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WO2025124967A1 - Procédé de compensation de décalage, procédé de fonctionnement d'un capteur de pression et capteur de pression - Google Patents

Procédé de compensation de décalage, procédé de fonctionnement d'un capteur de pression et capteur de pression Download PDF

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Publication number
WO2025124967A1
WO2025124967A1 PCT/EP2024/084307 EP2024084307W WO2025124967A1 WO 2025124967 A1 WO2025124967 A1 WO 2025124967A1 EP 2024084307 W EP2024084307 W EP 2024084307W WO 2025124967 A1 WO2025124967 A1 WO 2025124967A1
Authority
WO
WIPO (PCT)
Prior art keywords
acceleration
sensor element
offset
pressure
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/EP2024/084307
Other languages
German (de)
English (en)
Inventor
Sujaya Jayadevaiah Umesh
Alexander Schoenhals
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of WO2025124967A1 publication Critical patent/WO2025124967A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general

Definitions

  • the invention relates to a method for offset compensation of a signal offset in a measurement signal of a pressure sensor according to claim 1. Furthermore, the invention relates to a method for operating a pressure sensor and a pressure sensor.
  • DE 10 2011 077 686 A1 describes a pressure sensor comprising a housing enclosing a pressure chamber and a sensor element.
  • the pressure chamber can be pressurized from the outside, and the sensor element is sealed with a gel for protection.
  • the gravitational acceleration component can depend on the orientation of the sensor element to the gravitational acceleration direction.
  • the gravitational acceleration component can be equal to the gravitational acceleration if the orientation of the sensor element and the gravitational acceleration direction are parallel.
  • the gravitational acceleration component can be positive or negative, depending on whether the orientation of the sensor element is parallel or antiparallel to the gravitational acceleration direction.
  • the gravitational acceleration component can be zero if the orientation of the sensor element is at an angle of 90° to the gravitational acceleration.
  • Figure 2 A method for offset compensation in a specific embodiment of the invention.
  • Figure 3 A method for operating a pressure sensor in a specific embodiment of the invention.
  • the sensor element 12 with the sensor membrane converts an ambient pressure of the environment 20 of the pressure sensor 10 into an electrical signal.
  • the electronics unit 14 is preferably designed as an integrated circuit, in particular as an ASIC, and includes a memory unit on which retrievable calculation parameters are stored.
  • the electronics unit 14 can process the electrical signal of the sensor element 12, preferably convert it to digital, and output it as a digital measurement signal.
  • the normal N of the sensor element 12 can be oriented in the direction of a maximum deflection of the sensor membrane.
  • Figure 2 shows a method for offset compensation in a specific embodiment of the invention.
  • the method for offset compensation 22 of a signal offset in a measurement signal of a pressure sensor 10 comprises providing 24 the pressure sensor 10, which, with a sensor element 12, provides a measurement signal 26 dependent on a pressure at the pressure sensor 10 and which has an insulating compound on the sensor element 12 for protection against environmental influences.
  • the calculation parameter 35 can preferably include an insulating mass parameter 44, in particular a mass value of the insulating mass, and a sensor element parameter 46, in particular a sensor element area, of the sensor element 12.
  • the calculation parameter 35 can be specified as the quotient of the mass of the insulating mass and the sensor element area.
  • the offset pressure 38 is preferably calculated as the product of the calculation parameter 35 and the total acceleration 30.
  • the gravitational acceleration component 32 is detected in particular as a function of an orientation of the sensor element 12 with respect to the gravitational acceleration, and the gravitational acceleration component 32 of the total acceleration 30 is calculated as a function of the detected orientation.
  • the acceleration 33 acting on the sensor element 12 and the insulating mass is also measured in particular, and the acting Acceleration of the total acceleration 30 is calculated based on the measured acceleration.
  • the sum of the gravitational acceleration component 32 and the acceleration 33 results in the total acceleration 30, which is taken into account when calculating the offset pressure 38.
  • the calculation parameter 35 is stored in the memory unit 34, which is preferably assigned to the electronics unit of the pressure sensor 10, and is retrievable for calculating the offset pressure 38.
  • the calculation parameter 35 which includes the insulating mass parameter 44 and the sensor element parameters 46, is determined by an initial calibration 48, i.e., preferably before the initial commissioning of the pressure sensor 10, by measuring a signal offset 42 of the pressure sensor 10 under acceleration conditions 50 predetermined with respect to a total acceleration 30 acting on the sensor element 12.
  • the predetermined acceleration conditions 50 can be two predetermined orientations of the pressure sensor 10 relative to the direction of gravity, in each case with no further acceleration acting on the pressure sensor 10.
  • the calculation parameter is calculated as an updated calculation parameter 35' depending on the reduced signal offset 56 and the acceleration due to gravity as total acceleration 30 and stored in the memory unit 34 so that it can be retrieved.
  • Figure 3 shows a method for operating a pressure sensor in a specific embodiment of the invention.
  • the method for operating 58 of the pressure sensor 10 comprises providing 24 the pressure sensor 10, which, with a sensor element 12, provides a measurement signal 26 dependent on a pressure at the pressure sensor 10 and has an insulating compound on the sensor element 12 for protection against environmental influences.
  • a compensation 40 of a signal offset 42 corresponding to an offset pressure 38 which is generated by the mass of the insulating mass and the total acceleration 30 acting on the sensor element 12, preferably takes place by the method described in Figure 2, in particular in real time during operation, depending from the calculation parameter 35 stored in the storage unit 34 and the determined total acceleration 30.
  • a regular calibration 60 can be carried out regularly and/or on request, which proceeds similarly to the initial calibration described with reference to the method in Figure 2.
  • a signal offset 42 of the pressure sensor 10 is measured under acceleration conditions 50 predetermined in relation to a total acceleration 30 acting on the sensor element 12.
  • the predetermined acceleration conditions 50 can be two predetermined orientations of the pressure sensor 10 relative to the direction of gravity, with no further acceleration on the pressure sensor 10 in each case.
  • a first acceleration condition 52 can be a first orientation that is oriented parallel to the direction of gravity
  • a second acceleration condition 54 can be a second orientation opposite the first orientation and oriented antiparallel to the direction of gravity.
  • the calculation parameter is then calculated as an updated calculation parameter 35' depending on the reduced signal offset 56 and the gravitational acceleration as the total acceleration 30 and stored in the memory unit 34 for retrieval. Furthermore, it is concluded that the contact mass on the sensor element 12 is larger than the insulating mass if, during a check 62, a deviation 63 between the previously stored calculation parameter 35 and the updated calculation parameter 35' exceeds a predetermined deviation threshold 64. If the deviation 63 exceeds the deviation threshold 64, information 65 can be output indicating contamination of the pressure sensor 10.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention se rapporte à un procédé de compensation de décalage (22) d'un décalage de signal (42) dans un signal de mesure (26) provenant d'un capteur de pression (10), comprenant les étapes consistant à fournir (24) le capteur de pression (10), qui fournit le signal de mesure (26) en fonction d'une déflexion de l'élément de capteur (12) en fonction d'une pression au niveau du capteur de pression (10) et qui comporte un composé isolant (18) permettant une protection contre des influences environnementales sur l'élément de capteur (12), à détecter (28) une accélération totale (30) agissant sur le capteur de pression (10), comprenant une composante d'accélération gravitationnelle (32) et/ou une accélération (33), à accéder à des paramètres de calcul (35) stockés dans une unité de stockage (34), à calculer (36) une pression de décalage (38), survenant sur l'élément de capteur (12) au moins par l'intermédiaire de la masse du composé isolant (18) et de l'accélération totale (30) agissant sur celui-ci, en fonction des paramètres de calcul (35) et/ou de l'accélération totale (30), et à compenser (40) au moins le décalage de signal (42), correspondant à la pression de décalage calculée (38), dans le signal de mesure (26). L'invention se rapporte également à un procédé de fonctionnement (58) d'un capteur de pression (10), et à un capteur de pression (10).
PCT/EP2024/084307 2023-12-11 2024-12-02 Procédé de compensation de décalage, procédé de fonctionnement d'un capteur de pression et capteur de pression Pending WO2025124967A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102023212475.0A DE102023212475A1 (de) 2023-12-11 2023-12-11 Verfahren zur Offsetkompensation und Verfahren zum Betrieb eines Drucksensors sowie Drucksensor
DE102023212475.0 2023-12-11

Publications (1)

Publication Number Publication Date
WO2025124967A1 true WO2025124967A1 (fr) 2025-06-19

Family

ID=93799530

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2024/084307 Pending WO2025124967A1 (fr) 2023-12-11 2024-12-02 Procédé de compensation de décalage, procédé de fonctionnement d'un capteur de pression et capteur de pression

Country Status (2)

Country Link
DE (1) DE102023212475A1 (fr)
WO (1) WO2025124967A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009101566A1 (fr) * 2008-02-15 2009-08-20 Koninklijke Philips Electronics N.V. Compensation de mesures de capteur de pression
DE102011077686A1 (de) 2011-06-17 2012-12-20 Robert Bosch Gmbh Druckmessvorrichtung
DE102022205601A1 (de) * 2022-06-01 2023-12-07 Robert Bosch Gesellschaft mit beschränkter Haftung Membransensor zur Kompensation einer Beschleunigung sowie entsprechenden Betriebsverfahren

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10329665B4 (de) 2003-07-01 2009-04-30 Infineon Technologies Ag Drucksensor, Chip mit einem Drucksensor und Verfahren zum Erfassen eines Nutzdrucks
DE102014101573B3 (de) 2014-02-07 2014-10-09 Vega Grieshaber Kg Druckmessgerät mit automatischer Lagekorrektur
JP2017049158A (ja) 2015-09-03 2017-03-09 セイコーエプソン株式会社 センサー装置、携帯機器、電子機器および移動体
DE102023204039A1 (de) 2023-05-02 2024-11-07 Robert Bosch Gesellschaft mit beschränkter Haftung Membransensor zur Kompensation einer Beschleunigung und Verfahren zum Erzeugen eines kompensierten Sensorsignals

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009101566A1 (fr) * 2008-02-15 2009-08-20 Koninklijke Philips Electronics N.V. Compensation de mesures de capteur de pression
DE102011077686A1 (de) 2011-06-17 2012-12-20 Robert Bosch Gmbh Druckmessvorrichtung
DE102022205601A1 (de) * 2022-06-01 2023-12-07 Robert Bosch Gesellschaft mit beschränkter Haftung Membransensor zur Kompensation einer Beschleunigung sowie entsprechenden Betriebsverfahren

Also Published As

Publication number Publication date
DE102023212475A1 (de) 2025-06-12

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