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WO2025134809A1 - Dispositif de régulation de liquide - Google Patents

Dispositif de régulation de liquide Download PDF

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Publication number
WO2025134809A1
WO2025134809A1 PCT/JP2024/043182 JP2024043182W WO2025134809A1 WO 2025134809 A1 WO2025134809 A1 WO 2025134809A1 JP 2024043182 W JP2024043182 W JP 2024043182W WO 2025134809 A1 WO2025134809 A1 WO 2025134809A1
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WO
WIPO (PCT)
Prior art keywords
diaphragm
piezoelectric body
control device
fluid control
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/043182
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English (en)
Japanese (ja)
Inventor
雅章 藤崎
大輔 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2025134809A1 publication Critical patent/WO2025134809A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive

Definitions

  • the present invention relates to a fluid control device equipped with an actuator.
  • the housing is placed on the outer side of the diaphragm, which increases the outer diameter of the actuator.
  • the present invention aims to provide a fluid control device that prevents the sides of the piezoelectric body from coming into contact with obstacles when dropped or transported, and that can reduce the outer diameter.
  • a fluid control device comprises an actuator and an annular frame that fixes at least a portion of the outer periphery of the actuator.
  • the actuator comprises a piezoelectric body having a first main surface and a second main surface, and a vibration plate connected to the first main surface of the piezoelectric body.
  • the frame is disposed on the second main surface.
  • the outer diameter of the vibration plate and the outer diameter of the piezoelectric body are larger than the inner diameter of the frame, and the outer diameter of the vibration plate or the outer diameter of the frame is larger than the outer diameter of the piezoelectric body.
  • the outer diameter of the vibration plate and the outer diameter of the piezoelectric body are larger than the inner diameter of the frame body, so a pump chamber can be formed on the side surface on the inner circumference of the frame body. Therefore, the fluid control device in this embodiment can form a pump chamber without placing a housing further outward from the piezoelectric body and vibration plate.
  • the outer diameters of the members connected to the first main surface and the second main surface of the piezoelectric body are larger than the outer diameter of the piezoelectric body, obstacles and the like do not come into contact with the side surface of the piezoelectric element when it is dropped or transported.
  • This invention prevents the sides of the piezoelectric body from coming into contact with obstacles when dropped or transported, and allows the outer diameter to be reduced.
  • FIG. 1 is a cross-sectional view of a fluid control device 1.
  • FIG. FIG. FIG. FIG. 13 is a cross-sectional view of the fluid control device 1 when a flat plate 83 is attached to the lower surface of the frame 17.
  • FIG. FIG. 1 is a cross-sectional view of a fluid control device 1A according to a first modified example.
  • 2 is a bottom view of the piezoelectric body 10 in the fluid control device 1A.
  • FIG. 4 is a cross-sectional view of the vibration plate 11 in the fluid control device 1A during bending vibration.
  • FIG. FIG. 11 is a cross-sectional view of a fluid control device 1B according to a modified example 2.
  • FIG. 4 is a cross-sectional view of a fluid control device 2 according to a second embodiment.
  • FIG. 4 is a cross-sectional view of the fluid control device 2 during bending vibration.
  • FIG. 1 is a diagram showing the relationship between the distance from the neutral plane of a principal surface (the principal surface away from the neutral plane) of a piezoelectric body and stress/amplitude (stress per amplitude).
  • FIG. 13 is a diagram showing the relationship between the distance from the neutral plane of the main surface of a piezoelectric body and the amplitude.
  • FIG. 13 is a diagram showing the relationship between amplitude and radial stress at the center of a piezoelectric body.
  • FIG. 13 is a cross-sectional view showing the structure of a bimorph modified example 1.
  • FIG. 11 is a cross-sectional view showing the structure of a bimorph modified example 2.
  • FIG. 1 is a diagram showing the relationship between the distance from the neutral plane of a principal surface (the principal surface away from the neutral plane) of a piezoelectric body and stress/amplitude (stress per amplitude).
  • FIG. 11 is a cross-sectional view showing the structure of a modified example 3 of the bimorph.
  • FIG. 13 is an exploded perspective view of a fluid control device 2D according to a fourth modified example.
  • 1 is a cross-sectional view showing a portion of a fluid control device 2D below a first diaphragm 11A.
  • FIG. 1 is a cross-sectional view showing a portion of a fluid control device 2D below a first diaphragm 11A.
  • FIG. FIG. 2 is a plan view of the fluid control device 2D.
  • FIG. 2 is a perspective view of a fluid control device 2D.
  • FIG. 11 is a cross-sectional view showing the structure of another modified example of the fluid control device.
  • FIG. 25 is a partially enlarged view of FIG. 24 .
  • FIG. 1 is a cross-sectional view of a fluid control device 1 according to a first embodiment of the present invention.
  • the fluid control device 1 includes a piezoelectric body 10, a vibration plate 11, a frame body 12, a fillet 13, a first electrode 14, a second electrode 15, and a frame body 17.
  • FIG. 2 is a plan view of the diaphragm 11
  • FIG. 3 is a plan view of the piezoelectric body 10
  • FIG. 4 is a plan view of the frame body 12
  • FIG. 5 is a plan view of the frame body 17.
  • the cross-sectional view of FIG. 1 is a cross-sectional view of line A-A shown in FIG. 2, FIG. 3, FIG. 4, and FIG. 5.
  • the piezoelectric body 10 is made of, for example, lead zirconate titanate ceramics.
  • the piezoelectric body 10 has a thin disk shape.
  • a first electrode 14 is formed on the lower surface (first main surface) of the piezoelectric body 10 by, for example, sputtering, and a second electrode 15 is formed on the upper surface (second main surface) by, for example, sputtering.
  • the piezoelectric body 10 is distorted by a driving voltage applied to the first electrode 14 and the second electrode 15.
  • the outer diameter of the piezoelectric body 10 is larger than the outer diameters of the first electrode 14 and the second electrode 15 in a plan view.
  • This configuration is not essential to the present invention, but this configuration prevents the electrodes (first electrode 14 and second electrode 15) from protruding from the side surface of the piezoelectric body 10. Therefore, when the electrodes are formed, they do not wrap around the side surface of the piezoelectric body 10, and short circuits can be suppressed.
  • the diaphragm 11 is attached to the first electrode 14 with an adhesive.
  • the adhesive contains a plurality of conductive fillers.
  • the plurality of conductive fillers become conductive to each other when the thickness of the adhesive is equal to or less than a predetermined value.
  • the adhesive becomes conductive when the thickness is equal to or less than the predetermined thickness, and becomes insulating when the thickness exceeds the predetermined thickness.
  • the adhesive in the portion sandwiched between the diaphragm 11 and the first electrode 14 is equal to or less than the predetermined thickness and is conductive.
  • the vibration plate 11 is disk-shaped.
  • the outer diameter of the piezoelectric body 10 is smaller than the outer diameter of the vibration plate 11 in a plan view.
  • a frame 17 is attached to the underside of the diaphragm 11 with an adhesive.
  • the diaphragm 11 and frame 17 are made of a conductive material.
  • a drive circuit (not shown) is connected to the frame 17. This allows a drive voltage to be applied to the diaphragm 11 via the frame 17.
  • the frame 12 is attached to the second electrode 15 with an adhesive.
  • the frame 12 is made of a conductive material.
  • the adhesive in the portion sandwiched between the frame 12 and the second electrode 15 is less than a predetermined thickness and is conductive.
  • a drive circuit (not shown) is connected to the frame 12. This allows a drive voltage to be applied via the frame 12.
  • a drive voltage is applied to the first electrode 14 and the second electrode 15.
  • the diaphragm 11 is designed to vibrate at a predetermined resonant frequency.
  • a drive voltage with a frequency that matches the resonant frequency is applied to the first electrode 14 and the second electrode 15.
  • the piezoelectric body 10 when a driving voltage is applied that causes the piezoelectric body 10 to contract in a direction parallel to the main surface, the upper surface of the vibration plate 11 contracts and the lower surface of the vibration plate 11 expands. Therefore, the lower surface of the vibration plate 11 is bent and deformed in a convex shape toward the lower surface. Also, if the piezoelectric body 10 expands in a direction parallel to the main surface, the lower surface of the vibration plate 11 is bent and deformed in a concave shape toward the upper surface. As a result, the vibration plate 11 vibrates in a rotationally symmetrical (concentric) shape from the center to the periphery. Therefore, the piezoelectric body 10 and the vibration plate 11 function as an actuator of a piezoelectric unimorph vibrator.
  • the frame body 12 and the frame body 17 fix a part or the entire outer periphery of the actuator.
  • the frame body 12 and the frame body 17 may be annular and arranged on the entire outer periphery of the actuator in a plan view, or may be arranged on only a part of the actuator in a plan view.
  • the first main surface as an actuator is the lower surface of the vibration plate 11, and the second main surface corresponds to the upper surface of the piezoelectric body 10. If the vibration plate 11 is placed on the upper surface of the piezoelectric body 10, the first main surface of the actuator is the lower surface of the piezoelectric body 10, and the second main surface corresponds to the upper surface of the vibration plate 11.
  • FIG. 6 is a cross-sectional view of the fluid control device 1 when a flat plate 83 is attached to the lower surface of the frame 17.
  • the flat plate 83 is a plate-like member having a circular shape in plan view.
  • the flat plate 83 has a through hole at the center in plan view.
  • the flat plate 83 is arranged away from the vibration plate 11 by the frame 17.
  • a pump chamber is formed in the space surrounded by the inner peripheral side of the frame 17, the lower surface of the vibration plate 11, and the upper surface of the flat plate 83.
  • the vibration plate 11 vibrates, the flat plate 83 vibrates due to the pressure fluctuation in the pump chamber caused by the vibration of the vibration plate 11.
  • the vibration phase of the flat plate 83 lags behind the vibration phase of the vibration plate 11. This effectively increases the thickness fluctuation of the gap space between the flat plate 83 and the vibration plate 11, further improving the pump's performance.
  • the outer diameter of the vibration plate 11 and the outer diameter of the piezoelectric body 10 are larger than the inner diameter of the frame body 17, so that the inner peripheral side of the frame body 17 can form part of the housing of the fluid control device 1. Also, in the fluid control device 1, the outer diameter of the vibration plate 11 and the outer diameter of the piezoelectric body 10 are larger than the inner diameter of the frame body 12, so that the inner peripheral side of the frame body 12 can form part of the housing of the fluid control device 1. Therefore, the outer diameter of the entire device is smaller in the fluid control device 1 of this embodiment than in a structure in which the housing is disposed on the outer side of the vibration plate as in Patent Document 1 (JP Patent Publication 2009-293507).
  • the outer diameters of the components (vibration plate 11 and frame 12) connected to the first and second main surfaces of the piezoelectric body 10 in the fluid control device 1 of this embodiment are larger than the outer diameter of the piezoelectric body 10. Therefore, the fluid control device 1 of this embodiment prevents obstacles from coming into contact with the sides of the piezoelectric body when it is dropped or transported.
  • the fluid control device 1 of this embodiment can reduce the outer diameter without the side of the piezoelectric body coming into contact with obstacles when dropped or transported.
  • fillets 13 are formed between the main surface of the piezoelectric body 10 and the main surface of the vibration plate 11, between the main surface of the piezoelectric body 10 and the side of the frame body 12, and between the main surface of the vibration plate 11 and the side of the frame body 17.
  • the fillets 13 are formed by the overflow of the adhesive described above.
  • the fillets 13 in each part are at least a predetermined thickness and therefore have insulating properties.
  • the fillets 13 can prevent the peripheral parts of the frame body 12 and the vibration plate 11 from coming into contact and causing a short circuit.
  • FIG. 7 is a cross-sectional view of a fluid control device 1A according to the first modified example.
  • the same components as those in FIG. 1 are given the same reference numerals and will not be described.
  • FIG. 8 is a bottom view of the piezoelectric body 10 in the fluid control device 1A.
  • the electrode arranged on the lower surface is divided into an inner electrode 14A and an outer electrode 14B in a plan view.
  • FIG. 9 is a cross-sectional view of the vibration plate 11 in the fluid control device 1A during bending vibration.
  • the inner circumferential portion of the piezoelectric body 10 expands in a direction parallel to the main surface as shown in FIG. 9, the inner circumferential portion of the upper surface of the vibration plate 11 bends and deforms in a convex shape toward the upper surface.
  • the outer circumferential portion of the upper surface of the vibration plate 11 tries to bend and deform in a convex shape toward the lower surface, opposite to the inner circumferential portion.
  • the piezoelectric body 10 will apply a force in the outer circumferential portion in the opposite direction to the bending direction of the upper surface of the vibration plate 11. Also, although not shown, when the inner circumferential portion of the piezoelectric body 10 contracts in a direction parallel to the main surface, the inner circumferential portion of the upper surface of the vibration plate 11 bends and deforms in a concave shape toward the lower surface, and the outer circumferential portion of the upper surface of the vibration plate 11 tries to bend and deform in a convex shape toward the upper surface, opposite to the inner circumferential portion.
  • the piezoelectric body 10 would exert a force on the outer periphery in the opposite direction to the bending direction of the top surface of the diaphragm 11.
  • the polarization directions of the inner and outer circumferential portions of the piezoelectric body 10 are opposite. Therefore, when the inner circumferential portion of the piezoelectric body 10 expands in a direction parallel to the main surface, the outer circumferential portion of the piezoelectric body 10 contracts in a direction parallel to the main surface. Also, when the inner circumferential portion of the piezoelectric body 10 contracts in a direction parallel to the main surface, the outer circumferential portion of the piezoelectric body 10 expands in a direction parallel to the main surface.
  • the bending direction of the diaphragm and the direction of the force applied to the diaphragm by the expansion and contraction of the piezoelectric body 10 are consistent between the inner and outer periphery.
  • FIG. 10 is a cross-sectional view of a fluid control device 1B according to modification 2. Configurations common to those in FIG. 7 are given the same reference numerals and will not be described.
  • a first vibration plate 11A is attached to the bottom surface (first main surface) of the piezoelectric body 10 with an adhesive
  • a second vibration plate 11B is attached to the top surface (second main surface) of the piezoelectric body 10 with an adhesive
  • a frame 12 is attached to the top surface of the second vibration plate 11B with an adhesive.
  • the second vibration plate 11B is thinner than the first vibration plate 11A, making it more susceptible to deformation.
  • the center of the second vibration plate 11B bends and deforms in a convex shape along the upper surface direction.
  • a drive voltage is applied that contracts the inner peripheral portion of the piezoelectric body 10 in a direction parallel to the main surface
  • the center of the second vibration plate 11B bends and deforms in a concave shape along the lower surface direction.
  • the member that is joined to the frame body 12 is the second vibration plate 11B. Therefore, the mechanical stress that occurs at the joining position with the frame body 12 mainly affects the second vibration plate 11B, and the mechanical stress on the piezoelectric body 10 is reduced. In other words, in the fluid control device 1B, the mechanical stress on the piezoelectric body 10 due to deformation can be reduced, so cracks in the piezoelectric body 10 can be suppressed.
  • FIG. 11 is a cross-sectional view of a fluid control device 2 according to a second embodiment.
  • the same components as those of the fluid control device 1B shown in FIG. 10 are given the same reference numerals, and the description thereof will be omitted.
  • the fluid control device 2 includes a first piezoelectric body 10A, a first vibration plate 11A, a second vibration plate 11B, a frame 12, a fillet 13, a first electrode 14, a second inner electrode 15A, a second outer electrode 15B, a second piezoelectric body 10B, a third vibration plate 11C, a third electrode 151, a fourth inner electrode 152A, a fourth outer electrode 152B, and a frame 17.
  • the first piezoelectric body 10A has the same configuration and function as the piezoelectric body 10 of the first embodiment.
  • the second piezoelectric body 10B has the same structure as the first piezoelectric body 10A.
  • the second piezoelectric body 10B has a third principal surface and a fourth principal surface.
  • a third electrode 151 is formed on the third principal surface of the second piezoelectric body 10B by, for example, sputtering, and a fourth inner electrode 152A and a fourth outer electrode 152B are formed on the fourth principal surface by, for example, sputtering.
  • a second vibration plate 11B is attached to the fourth inner electrode 152A and the fourth outer electrode 152B by an adhesive.
  • the second diaphragm 11B is attached to the third electrode 151 with an adhesive.
  • the third diaphragm 11C is attached to the fourth inner electrode 152A and the fourth outer electrode 152B with an adhesive.
  • Fillets 13 are formed between the main surface of the first vibration plate 11A and the side of the frame 17, between the main surface of the first piezoelectric body 10A and the main surface of the first vibration plate 11A, between the main surface of the first piezoelectric body 10A and the main surface of the second vibration plate 11B, between the main surface of the second piezoelectric body 10B and the main surface of the second vibration plate 11B, between the main surface of the second piezoelectric body 10B and the main surface of the third vibration plate 11C, and between the main surface of the third vibration plate 11C and the side of the frame 17.
  • the outer diameters of the first piezoelectric body 10A and the second piezoelectric body 10B are smaller than the outer diameters of the first vibration plate 11A, the second vibration plate 11B, and the third vibration plate 11C in a plan view.
  • the first diaphragm 11A, the second diaphragm 11B, and the third diaphragm 11C all have the same shape and the same outer diameter.
  • the thickness of the first diaphragm 11A, the second diaphragm 11B, and the third diaphragm 11C are also the same.
  • the second diaphragm 11B may be thinner or thicker than the first diaphragm 11A and the third diaphragm 11C.
  • the outer diameter of the first vibration plate 11A, the outer diameter of the third vibration plate 11C, the outer diameter of the first piezoelectric body 10A, and the outer diameter of the second piezoelectric body 10B are larger than the inner diameters of the frame body 12 and the frame body 17. This allows the fluid control device 2 to form a pump chamber on the inner peripheral side of the frame body 12 or the frame body 17 and the lower surface of the first vibration plate 11A or the upper surface of the third vibration plate 11C.
  • FIGS. 13, 14, and 15 are the stress that occurs in the radial direction (planar direction) from the main surface of the piezoelectric body at the center position when the piezoelectric body is viewed in a plane.
  • the unimorph shown in FIGS. 13, 14, and 15 corresponds to the structure of the fluid control device 1B, and the bimorph corresponds to the structure of the fluid control device 2. In both cases, the thickness of the diaphragm is adjusted so that the resonant frequency of the actuator is constant.
  • FIG. 22 is a plan view of the fluid control device 2D
  • FIG. 23 is a perspective view of the fluid control device 2D.
  • the cover member 85 is disposed on the bottom surface of the fluid control device 2D.
  • the cover member 85 constitutes part of the housing of the fluid control device 2D.
  • the cover member 85 prevents the components of the fluid control device 2D from coming into direct contact with external objects when the fluid control device 2D is dropped or transported. As a result, the cover member 85 can prevent damage to the fluid control device 2D.
  • the cap 90 faces the third vibration plate 11C on the opposite side to the flat plate 83.
  • the cap 90 is placed on the top surface of the fluid control device 2D.
  • the cap 90 prevents the third vibration plate 11C from coming into direct contact with external objects when the fluid control device 2D is dropped or transported. This makes it possible for the cap 90 to prevent damage to the fluid control device 2D.
  • the cap 90 has an opening 90B at its center. In plan view, the opening 90B overlaps with the center of the third diaphragm 11C. This prevents the top surface of the third diaphragm 11C from coming into contact with the cap 90 when the third diaphragm 11C is bent in a convex shape toward the top surface during operation. In other words, the cap 90 does not impede the vibration of the third diaphragm 11C, thereby preventing a decrease in performance as a pump.
  • the first vibration plate 11A, the second vibration plate 11B, and the third vibration plate 11C each have a first outer peripheral terminal 110A, 111A, a second outer peripheral terminal 110B, 111B, and a third outer peripheral terminal 110C, 111C that protrude from the outer periphery.
  • a drive circuit (not shown) is connected to the second outer terminal 111B and the frame 12.
  • the frame 12 has a bent terminal 120
  • the frame 17 has a bent terminal 170.
  • the first diaphragm 11A and the third diaphragm 11C are electrically connected via the bent terminal 170 and the bent terminal 120, respectively. This allows a drive voltage to be applied to the first diaphragm 11A, the second diaphragm 11B, and the third diaphragm 11C.
  • the first outer terminals 110A, 111A, the second outer terminals 110B, 111B, and the third outer terminals 110C, 111C do not overlap when viewed in a plan view. This prevents the first outer terminals 110A, 111A, the second outer terminals 110B, 111B, and the third outer terminals 110C, 111C from contacting each other, thereby preventing short circuits between the terminals.
  • the outer diameter of the cover member 85 which is the housing of the fluid control device in a plan view, is located outside the outermost positions of the first outer terminals 110A, 111A, the second outer terminals 110B, 111B, and the third outer terminals 110C, 111C.
  • the cover member 85 can suppress short circuits between the terminals due to contact with and deformation of the first outer terminals 110A, 111A, the second outer terminals 110B, 111B, and the third outer terminals 110C, 111C in the event of a drop impact, etc.
  • the bent terminals 120 and 170 can shorten the path of the terminals leading to the outside, which can suppress noise caused by unnecessary vibrations and deterioration of pump performance caused by vibration leakage.
  • the cap has a protruding portion 90A that protrudes outward in a plan view.
  • the bent terminals 120 and 170 are pressed in the vertical direction by the protruding portion 90A.
  • the vertical reaction force generated by the bent terminals 120 and 170 is pressed by the protruding portion 90A. This improves the strength of the joint.
  • FIG. 24 is a cross-sectional view showing the structure of another modified example of a fluid control device.
  • FIG. 25 is a partially enlarged view of FIG. 24.
  • the fluid control device 1E according to the fourth modification example differs from the fluid control device 1A shown in FIG. 7 in that it includes a circuit board and in the shape of the electrode film formed on the piezoelectric body 10.
  • the rest of the configuration of the fluid control device 1E is the same as that of the fluid control device 1A, and a description of similar parts will be omitted.
  • the fluid control device 1E includes a piezoelectric body 10, a frame body 12, a fillet 13, a frame body 17, and a circuit board 18.
  • the piezoelectric body 10 includes a main surface F101, a main surface F102, and a side surface F103.
  • An inner electrode 14EA and an outer electrode 14EB are formed on the main surface F101.
  • the outer electrode 14EB is shaped so that it does not reach the side surface F103.
  • a second electrode 15E is formed on the main surface F102 and the side surface F103.
  • the second electrode 15E is shaped to reach the corner where the side surface F103 and the main surface F101 intersect.
  • the circuit board 18 is mainly composed of a laminate of insulator layers 181 and 182.
  • An electrode pattern D181 is formed between the insulator layers 181 and 182.
  • An electrode pattern D1821 and an electrode pattern D1822 are formed on the surface of the insulator layer 182 opposite the insulator layer 181 side.
  • the electrode patterns D1821 and D1822 are spaced apart from each other.
  • the electrode pattern D1822 is electrically connected to the electrode pattern D181 through a plurality of via electrodes VIA18 formed in the insulator layer 182.
  • the piezoelectric body 10 is mounted on the circuit board 18.
  • the inner electrode 14EA and the outer electrode 14EB of the piezoelectric body 10 are electrically connected to the electrode pattern D1822.
  • the second electrode 15E of the piezoelectric body 10 is electrically connected to the electrode pattern D1821.
  • an AC voltage is applied to the inner electrode 14EA and the outer electrode 14EB of the piezoelectric body 10 through the electrode pattern D1822 of the circuit board 18, the multiple via electrodes VIA18, and the electrode pattern D181.
  • An AC voltage is applied to the second electrode 15E of the piezoelectric body 10 through the electrode pattern D1821.
  • the circuit board 18 is a flat plate having a predetermined rigidity (elasticity). Therefore, the circuit board 18 functions as a vibration plate. This allows the fluid control device 1E to realize an actuator.
  • the fillet 13 covers the electrode pattern D1821 of the circuit board 18 and the side surface F103 of the side surface F103 of the piezoelectric body 10. This makes it possible to prevent a short circuit between the electrode pattern D1821 and the frame body 12.
  • the fluid control device 1E can achieve the same effects as the fluid control device 1A. Furthermore, the fluid control device 1E uses a circuit board that applies an AC voltage to the inner electrode 14EA, the outer electrode 14EB, and the second electrode 15E of the piezoelectric body 10 as a diaphragm. This allows the structure of the fluid control device 1E to be simplified, including the mechanism for applying the AC voltage.
  • the inner peripheral surface of the frame is circular in plan view, but this is not limited to the above.
  • the inner peripheral surface of the frame may be elliptical or regular polygonal in plan view.
  • the inner diameter indicates the major axis, and in the case of a regular polygon, the inner diameter corresponds to the length of the diagonal.
  • the outer shape of the piezoelectric body and the diaphragm is circular in plan view, but this is not limited to this.
  • the outer diameter corresponds to the shortest distance from the center (the center of the shape of the inner circumferential surface of the frame when viewed in plan) when the frame is placed on the actuator composed of the piezoelectric body and the diaphragm.
  • Fluid control device 10 Piezoelectric body 10A: First piezoelectric body 10B: Second piezoelectric body 11: Vibration plate 11A: First vibration plate 11B: Second vibration plate 11C: Third vibration plate 12: Frame 13: Fillet 14: First electrode 14A, 14EA: Inner electrode 14B, 14EB: Outer electrode 15: Second electrode 15A: Second inner electrode 15B: Second outer electrode 17: Frame 18: Circuit board 81: Joint member 82: Film valve 83: Flat plate 84: Flow path forming member 85: Cover member 90: Cap 90A: Protrusion 90B: Opening 110A, 111A: First outer peripheral terminal 110B, 111B: Second outer peripheral terminal 110C, 111C: Third outer peripheral terminal 120: Bent terminal 151: Third electrode 152A: Fourth inner peripheral electrode 152B: Fourth outer peripheral electrode 170: Bent terminals 181, 182: Insulator layers D1821, D1822: Electrode pattern VIA18: Vibration plate 11A: First vibration plate 11B: Second vibration plate 11C: Third vibration

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Un dispositif de régulation de fluide selon la présente invention comprend un actionneur et un cadre annulaire pour fixer au moins une partie de la périphérie externe de l'actionneur. L'actionneur comprend : un corps piézoélectrique qui a une première surface principale et une seconde surface principale ; et une plaque vibrante qui est reliée à la première surface principale du corps piézoélectrique. Le cadre est disposé sur la seconde surface principale. Le diamètre externe de la plaque vibrante et le diamètre externe du corps piézoélectrique sont supérieurs au diamètre interne du cadre, et le diamètre externe de la plaque vibrante ou le diamètre externe du cadre est supérieur au diamètre externe du corps piézoélectrique.
PCT/JP2024/043182 2023-12-21 2024-12-06 Dispositif de régulation de liquide Pending WO2025134809A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2023-215780 2023-12-21
JP2023215780 2023-12-21
JP2024204507 2024-11-25
JP2024-204507 2024-11-25

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WO2025134809A1 true WO2025134809A1 (fr) 2025-06-26

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02248671A (ja) * 1989-03-20 1990-10-04 Misuzu Erii:Kk 流体の定量圧送方法
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP2009097393A (ja) * 2007-10-16 2009-05-07 Murata Mfg Co Ltd 圧電マイクロブロア
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
US20190226471A1 (en) * 2018-01-22 2019-07-25 Microjet Technology Co., Ltd. Fluid system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02248671A (ja) * 1989-03-20 1990-10-04 Misuzu Erii:Kk 流体の定量圧送方法
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP2009097393A (ja) * 2007-10-16 2009-05-07 Murata Mfg Co Ltd 圧電マイクロブロア
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
US20190226471A1 (en) * 2018-01-22 2019-07-25 Microjet Technology Co., Ltd. Fluid system

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