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WO2025191785A1 - Ozone generation device and method for attaching object-transfer internal member - Google Patents

Ozone generation device and method for attaching object-transfer internal member

Info

Publication number
WO2025191785A1
WO2025191785A1 PCT/JP2024/009988 JP2024009988W WO2025191785A1 WO 2025191785 A1 WO2025191785 A1 WO 2025191785A1 JP 2024009988 W JP2024009988 W JP 2024009988W WO 2025191785 A1 WO2025191785 A1 WO 2025191785A1
Authority
WO
WIPO (PCT)
Prior art keywords
internal member
ozone
refrigerant
generator
ozone generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/009988
Other languages
French (fr)
Japanese (ja)
Inventor
幸成 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TMEIC Corp
Original Assignee
TMEIC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TMEIC Corp filed Critical TMEIC Corp
Priority to JP2024549521A priority Critical patent/JP7774948B1/en
Priority to CN202480020377.5A priority patent/CN120957941A/en
Priority to PCT/JP2024/009988 priority patent/WO2025191785A1/en
Priority to TW113149691A priority patent/TW202535768A/en
Publication of WO2025191785A1 publication Critical patent/WO2025191785A1/en
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P11/00Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for 
    • B23P11/02Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for  by first expanding and then shrinking or vice versa, e.g. by using pressure fluids; by making force fits
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10Preparation of ozone
    • C01B13/11Preparation of ozone by electric discharge

Definitions

  • This disclosure relates to an ozone generator including an ozone generator that performs an ozone generation process to generate ozone gas from a raw material gas supplied to a discharge space, and a method for installing an internal object-transmitting member provided in the ozone generator.
  • An example of a conventional ozone generator having an ozone generator that generates a dielectric barrier discharge in the discharge space and performs an ozone generation process to generate ozone gas from a raw material gas (oxygen gas) supplied to the discharge space is the ozone generator disclosed in Patent Document 1.
  • Such conventional ozone generators have a transmission member for transmitting a transmission target for the ozone generator.
  • the transmission target include raw material gases such as ozone gas and oxygen gas
  • transmission members include an ozone gas passage for transmitting ozone gas and a raw material gas passage for transmitting raw material gas.
  • conventional ozone generators have an internal object transmission member for outputting an object to be transmitted, such as ozone gas, to the outside, or inputting an object to be transmitted, such as a raw material gas, from the outside.
  • the internal object transmission member is connected to a transmission member so that the object to be transmitted can be transmitted.
  • the object to be transmitted is ozone gas
  • the internal object transmission member is connected to an ozone gas passage so that the ozone gas can be transmitted.
  • Figure 14 is an explanatory diagram that schematically shows the planar structure of a conventional object transmission structure 60.
  • Figure 15 is an explanatory diagram that schematically shows the cross-sectional structure of a conventional object transmission structure 60.
  • the conventional object transmission structure 60 includes, as its main components, an outer frame member 61 having a circular opening 61b in a plan view, and an object transmission internal member 62 that is disposed within the opening 61b and is also circular in a plan view.
  • the outer frame member 61 includes, as its main components, an alloy outer periphery 61a and an opening 61b that penetrates the central region of the alloy outer periphery 61a.
  • the outer frame member 61 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the alloy outer periphery 61a, thereby achieving weight savings.
  • the object transmission internal member 62 includes, as its main components, an alloy outer periphery 62a and a through-flow passage 62b that passes through the central region of the alloy outer periphery 62a.
  • the through-flow passage 62b is circular in plan view to transmit (flow) the object to be transmitted.
  • the alloy outer periphery 62a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object to be transmitted is passed through it.
  • the object transmission structure 60 requires two parts (outer frame member 61 + object transmission internal member 62).
  • the member diameter d62 of the object transmission internal member 62 is set to approximately the same length as the opening diameter d61, so that it gently contacts the inner surface of the opening 61b (opening diameter d61).
  • the alloy outer periphery 61a which is made of an aluminum alloy, and the alloy outer periphery 62a, which is made of stainless steel, cannot be directly joined.
  • the conventional object transmission structure 60 requires an O-ring 66, which acts as a sealing member, to ensure close contact between the outer frame member 61 and the object transmission internal member 62.
  • a sealing groove 62c that is circular in plan view is provided in the central region of the outer periphery of the alloy outer periphery 62a.
  • An O-ring 66 which is a sealing member that is circular in plan view, is provided within the sealing groove 62c, thereby improving the airtightness between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62 (alloy outer periphery 62a). This is because the O-ring 66, which acts as a sealing member, is interposed between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62.
  • the task of removing the O-ring 66 is relatively difficult, and there is a risk of damaging the outer frame member 61 or the object transmission internal member 62 during replacement, thereby degrading the performance of the object transmission structure 60.
  • sealing members such as O-rings 66 used in conventional object transmission structures 60 tend to deteriorate over time, making it difficult to extend the life of conventional ozone generators equipped with object transmission structures 60.
  • the purpose of this disclosure is to solve the above-mentioned problems and provide an ozone generator with an internal object-transmitting component that reduces environmental impact and extends the lifespan without reducing usage efficiency.
  • the ozone generator comprises an ozone generator that generates a dielectric barrier discharge in a discharge space and performs an ozone generation process that generates ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; a generator housing member that houses the ozone generator and the ozone gas passage within a housing space; and an object transmission internal member attached to a member mounting area of the generator housing member, wherein the object transmission internal member is connected to a transmission member in a manner that allows a transmission object for the ozone generator to be transmitted, the transmission member being a structure or space for transmitting the transmission object, and the transmission object containing the ozone gas.
  • the transmission member includes the ozone gas passage, the member mounting region has an opening, the object transmission internal member is disposed within the opening, the opening has a circular shape equal to the opening diameter in a plan view, the object transmission internal member has a circular shape equal to the member diameter in a plan view, and the object transmission internal member has a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is below a predetermined cooling temperature and is greater than or equal to the opening diameter when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, and when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, the object transmission internal member and the opening are in close contact at the boundary surface between the outer circumferential surface of the object transmission internal member and the inner circumferential surface of the opening without any other member in between.
  • the object transmission internal member provided in the generator housing member of the ozone generator disclosed herein is attached to the member mounting area of the generator housing member in a tight, airtight state in which the object transmission internal member is tightly attached within the opening without any other members in between when in the non-cooling temperature range.
  • the object transmission internal component has the diameter fluctuation property described above, the object transmission internal component, set at a temperature below a predetermined cooling temperature, is placed inside the opening of the component mounting area, and then the temperature of the object transmission internal component is set to the non-cooling temperature range, allowing the object transmission internal component to be mounted in the component mounting area of the generator housing component in the tightly fitted state described above.
  • the internal object transmission member does not have any parts that require replacement during use, which reliably prevents a decrease in the efficiency of use of the ozone generator.
  • the internal object transmission component does not have any parts that need to be replaced during use, so there is no risk of damage to the internal object transmission component or component mounting area due to component replacement, thereby extending the life of the ozone generator.
  • the internal object-transmitting components provided in the ozone generator disclosed herein do not contain any parts that need to be disposed of during use, thereby reducing the environmental impact.
  • FIG. 2 is an explanatory diagram schematically illustrating a cross-sectional structure of an object transmitting structure provided in the ozone generator according to the first embodiment of the present disclosure.
  • 2 is an explanatory diagram schematically illustrating a cross-sectional structure of an outer frame member in the object transmission structure of FIG. 1.
  • FIG. FIG. 2 is an explanatory diagram schematically illustrating a cross-sectional structure of the object transmission internal member of FIG. 1 .
  • FIG. 2 is an explanatory diagram schematically illustrating the configuration of the ozone generator of the first embodiment having an object-transmitting internal member.
  • FIG. 5 is an explanatory diagram schematically illustrating the structure of a target region of the ozone generator shown in FIG. 4.
  • FIG. 5 is an explanatory diagram schematically illustrating the structure of a target region of the ozone generator shown in FIG. 4.
  • FIG. 5 is an explanatory diagram showing details of a region of interest on the base shown in FIG. 4 .
  • FIG. 1 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a first modified example of the first embodiment.
  • FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a second modified example of the first embodiment.
  • FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a third modified example of the first embodiment.
  • FIG. 10 is an explanatory diagram (part 1) showing a method for attaching an internal object transmission member according to the second embodiment.
  • FIG. 1 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a first modified example of the first embodiment.
  • FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a second modified example of the first embodiment.
  • FIG. 10 is an explanatory diagram (part 2) showing a method for attaching an internal object transmission member according to the second embodiment.
  • FIG. 10 is an explanatory diagram (part 3) showing a method for attaching an internal object transmission member according to the second embodiment.
  • FIG. 10 is an explanatory diagram (part 4) showing a method for attaching an internal object transmission member according to the second embodiment.
  • FIG. 10 is an explanatory diagram schematically illustrating a planar structure of a conventional object transmission structure.
  • FIG. 10 is an explanatory diagram schematically showing a cross-sectional structure of a conventional object transmission structure.
  • Fig. 1 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission structure 30 provided in an ozone generator 100 (described later) according to a first embodiment of the present disclosure.
  • Fig. 2 is an explanatory diagram schematically showing the cross-sectional structure of an outer frame member 31 in the object transmission structure 30 in Fig. 1.
  • Fig. 3 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission inner member 32 in the object transmission structure 30.
  • the object transmission structure 30 of embodiment 1 includes, as its main components, an outer frame member 31 having a circular opening 31b in a plan view, and an object transmission internal member 32 that is disposed within the opening 31b and is also circular in a plan view.
  • the object transmission internal member 32 is a member to which a transmission object for the ozone generator 101, described below, is connected to a transmission member so that the transmission object can be transmitted.
  • a "transmission member” is a structure or space for transmitting the transmission object.
  • the outer frame member 31 mainly comprises an outer alloy periphery 31a and an opening 31b that penetrates the central region of the outer alloy periphery 31a.
  • the outer frame member 31 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy periphery 31a, thereby achieving weight savings.
  • the object transmission internal member 32 includes, as its main components, an outer alloy portion 32a and a through-flow passage 32b that penetrates the central region of the outer alloy portion 32a.
  • the through-flow passage 32b is circular in plan view with a through diameter d3 to transmit (flow) the object to be transmitted.
  • the outer alloy portion 32a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object to be transmitted is passed through it.
  • the opening 31b in the outer frame member 31 is circular in plan view with an opening diameter d1
  • the object transmission internal member 32 is circular in plan view with a member diameter d2.
  • transmission is used as a concept that includes the flow of gases such as raw material gases, the flow of liquids such as refrigerants including cooling water, and the transmission of electrical signals such as power (voltage).
  • the object transmission structure 30 requires two parts (outer frame member 31 + object transmission internal member 32).
  • the object transmission structure 30 has an outer frame member 31 with an opening 31b and the area surrounding the opening 31b as a component mounting area, and the object transmission internal member 32 is attached to the component mounting area in such a manner that the object transmission internal member 32 is positioned within the opening 31b.
  • the object transmission internal member 32 in the object transmission structure 30 of embodiment 1 has the following diameter fluctuation characteristics.
  • Diameter fluctuation characteristics When the cooling temperature is below the specified cooling temperature T1, the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1 of the opening 31b. When the cooling temperature is above T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes equal to or larger than the opening diameter d1.
  • the member diameter d2 at or below the cooling temperature T1 is defined as the cooled member diameter d22
  • the member diameter d2 at the non-cooling temperature zone TH is defined as the non-cooled member diameter d21
  • the relationship ⁇ d21 ⁇ d1 ⁇ d22 ⁇ holds between this and the opening diameter d1 of the opening 31b.
  • the object transmission internal member 32 has the above-mentioned diameter fluctuation characteristics, when the object transmission structure 30 is in the non-cooling temperature zone TH, the object transmission internal member 32 and the outer frame member 31 are in tightly attached contact at the boundary surface 33 between the outer peripheral surface of the object transmission internal member 32 and the inner peripheral surface of the opening 31b.
  • the object transmission internal member 32 can be attached to the member attachment area of the outer frame member 31 as follows.
  • the object transmission internal member 32 which has been set to a cooling temperature T1 or lower, is placed inside the opening 31b of the member attachment area, and the temperature of the object transmission internal member 32 is then set to the non-cooling temperature zone TH.
  • the method for attaching the object transmission internal member 32 will be described in detail in embodiment 2 below.
  • the object transmission structure 30 has the object transmission internal member 32 tightly attached within the opening 31b without the need for any other members, including sealing members such as O-rings.
  • Figure 4 is an explanatory diagram showing a schematic configuration of the ozone generator 100 of embodiment 1, which has the object transmission structure shown in Figures 1 to 3.
  • the ozone generator 100 functions as a flat-plate stacked ozone generator, and has a combination of a base 24 and a generator cover 110 as a generator housing member having a housing space S100 that houses the ozone generator 101.
  • the generator housing member includes a base 24 and a generator cover 110 placed on the surface of the base 24, and a housing space S100 is formed on the surface of the base 24.
  • the ozone generator 101 is housed within this housing space S100.
  • the ozone generator 101 generates a dielectric barrier discharge in the discharge space 6 and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1, such as oxygen gas, supplied to the discharge space 6.
  • the ozone generator 100 has an ozone transformer 200 and a high-frequency inverter 300 as a power supply unit that supplies power to the ozone generator 101.
  • the ozone gas passage 8 formed in the low-voltage electrode 7 is connected to an ozone gas outlet 11 provided in the base 24. Meanwhile, the refrigerant passage 9 formed in the electrode cooling plate 1 and low-voltage electrode 7 is connected to a refrigerant inlet/outlet 12 provided in the base 24.
  • FIG 6 is an explanatory diagram showing details of the focus area R2 of the base 24 in Figure 4.
  • the internal ozone gas member 51 has the same structure as the internal object transmission member 32 shown in Figures 1 to 3.
  • the base 24 corresponds to the outer frame member 31, and the opening 31b in the base 24 for attaching the internal ozone gas member 51 and its surrounding area constitute the member attachment area.
  • the refrigerant internal member 52 which serves as the object-transmitting internal member 32, is attached to the base 24 (inside the opening 31b) which serves as the outer frame member 31. Therefore, the through flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet/outlet 12 of the refrigerant internal member 52.
  • the object to be transmitted is the refrigerant CM, such as cooling water, and the transmission member serves as the refrigerant passage 9.
  • the refrigerant internal member 52 is connected to the refrigerant passage 9 so that the refrigerant CM can flow through the through-flow passage 32b of the object transmission internal member 32.
  • the connection between the refrigerant internal member 52 and the refrigerant passage 9 is performed using an existing connection method (joining method).
  • the base 24, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as flanges for mounting the ozone gas internal member 51 and the refrigerant internal member 52.
  • the source gas internal member 53 which serves as the target object transmission internal member 32, is attached to the cover side surface 110s (inside the opening 31b) of the generator cover 110. Therefore, the through passage 32b of the target object transmission internal member 32 serves as the source gas inlet 130 of the source gas internal member 53.
  • the target object to be transmitted is the source gas G1, such as oxygen gas, and the space that serves as the transmission member serves as the storage space S100.
  • the raw material gas inlet 130 which serves as the through-flow passage 32b of the raw material gas internal member 53, is connected to the storage space S100 so that the raw material gas G1 can flow into the ozone generator 101.
  • a bushing internal member 54 (high-pressure bushing 120) that serves as the object transmission internal member 32 is attached to the cover side surface 110s (inside the opening 31b) of the generator cover 110. As shown in Figure 4, the high-pressure bushing 120 itself functions as the bushing internal member 54.
  • the transmission object is the ozone generation power
  • the transmission member is the power supply terminal 4, which serves as the power supply path. Therefore, the ozone generation power is electrically connected to the power supply terminal 4, which serves as the power supply path, so that it can be supplied via the relay terminal 121 of the bushing internal member 54.
  • the source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for attaching the source gas internal member 53 and the high-pressure bushing 120 and the area surrounding the two openings 31b form the component attachment area.
  • the relay terminal 121 can be installed in the object transmission internal member 32, for example, by passing through the through-flow passage 32b.
  • the openings 31b for the ozone gas internal member 51 and the refrigerant internal member 52 and their surrounding areas serve as component mounting areas.
  • the openings 31b for the source gas internal member 53 and the bushing internal member 54 and their surrounding areas serve as component mounting areas.
  • the base 24 has two component mounting areas: one for the ozone gas internal component 51 and one for the refrigerant internal component 52, and the cover side surface 110s of the generator cover 110 has two component mounting areas: one for the source gas internal component 53 and one for the bushing internal component 54.
  • the object transmission internal member 32 provided in the generator housing member of the ozone generator 100 which is the basic configuration of embodiment 1 of the present disclosure, is attached to the member mounting area in a tight, highly airtight state within the opening 31b without any other members in between, in the non-cooling temperature zone TH.
  • the generator housing member is formed by the combination of the base 24 and the generator cover 110, and the member mounting area is a portion of the base 24 or the cover side surface 110s.
  • the object transmission internal member 32 has the diameter fluctuation property described above. Therefore, by placing the object transmission internal member 32, which has been set to a temperature below cooling temperature T1, inside the opening 31b and then setting the temperature of the object transmission internal member 32 to the non-cooling temperature zone TH, the object transmission internal member 32 can be attached to the member attachment area of the generator housing member in the tightly attached state described above.
  • the object transmission internal member 32 does not have any parts that require replacement during use, so a decrease in the usage efficiency of the ozone generator 100 can be reliably avoided.
  • parts that require replacement include sealing members such as O-rings.
  • O-rings which are typical sealing members, generally deteriorate over time, so they require periodic overhauls or other repairs to be performed and the O-rings replaced. This type of work does not occur with the ozone generator 100 of embodiment 1.
  • the ozone generator 100 of embodiment 1 does not have any parts that need to be replaced while the object transmission internal member 32 is in use, so there is no risk of damage to the object transmission internal member 32 or the component mounting area due to component replacement, thereby extending the life of the ozone generator 100.
  • the object transmission internal member 32 provided in the ozone generator 100 of embodiment 1 does not have any parts that need to be discarded during use, which reduces the environmental impact of the ozone generator 100. This is because, with the ozone generator 100 of embodiment 1, there is no need to discard sealing members such as O-rings.
  • the ozone generator 100 of embodiment 1 has an ozone gas internal member 51 provided in the member mounting area of the base 24.
  • the base 24 corresponding to the outer frame member 31 and the ozone gas internal member 51 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.
  • the ozone gas internal member 51 included in the object transmission internal member 32 which has the outer frame member 31 as the base 24, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 that includes the ozone gas internal member 51, and also extends the life of the ozone generator 100.
  • the internal ozone gas member 51 provided on the base 24 does not contain any parts that need to be disposed of during use, thereby reducing the environmental impact of the ozone generator 100.
  • the ozone generator 100 of embodiment 1 has an internal refrigerant member 52 provided in the member mounting area of the base 24.
  • the base 24 corresponding to the outer frame member 31 and the internal refrigerant member 52 corresponding to the internal object transmission member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.
  • the refrigerant internal member 52 included in the object transmission internal member 32 which has the outer frame member 31 as the base 24, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 that includes the refrigerant internal member 52, and also extends the life of the ozone generator 100.
  • the refrigerant internal member 52 attached to the base 24 does not contain any parts that need to be disposed of during use, thereby reducing the environmental impact of the ozone generator 100.
  • the ozone generator 100 of embodiment 1 has a source gas internal member 53 provided in the member mounting area of the cover side surface 110s of the generator cover 110.
  • the cover side surface 110s corresponding to the outer frame member 31 and the source gas internal member 53 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.
  • the source gas internal member 53 included in the object transmission internal member 32 which has the outer frame member 31 as the cover side surface 110s, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 having the source gas internal member 53, and also extends the life of the ozone generator 100.
  • the internal member 53 for raw material gas provided on the cover side surface 110s does not contain any parts that need to be discarded during use, thereby reducing the environmental impact of the ozone generator 100.
  • a bushing inner member 54 is provided as a high-pressure bushing 120 in the component mounting area of the cover side surface 110s of the generator cover 110.
  • the cover side surface 110s corresponding to the outer frame member 31 and the bushing inner member 54 corresponding to the object transmission inner member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.
  • the bushing internal member 54 included in the object transmission internal member 32 which has the outer frame member 31 as the cover side surface 110s, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 equipped with the bushing internal member 54, and also extends the life of the ozone generator 100.
  • the bushing internal member 54 provided on the cover side surface 110s does not contain any parts that need to be discarded during use, thereby reducing the environmental impact of the ozone generator 100.
  • the generator housing member in the ozone generator 100 which is the basic configuration of embodiment 1, is a combined structure of the base 24 and the generator cover 110. Therefore, before the generator housing member is completed, the object transmission internal member 32 (51-54) can be attached relatively easily to the base 24 or generator cover 110, which are each a single component.
  • the ozone gas internal member 51 and the refrigerant internal member 52 can be attached to the base 24, which is a single-piece structure prior to becoming a generator housing member, and the raw material gas internal member 53 and the bushing internal member 54 can be attached to the cover side surface 110s of the generator cover 110, which is a single-piece structure prior to becoming a generator housing member.
  • the attachment efficiency of the object transmission internal member 32 can be improved during the manufacturing stage of the ozone generator 100 of embodiment 1.
  • the refrigerant output internal member 52B which serves as the object-transmitting internal member 32, is attached to the base 24A (inside the opening 31b), which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant outlet 12B of the refrigerant output internal member 52B.
  • the object to be transmitted is the refrigerant CM
  • the transmission member is the refrigerant output passage 9B.
  • the refrigerant output passage 9B is a passage for discharging the refrigerant supplied to the ozone generator 101.
  • the ozone generator 100C of this third variant has the same effects as the basic configuration, first variant, and second variant, and also has the following unique effects.
  • the base 24A or the cover side surface 110s of the generator cover 110A serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.
  • the base 24B or the cover side surface 110s of the generator cover 110B serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.
  • the housing bottom 105b or housing side surface 105s of the generator housing 105 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.
  • the multiple object-transmitting internal members 32 are attached to the member attachment area of the outer frame member 31 as components of the ozone generator 100 (100A-100C).
  • the ozone generators 100, 100A-100C may be collectively referred to as "ozone generator 100, etc.”
  • the ozone generator 100 etc. has an ozone generator 101.
  • the ozone generator 101 generates a dielectric barrier discharge in the discharge space 6 and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1 supplied to the discharge space 6.
  • the ozone generator 101 is housed in the housing space S100 of the generator housing member.
  • the storage space S100 is provided with an ozone gas passage 8 for passing the ozone gas G2 generated in the discharge space 6, a refrigerant passage 9 (refrigerant input passage 9A, refrigerant output passage 9B) for passing a refrigerant such as cooling water, a source gas passage 18 for passing the source gas G1, and a power supply terminal 4 that serves as a power supply path.
  • the storage space S100 itself functions as a transmission member for the source gas G1.
  • the process for installing the object transmission internal member 32 will be explained below with reference to Figures 10 to 13.
  • the installation method involves steps (a) to (c) described below. Note that for ease of explanation, the through-flow passage 32b provided in the object transmission internal member 32 has been omitted from Figures 10 to 13.
  • Step (a)...As shown in Figure 10 prepare an outer frame member 31 having an opening 31b and an object-transmitting inner member 32 to be attached within the opening 31b.
  • the opening 31b has a circular shape with an opening diameter d1 in plan view
  • the object transmission internal member 32 has a circular shape with a member diameter d2 in plan view.
  • the outer peripheral surface of the object transmission internal member 32 does not have any recesses such as sealing grooves.
  • the opening 31b and its surrounding area serve as a component mounting area for mounting the object transmission internal component 32.
  • the object transmission internal member 32 has a diameter fluctuation property in which the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1 when the temperature is below a predetermined cooling temperature T1, and when the temperature is above T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes equal to or larger than the opening diameter d1.
  • the non-cooling temperature zone TH is a temperature range above the cooling temperature T1 and above 0°C, and includes the room temperature zone TR of ⁇ 0-40°C ⁇ . Note that the temperature at which the ozone generator 101 performs the ozone generation process is also included in the temperature range of the non-cooling temperature zone TH.
  • the member diameter d2 when in the non-cooling temperature zone TH is referred to as the non-cooling member diameter d21
  • the member diameter d2 when the cooling temperature is below T1 is referred to as the cooling member diameter d22.
  • the outer frame member 31 is excluded from the cooling target and is always set to a temperature in the non-cooling temperature zone TH, so it has a constant opening diameter d1.
  • step (a) when step (a) is performed, the uncooled member diameter d21 of the object-transmitting internal member 32 is longer than the opening diameter d1 of the outer frame member 31.
  • step (b) is executed. Note that step (b) includes the following steps (b-1) and (b-2).
  • the material constituting the internal object transmission member 32 is a corrosion-resistant alloy material such as stainless steel, the member diameter d2 tends to shorten as the temperature decreases due to thermal strain ⁇ , which is positively correlated with temperature.
  • the cooling temperature T1 is set to a value sufficiently lower than 0°C within the range of ⁇ -270°C to -20°C ⁇ , for example, 196°C.
  • step (b) which includes the above-mentioned steps (b-1) and (b-2), involves placing the object-transmitting internal member 32, which has been set to a cooling temperature equal to or lower than T1, within the opening 31b of the member mounting area in the outer frame member 31.
  • the member mounting area of the outer frame member 31 is the opening 31b and its surrounding area.
  • an object transmission structure 30 can be obtained in which the outer frame member 31 and the object transmission internal member 32 are integrated, with the outer surface of the object transmission internal member 32 being in close contact with the boundary surface 33 with the inner surface of the opening 31b.
  • the above-mentioned formula (1) holds, so the gap 35 between the inner surface of the opening 31b and the object transmission internal member 32 is completely filled, and the outer surface of the object transmission internal member 32 and the inner surface of the opening 31b are in tight contact at the boundary surface 33.
  • the object transmission internal member 32 is attached within the opening 31b of the outer frame member 31 in a tightly attached state.
  • the ozone gas internal member 51 which forms the object transmission internal member 32, is sufficiently small compared to the base 24, which forms the outer frame member 31, and the cover side surface 110s of the generator cover 110, and therefore the force (stress x contact area) that the outer frame member 31 receives from the object transmission internal member 32 is also relatively small. For this reason, even if equation (1) holds in the non-cooling temperature zone TH in an object transmission structure 30 to which the object transmission internal member 32 is attached, the outer frame member 31, such as the base 24 or generator cover 110, will not deform.
  • the operating temperature of the ozone generator 100 when the ozone generator 101 is in an operating state is included in the non-cooling temperature zone TH. Furthermore, the temperature of the refrigerant CM, such as cooling water, is above 0°C, and the supply of refrigerant CM does not cause the temperature of the object transmission internal member 32 to fall below the cooling temperature T1.
  • the refrigerant CM such as cooling water
  • the ozone gas internal member 51 and the refrigerant internal member 52 which each serve as the object transmission internal member 32, are attached to the base 24, which serves as the outer frame member 31, using the attachment method for the object transmission internal member 32 of embodiment 2.

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Abstract

The purpose of the present disclosure is to provide an ozone generation device that can, in a structure having an object-transfer internal member, reduce environmental load and extend service life without decreasing the efficiency of use. In the present disclosure, an outer frame member (31) has an opening (31b), and an object-transfer internal member (32) is provided in the opening (31b). The object-transfer internal member (32) has a diameter variation property in which the member diameter (d2) becomes less than the opening diameter (d1) of the opening (31) at a cooling temperature (T1) or lower, and the member diameter (d2) becomes equal to or greater than the opening diameter (d1) in a non-cooling temperature range (TH). At a boundary surface (33) between the outer circumferential surface of the object-transfer internal member (32) and the inner circumferential surface of the opening (31b), the object-transfer internal member (32) and the opening (31b) are tightly attached to each other without having another member interposed therebetween.

Description

オゾン発生装置及び対象物伝達内部部材の取り付け方法Ozone generator and method for installing internal components for transmitting objects

 本開示は、放電空間に供給した原料ガスからオゾンガスを生成するオゾン生成処理を実行するオゾン発生器を含むオゾン発生装置及びオゾン発生装置に設けられる対象物伝達内部部材の取り付け方法に関する。 This disclosure relates to an ozone generator including an ozone generator that performs an ozone generation process to generate ozone gas from a raw material gas supplied to a discharge space, and a method for installing an internal object-transmitting member provided in the ozone generator.

 放電空間誘電体バリア放電を発生させ、放電空間に供給した原料ガス(酸素ガス)からオゾンガスを生成するオゾン生成処理を実行するオゾン発生器を有する従来のオゾン発生装置として、例えば特許文献1で開示されたオゾン発生装置がある。 An example of a conventional ozone generator having an ozone generator that generates a dielectric barrier discharge in the discharge space and performs an ozone generation process to generate ozone gas from a raw material gas (oxygen gas) supplied to the discharge space is the ozone generator disclosed in Patent Document 1.

 このような、従来のオゾン発生装置は、オゾン発生器用の伝達対象物を達するための伝達部材を有している。伝達対象物として例えばオゾンガスや酸素ガス等の原料ガスが考えられ、伝達部材としてオゾンガス伝達用のオゾンガス通路や原料ガス伝達用の原料ガス通路が考えられる。 Such conventional ozone generators have a transmission member for transmitting a transmission target for the ozone generator. Examples of the transmission target include raw material gases such as ozone gas and oxygen gas, and transmission members include an ozone gas passage for transmitting ozone gas and a raw material gas passage for transmitting raw material gas.

 さらに、従来のオゾン発生装置は、オゾンガス等の伝達対象物を外部に出力したり、原料ガス等の伝達対象物を外部から入力したりすべく、対象物伝達内部部材を有している。対象物伝達内部部材は、伝達対象物が伝達可能に伝達部材に接続される。例えば、伝達対象物がオゾンガスの場合、対象物伝達内部部材はオゾンガスが伝達可能にオゾンガス通路に接続される。 Furthermore, conventional ozone generators have an internal object transmission member for outputting an object to be transmitted, such as ozone gas, to the outside, or inputting an object to be transmitted, such as a raw material gas, from the outside. The internal object transmission member is connected to a transmission member so that the object to be transmitted can be transmitted. For example, if the object to be transmitted is ozone gas, the internal object transmission member is connected to an ozone gas passage so that the ozone gas can be transmitted.

 図14は従来の対象物伝達用構造体60の平面構造を模式的に示す説明である。図15は従来の対象物伝達用構造体60の断面構造を模式的に示す説明図である。 Figure 14 is an explanatory diagram that schematically shows the planar structure of a conventional object transmission structure 60. Figure 15 is an explanatory diagram that schematically shows the cross-sectional structure of a conventional object transmission structure 60.

 これらの図に示すように、従来の対象物伝達用構造体60は、平面視して円状の開口部61bを有する外枠部材61と、開口部61b内に設けられ、平面視して円状の対象物伝達内部部材62とを主要構成要素として含んでいる。 As shown in these figures, the conventional object transmission structure 60 includes, as its main components, an outer frame member 61 having a circular opening 61b in a plan view, and an object transmission internal member 62 that is disposed within the opening 61b and is also circular in a plan view.

 外枠部材61は合金外周部61aと合金外周部61aの中央領域を貫通する開口部61bとを主要構成要素として含んでいる。外枠部材61は、合金外周部61aの構成材料としてアルミニウム合金等の比較的軽量で、かつ比強度が大きく材料を使用することにより、省重量化を図っている。 The outer frame member 61 includes, as its main components, an alloy outer periphery 61a and an opening 61b that penetrates the central region of the alloy outer periphery 61a. The outer frame member 61 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the alloy outer periphery 61a, thereby achieving weight savings.

 対象物伝達内部部材62は、合金外周部62aと合金外周部62aの中央領域を貫通する貫通流路62bとを主要構成要素として含んでいる。貫通流路62bは、伝達対象物を伝達(流通)させるべく、平面視して円状を呈している。合金外周部62aの構成材料として、例えばステンレス鋼等の伝達対象物を流通させる際に腐食しない耐性を有する耐食性合金材料が採用される。 The object transmission internal member 62 includes, as its main components, an alloy outer periphery 62a and a through-flow passage 62b that passes through the central region of the alloy outer periphery 62a. The through-flow passage 62b is circular in plan view to transmit (flow) the object to be transmitted. The alloy outer periphery 62a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object to be transmitted is passed through it.

 このように、外枠部材61(合金外周部61a)と対象物伝達内部部材62(合金外周部62a)との間で構成材料を変更する必要があるため、対象物伝達用構造体60は、2つの部品(外枠部材61+対象物伝達内部部材62)を必要としている。 As such, because it is necessary to change the constituent materials between the outer frame member 61 (alloy outer peripheral portion 61a) and the object transmission internal member 62 (alloy outer peripheral portion 62a), the object transmission structure 60 requires two parts (outer frame member 61 + object transmission internal member 62).

 開口部61b内に対象物伝達内部部材62を配置すべく、対象物伝達内部部材62の部材径d62は、開口部61b(開口径d61)の内周面と緩やかに接する程度に、開口径d61とほぼ同じ長さに設定されている。 In order to place the object transmission internal member 62 within the opening 61b, the member diameter d62 of the object transmission internal member 62 is set to approximately the same length as the opening diameter d61, so that it gently contacts the inner surface of the opening 61b (opening diameter d61).

 アルミニウム合金を構成材料とする合金外周部61aとステンレス鋼を構成材料とする合金外周部62aとは直接接合することができない。 The alloy outer periphery 61a, which is made of an aluminum alloy, and the alloy outer periphery 62a, which is made of stainless steel, cannot be directly joined.

 そこで、従来の対象物伝達用構造体60は、外枠部材61と対象物伝達内部部材62との密着性を確保するためにシール部材となるOリング66が必須の構成要素となる。 Therefore, the conventional object transmission structure 60 requires an O-ring 66, which acts as a sealing member, to ensure close contact between the outer frame member 61 and the object transmission internal member 62.

 具体的には、合金外周部62aの外周中央領域に平面視して円状のシール用溝部62cが設けられる。そして、シール用溝部62c内に平面視して円状のシール部材であるOリング66を設けることにより、外枠部材61の開口部61bの内周面と対象物伝達内部部材62(合金外周部62a)の外周面との気密性を高めている。なぜなら、外枠部材61の開口部61bの内周面と対象物伝達内部部材62の外周面との間にシール材となるOリング66が介在するからである。 Specifically, a sealing groove 62c that is circular in plan view is provided in the central region of the outer periphery of the alloy outer periphery 62a. An O-ring 66, which is a sealing member that is circular in plan view, is provided within the sealing groove 62c, thereby improving the airtightness between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62 (alloy outer periphery 62a). This is because the O-ring 66, which acts as a sealing member, is interposed between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62.

特許第3607890号公報Patent No. 3607890

 しかしながら、Oリング66は一般的に経時的に硬さの変化や腐食によって劣化するという、経年劣化特性を有するため、対象物伝達用構造体60を有するオゾン発生装置の使用期間中にOリング66を交換する必要がある。 However, since the O-ring 66 generally deteriorates over time due to changes in hardness and corrosion, it is necessary to replace the O-ring 66 during the use of the ozone generator having the object transmission structure 60.

 このように、対象物伝達用構造体60を有する従来のオゾン発生装置は、シール部材であるOリング66の交換を行う必要があるため、オゾン発生装置の使用効率が低くなり、加えて、使用済みのOリング66の廃棄に伴い環境負荷が高くなる問題点があった。 As such, conventional ozone generators with an object transmission structure 60 require the O-ring 66, which serves as a sealing member, to be replaced, which reduces the efficiency of use of the ozone generator. In addition, there is the problem of a high environmental impact associated with the disposal of used O-rings 66.

 また、Oリング66の交換の際、Oリング66を取り出す作業が比較的困難であり、交換の際、外枠部材61や対象物伝達内部部材62を傷つけることにより、対象物伝達用構造体60の性能を劣化させる危険性もあった。具体的には、外枠部材61と対象物伝達内部部材62との嵌め合い部分となる、合金外周部61aの内周面(開口部61bの内周面)や、または合金外周部62aの外周面を傷つけ、性能を劣化させる危険性があった。 Furthermore, when replacing the O-ring 66, the task of removing the O-ring 66 is relatively difficult, and there is a risk of damaging the outer frame member 61 or the object transmission internal member 62 during replacement, thereby degrading the performance of the object transmission structure 60. Specifically, there is a risk of damaging the inner surface of the alloy outer peripheral portion 61a (the inner surface of the opening 61b) or the outer surface of the alloy outer peripheral portion 62a, which form the mating portion between the outer frame member 61 and the object transmission internal member 62, and degrading performance.

 このように、対象物伝達用構造体60を有する従来のオゾン発生装置は、使用効率を低下させ、かつ、環境負荷を高めてしまう問題点があった。 As such, conventional ozone generators equipped with an object transfer structure 60 have the problem of reducing usage efficiency and increasing environmental impact.

 さらに、従来の対象物伝達用構造体60に使用されるOリング66等のシール部材は、経年劣化特性あるため、対象物伝達用構造体60を有する従来のオゾン発生装置の長寿命化が図ることが難しいという問題点があった。 Furthermore, the sealing members such as O-rings 66 used in conventional object transmission structures 60 tend to deteriorate over time, making it difficult to extend the life of conventional ozone generators equipped with object transmission structures 60.

 本開示では、上記のような問題点を解決し、対象物伝達内部部材を有する構造において、使用効率を低下させることなく、環境負荷の低減化を図り、かつ、長寿命化が図ることができる、オゾン発生装置を提供することを目的とする。 The purpose of this disclosure is to solve the above-mentioned problems and provide an ozone generator with an internal object-transmitting component that reduces environmental impact and extends the lifespan without reducing usage efficiency.

 本開示に係るオゾン発生装置は、放電空間に誘電体バリア放電を発生させ、前記放電空間に供給した原料ガスからオゾンガスを生成するオゾン生成処理を実行するオゾン発生器と、前記放電空間で発生した前記オゾンガスを流すためのオゾンガス通路と、前記オゾン発生器及び前記オゾンガス通路を収容空間内に収容する発生器収容部材と、前記発生器収容部材の部材取付領域に取り付けられた対象物伝達内部部材とを備え、前記対象物伝達内部部材は、前記オゾン発生器用の伝達対象物が伝達可能に伝達部材に接続され、前記伝達部材は前記伝達対象物を伝達するための構造物または空間であり、前記伝達対象物は前記オゾンガスを含み、前記伝達部材は前記オゾンガス通路を含み、前記部材取付領域は開口部を有し、前記対象物伝達内部部材は前記開口部内に設けられ、前記開口部は平面視して開口径の円状を呈し、前記対象物伝達内部部材は平面視して部材径の円状を呈し、前記対象物伝達内部部材は、所定の冷却温度以下の時、前記部材径が前記開口径を下回り、前記所定の冷却温度を上回りかつ0℃以上の非冷却温度帯の時、前記部材径が前記開口径以上になる径変動性質を有し、前記非冷却温度帯の時、前記対象物伝達内部部材の外周面と前記開口部の内周面との境界面において、他の部材を介することなく、前記対象物伝達内部部材と前記開口部とは密着している。 The ozone generator according to the present disclosure comprises an ozone generator that generates a dielectric barrier discharge in a discharge space and performs an ozone generation process that generates ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; a generator housing member that houses the ozone generator and the ozone gas passage within a housing space; and an object transmission internal member attached to a member mounting area of the generator housing member, wherein the object transmission internal member is connected to a transmission member in a manner that allows a transmission object for the ozone generator to be transmitted, the transmission member being a structure or space for transmitting the transmission object, and the transmission object containing the ozone gas. The transmission member includes the ozone gas passage, the member mounting region has an opening, the object transmission internal member is disposed within the opening, the opening has a circular shape equal to the opening diameter in a plan view, the object transmission internal member has a circular shape equal to the member diameter in a plan view, and the object transmission internal member has a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is below a predetermined cooling temperature and is greater than or equal to the opening diameter when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, and when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, the object transmission internal member and the opening are in close contact at the boundary surface between the outer circumferential surface of the object transmission internal member and the inner circumferential surface of the opening without any other member in between.

 本開示のオゾン発生装置の発生器収容部材に設けられる対象物伝達内部部材は、非冷却温度帯の時、他の部材を介することなく、開口部内で対象物伝達内部部材が密着した気密性の高い密着取付状態で、発生器収容部材の部材取付領域に取り付けられている。 The object transmission internal member provided in the generator housing member of the ozone generator disclosed herein is attached to the member mounting area of the generator housing member in a tight, airtight state in which the object transmission internal member is tightly attached within the opening without any other members in between when in the non-cooling temperature range.

 対象物伝達内部部材は上述した径変動性質を有するため、所定の冷却温度以下に設定した状態の対象物伝達内部部材を、部材取付領域の開口部内に配置した後、対象物伝達内部部材の温度を非冷却温度帯に設定することにより、上述した密着取付状態で対象物伝達内部部材を発生器収容部材の部材取付領域に取り付けることができる。 Because the object transmission internal component has the diameter fluctuation property described above, the object transmission internal component, set at a temperature below a predetermined cooling temperature, is placed inside the opening of the component mounting area, and then the temperature of the object transmission internal component is set to the non-cooling temperature range, allowing the object transmission internal component to be mounted in the component mounting area of the generator housing component in the tightly fitted state described above.

 その結果、本開示のオゾン発生装置において、対象物伝達内部部材は使用中に交換処理を必要とする部品を有していないため、オゾン発生装置の使用効率の低下を確実に回避することができる。 As a result, in the ozone generator disclosed herein, the internal object transmission member does not have any parts that require replacement during use, which reliably prevents a decrease in the efficiency of use of the ozone generator.

 さらに、本開示のオゾン発生装置において、対象物伝達内部部材は使用中に交換対象となる部品を有していないため、部品交換に伴う損傷等が対象物伝達内部部材及び部材取付領域に生じる可能性はなく、オゾン発生装置の長寿命化を図ることができる。 Furthermore, in the ozone generator disclosed herein, the internal object transmission component does not have any parts that need to be replaced during use, so there is no risk of damage to the internal object transmission component or component mounting area due to component replacement, thereby extending the life of the ozone generator.

 加えて、本開示のオゾン発生装置に設けられる対象物伝達内部部材は使用中に廃棄対象となる部品を有していないため、環境負荷の低減化を図ることができる。 In addition, the internal object-transmitting components provided in the ozone generator disclosed herein do not contain any parts that need to be disposed of during use, thereby reducing the environmental impact.

 本開示の目的、特徴、局面、および利点は、以下の詳細な説明と添付図面とによって、より明白となる。 The objects, features, aspects, and advantages of the present disclosure will become more apparent from the following detailed description and accompanying drawings.

本開示の実施の形態1であるオゾン発生装置に設けられる対象物伝達用構造体の断面構造を模式的に示す説明図である。FIG. 2 is an explanatory diagram schematically illustrating a cross-sectional structure of an object transmitting structure provided in the ozone generator according to the first embodiment of the present disclosure. 図1の対象物伝達用構造体における外枠部材の断面構造を模式的に示す説明図である。2 is an explanatory diagram schematically illustrating a cross-sectional structure of an outer frame member in the object transmission structure of FIG. 1. FIG. 図1の対象物伝達内部部材の断面構造を模式的に示す説明図である。FIG. 2 is an explanatory diagram schematically illustrating a cross-sectional structure of the object transmission internal member of FIG. 1 . 対象物伝達内部部材を有する実施の形態1のオゾン発生装置の構成を模式的に示す説明図である。FIG. 2 is an explanatory diagram schematically illustrating the configuration of the ozone generator of the first embodiment having an object-transmitting internal member. 図4で示したオゾン発生器の着目領域の構造を模式的に示す説明図である。FIG. 5 is an explanatory diagram schematically illustrating the structure of a target region of the ozone generator shown in FIG. 4. 図4で示した基台の着目領域の詳細を示す説明図である。FIG. 5 is an explanatory diagram showing details of a region of interest on the base shown in FIG. 4 . 実施の形態1の第1の変形例であるオゾン発生装置の断面構成を模式的に示す説明図である。FIG. 1 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a first modified example of the first embodiment. 実施の形態1の第2の変形例であるオゾン発生装置の断面構成を模式的に示す説明図である。FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a second modified example of the first embodiment. 実施の形態1の第3の変形例であるオゾン発生装置の断面構成を模式的に示す説明図である。FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of an ozone generator according to a third modified example of the first embodiment. 実施の形態2である対象物伝達内部部材の取り付け方法を示す説明図(その1)である。FIG. 10 is an explanatory diagram (part 1) showing a method for attaching an internal object transmission member according to the second embodiment. 実施の形態2である対象物伝達内部部材の取り付け方法を示す説明図(その2)である。FIG. 10 is an explanatory diagram (part 2) showing a method for attaching an internal object transmission member according to the second embodiment. 実施の形態2である対象物伝達内部部材の取り付け方法を示す説明図(その3)である。FIG. 10 is an explanatory diagram (part 3) showing a method for attaching an internal object transmission member according to the second embodiment. 実施の形態2である対象物伝達内部部材の取り付け方法を示す説明図(その4)である。FIG. 10 is an explanatory diagram (part 4) showing a method for attaching an internal object transmission member according to the second embodiment. 従来の対象物伝達用構造体の平面構造を模式的に示す説明図である。FIG. 10 is an explanatory diagram schematically illustrating a planar structure of a conventional object transmission structure. 従来の対象物伝達用構造体の断面構造を模式的に示す説明図である。FIG. 10 is an explanatory diagram schematically showing a cross-sectional structure of a conventional object transmission structure.

 <実施の形態1>
 図1は本開示の実施の形態1である後述するオゾン発生装置100に設けられる対象物伝達用構造体30の断面構造を模式的に示す説明図である。図2は図1の対象物伝達用構造体30における外枠部材31の断面構造を模式的に示す説明図である。図3は対象物伝達用構造体30における対象物伝達内部部材32の断面構造を模式的に示す説明図である。
First Embodiment
Fig. 1 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission structure 30 provided in an ozone generator 100 (described later) according to a first embodiment of the present disclosure. Fig. 2 is an explanatory diagram schematically showing the cross-sectional structure of an outer frame member 31 in the object transmission structure 30 in Fig. 1. Fig. 3 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission inner member 32 in the object transmission structure 30.

 これらの図に示すように、実施の形態1の対象物伝達用構造体30は、平面視して円状の開口部31bを有する外枠部材31と、開口部31b内に設けられ、平面視して円状の対象物伝達内部部材32とを主要構成要素として含んでいる。 As shown in these figures, the object transmission structure 30 of embodiment 1 includes, as its main components, an outer frame member 31 having a circular opening 31b in a plan view, and an object transmission internal member 32 that is disposed within the opening 31b and is also circular in a plan view.

 対象物伝達内部部材32は、後述するオゾン発生器101用の伝達対象物が伝達可能に伝達部材に接続される部材である。「伝達部材」は伝達対象物を伝達するための構造物または空間である。 The object transmission internal member 32 is a member to which a transmission object for the ozone generator 101, described below, is connected to a transmission member so that the transmission object can be transmitted. A "transmission member" is a structure or space for transmitting the transmission object.

 外枠部材31は合金外周部31aと合金外周部31aの中央領域を貫通して設けられる開口部31bとを主要構成要素として含んでいる。外枠部材31は、合金外周部31aの構成材料としてアルミニウム合金等の比較的軽量で、かつ比強度が大きく材料を使用することにより、省重量化を図っている。 The outer frame member 31 mainly comprises an outer alloy periphery 31a and an opening 31b that penetrates the central region of the outer alloy periphery 31a. The outer frame member 31 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy periphery 31a, thereby achieving weight savings.

 対象物伝達内部部材32は、合金外周部32aと合金外周部32aの中央領域を貫通する貫通流路32bとを主要構成要素として含んでいる。貫通流路32bは、伝達対象物を伝達(流通)させるべく、平面視して貫通径d3の円状を呈している。合金外周部32aの構成材料として、例えばステンレス鋼等の伝達対象物を流通させる際に腐食しない耐性を有する耐食性合金材料が採用される。 The object transmission internal member 32 includes, as its main components, an outer alloy portion 32a and a through-flow passage 32b that penetrates the central region of the outer alloy portion 32a. The through-flow passage 32b is circular in plan view with a through diameter d3 to transmit (flow) the object to be transmitted. The outer alloy portion 32a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object to be transmitted is passed through it.

 外枠部材31における開口部31bは平面視して開口径d1の円状を呈し、対象物伝達内部部材32は平面視して部材径d2の円状を呈している。 The opening 31b in the outer frame member 31 is circular in plan view with an opening diameter d1, and the object transmission internal member 32 is circular in plan view with a member diameter d2.

 以下、本明細書において、「伝達」とは、原料ガス等の気体の流通、冷却水を含む冷媒の等の液体の流通、電力(電圧)等の電気信号の伝達を含む概念として使用する。 Hereinafter, in this specification, the term "transmission" is used as a concept that includes the flow of gases such as raw material gases, the flow of liquids such as refrigerants including cooling water, and the transmission of electrical signals such as power (voltage).

 このように、外枠部材31(合金外周部31a)と対象物伝達内部部材32(合金外周部32a)との間で構成材料を変更する必要があるため、対象物伝達用構造体30は、2つの部品(外枠部材31+対象物伝達内部部材32)を必要とする。 As such, because it is necessary to change the constituent materials between the outer frame member 31 (alloy outer peripheral portion 31a) and the object transmission internal member 32 (alloy outer peripheral portion 32a), the object transmission structure 30 requires two parts (outer frame member 31 + object transmission internal member 32).

 図1に示すように、対象物伝達用構造体30は、外枠部材31は開口部31b及び開口部31bの周辺領域を部材取付領域とし、開口部31b内に対象物伝達内部部材32を配置した態様で部材取付領域に対象物伝達内部部材32が取り付けられている。 As shown in Figure 1, the object transmission structure 30 has an outer frame member 31 with an opening 31b and the area surrounding the opening 31b as a component mounting area, and the object transmission internal member 32 is attached to the component mounting area in such a manner that the object transmission internal member 32 is positioned within the opening 31b.

 実施の形態1の対象物伝達用構造体30における対象物伝達内部部材32は、以下の径変動特性を有している。 The object transmission internal member 32 in the object transmission structure 30 of embodiment 1 has the following diameter fluctuation characteristics.

 径変動特性…所定の冷却温度である冷却温度T1以下の時、対象物伝達内部部材32の部材径d2が開口部31bの開口径d1を下回り、冷却温度T1を上回りかつ0℃以上の非冷却温度帯THの時、部材径d2が開口径d1以上になる。 Diameter fluctuation characteristics: When the cooling temperature is below the specified cooling temperature T1, the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1 of the opening 31b. When the cooling temperature is above T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes equal to or larger than the opening diameter d1.

 ここで、冷却温度T1以下の時の部材径d2を冷却時部材径d22とし、非冷却温度帯THの時の部材径d2を非冷却時部材径d21とすると、開口部31bの開口径d1との間で、{d21<d1≦d22}が成立する。 Here, if the member diameter d2 at or below the cooling temperature T1 is defined as the cooled member diameter d22, and the member diameter d2 at the non-cooling temperature zone TH is defined as the non-cooled member diameter d21, then the relationship {d21<d1≦d22} holds between this and the opening diameter d1 of the opening 31b.

 このように、実施の形態1の対象物伝達用構造体30は、冷却温度T1以下の時、部材径d2(=冷却時部材径d22)が開口径d1を下回り、非冷却温度帯THの時、部材径d2(=非冷却時部材径d21)が開口径d1以上になる径変動性質を有している。 In this way, the object transmission structure 30 of embodiment 1 has a diameter fluctuation property in which, when the cooling temperature is below T1, the member diameter d2 (= member diameter d22 when cooled) is smaller than the opening diameter d1, and when the temperature is in the non-cooling temperature zone TH, the member diameter d2 (= member diameter d21 when not cooled) is larger than the opening diameter d1.

 対象物伝達内部部材32は上記径変動特性を有しているため、対象物伝達用構造体30は、非冷却温度帯THの時、対象物伝達内部部材32の外周面と開口部31bの内周面との境界面33において、対象物伝達内部部材32と外枠部材31とが強く密着した密着取付状態を呈している。 Because the object transmission internal member 32 has the above-mentioned diameter fluctuation characteristics, when the object transmission structure 30 is in the non-cooling temperature zone TH, the object transmission internal member 32 and the outer frame member 31 are in tightly attached contact at the boundary surface 33 between the outer peripheral surface of the object transmission internal member 32 and the inner peripheral surface of the opening 31b.

 対象物伝達内部部材32の外枠部材31の部材取付領域への取り付けは、以下のように行うことができる。冷却温度T1以下に設定した状態の対象物伝達内部部材32を、部材取付領域の開口部31b内に配置した後、対象物伝達内部部材32の温度を非冷却温度帯THに設定する。なお、対象物伝達内部部材32の取り付け方法については、後述する実施の形態2において詳述する。 The object transmission internal member 32 can be attached to the member attachment area of the outer frame member 31 as follows. The object transmission internal member 32, which has been set to a cooling temperature T1 or lower, is placed inside the opening 31b of the member attachment area, and the temperature of the object transmission internal member 32 is then set to the non-cooling temperature zone TH. The method for attaching the object transmission internal member 32 will be described in detail in embodiment 2 below.

 このように、対象物伝達用構造体30は、Oリング等のシール部材を含む他の部材を介することなく、対象物伝達内部部材32が開口部31b内に密着取付状態で取り付けられている。 In this way, the object transmission structure 30 has the object transmission internal member 32 tightly attached within the opening 31b without the need for any other members, including sealing members such as O-rings.

 図4は図1~図3で示した対象物伝達用構造体を有する実施の形態1のオゾン発生装置100の構成を模式的に示す説明図である。 Figure 4 is an explanatory diagram showing a schematic configuration of the ozone generator 100 of embodiment 1, which has the object transmission structure shown in Figures 1 to 3.

 オゾン発生装置100は、平板積層型オゾン発生装置として機能し、オゾン発生器101を収容する収容空間S100を有する発生器収容部材として基台24と発生器カバー110との組合せを有している。 The ozone generator 100 functions as a flat-plate stacked ozone generator, and has a combination of a base 24 and a generator cover 110 as a generator housing member having a housing space S100 that houses the ozone generator 101.

 すなわち、発生器収容部材は、基台24と、基台24の表面上に配置される発生器カバー110とを含み、基台24の表面上に収容空間S100が形成されている。 In other words, the generator housing member includes a base 24 and a generator cover 110 placed on the surface of the base 24, and a housing space S100 is formed on the surface of the base 24.

 この収容空間S100内に、オゾン発生器101が収容されている。オゾン発生器101は、放電空間6に誘電体バリア放電を発生させ、放電空間6に供給した酸素ガス等の原料ガスG1からオゾンガスG2を生成するオゾン生成処理を実行する。 The ozone generator 101 is housed within this housing space S100. The ozone generator 101 generates a dielectric barrier discharge in the discharge space 6 and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1, such as oxygen gas, supplied to the discharge space 6.

 さらに、オゾン発生装置100は、オゾン発生器101に電力を供給する電力供給部として、オゾントランス200及び高周波インバータ300を有している。 Furthermore, the ozone generator 100 has an ozone transformer 200 and a high-frequency inverter 300 as a power supply unit that supplies power to the ozone generator 101.

 高周波インバータ300は、電源入力404から入力された電力を必要な周波数に変換してインバータ出力ケーブル403に出力する。オゾントランス200は、この電力を所定の電圧まで昇圧させ、オゾン発生に必要な高電圧なオゾン発生用電力としてオゾン発生器100に供給する。 The high-frequency inverter 300 converts the power input from the power supply input 404 to the required frequency and outputs it to the inverter output cable 403. The ozone transformer 200 boosts this power to a predetermined voltage and supplies it to the ozone generator 100 as the high-voltage ozone generation power required for ozone generation.

 オゾントランス200から供給されるオゾン発生用電力(電圧)は、電力供給線となる高電圧ケーブル401から高圧ブッシング120(中継端子121を含む)、収容空間S100内の給電端子4を介してオゾン発生器100の高圧電極3に供給される。一方、低電圧は、低電圧ケーブル402から基台24を介して低圧電極7に供給される。 The power (voltage) for generating ozone supplied from the ozone transformer 200 is supplied from the high-voltage cable 401, which serves as the power supply line, to the high-voltage bushing 120 (including the relay terminal 121), through the power supply terminal 4 in the accommodation space S100, and to the high-voltage electrode 3 of the ozone generator 100. Meanwhile, low voltage is supplied from the low-voltage cable 402 to the low-voltage electrode 7 via the base 24.

 オゾン発生器100は、各々が高圧電極3及び低圧電極7を主要構成要素として含む複数の電極モジュール102を備えている。所定の個数の電極モジュール102が基台24上に図中矢印Z方向に「N-1」、「N-2」、「N-3」、…「N-7」及び「N-8」の順で積層されてオゾン発生器101が構成されている。 The ozone generator 100 comprises multiple electrode modules 102, each of which includes a high-voltage electrode 3 and a low-voltage electrode 7 as its main components. The ozone generator 101 is constructed by stacking a predetermined number of electrode modules 102 on the base 24 in the direction of the arrow Z in the figure in the order "N-1," "N-2," "N-3," ... "N-7," and "N-8."

 オゾン発生器101は発生器カバー110で覆われている。発生器カバー110のカバー側面110sには、窒素、炭酸ガス等が微量含まれた酸素ガスである原料ガスG1を供給する原料ガス入口130が設けられている。供給された酸素ガス等の原料ガスG1は、収容空間S100内に充満され、放電空間6に入り込む。 The ozone generator 101 is covered by a generator cover 110. A source gas inlet 130 is provided on the cover side 110s of the generator cover 110, which supplies source gas G1, which is oxygen gas containing trace amounts of nitrogen, carbon dioxide, etc. The supplied source gas G1, such as oxygen gas, fills the storage space S100 and enters the discharge space 6.

 一方、基台24には、放電空間6にて生成されたオゾンガスG2をオゾン発生器100から外部に出すオゾンガス出口11と電極モジュール102を冷却する冷却水等の冷媒が出入りする冷媒出入口12が設けられている。 Meanwhile, the base 24 is provided with an ozone gas outlet 11 that discharges the ozone gas G2 generated in the discharge space 6 from the ozone generator 100 to the outside, and a refrigerant inlet/outlet 12 through which a refrigerant such as cooling water that cools the electrode module 102 flows in and out.

 図5はオゾン発生器101の着目領域R1の構造を模式的に示す説明図である。同図に示すように、平板状の低圧電極7に対向して平板状の高圧電極3が設けられ、低圧電極7と高圧電極3との間に平板状の誘電体5が設けられる。そして、誘電体5を介して低圧電極7と誘電体5との間に図示しないスペーサによって放電空間6が形成される。 Figure 5 is an explanatory diagram showing a schematic structure of the target region R1 of the ozone generator 101. As shown in the figure, a flat high-voltage electrode 3 is provided opposite a flat low-voltage electrode 7, and a flat dielectric 5 is provided between the low-voltage electrode 7 and the high-voltage electrode 3. A discharge space 6 is formed between the low-voltage electrode 7 and the dielectric 5 via a spacer (not shown).

 図4に示したオゾントランス200から高圧ブッシング120(中継端子121)及び給電端子4を介して高圧電極3にオゾン発生用電力が供給される。高圧電極3は、ステンレス、アルミ等の金属で作製されている。誘電体5の主面は高圧電極3に密着している。誘電体5は、セラミック、ガラス、シリコン等の材料で作製されている。 Ozone generating power is supplied to the high-voltage electrode 3 from the ozone transformer 200 shown in Figure 4 via the high-voltage bushing 120 (relay terminal 121) and the power supply terminal 4. The high-voltage electrode 3 is made of a metal such as stainless steel or aluminum. The main surface of the dielectric 5 is in close contact with the high-voltage electrode 3. The dielectric 5 is made of a material such as ceramic, glass, or silicon.

 実施の形態1の基本構成であるオゾン発生装置100において、放電空間6は平面視して円板状に形成されており、収容空間S100に充満された原料ガスG1は、放電空間6の全周囲から中心方向に向かって注入される。すなわち、オゾン発生装置100において、オゾン発生器101の放電空間6に原料ガスG1を伝達(供給)するための伝達部材として、収容空間S100が機能している。 In the ozone generator 100, which is the basic configuration of embodiment 1, the discharge space 6 is formed in a disk shape in a plan view, and the source gas G1 filling the storage space S100 is injected from all around the discharge space 6 toward the center. In other words, in the ozone generator 100, the storage space S100 functions as a transmission member for transmitting (supplying) the source gas G1 to the discharge space 6 of the ozone generator 101.

 オゾントランス200及び高周波インバータ300を含む電極供給部から、高圧電極3と低圧電極7との間に交流・高電圧を印加することで放電空間6に誘電体バリア放電を発生させる。したがって、オゾン発生器101は、放電空間6を流れる酸素ガス等の原料ガスG1をオゾンガスG2に変換するオゾン発生処理が実行することができる。オゾン生成処理により生成されたオゾンガスG2は、低圧電極7の中心部から低圧電極7内に設けられたオゾンガス通路8を経由して、基台24に設けられたオゾンガス出口11に導かれる。 A dielectric barrier discharge is generated in the discharge space 6 by applying an AC/high voltage between the high-voltage electrode 3 and the low-voltage electrode 7 from an electrode supply unit including an ozone transformer 200 and a high-frequency inverter 300. Therefore, the ozone generator 101 can perform an ozone generation process that converts a raw material gas G1, such as oxygen gas, flowing through the discharge space 6 into ozone gas G2. The ozone gas G2 generated by the ozone generation process is guided from the center of the low-voltage electrode 7 through an ozone gas passage 8 provided within the low-voltage electrode 7 to an ozone gas outlet 11 provided in the base 24.

 低圧電極7は、ステンレス鋼板等からなる2枚の導電板を接合して板間にオゾンガス通路8を形成した薄板状の導電性剛体である。低圧電極7には、オゾンガス通路8以外にオゾン発生効率を上げるための冷媒通路9が設けられている。そして、この冷媒通路9に冷却水等の冷媒を流すことで、放電空間6内のガス温度を下げる。 The low-voltage electrode 7 is a thin, conductive rigid body made by joining two conductive plates made of stainless steel or other materials together to form an ozone gas passage 8 between the plates. In addition to the ozone gas passage 8, the low-voltage electrode 7 is also provided with a refrigerant passage 9 to increase the efficiency of ozone generation. The gas temperature in the discharge space 6 is lowered by flowing a refrigerant such as cooling water through this refrigerant passage 9.

 一方、高圧電極3を冷却するために、高圧電極3には熱伝導性の優れた絶縁板2を介して水冷式の電極冷却板1が配置されている。電極冷却板1は、ステンレス等からなる2枚の鋼板を接合して板間に冷媒通路9を形成した薄板状の剛体である。すなわち、電極冷却板1内にも冷媒通路9が設けられており、この冷媒通路9には、冷却水等の冷媒が流される。 Meanwhile, to cool the high-voltage electrode 3, a water-cooled electrode cooling plate 1 is placed on the high-voltage electrode 3 via an insulating plate 2 with excellent thermal conductivity. The electrode cooling plate 1 is a thin, rigid body made by joining two steel plates made of stainless steel or the like together to form a refrigerant passage 9 between the plates. In other words, a refrigerant passage 9 is also provided within the electrode cooling plate 1, and a refrigerant such as cooling water flows through this refrigerant passage 9.

 低圧電極7内に形成されたオゾンガス通路8は、基台24に設けられたオゾンガス出口11に連通している。一方、電極冷却板1及び低圧電極7に形成された冷媒通路9は、基台24に設けられた冷媒出入口12に連通している。 The ozone gas passage 8 formed in the low-voltage electrode 7 is connected to an ozone gas outlet 11 provided in the base 24. Meanwhile, the refrigerant passage 9 formed in the electrode cooling plate 1 and low-voltage electrode 7 is connected to a refrigerant inlet/outlet 12 provided in the base 24.

 オゾンガス通路8は、放電空間6で発生したオゾンガスG2を流すための通路であり、冷媒通路9はオゾン発生器101に冷媒を供給するための通路である。 The ozone gas passage 8 is a passage for flowing the ozone gas G2 generated in the discharge space 6, and the refrigerant passage 9 is a passage for supplying refrigerant to the ozone generator 101.

 低圧電極7、高圧電極3、誘電体5、図示しないスペーサ、絶縁板2及び電極冷却板1内を含む電極モジュール102は、各構成要素を貫通する締め付けボルト21によって、電極押え板22と基台24との間で締着された状態で固定されている。 The electrode module 102, which includes the low-voltage electrode 7, high-voltage electrode 3, dielectric 5, spacer (not shown), insulating plate 2, and electrode cooling plate 1, is fastened and fixed between the electrode pressing plate 22 and base 24 by tightening bolts 21 that pass through each component.

 図6は図4の基台24の着目領域R2の詳細を示す説明図である。同図に示すように、オゾンガス用内部部材51は図1~図3で示した対象物伝達内部部材32と同一の構造を呈している。ここで、基台24が外枠部材31に対応し、基台24におけるオゾンガス用内部部材51を取り付けるための開口部31b及びその周辺領域が部材取付領域となる。 Figure 6 is an explanatory diagram showing details of the focus area R2 of the base 24 in Figure 4. As shown in the figure, the internal ozone gas member 51 has the same structure as the internal object transmission member 32 shown in Figures 1 to 3. Here, the base 24 corresponds to the outer frame member 31, and the opening 31b in the base 24 for attaching the internal ozone gas member 51 and its surrounding area constitute the member attachment area.

 すなわち、外枠部材31となる基台24(の開口部31b)内に、対象物伝達内部部材32となるオゾンガス用内部部材51が取り付けられる。したがって、対象物伝達内部部材32の貫通流路32bがオゾンガス用内部部材51のオゾンガス出口11となる。オゾンガス用内部部材51において、伝達対象物がオゾンガスG2となり、伝達部材がオゾンガス通路8となる。なお、図6で示す開口部31bは上方が閉じた溝構造となっている。 In other words, the ozone gas internal member 51, which serves as the object transmission internal member 32, is attached inside (the opening 31b of) the base 24, which serves as the outer frame member 31. Therefore, the through flow path 32b of the object transmission internal member 32 serves as the ozone gas outlet 11 of the ozone gas internal member 51. In the ozone gas internal member 51, the transmission object is ozone gas G2, and the transmission member serves as the ozone gas passage 8. Note that the opening 31b shown in Figure 6 has a groove structure with a closed top.

 オゾンガス用内部部材51は、対象物伝達内部部材32の貫通流路32bを介してオゾンガスG2が流通可能に、オゾンガス通路8と接続される。なお、オゾンガス用内部部材51とオゾンガス通路8との接続は、差込み溶接や突合せ溶接との既存の接続方法(接合方法)を用いて行われる。図6で示す構造では、オゾンガス通路8の先端がオゾンガス出口11に侵入する接合態様でオゾンガス通路8と外枠部材61とが接合されている。 The ozone gas internal member 51 is connected to the ozone gas passage 8 so that ozone gas G2 can flow through the through-flow passage 32b of the object transmission internal member 32. The connection between the ozone gas internal member 51 and the ozone gas passage 8 is achieved using existing connection (joining) methods such as socket welding and butt welding. In the structure shown in Figure 6, the ozone gas passage 8 and outer frame member 61 are joined in a manner such that the tip of the ozone gas passage 8 extends into the ozone gas outlet 11.

 外枠部材31となる基台24(の開口部31b内)に、対象物伝達内部部材32となる冷媒用内部部材52が取り付けられる。したがって、対象物伝達内部部材32の貫通流路32bが冷媒用内部部材52の冷媒出入口12となる。冷媒用内部部材52において、伝達対象物が冷却水等の冷媒CMとなり、伝達部材が冷媒通路9となる。 The refrigerant internal member 52, which serves as the object-transmitting internal member 32, is attached to the base 24 (inside the opening 31b) which serves as the outer frame member 31. Therefore, the through flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet/outlet 12 of the refrigerant internal member 52. In the refrigerant internal member 52, the object to be transmitted is the refrigerant CM, such as cooling water, and the transmission member serves as the refrigerant passage 9.

 冷媒用内部部材52は、対象物伝達内部部材32の貫通流路32bを介して冷媒CMが流通可能に、冷媒通路9と接続される。なお、冷媒用内部部材52と冷媒通路9との接続は、既存の接続方法(接合方法)を用いて行われる。 The refrigerant internal member 52 is connected to the refrigerant passage 9 so that the refrigerant CM can flow through the through-flow passage 32b of the object transmission internal member 32. The connection between the refrigerant internal member 52 and the refrigerant passage 9 is performed using an existing connection method (joining method).

 このように、発生器収容部材の一部として機能する基台24は、2つの開口部31bを含む2つの部材取付領域を有し、オゾンガス用内部部材51及び冷媒用内部部材52を取り付けるためのフランジとして機能する。 In this way, the base 24, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as flanges for mounting the ozone gas internal member 51 and the refrigerant internal member 52.

 一方、発生器カバー110のカバー側面110s(の開口部31b内)に、対象物伝達内部部材32となる原料ガス用内部部材53が取り付けられる。したがって、対象物伝達内部部材32の貫通流路32bが原料ガス用内部部材53の原料ガス入口130となる。原料ガス用内部部材53において、伝達対象物が酸素ガス等の原料ガスG1となり、伝達部材となる空間が収容空間S100となる。 Meanwhile, the source gas internal member 53, which serves as the target object transmission internal member 32, is attached to the cover side surface 110s (inside the opening 31b) of the generator cover 110. Therefore, the through passage 32b of the target object transmission internal member 32 serves as the source gas inlet 130 of the source gas internal member 53. In the source gas internal member 53, the target object to be transmitted is the source gas G1, such as oxygen gas, and the space that serves as the transmission member serves as the storage space S100.

 このように、基本構成のオゾン発生装置100において、原料ガス用内部部材53の貫通流路32bとなる原料ガス入口130は、原料ガスG1がオゾン発生器101に流通可能に収容空間S100と接続される。 In this way, in the ozone generator 100 with a basic configuration, the raw material gas inlet 130, which serves as the through-flow passage 32b of the raw material gas internal member 53, is connected to the storage space S100 so that the raw material gas G1 can flow into the ozone generator 101.

 また、発生器カバー110のカバー側面110s(の開口部31b内)に、対象物伝達内部部材32となるブッシング用内部部材54(高圧ブッシング120)が取り付けられる。図4に示すように、高圧ブッシング120自体がブッシング用内部部材54として機能している。 In addition, a bushing internal member 54 (high-pressure bushing 120) that serves as the object transmission internal member 32 is attached to the cover side surface 110s (inside the opening 31b) of the generator cover 110. As shown in Figure 4, the high-pressure bushing 120 itself functions as the bushing internal member 54.

 ブッシング用内部部材54において、構成要素である中継端子121の一端が高電圧ケーブル401に電気的に接続され、中継端子121の他端が給電経路となる給電端子4と電気的に接続される。このように、ブッシング用内部部材54において、伝達対象物がオゾン発生用電力となり、伝達部材が給電経路となる給電端子4となる。したがって、ブッシング用内部部材54の中継端子121を介してオゾン発生用電力が供給可能に給電経路となる給電端子4と電気的に接続される。 In the bushing internal member 54, one end of the relay terminal 121, which is a component, is electrically connected to the high-voltage cable 401, and the other end of the relay terminal 121 is electrically connected to the power supply terminal 4, which serves as the power supply path. In this way, in the bushing internal member 54, the transmission object is the ozone generation power, and the transmission member is the power supply terminal 4, which serves as the power supply path. Therefore, the ozone generation power is electrically connected to the power supply terminal 4, which serves as the power supply path, so that it can be supplied via the relay terminal 121 of the bushing internal member 54.

 原料ガス用内部部材53及びブッシング用内部部材54は、それぞれ図1~図3で示した対象物伝達内部部材32と実質的に同じ構造を呈している。すなわち、発生器カバー110のカバー側面110sが外枠部材31に対応し、カバー側面110sにおいて、原料ガス用内部部材53及び高圧ブッシング120取り付け用の2つの開口部31b及び2つの開口部31bの周辺領域が部材取付領域となる。 The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for attaching the source gas internal member 53 and the high-pressure bushing 120 and the area surrounding the two openings 31b form the component attachment area.

 なお、中継端子121は例えば貫通流路32b内を貫通させる態様で対象物伝達内部部材32に設置することができる。 The relay terminal 121 can be installed in the object transmission internal member 32, for example, by passing through the through-flow passage 32b.

 このように、発生器収容部材の一部として機能する発生器カバー110のカバー側面110sは、2つの開口部31bを含む2つの部材取付領域を有し、原料ガス用内部部材53及びブッシング用内部部材54を取り付けるためのフランジとして機能する。 In this way, the cover side surface 110s of the generator cover 110, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as a flange for mounting the source gas internal member 53 and the bushing internal member 54.

 図1~図3で示した対象物伝達用構造体30と、図4~図6で示したオゾン発生装置100との関係を以下にまとめる。 The relationship between the object transmission structure 30 shown in Figures 1 to 3 and the ozone generator 100 shown in Figures 4 to 6 is summarized below.

 図1~図3で示した外枠部材31に、オゾン発生装置100の基台24及び発生器カバー110のカバー側面110sがそれぞれ対応している。基台24及び発生器カバー110により発生器収容部材を構成している。 The base 24 of the ozone generator 100 and the cover side surface 110s of the generator cover 110 correspond to the outer frame member 31 shown in Figures 1 to 3. The base 24 and generator cover 110 form a generator housing member.

 図1~図3で示した対象物伝達内部部材32に、基台24に取り付けられたオゾンガス用内部部材51及び冷媒用内部部材52並びにカバー側面110sに取り付けられた原料ガス用内部部材53及びブッシング用内部部材54がそれぞれ対応している。 The object transmission internal member 32 shown in Figures 1 to 3 corresponds to the ozone gas internal member 51 and the refrigerant internal member 52 attached to the base 24, and the source gas internal member 53 and the bushing internal member 54 attached to the cover side surface 110s.

 そして、基台24において、オゾンガス用内部部材51及び冷媒用内部部材52それぞれ用の開口部31b及びその周辺領域が部材取付領域となる。同様に、カバー側面110sにおいて、原料ガス用内部部材53及びブッシング用内部部材54それぞれ用の開口部31b及びその周辺領域が部材取付領域となる。 In the base 24, the openings 31b for the ozone gas internal member 51 and the refrigerant internal member 52 and their surrounding areas serve as component mounting areas. Similarly, in the cover side surface 110s, the openings 31b for the source gas internal member 53 and the bushing internal member 54 and their surrounding areas serve as component mounting areas.

 したがって、基台24はオゾンガス用内部部材51及び冷媒用内部部材52用の2つの部材取付領域を有し、発生器カバー110のカバー側面110sは原料ガス用内部部材53及びブッシング用内部部材54用の2つの部材取付領域を有している。 Therefore, the base 24 has two component mounting areas: one for the ozone gas internal component 51 and one for the refrigerant internal component 52, and the cover side surface 110s of the generator cover 110 has two component mounting areas: one for the source gas internal component 53 and one for the bushing internal component 54.

 このように、総計4つの対象物伝達内部部材32はそれぞれ、基台24及びカバー側面110sを含む発生器収容部材の4つの部材取付領域に取り付けられる。 In this way, a total of four object-transmitting internal members 32 are attached to four member attachment areas of the generator housing member, including the base 24 and the cover side surface 110s.

 上述したように、本開示の実施の形態1の基本構成であるオゾン発生装置100の発生器収容部材に設けられる対象物伝達内部部材32は、非冷却温度帯THの時、他の部材を介することなく、開口部31b内で対象物伝達内部部材32が密着した気密性の高い密着取付状態で部材取付領域に取り付けられている。なお、オゾン発生装置100において、発生器収容部材は基台24及び発生器カバー110の組合せで構成され、部材取付領域は基台24またはカバー側面110sの一部領域となる。 As described above, the object transmission internal member 32 provided in the generator housing member of the ozone generator 100, which is the basic configuration of embodiment 1 of the present disclosure, is attached to the member mounting area in a tight, highly airtight state within the opening 31b without any other members in between, in the non-cooling temperature zone TH. In the ozone generator 100, the generator housing member is formed by the combination of the base 24 and the generator cover 110, and the member mounting area is a portion of the base 24 or the cover side surface 110s.

 対象物伝達内部部材32は上述した径変動性質を有する。このため、冷却温度T1以下に設定した状態の対象物伝達内部部材32を、開口部31b内に配置した後、対象物伝達内部部材32の温度を非冷却温度帯THに設定することにより、対象物伝達内部部材32を発生器収容部材の部材取付領域に上述した密着取付状態で取り付けることができる。 The object transmission internal member 32 has the diameter fluctuation property described above. Therefore, by placing the object transmission internal member 32, which has been set to a temperature below cooling temperature T1, inside the opening 31b and then setting the temperature of the object transmission internal member 32 to the non-cooling temperature zone TH, the object transmission internal member 32 can be attached to the member attachment area of the generator housing member in the tightly attached state described above.

 その結果、実施の形態1のオゾン発生装置100において、対象物伝達内部部材32は使用中に交換処理を必要とする部品を有していないため、オゾン発生装置100の使用効率の低下を確実に回避することができる。 As a result, in the ozone generator 100 of embodiment 1, the object transmission internal member 32 does not have any parts that require replacement during use, so a decrease in the usage efficiency of the ozone generator 100 can be reliably avoided.

 なお、交換を必要とする部品として例えばOリング等のシール部材が考えられる。一般的に、代表的なシール部材であるOリングは、経年劣化特性を有しているため、定期的にオーバーホール等の修理機会を設けて、Oリングを交換する作業が必要となる。このような作業は実施の形態1のオゾン発生装置100では発生しない。 Note that parts that require replacement include sealing members such as O-rings. O-rings, which are typical sealing members, generally deteriorate over time, so they require periodic overhauls or other repairs to be performed and the O-rings replaced. This type of work does not occur with the ozone generator 100 of embodiment 1.

 さらに、実施の形態1のオゾン発生装置100は、対象物伝達内部部材32の使用中に交換対象となる部品を有していないため、部品交換に伴う損傷等が対象物伝達内部部材32及び部材取付領域に生じる可能性はなく、オゾン発生装置100の長寿命化を図ることができる。 Furthermore, the ozone generator 100 of embodiment 1 does not have any parts that need to be replaced while the object transmission internal member 32 is in use, so there is no risk of damage to the object transmission internal member 32 or the component mounting area due to component replacement, thereby extending the life of the ozone generator 100.

 加えて、実施の形態1のオゾン発生装置100に設けられる対象物伝達内部部材32は使用中に廃棄対象となる部品を有していないため、オゾン発生装置100における環境負荷の低減化を図ることができる。なぜなら、実施の形態1のオゾン発生装置100ではOリング等のシール部材を廃棄する可能性がないからである。 In addition, the object transmission internal member 32 provided in the ozone generator 100 of embodiment 1 does not have any parts that need to be discarded during use, which reduces the environmental impact of the ozone generator 100. This is because, with the ozone generator 100 of embodiment 1, there is no need to discard sealing members such as O-rings.

 実施の形態1のオゾン発生装置100は、基台24の部材取付領域にオゾンガス用内部部材51を設けている。すなわち、外枠部材31に対応する基台24と対象物伝達内部部材32に対応するオゾンガス用内部部材51とにより、図1~図3で示した対象物伝達用構造体30を構成している。 The ozone generator 100 of embodiment 1 has an ozone gas internal member 51 provided in the member mounting area of the base 24. In other words, the base 24 corresponding to the outer frame member 31 and the ozone gas internal member 51 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.

 実施の形態1のオゾン発生装置100において、外枠部材31を基台24とした対象物伝達内部部材32に含まれるオゾンガス用内部部材51は、使用中に交換処理を必要とする部品を有していない。このため、オゾンガス用内部部材51を有するオゾン発生装置100の使用効率の低下を確実に回避し、かつ、オゾン発生装置100の長寿命化を図ることができる。 In the ozone generator 100 of embodiment 1, the ozone gas internal member 51 included in the object transmission internal member 32, which has the outer frame member 31 as the base 24, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 that includes the ozone gas internal member 51, and also extends the life of the ozone generator 100.

 加えて、実施の形態1のオゾン発生装置100において、基台24に設けられるオゾンガス用内部部材51は使用中に廃棄対象となる部品は有していないため、オゾン発生装置100における環境負荷の低減化を図ることができる。 In addition, in the ozone generator 100 of embodiment 1, the internal ozone gas member 51 provided on the base 24 does not contain any parts that need to be disposed of during use, thereby reducing the environmental impact of the ozone generator 100.

 実施の形態1のオゾン発生装置100は、基台24の部材取付領域に冷媒用内部部材52を設けている。すなわち、外枠部材31に対応する基台24と対象物伝達内部部材32に対応する冷媒用内部部材52とにより、図1~図3で示した対象物伝達用構造体30を構成している。 The ozone generator 100 of embodiment 1 has an internal refrigerant member 52 provided in the member mounting area of the base 24. In other words, the base 24 corresponding to the outer frame member 31 and the internal refrigerant member 52 corresponding to the internal object transmission member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.

 実施の形態1のオゾン発生装置100において、外枠部材31を基台24とした対象物伝達内部部材32に含まれる冷媒用内部部材52は、使用中に交換処理を必要とする部品を有していない。このため、冷媒用内部部材52を有するオゾン発生装置100の使用効率の低下を確実に回避し、かつ、オゾン発生装置100の長寿命化を図ることができる。 In the ozone generator 100 of embodiment 1, the refrigerant internal member 52 included in the object transmission internal member 32, which has the outer frame member 31 as the base 24, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 that includes the refrigerant internal member 52, and also extends the life of the ozone generator 100.

 加えて、実施の形態1のオゾン発生装置100において、基台24に設けられる冷媒用内部部材52は使用中に廃棄対象となる部品は有しないため、オゾン発生装置100における環境負荷の低減化を図ることができる。 In addition, in the ozone generator 100 of embodiment 1, the refrigerant internal member 52 attached to the base 24 does not contain any parts that need to be disposed of during use, thereby reducing the environmental impact of the ozone generator 100.

 実施の形態1のオゾン発生装置100は、発生器カバー110のカバー側面110sの部材取付領域に原料ガス用内部部材53を設けている。すなわち、外枠部材31に対応するカバー側面110sと対象物伝達内部部材32に対応する原料ガス用内部部材53とにより、図1~図3で示した対象物伝達用構造体30を構成している。 The ozone generator 100 of embodiment 1 has a source gas internal member 53 provided in the member mounting area of the cover side surface 110s of the generator cover 110. In other words, the cover side surface 110s corresponding to the outer frame member 31 and the source gas internal member 53 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.

 実施の形態1のオゾン発生装置100において、外枠部材31をカバー側面110sとした対象物伝達内部部材32に含まれる原料ガス用内部部材53は、使用中に交換処理を必要とする部品を有していない。このため、原料ガス用内部部材53を有するオゾン発生装置100の使用効率の低下を確実に回避し、かつ、オゾン発生装置100の長寿命化を図ることができる。 In the ozone generator 100 of embodiment 1, the source gas internal member 53 included in the object transmission internal member 32, which has the outer frame member 31 as the cover side surface 110s, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 having the source gas internal member 53, and also extends the life of the ozone generator 100.

 加えて、実施の形態1のオゾン発生装置100において、カバー側面110sに設けられる原料ガス用内部部材53は使用中に廃棄対象となる部品は有していないため、オゾン発生装置100における環境負荷の低減化を図ることができる。 In addition, in the ozone generator 100 of embodiment 1, the internal member 53 for raw material gas provided on the cover side surface 110s does not contain any parts that need to be discarded during use, thereby reducing the environmental impact of the ozone generator 100.

 実施の形態1のオゾン発生装置100は、発生器カバー110のカバー側面110sの部材取付領域にブッシング用内部部材54を高圧ブッシング120として設けている。すなわち、外枠部材31に対応するカバー側面110sと対象物伝達内部部材32に対応するブッシング用内部部材54とにより、図1~図3で示した対象物伝達用構造体30を構成している。 In the ozone generator 100 of embodiment 1, a bushing inner member 54 is provided as a high-pressure bushing 120 in the component mounting area of the cover side surface 110s of the generator cover 110. In other words, the cover side surface 110s corresponding to the outer frame member 31 and the bushing inner member 54 corresponding to the object transmission inner member 32 constitute the object transmission structure 30 shown in Figures 1 to 3.

 実施の形態1のオゾン発生装置100において、外枠部材31をカバー側面110sとした対象物伝達内部部材32に含まれるブッシング用内部部材54は、使用中に交換処理を必要とする部品を有しない。このため、ブッシング用内部部材54を有するオゾン発生装置100の使用効率の低下を確実に回避し、かつ、オゾン発生装置100の長寿命化を図ることができる。 In the ozone generator 100 of embodiment 1, the bushing internal member 54 included in the object transmission internal member 32, which has the outer frame member 31 as the cover side surface 110s, does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 equipped with the bushing internal member 54, and also extends the life of the ozone generator 100.

 加えて、実施の形態1のオゾン発生装置100において、カバー側面110sに設けられるブッシング用内部部材54は使用中に廃棄対象となる部品は有していないため、オゾン発生装置100における環境負荷の低減化を図ることができる。 In addition, in the ozone generator 100 of embodiment 1, the bushing internal member 54 provided on the cover side surface 110s does not contain any parts that need to be discarded during use, thereby reducing the environmental impact of the ozone generator 100.

 また、実施の形態1の基本構成であるオゾン発生装置100における発生器収容部材は基台24及び発生器カバー110の組合せ構造である。このため、発生器収容部材を完成する前段階で単体構成の基台24または発生器カバー110に対象物伝達内部部材32(51~54)を比較的簡単に取り付けることができる。 Furthermore, the generator housing member in the ozone generator 100, which is the basic configuration of embodiment 1, is a combined structure of the base 24 and the generator cover 110. Therefore, before the generator housing member is completed, the object transmission internal member 32 (51-54) can be attached relatively easily to the base 24 or generator cover 110, which are each a single component.

 すなわち、発生器収容部材となる前段階の単体構造の基台24にオゾンガス用内部部材51及び冷媒用内部部材52を取り付けることができ、発生器収容部材となる前段階の単体構造の発生器カバー110のカバー側面110sに原料ガス用内部部材53及びブッシング用内部部材54を取り付けることができる。 In other words, the ozone gas internal member 51 and the refrigerant internal member 52 can be attached to the base 24, which is a single-piece structure prior to becoming a generator housing member, and the raw material gas internal member 53 and the bushing internal member 54 can be attached to the cover side surface 110s of the generator cover 110, which is a single-piece structure prior to becoming a generator housing member.

 その結果、実施の形態1のオゾン発生装置100の製造段階において、対象物伝達内部部材32の取付効率を向上させることができる。 As a result, the attachment efficiency of the object transmission internal member 32 can be improved during the manufacturing stage of the ozone generator 100 of embodiment 1.

 (第1の変形例)
 図7は本開示の実施の形態1の第1の変形例であるオゾン発生装置100Aの断面構成を模式的に示す説明図である。以下、図4~図6で示した基本構成のオゾン発生装置100と同様な構成要素は同一符号を付して説明を適宜省略し、オゾン発生装置100Aの特徴箇所を中心に説明する。
(First Modification)
7 is an explanatory diagram schematically illustrating a cross-sectional configuration of an ozone generator 100A according to a first modification of the first embodiment of the present disclosure. Hereinafter, components similar to those of the ozone generator 100 having the basic configuration shown in FIGS. 4 to 6 are designated by the same reference numerals, and descriptions thereof will be omitted as appropriate. The following description will focus on the characteristic features of the ozone generator 100A.

 同図に示すように、オゾン発生装置100Aの発生器収容部材は、基台24Aと、基台24Aの表面上に配置される発生器カバー110Aとを主要構成要素として含んでいる。第1の変形例では基台24Aの表面上に発生器カバー110Aで覆われた収容空間S100が形成される。 As shown in the figure, the generator housing member of the ozone generator 100A includes, as its main components, a base 24A and a generator cover 110A placed on the surface of the base 24A. In the first variant, a housing space S100 covered by the generator cover 110A is formed on the surface of the base 24A.

 オゾンガス用内部部材51、冷媒入力用内部部材52A及び冷媒出力用内部部材52Bはそれぞれ、図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と同様な構造を呈する。ここで、基台24Aが外枠部材31に対応し、基台24Aにおいて、オゾンガス用内部部材51、冷媒入力用内部部材52A及び冷媒出力用内部部材52Bそれぞれ用の3つの開口部31bと3つの開口部31bの周辺領域が部材取付領域となる。 The ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24A corresponds to the outer frame member 31, and in the base 24A, three openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B, respectively, and the areas surrounding the three openings 31b, form the component mounting areas.

 外枠部材31となる基台24A(の開口部31b内)に対象物伝達内部部材32となる冷媒入力用内部部材52Aが取り付けられ、対象物伝達内部部材32の貫通流路32bが冷媒入力用内部部材52Aの冷媒入口12Aとなる。冷媒入力用内部部材52Aにおいて、伝達対象物が冷却水等の冷媒CMとなり、伝達部材が冷媒入力通路9Aとなる。冷媒入力通路9Aは冷却水等の冷媒をオゾン発生器101に供給するための通路である。 The refrigerant input internal member 52A, which serves as the object-transmitting internal member 32, is attached to the base 24A (inside the opening 31b) which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet 12A of the refrigerant input internal member 52A. In the refrigerant input internal member 52A, the object to be transmitted is the refrigerant CM, such as cooling water, and the transmission member serves as the refrigerant input passage 9A. The refrigerant input passage 9A is a passage for supplying the refrigerant, such as cooling water, to the ozone generator 101.

 冷媒入力用内部部材52Aは、対象物伝達内部部材32の貫通流路32bを介して冷媒CMが流通可能に、冷媒入力通路9Aと接続される。なお、冷媒入力用内部部材52Aと冷媒入力通路9Aとの接続は、既存の接続方法(接合方法)を用いて行われる。 The refrigerant input internal member 52A is connected to the refrigerant input passage 9A so that the refrigerant CM can flow through the through-flow passage 32b of the object transmission internal member 32. The connection between the refrigerant input internal member 52A and the refrigerant input passage 9A is performed using an existing connection method (joining method).

 外枠部材31となる基台24A(の開口部31b内)に対象物伝達内部部材32となる冷媒出力用内部部材52Bが取り付けられ、対象物伝達内部部材32の貫通流路32bが冷媒出力用内部部材52Bの冷媒出口12Bとなる。冷媒出力用内部部材52Bにおいて、伝達対象物が冷媒CMとなり、伝達部材が冷媒出力通路9Bとなる。冷媒出力通路9Bはオゾン発生器101に供給された冷媒を排出するための通路である。 The refrigerant output internal member 52B, which serves as the object-transmitting internal member 32, is attached to the base 24A (inside the opening 31b), which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant outlet 12B of the refrigerant output internal member 52B. In the refrigerant output internal member 52B, the object to be transmitted is the refrigerant CM, and the transmission member is the refrigerant output passage 9B. The refrigerant output passage 9B is a passage for discharging the refrigerant supplied to the ozone generator 101.

 冷媒出力用内部部材52Bは、対象物伝達内部部材32の貫通流路32bを介して冷媒CMが流通可能に、冷媒出力通路9Bと接続される。なお、冷媒出力用内部部材52Bと冷媒出力通路9Bとの接続は、既存の接続方法(接合方法)を用いて行われる。 The refrigerant output internal member 52B is connected to the refrigerant output passage 9B so that the refrigerant CM can flow through the through-flow passage 32b of the object transmission internal member 32. The connection between the refrigerant output internal member 52B and the refrigerant output passage 9B is performed using an existing connection method (joining method).

 このように、発生器収容部材の一部として機能する基台24Aは、3つの開口部31bを含む3つの部材取付領域を有し、オゾンガス用内部部材51、冷媒入力用内部部材52A及び冷媒出力用内部部材52Bを取り付けるためのフランジとして機能する。 In this way, the base 24A, which functions as part of the generator housing member, has three member mounting areas including three openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B.

 一方、発生器カバー110Aのカバー側面110sに原料ガス用内部部材53及びブッシング用内部部材54が取り付けられる。原料ガス用内部部材53及びブッシング用内部部材54はそれぞれ図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と実質的に同じ構造を呈している。 Meanwhile, the source gas internal member 53 and the bushing internal member 54 are attached to the cover side surface 110s of the generator cover 110A. The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

 すなわち、発生器カバー110のカバー側面110sが外枠部材31に対応し、カバー側面110sにおいて原料ガス用内部部材53及び高圧ブッシング120用の2つの開口部31bと2つの開口部31bそれぞれの周辺領域が部材取付領域となる。 In other words, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for the source gas internal member 53 and the high-pressure bushing 120 and the surrounding areas of each of the two openings 31b form the component mounting areas.

 外枠部材31となるカバー側面110s(の開口部31b内)に対象物伝達内部部材32となる原料ガス用内部部材53が取り付けられ、対象物伝達内部部材32の貫通流路32bが原料ガス用内部部材53の原料ガス入口130となる。原料ガス用内部部材53において、伝達対象物が原料ガスG1となり、伝達部材が原料ガス通路18となる。 The raw material gas internal member 53, which serves as the object transmission internal member 32, is attached to (the opening 31b of) the cover side surface 110s, which serves as the outer frame member 31, and the through passage 32b of the object transmission internal member 32 serves as the raw material gas inlet 130 of the raw material gas internal member 53. In the raw material gas internal member 53, the object to be transmitted is the raw material gas G1, and the transmission member serves as the raw material gas passage 18.

 原料ガス通路18は、図示しない放電空間6に原料ガスG1を供給するために設けられる。基本構成のオゾン発生装置100のように、原料ガス通路18に替えて収容空間S100を原料ガスG1用の伝達部材として機能させても良い。 The raw material gas passage 18 is provided to supply the raw material gas G1 to the discharge space 6 (not shown). As in the ozone generator 100 with the basic configuration, the storage space S100 may function as a transmission member for the raw material gas G1 instead of the raw material gas passage 18.

 このように、発生器収容部材の一部として機能する発生器カバー110Aのカバー側面110sは、2つの開口部31bを含む2つの部材取付領域を有し、原料ガス用内部部材53及びブッシング用内部部材54を取り付けるためのフランジとして機能する。 In this way, the cover side surface 110s of the generator cover 110A, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as a flange for mounting the source gas internal member 53 and the bushing internal member 54.

 このような第1の変形例のオゾン発生装置100Aは、基本構成と同様な効果に加え、以下の効果を奏する。 The ozone generator 100A of this first variant has the same effects as the basic configuration, as well as the following effects.

 第1の変形例のオゾン発生装置100Aは、基台24Aの部材取付領域に冷媒入力用内部部材52A及び冷媒出力用内部部材52Bを設けている。すなわち、外枠部材31に対応する基台24Aと2つの対象物伝達内部部材32に対応する冷媒入力用内部部材52A及び冷媒出力用内部部材52Bとにより、図1~図3で示した構成の対象物伝達用構造体30を2単位構成で実現している。 The ozone generator 100A of the first modified example has a refrigerant input internal member 52A and a refrigerant output internal member 52B provided in the member mounting area of the base 24A. In other words, the base 24A corresponding to the outer frame member 31 and the refrigerant input internal member 52A and the refrigerant output internal member 52B corresponding to the two object transmission internal members 32 realize the object transmission structure 30 configured as shown in Figures 1 to 3 in a two-unit configuration.

 実施の形態1のオゾン発生装置100において、外枠部材31を基台24Aとした対象物伝達内部部材32に含まれる冷媒入力用内部部材52A及び冷媒出力用内部部材52Bそれぞれは、使用中に交換処理を必要とする部品を有していない。このため、冷媒入力用内部部材52A及び冷媒出力用内部部材52Bを有するオゾン発生装置100Aの使用効率の低下を確実に回避し、かつ、オゾン発生装置100Aの長寿命化を図ることができる。 In the ozone generator 100 of embodiment 1, the refrigerant input internal member 52A and the refrigerant output internal member 52B included in the object transmission internal member 32, which has the outer frame member 31 as the base 24A, do not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100A, which has the refrigerant input internal member 52A and the refrigerant output internal member 52B, and also extends the life of the ozone generator 100A.

 加えて、第1の変形例のオゾン発生装置100Aにおいて、基台24Aに設けられる冷媒入力用内部部材52A及び冷媒出力用内部部材52Bはそれぞれ使用中に廃棄対象となる部品は有しないため、オゾン発生装置100Aにおける環境負荷の低減化を図ることができる。 In addition, in the ozone generator 100A of the first modified example, the refrigerant input internal member 52A and the refrigerant output internal member 52B provided on the base 24A do not contain any parts that need to be disposed of during use, which reduces the environmental impact of the ozone generator 100A.

 (第2の変形例)
 図8は本開示の実施の形態1の第2の変形例であるオゾン発生装置100Bの断面構成を模式的に示す説明図である。以下、図4~図6で示した基本構成のオゾン発生装置100または図7で示した第1の変形例のオゾン発生装置100Aと同様な構成要素は同一符号を付して説明を適宜省略し、オゾン発生装置100Bの特徴箇所を中心に説明する。
(Second Modification)
Figure 8 is an explanatory diagram schematically illustrating a cross-sectional configuration of ozone generator 100B according to a second modified example of the first embodiment of the present disclosure. In the following, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6 or ozone generator 100A according to the first modified example shown in Figure 7 are designated by the same reference numerals and will not be described as necessary. The following description will focus on the characteristics of ozone generator 100B.

 同図に示すように、オゾン発生装置100Bの発生器収容部材は、基台24Bと、基台24Bの表面上に配置される発生器カバー110Bとを主要構成要素として含んでいる。第2の変形例では基台24Bの表面上に発生器カバー110Bで覆われた収容空間S100が形成さる。 As shown in the figure, the generator housing member of the ozone generator 100B includes, as its main components, a base 24B and a generator cover 110B placed on the surface of the base 24B. In the second variant, a housing space S100 covered by the generator cover 110B is formed on the surface of the base 24B.

 基台24Bにはオゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53が設けられる。 The base 24B is provided with an internal member 51 for ozone gas, an internal member 52A for refrigerant input, an internal member 52B for refrigerant output, and an internal member 53 for raw material gas.

 オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53はそれぞれ、図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と同様な構造を呈する。ここで、基台24Bが外枠部材31に対応し、基台24Bにおいて、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53それぞれ用の4つの開口部31bと4つの開口部31bの周辺領域が部材取付領域となる。 The ozone gas internal member 51, refrigerant input internal member 52A, refrigerant output internal member 52B, and raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24B corresponds to the outer frame member 31, and on the base 24B, four openings 31b for the ozone gas internal member 51, refrigerant input internal member 52A, refrigerant output internal member 52B, and raw material gas internal member 53, respectively, and the areas surrounding the four openings 31b, form the component mounting areas.

 このように、発生器収容部材の一部として機能する基台24Bは、4つの開口部31bを含む4つの部材取付領域を有し、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53を取り付けるためのフランジとして機能する。 In this way, the base 24B, which functions as part of the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

 一方、発生器カバー110Bのカバー側面110sに高圧ブッシング120としてブッシング用内部部材54が取り付けられる。ブッシング用内部部材54は図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と実質的に同じ構造を呈している。すなわち、発生器カバー110のカバー側面110sが外枠部材31に対応し、カバー側面110sにおいて、高圧ブッシング120用の開口部31b及び開口部31bの周辺領域が部材取付領域となる。 Meanwhile, a bushing internal member 54 is attached to the cover side surface 110s of the generator cover 110B as the high-pressure bushing 120. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. In other words, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the opening 31b for the high-pressure bushing 120 and the area surrounding the opening 31b form the member attachment area.

 このように、発生器収容部材の一部として機能する発生器カバー110Bのカバー側面110sは、開口部31bを含む材取付領域を有し、ブッシング用内部部材54を取り付けるためのフランジとして機能する。 In this way, the cover side surface 110s of the generator cover 110B, which functions as part of the generator housing member, has a material mounting area including the opening 31b, and functions as a flange for mounting the bushing inner member 54.

 このような第2の変形例のオゾン発生装置100Bは、基本構成及び第1の変形例と同様な効果を奏する。 The ozone generator 100B of this second variant has the same basic configuration and provides the same effects as the first variant.

 (第3の変形例)
 図9は本開示の実施の形態1の第3の変形例であるオゾン発生装置100Cの断面構成を模式的に示す説明図である。以下、図4~図6で示した基本構成のオゾン発生装置100、図7で示した第1の変形例のオゾン発生装置100A、または図8で示した第2の変形例のオゾン発生装置100Bと同様な構成要素は同一符号を付して説明を適宜省略し、オゾン発生装置100Cの特徴箇所を中心に説明する。
(Third Modification)
Figure 9 is an explanatory diagram schematically illustrating a cross-sectional configuration of ozone generator 100C according to a third modified example of the first embodiment of the present disclosure. Hereinafter, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6, ozone generator 100A according to the first modified example shown in Figure 7, or ozone generator 100B according to the second modified example shown in Figure 8 will be assigned the same reference numerals and descriptions thereof will be omitted as appropriate. The following description will focus on the characteristic features of ozone generator 100C.

 同図に示すように、オゾン発生装置100Cの発生器収容部材として単体構造の発生器収容筐体105が設けられる。発生器収容筐体105は内部に収容空間S100を有して筐体状に構成される。 As shown in the figure, a generator housing 105 having a single structure is provided as the generator housing member for the ozone generator 100C. The generator housing 105 has an internal housing space S100 and is configured in a housing shape.

 発生器収容筐体105の筐体底部105bにはオゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53が設けられる。 The housing bottom 105b of the generator housing 105 is provided with an internal member 51 for ozone gas, an internal member 52A for refrigerant input, an internal member 52B for refrigerant output, and an internal member 53 for raw material gas.

 オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53はそれぞれ、図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と同様な構造を呈する。 The ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

 すなわち、筐体底部105bが外枠部材31に対応し、筐体底部105bにおいて、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53それぞれ用の4つの開口部31b及び4つの開口部31bの周辺領域が部材取付領域となる。 In other words, the housing bottom 105b corresponds to the outer frame member 31, and on the housing bottom 105b, the four openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53, and the areas surrounding the four openings 31b, form the component mounting areas.

 このように、発生器収容部材である発生器収容筐体105の筐体底部105bは、4つの開口部31bを含む4つの部材取付領域を有し、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B及び原料ガス用内部部材53を取り付けるためのフランジとして機能する。 In this way, the housing bottom 105b of the generator housing 105, which is the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

 一方、発生器収容筐体105の筐体側面105sに高圧ブッシング120としてブッシング用内部部材54が取り付けられる。ブッシング用内部部材54は図1~図3で示した対象物伝達用構造体30における対象物伝達内部部材32と実質的に同じ構造を呈している。すなわち、発生器収容筐体105の筐体側面105sが外枠部材31に対応し、筐体側面105sにおいて、高圧ブッシング120用の開口部31b及び開口部31bの周辺領域が部材取付領域となる。 Meanwhile, a bushing internal member 54 is attached to the housing side surface 105s of the generator housing 105 as the high-pressure bushing 120. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. In other words, the housing side surface 105s of the generator housing 105 corresponds to the outer frame member 31, and on the housing side surface 105s, the opening 31b for the high-pressure bushing 120 and the area surrounding the opening 31b form the member attachment area.

 このように、発生器収容部材である発生器収容筐体105の筐体側面105sは、開口部31bを含む材取付領域を有し、ブッシング用内部部材54を取り付けるためのフランジとして機能する。 In this way, the housing side surface 105s of the generator housing 105, which is the generator housing member, has a material mounting area that includes the opening 31b, and functions as a flange for mounting the bushing internal member 54.

 このような第3の変形例のオゾン発生装置100Cは、基本構成、第1の変形例及び第2の変形例と同様な効果を奏し、以下の固有の効果を奏する。 The ozone generator 100C of this third variant has the same effects as the basic configuration, first variant, and second variant, and also has the following unique effects.

 第3の変形例のオゾン発生装置100Cにおける発生器収容部材となる発生器収容筐体105は単体構造であるため、発生器収容部材の部品点数を最小限に抑えることができる。 The generator housing 105, which serves as the generator housing member in the third modified ozone generator 100C, has a single structure, so the number of parts in the generator housing member can be minimized.

 <実施の形態2>
 図10~図13は、本開示の実施の形態2である対象物伝達内部部材32の取り付け方法を示す説明図である。
<Second Embodiment>
10 to 13 are explanatory diagrams showing a method of attaching the object transmitting internal member 32 according to the second embodiment of the present disclosure.

 対象物伝達内部部材32は、実施の形態1のオゾン発生装置100、及び第1~第3の変形例のオゾン発生装置100A~100Cそれぞれの構成要素となっている。 The object-transmitting internal member 32 is a component of the ozone generator 100 of embodiment 1 and the ozone generators 100A to 100C of the first to third modified examples.

 例えば、図4~図6で示す実施の形態1の基本構成であるオゾン発生装置100において、基台24または発生器カバー110のカバー側面110sが外枠部材31となり、オゾンガス用内部部材51、冷媒用内部部材52、原料ガス用内部部材53及びブッシング用内部部材54が対象物伝達内部部材32となる。 For example, in the ozone generator 100 having the basic configuration of embodiment 1 shown in Figures 4 to 6, the base 24 or the cover side surface 110s of the generator cover 110 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant internal member 52, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

 また、図7で示す第1の変形例であるオゾン発生装置100Aにおいて、基台24Aまたは発生器カバー110Aのカバー側面110sが外枠部材31となり、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B、原料ガス用内部部材53及びブッシング用内部部材54が対象物伝達内部部材32となる。 Furthermore, in the ozone generator 100A, which is a first modified example shown in Figure 7, the base 24A or the cover side surface 110s of the generator cover 110A serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

 一方、図8で示す第2の変形例であるオゾン発生装置100Bにおいて、基台24Bまたは発生器カバー110Bのカバー側面110sが外枠部材31となり、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B、原料ガス用内部部材53及びブッシング用内部部材54が対象物伝達内部部材32となる。 On the other hand, in the second modified ozone generator 100B shown in Figure 8, the base 24B or the cover side surface 110s of the generator cover 110B serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

 そして、図9で示す第3の変形例であるオゾン発生装置100Cにおいて、発生器収容筐体105の筐体底部105bまたは筐体側面105sが外枠部材31となり、オゾンガス用内部部材51、冷媒入力用内部部材52A、冷媒出力用内部部材52B、原料ガス用内部部材53及びブッシング用内部部材54が対象物伝達内部部材32となる。 In the ozone generator 100C, which is a third modified example shown in Figure 9, the housing bottom 105b or housing side surface 105s of the generator housing 105 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

 このように、複数の対象物伝達内部部材32は、オゾン発生装置100(100A~100C)の構成要素として外枠部材31の部材取付領域に取り付けられている。以下、オゾン発生装置100、100A~100Cを総称した装置を「オゾン発生装置100等」と称する場合がある。 In this way, the multiple object-transmitting internal members 32 are attached to the member attachment area of the outer frame member 31 as components of the ozone generator 100 (100A-100C). Hereinafter, the ozone generators 100, 100A-100C may be collectively referred to as "ozone generator 100, etc."

 オゾン発生装置100等はオゾン発生器101を有している。オゾン発生器101は、放電空間6に誘電体バリア放電を発生させ、放電空間6に供給した原料ガスG1からオゾンガスG2を生成するオゾン生成処理を実行する。オゾン発生器101は発生器収容部材の収容空間S100内に収容される。 The ozone generator 100 etc. has an ozone generator 101. The ozone generator 101 generates a dielectric barrier discharge in the discharge space 6 and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1 supplied to the discharge space 6. The ozone generator 101 is housed in the housing space S100 of the generator housing member.

 収容空間S100には、放電空間6で発生したオゾンガスG2を流すためのオゾンガス通路8、冷却水等の冷媒を流すための冷媒通路9(冷媒入力通路9A,冷媒出力通路9B)、原料ガスG1を流すための原料ガス通路18、電力供給用の給電経路となる給電端子4等が設けられる。なお、基本構成のオゾン発生装置100では、収容空間S100自体が原料ガスG1用の伝達部材として機能している。 The storage space S100 is provided with an ozone gas passage 8 for passing the ozone gas G2 generated in the discharge space 6, a refrigerant passage 9 (refrigerant input passage 9A, refrigerant output passage 9B) for passing a refrigerant such as cooling water, a source gas passage 18 for passing the source gas G1, and a power supply terminal 4 that serves as a power supply path. In the ozone generator 100 with a basic configuration, the storage space S100 itself functions as a transmission member for the source gas G1.

 以下、図10~図13を参照して、対象物伝達内部部材32の取り付け方法の処理内容を説明する。取り付け方法は以下で述べるステップ(a)~(c)を実行する方法である。なお、図10~図13において、説明の都合上、対象物伝達内部部材32に設けられる貫通流路32bの図示を省略している。 The process for installing the object transmission internal member 32 will be explained below with reference to Figures 10 to 13. The installation method involves steps (a) to (c) described below. Note that for ease of explanation, the through-flow passage 32b provided in the object transmission internal member 32 has been omitted from Figures 10 to 13.

 ステップ(a)…図10に示すように、開口部31bを有する外枠部材31と、開口部31b内に取り付けられる予定の対象物伝達内部部材32とを準備する。 Step (a)...As shown in Figure 10, prepare an outer frame member 31 having an opening 31b and an object-transmitting inner member 32 to be attached within the opening 31b.

 開口部31bは平面視して開口径d1の円状を呈し、対象物伝達内部部材32は平面視して部材径d2の円状を呈している。対象物伝達内部部材32の外周面はシール用溝部等の凹部を有していない。 The opening 31b has a circular shape with an opening diameter d1 in plan view, and the object transmission internal member 32 has a circular shape with a member diameter d2 in plan view. The outer peripheral surface of the object transmission internal member 32 does not have any recesses such as sealing grooves.

 外枠部材31において、開口部31b及びその周辺の領域が、対象物伝達内部部材32を取り付けるための部材取付領域となる。 In the outer frame member 31, the opening 31b and its surrounding area serve as a component mounting area for mounting the object transmission internal component 32.

 対象物伝達内部部材32は、所定の冷却温度である冷却温度T1以下の時、対象物伝達内部部材32の部材径d2が開口径d1を下回り、冷却温度T1を上回り、かつ、0℃以上の非冷却温度帯THの時、部材径d2が開口径d1以上になる径変動性質を有している。 The object transmission internal member 32 has a diameter fluctuation property in which the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1 when the temperature is below a predetermined cooling temperature T1, and when the temperature is above T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes equal to or larger than the opening diameter d1.

 非冷却温度帯THは、冷却温度T1を上回り、かつ0℃以上の温度範囲であり、{0~40℃}の常温温度帯TRが含まれる。なお、オゾン発生器101にオゾン生成処理を実行時の温度も非冷却温度帯THの温度範囲に含まれる。 The non-cooling temperature zone TH is a temperature range above the cooling temperature T1 and above 0°C, and includes the room temperature zone TR of {0-40°C}. Note that the temperature at which the ozone generator 101 performs the ozone generation process is also included in the temperature range of the non-cooling temperature zone TH.

 図10~図13において、非冷却温度帯THの時の部材径d2を非冷却時部材径d21と記し、冷却温度T1以下の時の部材径d2を冷却時部材径d22と記している。外枠部材31は冷却対象から外されており常に非冷却温度帯THで温度設定されているため、一定の開口径d1となっている。 In Figures 10 to 13, the member diameter d2 when in the non-cooling temperature zone TH is referred to as the non-cooling member diameter d21, and the member diameter d2 when the cooling temperature is below T1 is referred to as the cooling member diameter d22. The outer frame member 31 is excluded from the cooling target and is always set to a temperature in the non-cooling temperature zone TH, so it has a constant opening diameter d1.

 例えば、非冷却温度帯THにおいて、非冷却時部材径d21と開口径d1との間に式(1){d21=k・d1…(1)}を満足するように寸法設定する。ここで、係数kは、{k=1.0002~1.0003}に設定される。 For example, in the non-cooling temperature zone TH, the dimensions are set so that the relationship between the non-cooling member diameter d21 and the opening diameter d1 satisfies equation (1) {d21 = k d1...(1)}. Here, the coefficient k is set to {k = 1.0002 to 1.0003}.

 したがって、図10に示すように、ステップ(a)の実行時には、外枠部材31の開口径d1より対象物伝達内部部材32の非冷却時部材径d21の方が長くなっている。 Therefore, as shown in Figure 10, when step (a) is performed, the uncooled member diameter d21 of the object-transmitting internal member 32 is longer than the opening diameter d1 of the outer frame member 31.

 ステップ(a)の実行後、ステップ(b)が実行される。なお、ステップ(b)は以下のステップ(b-1)及び(b-2)を含んでいる。 After step (a) is executed, step (b) is executed. Note that step (b) includes the following steps (b-1) and (b-2).

 ステップ(b-1)…図11に示すように、対象物伝達内部部材32を冷却温度T1以下の低温状態に設定する。なお、外枠部材31の温度は非冷却温度帯THに設定されている。 Step (b-1)...As shown in Figure 11, the object transmission internal member 32 is set to a low temperature below cooling temperature T1. The temperature of the outer frame member 31 is set to the non-cooling temperature zone TH.

 ステップ(b-2)…図12に示すように、冷却温度T1以下の状態で、外枠部材31の開口部31b内に対象物伝達内部部材32を配置する。 Step (b-2)...As shown in Figure 12, the object transmission internal member 32 is placed within the opening 31b of the outer frame member 31 at a temperature below cooling temperature T1.

 ステップ(b-1)の実行により、対象物伝達内部部材32の部材径d2が非冷却時部材径d21から冷却時部材径d22に短縮し、式(2){d22<d1}が成立する。以下、この点を詳述する。 By performing step (b-1), the diameter d2 of the internal object transmission member 32 is reduced from the uncooled diameter d21 to the cooled diameter d22, and equation (2) {d22<d1} holds. This point is described in more detail below.

 対象物伝達内部部材32の構成材料がステンレス鋼等の耐食性合金材料の場合、温度と正の相関がある熱ひずみεによって部材径d2は温度低下に伴い短くなる性質を有している。 If the material constituting the internal object transmission member 32 is a corrosion-resistant alloy material such as stainless steel, the member diameter d2 tends to shorten as the temperature decreases due to thermal strain ε, which is positively correlated with temperature.

 そこで、対象物伝達内部部材32の温度を0℃より十分低い冷却温度T1以下に設定することにより、上述した式(2)を満足する冷却時部材径d22を実現することができる。なお、冷却温度T1は{-270℃~-20℃}の範囲で0℃より十分に低く設定され、例えば、196℃に設定される。 Therefore, by setting the temperature of the object-transmitting internal member 32 to a cooling temperature T1 or lower, which is sufficiently lower than 0°C, it is possible to achieve a cooled member diameter d22 that satisfies the above-mentioned formula (2). The cooling temperature T1 is set to a value sufficiently lower than 0°C within the range of {-270°C to -20°C}, for example, 196°C.

 ステップ(b-2)の実行時において、上記式(2)が成立しているため、対象物伝達内部部材32の外周面と開口部31bの内周面との間に隙間35が生じるため、開口部31b内に対象物伝達内部部材32を比較的簡単に配置することができる。 When step (b-2) is performed, the above formula (2) is satisfied, and therefore a gap 35 is created between the outer surface of the object transmission internal member 32 and the inner surface of the opening 31b, making it relatively easy to position the object transmission internal member 32 within the opening 31b.

 このように、上述したステップ(b-1)及び(b-2)を含むステップ(b)として、冷却温度T1以下に設定した対象物伝達内部部材32を、外枠部材31におえる部材取付領域の開口部31b内に配置する処理を実行する。なお、外枠部材31の部材取付領域は開口部31b及びその周辺の領域となる。ステップ(b)の実行後、以下のステップ(c)が実行される。 In this way, step (b), which includes the above-mentioned steps (b-1) and (b-2), involves placing the object-transmitting internal member 32, which has been set to a cooling temperature equal to or lower than T1, within the opening 31b of the member mounting area in the outer frame member 31. The member mounting area of the outer frame member 31 is the opening 31b and its surrounding area. After step (b) is performed, the following step (c) is executed.

 ステップ(c)…外枠部材31の開口部31b内に対象物伝達内部部材32を配置した状態で、対象物伝達内部部材32の設定温度を冷却温度T1から非冷却温度帯THに上昇させる。 Step (c)...With the object transmission internal member 32 placed within the opening 31b of the outer frame member 31, the set temperature of the object transmission internal member 32 is increased from the cooling temperature T1 to the non-cooling temperature zone TH.

 すると、図13に示すように、対象物伝達内部部材32の外周面が開口部31bの内周面との境界面33に密着した状態で外枠部材31と対象物伝達内部部材32とが一体化した対象物伝達用構造体30を得ることができる。 As a result, as shown in Figure 13, an object transmission structure 30 can be obtained in which the outer frame member 31 and the object transmission internal member 32 are integrated, with the outer surface of the object transmission internal member 32 being in close contact with the boundary surface 33 with the inner surface of the opening 31b.

 非冷却温度帯THでは、上述した式(1)が成立しているため、開口部31bの内周面と対象物伝達内部部材32との間の隙間35は完全に埋められ、対象物伝達内部部材32の外周面と開口部31bの内周面との境界面33で密着した状態となる。すなわち、対象物伝達内部部材32は、密着取付状態で外枠部材31の開口部31b内に取り付けられる。 In the non-cooling temperature zone TH, the above-mentioned formula (1) holds, so the gap 35 between the inner surface of the opening 31b and the object transmission internal member 32 is completely filled, and the outer surface of the object transmission internal member 32 and the inner surface of the opening 31b are in tight contact at the boundary surface 33. In other words, the object transmission internal member 32 is attached within the opening 31b of the outer frame member 31 in a tightly attached state.

 なお、対象物伝達内部部材32となるオゾンガス用内部部材51等は、外枠部材31となる基台24や発生器カバー110のカバー側面110sと比較的して十分小さいため、外枠部材31が対象物伝達内部部材32から受ける力(応力×接触面積)も比較的小さい。このため、対象物伝達内部部材32が取り付けられた対象物伝達用構造体30において、非冷却温度帯THで式(1)が成立しても、基台24や発生器カバー110等の外枠部材31が変形することはない。 Furthermore, the ozone gas internal member 51, which forms the object transmission internal member 32, is sufficiently small compared to the base 24, which forms the outer frame member 31, and the cover side surface 110s of the generator cover 110, and therefore the force (stress x contact area) that the outer frame member 31 receives from the object transmission internal member 32 is also relatively small. For this reason, even if equation (1) holds in the non-cooling temperature zone TH in an object transmission structure 30 to which the object transmission internal member 32 is attached, the outer frame member 31, such as the base 24 or generator cover 110, will not deform.

 オゾン発生器101の動作状態時におけるオゾン発生装置100の動作温度は非冷却温度帯THに含まれる。また、冷却水等の冷媒CMの温度は0℃以上であり、冷媒CMの供給によって対象物伝達内部部材32の温度が冷却温度T1以下になることもない。 The operating temperature of the ozone generator 100 when the ozone generator 101 is in an operating state is included in the non-cooling temperature zone TH. Furthermore, the temperature of the refrigerant CM, such as cooling water, is above 0°C, and the supply of refrigerant CM does not cause the temperature of the object transmission internal member 32 to fall below the cooling temperature T1.

 したがって、対象物伝達用構造体30の完成後において、開口部31b内における対象物伝達内部部材32の密着取付状態は安定性良く維持される。 Therefore, after the object transmission structure 30 is completed, the tightly fitted state of the object transmission internal member 32 within the opening 31b is maintained with good stability.

 対象物伝達用構造体30が完成された後において、対象物伝達内部部材32は、オゾンガス用内部部材51、冷媒用内部部材52(冷媒入力用内部部材52A、冷媒出力用内部部材52B)、原料ガス用内部部材53及びブッシング用内部部材54として部材取付領域に取り付けられている。すなわち、対象物伝達内部部材32はオゾン発生装置100等の構成要素となる。 After the object transmission structure 30 is completed, the object transmission internal member 32 is attached to the member attachment area as the ozone gas internal member 51, the refrigerant internal member 52 (refrigerant input internal member 52A, refrigerant output internal member 52B), the raw material gas internal member 53, and the bushing internal member 54. In other words, the object transmission internal member 32 becomes a component of the ozone generator 100, etc.

 例えば、図4~図6で示した実施の形態1のオゾン発生装置100の場合、外枠部材31となる基台24に対し、各々が対象物伝達内部部材32となるオゾンガス用内部部材51及び冷媒用内部部材52が、実施の形態2である対象物伝達内部部材32の取り付け方法によって取り付けられる。 For example, in the case of the ozone generator 100 of embodiment 1 shown in Figures 4 to 6, the ozone gas internal member 51 and the refrigerant internal member 52, which each serve as the object transmission internal member 32, are attached to the base 24, which serves as the outer frame member 31, using the attachment method for the object transmission internal member 32 of embodiment 2.

 同様に、外枠部材31となる発生器カバー110のカバー側面110sに対し、各々が対象物伝達内部部材32となる原料ガス用内部部材53及びブッシング用内部部材54が、実施の形態2の対象物伝達内部部材32の取り付け方法によって取り付けられる。 Similarly, the source gas internal member 53 and the bushing internal member 54, which each become the object transmission internal member 32, are attached to the cover side surface 110s of the generator cover 110, which becomes the outer frame member 31, using the attachment method for the object transmission internal member 32 in embodiment 2.

 本開示の実施の形態2である対象物伝達内部部材32の取り付け法は、対象物伝達内部部材32の上述した径変動性質を利用して、上述したステップ(a)~(c)を実行している。 The method for installing the object transmission internal member 32, which is the second embodiment of the present disclosure, utilizes the above-mentioned diameter fluctuation properties of the object transmission internal member 32 to perform the above-mentioned steps (a) to (c).

 上述したステップ(b)及びステップ(c)を実行することにより、Oリングを含むシール部材等の他の部材を設ける必要なく比較的簡単に、外枠部材31における部材取付領域の開口部31b内に対象物伝達内部部材32を密着取付状態で取り付けることができる。 By performing the above-described steps (b) and (c), the object transmission internal member 32 can be attached in a tightly fitted state within the opening 31b of the member attachment area in the outer frame member 31 relatively easily, without the need for other members such as sealing members including O-rings.

 その結果、実施の形態2の対象物伝達内部部材の取り付け方法は、シール部材等の他の部材を不要として対象物伝達内部部材32を外枠部材31に取り付けることができるため、他の部材の交換に伴うオゾン発生装置100等の使用効率の低下を確実に回避することができる。 As a result, the method for attaching the object transmission internal member in embodiment 2 allows the object transmission internal member 32 to be attached to the outer frame member 31 without the need for other members such as sealing members, thereby reliably avoiding a decrease in the usage efficiency of the ozone generator 100, etc., that would otherwise be associated with the replacement of other members.

 なお、対象物伝達用構造体30は、例えば、基本構成のオゾン発生装置100の場合、基台24とオゾンガス用内部部材51及び冷媒用内部部材52の組合せと、発生器カバー110のカバー側面110sと原料ガス用内部部材53及びブッシング用内部部材54の組合せとが該当する。 In the case of the ozone generator 100 with a basic configuration, the object transfer structure 30 corresponds to, for example, the combination of the base 24, the ozone gas internal member 51, and the refrigerant internal member 52, and the combination of the cover side surface 110s of the generator cover 110, the raw material gas internal member 53, and the bushing internal member 54.

 本開示は詳細に説明されたが、上記した説明は、すべての局面において、例示であって、本開示がそれに限定されるものではない。例示されていない無数の変形例が、本開示の範囲から外れることなく想定され得るものと解される。 Although the present disclosure has been described in detail, the above description is illustrative in all respects and does not limit the present disclosure. It is understood that countless variations not illustrated can be envisioned without departing from the scope of the present disclosure.

 4 給電端子
 8 オゾンガス通路
 9 冷媒通路
 9A 冷媒入力通路
 9B 冷媒出力通路
 11 オゾンガス出口
 12 冷媒出入口
 12A 冷媒入口
 12B 冷媒出口
 18 原料ガス通路
 24,24A,24B 基台
 30 対象物伝達用構造体
 31 外枠部材
 31b 開口部
 32 対象物伝達内部部材
 32b 貫通流路
 51 オゾンガス用内部部材
 52 冷媒用内部部材
 52A 冷媒入力用内部部材
 52B 冷媒出力用内部部材
 53 原料ガス用内部部材
 54 ブッシング用内部部材
 100,100A~100C オゾン発生装置
 101 オゾン発生器
 105 発生器収容筐体
 105b 筐体底部
 105s 筐体側面
 110,110A,110B 発生器カバー
 110s カバー側面
 120 高圧ブッシング
 130 原料ガス入口
 200 オゾントランス
 300 高周波インバータ
 CM 冷媒
 d1 開口径
 d2 部材径
 d21 非冷却時部材径
 d22 冷却時部材径
 G1 原料ガス
 G2 オゾンガス
 S100 収容空間
DESCRIPTION OF SYMBOLS 4 Power supply terminal 8 Ozone gas passage 9 Refrigerant passage 9A Refrigerant input passage 9B Refrigerant output passage 11 Ozone gas outlet 12 Refrigerant inlet/outlet 12A Refrigerant inlet 12B Refrigerant outlet 18 Raw material gas passage 24, 24A, 24B Base 30 Structure for transmitting object 31 Outer frame member 31b Opening 32 Internal member for transmitting object 32b Through flow path 51 Internal member for ozone gas 52 Internal member for refrigerant 52A Internal member for refrigerant input 52B Internal member for refrigerant output 53 Internal member for raw material gas 54 Internal member for bushing 100, 100A to 100C Ozone generator 101 Ozone generator 105 Generator accommodating housing 105b Housing bottom 105s Housing side 110, 110A, 110B Generator cover 110s Cover side surface 120 High-pressure bushing 130 Raw material gas inlet 200 Ozone transformer 300 High-frequency inverter CM Refrigerant d1 Opening diameter d2 Component diameter d21 Component diameter when not cooled d22 Component diameter when cooled G1 Raw material gas G2 Ozone gas S100 Storage space

Claims (9)

 放電空間に誘電体バリア放電を発生させ、前記放電空間に供給した原料ガスからオゾンガスを生成するオゾン生成処理を実行するオゾン発生器と、
 前記放電空間で発生した前記オゾンガスを流すためのオゾンガス通路と、
 前記オゾン発生器及び前記オゾンガス通路を収容空間内に収容する発生器収容部材と、
 前記発生器収容部材の部材取付領域に取り付けられた対象物伝達内部部材とを備え、
 前記対象物伝達内部部材は、前記オゾン発生器用の伝達対象物が伝達可能に伝達部材に接続され、
 前記伝達部材は前記伝達対象物を伝達するための構造物または空間であり、前記伝達対象物は前記オゾンガスを含み、前記伝達部材は前記オゾンガス通路を含み、
 前記部材取付領域は開口部を有し、
 前記対象物伝達内部部材は前記開口部内に設けられ、
 前記開口部は平面視して開口径の円状を呈し、前記対象物伝達内部部材は平面視して部材径の円状を呈し、
 前記対象物伝達内部部材は、所定の冷却温度以下の時、前記部材径が前記開口径を下回り、前記所定の冷却温度を上回りかつ0℃以上の非冷却温度帯の時、前記部材径が前記開口径以上になる径変動性質を有し、
 前記非冷却温度帯の時、前記対象物伝達内部部材の外周面と前記開口部の内周面との境界面において、他の部材を介することなく、前記対象物伝達内部部材と前記開口部とは密着している、
オゾン発生装置。
an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space;
an ozone gas passage for flowing the ozone gas generated in the discharge space;
a generator housing member that houses the ozone generator and the ozone gas passage in a housing space;
an object-transmitting internal member attached to a member attachment region of the generator housing member;
the object transmission internal member is connected to a transmission member so that a transmission object for the ozone generator can be transmitted therethrough;
the transmission member is a structure or space for transmitting the transmission object, the transmission object includes the ozone gas, and the transmission member includes the ozone gas passage;
The component attachment region has an opening,
the object-transmitting internal member is disposed within the opening;
The opening has a circular shape with an opening diameter in a plan view, and the object transmission internal member has a circular shape with a member diameter in a plan view,
the internal object transmission member has a diameter fluctuation property in which the member diameter is smaller than the opening diameter when the temperature is equal to or lower than a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is higher than the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher,
In the non-cooling temperature zone, the object transmission internal member and the opening are in close contact with each other at a boundary surface between an outer circumferential surface of the object transmission internal member and an inner circumferential surface of the opening without any other member therebetween.
Ozone generator.
 請求項1記載のオゾン発生装置であって、
 前記対象物伝達内部部材は、前記伝達対象物を流通させための貫通流路を有し、
 前記対象物伝達内部部材はオゾンガス用内部部材を含み、
 前記オゾンガス用内部部材は、前記対象物伝達内部部材の前記貫通流路を介して前記オゾンガスが伝達可能に前記オゾンガス通路と接続される、
オゾン発生装置。
2. The ozone generator according to claim 1,
the object transmission internal member has a through flow path for passing the object to be transmitted;
the object-transmitting internal member includes an ozone gas internal member;
the ozone gas internal member is connected to the ozone gas passage so that the ozone gas can be transmitted through the through-flow path of the object transmission internal member;
Ozone generator.
 請求項2記載のオゾン発生装置であって、
 前記オゾン発生器に冷媒を供給するための冷媒通路をさらに備え、
 前記冷媒通路は前記発生器収容部材の前記収容空間内に収容され、
 前記伝達対象物は前記冷媒を含み、前記伝達部材は前記冷媒通路を含み、
 前記対象物伝達内部部材は冷媒用内部部材を含み、
 前記冷媒用内部部材は、前記対象物伝達内部部材の前記貫通流路を介して前記冷媒が伝達可能に前記冷媒通路と接続される、
オゾン発生装置。
3. The ozone generator according to claim 2,
a refrigerant passage for supplying a refrigerant to the ozone generator;
the refrigerant passage is accommodated within the accommodation space of the generator accommodation member,
the transfer object includes the refrigerant, and the transfer member includes the refrigerant passage;
the object-transmitting internals include refrigerant internals;
The refrigerant internal member is connected to the refrigerant passage so that the refrigerant can be transmitted through the through-flow passage of the object transmission internal member.
Ozone generator.
 請求項3記載のオゾン発生装置であって、
 前記冷媒通路は
 前記冷媒を前記オゾン発生器に供給するための冷媒入力通路と、
 前記オゾン発生器に供給された前記冷媒を排出するための冷媒出力通路とを含み、
 前記伝達部材は前記冷媒入力通路及び前記冷媒出力通路を含み、
 前記冷媒用内部部材は、冷媒入力用内部部材及び冷媒出力用内部部材を含み、
 前記冷媒入力用内部部材は、前記貫通流路を介して前記冷媒が伝達可能に前記冷媒入力通路と接続され、
 前記冷媒出力用内部部材は、前記貫通流路を介して前記冷媒が伝達可能に前記冷媒出力通路と接続される、
オゾン発生装置。
4. The ozone generator according to claim 3,
the refrigerant passage includes a refrigerant input passage for supplying the refrigerant to the ozone generator;
a refrigerant output passage for discharging the refrigerant supplied to the ozone generator,
the transfer member includes the refrigerant input passage and the refrigerant output passage,
the refrigerant internal member includes a refrigerant input internal member and a refrigerant output internal member;
the refrigerant input internal member is connected to the refrigerant input passage so that the refrigerant can be transmitted through the through-flow passage;
the refrigerant output internal member is connected to the refrigerant output passage so that the refrigerant can be transmitted through the through-flow passage;
Ozone generator.
 請求項2から請求項4のいずれかに記載のオゾン発生装置であって、
 前記オゾン発生器の前記放電空間に前記原料ガスを供給するための原料ガス通路をさらに備え、
 前記原料ガス通路は前記発生器収容部材の前記収容空間内に設けられ、
 前記伝達対象物は前記原料ガスを含み、前記伝達部材は前記原料ガス通路を含み、
 前記対象物伝達内部部材は原料ガス用内部部材を含み、
 前記原料ガス用内部部材は、前記対象物伝達内部部材の前記貫通流路を介して前記原料ガスが伝達可能に前記原料ガス通路と接続される、
オゾン発生装置。
5. The ozone generator according to claim 2, wherein:
a raw material gas passage for supplying the raw material gas to the discharge space of the ozone generator,
the raw material gas passage is provided within the accommodation space of the generator accommodation member,
the transmission target includes the source gas, the transmission member includes the source gas passage,
the object-transmitting internals include source gas internals;
the source gas internal member is connected to the source gas passage so that the source gas can be transmitted through the through-flow path of the object transmission internal member;
Ozone generator.
 請求項1記載のオゾン発生装置であって、
 前記発生器収容部材の外部に設けられ、電力供給線を介してオゾン発生用電力を供給する電力供給部と、
 前記発生器収容部材の前記収容空間内に設けられ、前記オゾン発生器に前記オゾン発生用電力を供給するための給電経路とをさらに備え、
 前記伝達対象物は前記オゾン発生用電力を含み、前記伝達部材は前記給電経路を含み、
 前記対象物伝達内部部材はブッシング用内部部材を含み、
 前記ブッシング用内部部材は、前記対象物伝達内部部材を介して前記オゾン発生用電力が供給可能に前記給電経路と接続される、
オゾン発生装置。
2. The ozone generator according to claim 1,
a power supply unit provided outside the generator housing member and supplying power for generating ozone via a power supply line;
a power supply path provided in the accommodation space of the generator accommodation member for supplying the ozone generator with power for generating ozone,
the transmission target includes the ozone generating power, and the transmission member includes the power supply path;
the object transmission internal member includes a bushing internal member;
The bushing internal member is connected to the power supply path so that the ozone generating power can be supplied via the object transmission internal member.
Ozone generator.
 請求項1から請求項6のいずれかに記載のオゾン発生装置であって、
 前記発生器収容部材は、
 基台と、
 前記基台の表面上に配置される発生器カバーとを含み、
 前記基台の表面上に前記収容空間が形成され、
 前記部材取付領域は前記基台の領域または前記発生器カバーの領域を含む、
オゾン発生装置。
7. The ozone generator according to claim 1,
The generator housing member includes:
The base and
a generator cover disposed on a surface of the base;
The storage space is formed on a surface of the base,
The component mounting area includes an area of the base or an area of the generator cover.
Ozone generator.
 請求項1から請求項6のいずれかに記載のオゾン発生装置であって、
 前記発生器収容部材は単体構造であり、内部に前記収容空間を有する、
オゾン発生装置。
7. The ozone generator according to claim 1,
The generator accommodating member has a single structure and has the accommodating space therein.
Ozone generator.
 オゾン発生装置における対象物伝達内部部材の取り付け方法であって、
 前記オゾン発生装置は、
 放電空間に誘電体バリア放電を発生させ、前記放電空間に供給した原料ガスからオゾンガスを生成するオゾン生成処理を実行するオゾン発生器と、
 前記放電空間で発生した前記オゾンガスを流すためのオゾンガス通路と、
 前記オゾン発生器及び前記オゾンガス通路を収容空間内に収容する発生器収容部材とを備え、
 前記対象物伝達内部部材の取り付け方法は、
 前記発生器収容部材における部材取付領域の開口部内に対象物伝達内部部材を取り付ける方法であり、
 (a) 前記対象物伝達内部部材を準備するステップを備え、
 前記開口部は平面視して開口径の円状を呈し、前記対象物伝達内部部材は平面視して部材径の円状を呈し、
 前記対象物伝達内部部材は、所定の冷却温度以下の時、前記部材径が前記開口径を下回り、前記所定の冷却温度を上回りかつ0℃以上の非冷却温度帯の時、前記部材径が前記開口径以上になる径変動性質を有し、
 前記対象物伝達内部部材の取り付け方法は、前記ステップ(a)の実行後に実行される、
 (b) 前記所定の冷却温度以下に設定した前記対象物伝達内部部材を、前記部材取付領域の前記開口部内に配置するステップと、
 (c) 前記開口部内に前記対象物伝達内部部材を配置した状態で、前記対象物伝達内部部材の温度を前記非冷却温度帯に設定するステップとをさらに備える、
対象物伝達内部部材の取り付け方法。
1. A method for installing an object-transmitting internal member in an ozone generating device, comprising:
The ozone generator is
an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space;
an ozone gas passage for flowing the ozone gas generated in the discharge space;
a generator housing member that houses the ozone generator and the ozone gas passage within a housing space,
The method for attaching the object transmitting internal member includes:
A method for mounting an object transmission internal member within an opening in a member mounting region of the generator housing member,
(a) providing the object-transmitting internal member;
The opening has a circular shape with an opening diameter in a plan view, and the object transmission internal member has a circular shape with a member diameter in a plan view,
the internal object transmission member has a diameter fluctuation property in which the member diameter is smaller than the opening diameter when the temperature is equal to or lower than a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is higher than the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher,
The method for installing the object transmission internal member is performed after performing step (a).
(b) placing the object transmission internal member, set to a temperature equal to or lower than the predetermined cooling temperature, within the opening of the member mounting region;
(c) setting the temperature of the object transmission internal member to the non-cooling temperature range while the object transmission internal member is disposed within the opening,
Method of installing object-transmitting internal components.
PCT/JP2024/009988 2024-03-14 2024-03-14 Ozone generation device and method for attaching object-transfer internal member Pending WO2025191785A1 (en)

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JPS4635971Y1 (en) * 1968-04-25 1971-12-10
JP2004142963A (en) * 2002-10-22 2004-05-20 Mitsubishi Electric Corp Ozone generator
JP2009066712A (en) * 2007-09-13 2009-04-02 Toyota Motor Corp Method of assembling tank cap, tank cap and tank equipped with the same
JP2012121124A (en) * 2010-12-10 2012-06-28 Ihi Corp Installation tool and method
JP2014118341A (en) * 2012-12-19 2014-06-30 Toshiba Corp Movable ozone generating unit
JP2014118342A (en) * 2012-12-19 2014-06-30 Toshiba Corp Ozone generator
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