WO2025138364A1 - Thin-film-type high-precision sensor - Google Patents

Abstract

Disclosed in the present application is a thin-film-type high-precision sensor, comprising a base plate, a tube socket, an annular support and a diaphragm, wherein a support recess is provided on the side of the annular support facing the base plate, and a support through hole is provided on the side of the annular support away from the base plate; the annular support is fixedly connected to an edge of the base plate; the tube socket is provided with an induction device, the tube socket is assembled in the support recess, the side surface of the tube socket provided with the induction device faces the support through hole, and the induction device extends into the support through hole; the base plate is provided with a circular through hole, a plurality of connecting lines are provided on the side surface of the tube socket facing away from the induction device, and all the connecting lines pass through the circular through hole and extend outwards; and the diaphragm covers the side surface of the annular support provided with the support through hole. By means of forming a T-shaped oil chamber and configuring the diaphragm as a flexible diaphragm, the high-precision sensor effectively reduces the volume of oil in the oil chamber to enhance the anti-expansion ability, thereby improving the reliability of the sensor.

Description

A thin film type high precision sensor

This application claims the priority of the Chinese patent application filed with the Chinese Patent Office on December 27, 2023, with application number 202311821470.X, and invention name “A thin film type high-precision sensor”, the entire contents of which are incorporated by reference in this application.

Technical Field

The present application relates to the field of sensor technology, and in particular to a thin-film high-precision sensor.

Background Art

In order to conduct deformation, the sensor is provided with an oil cavity between the diaphragm and the sensing device, and the deformation of the diaphragm is conducted to the sensing device through the oil cavity, so that the sensing device senses the deformation and generates a sensing signal. However, in the prior art, due to the unreasonable overall structural design of the sensor, the oil injected into the oil cavity expands due to the expansion coefficient when heated, thereby deforming the diaphragm, causing the sensing signal obtained by the sensor to be inaccurate, and even causing the sensor to fail and unable to work, affecting the reliability of the sensor during use. Therefore, the sensor structure in the prior art has the problem of poor structural reliability.

Summary of the invention

The present application provides a thin-film high-precision sensor, which aims to solve the problem of poor structural reliability of sensor structures in the prior art.

The present application discloses a thin-film type high-precision sensor, comprising a base plate, a tube seat, an annular support and a diaphragm;

The annular support is provided with a support groove on one side facing the bottom plate, and a support through hole is provided on the side of the annular support away from the bottom plate; the annular support is fixedly connected to the edge of the bottom plate;

The tube base is provided with a sensing device, the tube base is assembled in the support groove, and a side surface of the tube base provided with the sensing device faces the support through hole, and the sensing device extends into the support through hole;

A circular through hole is provided on the bottom plate, and a plurality of connecting wires are provided on a side of the tube holder away from the induction device, and the connecting wires all pass through the circular through hole and extend outward;

The diaphragm is covered on one side surface of the annular support where the support through hole is provided, the edge of the diaphragm is fixedly connected to the edge of the top surface of the annular support, and a gap is formed between the diaphragm and the top surface of the annular support, the gap is combined with the support through hole to form a T-shaped oil chamber, and oil is injected into the T-shaped oil chamber.

The thin-film high-precision sensor, wherein the top edge of the annular support protrudes upward to form a boss, the lower side surface of the diaphragm is fixedly connected to the upper end surface of the boss, and the lower end surface of the pressure ring is fixedly connected to the edge of the diaphragm.

In the thin-film high-precision sensor, the top edge of the annular support protrudes upward to form an annular protrusion, and the outer edge of the diaphragm is bent downward and fixedly connected to the top surface and side surface of the annular protrusion.

In the thin-film high-precision sensor, the bottom edge of the diaphragm extends downward to form a connecting ring, and the inner side wall of the connecting ring is fixedly connected to the top edge and outer side wall of the annular support.

In the thin-film high-precision sensor, the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150.

In the thin-film high-precision sensor, the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm.

In the thin-film high-precision sensor, an inclined surface is provided at the connection between the edge of the diaphragm and the annular support, and the cross section of the gap is a trapezoidal gap corresponding to the inclined surface.

In the thin film type high-precision sensor, the diaphragm is a flexible metal diaphragm.

In the thin film type high-precision sensor, the height of the gap is 1.2-3 times the thickness of the diaphragm.

In the thin-film high-precision sensor, a sealing ring is provided between the tube seat and the bottom plate, and the inner diameter of the sealing ring is larger than the inner diameter of the circular through hole on the bottom plate.

The present application discloses a thin-film type high-precision sensor, which includes a base plate, a tube seat, an annular support and a diaphragm; a support groove is provided on the side of the annular support facing the base plate, and a support through hole is provided on the side of the annular support away from the base plate; the annular support is fixedly connected to the edge of the base plate; a sensing device is provided on the tube seat, the tube seat is assembled in the support groove, and the side of the tube seat where the sensing device is provided faces the support through hole, and the sensing device extends into the support through hole; a circular through hole is provided on the base plate, and a plurality of connecting wires are provided on the side of the tube seat away from the sensing device, and the connecting wires all pass through the circular through hole and extend outward; the diaphragm is covered and arranged on one side of the annular support where the support through hole is provided. The above-mentioned high-precision sensor, by forming a T-shaped oil cavity and setting the diaphragm as a flexible diaphragm, effectively reduces the volume of oil in the oil cavity to increase the anti-expansion ability, thereby improving the reliability of the sensor.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

FIG1 is an exploded structural diagram of an embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG2 is a cross-sectional structural diagram of an embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG3 is an exploded structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG4 is a cross-sectional structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG5 is an exploded structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG6 is a cross-sectional structural diagram of another embodiment of a thin-film high-precision sensor provided in an embodiment of the present application;

FIG. 7 is a partial structural diagram of a thin-film high-precision sensor provided in an embodiment of the present application.

Figure numbers: 1, bottom plate; 2, pipe seat; 3, annular support; 4, diaphragm; 31, support through hole; 21, induction device; 11, circular through hole; 22, connecting line; 5, T-shaped oil chamber; 321, boss; 322, pressure ring; 331, annular protrusion; 121, connecting ring; 12, inclined surface; 6, sealing ring; 7, oil.

Implementation

The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and/or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and/or combinations thereof.

It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, the singular forms "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise.

It should be further understood that the terms "and, or" used in this application specification and the appended claims refer to any combination and all possible combinations of one or more of the associated listed items, and include these combinations.

The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

The present application discloses a thin film type high-precision sensor, as shown in FIGS. 1 to 6, comprising a base plate 1, a tube seat 2, an annular support 3 and a diaphragm 4; the annular support 3 is provided with a support groove on the side facing the base plate 1, and the annular support 3 is provided with a support through hole 31 on the side away from the base plate 1; the annular support 3 is fixedly connected to the edge of the base plate 1; the tube seat 2 is provided with a sensing device 21, the tube seat 2 is assembled in the support groove, and the side surface of the tube seat 2 provided with the sensing device 21 faces the support through hole 31, and the sensing device 21 extends into the support through hole 31; a circular through hole 11 is provided on the bottom plate 1, and a plurality of connecting wires 22 are provided on a side of the tube seat 2 away from the induction device 21, and the connecting wires 22 all pass through the circular through hole 11 and extend outward; the diaphragm 4 is covered and arranged on a side surface of the annular support 3 where the support through hole 31 is provided, the edge of the diaphragm 4 is fixedly connected to the edge of the top surface of the annular support 3, and a gap is formed between the diaphragm 4 and the top surface of the annular support 3, the gap and the support through hole 31 are combined into a T-shaped oil chamber 5, oil is injected into the T-shaped oil chamber 5, and the diaphragm 4 is a flexible diaphragm 4.

A support groove is provided in the annular support 3. When the pipe seat 2 is assembled in the support groove, the top edge of the pipe seat 2 abuts against the bottom surface of the support groove. The induction device 21 provided on the pipe seat 2 extends into the support through hole 31. The connecting wire 22 provided on the pipe seat 2 penetrates the circular through hole 11 provided on the bottom plate 1 and extends outward. The diaphragm 4 is provided to cover the top surface of the annular support 3. A narrow gap is formed between the diaphragm 4 and the top surface of the annular support 3. The gap is filled with oil. The gap and the support through hole 31 are combined into a T-shaped oil chamber 5. The diaphragm 4 is a flexible diaphragm 4 with flexibility. By setting a T-shaped oil cavity 5, the volume of the oil in the oil cavity can be effectively reduced. The coefficient of thermal expansion of the oil is fixed, so the total volume of the original oil is reduced, and the expansion volume is also reduced accordingly. At the same time, the diaphragm 4 is also set as a flexible diaphragm 4. The area corresponding to the diaphragm 4 and the gap is large, which can effectively share the expansion force generated by the expansion of the oil. Through this combined setting structure, the volume of the oil in the oil cavity can be effectively reduced to increase the anti-expansion ability, and the diaphragm 4 can be prevented from being deformed by heat due to oil expansion, thereby improving the reliability of the sensor during use. Setting the diaphragm 4 as a flexible diaphragm 4 can reduce the loss when external pressure is transmitted, that is, it can increase the sensitivity of the sensor for sensing. The edges of the bottom plate 1 and the bottom plate 1 can be fixedly connected by welding or bonding.

In a specific embodiment, as shown in Figures 1 and 2, the top edge of the annular support 3 protrudes upward to form a boss 321, the lower side surface of the diaphragm 4 is fixedly connected to the upper end surface of the boss 321, and the lower end surface of the pressure ring 322 is fixedly connected to the edge of the diaphragm 4.

In a specific setting structure, an annular boss 321 protruding upward can be set on the top edge of the annular support 3, and the lower end surface of the diaphragm 4 is fixedly connected to the upper end surface of the boss 321. At the same time, in order to improve the tensile resistance of the diaphragm 4, a pressure ring 322 can be set on the upper end surface of the diaphragm 4. The outer diameter of the pressure ring 322 is equal to the outer diameter of the annular boss 321, and the inner diameter of the pressure ring 322 is equal to the inner diameter of the annular boss 321. The lower end surface of the pressure ring 322 is fixedly connected to the edge of the diaphragm 4, thereby greatly improving the stability of the diaphragm 4. The diaphragm 4 and the boss 321, as well as the boss 321 and the pressure ring 322 can be fixedly connected by welding or bonding.

In a specific embodiment, as shown in FIG. 3 and FIG. 4 , the top edge of the annular support 3 protrudes upward to form an annular protrusion 331 , and the outer edge of the diaphragm 4 is bent downward and fixedly connected to the top and side surfaces of the annular protrusion 331 .

In another specific setting structure, an annular protrusion 331 can be set on the top edge of the annular support 3, and the height of the annular protrusion 331 is equal to the height of the gap; the outer diameter of the annular protrusion 331 is smaller than the diameter of the outer wall of the annular support 3, and the outer edge of the diaphragm 4 is set to be bent downward, and the bent portion of the diaphragm 4 is fixedly connected to the top and side surfaces of the annular protrusion 331. This fixed connection method can effectively improve the stability of fixing the diaphragm 4. The diaphragm 4 and the top and side surfaces of the annular protrusion 331 can be fixedly connected by welding or bonding.

In a specific embodiment, as shown in FIG. 5 and FIG. 6 , the bottom edge of the diaphragm 4 extends downward to form a connecting ring 121 , and the inner side wall of the connecting ring 121 is fixedly connected to the top edge and the outer side wall of the annular support 3 .

In other structural designs, the bottom edge of the diaphragm 4 may be extended downward to form a connecting ring 121, and the inner side wall of the connecting ring 121 is fixedly connected to the top edge and outer side wall of the annular support 3. This fixed connection method increases the fixed contact area, thereby further improving the stability of fixing the diaphragm 4. The inner side wall of the connecting ring 121 and the annular support 3 may be fixedly connected by welding or bonding.

In a specific embodiment, the ratio of the diameter of the circular area covered by the diaphragm 4 on the gap to the thickness is 20-150. Specifically, the diameter of the circular area covered by the diaphragm 4 on the gap is 3-30 mm.

Further, the ratio of the diameter to the thickness of the circular area covering the gap can be set to 20-150. Relatively speaking, the greater the thickness of the diaphragm 4, the greater the diameter of the circular area corresponding to the diaphragm 4; the smaller the thickness of the diaphragm 4, the smaller the diameter of the circular area corresponding to the diaphragm 4. Further, the diameter of the circular area of the diaphragm 4 can be set to 3-30mm, and the thickness of the circular area of the diaphragm 4 can be set to 0.03-0.6mm. Further, the spacing between the top surface of the diaphragm 4 and the top surface of the bottom plate 1 can be set to 1-10mm.

In a specific embodiment, an inclined surface 12 is provided at the connection between the edge of the diaphragm 4 and the annular support 3 , and the cross section of the gap is a trapezoidal gap corresponding to the inclined surface 12 .

Furthermore, an inclined surface 12 may be provided on the edge of the diaphragm 4 facing the annular support 3. The specific configuration structure of the inclined surface 12 is shown in FIG. 7. The cross section of the gap formed is a corresponding trapezoidal gap. The trapezoidal gap can ensure that when the oil expands due to heat, the circular area in the center of the diaphragm 4 is elastically deformed upward as a whole, thereby preventing the diaphragm 4 from locally producing a large elastic deformation and causing wear or deformation (non-elastic deformation), thereby effectively improving the anti-expansion capability of the diaphragm 4. Specifically, the angle between the inclined surface 12 and the horizontal plane is 8-35°, so as to further increase the anti-expansion capability of the diaphragm 4.

In a specific embodiment, the diaphragm 4 is a metal diaphragm 4. The height of the gap is 1.2-3 times the thickness of the diaphragm 4. The diaphragm 4 can be a metal diaphragm 4, such as an aluminum diaphragm, a copper diaphragm, a stainless steel diaphragm, etc. with good ductility. Further, in order to allow the oil contained in the gap to conduct vibration while minimizing the overall volume of the T-shaped oil chamber 5, the height of the gap can be set to 1.2-3 times the thickness of the diaphragm 4.

In a specific embodiment, a sealing ring 6 is further provided between the tube seat 2 and the bottom plate 1, and the inner diameter of the sealing ring 6 is larger than the inner diameter of the circular through hole 11 on the bottom plate 1. Further, in order to improve the stability of the abutment between the tube seat 2 and the bottom surface of the support groove, a sealing ring 6 can be provided between the tube seat 2 and the bottom plate 1, and the sealing ring 6 is an annular structure, and the inner diameter of the sealing ring 6 is larger than the inner diameter of the circular through hole 11 on the bottom plate 1. The specific setting structure of the sealing ring 6 is shown in Figures 2, 4 and 6.

The present application discloses a thin-film type high-precision sensor, which includes a base plate, a tube seat, an annular support and a diaphragm; a support groove is provided on the side of the annular support facing the base plate, and a support through hole is provided on the side of the annular support away from the base plate; the annular support is fixedly connected to the edge of the base plate; a sensing device is provided on the tube seat, the tube seat is assembled in the support groove, and the side of the tube seat where the sensing device is provided faces the support through hole, and the sensing device extends into the support through hole; a circular through hole is provided on the base plate, and a plurality of connecting wires are provided on the side of the tube seat away from the sensing device, and the connecting wires all pass through the circular through hole and extend outward; the diaphragm is covered and arranged on one side of the annular support where the support through hole is provided. The above-mentioned high-precision sensor, by forming a T-shaped oil cavity and setting the diaphragm as a flexible diaphragm, effectively reduces the volume of oil in the oil cavity to increase the anti-expansion ability, thereby improving the reliability of the sensor.

The above is only a specific implementation method of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims (20)

A thin-film high-precision sensor, comprising a base plate, a tube seat, an annular support and a diaphragm; The annular support is provided with a support groove on one side facing the bottom plate, and a support through hole is provided on the side of the annular support away from the bottom plate; the annular support is fixedly connected to the edge of the bottom plate; The tube base is provided with a sensing device, the tube base is assembled in the support groove, and a side surface of the tube base provided with the sensing device faces the support through hole, and the sensing device extends into the support through hole; A circular through hole is provided on the bottom plate, and a plurality of connecting wires are provided on a side of the tube holder away from the induction device, and the connecting wires all pass through the circular through hole and extend outward; The diaphragm is covered on a side surface of the annular support where the support through hole is provided, the edge of the diaphragm is fixedly connected to the edge of the top surface of the annular support, and a gap is formed between the diaphragm and the top surface of the annular support, the gap is combined with the support through hole to form a T-shaped oil chamber, oil is injected into the T-shaped oil chamber, and the diaphragm is a flexible diaphragm. According to claim 1, the thin film type high-precision sensor, wherein the top edge of the annular support protrudes upward to form a boss, the lower side surface of the diaphragm is fixedly connected to the upper end surface of the boss, and the lower end surface of the pressure ring is fixedly connected to the edge of the diaphragm. According to claim 1, the thin film type high-precision sensor, wherein the top edge of the annular support protrudes upward to form an annular protrusion, and the outer edge of the diaphragm is bent downward and fixedly connected to the top surface and side surface of the annular protrusion. According to claim 1, the thin film type high-precision sensor, wherein the bottom edge of the diaphragm extends downward to form a connecting ring, and the inner side wall of the connecting ring is fixedly connected to the top edge and outer side wall of the annular support. According to claim 1, the thin film type high-precision sensor, wherein the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150. According to claim 2, the thin film type high-precision sensor, wherein the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150. According to claim 3, the thin film type high-precision sensor, wherein the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150. According to claim 4, the thin film type high-precision sensor, wherein the ratio of the diameter to the thickness of the circular area covered by the diaphragm on the gap is 20-150. According to claim 5, the thin film type high-precision sensor, wherein the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm. According to claim 6, the thin film type high-precision sensor, wherein the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm. According to claim 7, the thin film type high-precision sensor, wherein the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm. According to claim 8, the thin film type high-precision sensor, wherein the diameter of the circular area covered by the diaphragm on the gap is 3-30 mm. According to claim 1, a thin-film high-precision sensor is provided with an inclined surface at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface. According to claim 2, a thin-film high-precision sensor is provided with an inclined surface at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface. According to claim 3, a thin-film high-precision sensor is provided with an inclined surface at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface. According to claim 4, a thin-film high-precision sensor is provided with an inclined surface at the connection between the edge of the diaphragm and the annular support, and the cross-section of the gap is a trapezoidal gap corresponding to the inclined surface. According to the thin film type high-precision sensor according to claim 1, wherein the diaphragm is a metal diaphragm. According to the thin film type high-precision sensor according to claim 5, the height of the gap is 1.2-3 times the thickness of the diaphragm. According to the thin film type high-precision sensor according to claim 6, the height of the gap is 1.2-3 times the thickness of the diaphragm. The thin-film high-precision sensor according to claim 1 is characterized in that a sealing ring is provided between the tube seat and the base plate, and the inner diameter of the sealing ring is larger than the inner diameter of the circular through hole on the base plate.