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WO2025021974A1 - Élément dissipateur thermique pour module de puissance, module de puissance et procédé de production d'un tel élément dissipateur thermique - Google Patents

Élément dissipateur thermique pour module de puissance, module de puissance et procédé de production d'un tel élément dissipateur thermique Download PDF

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Publication number
WO2025021974A1
WO2025021974A1 PCT/EP2024/071245 EP2024071245W WO2025021974A1 WO 2025021974 A1 WO2025021974 A1 WO 2025021974A1 EP 2024071245 W EP2024071245 W EP 2024071245W WO 2025021974 A1 WO2025021974 A1 WO 2025021974A1
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WO
WIPO (PCT)
Prior art keywords
section
heat sink
sink element
flow
flow cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
PCT/EP2024/071245
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German (de)
English (en)
Inventor
Johannes Wiesend
Markus RÜPPEL
Rainer Herrmann
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Rogers Germany GmbH
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Rogers Germany GmbH
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Publication of WO2025021974A1 publication Critical patent/WO2025021974A1/fr
Pending legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids

Definitions

  • the present invention relates to a heat sink element for a power module and a method for producing such a heat sink element.
  • Power modules are well known in the art and offer the possibility of providing circuits or electrical connections between electronic or electrical components via corresponding connection surfaces and conductor tracks. It has proven particularly advantageous to use ceramic as an insulating element on which the individual metal sections of a component metallization are attached. Such ceramics have a comparatively high insulation strength and are particularly temperature-resistant. With the increasing demands on such power modules and the associated heat development, ever greater challenges are also being placed on the corresponding cooling systems, which are intended to ensure that heat is dissipated efficiently.
  • a classic approach to providing a heat sink element is to connect a cooling structure that has cooling fins to a rear-side metallization of a metal-ceramic substrate.
  • This arrangement of the corresponding cooling fins guides a cooling medium, in particular a cooling liquid, in order to ensure appropriate heat dissipation.
  • It is necessary to implement the connection via a rear-side metallization since this rear-side metallization is essential for the connection process of a metal layer to a ceramic element. Otherwise, especially if the metal layer is connected to the ceramic element on one side, the different expansion coefficients and the associated thermomechanical stresses would cause the metal-ceramic substrate to bend when the temperature changes, for example when cooling down after bonding.
  • loop-shaped cooling channels are provided as microchannels, which are designed in the same way and are arranged parallel to one another. This makes it possible in an advantageous manner to bring the cooling medium to the surface to be cooled in a particularly directed and targeted manner and in particular it is possible to ensure that the cooling is distributed as homogeneously as possible on the cooling side of the heat sink element.
  • the metal-ceramic substrates intended as power modules to be made available to a customer, who in turn connects the heat sink to the metal-ceramic substrate, in particular to the rear-side metallization of the metal-ceramic substrate.
  • a customer who in turn connects the heat sink to the metal-ceramic substrate, in particular to the rear-side metallization of the metal-ceramic substrate.
  • the present invention therefore sets itself the task of simplifying a manufacturing process for coolable power modules based on the prior art and, in particular, of improving the cooling efficiency and compactness of the power modules.
  • the present invention solves this problem with a heat sink element according to claim 1, a power module according to claim 9 and a method for producing such a heat sink element according to claim 10.
  • a heat sink element according to claim 1 a heat sink element according to claim 1
  • a power module according to claim 9 a method for producing such a heat sink element according to claim 10.
  • the further description, the figures and the subclaims contain further non-limiting embodiments of the invention.
  • a heat sink element for an electrical power module comprising - a base body with a first end face which, in the installed state, faces a surface to be cooled, and a second end face opposite the first end face, and
  • the cooling channel has a feed section, a deflection section and a discharge section, wherein the cooling channel is designed to form a general flow path to convey a cooling medium in the feed section in the direction of the first end face, to transfer it to the discharge section in the deflection section and to convey it in the direction of the second end face in the discharge section, wherein the feed section has a first flow cross-section dimensioned perpendicular to a flow direction and the deflection section has a second flow cross-section dimensioned perpendicular to the flow direction, wherein a ratio of the second flow cross-section to the first flow cross-section is less than 0.5, preferably less than 0.4 and particularly preferably less than 0.3.
  • the flow cross-section in the deflection area is specifically changed in comparison to the flow cross-sections in the feed section and the discharge section, in particular it is significantly reduced. This deviates in particular from the approach in which the aim is to keep the flow velocity in the channels as constant as possible.
  • By specifically influencing the flow velocity it is advantageously possible to reduce the pressure drop for the cooling medium that the cooling medium experiences when passing through the heat sink element. This is crucial for pumps that are used to pump the cooling medium through the heat sink element. In the case of a small pressure drop for the cooling medium between the inlet and outlet, it is advantageously possible to use pumps that have less stringent performance requirements.
  • the first flow cross-section and/or the second flow cross-section and/or the third flow cross-section for forming a microchannel assumes a value between 0.1 mm 2 and 25 mm 2 , preferably between 0.1 mm 2 and 12.5 mm 2 and particularly preferably 0.1 mm 2 and 5 mm 2.
  • These are thus cooling channels which are designed as a microstructure.
  • the channel structures, formed from a plurality of channel elements Microchannel structures are those that are so small that as many individual cooling channels as possible can be arranged next to one another in order to ensure appropriate homogeneity and uniform supply to the surface to be cooled.
  • the heat sink element comprises a microchannel cooling structure. This differs in particular from the fin-like structures, which are comparatively large and provide very large flow cross-sections between individual fins, in particular in a plane running perpendicular to the flow direction.
  • first flow cross-section and/or the second flow cross-section and/or the third flow cross-section have a polygonal shape.
  • first flow cross-section and/or the third flow cross-section have a star-shaped cross-section.
  • the second flow cross-section also differs from the first flow cross-section and/or the third flow cross-section in terms of its geometric shape and is, for example, rectangular.
  • the first flow cross-section and/or the third flow cross-section have a geometric shape that has more corners than the second flow cross-section. It has been found that the different geometries allow thermal resistance and pressure drop to be set in a targeted and improved manner.
  • the deflection section preferably runs as parallel as possible to the surface to be cooled, in particular to the first end face, in order to ensure appropriate point-based or surface-based cooling.
  • the deflection section can also be inclined to the main extension plane and/or have a stepped and/or curved course.
  • the flow cross-section is understood to mean in particular the extent that extends in the respective cooling channel in a perpendicular to the direction of flow. It is therefore a surface that is defined here and through which the cooling medium passes.
  • a plurality of identically shaped cooling channels are provided, wherein the cooling channel is part of the plurality of identically shaped cooling channels.
  • more than 50 cooling channels preferably more than 100 cooling channels and particularly preferably more than 200 cooling channels are provided in the heat sink element.
  • the plurality of cooling channels are arranged in clusters in a subsection. Appropriate clustering of the cooling channels makes it possible, for example, to specifically cool those areas in which it is expected that greater heat will be generated, particularly during operation. This makes it possible to specifically ensure increased cooling here.
  • Another advantage is that a smaller amount of cooling medium has to be guided through the heat sink element.
  • several plurality of identically shaped cooling channels are formed, wherein the respective plurality differs in terms of their type, i.e. have different designs for the feed section, deflection section and/or discharge section.
  • the plurality of cooling channels run parallel to one another, preferably along a row direction, and particularly preferably are arranged offset parallel to one another.
  • a suitable distribution structure as is known for example from DE 10 2016 125 338 and to whose disclosure content explicit reference is made in this regard, to supply the supply sections of adjacent cooling channels together or to receive the cooling fluid that emerges jointly, above all, from the discharge sections.
  • several rows of cooling channels arranged next to one another along a row direction are arranged in a direction predetermined by the main extension plane. This results in a regular pattern of cooling channels in the heat sink element.
  • the discharge region has a third flow cross-section dimensioned perpendicular to the flow direction, wherein a ratio of the third flow cross-section to the second flow cross-section is less than 0.5, preferably less than 0.4 and particularly preferably less than 0.3.
  • the discharge region has a third flow cross-section dimensioned perpendicular to the flow direction, wherein a ratio between the third flow cross-section and the first flow cross-section is less than 0.5, preferably less than 0.4 and particularly preferably less than 0.3.
  • the third flow cross-section can be larger than the second flow cross-section or vice versa.
  • the first flow cross-section is essentially identical to the third flow cross-section. In other words: the flow cross-section decreases from the first opening, through which the cooling medium enters the heat sink element, to the deflection section and then becomes larger again in the direction of the second opening, through which the fluid leaves the heat sink element.
  • a plurality of separate cooling channels with respective deflection section, supply section and discharge section and in particular cross-flow section are formed in the heat sink element.
  • the separate cooling channels are preferably arranged next to one another along two linearly independent directions in order to form a two-dimensional arrangement of deflection regions.
  • the cooling channels are preferably arranged in a repeating pattern. In particular, the cooling channels are arranged parallel to one another along two row directions.
  • the feed section and/or the discharge section is formed from a plurality of individual layers, i.e. first layers and/or second layers.
  • first layers and/or second layers are preferably provided.
  • a first flow cross-section in the feed section and/or a second flow cross-section in the discharge section which is dimensioned perpendicular to the flow direction, deviates from the second flow cross-section in the deflection section by less than 15%, preferably less than 10% and particularly preferably less than 5% of the second flow cross-section in the deflection section.
  • the flow cross-section is generally dimensioned in a plane perpendicular to the flow direction in the respective section, preferably as an average value if the flow cross-section changes along the flow direction.
  • a flow cross-section in the cross-flow section deviates from the second flow cross-section of the deflection section by less than 15%, preferably less than 10% and particularly preferably less than 5% of the second flow cross-section in the deflection section.
  • the deflection section runs essentially straight in a direction parallel to the main extension plane.
  • a first opening is formed in the feed section in the second end face. It is also provided that a flow cross-section in the first opening, measured perpendicular to the flow direction, deviates from the first flow cross-section of a downstream section of the feed section by less than 15%, preferably less than 10% and particularly preferably less than 5% of the first flow cross-section in the downstream section of the feed section.
  • the downstream section of the feed section is preferably located between the deflection section and the first opening, in particular centrally between the deflection section and the first opening. This ensures a particularly large volume flow, which can be introduced into the feed section and guided through the cooling channel.
  • a second opening is formed in the discharge section in the second end face. It is also provided that a flow cross-section in the second opening, measured perpendicular to the flow direction, deviates from the third flow cross-section of an upstream section of the discharge section by less than 15%, preferably less than 10% and particularly preferably less than 5% of the third flow cross-section in the discharge section.
  • the upstream section of the discharge section is preferably located between the deflection section and the second opening, in particular centrally between the deflection section and the second opening. This ensures a particularly large volume flow that can be guided through the cooling channel. In addition, nozzle effects are avoided.
  • the first opening and/or second opening are preferably dimensioned such that the flow cross-sections of the above shoulders are formed.
  • cooling channels in particular several separate cooling channels, are each connected to a common supply channel with the feed sections.
  • Each deflection section thus has its own feed section.
  • the feed section is thus defined as the area between a supply channel, which is used by several separate cooling channels, and the deflection section.
  • the heat sink element is closed on its first end face or is free of a recess or opening.
  • a continuous material layer is provided on the first end face, which, in particular with regard to the material composition, corresponds to at least one layer, i.e. first layer, second layer, third layer and/or fourth layer, from which the heat sink element is formed.
  • This ensures a particularly permanent connection, in particular in a critical area that is exposed to strong temperature changes.
  • the deflection section and thus the cooling fluid are therefore not directly adjacent to an object to be cooled. This advantageously prevents damage or impairments from occurring in this interface area. This increases the service life.
  • the supply section begins in a first opening, in particular set in the second end face, and/or that the discharge section opens into a second opening, in particular set in the second end face, wherein the first flow cross-section is determined in the region of the first opening and/or the third flow cross-section is determined in the region of the second opening.
  • the first opening and/or the second opening is not arranged in the second end face, but is introduced from the side, i.e. from a side that connects the first end face and the second end face and runs, for example, essentially along the stacking direction.
  • the formation of the first opening and the second opening on the second end face proves to be advantageous, in particular for distribution structures that are connected accordingly to the heat sink element in order to ensure the supply and disposal of the cooling medium.
  • the feed section and the discharge section run essentially parallel to one another to form a U-shaped course or are inclined to one another to form an angle, wherein the angle has a value between 0° and 120°, preferably between 0° and 90° and particularly preferably between O° and 45°.
  • the U-shaped design in particular makes it possible to create a cooling channel that has as little lateral expansion as possible. This means that as many cooling channels as possible can be arranged in parallel rows one behind the other and next to each other.
  • the cooling channels form a two-dimensional arrangement, preferably with a repeating pattern.
  • the deflection area has an additional profile.
  • the additional profile is a wave-shaped design of the channel wall in the deflection area that faces the first end face. This can be achieved, for example, by corresponding recesses or bulges in a metallization or metal layer that forms a cover layer of the heat sink element on the first end face.
  • a protruding web-shaped additional structure is also conceivable, which also contributes to increasing the heat transfer from the heat sink element to the coolant, for example by means of a bead-like and/or spherical end.
  • the supply section and/or the discharge section has additional structuring which protrudes into the cooling channel, which in particular increases cooling efficiency, in particular increases or improves the heat transfer from the heat sink element to the cooling liquid or cooling medium.
  • the first flow cross-section decreases along the flow direction, in particular decreases continuously, and/or the third flow cross-section increases along the flow direction, in particular increases continuously.
  • the heat sink element is closed on the first end face.
  • a partition wall is formed between a feed section and a discharge section, which has a width measured parallel to the main extension plane, which becomes smaller from the first end face to the second end face.
  • a distance between the deflection section and the ceramic element is less than 300 pm, preferably less than 200 pm and particularly preferably less than 100 pm. This makes it possible to arrange the deflection section particularly close to the ceramic element. This is only possible if a connection via a rear-side metallization is dispensed with, in particular if a first thickness of the component metallization is greater than the distance between the deflection section and the ceramic element.
  • An advantage attributable to this direct connection of the heat sink element is the avoidance of heat spreading and the shortening of a heat path to optimize the cooling performance.
  • the deflection section is directly adjacent to the ceramic element. In this case, the heat sink element, which is directly connected to the ceramic element, is open on the first end face. The heat can then be transferred directly to the cooling medium via the ceramic element.
  • At least one cross-flow section connecting the feed section and the discharge section is formed between the deflection section and the second end face
  • a cross-flow section is formed between the feed section and the discharge section.
  • Such a cross-flow section offers an additional possibility of guiding the cooling medium from the feed section into the discharge section, in particular without a corresponding proportion of cooling medium having to be guided via the deflection section.
  • the cross-flow section is designed in such a way that less than a third, preferably less than an eighth and preferably less than a fifteenth of the flow volume that is guided through the deflection section is guided through the cross-flow section, in particular an individual or all cross-flow sections. It has surprisingly been found that the thermal resistance of the entire heat sink element can be advantageously adjusted by such cross-flow sections.
  • the number of used layers and thus also the size of a second thickness of the heat sink element can be reduced, which has an advantageous effect on an adjustment of mass distribution on the front and back of the ceramic element for the purpose of compensating for deflection forces.
  • the formation of a cross-flow cross-section means that plastic deformations are promoted during cooling during the bonding process, which advantageously have the effect of minimizing deflection.
  • several cross-flow sections are provided, in particular arranged one above the other.
  • several cross-flow sections are provided which are arranged one above the other along a direction running perpendicular to the main extension plane and/or next to one another in a direction running parallel to the main extension plane.
  • the heat sink element is constructed from an arrangement of web elements that are arranged to form a partition between the supply section and the discharge section, in which the at least one cross-flow section, preferably a plurality of cross-flow sections, is arranged.
  • This provides a particularly light heat sink element that also behaves advantageously with regard to deflection.
  • the web elements also preferably form partitions between adjacent cooling channels.
  • the web elements preferably limit the respective flow cross-section and in particular determine its shape.
  • the web elements connect adjacent surface sections.
  • the adjacent surface sections are preferably part of a post section, which particularly preferably extends between the first and the second end face.
  • the surface sections advantageously ensure the necessary stability in the heat sink element.
  • the surface sections are preferably distributed in a two- or three-dimensional arrangement in the heat sink element. It is conceivable that surface sections are provided in the heat sink element which are connected within a plane via web elements to all adjacent surface sections and/or surface sections which are connected within a plane with less than 75%, preferably with less than 55% and particularly preferably with less than 50% of all adjacent surface sections.
  • web element refers in particular to those sections which are connected in a plane parallel to the main extension plane in a Layers are to be understood as having a preferred direction of extension along which the web elements have an extension that is many times, preferably at least five times, preferably at least eight times and particularly preferably ten times, greater than a web width measured perpendicular to the preferred direction of extension.
  • the surface sections either have no preferred direction of extension or at most have extensions along the preferred direction of extension that do not exceed five times, preferably eight times and particularly ten times the width of the web.
  • the at least one cross-flow section has a flow cross-section that assumes a value between 0.005 mm 2 and 0.07 mm 2 , preferably between 0.01 mm 2 and 0.055 mm 2 and particularly preferably between 0.015 mm 2 and 0.04 mm 2 . It has been found that with such flow cross-sections, sufficient cooling medium can still reach the deflection section and at the same time the openings that form the cross-flow cross-section are large enough to reduce the probability of blockage by particles in the cooling medium.
  • the flow cross-section is also defined here as an area that runs perpendicular to the cross-flow direction and is preferably delimited by web elements.
  • the heat sink element has at least one first layer and one second layer, which are arranged one above the other to form the at least one cooling channel. It is preferably provided that the heat sink element is composed of a system that has a plurality of first layers and a plurality of second layers, wherein first layers and second layers can be distinguished from one another in their geometric design. In particular, it is conceivable that the first layer and the second layer are produced as form-etched parts that are arranged one above the other and then connected to one another. It is also conceivable that the heat sink element is constructed exclusively from a plurality of first layers.
  • the first layer and the second layer preferably have a thickness which assumes a value between 0.1 mm and 0.8 mm, preferably between 0.1 and 0.5 mm and particularly preferably between 0.1 and 0.3 mm.
  • a thickness which assumes a value between 0.1 mm and 0.8 mm, preferably between 0.1 and 0.5 mm and particularly preferably between 0.1 and 0.3 mm.
  • recesses are let into the first and second layers, which are arranged one above the other in a targeted manner in order to form a corresponding cooling channel, preferably a cooling channel section that extends along the stacking direction.
  • an angle of inclination of the cooling channel and/or a spiral or stepped course of the cooling channel can be set by a corresponding offset of the first layer and the second layer or the first recess and the second recess, which can in particular contribute to the turbulence of the flow within the cooling channel, which in turn can increase the efficiency of the cooling channel.
  • the recesses are star-shaped and/or have projections that protrude into the recess in order to additionally influence the flow behavior during the flow along the flow direction.
  • the first layer and the second layer are offset from one another in a direction parallel to the main extension plane, preferably by a distance that has a value between 0.01 mm and 0.5 mm, preferably between 0.01 mm and 0.25 mm and particularly preferably between 0.01 and 0.15 mm.
  • This makes it possible to achieve a desired offset, in particular for a spiral-shaped course, which has proven to be particularly favorable for the turbulence of the cooling medium.
  • an offset of the first layer and the second layer or the first recess and the second recess increases from the second end face towards the first end face along the flow direction. This can correspondingly increase a degree of turbulence in the areas of the cooling channel that are arranged as close as possible to the first end face to be cooled.
  • first layer and/or the second layer have surface sections, the surface sections being connected to one another via web elements.
  • the surface sections are arranged congruently with one another, in particular when the first and second layers are assembled and stacked.
  • the surface sections of the first and second layers are preferably identical, in particular arranged at the same locations. This advantageously makes it possible to create a post section in the heat sink element, preferably continuous from the first to the second end face, which is particularly advantageous for the stability of the heat sink element.
  • a shape of the surface section measured parallel to the main extension plane can be rectangular, polygonal, square or rectangular. table, circular and/or oval.
  • the surface sections are arranged in a checkerboard pattern relative to one another or in a fixed two-dimensional pattern relative to one another.
  • the web elements connect the adjacent surface sections.
  • the first layer and the second layer to also comprise surface sections which have a reduced number of connections with web elements. For example, it is conceivable for a surface section to have fewer than three web elements which protrude from the surface section along the main extension plane. This makes it possible to deliberately produce an enlarged recess in the first layer and the second layer by deliberately omitting web elements between individual surface sections.
  • the surface sections and web elements are connected to one another in a grid-like manner, in particular to form a first layer and/or a second layer.
  • the surface sections and/or web elements are preferably designed in such a way that star-shaped recesses are formed. This also advantageously makes it possible to influence the deformation and/or rigidity of the heat sink element.
  • the web elements that connect the surface sections to one another do not run in a straight line along a plane that extends parallel to the main plane of extension.
  • the web element is angled and/or curved.
  • a wave-shaped design is also conceivable. It has been found that a certain flexibility can be created by web elements that do not run in a straight line, which has proven to be particularly advantageous for the mutual compensation of forces that act on the ceramic element, particularly when cooling after bonding the ceramic element and metal layer.
  • the geometric design allows a rigidity to be set in a targeted manner. This advantageously makes it possible to counteract or specifically counteract bending, for example.
  • the first layer and the second layer are arranged one above the other in such a way that the non-straight course of the web elements arranged one above the other creates an opening for forming the cross-flow section is designed.
  • the layers arranged one above the other and in particular in the sections in which the web elements are provided it is possible to create the corresponding opening that allows a desired cross-flow.
  • the web elements arranged one above the other form a boundary in the form of a diamond-shaped cross-section.
  • this can also be a cross-section that is at least elliptical or similar to an ellipse.
  • first openings in the first layer and the second openings in the second layer are laterally offset from one another along a direction parallel to the main extension plane, for example without being twisted, in order to create a cross-flow section. It is also conceivable that the first openings in the first layer and the second openings in the second layer are offset without forming a cross-flow section, since this also creates flexibility in the heat sink element that is advantageous for deformation. It is also preferably conceivable that the surface sections are offset from one another. This can, for example, additionally create turbulence.
  • a plurality of cross-sectional flow sections arranged one above the other are provided, in particular at least one cross-sectional flow section is provided for each pair of first and second layers.
  • the first layers and second layers arranged one above the other form a continuous post section.
  • This post section serves in particular to increase stability, in particular along a direction parallel to the stacking direction.
  • the post sections preferably provide the rigidity that is required in particular in the sintering process.
  • the post section proves to be advantageous for heat transport.
  • the layers stacked one above the other have surface sections of different sizes, in order to obtain, for example, a post section that tapers towards the second end face. This also proves to be advantageous for the cooling efficiency of the cooling device.
  • the post section preferably tapers gradually from layer to layer.
  • a power module is provided with a heat sink element, in particular a heat sink element according to the invention, comprising a ceramic element, a component metallization and the heat sink element, wherein the ceramic element, the component metallization and the heat sink element extend essentially along a plane running parallel to a main extension plane and are arranged one above the other in a stacking direction running perpendicular to the main extension plane, wherein the ceramic element is arranged between the component metallization and the heat sink element, wherein the component metallization has a first thickness measured in the stacking direction and the heat sink element has a second thickness measured in the stacking direction, wherein a ratio between the first thickness and the second thickness is less than 0.4, preferably less than 0.3 and particularly preferably less than 0.2, wherein the heat sink element, in particular by hollow areas in the heat sink element, in particular by a targeted arrangement of hollow areas in the heat sink element, and/or in particular by a targeted mass distribution within the heat sink element, is designed in such a way that
  • the shape of the heat sink element in particular an inner shape of the heat sink element, is used to compensate for the thermomechanical stress that acts on the back and the front of the ceramic element in the entire power module.
  • the heat sink element is designed independently of the power module and is simply connected to a rear-side metallization after the production of the metal-ceramic substrate.
  • This enables in particular the simultaneous connection of the heat sink element to the ceramic element, preferably during a common connection process or a common bonding process. This avoids an additional work step, namely the subsequent connection of the heat sink element.
  • the heat sink element is designed in such a way that the deflection is reduced compared to the reference power module, i.e. to the power module with the same geometric design but a solid heat sink element.
  • the person skilled in the art understands solid in particular to mean a heat sink element without hollow areas, i.e. a substantially structureless metal layer or a metal block.
  • Deflection is understood in particular to mean the deviation from a completely flat plane. Deflection is typically a type of curvature, so that the deflection can preferably be assumed to be the angle that forms between a plane that runs tangentially through a vertex of the curvature and a point that deviates or is spaced apart as much as possible from the course of the planar plane that runs through the vertex. This angle can be used, for example, as a scale to determine the respective deflection. The angles are to be determined for the reference power module and the power module with respect to the same distance from the vertex.
  • the first thickness assumes a value between 0.1 mm and 4 mm, preferably between 0.1 and 2 mm and particularly preferably between 0.2 and 0.8 mm and/or the second thickness assumes a value between 0.5 mm and 6 mm, preferably between 1.0 and 5 mm and particularly preferably between 1.5 and 4 or even 2 and 3.5 mm.
  • the heat sink element can preferably be formed from a metal layer or a plurality of metal layers. However, it is also conceivable that a composite structure is formed in which metal and/or ceramic alternately determine the shape of the heat sink. A heat sink element made of ceramic layers is also conceivable. The individual layers can be made of metal and/or a ceramic material.
  • a ceramic layer or the ceramic element comprises AI2O3, SisN4, AIN, an HPSX ceramic (i.e.
  • the ceramic layer is designed as a composite or hybrid ceramic, in which, in order to combine various desired properties, several ceramic layers, each of which differs in terms of their material composition, are arranged one above the other and joined together to form an insulating element.
  • the ceramic element especially if it is provided as a component of the heat sink element, has a thermal conductivity that is greater than 80 W/mK, preferably greater than 100 W/mK and particularly preferably greater than 120 W/mK. This makes it possible to achieve an advantageous thermal resistance, which is necessary for the effective dissipation of heat.
  • the heat sink element preferably has a plurality of three-dimensionally arranged web elements, which together form cooling channels. These are assembled in such a way that they form corresponding cavities, which have a corresponding influence on the deflection.
  • the web elements preferably have a web width that is less than 250 pm, preferably less than 200 pm and particularly preferably less than 150 pm. It has been found to be advantageous that such thin web widths enable plastic deformation in the cooling in the bonding process. This contributes to the reduction of the mechanical stress and has a positive effect on the extent of the deflection.
  • the web elements are designed in such a way that they form wall structures or partitions, in particular comparatively thin wall structures or partitions that separate, for example, a feed section and a discharge section from each other. These can be plastically deformed comparatively easily during cooling and can thus contribute to compensation to the desired extent.
  • the web elements have a cross-section along a plane measured perpendicular to a preferred direction which is rectangular and/or square and/or round and/or which occupies an area which is smaller than 0.08 mm 2 , preferably smaller than 0.05 mm 2 and particularly preferably smaller than 0.038 mm 2 .
  • the heat sink element as a body defines a first volume through its outer circumference and the hollow areas in the heat sink element occupy a second volume (for example, to be determined as the complete filling of all cooling channels with a liquid), wherein a ratio of the second volume to the first volume assumes a value that is greater than 0.5, preferably greater than 0.6 and particularly preferably greater than 0.7. It has been found that with an increasing proportion of hollow areas in the heat sink element, the compensation of thermomechanical stresses in the heat sink element can be improved.
  • the power module is preferably designed as a metal-ceramic substrate, in which the at least one metal layer that is connected to the ceramic element is structured in the manufactured state.
  • structuring is also carried out, for example by lasering, etching and/or mechanical processing, with which conductor tracks and/or connections for electrical or electronic components are realized.
  • the heat sink element is directly connected to the ceramic element.
  • a direct connection can be recognized in the produced metal-ceramic substrate, for example, by the fact that a homogeneous grain size distribution results in the course of the heat sink element, in particular from a first end face to the second end face.
  • a homogeneous grain size distribution results in the course of the heat sink element, in particular from a first end face to the second end face.
  • Such a direct connection proves to be particularly advantageous because a complex intermediate step can be dispensed with, in which first the back metallization and then the heat sink must be bonded to the back metallization.
  • the component metallization has a first mass and the heat sink element has a second mass, wherein the second mass deviates from the first mass by only less than 160%, preferably less than 120% and particularly preferably less than 80%.
  • a corresponding mass distribution proves to be particularly advantageous in order to counteract bending. It turns out that despite the significant differences in terms of thickness, the difference between the first mass and the second mass is comparatively small.
  • the entire power module is particularly light. This is preferably combined with a corresponding alignment of the individual wall structures in the heat sink element in order to generate corresponding leverage effects, for example. This cannot be guaranteed, for example, with the conventional procedure.
  • a grain size influences the thermomechanical stresses on the front and back of the ceramic element and/or that these are also taken into account.
  • the component metallization has an average first grain size and the heat sink element has an average second grain size, wherein a ratio of the average first grain size to the average second grain size is less than 0.7, preferably less than 0.5 and particularly preferably less than 0.25.
  • the component metallization comprises a fine grain, while the heat sink element has a coarse grain. At least a corresponding grain size distribution is taken into account when designing the heat sink element.
  • the mass distribution in the heat sink element can be influenced by having layers stacked on top of one another and connected to one another exhibit a web width modulation along a plane running parallel to the main extension plane before they are connected to one another in order to increase the density in specific areas and cause a corresponding leverage effect.
  • the deflection can be influenced by strengthening the layers joined together to form the heat sink element.
  • the ceramic element has a third thickness measured in the stacking direction and that the third thickness assumes a value of up to 500 pm, preferably a value of up to 300 pm and particularly preferably a value of up to 250 pm or even a value of up to 200 pm. This includes the respective limits, i.e. 500 pm, 300 pm, 250 pm and 200 pm. It has been found that it is even possible to make the ceramic elements so thin by appropriately designing the heat sink element. This would not be possible, for example, if a deflection is generated, as would be expected for the reference module, because in such cases these comparatively thin ceramic elements can and the functionality of the power module would not be given.
  • the heat sink element is designed to be porous, in particular to be provided with a large number of cooling channels.
  • the heat sink element preferably has more than 30, preferably more than 90 and particularly preferably more than 150 cooling channels, in particular active cooling channels.
  • cooling channels are embedded in the heat sink element to influence the thermomechanical stress on the back of the ceramic element. Accordingly, it is conceivable, for example, to achieve a thermally stable heat sink through the targeted plating decoration of cooling channels to counteract the corresponding deflection. In particular, the deflection of the power module is reduced by the positioning of the cooling channels.
  • the component metallization has a first extension running parallel to the main extension plane and the heat sink element has a second extension running parallel to the main extension plane, wherein a ratio of the first extension to the second extension assumes a value that is between 0.9 and 1, preferably between 0.95 and 1 and particularly preferably between 0.98 and 1.
  • the component metallization and the heat sink element are only marginally offset in a direction running perpendicular to the stacking direction, in particular in order to avoid leverage effects as far as possible.
  • the first extension and the second extension do not end flush with one another when viewed in the stacking direction, in particular in order to be able to provide a pullback on the side of the ceramic element that faces the component metallization.
  • the heat sink element ends flush with the ceramic element in an outer circumference delimiting it in a plane running parallel to the main extension plane.
  • the ceramic element does not protrude from the heat sink element in a direction perpendicular to the stacking direction
  • the heat sink element has hollow regions which are not intended for guiding the cooling medium, wherein the hollow regions not intended for guiding the cooling medium are preferably a continuation of an arrangement of cooling channels and/or are preferably arranged in the edge region of the heat sink element.
  • the heat sink element has hollow areas that are not intended for guiding a cooling medium.
  • further hollow areas are provided, which preferably serve exclusively the purpose of reducing the second mass and realizing an advantageous mass distribution.
  • the hollow areas have the shape of the cooling channels.
  • the structure or arrangement of cooling channels is continued without specific cooling channels being intended for the actual guidance of a cooling medium. They form so-called Dummy structures that advantageously contribute to mass distribution. Such unused cavities or dummy structures are preferably embedded in an edge region of the heat sink element.
  • the heat sink element has cooling channels over its second extension parallel to the main extension plane.
  • cooling channels are also provided in the areas that are not intended for cooling.
  • the cooling channels are distributed over the entire second extension of the heat sink element, preferably homogeneously. This applies in particular to the formation of a large card.
  • connecting structures are thus dispensed with that would connect the individual heat sink sections, which are intended for the respective individual substrates, to one another in the large card.
  • a further subject of the present invention is a method for producing a heat sink element according to the invention. All advantages and properties described for the power module can be transferred analogously to the method and vice versa.
  • Fig.1 schematic representation of a power module with heat sink element according to a first exemplary embodiment of the present invention
  • Fig.2 schematic representation of a power module with a sectional view of a heat sink element according to a second exemplary embodiment of the present invention
  • Fig. 3 schematic representation of a power module with a sectional view of a heat sink element according to a third exemplary embodiment of the present invention
  • FIG. 4 schematic representation of a cutout for a heat sink element for a power module according to a fourth exemplary embodiment of the present invention
  • FIG. 5a to 5c schematic representation of a cutout for a heat sink element for a power module according to a fifth exemplary embodiment of the present invention
  • FIG. 6 schematic representation of a cutout for a heat sink element for a power module according to a sixth exemplary embodiment of the present invention
  • FIG. 1 shows a power module 10 according to a preferred embodiment of the present invention.
  • a power module 10 comprises a component metallization 20, a ceramic element 25 and a heat sink element 1.
  • the component metallization 20 is preferably a structured metal layer in which conductor tracks and/or electronic connections are formed by the structuring. This makes it possible to use the component metallization 20 for circuits or circuit systems. For this purpose, for example, electrical components or wire bonds are connected to the connection surfaces and/or conductor tracks of the component metallization 20.
  • the structuring (not shown) ensures electrical insulation between the individual metal sections in the component metallization 20.
  • the structuring extends to a ceramic element 25, which acts as an insulation element for the insulation between the metal sections, which in turn are connected to the ceramic element 25.
  • the main task of the heat sink element 1 is to ensure that the heat generated during operation of the power module 10 is effectively dissipated at the component metallization 25 in order to prevent corresponding damage to the power module 1 and in particular not to endanger or reduce the performance of the power module 1.
  • the power modules 1 described here in particular with the present choice of material for the insulation element, it has proven to be a common approach It has been found that a metal layer which is bonded to the ceramic element 25 to form the component metallization 20 is bonded to the ceramic element 25 together with a backside metallization on the ceramic element 25 opposite the component metallization 20.
  • thermomechanical stresses on the front side of the ceramic element 25 which are caused by the different expansion coefficients of ceramic and metal and would lead to deflection without rear-side metallization. Without appropriate compensation, the different thermal expansion coefficients would lead to deflection of the metal-ceramic substrate, in particular if the temperature changes during the bonding process. Appropriate compensation is therefore ideally achieved if the metal layer that is bonded to the component side is essentially symmetrical to the rear-side metallization, i.e. comparable or identical in particular with regard to the dimensions, i.e. thickness and extension. In this way, thermomechanical stresses that essentially compensate for one another act on the ceramic element 25 on opposite sides.
  • a cooler it is usual for a cooler to then be connected to the corresponding rear-side metallization in order to ensure the corresponding cooling performance for the power module 10.
  • This is usually done on the customer side and is separate from the manufacturing process of the metal-ceramic substrate. This not only leads to an undesirable additional work step, but can also influence the maximum possible efficiency and cooling performance of a heat sink element 1 and thus the overall performance of the power module 10, especially if optimal coordination is not carried out.
  • the heat sink element 1 is or is directly connected to the ceramic element 25.
  • the component metallization 20, the ceramic element 25 and the heat sink element 25 each extend along a plane running parallel to the main extension plane HSE and are arranged one above the other in a stacking direction S running perpendicular to the main extension plane HSE.
  • the ceramic element 25 is between the Component metallization 20 and heat sink element 1 are arranged.
  • Component metallization 20 has a first thickness D1 measured in the stacking direction S, and heat sink element 1 has a second thickness D2 measured in the stacking direction S. Ceramic element 25 has a third thickness D3 measured in the stacking direction S.
  • heat sink element 1 has a second thickness D2 that is greater than the first thickness D1 of component metallization 20.
  • Such dimensioning of heat sink element 1 and component metallization 20 would normally result in considerable deflection being caused due to the significantly higher accumulation of material on the back of ceramic element 25, in particular if heat sink element 1 with the second thickness D2 is or is directly and immediately connected to the back of ceramic element 25.
  • a deflection of the power module 10 is more than five times smaller, preferably more than eight times smaller and particularly preferably more than ten times smaller than the deflection of a reference power module with dimensions that correspond to that of the power module 10, wherein the reference power module is designed with a solid heat sink element 1.
  • a plurality of cooling channels 30,30, in particular microchannel cooling channels, which are embedded in the heat sink element 1 ensure that a corresponding deflection of the power module 10 is reduced.
  • the deflection can be reduced in this way and an immediate and direct connection of the heat sink element 1 to the back of the ceramic element 25 is also possible.
  • the component metallization 20 has a first mass and the heat sink element 1 has a second mass, wherein the second mass deviates from the first mass by only less than 160%, preferably not more than 120% and particularly preferably not more than 80%.
  • the heat sink element 1 in such a way that the mass distribution on the front of the ceramic element 25 and the back of the ceramic element 25 are thermomechanically comparable, for example by letting a correspondingly large number of cooling channels into the heat sink element 1.
  • the person skilled in the art will draw on corresponding empirical values and/or simulations, which cause a corresponding mass distribution in the heat sink element 1, which has a corresponding reducing effect on the deflection of the power module 10.
  • heat sink element 1 An exemplary design of the heat sink element 1 can be seen in detail in Figure 5b or 5c. It is clear that other material distributions are also conceivable, which should also be included here. As a departure from the usual approach, it is therefore proposed that the heat sink element 1 is, for example, bonded directly and immediately to the ceramic element 25, preferably in a common bonding process with the metal layer provided for the component metallization 20, by designing and shaping the mass distribution on the back of the ceramic element 25 for the heat sink element 1 to reduce the deflection.
  • the ratio of the first extension A1 to the second extension A2 assumes a value between 0.9 and 1, preferably between 0.95 and 1 and particularly preferably between 0.98 and 1. Accordingly, it has proven advantageous if the second extension A2 of the heat sink element 1 is greater than the first extension A1 of the component metallization 20 in order to minimize a leverage effect on the rear side in comparison to the front side of the ceramic element 25.
  • the metal-ceramic substrate or power module 10 produced is initially a large card, from which individual metal-ceramic substrates or power modules 10 are then created by separating, preferably along a predetermined breaking point, which was created, for example, with an ultrashort pulse laser.
  • the large card is characterized in particular by the fact that it already has a connected heat sink element.
  • Figure 2 shows a power module 10 according to a second exemplary embodiment.
  • Figure 2 shows an example of a course of possible cooling channels 30, 30'.
  • Figure 2 shows two different possible types of cooling channels 30, 30' with two different general flow courses.
  • the cooling channels 30, 30' of the same type in particular only of a single type, are embedded in a power module 10.
  • the heat sink element 1 preferably has a first end face S1 and a second end face S2.
  • the first end face S1 and the second end face S2 lie opposite one another along the stacking direction S in the power module 10 and the first end face S1 faces the ceramic element 25 and thus the surface to be cooled.
  • the cooling channel 30, 30' is embedded or integrated in the base body of the heat sink element 1 and arranged between the first end face S1 and the second end face S2.
  • the heat sink element 1 has a first opening 41 on the second end face S2, as well as a second opening 42, which is also preferably arranged in the second end face S2.
  • a cooling medium in particular a fluid cooling medium, is introduced into the cooling channel 30, 30' via the first opening 41, while the medium used for cooling leaves the heat sink element 1 via the second opening 42.
  • the cooling channel 1 preferably has a feed section 31, a deflection section 32 and a discharge section 33.
  • the feed section 31 guides the cooling medium along a flow direction SR to a deflection section 32.
  • the feed section 31 guides the cooling medium in particular in the direction of the first end face S1 of the heat sink element 1.
  • the deflection section 32 in turn guides the cooling medium along a flow direction SR to the discharge section 33 and the discharge section 33 preferably guides the cooling medium to the second opening 42, ie in particular in the direction of the second end face S2.
  • the deflection section 32 runs essentially in sections parallel to the first end face S1 of the heat sink element 1 in order to ensure cooling over as much surface area as possible.
  • the actual cooling effect or a large contribution to the cooling effect comes from the deflection region 32, which is preferably arranged as close as possible to the ceramic element 25.
  • a distance A3 measured in the stacking direction S between the deflection region 33 and the ceramic element 25 is less than 250 pm, preferably less than 150 pm and particularly preferably less than 100 pm.
  • the respective successive flow directions SR in the feed section 31, deflection section 32 and discharge section 33 preferably define a general flow pattern in the cooling channel 30, 30'.
  • the general flow pattern is essentially U-shaped, while in the one shown on the right, th embodiment of a cooling channel 30, 30', a substantially V-shaped course is shown.
  • the flow direction SR in the feed section 31 is inclined or angled to a flow direction SR in the discharge section 33, wherein an angle between the flow directions SR in the feed section 31 and discharge section 33 preferably assumes a value between 0° and 90°, preferably between 0° and 60° and particularly preferably between 0° and 45°.
  • the flow cross sections are adapted accordingly during the flow along the flow path. It has been found particularly preferably that a first flow cross section Q1 in the feed section 31, which is dimensioned perpendicular to the flow direction SR, is larger than a second flow cross section Q2 in the deflection section 32, which is dimensioned perpendicular to the flow direction SR. In the embodiment of the cooling channel 30 shown on the left in Figure 2, the respectively dimensioned flow cross sections are aligned perpendicular to one another due to the general flow path.
  • the first flow cross section Q1 is preferably determined in the region of the first opening 41.
  • a third flow cross section Q3 of the discharge section 33 which is dimensioned perpendicular to the flow direction SR, is formed, in particular in the region of the second opening 42. It has proven to be particularly advantageous, in particular for a pressure drop over the flow path, if a ratio of the second flow cross section Q2 to the first flow cross section Q1 is less than 0.5, preferably less than 0.4 and particularly preferably less than 0.3.
  • the flow cross section is in particular dimensioned as the area that is delimited by the respective channel walls that are assigned to the cooling channel 30, 30'.
  • first flow cross section Q1 decreases in the direction of the deflection section 32, in particular decreases gradually and/or continuously, and/or that the third flow cross section Q3 increases in the direction of the second opening 42, in particular increases continuously and/or gradually.
  • the third flow cross-section Q3 is larger than the second flow cross-section Q2 and/or substantially corresponds to the first flow cross-section Q1.
  • the expert understands the term correspondence in particular to mean that a deviation between the first flow cross-section Q1 and the third flow cross-section Q3 is not greater than 10%, preferably not greater than 5% and particularly preferably not greater than 2.5% of the average value of the first flow cross-section Q1 and the third flow cross-section Q3.
  • the person skilled in the art also understands a flow cross-section to be an area, so that the length of the cross-section shown here in Figure 2 represents only a part of the flow cross-section to be used.
  • FIG. 3 shows a power module 10 according to a third exemplary embodiment of the present invention.
  • the power module 10 shown here is characterized by a heat sink element 1 in which the cooling channel 30, 30' is designed such that a cross-flow section 50 is formed.
  • the cross-flow section 50 is arranged between the second end face S2 and the deflection section 32 and connects the feed section 31 to the discharge section 33, in particular upstream of the deflection section 32, i.e. before part of the cooling medium reaches the deflection section 32.
  • part of the cooling medium is already deflected before reaching the deflection section 32 and discharged into the discharge section 33. Surprisingly, it has been found that this can increase the overall cooling efficiency of a power module 10.
  • the power module of Figure 3 is characterized in that the heat sink element 1 is flush with the ceramic element 25 on the outer circumference, preferably completely. This is also a preferred embodiment for the embodiment variants of the other figures.
  • Figure 4 shows an arrangement of a first layer 60 and a second layer 70, which are arranged one above the other along a stacking direction S in order to form part of a cooling channel structure in the heat sink element 1.
  • the first layer 60 and/or the second layer 70 have web elements 61, 71.
  • These web elements 61, 71 preferably connect adjacent surface sections 62, 72, wherein the surface sections 62, 72 of the first layer 60 and second layer 70 arranged one above the other are particularly preferably arranged congruently one above the other, in particular to form a post section 67 in the heat sink element 1.
  • Such post sections 67 prove to be particularly advantageous because they also serve to stabilize the heat sink element 1, in particular along a direction running parallel to the stacking direction S.
  • the surface sections 62, 72 are essentially square. It is also conceivable that a circular or elliptical geometry is selected and/or a rectangular and/or a polygonal cross-sectional shape. Furthermore, it is preferably provided that the web elements 61, 71 connecting the surface sections 62 do not run in a straight line. In the embodiment shown in Figure 4, the web element 61, 71 is angled, in particular forming an angle between 80° and 140°, preferably between 90° and 120° and particularly preferably between 90° and 100°. In other words: the web element 61, 71 comprises two partial segments that run at an angle to one another. Alternatively, it is conceivable that a curved course is provided for the web element 61, 71 as a non-straight course.
  • Figure 4 shows a plan view of a first layer 60 and a second layer 70, which are arranged one above the other along the stacking direction S.
  • the web elements 61, 71 By appropriately dimensioning or designing the first layer 60 and second layer 70 or by appropriately aligning the first layer 60 and the second layer 70, it is possible for the web elements 61, 71 to be aligned in opposite directions to one another.
  • they are designed such that the web elements 61, 71 form an opening in a plan view which is delimited by the web elements 61 of the first layer 60 and the web elements 71 of the second layer 70 in a viewing direction that runs parallel to the stacking direction S.
  • This opening forms the cross-flow section 50.
  • this opening is particularly diamond-shaped. It is also conceivable that other geometries, in particular polygonal or elliptical or circular geometries, are designed here.
  • web element 61, 71 is to be understood in particular as meaning those partial sections which are connected in a plane in a layer along a plane running parallel to the main extension plane and which have a preferred extension direction along which the web elements 61, 71 have an extension which is many times, preferably at least five times, greater than a web width B measured perpendicular to the preferred extension direction.
  • the surface sections 62, 72 either have no preferred extension direction or at most have extensions along the preferred extension direction which do not exceed five times the web width B.
  • the surface sections 62, 72 are arranged in a checkerboard pattern with respect to one another and that the respective surface sections 62, 72 are provided with the respective adjacent surface sections 62, 72 are connected via the web elements 61, 71.
  • the first layer 60 and/or the second layer 70 are designed in a grid shape.
  • Figures 5a to 5c show a further design option for a heat sink element 1 according to an exemplary embodiment.
  • Figure 5a shows a plan view of a first layer 60 and a second layer 70, which are arranged one above the other along the stacking direction S.
  • first layer 60 and the second layer 70 - this applies to the embodiment in Figure 4 and the embodiment in Figures 5a to 5c - are arranged alternately several times one above the other.
  • a first number of first layers 60 are arranged one above the other and a second number of second layers 70 are arranged one above the other, which in turn are arranged one above the other.
  • a first number of first layers 60 is arranged over a second number of second layers 70. This makes it possible to determine the corresponding position of a cross-sectional flow section 50 or to determine the number of cross-flow sections 50.
  • the first number of first layers 60 does not have to match the second number of second layers 70.
  • a heat sink element 1 is constructed from at least a plurality, preferably at least five, particularly preferably at least eight and particularly preferably at least ten individual layers, wherein the plurality of individual layers particularly preferably has only the first layer 60 and the second layer 70 for forming the feed section 31 and the discharge section 33.
  • the deflection section is preferably formed by a third layer and/or fourth layer (not shown) or a plurality of third layers 80 and/or fourth layers.
  • the first layer 60, the second layer 70, the third layer 80 and/or fourth layer differ, for example, with regard to the orientation of the web elements 61, 71 and/or the number of web elements 61, 72 and/or the size of the web elements 61, 71 and/or with regard to the arrangement, size and/or number of the surface sections 62, 72.
  • the alternating arrangement results in an uneven inner side of the cooling channel, which promotes turbulence in the cooling medium.
  • Figure 5b shows a first perspective view of the stack of the first layer 60 and the second layer 70.
  • the post section 67 can also be seen in particular. which preferably extends from the first end face S1 to the second end face S2, in particular extends continuously.
  • a plurality of cross-flow sections 50 arranged one above the other are formed by the web elements 61, 71 arranged one above the other.
  • Figure 5c also shows a further perspective view of the heat sink element 1.
  • the embodiment of Figures 5a to 5c differs from that of Figure 4 in that surface sections 62, 72 are provided which are free of connection to an adjacent surface section 62, 72 in at least one direction.
  • surface sections 62, 72 are connected to adjacent surface sections 62, 72 along a first direction via web elements 61, 71, and are not connected to adjacent surface sections 62, 72 along a second direction, wherein the first direction and second direction lie in a plane running parallel to the main extension plane HSE and are arranged at an angle to one another, in particular running at right angles to one another.
  • the flow cross-section Q1 and/or the third flow cross-section Q3 is advantageously defined, in particular enlarged, in order to correspondingly also produce a larger first flow cross-section Q1 or third flow cross-section Q3 compared to the second flow cross-section Q2 in the deflection section 32.
  • supply sections 31 and discharge sections 33 are realized by the corresponding stacking of the individual layers, wherein the deflection sections 32 are designed in such a way that, for example, in the case of two adjacent cooling channels 30, 30', the discharge sections 33 are arranged next to one another.
  • two discharge sections 33 of two adjacent cooling channels 30, 30' are located between two supply sections 31 of the adjacent cooling channels.
  • both discharge sections 33 can share a common discharge in the distribution structure.
  • the first layer 60 and the second layer 70 are identical in construction and are twisted relative to one another, preferably rotated by 180°, stacked and joined.
  • first layer 60 and the second layer 70 are offset relative to one another in a direction parallel to the main extension plane HSE, preferably by a distance that assumes a value between 0.01 mm and 0.5 mm, preferably between 0.01 mm and 0.25 mm and particularly preferably between 0.01 and 0.15 mm.
  • Figure 6 shows a further design option for a heat sink element 1 according to an exemplary embodiment.
  • first layers 60 are stacked on top of one another to form the feed section 31 and the discharge section 33.
  • the web elements 61 are designed in a straight line and connect the checkerboard-like surface sections 62. This results in rectangular recesses which define a first or third flow cross-section in the feed section 31 and in the discharge section 33.
  • Such a design proves to be particularly advantageous because it is comparatively easy to implement.
  • third layers 80 are arranged one above the other in order to define a deflection section 32 with their recesses arranged one above the other.
  • the third layers 80 which are arranged one above the other in a substantially identical manner, are arranged in relation to one another in such a way that the recesses are arranged congruently with one another. This results in substantially smooth inner sides in the deflection area 32. It is advantageous if the third layers 80 are offset from one another and/or a fourth layer (not shown) is provided in order to realize a profiling on the inner side in the deflection section 32, or in the transition from the feed section 31 to the deflection section 32 and/or in the transition from the deflection section 32 to the discharge section 33.
  • the third layer 80 differs from the first layer 60 and/or second layer 70 in that at least one web element 61, which connects adjacent surface sections 62 to one another, is omitted in comparison to the first layer 60 and/or second layer 70, in particular in order to realize a larger recess which forms the deflection section 32.

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Abstract

L'invention concerne un élément dissipateur thermique (1) pour un module de puissance électrique (10), ledit élément dissipateur thermique comprenant : - un corps principal ayant une première face d'extrémité (S1) qui, lorsqu'elle est installée, fait face à une surface à refroidir, et une seconde face d'extrémité (S2) opposée à la première face d'extrémité (S1), et - un canal de refroidissement (30, 30') qui est intégré dans le corps principal entre la première face d'extrémité (S1) et la seconde face d'extrémité (S2), le canal de refroidissement (30, 30') ayant une partie d'alimentation (31), une partie de redirection (32) et une partie d'évacuation (33), le canal de refroidissement (30, 30') étant conçu pour former un trajet d'écoulement général pour permettre à un milieu de refroidissement d'être transporté dans la partie d'alimentation (31) dans la direction de la première face d'extrémité (S1), transféré dans la partie de redirection (32) vers la partie d'évacuation (33), et transporté dans la partie d'évacuation (33) dans la direction de la seconde face d'extrémité (S2), la partie d'alimentation (31) ayant une première section transversale d'écoulement (Q1) mesurée perpendiculairement à une direction d'écoulement (S), et la partie de redirection (32) ayant une seconde section transversale d'écoulement (Q2) mesurée perpendiculairement à la direction d'écoulement (S), le rapport entre la seconde section transversale d'écoulement (Q2) et la première section transversale d'écoulement (Q1) étant inférieur à 0,5, de préférence inférieur à 0,4, et idéalement inférieur à 0,3.
PCT/EP2024/071245 2023-07-27 2024-07-26 Élément dissipateur thermique pour module de puissance, module de puissance et procédé de production d'un tel élément dissipateur thermique Pending WO2025021974A1 (fr)

Applications Claiming Priority (2)

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DE102023119991.9A DE102023119991A1 (de) 2023-07-27 2023-07-27 Kühlkörperelement für ein Leistungsmodul, ein Leistungsmodul und Verfahren zur Herstellung eines solchen Kühlkörperelements
DE102023119991.9 2023-07-27

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Citations (5)

* Cited by examiner, † Cited by third party
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