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WO2025016999A1 - Multiplexage de polarisation pour conception de trajet d'étalonnage interne améliorée - Google Patents

Multiplexage de polarisation pour conception de trajet d'étalonnage interne améliorée Download PDF

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Publication number
WO2025016999A1
WO2025016999A1 PCT/EP2024/070090 EP2024070090W WO2025016999A1 WO 2025016999 A1 WO2025016999 A1 WO 2025016999A1 EP 2024070090 W EP2024070090 W EP 2024070090W WO 2025016999 A1 WO2025016999 A1 WO 2025016999A1
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WIPO (PCT)
Prior art keywords
light
spectrometer device
polarization
detector
application
Prior art date
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Application number
PCT/EP2024/070090
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English (en)
Inventor
Matthias STEEG
Celal Mohan OEGUEN
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TrinamiX GmbH
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TrinamiX GmbH
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Publication date
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Publication of WO2025016999A1 publication Critical patent/WO2025016999A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held

Definitions

  • the invention relates to a spectrometer device, a method of calibrating a spectrometer device, a method of determining at least one spectroscopic information of at least one object and several uses.
  • a spectrometer device can, in general, be used for investigating or monitoring purposes, in particular, in the infrared (IR) spectral region, especially in the near-infrared (NIR) spectral region, and in the visible (VIS) spectral region.
  • IR infrared
  • NIR near-infrared
  • VIS visible
  • spectrometers are known to collect information on the spectral light composition from an object, when irradiating, reflecting and/or absorbing light. In order to allow comparing spectra from multiple spectrometers, the spectrometers have to be calibrated.
  • spectrometers require a wavelength or wavenumber calibration, e.g. a calibration of the x-axis of a recorded spectrum, and a calibration of the signal, reflectance, transmittance and/or absorbance, i.e. a calibration of the y-axis of the recorded spectrum.
  • the present invention in particular, relates to the calibration of the y-axis of a reflective measurement, e.g. for diffusive reflective NIR spectroscopy.
  • Calibrations of the y-axis of the recorded spectrum for reflective measurements may use external reflection standards which are placed at an object position.
  • the calibration may use internal calibration targets which are automatically moved into a measurement field by the spectrometer itself to calibrate the spectrometer's response.
  • the use of external calibration standards and/or moving internal calibration targets may be not feasible.
  • calibration schemes are known which avoid the need for placing external calibration standards at the object position and/or moving internal calibration targets. These calibration schemes may use different optical paths for sample and reference measurements. Specifically, optimal calibration is achieved, when using an ideal reference (i.e.
  • WO 2023/161403 describes an in-use calibration method for a spectrometer device.
  • the method comprises: a) providing the at least one spectrometer device comprising at least one optical measurement element and at least one optical calibration element having different optical properties; b) providing at least one sample; c) performing at least two measurements using the spectrometer device, specifically at least two consecutive measurements, wherein one of the measurements is performed with the sample and one of the measurements is performed without the sample, i. wherein performing the measurement with the sample comprises illuminating a detector of the spectrometer device via an optical measurement path by using the optical measurement element, the optical measurement path comprising at least one reflection at the at least one sample, and II.
  • performing the measurement without the sample comprises illuminating the detector via an optical calibration path independent from the optical measurement path by using the optical calibration element, the optical calibration path comprising at least one interaction with the optical calibration element without an interaction with the sample and wherein the optical calibration path is arranged within the spectrometer device, specifically within a housing of the spectrometer device; d) generating by the at least one detector at least one first detector signal Sd1 according to the measurement without the sample and at least one second detector signal Sd2 according to the measurement with the sample; e) deriving at least one calibrated optical property of the at least one sample (120) from the first detector signal Sd1 and the second detector signal Sd2.
  • a spectrometer device configured for performing an in-use calibration method and various uses thereof are disclosed.
  • a spectrometer device which at least partially address above- mentioned technical challenges of known devices.
  • a spectrometer device shall be provided which allow an optimized calibration for miniaturized NIR spectroscopy, in particular in terms of a simplified optical path design and avoiding necessity of a dedicated reference target.
  • a spectrometer device a method of calibrating a spectrometer device, a method of determining at least one spectroscopic information of at least one object and several uses with the features of the independent claims.
  • Advantageous embodiments which might be realized in an isolated fashion or in any arbitrary combinations are listed in the dependent claims as well as throughout the specification.
  • a spectrometer device for obtaining spectroscopic information on at least one object is disclosed.
  • the spectrometer device comprising at least one detector for detecting light; at least one light source configured for emitting light in at least one optical spectral range; at least one sample interface configured for allowing the emitted light of the light source to leave the spectrometer device through the sample interface and configured for allowing detection light to enter the spectrometer device through the sample interface, wherein the sample interface comprises at least one optical element configured for providing at least one internal calibration target; at least one optical path, wherein the optical path is configured for allowing the emitted light of the light source to propagate to the sample interface and for allowing detection light to propagate to the detector, wherein the optical path is further configured for allowing the emitted light of the light source to propagate to the internal calibration target and for allowing reference emission to be directed by the internal calibration target to the detector.
  • the spectrometer device is configured for separating the reference emission and the detection light from each other by polarization multiplexing.
  • the spectrometer device is configured for
  • the light source may comprise at least one polarized emitter configured for emitting polarized light and/or wherein the optical element comprises at least one reflective polarization filter.
  • the selection and/or separation of emitted light may be performed by means of polarization to transmit one part of light over the sample interface to the detector and another part to a detector without passing the sample interface.
  • a detector signal relating to detected detection light is compared with a reference signal relating to the reference emission.
  • the present invention can allow avoiding the need to place a reference target to obtain the reference signal, by using an internal calibration target.
  • the present invention proposes that the optical paths of object and reference light are identical such that the relation between detection light and reference can be reproducible under all operating conditions. This can be achieved when at the sample interface, the generated light is radiated to the object, where it interacts with the object, and travels (at least in part) to the detector, while the reference emission directly travels to the detector.
  • spectrometer device as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an optical device configured for acquiring at least one item of spectral information on at least one object.
  • the at least one item of spectral information may refer to at least one optical property or optically measurable property which is determined as a function of a wavelength, for one or more different wavelengths. More specifically, the optical property or optically measurable property, as well as the at least one item of spectral information, may relate to at least one property characterizing at least one of a transmission, an absorption, a reflection and an emission of the at least one object, either by itself or after illumination with external light. The at least one optical property may be determined for one or more wavelengths.
  • the spectrometer device specifically may form an apparatus which is capable of recording a signal intensity with respect to the corresponding wavelength of a spectrum or a partition thereof, such as a wavelength interval, wherein the signal intensity may, specifically, be provided as an electrical signal which may be used for further evaluation.
  • the spectrometer device may be or may comprise a device which allows for a measurement of at least one spectrum, e.g. for the measurement of a spectral flux, specifically as a function of a wavelength or detection wavelength.
  • the spectrum may be acquired, as an example, in absolute units or in relative units, e.g. in relation to at least one reference measurement.
  • the acquisition of the at least one spectrum specifically may be performed either for a measurement of the spectral flux (unit W/nm) or for a measurement of a spectrum relative to at least one reference material (unit 1), which may describe the property of a material, e.g., reflectance over wavelength.
  • the reference measurement may be based on a reference light source, an optical reference path, a calculated reference signal, e.g. a calculated reference signal from literature, and/or on a reference device.
  • the spectrometer device may be a diffusive reflective spectrometer device configured for acquiring spectral information from the light which is diffusively reflected by the at least one object, e.g. at least one object.
  • the at least one spectrometer device may be or may comprise an absorption- and/or transmission spectrometer.
  • measuring a spectrum with the spectrometer device may comprise measuring reflectance in a reflective configuration.
  • the spectrometer device may be configured for measuring reflectance in a reflective configuration.
  • other types of spectrometer devices are also feasible.
  • the spectrometer device may be a portable spectrometer device.
  • portable as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to the property of at least one object of being moved by human force, such as by a single user.
  • the object characterized by the term “portable” may have a weight not exceeding 10 kg, specifically not exceeding 5 kg, more specifically not exceeding 1 kg or even not exceeding 500 g.
  • the dimensions of the object characterized by the term “portable” may be such that the object extends by no more than 0.3 m into any dimension, specifically by no more than 0.2 m into any dimension.
  • the object specifically, may have a volume of no more than 0.03 m 3 , specifically of no more than 0.01 m 3 , more specifically no more than 0.001 m 3 or even no more than 500 mm 3 .
  • the portable spectrometer device may have dimensions of e.g. 10 mm by 10 mm by 5 mm.
  • the portable spectrometer device may be part of a mobile device or may be attachable to a mobile device, such as a notebook computer, a tablet, a cell phone, such as a smart phone, a smartwatch and/or a wearable computer, also referred to as “wearable”, e.g. a body borne computer such as a wrist band or a watch.
  • a weight of the spectrometer device specifically the portable spectrometer device, may be in the range from 1 g to 100 g, more specifically in the range from 1 g to 10 g.
  • the spectrometer device comprises at least one light source.
  • the spectrometer device further comprises at least one detector configured for detecting electromagnetic radiation, in particular light, such as light which is at least one of transmitted, reflected or emitted from the at least one object.
  • the spectrometer device further may comprise, as will be outlined in further detail below, at least one wavelength-selective element, such as at least one of a grating, a prism and a filter, e.g. a length variable filter having varying transmission properties over its lateral extension.
  • the wavelength-selective element may be used for separating incident light into a spectrum of constituent wavelength signals whose respective intensities are determined by employing a detector such as a detector having a detector array as described below in more detail.
  • the spectrometer device may specifically be a portable spectrometer device.
  • the portable spectrometer device may be part of a mobile device or may be attachable to a mobile device, such as a notebook computer, a tablet, a cell phone, such as a smart phone, a smartwatch and/or a wearable computer or the like.
  • spectroscopic information also referred to as “spectral information” or as “an item of spectral information”, as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an item of information, e.g. on at least one object and/or radiation emitted by at least one object, characterizing at least one optical property of the object, more specifically at least one item of information characterizing, e.g. qualifying and/or quantifying, at least one of a transmission, an absorption, a reflection and an emission of the at least one object.
  • the at least one item of spectral information may comprise at least one intensity information, e.g. information on an intensity of light being at least one of transmitted, absorbed, reflected or emitted by the object, e.g. as a function of a wavelength or wavelength sub-range over one or more wavelengths, e.g. over a range of wavelengths.
  • the intensity information may correspond to or be derived from the signal intensity, specifically the electrical signal, recorded by the spectrometer device with respect to a wavelength or a range of wavelengths of the spectrum.
  • the spectrometer device specifically may be configured for obtaining at least one spectrum or at least a part of a spectrum of detection light, also denoted as detection light herein, propagating from the object to the spectrometer device.
  • the spectrum may describe the radiometric unit of spectral flux, e.g. given in units of watt per nanometer (W I nm), or other units, e.g. as a function of the wavelength of the detection light.
  • W I nm watt per nanometer
  • the spectrum may describe the optical power of light, e.g. in the NIR spectral range, in a specific wavelength band.
  • the spectrum may contain one or more optical variables as a function of the wavelength, e.g. the power spectral density, electric signals derived by optical measurements and the like.
  • the spectrum may indicate, as an example, the power spectral density and/or the spectral flux of the object, e.g. of a object, e.g. relative to a reference object, such as a transmittance and/or a reflectance of the object, specifically of the object.
  • the spectrometer device may be configured for obtaining the spectrum in wavelength range at least partially comprising one or more of an infrared, a visible and an ultraviolet spectral range.
  • the spectrometer device may be a near-infrared spectrometer.
  • the spectrometer device may be configured for obtaining the spectrum in a wavelength range at least partially comprising the near-infrared spectral range, such as in a wavelength range from 760 nm to 5 pm, specifically in a wavelength range from 1 pm to 3 pm.
  • the spectrum may comprise at least one measurable optical variable or property of the detection light and/or of the object, specifically as a function of illumination light and/or detection light.
  • the at least one measurable optical variable or property may comprise at least one at least one radiometric quantity, such as at least one of a spectral density, a power spectral density, a spectral flux, a radiant flux, a radiant intensity, a spectral radiant intensity, an irradiance, a spectral irradiance.
  • the spectrometer device may measure the irradiance in Watt per square meter (W/m 2 ), more specifically the spectral irradiance in Watt per square meter per nanometer (W/m 2 /nm). Based on the measured quantity the spectral flux in Watt per nanometer (W/nm) and/or the radiant flux in Watt (W) may be determined, e.g. calculated, by taking into account an area of the detector.
  • the term “object” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary body, chosen from a living object and a non-living object.
  • the at least one object may comprise one or more articles and/or one or more parts of an article, wherein the at least one article or the at least one part thereof may comprise at least one component which may provide a spectrum suitable for investigations.
  • the object may be or may comprise one or more living beings and/or one or more parts thereof, such as one or more body parts of a human being, e.g. a user, and/or an animal.
  • the object specifically may comprise at least one sample which may fully or partially be analyzed by spectroscopic methods.
  • the object may be or may comprise at least one of: human or animal skin; edibles, such as fruits; plastics and textile.
  • the spectrometer device comprises at least one detector for detecting light, in particular detection light, from the object.
  • the term “to detect” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to the process of at least one of determining, measuring and monitoring at least one parameter, qualitatively and/or quantitatively, such as at least one of a physical parameter, a chemical parameter and a biological parameter.
  • the physical parameter may be or may comprise an electrical parameter.
  • detector as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary device configured for detecting, i.e. for at least one of determining, measuring and monitoring, at least one parameter, qualitatively and/or quantitatively, such as at least one of a physical parameter, a chemical parameter and a biological parameter.
  • the detector may be configured for generating at least one detector signal, more specifically at least one electrical detector signal, such as an analogue and/or a digital detector signal, the detector signal providing information on the at least one parameter measured by the detector.
  • the detector signal may directly or indirectly be provided by the detector to at least one evaluation unit, such that the detector and the evaluation unit may be directly or indirectly connected.
  • the detector signal may be used as a “raw” detector signal and/or may be processed or preprocessed before further used, e.g. by filtering and the like.
  • the detector may comprise at least one processing device and/or at least one preprocessing device, such as at least one of an amplifier, an ana- logue/digital converter and an electrical filter.
  • detection light is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to light emitted light of the light source impinging on the detector after having passed through the sample interface.
  • the detection light may be object light, being remittet such as scattered and/or reflected by an object placed onto the sample interface, or the detection light may be open port light, i.e. having passed through the sample interface without an object placed onto the sample interface.
  • the detector is configured for detecting light propagating from the object to the spectrometer device or more specifically to the detector of the spectrometer device.
  • the detector may be or may comprise at least one optical detector.
  • the optical detector may be configured for determining at least one optical parameter, such as an intensity and/or a power of light by which at least one sensitive area of the detector is irradiated.
  • the optical detector may comprise at least one photosensitive element and/or at least one optical sensor, such as at least one of a photodiode, a photocell, a photosensitive resistor, a phototransistor, a thermophile sensor, a photoacoustic sensor, a pyroelectric sensor, a photomultiplier and a bolometer.
  • the detector thus, may be configured for generating at least one detector signal, more specifically at least one electrical detector signal, in the above-mentioned sense, providing information on at least one optical parameter, such as the power and/or intensity of light by which the detector or a sensitive area of the detector is illuminated.
  • the detector may comprise one or multiple broadband or one or more multiple narrowband detectors.
  • the broadband detector may be configured for detecting light over a wide wavelength range, e.g. in one or more of the infrared, the visible and the ultraviolet spectral range.
  • the narrowband detector may be configured for detecting light only within a narrow selected wavelength range, such as a wavelength range having a width in the range of 0.1 to 500 nm, specifically in the range of 1 to 200 nm, more specifically a wavelength range having a width of 1 to 5 nm or having a width of 20 to 200 nm.
  • the detector may comprise one single optically sensitive element or area or a plurality of optically sensitive elements or areas.
  • the detector may be or may comprise at least one detector array, more specifically an array of photosensitive elements.
  • Each of the photosensitive elements may comprise at least a photosensitive area which may be adapted for generating an electrical signal depending on the intensity of the incident light, wherein the electrical signal may, in particular, be provided to the evaluation unit, as will be outlined in further detail below.
  • the photosensitive area as comprised by each of the optically sensitive elements may, especially, be a single, uniform photosensitive area which is configured for receiving the incident light which impinges on the individual optically sensitive elements.
  • other arrangements of the optically sensitive elements may also be conceivable.
  • the array of optically sensitive elements may be designed to generate detector signals, preferably electronic signals, associated with the intensity of the incident light which impinges on the individual optically sensitive elements.
  • the detector signal may be an analogue and/or a digital signal.
  • the electronic signals for adjacent pixelated sensors can, accordingly, be generated simultaneously or else in a temporally successive manner.
  • the individual optically sensitive elements may, preferably, be active pixel sensors which may be adapted to amplify the electronic signals prior to providing it to the evaluation unit.
  • the detector may comprise one or more signal processing devices, such as one or more filters and/or analogue-digital-converters for processing and/or preprocessing the electronic signals.
  • the detector comprises an array of optically sensitive elements
  • the detector may be selected from any known pixel sensor, in particular, from a pixelated organic camera element, preferably, a pixelated organic camera chip, or from a pixelated inorganic camera element, preferably, a pixelated inorganic camera chip, more preferably from a CCD chip or a CMOS chip, which are, commonly, used in various cameras nowadays.
  • the detector generally may be or comprise a photoconductor, in particular an inorganic photoconductor, especially PbS, PbSe, Ge, InGaAs, ext. InGaAs, InSb, or HgCdTe.
  • a camera chip having a matrix of 1 x N pixels or of M x N pixels may be used here, wherein, as an example, M may be ⁇ 10 and N may be in the range from 1 to 50, preferably from 2 to 20, more preferred from 5 to 10.
  • a monochrome camera element preferably a monochrome camera chip, may be used, wherein the monochrome camera element may be differently selected for each optically sensitive element, especially, in accordance with the varying wavelength along the series of the optical sensors.
  • the array may be adapted to provide a plurality of the electrical signals which may be generated by the photosensitive areas of the optically sensitive elements comprised by the array. The electrical signals as provided by the array of the spectrometer device may be forwarded to the evaluation unit.
  • the spectrometer device may comprise the at least one evaluation unit for evaluating at least one detector signal generated by the detector and for deriving the spectroscopic information on the object from the detector signal.
  • the term “to evaluate”, as used herein, is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to the process of processing at least one first item of information in order to generate at least one second item of information thereby. Consequently, the term “evaluation unit”, as used herein, is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary device or a combination of devices configured to evaluate or process at least one first item of information, in order to generate at least one second item of information thereof.
  • the evaluation unit may be configured for processing at least one input signal and to generate at least one output signal thereof.
  • the at least one input signal may comprise at least one detector signal provided directly or indirectly by the at least one detector.
  • the evaluation unit may be or may comprise one or more integrated circuits, such as one or more application-specific integrated circuits (ASICs), and/or one or more data processing devices, such as one or more of computers, digital signal processors (DSP), field programmable gate arrays (FPGA) preferably one or more microcomputers and/or microcontrollers. Additional components may be comprised, such as one or more preprocessing devices and/or data acquisition devices, such as one or more devices for receiving and/or preprocessing of the detector signals, such as one or more AD-converters and/or one or more filters. Further, the evaluation unit may comprise one or more data storage devices. Further, the evaluation unit may comprise one or more interfaces, such as one or more wireless interfaces and/or one or more wire-bound interfaces.
  • ASICs application-specific integrated circuits
  • DSP digital signal processors
  • FPGA field programmable gate arrays
  • Additional components may be comprised, such as one or more preprocessing devices and/or data acquisition devices, such as one or more devices for receiving
  • the evaluation unit may be adapted to execute at least one computer program, such as at least one computer program performing or supporting the step of generating the items of information.
  • at least one computer program such as at least one computer program performing or supporting the step of generating the items of information.
  • one or more algorithms may be implemented which, by using the at least one detector signal may perform a predetermined transformation for deriving the spectroscopic information on the object, such as for deriving a corrected spectrum and/or for deriving at least one spectroscopic information describing at least one property of the object.
  • the evaluation unit may, particularly, comprise at least one data processing device, also referred to as a processor, in particular an electronic data processing device, which can be designed to generate the desired information by evaluating the detector signal.
  • the evaluation unit may use an arbitrary process for generating the required information, such as by calculation and/or using at least one stored and/or known relationship.
  • the evaluation unit specifically may be configured for performing at least one digital signal processing (DSP) technique on the primary detector signal or any secondary detector signal derived thereof, in particular at least one Fourier transformation. Additionally or alternatively, the evaluation unit may be configured for performing one or more further digital signal processing techniques on the primary detector signal or any secondary detector signal derived thereof, e.g. windowing, filtering, Goertzel algorithm, crosscorrelation and autocorrelation.
  • DSP digital signal processing
  • the evaluation unit may be configured for performing one or more further digital signal processing techniques on the primary detector signal or any secondary detector signal derived thereof, e.g. windowing, filtering, Goertzel algorithm, crosscorrelation and autocorrelation.
  • the detector signal one or a plurality of further parameters and/or items of information can influence said relationship.
  • the relationship can be determined or determinable empirically, analytically or else semi-em
  • the relationship may comprise at least one of a model or calibration curve, at least one set of calibration curves, at least one function or a combination of the possibilities mentioned.
  • One or a plurality of calibration curves can be stored for example in the form of a set of values and the associated function values thereof, for example in a data storage device and/or a table.
  • the at least one calibration curve can also be stored for example in parameterized form and/or as a functional equation.
  • the spectrometer device further may comprise at least one wavelength-selective element configured for transferring incident light within at least one selected wavelength range onto the detector.
  • wavelength-selective element as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary optical element configured for interacting with differing spectral portions of incident light in a different manner, e.g.
  • the wavelength-selective element may be configured for selectively transmitting light having different wavelengths.
  • the optical path may be configured for allowing the emitted light of the light source to propagate to the object placed onto the sample interface and for allowing detection light to propagate via the wavelength-selective element to the detector.
  • the optical path may further be configured for allowing the emitted light of the light source to propagate to the internal calibration target and for allowing reference emission, directed by the internal calibration target, via the wavelength-selective element to the detector.
  • the at least one wavelength-selective element may comprise at least one element selected from the group consisting of: at least one of an optical filter; a grating, a prism; a plas- monic filter; a diffractive optical element; a metamaterial an interferometric filter; an absorption filter; a dichroic filter; an MEMS-lnterferometer; a MEMS Fabry-Perot interferometer; an array of individual bandpass filters; an array of patterned filters. Further elements are feasible.
  • the wavelength-selective element may comprise one or more of a dispersive (e.g. prism), or diffractive (grating) element, or a detector with an inherently limited bandwidth of its spectral response.
  • the spectrometer device may comprise at least one filter element disposed in a beam path of the light from the object, i.e. in the beam path of the detection light, wherein the filter element, specifically may be configured such that each of the photosensitive elements is exposed to an individual spectral range of the light from the object.
  • variable filter element may be used, the transmission of which depends on a position on the filter element, such that, when the variable filter element is placed on top of the array of photosensitive elements, the individual photosensitive elements are exposed to differing spectral ranges of the incident light, specifically the detection light from the object.
  • the wavelength-selective element may be configured for transmitting light having a wavelength within the at least one selected wavelength range, wherein the transmitting of light having a wavelength outside the selected wavelength range may be at least partially prevented, such as by having a diminished transmissivity outside the selected wavelength range compared to the transmissivity in the selected wavelength range.
  • selected wavelength range is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning and specifically may refer, without limitation, to at least one wavelength range of the wavelength-selective element allowing transmitting of light.
  • light having a wavelength with the selected wavelength range may be able to pass through the wavelength-selective element , wherein light having a wavelength outside the selected wavelength range may be at least partially blocked, such as by having a reduced light intensity after the wavelength-selective element.
  • the wavelength-selective element may comprise at least one narrow band pass filter, more specifically a set of narrow band pass filter.
  • the narrow band pass filter may be configured for transmitting light only within a narrow selected wavelength range, such as a wavelength range having a width in the range of 0.1 to 500 nm, specifically in the range of 1 to 200 nm, more specifically a wavelength range having a width of 1 to 5 nm or having a width of 20 to 200 nm.
  • each of the narrow band pass filter may have a narrow selected wavelength range at least partially differing from each other.
  • the wavelength selection by the wavelength-selective element may take place in the beam path of the illumination light, thereby selecting and/or modifying a wavelength of the illumination of the object, and/or in the detection beam path of the detection light, thereby selecting and/or modifying a wavelength of detection, e.g. for the detector in general and/or for each of the photosensitive elements.
  • the wavelength-selective element specifically may be selected from the group of a tunable wavelength-selective element and a wavelength-selective element having a fixed transmission spectrum.
  • a tunable wavelength selective element as an example, differing wavelength ranges may be selected sequentially, whereas, by using a wavelength-selective element having a fixed transmission spectrum, the selection of the wavelength ranges may be fixed and may, however, be dependent e.g. on a detection position, thereby allowing, as an example, in the detection light beam path, for simultaneously exposing different detectors and/or different photosensitive elements of the detector to differing spectral ranges of light.
  • the spectrometer device further comprises at least one light source configured for emitting light, also denoted as illumination light herein, in at least one optical spectral range.
  • spectroscopy various sources and paths of light are to be distinguished.
  • a nomenclature is used which, firstly, denotes light propagating from the light source to the object as “illumination light”.
  • light propagating from the object to the detector is denoted as “detection light”.
  • the detection light may be generated by the objected.
  • the term “generated by the object” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically specifically may refer, without limitation, to remission of light impinging on the object.
  • the detection light may comprise at least one of illumination light reflected by the object, illumination light scattered by the object, illumination light transmitted by the object, luminescence light generated by the object, e.g. phosphorescence or fluorescence light generated by the object after optical, electrical or acoustic excitation of the object by the illumination light or the like.
  • the detection light may directly or indirectly be generated through the illumination of the object by the illumination light.
  • the term “light” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to electromagnetic radiation in one or more of the infrared, the visible and the ultraviolet spectral range.
  • the term “ultraviolet spectral range” generally, refers to electromagnetic radiation having a wavelength of 1 nm to 380 nm, preferably of 100 nm to 380 nm.
  • the term “infrared spectral range” (I R) generally refers to electromagnetic radiation of 760 nm to 1000 pm, wherein the range of 760 nm to 1 .5 pm is usually denominated as “near infrared spectral range” (NIR) while the range from 1 .5 p to 15 pm is denoted as “mid infrared spectral range” (MidlR) and the range from 15 pm to 1000
  • NIR near infrared spectral range
  • light used for the typical purposes of the present invention is light in the infrared (IR) spectral range, more preferred, in the near infrared (NIR) and/or the mid infrared spectral range (MidlR), especially the light having a wavelength of 1 pm to 5 pm, preferably of 1 pm to 3 pm.
  • IR infrared
  • NIR near infrared
  • MidlR mid infrared spectral range
  • spectroscopy in other spectral ranges is also feasible and within the scope of the present invention.
  • the illumination light has the optical spectral range at least partially located in the near-infrared spectral range.
  • the optical spectral range of the illumination light may comprise a wavelength range from 760 nm to 5 pm, specifically a wavelength range from 1 pm to 3 pm.
  • the term “optical spectral range” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically specifically may refer, without limitation, to a wavelength range comprising one or more of the infrared, the visible and the ultraviolet spectral range as defined above.
  • the term “light source” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary device configured for generating or providing light in the sense of the above-mentioned definition.
  • the light source specifically may be or may comprise at least one electrical light source, such as an electrically driven light source.
  • the light source may comprise one or multiple broadband or one or multiple narrowband light sources.
  • the term “broadband light source” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a device emitting light in a wide spectral range.
  • the broadband light source may be configured for emitting light over a wide wavelength range, e.g. in one or more of the infrared, the visible and the ultraviolet spectral range.
  • the broadband light source may be configured for emitting light having a spectral width of at least 20 nm, e.g.
  • spectral width 20 nm to 5000 nm, specifically having a width in the range of 200 to 3000 nm, more specifically having a width in the range of 500 to 2000 nm.
  • narrowband light source as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a device configured for emitting light only within a narrow selected wavelength range, such as a wavelength range having a width in the range of 0.1 to 500 nm, specifically in the range of 1 to 200 nm, more specifically a wavelength range having a width of 1 to 5 nm or having a width of 20 to 200 nm.
  • the narrowband light source may be a monochromatic light source.
  • the light source may comprise of multiple individual emitting ele- ments, which may have different polarization directions, e.g. which may be turned on/off individually.
  • Such a “multi-pixel” light source may have emitters with identical wavelengths but different polarizations.
  • the spectrometer device may comprise one or multiple narrowband or broadband detectors and/or emitters.
  • the spectrometer device may comprise multiple narrowband emitters in combination with simplified or broadband detectors or emitters.
  • bandpass filters that reduce the overall optical signal
  • a smaller number of detectors or even a single broadband detector can be used.
  • the drawback of this configuration is, that using multiple emitters may complicate the optical path design. This can be alleviated by using dual polarization emitters, because by using dual polarization emitters it is ensured that all optical reference paths correspond directly to the measurement paths.
  • the light source may comprise a single emitter or a plurality of emitters.
  • the term “emitter” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to at least one arbitrary device configured for providing light beam for illumination of the object.
  • the light source comprises at least one emitter selected from the group consisting of: at least one light emitting diode (LED), at least one Laser, at least one vertical-cavity surface-emitting laser (VCSEL), at least one edge emitting laser diode, at least one external cavity laser, e.g. at least one dual polarization external cavity laser, and the like.
  • the light source may comprise at least one polarized emitter configured for emitting polarized light.
  • polarized emitter as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an emitter configured for emitting s- or p-polarized light.
  • the polarized emitter may itself be polarized or may comprise at least one polarization filter.
  • polarization filter also denoted as polarizer, as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an optical filter element configured for allowing pass through of light having a specific polarization and blocking light of other polarizations.
  • the polarization filter may be configured for generating polarized light from light of undefined or mixed polarization.
  • the polarization filter may comprise at least one linear polarizer and/or at least one circular polarizer.
  • the polarization filter may be configured for separating vertically polarized (s-polarized) from horizontally polarized (p-polar- ized) light.
  • a multi-element light source with individual emission elements may be used with different polarizations which may be turned on and off individually.
  • the polarized emitter itself being polarized, the emitter may itself be configured to emit polarized light.
  • this can be achieved by integrating a grating into the device, for example on its surface. The orientation and overall configuration of the grating then causes the laser to emit polarized light at the wavelength range of interest.
  • the polarized emitter may contain multiple integrated lasers with equal and/or different surface gratings, emitting polarized light of different polarization states.
  • the polarized emitter may be configured for switching between at least two polarization states.
  • the polarized emitter may be configured for emitting light having a first polarization for an object measurement (e.g. illumination of the object by the light emitted by the light source and detection of the detection light) and for emitting light having a second polarization, different from the first polarization, for a calibration measurement (e.g. illumination of the internal calibration target by the light emitted by the light source and detection of the reference emission).
  • the polarization of the polarized emitter may be switchable between the at least two polarization states by using at least one driving unit.
  • switchable as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to changing from a first polarization state to a second polarization state, different from the first polarization state, and/or vice versa.
  • the polarization states may refer to emission of s- or p-polarized light.
  • Switching may refer to changing the polarization state of the emitted light by switching off polarized emitters of one polarization state and switching on polarized emitters of another one polarization state.
  • driving unit is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an arbitrary device or a combination of devices configured for providing one or both of at least one control parameter and/or electrical power to another device, such as, in the present case, to the at least one light source.
  • the driving unit may comprise at least one current source for providing at least one current to the polarized emitter for driving the polarized emitter.
  • the current source specifically may be configured for adjusting or controlling a voltage applied to the polarized emitter in order to generate the predetermined current.
  • the driving unit may be configured for driving the polarized emitter by using at least one driving scheme, e.g. specifying frequency, current/voltage value and the like.
  • the driving unit may comprise one or more electrical components, such as integrated circuits, for driving the polarized emitter.
  • the driving unit may fully or partially be integrated into the light source or may be separated from the light source.
  • the light source comprises at least one dual polarization emitter.
  • the light source may comprise multiple dual polarization emitters.
  • the term “dual polarization emitter” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an emitter configured for emitting s- and p-polarized light.
  • the dual polarization emitter may be configured for controlling and modulating both polarizations independently.
  • the dual polarization emitter may comprise a single package array of polarized VCSELs.
  • the VCSELs may be designed to be driven independently.
  • the dual polarization emitter may comprise at least one VCSEL array with linear s- and p- polarized light and at least one optics, e.g. a dual polarization emitter as available from T rumpl® Photonics.
  • the dual polarization emitter may be driven by using at least one driving scheme.
  • the dual polarization emitter may be driven by using so called on-Off-Keying (OOK) modulation of both polarizations, each with a different frequency, e.g. square wave signals with different frequencies.
  • OOK on-Off-Keying
  • the polarized emitter may comprise multiple polarized emitters.
  • the multiple polarized emitters can overall generate polarized light of at least two different polarization states.
  • the polarization of the emitted light can be switched by turning the polarized emitters of one polarization state on and of the other polarization states off. This turning on and off may be done by e.g. applying the driving current to the polarized emitter of the desired polarization and reducing the current below the laser threshold for the polarized emitter to be turned off.
  • the switching between polarization states may be performed by using at least one switchable polarization filter, also denoted as tunable polarization filter.
  • the switchable polarization filter may be configured for being switched on and off, thereby switching of the polarization state of the emitted light.
  • Switchable polarization filters can e.g. be realized based on liquid-crystal technology.
  • the tunable polarization filter may allow separating between object and reference light.
  • the spectrometer device may comprise a fixed filter and switchable polarization from the light source or dual polarization light source.
  • the spectrometer device comprises at least one sample interface configured for allowing the emitted light of the light source to leave the spectrometer device through the sample interface, in particular to illuminate an object placed onto the sample interface, and configured for allowing detection light, e.g. from the object, to enter the spectrometer device through the sample interface.
  • the light having entered the spectrometer device may propagate, in particular via the wavelength-selective element, to the detector.
  • sample interface as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a port of the spectrometer device through which light in the optical spectral range, such as in at least one partition of the optical spectral range or in the full optical spectral range, may enter the spectrometer device, specifically for the purpose of the spectral sensing, and/or may leave the spectrometer device, e.g. for the purpose of illuminating the at least one object.
  • the sample interface may define an optical plane, e.g. a plane either material or imaginary, of the spectrometer device, through which the illumination light may travel to reach the object and/or through which the detection light from the object may travel to reach the detector, e.g. to generate a detector signal.
  • the sample interface may be a fictional plane.
  • the sample interface may or may not be constituted by a physical element and/or barrier, such as a transparent element, e.g. a glass or quartz window.
  • the sample interface may also be the sample surface itself or a plane where the sample can be placed or aligned.
  • the sample interface may be arranged in an optical path of the spectrometer device to allow the light emitted from the light source to illuminate the object placed in front of the spectrometer device, specifically in front of the sample interface.
  • the sample interface may be configured such that the light emitted from the light source can pass the sample interface.
  • pass the sample interface is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to one or more of propagating to the sample interface and from the sample interface, traversing the sample interface, and interacting with the sample interface.
  • the emitted light may impinge on the sample interface, e.g. under an angle of incidence.
  • the emitted light may interact with the sample interface and may leave the sample interface, e.g. under an exit angle.
  • a point or region of impingement on the sample interface may be at the same side of the sample interface or on an opposing side as the point or region of exit from the sample interface.
  • the sample interface comprises the at least one optical element.
  • optical element as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to at least one element configured for having at least one impact on incident light, in particular depending on polarization of the incident light.
  • the optical element may interact with the incident light depending on its polarization.
  • the optical element may be configured for allowing separating the reference emission and detection light.
  • the optical element may be at least one cover window.
  • cover as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an element configured for at least partially enclosing at least one other element.
  • window as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an optically transparent optical element having a defined index of refraction and thickness.
  • the window may provide an interface to an exterior of the spectrometer device, e.g.
  • cover window as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to an element or system configured for providing at least one covering function and providing at least one window.
  • the optical element, in particular the cover window is configured for providing at least one internal calibration target.
  • calibration target is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a reference object having a known, such as a predetermined and/or a predefined, interaction with light.
  • the calibration target can be used to calibrate the spectrometer device.
  • internal calibration target as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to at least one calibration target integrated in the spectrometer device, in particular in the optical path of the spectrometer device.
  • the internal calibration target may be configured for interacting with the illumination light in the optical path in a predetermined or pre-defined manner.
  • the internal calibration target may be configured for generating in response to illumination by light emitted by the light source reference emission.
  • reference emission is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a light which can be used as reference for calibrating the spectrometer device.
  • the detector may be configured for generating a reference signal in response to illumination by the reference emission.
  • the internal calibration target may be located within the spectrometer device.
  • the internal calibration target may be disposed on the optical element and/or may be a part of the optical element and/or may be the optical element.
  • optical path is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a trajectory of light in the spectrometer device.
  • the optical path of light in the spectrometer device may be affected by reflection, refraction, dispersion and/or absorption at one or more optical elements, such as lenses, prisms, mirrors, gratings or the like, comprised by the spectrometer device.
  • the optical path may be configured for allowing the emitted light of the light source to propagate to the object placed onto the sample interface and for allowing detection light generated by the object from interaction with the emitted light, e.g. reflected and/or scattered by the object, to propagate, in particular via the wavelength-selective element, to the detector.
  • the optical path is further configured for allowing the emitted light of the light source to propagate to the internal calibration target and for allowing reference emission directed by the internal calibration target, in particular via the wavelength-selective element, to the detector.
  • the term “generated by the internal calibration target” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning. The term specifically may refer, without limitation, to remission of light impinging on the internal calibration target.
  • the reference light may comprise at least one of illumination light reflected by the internal calibration target, illumination light scattered by the internal calibration target, illumination light transmitted by the internal calibration target, luminescence light generated by the internal calibration target, e.g. phosphorescence or fluorescence light generated by the internal calibration target after optical, electrical or acoustic excitation of the internal calibration target by the illumination light or the like.
  • the optical path for detection of the detection light and the optical path for detecting the reference emission may be identical. Only one optical path to the sample plane for both reference and object measurement may be used and required. This can allow that reference and object emission have the same angle of incidence.
  • the optical path design can be simplified and no dedicated reference target is required.
  • the optical element in particular the cover window, may comprise at least one reflective polarization filter.
  • the calibration measurement and the object measurement may be performed with at least one polarized emitter.
  • the reflective polarization filter may be configured for reflecting the polarized reference emission to the detector, while being transparent for the polarized detection light, which is reflected/scattered by the object under test. Using of a polarization filter can further effectively prevent external emission.
  • the detection light is s-polarized and reference emission is p-polarized.
  • the reflective polarization filter may be configured for reflecting polarized reference emission to the detector, while being transparent for the detection light.
  • the reflective polarization filter is a linear polarization filter.
  • polarization of the reflective polarization filter has a fixed polarization or is switchable between at least two polarization states by using at least one driving unit.
  • the driving unit may be identical to the driving unit described above, or may be a further driving unit.
  • the reflective polarization filter is positioned directly on the optical element, in particular on the cover window.
  • the term “positioned directly” as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to application without any further element between the optical element, in particular the cover window, and the reflective polarization filter.
  • the reflective polarization filter may comprise one or more of at least coating, at least one liquid crystal material, at least one metamaterial.
  • the reflective polarization filter is a coating on the cover window.
  • the reflective polarization filter may be a thin coating.
  • the reflective polarization filter may be a film polarizer, in particular a thin film polarizer.
  • the thin film polarizer may comprise dielectric multilayers.
  • a thin film polarizer available from Optoman® may be used, e.g. a thin film polarizer applied via ion beam sputtering.
  • a metamaterial surface available from Metalenz® may be used as reflective polarization filter.
  • the polarization extinction ratio may be at least 16 dB, preferably > 20 dB, more preferably > 25 dB.
  • the polarization extinction ratio may be > 23 dB, preferably > 30 dB, more preferably > 40 dB.
  • the polarization filter may at least cover a wavelength range from 1400 nm to 2000 nm, preferably from 1000 nm to 2500 nm, more preferably from 300 nm to 3000 nm.
  • the reflective polarization filter may have a transmittance of the transmit polarization of at least 80%, preferably of at least 90%, more preferably of at least 95%, most preferably of at least 99%.
  • the reflective polarization filter may have a transmittance of the reflected polarization of at least 90%, preferably of at least 97%, more preferably of at least 99%, most preferably of 99.9%.
  • the coating may be arranged at a bottom side of the cover window. The bottom side may be the side facing the detector. Using such a coating can allow yielding exacting optical paths for reference and object when applied to the cover window top side. In particular, a coating on the bottom side can allow preventing external damaging of the coating.
  • the optical element in particular the cover window, may comprise a stack.
  • the stack may comprise the reflective polarization filter applied as coating to the bottom side of cover window and an anti refl ection coating applied to a top surface of cover window.
  • the antireflective coating may be configured for reducing the reflectivity to near-zero, e.g. for a specific wavelength.
  • an antireflective coating available from EKSMA® Optics or Visimax® may be used.
  • the spectrometer device is configured for separating the reference emission and the detection light from each other by polarization multiplexing.
  • multiplexing as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a technique used to transmit a plurality of signals simultaneously over a single channel.
  • polarization multiplexing as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to multiple light beams transmitted over a single optical path using different polarizations.
  • Both polarizations need to be differentiated as the detector itself may be unpolarized.
  • the polarization multiplexing may be used for separating the detector signals relating to the different polarizations.
  • the separating the detector signals may be also denoted as demultiplexing.
  • the spectrometer device may be configured for separating the reference emission and the detection light from each other by time multiplexing and/or frequency multiplexing.
  • the spectrometer device may be configured for separating the reference emission and the detection light from each other by time multiplexing.
  • time multiplexing as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to a plurality of signals sharing the same channel by dividing the channel into a plurality of time slots.
  • the light source may comprise a single polarized emitter, wherein the at least one driving unit is configured for sequentially switching the polarization of the polarized emitter and/or the reflective polarization filter.
  • Time multiplexing may comprise using time for separating the detector signals relating to the polarization states of the polarized emitter and/or the reflective polarization filter. Particularly therefore, each signal may be transmitted during its own time slot, which can allow preventing interference between the signals and ensures that the signals are received correctly.
  • the driving unit may be configured for generating at least one item of switch-on information indicating at which point in time which polarization is turned on.
  • the evaluation unit may be configured for taking into consideration the item of switch-on information when deriving the spectroscopic information from the detector signals.
  • the evaluation unit may be configured for separating the detector signals, e.g. relating to the different polarizations, based on the item of switch-on information.
  • the spectrometer device is configured for separating the reference emission and the detection light from each other by frequency multiplexing.
  • frequency multiplexing as used herein is a broad term and is to be given its ordinary and customary meaning to a person of ordinary skill in the art and is not to be limited to a special or customized meaning.
  • the term specifically may refer, without limitation, to dividing an available frequency range into at least two, in particular multiple, non-overlapping frequency bands, each of which is used to carry a separate signal, in particular, the detection light and the reference emission.
  • both polarizations may be generated at the same time but with different modulation frequencies (also denoted as frequency division).
  • the polarized emitter may comprise at least one dual polarization emitter configured for controlling and modulating both polarizations independently, wherein the reflective polarization filter may have a fixed polarization.
  • the reference emission and the detection light may be measured by the detector at the same time.
  • the light source comprises at least two polarized emitters arranged with respect to the detector in a mirrored configuration, wherein the polarization of the two polarized emitters differs.
  • the driving unit may be configured for controlling and modulating both polarizations of two polarized emitters independently.
  • the reference emission and the detection light are measured by the detector at the same time. Differentiation based on frequency may be advantageous since in this case conditions are always the same, i.e. same temperature.
  • the optical path may be designed such that in the field-of-view of the detection light no the reflective polarization filter is present.
  • the spectrometer device may comprise at least one additional polarization filter configured for filtering out Fresnel reflection, in particular from the object that is of the same polarization as the polarized transmitted light.
  • the diffuse reflection that contains the spectral information is unpolarized and will still be detected, resulting in an improved contrast.
  • the spectrometer device may be configured to measure voltage and/or current of emitter during calibration measurement and object measurement.
  • This voltage and/or current information may be used to derive further information on the emitter such as temperature, optical output power etc. and thus the emitted light.
  • This information may be used to validate the calibration and ob- ject measurement, e.g. by confirming that the correct current was applied and that the temperature was sufficiently similar.
  • the obtained voltage and/or current information may be used to calculate normalized detector signals to correct for differences in operating conditions e.g. temperature or optical output power. Thereby the calibration reference can be improved, and the quality of the calculated spectroscopic information improved.
  • a method of method of calibrating a spectrometer device according to the present invention is disclosed.
  • the method comprises the following steps that may be performed in the given order. However, a different order may also be possible. In particular, one, more than one or even all of the method steps may be performed once or repeatedly. Further, the method steps may be performed successively or, alternatively, one or more of the method steps may be performed in a timely overlapping fashion or even in a parallel fashion and/or in a combined fashion. The method may further comprise additional method steps that are not listed.
  • the method comprising:
  • the terms “calibrating” and “calibration”, as used herein are broad terms and are to be given their ordinary and customary meaning to a person of ordinary skill in the art and are not to be limited to a special or customized meaning.
  • the terms specifically may refer, without limitation, to a process of correcting, adjusting and/or compensating measurement signals at the spectrometer device.
  • the calibration may comprise determining at least one item of calibration information, which may comprise at least one item of information on a result of the calibration, such as a calibration function, a calibration factor, a calibration matrix or the like, and may be used for transforming one or more measured values into one or more calibrated or “true” values.
  • the calibration may comprise determining information on a relation of a measurement signal of the spectrometer device to a known calibration standard.
  • a known calibration standard an external calibration target may be used. This information can be used for calibrating reference measurements.
  • the reference measurements, using the internal calibration target, can be performed online, in particular during the object measurement. Thus, this information can be used for correcting and/or adjusting the measurement signal of the spectrometer device, e.g. in order to reduce, minimize and/or eliminate deviations of the measurement signal from the known calibration standard.
  • the calibration using the external calibration target may be performed during setup of the spectrometer, e.g. before a measurement, and/or repeatedly in time intervals.
  • the spectrometer device to be calibrated is a spectrometer device according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below.
  • a spectrometer device according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below.
  • the item of calibration information may be determined according to
  • the method may specifically comprise repeating steps II. to IV. for a plurality of wavelengths i.
  • a method of determining at least one spectroscopic information of at least one object by using a spectrometer device is disclosed.
  • the spectrometer device to be used is a spectrometer device according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below.
  • the method comprises the following steps that may be performed in the given order. However, a different order may also be possible. In particular, one, more than one or even all of the method steps may be performed once or repeatedly. Further, the method steps may be performed successively or, alternatively, one or more of the method steps may be performed in a timely overlapping fashion or even in a parallel fashion and/or in a combined fashion. The method may further comprise additional method steps that are not listed.
  • the method comprises: i. providing the object to the sample interface, wherein the object comprises at least one measurement object;
  • the spectroscopic information of the object may specifically one or more of reflectance, transmittance, absorbance of the object.
  • the spectroscopic information of the object may be a reflectance R O bject,i> wherein
  • the method may comprise repeating steps II. to iv. for a plurality of wavelengths i.
  • a computer program comprising instructions which, when the program is executed by a computer or computer network, cause the computer or computer network to perform the method of calibrating a spectrometer device according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below, and/or the method of determining at least one spectroscopic information of at least one object according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below.
  • a computer-readable storage medium is disclosed, specifically a non-transient computer-readable storage medium, comprising instructions which, when the instructions are executed by a computer or computer network, cause the computer or computer network to perform the method of calibrating a spectrometer device according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below, and/or the method of determining at least one spectroscopic information of at least one object according to the present invention, such as according to any one of the embodiments disclosed above and/or according to any one of the embodiments disclosed in further detail below.
  • the term “computer-readable storage medium” specifically may refer to non- transitory data storage means, such as a hardware storage medium having stored thereon computer-executable instructions.
  • the storage medium specifically may be or may comprise a storage medium such as a random-access memory (RAM) and/or a read-only memory (ROM).
  • RAM random-access memory
  • ROM read-only memory
  • the spectrometer device and the methods according to the present invention in one or more of the above-mentioned embodiments and/or in one or more of the embodiments described in further detail below, provide a large number of advantages over known devices and methods of similar kind. Specifically, only one optical path to sample plane for both reference and sample measurement is necessary. Reference and object emission have same angle of incidence. The polarization filter effectively can prevent external emission. The optical path design can be simplified. No dedicated reference target may be required.
  • a use of a spectrometer device in an application selected from the group consisting of: an infrared detection application; a spectroscopy application; an exhaust gas monitoring application; a combustion process monitoring application; a pollution monitoring application; an industrial process monitoring application; a mixing or blending process monitoring; a chemical process monitoring application; a food processing process monitoring application; a food preparation process monitoring; a water quality monitoring application; an air quality monitoring application; a quality control application; a temperature control application; a motion control application; an exhaust control application; a gas sensing application; a gas analytics application; a motion sensing application; a chemical sensing application; a mobile application; a medical application; a mobile spectroscopy application; a food analysis application; an agricultural application, in particular characterization of soil, silage, feed, crop or produce, monitoring plant health; a plastics identification and/or recycling application; a healthcare and/or beauty application, in particular a determining of skin hydr
  • the terms “have”, “comprise” or “include” or any arbitrary grammatical variations thereof are used in a non-exclusive way. Thus, these terms may both refer to a situation in which, besides the feature introduced by these terms, no further features are present in the entity described in this context and to a situation in which one or more further features are present.
  • the expressions “A has B”, “A comprises B” and “A includes B” may both refer to a situation in which, besides B, no other element is present in A (i.e. a situation in which A solely and exclusively consists of B) and to a situation in which, besides B, one or more further elements are present in entity A, such as element C, elements C and D or even further elements.
  • the terms “at least one”, “one or more” or similar expressions indicating that a feature or element may be present once or more than once typically are used only once when introducing the respective feature or element. In most cases, when referring to the respective feature or element, the expressions “at least one” or “one or more” are not repeated, nonwithstanding the fact that the respective feature or element may be present once or more than once.
  • the terms “preferably”, “more preferably”, “particularly”, “more particularly”, “specifically”, “more specifically” or similar terms are used in conjunction with optional features, without restricting alternative possibilities. Thus, features introduced by these terms are optional features and are not intended to restrict the scope of the claims in any way.
  • Embodiment 1 A spectrometer device for obtaining spectroscopic information on at least one object, the spectrometer device comprising at least one detector for detecting light, e.g. from an object; at least one light source configured for emitting light in at least one optical spectral range; at least one sample interface configured for allowing the emitted light of the light source to leave the spectrometer device through the sample interface and configured for allowing detection light to enter the spectrometer device through the sample interface, wherein the sample interface comprises at least one optical element configured for providing at least one internal calibration target; at least one optical path, wherein the optical path is configured for allowing the emitted light of the light source to propagate to the sample interface and for allowing detection light to propagate to the detector, wherein the optical path is further configured for allowing the emitted light of the light source to propagate to the internal calibration target and for allowing reference emission to be directed by the internal calibration target to the detector, wherein the spectrometer device is configured for separating the reference emission and the detection light
  • Embodiment III determining at least one item of calibration information by using the first detector signal and the calibration signal.
  • Embodiment 2. The spectrometer device according to the preceding embodiment, wherein the spectrometer device is configured for separating the reference emission and the detection light from each other by time multiplexing and/or frequency multiplexing, and/or wherein the light source comprises at least one polarized emitter configured for emitting polarized light and/or wherein the optical element comprises at least one reflective polarization filter.
  • Embodiment 3 The spectrometer device according to any one of the preceding embodiments, wherein the detection light is s-polarized and reference emission is p-polarized.
  • Embodiment 4 The spectrometer device according to any one of the preceding embodiments, wherein the reflective polarization filter is configured for reflecting polarized reference emission to the detector, while being transparent for the detection light.
  • Embodiment 5 The spectrometer device according to any one of the preceding embodiments, wherein the reflective polarization filter is a linear polarization filter.
  • Embodiment 6 The spectrometer device according to any one of the preceding embodiments, wherein polarization of the reflective polarization filter has a fixed polarization or is switchable between at least two polarization states by using at least one driving unit.
  • Embodiment 7 The spectrometer device according to any one of the preceding embodiments, wherein the optical element is at least one cover window, wherein the cover window is configured for providing the at least one internal calibration target, wherein the reflective polarization filter is positioned directly on the cover window.
  • Embodiment 8 The spectrometer device according to any one of the preceding embodiments, wherein the optical element is at least one cover window, wherein the cover window is configured for providing the at least one internal calibration target, wherein the reflective polarization filter is a coating on the cover window, wherein the coating is arranged at a bottom side of the cover window.
  • Embodiment 9 The spectrometer device according to any one of the preceding embodiments, wherein the optical element is at least one cover window, wherein the cover window is configured for providing the at least one internal calibration target, wherein the cover window comprises a stack, wherein the stack comprises the reflective polarization filter applied as coating to the bottom side of cover window and an anti refl ection coating applied to a top surface of cover window.
  • Embodiment 10 The spectrometer device according to the preceding embodiment, wherein the optical path is designed such that in the field-of-view of the detection light no the reflective polarization filter is present.
  • Embodiment 11 The spectrometer device according to any one of the preceding embodiments, wherein the detector comprises one or multiple broadband or one or more multiple narrowband detectors.
  • Embodiment 12 The spectrometer device according to any one of the preceding embodiments, wherein the light source comprises one or multiple broadband or one or multiple narrowband light sources.
  • Embodiment 13 The spectrometer device according to any one of the preceding embodiments, wherein the light source comprises a single emitter or a plurality of emitters.
  • Embodiment 14 The spectrometer device according to any one of the preceding embodiments, wherein the light source comprises at least one emitter selected from the group consisting of: at least one light emitting diode, at least one Laser, at least one vertical-cavity surfaceemitting laser (VCSEL), at least one edge emitting laser diode, at least one external cavity laser.
  • the light source comprises at least one emitter selected from the group consisting of: at least one light emitting diode, at least one Laser, at least one vertical-cavity surfaceemitting laser (VCSEL), at least one edge emitting laser diode, at least one external cavity laser.
  • the light source comprises at least one emitter selected from the group consisting of: at least one light emitting diode, at least one Laser, at least one vertical-cavity surfaceemitting laser (VCSEL), at least one edge emitting laser diode, at least one external cavity laser.
  • VCSEL vertical-cavity surfaceemitting laser
  • Embodiment 15 The spectrometer device according to any one of the preceding embodiments, wherein the polarized emitter is itself polarized or comprises at least one polarization filter, wherein polarization of the polarized emitter is switchable between at least two polarization states by using at least one driving unit.
  • Embodiment 16 The spectrometer device according to any one of the preceding embodiments, wherein the light source comprises at least one dual polarization emitter, wherein the dual polarization emitter is configured for controlling and modulating both polarizations independently.
  • Embodiment 17 The spectrometer device according to the preceding embodiment, wherein the light source comprises multiple dual polarization emitters.
  • Embodiment 18 The spectrometer device according to any one of the preceding embodiments, wherein the spectrometer device is configured for separating the reference emission and the detection light from each other by time multiplexing, wherein the light source comprises a single polarized emitter, wherein at least one driving unit is configured for sequentially switching the polarization of the polarized emitter and/or the reflective polarization filter.
  • Embodiment 19 The spectrometer device according to any one of the preceding embodiments, wherein the spectrometer device is configured for separating the reference emission and the detection light from each other by frequency multiplexing, wherein the polarized emitter comprises at least one dual polarization emitter configured for controlling and modulating both polarizations independently, wherein the reflective polarization filter has a fixed polarization, wherein the reference emission and the detection light are measured by the detector at the same time.
  • the polarized emitter comprises at least one dual polarization emitter configured for controlling and modulating both polarizations independently, wherein the reflective polarization filter has a fixed polarization, wherein the reference emission and the detection light are measured by the detector at the same time.
  • the spectrometer device is configured for separating the reference emission and the detection light from each other by frequency multiplexing, wherein the light source comprises at least two polarized emitters arranged with respect to the detector in a mirrored configuration, wherein the polarization of the two polarized emitters differs, the driving unit is configured for controlling and modulating both polarizations of two polarized emitters independently, wherein the reference emission and the detection light are measured by the detector at the same time.
  • Embodiment 21 A method of calibrating a spectrometer device, wherein the spectrometer device is a spectrometer device according to any one of the preceding embodiments, the method comprising:
  • Embodiment 22 A method of determining at least one spectroscopic information of at least one object by using a spectrometer device according to any one of the preceding embodiments referring to a spectrometer device, the method comprising: i. providing the object to the sample interface, wherein the object comprises at least one measurement object;
  • Embodiment 23 A computer program for calibrating a spectrometer device and/or obtaining spectroscopic information on at least one object comprising instructions which, when the program is executed by a computer or computer network, cause the computer or computer network to perform the method calibrating a spectrometer device according to any one of the preceding embodiments referring to a method of calibrating a spectrometer device and/or of obtaining spectroscopic information on at least one object according to any one of the preceding embodiments referring to a method of obtaining spectroscopic information on at least one object.
  • Embodiment 24 A computer-readable storage medium, specifically a non-transient computer- readable storage medium, comprising instructions which, when the instructions are executed by a computer or computer network, cause the computer or computer network to perform the method calibrating a spectrometer device according to any one of the preceding embodiments referring to a method of calibrating a spectrometer device and/or of obtaining spectroscopic information on at least one object according to any one of the preceding embodiments referring to a method of obtaining spectroscopic information on at least one object.
  • Embodiment 25 A use of a spectrometer device according to any one of the preceding embodiments referring to a spectrometer device, in an application selected from the group consisting of: an infrared detection application; a spectroscopy application; an exhaust gas monitoring application; a combustion process monitoring application; a pollution monitoring application; an industrial process monitoring application; a mixing or blending process monitoring; a chemical process monitoring application; a food processing process monitoring application; a food preparation process monitoring; a water quality monitoring application; an air quality monitoring application; a quality control application; a temperature control application; a motion control application; an exhaust control application; a gas sensing application; a gas analytics application; a motion sensing application; a chemical sensing application; a mobile application; a medical application; a mobile spectroscopy application; a food analysis application; an agricultural application, in particular characterization of soil, silage, feed, crop or produce, monitoring plant health; a plastics identification and/or recycling application; a healthcare and/or beauty application, in particular
  • Figures 1 to 6 shows embodiments of a spectrometer device according to the present invention
  • Figure 7 shows a flowchart of an embodiment of a method of calibrating the spectrometer device.
  • Figure 8 shows a flowchart of an embodiment of a method of determining at least one spectroscopic information of at least one object by using the spectrometer device.
  • Figure 1 shows an exemplary embodiment of a spectrometer device 110 for obtaining spectroscopic information on at least one object 112 according to the present invention in a highly schematic fashion.
  • the spectrometer device 110 comprises at least one detector 114 for detecting light, e.g. from an object 112.
  • the detector 114 may be configured for generating at least one detector signal, more specifically at least one electrical detector signal, such as an analogue and/or a digital detector signal, the detector signal providing information on the at least one parameter measured by the detector.
  • the detector signal may directly or indirectly be provided by the detector 114 to at least one evaluation unit 116, such that the detector 112 and the evaluation unit 116 may be directly or indirectly connected.
  • the detector signal may be used as a “raw” detector signal and/or may be processed or preprocessed before further used, e.g. by filtering and the like.
  • the detector 114 may comprise at least one processing device and/or at least one preprocessing device, such as at least one of an amplifier, an analogue/digital converter and an electrical filter.
  • the detector 114 may be or may comprise at least one optical detector.
  • the optical detector may be configured for determining at least one optical parameter, such as an intensity and/or a power of light by which at least one sensitive area of the detector is irradiated. More specifically, the optical detector may comprise at least one photosensitive element and/or at least one optical sensor, such as at least one of a photodiode, a photocell, a photosensitive resistor, a phototransistor, a thermophile sensor, a photoacoustic sensor, a pyroelectric sensor, a photomultiplier and a bolometer.
  • the detector 114 may comprise one or multiple broadband or one or more multiple narrowband detectors.
  • the broadband detector may be configured for detecting light over a wide wavelength range, e.g. in one or more of the infrared, the visible and the ultraviolet spectral range.
  • the narrowband detector may be configured for detecting light only within a narrow selected wavelength range, such as a wavelength range having a width in the range of 0.1 to 500 nm, specifically in the range of 1 to 200 nm, more specifically a wavelength range having a width of 1 to 5 nm or having a width of 20 to 200 nm.
  • the detector 114 may comprise one single optically sensitive element or area or a plurality of optically sensitive elements or areas. Specifically, the detector 114 may be or may comprise at least one detector array, more specifically an array of photosensitive elements. Each of the photosensitive elements may comprise at least a photosensitive area which may be adapted for generating an electrical signal depending on the intensity of the incident light, wherein the electrical signal may, in particular, be provided to the evaluation unit, as will be outlined in further detail below.
  • the photosensitive area as comprised by each of the optically sensitive elements may, especially, be a single, uniform photosensitive area which is configured for receiving the incident light which impinges on the individual optically sensitive elements.
  • other arrangements of the optically sensitive elements may also be conceivable.
  • the detector 114 comprises an array of optically sensitive elements
  • the detector 114 may be selected from any known pixel sensor, in particular, from a pixelated organic camera element, preferably, a pixelated organic camera chip, or from a pixelated inorganic camera element, preferably, a pixelated inorganic camera chip, more preferably from a CCD chip or a CMOS chip, which are, commonly, used in various cameras nowadays.
  • the detector generally may be or comprise a photoconductor, in particular an inorganic photoconductor, especially PbS, PbSe, Ge, InGaAs, ext. InGaAs, InSb, or HgCdTe.
  • a camera chip having a matrix of 1 x N pixels or of M x N pixels may be used here, wherein, as an example, M may be ⁇ 10 and N may be in the range from 1 to 50, preferably from 2 to 20, more preferred from 5 to 10.
  • a monochrome camera element preferably a monochrome camera chip, may be used, wherein the monochrome camera element may be differently selected for each optically sensitive element, especially, in accordance with the varying wavelength along the series of the optical sensors.
  • the array may be adapted to provide a plurality of the electrical signals which may be generated by the photosensitive areas of the optically sensitive elements comprised by the array. The electrical signals as provided by the array of the spectrometer device may be forwarded to the evaluation unit 116.
  • the evaluation unit 116 may be or may comprise one or more integrated circuits, such as one or more application-specific integrated circuits (ASICs), and/or one or more data processing devices, such as one or more of computers, digital signal processors (DSP), field programmable gate arrays (FPGA) preferably one or more microcomputers and/or microcontrollers. Additional components may be comprised, such as one or more preprocessing devices and/or data acquisition devices, such as one or more devices for receiving and/or preprocessing of the detector signals, such as one or more AD-converters and/or one or more filters. Further, the evaluation unit 116 may comprise one or more data storage devices. Further, the evaluation unit 116 may comprise one or more interfaces, such as one or more wireless interfaces and/or one or more wire-bound interfaces.
  • ASICs application-specific integrated circuits
  • DSP digital signal processors
  • FPGA field programmable gate arrays
  • Additional components may be comprised, such as one or more preprocessing devices and/or data acquisition devices, such as
  • the evaluation unit 116 may be adapted to execute at least one computer program, such as at least one computer program performing or supporting the step of generating the items of information.
  • at least one computer program such as at least one computer program performing or supporting the step of generating the items of information.
  • one or more algorithms may be implemented which, by using the at least one detector signal may perform a predetermined transformation for deriving the spectroscopic information on the object 112, such as for deriving a corrected spectrum and/or for deriving at least one spectroscopic information describing at least one property of the object 112.
  • the evaluation unit 116 may, particularly, comprise at least one data processing device, also referred to as a processor, in particular an electronic data processing device, which can be designed to generate the desired information by evaluating the detector signal.
  • the evaluation unit 116 may use an arbitrary process for generating the required information, such as by calculation and/or using at least one stored and/or known relationship.
  • the evaluation unit 116 specifically may be configured for performing at least one digital signal processing (DSP) technique on the primary detector signal or any secondary detector signal derived thereof, in particular at least one Fourier transformation. Additionally or alternatively, the evaluation unit 116 may be configured for performing one or more further digital signal processing techniques on the primary detector signal or any secondary detector signal derived thereof, e.g. windowing, filtering, Goertzel algorithm, crosscorrelation and autocorrelation. Besides the detector signal one or a plurality of further parameters and/or items of information can influence said relationship.
  • DSP digital signal processing
  • the relationship can be determined or determinable empirically, analytically or else semi-empirically.
  • the relationship may comprise at least one of a model or calibration curve, at least one set of calibration curves, at least one function or a combination of the possibilities mentioned.
  • One or a plurality of calibration curves can be stored for example in the form of a set of values and the associated function values thereof, for example in a data storage device and/or a table.
  • the at least one calibration curve can also be stored for example in parameterized form and/or as a functional equation.
  • the spectrometer device 110 further comprises at least one wavelength- selective element, not shown here, configured for transferring incident light within at least one selected wavelength range onto the detector 114.
  • the at least one wavelength-selective element may comprise at least one element selected from the group consisting of: at least one of an optical filter; a grating, a prism; a plasmonic filter; a diffractive optical element; a metamaterial an interferometric filter; an absorption filter; a dichroic filter; an MEMS-lnterferome- ter; a MEMS Fabry-Perot interferometer; an array of individual bandpass filters; an array of patterned filters. Further elements are feasible.
  • the wavelength-selective element may comprise at least one narrow band pass filter, more specifically a set of narrow band pass filter.
  • the narrow band pass filter may be configured for transmitting light only within a narrow selected wavelength range, such as a wavelength range having a width in the range of 0.1 to 500 nm, specifically in the range of 1 to 200 nm, more specifically a wavelength range having a width of 1 to 5 nm or having a width of 20 to 200 nm.
  • each of the narrow band pass filter may have a narrow selected wavelength range at least partially differing from each other.
  • the spectrometer device 110 further comprises at least one light source 118 configured for emitting light in at least one optical spectral range.
  • the light source 118 may comprise one or multiple broadband or one or multiple narrowband light sources.
  • the light source 118 may comprise a single emitter or a plurality of emitters.
  • the light source 118 comprises at least one emitter selected from the group consisting of: at least one light emitting diode (LED), at least one Laser, at least one vertical-cavity surface-emitting laser (VCSEL), at least one edge emitting laser diode, at least one external cavity laser, e.g. at least one dual polarization external cavity laser, and the like.
  • the light source 118 may comprise at least one polarized emitter configured for emitting polarized light.
  • the polarized emitter may be configured for emitting s- or p-polarized light.
  • the polarized emitter may itself be polarized or may comprise at least one polarization filter.
  • the polarization filter may be configured for generating polarized light from light of undefined or mixed polarization.
  • the polarization filter may comprise at least one linear polarizer and/or at least one circular polarizer.
  • the polarization filter may be configured for separating vertically polarized (s- polarized) from horizontally polarized (p-polarized) light.
  • the polarized emitted may be configured for switching between at least two polarization states.
  • the polarized emitter may be configured for emitting light having a first polarization for an object measurement (e.g. illumination of the object by the light emitted by the light source and detection of the detection light) and for emitting light having a second polarization, different from the first polarization, for a calibration measurement (e.g. illumination of the internal calibration target by the light emitted by the light source 118 and detection of the reference emission).
  • the polarization of the polarized emitter may be switchable between the at least two polarization states by using at least one driving unit.
  • the polarization states may refer to emission of s- or p-polarized light.
  • the driving unit may comprise at least one current source for providing at least one current to the polarized emitter for driving the polarized emitter.
  • the current source specifically may be configured for adjusting or controlling a voltage applied to the polarized emitter in order to generate the predetermined current.
  • the driving unit may be configured for driving the polarized emitter by using at least one driving scheme, e.g. specifying frequency, current/voltage value and the like.
  • the driving unit may comprise one or more electrical components, such as integrated circuits, for driving the polarized emitter.
  • the driving unit may fully or partially be integrated into the light source or may be separated from the light source.
  • the spectrometer device 110 comprises at least one sample interface 120.
  • the sample interface 120 is configured for allowing the emitted light of the light source to leave the spectrometer device 110 through the sample interface 120 and configured for allowing detection light to enter the spectrometer device 110 through the sample interface 120.
  • the sample interface 120 may be configured for allowing the emitted light of the light source to illuminate an object 112 placed onto the sample interface 120 and configured for allowing light from the object 112 to propagate via the wavelength-selective element to the detector 114.
  • the sample interface 120 may be a port of the spectrometer device 110 through which light in the optical spectral range, such as in at least one partition of the optical spectral range or in the full optical spectral range, may enter the spectrometer device 110, specifically for the purpose of the spectral sensing, and/or may leave the spectrometer device 110, e.g. for the purpose of illuminating the at least one object 112.
  • the sample interface 120 may define an optical plane, e.g. a plane either material or imaginary, of the spectrometer device 110, through which the illumination light may travel to reach the object 112 and/or through which the detection light from the object 112 may travel to reach the detector 114, e.g. to generate a detector signal.
  • the sample interface 120 may be a fictional plane.
  • the sample interface 120 may or may not be constituted by a physical element and/or barrier, such as a transparent element, e.g. a glass or quartz window.
  • the sample interface 120 may also be the sample surface itself or a plane where the sample can be placed or aligned.
  • the sample interface 120 may be arranged in an optical path 122 of the spectrometer device 110 to allow the light emitted from the light source 118 to illuminate the object 112 placed in front of the spectrometer device 110, specifically in front of the sample interface 120.
  • the sample interface 120 may be configured such that the light emitted from the light source 118 can pass the sample interface 120.
  • the sample interface 120 comprises at least one optical element, in this embodiment at least one cover window 124.
  • the cover window 124 may be configured for providing at least one internal calibration target.
  • the internal calibration target may be configured for interacting with the illumination light in the optical path 122 in a predetermined or pre-defined manner.
  • the internal calibration target may be configured for generating in response to illumination by light emitted by the light source 118 reference emission.
  • the optical path 122 is configured for allowing the emitted light of the light source 118 to propagate to the internal calibration target and for allowing reference emission directed by the internal calibration target, e.g. via the wavelength-selective element, to the detector 114.
  • the optical path for detection of the detection light and the optical path for detecting the reference emission may be identical. Only one optical path 122 to the sample plane for both reference and object measurement may be used and required. This can allow that reference and object emission have the same angle of incidence.
  • the optical path design can be simplified and no dedicated reference target is required.
  • the cover window 124 comprises at least one reflective polarization filter 126.
  • the calibration measurement and the object measurement may be performed with at least one polarized emitter.
  • the reflective polarization filter 126 may be configured for reflecting the polarized reference emission to the detector 114, while being transparent for the polarized detection light, which is reflected/scattered by the object under test. Using of a polarization filter 126 can further effectively prevent external emission.
  • the object 112 light is s-polarized and reference emission is p-polarized.
  • the reflective polarization filter 126 may be configured for reflecting polarized reference emission to the detector 114, while being transparent for the detection light.
  • the reflective polarization filter 126 is a linear polarization filter.
  • polarization of the reflective polarization filter 126 has a fixed polarization or is switchable between at least two polarization states by using at least one driving unit.
  • the driving unit may be identical to the driving unit described above, or may be a further driving unit.
  • the reflective polarization filter 126 is positioned directly on the cover window 124.
  • the reflective polarization filter 126 may comprise one or more of at least coating, at least one liquid crystal material, at least one metamaterial.
  • the reflective polarization filter 126 is a coating on the cover window.
  • the reflective polarization filter 126 may be a thin coating.
  • the reflective polarization filter 126 may be a film polarizer, in particular a thin film polarizer.
  • the thin film polarizer may comprise dielectric multilayers.
  • a thin film polarizer available from Optoman® may be used, e.g. a thin film polarizer applied via ion beam sputtering.
  • a metamaterial surface available from Metalenz® may be used as reflective polarization filter.
  • the coating may be arranged at a bottom side of the cover window 124.
  • the bottom side may be the side facing the detector 114.
  • Using such a coating can allow yielding exacting optical paths for reference and object 112 when applied to the cover window 124 top side.
  • a coating on the bottom side can allow preventing external damaging of the coating.
  • the spectrometer device 110 is configured for separating the reference emission and the detection light from each other by polarization multiplexing. Both polarizations need to be differentiated as the detector 114 itself may be unpolarized.
  • the polarization multiplexing may be used for separating the detector signals relating to the different polarizations.
  • the spectrometer device 110 may be configured for separating the reference emission and the detection light from each other by time multiplexing and/or frequency multiplexing.
  • Figure 1 shows an example, in which the reference emission and the detection light from each other by time multiplexing, denoted with two different dashing of 122.
  • the light source 118 may comprise a single polarized emitter, wherein the at least one driving unit is configured for sequentially switching the polarization states of the reflective polarization filter 126.
  • a signal for switching the polarization states of the reflective polarization filter 126 is show as arrow 128.
  • each signal may be transmitted during its own time slot, which can allow preventing interference between the signals and ensures that the signals are received correctly.
  • the driving unit may be configured for generating at least one item of switchon information indicating at which point in time which polarization is turned on.
  • the evaluation unit 116 may be configured for taking into consideration the item of switch-on information when deriving the spectroscopic information from the detector signals.
  • the evaluation unit 116 may be configured for separating the detector signals, e.g. relating to the different polarizations, based on the item of switch-on information.
  • Figure 2 shows a further embodiment of the spectrometer device 110 according to the present invention.
  • the light source 118 may comprise a single polarized emitter, wherein the at least one driving unit is configured for sequentially switching the polarization of the polarized emitter and/or the reflective polarization filter 126.
  • a signal for switching the polarization states of the polarized emitter is shown as arrow 130.
  • the polarization state of the polarized emitter may be changed either by switching a polarization filter of the polarized emitter by switching in the polarized emitter itself.
  • Such an arrangement can allow one or more of that angles and optical path match, that a single emitter package can be used for both calibration and sample measurement, that calibration and sample emitter have exactly same properties, that only one driver channel is required and that the spectrometer device can be designed with a small size. Due to switching, reference and sample measurement can be performed sequentially. Avoiding difference between sample and calibration may depend on a used driving/trigger pattern.
  • Figure 3 shows a further embodiment of the spectrometer device 110 according to the present invention.
  • the light source 118 comprises at least one dual polarization emitter 132.
  • the dual polarization emitter 132 may be configured for controlling and modulating both polarizations independently.
  • the dual polarization emitter 132 may comprise a single package array of polarized VCSELs.
  • the VCSELs may be designed to be driven independently.
  • the dual polarization emitter 132 may comprise at least one VCSEL array with linear s- and p- polarized light and at least one optics, e.g.
  • the dual polarization emitter 132 may be driven by using at least one driving scheme.
  • the dual polarization emitter 132 may be driven by using so called on-Off-Keying (OOK) modulation of both polarizations, each with a different frequency, e.g. square wave signals with different frequencies.
  • OOK on-Off-Keying
  • the dual polarization emitter 132 e.g. a single package array of polarized VCSELs that can be driven independently, it may be possible to ensure that the same light source properties and operating conditions apply for object and reference measurement. In this embodiment, two driver channels may be required.
  • FIG. 4 shows a further embodiment of the spectrometer device 110 according to the present invention. With respect to elements of the spectrometer device 110 reference is made to the description of Figures 1 to 3. In the following, the differences are described.
  • two polarized emitters are used in a mirrored configuration. In such an arrangement angles match and the optical path is mirrored. Two emitters and two driver channels may be used. Reference and sample measurement can be performed at the same time but since different emitters are used, temperatures may need calibration as well.
  • Figure 5 shows a further embodiment of the spectrometer device 110 according to the present invention.
  • the cover window 124 may comprise a stack.
  • the stack may comprise the reflective polarization filter 126 applied as coating to the bottom side of cover window 124 and an antireflection coating 134 applied to a top surface of cover window 124.
  • the antireflective coating 134 may be configured for reducing the reflectivity to near-zero, e.g. for a specific wavelength.
  • an antireflective coating available from EKSMA® Optics or Visimax® may be used.
  • This dual polarization setup can be used for maximizing optical throughput.
  • the Brewster angle may be exploited to suppress reflexion: therefore measurement optical emission is s-polarized and reference optical emission is p-polarized.
  • the reflective polarization filter 126 applied as coating to the bottom side of cover window 124 reflects p-polarized light to maximize reflection.
  • the reflective polarization filter 126 transmits s-polarized light to maximize optical signal from the object.
  • the anti refl ection coating 134 can allow minimizing optical signal losses in the illumination path from object.
  • the optical path 122 may be designed so that no polarization filter is applied in the field-of-view (FoV) of the object detection path. This can allow preventing losses from passing the polarization filter, e.g. of 50%. Instead antireflection coating are used to maximize throughput.
  • FoV field-of-view
  • Figure 6 shows a further embodiment of the spectrometer device 110 according to the present invention. With respect to elements of the spectrometer device 110 reference is made to the description of Figures 1 to 5. In the following, the differences are described. In the embodiment of Figure 6, two dual polarization emitters 132 are used.
  • Figure 7 shows a flowchart of an embodiment of a method of calibrating the spectrometer device 110, e.g. a spectrometer device 110 described with respect to Figures 1 to 6.
  • the method comprises the following steps that may be performed in the given order. However, a different order may also be possible. In particular, one, more than one or even all of the meth-od steps may be performed once or repeatedly. Further, the method steps may be performed successively or, alternatively, one or more of the method steps may be performed in a timely overlapping fashion or even in a parallel fashion and/or in a combined fashion. The method may further comprise additional method steps that are not listed.
  • the method comprising: I .
  • the calibration may comprise determining information on a relation of a measurement signal of the spectrometer device 110 to a known calibration standard.
  • a known calibration standard an external calibration target may be used. This information can be used for calibrating reference measurements.
  • the reference measurements, using the internal calibration target, can be performed online, in particular during the object measurement. Thus, this information can be used for correcting and/or adjusting the measurement signal of the spectrometer device, e.g. in order to reduce, minimize and/or eliminate deviations of the measurement signal from the known calibration standard.
  • the calibration using the external calibration target may be performed during setup of the spectrometer, e.g. before a measurement, and/or repeatedly in time intervals.
  • the item of calibration information may be determined according to
  • the method may specifically comprise repeating steps II. to IV. for a plurality of wavelengths i.
  • Figure 8 shows a flowchart of an embodiment of a method of determining at least one spectroscopic information of at least one object 112 by using the spectrometer device 110, e.g. a spectrometer device 110 described with respect to Figures 1 to 6.
  • the method comprises the following steps that may be performed in the given order. However, a different order may also be possible. In particular, one, more than one or even all of the method steps may be performed once or repeatedly. Further, the method steps may be performed successively or, alternatively, one or more of the method steps may be performed in a timely overlapping fashion or even in a parallel fashion and/or in a combined fashion. The method may further comprise additional method steps that are not listed.
  • the method comprises: i. (144) providing the object 112 to the sample interface 120, wherein the object 112 comprises at least one measurement object; ii. (146) illuminating the object 112 with light, e.g. having at least one wavelengths A h having a first polarization via the optical path to obtain at least one measurement signal S meaSii relating to the detection light; ill. (148) illuminating the internal calibration target with light, e.g. having at least one wavelengths Aj, having a second polarization, different from the first polarization, via the optical path to obtain at least one reference signal S ref i relating to the reference emission; and iv.
  • the spectroscopic information of the object may specifically one or more of reflectance, transmittance, absorbance of the object.
  • the spectroscopic information of the object 112 may be a reflectance R O bject,i > wherein
  • the method may comprise repeating steps II. to iv. for a plurality of wavelengths i.

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Abstract

Un dispositif de spectromètre (110) pour obtenir des informations spectroscopiques sur au moins un objet (112) est divulgué, comprenant au moins un détecteur (114) pour détecter la lumière ; au moins une source de lumière (118) conçue pour émettre de la lumière dans au moins une plage spectrale optique ; au moins une interface d'échantillon (120) conçue pour permettre à la lumière émise de la source de lumière (118) de quitter le dispositif de spectromètre (110) à travers l'interface d'échantillon (120) et conçue pour permettre à la lumière de détection d'entrer dans le dispositif de spectromètre (110) à travers l'interface d'échantillon (120), l'interface d'échantillon (120) comprenant au moins un élément optique conçu pour fournir au moins une cible d'étalonnage interne ; au moins un trajet optique (122), le trajet optique (122) étant conçu pour permettre à la lumière émise de la source de lumière (118) de se propager vers l'interface d'échantillon (120) et pour permettre à la lumière de détection de se propager vers le détecteur (114), le trajet optique (122) étant en outre conçu pour permettre à la lumière émise de la source de lumière (118) de se propager vers la cible d'étalonnage interne et pour permettre à une émission de référence d'être dirigée par la cible d'étalonnage interne vers le détecteur (114). Le dispositif de spectromètre (110) est conçu pour séparer l'émission de référence et la lumière de détection l'une de l'autre par multiplexage par polarisation. Le dispositif de spectromètre (110) est conçu pour I. (138) éclairer à travers l'interface d'échantillon (120) avec de la lumière ayant une première polarisation par l'intermédiaire du ou des trajets optiques (122) pour obtenir au moins un premier signal de détecteur relatif à la lumière de détection ; II. (140) éclairer la cible d'étalonnage interne avec de la lumière ayant une seconde polarisation, différente de la première, par l'intermédiaire du trajet optique (122) pour obtenir au moins un signal d'étalonnage relatif à l'émission de référence ; et III. (142) déterminer au moins une information d'étalonnage à l'aide du premier signal de détecteur et du signal d'étalonnage.
PCT/EP2024/070090 2023-07-17 2024-07-16 Multiplexage de polarisation pour conception de trajet d'étalonnage interne améliorée Pending WO2025016999A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018203831A1 (fr) * 2017-05-03 2018-11-08 Heptagon Micro Optics Pte. Ltd. Étalonnage de spectromètre
WO2021042120A1 (fr) * 2019-08-27 2021-03-04 Viavi Solutions Inc. Dispositif de mesure optique comprenant une référence spectrale interne
WO2022117611A1 (fr) * 2020-12-02 2022-06-09 Trinamix Gmbh Dispositif de détection spectrale et procédé de mesure de rayonnement optique
WO2023052608A1 (fr) * 2021-10-01 2023-04-06 Trinamix Gmbh Spectromètre spécifique à une application à multiples détecteurs uniques
WO2023161403A1 (fr) 2022-02-25 2023-08-31 Trinamix Gmbh Spectromètre à trajet d'étalonnage intégré

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018203831A1 (fr) * 2017-05-03 2018-11-08 Heptagon Micro Optics Pte. Ltd. Étalonnage de spectromètre
WO2021042120A1 (fr) * 2019-08-27 2021-03-04 Viavi Solutions Inc. Dispositif de mesure optique comprenant une référence spectrale interne
WO2022117611A1 (fr) * 2020-12-02 2022-06-09 Trinamix Gmbh Dispositif de détection spectrale et procédé de mesure de rayonnement optique
WO2023052608A1 (fr) * 2021-10-01 2023-04-06 Trinamix Gmbh Spectromètre spécifique à une application à multiples détecteurs uniques
WO2023161403A1 (fr) 2022-02-25 2023-08-31 Trinamix Gmbh Spectromètre à trajet d'étalonnage intégré

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