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WO2025214569A1 - Dispositif lidar à dispositif de déplacement de faisceau sensible à la polarisation - Google Patents

Dispositif lidar à dispositif de déplacement de faisceau sensible à la polarisation

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Publication number
WO2025214569A1
WO2025214569A1 PCT/EP2024/059463 EP2024059463W WO2025214569A1 WO 2025214569 A1 WO2025214569 A1 WO 2025214569A1 EP 2024059463 W EP2024059463 W EP 2024059463W WO 2025214569 A1 WO2025214569 A1 WO 2025214569A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
outgoing
substrate
beam displacer
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/EP2024/059463
Other languages
English (en)
Inventor
Francesca Fabiana SETTEMBRINI
Moise Sala Henri SOTTO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pointcloud GmbH
Original Assignee
Pointcloud GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pointcloud GmbH filed Critical Pointcloud GmbH
Priority to PCT/EP2024/059463 priority Critical patent/WO2025214569A1/fr
Publication of WO2025214569A1 publication Critical patent/WO2025214569A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone

Definitions

  • LIDAR light detection and ranging
  • One class of known LIDAR (light detection and ranging) devices comprises a plurality of emitters for sending light beams towards a target as well as a plurality of light receivers to detect light returning from the target.
  • the emitters and receives are usually formed by the same elements, such as grating couplers that emit as well as receive the light, or a beam splitter is used to couple the emitter and the receiver. In both cases, part of the reflected, incoming light will typically be lost, thereby reducing device efficiency.
  • WO2012252444 Al describes a LIDAR device having a plurality of light emitters for sending light beams towards a target. The returning light is detected by a plurality of light receivers. To separate outgoing and incoming light, a Faraday rotator as well as a polarizing beam splitter are used. This design requires two separate, orthogonal, mutually aligned substrates for the emitters and the receivers, which makes manufacturing more difficult and adds to device complexity.
  • WO 2023/121888 Al describes another solution having a combined TE/TM emitter/receiver.
  • the emitted light is, e.g., TM polarized, passes a Faraday rotator on its outbound and incoming journey, and arrives back at the emitter/receiver with TE polarization.
  • a polarization-sensitive integrated coupler is used for routing the returning light to a coherent detector.
  • Efficient TE/TM emitter/receiver couplers as well as efficient polarization-sensitive integrated couplers are, however, difficult to manufacture in standard integrated optics devices.
  • the problem to be solved by the present invention is to provide an efficient LIDAR device having a simple design.
  • the device comprises at least the following elements: - A substrate.
  • the light emitter of a given pair is arranged at an "emitterreceiver offset" from the light receiver of the given pair, with the emitter-receiver offset being a vector of non-zero length. Hence, the light emitter and receiver of each pair are offset from each other.
  • This beam displacer is an optical element adapted and structured to perform one or both of the following a) to displace the outgoing light beam from a given emitter, as it travels towards a target, in a direction transversal to the outgoing light beam, and b) to displace the incoming light beam, as it returns as a reflection of the outgoing light beam from the target, a direction transversal to the incoming light beam.
  • the displacement between the outgoing (emitted) and incoming (reflected) light beams in the plane of the light emitters and light receivers corresponds to the emitter-receiver offset. Therefore, the incoming light beam arrives at the light receiver.
  • Arranging such a polarization-sensitive beam displacer between the substrate and the Faraday rotator allows to exploit the fact that the Faraday rotator rotates the polarization of the incoming light beam in respect to the outgoing light beam.
  • the displacement generated by the beam displacer is selected to direct the incoming light beam to the light receiver.
  • the displacement between the outgoing and incoming light beams in the plane of the light emitters and receivers is a vector corresponding to the emitter-receiver offset.
  • the beam displacer may comprise at least one sub -wavelength grating, i.e., a grating having a grating spacing smaller than a smallest wavelength of the outgoing light beam. As described below, such gratings can be tuned to generate a substantial lateral beam offset based on the Goos-Hanchen effect.
  • the beam displacer may comprise a birefringent material. This again allows to generate the desired displacement between the outgoing and incoming light beams.
  • the beam displacer may be arranged parallel to the substrate. In this case, the distance between the light emitters and receivers to the beam displacers is the same for light emitters and receivers.
  • the outgoing light beams from the emitters may be selected to propagate along a direction non-perpendicular to the substrate and the beam displacer. This is based on the understanding that a break of symmetry is required for the beam displacer to displace the beams laterally. Such a break of symmetry may be implemented by the beams extending non-perpendicularly to the beam displacer, in which case the geometry of the beam displacer can be simplified as described in some examples below.
  • a method for operating the present device may comprise at least the following steps:
  • the outgoing light beam from the light emitter through the beam displacer towards a target, where the outgoing light beam is reflected to form the incoming light beam.
  • Fig. 1 shows a block diagram of some of the components of an embodiment of a LIDAR device
  • Fig. 2 shows a schematical sectional view of a substrate, a beam displacer, a Faraday rotator, and a lens,
  • Fig. 3 shows an embodiment of a pixel with a light emitter and receiver pair
  • Fig. 4 illustrates the beam displacement in a grating-based beam displacer
  • Fig. 5 also illustrates the beam displacement in a grating-based beam displacer
  • Fig. 6 illustrates the beam displacement in a grating-based beam displacer having two sets of gratings
  • Fig. 7 illustrates the beam displacement in a birefringent beam dis- placer.
  • a "sub-wavelength" grating is a grating having a grating spacing smaller than the wavelength of the light in the medium outside the grating.
  • Figs. 1 - 3 show an example of a LIDAR device 1.
  • Device 1 of the shown embodiment generates outgoing light beams 2 and sends them towards a target 4.
  • the outgoing light beams 2 are reflected from target 4 and return, as incoming light beams 6, to the device.
  • the device measures the distance between itself and the points where the light beams hit target 4, basically by measuring a parameter depending on the time-of-flight of the light from the device to these points and back.
  • the light beams may be pulsed, and the time of flight is measured by directly measuring the time a pulse requires to travel to target 4 and back.
  • the light of the light beams may frequency-modulated, in particular frequency-chirped, i.e., the optical frequency (and optical wavelength) of the light is modulated or chirped, and the beat frequency of the incoming light beams at device 1 interfering with the currently generated light is measured.
  • Figs. 1 - 3 Other classes of embodiments are known to the skilled person. They comprise, e.g., the use of amplitude-modulated light, again using frequency modulation and beat detection.
  • the device shown in Figs. 1 - 3 is based on the second class of embodiments, using principles as, e.g., described in WO2018/160729A2 and WO2020163717A1.
  • Device 1 comprises, as shown in Fig. 1, a frequency-chirped light source 8, e.g., comprising a fixed-frequency light generator and an I/Q-modulator as described in WO2018/160729A2.
  • a frequency-chirped light source 8 e.g., comprising a fixed-frequency light generator and an I/Q-modulator as described in WO2018/160729A2.
  • the light from light source 8 is sent through a switch 10 controlled by a control unit 12.
  • Switch 10 forms a multiplexer sending the light to selected subsets of a plurality of light emitters 14.
  • Control unit 12 is adapted to sequentially switch the light through these subgroups.
  • Each subgroup comprises one or more light emitters 14.
  • the light emitters are arranged in a two-dimensional pixel array 16, with each subgroup comprising the emitters 14 of one row.
  • the light emitters 14 may be diffractive grating couplers integrated on substrate 18 as shown in Fig. 3. Examples of such grating couplers are described in the two references cited above. They generate the outgoing light beams 2.
  • the outgoing light beams 2 emerge from substate 18 and are sent towards target 4. They pass a beam displacer 20 and a Faraday rotator 22, which will be described in more detail below. Then they are pass an imaging optics 24, such as a lens, which sends them towards target 4.
  • Imaging optics 24 is arranged at a distance D from the plane 26 of the light emitters 14 and light receivers 28. For probing remote targets 4, this distance D may correspond to the focal length f of imaging optics 24, i.e., the light emitters 14 and light detectors 28 are arranged in the focal plane of the imaging optics 24.
  • each pixel position in the two-dimensional pixel array 16 becomes a given direction after imaging optics 24, i.e., the direction of the beam emitted from the imaging optics 24 is a function of the position of the emitting pixel in two- dimensional pixel array 16.
  • the outgoing beams 2 are reflected at target 4 to the generate incoming beams 6, which are mapped back into the respective pixels in two-dimensional pixel array 16 by means of imaging optics 24.
  • the light receivers 28 receive the incoming beams.
  • the light receivers 28 may again be diffractive grating couplers integrated on substrate 18 as shown in Fig. 3.
  • the light emitters 14 and light receivers 28 form pairs 30.
  • the light emitter of a given pair is arranged to receive the incoming beam 6 generated by the reflection of the outgoing beam 2 from the light emitter 14 of the same pair 30.
  • the light received by light receiver 28 may then be brought to interference with the light currently generated by light source 8.
  • the light from light source 8 may be sent, as reference light, directly (i.e., not via target 4 but within device 1) to each emitter receiver pair 30 via light guides 32.
  • the light received by light receiver 28 and the reference light 28 are brought to interference at a coupler 34, e.g., with the two outputs of coupler 34 being sent to a differential detector 36.
  • Coupler 34 and differential detector 36 form a coherent detector. Examples of such coherent detectors are described in the two references cited above.
  • the output signals from the detectors 36 may be fed to a signal processor 40 for frequency analysis.
  • the device comprises a beam displacer 20 and a Faraday rotator 22.
  • the purpose of these components is to couple the light emitter 14 of a given pair to its light receiver 28, i.e., to send the incoming beam 6 generated by the outgoing beam 2 of the light emitter 14 of the given pair to the light receiver 28 of the same pair.
  • the light emitter 14 and light receiver 28 of a given pair are arranged at a distance from each other.
  • the displacement between the light emitter 14 and the light receiver 28 is called the "emitter-receiver offset" v, with this offset being a vector of non-zero length in the plane 26 of the light emitters 14 and light receivers 28.
  • the light emitters 14 are adapted to emit light with a first polarization, e.g., TE-polarized light.
  • the light receivers 28 may be adapted to receive light with a second polarization, e.g., TM-polarized light, with the second polarization being orthogonal to the first polarization.
  • a second polarization e.g., TM-polarized light
  • the outgoing beams 2 from the light emitters 14 are sent to beam displacer 20 and from there through Faraday rotator 22.
  • Faraday rotator 22 rotates the polarization, e.g., by 45°.
  • the polarization of the incoming beams 6 is rotated by another 45° as they pass Faraday rotator 22, i.e., as they arrive at beam displacer 20, the polarization will be rotated by a total of 90° in respect to the outgoing beams 2 as originally emitted by the light emitters 14.
  • the incoming beams 6 pass beam displacer 20 and are sent to the light receivers 28.
  • beam displacer 20 is a polarization-sensitive beam displacer, i.e., it displaces outgoing and incoming light differently as a function of the light polarization. In other words, displaces the outgoing beams 2 and/or the incoming beams 6.
  • the displacement (as a vector) between the outgoing beams 2 and incoming beams 6 in the plane 26 is designed to be equal to the emitter-receiver offset v.
  • Faraday rotator 22 may rotate light polarization also by other angles, such as by odd multiples of 45°. For good separation of outgoing and incoming light, Faraday rotator may generate a total rotation between outgoing and incoming light that is an odd multiple of 90°.
  • Beam displacer 20 can be based on various principles, some of which are described in the following.
  • beam displacer 20 may be based on one or more sub -wavelength gratings. Such gratings can generate a lateral displacement of light beams based on the Goos-Hanchen effect. This displacement can be substantial if a resonance condition is met.
  • Figs. 4 and 5 show a first embodiment of beam displacer 20 based on one or more sub -wavelength gratings 38.
  • Such gratings are resonant devices, as, e.g., described in the References 1 - 3 above.
  • the grating frequency of the resonance depends on beam polarization, refractive index, and grating geometry.
  • the gratings can be tuned to, e.g., generate a large offset for light at one polarization but no offset for light polarized perpendicularly thereto.
  • Vector displacement F extends along the grating vector of the sub wavelength gratings, and its length can be calculated using the techniques described in References 1 - 3 above.
  • the total displacement between outgoing beam 2 and incoming beam 6 at plane 26 corresponds to the vector displacement F of outgoing beam 2.
  • the geometry of the sub -wavelength grating and the light beam must be non-symmetric in respect to a plane perpendicular to the grating vector of the sub-wavelength grating(s).
  • such asymmetry is achieved by selecting the resonance condition to be fulfilled for a beam that has an angle a 90° in respect to the grating vector of the sub -wavelength grating(s) 38.
  • the deviation from 90° can be small, e.g., in the range of a few degrees, as illustrated by the examples in the two articles of Du et al. above.
  • may be at least 0.5°
  • the outgoing light beams 2 may propagate along a direction non-perpendic- ular to substrate 18 and non-perpendicular to beam displacer 38.
  • the outgoing light beams 2 and the incoming light beams 6 must extend along a direction non-perpendicular to substate 18.
  • Such an oblique emission angle or incoming angle can be easily implemented by selecting a suitable grating spacing of the light emitter 14 and/or light receivers 28.
  • a more efficient asymmetric coupling between the gratings of the light emitter and/or receiver 14, 28 and the sub -wavelength grating(s) 38 of beam displacer 38 may be achieved if the angle between the (average) grating vector of the light emitter and/or receiver 14, 28 and the grating vector of the sub -wavelength grating(s) 38 is small, such as smaller than 30°.
  • the grating vectors of the emitter 14 and/or receiver 28 can be parallel to the one of the sub -wavelength grating.
  • beam displacer 20 comprises exactly two parallel, stacked sub -wavelength gratings 38a, 38b as described in Reference 3 above. This type of design allows to obtain a larger transmission efficiency into the displaced beam. Lager shifts and/or higher efficiency can also be achieved by using three or more parallel, stacked sub -wavelength gratings.
  • the beam displacer comprises several stacked, parallel sub -wavelength gratings.
  • These stacked gratings may have equal grating spacings, but they may be offset in respect to each other along the direction of their (parallel) grating vectors.
  • the beam displacer may comprise a first set of stacked, parallel sub -wavelength gratings 38a, 38b, with the gratings of the first set having equal grating vectors (i.e., the gratings are parallel c/ have equal grating spacing).
  • the sub-wavelength gratings 38 are designed to be in resonance with outgoing beam 2 but not with incoming beam 6. Hence, only the outgoing beam is displaced.
  • the sub -wavelength grating(s) 38 may be designed to be in resonance with the incoming beam 6 but not with the outgoing beam 2, in which case only the incoming beam is displaced.
  • the sub -wavelength gratings 38 may also be designed to be in resonance with outgoing beam 2 and with incoming beam 6.
  • Fig. 6 illustrates a simple class of embodiments for implementing such a design.
  • beam displacer 20 comprises a first set of sub -wavelength gratings 38a, 38b similar to those of Figs. 4 and 5, which are in resonance with outgoing beam 2, offsetting it by a vector offset Fl. Further, beam displacer 20 comprises a second set of sub -wavelength gratings 38c, 38d, which are in resonance with incoming beam 6, offsetting it by a vector offset F2.
  • the total offset between outgoing beam 2 and incoming beam 6 is Fl + F2.
  • the beam displacer 20 may comprise several stacked sub -wavelength gratings, with at least some of the stacked sub -wavelength gratings having different grating vectors.
  • beam displacer 20 may comprise
  • the grating vector of first set of subwavelength gratings 38a, 38b is parallel to the grating vector of the second set of subwavelength gratings 38c, 38d. This makes it easier to obtain an efficient asymmetric coupling between the gratings and the outgoing and incoming beams 2, 6 because the outgoing and incoming beams are parallel to each other.
  • Subwavelength gratings of the type shown in Figs. 4 - 6 may be built by forming regular structures on a substrate, such as a structured layer of silicon nitride on a silicon substrate (see, e.g., Reference 2 above), or by regular openings in a substrate (see, e.g., Reference 1 above).
  • a substrate such as a structured layer of silicon nitride on a silicon substrate (see, e.g., Reference 2 above), or by regular openings in a substrate (see, e.g., Reference 1 above).
  • beam displacer 20 may comprise a birefringent material for obtaining a polarization-dependent offset of the beams.
  • An embodiment is illustrated in Fig. 7.
  • beam displacer 20 is of a birefringent material, with its optical axes being arranged non-parallel to the propagation direction of the outgoing and incoming beams. In that case, the angles of refraction depend on the polarization of the beams.
  • beam displacer 20 may be arranged parallel to substrate 8, and the optical axes of beam displacer 20 may be parallel and perpendicular to substrate 8. In that case, as shown, and as in the case of a beam displacer 20 having sub -wavelength gratings, the outgoing light beams 2 and/or the incoming light beams 6 may propagate along a direction non-perpendicular to substrate 18 and the beam displacer 20 in order to experience birefringence.
  • Beam displacer 20 may, e.g., comprise a crystalline, birefringent material, such as rutile, lithium niobate, potassium niobate, or calcite. It may also comprise an anisotropically deformed amorphous material, such as a polymer where birefringence has been induced by anisotropic deformation or a matrix of polar chromophores where birefringence has been introduced by electrical field poling.
  • a crystalline, birefringent material such as rutile, lithium niobate, potassium niobate, or calcite. It may also comprise an anisotropically deformed amorphous material, such as a polymer where birefringence has been induced by anisotropic deformation or a matrix of polar chromophores where birefringence has been introduced by electrical field poling.
  • Beam displacer 20 may, e.g., be plate shaped.
  • beam displacer 20 may comprise a combination of at least sub -wavelength grating and a birefringent material, such as one or more sub -wavelength gratings arranged on a birefringent substrate.
  • the sub -wavelength gratings may, in general, also be formed by metasurfaces, as, e.g., described by X. Jian et al. in " Theoretical Enhancement of the Goos-Hanchen Shift with a Metasurface Based on Bound States in the Continuum” https://doi.org/10.3390/mil4061109.
  • the beam displacer may generate a parallel displacement between the incoming and outgoing light beams 2, 6.
  • Suitable beam displacers include "photonic crystals", which are materials having periodic structures wirth a spacing in the order of or even smaller than the wavelength, and may therefore be considered at least closely related to or even include basically the same type of structures as sub -wavelength gratings, see, e.g., Reference 1.
  • the light emitters 14 and light detectors 28 may be arranged in a two-dimensional pixel array 16.
  • the length v of the emitter-detector offset v may be smaller than the nearest neighbor distance w (as measured along v) between adjacent light emitters 14.
  • the two-dimensional array may be a tessellation of pixels 42, with each pixel containing a pair of a light emitter 14 and its attributed light receiver 28.
  • the light emitters 14 generate the outgoing beams 2, which propagate away from substrate 18.
  • the incoming beams 6 first traverse imaging optics 24, then Faraday rotator 22, and finally beam displacer 20 before they arrive at substrate 18 and the light receivers 14.
  • beam displacer 20 may be arranged between substrate 18 and imaging optics 22.
  • Faraday rotator 22 may be arranged between substrate 18 and imaging optics 22.
  • beam displacer 20 may be mounted to sub state 18.
  • struts 44 this is schematically illustrated by struts 44.
  • this mounting may also be implemented by directly building image displacer 20 on substrate 18 and/or by laminating image displacer 20 on substrate 18 or by placing a transparent, solid spacer layer between substrate 18 and image displacer 20.
  • the subwavelength grating(s) of beam displacer 20 may be manufactured by suitably structuring the BEOL layers.
  • beam displacer 20 and Faraday rotator 22 may be mounted to each other, e.g., beam displacer 20 may be mounted to the surface of Faraday rotator 22 that faces substrate 18. Notes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)

Abstract

Un dispositif LIDAR comprend un substrat (18) et une pluralité de paires d'émetteurs de lumière (14) et un récepteur de lumière (28) disposé dans un plan (26) sur le substrat (18). L'émetteur de lumière (14) d'une paire donnée est disposé à un décalage émetteur-récepteur (v) du récepteur de lumière (28) de la paire donnée. Le dispositif comprend en outre un rotateur de Faraday (22) et un déplaceur de faisceau sensible à la polarisation (20) disposé entre le substrat (18) et le rotateur de Faraday (22). Le déplaceur de faisceau (20) est conçu pour déplacer un faisceau lumineux sortant (2) d'un émetteur donné, lorsqu'il se déplace vers une cible, dans une direction transversale au faisceau lumineux sortant (2), et/ou pour déplacer un faisceau lumineux entrant (6), lorsqu'il revient en tant que réflexion du faisceau lumineux sortant (2) depuis la cible. Le déplacement se produit dans une direction transversale au faisceau lumineux entrant (6), et correspond au décalage émetteur-récepteur (v). Cette conception permet une séparation de signaux entre les faisceaux sortant et entrant (2, 6) pour une meilleure efficacité.
PCT/EP2024/059463 2024-04-08 2024-04-08 Dispositif lidar à dispositif de déplacement de faisceau sensible à la polarisation Pending WO2025214569A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2024/059463 WO2025214569A1 (fr) 2024-04-08 2024-04-08 Dispositif lidar à dispositif de déplacement de faisceau sensible à la polarisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2024/059463 WO2025214569A1 (fr) 2024-04-08 2024-04-08 Dispositif lidar à dispositif de déplacement de faisceau sensible à la polarisation

Publications (1)

Publication Number Publication Date
WO2025214569A1 true WO2025214569A1 (fr) 2025-10-16

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