WO2025216065A1 - Track equipment and track-guided carriage system - Google Patents
Track equipment and track-guided carriage systemInfo
- Publication number
- WO2025216065A1 WO2025216065A1 PCT/JP2025/012129 JP2025012129W WO2025216065A1 WO 2025216065 A1 WO2025216065 A1 WO 2025216065A1 JP 2025012129 W JP2025012129 W JP 2025012129W WO 2025216065 A1 WO2025216065 A1 WO 2025216065A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pair
- track
- rollers
- guide
- traveling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Definitions
- One aspect of the present invention relates to track equipment for rail-guided vehicles and a rail-guided vehicle system.
- Overhead traveling vehicles that travel along tracks to transport goods are known. Overhead traveling vehicles travel along the direction of the track, with traveling rollers rolling on the underside of the track and side rollers guided by the sides of the track. Furthermore, the tracks on which such overhead traveling vehicles travel may be laid across multiple buildings. If the buildings shake or move in different ways due to an earthquake or other event, the tracks spanning the buildings may become bent or damaged.
- Patent Document 1 describes a traveling facility that allows for some degree of misalignment by arranging a track made up of multiple segment structures for a portion of the track spanning between buildings, and also arranges connecting sections that break the connection between the tracks when a stress above a predetermined value is applied, thereby avoiding interference with other tracks (or structures installed near the tracks) after a portion of the track breaks, and reducing damage to the track.
- one object of the present invention is to provide track equipment and a track-guided bogie system that allow the bogie to run stably even if there is a gap on the side where the side rollers roll.
- the track system has a pair of running rollers that are arranged opposite each other in a width direction perpendicular to the running direction and rotate about a horizontal axis, and a pair of side rollers that are arranged opposite each other in the width direction and rotate about a vertical axis.
- the track system is constructed by connecting a plurality of segments, each of which has a rolling surface on which the pair of running rollers roll, a side surface that contacts the side rollers from the outside in the width direction of the segment, and a guide surface that contacts the side rollers from the inside in the width direction of the segment, and the guide surface on one of the adjacent segments and the side surface on the other of the adjacent segments are formed so as to face each other in the width direction.
- the side rollers can always be guided by at least one of the side surfaces and the guide surfaces between adjacent segments in the direction in which the segments are connected. Furthermore, even if there is a gap in the gap between the side surfaces where the side rollers roll, there will be no section where the side rollers are not guided, allowing the bogie to run stably.
- the side surfaces are a pair of side surfaces that contact each of the pair of side rollers from the outside in the width direction
- the guide surfaces are a pair of guide surfaces that contact each of the pair of side rollers from the inside in the width direction
- the pair of side surfaces and pair of guide surfaces may be arranged so that the pair of guide surfaces of one of the adjacent segments and the pair of side surfaces of the other adjacent segment face each other in the width direction.
- each of the multiple segments may be formed symmetrically. This configuration makes it easier to form the segments.
- the guide surface may be positioned at a distance from the side surface that is greater than the diameter of the side roller.
- adjacent segments may be configured to be rotatable relative to each other in the horizontal direction.
- the segments can be curved to the left or right along the connecting direction.
- the adjacent segments can rotate relative to each other to absorb the misalignment. Even if such misalignment occurs, the bogie can travel stably.
- one end of each segment in the running direction may be formed in a convex arc shape in plan view, and the other end may be formed in a concave arc shape that fits into the one end in plan view.
- the side surface may be formed to guide the side rollers in a direction that brings them into contact with the guide surface.
- a rail-guided vehicle system may include any one of the track facilities described above in (1) to (7) and a vehicle that travels on the track facility. With this configuration, the vehicle can travel stably even if a gap occurs on the side where the side rollers roll.
- the bogie has two pairs of side rollers, a pair of upper side rollers and a pair of lower side rollers, arranged in the vertical direction, and the upper side rollers may contact the side surface, and the lower side rollers may contact the guide surface.
- the height of the guide surface can be lower than the position of the upper side rollers, thereby increasing the travel space in which the bogie travels.
- the carriage can run stably even if there is a gap on the side where the side rollers roll.
- FIG. 1 is a schematic plan view showing a traveling vehicle system according to an embodiment.
- FIG. 2 is a schematic front view of the overhead traveling vehicle of FIG. 1 as seen from the traveling direction.
- FIG. 3 is a cross-sectional view of the track of FIG. 4A and 4B are diagrams for explaining the operations of the branch rollers, upper side rollers, and lower side rollers at the branching portion and merging portion in FIG. 2.
- FIG. 5A is a plan view showing a coupling track in which segments are arranged in a straight line
- FIG. 5B is a plan view showing a coupling track in which segments are arranged in a curved line.
- Fig. 6(A) is a perspective view of a segment that constitutes a connecting track
- Fig. 6(A) is a perspective view of a segment that constitutes a connecting track
- FIG. 6(B) is a perspective view showing a part of the segment shown in Fig. 6(A).
- FIG. 7 is a perspective view of a part of the connecting track as seen obliquely from above.
- FIG. 8 is a perspective view of the connecting tracks in FIG. 7 arranged in a curved shape, as viewed obliquely from above.
- 9 is a perspective view of the running section running in the running space forming section formed on the connecting track of FIG. 7, seen obliquely from above.
- 10A and 10B are diagrams showing an example of state transitions in a traveling vehicle traveling on a connecting track.
- 11A and 11B are diagrams showing an example of state transitions in a traveling vehicle traveling on a connecting track.
- 12A and 12B are diagrams showing an example of state transitions in a traveling vehicle traveling on a connecting track.
- traveling vehicle system (rail-guided bogie system) including an articulated track (railway facility) 60 according to one embodiment, with reference to the drawings.
- identical elements are given the same reference numerals, and duplicate explanations will be omitted.
- the directions “up,” “down,” “left,” “right,” “front,” and “rear” are defined in Figures 2 and 3.
- the traveling vehicle system 1 is a system for transporting items 10 between mounting sections 9, 9 using overhead traveling vehicles (carriages) 6 (hereinafter referred to as traveling vehicles 6) that can move along traveling tracks 4.
- Items 10 include, for example, FOUPs (Front Opening Unified Pods) that store multiple semiconductor wafers, containers that store glass substrates, containers such as reticle pods, and general parts.
- the traveling vehicle system 1 comprises traveling tracks 4, multiple traveling vehicles 6, multiple mounting sections 9, and connecting tracks 60.
- the running track 4 is installed, for example, near the ceiling, which is the overhead space for the worker.
- the running track 4 is suspended, for example, from the ceiling of the building 2.
- the running track 4 is a predetermined running path for the running vehicle 6 to travel on.
- the running track 4 may be arranged across multiple buildings 2. In this embodiment, the running track 4 is arranged across two buildings 2A and 2B.
- Buildings 2A and 2B may sway in different ways due to an earthquake or the like. Specifically, buildings 2A and 2B may sway in different directions in the X direction, or in different directions in the Y direction.
- the running track 4 is installed via a connecting track 60 across buildings 2A and 2B, which may sway in different ways. Note that in this embodiment, an example has been given in which buildings 2A and 2B are arranged so that there is almost no distance between them, but buildings 2A and 2B may also be arranged so that there is a certain distance between them and they are suspended from an inter-building building or the like.
- the traveling track 4 of the traveling vehicle system 1 has a first main line section 4A that travels in one direction in a specified area in building 2A, a second main line section 4B that travels in one direction in a specified area in building 2B, and a connecting section 4C that connects buildings 2A and 2B. Note that in connecting section 4C, the traveling vehicle 6 also moves in a predetermined direction.
- the running track 4 is supported by support posts 40A, 40A.
- the running track 4 has a cylindrical rail main body 40 consisting of a pair of bottom surfaces 40B, 40B, a pair of side surfaces 40C, 40C, and a top surface 40D, as well as a power supply line 40E and a magnetic plate 40F.
- the rail main body 40 houses (encloses) the running part 50 of the running vehicle 6.
- the bottom surface 40B extends in the running direction of the running vehicle 6 and forms the underside of the rail main body 40.
- the bottom surface 40B is a plate-shaped member on which the running rollers 51 of the running vehicle 6 roll.
- the side surface 40C extends in the running direction of the running vehicle 6 and forms the side of the rail main body 40.
- the top surface 40D extends in the running direction of the running vehicle 6 and forms the top surface of the rail main body 40.
- the power feeder 40E supplies power to the power feeder core 57 of the traveling vehicle 6 and transmits and receives signals to and from the power feeder core 57.
- the power feeder 40E is fixed to each of the pair of side portions 40C, 40C and extends along the traveling direction.
- the power feeder 40E supplies power to the power feeder core 57 in a non-contact manner.
- the magnetic plate 40F generates a magnetic force in the LDM (Linear DC Motor) 59 of the traveling vehicle 6 to cause it to travel or stop.
- the magnetic plate 40F is fixed to the top surface portion 40D and extends along the traveling direction.
- the traveling vehicle 6 travels on the traveling track 4 and transports the article 10.
- the traveling vehicle 6 travels on the traveling track 4 when the traveling rollers 51 of the traveling vehicle 6 roll on the underside 40B of the traveling track 4.
- the traveling vehicle 6 is configured to be able to transfer the article 10.
- the traveling vehicle 6 is an overhead traveling unmanned traveling vehicle.
- the number of traveling vehicles 6 provided in the traveling vehicle system 1 is not particularly limited and may be multiple.
- the traveling vehicle 6 has a main body unit 7, a traveling unit 50, and a traveling vehicle controller 35.
- the main body unit 7 has a main body frame 22, a lateral feed unit 24, a ⁇ drive 26, an elevation drive unit 28, an elevation platform 30, and a cover 33.
- the main frame 22 is connected to the travel unit 50 and supports the lateral feed unit 24, ⁇ drive 26, lift drive unit 28, lift platform 30, and cover 33.
- the lateral feed unit 24 collectively transports the ⁇ drive 26, lift drive unit 28, and lift platform 30 laterally in a direction perpendicular to the travel direction of the travel track 4.
- the ⁇ drive 26 rotates at least one of the lift drive unit 28 and the lift platform 30 within a predetermined angular range in a horizontal plane.
- the lift drive unit 28 raises and lowers the lift platform 30 by winding or unwinding a suspending material such as a wire, rope, or belt.
- the lift platform 30 is provided with a chuck that can freely grip or release the article 10.
- a pair of covers 33 are provided, for example, at the front and rear of the travel direction of the travel vehicle 6.
- the cover 33 has protruding and retracting claws (not shown) to prevent the article 10 from falling during transport.
- the running unit 50 causes the running vehicle 6 to run along the running track 4.
- the running unit 50 has a first running unit 50A and a second running unit 50B, which are rotatably connected to each other.
- each of the first running unit 50A and the second running unit 50B has a running roller 51, a side roller 52, a branch roller 53, an auxiliary roller 54, an inclined roller 55, a power supply core 57, and an LDM 59.
- the branch roller 53, the auxiliary roller 54, and the inclined roller 55 are not shown in FIG. 2.
- the running rollers 51 are a pair of rollers consisting of an outer wheel 51A as a running wheel and an inner wheel 51B as a running auxiliary wheel.
- the running rollers 51 are arranged at both the front and rear, left and right ends of the running section 50.
- the running rollers 51 roll on a pair of lower surface portions 40B, 40B of the running track 4.
- the side rollers 52 are arranged so as to sandwich each of the outer rings 51A of the running rollers 51 in the front-to-rear direction.
- the side rollers 52 have two pairs of side rollers 52, 52: a pair of upper side rollers 52A, 52A and a pair of lower side rollers 52B, 52B.
- Each of the pair of upper side rollers 52A, 52A is arranged opposite each other in the width direction (left-right direction) and rotates around a vertical axis.
- Each of the pair of upper side rollers 52A, 52A is arranged so as to be able to come into contact (roll) with a pair of side portions 40C, 40C.
- Each of the pair of lower side rollers 52B, 52B is arranged opposite each other in the width direction (left-right direction) like the pair of upper side rollers 52A, 52A and rotates around a vertical axis.
- Each of the pair of lower side rollers 52B, 52B is arranged to be able to come into contact with (roll over) a pair of guide surfaces 77A, 77A formed on each of a pair of guide members 77, which will be described in detail below.
- the branching rollers 53 are provided to switch the traveling vehicle 6 (traveling section 50) between straight-ahead traveling and branching traveling at the branching section of the traveling track 4.
- the branching rollers 53 are provided so that they can be shifted left and right (widthwise) by a switching mechanism (not shown).
- the branching rollers 53 selectively come into contact with (abut on) the branching guides provided at the branching section and are guided thereby, switching the traveling direction of the traveling vehicle 6.
- Four branching rollers 53 are provided for each of the first traveling section 50A and the second traveling section 50B (see Figure 4). The switching of the position of the branching rollers 53 is controlled by the traveling vehicle controller 35, which receives commands from the area controller 90.
- the vehicle 6 traveling on the first main line portion 4A has a pair of upper side rollers 52A, 52A rolling on the inner surfaces of a pair of side surfaces 40C, 40C that make up the first main line portion 4A.
- the branch roller 53 is guided by the branch guide 40G.
- the branch roller 53 is guided from the first main line portion 4A to the connecting track 4D.
- the branch roller 53 is shifted to the right by a switching mechanism (not shown). In this case, the branch roller 53 is not guided by the branch guide 40G on the connecting track 4D side, but is guided by the branch guide 40H on the straight-ahead side. This allows the vehicle 6 to continue traveling on the first main line portion 4A.
- the connecting track 4D is provided with a posture stabilizing guide 40I at the branching point and a posture stabilizing guide 40J at the merging point.
- a traveling vehicle 6 transfers to the connecting track 4D and approaches a point where a posture stabilizing guide 40I is provided
- the left lower side roller 52B is guided by the posture stabilizing guide 40I.
- the left upper side roller 52A rolls on the left side surface 40C that constitutes the connecting track 4D.
- the lower side roller 52B can stabilize the posture of the traveling vehicle 6.
- the traveling vehicle 6 approaches a location where posture stabilization guide 40J is provided, the right lower side roller 52B (i.e., the roller on the opposite side from the roller that was previously guiding it) is guided by posture stabilization guide 40J. At this time, the right upper side roller 52A rolls on the right side surface portion 40C that forms the connecting track 4D. By being guided by posture stabilization guide 40J, the lower side roller 52B can stabilize the posture of the traveling vehicle 6.
- the sections where posture stabilization guide 40I and posture stabilization guide 40J are provided do not overlap, but there may be sections where both posture stabilization guide 40I and posture stabilization guide 40J are provided.
- the traveling vehicle 6 having a pair of lower side rollers 52B, 52B and a branch roller 53 can easily transfer from the first main line portion 4A to the connecting track 4D and from the connecting track 4D to the first main line portion 4A by having the branch roller 53 and lower side roller 52B guided by the branch guide 40G, posture stabilizing guide 40I, posture stabilizing guide 40J, and branch guide 40K, respectively.
- the lower side roller 52B is guided by the posture stabilizing guide 40I and posture stabilizing guide 40J. Therefore, the posture of the traveling vehicle 6 can be stabilized even in guideless sections.
- the auxiliary rollers 54 are a group of three rollers provided at the front and rear of the running section 50.
- the auxiliary rollers 54 are provided to prevent the LDM 59, power supply core 57, etc. from coming into contact with the magnetic plate 40F arranged on the upper surface of the running track 4 when the running section 50 tilts forward or backward due to acceleration or deceleration while running.
- the inclined rollers 55 are provided at the four corners of the LDM 59.
- the inclined rollers 55 are arranged in a state tilted from the front to rear direction.
- the inclined rollers 55 are provided to prevent the running section 50 from tilting due to centrifugal force when running on curved sections.
- the power supply cores 57 are arranged at the front and rear of the traveling section 50, sandwiching the LDM 59 in the left-right direction. They provide contactless power supply and send and receive various signals between them and the power supply line 40E arranged on the traveling track 4.
- the power supply core 57 exchanges signals with the traveling vehicle controller 35.
- the LDM 59 is located at the front and rear of the traveling section 50.
- the LDM 59 uses an electromagnet to generate magnetic force for traveling or stopping between it and the magnetic plate 40F arranged on the top surface of the traveling track 4.
- the placement section 9 is arranged along the traveling track 4 and is provided at a position where the article 10 can be handed over to and from the traveling vehicle 6.
- the placement section 9 includes a buffer and a delivery port.
- the buffer is a placement section where the article 10 is temporarily placed.
- the buffer is a placement section where the article 10 is temporarily placed when, for example, the article 10 being transported by the traveling vehicle 6 cannot be transferred to the intended delivery port because another article 10 is placed at that port.
- the delivery port is a placement section where the article 10 is handed over to and from semiconductor processing equipment (not shown), such as a cleaning equipment, film formation equipment, lithography equipment, etching equipment, heat treatment equipment, or planarization equipment.
- the processing equipment is not particularly limited and may be a variety of devices.
- the placement unit 9 is arranged to the side of the running track 4.
- the running vehicle 6 transfers the article 10 to and from the placement unit 9 by using the lateral feed unit 24 to laterally feed the lifting drive unit 28 and the like, and slightly raising and lowering the lifting platform 30.
- the placement unit 9 may also be arranged directly below the running track 4. In this case, the running vehicle 6 transfers the article 10 to and from the placement unit 9 by raising and lowering the lifting platform 30.
- the traveling vehicle controller 35 is an electronic control unit consisting of a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc.
- the traveling vehicle controller 35 controls various operations of the traveling vehicle 6. Specifically, the traveling vehicle controller 35 controls the traveling unit 50, the lateral feed unit 24, the ⁇ drive 26, the lifting drive unit 28, and the lifting platform 30.
- the traveling vehicle controller 35 can be configured as software in which a program stored in ROM is loaded onto RAM and executed by the CPU, for example.
- the traveling vehicle controller 35 may also be configured as hardware such as electronic circuits.
- the traveling vehicle controller 35 communicates with the area controller 90 using a power supply line 40E, such as a feeder line, provided on the traveling track 4.
- a power supply line 40E such as a feeder line
- the area controller 90 is an electronic control unit consisting of a CPU, ROM, RAM, etc.
- the area controller 90 can be configured as software, for example, in which a program stored in ROM is loaded into RAM and executed by the CPU.
- the area controller 90 may also be configured as hardware such as electronic circuits.
- the area controller 90 sends transport commands to the traveling vehicles 6 to transport the items 10.
- An area controller 90 may be provided for each area in which the traveling track 4 is laid for each building 2A, 2B.
- a connecting track 60 is disposed in the connecting section 4C connecting building 2A and building 2B.
- the connecting track 60 is disposed in building 2A.
- the connecting track 60 includes a plurality of segments 61.
- the connecting track 60 is configured by connecting adjacent segments 61, 61 with a gap G between their side surfaces.
- adjacent segments 61, 61 are configured to be rotatable relative to each other in the horizontal direction. This configuration allows the connecting track 60 to be deformed so that it becomes linear in its extension direction (the traveling direction of the traveling vehicle 6) in a plan view (see Figures 5(A) and 7) or curved (see Figures 5(B) and 8).
- the configuration of the connecting track 60 is described in detail below.
- each of the multiple segments 61 includes a support portion 63, a pivot portion 65, a connecting portion 67, and a travel space forming portion 70.
- Each of the multiple segments 61 is formed symmetrically.
- the support portion 63 supports the rotating portion 65, the connecting portion 67, and the running space forming portion 70.
- the support portion 63 is a flat member.
- the running space forming portion 70 is attached to the underside of the support portion 63 via a pair of mounting portions 63A, 63A at both ends in the width direction (left-right direction).
- the rotating portion 65 is attached to the underside of the support portion 63, between the mounting portions 63A, 63A in the left-right direction.
- the support portion 63 of one of the multiple segments 61 is fixed by a hanging member that suspends the connecting track 60 from the ceiling of the building 2A.
- the support portions 63 of the remaining multiple segments 61 are not fixed to the ceiling of the building 2A.
- only the segment 61 furthest upstream (rearmost) in the running direction is fixed to the ceiling of the building 2A.
- the rotating portion 65 is fixed to the underside of the support portion 63 and to the upper surface of the connecting portion 67.
- the rotating portion 65 is a member that rotates the connecting portion 67 relative to the support portion 63.
- the rotating portion 65 rotates the connecting portion 67 around a rotation axis that extends vertically.
- the rotating portion 65 is configured to include, for example, an outer ring portion 65A, an inner ring portion 65B, and a rolling portion 65C that is provided between the outer ring portion 65A and the inner ring portion 65B.
- the outer ring portion 65A is fixed to the support portion 63.
- the inner ring portion 65B is fixed to the connecting portion 67.
- the outer ring portion 65A and the inner ring portion 65B are arranged to be able to rotate relatively around the same rotation axis that extends vertically.
- the connecting portion 67 is a member that connects adjacent segments 61, 61.
- One end of the connecting portion 67 in the running direction is fixed to the rotating portion 65. More specifically, a cylindrical mounting portion 67A is formed at one end of the connecting portion 67 in the running direction, and is fixed to the rotating portion 65 while inserted into the inner ring portion 65B.
- the other end of the connecting portion 67 in the running direction is fixed to the underside of the support portion 63 of the adjacent segment 61. More specifically, the other end of the connecting portion 67 in the running direction is fixed to the underside of the support portion 63 via an intermediate member 67B.
- the running space forming portion 70 forms the running space DA in which the running portion 50 of the running vehicle 6 runs.
- the running space forming portion 70 has a top surface portion 71, a pair of side surfaces 73, 73, and a pair of bottom surfaces 75, 75.
- the top surface 71 forms the upper surface of the running space DA.
- the top surface 71 corresponds to the top surface 40D of the running track 4.
- a magnetic plate is attached to the top surface 71.
- One end of the top surface 71 in the running direction is formed in a convex arc shape in plan view, and the other end of the top surface 71 in the running direction is formed in a concave arc shape that fits into the one end in plan view.
- the pair of side surfaces 73, 73 form a pair of side surfaces of the running space DA.
- the pair of side surfaces 73, 73 correspond to the pair of side surfaces 40C, 40C of the running track 4.
- Each of the pair of side surfaces 73, 73 has a side surface 73A, 73A that contacts each of the pair of upper side rollers 52A, 52A from the outside in the width direction.
- a power supply line is attached to each of the inner surfaces of the pair of side surfaces 73, 73.
- Each of the pair of side surfaces 73, 73 is formed in an arc shape when viewed in a plane.
- the pair of underside portions 75, 75 form a pair of underside portions of the traveling space DA.
- the pair of underside portions 75, 75 correspond to the pair of underside portions 40B, 40B of the traveling track 4.
- Each of the pair of underside portions 75, 75 has a rolling surface 75A, 75A on which the traveling rollers 51 (outer ring 51A and inner ring 51B) of the traveling vehicle 6 roll.
- One end of the underside portion 75 in the traveling direction is formed in a convex arc shape in plan view, and the other end of the underside portion 75 in the traveling direction is formed in a concave arc shape that fits into the one end in plan view.
- a guide member 77 is provided on each of the pair of lower surface portions 75.
- Each of the guide members 77 is formed with a guide surface 77A that contacts the pair of lower side rollers 52B from the inside in the width direction.
- the guide member 77 may be formed integrally with the lower surface portion 75, or may be attached as a separate member.
- the pair of side surfaces 73A and the pair of guide surfaces 77A are arranged so that one pair of guide surfaces 77A of adjacent segments 61 and the other pair of side surfaces 73A of adjacent segments 61 face each other in the width direction.
- the guide surface 77A of the guide member 77 is positioned at a distance from the side surface 73A of the side portion 73 that is greater than the diameter of the lower side roller 52B.
- the side surface 73A of the side portion 73 is formed to guide the lower side roller 52B in a direction that brings it into contact with the guide surface 77A of the guide member 77.
- one of the pair of upper side rollers 52A contacts (rolls against) the side surface 73A of the side surface portion 73 as it moves forward.
- the traveling vehicle 6 reaches the front of the first segment 61, as shown in FIG. 10(A)
- the pair of upper side rollers 52A, 52A on the front side in the traveling direction are guided inward in the width direction by the end of the side surface 73A of the side surface portion 73, and the pair of lower side rollers 52B, 52B on the rear side in the traveling direction are guided by the guide surface 77A of the guide member 77.
- one of the pair of upper side rollers 52A, 52A on the front side again moves forward while making contact (rolling) with the side surface 73A of the side portion 73.
- the pair of upper side rollers 52A, 52A on the rear side like the pair of upper side rollers 52A, 52A on the front side, is guided inward in the width direction by the end of the side surface 73A of the side portion 73, and the pair of lower side rollers 52B, 52B on the rear side are guided by the guide surface 77A of the guide member 77.
- one of the pair of upper side rollers 52A, 52A on the front side is guided inward in the width direction by the end of the side surface 73A of the side portion 73, and as shown in FIG. 11(B), the pair of lower side rollers 52B, 52B on the front side is guided by the guide surface 77A of the guide member 77.
- one of the pair of upper side rollers 52A, 52A on the rear side goes through a free state (not contacting the side surface 73A of the side portion 73) and is again guided by the side surface 73A of the side portion 73, as shown in FIG. 12(A).
- one of the pair of upper side rollers 52A, 52A on the front side is again guided in the traveling direction by the side surface 73A of the side surface portion 73.
- one of the pair of upper side rollers 52A, 52A on the rear side is guided inward in the width direction by the end of the side surface 73A of the side surface portion 73, and the pair of lower side rollers 52B, 52B on the rear side is guided by the guide surface 77A of the guide member 77.
- the traveling vehicle 6 travels along the connecting track 60 while alternately repeating a pattern in which the pair of upper side rollers 52A, 52A are guided along the side surface 73A of the side surface portion 73 and a pattern in which the pair of lower side rollers 52B, 52B are guided along the guide surface 77A of the guide member 77.
- the connecting track 60 of the above embodiment even when adjacent segments 61 are connected with a gap G in the connecting direction of the segments 61, the side rollers 52 (upper side rollers 52A and lower side rollers 52B) are guided by at least one of the side surface 73A and the guide surface 77A. As a result, there are no sections in the connecting direction of the segments 61 where the side rollers 52 are not guided, allowing the traveling vehicle 6 to travel stably.
- the side surfaces 73A are a pair of side surfaces 73A that contact the pair of upper side rollers 52A from the outside in the width direction
- the guide surfaces 77A are a pair of guide surfaces 77A that contact the pair of lower side rollers 52B from the inside in the width direction
- the pair of side surfaces 73A and the pair of 77A are arranged so that the pair of guide surfaces 77A of one adjacent segment 61 and the pair of side surfaces 73A of the other adjacent segment 61 face each other in the width direction.
- each of the multiple segments 61 is formed symmetrically. This makes it easy to form the segments 61.
- the guide surfaces 77A, 77A are positioned away from the side surfaces 73A, 73A at a distance greater than the diameter of the lower side roller 52B. This prevents the lower side roller 52B from coming into contact with both the side surface 73A and the guide surface 77A, thereby reducing damage to the lower side roller 52B.
- adjacent segments 61 are configured to be rotatable relative to each other in the horizontal direction. This allows the segments 61 to be curved to the left or right, for example, as shown in Figure 5(B), along the connecting direction. As a result, even if horizontal misalignment occurs in the running track 4 due to shaking of the building 2, the adjacent segments 61, 61 can rotate relative to each other to absorb the misalignment. Even if such misalignment occurs, the running vehicle 6 can travel stably.
- each segment 61 top surface portion 71 and a pair of bottom surface portions 75, 75 in the running direction is formed as a convex arc in plan view, and the other end is formed as a concave arc that fits into the one end in plan view.
- the connecting track 60 may be positioned in the connecting section 4C in a state between the state shown in FIG. 5(A) and the state shown in FIG. 5(B). In this case, even if the buildings 2A and 2B are misaligned in the X and Y directions, it will be possible to follow the misalignment.
- the side surface 73A is formed to guide the lower side roller 52B in the direction of contact with the guide surface 77A.
- the upper side roller 52A contacts the side surface 73A, and the lower side roller 52B contacts the guide surface 77A. This allows the height of the guide surface 77A to be lower than the position where the upper side roller 52A is positioned, thereby increasing the space of the traveling space DA in which the traveling vehicle 6 travels.
- the connecting track 60 in the above embodiment has been described with an example in which one of the plurality of segments 61 is fixed to the ceiling or the like of the building 2, and the remaining segments 61 are not directly fixed to the ceiling or the like but are connected to the fixed segment 61 so as to be rotatable.
- this is not limiting.
- one or more of the remaining segments 61 may be fixed via a stage that is slidable in at least one of the X and Y directions relative to the ceiling or the like of the building 2.
- one or more of the remaining segments 61 may be fixed via a stage that is rotatable in addition to the X and Y directions.
- a sliding portion that is slidable in the connecting direction may be provided instead of the rotating portion 65 of the segment 61 in the above embodiment.
- the distance between adjacent segments 61 can be changed.
- the adjacent segments 61 do not need to be rotatable relative to each other.
- the rotating portion 65 may be removed from the segment 61.
- one end of the segment 61 (top surface portion 71 and the pair of bottom surface portions 75, 75) in the running direction is formed in a convex arc shape in a plan view, and the other end does not have to be formed in a concave arc shape that fits into the one end in a plan view.
- any shape is acceptable as long as one end has a shape that allows it to fit into the other end, in other words, as long as there is a portion that overlaps with the other in the running direction of the running vehicle 6.
- connection track 60 of the above embodiment and modified examples may be applied to the first connecting member (50) or the second connecting member (60) described as an embodiment in JP 2019-186428 A.
- the connecting track 60 has been described for the case where the traveling vehicle 6 runs on which both the pair of upper side rollers 52A, 52A and the pair of lower side rollers 52B, 52B are provided as side rollers, but the present invention is not limited to this.
- the traveling vehicle 6 runs on which only the pair of side rollers 52, 52 are provided, it is sufficient to provide a guide member 77 having a guide surface 77A that comes into contact with the side rollers 52, 52.
- the connecting track 60 is disposed in building 2A, but it may be disposed in building 2B, or may be disposed at a position straddling buildings 2A and 2B. Furthermore, if there is an inter-building building between buildings 2A and 2B, the connecting track 60 is disposed between building 2A and the inter-building building. The connecting track 60 may be disposed in building 2A, in the inter-building building, or straddling building 2A and the inter-building building. Similarly, the connecting track 60 is disposed between building 2B and the inter-building building. The connecting track 60 may be disposed in building 2B, in the inter-building building, or straddling building 2B and the inter-building building.
- the connecting track 60 is arranged in the connecting section 4C, but it may also be arranged in the first main line section 4A or the second main line section 4B, etc.
- the curved section in the first main line section 4A or the second main line section 4B is composed of a running track 4 with a standardized curvature. For this reason, giving the running track 4 a shape other than the standardized curvature requires, for example, custom-making the running track 4.
- the connecting track 60 according to the above embodiment and modified example it is easy to give the running track 4 a shape other than the standardized curvature.
- the connecting track 60 in which adjacent segments 61, 61 are connected with a gap G between them when the segments 61, 61 are not rotating relative to each other, that is, when the segments 61, 61 are aligned in a straight line as shown in Figure 5 (A).
- the connecting track may also be configured so that adjacent segments 61, 61 are connected with no gap G between them.
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Abstract
Description
本発明の一側面は、有軌道台車の軌道設備及び有軌道台車システムに関する。 One aspect of the present invention relates to track equipment for rail-guided vehicles and a rail-guided vehicle system.
軌道を走行して物品を搬送する天井走行車(台車)が知られている。天井走行車は、走行ローラが軌道の下面を転動し、サイドローラが軌道の側面に案内されることによって、軌道の延在方向に沿って走行する。また、このような天井走行車が走行する軌道は、複数の建屋に跨がって敷設される場合がある。地震等により各建屋が互いに異なる態様で揺れたり移動したりすると、建屋間に跨がる軌道は、湾曲又は破損する場合がある。 Overhead traveling vehicles (carts) that travel along tracks to transport goods are known. Overhead traveling vehicles travel along the direction of the track, with traveling rollers rolling on the underside of the track and side rollers guided by the sides of the track. Furthermore, the tracks on which such overhead traveling vehicles travel may be laid across multiple buildings. If the buildings shake or move in different ways due to an earthquake or other event, the tracks spanning the buildings may become bent or damaged.
特許文献1には、建屋間に跨がる軌道の一部を、複数のセグメント構造体によって構成される軌道を配置することによって多少のずれを可能にすると共に、所定値以上の応力が作用すると軌道間の接続を破断する接続部を配置することで、軌道の一部が破断した後に他の軌道(又は軌道近傍に設けられる構造物)との干渉を回避し、軌道の損傷を低減することが可能な走行設備が記載されている。 Patent Document 1 describes a traveling facility that allows for some degree of misalignment by arranging a track made up of multiple segment structures for a portion of the track spanning between buildings, and also arranges connecting sections that break the connection between the tracks when a stress above a predetermined value is applied, thereby avoiding interference with other tracks (or structures installed near the tracks) after a portion of the track breaks, and reducing damage to the track.
しかしながら、上記の複数のセグメント構造体によって構成される軌道では、破損しない程度に湾曲した場合、セグメント同士の切れ目を境に隣接するセグメント同士が移動し、サイドローラが転動する側面の切れ目において隙間が生じる場合がある。また、上記の接続部が設けられる箇所も切れ目が生じ、同様に、サイドローラが転動する側面の切れ目において隙間が生じる場合がある。このようなサイドローラが転動する側面に切れ目がある走行レールでは、台車を安定して走行させることができなくなるおそれがある。 However, in a track made up of the above-mentioned multiple segment structures, if it is bent to a degree that does not cause damage, adjacent segments may move across the gaps between them, creating gaps in the side surfaces where the side rollers roll. Gap may also occur at the locations where the above-mentioned connection parts are provided, creating gaps in the side surfaces where the side rollers roll. Running rails with gaps on the side surfaces where the side rollers roll may not allow bogies to run stably.
そこで、本発明の一側面の目的は、サイドローラが転動する側面に切れ目がある場合であっても、台車を安定して走行させることができる、有軌道台車の軌道設備及び有軌道台車システムを提供することにある。 Therefore, one object of the present invention is to provide track equipment and a track-guided bogie system that allow the bogie to run stably even if there is a gap on the side where the side rollers roll.
(1)本発明の一側面に係る軌道設備は、走行方向に直交する幅方向に対向して設けられ、水平軸を中心に回転する一対の走行ローラと、幅方向に対向して設けられ、鉛直軸を中心に回転する一対のサイドローラと、を有する台車が走行する軌道設備であって、軌道設備は、複数のセグメント部材が連結されることによって構成されており、複数のセグメント部材のそれぞれは、一対の走行ローラが転動する転動面と、セグメント部材の幅方向における外側からサイドローラに接触する側面と、セグメント部材の幅方向における内側からサイドローラに接触するガイド面と、を備え、互いに隣接するセグメント部材の一方に備わるガイド面と、互いに隣接するセグメント部材の他方に備わる側面とが、幅方向において互いに対向するように形成されている。 (1) One aspect of the present invention relates to a track system on which a carriage travels. The track system has a pair of running rollers that are arranged opposite each other in a width direction perpendicular to the running direction and rotate about a horizontal axis, and a pair of side rollers that are arranged opposite each other in the width direction and rotate about a vertical axis. The track system is constructed by connecting a plurality of segments, each of which has a rolling surface on which the pair of running rollers roll, a side surface that contacts the side rollers from the outside in the width direction of the segment, and a guide surface that contacts the side rollers from the inside in the width direction of the segment, and the guide surface on one of the adjacent segments and the side surface on the other of the adjacent segments are formed so as to face each other in the width direction.
この構成の軌道設備では、セグメント部材の連結方向において互いに隣接するセグメント部材の間で、サイドローラは、常に側面及びガイド面の少なくとも一方によって案内され得る。更に、サイドローラが転動する側面の切れ目に隙間が生じている場合であっても、サイドローラが案内されない区間がなくなるので、台車を安定して走行させることができる。 In a track system with this configuration, the side rollers can always be guided by at least one of the side surfaces and the guide surfaces between adjacent segments in the direction in which the segments are connected. Furthermore, even if there is a gap in the gap between the side surfaces where the side rollers roll, there will be no section where the side rollers are not guided, allowing the bogie to run stably.
(2)上記(1)に記載の軌道設備では、側面は、幅方向における外側から一対のサイドローラのそれぞれに接触する一対の側面であり、ガイド面は、幅方向における内側から一対のサイドローラのそれぞれに接触する一対のガイド面であり、一対の側面及び一対のガイド面は、隣接するセグメント部材の一方の一対のガイド面と、隣接するセグメント部材の他方の一対の側面とが、幅方向において互いに対向するように配置されていてもよい。この構成では、一対のサイドローラが案内されない区間がなくなるので、台車を安定して走行させることができる。 (2) In the track equipment described in (1) above, the side surfaces are a pair of side surfaces that contact each of the pair of side rollers from the outside in the width direction, and the guide surfaces are a pair of guide surfaces that contact each of the pair of side rollers from the inside in the width direction, and the pair of side surfaces and pair of guide surfaces may be arranged so that the pair of guide surfaces of one of the adjacent segments and the pair of side surfaces of the other adjacent segment face each other in the width direction. With this configuration, there are no sections where the pair of side rollers are not guided, allowing the bogie to run stably.
(3)上記(1)又は(2)に記載の軌道設備では、複数のセグメント部材のそれぞれは、左右対称形に形成されていてもよい。この構成では、セグメント部材を形成することが容易となる。 (3) In the track system described in (1) or (2) above, each of the multiple segments may be formed symmetrically. This configuration makes it easier to form the segments.
(4)上記(1)~(3)の何れか一つに記載の軌道設備では、ガイド面は、側面からサイドローラの直径より離れた位置に配置されてもよい。この構成では、サイドローラが側面とガイド面とに同時に接触することがなくなるので、サイドローラへのダメージを低減できる。 (4) In the track equipment described in any one of (1) to (3) above, the guide surface may be positioned at a distance from the side surface that is greater than the diameter of the side roller. With this configuration, the side roller will not come into contact with the side surface and the guide surface at the same time, reducing damage to the side roller.
(5)上記(1)~(4)の何れか一つに記載の軌道設備では、隣接するセグメント部材同士は、水平方向において互いに回動可能に構成されていてもよい。この構成では、セグメント部材の連結方向に沿って、左方又は右方に向かって湾曲させることが可能となる。この結果、建屋の揺れ等で軌道に水平方向のズレが生じたとしても、隣接するセグメント部材同士がそれぞれ回動することで当該ズレを吸収できる。そして、当該ズレが生じた場合であっても、台車を安定して走行させることができる。 (5) In the track system described in any one of (1) to (4) above, adjacent segments may be configured to be rotatable relative to each other in the horizontal direction. With this configuration, the segments can be curved to the left or right along the connecting direction. As a result, even if horizontal misalignment occurs in the track due to building shaking or the like, the adjacent segments can rotate relative to each other to absorb the misalignment. Even if such misalignment occurs, the bogie can travel stably.
(6)上記(5)に記載の軌道設備では、セグメント部材における走行方向における一方の端部は、平面視において凸円弧状に形成され、他方の端部は、平面視において一方の端部に嵌合する凹円弧状に形成されていてもよい。この構成では、隣接するセグメント部材同士で回動したときに、隣接するセグメント部材間に生じる隙間が小さくなる。 (6) In the track system described in (5) above, one end of each segment in the running direction may be formed in a convex arc shape in plan view, and the other end may be formed in a concave arc shape that fits into the one end in plan view. With this configuration, the gap between adjacent segments is reduced when the segments rotate relative to each other.
(7)上記(1)~(6)の何れか一つに記載の軌道設備では、側面は、ガイド面に接触する方向にサイドローラを案内するように形成されていてもよい。この構成では、サイドローラが案内される部分が側面からガイド面に切り替わる際に、ガイド面への案内がスムーズとなる。これにより、台車をより安定して走行させることができる。 (7) In the track equipment described in any one of (1) to (6) above, the side surface may be formed to guide the side rollers in a direction that brings them into contact with the guide surface. With this configuration, when the portion along which the side rollers are guided changes from the side surface to the guide surface, the side rollers are smoothly guided onto the guide surface. This allows the carriage to travel more stably.
(8)本発明の一側面に係る有軌道台車システムは、上記(1)~(7)の何れか一つの軌道設備と、軌道設備を走行する台車と、を備えてもよい。この構成では、サイドローラが転動する側面に隙間が生じた場合であっても、台車を安定して走行させることができる。 (8) A rail-guided vehicle system according to one aspect of the present invention may include any one of the track facilities described above in (1) to (7) and a vehicle that travels on the track facility. With this configuration, the vehicle can travel stably even if a gap occurs on the side where the side rollers roll.
(9)上記(8)に記載の有軌道台車システムでは、台車は、鉛直方向において配列された、一対の上側サイドローラ及び一対の下側サイドローラの二つの一対のサイドローラを有し、上側サイドローラは、側面と接触し、下側サイドローラは、ガイド面と接触してもよい。この構成では、上側サイドローラの配置位置よりもガイド面の高さを低くできるので、台車が走行する走行空間のスペースを大きくできる。 (9) In the rail-guided bogie system described in (8) above, the bogie has two pairs of side rollers, a pair of upper side rollers and a pair of lower side rollers, arranged in the vertical direction, and the upper side rollers may contact the side surface, and the lower side rollers may contact the guide surface. In this configuration, the height of the guide surface can be lower than the position of the upper side rollers, thereby increasing the travel space in which the bogie travels.
本発明の一側面によれば、サイドローラが転動する側面に切れ目がある場合であっても、台車を安定して走行させることができる。 According to one aspect of the present invention, the carriage can run stably even if there is a gap on the side where the side rollers roll.
以下、図面を参照して一実施形態に係る連結軌道(軌道設備)60を含む走行車システム(有軌道台車システム)について説明する。図面の説明において、同一要素には同一符号を付し、重複する説明を省略する。図2及び図3では、説明の便宜のため「上」、「下」、「左」、「右」、「前」、「後」方向を定義する。 The following describes a traveling vehicle system (rail-guided bogie system) including an articulated track (railway facility) 60 according to one embodiment, with reference to the drawings. In the description of the drawings, identical elements are given the same reference numerals, and duplicate explanations will be omitted. For ease of explanation, the directions "up," "down," "left," "right," "front," and "rear" are defined in Figures 2 and 3.
図1及び図2に示されるように、走行車システム1は、走行用軌道4に沿って移動可能な天井走行車(台車)6(以後、走行車6と称する。)を用いて、物品10を載置部9,9間で搬送するためのシステムである。物品10には、例えば、複数の半導体ウェハを格納するFOUP(Front Opening Unified Pod)及びガラス基板を格納する容器、レチクルポッド等のような容器、並びに一般部品等が含まれる。走行車システム1は、走行用軌道4、複数の走行車6、複数の載置部9及び連結軌道60を備える。 As shown in Figures 1 and 2, the traveling vehicle system 1 is a system for transporting items 10 between mounting sections 9, 9 using overhead traveling vehicles (carriages) 6 (hereinafter referred to as traveling vehicles 6) that can move along traveling tracks 4. Items 10 include, for example, FOUPs (Front Opening Unified Pods) that store multiple semiconductor wafers, containers that store glass substrates, containers such as reticle pods, and general parts. The traveling vehicle system 1 comprises traveling tracks 4, multiple traveling vehicles 6, multiple mounting sections 9, and connecting tracks 60.
走行用軌道4は、例えば、作業者の頭上スペースである天井付近に敷設されている。走行用軌道4は、例えば建屋2の天井から吊り下げられている。走行用軌道4は、走行車6を走行させるための予め定められた走行路である。走行用軌道4は、複数の建屋2に跨がって配置される場合がある。本実施形態では、走行用軌道4は、二つの建屋2A,2Bに跨がって配置される。 The running track 4 is installed, for example, near the ceiling, which is the overhead space for the worker. The running track 4 is suspended, for example, from the ceiling of the building 2. The running track 4 is a predetermined running path for the running vehicle 6 to travel on. The running track 4 may be arranged across multiple buildings 2. In this embodiment, the running track 4 is arranged across two buildings 2A and 2B.
建屋2Aと建屋2Bとは、地震等により互いに別の揺れ方をする場合がある。具体的には、建屋2Aと建屋2Bとは、X方向に互いに異なる方向に揺れる場合もあれば、Y方向に互いに異なる方向に揺れる場合もある。走行用軌道4は、このような別の揺れ方をする可能性がある建屋2Aと建屋2Bとに跨がって連結軌道60を介して設けられている。なお、本実施形態では、建屋2Aと建屋2Bとは、ほとんど距離がないように配置される例を挙げて説明したが、建屋2Aと建屋2Bとは、ある程度の距離が存在し、棟間建物等に吊り下げられる等して設けられてもよい。 Buildings 2A and 2B may sway in different ways due to an earthquake or the like. Specifically, buildings 2A and 2B may sway in different directions in the X direction, or in different directions in the Y direction. The running track 4 is installed via a connecting track 60 across buildings 2A and 2B, which may sway in different ways. Note that in this embodiment, an example has been given in which buildings 2A and 2B are arranged so that there is almost no distance between them, but buildings 2A and 2B may also be arranged so that there is a certain distance between them and they are suspended from an inter-building building or the like.
走行車システム1の走行用軌道4は、建屋2Aにおける所定のエリアを一方向に巡回する第一本線部4Aと、建屋2Bにおける所定のエリアを一方向に巡回する第二本線部4Bと、建屋2Aと建屋2Bとの間を接続する連絡部4Cと、を有している。なお、連絡部4Cにおいても、走行車6は、予め定められた一方向に移動する。 The traveling track 4 of the traveling vehicle system 1 has a first main line section 4A that travels in one direction in a specified area in building 2A, a second main line section 4B that travels in one direction in a specified area in building 2B, and a connecting section 4C that connects buildings 2A and 2B. Note that in connecting section 4C, the traveling vehicle 6 also moves in a predetermined direction.
走行用軌道4は、支柱40A,40Aにより支持される。走行用軌道4は、一対の下面部40B,40Bと一対の側面部40C,40Cと天面部40Dとからなる筒状のレール本体部40と、給電線40Eと、磁気プレート40Fと、を有している。レール本体部40は、走行車6の走行部50を収容(内包)する。下面部40Bは、走行車6の走行方向に延在し、レール本体部40の下面を構成する。下面部40Bは、走行車6の走行ローラ51が転動する板状部材である。側面部40Cは、走行車6の走行方向に延在し、レール本体部40の側面を構成する。天面部40Dは、走行車6の走行方向に延在し、レール本体部40の上面を構成する。 The running track 4 is supported by support posts 40A, 40A. The running track 4 has a cylindrical rail main body 40 consisting of a pair of bottom surfaces 40B, 40B, a pair of side surfaces 40C, 40C, and a top surface 40D, as well as a power supply line 40E and a magnetic plate 40F. The rail main body 40 houses (encloses) the running part 50 of the running vehicle 6. The bottom surface 40B extends in the running direction of the running vehicle 6 and forms the underside of the rail main body 40. The bottom surface 40B is a plate-shaped member on which the running rollers 51 of the running vehicle 6 roll. The side surface 40C extends in the running direction of the running vehicle 6 and forms the side of the rail main body 40. The top surface 40D extends in the running direction of the running vehicle 6 and forms the top surface of the rail main body 40.
給電線40Eは、走行車6の給電コア57に電力を供給すると共に、給電コア57と信号の送受信を行う部位である。給電線40Eは、一対の側面部40C,40Cのそれぞれに固定され、走行方向に沿って延在している。給電線40Eは、給電コア57に対して非接触の状態で電力を供給する。磁気プレート40Fは、走行車6のLDM(Linear DC Motor)59に走行又は停止のための磁力を発生させる。磁気プレート40Fは、天面部40Dに固定され、走行方向に沿って延在している。 The power feeder 40E supplies power to the power feeder core 57 of the traveling vehicle 6 and transmits and receives signals to and from the power feeder core 57. The power feeder 40E is fixed to each of the pair of side portions 40C, 40C and extends along the traveling direction. The power feeder 40E supplies power to the power feeder core 57 in a non-contact manner. The magnetic plate 40F generates a magnetic force in the LDM (Linear DC Motor) 59 of the traveling vehicle 6 to cause it to travel or stop. The magnetic plate 40F is fixed to the top surface portion 40D and extends along the traveling direction.
走行車6は、走行用軌道4を走行し、物品10を搬送する。走行車6が走行用軌道4を走行するとは、走行車6の走行ローラ51が走行用軌道4の下面部40Bを転動することをいう。走行車6は、物品10を移載可能に構成されている。走行車6は、天井走行式無人走行車である。走行車システム1が備える走行車6の台数は、特に限定されず、複数である。走行車6は、本体部7と、走行部50と、走行車コントローラ35と、を有する。本体部7は、本体フレーム22と、横送り部24と、θドライブ26と、昇降駆動部28と、昇降台30と、カバー33と、を有する。 The traveling vehicle 6 travels on the traveling track 4 and transports the article 10. The traveling vehicle 6 travels on the traveling track 4 when the traveling rollers 51 of the traveling vehicle 6 roll on the underside 40B of the traveling track 4. The traveling vehicle 6 is configured to be able to transfer the article 10. The traveling vehicle 6 is an overhead traveling unmanned traveling vehicle. The number of traveling vehicles 6 provided in the traveling vehicle system 1 is not particularly limited and may be multiple. The traveling vehicle 6 has a main body unit 7, a traveling unit 50, and a traveling vehicle controller 35. The main body unit 7 has a main body frame 22, a lateral feed unit 24, a θ drive 26, an elevation drive unit 28, an elevation platform 30, and a cover 33.
本体フレーム22は、走行部50と接続されており、横送り部24と、θドライブ26と、昇降駆動部28と、昇降台30と、カバー33とを支持する。横送り部24は、θドライブ26、昇降駆動部28及び昇降台30を一括して、走行用軌道4の走行方向と直角な方向に横送りする。θドライブ26は、昇降駆動部28及び昇降台30の少なくとも何れかを水平面内で所定の角度範囲内で回動させる。昇降駆動部28は、昇降台30をワイヤ、ロープ及びベルト等の吊持材の巻取り又は繰出しによって昇降させる。昇降台30には、チャックが設けられており、物品10の把持又は解放が自在とされている。カバー33は、例えば走行車6の走行方向の前後に一対設けられている。カバー33は、図示しない爪等を出没させて、搬送中に物品10が落下することを防止する。 The main frame 22 is connected to the travel unit 50 and supports the lateral feed unit 24, θ drive 26, lift drive unit 28, lift platform 30, and cover 33. The lateral feed unit 24 collectively transports the θ drive 26, lift drive unit 28, and lift platform 30 laterally in a direction perpendicular to the travel direction of the travel track 4. The θ drive 26 rotates at least one of the lift drive unit 28 and the lift platform 30 within a predetermined angular range in a horizontal plane. The lift drive unit 28 raises and lowers the lift platform 30 by winding or unwinding a suspending material such as a wire, rope, or belt. The lift platform 30 is provided with a chuck that can freely grip or release the article 10. A pair of covers 33 are provided, for example, at the front and rear of the travel direction of the travel vehicle 6. The cover 33 has protruding and retracting claws (not shown) to prevent the article 10 from falling during transport.
走行部50は、走行車6を走行用軌道4に沿って走行させる。走行部50は、図4に示されるように、第一走行部50Aと第二走行部50Bとを有しており、第一走行部50A及び第二走行部50Bは、互いに回動可能に連結されている。第一走行部50A及び第二走行部50Bのそれぞれは、図3に示されるように、走行ローラ51、サイドローラ52、分岐ローラ53、補助ローラ54、傾斜ローラ55、給電コア57及びLDM59を有している。図2では、分岐ローラ53、補助ローラ54、及び傾斜ローラ55の図示は省略する。 The running unit 50 causes the running vehicle 6 to run along the running track 4. As shown in FIG. 4, the running unit 50 has a first running unit 50A and a second running unit 50B, which are rotatably connected to each other. As shown in FIG. 3, each of the first running unit 50A and the second running unit 50B has a running roller 51, a side roller 52, a branch roller 53, an auxiliary roller 54, an inclined roller 55, a power supply core 57, and an LDM 59. The branch roller 53, the auxiliary roller 54, and the inclined roller 55 are not shown in FIG. 2.
走行ローラ51は、走行輪としての外輪51A及び走行補助輪としての内輪51Bからなるローラ対である。走行ローラ51は、走行部50の前後の左右両端に配置されている。走行ローラ51は、走行用軌道4の一対の下面部40B,40Bを転動する。 The running rollers 51 are a pair of rollers consisting of an outer wheel 51A as a running wheel and an inner wheel 51B as a running auxiliary wheel. The running rollers 51 are arranged at both the front and rear, left and right ends of the running section 50. The running rollers 51 roll on a pair of lower surface portions 40B, 40B of the running track 4.
サイドローラ52は、走行ローラ51の外輪51Aのそれぞれを前後方向に挟むように配置されている。サイドローラ52は、一対の上側サイドローラ52A,52A及び一対の下側サイドローラ52B,52Bの二組の一対のサイドローラ52,52を有している。一対の上側サイドローラ52A,52Aのそれぞれは、幅方向(左右方向)に対向して設けられ、鉛直軸を中心に回転する。一対の上側サイドローラ52A,52Aのそれぞれは、一対の側面部40C,40Cに接触(転動)可能に設けられている。一対の下側サイドローラ52B,52Bのそれぞれは、一対の上側サイドローラ52A,52Aと同様に、幅方向(左右方向)に対向して設けられ、鉛直軸を中心に回転する。一対の下側サイドローラ52B,52Bのそれぞれは、後段にて詳述する一対のガイド部材77のそれぞれに形成される一対のガイド面77A,77Aに接触(転動)可能に設けられている。 The side rollers 52 are arranged so as to sandwich each of the outer rings 51A of the running rollers 51 in the front-to-rear direction. The side rollers 52 have two pairs of side rollers 52, 52: a pair of upper side rollers 52A, 52A and a pair of lower side rollers 52B, 52B. Each of the pair of upper side rollers 52A, 52A is arranged opposite each other in the width direction (left-right direction) and rotates around a vertical axis. Each of the pair of upper side rollers 52A, 52A is arranged so as to be able to come into contact (roll) with a pair of side portions 40C, 40C. Each of the pair of lower side rollers 52B, 52B is arranged opposite each other in the width direction (left-right direction) like the pair of upper side rollers 52A, 52A and rotates around a vertical axis. Each of the pair of lower side rollers 52B, 52B is arranged to be able to come into contact with (roll over) a pair of guide surfaces 77A, 77A formed on each of a pair of guide members 77, which will be described in detail below.
分岐ローラ53は、走行用軌道4の分岐部において走行車6(走行部50)が直進走行する又は分岐走行するのを切り替えるために設けられる。分岐ローラ53は、図示しない切替機構によって、左右方向(幅方向)にシフト可能に設けられている。分岐ローラ53は、分岐部に設けられている分岐ガイドに選択的に接触(当接)させて、誘導されることによって、走行車6の走行方向を切り替える。分岐ローラ53は、第一走行部50A及び第二走行部50Bのそれぞれに対して四個設けられている(図4参照)。分岐ローラ53の位置を切り替えは、エリアコントローラ90の命令を受けた走行車コントローラ35によって制御される。 The branching rollers 53 are provided to switch the traveling vehicle 6 (traveling section 50) between straight-ahead traveling and branching traveling at the branching section of the traveling track 4. The branching rollers 53 are provided so that they can be shifted left and right (widthwise) by a switching mechanism (not shown). The branching rollers 53 selectively come into contact with (abut on) the branching guides provided at the branching section and are guided thereby, switching the traveling direction of the traveling vehicle 6. Four branching rollers 53 are provided for each of the first traveling section 50A and the second traveling section 50B (see Figure 4). The switching of the position of the branching rollers 53 is controlled by the traveling vehicle controller 35, which receives commands from the area controller 90.
ここで、例えば、図1に示されるA部分の走行用軌道4の分岐部又は合流部における、一対の上側サイドローラ52A,52A、一対の下側サイドローラ52B,52B及び分岐ローラ53の動作について説明する。 Here, we will explain the operation of the pair of upper side rollers 52A, 52A, the pair of lower side rollers 52B, 52B, and the branching roller 53 at the branching or merging section of the running track 4 in section A shown in Figure 1, for example.
図3及び図4に示されるように、第一本線部4Aを走行する走行車6は、一対の上側サイドローラ52A,52Aが第一本線部4Aを構成する一対の側面部40C,40Cの内面を転動している。走行車6は、分岐ガイド40Gが設けられた箇所に差しかかったとき、分岐ローラ53が図示しない切替機構によって左側にシフトされていると、分岐ガイド40Gによって分岐ローラ53が案内される状態となる。このため、走行車6は、第一本線部4Aから接続軌道4Dへと案内される。なお、走行車6を接続軌道4Dへと案内しない場合には、分岐ローラ53は、図示しない切替機構によって右側にシフトされた状態となる。この場合、分岐ローラ53は、接続軌道4D側の分岐ガイド40Gに案内されず、直進側の分岐ガイド40Hによって案内される。これにより、走行車6は、第一本線部4Aを走行し続けることになる。 As shown in Figures 3 and 4, the vehicle 6 traveling on the first main line portion 4A has a pair of upper side rollers 52A, 52A rolling on the inner surfaces of a pair of side surfaces 40C, 40C that make up the first main line portion 4A. When the vehicle 6 approaches a location where a branch guide 40G is provided, if the branch roller 53 has been shifted to the left by a switching mechanism (not shown), the branch roller 53 is guided by the branch guide 40G. As a result, the vehicle 6 is guided from the first main line portion 4A to the connecting track 4D. If the vehicle 6 is not guided to the connecting track 4D, the branch roller 53 is shifted to the right by a switching mechanism (not shown). In this case, the branch roller 53 is not guided by the branch guide 40G on the connecting track 4D side, but is guided by the branch guide 40H on the straight-ahead side. This allows the vehicle 6 to continue traveling on the first main line portion 4A.
接続軌道4Dには、分岐部に設けられる姿勢安定ガイド40Iと、合流部に設けられる姿勢安定ガイド40Jと、が設けられている。接続軌道4Dへ乗り移り、姿勢安定ガイド40Iが設けられた箇所に差しかかった走行車6は、左側の下側サイドローラ52Bが、姿勢安定ガイド40Iに案内される状態となる。このとき、左側の上側サイドローラ52Aは、接続軌道4Dを構成する左側の側面部40Cを転動する。下側サイドローラ52Bは、姿勢安定ガイド40Iに案内されることで、走行車6の姿勢を安定させることができる。 The connecting track 4D is provided with a posture stabilizing guide 40I at the branching point and a posture stabilizing guide 40J at the merging point. When a traveling vehicle 6 transfers to the connecting track 4D and approaches a point where a posture stabilizing guide 40I is provided, the left lower side roller 52B is guided by the posture stabilizing guide 40I. At this time, the left upper side roller 52A rolls on the left side surface 40C that constitutes the connecting track 4D. By being guided by the posture stabilizing guide 40I, the lower side roller 52B can stabilize the posture of the traveling vehicle 6.
姿勢安定ガイド40Jが設けられた箇所に差しかかった走行車6は、右側の下側サイドローラ52B(すなわち、それまで案内されていたローラとは逆サイドのローラ)が、姿勢安定ガイド40Jに案内される状態となる。このとき、右側の上側サイドローラ52Aは、接続軌道4Dを構成する右側の側面部40Cを転動する。下側サイドローラ52Bは、姿勢安定ガイド40Jに案内されることで、走行車6の姿勢を安定させることができる。なお、本実施形態では、姿勢安定ガイド40I及び姿勢安定ガイド40Jが設けられる区間は互いに重複していないが、姿勢安定ガイド40I及び姿勢安定ガイド40Jの両方が設けられる区間があってもよい。 When the traveling vehicle 6 approaches a location where posture stabilization guide 40J is provided, the right lower side roller 52B (i.e., the roller on the opposite side from the roller that was previously guiding it) is guided by posture stabilization guide 40J. At this time, the right upper side roller 52A rolls on the right side surface portion 40C that forms the connecting track 4D. By being guided by posture stabilization guide 40J, the lower side roller 52B can stabilize the posture of the traveling vehicle 6. Note that in this embodiment, the sections where posture stabilization guide 40I and posture stabilization guide 40J are provided do not overlap, but there may be sections where both posture stabilization guide 40I and posture stabilization guide 40J are provided.
姿勢安定ガイド40I及び姿勢安定ガイド40Jの各々によって下側サイドローラ52Bが案内される区間では、分岐ローラ53を案内する分岐ガイドが設けられていないため、分岐ローラ53は、シフト可能な状態となる。分岐ローラ53は、下側サイドローラ52Bが案内される区間において、図示しない切替機構によって右側にシフトされる。姿勢安定ガイド40Jが設けられた区間を抜け、分岐ガイド40Kが設けられた箇所に差しかかった走行車6では、分岐ローラ53が図示しない切替機構によって右側にシフトされているため、右側の分岐ローラ53が分岐ガイド40Kに案内される状態となる。よって、走行車6は、接続軌道4Dから第一本線部4Aへと乗り移ることになる。 In the section where the lower side roller 52B is guided by each of the posture stabilizing guides 40I and 40J, there is no branch guide to guide the branch roller 53, so the branch roller 53 is able to shift. In the section where the lower side roller 52B is guided, the branch roller 53 is shifted to the right by a switching mechanism (not shown). When the traveling vehicle 6 leaves the section where the posture stabilizing guide 40J is provided and approaches the location where the branch guide 40K is provided, the branch roller 53 has been shifted to the right by a switching mechanism (not shown), so the right-side branch roller 53 is guided by the branch guide 40K. Therefore, the traveling vehicle 6 transfers from the connecting track 4D to the first main line section 4A.
以上のように、一対の下側サイドローラ52B,52B及び分岐ローラ53を有する走行車6は、分岐ローラ53及び下側サイドローラ52Bがそれぞれ、分岐ガイド40G、姿勢安定ガイド40I、姿勢安定ガイド40J及び分岐ガイド40Kに案内されることで、第一本線部4Aから接続軌道4Dへの乗り移り及び接続軌道4Dから第一本線部4Aへの乗り移りを好適に実現できる。本実施形態では、分岐ガイド40G及び分岐ガイド40Kが設けられていない無ガイド区間において、また、一対の上側サイドローラ52A,52Aの少なくとも一方が接続軌道4Dを構成する一対の側面部40C,40Cの内面に接触しない区間において、下側サイドローラ52Bが姿勢安定ガイド40I及び姿勢安定ガイド40Jに案内された状態となる。従って、無ガイド区間においても、走行車6の姿勢を安定させることができる。 As described above, the traveling vehicle 6 having a pair of lower side rollers 52B, 52B and a branch roller 53 can easily transfer from the first main line portion 4A to the connecting track 4D and from the connecting track 4D to the first main line portion 4A by having the branch roller 53 and lower side roller 52B guided by the branch guide 40G, posture stabilizing guide 40I, posture stabilizing guide 40J, and branch guide 40K, respectively. In this embodiment, in guideless sections where branch guide 40G and branch guide 40K are not provided, and in sections where at least one of the pair of upper side rollers 52A, 52A does not contact the inner surfaces of the pair of side portions 40C, 40C that make up the connecting track 4D, the lower side roller 52B is guided by the posture stabilizing guide 40I and posture stabilizing guide 40J. Therefore, the posture of the traveling vehicle 6 can be stabilized even in guideless sections.
補助ローラ54は、走行部50の前後に設けられている、三つ一組のローラ群である。補助ローラ54は、走行部50が加減速等により走行中に前後に傾いたときに、LDM59及び給電コア57等が走行用軌道4の上面に配置された磁気プレート40Fに接触することを防止するために設けられている。傾斜ローラ55は、LDM59の四隅に設けられている。傾斜ローラ55は、前後方向から傾いた状態で配置されている。傾斜ローラ55は、走行部50がカーブ区間を走行する際の遠心力による傾きを防止するために設けられている。 The auxiliary rollers 54 are a group of three rollers provided at the front and rear of the running section 50. The auxiliary rollers 54 are provided to prevent the LDM 59, power supply core 57, etc. from coming into contact with the magnetic plate 40F arranged on the upper surface of the running track 4 when the running section 50 tilts forward or backward due to acceleration or deceleration while running. The inclined rollers 55 are provided at the four corners of the LDM 59. The inclined rollers 55 are arranged in a state tilted from the front to rear direction. The inclined rollers 55 are provided to prevent the running section 50 from tilting due to centrifugal force when running on curved sections.
給電コア57は、走行部50の前後に、左右方向にLDM59を挟むように配置されている。走行用軌道4に配置された給電線40Eとの間で非接触による給電と、非接触による各種信号の送受信を行う。給電コア57は走行車コントローラ35との間で信号をやりとりする。LDM59は、走行部50の前後に設けられている。LDM59は、電磁石によって走行用軌道4の上面に配置された磁気プレート40Fとの間で、走行又は停止のための磁力を発生させる。 The power supply cores 57 are arranged at the front and rear of the traveling section 50, sandwiching the LDM 59 in the left-right direction. They provide contactless power supply and send and receive various signals between them and the power supply line 40E arranged on the traveling track 4. The power supply core 57 exchanges signals with the traveling vehicle controller 35. The LDM 59 is located at the front and rear of the traveling section 50. The LDM 59 uses an electromagnet to generate magnetic force for traveling or stopping between it and the magnetic plate 40F arranged on the top surface of the traveling track 4.
図1に示されるように、載置部9は、走行用軌道4に沿って配置され、走行車6との間で物品10の受け渡し可能な位置に設けられている。載置部9には、バッファ及び受渡ポートが含まれる。バッファは、物品10が一時的に載置される載置部である。バッファは、例えば、目的とする受渡ポートに他の物品10が載置されている等の理由により、走行車6が搬送している物品10をその受渡ポートに移載できない場合に、物品10が仮置きされる載置部である。受渡ポートは、例えば洗浄装置、成膜装置、リソグラフィ装置、エッチング装置、熱処理装置、平坦化装置をはじめとする半導体の処理装置(図示せず)に対して物品10の受渡を行うための載置部である。なお、処理装置は、特に限定されず、種々の装置であってもよい。 As shown in FIG. 1, the placement section 9 is arranged along the traveling track 4 and is provided at a position where the article 10 can be handed over to and from the traveling vehicle 6. The placement section 9 includes a buffer and a delivery port. The buffer is a placement section where the article 10 is temporarily placed. The buffer is a placement section where the article 10 is temporarily placed when, for example, the article 10 being transported by the traveling vehicle 6 cannot be transferred to the intended delivery port because another article 10 is placed at that port. The delivery port is a placement section where the article 10 is handed over to and from semiconductor processing equipment (not shown), such as a cleaning equipment, film formation equipment, lithography equipment, etching equipment, heat treatment equipment, or planarization equipment. The processing equipment is not particularly limited and may be a variety of devices.
例えば、載置部9は、走行用軌道4の側方に配置されている。この場合、走行車6は、横送り部24で昇降駆動部28等を横送りし、昇降台30を僅かに昇降させることにより、載置部9との間で物品10を受け渡しする。なお、図示はしないが載置部9は、走行用軌道4の直下に配置されてもよい。この場合、走行車6は、昇降台30を昇降させることにより、載置部9との間で物品10を受け渡しする。 For example, the placement unit 9 is arranged to the side of the running track 4. In this case, the running vehicle 6 transfers the article 10 to and from the placement unit 9 by using the lateral feed unit 24 to laterally feed the lifting drive unit 28 and the like, and slightly raising and lowering the lifting platform 30. Although not shown, the placement unit 9 may also be arranged directly below the running track 4. In this case, the running vehicle 6 transfers the article 10 to and from the placement unit 9 by raising and lowering the lifting platform 30.
走行車コントローラ35は、CPU(Central Processing Unit)、ROM(Read Only Memory)及びRAM(Random Access Memory)等からなる電子制御ユニットである。走行車コントローラ35は、走行車6における各種動作を制御する。具体的には、走行車コントローラ35は、走行部50と、横送り部24と、θドライブ26と、昇降駆動部28と、昇降台30と、を制御する。走行車コントローラ35は、例えばROMに格納されているプログラムがRAM上にロードされてCPUで実行されるソフトウェアとして構成することができる。走行車コントローラ35は、電子回路等によるハードウェアとして構成されてもよい。走行車コントローラ35は、走行用軌道4に設けられるフィーダー線等の給電線40Eを利用して、エリアコントローラ90と通信を行う。 The traveling vehicle controller 35 is an electronic control unit consisting of a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc. The traveling vehicle controller 35 controls various operations of the traveling vehicle 6. Specifically, the traveling vehicle controller 35 controls the traveling unit 50, the lateral feed unit 24, the θ drive 26, the lifting drive unit 28, and the lifting platform 30. The traveling vehicle controller 35 can be configured as software in which a program stored in ROM is loaded onto RAM and executed by the CPU, for example. The traveling vehicle controller 35 may also be configured as hardware such as electronic circuits. The traveling vehicle controller 35 communicates with the area controller 90 using a power supply line 40E, such as a feeder line, provided on the traveling track 4.
エリアコントローラ90は、CPU、ROM及びRAM等からなる電子制御ユニットである。エリアコントローラ90は、例えばROMに格納されているプログラムがRAM上にロードされてCPUで実行されるソフトウェアとして構成することができる。エリアコントローラ90は、電子回路等によるハードウェアとして構成されてもよい。エリアコントローラ90は、走行車6に物品10を搬送させる搬送指令を送信する。エリアコントローラ90は、建屋2A,2Bごとの走行用軌道4の敷設エリアごとに設けられてもよい。 The area controller 90 is an electronic control unit consisting of a CPU, ROM, RAM, etc. The area controller 90 can be configured as software, for example, in which a program stored in ROM is loaded into RAM and executed by the CPU. The area controller 90 may also be configured as hardware such as electronic circuits. The area controller 90 sends transport commands to the traveling vehicles 6 to transport the items 10. An area controller 90 may be provided for each area in which the traveling track 4 is laid for each building 2A, 2B.
建屋2Aと建屋2Bとを接続する連絡部4Cには、連結軌道60が配置される。本実施形態では、連結軌道60は、建屋2Aに配置されている。図5(A)及び図5(B)に示されるように、連結軌道60は、複数のセグメント部材61を備えている。連結軌道60は、隣接するセグメント部材61,61間の側面が隙間Gをあけた状態で連結されることによって構成されている。連結軌道60では、隣接するセグメント部材61,61同士は、水平方向において互いに回動可能に構成されている。このような構成により、連結軌道60は、平面視において、その延在方向(走行車6の走行方向)に直線状となるように変形させたり(図5(A)、図7参照)、湾曲状となるように変形させたり(図5(B)、図8参照)することが可能となる。以下、連結軌道60の構成について詳細に説明する。 A connecting track 60 is disposed in the connecting section 4C connecting building 2A and building 2B. In this embodiment, the connecting track 60 is disposed in building 2A. As shown in Figures 5(A) and 5(B), the connecting track 60 includes a plurality of segments 61. The connecting track 60 is configured by connecting adjacent segments 61, 61 with a gap G between their side surfaces. In the connecting track 60, adjacent segments 61, 61 are configured to be rotatable relative to each other in the horizontal direction. This configuration allows the connecting track 60 to be deformed so that it becomes linear in its extension direction (the traveling direction of the traveling vehicle 6) in a plan view (see Figures 5(A) and 7) or curved (see Figures 5(B) and 8). The configuration of the connecting track 60 is described in detail below.
図6(A)、図7及び図8に示されるように、複数のセグメント部材61のそれぞれは、支持部63と、回動部65と、連結部67と、走行空間形成部70と、を備える。複数のセグメント部材61のそれぞれは、左右対称形に形成されている。 As shown in Figures 6(A), 7, and 8, each of the multiple segments 61 includes a support portion 63, a pivot portion 65, a connecting portion 67, and a travel space forming portion 70. Each of the multiple segments 61 is formed symmetrically.
支持部63は、回動部65、連結部67及び走行空間形成部70を支持する。支持部63は、平板状の部材である。支持部63の下面には、幅方向(左右方向)における両端において、一対の取付部63A,63Aを介して走行空間形成部70が取り付けられている。支持部63の下面において、左右方向における取付部63A,63Aの間には、回動部65が取り付けられている。なお、複数のセグメント部材61の中の一つは、支持部63が、建屋2Aの天井から連結軌道60を吊り下げる吊り下げ部材によって固定されている。言い換えれば、複数のセグメント部材61の中の残りについては、支持部63が、建屋2Aの天井に固定されていない。本実施形態では、複数のセグメント部材61のうち、走行方向における最上流(最後方)側のセグメント部材61のみが建屋2Aの天井に固定されている。 The support portion 63 supports the rotating portion 65, the connecting portion 67, and the running space forming portion 70. The support portion 63 is a flat member. The running space forming portion 70 is attached to the underside of the support portion 63 via a pair of mounting portions 63A, 63A at both ends in the width direction (left-right direction). The rotating portion 65 is attached to the underside of the support portion 63, between the mounting portions 63A, 63A in the left-right direction. Note that the support portion 63 of one of the multiple segments 61 is fixed by a hanging member that suspends the connecting track 60 from the ceiling of the building 2A. In other words, the support portions 63 of the remaining multiple segments 61 are not fixed to the ceiling of the building 2A. In this embodiment, of the multiple segments 61, only the segment 61 furthest upstream (rearmost) in the running direction is fixed to the ceiling of the building 2A.
回動部65は、支持部63の下面に固定されると共に連結部67の上面に固定される。回動部65は、支持部63に対して連結部67を回動させる部材である。回動部65は、鉛直方向に延在する回動軸を中心に連結部67を回動させる。回動部65は、例えば、外輪部65Aと、内輪部65Bと、外輪部65Aと内輪部65Bとの間に設けられる転動部65Cと、を含んで構成されている。外輪部65Aは、支持部63に固定されている。内輪部65Bは、連結部67に固定されている。外輪部65A及び内輪部65Bは、鉛直方向に延在する同一の回動軸を中心に、相対回転可能に設けられる。 The rotating portion 65 is fixed to the underside of the support portion 63 and to the upper surface of the connecting portion 67. The rotating portion 65 is a member that rotates the connecting portion 67 relative to the support portion 63. The rotating portion 65 rotates the connecting portion 67 around a rotation axis that extends vertically. The rotating portion 65 is configured to include, for example, an outer ring portion 65A, an inner ring portion 65B, and a rolling portion 65C that is provided between the outer ring portion 65A and the inner ring portion 65B. The outer ring portion 65A is fixed to the support portion 63. The inner ring portion 65B is fixed to the connecting portion 67. The outer ring portion 65A and the inner ring portion 65B are arranged to be able to rotate relatively around the same rotation axis that extends vertically.
連結部67は、隣接するセグメント部材61,61同士を接続する部材である。連結部67における走行方向における一端は、回動部65に固定されている。より詳細には、連結部67における走行方向における一端には、円筒状の取付部67Aが形成されており、内輪部65Bに内挿された状態で回動部65に固定されている。連結部67における走行方向における他端は、隣接するセグメント部材61の支持部63の下面に固定されている。より詳細には、連結部67における走行方向における他端は、中間部材67Bを介して、支持部63の下面に固定されている。 The connecting portion 67 is a member that connects adjacent segments 61, 61. One end of the connecting portion 67 in the running direction is fixed to the rotating portion 65. More specifically, a cylindrical mounting portion 67A is formed at one end of the connecting portion 67 in the running direction, and is fixed to the rotating portion 65 while inserted into the inner ring portion 65B. The other end of the connecting portion 67 in the running direction is fixed to the underside of the support portion 63 of the adjacent segment 61. More specifically, the other end of the connecting portion 67 in the running direction is fixed to the underside of the support portion 63 via an intermediate member 67B.
このような支持部63、回動部65及び連結部67の構成によって、図8及び図9に示されるように、隣接する回動部65,65同士、すなわち、隣接する走行空間形成部70,70が互いに回動可能となる。走行空間形成部70は、走行車6の走行部50が走行する走行空間DAを形成する。走行空間形成部70は、天面部71と、一対の側面部73,73と、一対の下面部75,75と、を有している。 With this configuration of the support portion 63, rotating portion 65, and connecting portion 67, adjacent rotating portions 65, 65, i.e., adjacent running space forming portions 70, 70, can rotate relative to each other, as shown in Figures 8 and 9. The running space forming portion 70 forms the running space DA in which the running portion 50 of the running vehicle 6 runs. The running space forming portion 70 has a top surface portion 71, a pair of side surfaces 73, 73, and a pair of bottom surfaces 75, 75.
天面部71は、走行空間DAの上面を形成する。天面部71は、走行用軌道4の天面部40Dに相当する。図6(A)及び図7等では図示されていないが、天面部71には、磁気プレートが取り付けられている。天面部71における走行方向における一方の端部は、平面視において凸円弧状に形成され、天面部71における走行方向における他方の端部は、平面視において一方の端部に嵌合する凹円弧状に形成されている。 The top surface 71 forms the upper surface of the running space DA. The top surface 71 corresponds to the top surface 40D of the running track 4. Although not shown in Figures 6(A) and 7, a magnetic plate is attached to the top surface 71. One end of the top surface 71 in the running direction is formed in a convex arc shape in plan view, and the other end of the top surface 71 in the running direction is formed in a concave arc shape that fits into the one end in plan view.
一対の側面部73,73は、走行空間DAの一対の側面部分を形成する。一対の側面部73,73は、走行用軌道4における一対の側面部40C,40Cに相当する。一対の側面部73,73のそれぞれは、幅方向における外側から一対の上側サイドローラ52A,52Aのそれぞれに接触する側面73A,73Aを有する。図6(A)及び図9等では図示されていないが、一対の側面部73,73の内側面のそれぞれには、給電線が取り付けられている。一対の側面部73,73のそれぞれは、平面視において円弧状に形成されている。 The pair of side surfaces 73, 73 form a pair of side surfaces of the running space DA. The pair of side surfaces 73, 73 correspond to the pair of side surfaces 40C, 40C of the running track 4. Each of the pair of side surfaces 73, 73 has a side surface 73A, 73A that contacts each of the pair of upper side rollers 52A, 52A from the outside in the width direction. Although not shown in Figures 6(A) and 9, etc., a power supply line is attached to each of the inner surfaces of the pair of side surfaces 73, 73. Each of the pair of side surfaces 73, 73 is formed in an arc shape when viewed in a plane.
一対の下面部75,75は、走行空間DAの一対の下面部分を形成する。一対の下面部75,75は、走行用軌道4における一対の下面部40B,40Bに相当する。一対の下面部75,75のそれぞれは、走行車6の走行ローラ51(外輪51A及び内輪51B)が転動する転動面75A,75Aを有する。下面部75における走行方向における一方の端部は、平面視において凸円弧状に形成され、下面部75における走行方向における他方の端部は、平面視において一方の端部に嵌合する凹円弧状に形成されている。 The pair of underside portions 75, 75 form a pair of underside portions of the traveling space DA. The pair of underside portions 75, 75 correspond to the pair of underside portions 40B, 40B of the traveling track 4. Each of the pair of underside portions 75, 75 has a rolling surface 75A, 75A on which the traveling rollers 51 (outer ring 51A and inner ring 51B) of the traveling vehicle 6 roll. One end of the underside portion 75 in the traveling direction is formed in a convex arc shape in plan view, and the other end of the underside portion 75 in the traveling direction is formed in a concave arc shape that fits into the one end in plan view.
一対の下面部75,75のそれぞれには、ガイド部材77,77が設けられている。ガイド部材77,77のそれぞれには、幅方向における内側から一対の下側サイドローラ52B,52Bのそれぞれに接触するガイド面77A,77Aが形成されている。ガイド部材77は、下面部75に対して一体的に形成されてもよいし、別体の部材として取り付けられてもよい。一対の側面73A,73A及び一対のガイド面77A,77Aは、隣接するセグメント部材61,61の一方の一対のガイド面77A,77Aと、隣接するセグメント部材61,61の他方の一対の側面73A,73Aとが、幅方向において互いに対向するように配置されている。 A guide member 77 is provided on each of the pair of lower surface portions 75. Each of the guide members 77 is formed with a guide surface 77A that contacts the pair of lower side rollers 52B from the inside in the width direction. The guide member 77 may be formed integrally with the lower surface portion 75, or may be attached as a separate member. The pair of side surfaces 73A and the pair of guide surfaces 77A are arranged so that one pair of guide surfaces 77A of adjacent segments 61 and the other pair of side surfaces 73A of adjacent segments 61 face each other in the width direction.
ガイド部材77のガイド面77Aは、側面部73の側面73Aから下側サイドローラ52Bの直径より離れた位置に配置されている。側面部73の側面73Aは、ガイド部材77のガイド面77Aに接触する方向に下側サイドローラ52Bを案内するように形成されている。 The guide surface 77A of the guide member 77 is positioned at a distance from the side surface 73A of the side portion 73 that is greater than the diameter of the lower side roller 52B. The side surface 73A of the side portion 73 is formed to guide the lower side roller 52B in a direction that brings it into contact with the guide surface 77A of the guide member 77.
以下、連結軌道60を走行する走行車6の動作の一例、より詳細には、走行車6の上側サイドローラ52A及び下側サイドローラ52Bの動作を説明する。ここでは、図10(A)、図10(B)、図11(A)、図11(B)、図12(A)及び図12(B)に示されるように、連結軌道60を右から左に向かって走行する走行車6を例に挙げて説明する。 Below, an example of the operation of the traveling vehicle 6 traveling on the connecting track 60, more specifically, the operation of the upper side roller 52A and lower side roller 52B of the traveling vehicle 6, will be explained. Here, an example of a traveling vehicle 6 traveling from right to left on the connecting track 60, as shown in Figures 10(A), 10(B), 11(A), 11(B), 12(A), and 12(B), will be explained.
連結軌道60に進入した走行車6は、一対の上側サイドローラ52Aの一方が側面部73の側面73Aを接触(転動)しながら進行する。走行車6が、最初のセグメント部材61の前方に到達すると、図10(A)に示されるように、走行方向の前方側の一対の上側サイドローラ52A,52Aが、側面部73の側面73Aの端部によって幅方向における内側に案内され、走行方向の後方側の一対の下側サイドローラ52B,52Bが、ガイド部材77のガイド面77Aによって案内されるようになる。 When the traveling vehicle 6 enters the connecting track 60, one of the pair of upper side rollers 52A contacts (rolls against) the side surface 73A of the side surface portion 73 as it moves forward. When the traveling vehicle 6 reaches the front of the first segment 61, as shown in FIG. 10(A), the pair of upper side rollers 52A, 52A on the front side in the traveling direction are guided inward in the width direction by the end of the side surface 73A of the side surface portion 73, and the pair of lower side rollers 52B, 52B on the rear side in the traveling direction are guided by the guide surface 77A of the guide member 77.
そして、走行車6が二番目のセグメント部材61に進入すると、図10(B)に示されるように、前方側の一対の上側サイドローラ52A,52Aの一方が、再び、側面部73の側面73Aを接触(転動)しながら進行するようになる。一方、後方側の一対の上側サイドローラ52A,52Aも、前方側の一対の上側サイドローラ52A,52Aと同様に、側面部73の側面73Aの端部によって幅方向における内側に案内され、後方側の一対の下側サイドローラ52B,52Bが、ガイド部材77のガイド面77Aによって案内されるようになる。 When the traveling vehicle 6 then enters the second segment 61, as shown in Figure 10 (B), one of the pair of upper side rollers 52A, 52A on the front side again moves forward while making contact (rolling) with the side surface 73A of the side portion 73. Meanwhile, the pair of upper side rollers 52A, 52A on the rear side, like the pair of upper side rollers 52A, 52A on the front side, is guided inward in the width direction by the end of the side surface 73A of the side portion 73, and the pair of lower side rollers 52B, 52B on the rear side are guided by the guide surface 77A of the guide member 77.
更に、走行車6が二番目のセグメント部材61を進行すると、図11(A)に示されるように、前方側の一対の上側サイドローラ52A,52Aの一方が、側面部73の側面73Aの端部によって幅方向における内側に案内され、図11(B)に示されるように、前方側の一対の下側サイドローラ52B,52Bが、ガイド部材77のガイド面77Aによって案内されるようになる。このとき、後方側の一対の上側サイドローラ52A,52Aの一方は、図12(A)に示されるように、フリーの状態(側面部73の側面73Aに接触しない)を経て、再び、側面部73の側面73Aに案内されるようになる。 Furthermore, as the traveling vehicle 6 travels along the second segment 61, as shown in FIG. 11(A), one of the pair of upper side rollers 52A, 52A on the front side is guided inward in the width direction by the end of the side surface 73A of the side portion 73, and as shown in FIG. 11(B), the pair of lower side rollers 52B, 52B on the front side is guided by the guide surface 77A of the guide member 77. At this time, one of the pair of upper side rollers 52A, 52A on the rear side goes through a free state (not contacting the side surface 73A of the side portion 73) and is again guided by the side surface 73A of the side portion 73, as shown in FIG. 12(A).
更に、走行車6が二番目のセグメント部材61から三番目のセグメント部材61に進行すると、図12(B)に示されるように、前方側の一対の上側サイドローラ52A,52Aの一方が、再び、側面部73の側面73Aによって走行方向に案内されるようになる。同様に、後方側の一対の上側サイドローラ52A,52Aの一方が、側面部73の側面73Aの端部によって幅方向における内側に案内され、後方側の一対の下側サイドローラ52B,52Bが、ガイド部材77のガイド面77Aによって案内されるようになる。 Furthermore, as the traveling vehicle 6 moves from the second segment 61 to the third segment 61, as shown in FIG. 12(B), one of the pair of upper side rollers 52A, 52A on the front side is again guided in the traveling direction by the side surface 73A of the side surface portion 73. Similarly, one of the pair of upper side rollers 52A, 52A on the rear side is guided inward in the width direction by the end of the side surface 73A of the side surface portion 73, and the pair of lower side rollers 52B, 52B on the rear side is guided by the guide surface 77A of the guide member 77.
以上に説明したように、走行車6は、一対の上側サイドローラ52A,52Aが、側面部73の側面73Aに沿って案内される態様と、一対の下側サイドローラ52B,52Bが、ガイド部材77のガイド面77Aに沿って案内される態様とを交互に繰り返しながら連結軌道60を走行する。 As described above, the traveling vehicle 6 travels along the connecting track 60 while alternately repeating a pattern in which the pair of upper side rollers 52A, 52A are guided along the side surface 73A of the side surface portion 73 and a pattern in which the pair of lower side rollers 52B, 52B are guided along the guide surface 77A of the guide member 77.
上記実施形態の連結軌道60における作用効果について説明する。上記実施形態の連結軌道60では、セグメント部材61の連結方向において互いに隣接するセグメント部材61が隙間Gをあけた状態で連結されている場合であっても、サイドローラ52(上側サイドローラ52A及び下側サイドローラ52B)は、側面73A及びガイド面77Aの少なくとも一方によって案内される。これにより、セグメント部材61の連結方向において、サイドローラ52が案内されない区間がなくなるので、走行車6を安定して走行させることができる。 The effects of the connecting track 60 of the above embodiment will now be described. In the connecting track 60 of the above embodiment, even when adjacent segments 61 are connected with a gap G in the connecting direction of the segments 61, the side rollers 52 (upper side rollers 52A and lower side rollers 52B) are guided by at least one of the side surface 73A and the guide surface 77A. As a result, there are no sections in the connecting direction of the segments 61 where the side rollers 52 are not guided, allowing the traveling vehicle 6 to travel stably.
上記実施形態の連結軌道60では、側面73Aは、幅方向における外側から一対の上側サイドローラ52A,52Aのそれぞれに接触する一対の側面73A,73Aであり、ガイド面77Aは、幅方向における内側から一対の下側サイドローラ52B,52Bのそれぞれに接触する一対のガイド面77A,77Aであり、一対の側面73A,73A及び一対の77A,77Aは、隣接するセグメント部材61の一方の一対のガイド面77A,77Aと、隣接するセグメント部材61の他方の一対の側面73A,73Aとが、幅方向において互いに対向するように配置されている。これにより、上側サイドローラ52A,52A及び下側サイドローラ52B,52Bの少なくとも一方が案内されない区間がなくなるので、走行車6を安定して走行させることができる。 In the connecting track 60 of the above embodiment, the side surfaces 73A are a pair of side surfaces 73A that contact the pair of upper side rollers 52A from the outside in the width direction, and the guide surfaces 77A are a pair of guide surfaces 77A that contact the pair of lower side rollers 52B from the inside in the width direction, and the pair of side surfaces 73A and the pair of 77A are arranged so that the pair of guide surfaces 77A of one adjacent segment 61 and the pair of side surfaces 73A of the other adjacent segment 61 face each other in the width direction. This eliminates any section where at least one of the upper side rollers 52A and the lower side rollers 52B is not guided, allowing the traveling vehicle 6 to travel stably.
上記実施形態の連結軌道60では、複数のセグメント部材61のそれぞれは、左右対称形に形成されている。これにより、セグメント部材61を形成することが容易となる。 In the connecting track 60 of the above embodiment, each of the multiple segments 61 is formed symmetrically. This makes it easy to form the segments 61.
上記実施形態の連結軌道60では、ガイド面77A,77Aは、側面73A,73Aから下側サイドローラ52Bの直径より離れた位置に配置されている。これにより、下側サイドローラ52Bが側面73Aとガイド面77Aとの両方に接触することがなくなるので、下側サイドローラ52Bへのダメージを低減できる。 In the connecting track 60 of the above embodiment, the guide surfaces 77A, 77A are positioned away from the side surfaces 73A, 73A at a distance greater than the diameter of the lower side roller 52B. This prevents the lower side roller 52B from coming into contact with both the side surface 73A and the guide surface 77A, thereby reducing damage to the lower side roller 52B.
上記実施形態の連結軌道60では、隣接するセグメント部材61同士は、水平方向において互いに回動可能に構成されている。これにより、セグメント部材61の連結方向に沿って、例えば図5(B)に示されるように、左方又は右方に向かって湾曲させることが可能となる。この結果、建屋2の揺れ等で走行用軌道4に水平方向のズレが生じたとしても、隣接するセグメント部材61,61同士がそれぞれ回動することで当該ズレを吸収できる。そして、当該ズレが生じた場合であっても、走行車6を安定して走行させることができる。 In the connecting track 60 of the above embodiment, adjacent segments 61 are configured to be rotatable relative to each other in the horizontal direction. This allows the segments 61 to be curved to the left or right, for example, as shown in Figure 5(B), along the connecting direction. As a result, even if horizontal misalignment occurs in the running track 4 due to shaking of the building 2, the adjacent segments 61, 61 can rotate relative to each other to absorb the misalignment. Even if such misalignment occurs, the running vehicle 6 can travel stably.
上記実施形態の連結軌道60では、セグメント部材61(天面部71及び一対の下面部75,75)における走行方向における一方の端部は、平面視において凸円弧状に形成され、他方の端部は、平面視において一方の端部に嵌合する凹円弧状に形成されている。この構成では、隣接するセグメント部材61,61同士で回動したときに、隣接するセグメント部材61,61間に生じる隙間Gが小さくなる。 In the connecting track 60 of the above embodiment, one end of each segment 61 (top surface portion 71 and a pair of bottom surface portions 75, 75) in the running direction is formed as a convex arc in plan view, and the other end is formed as a concave arc that fits into the one end in plan view. With this configuration, when adjacent segments 61, 61 rotate relative to each other, the gap G that occurs between the adjacent segments 61, 61 is reduced.
連結軌道60が、図5(A)に示される状態から図5(B)に示される状態まで変形が可能である場合、例えば、図5(A)に示される状態と図5(B)に示される状態との間の状態で連結軌道60を連絡部4Cに配置してもよい。この場合には、建屋2A及び建屋2BがX方向及びY方向に互いにずれた場合であっても、そのずれに追随することが可能となる。すなわち、連結軌道60の延在方向における一端と他端とが、X方向に互いにずれた場合であっても、湾曲のレベルを変更することによってX方向に伸縮又は延伸するような変形によって追随が可能となり、Y方向に互いにずれた場合であっても、Y方向を斜めに延在するような変形によって追随が可能となる。 If the connecting track 60 is capable of deforming from the state shown in FIG. 5(A) to the state shown in FIG. 5(B), the connecting track 60 may be positioned in the connecting section 4C in a state between the state shown in FIG. 5(A) and the state shown in FIG. 5(B). In this case, even if the buildings 2A and 2B are misaligned in the X and Y directions, it will be possible to follow the misalignment. In other words, even if one end and the other end of the connecting track 60 in its extension direction are misaligned in the X direction, it will be possible to follow the misalignment by changing the level of curvature to expand or contract in the X direction, and even if they are misaligned in the Y direction, it will be possible to follow the misalignment by deforming so as to extend diagonally in the Y direction.
上記実施形態の連結軌道60では、側面73Aは、ガイド面77Aに接触する方向に下側サイドローラ52Bを案内するように形成されている。この構成では、下側サイドローラ52Bが案内される部分が側面73Aはからガイド面77Aに切り替わる際に、ガイド面77Aへの案内がスムーズとなる。これにより、走行車6をより安定して走行させることができる。 In the connecting track 60 of the above embodiment, the side surface 73A is formed to guide the lower side roller 52B in the direction of contact with the guide surface 77A. With this configuration, when the portion of the lower side roller 52B that is guided switches from the side surface 73A to the guide surface 77A, the lower side roller 52B is smoothly guided onto the guide surface 77A. This allows the traveling vehicle 6 to travel more stably.
上記実施形態の走行車システム1では、上側サイドローラ52Aは、側面73Aと接触し、下側サイドローラ52Bは、ガイド面77Aと接触している。これにより、ガイド面77Aの高さを上側サイドローラ52Aの配置位置よりも低くできるので、走行車6が走行する走行空間DAのスペースを大きくできる。 In the traveling vehicle system 1 of the above embodiment, the upper side roller 52A contacts the side surface 73A, and the lower side roller 52B contacts the guide surface 77A. This allows the height of the guide surface 77A to be lower than the position where the upper side roller 52A is positioned, thereby increasing the space of the traveling space DA in which the traveling vehicle 6 travels.
以上、一実施形態について説明したが、本発明の一側面は、上記実施形態に限られない。発明の趣旨を逸脱しない範囲で種々の変更が可能である。 Although one embodiment has been described above, aspects of the present invention are not limited to the above embodiment. Various modifications are possible without departing from the spirit of the invention.
(変形例1)
上記実施形態の連結軌道60は、複数のセグメント部材61の一つが建屋2の天井等に固定され、残りのセグメント部材61は、天井等には直接固定されず、固定されたセグメント部材61に対して回動可能に連結されている例を挙げて説明したが、これに限定されない。例えば、上記の残りのセグメント部材61の一つ又は複数は、建屋2の天井等に対してX方向及びY方向の少なくとも一方にスライド可能なステージを介して固定されていてもよい。更に、上記の残りのセグメント部材61の一つ又は複数は、X方向及びY方向に加えて、回動可能なステージを介して固定されていてもよい。
(Variation 1)
The connecting track 60 in the above embodiment has been described with an example in which one of the plurality of segments 61 is fixed to the ceiling or the like of the building 2, and the remaining segments 61 are not directly fixed to the ceiling or the like but are connected to the fixed segment 61 so as to be rotatable. However, this is not limiting. For example, one or more of the remaining segments 61 may be fixed via a stage that is slidable in at least one of the X and Y directions relative to the ceiling or the like of the building 2. Furthermore, one or more of the remaining segments 61 may be fixed via a stage that is rotatable in addition to the X and Y directions.
(変形例2)
上記実施形態のセグメント部材61の回動部65に代えて、連結方向にスライド可能なスライド部を設けてもよい。この構成では、互いに隣り合うセグメント部材61同士の距離を変更することができる。また、上記の残りのセグメント部材61の一つ又は複数が、建屋2の天井等に対してX方向にスライド可能なステージを介して固定される場合、互いに隣り合うセグメント部材61同士は相対的に回動可能に設けられなくてもよい。すなわち、セグメント部材61から回動部65が取り除かれてもよい。
(Variation 2)
Instead of the rotating portion 65 of the segment 61 in the above embodiment, a sliding portion that is slidable in the connecting direction may be provided. In this configuration, the distance between adjacent segments 61 can be changed. Furthermore, when one or more of the remaining segments 61 are fixed to the ceiling of the building 2 or the like via a stage that is slidable in the X direction, the adjacent segments 61 do not need to be rotatable relative to each other. In other words, the rotating portion 65 may be removed from the segment 61.
これらの変形例2に係る構成の場合、セグメント部材61(天面部71及び一対の下面部75,75)における走行方向における一方の端部は、平面視において凸円弧状に形成され、他方の端部は、平面視において一方の端部に嵌合する凹円弧状に形成されなくてもよい。例えば、一方の端部が他方の端部と嵌合可能な形状、言い換えれば、走行車6の走行方向において互いに重複する部分があれば、どのような形状であってもよい。 In the configuration according to Variation 2, one end of the segment 61 (top surface portion 71 and the pair of bottom surface portions 75, 75) in the running direction is formed in a convex arc shape in a plan view, and the other end does not have to be formed in a concave arc shape that fits into the one end in a plan view. For example, any shape is acceptable as long as one end has a shape that allows it to fit into the other end, in other words, as long as there is a portion that overlaps with the other in the running direction of the running vehicle 6.
(変形例3)
上記実施形態及び変形例では、連結軌道60両端が走行用軌道4,4に連結されている例を挙げて説明したが、これに限定されない。例えば、特開2019-186428号公報において、実施形態として記載されている第一接続部材(50)又は第二接続部材(60)部分に上記実施形態及び変形例の連結軌道60を適用してもよい。
(Variation 3)
In the above embodiment and modified examples, an example in which both ends of the connecting track 60 are connected to the running tracks 4, 4 has been described, but the present invention is not limited to this. For example, the connecting track 60 of the above embodiment and modified examples may be applied to the first connecting member (50) or the second connecting member (60) described as an embodiment in JP 2019-186428 A.
(変形例4)
上記実施形態及び上記変形例では、一対の上側サイドローラ52A,52A及び一対の下側サイドローラ52B,52Bの両方が、サイドローラとして設けられている走行車6が走行する場合の連結軌道60について説明したが、これに限定されない。例えば、一対のサイドローラ52,52のみが配置された走行車6が走行する場合も、当該サイドローラ52,52に接触するようなガイド面77Aを有するガイド部材77を設ければよい。
(Variation 4)
In the above embodiment and modified example, the connecting track 60 has been described for the case where the traveling vehicle 6 runs on which both the pair of upper side rollers 52A, 52A and the pair of lower side rollers 52B, 52B are provided as side rollers, but the present invention is not limited to this. For example, even in the case where the traveling vehicle 6 runs on which only the pair of side rollers 52, 52 are provided, it is sufficient to provide a guide member 77 having a guide surface 77A that comes into contact with the side rollers 52, 52.
(その他の変形例)
上記実施形態及び上記変形例では、連結軌道60は、建屋2Aに配置されている例を挙げて説明したが、建屋2Bに配置されてもよいし、建屋2Aと建屋2Bとに跨がった位置に配置されてもよい。また、建屋2Aと建屋2Bとの間に棟間建物がある場合には、建屋2Aと棟間建物との間に連結軌道60が配置される。当該連結軌道60は、建屋2Aに配置されてもよいし、棟間建物に配置されてもよいし、建屋2Aと棟間建物とに跨がって配置されてもよい。同様に、建屋2Bと棟間建物との間に連結軌道60が配置される。当該連結軌道60は、建屋2Bに配置されてもよいし、棟間建物に配置されてもよいし、建屋2Bと棟間建物とに跨がって配置されてもよい。
(Other Modifications)
In the above embodiment and modified example, the connecting track 60 is disposed in building 2A, but it may be disposed in building 2B, or may be disposed at a position straddling buildings 2A and 2B. Furthermore, if there is an inter-building building between buildings 2A and 2B, the connecting track 60 is disposed between building 2A and the inter-building building. The connecting track 60 may be disposed in building 2A, in the inter-building building, or straddling building 2A and the inter-building building. Similarly, the connecting track 60 is disposed between building 2B and the inter-building building. The connecting track 60 may be disposed in building 2B, in the inter-building building, or straddling building 2B and the inter-building building.
上記実施形態及び上記変形例では、連絡部4Cに連結軌道60が配置される例を挙げて説明したが、第一本線部4A又は第二本線部4B等に配置されてもよい。第一本線部4A又は第二本線部4Bにおいてカーブ区間は、規格化された曲率を有する走行用軌道4によって構成されている。このため、走行用軌道4を規格化された曲率以外の線形にすることは、走行用軌道4を特注する等して対応する必要があるところ、この部分に上記実施形態及び変形例に係る連結軌道60を適用すれば、容易に走行用軌道4を規格化された曲率以外の線形にすることができる。 In the above embodiment and modified example, an example was given in which the connecting track 60 is arranged in the connecting section 4C, but it may also be arranged in the first main line section 4A or the second main line section 4B, etc. The curved section in the first main line section 4A or the second main line section 4B is composed of a running track 4 with a standardized curvature. For this reason, giving the running track 4 a shape other than the standardized curvature requires, for example, custom-making the running track 4. However, by applying the connecting track 60 according to the above embodiment and modified example to this section, it is easy to give the running track 4 a shape other than the standardized curvature.
上記実施形態及び上記変形例では、セグメント部材61,61同士が互いに回動をしていない状態、すなわち、図5(A)に示されるように、セグメント部材61,61同士が一直線上に並んだ状態のときに、隣接するセグメント部材61,61間の切れ目に隙間Gをあけた状態で連結される連結軌道60を例に挙げて説明したが、隣接するセグメント部材61,61間の切れ目に隙間Gが設けられない状態で連結される構成の連結軌道としてもよい。 In the above embodiment and modified example, the description was given of a connecting track 60 in which adjacent segments 61, 61 are connected with a gap G between them when the segments 61, 61 are not rotating relative to each other, that is, when the segments 61, 61 are aligned in a straight line as shown in Figure 5 (A). However, the connecting track may also be configured so that adjacent segments 61, 61 are connected with no gap G between them.
1…走行車システム、2(2A,2B)…建屋、4…走行用軌道、4A…第一本線部、4B…第二本線部、4C…連絡部、4D…接続軌道、6…天井走行車(走行車)、50…走行部、50A…第一走行部,50B…第二走行部、51…走行ローラ、52…サイドローラ、52A…上側サイドローラ、52B…下側サイドローラ、53…分岐ローラ、60…連結軌道(軌道設備)、61…セグメント部材、63…支持部、65…回動部、67…連結部、70…走行空間形成部、71…天面部、73…側面部、73A…側面、75…下面部、75A…転動面、77…ガイド部材、77A…ガイド面、90…エリアコントローラ、DA…走行空間。 1...Traveling vehicle system, 2 (2A, 2B)...Building, 4...Traveling track, 4A...First main line section, 4B...Second main line section, 4C...Connecting section, 4D...Connecting track, 6...Overhead traveling vehicle (traveling vehicle), 50...Traveling section, 50A...First traveling section, 50B...Second traveling section, 51...Traveling rollers, 52...Side rollers, 52A...Upper side rollers, 52B...Lower side rollers, 53...Branching rollers, 60...Connecting track (track equipment), 61...Segment member, 63...Support section, 65...Pivoting section, 67...Connecting section, 70...Traveling space forming section, 71...Ceiling surface, 73...Side section, 73A...Side section, 75...Lower surface, 75A...Rolling surface, 77...Guide member, 77A...Guide surface, 90...Area controller, DA...Traveling space.
Claims (9)
前記軌道設備は、複数のセグメント部材が連結されることによって構成されており、
前記複数のセグメント部材のそれぞれは、
前記一対の走行ローラが転動する転動面と、
前記セグメント部材の前記幅方向における外側から前記サイドローラに接触する側面と、
前記セグメント部材の前記幅方向における内側から前記サイドローラに接触するガイド面と、を備え、
互いに隣接する前記セグメント部材の一方に備わる前記ガイド面と、互いに隣接する前記セグメント部材の他方に備わる前記側面とが、前記幅方向において互いに対向するように形成されている、軌道設備。 A track facility on which a carriage travels, the track facility having a pair of traveling rollers arranged opposite to each other in a width direction perpendicular to the traveling direction and rotating about a horizontal axis, and a pair of side rollers arranged opposite to each other in the width direction and rotating about a vertical axis,
The track facility is configured by connecting a plurality of segment members,
Each of the plurality of segment members is
a rolling surface on which the pair of running rollers roll;
a side surface of the segment that contacts the side roller from an outer side in the width direction;
a guide surface that contacts the side roller from an inner side of the segment in the width direction,
the guide surface provided on one of the adjacent segments and the side surface provided on the other of the adjacent segments are formed to face each other in the width direction.
前記ガイド面は、前記幅方向における内側から前記一対のサイドローラのそれぞれに接触する一対のガイド面であり、
前記一対の側面及び前記一対のガイド面は、隣接する前記セグメント部材の一方の前記一対のガイド面と、隣接する前記セグメント部材の他方の前記一対の側面とが、前記幅方向において互いに対向するように配置されている、請求項1記載の軌道設備。 the side surfaces are a pair of side surfaces that contact the pair of side rollers from the outer sides in the width direction, respectively;
the guide surfaces are a pair of guide surfaces that contact the pair of side rollers from the inner side in the width direction, respectively;
2. The track installation according to claim 1, wherein the pair of side surfaces and the pair of guide surfaces are arranged such that the pair of guide surfaces of one of the adjacent segments and the pair of side surfaces of the other of the adjacent segments face each other in the width direction.
前記軌道設備を走行する台車と、を備える、有軌道台車システム。 The track facility according to claim 1 or 2;
a bogie that travels on the track facility.
前記上側サイドローラは、前記側面と接触し、
前記下側サイドローラは、前記ガイド面と接触する、請求項8記載の有軌道台車システム。 The carriage has two pairs of side rollers, a pair of upper side rollers and a pair of lower side rollers, arranged in a vertical direction,
The upper side roller contacts the side surface,
The rail guided vehicle system of claim 8 , wherein the lower side rollers contact the guide surface.
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