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WO2025197199A1 - Dispositif de source de lumière et corps rotatif - Google Patents

Dispositif de source de lumière et corps rotatif

Info

Publication number
WO2025197199A1
WO2025197199A1 PCT/JP2024/042611 JP2024042611W WO2025197199A1 WO 2025197199 A1 WO2025197199 A1 WO 2025197199A1 JP 2024042611 W JP2024042611 W JP 2024042611W WO 2025197199 A1 WO2025197199 A1 WO 2025197199A1
Authority
WO
WIPO (PCT)
Prior art keywords
light source
support
raw material
source device
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/042611
Other languages
English (en)
Japanese (ja)
Inventor
雄介 寺本
則孝 芦澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of WO2025197199A1 publication Critical patent/WO2025197199A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Definitions

  • the present invention relates to a light source device that generates radiation such as extreme ultraviolet light, and a rotating body used in the light source device.
  • Light source devices have been developed that excite plasma raw materials such as tin to generate plasma, which serves as a light source.
  • the plasma generated in this way emits radiation such as extreme ultraviolet (EUV).
  • Known methods for generating plasma include the LPP (Laser Produced Plasma) method, in which the plasma raw material is excited with an energy beam such as a laser, and the DPP (Discharge Produced Plasma) method, in which the plasma raw material is excited using an electric discharge.
  • LPP Laser Produced Plasma
  • DPP discharge Produced Plasma
  • Another known method is the LDP (Laser Assisted Discharge Produced Plasma) method, in which the electric discharge is assisted by laser irradiation.
  • one known LPP light source device is one that ejects liquid plasma raw material in the form of droplets to generate droplets, which are then irradiated with a laser beam to generate plasma.
  • a method has been developed in which liquid plasma raw material is supplied onto a rotating body, and the rotating body is rotated to supply the plasma raw material to the irradiation area of the energy beam (Patent Documents 1 and 2). This method does not require droplet generation, making it possible to obtain high-intensity radiation with a relatively simple configuration.
  • JP 2014-216286 A Japanese Patent Application Laid-Open No. 2021-504763
  • heavy element materials such as tungsten are considered to have relatively high corrosion resistance against plasma raw materials, but because such materials are highly dense, it is expected that the rotor will be heavy. In this case, it may become difficult to replace the rotor, and it may also become difficult to control its rotation. Furthermore, the use of rare heavy element materials may increase the cost of the rotor itself.
  • the object of the present invention is to provide a light source device and a rotating body that have a long life, yet are low-cost and lightweight.
  • one embodiment of the present invention provides a light source device that includes a rotating body that holds plasma raw material, irradiates the plasma raw material on the rotating body with an energy beam to generate plasma, and extracts radiation from the plasma.
  • the rotating body includes a support that rotates around its axis and is made of a first material that is corrosion-resistant to the plasma raw material, and an irradiated portion that is made of a second material that is more corrosion-resistant to the plasma raw material than the first material and is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating.
  • a rotating body onto which the energy beam is irradiated is provided with a support and an irradiated portion.
  • the support is made of a first material that is corrosion-resistant to the plasma raw material, and the irradiated portion is made of a second material that is more corrosion-resistant than the first material.
  • the irradiated portion is provided on part of the support so that it overlaps with the irradiation position of the energy beam while the support is rotating. In this way, by locally placing a material that is more corrosion-resistant than other parts only in the part irradiated with the energy beam, it is possible to realize a rotating body that is low-cost, lightweight, and has a long lifespan.
  • the rotating body may be a rotating plate having a rotation surface extending around the rotation axis and holding the plasma raw material on the rotation surface.
  • the irradiated portion may form the rotation surface together with the support, or may form the rotation surface by itself.
  • the energy beam may be irradiated toward the rotation surface formed by the irradiated portion.
  • the irradiated portion may be arranged in a ring shape on the rotation plane, centered on the rotation axis.
  • the support may be a plate-like member having a first surface that forms the rotation surface.
  • the irradiated portion may be an irradiated member embedded in the support from the first surface side.
  • the support may have an embedding hole formed in the first surface into which the irradiated member is embedded.
  • the irradiated member may have a cross-sectional structure in which, in a cross section taken along the rotation axis, both the inner end point and the outer end point that form the boundary between the first surface and the embedding hole are continuously connected.
  • the rotating body may be a rotating vessel having an inner circumferential surface surrounding the rotation axis and holding the plasma raw material on the inner circumferential surface.
  • the irradiated portion may form the inner circumferential surface together with the support, or may form the inner circumferential surface independently.
  • the energy beam may be irradiated toward the inner circumferential surface formed by the irradiated portion.
  • the second material may be any one of tungsten, WL (lanthanum-containing tungsten), rhenium, tungsten-rhenium alloy, iridium, platinum, tungsten carbide, DLC (Diamond-Like Carbon), or diamond.
  • the irradiated portion may be formed by coating the support with the second material.
  • a rotating body is used in a light source device that irradiates a plasma raw material with an energy beam to generate plasma and extracts radiation from the plasma.
  • the rotating body holds the plasma raw material and is irradiated with the energy beam, and has a support and an irradiated portion.
  • the support is made of a first material that is corrosion-resistant to the plasma raw material and rotates around the rotation axis.
  • the irradiated portion is made of a second material that is more corrosion-resistant to the plasma raw material than the first material, and is provided on a part of the support so as to overlap with the irradiation position of the energy beam while the support is rotating.
  • the present invention makes it possible to realize a rotating body that is long-lasting, low-cost, and lightweight.
  • the effects described here are not necessarily limited to those described herein, and may be any of the effects described in this disclosure.
  • the light source device 100 is a laser-produced plasma (LPP) type light source device. That is, the light source device 100 irradiates a plasma raw material 101 with an energy beam EB, thereby exciting the plasma raw material 101 to generate plasma P, and extracts radiation R emitted from the plasma P to use as a light source.
  • the radiation R is EUV (Extreme Ultraviolet) light, X-rays, or other electromagnetic waves.
  • the plasma raw material 101 is a molten metal or alloy, such as liquid-phase tin (Sn), lithium (Li), gadolinium (Gd), terbium (Tb), gallium (Ga), bismuth (Bi), indium (In), or an alloy containing at least one of these materials.
  • molten metal or alloy such as liquid-phase tin (Sn), lithium (Li), gadolinium (Gd), terbium (Tb), gallium (Ga), bismuth (Bi), indium (In), or an alloy containing at least one of these materials.
  • EUV light is emitted as the radiation R
  • molten Sn or Li is used as the plasma raw material 101.
  • X-rays are emitted as the radiation R, for example, molten Ga, Ga alloy, In, Sn compound, etc. is used as the plasma raw material 101.
  • FIG. 1 is a schematic cross-section of light source device 100 taken horizontally at a predetermined height from the installation surface, viewed from vertically above.
  • FIG. 1 to facilitate understanding of the configuration and operation of light source device 100, cross-sections are omitted for portions that are not necessary to explain the cross-sectional configuration, etc.
  • the X direction may be referred to as the front-to-back direction within the horizontal direction (the positive side of the X axis is the front side, and the negative side is the rear side), the Y direction as the left-to-right direction within the horizontal direction (the positive side of the Y axis is the left side, and the negative side is the right side), and the Z direction as the vertical direction (the positive side of the Z axis is the upper side, and the negative side is the lower side).
  • the application of this technology is not limited to the orientation in which light source device 100 is used.
  • the light source device 100 has a vacuum chamber 10, a plasma generation mechanism 11, a debris reduction mechanism 12, a beam source 13, and a control unit 14.
  • a utilization device 15 that utilizes radiation R is also connected to the light source device 100.
  • the vacuum chamber 10 houses the plasma generation mechanism 11 and the debris reduction mechanism 12, and is evacuated by a specified exhaust mechanism (not shown).
  • the vacuum chamber 10 has an entrance hole 10a and an exit hole 10b.
  • the incidence axis IA of the energy beam EB is set so as to pass through the incidence hole 10a.
  • the incidence hole 10a is provided with an incidence window 16 that transmits the energy beam EB.
  • a beam source 13 is installed outside the vacuum chamber 10 to emit an energy beam EB along an incident axis IA into the vacuum chamber 10.
  • An electron beam or a laser beam can be used as the energy beam EB.
  • the emission axis EA of the radiation R is set so as to pass through the emission hole 10b.
  • a utilization device 15 is connected to the vacuum chamber 10 via an exit hole 10b. Radiation R generated from the plasma P is supplied to the utilization device 15 through the exit hole 10b.
  • the plasma generation mechanism 11 is a mechanism for generating plasma P within the vacuum chamber 10 and emitting radiation R (X-rays or EUV light). As shown in FIG. 1, the plasma generation mechanism 11 has a light source cover 20, a raw material container 21, a rotating body 30, and a film thickness adjustment mechanism 22.
  • the light source cover 20 is a cover that covers the rotating body 30 and prevents the plasma raw material 101 from scattering.
  • the light source cover 20 has an entrance hole 20a and an exit hole 20b.
  • the entrance hole 20a is a hole that passes the energy beam EB that enters along the entrance axis IA
  • the exit hole 20b is a hole that passes the radiation R that is emitted centered on the exit axis EA.
  • the raw material container 21 stores the plasma raw material 101 in a liquid state.
  • the raw material container 21 is connected to, for example, a raw material supply device (not shown) that supplies and circulates the plasma raw material 101.
  • the raw material container 21 is positioned vertically below the rotating body 30 so that at least a portion of the rotating body 30 is immersed in the plasma raw material 101 in a liquid state.
  • the rotor 30 holds the plasma raw material 101 and rotates around the rotation axis RA to supply the plasma raw material 101 to the irradiation position I of the energy beam EB.
  • the rotor 30 is placed inside the vacuum chamber 10 so that the irradiation position I of the energy beam EB is located at the intersection of the entrance axis IA and the exit axis EA.
  • the rotation axis RA is typically set parallel to the horizontal plane, but the rotation axis RA may also be set at an angle relative to the horizontal plane.
  • the rotating body 30 is connected to a shaft member 25 that rotates around a rotation axis RA.
  • the shaft member 25 passes through a through-hole 20c provided in the light source cover 20 and a through-hole 10c provided in the vacuum chamber 10, and is connected to a drive motor 26 provided outside the vacuum chamber 10.
  • the drive motor 26 rotates the shaft member 25, causing the rotating body 30 to rotate.
  • a mechanical seal or the like is provided between the through-hole 10c of the vacuum chamber 10 and the shaft member 25 to prevent leakage.
  • the rotor 30 is immersed in the plasma raw material 101 in the raw material container 21, so when the rotor 30 rotates, the plasma raw material 101 is lifted up while adhering to the rotor 30.
  • the plasma raw material 101 that has been attached to the rotor 30 and transported to irradiation position I is irradiated with the energy beam EB emitted from the beam source 13.
  • the plasma raw material 101 is excited at irradiation position I, generating high-temperature plasma P, and radiation R is emitted from the plasma P.
  • the light source device 100 is equipped with a rotor 30 that holds the plasma raw material 101, and is a light source device that irradiates the plasma raw material 101 on the rotor 30 with an energy beam EB to generate plasma P and extracts radiation R from the plasma P.
  • the specific configuration of the rotor 30 will be explained in detail later.
  • the film thickness adjustment mechanism 22 adjusts the film thickness of the plasma raw material 101 at irradiation position I.
  • the film thickness adjustment mechanism 22 is arranged with a predetermined gap between them, sandwiching the rotor 30, and is provided as a mechanism for adjusting the film thickness of the plasma raw material 101 by scraping off any plasma raw material 101 that has not flowed into the gap.
  • the film thickness adjustment mechanism 22 is also provided upstream of irradiation position I in the rotation direction of the rotor 30, and determines the film thickness of the plasma raw material 101 at irradiation position I.
  • the debris reduction mechanism 12 is a mechanism that captures debris such as fine particles of the plasma raw material 101 emitted from the plasma P, and is placed inside the vacuum chamber 10 opposite the emission hole 20b of the light source cover 20.
  • the debris reduction mechanism 12 is a rotary foil trap that rotates multiple foils to capture debris with the rotating foils.
  • a fixed foil trap that captures debris with fixed foils may be used.
  • the control unit 14 controls the operation of each component of the light source device 100.
  • the control unit 14 controls the operation of the beam source 13 and the drive motor 26.
  • the control unit 14 is shown schematically as a functional block, but the position at which the control unit 14 is configured may be designed arbitrarily.
  • the light source device 100 may be provided with a sensor for measuring the state of radiation R, a focusing mirror for focusing radiation R, etc. as appropriate.
  • the support 31 is a structural member that supports the irradiated member 35 and is connected to the shaft member 25 . Therefore, the support 31 rotates about the rotation axis RA when the shaft member 25 rotates.
  • the support 31 can also be said to be a member that constitutes the main body of the rotating body 30.
  • the support 31 is made of a first material that is corrosion-resistant to the plasma raw material 101.
  • corrosion-resistance to the plasma raw material 101 means resistance to mechanical erosion and chemical corrosion caused by the plasma raw material 101 in a liquid state, which is molten metal.
  • the surface of components that come into contact with the plasma raw material 101 which is a molten metal in a liquid state, will be worn away due to erosion and corrosion caused by the plasma raw material 101.
  • the amount of this wear (amount of surface scraping) will vary depending on the material of the component that comes into contact with the plasma raw material 101. It is also thought that the higher the temperature of the plasma raw material 101 or the longer the component is in contact with the plasma raw material 101, the greater the amount of wear.
  • the first material constituting the support 31 is, for example, a material that, when immersed in the liquid plasma raw material 101, experiences less wear due to erosion or the like within its expected service life than a predetermined level.
  • the irradiated member 35 is provided on a part of the support 31 so as to overlap with the irradiation position I of the energy beam EB while the support 31 is rotating.
  • the irradiated member 35 is a member that is partially provided on the rotating body 30 so as to overlap with the irradiation position I of the energy beam EB.
  • the irradiated member 35 corresponds to the irradiated portion.
  • Figure 2 is a schematic diagram showing an example of the planar configuration of the rotating body 30.
  • Figure 2 schematically shows the planar configuration of the main surface (plane of rotation 40, described below) of the rotating body 30 onto which the energy beam EB is irradiated, as viewed from the direction of the rotation axis RA.
  • irradiation locus 5 a circular locus centered on the rotation axis RA.
  • This irradiation locus 5 becomes the portion that overlaps with the irradiation position I of the energy beam EB while the rotating body 30 is rotating.
  • the irradiated member 35 is positioned so that it overlaps at least with the irradiation locus 5.
  • the second material constituting the irradiated member 35 is, for example, a material that experiences less wear at the irradiation position I of the energy beam EB than the first material. This makes it possible to sufficiently suppress the amount of wear at the irradiation position I of the energy beam EB, thereby enabling the life of the rotating body 30 to be extended.
  • first material and second material are listed. Note that the first material and second material are not limited to the examples described here.
  • the first material constituting the support 31 is any one of molybdenum (Mo), titanium (Ti), stainless steel, aluminum (Al), TZM (an alloy of titanium (Ti), zirconium (Zr), and molybdenum (Mo)), stainless steel coated with titanium nitride (TiN), aluminum coated with titanium nitride, stainless steel coated with TZM, or aluminum coated with TZM.
  • metal materials such as molybdenum, titanium, stainless steel, and aluminum are cheaper and lighter than materials made of heavy elements such as tungsten, which are used as the second material described below.
  • Titanium nitride and TZM also have high corrosion resistance against tin in high-temperature environments. Therefore, by using a titanium nitride coating or TZM coating, it is possible to improve the corrosion resistance of low-cost, highly workable metal materials such as stainless steel and aluminum.
  • the second material constituting the irradiated member 35 is any one of tungsten (W), WL (tungsten containing lanthanum (La)), rhenium (Re), tungsten-rhenium alloy, iridium (Ir), platinum (Pt), tungsten carbide (WC), DLC (diamond-like carbon), or diamond.
  • tungsten, rhenium, tungsten-rhenium alloy, iridium, platinum, and tungsten carbide have a higher specific gravity (density) than the metal materials listed as the first material. This makes them highly resistant to erosion by tin, and the amount of wear can be sufficiently suppressed.
  • WL also has the same corrosion resistance as simple tungsten and is highly workable, making it easy to form the irradiated member 35.
  • DLC and diamond are stable and hard materials that are very light compared to metal materials, and therefore have sufficiently high resistance to erosion by tin. DLC and diamond may also be used by forming a film on a specified substrate material.
  • first and second materials are not limited to the examples described above.
  • metallic materials such as tungsten and tungsten alloys exist as materials with relatively high density and materials with relatively low density, even if the constituent elements are the same.
  • the rotating body 30 may be constructed using such metallic materials.
  • the support body 31 may be constructed using a metallic material with a relatively low density as the first material
  • the irradiated member 35 may be constructed using a metallic material with the same constituent elements as the first material but with a relatively high density as the second material.
  • the first and second materials described here can be used, for example, when the plasma raw material 101 is tin.
  • a plasma raw material 101 other than tin lithium, gadolinium, terbium, gallium, bismuth, indium, etc.
  • the first and second materials may be appropriately selected from the materials listed above. In this case, for example, a material that does not react with the plasma raw material 101 in the temperature environment in which it is used, or that has sufficiently low reactivity, is used.
  • a support 31 and an irradiated member 35 are provided on the rotating body 30 that is irradiated with the energy beam EB.
  • the support 31 is made of a first material that is corrosion-resistant to the plasma raw material 101
  • the irradiated member 35 is made of a second material that is more corrosion-resistant than the first material.
  • the irradiated member 35 is provided on a part of the support 31 so that it overlaps with the irradiation position of the energy beam EB while the support 31 is rotating. In this way, by locally arranging a material that is more corrosion-resistant than other parts only in the part that is irradiated with the energy beam EB, it is possible to realize a rotating body that is low-cost, lightweight, and has a long lifespan.
  • energy beams such as laser light used in LPP light source devices have a very high energy content because they directly convert plasma raw materials such as tin into plasma. For this reason, even materials that are considered to be corrosion-resistant to liquid plasma raw materials can have their surface scraped away by erosion or other factors at the point of irradiation with the energy beam. When the surface of the rotating body wears out in this way, for example, the point of irradiation with the energy beam moves back, making it difficult to generate radiation stably and requiring the rotating body to be replaced.
  • the rotating body is heavy, a motor with high torque is required, and the power required for rotation increases. Furthermore, if the rotation axis is oriented sideways, a mechanism to suppress rotational wobble is required to ensure stable rotation of the rotating body. This is likely to result in increased running costs and manufacturing costs for the entire light source device. In addition, a heavy rotating body makes it difficult to replace, which may worsen maintenance.
  • an irradiated member 35 made of a material (second material) that has higher corrosion resistance to the plasma raw material 101 than the material (first material) that constitutes the support 31, which is the main body of the rotator 30, is provided in the portion of the rotator 30 that is irradiated with the energy beam EB.
  • the irradiated member 35 made of the second material is provided on part of the rotating body 30, and the other part of the rotating body 30 is made up of the support member 31 made of the first material. Therefore, it is possible to reduce the amount of the second material used compared to, for example, when the rotating body 30 is made up of only the second material. Furthermore, because the support member 31 does not need to be as resistant to corrosion by the plasma raw material 101 as the irradiated member 35, it is possible to select, for example, a common material that is widely distributed as the first material. This makes it possible to reduce the material costs of the rotating body 30.
  • the rotating body 30 is light, there is no need to use a special motor or the like with a large torque. Furthermore, it is possible to stabilize the rotation without adding a mechanism to suppress the rotational shake, etc. This makes it possible to reduce the running costs and manufacturing costs of the light source device. Furthermore, the weight reduction of the rotating body 30 makes it easier to replace the rotating body 30, and it is possible to improve maintainability.
  • the rotating body 30 is a rotating plate having a rotation surface 40 that extends around the rotation axis RA, and holding the plasma raw material 101 on the rotation surface 40.
  • the rotation surface 40 is the surface that is irradiated with the energy beam EB.
  • the main surface that is irradiated with the energy beam EB (the surface facing to the right in the figure) is the rotation surface 40.
  • the main surface opposite the rotation surface 40 is referred to as the back surface 41.
  • the surface of rotation 40 is a plane perpendicular to the rotation axis RA.
  • the surface of rotation 40 may also be a rotationally symmetric curved surface with the rotation axis RA as its axis of symmetry, such as a conical surface.
  • the surface of rotation 40 may also be a convex or concave surface.
  • the surface of rotation 40 may also be configured as an annular surface centered on the rotation axis RA.
  • the surface of rotation 40 may also be provided with recessed portions (concave portions), protruding portions (convex portions), or perforated portions (openings).
  • the specific shape of the surface of rotation 40 is not limited to these.
  • a portion of the rotor 30 is immersed in the plasma raw material 101 stored in the raw material container 21, causing the plasma raw material 101 to adhere to the surface of rotation 40. This holds the plasma raw material 101 on the surface of rotation 40.
  • the support 31 is a plate-like member having a first surface 31a and a second surface 31b.
  • the first surface 31a forms the rotation surface 40 of the rotating body 30.
  • the second surface 31b forms the back surface 41 of the rotating body 30.
  • the support 31 is a flat plate-like member, and the first surface 31a and the second surface 31b are both planes perpendicular to the rotation axis RA.
  • the planar shape of the support 31 is set to be circular.
  • the shape of the support 31 is not limited to the shape shown in Figures 1 and 2.
  • the support 31 does not need to be a flat member, and a member in which at least one of the first surface 31a and the second surface 31b is concave or convex may be used.
  • the planar shape of the support 31 does not need to be circular, and any shape that is rotationally symmetric about the rotation axis RA, such as a regular polygon, can be used.
  • the support body 31 also has an embedding hole 32 formed on the first surface 31a, into which the irradiated member 35 is embedded.
  • the embedding hole 32 is, for example, a hole formed on the first surface 31a so as not to penetrate the support body 31.
  • the depth and planar shape of the embedding hole 32 are set to match the thickness and planar shape of the irradiated member 35.
  • the irradiated member 35 is embedded in the support 31 from the first surface 31a side. More specifically, the irradiated member 35 is inserted into an embedding hole 32 provided in the first surface 31a and fixed to the support 31 in this state. In this way, the irradiated member 35 functions as part of the rotation surface 40 that holds the plasma raw material 101.
  • the method for fixing the irradiated member 35 to the support 31 is not limited.
  • a through-hole may be provided in the embedding hole 32, and the irradiated member 35 may be screwed from the second surface 31b (rear surface 41) side of the support 31.
  • a through-hole may be provided in the irradiated member 35, and the irradiated member 35 may be screwed to the support 31 from the front surface side.
  • the through-hole provided in the irradiated member 35 is set in a position that does not overlap with the irradiation trajectory 5 of the energy beam EB.
  • the irradiated member 35 may be fitted to the embedding hole 32 using thermal expansion.
  • the irradiated member 35 is arranged in a ring shape on the rotation plane 40, with the rotation axis RA as the center. Specifically, the irradiated member 35 forms a ring-shaped area on the rotation plane 40 that overlaps with the irradiation position I (irradiation locus 5) of the energy beam EB. This makes it possible to sufficiently reduce the amount of irradiated member 35 used.
  • the circle passing through the middle between the inner and outer edges of the annular irradiated member 35 will be referred to as the center circle 36 of the irradiated member 35.
  • the distance between the inner and outer edges will be referred to as the width of the irradiated member 35.
  • the radius of the central circle 36 is preferably set to 75% or more of the radius of the support 31, and more preferably 90% or more of the radius of the support 31.
  • the spot size (beam diameter) of the energy beam EB at irradiation position I is set to approximately several tens of ⁇ m (e.g., 50 ⁇ m) in order to concentrate the energy.
  • the width of the irradiated member 35 is preferably set to, for example, 10 times the spot size or more, and preferably 500 ⁇ m or more. Note that depending on the method for holding the irradiated member 35 on the support 31 and conditions such as handling during processing and assembly, it may be better for the irradiated member 35 to be somewhat wider. On the other hand, if the width of the irradiated member 35 is large, the weight and cost of the rotating body 30 may increase. From this perspective, it is preferable that the width of the irradiated member 35 be, for example, 15 mm or less.
  • the irradiation position I of the energy beam EB is set, for example, on the central circle 36 of the irradiated member 35.
  • the irradiation trajectory 5 is a circle that follows the central circle 36. This makes it possible to efficiently dissipate the heat generated from the plasma P throughout the irradiated member 35. Furthermore, the propagation of heat to the support 31 is suppressed, making it possible to suppress the occurrence of erosion, etc., in the support 31.
  • the irradiation position I may be set so as to be close to the outer edge (or inner edge) of the irradiated member 35.
  • planar shape of the irradiated member 35 is not limited to a circular shape as long as it overlaps with the irradiation locus 5; for example, an annular irradiated member 35 with polygonal inner and outer edges may be used.
  • Figures 3A, 3B, and 3C are cross sections of the rotating body 30 cut along the rotation axis RA, and are schematic illustrations of an example of the cross-sectional shape of the irradiated member 35.
  • the left side of the figure is the inside of the rotating body 30 closer to the rotation axis RA, and the right side is the outside of the rotating body 30.
  • the upper side of the figure is the rotation surface 40, and the lower side is the back surface 41.
  • the inner endpoint that forms the boundary between the first surface 31a of the support 31 and the embedding hole 32 will be referred to as P1, and the outer endpoint will be referred to as P2.
  • the left corner that forms the inner edge of the embedding hole 32 is endpoint P1
  • the right corner that forms the outer edge of the embedding hole 32 is endpoint P2.
  • the surface of the irradiated member 35 that faces the energy beam EB (the surface that constitutes the rotation plane 40) will be referred to as the irradiation surface 37.
  • the irradiated member 35 has a cross-sectional structure that is continuously connected to both the inner end point P1 and the outer end point P2.
  • the irradiated member 35 is configured so that, in the thickness direction of the rotating body 30 (the vertical direction in the figure), the inner edge of the irradiated surface 37 is positioned at the same position as the inner edge (end point P1) of the embedding hole 32, and the outer edge of the irradiated surface 37 is positioned at the same position as the outer edge (end point P2) of the embedding hole 32.
  • Figure 3A shows an example in which the irradiated member 35 is configured so that the irradiation surface 37 is a straight line in a cross section along the rotation axis RA.
  • the irradiated member 35 is embedded in the support 31 so that it is flush with the first surface 31a of the support 31.
  • the rotation surface 40 first surface 31a and irradiation surface 37
  • the cross-sectional structure of the irradiated member 35 is not limited to the examples shown in Figures 3A, 3B, and 3C.
  • any cross-sectional structure in which the end points P1 and P2 are continuously connected is possible, and an irradiated member 35 in which the irradiation surface 37 has a cross section that combines straight lines and curves may be used.
  • the cross-sectional structure of the irradiated member 35 does not necessarily have to be a structure in which the end points P1 and P2 are continuously connected, and it may also be a structure in which steps are formed on the inside and outside.
  • planar shape of the irradiated member 35 does not necessarily have to be annular; for example, an irradiated member 35 having a circular or polygonal planar shape may be embedded in the support body 31. In this case, compared to when the planar shape is annular, processing such as cutting out the center is not required, and the irradiated member 35 can be easily formed.
  • the irradiated member 35 does not necessarily have to be configured as a single unit, and may be configured, for example, by arranging multiple parts.
  • the irradiated member 35 may be arranged in an annular shape, and may be configured, for example, by arranging multiple parts spaced apart from each other.
  • the irradiated member 35 (irradiation surface 37) and the support 31 (first surface 31a) form the rotation surface 40 that holds the plasma raw material 101 on the rotating body 30.
  • the irradiated member 35 may form the rotation surface 40 by itself.
  • the irradiated member 35 is provided so as to cover the entire first surface 31a of the support 31.
  • the irradiation surface 37 of the irradiated member 35 functions as the rotation surface 40.
  • the rotating body 30 is made up of a relatively lightweight support body 31, except for the irradiated member 35, making it possible to reduce the weight of the rotating body 30.
  • FIGS. 4A and 4B are schematic diagrams showing an example of the cross-sectional and planar configurations of a rotating body according to the second embodiment.
  • FIG. 4A is a cross-sectional view of the rotating body 50 taken along the rotation axis RA, with the upper side in the figure being the upper side in the vertical direction and the lower side in the figure being the lower side in the vertical direction.
  • FIG. 4B is a plan view of the rotating body 50 as seen from above along the rotation axis RA.
  • the rotor 50 is configured as a rotary container. That is, the rotor 50 itself functions as a container for accommodating the plasma raw material 101. Additionally, a shaft member 25 that rotates around a rotation axis RA is connected to the underside of the rotating body 50. This causes the rotating body 50 to rotate around the rotation axis RA.
  • the rotation axis RA is typically set parallel to the vertical direction. However, the rotation axis RA may also be set at an angle relative to the vertical direction.
  • the rotor 50 has an inner peripheral surface 45 that surrounds the rotation axis RA, and holds the plasma raw material 101 on the inner peripheral surface 45.
  • the inner peripheral surface 45 is, for example, a band-shaped curved surface that is centered on the rotation axis RA and extends toward the rotation axis RA.
  • the inner peripheral surface 45 is also the surface of the rotor 50 that is irradiated with the energy beam EB.
  • the rotating body 50 has a support body 51 and an irradiated member 55.
  • the support body 51 is a structural member connected to the shaft member 25 and supports the irradiated member 55, and is made of a first material that is corrosion-resistant to the plasma raw material 101.
  • the irradiated member 55 is a member that forms the portion of the rotating body 50 (inner surface 45) that overlaps with the irradiation position I of the energy beam EB, and is made of a second material that is more corrosion-resistant to the plasma raw material 101 than the first material.
  • the first and second materials can be, for example, the same materials as those described in the above embodiments.
  • the irradiated member 55 corresponds to the irradiated portion.
  • the support 51 has a bottom plate portion 52 and a protruding wall 53.
  • the bottom plate portion 52 is a plate-shaped structural part arranged perpendicular to the rotation axis RA.
  • the bottom plate portion 52 functions as the bottom plate of the rotor 50 configured as a rotary container. For example, when the rotor 50 is not rotating, the plasma raw material 101 is stored on the upper surface 52a of the bottom plate portion 52.
  • the shaft member 25 is connected to the lower surface 52b of the bottom plate portion 52.
  • the protruding wall 53 is an annular structural part that protrudes from the upper surface 52a of the bottom plate portion 52 so as to surround the rotation axis RA.
  • the protruding wall 53 constitutes a side wall that is provided around the bottom plate of the rotary container.
  • the protruding wall 53 protrudes vertically upward from the upper surface 52a at the outer edge of the bottom plate portion 52. Therefore, the rotary body 50 is a flat-cylindrical (drum-shaped) rotary container.
  • the protruding direction of the protruding wall 53 does not have to be vertically upward. For example, it may protrude in a direction away from the rotation axis RA (toward the outside of the rotating body 50), or in a direction toward the rotation axis RA (toward the inside of the rotating body 50).
  • the protruding wall 53 may also protrude from inside the outer edge of the bottom plate portion 52.
  • the irradiated member 55 is a cylindrical ring-shaped member that is attached to the inside of the protruding wall 53 to form the inner circumferential surface 45.
  • the outer diameter of the irradiated member 55 is set to be the same as or slightly smaller than the inner diameter of the protruding wall 53.
  • the irradiated member 55 is inserted into the space surrounded by the protruding wall 53 and fixed in that state.
  • the irradiated member 55 can be fixed using screws or a joint that utilizes thermal expansion.
  • the shape of the irradiated member 55 does not have to be cylindrical, and may be processed appropriately to obtain the desired inner peripheral surface 45.
  • the irradiated member 55 may be formed so that the inner peripheral surface 45 is inclined toward the bottom plate portion 52 (tilted inward).
  • the irradiated member 55 may be formed so that the inner peripheral surface 45 is inclined outward.
  • the inner surface of the irradiated member 55 directly becomes the inner peripheral surface 45.
  • the irradiated member 55 alone forms the inner peripheral surface 45.
  • the energy beam EB is irradiated toward the inner peripheral surface 45 formed by the irradiated member 55 in this way.
  • the irradiated member 55 does not necessarily have to form the inner circumferential surface 45 by itself; for example, the irradiated member 55 may form the inner circumferential surface 45 together with the support body 51.
  • the lower side of the inner circumferential surface 45 may be formed by the protruding wall 53 of the support body 51, and the upper side of the inner circumferential surface 45 to be formed by the irradiated member 55.
  • the irradiated member 55 is provided so as to be embedded in the protruding wall 53, it is also possible for only the central portion of the inner circumferential surface 45 to be formed by the irradiated member 55. In this way, when the inner circumferential surface 45 is formed by the irradiated member 55 and the support body 51, it is possible to reduce the amount of irradiated member 55 used, thereby making it possible to reduce the weight and cost of the rotating body 50.
  • the rotating vessel-type rotating body 50 requires a high rotation speed to control the film thickness on the inner peripheral surface 45.
  • the rotating body 50 by reducing the weight of the rotating body 50, it is possible to achieve relatively high-speed rotation without using a special motor.
  • the rotating body if the rotating body is heavy, it is possible to use a heavy shaft member 25 to stabilize the rotation, but by applying this technology to reduce the weight of the rotating body 50, it is possible to achieve a reduction in the weight of the shaft member 25, etc.
  • Figures 5A and 5B are schematic diagrams showing an example of the cross-sectional and planar configurations of a rotating body according to the third embodiment.
  • Figure 5A is a cross-sectional view of the rotating body 60 taken along the rotation axis RA, with the right side of the figure being the front side of the rotating body 60 and the left side being the back side of the rotating body 60.
  • Figure 5B is a plan view of the rotating body 60 as seen from the front side along the rotation axis RA.
  • the rotating body 60 is a rotating plate that holds plasma raw material 101 on a rotation surface 40 extending around the rotation axis RA, and has a support 61 and a coating portion 65.
  • the support 61 is a plate-shaped member made of a first material that is corrosion-resistant to the plasma raw material 101.
  • the support 61 has a first surface 61a, which is the front side, and a second surface 61b, which is the back side.
  • the first surface 61a and the second surface 61b are configured as flat surfaces perpendicular to the rotation axis RA, but they may also be configured as curved surfaces such as conical surfaces.
  • a coating portion 65 is provided on the first surface 61a.
  • the shaft member 25 is connected to the second surface 61b.
  • the coating portion 65 is made of a second material that has higher corrosion resistance to the plasma raw material 101 than the first material, and is formed by coating the support body 61 with the second material.
  • the coating portion 65 is a coating film made of the second material.
  • the coating portion 65 corresponds to the irradiated portion.
  • the second material constituting the coating portion 65 is a material that has higher corrosion resistance to the plasma raw material 101 than the first material and that can be coated.
  • the coating portion 65 can be formed by depositing DLC, diamond, tungsten carbide, boron carbide ( B4C ), or silicon carbide. Other than these, the material of the coating portion 65 is not limited.
  • a ring-shaped coating portion 65 is formed on the first surface 61a of the support body 61, with the center being the rotation axis RA. It is also possible to form the coating portion 65 so that it covers the entire surface of the first surface 61a. Alternatively, the shape and size of the coating portion 65 can be set to be the same as the planar shape of the irradiated member 35 in the rotating body 30 described in the first embodiment, for example.
  • the corrosion resistance of the plasma raw material 101 is improved in the portion of the rotor 60 that overlaps with the irradiation position I of the energy beam EB, making it possible to suppress wear of the rotor 60 due to erosion, etc. Furthermore, because the coating portion 65 formed in film form is very lightweight, it is possible to sufficiently reduce the weight of the rotor 60.
  • a rotating plate-type rotating body 60 has been described, but the type of rotating body to which the coating section 65 can be applied is not limited.
  • the coating section 65 may be applied to the rotating vessel-type rotating body described in the second embodiment.
  • the coating section 65 is provided so as to form the inner circumferential surface 45 that holds the plasma raw material 101. This makes it possible to sufficiently reduce the weight of the rotating vessel-type rotating body.
  • the present invention has been described as being applied to an LPP-type light source device, but this is not limited to this, and the present invention may also be applied to light source devices of other types, such as DPP-type or LDP-type.
  • the rotating body may have a support that rotates around the rotation axis, and an irradiated member that is detachable from the support and is provided on part of the support so that it overlaps with the irradiation position of the energy beam while the support is rotating.
  • the materials of the support and the irradiated member are not limited.
  • the support may be configured using a first material that is corrosion-resistant to the plasma raw material
  • the irradiated member may be configured using a second material that is more corrosion-resistant to the plasma raw material than the first material. In this case, the life of the irradiated member is extended, and maintenance costs can be reduced by reducing the frequency of replacement.
  • both the support and the irradiated member may be made of the same material.
  • both the support and the irradiated member may be made of the metal material (tungsten, tungsten alloy, etc.) given as an example of the second material in the above embodiment.
  • the material given as an example of the first material in the above embodiment may be used to construct both the support body and the irradiated member. In this case, it is possible to reduce the costs of both the support body and the irradiated member.
  • the support body may be constructed from the second material, and the irradiated member may be constructed from the first material. In this case, it is possible to reduce the cost of the irradiated member, which is a replacement part, while also extending the life of the support body.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

L'invention concerne un dispositif de source de lumière utilisant un corps rotatif qui est peu coûteux, léger et qui a une longue durée de vie, ainsi que le corps rotatif.　Un dispositif de source de lumière selon un mode de réalisation de la présente invention comprend un corps rotatif qui contient une matière première de plasma. Le dispositif de source de lumière irradie la matière première de plasma sur le corps rotatif avec un faisceau d'énergie pour générer un plasma, et il extrait un rayonnement du plasma. Le corps rotatif comprend : un corps de support qui est composé d'un premier matériau résistant à la corrosion provoquée par la matière première de plasma, et qui tourne autour d'un axe de rotation ; et une partie à irradier qui est composée d'un second matériau ayant une résistance à la corrosion provoquée par la matière première de plasma qui est supérieure à celle du premier matériau, et qui est disposée sur une partie du corps de support de façon à chevaucher la position d'irradiation du faisceau d'énergie pendant que le corps de support tourne.
PCT/JP2024/042611 2024-03-22 2024-12-03 Dispositif de source de lumière et corps rotatif Pending WO2025197199A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2024-046498 2024-03-22
JP2024046498A JP2025145961A (ja) 2024-03-22 2024-03-22 光源装置及び回転体

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WO2025197199A1 true WO2025197199A1 (fr) 2025-09-25

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007525799A (ja) * 2003-12-17 2007-09-06 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 特にｅｕｖ放射及び／又は軟ｘ線放射を発生する方法及び装置
WO2014178177A1 (fr) * 2013-04-30 2014-11-06 ウシオ電機株式会社 Dispositif de source de lumière à rayonnement ultraviolet (uv) extrême
JP2022077182A (ja) * 2020-11-11 2022-05-23 ウシオ電機株式会社 ホイルトラップカバー装置およびデブリ低減装置
JP2023014709A (ja) * 2021-07-19 2023-01-31 ウシオ電機株式会社 循環機構、及び動作装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007525799A (ja) * 2003-12-17 2007-09-06 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 特にｅｕｖ放射及び／又は軟ｘ線放射を発生する方法及び装置
WO2014178177A1 (fr) * 2013-04-30 2014-11-06 ウシオ電機株式会社 Dispositif de source de lumière à rayonnement ultraviolet (uv) extrême
JP2022077182A (ja) * 2020-11-11 2022-05-23 ウシオ電機株式会社 ホイルトラップカバー装置およびデブリ低減装置
JP2023014709A (ja) * 2021-07-19 2023-01-31 ウシオ電機株式会社 循環機構、及び動作装置

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