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WO2025187527A1 - Système optique et dispositif d'imagerie - Google Patents

Système optique et dispositif d'imagerie

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Publication number
WO2025187527A1
WO2025187527A1 PCT/JP2025/006860 JP2025006860W WO2025187527A1 WO 2025187527 A1 WO2025187527 A1 WO 2025187527A1 JP 2025006860 W JP2025006860 W JP 2025006860W WO 2025187527 A1 WO2025187527 A1 WO 2025187527A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical system
lens
diffractive
diffractive lens
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2025/006860
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English (en)
Japanese (ja)
Other versions
WO2025187527A8 (fr
Inventor
心平 荻野
文彦 半澤
千秋 渋谷
仁 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Semiconductor Solutions Corp
Original Assignee
Sony Semiconductor Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Semiconductor Solutions Corp filed Critical Sony Semiconductor Solutions Corp
Publication of WO2025187527A1 publication Critical patent/WO2025187527A1/fr
Publication of WO2025187527A8 publication Critical patent/WO2025187527A8/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings

Definitions

  • This disclosure relates to an optical system and an imaging device.
  • Patent Documents 1 and 2 propose a technology that utilizes the aberration properties of metalenses to combine them with multiple refractive lenses (bulk lenses) to improve optical properties.
  • Patent Document 2 allows for a more compact optical system than one constructed solely with refractive lenses, but because it uses multiple refractive lenses, the miniaturization is insufficient.
  • a first optical system includes a plurality of diffractive lenses and an aperture stop disposed between any two of the plurality of diffractive lenses, the aperture of which is filled with a substance.
  • a second optical system comprises, in order from the object side to the image plane side, a first lens having a first surface and a second surface, the first surface and the second surface being planar; a second lens having a third surface and a fourth surface, the third surface and the fourth surface being planar, the third surface being cemented to the second surface without an air gap; and a medium having a refractive index greater than 1 that fills the space from the fourth surface to the image plane without an air gap, and of the first surface through the fourth surface, at least the second surface or the third surface is a phase modulation surface.
  • a first imaging device includes an optical system and a solid-state imaging element that outputs an imaging signal corresponding to an optical image formed by the optical system, and the optical system is configured using the first optical system according to the embodiment of the present disclosure.
  • a second imaging device includes an optical system and an imaging element that receives light via the optical system.
  • the optical system comprises, in order from the object side to the image plane side, a first lens having a first surface and a second surface, the first and second surfaces being planar; a second lens having a third and fourth surface, the third and fourth surfaces being planar, the third surface being cemented to the second surface without an air gap; and a medium having a refractive index greater than 1 that fills the space from the fourth surface to the imaging element without an air gap, and of the first through fourth surfaces, at least the second or third surface is a phase modulation surface.
  • the configuration of multiple diffractive lenses and aperture stops is optimized to enable miniaturization and high performance.
  • the configuration up to the image plane has been optimized to enable miniaturization and high performance.
  • FIG. 1 is an explanatory diagram showing the influence of reflected light components in a solid-state imaging device with a CSP structure.
  • FIG. 2 is an explanatory diagram showing the influence of reflected light components in a solid-state imaging device with a CSP structure.
  • FIG. 3 is an explanatory diagram showing an overview of chromatic aberration occurring in a diffractive lens and chromatic aberration occurring in a refractive lens.
  • FIG. 4 is a cross-sectional view schematically illustrating an overview of an optical system according to the first embodiment of the present disclosure.
  • FIG. 5 is an explanatory diagram showing an example of an image formation state when there is image deviation in the optical system.
  • FIG. 1 is an explanatory diagram showing the influence of reflected light components in a solid-state imaging device with a CSP structure.
  • FIG. 2 is an explanatory diagram showing the influence of reflected light components in a solid-state imaging device with a CSP structure.
  • FIG. 3 is an explanatory diagram showing an overview of
  • FIG. 6 is a cross-sectional view schematically showing a configuration example 1-1 of the optical system according to the first embodiment.
  • FIG. 7 is an aberration diagram showing longitudinal aberration in the optical system according to Configuration Example 1-1.
  • FIG. 8 is a cross-sectional view schematically showing a configuration example 1-2 of the optical system according to the first embodiment.
  • FIG. 9 is an aberration diagram showing longitudinal aberration in the optical system according to Configuration Example 1-2.
  • FIG. 10 is a cross-sectional view schematically showing a configuration example 1-3 of the optical system according to the first embodiment.
  • FIG. 11 is a cross-sectional view showing an example of the actual shape of an aspherical lens in an optical system according to Configuration Example 1-3.
  • FIG. 12 is an aberration diagram showing longitudinal aberration in the optical system according to Configuration Example 1-3.
  • FIG. 13 is a cross-sectional view schematically showing an optical system according to a comparative example.
  • FIG. 14 is an explanatory diagram showing a comparison between the specifications of the optical system according to the comparative example and the specifications of the optical system according to configuration example 1-1.
  • FIG. 15 is an explanatory diagram showing a comparison of the specifications of the optical systems according to configuration examples 1-1 to 1-3.
  • FIG. 16 is a cross-sectional view showing an example of the configuration of the imaging device according to the first embodiment.
  • FIG. 17 is a cross-sectional view that schematically illustrates an overview of an optical system and an imaging device according to a second embodiment of the present disclosure.
  • FIG. 18 is an explanatory diagram showing how light rays pass through an optical system according to a comparative example.
  • FIG. 19 is an explanatory diagram showing how light rays pass when the first lens is disposed on the object side of the phase modulation surface.
  • FIG. 20 is an explanatory diagram showing an example of the state of light rays passing when a second lens is disposed on the image plane side of the phase modulation surface.
  • FIG. 21 is a cross-sectional view schematically showing a configuration example 2-1 of the optical system according to the second embodiment.
  • FIG. 22 is a cross-sectional view showing an example of the structure of the phase modulation surface.
  • FIG. 23 is a cross-sectional view schematically showing a configuration example 2-2 of the optical system according to the second embodiment.
  • FIG. 24 is a cross-sectional view schematically showing a configuration example 2-3 of the optical system according to the second embodiment.
  • Patent Document 1 JP 2022-544213 A
  • metalens Similar to diffractive lenses, metalens have a periodically repeating structure, and can impart desired optical properties by diffracting light in any direction. However, the diffraction direction varies significantly depending on the wavelength of the light. Therefore, when light is incident from a light source with a FWHM (Full Width at Half Maximum) of several tens of nanometers, such as an LED (Light Emitting Diode), significant chromatic aberration occurs, significantly degrading the optical properties.
  • FWHM Full Width at Half Maximum
  • Patent Document 2 JP 2021-71727 A proposes a technology that utilizes the aberration characteristics of a metalens and combines it with multiple refractive lenses (bulk lenses) to improve optical properties. This technology allows for a more compact optical system than one composed solely of refractive lenses, but the use of multiple refractive lenses means that the system is not sufficiently compact.
  • the chip-size package (CSP) structure is known as one type of solid-state imaging element structure that achieves increased pixel count, miniaturization, and a low profile.
  • the CSP structure is an extremely small package that is roughly the same size as a single chip.
  • a solid-state imaging element with a CSP structure for example, pixels that convert incident light into electrical signals are formed on a semiconductor substrate, and a glass substrate is placed over the light-receiving surface where the pixels are formed to secure the solid-state imaging element and protect the light-receiving surface.
  • Figures 1 and 2 are explanatory diagrams showing the influence of reflected light components on a solid-state imaging device with a CSP structure.
  • a glass substrate 102 is arranged opposite the light-receiving surface side of the solid-state imaging element 101 via adhesive 131.
  • the upper surface side of the glass substrate 102 (the light-receiving surface side of the solid-state imaging element 101) is air, and the refractive index n is 1.0.
  • the refractive index n of the glass substrate 102 is, for example, 1.5.
  • subject light that is directly incident on the light-receiving surface of the solid-state imaging element 101 may be totally reflected at the light-receiving surface.
  • This totally reflected component may reflect at the interface between the glass substrate 102 and the air and return to the light-receiving surface again (total reflection aliasing component).
  • total reflection aliasing component If the thickness h1 of the glass substrate 102 is large, as in the example in the upper part of FIG. 1, the above-mentioned total reflection aliasing component will be imaged around the original light source image, as in the example in the lower part of FIG. 1. For this reason, the total reflection components at the light receiving surface appear in the captured image as, for example, flare or ghosting on the subject image, causing a decrease in the image quality of the captured image.
  • (Chromatic aberration of diffractive and refractive lenses) 3 is an explanatory diagram outlining the chromatic aberrations that occur in a diffractive lens and a refractive lens.
  • ⁇ 1, ⁇ 2, and ⁇ 3 represent the wavelengths of light, with the wavelength relationship being ⁇ 3> ⁇ 2> ⁇ 1 (where ⁇ 1 is a shorter wavelength and ⁇ 3 is a longer wavelength than ⁇ 2).
  • the shorter the wavelength the lower the refractive power of a diffractive lens.
  • the Abbe number is equivalent to -3.45, which is very high dispersion.
  • the shorter the wavelength the higher the refractive power of a refractive lens.
  • the Abbe number of a refractive lens is generally around 20 to 60.
  • the chromatic aberration of a diffractive lens and that of a refractive lens cancel each other out.
  • the sensitivity of diffractive lenses to chromatic aberration is greater than that of refractive lenses. This results in many design constraints, such as increasing the focal length of the diffractive lens, as in the optical system described in Patent Document 2, or increasing the number of refractive lenses.
  • FIG. 4 is a cross-sectional view schematically illustrating an overview of an optical system according to the first embodiment of the present disclosure.
  • the optical system according to the first embodiment comprises a plurality of diffractive lenses and an aperture stop St, which is disposed between any two of the plurality of diffractive lenses and has an aperture Sta filled with a substance such as resin.
  • Each of the plurality of diffractive lenses has positive refractive power.
  • FIG. 4 shows an example configuration having multiple diffractive lenses, including a first diffractive lens 11 and a second diffractive lens 12.
  • the example configuration in FIG. 4 includes, in order from the object side toward the image plane (imaging plane), a first diffractive lens 11, an aperture stop St, and a second diffractive lens 12.
  • the object-side surface of the first diffractive lens 11 and the image-plane-side surface of the second diffractive lens 12 are diffractive surfaces.
  • Each of the multiple diffractive lenses has positive refractive power.
  • the first diffractive lens 11 and the second diffractive lens 12 each have positive refractive power.
  • the opening Sta of the aperture stop St is filled with a material such as resin
  • the light passing range from the first diffractive lens 11 to the second diffractive lens 12 is filled with a material such as resin.
  • image shift due to wavelength can be reduced by arranging the first diffractive lens 11 and the second diffractive lens 12 opposite the aperture stop St.
  • total reflection will occur at the output interface of the first diffractive lens 11. For this reason, total reflection can be reduced by filling the opening Sta of the aperture stop St with a material such as resin.
  • Figure 5 is an explanatory diagram showing an example of the imaging state when there is image misalignment in the optical system.
  • the focus position shifts significantly due to wavelength, and if the wavelength width of the light source is too broad, the resolution decreases. For this reason, it is desirable for the light source to have a wavelength width equivalent to that of a monochromatic LED (several tens of nm). Furthermore, in the peripheral 32 of the imaging surface, even if there is a wavelength width, there is little position shift due to wavelength.
  • ⁇ di indicates the value of the Abbe number at the d-line of the material of the optical element that comprises the i-th surface.
  • ⁇ i indicates the value (mm) of the effective diameter of the i-th surface.
  • DOE in the surface number (Si) column indicates that the surface is a diffractive surface.
  • ASP in the surface number (Si) column indicates that the surface is an aspherical surface.
  • IMG indicates that the surface is an image surface.
  • the lens surfaces are either diffractive or aspherical.
  • the diffraction surface is defined by the following polynomial (A) that represents the phase change ⁇ (r).
  • ⁇ is the normalized wavelength
  • M is the diffraction order
  • ⁇ is the phase coefficient
  • r is the distance from the optical axis Z1.
  • the aspherical shape is defined by the following formula (B).
  • Z(r) is positive in the direction of light propagation and indicates the distance (sag) from the vertex of the lens surface in the direction of the optical axis.
  • C indicates the curvature (the reciprocal of the radius of curvature).
  • k indicates the conic constant.
  • A indicates the aspherical coefficient.
  • r indicates the distance from the optical axis Z1.
  • FIG. 6 is a cross-sectional view schematically showing a configuration example 1-1 of the optical system according to the first embodiment.
  • the optical system 1 according to configuration example 1-1 has multiple diffractive lenses, including a first diffractive lens 11 and a second diffractive lens 12.
  • the optical system 1 according to configuration example 1-1 includes, in order from the object side toward the image plane (imaging plane) IMG side, the first diffractive lens 11, an aperture stop St, and a second diffractive lens 12.
  • the second diffractive lens 12 includes a bandpass filter as a filter LF on the image plane IMG side.
  • the first diffractive lens 11 and the second diffractive lens 12 each have positive refractive power.
  • the object-side surface of the first diffractive lens 11 and the image-plane-side surface of the second diffractive lens 12 are diffractive surfaces.
  • the opening Sta of the aperture stop St is filled with a material such as resin.
  • the first diffractive lens 11 and the second diffractive lens 12 are arranged opposite each other with the aperture stop St sandwiched between them.
  • the first diffractive lens 11 and the second diffractive lens 12 also have approximately the same focal length. As a result, the chromatic aberration of magnification is canceled out by the first diffractive lens 11 and the second diffractive lens 12.
  • Table 1 shows the basic lens data for optical system 1 according to configuration example 1-1.
  • Table 2 shows the coefficient values representing the diffractive surface defined by the above polynomial (A) for optical system 1 according to configuration example 1-1.
  • FIG. 7 is an aberration diagram showing longitudinal aberration in the optical system 1 according to configuration example 1-1.
  • FIG. 7 shows spherical aberration, astigmatism (curvature of field), and distortion as longitudinal aberrations.
  • the solid line indicates values at a wavelength of 940 nm
  • the dashed-dotted line indicates values at a wavelength of 920 nm
  • the dashed line indicates values at a wavelength of 960 nm.
  • S indicates values at the sagittal image plane
  • T indicates values at the tangential (meridional) image plane.
  • values at a wavelength of 940 nm are shown. " ⁇ " indicates the angle of view. Similar aberration diagrams will be shown for the other configuration examples that follow.
  • Fig. 8 is a cross-sectional view schematically showing a configuration example 1-2 of the optical system according to the first embodiment
  • Fig. 9 is an aberration diagram showing longitudinal aberration in the optical system 2 according to the configuration example 1-2.
  • the optical system 2 according to configuration example 1-2 has multiple diffractive lenses, namely, a first diffractive lens 11, a second diffractive lens 12, and a third diffractive lens 13.
  • the optical system 2 according to configuration example 1-2 includes, in order from the object side toward the image plane (imaging plane) IMG side, a first diffractive lens 11, an aperture stop St, a second diffractive lens 12, and a third diffractive lens 13.
  • the first diffractive lens 11, the second diffractive lens 12, and the third diffractive lens 13 each have positive refractive power.
  • the object-side surface of the first diffractive lens 11, the object-side surface of the second diffractive lens 12, and the object-side surface of the third diffractive lens 13 are diffractive surfaces.
  • the opening Sta of the aperture stop St is filled with a material such as resin.
  • the first diffractive lens 11 and the third diffractive lens 13 are arranged opposite each other with the aperture stop St sandwiched between them.
  • the first diffractive lens 11 and the third diffractive lens 13 also have approximately the same focal length. As a result, the chromatic aberration of magnification is canceled out by the first diffractive lens 11 and the third diffractive lens 13.
  • Optical system 2 according to configuration example 1-2 can achieve even higher optical performance than optical system 1 according to configuration example 1-1.
  • Table 3 shows basic lens data for optical system 2 according to configuration example 1-2.
  • Table 4 shows the coefficient values representing the diffractive surface defined by the above polynomial (A) for optical system 2 according to configuration example 1-2.
  • Fig. 10 is a cross-sectional view schematically showing a configuration example 1-3 of the optical system according to the first embodiment
  • Fig. 12 is an aberration diagram showing longitudinal aberration in the optical system 3 according to the configuration example 1-3.
  • the optical system 3 according to configuration example 1-3 has multiple diffractive lenses, including a first diffractive lens 11 and a second diffractive lens 12.
  • the optical system 3 according to configuration example 1-3 includes, in order from the object side toward the image plane (imaging plane) IMG side, a first diffractive lens 11, an aperture stop St, a refractive lens 21, and a second diffractive lens 12.
  • the first diffractive lens 11 and the second diffractive lens 12 each have positive refractive power.
  • the object-side surface of the first diffractive lens 11 and the object-side surface of the second diffractive lens 12 are diffractive surfaces.
  • the opening Sta of the aperture stop St is filled with a material such as resin.
  • the first diffractive lens 11 and the second diffractive lens 12 are arranged opposite each other with the aperture stop St sandwiched between them.
  • the first diffractive lens 11 and the second diffractive lens 12 also have approximately the same focal length. As a result, the chromatic aberration of magnification is canceled out by the first diffractive lens 11 and the second diffractive lens 12.
  • the object-side surface of the refractive lens 21 is aspherical.
  • the sag of the object-side surface (aspherical surface) of the refractive lens 21 is 40 ⁇ m or less.
  • the maximum sag of the aspherical surface is 13 ⁇ m.
  • Figure 11 shows an example of the actual shape of the refractive lens 21, which is an aspherical lens in the optical system 3 according to configuration example 1-3. If the curvature of the aspherical surface of the refractive lens 21 becomes too large, the amount of sag increases, and the thickness of the adhesive layer bonding the first diffractive lens 11 and the refractive lens 21 varies significantly within the lens surface, reducing reliability in terms of adhesive strength and preventing lens cracking. For this reason, it is desirable that the amount of sag of the aspherical surface of the refractive lens 21 be 40 ⁇ m or less.
  • Optical system 3 according to configuration example 1-3 can achieve even higher optical performance than optical system 1 according to configuration example 1-1.
  • [Table 5] shows basic lens data for optical system 3 according to configuration examples 1-3.
  • [Table 6] shows the values of coefficients representing the diffractive surface defined by the above polynomial (A) for optical system 3 according to configuration examples 1-3.
  • [Table 7] shows the values of coefficients representing the aspherical shape defined by the above formula (B) for optical system 3 according to configuration examples 1-3.
  • FIG. 13 is a cross-sectional view schematically showing an optical system according to a comparative example.
  • the optical system 100 comprises, in order from the object side toward the image plane (imaging plane) IMG side, a first refractive lens L1, a second refractive lens L2, a third refractive lens L3, and an optical member GC.
  • Each lens surface of the first refractive lens L1, the second refractive lens L2, and the third refractive lens L3 is aspherical.
  • Table 8 shows basic lens data for the optical system 100 according to the comparative example.
  • Table 9 shows the values of the coefficients representing the aspherical shape defined by the above formula (B) for the optical system 100 according to the comparative example.
  • FIG. 14 shows a comparison of the specifications of the optical system 100 according to the comparative example and the specifications of the optical system 1 according to configuration example 1-1.
  • FIG. 15 shows a comparison of the specifications of the optical systems 1 to 3 according to configuration examples 1-1 to 1-3.
  • Figures 14 and 15 show the following specifications: light source wavelength, lens configuration, and sensor diagonal length (the diagonal length of the light-receiving surface of the solid-state image sensor to which the optical system is applied). Further specifications include the field of view (FOV), F-number (Fno), chief ray angle (CRA), total optical length (the distance on the optical axis from the surface closest to the object to the image plane IMG), and maximum optical diameter. Further specifications include the relative illumination (RI) values at FOVs of 60° and 120°.
  • FOV field of view
  • Fno F-number
  • CRA chief ray angle
  • RI relative illumination
  • each diffractive lens has a positive refractive power. This makes it possible to achieve the power distribution necessary for chromatic aberration correction.
  • the light source is preferably an LED light source. LEDs can be implemented more inexpensively than laser light sources.
  • the diffractive lens may be a metalens.
  • Diffractive lenses other than metalens have diffraction efficiencies of approximately 80% or less.
  • metalens have a diffraction efficiency of approximately 90%, which is high efficiency.
  • the diffractive lens may be a transmission diffraction grating, a blazed diffraction grating, or a volume phase holographic diffraction grating.
  • the material of the metalens substrate may be, for example, glass (SiO 2 , fused silica, BK7, Quartz) or a resin substrate.
  • the material of the metasurface pillars in the metalens may be, for example, titanium oxide (TiO), silicon, polysilicon (Poly-Si), or amorphous silicon (a-Si).
  • the protective layer of the metasurface may be composed of, for example, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, fused silica, BK7, Quartz, siloxane-based resin, styrene-based resin, acrylic resin, etc.
  • the protective layer of the metasurface may be composed of a material in which any of these resins contains fluorine.
  • the refractive index of the material filled in the opening Sta be 1.3 or higher. If the refractive index of the material is too low, the ability to correct chromatic aberration of magnification decreases. If the refractive index of the material is too low, the critical angle of the exit surface of the first diffractive lens 11 becomes small. As a result, it becomes difficult to provide the first diffractive lens 11 with sufficient power equivalent to the required amount of chromatic aberration correction.
  • the material filled in the opening Sta is preferably resin.
  • resin for example, UV-curable resin or thermosetting resin is preferable.
  • the material filled in the opening Sta may also be a material other than resin, such as oil, glycerin, or water. If the material filled inside the aperture stop St is resin, for example, in the configuration of the optical system 2 according to configuration example 1-2 above, the first diffractive lens 11, aperture stop St, and second diffractive lens 12 can each be cemented together, making stacking easier.
  • the optical system 2 according to Configuration Example 1-2 may have a configuration in which the order of the aperture stop St and the second diffractive lens 12 is changed. That is, the first diffractive lens 11, the second diffractive lens 12, the aperture stop St, and the third diffractive lens 13 may be arranged in this order from the object side toward the image plane (imaging plane) IMG side.
  • the order in which the aperture stop St and the refractive lens 21 are arranged may be changed from the configuration of the optical system 3 according to the above configuration examples 1-3.
  • the first diffractive lens 11, the refractive lens 21, the aperture stop St, and the second diffractive lens 12 may be arranged in this order from the object side toward the image plane (imaging plane) IMG side.
  • FIG. 16 is a cross-sectional view showing an example of the configuration of the imaging device according to the first embodiment.
  • the imaging device may include the optical system according to the first embodiment described above and a solid-state imaging element 101 that outputs an imaging signal corresponding to the optical image formed by the optical system.
  • FIG 16 shows an example configuration of an imaging device according to the first embodiment, including a solid-state imaging element with a CSP structure (CSP solid-state imaging element 120).
  • the imaging device according to the first embodiment includes a solid-state imaging element 101, a glass substrate 102, and an optical system 104.
  • the imaging device according to the first embodiment also includes a circuit board 106, a connector 108, a spacer 109, a semiconductor component 110, a fixing agent 111, a thin circuit board 112, an adhesive 131, and a black resin 141.
  • the CSP solid-state imaging element 120 includes the solid-state imaging element 101, a glass substrate 102, an adhesive 131, and a black resin 141.
  • the solid-state imaging element 101 is an imaging element such as a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor.
  • the solid-state imaging element 101 has a light-receiving surface formed by a two-dimensional lattice arrangement of light-receiving elements.
  • the glass substrate 102 has a first surface and a second surface facing each other.
  • the light-receiving surface of the solid-state imaging element 101 is disposed opposite the first surface of the glass substrate 102, and the optical system 104 is disposed opposite the second surface of the glass substrate 102.
  • the adhesive 131 is a transparent adhesive (GLUE) that bonds the solid-state imaging element 101 and the glass substrate 102.
  • GLUE transparent adhesive
  • the optical system 104 forms a subject image on the light-receiving surface of the solid-state imaging device 101.
  • the optical systems 1 to 3 according to the above configuration examples 1-1 to 1-3 can be used as the optical system 104.
  • the black resin 141 is a black mask that blocks light emitted from the optical system 104 that is outside the light-receiving surface of the solid-state imaging element 101.
  • the black resin 141 also functions as a cavity layer that functions as a spacer to connect the optical system 104 and the solid-state imaging element 101 in parallel.
  • the circuit board 106 is a board that outputs the electrical signal (image signal) from the solid-state image sensor 101 to the outside.
  • the connector 108 is a connector for connecting the image signal to an external device.
  • the spacer 109 is a spacer with a built-in circuit that secures an actuator (not shown) to the circuit board 106.
  • the semiconductor components 110 are components such as capacitors mounted on the circuit board 106 and spacer 109, and control LSIs (Large Scale Integration) for actuators (not shown).
  • the fixing agent 111 fixes the solid-state imaging element 101 (CSP solid-state imaging element 120), the optical system 104, and the semiconductor component 110.
  • the fixing agent 111 is made of a material that has the characteristic of reducing refracted and reflected light on the side surfaces of the optical system 104 and the solid-state imaging element 101.
  • the thin circuit board 112 is connected to the solid-state imaging element 101 and outputs the imaging signal from the solid-state imaging element 101 to the circuit board 106.
  • the imaging device according to the first embodiment can achieve miniaturization, including the optical system, while simultaneously avoiding flare and ghosting caused by reflected light (see Figures 1 and 2) and ensuring the strength of the entire CSP solid-state imaging element 120.
  • the thickness h2 of the glass substrate 102 and adhesive 131 placed on the solid-state imaging element 101 is reduced, resulting in a decrease in the strength of the solid-state imaging element 101 (CSP solid-state imaging element 120).
  • strength can be improved by applying the optical system according to the first embodiment as the optical system 104.
  • the optical system according to the first embodiment optimizes the configuration of the multiple diffractive lenses and the aperture stop St so as to achieve both compactness and high performance, thereby making it possible to provide an optical system and an imaging device that are both compact and high performance.
  • the optical system according to the first embodiment can suppress image shift due to wavelength changes by optimizing the configuration of multiple diffractive lenses and aperture stop St.
  • the optical system according to the first embodiment can realize a compact, low-cost optical system that can accommodate a light source with a wavelength width equivalent to that of a monochromatic LED (several tens of nanometers).
  • Second embodiment [2.0 Comparative Example] Recent trends in camera modules for mobile devices include higher resolution sensor devices and smaller module sizes. While metalenses are used as a means of miniaturization, it is difficult to achieve good MTF imaging performance with a single lens, focusing light into a small spot at the high Nyquist frequency of the micropixels.
  • One method for improving optical properties is to combine a metalenses with an aspherical lens (see Patent Document 2), but this method results in increased size due to an increase in the overall optical length and degradation of optical properties due to decentering errors in multiple lens groups.
  • the optical system proposed in Patent Document 2 simply replaces some of the conventional module lenses with metalenses, limiting its contribution to miniaturization in the in-plane direction perpendicular to the optical axis.
  • FIG. 17 is a cross-sectional view that schematically illustrates an overview of an optical system and an imaging device according to a second embodiment of the present disclosure.
  • the imaging device includes an optical system according to the second embodiment and an imaging element 200 that receives light via the optical system.
  • the optical system comprises, in order from the object side to the image plane side, a first lens 11A having a first surface and a second surface as optical surfaces, and a second lens 12A having a third surface and a fourth surface as optical surfaces.
  • first lens 11A the first surface, which is the surface on the object side, and the second surface, which is the surface on the image plane side, are both flat.
  • second lens 12A the third surface, which is the surface on the object side, and the fourth surface, which is the surface on the image plane side, are both flat.
  • the optical system is arranged so that the imaging plane coincides with the imaging plane of the image sensor 200.
  • the image sensor 200 has multiple pixels arranged two-dimensionally, and converts the secondary optical image formed by the optical system into an electrical signal corresponding to the light intensity distribution, and outputs it as an imaging signal.
  • the first lens 11A and the second lens 12A are compound lenses cemented together.
  • the third surface of the second lens 12A is cemented to the second surface of the first lens 11A without an air gap between them.
  • at least the second or third surface is a phase modulation surface Sp.
  • the third surface is a phase modulation surface Sp, but the second surface, rather than the third surface, may also be a phase modulation surface Sp.
  • at least one of the first and fourth surfaces may be a phase modulation surface Sp.
  • a phase modulation surface Sp is a surface through which a phase change occurs in light as it passes through that surface.
  • the first lens 11A and the second lens 12A are made of a lens material with a refractive index greater than 1.
  • the optical system and the image sensor 200 are cemented together.
  • a medium with a refractive index greater than 1 is provided so as to fill the area from the fourth surface of the optical system to the image plane IMG (imaging plane) without an air gap.
  • an optical filter GF Configuration Example 2-1
  • an optical member GL Configuration Examples 2-1, 2-2, and 2-3
  • the optical system includes an aperture stop St near the first surface.
  • the aperture stop St may be positioned in close contact with the object side of the first surface, as in Configuration Example 2-1 described below, or may be positioned at a distance from the object side of the first surface, as in Configuration Examples 2-2 and 2-3 described below.
  • the optical system according to the second embodiment can realize a small, bright optical system with high resolution.
  • Fig. 18 is an explanatory diagram showing an example of a state in which a light ray passes through an optical system according to a comparative example.
  • Fig. 19 is an explanatory diagram showing an example of a state in which a light ray passes through when the first lens 11A is disposed on the object side of the phase modulation surface Sp.
  • the first lens 11A By arranging the first lens 11A on the object side of the phase modulation surface Sp as in the configuration example of Fig. 19, there is an effect of lowering the ray height x, and the effective diameter can be made smaller, thereby achieving miniaturization in the in-plane direction.
  • the ray height x at the phase modulation surface Sp is expressed as in equation (1) using the angle of view ⁇ .
  • A is the aperture diameter
  • d is the distance between the aperture stop St and the phase modulation surface Sp
  • f is the distance between the phase modulation surface Sp and the image plane IMG.
  • the optical system according to the second embodiment differs from the optical system according to the comparative example in that the first lens 11A is positioned on the object side of the phase modulation surface Sp, as shown in FIG. 19.
  • the ray height x at the phase modulation surface Sp is expressed as in equation (2) using angle ⁇ .
  • angle ⁇ is expressed as in equation (3) using the angle of view ⁇ . Because angle ⁇ can be reduced by the influence of the refractive index of first lens 11A, in the optical system according to the second embodiment, the ray height x can be reduced from equations (2) and (3).
  • FIG. 20 is an explanatory diagram showing an example of the state of light rays passing when the second lens 12A is disposed on the image plane side of the phase modulation surface Sp.
  • the spot diameter Ds can be reduced, and high-resolution imaging can be achieved.
  • the formula for calculating the spot diameter Ds is shown in Equation (4).
  • ⁇ is the design wavelength of the phase modulation surface Sp
  • F is the Fno of the phase modulation surface Sp
  • NA is the numerical aperture of the phase modulation surface Sp
  • n is the refractive index of the second lens 12A.
  • Table 10 shows the results of a comparison of the specifications of the optical system according to the comparative example in Figure 18 with those of optical systems according to configuration examples 2-1 and 2-2, which will be described later. It can be seen that in configuration examples 2-1 and 2-2, which will be described later, the NA increases due to the influence of the refractive index of second lens 12A, resulting in a small spot diameter Ds. In the optical system according to the comparative example, the medium in the area of second lens 12A is air, so in principle the NA cannot exceed 1.
  • the optical system according to the second embodiment by using a medium with a refractive index greater than 1 for second lens 12A, it is possible, in principle, to achieve an NA of 1 or greater, which contributes to a reduction in the imaging spot diameter Ds for higher resolution.
  • the Fno can be made small, making it possible to realize a bright optical system. Furthermore, as mentioned above, by lowering the ray height x, an optical effective diameter without vignetting can be ensured, making it possible to eliminate vignetting even in peripheral areas. As a result, it is possible to provide a bright optical system with little peripheral light falloff, even in a wide-angle lens system.
  • the space between the phase modulation surface Sp and the image plane IMG is filled with a medium having a refractive index greater than 1, without an air layer in between, so that in principle the NA can exceed 1, thereby realizing a bright, high-resolution lens. Furthermore, by locating the first lens 11A on the object side of the phase modulation surface Sp, the ray height x at the phase modulation surface Sp can be lowered, thereby eliminating the lens edge and lens holder and realizing a low-profile, compact optical module.
  • the first surface and the phase modulation surface Sp bend the ray angle in stages, reducing the ray height x and creating a nearly telecentric optical system, thereby realizing a compact optical module with a wide angle and little peripheral shading.
  • the optical system according to the second embodiment is designed so that there is no air gap between the first surface and the image plane IMG (imaging surface), which reduces assembly costs by eliminating the need for a lens holder and makes it possible to achieve smaller size and lower costs. Furthermore, because there is no air gap between the first surface and the image plane IMG (imaging surface), it is possible to prevent dust from adhering to the interior of the optical system and to prevent foreign matter from entering from the outside. Furthermore, a medium with a refractive index greater than 1 is placed between the fourth surface and the imaging surface, making it easier to design the filter film.
  • FIG. 21 is a cross-sectional view schematically illustrating a configuration example 2-1 of an optical system according to a second embodiment.
  • Table 11 shows the design wavelength ⁇ of the phase modulation surface Sp in the optical system 1A according to configuration example 2-1, the focal length f of the entire system, the F-number (Fno), the image height Y, and the total optical length L (the distance on the optical axis from the surface closest to the object to the image plane IMG).
  • Table 12 shows basic lens data for the optical system 1A according to configuration example 2-1.
  • "Si" indicates the number of the i-th surface, with symbols increasing sequentially from the surface closest to the object.
  • Ra indicates the value (mm) of the paraxial radius of curvature of the i-th surface.
  • Di indicates the value (mm) of the distance on the optical axis between the i-th surface and the (i+1)-th surface.
  • ndi indicates the value of the refractive index at the d-line (wavelength 587.6 nm) of the material of the optical element comprising the i-th surface.
  • ⁇ di indicates the value of the Abbe number at the d-line of the material of the optical element comprising the i-th surface.
  • STO in the surface number (Si) column indicates that the aperture stop St is located at the corresponding position.
  • IMG indicates that the corresponding surface is an image plane.
  • Table 13 shows the values of the coefficients that define the phase modulation surface Sp in the optical system 1A according to configuration example 2-1.
  • ⁇ represents the normalized wavelength
  • M represents the diffraction order.
  • the phase modulation surface Sp is defined by the following polynomial (C) that represents the phase change amount ⁇ .
  • R is the distance (radius) from the optical axis Z1 within the lens surface, specified by the coefficient Cn of the phase polynomial, and ⁇ represents the phase amount, expressed in mm.
  • the optical system 1A according to configuration example 2-1 comprises, in order from the object side to the image plane side, an aperture stop St, a first lens 11A having first and second optical surfaces, a second lens 12A having third and fourth optical surfaces, an optical filter GF made of a medium with a refractive index greater than 1, and an optical member GL.
  • Aperture diaphragm St is located on the object side of first lens 11A, with an air gap between them.
  • Aperture diaphragm St is located on the object side, with a gap between it and the first surface.
  • first lens 11A and second lens 12A are cemented together without an air gap. Furthermore, second lens 12A and optical filter GF are cemented together without an air gap.
  • a medium with a refractive index greater than 1, including optical filter GF and optical member GL, is arranged to fill the area from the fourth surface of second lens 12A to the image plane IMG (imaging plane) without an air gap.
  • Optical system 1A is positioned so that the image plane IMG (imaging plane) coincides with the imaging plane of image sensor 200. This results in a structure where no air gap is present between the first surface and image plane IMG.
  • the first lens 11A is a glass substrate with planar first and second surfaces.
  • the second lens 12A is a glass substrate with planar third and fourth surfaces, with the third surface cemented to the second surface of the first lens 11A without an air gap between them.
  • the third surface of the second lens 12A is a phase modulation surface Sp.
  • the third phase modulation surface Sp has a positive focal length, which gives the second lens 12A a lens function.
  • the optical filter GF is a filter that transmits only light in the required wavelength band from the wavelength components of the incident light, and blocks light in unnecessary wavelength bands.
  • a BPF Band Pass Filter
  • the optical filter GF when passing light with a narrow wavelength width, such as an infrared laser.
  • an IR (infrared) cut filter is used.
  • the optical filter GF achieves the desired spectral characteristics by using a coating consisting of multiple layered transparent films.
  • the optical filter GF is disposed with its filter surface in contact with the fourth surface.
  • the optical filter GF may be formed by coating a film having the desired spectral characteristics on a flat substrate different from the second lens 12A, and then bonding the filter surface to the fourth surface. Note that the function of the optical filter GF may also be achieved by directly coating the fourth surface with a film having the desired spectral characteristics.
  • Figure 22 is a cross-sectional view showing an example of the structure of the phase modulation surface Sp.
  • a typical example of a phase modulation surface Sp is a metasurface structure using a dielectric.
  • Figure 22 shows an example of a cross-sectional view of a metasurface structure as an example of the structure of a phase modulation surface Sp.
  • This metasurface structure includes a first substrate 41 with flat surfaces on both sides, a second substrate 42 with flat surfaces on both sides, and an intermediate layer 50 disposed between the first substrate 41 and the second substrate 42. Multiple nanostructures smaller than the wavelength of the incident light are disposed in the intermediate layer 50, and a filler material 51 is filled in the area other than the nanostructures.
  • a typical nanostructure is a cylindrical pillar 52 made of a dielectric.
  • the wavelength of the incident light is 940 nm
  • a-Si for example, can be used as the dielectric that constitutes the pillars 52.
  • the height of the pillars 52 can be, for example, 800 nm, and the pillars can be disposed at intervals of 370 nm.
  • Filler 51 is filled between first substrate 41 and second substrate 42 so as to fill pillars 52.
  • Filler 51 is transparent, and a material with a large difference in refractive index from pillars 52 is used.
  • phase modulation surface Sp actually has a finite thickness, considering it as a surface does not have a significant effect on lens performance, so it is treated as a surface here. The same applies to the other configuration examples below.
  • (Configuration Example 2-2) 23 is a cross-sectional view schematically illustrating a configuration example 2-2 of an optical system according to the second embodiment.
  • Table 14 shows the values of the design wavelength ⁇ of the phase modulation surface Sp in an optical system 2A according to configuration example 2-2, the focal length f of the entire system, the F-number (Fno), the image height Y, and the total optical length L (the distance on the optical axis from the surface closest to the object to the image plane IMG).
  • Table 15 shows basic lens data for the optical system 2A according to configuration example 2-2.
  • Table 16 shows the values of coefficients defining the phase modulation surface Sp in the optical system 2A according to configuration example 2-2. The meanings of symbols in each table are the same as those in configuration example 2-1 above.
  • the optical system 2A according to configuration example 2-2 comprises, in order from the object side to the image plane side, an aperture stop St, a first lens 11A having first and second optical surfaces, a second lens 12A having third and fourth optical surfaces, and an optical member GL made of a medium with a refractive index greater than 1.
  • Aperture diaphragm St is disposed in close contact with the object side of the first surface of first lens 11A.
  • Aperture diaphragm St may be configured by adhering an aperture structure to the object side of first lens 11A, or by patterning a low-reflection resist material on the first surface of first lens 11A using photolithography.
  • first lens 11A and second lens 12A are cemented together without an air gap. Furthermore, second lens 12A and optical member GL are cemented together without an air gap.
  • a medium with a refractive index greater than 1, including optical member GL, is arranged to fill the space from the fourth surface of second lens 12A to the image plane IMG (imaging plane) without an air gap.
  • Optical system 2A is positioned so that the image plane IMG (imaging plane) coincides with the imaging plane of image sensor 200. This results in a structure where no air gap exists between the first surface and image plane IMG.
  • the first lens 11A is a glass substrate with planar first and second surfaces.
  • the second lens 12A is a glass substrate with planar third and fourth surfaces, with the third surface cemented to the second surface of the first lens 11A without an air gap between them.
  • the first surface is a phase modulation surface Sp.
  • the third surface is a phase modulation surface Sp.
  • the phase modulation surface Sp of the first surface and the phase modulation surface Sp of the third surface each have a positive focal length, so that the first lens 11A and the second lens 12A each have a lens function.
  • optical system 2A according to configuration example 2-2 by providing phase modulation surfaces Sp on both the first and third surfaces, aberrations can be corrected over a wider range of pupil diameters, making it possible to realize an optical system with a very high NA (small Fno).
  • (Configuration Example 2-3) 24 is a cross-sectional view schematically illustrating a configuration example 2-3 of an optical system according to the second embodiment.
  • [Table 17] shows values of the design wavelength ⁇ of the phase modulation surface Sp in an optical system 3A according to configuration example 2-3, the focal length f of the entire system, the F-number (Fno), the image height Y, and the total optical length L (the distance on the optical axis from the surface closest to the object to the image plane IMG).
  • [Table 18] shows basic lens data for the optical system 3A according to configuration example 2-3.
  • [Table 19] shows values of coefficients defining the phase modulation surface Sp in the optical system 3A according to configuration example 2-3. The meanings of symbols in each table are the same as those in configuration example 2-1 above.
  • the optical system 3A according to configuration example 2-3 comprises, in order from the object side to the image plane side, an aperture stop St, a first lens 11A having first and second optical surfaces, a second lens 12A having third and fourth optical surfaces, and an optical member GL made of a medium with a refractive index greater than 1.
  • Aperture diaphragm St is disposed in close contact with the object side of the first surface of first lens 11A.
  • Aperture diaphragm St may be configured by adhering an aperture structure to the object side of first lens 11A, or by patterning a low-reflection resist material on the first surface of first lens 11A using photolithography.
  • first lens 11A and second lens 12A are cemented together without an air gap. Furthermore, second lens 12A and optical member GL are cemented together without an air gap.
  • a medium with a refractive index greater than 1, including optical member GL, is arranged to fill the area from the fourth surface of second lens 12A to the image plane IMG (imaging plane) without an air gap.
  • Optical system 3A is positioned so that the image plane IMG (imaging plane) coincides with the imaging plane of image sensor 200. This results in a structure where no air gap is present between the first surface and image plane IMG.
  • the first lens 11A is a glass substrate with planar first and second surfaces.
  • the second lens 12A is a glass substrate with planar third and fourth surfaces, with the third surface cemented to the second surface of the first lens 11A without an air gap between them.
  • the first surface is a phase modulation surface Sp.
  • the third and fourth surfaces are each a phase modulation surface Sp.
  • the phase modulation surface Sp of the first surface and the phase modulation surface Sp of the third surface each have a positive focal length. This allows the first lens 11A and the second lens 12A to each have a lens function.
  • optical system 3A by providing a phase modulation surface Sp on each of the first, third, and fourth surfaces, aberrations can be corrected over a wider range of pupil diameters, making it possible to realize an optical system with a very high NA (small Fno).
  • the present technology can be configured as follows.
  • the configuration is optimized to enable miniaturization and high performance. This makes it possible to provide a small, low-cost optical system and imaging device.
  • the plurality of diffractive lenses include a first diffractive lens and a second diffractive lens, From the object side to the image plane side, the first diffractive lens; the aperture stop;
  • the plurality of diffractive lenses include a first diffractive lens, a second diffractive lens, and a third diffractive lens.
  • the optical system according to (4) above comprising: the third diffractive lens.
  • the plurality of diffractive lenses include a first diffractive lens and a second diffractive lens, From the object side to the image plane side, the first diffractive lens; the aperture stop; A refractive lens, The optical system according to (1) above, comprising: the second diffractive lens.
  • each of the plurality of diffractive lenses is a metalens.
  • the optical system comprises: A plurality of diffractive lenses; an aperture stop, the aperture of which is filled with a substance, disposed between any two of the plurality of diffractive lenses.
  • a first lens having a first surface and a second surface, the first surface and the second surface being flat; a second lens having a third surface and a fourth surface, the third surface and the fourth surface being planar, and the third surface being bonded to the second surface without an air layer therebetween; a medium having a refractive index greater than 1, the medium being provided so as to fill the area from the fourth surface to the image plane without an air gap therebetween;
  • An optical system wherein at least the second surface or the third surface among the first surface to the fourth surface is a phase modulation surface.
  • the phase modulation surface is a metasurface in which a plurality of structures smaller than the wavelength of incident light are arranged.
  • optical system further comprising an aperture stop arranged in close contact with the first surface on the object side, or arranged at a distance from the first surface on the object side.
  • an optical system and an image sensor that receives light via the optical system;
  • the optical system comprises: From the object side to the image plane side, a first lens having a first surface and a second surface, the first surface and the second surface being flat; a second lens having a third surface and a fourth surface, the third surface and the fourth surface being planar, and the third surface being bonded to the second surface without an air layer therebetween; a medium having a refractive index greater than 1, the medium being provided so as to fill the space from the fourth surface to the image sensor without an air layer therebetween;
  • An imaging device wherein at least the second surface or the third surface of the first to fourth surfaces is a phase modulation surface.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Cameras In General (AREA)

Abstract

Un système optique selon la présente divulgation comprend : une pluralité de lentilles de diffraction ; et un diaphragme d'ouverture qui est disposé entre deux lentilles de diffraction quelconques parmi la pluralité de lentilles de diffraction et dans lequel une ouverture est remplie d'une substance.
PCT/JP2025/006860 2024-03-06 2025-02-27 Système optique et dispositif d'imagerie Pending WO2025187527A1 (fr)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10133100A (ja) * 1996-10-29 1998-05-22 Olympus Optical Co Ltd 撮像レンズ
JP2004109532A (ja) * 2002-09-19 2004-04-08 Nagano Kogaku Kenkyusho:Kk 撮影レンズ
JP2004354859A (ja) * 2003-05-30 2004-12-16 Canon Inc 開口絞り付き成形レンズ
JP2012042553A (ja) * 2010-08-16 2012-03-01 Konica Minolta Opto Inc 撮像レンズ及び撮像装置
JP2012189991A (ja) * 2011-02-23 2012-10-04 Panasonic Corp 回折光学素子およびそれを用いた撮像装置
WO2013168740A1 (fr) * 2012-05-09 2013-11-14 旭硝子株式会社 Élément optique de diffraction et système optique de capture d'image
WO2023032975A1 (fr) * 2021-08-31 2023-03-09 富士フイルム株式会社 Élément optique

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10133100A (ja) * 1996-10-29 1998-05-22 Olympus Optical Co Ltd 撮像レンズ
JP2004109532A (ja) * 2002-09-19 2004-04-08 Nagano Kogaku Kenkyusho:Kk 撮影レンズ
JP2004354859A (ja) * 2003-05-30 2004-12-16 Canon Inc 開口絞り付き成形レンズ
JP2012042553A (ja) * 2010-08-16 2012-03-01 Konica Minolta Opto Inc 撮像レンズ及び撮像装置
JP2012189991A (ja) * 2011-02-23 2012-10-04 Panasonic Corp 回折光学素子およびそれを用いた撮像装置
WO2013168740A1 (fr) * 2012-05-09 2013-11-14 旭硝子株式会社 Élément optique de diffraction et système optique de capture d'image
WO2023032975A1 (fr) * 2021-08-31 2023-03-09 富士フイルム株式会社 Élément optique

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