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WO2025013119A1 - Dispositif optique - Google Patents

Dispositif optique Download PDF

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Publication number
WO2025013119A1
WO2025013119A1 PCT/JP2023/025251 JP2023025251W WO2025013119A1 WO 2025013119 A1 WO2025013119 A1 WO 2025013119A1 JP 2023025251 W JP2023025251 W JP 2023025251W WO 2025013119 A1 WO2025013119 A1 WO 2025013119A1
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WO
WIPO (PCT)
Prior art keywords
optical
optical waveguide
light
refractive index
waveguide
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Pending
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PCT/JP2023/025251
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English (en)
Japanese (ja)
Inventor
敬太 望月
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2024516397A priority Critical patent/JPWO2025013119A1/ja
Priority to PCT/JP2023/025251 priority patent/WO2025013119A1/fr
Publication of WO2025013119A1 publication Critical patent/WO2025013119A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections

Definitions

  • This disclosure relates to optical devices.
  • optical waveguides are widely used as a basic component of devices. These waveguides have a higher refractive index than the surrounding area, thereby confining light to a localized region and forming that region into a linear shape, allowing the light to propagate to the desired region.
  • various waveguide-type devices based on optical waveguides are widely used as one of the basic components of optical devices to realize various functions, such as directional couplers, which optically couple the optical propagation modes of two independent optical waveguides by bringing them close to each other at a distance equal to or less than the wavelength of the propagating light, and multimode interference waveguides (MMIs), which form a wide waveguide to convert the eigenmode of the light propagating inside into multiple modes and split the propagating light into any number of waves or combine it by optical interference between the modes, polarization multiplexers and splitters, which split the input light into polarization waves and output them in different positions, or the reverse function, and grating couplers, which have a diffraction grating structure in the direction of light propagation and diffract light of the desired wavelength or polarization up and down from the optical waveguide, thereby propagating light into space.
  • MMIs multimode interference waveguides
  • optical devices such as MMI, polarization multiplexer/demultiplexer, and grating coupler have a small range of operating wavelengths or polarizations, and in order to accommodate various wavelengths or polarizations, it is necessary to devise a method such as arranging devices corresponding to light with various attributes in parallel, which also leads to a large overall device size.
  • 3 dB couplers or 3 dB splitters which are often used in directional couplers and split 50% of the optical power to the other side, have the problem that the tolerance range of the device length at which the desired transfer rate can be obtained is very narrow, about 1 micrometer.
  • Non-Patent Documents 1 and 2 a periodic structure with a period equal to or smaller than the propagating light, known as a sub-wavelength grating (SWG) structure, has been introduced into a Si-based optical device in a direction perpendicular to two optical waveguides, which has succeeded in realizing a smaller device size, polarization independence, and wavelength independence (Non-Patent Documents 1 and 2).
  • SWG sub-wavelength grating
  • Non-Patent Documents 1 and 2 disclose techniques for realizing a small directional coupler, but the SWG structure requires a periodic structure with a size equal to or smaller than the wavelength.
  • the refractive index of semiconductor optical materials such as Si and InP that make up the waveguide exceeds 3, so a size of 1/3 or less of the wavelength is essentially required.
  • a wavelength of 1.5 ⁇ m requires a periodic structure of 0.5 ⁇ m or less, and a fine structure of about 0.25 ⁇ m is required if the filling rate of the optical waveguide core material is 50%.
  • Forming a structure of this size with high precision is difficult in optical semiconductor processes, and requires a high-precision process such as electron beam (EB) lithography, which leads to high costs.
  • EB electron beam
  • the present disclosure has been made to solve the above problems, and aims to provide an optical device that requires less machining precision than before and can be easily manufactured.
  • the optical device disclosed herein is an optical device comprising a first optical waveguide and a second optical waveguide arranged side by side on a substrate, and having an optical coupling region in which the distance between the first optical waveguide and the second optical waveguide is narrower than in other regions so that light is coupled between the first optical waveguide and the second optical waveguide, and the optical coupling region has a grating structure in which a first refractive index material and a second refractive index material having a refractive index lower than that of the first refractive index material are alternately arranged with a period ⁇ around the first optical waveguide and the second optical waveguide in the propagation direction of the light, and the period ⁇ satisfies 11c0 / (20neff ⁇ f) ⁇ 3c0/( 4neff ⁇ f) , where c0 is the speed of light in a vacuum, f is the frequency of the light, and neff is the effective refractive index corresponding to the waveguide mode in the optical coupling region
  • the required processing precision is reduced compared to conventional methods, resulting in an optical device that can be easily manufactured.
  • FIG. 1 is a schematic top view showing a configuration of an optical device according to a first embodiment.
  • 2 is a schematic enlarged perspective view showing a configuration of an optical coupling region of the optical device according to the first embodiment;
  • FIG. 4 is a diagram illustrating the operating points of the optical device according to the first embodiment in comparison with the operating points of an optical device of a comparative example;
  • 5A to 5C are schematic diagrams for explaining the operation of the optical device according to the first embodiment in comparison with the operation of an optical device of the comparative example.
  • 13 is a diagram showing the branching characteristics of optical power of an optical device of a comparative example.
  • FIG. 13 is a diagram showing the branching characteristics of optical power of an optical device of another comparative example.
  • FIG. 4 is a diagram showing the branching characteristics of optical power of the optical device according to the first embodiment;
  • FIG. FIG. 1 is a diagram showing a calculation model of the FDTD method.
  • FIG. 13 is a diagram showing characteristics of an optical device according to a comparative example. 13 is a diagram showing the characteristics of the optical device according to the second embodiment in comparison with a comparative example. 13A and 13B are diagrams illustrating the operation of the optical device according to the second embodiment in comparison with a comparative example.
  • FIG. 11 is a schematic top view showing the configuration of an optical device according to a third embodiment.
  • FIG. 11 is a schematic enlarged perspective view showing a configuration of an optical coupling region of an optical device according to a third embodiment.
  • Embodiment 1. 1 and 2 show the configuration of a directional coupler as an optical device according to the first embodiment.
  • this directional coupler has an area inside with a higher refractive index than the surroundings, and two optical waveguides, a first optical waveguide 11 and a second optical waveguide 21, in which light is locally confined in this area and light is allowed to propagate only in a specific direction, are formed on a substrate 1.
  • this directional coupler is divided into an input area A, a width shifting area B, a coupling area C, a width expansion area D, and an output area E in this order in the direction of light propagation as shown in FIG. 1, the first optical waveguide 11 and the second optical waveguide 21 are configured as follows in each area.
  • the first optical waveguide 11 and the second optical waveguide 21 are disposed at a sufficient interval of several times or more the wavelength of light.
  • the interval between the first optical waveguide 11 and the second optical waveguide 21 is changed from an interval of several times or more the wavelength of the propagating light in the input area A to be narrowed to about the size of the wavelength.
  • the length of the region is about 10 times the wavelength or more, so that the first optical waveguide 11 and the second optical waveguide 21 are bent without optical loss, and both the first optical waveguide 11 and the second optical waveguide 21 are bent by drawing a curve such as a combination of arcs, a combination of sine waves or cosine waves, or a cycloid curve or a clothoid curve.
  • the first optical waveguide 11 and the second optical waveguide 21 are arranged parallel and close to each other so that the interval is kept approximately constant at about the wavelength.
  • the interval between the first optical waveguide 11 and the second optical waveguide 21 is expanded to a sufficient interval of about the wavelength to several times the wavelength of light, in contrast to the width narrowing region B.
  • the width expansion region D is about 10 times the wavelength or more, so that both the first optical waveguide 11 and the second optical waveguide 21 are bent by drawing a curve such as a combination of arcs, a combination of sine waves or cosine waves, or a cycloid curve.
  • the first optical waveguide 11 and the second optical waveguide 21 are disposed at a sufficient interval of at least several times the wavelength of light.
  • This optical device constitutes a directional coupler in which the light of the first optical waveguide 11 and the second optical waveguide 21 are coupled in an optical coupling region C, which is the region where the first optical waveguide 11 and the second optical waveguide 21 are closest to each other.
  • the first optical waveguide 11 and the second optical waveguide 21 in the optical coupling region C have a substrate 1, a lower cladding layer 5 formed on the substrate 1, and core layers 11a and 21a, which are regions for confining light and are made of a material having a higher refractive index than the lower cladding layer 5 on the lower cladding layer 5. Furthermore, they have a grating structure 3 made of the same material as the core layer, in which protrusions (gratings) 31 are periodically and repeatedly arranged so as to be approximately perpendicular to the light propagation direction and to penetrate both the core layers 11a and 21a.
  • the core layers 11a and 21a and the protrusions 31 are surrounded by a surrounding cladding 6 made of a material having a lower refractive index than the material constituting the core layer, such as SiO 2 or SiN. That is, the grating structure 3 has a configuration in which protrusions 31 made of a first refractive index material, which is the same material as the core layer, and surrounding cladding 6 made of a second refractive index material having a refractive index lower than that of the first refractive index material, are repeatedly arranged at a constant period, and the entire waveguide has a waveguide structure with a grating.
  • the period ⁇ of the grating of the grating structure 3 is set so as to generally satisfy the following formula (1).
  • c 0 is the speed of light propagating in a vacuum
  • f is the frequency of light propagating through the optical device
  • n eff is the effective refractive index of the guided mode.
  • the effective refractive index is a parameter determined by the structure and material of the optical waveguide, and is defined as a value equivalent to the refractive index when the optical waveguide is assumed to be made of a material with a constant refractive index, based on the propagation speed of the guided mode, even if the optical waveguide has a complex structure.
  • the light 41 input to the directional coupler and the output lights 42 and 43 branched by the directional coupler are shown diagrammatically with arrows.
  • the x, y, and z axes are shown in the figure so that the correspondence of the directions in Figures 1 and 2 can be understood.
  • Figure 3 shows a schematic diagram of the dispersion relationship of light propagating through an optical waveguide with a grating.
  • the lower frequency side than the Bragg reflection region is the SWG region.
  • the optical waveguide with a grating shown in the prior art had the SWG region indicated by the dashed arrow in the figure as its operating point.
  • the higher frequency side than the Bragg reflection region is the radiation region, where the propagating light is radiated outside the waveguide and the power is attenuated.
  • the operating point of the optical device according to the first embodiment is the region indicated by the solid arrow in Figure 3.
  • the period ⁇ of the grating is set so that the operating frequency f falls between f_min and f_max shown in Figure 3, that is, so that equation (1) is satisfied.
  • the optical device according to the first embodiment is characterized by operating at a frequency that is in the radiation region and shows the same wave number as the SWG device shown in the prior art.
  • Figure 4 shows a schematic diagram of the relationship between light propagating in a directional coupler based on a normal optical waveguide and a directional coupler based on an optical waveguide with a grating.
  • the wave vector increases as the frequency of the propagating light increases, but in a structure based on an optical waveguide with a grating, the reciprocal lattice vector acts.
  • the reciprocal lattice vector acts to fold back the wave vector of the propagating light, and as a result, the kz component of the wave vector can be set to a length similar to that of a conventional SWG.
  • the kz component of the wave vector can be set to a length similar to that of a conventional SWG.
  • 5 to 7 show the results of calculations of the relationship between the length of the optical coupling region and the branching ratio of the optical power when light with a wavelength of 1.55 ⁇ m is incident on a normal directional coupler without a grating structure, a directional coupler with a grating of an SWG structure, and a directional coupler with a grating structure according to the first embodiment.
  • FIG. 5 shows the calculation results of a normal directional coupler without a grating structure as a comparative example.
  • the reason why the widths of the first optical waveguide 11 and the second optical waveguide 21 are different is that by making the widths different, it is possible to shorten the distance required for optical branching. This effect becomes noticeable when the width ratio is about 1.2 times.
  • the optimal ratio varies depending on the branching ratio to be designed. However, if the width ratio becomes too large, such as 2 times or more, the difference in effective refractive index between the respective waveguide modes of the first optical waveguide and the second optical waveguide becomes too large, and a coupling mode is not formed.
  • a normal directional coupler without a grating cannot achieve 50% power splitting no matter how the length is set, but by adding an SWG structure as in FIG. 6, it is possible to achieve approximately 50% power splitting at a length of around 6 ⁇ m to 8 ⁇ m. Also, in the configuration according to the first embodiment of FIG. 7, even with a grating with a period approximately 1.8 times longer than the SWG, it is possible to achieve approximately 50% power splitting at a length of around 6 ⁇ m to 8 ⁇ m, and it can be seen that characteristics equivalent to those of a conventional SWG structure are obtained.
  • a longer directional coupler length that achieves the same power splitting means that the manufacturing precision required for the directional coupler can be relaxed. At the same time, it also means that the optical length at which the desired characteristics are obtained is longer, which has the effect of expanding the operating wavelength band.
  • the shape, material, and positional relationship of the directional coupler do not need to be limited to those in the first embodiment.
  • the positions of the input side optical waveguide and the output side optical waveguide may be interchanged
  • the material of the substrate 1 may be other materials such as Si, GaAs, SiO 2 , SiN, LiNbO 3
  • the core layer does not need to be Si, but may be any material having a higher refractive index than the cladding layer, for example, SiO 2 doped with Ge for SiO 2 cladding.
  • the refractive index of the device is generally small, which is disadvantageous in that the device size becomes large, but the optical loss of the propagating light is small, which is advantageous in that a low-loss device can be realized.
  • Embodiment 2 is a modification of the first embodiment, and is characterized in that in the directional coupler shown in FIGS. 1 and 2, the period of the grating 3 generally satisfies the following formula (2).
  • c 0 is the speed of light propagating in a vacuum
  • f is the frequency of light propagating through the optical device
  • n eff is the effective refractive index of the guided mode
  • ⁇ is the period of the grating 3.
  • Figure 8 shows a calculation model for the FDTD method.
  • An optical waveguide with a grating of 0.22 ⁇ m in height is installed in the cladding from 10 ⁇ m to 100 ⁇ m, and a normal optical waveguide of the same height is used from 0 ⁇ m to 10 ⁇ m.
  • the refractive index n is 3.4 for the protrusion 31 of the grating structure, 1.6 for the surrounding cladding 6, and 3.4 for the optical waveguide.
  • Figure 10 shows the calculation results of the radiation loss in the emission region in Figure 3.
  • the period ⁇ is 0.36 ⁇ m to 0.38 ⁇ m ( ⁇ is 0.553 c 0 /(n eff ⁇ f) to 0.583 c 0 /(n eff ⁇ f))
  • ⁇ is 0.36 ⁇ m to 0.38 ⁇ m ( ⁇ is 0.553 c 0 /(n eff ⁇ f) to 0.583 c 0 /(n eff ⁇ f)
  • an upward arrow ( ⁇ ) indicates a positive electric field
  • a downward arrow ( ⁇ ) indicates a negative electric field, with the darker the line, the larger the absolute value.
  • Embodiment 3. 12 and 13 show the configuration of an optical device according to the third embodiment.
  • This optical device is an optical device in which the optical coupling region is a multi-mode interference (MMI) waveguide. As shown in the plan view of FIG. 12, this optical device has a region inside which the refractive index is higher than the surroundings, and two optical waveguides, a first optical waveguide 11 and a second optical waveguide 21, in which light is locally confined in the region and light is allowed to propagate only in a specific direction, are formed on a substrate 1. If this optical device is divided into regions in the light propagation direction, in the order of an input region A, a width adjustment region B, a coupling region C, a width expansion region D, and an output region E as shown in FIG.
  • MMI multi-mode interference
  • the first optical waveguide 11 and the second optical waveguide 21 in each region have the following configuration.
  • the first optical waveguide 11 and the second optical waveguide 21 are arranged at a sufficient interval of several times or more the wavelength of light.
  • the interval between the first optical waveguide 11 and the second optical waveguide 21 is changed from an interval of several times or more of the wavelength of the propagating light in the input region to be narrowed to about the wavelength size.
  • the length of the region is about 10 times or more of the wavelength so that the first optical waveguide 11 and the second optical waveguide 21 bend without optical loss, and both the first optical waveguide 11 and the second optical waveguide 21 are configured to bend by drawing a combination of circular arcs, a combination of sine waves or cosine waves, or a curve such as a cycloid curve or a clothoid curve.
  • a grating structure 30 is formed to configure an MMI section, and light is configured to be incident on this grating structure 30 from the first optical waveguide 11 and the second optical waveguide 21.
  • light from the grating structure 30 in the optical coupling region C is configured to be coupled again to the first optical waveguide 11 and the second optical waveguide 21 in the width expansion region D.
  • the width expansion region D the distance between the first optical waveguide 11 and the second optical waveguide 21 is expanded from the wavelength, which is the distance on the optical coupling region C side, to a sufficient distance of several times the wavelength of light, in contrast to the width adjustment region B.
  • the width expansion region D is configured to have a length of about 10 times the wavelength or more, and both the first optical waveguide 11 and the second optical waveguide 21 are bent by drawing a curve such as a combination of circular arcs, a combination of sine waves or cosine waves, or a cycloid curve.
  • the first optical waveguide 11 and the second optical waveguide 21 are disposed at a sufficient distance of several times the wavelength of light or more.
  • the MMI portion of the optical coupling region C includes a substrate 1, a lower cladding layer 5 formed on the substrate 1, a grating structure 30 made of a material having a higher refractive index than the lower cladding layer 5 and having gratings 33 arranged periodically and repeatedly so as to be approximately perpendicular to the direction of light propagation, and a surrounding cladding 6 made of a material such as SiO 2 or SiN having a lower refractive index than the material constituting the core layer arranged so as to surround the grating 33.
  • the period of the grating 33 is set to approximately satisfy the following formula (3) (the same as formula (1) in the first embodiment).
  • the width of the grating structure 30 in the x direction i.e., the direction perpendicular to the direction of light propagation and parallel to the substrate 1, needs to be three times the wavelength of light or more.
  • c0 is the speed of light propagating in a vacuum
  • f is the frequency of light propagating through the optical device
  • neff is the effective refractive index of the waveguide mode
  • ⁇ is the period of the grating 33.
  • arrows are used to diagrammatically indicate light 41 input to the directional coupler of this embodiment, and output lights 42 and 43 branched by the directional coupler.
  • x, y, and z axes are indicated in the figure.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un dispositif optique comprenant un premier guide d'ondes optique (11) et un second guide d'ondes (21) disposés côte à côte sur un substrat (1), le dispositif optique ayant une région de couplage optique (C) dans laquelle l'intervalle entre le premier guide d'ondes optique (11) et le second guide d'ondes (21) est plus étroit que celui dans une autre région de telle sorte que la lumière est couplée entre le premier guide d'ondes optique (11) et le second guide d'ondes (21), dans la région de couplage optique (C), le dispositif optique ayant une structure de réseau (3) dans laquelle sont disposés en alternance à un cycle Λ dans la direction de propagation de lumière, un premier matériau à indice de réfraction (31) et un second matériau à indice de réfraction (6) ayant un indice de réfraction inférieur à celui du premier matériau à indice de réfraction (31), dans la périphérie du premier guide d'ondes optique (11) et du second guide d'ondes (21), et lorsque la vitesse de la lumière dans un vide est c0, la fréquence de la lumière est f, et l'indice de réfraction effectif correspondant au mode de guide d'ondes dans la région de couplage optique (C) est neff, le cycle Λ est amené à satisfaire à la formule 11c0/(20neff･f) ≤ Λ ≤ 3c0/(4neff･f).
PCT/JP2023/025251 2023-07-07 2023-07-07 Dispositif optique Pending WO2025013119A1 (fr)

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PCT/JP2023/025251 WO2025013119A1 (fr) 2023-07-07 2023-07-07 Dispositif optique

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Citations (5)

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Publication number Priority date Publication date Assignee Title
WO2005085921A1 (fr) * 2004-03-03 2005-09-15 Japan Science And Technology Agency Coupleur de guide d’onde de defaut de couplage de cristal photonique et systeme de cristal photonique
JP2015121626A (ja) * 2013-12-20 2015-07-02 Kddi株式会社 モード変換装置、モード多重装置、モード分離装置、光合波装置および分波装置
CN106094107A (zh) * 2016-08-22 2016-11-09 北京大学 一种偏振分束器
JP2021179484A (ja) * 2020-05-12 2021-11-18 沖電気工業株式会社 光波長フィルタ
JP7205678B1 (ja) * 2022-06-16 2023-01-17 三菱電機株式会社 方向性結合器及びその製造方法

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WO2005085921A1 (fr) * 2004-03-03 2005-09-15 Japan Science And Technology Agency Coupleur de guide d’onde de defaut de couplage de cristal photonique et systeme de cristal photonique
JP2015121626A (ja) * 2013-12-20 2015-07-02 Kddi株式会社 モード変換装置、モード多重装置、モード分離装置、光合波装置および分波装置
CN106094107A (zh) * 2016-08-22 2016-11-09 北京大学 一种偏振分束器
JP2021179484A (ja) * 2020-05-12 2021-11-18 沖電気工業株式会社 光波長フィルタ
JP7205678B1 (ja) * 2022-06-16 2023-01-17 三菱電機株式会社 方向性結合器及びその製造方法

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Title
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TAGLIETTI BRUNO; CHEN LAWRENCE R.: "Subwavelength Grating Waveguide-Based 1310/1550 nm Diplexer", 2022 IEEE PHOTONICS CONFERENCE (IPC), IEEE, 13 November 2022 (2022-11-13), pages 1 - 2, XP034247495, DOI: 10.1109/IPC53466.2022.9975638 *
WANG ZHIBIN, ZHAO MENGXIONG, YIN SHAOJIE, JIA MENGFEI, HOU XUWEI: "Silicon-based subwavelength grating polarization beam splitter with asymmetric directional coupler", LASER PHYSICS, MOSCOW, RU, vol. 33, no. 8, 1 August 2023 (2023-08-01), RU , pages 086204, XP093261242, ISSN: 1054-660X, DOI: 10.1088/1555-6611/acdbc4 *
YE CHAOCHAO; DAI DAOXIN: "Ultra-Compact Broadband 2 × 2 3 dB Power Splitter Using a Subwavelength-Grating-Assisted Asymmetric Directional Coupler", JOURNAL OF LIGHTWAVE TECHNOLOGY, IEEE, USA, vol. 38, no. 8, 13 February 2020 (2020-02-13), USA, pages 2370 - 2375, XP011782283, ISSN: 0733-8724, DOI: 10.1109/JLT.2020.2973663 *

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