WO2025140689A1 - Heating device and heater - Google Patents

Abstract

A heating device and a heater. In the heating device, a first cover is sealedly connected to one end of a housing; the first cover has a first through opening; a first sealing member separately abuts against the peripheral wall of a first connecting part and the side wall corresponding to the first opening, so as to seal the first connecting part with the first cover. According to the present application, the first cover is sealedly connected to the housing, and the peripheral wall of the first connecting part is sealed by means of the first cover, thereby reducing the assembly difficulty between the housing and a heating tube, and also ensuring the sealing performance of the heating device even when there is an assembly error between the housing and the heating tube.

Description

Heating device and heater

This application requires:

Submitted to the China Patent Office on December 29, 2023, application number 202323664949.5, invention name “A heating tube”;

Submitted to the China Patent Office on March 11, 2024, application number 202420461478.3, invention name “A heating device and heater”;

Submitted to the China Patent Office on March 11, 2024, application number 202410272367.2, invention name “A heating device, a heater and an assembly method of a heating device”;

The priorities of the above three Chinese patent applications are incorporated in this application by reference in their entirety.

Technical Field

The present application relates to the technical field of electric heating, and in particular to a heating device and a heater.

Background Art

In life and production, fluids of a certain temperature are usually required, such as hot water from a water dispenser, warm water from a water heater, and fluids in semiconductor cleaning equipment requiring a certain temperature.

In the related art, the fluid is heated by a heating device, and the heating device includes a heating tube and a shell. The shell protects the heating part of the heating tube to prevent the external environment from causing adverse effects on the heating part of the heating tube. When installing the heating tube into the shell, it is usually necessary to pass the heating tube through the inner cavity of the shell. At this time, there needs to be a certain distance between the shell and the heating tube to meet the assembly error of the two, so that the heating tube can easily pass through the inner cavity of the shell. Therefore, there is a need to meet the assembly space between the shell and the heating tube and to set a sealing structure to ensure the sealing of the two, which will increase the difficulty of assembly between the heating tube and the shell. Therefore, how to meet the sealing between the shell and the heating tube and reduce the difficulty of assembly is a problem that technicians in this field need to consider.

Summary of the invention

The purpose of this application is to at least solve the problems in the background technology and to provide a heating device and a heater.

In order to achieve the above object, the present invention adopts the following technical solutions:

A heating device comprises a shell and a heating tube, the shell having a accommodating cavity, the heating tube comprising a heating part, a first connecting part located at one end of the heating part, and a second connecting part located at the other end of the heating part, at least part of the heating part is located in the accommodating cavity, at least part of the first connecting part is located outside the shell, the heating device comprises a first pressure cover, the first pressure cover is sealed and connected to one end of the shell, the first pressure cover has a first opening penetrating therethrough, part of the first connecting part is located in the first opening, the heating device comprises a first sealing member, at least part of the first sealing member is located between the peripheral wall of the first connecting member and the side wall of the opening corresponding to the first opening, the first sealing member respectively abuts against the peripheral wall of the first connecting member and the side wall of the opening corresponding to the first opening.

In the heating device of the above technical solution, the first pressure cover is sealed and connected to one end of the shell, and the first pressure cover has a first opening extending therethrough, and the first sealing member is respectively abutted against the peripheral wall of the first connecting part and the side wall of the opening corresponding to the first opening, so that the first connecting part and the first pressure cover are sealed; in the present application, the first pressure cover is sealed with the shell, and the sealing of the peripheral wall of the first connecting part is achieved by the first pressure cover, thereby reducing the difficulty of assembly between the shell and the heating tube, and satisfying the sealing of the heating device even when there is an assembly error between the shell and the heating tube.

BRIEF DESCRIPTION OF THE DRAWINGS FIG1 is a schematic structural diagram of a heating device according to an embodiment;

FIG2 is a schematic diagram of an exploded structure of a heating device according to an embodiment;

FIG3 is a schematic diagram of an exploded structure of a heating device according to an embodiment of the present invention showing a first end cover;

FIG4 is a schematic diagram of an exploded structure of a heating device according to another embodiment;

FIG5 is a schematic diagram of a partial cross-sectional structure of a heating device according to an embodiment;

FIG6 is a schematic diagram showing a first gland structure according to an embodiment;

FIG7 is a schematic structural diagram of a first gland from another perspective of an embodiment;

FIG8 is a schematic cross-sectional structure diagram of a first gland according to an embodiment;

FIG9 is a schematic structural diagram of a first gland according to another embodiment;

FIG10 is a schematic cross-sectional view of a first gland according to another embodiment;

FIG11 is a schematic structural diagram of a first end cover according to an embodiment;

FIG12 is a schematic diagram of an exploded structure of a joint according to an embodiment;

FIG13 is a schematic cross-sectional view of a joint according to an embodiment;

FIG. 14 is a schematic structural diagram showing the gap M. FIG.

In Figures 1 to 14:
Shell 1, accommodating cavity 100, main body 101, second mounting hole 1010, first end cover 102, second port 1020,
outlet 1021, third annular groove 1022, fixing hole 1023, cover plate 1024, protrusion 1025, second threaded hole 1026, sealing body 1027, second end cover 103, third port 1031, heating tube 2, first connecting part 201, first interface part 2010, second connecting part 202, second interface part 2020, heating part 203, first gland 3, first port 300, annular part 301, inner port 3010, first annular groove 302, base 303, second annular groove 304, first mounting hole 305, joint 4, stud 401, outer wall part 4011, stop nut 402, sealing ring 403, cover head 404, fixing nut 405, channel 406, first seal 5, second seal 6, third seal 7, second gland 8, fourth port 801, fourth seal 9, fifth seal 10,

FIG15 is a schematic diagram of an exploded structure of a heating device according to another embodiment;

FIG16 is a schematic structural diagram of a first end cover of a heating device according to an embodiment;

FIG17 is a schematic structural diagram of a first end cover of a heating device according to another embodiment;

FIG18 is a schematic structural diagram of a second end cover of a heating device according to an embodiment;

FIG. 19 is a schematic diagram of a partial structure of a heating device according to another embodiment.

Among them, in Figures 15 to 19:
1 shell, 100 accommodating cavity, 101 main body, 01011 first mounting hole, 102 first end cover, 01021 first opening, 010211 first recessed portion, 01022 cover plate, 01023 protruding portion, 010231 first threaded hole, 103 second end cover, 01031 second opening, 010311 second recessed portion, 2 heating tube, 200 main body, 0201 heating portion, 0202 first connecting portion, 0204 first protruding portion, 0205 second connecting portion, 0206 second protruding portion, 3 first pressure cover, 8 second pressure cover,.

Figure 20 is a schematic diagram of the main structure of the utility model;

FIG21 is a schematic diagram of the structure of the utility model from the left;

FIG22 is a schematic diagram of the radial cross-sectional structure of the tube substrate of the present invention;

FIG23 is a schematic diagram of the structure of the tube substrate of the utility model in a straightened state;

FIG24 is a schematic diagram of a partial structure of the utility model;

FIG25 is a schematic diagram of the assembly structure of the metal element and the tube substrate of the utility model;

FIG26 is a schematic diagram of the winding structure of the silver wire and the tube substrate of the utility model;

FIG27 is a schematic diagram of the structure of the copper electrode power connection method of the utility model;

FIG. 28 is a second structural schematic diagram of the copper electrode power connection method of the present invention.

In Figures 20 to 28: tube substrate 1', electric heating film layer 2', electrode layer 3', annular portion 6', power connection portion 7', elastic portion 8', spiral tube portion 9', first connecting section 10', second connecting section 11', first joint portion 102', second joint portion 112', first reduced diameter portion 1021', first expanded diameter portion 1022', second reduced diameter portion 1121', second expanded diameter portion 1122', first electrode layer 31', second electrode layer 32', first conductive element 41', second conductive element 42', first wire 412', second wire 422', first copper electrode 411', second copper electrode 421'.

DETAILED DESCRIPTION

The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

As shown in Figures 1 to 14, a heating device according to an embodiment includes a shell 1 and a heating tube 2, the shell 1 has a accommodating cavity 100, the heating tube 2 includes a heating portion 203 and a first connecting portion 201 located at one end of the heating portion 203, at least a portion of the heating portion 203 is located in the accommodating cavity 100, and at least a portion of the first connecting portion 201 is located outside the shell 1, the heating device includes a first pressure cover 3, the first pressure cover 3 is sealed and connected to one end of the shell 1, the first pressure cover 3 has a first opening 300 that passes through, and a portion of the first connecting portion 201 is located in the first opening 300, the heating device includes a first sealing member 5, at least a portion of the first sealing member 5 is located between the peripheral wall of the first connecting portion 201 and the side wall of the opening corresponding to the first opening 300, and the first sealing member 5 is respectively abutted against the peripheral wall of the first connecting portion 201 and the side wall of the opening corresponding to the first opening 300.

At least part of the heating part 203 of the heating tube 2 is located in the accommodating chamber 100 of the shell 1, so that it is protected by the shell 1, reducing the adverse effects of the external environment on it. Further, at least part of the first connecting part 201 extends out of the shell 1, connected to an external pipeline or equipment to transport fluid, and the fluid is transported to the heating part 203 of the heating tube 2 through the first connecting part 201 for heating, or the heated fluid is transported to an external pipeline or equipment. As shown in Figure 5, the first sealing member 5 is respectively against the peripheral wall of the first connecting part 201 and the side wall of the mouth corresponding to the first mouth 300, thereby ensuring the sealing between the first connecting part 201 and the first gland 3, and the first gland 3 is sealed and connected to the shell 1, so that the first connecting part 201 and the shell 1 also have good sealing, preventing external impurities from entering the accommodating chamber 100 to cause adverse effects such as contamination on the heating part 203, thereby affecting the heating efficiency of the heating part 203.

Due to the existence of processing errors, during the installation process of the heating tube 2 and the shell 1, when the heating tube 2 extends out of the end of the shell 1, the heating tube 2 extends out of the opening at the end of the shell 1, and the inner diameter of the opening is slightly larger than the outer diameter of the opening of the heating tube 2 to meet the installation of the heating tube 2 and the shell 1; as in actual production, it is difficult for the two ends of the heating tube 2 to be coaxial with the two ends of the shell 1 or just to allow the two ends of the heating tube 2 to be installed through the two ends of the shell 1. When one end of the heating tube 2 is installed through the end corresponding to the shell 1, there is often a certain installation deviation between the other end and the other end corresponding to the shell 1. Especially when the heating tube 2 is a curved tube structure such as a spiral tube, the end of the shell 1 needs to have sufficient radial space margin to facilitate the installation of the heating tube 2. At this time, if a sealing ring is directly added to the end of the shell 1 to limit the installation position of the heating tube 2, it will be difficult to install the shell 1 and the heating tube 2. Therefore, it is difficult to achieve the direct setting of a sealing ring on the shell 1 to cooperate with the heating tube 2 and facilitate the installation of the heating tube 2 and the shell 1.

In the present application, the first pressure cover 3 is used to achieve sealing between the first connection part 201 and the shell 1, while taking into account the installation cooperation with the heating tube 2 at the end of the shell 1, so that sufficient installation space margin can be reserved at the end of the shell 1 for the installation of the first connection part 201.

Furthermore, during the assembly process of the heating device of the present application, the heating tube 2 is first installed into the shell 1, the first connecting portion 201 of the heating tube 2 extends out of the end of the shell 1, and then the first pressure cover 3 is sleeved on the first connecting portion 201, and finally the first pressure cover 3 is fixed to the end of the shell 1.

Furthermore, in one embodiment, any one of the first connection portion 201 and the second connection portion 202 serves as a fluid inlet port, and the other serves as a fluid outlet port. Of course, the two may also be interchangeable.

In one embodiment, as shown in Figures 9 and 10, the first connecting portion 201 extends out of the first pressure cover 3, the first pressure cover 3 includes an annular portion 301, the first opening 300 includes an inner opening 3010 corresponding to the inner wall of the annular portion 301, the inner wall of the annular portion 301 is provided with a first annular groove 302, and at least a portion of the first sealing member 5 is located in the first annular groove 302.

The first sealing member 5 is a sealing ring made of materials such as silicone or rubber. The first sealing member 5 matches the first annular groove 302. The first sealing member 5 is embedded in the first annular groove 302. The first connecting portion 201 passes through the first opening 300. Finally, the first sealing member 5 respectively abuts against part of the peripheral wall of the first connecting portion 201 and part of the side wall of the first opening 300.

Furthermore, a second annular groove 304 is provided on one side of the annular portion 301 facing the shell 1, and the heating device includes a second seal 6, at least part of the second seal 6 is located in the second annular groove 304, and the second seal 6 is respectively abutted against the shell 1 and the first pressure cover 3, thereby achieving sealing between the annular portion 301 and the shell 1.

The second sealing member 6 is a sealing ring made of materials such as silicone or rubber, and the second sealing member 6 corresponds to the second annular groove 304, and the second sealing member 6 is embedded in the second annular groove 304. The annular portion 301 is also provided with a first mounting hole 305, and the corresponding end of the housing 1 has a fixing hole 1023, and a screw is passed through the first mounting hole 305 and locked and installed with the fixing hole 1023, so that the second sealing member 6 is respectively against the housing 1 and the first gland 3, so as to achieve sealing between the annular portion 301 and the housing 1.

Furthermore, the first gland 3 is first sleeved on the first connection part 201, and then the corresponding fixing hole 1023 is opened at the end of the shell 1 according to the corresponding position of the first installation hole 305, that is, the position of the fixing hole 1023 is determined according to the position of the first gland 3 and the first connection part 201, and then the first gland 3 is installed at the end of the shell 1 by screws and other parts for installation and fixing through the first installation hole 305 and locking and installing with the fixing hole 1023. In this way, the processing error of the heating device can be effectively compensated, and the sealing and installation matching between the heating tube 2 and the shell 1 are taken into account.

In another embodiment, as shown in FIGS. 6 to 8 , the first gland 3 includes a base 303 and an annular portion 301, the base 303 and the annular portion 301 are integral or fixed, and the second annular groove 304 is located on the base 303. Further, the base 303 and the annular portion 301 form a step shape, the diameter of the base 303 is larger than the diameter of the annular portion 301, the base 303 is located between the annular portion 301 and the housing 1, and the base 303 is fixed to the housing 1, so that the first gland 3 is fixed to the housing 1. The base 303 also has an opening corresponding to the inner opening 3010 of the annular portion 301, and the opening and the inner opening 3010 of the annular portion 301 together constitute the first opening 300. The first annular groove 302 can be provided on the inner wall of the annular portion 301, and can also be provided on the inner wall corresponding to the opening of the base 303.

Furthermore, at this time, the first mounting hole 305 is located at the base 303, and a screw is passed through the first mounting hole 305 and locked and installed with the fixing hole 1023, so that the second sealing member 6 is respectively against the shell 1 and the first pressure cover 3, thereby achieving sealing between the annular portion 301 and the shell 1.

In one embodiment, as shown in Figure 1, the shell 1 includes a main body 101 and a first end cover 102, the first end cover 102 is located at one end of the main body 101, the first pressure cover 3 is assembled and fixed with the first end cover 102 and sealed, and the first pressure cover 3 is located on the side of the first end cover 102 away from the main body 101.

In one embodiment, as shown in FIG. 1 and FIG. 11 , the main body 101 is an annular housing 1 as a whole, and the first end cover 102 is matched with the end of the main body 101. The side wall of the first end cover 102 is provided with a second threaded hole 1026, and the corresponding side wall of the main body 101 is provided with a second mounting hole 1010, and a screw is passed through the second mounting hole 1010 and locked and installed with the second threaded hole 1026, so that the first end cover 102 is fixedly installed with the main body 101.

In one embodiment, as shown in Figures 5 and 11, the first end cover 102 includes a cover plate 1024 and a protrusion 1025, at least a portion of the protrusion 1025 is located in the space enclosed by the main body 101, and the heating device includes a third sealing member 7, the third sealing member 7 is located between the outer wall of the protrusion 1025 and the inner wall of the main body 101, and the third sealing member 7 is respectively against the outer wall of the protrusion 1025 and the inner wall of the main body 101.

The cover plate 1024 covers the opening at the end of the main body 101 . The protrusion 1025 extends into the space enclosed by the main body 101 . The second threaded hole 1026 is disposed on the side of the protrusion 1025 .

In one embodiment, as shown in FIG5 and FIG11, the outer wall of the protrusion 1025 is provided with a third annular groove 1022, and at least a portion of the third sealing member 7 is located in the third annular groove 1022. The third annular groove 1022 matches the third sealing member 7, and the third sealing member 7 is a sealing ring made of materials such as silicone or rubber. At least a portion of the third sealing member 7 is embedded in the third annular groove 1022, and the third sealing member 7 improves the sealing performance between the cover plate 1024 and the main body 101.

In one embodiment, as shown in Figure 13, the first end cover 102 has a penetrating second port 1020, the second port 1020 is connected to the first port 300, a portion of the first connecting portion 201 is located at the second port 1020, the inner diameter of the port corresponding to the second port 1020 is larger than the outer diameter of the first connecting portion 201, and the side wall of the port corresponding to the second port 1020 has a gap M with the first connecting portion 201, and M satisfies M≥1mm.

The gap M facilitates the installation between the heating tube 2 and the housing 1. Due to processing errors, the first connection portion 201 of the heating tube 2 may deviate from the installation position of the second port 1020 of the first end cover 102. The gap M is used to compensate for the deviation, that is, when at least part of the first connection portion 201 is located at the second port 1020, there is a radial deviation margin, which also reflects the reason why the side wall corresponding to the second port 1020 is not suitable for setting a sealing ring. In some embodiments, M can be 1.5mm or 2mm, taking into account solving the installation deviation between the heating tube 2 and the housing 1, and avoiding the low space utilization rate of the heating device caused by too large installation margins of both.

The main body 101 of the housing may be cylindrical as a whole, or may be other shapes such as a polygonal column.

In one embodiment, as shown in FIG. 2 , the heating portion 203 includes a curved tube substrate and a heating film disposed on at least part of the surface of the curved tube substrate, and the curved tube substrate has a heating channel. Specifically, the curved tube substrate can be a spiral tube substrate or a curved tube substrate such as an S-shaped tube substrate. The curved tube substrate can increase the actual heating length of the heating tube 2 in the effective space, thereby increasing the space utilization rate of the heating device. The heating film is a nano-electric heating film or other electric heating film, which can generate heat quickly when powered on. The heating portion 203 is integrally formed with the first connecting portion 201 and the second connecting portion 202, and can also be connected by welding. When the inner diameter of the heating portion 203 is the same as that of the first connecting portion 201 and the second connecting portion 202, it is preferentially integrally formed; when the inner diameter of the heating portion 203 is different from that of the first connecting portion 201 and the second connecting portion 202, it is preferentially welded and fixed. Both the first connecting portion 201 and the second connecting portion 202 have a fluid channel connected to the heating channel, and the fluid flows through the fluid channel and the heating channel to realize the heating function.

In one embodiment, the first end cover 102 is provided with a wire outlet 1021, the heating device includes a wire, a portion of the wire is located in the space corresponding to the wire outlet 1021, a portion of the wire is located outside the housing 1, and a portion of the wire is located in the accommodating cavity 100, and the wire is connected to the electrode of the heating tube 2. One end of the wire located in the accommodating cavity 100 is connected to the electrode of the heating tube 2, and the other end thereof can be connected to an external power source to supply power to the heating tube 2.

In one embodiment, as shown in FIG. 4 , a sealing body 1027 is provided on the wall corresponding to the outlet 1021, and the sealing body 1027 is located between the side wall corresponding to the outlet 1021 and the wire. The sealing body 1027 wraps part of the outer wall of the wire to ensure the tightness of the wire extending out of the outlet 1021. Specifically, the sealing body 1027 can be a sealing ring made of rubber or silicone material, and the wall corresponding to the outlet 1021 can be provided with an annular groove corresponding to the sealing body 1027, and the sealing body 1027 is installed in the annular groove, and the wire passes through the outlet 1021 and is sealed by the sealing body 1027.

In another embodiment, as shown in FIG3 , the heating device includes a joint 4, the joint 4 matches the outlet 1021 and the joint 4 is sealed and connected to the wall corresponding to the outlet 1021, the joint 4 is fixedly installed at the outlet 1021, and the wire passes through the joint 4 in a sealed manner, so that the wire connects the electrode of the heating tube 2 with the external power supply. Further, the joint 4 includes a hollow stud 401, a stop nut 402 integral with or fixed to the stud 401, a fixing nut 405, a cover head 404, and a sealing ring 403, the stud 401 has a channel 406, at least part of the wire is located in the channel 406, the sealing ring 403 is located between the side wall corresponding to the channel 406 and the wire, and the wire passes through the channel 406 and is sealed by the sealing ring 403. The stud 401 has at least two outer wall portions 4011, and there is a spacing between two adjacent outer wall portions 4011. The outer wall portion 4011 is arranged in a ring shape as a whole. At least part of the sealing ring 403 is located in the space enclosed by the outer wall portion 4011. At least part of the cover head 404 is fixedly sleeved on the outer wall portion 4011. The cover head 404 can also be threadedly fixed with the stud 401. When the cover head 404 locks the stud 401, at least two outer wall portions 4011 are close to each other, so that the sealing ring 403 shrinks, thereby making the wire and the connector 4 sealed. In the use of the connector 4, the stud 401, the stop nut 402, the sealing ring 403, and the cover head 404 are used as an integral part, which is installed on the outlet 1021, and then the other end of the stud 401 relative to the cover head 404 is locked by the fixing nut 405. The setting of the connector 4 further improves the sealing performance of the wire and the first end cover 102.

Furthermore, the heating tube 2 has two electrodes, the first end cap 102 is provided with two outlets 1021, two wires are respectively connected to the two electrodes, and extend out of the heating device through the two outlets 1021, that is, the two wires extend from the same end of the heating device, which facilitates the wiring arrangement of the wires. In other embodiments, the heating tube 2 has three electrodes, the first end cap 102 is provided with three outlets 1021, and the three wires are respectively connected to the three electrodes. In this case, the heating device is suitable for three-phase electricity.

In one embodiment, as shown in Figure 2, the heating device includes a second pressure cover 8, which is located at the other end of the shell 1 relative to the first pressure cover 3, the second pressure cover 8 has a fourth opening 801 extending therethrough, a portion of the second connection portion 202 is located at the fourth opening 801, and at least a portion of the second connection portion 202 is located outside the shell 1, and the heating device includes a fourth sealing member 9, which is located between the peripheral wall of the second connection portion 202 and the side wall of the opening corresponding to the fourth opening 801, and the fourth sealing member 9 is respectively abutted against the peripheral wall of the second connection portion 202 and the side wall of the opening corresponding to the fourth opening 801.

In one embodiment, as shown in FIG2 , the structure of the second gland 8 is the same as that of the first gland 3, the second gland 8 and the second connecting portion 202 are sealed by a fourth seal 9, and the second gland 8 and the housing 1 are sealed by a fifth seal 10. The structural arrangement of the fourth seal 9 and the fifth seal 10 refers to the first seal 5 and the second seal 6, and will not be repeated.

The installation structure of the second gland 8 and the second connection part 202 is the same as the installation structure of the first gland 3 and the first connection part 201, and both satisfy the installation offset margin of the heating tube 2 and the shell 1. After the heating tube 2 and the shell 1 are installed, the first gland 3, the second gland 8 and the first connection part 201 and the second connection part 202 are installed respectively, and then installation holes are opened at the corresponding positions of the two ends of the shell 1 according to the positions of the first gland 3 and the second gland 8, and finally the first gland 3 and the second gland 8 are fixed to the two ends of the shell 1 by screws and other fixing parts.

In one embodiment, the shell includes a second end cover 103, the second pressure cover 8 is sealed and connected to the second end cover 103, the second end cover 103 has a third port 1031 extending therethrough, a portion of the second connection portion 202 is located at the third port 1031, the inner diameter of the port corresponding to the third port 1031 is greater than the outer diameter of the second connection portion 202, and there is a gap N (not marked in the figure, the principle is the same as the gap M) between the side wall of the port corresponding to the third port 1031 and the outer wall of the second connection portion 202, and N satisfies: N ≥ 1mm. In some embodiments, N can be 1.5mm or 2mm, taking into account solving the installation deviation of the heating tube 2 and the shell 1, and avoiding the low space utilization rate of the heating device caused by the excessive installation margin of the two.

In one embodiment, the mounting structure of the second end cover 103 and the main body 101 of the housing 1 may be the same as the mounting structure of the first end cover 102 and the main body 101 of the housing 1. Of course, in other embodiments, the second end cover 103 may also be integrally formed with the main body 101 of the housing 1, and the first end cover 102 and the main body 101 of the housing 1 may be detachably mounted.

A heater according to an embodiment is used to connect with a pan-semiconductor device, comprising a shell 1 and a heating tube 2, wherein the shell 1 has a accommodating cavity 100, the heating tube 2 comprises a heating portion 203 and a first connecting portion 201 located at one end of the heating portion 203, at least a portion of the heating portion 203 is located in the accommodating cavity 100, and at least a portion of the first connecting portion 201 is located outside the shell 1, the heating device comprises a first pressure cap 3, the first pressure cap 3 is sealed and connected to one end of the shell 1, the first pressure cap 3 has a first opening 300 passing through, a portion of the first connecting portion 201 is located in the first opening 300, the heating device comprises a first sealing member 5, at least a portion of the first sealing member 5 is located between a peripheral wall of the first connecting portion 201 and a side wall of the opening corresponding to the first opening 300, the first sealing member 5 is respectively abutted against the peripheral wall of the first connecting portion 201 and the side wall of the opening corresponding to the first opening 300; the first connecting portion can be used to connect with the pan-semiconductor device, and\or, the second connecting portion can be used to connect with the pan-semiconductor device.

Further, the first connection part has an integrated first interface part 2010, which can be used to connect to a pan-semiconductor device, and\or, the second connection part has an integrated second interface part 2020, which can be used to connect to a pan-semiconductor device.

Pan-semiconductors include chip, photovoltaic, lithium battery, liquid crystal display and electronic circuit board manufacturing, etc. The pan-semiconductor equipment in this application refers to the equipment related to its production and manufacturing. The heater of this application has good sealing performance, and its shell can have a good sealing effect on the heating tube. It is very suitable for semiconductor production and manufacturing environment, and can avoid the possible intrusion of moisture and acidic and alkaline gases in the pan-semiconductor working scene, thereby eliminating the possible influence of external gases on the life of the heater. The integrated interface makes the material in contact with the fluid purer, meeting the requirements of semiconductor production and manufacturing. Specifically, the heating tube can be integrally formed with quartz material with a purity of not less than 99.99%. In one embodiment, one or both of the first interface part 2010 and the second interface part 2020 have a reduced diameter portion to facilitate connection with the pan-semiconductor equipment through a PILLAR joint structure.

Please refer to Figures 15 to 19. The present application also provides a structure in which the heating tube and the shell are not prone to axial displacement, which can reduce the occurrence of collision between the heating tube and the shell and damage to the heating tube.

As shown in Figures 15 to 19, an embodiment includes a shell 1 and a heating tube 2, the shell 1 has a accommodating cavity 100, at least part of the heating tube 2 is located in the accommodating cavity 100, the shell 1 includes a main body 101 and a first end cover 102, the first end cover 102 is located at one end of the main body 101, the first end cover 102 has a first opening 01021, part of the heating tube 2 is located in the first opening 01021, the side wall of the opening corresponding to the first opening 01021 or the inner wall of the main body 101 has a first recessed portion 010211, and the outer peripheral wall of the heating tube 2 has a first convex portion 0204, the first convex portion 0204 can cooperate with the first recessed portion 010211 and be axially limited by the first recessed portion 010211.

The first convex part 0204 can cooperate with the first concave part 010211 and be axially limited by the first concave part 010211, so that the heating tube 2 can be axially limited by the first end cover 102. On the one hand, the first convex part 0204 supports the heating tube 2, reducing the collision between the heating tube 2 and the shell 1 and damaging the heating tube 2; on the other hand, the heating tube 2 reduces the axial position deviation between the heating tube 2 and the shell through the cooperation between the first convex part 0204 and the first concave part 010211, so that the heating part of the heating device is located in a reasonable position section of the heating device. The first convex part 0204 cooperates with the first concave part 010211, and can also axially limit the heating tube 2 to prevent rotational wear between the heating tube 2 and the shell 1.

In one embodiment, the first recessed portion 010211 is located at the first end cover 102, and the first end cover 102 is fixed integrally with the main body 101 or detachably. When the first end cover 102 is integrally with the main body 101, during assembly, the heating tube 2 is inserted from the other side of the main body 101 relative to the first end cover 102 along the axial direction until the first protrusion 0204 cooperates with the first recessed portion 010211 and is axially limited by the first recessed portion 010211; when the first end cover 102 is detachably fixed to the main body 101, during assembly, the first end cover 102 and the main body 101 are separated in the initial state, and the first end cover 102 and the main body 101 can be fixed first, and then the heating tube 2 is inserted. 2 is inserted from the other side of the main body 101 relative to the first end cover 102 along the axial direction until the first convex portion 0204 cooperates with the first concave portion 010211 and is axially limited by the first concave portion 010211. Alternatively, the heating tube 2 may be first inserted into the main body 101 from any end of the main body 101 along the axial direction and then the first end cover 102 is fixed to the main body 101. During the installation of the first end cover 102, the axial position of the heating tube 2 is adjusted by the cooperation between the first convex portion 0204 and the first concave portion 010211.

In one embodiment, as shown in Figure 17, the first recessed portion 010211 is annular as a whole, and the first recessed portion 010211 is located on the side of the mouth side wall corresponding to the first mouth 01021 facing the accommodating cavity 100. The heating tube 2 includes a main body portion 200 and a first convex portion 0204. The first convex portion 0204 protrudes from the main body portion 200, and the first convex portion 0204 is annular as a whole and matches the first recessed portion 010211.

In one embodiment, the shell 1 includes a second end cover 103, which is located at the other end of the shell 1 relative to the first end cover 102, and the second end cover 103 has a second opening 01031, and the side wall of the opening corresponding to the second opening 01031 has a second recessed portion 010311, and the outer peripheral wall of the heating tube 2 has a second protrusion 0206, and the second recessed portion 010311 can cooperate with the second protrusion 0206 and be axially limited by the second protrusion 0206.

The structure of the second end cover 103 can refer to the structure of the first end cover 102. In one embodiment, the second end cover 103 cooperates with the first end cover 102 to clamp the heating tube 2, so as to fix the heating tube 2. On the one hand, the heating tube 2 is fixed in a reasonable position so that a specific position of the heating device, such as the middle part thereof, has an optimal heating effect. On the other hand, the shaking of the heating tube 2 can be reduced. In one embodiment, the second end cover 103 and the first end cover 102 limit the axial position of the heating tube 2 to avoid axial position deviation of the heating tube 2.

In one embodiment, as shown in FIG. 16 , the first end cover 102 includes a cover plate 01022 and a protrusion 01023 , at least a portion of the protrusion 01023 is located in the space enclosed by the main body 101 , the side wall of the protrusion 01023 has a radial first threaded hole 010231 , and the main body 101 has a corresponding first mounting hole 01011 .

Specifically, the main body 101 is an annular shell as a whole, and the first end cover 102 is matched with the end of the main body 101. The side wall of the first end cover 102 is provided with a first threaded hole 010231, and the corresponding side wall of the main body 101 is provided with a first mounting hole 01011. The first end cover 102 is fixedly installed with the main body 101 by screws passing through the first mounting hole 01011 and locking and mounting with the first threaded hole 010231. The cover plate 01022 covers the opening at the end of the main body 101, the protrusion 01023 extends into the space enclosed by the main body 101, and the first threaded hole 010231 is provided on the side of the protrusion 01023.

The liquid flow rate in current semiconductor wet cleaning equipment is relatively large. In order to meet the heating efficiency, the heating tube is designed to be spiral. The structural design of the spiral heating tube in the prior art is unreasonable, resulting in uneven arrangement of the electric heating film on the surface of the spiral heating tube. The uneven electric heating film will affect the heating effect and the service life of the electric heating tube. This application makes the following improvements to the structure of the heating tube.

Referring to Figures 20-28, a heating tube is used for pan-semiconductor equipment, including a tube base 1' and an electric heating film layer 2', the tube base 1' has a spiral tube portion 9', at least part of the electric heating film layer 2' is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion 9' is D_j, and the outer radius of the spiral tube portion is r, wherein D_j＞3r.

The tube base 1' of the device is provided with a spiral tube portion 9', and at least the outer wall of the spiral tube portion 9' is provided with an electric heating film layer 2'. The electric heating film layer 2' is energized to conduct heat to the tube base 1', and the fluid is heated when passing through the tube base 1'. The pitch of the spiral tube portion 9' and the outer radius of the spiral tube portion of the device are reasonably set, which can ensure that the setting of the electric heating film layer 2' of the spiral tube portion is more uniform, and the uniformly set electric heating film layer 2' can ensure a better fluid heating effect.

The pitch of the spiral tube portion 9' is D_j, and the outer radius of the spiral tube portion 9' is r, wherein D_j>3r; the pitch of the spiral tube portion 9' is greater than 3 times of its outer radius, so that the electric heating film layer 2 can be evenly plated on the outer surface of the spiral tube portion 9'; it can be understood that when the pitch of the spiral tube portion 9' is not greater than 3 times of its outer radius, the uniformity of the coating inside and outside the spiral tube is difficult to ensure, and the film on the inside will be significantly thinner than the outside, affecting the normal use of the heating tube. Preferably, the pitch of the spiral tube portion 9' is greater than 3.5 times of its outer radius, so as to take into account the printing of the electrode layer of the heating tube and the uniform setting of the electric heating film. Furthermore, the pitch of the spiral tube portion 9' is greater than 4 times of its outer radius to ensure the quality of the heating tube.

The electric heating tube has a spiral tube portion 9', which can reduce the space occupancy rate of the electric heating equipment and is very suitable for heating pan-semiconductor equipment, including integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment material industries, including semiconductors.

The electric heating film layer 2' of the device can be attached to the tube substrate by spraying or coating.

The outer radius r of the spiral tube portion 9' satisfies: 4mm≤r≤40mm; and\or, the thermal distance d of the spiral tube portion 9' satisfies: d≥5mm, where the thermal distance d refers to the minimum distance between the outer walls of two adjacent spiral units of the spiral tube portion 9'; and\or, the number of spiral turns n of the spiral tube portion 9' satisfies: 3≤n≤20; and\or, the wall thickness t of the tube matrix satisfies: 1.5mm≤t≤3mm; and\or, the median diameter Dm of the spiral tube portion satisfies: 15mm≤Dm≤300mm.

The larger the outer radius r of the tube base 1', the larger the flow rate of the heated fluid needs to be. Otherwise, the lower the Reynolds number of the fluid when flowing through the inner wall of the quartz tube, the more likely it is to present a laminar flow state. The temperature distribution at the center of the heated fluid is quite different from the temperature close to the inner wall of the quartz tube. The thinner the wall thickness, the better the heat transfer effect and the obvious energy saving effect. However, the wall thickness cannot be too thin, which will affect the mechanical strength of the quartz glass. The closer the distance between similar spiral segments, that is, the smaller the thermal distance, the greater the radiation temperature rise. Excessive thermal radiation will affect the service life of the heating tube. The greater the power density of the heating tube, the higher the fluid heating temperature, and the greater the required thermal distance d.

Referring to Fig. 20, the tube base 1' comprises a first connecting section 10' and a second connecting section 11', which are respectively located at the two ends of the spiral tube portion 9', the first connecting section 10' has an integrated first joint portion 102', and the second connecting section 11' has an integrated second joint portion 112'. The first connecting section 10' and the second connecting section 11' are arranged at the two ends of the spiral tube portion 9' of the tube base for connecting external equipment, such as connecting a PILLAR joint.

As an implementation mode of the first connecting section 10’ and the second connecting section 11’, the first connecting section 10’ includes a first straight tube portion 101’, one end of the first straight tube portion 101’ is connected to the spiral tube portion 9’, the other end of the first straight tube portion 101’ is connected to the first joint portion 102’, and the first straight tube portion 101’ and the first joint portion 102’ are integrally arranged; and\or, the second connecting section 11’ includes a second straight tube portion 111, one end of the second straight tube portion 111 is connected to the spiral tube portion, the other end of the second straight tube portion 111 is connected to the second joint portion 112’, and the second straight tube portion 111 and the second joint portion 112’ are integrally arranged. The arrangement of the first straight tube portion 101’ and the second straight tube portion 111 can better connect external equipment.

As an implementation mode of the first joint part 102’ and the second joint part 112’, the first joint part 102’ includes an integrated first reduced diameter part 1021’ and a first expanded diameter part 1022’, the first reduced diameter part 1021’ is connected to the first straight tube part 101’, and the outer diameter of the first reduced diameter part 1021’ is smaller than the outer diameters of the first straight tube part 101’ and the first expanded diameter part 1022’; and\or, the second joint part 112’ includes an integrated second reduced diameter part 1121’ and a second expanded diameter part 1122’, the second reduced diameter part 1121’ is connected to the second straight tube part 111, and the outer diameter of the second reduced diameter part 1121’ is smaller than the outer diameters of the second straight tube part 111 and the second expanded diameter part 1122’. The Cao feature is formed by the arrangement of the first reduced diameter part 1021’ and the first expanded diameter part 1022’, and the second reduced diameter part 1121’ and the second expanded diameter part 1122’, so as to better connect the joints of external equipment.

Referring to FIGS. 26-28 , the heating tube includes at least two first electrode layers 31 ′, two second electrode layers 32 ′, and a first conductive element 41 ′ connecting at least two first electrode layers, and a second conductive element 42 ′ connecting at least two second electrode layers 32 ′. The first electrode layers 31 ′ and the second electrode layers 32 ′ are alternately arranged. The first electrode layers 31 ′ and the second electrode layers 32 ′ are silver electrode layers. A heating area is formed between every two adjacent electrode layers. By arranging a plurality of first electrode layers 31 ′ and second electrode layers 32 ′, the electric heating tube forms a plurality of heating areas, thereby reducing the resistance of the electric heating film layer, improving the heating efficiency, and facilitating extending the service life of the heating tube.

Referring to FIG26 , the first conductive element 41 ′ is a silver wire wound around the first electrode layer 31 ′, and the second conductive element 42 ′ is a silver wire wound around the second electrode layer 32 ′. The widths of the first electrode layer 31 ′ and the second electrode layer 32 ′ are both 8 mm to 10 mm, and the diameter of the silver wire is 0.2 mm to 1.0 mm. The multiple electric heating areas are connected in series through the silver wire, and the power connection method is simple, which reduces the complexity of the structure.

As another way of connecting the heating tube to electricity, referring to Figure 27, the first conductive element 41' includes at least two first copper electrodes 411' and a first wire 412', the first copper electrodes correspond to and are connected to the first electrode layer one by one, and the first wire is connected to at least two first copper electrodes, the second conductive element 42' includes at least two second copper electrodes 421' and a second wire 422', the second copper electrodes correspond to and are connected to the second electrode layer 32' one by one, and the second wire is connected to at least two second copper electrodes, the width of the first electrode layer 31' and the second electrode layer 32' are both 5mm-8mm, and the width of the copper electrode 5 is 3mm-5mm. Multiple heating areas are connected in series by using copper electrodes and wires. This way of connecting electricity has lower cost and longer service life.

As another implementation method of copper electrode connection, when the heating power is relatively large, the first conductive element 41' and the second conductive element 42' are set to be multiple groups connected in series to avoid excessive current affecting the service life and safety of the wire.

The silver wire is connected to the power supply, and a first high-temperature insulating sheath is provided on the surface of the portion of the silver wire that is not in contact with the first electrode layer 31' and the second electrode layer 32';

Alternatively, a second high-temperature insulating sheath is provided on the surface of the first wire 412', the second wire 422', and the first copper electrode 411', the second copper electrode 421'. The high-temperature insulating sheath can ensure a safe distance between the conductor silver wire or the wire and the heating film layer, and will not cause electrical safety risks. The high-temperature insulating sheath is generally able to withstand a temperature between 500 and 1000 degrees.

The first copper electrode 411' and the second copper electrode 421' are both defined as copper electrodes, the first electrode layer 31' and the second electrode layer 32' are both defined as electrode layers 3', the copper electrode comprises an annular portion 6' wrapped around the outer circumference of the electrode layer, and a power connection portion 7' integrally formed with the annular portion 6', the annular portion 6' comprises a plurality of elastic portions 8' protruding outward, a silver layer is provided at the portion where the copper electrode contacts the electrode layer, the thickness of the silver layer is 30um-200um, and the thickness of the copper electrode is 0.2mm-0.5mm.

The elastic portion 8' can compensate for the dimensional tolerance of the tube substrate and ensure a tight fit. The use of copper electrodes has the advantages of low cost and high efficiency assembly. A silver layer is provided at the contact portion between the copper electrode and the electrode layer to reduce the contact resistance between the copper electrode clamp and the silver electrode layer.

The total length of the heating area of the electric heating film layer 2' on the tube substrate 1' is L, wherein 1000mm≤L≤4000mm.

Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims (17)

A heating device, comprising a shell (1) and a heating tube (2), wherein the shell (1) has a receiving cavity (100), the heating tube (2) comprises a heating portion (203), a first connecting portion (201) located at one end of the heating portion (203), and a second connecting portion (202) located at the other end of the heating portion (203), at least part of the heating portion (203) is located in the receiving cavity (100), and the heating device comprises a first pressure cover (3), the first pressure cover (3) and the shell (1) are connected to each other. One end is sealed and connected, the first pressure cover (3) has a first opening (300) extending therethrough, a portion of the first connecting portion (201) is located at the first opening (300), the heating device comprises a first sealing member (5), at least a portion of the first sealing member (5) is located between a peripheral wall of the first connecting portion (201) and a side wall of the opening corresponding to the first opening (300), and the first sealing member (5) is respectively abutted against the peripheral wall of the first connecting portion (201) and the side wall of the opening corresponding to the first opening (300). The heating device according to claim 1, wherein the first connecting portion (201) extends out of the first pressure cover (3), the first pressure cover (3) includes an annular portion (301), the first port (300) includes an inner opening (3010) corresponding to the inner wall of the annular portion (301), the inner wall of the annular portion (301) is provided with a first annular groove (302), and at least a portion of the first sealing member (5) is located in the first annular groove (302). The heating device according to claim 1 or 2, wherein a second annular groove (304) is provided on a side of the first pressure cover (3) facing the shell (1), and the heating device comprises a second sealing member (6), at least a portion of the second sealing member (6) is located in the second annular groove (304), and the second sealing member (6) is respectively abutted against the shell (1) and the first pressure cover (3). The heating device according to claim 3, wherein the shell (1) includes a main body (101) and a first end cover (102), the first end cover (102) is located at one end of the main body (101), the first pressure cover (3) is assembled and fixed with the first end cover (102) and is sealed, and the first pressure cover (3) is located on the side of the first end cover (102) away from the main body (101); and\or, the first pressure cover (3) includes a base (303), the base (303) is integral with or fixed to the annular portion (301), and the second annular groove (304) is located on the base (303). The heating device according to claim 4, wherein the first end cover (102) comprises a cover plate (1024) and a protrusion (1025), at least a portion of the protrusion (1025) is located in a space enclosed by the main body (101), and the heating device comprises a third sealing member (7), the third sealing member (7) is located between an outer wall of the protrusion (1025) and an inner wall of the main body (101), and the third sealing member (7) is respectively abutted against the outer wall of the protrusion (1025) and the inner wall of the main body (101). The heating device according to claim 4 or 5, wherein the first end cover (102) has a second port (1020) extending therethrough, the second port (1020) is connected to the first port (300), a portion of the first connecting portion (201) is located at the second port (1020), an inner diameter of the port corresponding to the second port (1020) is larger than an outer diameter of the first connecting portion (201), and a gap M is provided between a side wall of the port corresponding to the second port (1020) and an outer peripheral wall of the first connecting portion (201), and M satisfies: M ≥ 1 mm. The heating device according to claim 4 or 5, wherein the first end cover (102) is provided with a wire outlet (1021), the heating device comprises a wire, a part of the wire is located in a space corresponding to the wire outlet (1021), and a part of the wire is located outside the housing (1); The wall corresponding to the outlet (1021) is provided with a sealing body (1027), and the sealing body (1027) is located between the side wall corresponding to the outlet (1021) and the wire; or, the heating device comprises a joint (4), the joint (4) matches the outlet (1021) and the joint (4) is sealed and connected to the wall corresponding to the outlet (1021), the joint (4) comprises a hollow stud (401), a stop nut (402) integral with or fixed to the stud (401), a fixing nut (405), a cover head (404), and a sealing ring (403), the stud (401) has a channel (406), and at least a portion of the wire is located at the outlet (1021). The channel (406) is provided, the sealing ring (403) is located between the side wall corresponding to the channel (406) and the wire, the stud (401) has at least two outer wall parts (4011), there is a spacing between two adjacent outer wall parts (4011), the outer wall parts (4011) are arranged in a ring shape as a whole, at least part of the sealing ring (403) is located in the space enclosed by the outer wall parts (4011), at least part of the cover head part (404) is fixedly sleeved on the outer wall part (4011), the fixing nut (405) is threadedly fixed to the stud (401), and the fixing nut (405) and the cover head part (404) are located on both sides of the stop nut (402). A heating device according to claim 1 or 2 or 4 or 5 or 7, wherein the heating device comprises a second gland (8), the second gland (8) is located at the other end of the shell (1) relative to the first gland (3), the second gland (8) has a fourth opening (801) extending therethrough, a portion of the second connecting portion (202) is located at the fourth opening (801), at least a portion of the second connecting portion (202) is located outside the shell (1), the heating device comprises a fourth sealing member (9), the fourth sealing member (9) is located between the peripheral wall of the second connecting portion (202) and the side wall of the opening corresponding to the fourth opening (801), and the fourth sealing member (9) is respectively abutted against the peripheral wall of the second connecting portion (202) and the side wall of the opening corresponding to the fourth opening (801); The shell comprises a second end cover (103), the second pressure cover (8) is sealingly connected to the second end cover (103), the second end cover (103) has a third opening (103) extending therethrough, a portion of the second connecting portion (202) is located at the third opening (103), an inner diameter of the opening corresponding to the third opening (103) is greater than an outer diameter of the second connecting portion (202), and a gap N is provided between a side wall of the opening corresponding to the third opening (103) and an outer peripheral wall of the second connecting portion (202), wherein N satisfies: N≥1 mm. A heater, used for connecting to a pan-semiconductor device, comprising a shell (1) and a heating tube (2), wherein the shell (1) has a receiving cavity (100), the heating tube (2) comprises a heating portion (203), a first connecting portion (201) located at one end of the heating portion (203), and a second connecting portion (202) located at the other end of the heating portion (203), at least part of the heating portion (203) is located in the receiving cavity (100), and the heating device comprises a first pressure cover (3), wherein the first pressure cover (3) and the heating tube (2) are connected to each other. One end of the shell (1) is sealed and connected, the first gland (3) has a first opening (300) extending therethrough, a portion of the first connection portion (201) is located at the first opening (300), the heating device comprises a first sealing member (5), at least a portion of the first sealing member (5) is located between a peripheral wall of the first connection portion (201) and a side wall of the opening corresponding to the first opening (300), and the first sealing member (5) is respectively abutted against the peripheral wall of the first connection portion (201) and the side wall of the opening corresponding to the first opening (300); The first connection portion (201) can be used to connect to the pan-semiconductor device, and/or the second connection portion (202) can be used to connect to the pan-semiconductor device. The heating device according to claim 1, wherein the heating device comprises a shell (1) and a heating tube (2), the shell (1) having a containing cavity (100), part of the heating tube (2) being located in the containing cavity (100), the shell (1) comprising a main body (101) and a first end cover (102), the first end cover (102) being located at one end of the main body (101), the first end cover (102) having a first opening (01021), part of the heating tube (2) being located at the first opening (01021); a side wall of the opening corresponding to the first opening (01021) or an inner side wall of the main body (101) having a first recessed portion (010211), an outer peripheral wall of the heating tube (2) having a first convex portion (0204), the first convex portion (0204) being matched with the first recessed portion (010211) and being axially limited by the first recessed portion (010211), Alternatively, the side wall of the mouth corresponding to the first mouth (01021) or the inner wall of the main body (101) has a first convex portion (0204), and the outer peripheral wall of the heating tube (2) has a first concave portion (010211), and the first convex portion (0204) cooperates with the first concave portion (010211) and is axially limited by the first concave portion (010211). The heating device according to claim 10, wherein the first end cover (102) comprises a cover plate (01022) and a protrusion (01023), at least a portion of the protrusion (01023) is located in a space enclosed by the main body (101), a side wall of the protrusion (01023) has a first threaded hole (010231) in a radial direction of the heating device, and the main body (101) has a corresponding first mounting hole (01011); The heating tube (2) comprises a main body (200) and a first convex portion (0204); the inner diameter of the heating portion (0201) of the main body (200) is larger than the first connecting portion (0202) of the main body (200); The heating tube (2) has a fluid flow channel inside, and a portion of the heating tube (2) extends out of the housing (1) and can be used to connect to an external joint. According to claim 1, the heating device comprises a tube substrate (1') and an electric heating film layer (2'), the tube substrate (1') has a spiral tube portion (9'), at least a portion of the electric heating film layer (2') is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion (9') is D_j, and the outer radius of the spiral tube portion is r, wherein D_j＞3r. The heating device according to claim 12, wherein the outer radius r of the spiral tube portion satisfies: 4mm≤r≤40mm; and\or, the thermal distance d of the spiral tube portion satisfies: d≥5mm; and\or, the number of spiral turns n of the spiral tube portion satisfies: 3≤n≤20; and\or, the wall thickness t of the tube substrate satisfies: 1.5mm≤t≤3mm; and\or, the middle diameter Dm of the spiral tube portion satisfies: 15mm≤Dm≤300mm; and\or, the total length of the heating area of the electric heating film layer (2') on the tube substrate (1') is L, wherein 1000mm≤L≤4000mm. The heating device according to claim 12 or 13, wherein the tube matrix comprises a first connecting section (10') and a second connecting section (11'), the first connecting section (10') and the second connecting section (11') are respectively located at two ends of the spiral tube portion (9'), the first connecting section (10') has an integrated first joint portion (102'), the second connecting section (11') has an integrated second joint portion (112), the first joint portion (102') comprises an integrated first reduced diameter portion (1021') and a first expanded diameter portion (1022'), the first reduced diameter portion (1021') and the second expanded diameter portion (1022') are respectively located at two ends of the spiral tube portion (9'), the first connecting section (10') has an integrated first joint portion (102'), the second connecting section (11') has an integrated second joint portion (112), the first joint portion (102') comprises an integrated first reduced diameter portion (1021') and a first expanded diameter portion (1022'), the first reduced diameter portion (102 The first straight tube portion (101’) is connected to the first reduced diameter portion (1021’), and the outer diameter of the first reduced diameter portion (1021’) is smaller than the outer diameters of the first straight tube portion (101’) and the first expanded diameter portion (1022’); and/or, the second joint portion (112’) includes an integrated second reduced diameter portion (1121’) and a second expanded diameter portion (1122’), the second reduced diameter portion (1121’) is connected to the second straight tube portion (111’), and the outer diameter of the second reduced diameter portion (1121’) is smaller than the outer diameters of the second straight tube portion (111’) and the second expanded diameter portion (1122’). The heating device according to claim 12, 13 or 14, wherein the heating tube comprises at least two first electrode layers (31'), two second electrode layers (32'), and a first conductive element (41') connecting at least two first electrode layers, and a second conductive element (42') connecting at least two second electrode layers (32'), the first electrode layers (31') and the second electrode layers (32') are alternately arranged, and the first electrode layers (31') and the second electrode layers (32') are silver electrode layers; The first conductive element (41') comprises at least two first copper electrodes (411') and a first conductive wire (412'), the first copper electrodes correspond to and are connected to the first electrode layer one by one, the first conductive wire is connected to at least two of the first copper electrodes, the second conductive element (42') comprises at least two second copper electrodes (421') and a second conductive wire (422'), the second copper electrodes correspond to and are connected to the second electrode layer (32') one by one, the second conductive wire is connected to at least two of the second copper electrodes, the width of the first electrode layer (31') and the second electrode layer (32') are both 5mm-8mm, and the width of the copper electrode (5') is 3mm-5mm; or the first conductive element (41') is a silver wire wound around the first electrode layer (31'), the second conductive element (42') is a silver wire wound around the second electrode layer (32'), the width of the first electrode layer (31') and the second electrode layer (32') are both 8mm-10mm, and the wire diameter of the silver wire is 0.2mm-1.0mm. The heating device according to claim 15, wherein A first high-temperature insulating sheath is provided on the surface of the portion of the silver wire that is not in contact with the first electrode layer (31') and the second electrode layer (32'); A second high-temperature insulating sheath is provided on the surface of the first conductive wire (412') and the second conductive wire (422') which are not in contact with the first copper electrode (411') and the second copper electrode (421'). A heating device according to claim 15, wherein the first copper electrode (411') and the second copper electrode (421') are both copper electrodes, the first electrode layer (31') and the second electrode layer (32') are both electrode layers, the copper electrode comprises an annular portion (6') wrapped around the outer circumference of the electrode layer, and a power connection portion (7') integrally formed with the annular portion (6'), the annular portion (6') comprises a plurality of elastic portions (8') protruding outward, a silver layer is provided at a portion where the copper electrode contacts the electrode layer, the silver layer has a thickness of 30um-200um, and the copper electrode has a thickness of 0.2mm-0.5mm.