WO2025246757A1 - Gas intake system and furnace pipe apparatus - Google Patents

Abstract

The present application relates to the technical field of semiconductor apparatuses. Disclosed are a gas intake system and a furnace pipe apparatus. The gas intake system comprises: a first gas intake pipe; a pre-flow pipe; a second gas intake pipe, which is connected to the first gas intake pipe and the pre-flow pipe by means of a first pipe switching device, wherein the first pipe switching device is configured to enable the second gas intake pipe to be in communication with one of the first gas intake pipe and the pre-flow pipe; a pressure difference measurement device, which is used for measuring a pressure difference between the first gas intake pipe and the pre-flow pipe or a pressure difference between the first gas intake pipe and the second gas intake pipe; a pressure adjustment device, which is used for controlling the pressure of the pre-flow pipe; and a control unit, which is in communication connection with the pressure difference measurement device and is used for controlling the pressure adjustment device on the basis of the pressure difference, so as to adjust the pressure of the pre-flow pipe. In the present application, the gas intake pressure of the pipes fluctuates slightly and is more stable.

Description

Air intake system and furnace tube equipment Technical Field

This application relates to the field of semiconductor equipment technology, specifically to an air intake system and furnace tube equipment.

Background Technology

Currently, the furnace tube's air intake system experiences pressure fluctuations during air intake, affecting the process. This is especially true during the ALD process, where it severely impacts process stability.

Specifically, in the ALD process, the following cycle is required to deposit the film: introducing the first reactive gas – performing a purging operation – introducing the second reactive gas – performing a purging operation. Referring to Figure 4 (only the inlet line for the first reactive gas is shown; the inlet line for the second reactive gas is the same as the first), the carrier gas line 100' is used to introduce nitrogen, and the inlet line 200' is used to introduce the first reactive gas. The first reactive gas enters the reaction chamber 400' as a carrier gas. Because the first and second reactive gases are frequently switched into the reaction chamber 400', valve 210' is frequently opened and closed. When valve 210' is closed, a pressure difference exists across its two ends; when valve 210' is open, pressure fluctuations occur during the intake, leading to unstable intake volume and affecting the process.

Summary of the Invention

This application provides an air intake system and furnace tube equipment, which helps to reduce pressure fluctuations during air intake and make the air intake volume more accurate.

This application solves the above-mentioned technical problems through the following technical solution:

An intake system, comprising:

First intake pipe;

Pre-flow piping;

The second intake pipe is connected to the first intake pipe and the pre-flow pipe via a first pipe switching device, the first pipe switching device being configured to allow the second intake pipe to be connected to one of the first intake pipe and the pre-flow pipe.

A differential pressure detection device is used to measure the differential pressure between the first intake pipe and the pre-flow pipe or between the first intake pipe and the second intake pipe.

A pressure regulating device is used to control the pressure of the pre-flow pipeline;

The control unit is communicatively connected to the differential pressure detection device and is used to control the pressure regulating device according to the differential pressure, thereby regulating the pressure of the pre-flow pipeline.

A furnace tube device includes the above-described air intake system, the furnace tube device includes a reaction chamber, and a first air intake pipe is connected to the reaction chamber.

The positive and progressive effects of this application are as follows: By adding a pre-flow pipeline, installing a pump in the pre-flow pipeline, and incorporating a differential pressure detection device to detect the pressure difference between the pre-flow pipeline and the first intake pipeline, the control unit can obtain the value from the differential pressure detection device and adjust the pressure in the pre-flow pipeline by controlling the pump. This balances the pressure difference between the pre-flow pipeline and the first intake pipeline, resulting in smaller pressure fluctuations and a more stable switching when the second intake pipeline switches from the pre-flow pipeline to the first intake pipeline. Consequently, the amount of gas supplied by the second intake pipeline is more precise and stable.

Overview of the attached figures

The features and performance of this application are further described by the following embodiments and accompanying drawings.

Figure 1 is a schematic diagram of the air intake system of Embodiment 1 of this application;

Figure 2 is a schematic diagram of the air intake system of Embodiment 2 of this application;

Figure 3 is a schematic diagram of the air intake system of Embodiment 3 of this application;

Figure 4 is a schematic diagram of the existing furnace tube air intake system.

Preferred embodiments of this application

The present application is further illustrated below by way of embodiments, but this does not limit the present application to the scope of the embodiments.

Example 1

As shown in Figure 1, this embodiment provides an air intake system, including a first air intake pipe 100, a pre-flow pipe 300, a second air intake pipe 200, a differential pressure detection device 600, and a control unit 150. The first air intake pipe 100 is connected to the reaction chamber 400 of the furnace tube equipment. The pre-flow pipe 300 is equipped with a pump 310. The second air intake pipe 200 is connected to the first air intake pipe 100 and the pre-flow pipe 300 via a first pipe switching device, which is configured to allow the second air intake pipe 200 to be connected to one of the first air intake pipe 100 and the pre-flow pipe 300. The differential pressure detection device 600 is used to measure the pressure difference between the first air intake pipe 100 and the pre-flow pipe 300. The control unit 150 is communicatively connected to the differential pressure detection device 600 and is used to control the power of the pump 310 and thus adjust the pressure of the pre-flow pipe 300 based on the value measured by the differential pressure detection device 600.

Specifically, in this embodiment, the first pipeline switching device includes a first valve 510 disposed between the first intake pipeline 100 and the second intake pipeline 200 and a second valve 520 disposed between the second intake pipeline 200 and the pre-flow pipeline 300. By controlling the opening and closing of the first valve 510 and the second valve 520, the second intake pipeline 200 can be switched between the first intake pipeline 100 and the pre-flow pipeline 300.

In this embodiment, the differential pressure detection device 600 is a differential pressure gauge, which is installed between the first intake pipe 100 and the pre-flow pipe 300. When the second valve 520 is opened, the second intake pipe 200 is connected to the pre-flow pipe 300, and the pressure in the second intake pipe 200 is the same as the pressure in the pre-flow pipe 300. Therefore, the value measured by the differential pressure detection device 600 is also the differential pressure between the first intake pipe 100 and the second intake pipe 200.

In some embodiments, the differential pressure detection device 600 may also be disposed between the first intake pipe 100 and the second intake pipe 200.

The control unit 150 is a programmable logic controller (PLC). In this embodiment, the control unit 150 communicates wirelessly; in some embodiments, the control unit 150 may also communicate via a wired connection.

In some embodiments, the differential pressure detection device 600 may also be equipped with pressure gauges on the first intake pipe 100 and the pre-flow pipe 300 respectively to obtain the differential pressure between the first intake pipe 100 and the pre-flow pipe 300.

In this embodiment, the first air inlet pipe 100 is connected to the reaction chamber 400 of the furnace tube equipment. The reaction chamber 400 of the furnace tube equipment is usually under negative pressure (less than standard atmospheric pressure), so the pressure in the first air inlet pipe 100 will be less than atmospheric pressure. This application adds a pre-flow pipe 300 and installs a pump 310 in the pre-flow pipe 300. By turning on the pump 310 to pump air, the pressure in the pre-flow pipe 300 can be reduced. A differential pressure detection device 600 is also provided to detect the pressure difference between the pre-flow pipe 300 and the first air inlet pipe 100. During the furnace tube process, the second inlet pipe 200 is connected to the pre-flow pipe 300 for pre-flow. The control unit 150 can obtain the value from the differential pressure detection device 600 and adjust the pressure of the pre-flow pipe 300 by controlling the pump 310, thereby balancing the pressure difference between the pre-flow pipe 300 and the first inlet pipe 100. This reduces or even eliminates the pressure difference across the first valve 510. Consequently, when the second inlet pipe 200 switches from the pre-flow pipe 300 to the first inlet pipe 100 (i.e., from the second valve 520 to the first valve 510), the pressure fluctuation is smaller, and the switching is more stable. This results in a more precise and stable amount of gas entering the reaction chamber 400 from the second inlet pipe 200. Furthermore, the switching process also helps reduce the wear and tear on the first pipe switching device and extends its service life.

Specifically, in this embodiment, before the second intake pipe 200 switches from being connected to the pre-flow pipe 300 to being connected to the first intake pipe 100, the air intake of the first intake pipe 100 is already in a stable state. The control unit 150 adjusts the pressure in the pre-flow pipe 300 by controlling the pump 310, adjusting the value of the differential pressure detection device 600 to a preset value to reduce the pressure difference between the first intake pipe 100 and the pre-flow pipe 300. The preset value is determined according to different process requirements. For processes that require more precise air intake, the preset value can be set smaller to reduce pressure fluctuations when the second intake pipe 200 switches from the pre-flow pipe 300 to the first intake pipe 100. In some embodiments, before the second intake line 200 is switched from being connected to the first intake line 100 to being connected to the pre-flow line 300, the pressure of the pre-flow line 300 can be adjusted by controlling the pump 310, thereby balancing the pressure difference between the pre-flow line 300 and the first intake line 100.

In some embodiments, the devices connected to the first intake pipe 100 are not limited to this, and the first intake pipe 100 may also be connected to other devices that require pipe switching.

In this embodiment, a mass flow controller (MFC) 110 is provided on the first intake pipe 100 to control the flow rate of gas in the first intake pipe 100, and a mass flow controller 210 is provided on the second intake pipe 200 to control the flow rate of gas in the second intake pipe 200. Furthermore, in this example, the connection end of the differential pressure detection device 600 to the first intake pipe 100 is located downstream of the mass flow controller (MFC) 110, and the connection end of the differential pressure detection device 600 to the pre-flow pipe 300 is located between the second valve 520 and the pump 310.

Example 2

As shown in Figure 2, the intake system provided in this embodiment is basically the same as the solution in embodiment 1. The difference is that in this embodiment, the intake system also includes a pressure regulating pipeline 900, which is connected to the pre-flow pipeline 300. A mass flow controller 910 is provided on the pressure regulating pipeline 900, and the control unit 150 is also communicatively connected to the mass flow controller 910.

The control unit 150 can not only coarsely adjust the pressure of the pre-flow line 300 through the pump 310, but also precisely control the pressure of the pre-flow line 300 by adjusting the mass flow controller 910 on the pressure regulating line 900. By adjusting the power of the pump 310, the pressure of the pre-flow line 300 can be controlled within a certain range. Then, by adjusting the flow rate of the pre-flow line 300 through the mass flow controller 910, the pressure of the pre-flow line 300 can be precisely controlled. The pressure control of the pre-flow line 300 is more accurate, which further reduces the pressure fluctuation when the second intake line 200 switches from the pre-flow line 300 to the first intake line 100.

In some embodiments, the pump 310 may be omitted, and the pressure of the pre-flow line 300 may be controlled solely by the mass flow controller 910 on the pressure regulating line 900.

In this embodiment, the first pipeline switching device is a two-position five-way valve 540, and the pressure regulating pipeline 900 and the pre-flow pipeline 300 are connected through the two-position five-way valve 540. The use of a two-position five-way valve 540 as the first pipeline switching device helps to reduce the number of individual valves, optimize pipeline design, and simplify control.

Example 3

As shown in Figure 3, the air intake system provided in this embodiment is basically the same as the scheme in embodiment 2. The difference is that in this embodiment, the air intake system also includes a first branch 810, a second branch 820, and an air source container 700. The air source container 700 is used to contain the air source. The air intake end of the first branch 810 is connected to the second air intake pipe 200 through the second pipe switching device 530. The air outlet end of the first branch 810 is connected to the air intake end of the air source container 700. The air intake end of the second branch 820 is connected to the air outlet end of the air source container 700. The air outlet end of the second branch 820 is connected to the second air intake pipe 200 through the second pipe switching device 530.

Specifically, the second pipeline switching device 530 is a two-position four-way valve.

In this embodiment, the gas source container 700 contains DCE (dichloroethylene) liquid. When the first passage of the second pipeline switching device 530 is disconnected and the second and third passages are connected, the nitrogen from the plant end enters the third inlet pipeline 830 through the mass flow controller 210, and then enters the gas source container 700 through the first branch 810. The nitrogen carries the DCE (gaseous) through the second branch 820 into the second inlet pipeline 200 by bubbling.

In this embodiment, an electronic pressure controller (EPC) 220 is provided on the second air intake pipe 200. The electronic pressure controller 220 is located downstream of the second pipe switching device 530 and is used to control the pressure of the second air intake pipe 200. The electronic pressure controller 220 ensures that the amount of gas carried out from the gas source container 700 can be accurately controlled, and that the amount of gas will not fluctuate due to pressure fluctuations.

In this embodiment, a regulating valve 320 is also provided on the pre-flow pipeline 300. The regulating valve 320 is located upstream of the pump 310 and downstream of the two-position five-way valve 540. The regulating valve 320 is used to regulate the pressure of the pre-flow pipeline 300. Specifically, the regulating valve 320 can be a throttle valve, and the pressure of the pre-flow pipeline 300 is regulated by controlling the opening degree of the throttle valve.

Example 4

This embodiment provides a furnace tube device, which includes the air intake system described in the above embodiment.

While specific embodiments of this application have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of this application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this application, but all such changes and modifications fall within the scope of protection of this application.

Claims (10)

An intake system, characterized in that it comprises: First intake pipe; Pre-flow piping; The second intake pipe is connected to the first intake pipe and the pre-flow pipe via a first pipe switching device, the first pipe switching device being configured to allow the second intake pipe to be connected to one of the first intake pipe and the pre-flow pipe. A differential pressure detection device is used to measure the differential pressure between the first intake pipe and the pre-flow pipe or between the first intake pipe and the second intake pipe. A pressure regulating device is used to control the pressure of the pre-flow pipeline; The control unit is communicatively connected to the differential pressure detection device and is used to control the pressure regulating device according to the differential pressure, thereby regulating the pressure of the pre-flow pipeline. The intake system as claimed in claim 1, wherein the control unit controls the pressure regulating device to adjust the measurement result of the differential pressure detection device to a preset value. The intake system as described in claim 1, wherein the differential pressure detection device is a differential pressure gauge, and the differential pressure gauge is disposed between the first intake pipeline and the pre-flow pipeline or the second intake pipeline. The intake system as described in claim 1, wherein the differential pressure detection device includes a pump, and the pump is disposed on the pre-flow pipeline. The intake system as described in claim 1 or 4 is characterized in that the differential pressure detection device includes a pressure regulating pipeline, the pressure regulating pipeline is connected to the pre-flow pipeline, and a mass flow controller is provided on the pressure regulating pipeline. The intake system as described in claim 5 is characterized in that the pressure regulating pipeline and the pre-flow pipeline are connected through the first pipeline switching device. The intake system as described in claim 4 is characterized in that a regulating valve is further provided on the pre-flow pipeline, the regulating valve being located upstream of the pump, and the regulating valve being used to regulate the pressure of the pre-flow pipeline. The air intake system as described in claim 1, characterized in that it further includes a first branch, a second branch, and an air source container, wherein the air source container is used to contain an air source, the air intake end of the first branch is connected to the second air intake pipe through a second pipe switching device, the air outlet end of the first branch is connected to the air intake end of the air source container, the air intake end of the second branch is connected to the air outlet end of the air source container, and the air outlet end of the second branch is connected to the second air intake pipe through the second pipe switching device. The intake system as described in claim 8 is characterized in that an electronic pressure controller is provided on the second intake pipe, the electronic pressure controller being located downstream of the second pipe switching device and used to control the pressure of the second intake pipe. A furnace tube device, characterized in that it includes an air intake system as described in any one of claims 1-9, the furnace tube device including a reaction chamber, and a first air intake pipe communicating with the reaction chamber.