ前駆体の硬化温度は、バインダ前駆体からバインダを生成するために適用される加熱工程における最高温度である。また、微粒子密接抑制剤は、溶媒より沸点が高いことが望ましい。コーティング液組成物が溶媒として複数種の化合物を含む場合、微粒子密接抑制剤は、溶媒として含まれているすべての化合物の沸点よりも高い沸点を有していてもよい。また、後述するように、コーティング液組成物が第1溶媒及び第2溶媒を含み、第2溶媒の沸点が第1溶媒の沸点よりも高い場合、微粒子密接抑制剤の沸点は、第2溶媒の沸点より高くてもよい。 The particle adhesion inhibitor may have a boiling point of, for example, 300°C or higher, or even 400°C or higher. The boiling point of the particle adhesion inhibitor is desirably higher than the curing temperature of the binder precursor. The curing temperature of the binder precursor is the maximum temperature in the heating process applied to produce the binder from the binder precursor. The particle adhesion inhibitor also desirably has a boiling point higher than that of the solvent. When the coating liquid composition contains multiple compounds as solvents, the particle adhesion inhibitor may have a boiling point higher than the boiling points of all of the compounds contained as solvents. Furthermore, as described below, when the coating liquid composition contains a first solvent and a second solvent and the boiling point of the second solvent is higher than the boiling point of the first solvent, the boiling point of the particle adhesion inhibitor may be higher than the boiling point of the second solvent.

 微粒子密接抑制剤は、例えば、1000mPa・s以上、1200mPa・s以上、1400mPa・s以上、1600mPa・s以上、さらに1800mPa・s以上の粘度を有していてもよい。コーティング液組成物が溶媒として複数種の化合物を含む場合、微粒子密接抑制剤は、溶媒として含まれているすべての化合物の粘度よりも高い粘度を有していてもよい。微粒子密接抑制剤の相対的に高い粘度は、コーティング液組成物を曲面上に塗布する際に特に有用である。コーティング液組成物が第1溶媒及び第2溶媒を含み、第2溶媒の粘度が第1溶媒の粘度よりも高い場合、微粒子密接抑制剤の粘度は、第2溶媒の粘度より高くてもよい。なお、粘度は、常温(25℃)において振動式粘度計(例えば、セコニック社製、プローブ:PR-10L、コントローラVM-10A)を用いて測定できる。微粒子密接抑制剤が溶媒を含む場合は、溶媒を除去してから粘度測定が実施される。 The particle adhesion inhibitor may have a viscosity of, for example, 1000 mPa·s or more, 1200 mPa·s or more, 1400 mPa·s or more, 1600 mPa·s or more, or even 1800 mPa·s or more. When the coating liquid composition contains multiple compounds as solvents, the particle adhesion inhibitor may have a viscosity higher than the viscosity of all of the compounds contained as solvents. The relatively high viscosity of the particle adhesion inhibitor is particularly useful when applying the coating liquid composition to a curved surface. When the coating liquid composition contains a first solvent and a second solvent and the viscosity of the second solvent is higher than the viscosity of the first solvent, the viscosity of the particle adhesion inhibitor may be higher than the viscosity of the second solvent. Viscosity can be measured at room temperature (25°C) using a vibration viscometer (e.g., Sekonic Corporation, probe: PR-10L, controller: VM-10A). When the particle adhesion inhibitor contains a solvent, the viscosity is measured after removing the solvent.

 微粒子密接抑制剤は、ポリマー、特に熱可塑性ポリマーであってもよい。微粒子密接抑制剤は、分散剤であってもよい。 The particulate adhesion inhibitor may be a polymer, particularly a thermoplastic polymer. The particulate adhesion inhibitor may also be a dispersant.

 <2-5.分散剤>
 コーティング液組成物には、アニオン系ポリマー型分散剤及び高分子型分散剤からなる群より選択される少なくとも一つに該当する分散剤を添加することが望ましい。分散剤は、微粒子密接抑制剤として機能しうる。分散剤は、微粒子密接抑制剤について例示した沸点を有しうる。分散剤は、微粒子密接抑制剤について例示した粘度を有しうる。
<2-5. Dispersants>
It is desirable to add at least one dispersant selected from the group consisting of anionic polymer dispersants and polymer dispersants to the coating liquid composition. The dispersant can function as a particulate adhesion inhibitor. The dispersant can have a boiling point as exemplified for the particulate adhesion inhibitor. The dispersant can have a viscosity as exemplified for the particulate adhesion inhibitor.

 アニオン系ポリマー型分散剤は、カルボン酸塩基及びスルホン酸塩基に代表されるアニオン性基を有する。また、アニオン系ポリマー型分散剤は、ポリマー型の分子構造、すなわち繰り返し単位を含む分子構造を有する。アニオン系ポリマー型分散剤は、単独重合体(ホモポリマー)であっても共重合体(コポリマー)であってもよい。アニオン系ポリマー型分散剤は、繰り返し単位にアニオン性基を有することが望ましい。 Anionic polymer dispersants have anionic groups, such as carboxylate and sulfonate groups. Furthermore, anionic polymer dispersants have a polymeric molecular structure, i.e., a molecular structure containing repeating units. Anionic polymer dispersants may be either homopolymers or copolymers. It is desirable for anionic polymer dispersants to have anionic groups in the repeating units.

 アニオン系ポリマー型分散剤としては、ポリアクリル酸塩、ポリスチレンスルホン酸塩、スチレン無水マレイン酸共重合体、オレフィン無水マレイン酸共重合体、アクリルアミドアクリル酸塩共重合体、アルギン酸塩、カルボキシメチルセルロース塩を例示できる。塩は、例えば、ナトリウム塩、カリウム塩等のアルカリ金属塩である。無水マレイン酸に由来するカルボン酸もナトリウム塩等として存在しうる。 Examples of anionic polymer dispersants include polyacrylates, polystyrene sulfonates, styrene-maleic anhydride copolymers, olefin-maleic anhydride copolymers, acrylamide-acrylate copolymers, alginates, and carboxymethylcellulose salts. Examples of salts include alkali metal salts such as sodium salts and potassium salts. Carboxylic acids derived from maleic anhydride can also exist as sodium salts, etc.

 高分子型分散剤は、平均分子量2000以上であって、汎用の界面活性剤である低分子型分散剤よりも相対的に分子量が大きく、微粒子に対して有効に作用する。高分子型分散剤の分子量は、3000以上、4000以上、5000以上、6000以上、7000以上、8000以上、9000以上、さらに10000以上であってもよい。分子量の上限は、特に限定されるものではないが、例えば20万以下、さらに10万以下である。高分子型分散剤は、アニオン系、ノニオン系、カチオン系のいずれであってもよいが、アニオン系又はノニオン系であることが望ましい。 Polymer dispersants have an average molecular weight of 2000 or more, which is relatively larger than the low-molecular-weight dispersants that are general-purpose surfactants, and they act effectively on fine particles. The molecular weight of polymer dispersants may be 3000 or more, 4000 or more, 5000 or more, 6000 or more, 7000 or more, 8000 or more, 9000 or more, or even 10,000 or more. There is no particular upper limit to the molecular weight, but it is, for example, 200,000 or less, or even 100,000 or less. Polymer dispersants may be anionic, nonionic, or cationic, but anionic or nonionic dispersants are preferable.

 アニオン系高分子型分散剤の例は、アニオン系ポリマー型分散剤の例と同一である。ノニオン系高分子型分散剤としては、ポリビニルアルコール、ポリエチレングリコール、ポリアクリルアミド等を例示できる。カチオン系高分子型分散剤としては、ポリエチレンイミン、ポリビニルイミダゾリン等を例示できる。 Examples of anionic polymer dispersants are the same as those of anionic polymer dispersants. Examples of nonionic polymer dispersants include polyvinyl alcohol, polyethylene glycol, and polyacrylamide. Examples of cationic polymer dispersants include polyethyleneimine and polyvinylimidazoline.

 <2-6.微粒子密接抑制剤の配合量>
 微粒子密接抑制剤又は分散剤の配合量は、微粒子に対して、質量基準で、0.4以上、0.5以上、2以上、4以上、5以上、6以上、7以上、8以上、9以上、さらに10以上であってもよい。この比の上限は、特に限定されず、1000以下、特に100以下であってもよい。この比の例は、4以上100以下、6以上100以下、8以上100以下、さらに10以上100以下である。
<2-6. Amount of fine particle contact inhibitor>
The amount of the fine particle adhesion inhibitor or dispersant blended relative to the fine particles may be, on a mass basis, 0.4 or more, 0.5 or more, 2 or more, 4 or more, 5 or more, 6 or more, 7 or more, 8 or more, 9 or more, or even 10 or more. The upper limit of this ratio is not particularly limited, and may be 1,000 or less, particularly 100 or less. Examples of this ratio are 4 or more and 100 or less, 6 or more and 100 or less, 8 or more and 100 or less, and even 10 or more and 100 or less.

 微粒子密接抑制剤又は分散剤は、バインダと同様、微粒子の間隔を保持する作用を奏しうる。微粒子密接抑制剤又は分散剤を含む場合、微粒子に対するバインダと微粒子密接抑制剤又は分散剤との合計量の比は、0.5以上が望ましい。この比についても、質量基準で記述する。この比は、0.8以上、1.0以上、1.1以上、1.2以上、1.5以上、1.7以上、さらに1.8以上であってもよい。この比の上限は、特に限定されず、1000以下、特に100以下であってもよい。この比の例は、0.5以上100以下、1.0以上100以下である。 Like a binder, a particle adhesion inhibitor or dispersant can function to maintain the spacing between particles. When a particle adhesion inhibitor or dispersant is included, the ratio of the total amount of binder and particle adhesion inhibitor or dispersant to the amount of particles is desirably 0.5 or more. This ratio is also stated on a mass basis. This ratio may be 0.8 or more, 1.0 or more, 1.1 or more, 1.2 or more, 1.5 or more, 1.7 or more, or even 1.8 or more. There is no particular upper limit to this ratio, and it may be 1000 or less, and in particular 100 or less. Examples of this ratio are 0.5 or more and 100 or less, and 1.0 or more and 100 or less.

 <2-7.溶媒>
 溶媒は、単一種の溶媒から構成されていてもよいが、互いに沸点が異なる2種類以上の溶媒を含むことが望ましい。溶媒は、共に、有機溶媒、特に極性有機溶媒である第1溶媒及び第2溶媒を含み得る。主として2種類の溶媒(第1溶媒及び第2溶媒)を用いる場合には、第1溶媒の沸点は、60~150℃が好ましく、80~140℃がさらに好ましく、90~130℃が特に好ましい。第2溶媒の沸点は、150℃より高いことが好ましく、165℃以上がさらに好ましく、特に170℃以上が特に好ましい。第2溶媒の沸点の一例は、150~280℃である。微粒子密接抑制剤又は分散剤を含む場合、第2溶媒の沸点は、微粒子密接抑制剤又は分散剤の沸点よりも低
くてよい。第1溶媒と第2溶媒の沸点の差は、例えば、50~100℃とすることができる。
<2-7. Solvent>
The solvent may be composed of a single type of solvent, but it is desirable to include two or more solvents with different boiling points. The solvent may include a first solvent and a second solvent, both of which are organic solvents, particularly polar organic solvents. When mainly using two types of solvents (first solvent and second solvent), the boiling point of the first solvent is preferably 60 to 150°C, more preferably 80 to 140°C, and particularly preferably 90 to 130°C. The boiling point of the second solvent is preferably higher than 150°C, more preferably 165°C or higher, and particularly preferably 170°C or higher. An example of the boiling point of the second solvent is 150 to 280°C. When a particulate adhesion inhibitor or dispersant is included, the boiling point of the second solvent may be lower than the boiling point of the particulate adhesion inhibitor or dispersant. The difference in boiling point between the first solvent and the second solvent may be, for example, 50 to 100°C.

 第1溶媒及び第2溶媒は、第1溶媒に対する第2溶媒の比により表示して、質量基準で1未満、0.8以下、さらに0.6以下、特に0.4以下となるように配合するとよい。この比の下限は、0.03以上、0.05、さらに0.07以上であってもよい。この比は、例えば、0.03以上0.8以下、0.05以上0.5以下、さらに0.07以上0.4以下である。これらの比は、スプレーコーティング、特にスプレーコーティングにより曲面上に塗布されるコーティング液組成物に滴定している。 The first and second solvents are preferably blended so that the ratio of the second solvent to the first solvent is less than 1, 0.8 or less, preferably 0.6 or less, and particularly preferably 0.4 or less, by mass. The lower limit of this ratio may be 0.03 or more, 0.05, or even 0.07 or more. This ratio is, for example, 0.03 or more and 0.8 or less, 0.05 or more and 0.5 or less, or even 0.07 or more and 0.4 or less. These ratios are titrated into a coating liquid composition to be applied by spray coating, particularly to a curved surface by spray coating.

 第1溶媒及び第2溶媒としては、相溶性に優れた溶媒の組み合わせを選択するとよい。このような組み合わせは、例えば、第1溶媒及び第2溶媒を共にアルコキシ基含有アルコールとすることにより達成が容易となる。 It is advisable to select a combination of solvents with excellent compatibility as the first and second solvents. Such a combination can be easily achieved, for example, by using alkoxy group-containing alcohols as both the first and second solvents.

 後述する通り、成膜の際には、コーティング液組成物に含まれる溶媒の沸点および表面エネルギが重要になる。第1溶媒においては、第2溶媒よりも沸点が低いので、例えば、後述するスプレーコーティングにより成膜する場合には、レンズに到達する前に揮発してしまう。一方、第2溶媒は第1溶媒よりも沸点が高いため、スプレーコーティングによりノズルから吐出されるとレンズに到達し、液滴としてレンズに付着する。レンズに付着した液滴は、その後、レンズ表面を広がり、膜を形成する。この場合、第2溶媒の表面エネルギーが高くないと液の広がりが十分ではなく、色ムラ等の欠陥の原因となり得る。したがって、第2溶媒は沸点とともに表面エネルギーが重要な性質であるといえる。具体的には、第2溶媒の表面エネルギは30dyne/cm以上、35dyne/cm以上、40dyne/cm以上、45dyne/cm以上、さらに70dyne/cm以上が適している。 As will be described later, the boiling point and surface energy of the solvents contained in the coating liquid composition are important when forming a film. The first solvent has a lower boiling point than the second solvent, so when a film is formed by spray coating, as described below, it will volatilize before reaching the lens. On the other hand, the second solvent has a higher boiling point than the first solvent, so when it is ejected from the nozzle by spray coating, it reaches the lens and adheres to the lens as droplets. The droplets that adhere to the lens then spread over the lens surface and form a film. In this case, if the surface energy of the second solvent is not high, the liquid will not spread sufficiently, which can cause defects such as color unevenness. Therefore, it can be said that the boiling point and surface energy of the second solvent are important properties. Specifically, the surface energy of the second solvent should be 30 dyne/cm or more, 35 dyne/cm or more, 40 dyne/cm or more, 45 dyne/cm or more, or even 70 dyne/cm or more.

 沸点が高い溶媒には、(A)分子量が大きく沸点が高いものと、(B)分子量は(A)に比べ分子量は小さいものの水素結合が強いもの、に大別される。(B)の溶媒は表面エネルギが大きくなり、液をレンズ表面上に広げるには適している。(A)の溶媒として代表的なものはブトキシエタノール(沸点171℃、表面エネルギ24.8dyne/cm)が挙げられ、(B)の溶媒として代表的なものはプロピレングリコール400(沸点188℃、表面エネルギ71.6dyne/cm)である。 High boiling point solvents can be broadly divided into (A) those with a high molecular weight and a high boiling point, and (B) those with a smaller molecular weight than (A) but with strong hydrogen bonds. (B) solvents have a high surface energy and are suitable for spreading the liquid over the lens surface. A typical example of (A) solvent is butoxyethanol (boiling point 171°C, surface energy 24.8 dyne/cm), and a typical example of (B) solvent is propylene glycol 400 (boiling point 188°C, surface energy 71.6 dyne/cm).

 なお、溶媒の表面エネルギーを測定する方法においては、通常の表面エネルギー測定方法であればその種類を問わず適用可能である。例えば、潤滑法で白金環を液体面に水平に当接させてからそのまま引っ張り上げて液体面から落ちようとする瞬間環に作用する表面張力と均衡をなす力を秤で測定する方法で測定することもできる。 In addition, any ordinary surface energy measurement method can be used to measure the surface energy of a solvent. For example, it can be measured using the lubrication method, where a platinum ring is placed horizontally on the liquid surface, then pulled up and the force that balances the surface tension acting on the ring at the moment it tries to fall off the liquid surface is measured using a balance.

 <2-8.その他の成分>
 コーティング液組成物は、さらに増粘剤、チクソ性付与材、界面活性剤、架橋剤、レベリング剤等を含んでいてもよい。レベリング剤は、微粒子のぬれの改善に効果がある。コーティング液組成物は、さらにレベリング剤を含んでいてもよい。レベリング剤は、低分子量、具体的には平均分子量が2000未満の界面活性剤が適している。
<2-8. Other ingredients>
The coating liquid composition may further contain a thickener, a thixotropy imparting agent, a surfactant, a crosslinking agent, a leveling agent, etc. The leveling agent is effective in improving the wetting of the fine particles. The coating liquid composition may further contain a leveling agent. As the leveling agent, a surfactant with a low molecular weight, specifically an average molecular weight of less than 2000, is suitable.

 <3.反射防止膜>
 図2はレンズ上に積層された反射防止膜の断面図である。図2に示すように、反射防止膜2は、基材3(上述した各レンズ)上に設けられる膜の一例である。反射防止膜2は、バインダ31で固定された2層の微粒子21によって形成されている。さらに、微粒子21と基材3ともバインダ31で固定されている。
<3. Anti-reflection film>
Fig. 2 is a cross-sectional view of an anti-reflection film laminated on a lens. As shown in Fig. 2, the anti-reflection film 2 is an example of a film provided on a substrate 3 (each of the above-mentioned lenses). The anti-reflection film 2 is formed of two layers of fine particles 21 fixed with a binder 31. Furthermore, both the fine particles 21 and the substrate 3 are fixed with the binder 31.

 上記のように、本実施形態に係る塗布液は、溶媒に対する固形分の質量が少なく、また、微粒子に対するバインダの質量比が少ないため、反射防止膜2をポーラス構造とすることができる。このようなポーラス構造としては、例えば、空隙率が50%以上であることが好ましい。 As described above, the coating liquid according to this embodiment has a low mass of solids relative to the solvent, and a low mass ratio of binder to fine particles, allowing the anti-reflection coating 2 to have a porous structure. For such a porous structure, it is preferable that the porosity be 50% or more.

 反射防止膜2は、1.10~1.35の屈折率nL1及び80nm~150nmの厚みtL1を有する。このような構成によれば、反射防止膜2が高い反射防止性能を発揮しうる。屈折率nL1は、D線(波長589.3nm)における屈折率である。なお、図2では、説明の便宜上、基材3を平坦に記載しているが、実際は曲面を有するレンズである。 The antireflection coating 2 has a refractive index n L1 of 1.10 to 1.35 and a thickness t L1 of 80 nm to 150 nm. With this configuration, the antireflection coating 2 can exhibit high antireflection performance. The refractive index n L1 is the refractive index at the D-line (wavelength 589.3 nm). Note that, for the sake of convenience, the substrate 3 is depicted as flat in FIG. 2, but in reality it is a lens having a curved surface.

 反射防止膜2において、例えば、波長300nm~1200nmの波長の光を入射角度が5°で入射させたときの波長と、その波長に対する反射率を表した反射スペクトルにおいて、波長300nm~1200nmの範囲内における最小の反射率rmin 300-1200は1%以下となりうる。反射率rmin 300-1200は、望ましくは0.5%以下であり、より望ましくは0.2%以下である。以下、特に断りのない限り、反射防止膜等の反射率は、波長300nm~1200nmの波長の光を入射角度が5°で入射させたときの反射スペクトルから求められる反射率とする。 In the antireflection coating 2, for example, in the reflection spectrum showing the wavelength and the reflectance for light with a wavelength of 300 nm to 1200 nm incident at an incident angle of 5°, the minimum reflectance r min 300-1200 within the wavelength range of 300 nm to 1200 nm can be 1% or less. The reflectance r min 300-1200 is preferably 0.5% or less, and more preferably 0.2% or less. Hereinafter, unless otherwise specified, the reflectance of an antireflection coating or the like refers to the reflectance determined from the reflection spectrum when light with a wavelength of 300 nm to 1200 nm is incident at an incident angle of 5°.

 反射防止膜2において、波長400nm~800nmの範囲内における最小の反射率rmin 400-800は、特定の値に限定されない。反射率rmin 400-800は、例えば、0.5%以下である。この場合、反射防止膜2が高い反射防止性能をより発揮しやすい。反射率rmin 400-800は、望ましくは、0.2%以下である。 In the antireflection coating 2, the minimum reflectance r min 400-800 within the wavelength range of 400 nm to 800 nm is not limited to a specific value. The reflectance r min 400-800 is, for example, 0.5% or less. In this case, the antireflection coating 2 is more likely to exhibit high antireflection performance. The reflectance r min 400-800 is preferably 0.2% or less.

 反射防止膜2において、波長300nm~1200nmの範囲内において反射率が2.5%以下となる範囲λrange/2.5は、特定の値に限定されない。範囲λrange/2.5は、例えば400nm以上である。これにより、反射防止膜2が高い反射防止性能をより発揮しやすい。範囲λrange/2.5は、450nm以上であってもよく、500nm以上であってもよい。以下、特に断りのない限り、所定の反射率に対応する波長及び波長の範囲についても、反射スペクトルから求められる波長とする。 In the antireflection coating 2, the range λ range/2.5 , within which the reflectance is 2.5% or less within the wavelength range of 300 nm to 1200 nm, is not limited to a specific value. The range λ range /2.5 is, for example, 400 nm or greater. This allows the antireflection coating 2 to more easily exhibit high antireflection performance. The range λ range/2.5 may be 450 nm or greater, or may be 500 nm or greater. Unless otherwise specified below, the wavelength and wavelength range corresponding to a given reflectance also refer to the wavelength determined from the reflection spectrum.

 反射防止膜2において、波長300nm~1200nmの範囲内において反射率が1.0%以下となる範囲λrange/1.0は、特定の値に限定されない。範囲λrange/1.0は、例えば250nm以上である。これにより、反射防止膜2が高い反射防止性能をより発揮しやすい。範囲λrange/1.0は、300nm以上であってもよく、350nm以上であってもよく、400nm以上であってもよい。 In the antireflection coating 2, the range λ range/1.0 , in which the reflectance is 1.0% or less in the wavelength range of 300 nm to 1200 nm, is not limited to a specific value. The range λ range /1.0 is, for example, 250 nm or more. This makes it easier for the antireflection coating 2 to exhibit high antireflection performance. The range λ range/1.0 may be 300 nm or more, 350 nm or more, or 400 nm or more.

 基材(レンズ)の屈折率nsb及び反射防止膜の屈折率nL1であるときに、反射防止膜の光学厚みを所定の波長λの1/4に調整することが考えられる。この場合、nsb-nL1 2の値の絶対値が小さいほど、その屈折率に対応する波長λにおいて、反射率が小さくなりやすい。このため、反射防止膜2の実質的な屈折率が低いことが反射率の低減の観点から望ましい場合がある。このように反射防止膜に低屈折率が要求される場合、反射防止膜が中空微粒子を含むことが有利である。 When the refractive index of the substrate (lens) is n sb and the refractive index of the antireflection coating is n L1 , it is possible to adjust the optical thickness of the antireflection coating to ¼ of a predetermined wavelength λ. In this case, the smaller the absolute value of n sb -n L1 2 , the lower the reflectance at the wavelength λ corresponding to that refractive index. For this reason, a low effective refractive index of the antireflection coating 2 may be desirable from the perspective of reducing reflectance. When a low refractive index is required for the antireflection coating, it is advantageous for the antireflection coating to contain hollow microparticles.

 図2の例では、基材(レンズ)3と反射防止膜2とが直接接しているが、これに限らず、基材3と反射防止膜2との間には別の膜が介在していてもよい。別の膜としては、例えば、ポリビニルブチラール樹脂(PVB)等を挙げることができる。また、反射防止膜2の表面は露出しているが、これに限定されず、反射防止膜2の表面は別の層により被覆されていてもよい。 In the example of Figure 2, the substrate (lens) 3 and the anti-reflection coating 2 are in direct contact, but this is not limited thereto, and another film may be interposed between the substrate 3 and the anti-reflection coating 2. An example of such another film is polyvinyl butyral resin (PVB). Furthermore, while the surface of the anti-reflection coating 2 is exposed, this is not limited thereto, and the surface of the anti-reflection coating 2 may be covered with another layer.

 また、Rを微粒子の径、rをバインダの断面径としたとき、R>5rであることが好ましい(図2参照)。これにより、バインダの量が減るため、反射防止膜をポーラス構造にすることができる。なお、バインダの断面径rは、模式図として示した図2のように、膜の断面を透過型電子顕微鏡又は走査型電子顕微鏡を観察したときに、微粒子同士の接続をする部分の最大の厚みを測定することで求めてもよい。このとき、観察視野内において、認識可能な微粒子同士の接続をする部分の厚みを測定して、それらの平均値をrの値としてもよい。 Furthermore, where R is the diameter of the fine particles and r is the cross-sectional diameter of the binder, it is preferable that R>5r (see Figure 2). This reduces the amount of binder, allowing the anti-reflection film to have a porous structure. The cross-sectional diameter r of the binder may be determined by measuring the maximum thickness of the part where fine particles connect when observing the cross-section of the film with a transmission electron microscope or scanning electron microscope, as shown in the schematic diagram of Figure 2. In this case, the thickness of the part where recognizable fine particles connect within the observation field may be measured, and the average value of these may be used as the value of r.

 また、各層21,22における微粒子の配置は、特には限定されないが、例えば、平方最密充填とすることができる。これにより、空隙率を50%以上とすることができる。 Furthermore, the arrangement of the microparticles in each layer 21, 22 is not particularly limited, but can be, for example, square closest packing. This allows the porosity to be 50% or more.

 <4.反射防止膜の形成方法>
 本実施形態のコーティング液組成物は、各種のコーティングプロセスに供することが可能であるが、スプレーコーティングによる塗布に適している。スプレーコーティングは、スプレーノズルからコーティング液組成物を噴霧する周知のコーティングプロセスである。本実施形態で対象とするレンズは小型であり、スピンコーティングなどの方法ではコーティング液組成物を塗布できないため、スプレーコーティングが適している。
4. Method for forming anti-reflection film
The coating liquid composition of this embodiment can be subjected to various coating processes, but is suitable for application by spray coating. Spray coating is a well-known coating process in which a coating liquid composition is sprayed from a spray nozzle. The lens targeted in this embodiment is small, and the coating liquid composition cannot be applied by methods such as spin coating, so spray coating is suitable.

 スプレーコーティングにより、微粒子、バインダ前駆体、及び溶媒を含むコーティング液組成物を塗布して形成した反射防止膜では、他のコーティングプロセスにより形成した光学薄膜よりも微小欠陥が発生しやすい。この一因は、微粒子の凝集体の付着にあると推察される。上述したコーティング液組成物を使用することにより、微小欠陥の発生は低減し、場合によっては解消する。スプレーコーティング自体は、量産性に優れ、曲面へも対応できる塗布方法であり、連続で多数の基板に成膜できるコーティングプロセスでもある。 Anti-reflective coatings formed by spray coating using a coating liquid composition containing fine particles, a binder precursor, and a solvent are more likely to develop micro-defects than optical thin films formed by other coating processes. One cause of this is thought to be the adhesion of aggregates of fine particles. By using the coating liquid composition described above, the occurrence of micro-defects is reduced and, in some cases, eliminated. Spray coating itself is a coating method that is highly suitable for mass production and can be used on curved surfaces, and is also a coating process that can continuously form films on multiple substrates.

 まず、基材3上に、上述したように、黒色遮光膜14を形成する。その後、黒色遮光膜14上を含む中央領域及び周辺領域にコーティング液組成物を塗布した後、これを焼成することで、溶媒が蒸発し、バインダ前駆体からバインダが生成され、反射防止膜が形成される。焼成温度は、溶媒の沸点よりも低く、例えば、80~110℃、焼成時間は,例えば、5~400分とすることができる。本実施形態に係るレンズは樹脂製であるため、焼成温度は高くできないため、上記のような温度範囲にしている。 First, the black light-shielding film 14 is formed on the substrate 3 as described above. Then, a coating liquid composition is applied to the central and peripheral regions, including on the black light-shielding film 14, and then baked. This evaporates the solvent, produces a binder from the binder precursor, and forms an anti-reflection film. The baking temperature is lower than the boiling point of the solvent, for example, 80 to 110°C, and the baking time can be, for example, 5 to 400 minutes. Because the lens according to this embodiment is made of resin, the baking temperature cannot be high, so the temperature range described above is used.

 上記のように、コーティング液組成物が第1溶媒及び第2溶媒を含有している場合、スプレーコーティングによりコーティング液組成物が基材3上に塗布されるときには、詳細な原理は不明であるが形成される反射防止膜の厚みのムラを小さくすることができる。 As described above, when the coating liquid composition contains the first solvent and the second solvent, when the coating liquid composition is applied to the substrate 3 by spray coating, it is possible to reduce unevenness in the thickness of the anti-reflection film formed, although the detailed mechanism is unknown.

 そして、コーティング液組成物が基材上に塗布された後には、第2溶媒の作用により、コーティング液組成物が曲面状の基材3上で広がっていく。その後、第2溶媒は、焼成工程により蒸発する。また、バインダは焼成工程においてはほとんど蒸発しないようにすることができる。すなわち、バインダ前駆体である金属アルコキシドを、加水分解物として含有させると、コーティング液組成物に含有されたバインダ前駆体が焼成工程においてほとんど蒸発しないようにすることができる。これにより、反射防止膜の形成の制御性が高くなる。 After the coating liquid composition has been applied to the substrate, the action of the second solvent causes the coating liquid composition to spread over the curved substrate 3. The second solvent then evaporates during the baking process. Furthermore, the binder can be made to barely evaporate during the baking process. In other words, by including a metal alkoxide, which is a binder precursor, as a hydrolyzate, the binder precursor contained in the coating liquid composition can be made to barely evaporate during the baking process. This increases the controllability of the formation of the anti-reflective film.

 形成された反射防止膜に含まれる微粒子密接抑制剤又は分散剤、その後、少なくともその一部を除去してもよい。微粒子密接抑制剤又は分散剤の除去は、具体的には、反射防止膜への各種処理により実施できる。処理としては、プラズマ処理、コロナ処理、UV洗浄、高温処理、有機洗浄、酸洗浄、アルカリ洗浄を例示できる。プラズマ処理は、酸化性の活性種、例えば酸素プラズマを照射することにより、実施できる。図3は上述した方法で形成した反射防止膜の一例であり、中空微粒子が2層積層された反射防止膜の断面をSEMで撮影したものである。但し、図2及び図3に示す反射防止膜は一例であり、反射防止膜を複数層に亘って積層することができる。この場合、レンズに近い反射防止層の屈折率がレンズの屈折率に近くなるようにし、最外層の反射防止膜が上述したように、1.10~1.35となるように、最外層に向かって屈折率が徐々に小さくなるように形成することができる。 At least a portion of the particle adhesion inhibitor or dispersant contained in the formed anti-reflective coating may then be removed. Removal of the particle adhesion inhibitor or dispersant can be achieved by various treatments of the anti-reflective coating. Examples of such treatments include plasma treatment, corona treatment, UV cleaning, high-temperature treatment, organic cleaning, acid cleaning, and alkaline cleaning. Plasma treatment can be achieved by irradiating the anti-reflective coating with an oxidizing active species, such as oxygen plasma. Figure 3 shows an example of an anti-reflective coating formed by the above-described method, depicting a cross-section of an anti-reflective coating with two layers of hollow particles, photographed with an SEM. However, the anti-reflective coatings shown in Figures 2 and 3 are merely examples, and multiple layers of anti-reflective coating can be laminated. In this case, the refractive index of the anti-reflective layer closest to the lens is close to that of the lens, and the refractive index of the outermost anti-reflective coating layer can be gradually reduced toward the outermost layer, as described above, to 1.10 to 1.35.

 スプレーコーティングについては、種々の方法があるが、以下に一例を示す。図4は、スプレーコーティングに用いられるスプレーノズルの一例を示す断面図である。図4に示すように、このスプレーノズルは、コーティング液組成物を収容する収容部91を有し、この収容部91からノズルの吐出口92に向かって延びる環状の液流路93が形成されている。この液流路93には、コーティング液組成物を液流路93内で旋回させるための空気旋回機(図示省略)が設けられている。したがって、液流路93を経て吐出口92から吐出されるコーティング液組成物は、旋回しながら下方に向かって吐出される。 There are various methods for spray coating, but one example is shown below. Figure 4 is a cross-sectional view showing an example of a spray nozzle used for spray coating. As shown in Figure 4, this spray nozzle has a storage section 91 that stores the coating liquid composition, and an annular liquid flow path 93 is formed that extends from this storage section 91 toward the nozzle's discharge outlet 92. This liquid flow path 93 is provided with an air swirler (not shown) for swirling the coating liquid composition within the liquid flow path 93. Therefore, the coating liquid composition that passes through the liquid flow path 93 and is discharged from the discharge outlet 92 is discharged downward while swirling.

 また、収容部91及び液流路93の外側には、ノズルの吐出口92に向かって延びる環状の空気流路94が形成されている。この空気流路94には、コーティング液組成物を空気流路94内で旋回させるための空気旋回機(図示省略)が設けられている。これにより、空気流路94を流れる空気は旋回流となり、吐出口92付近において、液流路93の外側から液流路93に合流している。その結果、旋回する空気流によりコーティング液組成物は液流路93の外側に押し付けられ、薄い膜状になって吐出口92に到達する。そして、コーティング液組成物は、吐出口92から旋回しながら下方に吐出される。空気流路94を経て吐出口92から吐出されたコーティング液組成物は、下方にいくにしたがって外径が大きくなりながら旋回し、塗布対象となるレンズに塗布される。このようなノズルとしては、例えば、SHIMADA APPLI社製のものを用いることができる。 Furthermore, an annular air flow path 94 extending toward the nozzle outlet 92 is formed outside the storage section 91 and the liquid flow path 93. This air flow path 94 is provided with an air swirler (not shown) for swirling the coating liquid composition within the air flow path 94. As a result, the air flowing through the air flow path 94 becomes a swirling flow, and merges with the liquid flow path 93 from the outside of the liquid flow path 93 near the outlet 92. As a result, the coating liquid composition is pressed against the outside of the liquid flow path 93 by the swirling air flow, and reaches the outlet 92 in the form of a thin film. The coating liquid composition is then discharged downward from the outlet 92 while swirling. The coating liquid composition discharged from the outlet 92 via the air flow path 94 swirls, its outer diameter increasing as it travels downward, and is applied to the lens to be coated. An example of such a nozzle that can be used is one manufactured by SHIMADA APPLI.

 上記のように構成されたスプレーノズル9の吐出口92は、塗布対象となるレンズからの高さが、25mm以上35mmであることが好ましい。また、コーティング液組成物の単位時間あたりの吐出量は、0.1ml/分以上0.3ml/分以下であることが好ましい。なお、単位時間あたりの吐出量は、スプレーノズルからの吐出された液を1分間採集して、その体積を測定して求めてもよい。 The discharge outlet 92 of the spray nozzle 9 configured as described above is preferably at a height of 25 mm to 35 mm from the lens to be coated. Furthermore, the amount of coating liquid composition discharged per unit time is preferably 0.1 ml/min to 0.3 ml/min. The amount of liquid discharged per unit time may also be determined by collecting the liquid discharged from the spray nozzle for one minute and measuring its volume.

 図4に示すように、例えば、吐出口92から25~35mm離れた領域N1は、吐出口92から近いため、コーティング液組成物の旋回流が強い。そのため、旋回流内にあるミストを構成する液滴が、旋回流によって内側に流される。また、旋回流の外側に出てしまった液滴は、旋回流によって、それよりも外側にはじき出される。すなわち、はじき出された液滴はレンズ上には付着しない。なお、レンズ上に付着した液滴はレンズ表面上に広がって膜状になる。したがって、この領域N1にレンズを配置してコーティング液組成物を塗布すると、適切な塗膜が形成される。 As shown in Figure 4, for example, in region N1, which is 25 to 35 mm away from the discharge port 92, the swirling flow of the coating liquid composition is strong because it is close to the discharge port 92. As a result, the droplets that make up the mist within the swirling flow are swept inward by the swirling flow. Furthermore, droplets that fall outside the swirling flow are repelled further out by the swirling flow. In other words, the repelled droplets do not adhere to the lens. However, droplets that adhere to the lens spread over the lens surface and form a film. Therefore, if a lens is placed in this region N1 and the coating liquid composition is applied, an appropriate coating film will be formed.

 一方、吐出口92から45~55mm離れた領域N2は、吐出口92から遠いため、コーティング液組成物の旋回流が弱まっていく。そのため、旋回流内にあるミストを構成する液滴が、旋回流の外側に流されるのが妨げられない。そして、旋回流の外側に出てしまった液滴は、旋回流が弱いため、それよりも外側に大きくはじかれず、レンズ上に付着する可能性がある。したがって、この領域N2にレンズを配置してコーティング液組成物を塗布すると、制御できなかった液滴が、飛散痕としてレンズ上に付着するため、欠陥品となり得る。なお、このような飛散痕(欠陥数は5以下であることが好ましい) On the other hand, in region N2, 45 to 55 mm away from the outlet 92, the swirling flow of the coating liquid composition weakens due to its distance from the outlet 92. As a result, the droplets that make up the mist within the swirling flow are not prevented from flowing to the outside of the swirling flow. Furthermore, because the swirling flow is weak, droplets that reach the outside of the swirling flow are not repelled farther and may end up adhering to the lens. Therefore, if a lens is placed in region N2 and the coating liquid composition is applied, uncontrolled droplets will adhere to the lens as scattered marks, potentially resulting in a defective product. Note that such scattered marks (the number of defects is preferably 5 or less)

 図5に示すように、レンズLに対してスプレーコーティングを行う際には、設置面(例えば、ステージやパレット)に複数のレンズL(例えば、直径5~20mm)を前後左右の間隔が5~30mmとして格子状に整列させ、各レンズ上にスプレーノズル9を順に移動させて塗布を行う。すなわち、複数のレンズLにコーティング液組成物を連続的に塗布していく。そのため、特に、スプレーノズル9の高さが上述した範囲外であったり、塗布量が少ない場合には、次のような問題が生じるおそれがある。なお、レンズLの間隔や配列はしたスプレーノズル9の高さ、塗布量の適切さにくらべ支配的ではないので、配列は格子状でなくてもよく任意である。すなわち、上述したレンズの直径や間隔は一例であるが、少なくともこの範囲であれば、上述したスプレーノズルの吐出口の高さや吐出量の好ましい範囲において適切な成膜が可能であることを本発明者は確認している。 As shown in Figure 5, when spray coating lenses L, multiple lenses L (e.g., 5-20 mm in diameter) are arranged in a grid pattern on a mounting surface (e.g., a stage or pallet) with front-to-back and left-to-right spacing of 5-30 mm, and the spray nozzle 9 is moved over each lens in turn to apply the coating. In other words, the coating liquid composition is continuously applied to multiple lenses L. Therefore, the following problems may occur, particularly if the height of the spray nozzle 9 is outside the above-mentioned range or the amount of coating is small. Note that the spacing and arrangement of the lenses L are not as critical as the height of the spray nozzle 9 and the appropriate amount of coating, and therefore the arrangement does not have to be grid-like and is arbitrary. In other words, while the lens diameter and spacing described above are examples, the inventors have confirmed that, at least within these ranges, appropriate film formation is possible within the preferred ranges of the spray nozzle outlet height and discharge amount described above.

 (a) コーティング液組成物の塗布量が適切で、スプレーノズルの高さが高い場合(例えば、スプレーノズル9とレンズLとの距離が35mm以上の場合)
 この場合、スプレーノズル9から吐出されるコーティング液組成物の塗布面積が広くなる。そのため、複数のレンズLに対してコーティング液組成物を連続的に塗布すると、塗布前のレンズLに、上述したコーティング液組成物の液滴が付着することがある。こうして付着した液滴が乾燥すると飛散痕となり、その上にコーティング液組成物が塗布されるため、完成したレンズLは、色ムラのような偏在的な変色を呈する。同様に、塗布後のレンズLに液滴が付着すると、同様の変色が生じる。
(a) When the amount of coating liquid composition applied is appropriate and the height of the spray nozzle is high (for example, when the distance between the spray nozzle 9 and the lens L is 35 mm or more)
In this case, the coating area of the coating liquid composition ejected from the spray nozzle 9 becomes wider. Therefore, when the coating liquid composition is continuously applied to a plurality of lenses L, droplets of the above-mentioned coating liquid composition may adhere to the lenses L before application. When the droplets thus adhered dry, they leave scattered marks, and the coating liquid composition is applied onto these marks, so that the completed lenses L exhibit uneven discoloration such as color unevenness. Similarly, when droplets adhere to the lenses L after application, similar discoloration occurs.

 但し、スプレーノズル9の高さが60mm以上のようにさらに高くなると、溶媒が揮発しやすくなる。そのため、レンズに到達する液量が少なくなり、凹面の中央に流れる液量が少なくなる。その結果、飛散痕の観察はあるが、色ムラは発生しがたくなる。 However, if the height of the spray nozzle 9 is increased further, such as to 60 mm or more, the solvent becomes more likely to volatilize. As a result, less liquid reaches the lens, and less liquid flows to the center of the concave surface. As a result, although splash marks can be observed, color unevenness is less likely to occur.

 このような変色を防止するためには、例えば、以下の方策がある。
(1) コーティング液組成物に、微粒子密接抑制剤を液組成物に一定量添加しておくと、塗布前のレンズLの表面に、一部の液組成物が付着した場合であっても、乾燥を防ぎ偏在的な変色を低減させるはたらきがある。
(2) スプレーノズル9の吐出口92とレンズLとの距離を上述した適切な距離に設定することにより偏在的な変色を低減させるはたらきがある。
To prevent such discoloration, the following measures can be taken, for example.
(1) Adding a certain amount of a microparticle adhesion inhibitor to the coating liquid composition prevents drying and reduces uneven discoloration even if some of the liquid composition adheres to the surface of the lens L before coating.
(2) By setting the distance between the discharge port 92 of the spray nozzle 9 and the lens L to the appropriate distance described above, uneven discoloration can be reduced.

 (b) コーティング液組成物の塗布量が適切で、スプレーノズルの高さが低い場合(例えば、スプレーノズル9とレンズLとの距離が25mm以下の場合)
 この場合には、レンズLに塗布されるコーティング液組成物の膜厚が厚くなる可能性がある。これは次の理由による。
(b) When the amount of coating liquid composition applied is appropriate and the height of the spray nozzle is low (for example, when the distance between the spray nozzle 9 and the lens L is 25 mm or less)
In this case, there is a possibility that the thickness of the coating liquid composition applied to the lens L will become thick. This is for the following reason.

(1) スプレーノズル9とレンズLとの距離が小さいため、コーティング液組成物の塗布領域が狭くなる。吐出量が一定である場合、塗布領域の面積が小さいと、塗布直後(コーティング液組成物がレンズLに付着した直後)の膜厚が厚くなる。
(2) スプレーノズル9とレンズLとの距離が小さいため、コーティング液組成物に含有される溶媒の揮発が十分ではない。これにより、塗布直後の膜厚が厚くなる。
(1) The area where the coating liquid composition is applied is narrow because the distance between the spray nozzle 9 and the lens L is small. If the discharge amount is constant, if the area of the applied area is small, the film thickness immediately after application (immediately after the coating liquid composition adheres to the lens L) will be thick.
(2) The solvent contained in the coating liquid composition does not evaporate sufficiently due to the small distance between the spray nozzle 9 and the lens L. This results in a thick film thickness immediately after coating.

 特に、レンズ等の基材は湾曲しているため、例えば、レンズLの凹面にコーティング液組成物を塗布した場合には、図6に示すように、過剰に塗布された分は乾燥する前に凹面の底部に向かって流れ、膜厚に許容しがたい偏差が生じるおそれがある。これにより、適切な屈折率や反射性能が得られない可能性があり、外観上の問題、つまり反射の色合いの不均一による色ムラの発生も生じるおそれがある。一方、レンズLの凸面にコーティング液組成物を塗布した場合には、過剰に塗布された分は乾燥する前に凸面の周縁部に向かって流れ、膜厚に許容しがたい偏差が生じるおそれがある。以上のような現象は、上述した(a)において、コーティング液組成物の塗布量が多いと起こり得る。 In particular, because substrates such as lenses are curved, if a coating liquid composition is applied to the concave surface of lens L, for example, the excess coating may flow toward the bottom of the concave surface before drying, as shown in Figure 6, resulting in unacceptable deviations in film thickness. This may prevent appropriate refractive index and reflective performance from being achieved, and may also cause appearance problems, such as uneven color due to uneven reflection. On the other hand, if a coating liquid composition is applied to the convex surface of lens L, the excess coating may flow toward the periphery of the convex surface before drying, resulting in unacceptable deviations in film thickness. The above phenomenon can occur if a large amount of coating liquid composition is applied in (a) above.

 (c) コーティング液組成物の塗布量が少ない場合(例えば、塗布量が0.1ml/分以下の場合)
 この場合には、ノズルの構造上少ない液量の吐出は制御できないため塗布することができない。
(c) When the amount of coating liquid composition applied is small (for example, when the amount of coating is 0.1 ml/min or less)
In this case, the nozzle structure makes it impossible to control the discharge of a small amount of liquid, and therefore application is not possible.

 なお、バインダが少ない状態でスプレーノズル9の高さが高い場合、コーティング液組成物の液滴が周囲に飛び散ることにより、レンズLに形成される反射防止膜は、欠陥がある膜になってしまう。一方、この課題を解決すべく微粒子凝集抑止剤(アニオン系ポリマー型分散剤及び高分子型分散剤からなる群より選択される少なくとも一つに該当する分散剤)を添加することが望ましいとされていたが、スプレーノズル9の高さを適正化することにより、上記凝集抑止剤を添加せずとも欠陥がない膜を作製することができる。 Furthermore, if the height of the spray nozzle 9 is high when there is little binder, droplets of the coating liquid composition will scatter around, resulting in a defective anti-reflection film formed on the lens L. Meanwhile, to solve this problem, it has been considered desirable to add a particle aggregation inhibitor (at least one dispersant selected from the group consisting of anionic polymer dispersants and polymer dispersants), but by optimizing the height of the spray nozzle 9, it is possible to produce a defect-free film without adding the above-mentioned aggregation inhibitor.

 <5.特徴>
 本実施形態に係るレンズユニットによれば、以下の効果を得ることができる。
(1)空隙を有する中空微粒子などの微粒子が含有しているため、ポーラス構造の反射防止膜を形成することができる。これにより、低い屈折率を実現することができる。
(2)塗布液中の固形分(バインダ前駆体と微粒子)に対する微粒子の割合が低いため、微粒子21間のバインダの量が小さくなり、変形しやすい反射防止膜を形成することができる。
<5. Features>
The lens unit according to this embodiment has the following advantages.
(1) Because the anti-reflection coating contains fine particles such as hollow fine particles having voids, it is possible to form an anti-reflection coating with a porous structure, which allows a low refractive index to be achieved.
(2) Since the ratio of the fine particles to the solid content (binder precursor and fine particles) in the coating liquid is low, the amount of binder between the fine particles 21 is small, and an anti-reflection film that is easily deformed can be formed.

(3)塗布液に対する、微粒子とバインダ前駆体の合計の質量比が低いため、塗布液における溶媒の量が多くなる。これにより、反射防止膜2をポーラス構造にしやすくなる。すなわち、隣接する微粒子の間に空隙が形成されやすくなるため、低屈折率を実現することができる。 (3) Because the total mass ratio of the microparticles and binder precursor to the coating liquid is low, the amount of solvent in the coating liquid is large. This makes it easier to give the anti-reflection coating 2 a porous structure. In other words, voids are more likely to form between adjacent microparticles, making it possible to achieve a low refractive index.

(4)上記のような黒色遮光膜14が形成されることで、撮影ユニット内に、撮影に不要な光が進入するのを抑制することができる。しかしながら、撮影を行うときには、被写体側から黒色遮光膜14での反射光が見えるという問題があった。より詳細に説明すると、例えば、黒色遮光膜14に含まれる顔料等の材料は、通常は外部からの光を吸収するが、例えば、平坦な反射面を有する場合には、その反射面で光が反射することがあった。被写体が人である場合には、撮影時にその反射光が視認され、気になるという問題があった。そこで、本実施形態では、上記のように黒色遮光膜14上に反射防止膜を形成しているため、このような反射を抑制することができる。 (4) By forming the black light-shielding film 14 as described above, it is possible to prevent light unnecessary for photography from entering the photographing unit. However, there is a problem in that light reflected by the black light-shielding film 14 is visible from the subject side when photographing. To explain in more detail, for example, materials such as pigments contained in the black light-shielding film 14 normally absorb light from outside, but if the film has a flat reflective surface, light may be reflected from that reflective surface. When the subject is a person, this reflected light is visible during photography and can be distracting. Therefore, in this embodiment, an anti-reflection film is formed on the black light-shielding film 14 as described above, thereby preventing such reflections.

 以下、一例を示す。図7はスマートフォンの撮影ユニットを外部から撮影した写真である。図7の四角で囲まれた領域を拡大したのが図8及び図9である。但し、図7は黒色遮光膜14上に反射防止膜を形成していない例であり、図9は黒色遮光膜14上に反射防止膜を形成した例である。図8に示すように、反射防止膜を形成していない場合には、黒色遮光膜14の周縁に反射光が確認された。一方、図7に示すように、反射防止膜を形成した場合には、黒色遮光膜14の周縁の反射光が抑えられている。したがって、黒色遮光膜14上に反射防止膜を形成することで、撮像ユニットの外部から視認される黒色遮光膜14の反射光を抑制することができ、被写体が反射光を気にならないようにすることができる。なお、図7~図9の例では、黒色遮光膜14の周縁部に反射が生じる領域が存在するが、これは一例であり、黒色遮光膜14のいずれの領域にも反射が生じる可能性があることを本発明者は確認している。 An example is shown below. Figure 7 is a photograph of a smartphone's camera unit taken from the outside. Figures 8 and 9 are enlarged views of the area surrounded by a square in Figure 7. However, Figure 7 shows an example in which no anti-reflection film is formed on the black light-shielding film 14, while Figure 9 shows an example in which an anti-reflection film is formed on the black light-shielding film 14. As shown in Figure 8, when no anti-reflection film is formed, reflected light is observed on the periphery of the black light-shielding film 14. On the other hand, as shown in Figure 7, when an anti-reflection film is formed, reflected light on the periphery of the black light-shielding film 14 is suppressed. Therefore, by forming an anti-reflection film on the black light-shielding film 14, reflected light from the black light-shielding film 14 visible from outside the imaging unit can be suppressed, and the subject can be prevented from being bothered by reflected light. Note that in the examples of Figures 7 to 9, there are areas where reflection occurs on the periphery of the black light-shielding film 14, but this is just one example, and the inventor has confirmed that reflection can occur in any area of the black light-shielding film 14.

 <6.変形例>
 以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて、種々の変更が可能である。なお、以下の変形例は適宜組み合わせることができる。
6. Modified Examples
Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment and various modifications are possible without departing from the spirit of the present invention. The following modifications can be combined as appropriate.

(1)本発明の反射防止膜が積層されるレンズユニットは特には限定されず、図1はその一例に過ぎない。すなわち、本発明が対象とするレンズユニットは、例えば、外径が20mm以下の複数の樹脂製のレンズが重ねられたレンズユニットであればよい。また、レンズモジュールの形状、数、スペーサ、センサ基板Wの構成も特には限定されない。各レンズのレンズ表面を構成する曲面には、少なくとも1つの変曲点が存在するように形成されていてもよい。 (1) The lens unit on which the anti-reflection film of the present invention is laminated is not particularly limited, and Figure 1 is merely one example. That is, the lens unit covered by the present invention may be, for example, a lens unit in which multiple resin lenses each having an outer diameter of 20 mm or less are stacked. Furthermore, the shape, number, spacer, and configuration of the lens module are not particularly limited. The curved surface that constitutes the lens surface of each lens may be formed so that there is at least one inflection point.

(2)上記実施形態では、撮影ユニット内への光の進入を抑制するために、黒色遮光膜14を形成しているが、光を遮蔽できるものであれば、上述した材料以外、あるいは黒色以外で形成されていてもよい。例えば、黒色顔料に加えて、必要に応じて赤色、青色、黄色、緑色、白色、及び、紫色等の着色有機顔料を含んでいてもよい。着色有機顔料を併用する場合としては、赤色顔料を黒色顔料に対して1~40質量%用いることが好ましく、赤色顔料としてはピグメントレッド254であることが好ましい。 白色顔料としては、例えば、二酸化チタン、酸化マグネシウム、硫酸バリウム、酸化ジルコニウム、酸化亜鉛又は鉛白が挙げられるが、遮蔽性に優れ工業的利用が容易な二酸化チタンが好ましい。これらの黒色顔料以外の顔料も用いることもできる。 (2) In the above embodiment, a black light-shielding film 14 is formed to prevent light from entering the imaging unit. However, as long as it can block light, it may be formed of materials other than those mentioned above, or of a color other than black. For example, in addition to black pigment, colored organic pigments such as red, blue, yellow, green, white, and purple may be included as necessary. When colored organic pigments are used in combination, it is preferable to use 1 to 40% by mass of red pigment relative to the black pigment, and a preferred red pigment is Pigment Red 254. Examples of white pigments include titanium dioxide, magnesium oxide, barium sulfate, zirconium oxide, zinc oxide, and white lead, but titanium dioxide is preferred because of its excellent shielding properties and ease of industrial use. Pigments other than these black pigments can also be used.

(3)反射防止膜2は上述した中空微粒子を含む膜でなくてもよく、種々の構成が可能である。例えば、反射防止膜を、表面に凹凸構造を有する酸化アルミニウム膜により形成することができる。この点について、詳述する。 (3) The anti-reflection coating 2 does not have to be a film containing hollow microparticles as described above, and various configurations are possible. For example, the anti-reflection coating can be formed from an aluminum oxide film having an uneven surface. This point will be described in more detail below.

 まず、レンズモジュールの上述した中央領域に、ALD法によりAl23膜を形成する。Al23膜14をALD法で形成する際には、Al含有ガスと、酸化剤とを順次供給してAl23からなる薄い単位膜を形成する操作を、複数回繰り返すことにより、すなわちAl含有ガスと酸化剤とを交互に供給することにより、所定の膜厚のAl23膜とする。具体的には、処理容器内に基材を収容し、基材を所定温度に加熱するとともに、処理容器内を所定の真空度まで排気し、その状態で、「Al含有ガスの供給→処理容器内のパージ→酸化剤の供給→処理容器内のパージ」を単位膜形成のための1サイクルとして、複数サイクル繰り返す。 First, an Al2O3 film is formed in the central region of the lens module by ALD. When forming the Al2O3 film 14 by ALD, an Al-containing gas and an oxidizer are sequentially supplied to form thin unit films of Al2O3 . This operation is repeated multiple times, i.e., the Al-containing gas and the oxidizer are alternately supplied, to form an Al2O3 film with a predetermined thickness. Specifically, a substrate is placed in a processing chamber, the substrate is heated to a predetermined temperature, and the processing chamber is evacuated to a predetermined vacuum level. In this state, one cycle of "supply of Al-containing gas → purging of the processing chamber → supply of oxidizer → purging of the processing chamber" is repeated multiple times to form a unit film.

 Al含有ガスは特に限定されず、一般的に用いられるものであればよく、例えば、トリメチルアルミニウム(TMA):Al(CH33が例示される。酸化剤としては、例えば、H2O、O3、O2プラズマを用いることができる。 The Al-containing gas is not particularly limited and may be any commonly used gas, such as trimethylaluminum (TMA): Al( CH3 ) 3 . As the oxidizing agent, for example, H2O , O3 , or O2 plasma may be used.

 このときのAl23膜の膜厚は、次に説明する水熱処理により所望の反射防止構造が得られる厚さであることが好ましい。そのような点から、100nm以下が好ましく、10~50nmがより好ましい。 The thickness of the Al 2 O 3 film at this time is preferably a thickness that allows a desired anti-reflection structure to be obtained by the hydrothermal treatment described below, and from this point of view, it is preferably 100 nm or less, more preferably 10 to 50 nm.

 次いで、Al23膜に水熱処理を施して、Al23膜に微細凹凸を形成する。これにより微細凹凸状の反射防止膜が形成される。微細凹凸の深さ(凸部の高さ)は、例えば、100~500nmであることが好ましい。微細な凸部および凹部は、例えば100nm程度のピッチで形成されることが好ましい。これにより、照射する光の波長よりも短いピッチとすることができ、微細凹凸の形状は針状や紡錘状であるため、深さ方向に連続的に屈折率が変化し、反射防止機能が得られる。なお、Al23の微細凹凸の深さは、慣用な方法で測定可能である。Al23の微細凹凸の深さは、例えば、膜の断面をSEM(走査型電子顕微鏡)で像観察を行いながら、その視野に対して蛍光X線による分析を行うこと(SEM-EDX法)により、各元素(例えば、Alを含む)の膜の厚み方向のマッピングを行い、その特定の元素(例えば、Al)が連続的に含まれる層の厚みを測定することで微細凹凸の深さを算出できる。 Next, the Al2O3 film is subjected to a hydrothermal treatment to form fine irregularities on the Al2O3 film. This results in a finely irregular anti-reflection film. The depth of the fine irregularities (height of the convexities) is preferably, for example, 100 to 500 nm. The fine convexities and concaves are preferably formed at a pitch of, for example, about 100 nm. This allows for a pitch shorter than the wavelength of the irradiated light, and the shape of the fine irregularities is needle-like or spindle-like, so the refractive index changes continuously in the depth direction, thereby achieving anti-reflection functionality. The depth of the Al2O3 fine irregularities can be measured by conventional methods. The depth of the Al 2 O 3 fine irregularities can be calculated, for example, by observing the cross section of the film with a SEM (scanning electron microscope) and analyzing the field of view with fluorescent X-rays (SEM-EDX method), thereby mapping each element (including Al, for example) in the thickness direction of the film, and measuring the thickness of the layer in which that specific element (e.g., Al) is continuously contained.

 水熱処理の方法は特には限定されないが、例えば、熱水または高温のアルカリ水溶液に浸漬する方法、水蒸気に曝す方法等により行うことができる。これらへの浸漬時間は、Al23膜の膜厚によるが、1秒~30分程度が好ましく、10秒~10分がより好ましい。水蒸気に曝す方法の場合の処理時間は、1分~24時間が好ましい。 The hydrothermal treatment method is not particularly limited, but can be carried out by, for example, immersing in hot water or a high-temperature alkaline aqueous solution, or by exposing to water vapor. The immersion time depends on the thickness of the Al2O3 film, but is preferably about 1 second to 30 minutes, more preferably 10 seconds to 10 minutes. In the case of exposing to water vapor, the treatment time is preferably 1 minute to 24 hours.

 膜の材質の例として、Al23を示したが、これに限られない。膜の材質はALD法で製膜できる無機物からなる。無機物は、例えば酸化物、窒化物、硫化物、金属単体が例示される。酸化物は具体的にはAl23,CoO,Er23,Fe23,Ga23,HfO2,ITO,In23,MgO,Nb25,NiO,SiO2,SnO2,Ta25,TiO2,WO3,ZnO,AlドープZnO,ZrO2等が例示される。窒化物は具体的にはAlN,CoNx,FeNx,Hf34,HfSiON,NbN,NiNx,TiN,WN等が例示される。金属単体は具体的にはCo,Ni,Pt,Ru等が例示される。硫化物は具体的にはZnS等が例示される。膜の安定性取り扱いを考えると酸化物膜が特に好ましい。さらに膜の機能性を考慮するとAl23膜が特に好ましい。 Although Al2O3 is shown as an example of the film material, this is not limiting. The film material is made of an inorganic material that can be formed by the ALD method. Examples of inorganic materials include oxides, nitrides, sulfides, and elemental metals . Specific examples of oxides include Al2O3 , CoO, Er2O3 , Fe2O3 , Ga2O3 , HfO2 , ITO , In2O3 , MgO , Nb2O5 , NiO , SiO2 , SnO2 , Ta2O5 , TiO2 , WO3 , ZnO, Al-doped ZnO, and ZrO2 . Specific examples of nitrides include AlN, CoNx, FeNx, Hf3N4 , HfSiON, NbN, NiNx, TiN, WN, etc. Specific examples of metal elements include Co, Ni, Pt, Ru, etc. Specific examples of sulfides include ZnS , etc. Considering the stability and handling of the film, an oxide film is particularly preferable. Furthermore, considering the functionality of the film, an Al2O3 film is particularly preferable.

(4)上記実施形態において、反射防止膜が形成される領域は、各レンズ10A,10B,10C,20A,20B,30A,30Bの表面と黒色遮光膜14上であるが、特に周辺領域については、黒色遮光膜14以外の領域に形成されていてもよい。但し、各レンズモジュールにおいてスペーサが固定される領域には、反射防止膜2を形成しないことが好ましい。これは、撮影ユニットの製造時にスペーサ12と反射防止膜2が接触することはない。したがって、スペーサ12と反射防止膜2とが接触することによる反射防止膜2の剥がれを防止することかできる。そのため、反射防止膜の剥がれによる粉塵の発生を防止することができる。 (4) In the above embodiment, the anti-reflection film is formed on the surfaces of each lens 10A, 10B, 10C, 20A, 20B, 30A, and 30B and on the black light-shielding film 14. However, particularly in the peripheral region, the anti-reflection film may be formed in an area other than the black light-shielding film 14. However, it is preferable not to form the anti-reflection film 2 in the area where the spacer 12 is fixed in each lens module. This is because the spacer 12 and the anti-reflection film 2 do not come into contact with each other during the manufacture of the imaging unit. Therefore, peeling of the anti-reflection film 2 due to contact between the spacer 12 and the anti-reflection film 2 can be prevented. This makes it possible to prevent the generation of dust due to peeling of the anti-reflection film.

(5)上記実施形態では黒色遮光膜14上に反射防止膜を形成しているが、反射が生じるのは黒色遮光膜14に限定されず、凹凸の高さの差が50nm以上の領域には視認可能な反射光が生じると考えられる。そのため、周辺領域においては、黒色遮光膜14以外でも、凹凸の高さの差が50nm以上となるような凹凸が形成されている領域には、反射防止膜を形成することが好ましい。 (5) In the above embodiment, an anti-reflection film is formed on the black light-shielding film 14, but reflection is not limited to the black light-shielding film 14, and it is believed that visible reflected light occurs in areas where the difference in height between the protrusions and recesses is 50 nm or more. Therefore, in the peripheral area, it is preferable to form an anti-reflection film in areas other than the black light-shielding film 14 where protrusions and recesses have a difference in height between the protrusions and recesses of 50 nm or more.

12 スペーサ
14 黒色遮光膜
2 反射防止膜
21 微粒子
31 バインダ
12 Spacer 14 Black light-shielding film 2 Anti-reflection film 21 Fine particles 31 Binder

Claims (18)

 外部からの光を撮像素子へ集光可能な携帯デバイス用のレンズユニットであって、
 前記レンズユニットは、所定間隔をおいて配置された複数のレンズを備え、
 前記レンズは、対向する一組の面を有し、
 前記各面は、レンズとして機能するレンズ表面を含む中央領域と、
 前記中央領域の周囲において、表面の少なくとも一部に高さの差が50nm以上である凹凸が設けられた凹凸領域を含む周辺領域と、
 を有し、
 前記中央領域及び前記周辺領域の凹凸領域の表面の上に反射防止膜が設けられている、
レンズユニット。
A lens unit for a mobile device capable of condensing external light onto an imaging element,
The lens unit includes a plurality of lenses arranged at predetermined intervals,
the lens has a pair of opposing surfaces;
Each of the faces has a central region including a lens surface that functions as a lens;
a peripheral region including an uneven region around the central region, in which unevenness having a height difference of 50 nm or more is provided on at least a part of the surface;
and
an anti-reflection film is provided on the surface of the concave-convex region of the central region and the peripheral region;
Lens unit.
 前記周辺領域の凹凸領域は、前記外部からの光を遮蔽可能な粒子状の顔料を含む遮光膜によって形成されている、
請求項1に記載のレンズユニット。
the concave-convex region of the peripheral region is formed by a light-shielding film containing a particulate pigment capable of blocking the external light;
The lens unit according to claim 1 .
 カバー部材に収容された状態で、前記携帯デバイスに内蔵されている、
請求項1に記載のレンズユニット。
The portable device is housed in a cover member and is built into the portable device.
The lens unit according to claim 1 .
 前記レンズユニットは、1mm以下の中心厚を有するレンズを含む、請求項1に記載のレンズユニット。 The lens unit described in claim 1, wherein the lens unit includes a lens having a center thickness of 1 mm or less.  前記レンズユニットは、20mm以下の外径を有するレンズを含む、請求項1に記載のレンズユニット。 The lens unit described in claim 1, wherein the lens unit includes a lens having an outer diameter of 20 mm or less.  前記レンズユニットは、軸対称の凹状の曲面と凸状の曲面と、を含む、少なくとも一つの表面を有するレンズを含む、請求項1に記載のレンズユニット。 The lens unit of claim 1, wherein the lens unit includes a lens having at least one surface including an axially symmetric concave curved surface and a convex curved surface.  前記反射防止膜は、機能性微粒子とバインダとを含有している、請求項1に記載のレンズユニット。 The lens unit described in claim 1, wherein the anti-reflection film contains functional fine particles and a binder.  前記機能性微粒子が面方向に並ぶ微粒子層が、2層積層されている、請求項7に記載のレンズユニット。 The lens unit described in claim 7, wherein the microparticle layer in which the functional microparticles are aligned in the surface direction is a laminate of two layers.  前記機能性微粒子は、55±10nmの粒径を有する、請求項7に記載のレンズユニット。 The lens unit described in claim 7, wherein the functional microparticles have a particle size of 55±10 nm.  R>5rである、請求項8に記載のレンズユニット。
 但し、Rは前記機能性微粒子の径、rは前記バインダの断面径である。
9. The lens unit of claim 8, wherein R>5r.
Here, R is the diameter of the functional fine particles, and r is the cross-sectional diameter of the binder.
 前記反射防止膜は、表面に微細凹凸構造を有する無機物からなる膜である、請求項1に記載のレンズユニット。 The lens unit described in claim 1, wherein the anti-reflection film is a film made of an inorganic material having a fine uneven structure on its surface.  前記無機物は酸化物である、請求項11に記載のレンズユニット。 The lens unit described in claim 11, wherein the inorganic material is an oxide.  前記酸化物は酸化アルミニウムである、請求項12に記載のレンズユニット。 The lens unit of claim 12, wherein the oxide is aluminum oxide.  請求項1に記載のレンズユニットに含まれる少なくとも一つのレンズの、少なくとも一つの面の上に形成される反射防止膜用の塗布液であって、
 前記レンズのレンズ表面より小さい屈折率を有する複数の機能性微粒子と、
 前記反射防止膜中で前記機能性微粒子間を固定可能であって、前記反射防止膜と前記レンズとを固定可能な、バインダの前駆体であるバインダ成分と、
 前記バインダ成分よりも低い沸点を有する、少なくとも1種の溶媒と、
を含有する塗布液。
A coating solution for an anti-reflection film formed on at least one surface of at least one lens included in the lens unit according to claim 1, comprising:
a plurality of functional fine particles having a refractive index lower than that of the lens surface of the lens;
a binder component that is a precursor of a binder that can fix the functional fine particles in the anti-reflection film and fix the anti-reflection film and the lens together;
At least one solvent having a boiling point lower than that of the binder component;
A coating solution containing the above.
 前記溶媒は、60℃以上140℃以下である沸点を有する溶媒を含む、請求項14に記載の塗布液。 The coating liquid described in claim 14, wherein the solvent includes a solvent having a boiling point of 60°C or higher and 140°C or lower.  前記機能性微粒子の前記機能性微粒子及びバインダ成分の合計に対する質量比は、80%以上である、請求項14に記載の塗布液。 The coating liquid according to claim 14, wherein the mass ratio of the functional fine particles to the total of the functional fine particles and binder component is 80% or more.  前記機能性微粒子の粒径のばらつきは±10%以内である、請求項14に記載の塗布液。 The coating solution described in claim 14, wherein the particle size variation of the functional fine particles is within ±10%.  前記塗布液に対する、前記機能性微粒子と前記バインダ成分の合計の質量比は、20%以下である、請求項14に記載の塗布液。 The coating liquid according to claim 14, wherein the total mass ratio of the functional fine particles and the binder component to the coating liquid is 20% or less.
PCT/JP2025/014943 2024-04-17 2025-04-16 Lens unit and coating liquid Pending WO2025220693A1 (en)

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JP2013024922A (en) * 2011-07-15 2013-02-04 Canon Inc Optical element and method for manufacturing the same, and light-shielding coating material
US20150103407A1 (en) * 2013-10-16 2015-04-16 Shen-Chieh Chen Lens, optical imaging lens set and method for forming a lens
WO2016158097A1 (en) * 2015-03-31 2016-10-06 富士フイルム株式会社 Composition for forming optical function layer, solid-state imaging element using same, and camera module
JP2019139208A (en) * 2018-02-13 2019-08-22 日本板硝子株式会社 Membrane, liquid composition, optical element, and imaging apparatus
JP2023177176A (en) * 2022-06-01 2023-12-13 日本板硝子株式会社 Coating liquid for low-reflection materials and low-reflection films

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013024922A (en) * 2011-07-15 2013-02-04 Canon Inc Optical element and method for manufacturing the same, and light-shielding coating material
US20150103407A1 (en) * 2013-10-16 2015-04-16 Shen-Chieh Chen Lens, optical imaging lens set and method for forming a lens
WO2016158097A1 (en) * 2015-03-31 2016-10-06 富士フイルム株式会社 Composition for forming optical function layer, solid-state imaging element using same, and camera module
JP2019139208A (en) * 2018-02-13 2019-08-22 日本板硝子株式会社 Membrane, liquid composition, optical element, and imaging apparatus
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