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WO2025182669A1 - Dispositif d'entraînement piézoélectrique - Google Patents

Dispositif d'entraînement piézoélectrique

Info

Publication number
WO2025182669A1
WO2025182669A1 PCT/JP2025/005363 JP2025005363W WO2025182669A1 WO 2025182669 A1 WO2025182669 A1 WO 2025182669A1 JP 2025005363 W JP2025005363 W JP 2025005363W WO 2025182669 A1 WO2025182669 A1 WO 2025182669A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
piezoelectric drive
movable member
axis
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2025/005363
Other languages
English (en)
Japanese (ja)
Inventor
克俊 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Alpine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Alpine Co Ltd filed Critical Alps Alpine Co Ltd
Publication of WO2025182669A1 publication Critical patent/WO2025182669A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details

Definitions

  • This disclosure relates to a piezoelectric drive device.
  • Patent Document 1 a driving device that uses a piezoelectric element to translate a linear member is known (see Patent Document 1).
  • the above-mentioned drive device can only translate the linear member (movable member) and cannot cause the linear member (movable member) to perform other movements.
  • a piezoelectric drive device includes a fixed member, a movable member having a substantially circular cross-sectional outer shape in a cutting plane perpendicular to the translation direction, and a piezoelectric drive unit that moves the movable member at least in the translation direction, wherein the piezoelectric drive unit has a first piezoelectric drive unit and a second piezoelectric drive unit, and the first piezoelectric drive unit has a first piezoelectric element extending along a first axis, and a first contact member that extends along the first axis and is fixed to one surface of the first piezoelectric element facing the movable member, and that contacts the outer peripheral surface of the movable member at a first position, When viewed along a first longitudinal vibration direction, which is a direction perpendicular to the surface of the first piezoelectric element, the first axis is configured to intersect at an angle with respect to the translational direction, and the second piezoelectric drive unit has a second piez
  • the piezoelectric drive device described above can cause the movable member to perform multiple types of movement.
  • FIG. 1 is a perspective view of a piezoelectric driving device according to an embodiment of the present disclosure.
  • FIG. 2 is an exploded perspective view of the piezoelectric driving device shown in FIG. 1 .
  • FIG. 2 is a more detailed exploded perspective view of the piezoelectric drive device shown in FIG. 1 .
  • 2 is a perspective view of a holding member and a piezoelectric driving unit that constitute the piezoelectric driving device shown in FIG. 1.
  • FIG. 2 is a front view of a movable member, a shaft member, a holding member, a rod-shaped member, a piezoelectric driving unit, and a swinging member that constitute the piezoelectric driving device shown in FIG. 1.
  • FIG. 1 is a perspective view of a piezoelectric driving device according to an embodiment of the present disclosure.
  • FIG. 2 is an exploded perspective view of the piezoelectric driving device shown in FIG. 1 .
  • FIG. 2 is a more detailed exploded perspective view of the piezo
  • FIG. 6A and 6B are diagrams illustrating a piezoelectric element and a contact member that configure the piezoelectric driving unit shown in FIG. 5.
  • 2A and 2B are five-view diagrams of a movable member and a piezoelectric driving unit that constitute the piezoelectric driving device shown in FIG. 1 .
  • FIG. 10 is an exploded perspective view of another configuration example of a piezoelectric driving device according to an embodiment of the present disclosure. 9 is a diagram showing a rod-shaped member and a swinging member that constitute the piezoelectric driving device shown in FIG. 8.
  • FIG. 10 is an exploded perspective view of another configuration example of a piezoelectric driving device according to an embodiment of the present disclosure.
  • 9 is a diagram showing a rod-shaped member and a swinging member that constitute the piezoelectric driving device shown in FIG. 8.
  • FIG. 9 is a front view of a movable member, a shaft member, a holding member, a rod-shaped member, a piezoelectric driving unit, and a swinging member that constitute the piezoelectric driving device shown in FIG. 8.
  • 10 is a diagram illustrating the positional relationship between a movable member and a piezoelectric driving unit in yet another configuration example of a piezoelectric driving device according to an embodiment of the present disclosure.
  • FIG. 1 is a perspective view of the piezoelectric drive device 100.
  • the upper view of Figure 1 is a perspective view of the piezoelectric drive device 100 rotating the movable member 1 around the rotation axis 1X
  • the center view of Figure 1 is a perspective view of the piezoelectric drive device 100 translating the movable member 1 to one side (X1 side, front side) along the rotation axis 1X
  • the lower view of Figure 1 is a perspective view of the piezoelectric drive device 100 translating the movable member 1 to the other side (X2 side, rear side) along the rotation axis 1X.
  • Figure 2 is an exploded perspective view of the piezoelectric drive device 100
  • Figure 3 is a more detailed exploded perspective view of the piezoelectric drive device 100.
  • X1 represents one direction of the X axis that constitutes the three-dimensional Cartesian coordinate system
  • X2 represents the other direction of the X axis
  • Y1 represents one direction of the Y axis that constitutes the three-dimensional Cartesian coordinate system
  • Y2 represents the other direction of the Y axis
  • Z1 represents one direction of the Z axis that constitutes the three-dimensional Cartesian coordinate system
  • Z2 represents the other direction of the Z axis.
  • the X1 side of the piezoelectric drive device 100 corresponds to the front side (front face) of the piezoelectric drive device 100
  • the X2 side of the piezoelectric drive device 100 corresponds to the rear side (back face) of the piezoelectric drive device 100
  • the Y1 side of the piezoelectric drive device 100 corresponds to the left side of the piezoelectric drive device 100
  • the Y2 side of the piezoelectric drive device 100 corresponds to the right side of the piezoelectric drive device 100
  • the Z1 side of the piezoelectric drive device 100 corresponds to the top side of the piezoelectric drive device 100
  • the Z2 side of the piezoelectric drive device 100 corresponds to the bottom side of the piezoelectric drive device 100. The same applies to the other figures.
  • the piezoelectric driving device 100 is a device that enables multiple types of motion of the movable member 1 to be separately realized, and is composed of the movable member 1, a fixed member FB, a piezoelectric driving unit PD, and an oscillating member SM.
  • the multiple types of motion of the movable member 1 include rotation of the movable member 1 around the rotation axis 1X and translation of the movable member 1 along the rotation axis 1X.
  • the piezoelectric driving device 100 can rotate the movable member 1 around the rotation axis 1X without translating the movable member 1 along the rotation axis 1X, or as shown in the center and bottom diagrams of FIG.
  • the piezoelectric driving device 100 can also translate the movable member 1 along the rotation axis 1X while rotating the movable member 1 around the rotation axis 1X.
  • the movable member 1 is a member that is moved by the piezoelectric drive unit PD, and is configured so that the outer shape of a cross section perpendicular to the rotation axis 1X includes a substantially arc shape.
  • the movable member 1 is made of a metal such as titanium copper or stainless steel.
  • the movable member 1 may also be made of other metals.
  • the other metals may be either magnetic or non-magnetic metals.
  • the movable member 1 may also be made of materials other than metals, such as synthetic resin or ceramic.
  • the movable member 1 is a cylindrical body whose outer shape of a cross section perpendicular to the rotation axis 1X is substantially circular, and is configured to move when it receives a driving force generated by the piezoelectric drive unit PD.
  • the movable member 1 may also be a cylindrical body.
  • the fixed side member FB is a member for supporting the movable member 1 and the oscillating member SM.
  • the fixed side member FB includes a base member 2, a shaft support member 3, a shaft member 4, and a rod-shaped member 11, as shown in Figure 3.
  • the base member 2 is a member for supporting the other members that make up the fixed side member FB.
  • the base member 2 is a member having an approximately rectangular parallelepiped outer shape, and has a through-hole 2K that is rectangular in top view for accommodating the oscillating member SM so that it can oscillate.
  • the base member 2 is made of synthetic resin.
  • the base member 2 may also be made of metal.
  • grooves 2G that accommodate both ends of the rod-shaped member 11 are formed on the top surface of the base member 2.
  • the shaft support member 3 is a member for supporting the shaft member 4.
  • the shaft support member 3 includes a rear shaft support member 3B and a front shaft support member 3F.
  • the rear shaft support member 3B and the front shaft support member 3F each have a through-hole TH1 through which the cylindrical (round bar-shaped) shaft member 4 is inserted, and are fixed to the upper surface of the base member 2 with adhesive.
  • the shaft member 4 is a member for supporting the movable member 1 so that it can move.
  • the shaft member 4 is a cylindrical (round rod-shaped) member that is configured to support the movable member 1 so that it can rotate around the rotation axis 1X and move translationally along the rotation axis 1X.
  • the shaft member 4 is fixed to the shaft support member 3 with adhesive.
  • the rod-shaped member 11 is a member for supporting the oscillating member SM so that it can oscillate.
  • the rod-shaped member 11 is made of metal, with one end and the other end each fitted into a groove 2G formed in the base member 2, and the middle portion inserted into a through-hole TH2 provided in the oscillating member SM.
  • the rod-shaped member 11 is also fixed to the base member 2 with adhesive.
  • the piezoelectric drive unit PD is a drive mechanism for moving the movable member 1, and as shown in Figure 3, includes a first piezoelectric drive unit PD1 and a second piezoelectric drive unit PD2.
  • the oscillating member SM is a member that enables each of the pair of piezoelectric drive units PD (first piezoelectric drive unit PD1 and second piezoelectric drive unit PD2) to be pressed against the movable member 1.
  • the oscillating member SM includes a support member 5, a holding member 6, a biasing member 7, and an intermediate member 12, and is supported so that it can oscillate by the fixed-side member FB (rod-shaped member 11).
  • the oscillating member SM is configured so that each of the pair of piezoelectric drive units PD can be pressed against the movable member 1 with approximately the same force.
  • the support member 5 is a member for supporting the piezoelectric drive unit PD.
  • the support member 5 includes a first support member 5A for supporting the first piezoelectric drive unit PD1 and a second support member 5B for supporting the second piezoelectric drive unit PD2.
  • the first support member 5A and the second support member 5B have the same size and are arranged symmetrically to each other.
  • the first support member 5A has a first opposing portion OP1 that faces the movable member 1 and a first spring bearing portion SR1 that contacts the biasing member 7.
  • the second support member 5B has a second opposing portion OP2 that faces the movable member 1 and a second spring bearing portion SR2 that contacts the biasing member 7.
  • the holding member 6 is a member for holding the piezoelectric drive unit PD.
  • the holding member 6 is formed by pressing a titanium copper metal plate.
  • the metal plate may be formed of other metals such as stainless steel.
  • the holding member 6 includes a first holding member 6A for holding the first piezoelectric drive unit PD1 and a second holding member 6B for holding the second piezoelectric drive unit PD2.
  • the first holding member 6A is housed in a first recess RP1 formed in the first support member 5A and fixed thereto with an adhesive
  • the second holding member 6B is housed in a second recess RP2 (not visible in FIG. 3) formed in the second support member 5B and fixed thereto with an adhesive.
  • the first piezoelectric drive unit PD1 is supported by the first support member 5A via the first holding member 6A
  • the second piezoelectric drive unit PD2 is supported by the second support member 5B via the second holding member 6B.
  • the biasing member 7 is a member that generates a biasing force to press the piezoelectric drive unit PD against the movable member 1.
  • the biasing member 7 is a metal leaf spring LS, with the upper surface of the left end fixed to the lower surface of the first support member 5A, the upper surface of the right end fixed to the lower surface of the second support member 5B, and the upper surface of the intermediate part between the left and right ends fixed to the lower surface of the intermediate member 12.
  • the biasing member 7 can be fixed to the support member 5 and the intermediate member 12 by any method, such as adhesive or caulking.
  • the biasing member 7 is configured to generate a preload that tends to bring the first opposing portion OP1 of the first support member 5A and the second opposing portion OP2 of the second support member 5B closer to each other when the movable member 1 is sandwiched between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2.
  • the intermediate member 12 is a member for forming the through portion TH2 through which the rod-shaped member 11 is inserted.
  • the intermediate member 12 is fixed to the upper surface of the intermediate portion of the biasing member 7 while being disposed between the first support member 5A and the second support member 5B so as not to come into contact with either the first support member 5A or the second support member 5B.
  • the intermediate member 12 is composed of a first intermediate member 12A and a second intermediate member 12B, and is configured so that the first intermediate member 12A and the second intermediate member 12B sandwich the rod-shaped member 11 from above and below.
  • the first intermediate member 12A and the second intermediate member 12B are fixed together with an adhesive.
  • the oscillating member SM can balance the force pressing the first piezoelectric drive unit PD1 against the movable member 1 and the force pressing the second piezoelectric drive unit PD2 against the movable member 1. In other words, the oscillating member SM can press each of the pair of piezoelectric drive units PD against the movable member 1 with approximately the same force.
  • Figure 4 is a perspective view of the holding member 6 and the piezoelectric drive unit PD. Specifically, the upper view of Figure 4 is an assembled perspective view, and the lower view of Figure 4 is an exploded perspective view.
  • Figure 5 is a front view of the movable member 1, shaft member 4, holding member 6, rod-shaped member 11, piezoelectric drive unit PD, and oscillating member SM. Specifically, the upper view of Figure 5 is an assembled view, and the lower view of Figure 5 is an exploded view.
  • the piezoelectric drive unit PD is configured to be able to move the movable member 1.
  • the piezoelectric drive unit PD is an example of a friction drive unit that uses the drive system disclosed in U.S. Patent No. 7,786,648, and is configured to include a piezoelectric element 8, a contact member 9, and a flexible wiring board 10.
  • the piezoelectric drive unit PD is also configured to be biased by a biasing member 7 and pressed against the movable member 1.
  • the piezoelectric driver PD includes a first piezoelectric driver PD1 and a second piezoelectric driver PD2
  • the piezoelectric element 8 includes a first piezoelectric element 8A and a second piezoelectric element 8B
  • the contact member 9 includes a first contact member 9A and a second contact member 9B
  • the flexible wiring board 10 includes a first flexible wiring board 10A and a second flexible wiring board 10B.
  • the flexible wiring board 10 may be replaced with a rigid wiring board.
  • the first flexible wiring board 10A and the second flexible wiring board 10B may also be formed from a common flexible wiring board. In this case, the common flexible wiring board may be configured so that a portion of it functions as the first flexible wiring board 10A and another portion functions as the second flexible wiring board 10B.
  • the first piezoelectric drive unit PD1 includes a first piezoelectric element 8A, a first contact member 9A, and a first flexible wiring board 10A, and is held by a first holding member 6A fixed to the first support member 5A, and is configured to be biased by a first biasing member 7A fixed to the first support member 5A and pressed against the movable member 1.
  • the second piezoelectric drive unit PD2 includes a second piezoelectric element 8B, a second contact member 9B, and a second flexible wiring board 10B, and is held by a second holding member 6B fixed to the second support member 5B, and is configured to be biased by a second biasing member 7B fixed to the second support member 5B and pressed against the movable member 1.
  • the first biasing member 7A and the second biasing member 7B are configured using a common spring member SP (leaf spring LS).
  • Each of the first piezoelectric element 8A and the second piezoelectric element 8B is configured to achieve bending vibration in response to an applied voltage.
  • the first piezoelectric element 8A extends along the first axis 8AX
  • the second piezoelectric element 8B extends along the second axis 8BX.
  • Each of the first piezoelectric element 8A and the second piezoelectric element 8B is also configured to achieve bending vibration with two nodes (nodes ND), as shown in the lower diagram of FIG. 4. When bending vibration occurs, the two nodes ND hardly vibrate. For clarity, in the lower diagram of FIG.
  • the positions of the nodes ND on each of the first piezoelectric element 8A and the second piezoelectric element 8B are indicated by a cross pattern.
  • the positions of the nodes ND on the piezoelectric element 8 include the positions of the first node ND1 and the second node ND2.
  • the positions of the nodes ND correspond to positions that are a predetermined distance from the end of the piezoelectric element 8. The predetermined distance is, for example, approximately one-quarter of the total length of the piezoelectric element 8.
  • the first flexible wiring board 10A is a flexible wiring board including a conductive pattern and is configured to electrically connect an external voltage supply source (control circuit) to the first piezoelectric element 8A.
  • the first flexible wiring board 10A is configured to apply a voltage to the first piezoelectric element 8A.
  • the first piezoelectric element 8A is bonded to one surface (proximal side, Y2 side) of the first flexible wiring board 10A with an adhesive.
  • the first piezoelectric element 8A has electrodes ED at each of the four corners of the other surface (distal side, Y1 side) as shown in FIG. 6.
  • the four electrodes ED of the first piezoelectric element 8A are bonded to four conductive patterns PT formed on the surface of one surface (proximal side, Y2 side) of the first flexible wiring board 10A with an adhesive.
  • proximal side refers to the side closer to the movable member 1
  • distal side refers to the side farther from the movable member 1.
  • the second flexible wiring board 10B is a flexible wiring board including a conductive pattern, and is configured to electrically connect an external voltage supply source (control circuit) to the second piezoelectric element 8B.
  • the second flexible wiring board 10B is configured to apply a voltage to the second piezoelectric element 8B.
  • the second piezoelectric element 8B is bonded to one surface (proximal side, Y1 side) of the second flexible wiring board 10B with an adhesive.
  • the second piezoelectric element 8B has electrodes ED at each of the four corners of the other surface (distal side, Y2 side). The four electrodes ED of the second piezoelectric element 8B are then bonded via adhesive to four conductive patterns PT formed on the surface of one surface (proximal side, Y1 side) of the second flexible wiring board 10B.
  • the adhesive is an adhesive capable of forming an anisotropic conductive film, and is heated and pressurized while placed between the piezoelectric element 8 and the flexible wiring board 10, thereby fixing it to both the piezoelectric element 8 and the flexible wiring board 10.
  • the adhesive may also be a conductive adhesive, or may be replaced with solder, etc.
  • conductive patterns are formed on both sides of the flexible wiring board 10, and insulating films are provided on both sides to cover the conductive patterns except for the connection parts of the conductive patterns PT, etc. Furthermore, insulating protective films are provided on the parts that come into contact with the piezoelectric elements 8 and the parts that come into contact with the holding member 6 to ensure more reliable insulation.
  • the first piezoelectric driver PD1 is configured to be pressed against the movable member 1 while being held by a first holding member 6A fixed to the first support member 5A.
  • the first holding member 6A is configured to contact the surface of the other side (distal side, Y1 side) of the first flexible wiring board 10A at positions (the positions of the first convex portion SG1 and the second convex portion SG2) corresponding to the two nodes ND formed during bending vibration of the first piezoelectric element 8A, as shown in FIG. 4.
  • the first holding member 6A and the first flexible wiring board 10A may also be joined with an adhesive.
  • the second piezoelectric driver PD2 is configured to be pressed against the movable member 1 while being held by a second holding member 6B fixed to the second support member 5B.
  • the second holding member 6B is configured to contact the surface on the other side (distal side, Y2 side) of the second flexible wiring board 10B at positions (the positions of the first convex portion SG1 and the second convex portion SG2) corresponding to the two nodes ND formed during bending vibration of the second piezoelectric element 8B, as shown in FIG. 4.
  • the second holding member 6B and the second flexible wiring board 10B may also be joined with an adhesive.
  • the holding member 6 is formed from a single metal plate.
  • the first holding member 6A has a first fixed portion 6AF fixed to the first support member 5A and a first support portion 6AS that supports the first piezoelectric drive unit PD1.
  • the second holding member 6B has a second fixed portion 6BF fixed to the second support member 5B and a second support portion 6BS that supports the second piezoelectric drive unit PD2.
  • the first fixing portion 6AF and the second fixing portion 6BF each include a first convex portion SG1 and a second convex portion SG2 that protrude toward the movable member 1 side (proximal side).
  • the first convex portion SG1 and the second convex portion SG2 are drawn beads formed by drawing.
  • the first convex portion SG1 and the second convex portion SG2 may also be formed by doweling or half-punching, etc.
  • recesses corresponding to the first convex portion SG1 and the second convex portion SG2 are formed on the other surface (distal side, Y1 side surface) of the first fixing portion 6AF and the other surface (distal side, Y2 side surface) of the second fixing portion 6BF, respectively.
  • the first convex portion SG1 and the second convex portion SG2 are each formed to extend (protrude) perpendicular to the extension direction of the piezoelectric element 8.
  • the positions at which the first convex portion SG1 and the second convex portion SG2 are arranged are preferably positions corresponding to the nodes ND of the piezoelectric element 8, and more specifically, are spaced apart from each other in the extension direction of the piezoelectric element 8.
  • the first piezoelectric drive unit PD1 (first piezoelectric element 8A) is attached to the first holding member 6A so that its long side is fixed to the first support portion 6AS with an adhesive or the like.
  • the first piezoelectric drive unit PD1 is attached to the first holding member 6A so that positions on each of its two long sides corresponding to the first node ND1 and second node ND2 of the first piezoelectric element 8A are fixed to each of the four first support portions 6AS with an adhesive or the like.
  • the first piezoelectric drive unit PD1 is attached to the first holding member 6A so that positions on the first flexible wiring board 10A corresponding to the first node ND1 and second node ND2 of the first piezoelectric element 8A are fixed to each of the first convex portion SG1 and second convex portion SG2 of the first fixing portion 6AF with an adhesive.
  • the first piezoelectric driver PD1 is attached to the first holding member 6A so that the portions of the other surface (distal side, Y1 side surface) of the first flexible wiring board 10A that do not correspond to the first node ND1 and second node ND2 of the first piezoelectric element 8A do not come into contact with the first fixed portion 6AF of the first holding member 6A.
  • the second piezoelectric drive unit PD2 (second piezoelectric element 8B) is attached to the second holding member 6B so that its long side is fixed to the second support portion 6BS with an adhesive or the like.
  • the second piezoelectric drive unit PD2 is attached to the second holding member 6B so that positions on each of its two long sides corresponding to the first node ND1 and second node ND2 of the second piezoelectric element 8B are fixed to each of the four second support portions 6BS with an adhesive or the like.
  • the second piezoelectric drive unit PD2 is attached to the second holding member 6B so that positions on the second flexible wiring board 10B corresponding to the first node ND1 and second node ND2 of the second piezoelectric element 8B are fixed to each of the first convex portion SG1 and second convex portion SG2 of the second fixing portion 6BF with an adhesive. That is, the second piezoelectric driver PD2 is attached to the second holding member 6B so that the portions of the other surface (Y2 side surface) of the second flexible wiring board 10B that do not correspond to the first node ND1 and second node ND2 of the second piezoelectric element 8B do not come into contact with the second fixed portion 6BF of the second holding member 6B.
  • FIG. 6 is a diagram showing the first piezoelectric element 8A and first contact member 9A that constitute the first piezoelectric drive unit PD1.
  • the first flexible wiring board 10A is omitted from FIG. 6.
  • the topmost view in FIG. 6 is a perspective view of the first piezoelectric element 8A and first contact member 9A.
  • the second, third, and fourth views from the top in FIG. 6 are views of the first piezoelectric element 8A and first contact member 9A as viewed along the first horizontal vibration direction BD1.
  • FIG. 6 are views of the first piezoelectric element 8A and first contact member 9A as viewed along the first vertical vibration direction VD1. Note that the deflected shape of the first piezoelectric drive unit PD1 is exaggerated in FIG. 6 for ease of understanding. The following description with reference to FIG. 6 relates to the movement of the first piezoelectric drive unit PD1, but applies equally to the movement of the second piezoelectric drive unit PD2. This is because the first piezoelectric driver PD1 and the second piezoelectric driver PD2 each have the same configuration.
  • the first piezoelectric element 8A has two portions (first portion 8A1 and second portion 8A2) aligned along the first horizontal vibration direction BD1, and two electrodes ED to which voltages can be applied are formed on each of these two portions. Specifically, the first electrode ED1 and second electrode ED2 are formed on the first portion 8A1, and the first electrode ED11 and second electrode ED12 are formed on the second portion 8A2. Note that in Figure 6, for clarity, a dot pattern is applied to the first portion 8A1, and a diagonal line pattern is applied to the second portion 8A2.
  • the first piezoelectric drive unit PD1 applies a voltage to the first portion 8A1 and a voltage to the second portion 8A2 separately at appropriate timing, it can, for example, cause the first piezoelectric element 8A to undergo bending vibration (circular motion) so that the trajectory traced by the center point CP, which is a predetermined point on the first piezoelectric element 8A (first piezoelectric drive unit PD1), forms a circular orbit centered on the first axis 8AX.
  • the circular motion may also be elliptical motion.
  • the first piezoelectric element 8A can achieve movement such that the center point CP traces a circle (circular motion).
  • the center point CP of the first piezoelectric element 8A is the center of gravity of the first piezoelectric element 8A.
  • the center point CP of the circular motion may be located within the first contact member 9A fixed to the first piezoelectric element 8A. This is because the first contact member 9A also performs circular motion together with the first piezoelectric element 8A.
  • the first piezoelectric drive unit PD1 can switch the movement direction (rotation direction) of the center point CP along the circular orbit between clockwise and counterclockwise when viewed from one side along the first axis 8AX.
  • the circle (circular orbit) described by the center point CP does not have to be a perfect circle (true circle), as long as it is approximately circular or even elliptical.
  • the combination of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can switch the translation direction of the movable member 1 along the rotation axis 1X, and can also switch the rotation direction of the movable member 1 around the rotation axis 1X.
  • the dashed arrows drawn around the first piezoelectric element 8A represent an example of bending vibration of the first piezoelectric element 8A (circular motion in which the first piezoelectric element 8A rotates counterclockwise around the first axis 8AX while bending). Although not indicated by the arrows, the first piezoelectric element 8A can also rotate clockwise around the first axis 8AX while bending.
  • the first contact member 9A is attached to the first piezoelectric element 8A and is configured to contact the movable member 1.
  • the first contact member 9A is bonded to one surface of the first piezoelectric element 8A with an adhesive so as to cover the entire surface of one side (proximal side, Y2 side) of the first piezoelectric element 8A.
  • the first contact member 9A is formed of a metal such as titanium copper or stainless steel, and is configured with an appropriate thickness so that it can perform bending vibration (circular motion) together with the bending vibration (circular motion) of the first piezoelectric element 8A.
  • the first contact member 9A is a friction plate made of stainless steel.
  • the first contact member 9A extends in the same direction as the extension direction of the first piezoelectric element 8A so as to have the same length as the first piezoelectric element 8A.
  • the first contact member 9A is configured to contact the movable member 1 at the center in its extension direction.
  • the first contact member 9A is configured to contact the movable member 1 at the portion where the amplitude of the bending vibration (circular motion) is maximum (the portion corresponding to the antinode of the bending vibration).
  • the contact surface 9AS of the first contact member 9A on the side that comes into contact with the movable member 1 (proximal side, Y2 side) is a convex curved surface that is convex toward the Y2 side.
  • the contact surface 9AS is configured to form a surface with one convex portion.
  • the reason for bringing the metallic movable member 1 into contact with the metallic first contact member 9A is to prevent wear on the movable member 1 due to contact between the synthetic resin movable member 1 and the metallic first contact member 9A.
  • the length of the first contact member 9A in the direction along the first axis 8AX does not have to be the same as the length of the first piezoelectric element 8A in the direction along the first axis 8AX.
  • the length of the first contact member 9A in the direction along the first axis 8AX may be smaller than the length of the first piezoelectric element 8A in the direction along the first axis 8AX.
  • the length of the first contact member 9A in the extension direction (direction along the first axis 8AX) be equal to or greater than the length of the first piezoelectric element 8A.
  • the first piezoelectric element 8A and the first contact member 9A each bend so as to become convex on the proximal side.
  • the state of the first piezoelectric driver PD1 when the first piezoelectric element 8A and the first contact member 9A each become convex on the proximal side is also referred to as the "proximal convex state.”
  • the first piezoelectric element 8A and the first contact member 9A each extend linearly, as shown in the third and sixth figures from the top.
  • the state of the first piezoelectric driver PD1 when the first piezoelectric element 8A and the first contact member 9A each extend linearly is also referred to as the “neutral state.”
  • the state when the application of voltage is stopped is also referred to as the “initial state.”
  • the first piezoelectric element 8A and the first contact member 9A each bend so as to become convex on the distal side.
  • the state of the first piezoelectric driver PD1 when the first piezoelectric element 8A and the first contact member 9A each become convex on the distal side is also referred to as the "distal convex state.”
  • the first piezoelectric element 8A and the first contact member 9A each bend so as to become convex toward the upper side of the figure.
  • the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A each become convex toward the upper side of the figure is also referred to as the "upper convex state.”
  • the first piezoelectric element 8A and the first contact member 9A each bend so as to become convex toward the bottom of the figure.
  • the state of the first piezoelectric driver PD1 when the first piezoelectric element 8A and the first contact member 9A each become convex toward the bottom of the figure is also referred to as the "bottom convex state.”
  • the first contact member 9A fixed to one surface of the first piezoelectric element 8A does not change dimension in its extension direction. Therefore, the first piezoelectric drive unit PD1 deforms as described above. Furthermore, the first flexible wiring board 10A fixed to the other surface of the first piezoelectric element 8A can deform in accordance with the change in shape of the first piezoelectric element 8A.
  • Figure 7 is a five-view diagram (front view, left side view, right side view, top view, and bottom view) of the movable member 1 and the piezoelectric drive unit PD. Note that in Figure 7, the front view is located in the center, the left side view is located to the left of the front view, the right side view is located to the right of the front view, the top view is located above the front view, and the bottom view is located below the front view.
  • the first piezoelectric driving unit PD1 generates a force F1 that tends to move the movable member 1 diagonally downward and forward when the state repeatedly changes in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, etc. Because the movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, the force F1 is resolved into an axial component F1X and a rotational component F1Z.
  • the first piezoelectric driving unit PD1 generates a force F2 that tends to move the movable member 1 diagonally upward and backward when the state repeatedly changes in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, etc. Because the movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, the force F2 is resolved into an axial component F2X and a rotational component F2Z.
  • the second piezoelectric drive unit PD2 generates a force F3 that tends to move the movable member 1 diagonally downward and forward when the state repeatedly changes in the order of proximal side convex state, lower side convex state, distal side convex state, upper side convex state, proximal side convex state, etc. Because the movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, the force F3 is resolved into an axial component F3X and a rotational component F3Z.
  • the second piezoelectric drive unit PD2 generates a force F4 that tends to move the movable member 1 diagonally upward and backward when the state repeatedly changes in the order of proximal side convex state, upper side convex state, distal side convex state, lower side convex state, proximal side convex state, etc. Since the movable member 1 is limited in movement by the shaft member 4 to rotation around the rotation axis 1X and translation along the rotation axis 1X, the force F4 is resolved into an axial component F4X and a rotational component F4Z.
  • the piezoelectric drive device 100 synchronizes the movement of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, and repeatedly changes the states of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, etc., thereby translating the movable member 1 forward (toward X1) as shown by arrow AR1.
  • the piezoelectric drive device 100 synchronizes the movement of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, and repeatedly changes the states of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, etc., thereby enabling the movable member 1 to translate rearward (toward X2) as shown by arrow AR2.
  • the piezoelectric drive device 100 synchronizes the movements of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, repeatedly changing the state of the first piezoelectric drive unit PD1 in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, etc., and repeatedly changing the state of the second piezoelectric drive unit PD2 in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, etc., thereby rotating the movable member 1 clockwise around the rotation axis 1X as viewed from the X1 side, as indicated by arrow AR3.
  • the piezoelectric drive device 100 synchronizes the movements of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, repeatedly changing the state of the first piezoelectric drive unit PD1 in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, etc., and repeatedly changing the state of the second piezoelectric drive unit PD2 in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, etc., thereby rotating the movable member 1 counterclockwise around the rotation axis 1X as viewed from the X1 side, as indicated by arrow AR4.
  • the piezoelectric drive device 100 can reduce the resultant force acting in the rotational direction to zero or the resultant force acting in the translational direction to zero by adjusting the magnitude of the bending vibration (circular motion) of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 using feedback control, etc.
  • the first piezoelectric driver PD1 is configured so that the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential so that the first portion 8A1 contracts, and so that the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential so that the first portion 8A1 expands.
  • the first electrode ED1 may be connected to a low potential and the second electrode ED2 to a high potential so that the first portion 8A1 contracts, and so that the first electrode ED1 is connected to a high potential and the second electrode ED2 to a low potential so that the first portion 8A1 expands.
  • the second portion 8A2 The same applies to the second portion 8A2.
  • FIG. 9 is a diagram of the rod-shaped member 11 and oscillating member SM1 that make up piezoelectric drive device 100A.
  • the top view in Figure 9 is an assembled top view
  • the second view from the top in Figure 9 is an exploded top view
  • the third view from the top in Figure 9 is an assembled bottom view
  • the bottom view in Figure 9 is an exploded bottom view.
  • Figure 10 is a front view of movable member 1, shaft member 4, holding member 6, rod-shaped member 11, piezoelectric drive unit PD, and oscillating member SM1.
  • the top view in Figure 10 is an assembled view
  • the bottom view in Figure 10 is an exploded view.
  • Piezoelectric drive device 100A differs from piezoelectric drive device 100, which has an oscillating member SM, in that it has an oscillating member SM1. Furthermore, oscillating member SM1 differs from oscillating member SM, which uses a leaf spring LS as the biasing member 7 (spring member SP), in that it uses a tension coil spring TS as the biasing member 7 (spring member SP). Furthermore, oscillating member SM1 differs from oscillating member SM, which uses an intermediate member 12 to form the biasing member TH2, in that it uses a cover member LM to form the through-hole TH2 through which the rod-shaped member 11 is inserted.
  • the support member 5 includes a first support member 5A and a second support member 5B having the same size and shape.
  • the first support member 5A includes a first opposing portion OP1 which is the portion facing the movable member 1, a pair of first legs LG1 extending from the first opposing portion OP1, and a first spring receiving portion SR1 arranged between the pair of first legs LG1.
  • the first spring receiving portion SR1 is fixed to the pair of first legs LG1 with an adhesive.
  • the second support member 5B includes a second opposing portion OP2 which is the portion facing the movable member 1, a pair of second legs LG2 extending from the second opposing portion OP2, and a second spring receiving portion SR2 arranged between the pair of second legs LG2.
  • the second spring receiving portion SR2 is fixed to the pair of second legs LG2 with an adhesive.
  • First penetration portions TH21 are formed on the proximal surfaces of the pair of first leg portions LG1 of the first support member 5A, and second penetration portions TH22 are formed on the proximal surfaces of the pair of second leg portions LG2 of the second support member 5B.
  • the first support member 5A and the second support member 5B are combined so that one of the pair of second legs LG2 of the second support member 5B is sandwiched between the pair of first legs LG1 of the first support member 5A, and one of the pair of first legs LG1 of the first support member 5A is sandwiched between the pair of second legs LG2 of the second support member 5B. Furthermore, the first support member 5A and the second support member 5B are combined so that the first through portion TH21 and the second through portion TH22 are positioned on the same straight line, and a rod-shaped member 11 is inserted through the through portion TH2 formed by the first through portion TH21 and the second through portion TH22.
  • the pair of first lid members LM1 are fixed to the first support member 5A so as to cover the first penetration portion TH21 through which the rod-shaped member 11 is inserted
  • the pair of second lid members LM2 are fixed to the second support member 5B so as to cover the second penetration portion TH22 through which the rod-shaped member 11 is inserted.
  • the support member 5 and lid member LM can be fixed by any method, such as adhesive or crimping.
  • the biasing member 7 (tension coil spring TS) includes a first biasing member 7A (first tension coil spring TS1) and a second biasing member 7B (second tension coil spring TS2).
  • the first tension coil spring TS1 and the second tension coil spring TS2 are fixed to the first support member 5A and the second support member 5B, respectively, so as to generate a preload that tends to bring the first opposing portion OP1 of the first support member 5A and the second opposing portion OP2 of the second support member 5B closer to each other.
  • the left end of the first tension coil spring TS1 is fixed to a second left-side recess H2L formed on the distal surface of one of the pair of second leg portions LG2 of the second support member 5B, and the right end is fixed to a second right-side recess H2R formed on the distal surface of the first spring receiving portion SR1 of the first support member 5A.
  • the right end of the second tension coil spring TS2 is fixed to a first right recess H1R formed on the distal surface of one of the pair of first leg portions LG1 of the first support member 5A, and the left end is fixed to a first left recess H1L formed on the distal surface of the second spring receiving portion SR2 of the second support member 5B.
  • the first retaining member 6A is housed in a first recess RP1 formed in the proximal surface of the first opposing portion OP1 of the first support member 5A and fixed thereto with adhesive
  • the second retaining member 6B is housed in a second recess RP2 formed in the proximal surface of the second opposing portion OP2 of the second support member 5B and fixed thereto with adhesive.
  • oscillating member SM1 is configured to use a tension coil spring TS as the biasing member 7 (spring member SP), it may also be configured to use a compression coil spring as the biasing member 7 (spring member SP).
  • a compression coil spring as the biasing member 7
  • the position at which the biasing member 7 is disposed can be changed.
  • Figure 11 is a diagram showing the positional relationship between the movable member 1 and the piezoelectric driver PD.
  • the upper left and upper right views of Figure 11 show a first half-side arrangement of the piezoelectric driver PD
  • the lower left and lower right views of Figure 11 show a second half-side arrangement of the piezoelectric driver PD.
  • the upper left and lower left views of Figure 11 are front views of the movable member 1 and the piezoelectric driver PD
  • the upper right and lower right views of Figure 11 are right side views of the movable member 1 and the piezoelectric driver PD.
  • the upper right and lower right views of Figure 11 only the outline of the movable member 1 is shown in thick dotted lines to make the explanation easier to understand.
  • the first one-sided arrangement and second one-sided arrangement are examples of one-sided arrangement. Unlike the two-sided arrangement (opposing arrangement) shown in Figures 5 and 10, in which the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged facing each other across the movable member 1, the one-sided arrangement means that the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged on one side of the movable member 1. In the example shown in Figure 11, both the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged on the left side (Y1 side) of the movable member 1, rather than on the right side (Y2 side) of the movable member 1.
  • the first piezoelectric drive unit PD1 is arranged to contact the outer peripheral surface 1F of the movable member 1 at a first position P1
  • the second piezoelectric drive unit PD2 is arranged to contact the outer peripheral surface 1F of the movable member 1 at a second position P2.
  • the first piezoelectric drive unit PD1 is arranged so that a straight line L1 along the first axis 8AX intersects obliquely with a straight line L3 along the translation direction (X-axis direction) at an angle ⁇ 1 greater than 0 degrees and less than 90 degrees.
  • the second piezoelectric drive unit PD2 When viewed from the Y2 side along the Y-axis direction, the second piezoelectric drive unit PD2 is arranged so that a straight line L2 along the second axis 8BX intersects obliquely with a straight line L4 along the translation direction (X-axis direction) at an angle ⁇ 2 greater than 0 degrees and less than 90 degrees.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged so that the angles ⁇ 1 and ⁇ 2 are symmetrical (vertically symmetrical) about the rotation axis 1X. That is, as shown in the upper left diagram in FIG.
  • the angle ⁇ 1 between the lines AL1 and ALC is the same as the angle ⁇ 2 between the lines AL2 and ALC.
  • the line AL1 is a line that passes through the first position P1 and the rotation axis 1X in the YZ plane
  • the line AL2 is a line that passes through the second position P2 and the rotation axis 1X in the YZ plane
  • the line ALC is a line that is parallel to the Y axis and intersects with the rotation axis 1X in the YZ plane.
  • the angles ⁇ 1 and ⁇ 2 may be different from each other.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged so that the distance between their left ends in the diagram is smaller than the distance between their right ends in the diagram, as shown in the upper right diagram of FIG. 11, but they may also be arranged so that the distance between their left ends in the diagram is greater than the distance between their right ends in the diagram.
  • the first piezoelectric drive unit PD1 is arranged to contact the outer peripheral surface 1F of the movable member 1 at a first position P1
  • the second piezoelectric drive unit PD2 is arranged to contact the outer peripheral surface 1F of the movable member 1 at a second position P2.
  • the first piezoelectric drive unit PD1 is arranged so that a straight line L1 along the first axis 8AX intersects obliquely with a straight line L3 along the translation direction (X-axis direction) at an angle ⁇ 1 greater than 0 degrees and less than 90 degrees.
  • the second piezoelectric drive unit PD2 when viewed from the Y2 side along the Y-axis direction, the second piezoelectric drive unit PD2 is arranged so that a straight line L2 along the second axis 8BX intersects obliquely with a straight line L4 along the translation direction (X-axis direction) at an angle ⁇ 2 greater than 0 degrees and less than 90 degrees.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged so that the angles ⁇ 1 and ⁇ 2 are symmetrical (front-to-back symmetrical) with respect to the straight line AL3, which represents a plane perpendicular to the rotation axis 1X.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged so that the distance between the left end of the first piezoelectric drive unit PD1 and the right end of the second piezoelectric drive unit PD2 is greater than the distance between the right end of the first piezoelectric drive unit PD1 and the left end of the second piezoelectric drive unit PD2, as shown in the lower right diagram of FIG.
  • the piezoelectric drive device 100 can rotate the movable member 1 about the rotation axis 1X without translating the movable member 1 along the rotation axis 1X, just as when it is arranged on both sides (facing arrangement), or can translate the movable member 1 along the rotation axis 1X without rotating the movable member 1 about the rotation axis 1X.
  • the piezoelectric drive device 100 can also translate the movable member 1 along the rotation axis 1X while rotating the movable member 1 about the rotation axis 1X.
  • the movable member 1 is configured so that its movement is guided by a guide member such as the shaft member 4. That is, the guide member prevents the movable member 1 from moving in any direction other than rotation about the rotation axis 1X and translation along the rotation axis 1X.
  • the biasing member 7 (not shown) is configured in combination with other members as necessary to continuously maintain contact between the movable member 1 and each of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2.
  • the shaft member 4 which functions as a guide member, may be omitted. This is because, in the two-sided arrangement (opposing arrangement) shown in FIG. 5, the movable member 1 is sandwiched between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, limiting movement other than rotation about the rotation axis 1X and translation along the rotation axis 1X.
  • the piezoelectric drive device 100 includes a fixed member FB, a movable member 1 having a substantially circular cross-sectional outer shape in a cutting plane perpendicular to the translation direction (X-axis direction), and a piezoelectric drive unit PD that moves the movable member 1 at least in the translation direction (X-axis direction).
  • the piezoelectric drive unit PD has a first piezoelectric drive unit PD1 and a second piezoelectric drive unit PD2. As shown in FIGS.
  • the first piezoelectric drive unit PD1 has a first piezoelectric element 8A extending along the first axis 8AX, and a first contact member 9A that extends along the first axis 8AX, is fixedly attached to one surface (first plane FP1) of the first piezoelectric element 8A that faces the movable member 1 (Y2 side), and contacts the outer peripheral surface 1F (see FIG. 5) of the movable member 1 at a first position P1.
  • a line L1 along the first axis 8AX obliquely intersects with a line L3 along the translation direction (X-axis direction) at an angle ⁇ 1 that is greater than 0 degrees and less than 90 degrees.
  • the second piezoelectric drive unit PD2 has a second piezoelectric element 8B extending along the second axis 8BX, and a second contact member 9B that extends along the second axis 8BX and is overlapped and fixed to one surface (first plane FP2) of the second piezoelectric element 8B that faces the movable member 1 (Y1 side), and that comes into contact with the outer circumferential surface 1F of the movable member 1 at a second position P2.
  • the second piezoelectric drive unit PD2 is disposed so that a line L2 along the second axis 8BX intersects obliquely with a line L4 along the translation direction (X-axis direction) at an angle ⁇ 2 greater than 0 degrees and less than 90 degrees.
  • a line AL passing through the first position P1 and the second position P2 intersects with the rotation axis 1X.
  • the first piezoelectric drive unit PD1 is disposed so that a line perpendicular to one surface (first plane FP1) of the first piezoelectric element 8A and passing through the first position P1 intersects with the rotation axis 1X.
  • the second piezoelectric drive unit PD2 is disposed so that a line perpendicular to one surface (first plane FP2) of the second piezoelectric element 8B and passing through the second position P2 intersects with the rotation axis 1X.
  • the movable member 1 is driven by a first piezoelectric drive unit PD1 that contacts the outer peripheral surface 1F of the movable member 1 at a first position P1, and a second piezoelectric drive unit PD2 that contacts the outer peripheral surface 1F of the movable member 1 at a second position P2.
  • This configuration therefore has the effect of making it possible to cause the movable member 1 to perform multiple types of movement by controlling the driving method (movement) of the two piezoelectric drive units PD.
  • This configuration is useful, for example, when used in humanoid or animal-type robots or manipulators.
  • the multiple types of movement include rotation around the rotation axis 1X (X-axis) and translation along the rotation axis 1X (X-axis).
  • the first piezoelectric element 8A has two portions (first portion 8A1 and second portion 8A2) aligned along a first horizontal vibration direction BD1 that is perpendicular to the first axis 8AX and perpendicular to the first vertical vibration direction VD1, and two electrodes ED may be formed on each of these two portions so that voltages can be applied individually.
  • the second piezoelectric element 8B has two portions aligned along a second horizontal vibration direction BD2 that is perpendicular to the second axis 8BX and perpendicular to the second vertical vibration direction VD2, and two electrodes ED may be formed on each of these two portions so that voltages can be applied individually.
  • This configuration allows circular motion (including elliptical motion) of the piezoelectric drive unit PD to be achieved by applying voltage to the piezoelectric element 8 at the appropriate timing, thereby providing the effect of selectively achieving translation of the movable member 1 along the rotation axis 1X and rotation of the movable member 1 around the rotation axis 1X.
  • a first flexible wiring board 10A having a conductive pattern PT connected to the electrode ED may be fixed to the other surface (second plane DP1) side (Y1 side) of the first piezoelectric element 8A.
  • a second flexible wiring board 10B having a conductive pattern PT connected to the electrode ED may be fixed to the other surface (second plane DP2) side (Y2 side) of the second piezoelectric element 8B.
  • the first piezoelectric drive unit PD1 may have a first flexible wiring board 10A fixed to the other surface (second plane DP1) of the first piezoelectric element 8A and having a conductive pattern PT connected to the electrode ED of the first piezoelectric element 8A.
  • the second piezoelectric drive unit PD2 may have a second flexible wiring board 10B fixed to the other surface (second plane DP2) of the second piezoelectric element 8B and having a conductive pattern PT connected to the electrode ED of the second piezoelectric element 8B.
  • This configuration has the advantage of making it easier to pass electricity through the piezoelectric element 8 compared to when a conductive pattern is formed on the support member 5, etc.
  • the piezoelectric driving device 100 may have a first biasing member 7A that biases the first contact member 9A toward the movable member 1 and brings the first contact member 9A into contact with the movable member 1, and a second biasing member 7B that biases the second contact member 9B toward the movable member 1 and brings the second contact member 9B into contact with the movable member 1.
  • This configuration has the advantage of allowing the movable member 1 to move more reliably than a configuration in which the contact member 9 presses weakly against the movable member 1.
  • first biasing member 7A and the second biasing member 7B may be formed from a common spring member SP.
  • This configuration has the advantage of minimizing the increase in the number of parts compared to when the first biasing member 7A and the second biasing member 7B are configured as separate, independent components.
  • the piezoelectric drive device 100 may have a first support member 5A including a first opposing portion OP1 that supports the first piezoelectric drive unit PD1, and a second support member 5B including a second opposing portion OP2 that supports the second piezoelectric drive unit PD2.
  • the first opposing portion OP1 and the second opposing portion OP2 may be located opposite each other with the movable member 1 in between.
  • the spring member SP may be provided between the first support member 5A and the second support member 5B, and configured to press (bias) the first contact member 9A toward the movable member 1 (Y2 side) via the first support member 5A, and to press (bias) the second contact member 9B toward the movable member 1 (Y1 side) via the second support member 5B.
  • This configuration allows the movable member 1 to be sandwiched between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, making it easier for the spring member SP to apply a biasing force to each of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2.
  • This configuration therefore stabilizes the pressing of the contact member 9 against the movable member 1, enabling the movable member 1 to be moved more reliably.
  • the piezoelectric driving device 100 may have a rod-shaped member 11 extending in the translation direction (X-axis direction), and an intermediate member 12 having a through portion TH2 through which the rod-shaped member 11 is inserted and arranged with a gap GP (see Figure 5) between the first support member 5A and the second support member 5B.
  • the intermediate member 12 may be integrated with one of the first support member 5A and the second support member 5B. In this case, as shown in FIG.
  • the spring member SP may be formed of a leaf spring LS, with a first portion LS1 of the leaf spring LS fixed to the first support member 5A at a first fixing position CT1 away from the portion (first opposing portion OP1) where the first piezoelectric drive unit PD1 is located, a second portion LS2 of the leaf spring LS fixed to the second support member 5B at a second fixing position CT2 away from the portion (second opposing portion OP2) where the second piezoelectric drive unit PD2 is located, and a third portion 7C (intermediate portion) located between the first portion LS1 and the second portion LS2 may be fixed to the intermediate member 12.
  • the leaf spring LS may also be configured to apply a force that moves the portion (first opposing portion OP1) of the first support member 5A where the first piezoelectric drive unit PD1 is located and the portion (second opposing portion OP2) of the second support member 5B where the second piezoelectric drive unit PD2 is located closer to each other.
  • This configuration has the effect of making the force pressing against the first contact member 9A and the movable member 1 equal to the force pressing against the second contact member 9B and the movable member 1. This is because the oscillating member SM oscillates around the rod-shaped member 11, holding the first contact member 9A and the second contact member 9B so that the movable member 1 is sandwiched between them.
  • the spring member SP may be constituted by a tension coil spring TS, as shown in FIG. 9.
  • the first support member 5A and the second support member 5B when viewed along the translation direction (X-axis direction), may have a portion where they intersect with each other (intersection portion CR). That is, the intersection portion CR may include a first intersection portion CR1 of the first support member 5A and a second intersection portion CR2 of the second support member 5B.
  • the rod-shaped member 11 may be inserted through the first support member 5A and the second support member 5B.
  • a tension coil spring TS may be arranged between a portion (first leg portion LG1 or first spring receiving portion SR1) located on the opposite side of the first intersecting portion CR1 of the first support member 5A from the portion where the first piezoelectric drive unit PD1 is arranged (first opposing portion OP1), and a portion (second spring receiving portion SR2 or second leg portion LG2) located on the opposite side of the second intersecting portion CR2 of the second support member 5B from the portion where the second piezoelectric drive unit PD2 is arranged (second opposing portion OP2).
  • This configuration has the effect of making the force pressing against the first contact member 9A and the movable member 1 the same as the force pressing against the second contact member 9B and the movable member 1, similar to when the spring member SP is configured as a leaf spring LS as shown in Figure 5.
  • the piezoelectric drive device 100 may have a first holding member 6A that holds the first piezoelectric drive unit PD1 and is formed as a separate member from the first biasing member 7A, and a second holding member 6B that holds the second piezoelectric drive unit PD2 and is formed as a separate member from the second biasing member 7B.
  • This configuration provides the advantage of allowing for greater design freedom compared to when the retaining member 6 and the biasing member 7 are integrally formed.
  • the retaining member 6 and the biasing member 7 may also be integrally formed.
  • the first position P1 and the second position P2 when viewed along the translation direction (X-axis direction), may be at different positions in the circumferential direction of the movable member 1.
  • the first position P1 and the second position P2 are arranged so that they differ from each other by a central angle of 180 degrees around the rotation axis 1X.
  • This configuration has the advantage that it is easier to arrange the two piezoelectric drive units PD (make them contact the movable member 1) compared to a configuration in which the first position P1 and the second position P2 are arranged so that they differ from each other by a central angle of less than 180 degrees. This is because the direction in which the first contact member 9A is pressed against the movable member 1 and the direction in which the second contact member 9B is pressed against the movable member 1 are opposite to each other. Furthermore, this configuration has the advantage that it is possible to increase the range of motion of the movable member 1 in the translation direction (X-axis direction) compared to the second one-sided arrangement shown in the lower right diagram of Figure 11.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 may be positioned opposite each other with the movable member 1 in between.
  • This configuration has the effect of transmitting movement (force) to the movable member 1 in a balanced manner.
  • the line L1 along the first axis 8AX relative to the line L3 along the translation direction (X-axis direction), and when viewed along the second longitudinal vibration direction VD2 as shown in the right side view of FIG. 7, the line L2 along the second axis 8BX relative to the line L4 along the translation direction (X-axis direction), may be inclined in the same direction (towards the same X1 side).
  • This configuration can simultaneously achieve translation of the movable member 1 along the rotation axis 1X and rotation of the movable member 1 about the rotation axis 1X.
  • This configuration also has the effect of selectively achieving either translation of the movable member 1 along the rotation axis 1X or rotation of the movable member 1 about the rotation axis 1X.
  • the angle ⁇ 1 between the line L3 along the translation direction (X-axis direction) and the line L1 along the first axis 8AX may be the same as the angle ⁇ 2 between the line L4 along the translation direction (X-axis direction) and the line L2 along the second axis 8BX when viewed along the second longitudinal vibration direction VD2, as shown in the right side view of FIG. 7.
  • This configuration has the advantage of making it easier to control the movement of the movable member 1 in the desired direction compared to when the angles ⁇ 1 and ⁇ 2 are different from each other.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 may be arranged so that one surface (first plane FP1) of the first piezoelectric element 8A and one surface (first plane FP2) of the second piezoelectric element 8B are inclined (so that the first plane FP1 and the first plane FP2 form part of a V-shape) when viewed along the translation direction (X-axis direction).
  • This configuration has the advantage of enabling the piezoelectric drive device 100 to be made smaller than when the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged opposite each other as shown in Figure 5.
  • first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 may be arranged side by side in the translation direction (X-axis direction), as shown in the lower right diagram of FIG. 11.
  • the line L1 along the first axis 8AX and the line L2 along the second axis 8BX may be inclined on opposite sides to the line L3 along the translation direction (X-axis direction). Note that in the example shown in the lower right diagram of FIG.
  • the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged so that the distance between the left end of the first piezoelectric drive unit PD1 and the right end of the second piezoelectric drive unit PD2 is greater than the distance between the right end of the first piezoelectric drive unit PD1 and the left end of the second piezoelectric drive unit PD2.
  • This configuration has the advantage of reducing the size of the piezoelectric drive device 100 in the Y-axis direction compared to when the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged opposite each other, as shown in Figure 5 or Figure 10.
  • the movable member 1 may also be made of metal. This configuration has the advantage of suppressing the generation of wear particles and other debris that accompanies contact between the movable member 1 and the piezoelectric drive unit PD (contact member 9), compared to when the movable member 1 is made of synthetic resin.
  • the movable member 1 may also have a cylindrical shape.
  • the fixed member FB may include a shaft member 4 that is inserted into the movable member 1.
  • This configuration allows the shaft member 4 to function as a guide member, thereby stabilizing the movement of the movable member 1.
  • the movable member 1 is cylindrical, with the shaft member 4 inserted therethrough and rotating around the shaft member 4, but it may also be rod-shaped (cylindrical) without a through-hole through which the shaft member 4 is inserted.
  • the shaft member 4 may be part of the movable member 1.
  • the piezoelectric driving device 100 can rotate the movable member 1, with which the shaft member 4 is integrated, around the rotation axis 1X and translate it along the rotation axis 1X.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Un dispositif d'entraînement piézoélectrique (100) comprend une première unité d'entraînement piézoélectrique (PD1) et une seconde unité d'entraînement piézoélectrique (PD2) qui déplacent un élément mobile (1). La première unité d'entraînement piézoélectrique (PD1) comporte un premier élément de contact (9A) qui est fixé à un premier élément piézoélectrique (8A) s'étendant le long d'un premier axe (8AX) et qui est en contact avec la surface périphérique externe (1F) de l'élément mobile (1). Vu le long d'une première direction de vibration longitudinale (VD1), le premier axe (8AX) est conçu pour s'incliner et se croiser selon un angle θ1 par rapport à la direction de l'axe X. La seconde unité d'entraînement piézoélectrique (PD2) comporte un second élément de contact (9B) qui est fixé à un second élément piézoélectrique (8B) s'étendant le long d'un second axe (8BX) et est en contact avec la surface périphérique externe (1F) de l'élément mobile (1). Vu le long d'une seconde direction de vibration longitudinale (VD2), le second axe (8BX) est conçu pour s'incliner et se croiser selon un angle θ2 par rapport à la direction de l'axe X.
PCT/JP2025/005363 2024-02-27 2025-02-18 Dispositif d'entraînement piézoélectrique Pending WO2025182669A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009514497A (ja) * 2005-10-28 2009-04-02 ニュー スケール テクノロジーズ インコーポレーティッド 超音波リードスクリューモーターを含む機構
JP2010200484A (ja) * 2009-02-25 2010-09-09 Alps Electric Co Ltd 振動型アクチュエータ
JP2020182328A (ja) * 2019-04-25 2020-11-05 キヤノン株式会社 振動型駆動装置、振動型アクチュエータの制御方法とその制御装置
JP2021100303A (ja) * 2019-12-20 2021-07-01 オカムラ有限会社 積層圧電アクチュエータによる駆動方法及び積層圧電アクチュエータを備えた駆動装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009514497A (ja) * 2005-10-28 2009-04-02 ニュー スケール テクノロジーズ インコーポレーティッド 超音波リードスクリューモーターを含む機構
JP2010200484A (ja) * 2009-02-25 2010-09-09 Alps Electric Co Ltd 振動型アクチュエータ
JP2020182328A (ja) * 2019-04-25 2020-11-05 キヤノン株式会社 振動型駆動装置、振動型アクチュエータの制御方法とその制御装置
JP2021100303A (ja) * 2019-12-20 2021-07-01 オカムラ有限会社 積層圧電アクチュエータによる駆動方法及び積層圧電アクチュエータを備えた駆動装置

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