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WO2025087071A1 - Laser light path apparatus and laser light path system - Google Patents

Laser light path apparatus and laser light path system Download PDF

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Publication number
WO2025087071A1
WO2025087071A1 PCT/CN2024/124298 CN2024124298W WO2025087071A1 WO 2025087071 A1 WO2025087071 A1 WO 2025087071A1 CN 2024124298 W CN2024124298 W CN 2024124298W WO 2025087071 A1 WO2025087071 A1 WO 2025087071A1
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WIPO (PCT)
Prior art keywords
light
optical path
laser optical
emitted
laser
Prior art date
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Application number
PCT/CN2024/124298
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French (fr)
Chinese (zh)
Inventor
颜志焕
苏宇航
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Lead Laser Intelligent Equipment Co Ltd
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Wuxi Lead Laser Intelligent Equipment Co Ltd
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Publication of WO2025087071A1 publication Critical patent/WO2025087071A1/en
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting

Definitions

  • the present invention relates to the field of laser cutting technology, and in particular to a laser optical path device and a laser optical path system.
  • Laser cutting is an important way to process products and is widely used in various fields. For example, in the preparation process of solar cells, it is necessary to scribe the solar cell substrate multiple times. Each time the solar cell substrate is laser-scribed, multiple laser beams need to be shot in parallel onto the solar cell substrate. In order to achieve the purpose of shooting multiple laser beams each time, a laser optical path device is required.
  • the traditional laser optical path device includes a laser, a beam splitter and a reflector.
  • the laser emits laser light to the beam splitter for beam splitting.
  • the light split by the beam splitter is reflected by multiple reflectors to form two laser beams.
  • multiple laser optical path devices need to be set up, resulting in a complex structure.
  • a laser optical path device comprising:
  • the light splitting mechanism comprises a first light splitter and a second light splitter, wherein the first light splitter is located on the propagation path of the emission light emitted by the laser, and the transmitted light or reflected light of the first light splitter can be emitted to the second light splitter.
  • the light splitting mechanism comprises at least two of the second light splitters, the light splitter located upstream The transmitted light of the second beam splitter can be directed to the second beam splitter located downstream;
  • the beam splitters of the beam splitting mechanism are parallel to each other, so that the reflected light emitted by all the beam splitters is emitted in parallel along a first direction to form at least two beams of output light for marking lines on the product, or the transmitted light of the first beam splitter and the reflected light of all the second beam splitters are emitted in parallel along the first direction to form at least two beams of output light for marking lines on the product.
  • the distance between each two adjacent beam splitters is equal, so that the distance between each two adjacent beams of the emergent light formed by the beam splitting is equal.
  • all the outgoing lights formed by light splitting by the laser optical path device have equal powers.
  • the laser optical path device further includes a half-wave plate, and each of the beam splitters is provided with a corresponding half-wave plate, and the light intensity ratio of the transmitted light and the reflected light formed by the corresponding beam splitter is adjusted by the half-wave plate.
  • the light splitting mechanism includes 6 light splitters.
  • the laser optical path device further includes a reflector group, and the number of the reflector groups is equal to the number of the output lights and corresponds one to one;
  • Each group of the reflector groups includes an even number of first reflectors, and the first reflectors are arranged on the propagation path of the corresponding outgoing light to reflect the outgoing light, and all the outgoing light is emitted in parallel along the first direction after being reflected by the corresponding reflector group.
  • the spacing between the first reflectors located at the most downstream of each two adjacent groups of reflectors is equal, so that the spacing between the light beams formed by each two adjacent beams of the outgoing light after being reflected by the reflector groups is equal.
  • the reflector group includes two first reflectors, and in the first direction, one of the first reflectors in the reflector group is aligned with the splitter that emits the outgoing light.
  • the optical mirrors are opposite to each other, and another first reflector in the reflector group is offset from the beam splitter for emitting the outgoing light.
  • the laser optical path device further comprises a beam expander, and the beam expander is located on the propagation path of the emitted light, so as to expand the emitted light and direct it toward the beam splitting mechanism.
  • the laser optical path device further includes a power detection element, and the power detection element is located on the propagation path of the transmitted light of the second beam splitter at the most downstream so as to be able to detect the power of the transmitted light.
  • a laser optical path system comprises at least two laser optical path devices as described above, wherein the outgoing lights formed by the light splitting of all the laser optical path devices are parallel to each other.
  • the spacing between each two adjacent beam splitters is equal, so that the beam splitters The intervals between each two adjacent beams of the emitted light are equal.
  • the laser optical path system includes two laser optical path devices, the laser optical path system has a central axis, and the two laser optical path devices are symmetrically arranged on both sides of the central axis.
  • the laser optical path system further includes an adjustment mechanism, the beam splitting mechanism is connected to the adjustment mechanism, and the adjustment mechanism can adjust the distance between each beam splitter.
  • the laser optical path device further comprises a power detection element, and the power detection element is located on the propagation path of the transmitted light of the second beam splitter at the most downstream so as to be able to detect the power of the transmitted light;
  • the power detection element is located at one end of the laser light path device close to the adjacent laser light path device;
  • the laser optical path device also includes a reflector group, the number of which is equal to the number of the outgoing lights and corresponds one to one; each group of the reflector groups includes an even number of first reflectors, and the first reflectors are arranged on the propagation path of the corresponding outgoing light to reflect the outgoing light, and all the outgoing lights are reflected by the corresponding reflector group and emitted in parallel along the first direction.
  • the above-mentioned laser optical path device and laser optical path system can be realized by setting a corresponding number of beam splitters when at least two mutually parallel outgoing light beams need to be emitted. There is no need to copy multiple laser optical path devices when more than two laser beams need to be formed as in the prior art.
  • the structure is simple and compact.
  • FIG1 is a structural diagram of a laser optical path device provided in one embodiment of the present application.
  • FIG3 is an axonometric diagram of a laser optical path system provided by another embodiment of the present application.
  • FIG. 4 is a top view of the laser optical path system shown in FIG. 3 .
  • first and second are used only for descriptive purposes and should not be understood as indicating or implying
  • the term “a first feature” or “a second feature” may indicate relative importance or implicitly indicate the number of the indicated technical features.
  • a feature defined as “first” or “second” may explicitly or implicitly include at least one of the features.
  • "a plurality of” means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
  • the terms “installed”, “connected”, “connected”, “fixed” and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • installed can be a fixed connection, a detachable connection, or an integral connection
  • it can be a mechanical connection or an electrical connection
  • it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium.
  • a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature.
  • a first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
  • the laser optical path device 100 includes a laser 10 and a beam splitter 20.
  • the laser 10 can emit emission light.
  • the beam splitter 20 can split the emission light emitted by the laser 10 into at least two outgoing light beams.
  • the outgoing light beams are used to mark lines on products.
  • the spectroscopic mechanism 20 includes a first spectroscope 211 and at least one second spectroscope 212.
  • the spectroscope is used to split the incident light into two beams of transmission and reflection having a certain light intensity ratio.
  • the spectroscope is usually used at an angle, and it can conveniently separate the incident light into two parts, namely, the reflected light and the transmitted light.
  • the first spectroscope 211 is located on the propagation path of the emitted light emitted by the laser 10, that is, the emitted light of the laser 10 forms the incident light incident to the first spectroscope 211.
  • the transmitted light or reflected light of the first spectroscope 211 can be directed to the second spectroscope 212.
  • the transmitted light of the first spectroscope 211 When the transmitted light of the first spectroscope 211 is directed to the second spectroscope 212, the transmitted light of the first spectroscope 211 forms the incident light incident to the second spectroscope 212.
  • the reflected light of the first spectroscope 211 is directed to the second spectroscope 212, the reflected light of the first spectroscope 211 forms the incident light incident to the second spectroscope 212.
  • the spectroscopic mechanism 20 includes at least two second spectroscopes 212 .
  • the transmitted light of the upstream second spectroscope 212 can be directed to the downstream second spectroscope 212 . At this time, the transmitted light of the upstream second spectroscope 212 forms the incident light incident on the downstream second spectroscope 212 .
  • the beam splitters of the beam splitting mechanism 20 are parallel to each other, so that the reflected light emitted by all the beam splitters is emitted in parallel along the first direction to form at least two beams of outgoing light, or the transmitted light of the first beam splitter 211 and the reflected light of all the second beam splitters 212 are emitted in parallel along the first direction to form at least two beams of outgoing light.
  • the transmitted light of the first beam splitter 211 is directed to the second beam splitter 212, and the transmitted light of the second beam splitter 212 located upstream can be directed to the second beam splitter 212 located downstream.
  • the reflected light emitted by the first beam splitter 211 is parallel to the reflected light emitted by the second beam splitter 212, so that the light splitting mechanism 20 splits the emitted light into at least two beams of outgoing light extending along the first direction and parallel to each other.
  • the reflected light of the first beam splitter 211 is emitted to the second beam splitter 212, and the transmitted light of the second beam splitter 212 located upstream can be emitted to the second beam splitter 212 located downstream.
  • the transmitted light of the first beam splitter 211 is parallel to the reflected light of all the second beam splitters 212, so that the light splitting mechanism 20 splits the emitted light into at least two beams of outgoing light extending along the first direction and parallel to each other.
  • the laser optical path device 100 provided in the embodiment of the present application can be realized by setting a corresponding number of beam splitters when at least two mutually parallel outgoing light beams need to be emitted. There is no need to replicate multiple laser optical path devices 100 when more than two laser beams need to be formed as in the prior art.
  • the structure is simple and compact.
  • the light splitting mechanism 20 includes 6 beam splitters, and the laser light path device 100 can split the emitted light into 6 outgoing light beams.
  • the light splitting mechanism 20 can also include 2, 3, 4, 5 or more than 6 beam splitters, which is not limited here.
  • the beam splitters included in the laser optical path device 100 are evenly spaced and arranged in parallel, that is, in the second direction, the spacing between each two adjacent beam splitters is equal, so that the spacing of the output light formed by the split light in the second direction is equal (the spacing between each two adjacent output light beams in the second direction is equal), so as to facilitate equal-spaced cutting or scribing.
  • the first direction intersects the second direction, specifically, the first direction is perpendicular to the second direction.
  • the powers of all the outgoing lights formed by the laser optical path device 100 are equal, so as to ensure that when all the outgoing lights hit the product for marking, the depth and width of the marking are uniform, thereby ensuring the consistency of the marking. Since the sum of the intensities of the transmitted light and the reflected light divided by the beam splitter is equal to the intensity of the incident light incident thereon. In this way, by adjusting the light intensity ratio of the transmitted light and the reflected light formed by the beam splitting of each beam splitter, the intensity of the outgoing light formed by the laser optical path device 100 can be made equal, that is, the power of the outgoing light formed by the laser optical path device 100 (the intensity of light is equal to the power of light per unit area) is equal.
  • the laser optical path device 100 further includes a half-wave plate.
  • Each beam splitter is provided with a corresponding half-wave plate, and the light intensity ratio of the transmitted light and the reflected light formed by the beam splitting of the corresponding beam splitter is adjusted by the half-wave plate.
  • the laser optical path device 100 further includes a power detection element 30, which is located on the propagation path of the transmitted light of the second beam splitter 212 at the most downstream. Since the power detection element 30 can detect the power of the transmitted light of the second beam splitter 212 at the most downstream, the power of the outgoing light can be obtained through the power of the transmitted light of the second beam splitter 212 at the most downstream, thereby controlling the power of the outgoing light. Generally, the power of the transmitted light of the second beam splitter 212 at the most downstream is set equal to the power of all the outgoing lights.
  • the power detection element 30 can detect the power of the transmitted light of the second beam splitter 212 at the most downstream, the power of the outgoing light can be obtained through the power of the transmitted light of the second beam splitter 212 at the most downstream, thereby controlling the power of the outgoing light.
  • the power detection element 30 can not only detect the power of the transmitted light of the second beam splitter 212 at the most downstream, but also play a certain light blocking role to prevent the transmitted light of the second beam splitter 212 at the most downstream from shining on other components and affecting the components.
  • the laser optical path device 100 further includes at least one second reflector 40, which is located on the propagation path of the emitted light, and is used to reflect the emitted light to the light splitting mechanism 20.
  • the arrangement of the laser 10 is not limited by the position, that is, when the emitted light emitted by the laser 10 cannot be directly emitted to the light splitting mechanism 20, the second reflector 40 can receive the emitted light and reflect it to the light splitting mechanism 20.
  • the laser optical path device 100 includes three second reflectors 40.
  • the laser 10 emits emission light along a first direction, and the emission light is emitted along a second direction after being reflected by the first second reflector 40, and then emitted along a third direction after being reflected by the second second reflector 40, and finally emitted along a second direction after being reflected by the third second reflector 40, and then emitted toward the light splitting mechanism 20, which splits the emission light into at least two outgoing light beams and emits them along the first direction.
  • each outgoing light beam is emitted along the first direction again, so that the outgoing light beam is parallel to the initial emission direction of the emission light beam.
  • the number of second reflectors 40 included in the laser optical path device 100 there is no limitation on the number of second reflectors 40 included in the laser optical path device 100.
  • the number of second reflectors 40 can be one, two or more than three. Depending on the number of second reflectors 40, the number of times the emitted light changes direction is different.
  • the laser optical path device 100 further includes a beam expander 50, which is located on the propagation path of the emitted light and is used to expand the emitted light and then emit it toward the light splitting mechanism 20.
  • the arrangement of the beam expander 50 can expand the diameter of the laser beam and reduce the divergence angle of the beam.
  • the beam expander 50 may be located before the emitted light is emitted to the second reflector 40 , or may be located on the path of the emitted light reflected by the second reflector 40 , which is not limited here.
  • the laser optical path device 100 also includes a reflector group 60, the number of which is equal to the number of outgoing lights and corresponds one to one.
  • Each reflector group 60 includes an even number of first reflectors 61, which are arranged on the propagation path of the outgoing light corresponding thereto to reflect the outgoing light, and all the outgoing lights are reflected by the corresponding reflector group 60 and then emitted in parallel along the first direction.
  • the arrangement of the reflector group 60 can extend the path of the outgoing light in the first direction, and make the light beam as collimated as possible when the emission distance is long.
  • each reflector group 60 includes two first reflectors 61.
  • one of the first reflectors 61 in the reflector group 60 is opposite to the beam splitter that emits the beam of outgoing light, and the other first reflector 61 in the reflector group 60 is offset from the beam splitter that emits the beam of outgoing light.
  • each reflector group 60 may also include 4 first reflectors or 6 first reflectors 61 .
  • the laser optical path device 100 further includes light blocks 70, and the number of light blocks 70 is equal to the number of outgoing lights and corresponds one to one.
  • the light blocks 70 are located on the propagation path of the outgoing light to block the outgoing light from being emitted to the product. By providing the light blocks 70, it is possible to control whether the outgoing light is emitted, thereby facilitating the control of the number of lines on the product.
  • another embodiment of the present application further provides a laser optical path system 1000, which includes at least two laser optical path devices 100, and the outgoing lights formed by the light splitting of all the laser optical path devices 100 are parallel to each other.
  • This arrangement increases the number of outgoing lights, and more lines can be drawn on the product each time, thereby improving the drawing efficiency.
  • the spacing between each two adjacent beam splitters is equal, so that the spacing between each two adjacent beams of emitted light formed by the beam splitting is equal, thereby facilitating equal-spaced scribing or cutting.
  • the setting of the reflector group 60 can not only extend the path of the emitted light in the first direction.
  • the emitted light emitted by the beam splitter does not directly emit from the laser light path device 100 along the first direction, but is emitted from the laser light path device 100 along the first direction after being changed in direction by the reflector group 60. It is precisely because of the setting of the reflector group 60 that a setting space for setting the power detection element 30 can be reserved at the position where the two laser light path devices 100 are close to each other, so as to facilitate the setting of the power detection element 30.
  • the laser optical path system 1000 includes two laser optical path devices 100.
  • the laser optical path system 1000 has a central axis.
  • the two laser optical path devices 100 are symmetrically arranged on both sides of the central axis.
  • the spatial arrangement of the laser light path system 1000 can be optimized, making the layout of the laser light path system 1000 more reasonable, thereby reducing the occupied area.
  • each laser optical path device 100 includes 6 beam splitters, and the laser optical path device 100 can split the emitted light into 6 outgoing light beams, and the laser optical path system 1000 can synchronously emit 12 outgoing light beams. In this way, when all the light beams are not blocked by the light blocker 70, the laser optical path system 1000 can draw 12 lines on the product each time.
  • the laser optical path system 1000 may also include other numbers of laser optical path devices 100, such as 3, 4, or more than 4. Similarly, when the laser optical path system 1000 includes other numbers of laser optical path devices 100, all laser optical path devices 100 may also be symmetrically arranged on both sides of the central axis.
  • the laser optical path system 1000 further includes an adjustment mechanism, and the light splitting mechanism 20 is connected to the adjustment mechanism, and the adjustment mechanism can adjust the spacing between each light splitter.
  • the adjustment mechanism can adjust the spacing between each light splitter at equal intervals. In this way, the adjustment mechanism can adjust the spacing between each light splitter so that the spacing between each emitted light changes, thereby changing the spacing between the lines on the product, thereby meeting the requirements for line markings with different spacings.
  • the adjustment mechanism includes a driving member and a transmission assembly
  • the spectroscope is connected to the driving member through the transmission assembly
  • the driving member can drive the spectroscope to move through the transmission assembly to change the spacing between the spectroscopes.
  • the driving member is a motor. It is conceivable that in some other embodiments, the type of the driving member is not limited, such as the driving member can also be a cylinder, etc.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)

Abstract

A laser light path apparatus, comprising: a laser device (10); and a light splitting mechanism (20) comprising a first beam splitter (211) and second beam splitters (212). The first beam splitter is located on a propagation path of emission light emitted by the laser device; transmission light or reflected light of the first beam splitter can be emitted to the second beam splitters; transmission light of the second beam splitters located upstream can be emitted to the second beam splitters located downstream; and the beam splitters of the light splitting mechanism are parallel to one another, such that reflected light emitted by all the beam splitters is emitted in parallel in a first direction to form at least two beams of emergent light, or transmission light of the first beam splitter and reflected light of all the second beam splitters are emitted in parallel in the first direction to form at least two beams of emergent light. Further provided is a laser light path system. At least two beams of parallel emergent light can be emitted simply by providing a corresponding number of beam splitters, without using a plurality of laser light path apparatuses, thereby achieving a simple and compact structure.

Description

激光光路装置及激光光路系统Laser optical path device and laser optical path system 技术领域Technical Field

本发明涉及激光切割技术领域,特别是涉及一种激光光路装置及激光光路系统。The present invention relates to the field of laser cutting technology, and in particular to a laser optical path device and a laser optical path system.

背景技术Background Art

激光切割作为加工产品的一种重要方式,在各个领域中应用广泛。如在太阳能电池的制备过程中,需要对太阳能电池基板进行多次划线。在每次对太阳能电池基板进行激光划线时,需要平行打出多束激光至太阳能电池基板上。为了满足每次打出多束激光的目的,需要用到激光光路装置。Laser cutting is an important way to process products and is widely used in various fields. For example, in the preparation process of solar cells, it is necessary to scribe the solar cell substrate multiple times. Each time the solar cell substrate is laser-scribed, multiple laser beams need to be shot in parallel onto the solar cell substrate. In order to achieve the purpose of shooting multiple laser beams each time, a laser optical path device is required.

传统的激光光路装置包括激光器、分光镜及反射镜,激光器打出激光至分光镜分光,分光镜分光后的光经过多个反射镜反射后形成两束激光。如此,当需要形成多于两束激光时将需要设置多个上述激光光路装置,导致结构复杂。The traditional laser optical path device includes a laser, a beam splitter and a reflector. The laser emits laser light to the beam splitter for beam splitting. The light split by the beam splitter is reflected by multiple reflectors to form two laser beams. Thus, when more than two laser beams need to be formed, multiple laser optical path devices need to be set up, resulting in a complex structure.

发明内容Summary of the invention

基于此,有必要针对传统的激光光路装置结构复杂的问题,提供一种结构简单的激光光路装置及激光光路系统。Based on this, it is necessary to provide a laser optical path device and a laser optical path system with a simple structure in order to solve the problem that the traditional laser optical path device has a complex structure.

一种激光光路装置,包括:A laser optical path device, comprising:

激光器;Lasers;

分光机构,包括第一分光镜及第二分光镜,所述第一分光镜位于所述激光器所发射的发射光的传播路径上,所述第一分光镜的透射光或反射光能够射向所述第二分光镜,所述分光机构包括至少两个所述第二分光镜时,位于上游的 所述第二分光镜的透射光能够射向位于下游的所述第二分光镜;The light splitting mechanism comprises a first light splitter and a second light splitter, wherein the first light splitter is located on the propagation path of the emission light emitted by the laser, and the transmitted light or reflected light of the first light splitter can be emitted to the second light splitter. When the light splitting mechanism comprises at least two of the second light splitters, the light splitter located upstream The transmitted light of the second beam splitter can be directed to the second beam splitter located downstream;

所述分光机构的各分光镜相互平行,使得全部所述分光镜射出的反射光均沿第一方向平行射出,以形成至少两束用于在产品上划线的出射光,或者使得所述第一分光镜的透射光与全部所述第二分光镜的反射光均沿第一方向平行射出,以形成至少两束用于在产品上划线的出射光。The beam splitters of the beam splitting mechanism are parallel to each other, so that the reflected light emitted by all the beam splitters is emitted in parallel along a first direction to form at least two beams of output light for marking lines on the product, or the transmitted light of the first beam splitter and the reflected light of all the second beam splitters are emitted in parallel along the first direction to form at least two beams of output light for marking lines on the product.

在其中一个实施例中,每相邻两个所述分光镜之间的间距相等,使得分光所形成的每相邻两束所述出射光之间的间距相等。In one embodiment, the distance between each two adjacent beam splitters is equal, so that the distance between each two adjacent beams of the emergent light formed by the beam splitting is equal.

在其中一个实施例中,所述激光光路装置所分光形成的所有出射光的功率相等。In one embodiment, all the outgoing lights formed by light splitting by the laser optical path device have equal powers.

在其中一个实施例中,所述激光光路装置还包括半波片,每个所述分光镜对应设有一个所述半波片,通过所述半波片调节相对应的所述分光镜分光形成的透射光和反射光的光强比。In one of the embodiments, the laser optical path device further includes a half-wave plate, and each of the beam splitters is provided with a corresponding half-wave plate, and the light intensity ratio of the transmitted light and the reflected light formed by the corresponding beam splitter is adjusted by the half-wave plate.

在其中一个实施例中,所述分光机构包括6个分光镜。In one embodiment, the light splitting mechanism includes 6 light splitters.

在其中一个实施例中,所述激光光路装置还包括反射镜组,所述反射镜组的数量与所述出射光的数量相等且一一对应;In one embodiment, the laser optical path device further includes a reflector group, and the number of the reflector groups is equal to the number of the output lights and corresponds one to one;

每组所述反射镜组包括偶数个第一反射镜,所述第一反射镜设于与其相对应的所述出射光的传播路径上以反射所述出射光,全部所述出射光通过相对应的所述反射镜组反射后均沿所述第一方向平行射出。Each group of the reflector groups includes an even number of first reflectors, and the first reflectors are arranged on the propagation path of the corresponding outgoing light to reflect the outgoing light, and all the outgoing light is emitted in parallel along the first direction after being reflected by the corresponding reflector group.

在其中一个实施例中,每相邻两组所述反射镜组位于最下游的所述第一反射镜之间的间距相等,使得每相邻两束所述出射光经所述反射镜组反射后所形成的光束之间的间距相等。In one embodiment, the spacing between the first reflectors located at the most downstream of each two adjacent groups of reflectors is equal, so that the spacing between the light beams formed by each two adjacent beams of the outgoing light after being reflected by the reflector groups is equal.

在其中一个实施例中,所述反射镜组包括两个所述第一反射镜,在所述第一方向上,所述反射镜组中的一个所述第一反射镜与射出所述出射光的所述分 光镜相对,所述反射镜组中的另一个所述第一反射镜与射出所述出射光的所述分光镜错位。In one embodiment, the reflector group includes two first reflectors, and in the first direction, one of the first reflectors in the reflector group is aligned with the splitter that emits the outgoing light. The optical mirrors are opposite to each other, and another first reflector in the reflector group is offset from the beam splitter for emitting the outgoing light.

在其中一个实施例中,所述激光光路装置还包括挡光器,所述挡光器的数量与所述出射光的数量相等且一一对应;In one embodiment, the laser light path device further includes light blocks, and the number of the light blocks is equal to the number of the emitted lights and corresponds one to one;

所述挡光器位于所述出射光的传播路径上,以能够阻挡所述出射光射出。The light blocker is located on a propagation path of the outgoing light so as to block the outgoing light from being emitted.

在其中一个实施例中,所述激光光路装置还包括至少一个第二反射镜,所述第二反射镜位于所述发射光的传播路径上,以用于反射所述发射光至所述分光机构。In one of the embodiments, the laser optical path device further includes at least one second reflector, and the second reflector is located on the propagation path of the emitted light, so as to reflect the emitted light to the light splitting mechanism.

在其中一个实施例中,所述激光光路装置包括三个第二反射镜,所述激光器沿所述第一方向发出发射光,发射光射向第一个所述第二反射镜被反射后沿第二方向射出,发射光再射向第二个所述第二反射镜被反射后沿第三方向射出,发射光再射向第三个所述第二反射镜被反射后再沿所述第二方向射向所述分光机构,所述分光机构将发射光分为至少两束出射光后沿所述第一方向射出;In one embodiment, the laser optical path device includes three second reflectors, the laser emits emission light along the first direction, the emission light is emitted to the first second reflector and then is reflected and then emitted along the second direction, the emission light is then emitted to the second second reflector and then is reflected and then emitted along the third direction, the emission light is then emitted to the third second reflector and then is reflected and then emitted to the light splitting mechanism along the second direction, the light splitting mechanism splits the emission light into at least two outgoing light beams and then emits them along the first direction;

所述第一方向、所述第二方向及所述第三方向两两相交。The first direction, the second direction and the third direction intersect each other.

在其中一个实施例中,所述激光光路装置还包括扩束镜,所述扩束镜位于所述发射光的传播路径上,以用于所述发射光扩束后射向所述分光机构。In one of the embodiments, the laser optical path device further comprises a beam expander, and the beam expander is located on the propagation path of the emitted light, so as to expand the emitted light and direct it toward the beam splitting mechanism.

在其中一个实施例中,所述分光镜为偏振分光棱镜。In one embodiment, the beam splitter is a polarization beam splitter prism.

在其中一个实施例中,所述激光光路装置还包括功率检测件,所述功率检测件位于最下游的所述第二分光镜的所述透射光的传播路径上,以能够检测所述透射光的功率。In one of the embodiments, the laser optical path device further includes a power detection element, and the power detection element is located on the propagation path of the transmitted light of the second beam splitter at the most downstream so as to be able to detect the power of the transmitted light.

一种激光光路系统,所述激光光路系统包括至少两个如上述的激光光路装置,全部所述激光光路装置分光形成的所述出射光相互平行。A laser optical path system comprises at least two laser optical path devices as described above, wherein the outgoing lights formed by the light splitting of all the laser optical path devices are parallel to each other.

在其中一个实施例中,每相邻两个所述分光镜之间的间距相等,使得分光 所形成的每相邻两束所述出射光之间的间距相等。In one embodiment, the spacing between each two adjacent beam splitters is equal, so that the beam splitters The intervals between each two adjacent beams of the emitted light are equal.

在其中一个实施例中,所述激光光路系统包括两个所述激光光路装置,所述激光光路系统具有中心轴线,两个所述激光光路装置对称设于所述中心轴线的两侧。In one of the embodiments, the laser optical path system includes two laser optical path devices, the laser optical path system has a central axis, and the two laser optical path devices are symmetrically arranged on both sides of the central axis.

在其中一个实施例中,所述激光光路系统还包括调节机构,所述分光机构与所述调节机构相连,所述调节机构能够调节各所述分光镜之间的间距。In one embodiment, the laser optical path system further includes an adjustment mechanism, the beam splitting mechanism is connected to the adjustment mechanism, and the adjustment mechanism can adjust the distance between each beam splitter.

在其中一个实施例中,所述调节机构包括驱动件及传动组件,所述分光镜通过所述传动组件与所述驱动件相连,所述驱动件能够通过所述传动组件带动所述分光镜运动,以改变各所述分光镜之间的间距。In one embodiment, the adjustment mechanism includes a driving member and a transmission assembly, the beam splitter is connected to the driving member via the transmission assembly, and the driving member can drive the beam splitter to move via the transmission assembly to change the spacing between the beam splitters.

在其中一个实施例中,所述激光光路装置还包括功率检测件,所述功率检测件位于最下游的所述第二分光镜的所述透射光的传播路径上,以能够检测所述透射光的功率;In one embodiment, the laser optical path device further comprises a power detection element, and the power detection element is located on the propagation path of the transmitted light of the second beam splitter at the most downstream so as to be able to detect the power of the transmitted light;

所述功率检测件位于所述激光光路装置靠近与其相邻的所述激光光路装置的一端;The power detection element is located at one end of the laser light path device close to the adjacent laser light path device;

所述激光光路装置还包括反射镜组,所述反射镜组的数量与所述出射光的数量相等且一一对应;每组所述反射镜组包括偶数个第一反射镜,所述第一反射镜设于与其相对应的所述出射光的传播路径上以反射所述出射光,全部所述出射光通过相对应的所述反射镜组反射后均沿所述第一方向平行射出。The laser optical path device also includes a reflector group, the number of which is equal to the number of the outgoing lights and corresponds one to one; each group of the reflector groups includes an even number of first reflectors, and the first reflectors are arranged on the propagation path of the corresponding outgoing light to reflect the outgoing light, and all the outgoing lights are reflected by the corresponding reflector group and emitted in parallel along the first direction.

上述激光光路装置及激光光路系统,当需要射出至少两束相互平行的出射光时,设置相应数量的分光镜即可实现,不需要像现有技术中那样,当需要形成多于两束激光时要复制多个激光光路装置,结构简单且紧凑。The above-mentioned laser optical path device and laser optical path system can be realized by setting a corresponding number of beam splitters when at least two mutually parallel outgoing light beams need to be emitted. There is no need to copy multiple laser optical path devices when more than two laser beams need to be formed as in the prior art. The structure is simple and compact.

附图说明 BRIEF DESCRIPTION OF THE DRAWINGS

图1为本申请一实施例提供的激光光路装置的结构图;FIG1 is a structural diagram of a laser optical path device provided in one embodiment of the present application;

图2为本申请一实施例提供的激光光路系统的光路图;FIG2 is an optical path diagram of a laser optical path system provided in one embodiment of the present application;

图3为本申请另一实施例提供的激光光路系统的轴测图;FIG3 is an axonometric diagram of a laser optical path system provided by another embodiment of the present application;

图4为图3中所示的激光光路系统的俯视图。FIG. 4 is a top view of the laser optical path system shown in FIG. 3 .

附图标记说明:Description of reference numerals:

1000、激光光路系统;100、激光光路装置;10、激光器;20、分光机构;211、第一分光镜;212、第二分光镜;30、功率检测件;40、第二反射镜;50、扩束镜;60、反射镜组;61、第一反射镜;70、挡光器。1000, laser optical path system; 100, laser optical path device; 10, laser; 20, spectrometer; 211, first spectrometer; 212, second spectrometer; 30, power detector; 40, second reflector; 50, beam expander; 60, reflector assembly; 61, first reflector; 70, light blocker.

具体实施方式DETAILED DESCRIPTION

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗 示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。In addition, the terms "first" and "second" are used only for descriptive purposes and should not be understood as indicating or implying The term "a first feature" or "a second feature" may indicate relative importance or implicitly indicate the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

在本发明中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

参阅图1及图2,本申请一实施例提供一种激光光路装置100,应用于激光划线设备中,以用于在产品上划线,从而实现对产品的加工。具体地,激光光路装置100用于在太阳能电池基板上进行划线,以制备形成太阳能电池。一个 具体实施方式中,太阳能电池为钙钛矿电池,钙钛矿电池在生产过程中有3个工艺需要划线,分别为P1工艺、P2工艺和P3工艺,上述激光划线设备能够在P3工艺进行划线。可以想到的是,另一些实施例中,对于激光光路装置100所划线的产品的种类不作限定。Referring to FIG. 1 and FIG. 2 , an embodiment of the present application provides a laser optical path device 100, which is applied to a laser scribing device to scribing on a product, thereby realizing product processing. Specifically, the laser optical path device 100 is used to scribing on a solar cell substrate to prepare a solar cell. In a specific embodiment, the solar cell is a perovskite cell. There are three processes in the production process of the perovskite cell that require scribing, namely, the P1 process, the P2 process, and the P3 process. The laser scribing device can scribing in the P3 process. It is conceivable that in other embodiments, the type of product scribed by the laser optical path device 100 is not limited.

激光光路装置100包括激光器10及分光机构20,激光器10能够发出发射光,分光机构20能够将激光器10发射的发射光分为至少两束出射光,出射光用于在产品上划线。The laser optical path device 100 includes a laser 10 and a beam splitter 20. The laser 10 can emit emission light. The beam splitter 20 can split the emission light emitted by the laser 10 into at least two outgoing light beams. The outgoing light beams are used to mark lines on products.

分光机构20包括第一分光镜211及至少一个第二分光镜212。分光镜用于将入射光分成具有一定光强比的透射和反射两束光,分光镜通常倾斜着使用,它能方便地将入射光分离成反射光和透射光两部分。第一分光镜211位于激光器10所发射的发射光的传播路径上,即为,激光器10的发射光形成入射至第一分光镜211的入射光。第一分光镜211的透射光或反射光能够射向第二分光镜212,当第一分光镜211的透射光射向第二分光镜212时,第一分光镜211的透射光形成入射至第二分光镜212的入射光,当第一分光镜211的反射光射向第二分光镜212时,第一分光镜211的反射光形成入射至第二分光镜212的入射光。具体地,分光机构20包括至少两个第二分光镜212,位于上游的第二分光镜212的透射光能够射向位于下游的第二分光镜212,此时位于上游的第二分光镜212的透射光形成入射至下游的第二分光镜212的入射光。The spectroscopic mechanism 20 includes a first spectroscope 211 and at least one second spectroscope 212. The spectroscope is used to split the incident light into two beams of transmission and reflection having a certain light intensity ratio. The spectroscope is usually used at an angle, and it can conveniently separate the incident light into two parts, namely, the reflected light and the transmitted light. The first spectroscope 211 is located on the propagation path of the emitted light emitted by the laser 10, that is, the emitted light of the laser 10 forms the incident light incident to the first spectroscope 211. The transmitted light or reflected light of the first spectroscope 211 can be directed to the second spectroscope 212. When the transmitted light of the first spectroscope 211 is directed to the second spectroscope 212, the transmitted light of the first spectroscope 211 forms the incident light incident to the second spectroscope 212. When the reflected light of the first spectroscope 211 is directed to the second spectroscope 212, the reflected light of the first spectroscope 211 forms the incident light incident to the second spectroscope 212. Specifically, the spectroscopic mechanism 20 includes at least two second spectroscopes 212 . The transmitted light of the upstream second spectroscope 212 can be directed to the downstream second spectroscope 212 . At this time, the transmitted light of the upstream second spectroscope 212 forms the incident light incident on the downstream second spectroscope 212 .

分光机构20的各分光镜相互平行,使得全部分光镜射出的反射光均沿第一方向平行射出,以形成至少两束出射光,或者使得第一分光镜211的透射光与全部第二分光镜212的反射光均沿第一方向平行射出,以形成至少两束出射光。The beam splitters of the beam splitting mechanism 20 are parallel to each other, so that the reflected light emitted by all the beam splitters is emitted in parallel along the first direction to form at least two beams of outgoing light, or the transmitted light of the first beam splitter 211 and the reflected light of all the second beam splitters 212 are emitted in parallel along the first direction to form at least two beams of outgoing light.

一个实施例中,第一分光镜211的透射光射向第二分光镜212,位于上游的第二分光镜212的透射光能够射向位于下游的第二分光镜212,此时,全部分光 镜射出的反射光平行,以使得分光机构20将发射光分为至少两束沿第一方向延伸且相互平行的出射光。另一个实施例中,第一分光镜211的反射光射向第二分光镜212,位于上游的第二分光镜212的透射光能够射向位于下游的第二分光镜212,此时,第一分光镜211的透射光与全部第二分光镜212的反射光平行,以使得分光机构20将发射光分为至少两束沿第一方向延伸且相互平行的出射光。In one embodiment, the transmitted light of the first beam splitter 211 is directed to the second beam splitter 212, and the transmitted light of the second beam splitter 212 located upstream can be directed to the second beam splitter 212 located downstream. The reflected light emitted by the first beam splitter 211 is parallel to the reflected light emitted by the second beam splitter 212, so that the light splitting mechanism 20 splits the emitted light into at least two beams of outgoing light extending along the first direction and parallel to each other. In another embodiment, the reflected light of the first beam splitter 211 is emitted to the second beam splitter 212, and the transmitted light of the second beam splitter 212 located upstream can be emitted to the second beam splitter 212 located downstream. At this time, the transmitted light of the first beam splitter 211 is parallel to the reflected light of all the second beam splitters 212, so that the light splitting mechanism 20 splits the emitted light into at least two beams of outgoing light extending along the first direction and parallel to each other.

本申请实施例提供的激光光路装置100,当需要射出至少两束相互平行的出射光时,设置相应数量的分光镜即可实现,不需要像现有技术中那样,当需要形成多于两束激光时要复制多个激光光路装置100,结构简单且紧凑。The laser optical path device 100 provided in the embodiment of the present application can be realized by setting a corresponding number of beam splitters when at least two mutually parallel outgoing light beams need to be emitted. There is no need to replicate multiple laser optical path devices 100 when more than two laser beams need to be formed as in the prior art. The structure is simple and compact.

可选地,分光机构20包括6个分光镜,此时激光光路装置100能够将发射光分为6束出射光射出。当然,其他一些实施例中,分光机构20还可以包括2个、3个、4个、5个或者多于6个分光镜,在此不作限定。Optionally, the light splitting mechanism 20 includes 6 beam splitters, and the laser light path device 100 can split the emitted light into 6 outgoing light beams. Of course, in other embodiments, the light splitting mechanism 20 can also include 2, 3, 4, 5 or more than 6 beam splitters, which is not limited here.

激光光路装置100所包括的分光镜均匀间隔且平行设置,即为,在第二方向上,每相邻两个分光镜之间的间距相等,使得分光所形成的出射光在第二方向上的间距相等(每相邻两束出射光在第二方向上之间的间距相等),以便于等间距切割或划线。第一方向与第二方向相交,具体地,第一方向与第二方向垂直。The beam splitters included in the laser optical path device 100 are evenly spaced and arranged in parallel, that is, in the second direction, the spacing between each two adjacent beam splitters is equal, so that the spacing of the output light formed by the split light in the second direction is equal (the spacing between each two adjacent output light beams in the second direction is equal), so as to facilitate equal-spaced cutting or scribing. The first direction intersects the second direction, specifically, the first direction is perpendicular to the second direction.

进一步,激光光路装置100所分光形成的所有出射光的功率相等,以保证所有出射光打至产品上进行划线时,划线的深度和宽度均匀,从而保证划线一致性。由于分光镜所分成的透射光和反射光的强度之和等于入射至其上的入射光的强度。如此,通过调节每个分光镜分光形成的透射光和反射光的光强比,能够使得激光光路装置100分光所形成的出射光的强度相等,即为使得激光光路装置100分光所形成的出射光的功率(光的强度等于单位面积的光的功率)相等。 Furthermore, the powers of all the outgoing lights formed by the laser optical path device 100 are equal, so as to ensure that when all the outgoing lights hit the product for marking, the depth and width of the marking are uniform, thereby ensuring the consistency of the marking. Since the sum of the intensities of the transmitted light and the reflected light divided by the beam splitter is equal to the intensity of the incident light incident thereon. In this way, by adjusting the light intensity ratio of the transmitted light and the reflected light formed by the beam splitting of each beam splitter, the intensity of the outgoing light formed by the laser optical path device 100 can be made equal, that is, the power of the outgoing light formed by the laser optical path device 100 (the intensity of light is equal to the power of light per unit area) is equal.

具体地,激光光路装置100还包括半波片,每个分光镜对应设有一个半波片,通过半波片调节相对应的分光镜分光形成的透射光和反射光的光强比。Specifically, the laser optical path device 100 further includes a half-wave plate. Each beam splitter is provided with a corresponding half-wave plate, and the light intensity ratio of the transmitted light and the reflected light formed by the beam splitting of the corresponding beam splitter is adjusted by the half-wave plate.

一个具体实施例中,分光机构20包括6个分光镜,全部分光镜射出的反射光形成上述出射光。可以设置入射至第一分光镜211的光强为7,第一分光镜211分光形成的透射光与反射光的强度分别为6和1,第一个第二分光镜212分光形成的透射光与反射光的光强分别为5和1,第二个第二分光镜212分光形成的透射光与反射光的光强分别为4和1,第三个第二分光镜212分光形成的透射光与反射光的光强分别为3和1,第四个第二分光镜212分光形成的透射光与反射光的光强分别为2和1,第五个第二分光镜212分光形成的透射光与反射光的光强分别为1和1,最终使得激光光路装置100分光所形成的出射光的强度相等。In a specific embodiment, the light splitting mechanism 20 includes 6 beam splitters, and the reflected light emitted by all the beam splitters forms the above-mentioned output light. The light intensity incident on the first beam splitter 211 can be set to 7, the intensities of the transmitted light and the reflected light formed by the first beam splitter 211 are 6 and 1 respectively, the intensities of the transmitted light and the reflected light formed by the first second beam splitter 212 are 5 and 1 respectively, the intensities of the transmitted light and the reflected light formed by the second second beam splitter 212 are 4 and 1 respectively, the intensities of the transmitted light and the reflected light formed by the third second beam splitter 212 are 3 and 1 respectively, the intensities of the transmitted light and the reflected light formed by the fourth second beam splitter 212 are 2 and 1 respectively, and the intensities of the transmitted light and the reflected light formed by the fifth second beam splitter 212 are 1 and 1 respectively, so that the intensity of the output light formed by the beam splitting of the laser optical path device 100 is finally equal.

一些具体实施方式中,所有分光镜均为偏振分光棱镜(PBS),偏振分光棱镜能够将入射的非偏振光分为两束垂直的线偏光,其中P偏光完全通过形成透射光,而S偏光以45°角被反射形成反射光,出射方向与P光形成90°角。In some specific embodiments, all beam splitters are polarization beam splitters (PBS), which can split incident non-polarized light into two perpendicular linear polarized light beams, wherein the P polarized light passes completely to form transmitted light, and the S polarized light is reflected at an angle of 45° to form reflected light, and the outgoing direction forms a 90° angle with the P light.

另一些实施例中,对于分光镜的种类不作限定,只要能够保证分光机构20射出的多束出射光相互平行的分光镜种类均可。In other embodiments, there is no limitation on the type of the beam splitter, as long as it can ensure that the multiple beams of light emitted by the beam splitting mechanism 20 are parallel to each other.

为了便于对出射光的功率进行检测,参阅图3及图4,激光光路装置100还包括功率检测件30,功率检测件30位于最下游的第二分光镜212的透射光的传播路径上。由于功率检测件30能够检测最下游的第二分光镜212的透射光的功率,通过最下游的第二分光镜212的透射光的功率能够获知出射光的功率,从而对出射光的功率进行控制。一般地,设置最下游的第二分光镜212的透射光的功率与所有出射光的功率相等,由于功率检测件30能够检测最下游的第二分光镜212的透射光的功率,通过最下游的第二分光镜212的透射光的功率能够获知出射光的功率,从而对出射光的功率进行控制。 In order to facilitate the detection of the power of the outgoing light, referring to FIG. 3 and FIG. 4 , the laser optical path device 100 further includes a power detection element 30, which is located on the propagation path of the transmitted light of the second beam splitter 212 at the most downstream. Since the power detection element 30 can detect the power of the transmitted light of the second beam splitter 212 at the most downstream, the power of the outgoing light can be obtained through the power of the transmitted light of the second beam splitter 212 at the most downstream, thereby controlling the power of the outgoing light. Generally, the power of the transmitted light of the second beam splitter 212 at the most downstream is set equal to the power of all the outgoing lights. Since the power detection element 30 can detect the power of the transmitted light of the second beam splitter 212 at the most downstream, the power of the outgoing light can be obtained through the power of the transmitted light of the second beam splitter 212 at the most downstream, thereby controlling the power of the outgoing light.

在此需要说明的是,功率检测件30的设置,除了能够检测最下游的第二分光镜212的透射光的功率之外,还能够起到一定的挡光作用,以避免最下游的第二分光镜212的透射光照向其他部件而对该部件造成影响。It should be noted here that the power detection element 30 can not only detect the power of the transmitted light of the second beam splitter 212 at the most downstream, but also play a certain light blocking role to prevent the transmitted light of the second beam splitter 212 at the most downstream from shining on other components and affecting the components.

一些实施例中,继续参阅图2-图4,激光光路装置100还包括至少一个第二反射镜40,第二反射镜40位于发射光的传播路径上,以用于反射发射光至分光机构20。如此,使得激光器10的设置不受位置的限制,即为,当激光器10所发射的发射光不可直接射向分光机构20时,第二反射镜40可以接收上述发射光并将其反射向分光机构20。In some embodiments, referring to FIGS. 2 to 4 , the laser optical path device 100 further includes at least one second reflector 40, which is located on the propagation path of the emitted light, and is used to reflect the emitted light to the light splitting mechanism 20. In this way, the arrangement of the laser 10 is not limited by the position, that is, when the emitted light emitted by the laser 10 cannot be directly emitted to the light splitting mechanism 20, the second reflector 40 can receive the emitted light and reflect it to the light splitting mechanism 20.

一个具体实施方式中,继续参阅图3,激光光路装置100包括三个第二反射镜40。激光器10沿第一方向发出发射光,发射光射向第一个第二反射镜40被反射后沿第二方向射出,再射向第二个第二反射镜40被反射后沿第三方向射出,最后射向第三个第二反射镜40被反射后再沿第二方向射向分光机构20,分光机构20将发射光分为至少两束出射光后沿第一方向射出。如此,在三个第二反射镜40的作用下,发射光的路径在三次转换方向后射向分光机构20,在分光机构20的分光镜的作用下,各出射光再次沿第一方向射出,使得出射光与发射光的初始射出方向平行。In a specific embodiment, referring to FIG. 3 , the laser optical path device 100 includes three second reflectors 40. The laser 10 emits emission light along a first direction, and the emission light is emitted along a second direction after being reflected by the first second reflector 40, and then emitted along a third direction after being reflected by the second second reflector 40, and finally emitted along a second direction after being reflected by the third second reflector 40, and then emitted toward the light splitting mechanism 20, which splits the emission light into at least two outgoing light beams and emits them along the first direction. In this way, under the action of the three second reflectors 40, the path of the emission light is emitted toward the light splitting mechanism 20 after changing directions three times, and under the action of the beam splitters of the light splitting mechanism 20, each outgoing light beam is emitted along the first direction again, so that the outgoing light beam is parallel to the initial emission direction of the emission light beam.

上述第一方向、第二方向及第三方向相交。具体地,第一方向、第二方向及第三方向垂直。如图3所示,第一方向为图3中的长度方向,即为X方向,第二方向为图3中的宽度方向,即为Y方向,第三方向为图3中的Z方向,即为高度方向。The first direction, the second direction and the third direction intersect. Specifically, the first direction, the second direction and the third direction are perpendicular. As shown in FIG3 , the first direction is the length direction in FIG3 , that is, the X direction, the second direction is the width direction in FIG3 , that is, the Y direction, and the third direction is the Z direction in FIG3 , that is, the height direction.

可以理解的是,另一些实施例中,对于激光光路装置100所包括的第二反射镜40的数量不作限定,如第二反射镜40的数量还可以为一个、两个或者多于三个,而依据第二反射镜40的数量的不同,发射光改变方向的次数不同。 It is understandable that in other embodiments, there is no limitation on the number of second reflectors 40 included in the laser optical path device 100. For example, the number of second reflectors 40 can be one, two or more than three. Depending on the number of second reflectors 40, the number of times the emitted light changes direction is different.

一些实施例中,继续参阅图2-图4,激光光路装置100还包括扩束镜50,扩束镜50位于发射光的传播路径上,以用于发射光扩束后射向分光机构20。扩束镜50的设置,能够扩展激光光束直径和减小光束的发散角。In some embodiments, referring to Figures 2 to 4, the laser optical path device 100 further includes a beam expander 50, which is located on the propagation path of the emitted light and is used to expand the emitted light and then emit it toward the light splitting mechanism 20. The arrangement of the beam expander 50 can expand the diameter of the laser beam and reduce the divergence angle of the beam.

在此需要说明的是,扩束镜50可以位于发射光射向第二反射镜40之前,也可以位于第二反射镜40反射发射光的路径上,在此亦不作限定。It should be noted that the beam expander 50 may be located before the emitted light is emitted to the second reflector 40 , or may be located on the path of the emitted light reflected by the second reflector 40 , which is not limited here.

激光光路装置100还包括反射镜组60,反射镜组60的数量与出射光的数量相等且一一对应。每组反射镜组60包括偶数个第一反射镜61,第一反射镜61设于与其相对应的出射光的传播路径上以反射出射光,全部出射光通过相对应的反射镜组60反射后均沿第一方向平行射出。反射镜组60的设置,能够延伸出射光在第一方向上的路径,在出射距离较远的情况下,让光束尽可能准直。The laser optical path device 100 also includes a reflector group 60, the number of which is equal to the number of outgoing lights and corresponds one to one. Each reflector group 60 includes an even number of first reflectors 61, which are arranged on the propagation path of the outgoing light corresponding thereto to reflect the outgoing light, and all the outgoing lights are reflected by the corresponding reflector group 60 and then emitted in parallel along the first direction. The arrangement of the reflector group 60 can extend the path of the outgoing light in the first direction, and make the light beam as collimated as possible when the emission distance is long.

每相邻两组反射镜组60位于最下游的第一反射镜61之间的间距相等,使得每相邻两束出射光经反射镜组60反射后所形成的光束之间的间距相等。在此需要说明的是,反射镜组60位于最下游的第一反射镜61为出射光最终射出反射镜组60的第一反射镜61。若定义反射镜组60中位于最下游的第一反射镜61为出射反射镜,则每相邻两个出射反射镜在第二方向上的间距相等,如此设置,能够确保最终射出的光束等间距设置,进而保证等间距切割或划线。The spacing between the first reflectors 61 located at the most downstream of each two adjacent reflector groups 60 is equal, so that the spacing between the light beams formed by each two adjacent outgoing light beams after being reflected by the reflector group 60 is equal. It should be noted here that the first reflector 61 located at the most downstream of the reflector group 60 is the first reflector 61 from which the outgoing light finally exits the reflector group 60. If the first reflector 61 located at the most downstream in the reflector group 60 is defined as the outgoing reflector, the spacing between each two adjacent outgoing reflectors in the second direction is equal, and such a setting can ensure that the finally emitted light beams are arranged at equal spacing, thereby ensuring equal spacing cutting or scribing.

进一步,每组反射镜组60包括两个第一反射镜61,在第一方向上,反射镜组60中的一个第一反射镜61与射出该束出射光的分光镜相对,反射镜组60中的另一个第一反射镜61与射出该束出射光的分光镜错位。这样,在反射镜组60结构较为简单的情况下,满足光束出射距离较远时的准直性要求。Furthermore, each reflector group 60 includes two first reflectors 61. In the first direction, one of the first reflectors 61 in the reflector group 60 is opposite to the beam splitter that emits the beam of outgoing light, and the other first reflector 61 in the reflector group 60 is offset from the beam splitter that emits the beam of outgoing light. In this way, when the reflector group 60 has a relatively simple structure, the collimation requirement when the beam is emitted at a long distance is met.

可以想到的是,另一些实施例中,对于反射镜组60所包括的第一反射镜61的数量不作限定,如每组反射镜组60还可以包括4个第一反射或者6个第一反射镜61等。 It is conceivable that in other embodiments, the number of first reflectors 61 included in the reflector group 60 is not limited. For example, each reflector group 60 may also include 4 first reflectors or 6 first reflectors 61 .

一些实施例中,激光光路装置100还包括挡光器70,挡光器70的数量与出射光的数量相等且一一对应。挡光器70位于出射光的传播路径上,以能够阻挡出射光射出至产品。通过设置挡光器70,能够控制出射光是否出光,从而便于对产品上划线的条数进行控制。In some embodiments, the laser optical path device 100 further includes light blocks 70, and the number of light blocks 70 is equal to the number of outgoing lights and corresponds one to one. The light blocks 70 are located on the propagation path of the outgoing light to block the outgoing light from being emitted to the product. By providing the light blocks 70, it is possible to control whether the outgoing light is emitted, thereby facilitating the control of the number of lines on the product.

在此需要说明的是,本申请中,对于挡光器70的具体设置位置不作限定,只要挡光器70位于出射光射向产品的传播路径上即可。一些具体实施方式中,挡光器70可以位于分光镜与反射镜组60中的第一个第一反射镜61之间,也可以位于反射镜组60的第一反射镜61之间,还可以位于出射光经反射镜组60反射后的出射路径上。It should be noted that, in the present application, the specific location of the light blocker 70 is not limited, as long as the light blocker 70 is located on the propagation path of the outgoing light to the product. In some specific embodiments, the light blocker 70 can be located between the beam splitter and the first first reflector 61 in the reflector group 60, or between the first reflectors 61 of the reflector group 60, or on the outgoing path of the outgoing light after being reflected by the reflector group 60.

继续参阅图2-图4,本申请另一实施例还提供一种激光光路系统1000,激光光路系统1000包括至少两个激光光路装置100,全部激光光路装置100分光形成的出射光相互平行。这样设置,增加了出射光的数量,每次能够在产品上划更多的线,提高划线效率。Continuing to refer to FIG. 2 to FIG. 4 , another embodiment of the present application further provides a laser optical path system 1000, which includes at least two laser optical path devices 100, and the outgoing lights formed by the light splitting of all the laser optical path devices 100 are parallel to each other. This arrangement increases the number of outgoing lights, and more lines can be drawn on the product each time, thereby improving the drawing efficiency.

进一步,在第二方向上,每相邻两个分光镜之间的间距相等,使得分光所形成的每相邻两束出射光之间的间距相等,从而便于等间距划线或切割。Furthermore, in the second direction, the spacing between each two adjacent beam splitters is equal, so that the spacing between each two adjacent beams of emitted light formed by the beam splitting is equal, thereby facilitating equal-spaced scribing or cutting.

在此需要说明的是,当功率检测件30位于激光光路装置100靠近与其相邻的激光光路装置100的一端时,反射镜组60的设置不但能够延伸出射光在第一方向上的路径。同时,经分光镜射出的出射光并非直接沿第一方向直接射出激光光路装置100,而是经反射镜组60转变方向后沿第一方向射出激光光路装置100,正是由于反射镜组60的设置,在两个激光光路装置100相互靠近的位置能够预留出设置功率检测件30的设置空间,以便于设置功率检测件30。It should be noted that when the power detection element 30 is located at one end of the laser light path device 100 close to the adjacent laser light path device 100, the setting of the reflector group 60 can not only extend the path of the emitted light in the first direction. At the same time, the emitted light emitted by the beam splitter does not directly emit from the laser light path device 100 along the first direction, but is emitted from the laser light path device 100 along the first direction after being changed in direction by the reflector group 60. It is precisely because of the setting of the reflector group 60 that a setting space for setting the power detection element 30 can be reserved at the position where the two laser light path devices 100 are close to each other, so as to facilitate the setting of the power detection element 30.

一个具体实施方式中,激光光路系统1000包括两个激光光路装置100,激光光路系统1000具有中心轴线,两个激光光路装置100对称设于中心轴线的两 侧。通过设置两个激光光路装置100对称设于中心轴线的两侧,能够优化激光光路系统1000的空间布置,使得激光光路系统1000布局更为合理,进而减小占地面积。In a specific embodiment, the laser optical path system 1000 includes two laser optical path devices 100. The laser optical path system 1000 has a central axis. The two laser optical path devices 100 are symmetrically arranged on both sides of the central axis. By arranging two laser light path devices 100 symmetrically on both sides of the central axis, the spatial arrangement of the laser light path system 1000 can be optimized, making the layout of the laser light path system 1000 more reasonable, thereby reducing the occupied area.

进一步,每个激光光路装置100包括6个分光镜,此时激光光路装置100能够将发射光分为6束出射光射出,而激光光路系统1000能够同步射出12束出射光。如此,当所有光束均未被挡光器70阻挡时,激光光路系统1000每次能够在产品上划12条线。Furthermore, each laser optical path device 100 includes 6 beam splitters, and the laser optical path device 100 can split the emitted light into 6 outgoing light beams, and the laser optical path system 1000 can synchronously emit 12 outgoing light beams. In this way, when all the light beams are not blocked by the light blocker 70, the laser optical path system 1000 can draw 12 lines on the product each time.

可以理解的是,在其他一些实施例中,激光光路系统1000还可以包括其他数量的激光光路装置100,如3个、4个或者多于4个。同样地,当激光光路系统1000包括其他数量的激光光路装置100时,全部激光光路装置100也可以对称设于中心轴线的两侧。It is understandable that in some other embodiments, the laser optical path system 1000 may also include other numbers of laser optical path devices 100, such as 3, 4, or more than 4. Similarly, when the laser optical path system 1000 includes other numbers of laser optical path devices 100, all laser optical path devices 100 may also be symmetrically arranged on both sides of the central axis.

一些实施例中,激光光路系统1000还包括调节机构,分光机构20与调节机构相连,调节机构能够调节各分光镜之间的间距。具体地,调节机构能够等间距调节各分光镜之间的间距。这样设置,调节机构能够调节各个分光镜之间的间距,以使得各出射光之间的间距改变,从而改变在产品上划线之间的间距,进而满足不同间距的划线需求。In some embodiments, the laser optical path system 1000 further includes an adjustment mechanism, and the light splitting mechanism 20 is connected to the adjustment mechanism, and the adjustment mechanism can adjust the spacing between each light splitter. Specifically, the adjustment mechanism can adjust the spacing between each light splitter at equal intervals. In this way, the adjustment mechanism can adjust the spacing between each light splitter so that the spacing between each emitted light changes, thereby changing the spacing between the lines on the product, thereby meeting the requirements for line markings with different spacings.

进一步,调节机构包括驱动件及传动组件,分光镜通过传动组件与驱动件相连,驱动件能够通过传动组件带动分光镜运动,以改变各分光镜之间的间距。具体地,驱动件为电机。可以想到的是,在其他一些实施例中,对于驱动件的种类不作限定,如驱动件还可以为气缸等。Further, the adjustment mechanism includes a driving member and a transmission assembly, the spectroscope is connected to the driving member through the transmission assembly, and the driving member can drive the spectroscope to move through the transmission assembly to change the spacing between the spectroscopes. Specifically, the driving member is a motor. It is conceivable that in some other embodiments, the type of the driving member is not limited, such as the driving member can also be a cylinder, etc.

以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技 术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. There is no contradiction in the combination of technical features, and all should be considered to be within the scope of this specification.

以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。 The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims (20)

一种激光光路装置,其特征在于,包括:A laser optical path device, characterized by comprising: 激光器(10);Laser (10); 分光机构(20),包括第一分光镜(211)及第二分光镜(212),所述第一分光镜(211)位于所述激光器(10)所发射的发射光的传播路径上,所述第一分光镜(211)的透射光或反射光能够射向所述第二分光镜(212),所述分光机构(20)包括至少两个所述第二分光镜(212)时,位于上游的所述第二分光镜(212)的透射光能够射向位于下游的所述第二分光镜(212);A light splitting mechanism (20), comprising a first light splitter (211) and a second light splitter (212), wherein the first light splitter (211) is located on a propagation path of light emitted by the laser (10), and the transmitted light or reflected light of the first light splitter (211) can be directed toward the second light splitter (212), and when the light splitting mechanism (20) comprises at least two second light splitters (212), the transmitted light of the second light splitter (212) located upstream can be directed toward the second light splitter (212) located downstream; 所述分光机构(20)的各分光镜相互平行,使得全部所述分光镜射出的反射光均沿第一方向平行射出,以形成至少两束用于在产品上划线的出射光,或者使得所述第一分光镜(211)的透射光与全部所述第二分光镜(212)的反射光均沿第一方向平行射出,以形成至少两束用于在产品上划线的出射光。The beam splitters of the beam splitting mechanism (20) are parallel to each other, so that the reflected light emitted by all the beam splitters is emitted in parallel along a first direction to form at least two beams of output light for marking a line on a product, or the transmitted light of the first beam splitter (211) and the reflected light of all the second beam splitters (212) are emitted in parallel along the first direction to form at least two beams of output light for marking a line on a product. 根据权利要求1所述的激光光路装置,其特征在于,每相邻两个所述分光镜之间的间距相等,使得分光所形成的每相邻两束所述出射光之间的间距相等。The laser optical path device according to claim 1 is characterized in that the spacing between each two adjacent beams of the beam splitters is equal, so that the spacing between each two adjacent beams of the output light formed by the beam splitting is equal. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置所分光形成的所有出射光的功率相等。The laser optical path device according to claim 1 is characterized in that the powers of all output lights formed by the splitting of the laser optical path device are equal. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置还包括半波片,每个所述分光镜对应设有一个所述半波片,通过所述半波片调节相对应的所述分光镜分光形成的透射光和反射光的光强比。The laser optical path device according to claim 1 is characterized in that the laser optical path device also includes a half-wave plate, and each of the beam splitters is provided with a corresponding half-wave plate, and the half-wave plate is used to adjust the light intensity ratio of the transmitted light and the reflected light formed by the corresponding beam splitting of the beam splitter. 根据权利要求1所述的激光光路装置,其特征在于,所述分光机构(20)包括6个分光镜。The laser optical path device according to claim 1, characterized in that the light splitting mechanism (20) comprises 6 light splitters. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置还包括反射镜组(60),所述反射镜组(60)的数量与所述出射光的数量相等且 一一对应;The laser optical path device according to claim 1, characterized in that the laser optical path device further comprises a reflector group (60), the number of the reflector groups (60) is equal to the number of the emitted light and One to one correspondence; 每组所述反射镜组(60)包括偶数个第一反射镜(61),所述第一反射镜(61)设于与其相对应的所述出射光的传播路径上以反射所述出射光,全部所述出射光通过相对应的所述反射镜组(60)反射后均沿所述第一方向平行射出。Each of the reflector groups (60) comprises an even number of first reflectors (61), wherein the first reflectors (61) are arranged on a propagation path of the corresponding outgoing light to reflect the outgoing light, and all the outgoing light is emitted in parallel along the first direction after being reflected by the corresponding reflector group (60). 根据权利要求6所述的激光光路装置,其特征在于,每相邻两组所述反射镜组(60)位于最下游的所述第一反射镜(61)之间的间距相等,使得每相邻两束所述出射光经所述反射镜组(60)反射后所形成的光束之间的间距相等。The laser optical path device according to claim 6 is characterized in that the spacing between the first reflectors (61) located at the most downstream of each two adjacent groups of the reflector groups (60) is equal, so that the spacing between the light beams formed after each two adjacent beams of the outgoing light are reflected by the reflector groups (60) is equal. 根据权利要求6或7所述的激光光路装置,其特征在于,所述反射镜组(60)包括两个所述第一反射镜(61),在所述第一方向上,所述反射镜组(60)中的一个所述第一反射镜(61)与射出所述出射光的所述分光镜相对,所述反射镜组(60)中的另一个所述第一反射镜(61)与射出所述出射光的所述分光镜错位。The laser optical path device according to claim 6 or 7 is characterized in that the reflector group (60) includes two first reflectors (61), and in the first direction, one of the first reflectors (61) in the reflector group (60) is opposite to the beam splitter that emits the outgoing light, and the other first reflector (61) in the reflector group (60) is offset from the beam splitter that emits the outgoing light. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置还包括挡光器(70),所述挡光器(70)的数量与所述出射光的数量相等且一一对应;The laser light path device according to claim 1, characterized in that the laser light path device further comprises light blocks (70), and the number of the light blocks (70) is equal to the number of the emitted lights and corresponds one to one; 所述挡光器(70)位于所述出射光的传播路径上,以能够阻挡所述出射光射出。The light blocker (70) is located on the propagation path of the outgoing light so as to block the outgoing light from being emitted. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置还包括至少一个第二反射镜(40),所述第二反射镜(40)位于所述发射光的传播路径上,以用于反射所述发射光至所述分光机构(20)。The laser optical path device according to claim 1 is characterized in that the laser optical path device also includes at least one second reflector (40), and the second reflector (40) is located on the propagation path of the emitted light to reflect the emitted light to the splitting mechanism (20). 根据权利要求10所述的激光光路装置,其特征在于,所述激光光路装置包括三个第二反射镜(40),所述激光器(10)沿所述第一方向发出发射光,发射光射向第一个所述第二反射镜(40)被反射后沿第二方向射出,发射光再 射向第二个所述第二反射镜(40)被反射后沿第三方向射出,发射光再射向第三个所述第二反射镜(40)被反射后再沿所述第二方向射向所述分光机构(20),所述分光机构(20)将发射光分为至少两束出射光后沿所述第一方向射出;The laser optical path device according to claim 10 is characterized in that the laser optical path device comprises three second reflectors (40), the laser (10) emits emission light along the first direction, the emission light is emitted to the first second reflector (40) and then emitted along the second direction, and the emission light is then reflected by the second reflector (40). The emitted light is emitted toward the second second reflector (40) and then reflected and emitted along a third direction. The emitted light is then emitted toward the third second reflector (40) and then reflected and emitted toward the light splitting mechanism (20) along the second direction. The light splitting mechanism (20) splits the emitted light into at least two outgoing light beams and then emits them along the first direction. 所述第一方向、所述第二方向及所述第三方向两两相交。The first direction, the second direction and the third direction intersect each other. 根据权利要求1所述的激光光路装置,其特征在于,所述激光光路装置还包括扩束镜(50),所述扩束镜(50)位于所述发射光的传播路径上,以用于所述发射光扩束后射向所述分光机构(20)。The laser optical path device according to claim 1 is characterized in that the laser optical path device also includes a beam expander (50), and the beam expander (50) is located on the propagation path of the emitted light, so as to expand the emitted light and then emit it toward the light splitting mechanism (20). 根据权利要求1所述的激光光路装置,其特征在于,所述分光镜为偏振分光棱镜。The laser optical path device according to claim 1 is characterized in that the beam splitter is a polarization beam splitter prism. 根据权利要求1-13任一项所述的激光光路装置,其特征在于,所述激光光路装置还包括功率检测件(30),所述功率检测件(30)位于最下游的所述第二分光镜(212)的所述透射光的传播路径上,以能够检测所述透射光的功率。The laser optical path device according to any one of claims 1 to 13 is characterized in that the laser optical path device also includes a power detection element (30), and the power detection element (30) is located on the propagation path of the transmitted light of the second beam splitter (212) at the most downstream so as to be able to detect the power of the transmitted light. 一种激光光路系统,其特征在于,所述激光光路系统包括至少两个如权利要求1-14任一项所述的激光光路装置,全部所述激光光路装置分光形成的所述出射光相互平行。A laser optical path system, characterized in that the laser optical path system comprises at least two laser optical path devices according to any one of claims 1 to 14, and the output lights formed by the light splitting of all the laser optical path devices are parallel to each other. 根据权利要求15所述的激光光路系统,其特征在于,每相邻两个所述分光镜之间的间距相等,使得分光所形成的每相邻两束所述出射光之间的间距相等。The laser optical path system according to claim 15 is characterized in that the distance between each two adjacent beams of the beam splitters is equal, so that the distance between each two adjacent beams of the output light formed by the beam splitting is equal. 根据权利要求15或16所述的激光光路系统,其特征在于,所述激光光路系统包括两个所述激光光路装置,所述激光光路系统具有中心轴线,两个所述激光光路装置对称设于所述中心轴线的两侧。The laser optical path system according to claim 15 or 16 is characterized in that the laser optical path system comprises two laser optical path devices, the laser optical path system has a central axis, and the two laser optical path devices are symmetrically arranged on both sides of the central axis. 根据权利要求15所述的激光光路系统,其特征在于,所述激光光路系统还包括调节机构,所述分光机构(20)与所述调节机构相连,所述调节机构 能够调节各所述分光镜之间的间距。The laser optical path system according to claim 15 is characterized in that the laser optical path system further comprises an adjustment mechanism, the light splitting mechanism (20) is connected to the adjustment mechanism, and the adjustment mechanism The spacing between the beam splitters can be adjusted. 根据权利要求18所述的激光光路系统,其特征在于,所述调节机构包括驱动件及传动组件,所述分光镜通过所述传动组件与所述驱动件相连,所述驱动件能够通过所述传动组件带动所述分光镜运动,以改变各所述分光镜之间的间距。The laser optical path system according to claim 18 is characterized in that the adjustment mechanism includes a driving member and a transmission assembly, the beam splitter is connected to the driving member through the transmission assembly, and the driving member can drive the beam splitter to move through the transmission assembly to change the spacing between each beam splitter. 根据权利要求15所述的激光光路系统,其特征在于,所述激光光路装置还包括功率检测件(30),所述功率检测件(30)位于最下游的所述第二分光镜(212)的所述透射光的传播路径上,以能够检测所述透射光的功率;The laser optical path system according to claim 15, characterized in that the laser optical path device further comprises a power detection element (30), and the power detection element (30) is located on the propagation path of the transmitted light of the second beam splitter (212) at the most downstream so as to be able to detect the power of the transmitted light; 所述功率检测件(30)位于所述激光光路装置靠近与其相邻的所述激光光路装置的一端;The power detection element (30) is located at one end of the laser light path device close to the laser light path device adjacent thereto; 所述激光光路装置还包括反射镜组(60),所述反射镜组(60)的数量与所述出射光的数量相等且一一对应;每组所述反射镜组(60)包括偶数个第一反射镜(61),所述第一反射镜(61)设于与其相对应的所述出射光的传播路径上以反射所述出射光,全部所述出射光通过相对应的所述反射镜组(60)反射后均沿所述第一方向平行射出。 The laser optical path device further comprises a reflector group (60), the number of the reflector groups (60) being equal to the number of the outgoing lights and corresponding one to one; each reflector group (60) comprises an even number of first reflectors (61), the first reflectors (61) being arranged on the propagation path of the outgoing lights corresponding thereto to reflect the outgoing lights, and all the outgoing lights being reflected by the corresponding reflector groups (60) are emitted in parallel along the first direction.
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