WO2025060762A1 - All-round measurement apparatus and method for probe - Google Patents

Abstract

The present invention relates to the technical field of semiconductor testing, and more specifically relates to an all-round measurement apparatus and method for a probe. The apparatus comprises a 3D scanning device, a probe suction structure, a carrier, a probe gripping structure and several measurement cameras, wherein the carrier is used for placing a probe needing to be measured; the 3D scanning device is used for carrying out morphological scanning on the probe; the probe suction structure is used for suctioning the probe and adjusting the position of the probe after the scanning is completed, so that the probe points in a specific direction; the probe gripping structure is used for gripping the probe from the probe suction structure and moving the probe to a measurement position; and the several measurement cameras are installed in several functional areas corresponding to the measurement position so as to carry out identification, measurement and determination on the probe in different measurement directions, thus obtaining all-round morphological and dimensional data of the probe. The present invention can carry out all-round measurement on the whole probe and the probe tip, can visually determine the all-round dimensions and flatness of the probe, and thus effectively screens out probes that are suitable for a probe card.

Description

A probe omnidirectional measurement device and method Technical Field

The present invention relates to the field of semiconductor testing technology, and more particularly to a probe omnidirectional measurement device and method.

Background Art

Semiconductor testing is a key link in the semiconductor design, production, packaging, and testing process, and its importance cannot be ignored. As the core component of semiconductor testing, probes are widely used in semiconductor chip design verification, wafer testing, finished product testing, and other links. The structural rationality, dimensional error control, and needle deflection of the probe are directly related to the testing and verification effect of semiconductor chip products. Therefore, the produced probes must undergo strict testing and control to ensure their test accuracy and test results.

The existing technology currently requires the production of probes to be measured for size and tip. Size measurement needs to be performed when the probe is lying flat or sideways, and tip measurement requires the probe to be vertically aligned to measure and judge the tip of a dozen microns. The visual system is used to obtain the reflective area to assist in detecting the tip size and cutting consistency.

However, the existing measurement methods can only measure the dimensions of the flat probes through cameras, and cannot determine the angle errors of the front and rear beams and tails of the probes, or the possible non-parallelism between the tip and tail. In addition, the warping of the probe itself cannot be accurately measured. The warping causes the tip position in the probe card to deviate too much, making it impossible to conduct the normal test function, and thus causing the entire probe card to be unusable.

In addition, warping may cause the probes to overlap with each other, resulting in a short circuit, which seriously affects the test performance of the probe card. The probe tips cannot be effectively detected and identified, which will result in a large number of probes that do not meet the requirements in subsequent work.

The problem with the needle tip will result in the inability to perform the puncture function. Even if the needle tip is in the correct position, the probe card cannot perform the test function normally. In addition, there is a large height difference between the needle tip and the probe tip, which causes the probe to be on the probe card. If the height position is incorrect, the test function cannot be realized.

Due to the above problems, a large number of screening probe operations occurred, resulting in a lot of time wasted in the steps of measuring the probes. In addition, there were many defective products in subsequent production, resulting in low overall efficiency of production tasks and failure to achieve production plans.

Summary of the invention

The purpose of the present invention is to provide a probe omnidirectional measurement device and method to solve the problem that the prior art cannot effectively detect and identify the probe.

In order to achieve the above-mentioned object, the present invention provides a probe omnidirectional measurement device, including a 3D scanning device, a suction probe structure, a carrier, a clamping probe structure and several measurement cameras:

The carrier plate is used to place the probes required for measurement;

The 3D scanning device is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe;

The probe suction structure is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction;

The probe clamping structure is used to clamp the probe from the probe suction structure and move it to the measurement position;

The several measuring cameras are installed in several functional areas corresponding to the measuring positions, and identify, measure and judge the probe in multiple spatial dimensions from different measuring directions, and finally obtain all-round shape and size data of the probe.

In one embodiment, the 3D scanning device, the suction probe structure and the carrier are installed in a scanning station area.

In one embodiment, the gripping probe structure and a plurality of measuring cameras are installed in a camera recognition station area.

In one embodiment, the scanning format of the 3D scanning device is 1mm×1mm to 6mm×6mm;

The scanning accuracy of the 3D scanning device is within 2 microns.

In one embodiment, the suction probe structure includes a suction nozzle, a mechanical swing arm, a suction probe camera, a rotating shaft and a first base:

The suction nozzle is installed at one end of the mechanical swing arm and is used to suck the probe;

The rotating shaft is mounted on the other end of the mechanical swing arm;

The mechanical swing arm is mounted on the first base and rotates around the rotation axis to adjust the direction of the nozzle and the probe;

The suction probe camera is installed on the first base, located on one side of the mechanical swing arm, and measures the relative positions of the suction nozzle and the probe.

In one embodiment, the diameter of the nozzle is smaller than the width of the probe.

In one embodiment, the device further comprises a plurality of motion axes for providing axial movement:

The carrier plate is mounted on the moving shaft for axial movement.

In one embodiment, the clamping probe structure includes a clamping claw, a clamping probe camera and a second base:

The clamping claw is installed at the bottom of the second base and is used to clamp the probe;

The clamping probe camera is installed on the side of the second base to measure the relative positions of the clamping claw and the probe.

In one embodiment, the plurality of measuring cameras include a first measuring camera, a second measuring camera and a third measuring camera:

The first measuring camera is fixed above the measuring position, and the measuring direction is the vertical direction, and is used to determine whether the probe is tilted or deflected in the vertical direction;

The second measuring camera is fixed on one side of the probe, and the measuring direction is horizontal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal direction;

The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first measuring camera and the second measuring camera, and the measuring direction is horizontal and longitudinal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

In one embodiment, the first measuring camera is used to determine whether the probe beam is bent, and to perform fixed-point measurement and screening on the probe tip.

In one embodiment, the magnification of the measuring camera is 10-40 times, which is determined according to different probe tip parameters.

In order to achieve the above object, the present invention provides a probe omnidirectional measurement method, comprising the following steps: Steps:

Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe;

Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is recognized, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe.

In one embodiment, the step S1 further comprises: after the scanning is completed, the probe is kept in a vertical state and moved to a measuring position.

In one embodiment, the step S2 further comprises:

The three measuring cameras are set in the corresponding functional areas of the measuring position to identify, measure and judge the different surfaces of the probe in the three-dimensional space from three different measuring directions.

In one embodiment, the step S2 further comprises:

Fixing the first measuring camera above the measuring position, with the measuring direction being the vertical direction, and measuring to determine whether the probe is tilted or deflected in the vertical direction;

The second measuring camera is fixed on one side of the probe, with the measuring direction being horizontal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal direction;

The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first measuring camera and the second measuring camera, and the measuring direction is horizontal and longitudinal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

In one embodiment, the step S2 further comprises:

The first measuring camera is used to perform fixed-point measurement and screening on the tip of the probe.

In one embodiment, the step S2 further comprises:

The selection of the measuring camera is determined according to different probe tip parameters.

The present invention provides a probe omnidirectional measurement device and method, which can perform omnidirectional measurement on the entire probe and the needle tip, so as to intuitively judge the omnidirectional size and flatness of the probe, effectively screen the probe suitable for the probe card, reduce the working cost and improve the working efficiency of the overall process.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features, wherein:

FIG1 discloses a schematic diagram of the placement of the full-area probe omni-directional measurement device according to an embodiment of the present invention;

FIG2 discloses a partial schematic diagram of a probe omni-directional measurement device in a scanning station area according to an embodiment of the present invention;

FIG3 discloses a partial schematic diagram of a probe omni-directional measurement device in a camera recognition station area according to an embodiment of the present invention;

FIG. 4 discloses a flow chart of a probe omni-directional measurement method according to an embodiment of the present invention.

The meanings of the reference numerals in the figures are as follows:

1 3D scanning equipment;

2. Absorption probe structure;

21 suction nozzle;

22 mechanical swing arm;

23 suction probe camera;

24 rotation axis;

25 first base;

3 carrier plate;

4 motion axes;

5. Clamping probe structure;

51 jaws;

52 clamping probe camera;

53 second base;

61 first measuring camera;

62 second measuring camera;

63 third measuring camera;

7Measurement location.

DETAILED DESCRIPTION

In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

The present invention aims to solve the problem of being unable to accurately detect a probe, especially the detection of the warping of the probe itself and the needle tip.

FIG1 discloses a schematic diagram of the full-area placement position of a probe omnidirectional measurement device according to an embodiment of the present invention. As shown in FIG1 , a probe omnidirectional measurement device proposed by the present invention includes a 3D scanning device 1, a suction probe structure 2, a carrier 3, a plurality of motion axes 4, a clamping probe structure 5, and a plurality of measurement cameras:

In this embodiment, the groups of measuring cameras include a first measuring camera 61 , a second measuring camera 62 , and a third measuring camera 63 .

The 3D scanning device 1, the suction probe structure 2, the carrier plate 3, and a plurality of motion axes 4 are installed in the scanning station area;

The 3D scanning device 1 is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe;

The probe suction structure 2 is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction;

The carrier plate 3 is mounted on the moving shaft 4 and is used to place the probe to be measured;

The measuring plane of the probe and the plane on which the probe is placed on the carrier plate 3 should be parallel to each other;

The moving shafts 4 are multiple in number and are used to provide axial movement.

The clamping probe structure 5 and the first measuring camera 61, the second measuring camera 62, and the third measuring camera 63 are installed in the camera recognition station area:

The clamping probe structure 5 is used to clamp the probe from the suction probe structure 2 and move it to a preset measurement position;

In the functional area corresponding to the measurement position, a first measurement camera 61 and a second measurement camera 62 are installed. and a third measuring camera 63;

The first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 have different measuring directions, and can identify, measure and judge the probe in multiple spatial dimensions from multiple measuring directions, and finally obtain all-round shape and size data of the probe.

The probes that can be measured in the present invention include both probes in a general sense and new probes with complex spatial morphological configurations.

Generally speaking, the number of measurement cameras is usually three, and the number of cameras can be increased according to actual needs. For probes with complex shapes, the number of cameras can be increased to obtain measurement data in more directions. For conventional probes, increasing the number of measurement cameras is not necessary.

Figure 2 discloses a partial schematic diagram of the probe omnidirectional measurement device in the scanning station area according to an embodiment of the present invention, such as the probe omnidirectional measurement device shown in Figures 1 and 2, wherein the 3D scanning device 1 is fixed in the scanning station area, and a motion axis 4 is installed underneath to move the carrier 3 on which the probe is placed.

When choosing a 3D scanning device, not only its accuracy but also its efficiency should be considered. Therefore, there are very high requirements for the scanning method and format of the 3D scanning device. According to actual needs, the 3D scanning device 1 needs to have the following characteristics:

The scanning area ranges from 1mm×1mm to 6mm×6mm;

Capable of measuring probes in batches;

The scanning accuracy is within 2 microns.

The suction probe structure 2 includes a suction nozzle 21, a mechanical swing arm 22, a suction probe camera 23, a rotating shaft 24 and a first base 25;

A suction nozzle 21, mounted at one end of a mechanical swing arm 22, for sucking the probe;

The probe is stably fixed in position by the adsorption action of the suction nozzle 21;

The rotating shaft 24 is mounted on the other end of the mechanical swing arm 22;

The mechanical swing arm 22 is mounted on the first base 25 and can rotate around the rotation axis 24 to adjust the direction of the suction nozzle 21 and thus adjust the direction of the probe;

The suction probe camera 23 is installed on the first base 25 and is located on one side of the mechanical swing arm 22 to measure the relative position of the suction nozzle 21 and the probe;

In some embodiments, the measurement direction of the suction probe camera 23 is the Z-axis direction.

In this embodiment, the nozzle 21 may be a customized structure with a diameter smaller than the width of the probe, such as a diameter of 0.15-0.4 mm.

The motion shafts 4 are structurally designed in the form of linear motion and can move freely in parallel directions. There are several of them and they are used to provide axial motion.

The motion axis 4 may include a first motion axis and a second motion axis, and the carrier plate 3 may be connected via a driving device, and the driving device may drive the carrier plate 3 to perform linear axial motion along the first motion axis and the second motion axis.

FIG3 discloses a partial schematic diagram of a probe omni-directional measurement device in a camera identification station area according to an embodiment of the present invention. As shown in FIG1 and FIG3 , a clamping probe structure 5 includes a clamping claw 51, a clamping probe camera 52, and a second base 53:

The clamping claw 51 is installed at the bottom of the second base 53 and is used to clamp the probe;

The clamping probe camera 52 is installed on the side of the second base to measure the relative positions of the clamping jaw 51 and the probe.

The clamping jaw 51 and the clamping probe camera 52 are fixed on the same motion axis. In some embodiments, the measuring direction of the clamping probe camera 52 is the Z-axis direction.

The first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 are fixed in sequence at different functional areas of the measuring position 7 to cooperate with each other to complete the all-round measurement of the probe.

In this embodiment, the first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 respectively measure and judge the probe from three mutually perpendicular measuring directions.

As shown in Figures 1 to 3, the X-Y-Z axis three-dimensional coordinate system is set as the measurement direction coordinate system, the Z axis is the vertical direction, the Y axis is the moving direction of the motion axis (horizontal longitudinal direction), and the X axis is the direction perpendicular to the Y axis and the Z axis (horizontal transverse direction).

After being sucked and adjusted by the sucking probe structure 2 , the probe points to a specific vertical direction, and then moves to a measuring position through the clamping probe structure 5 , with the tip of the probe facing the measuring direction of the first measuring camera 61 .

The first measuring camera 61 is fixed above the probe, and the measuring direction is the vertical direction, that is, the negative direction of the Z axis, and is used to determine whether the probe is tilted or deflected in the vertical direction (clearly straight lines are not parallel), and whether the probe beam is bent, and can locate the probe tip. Point measurement and screening;

The second measuring camera 62 is fixed on one side of the probe, and the measuring direction is the positive direction of the X-axis (horizontal lateral direction), and is used to determine whether the probe is tilted or deflected on one side of the X-axis direction;

The third measuring camera 63 is fixed on the other side of the probe, perpendicular to the measuring direction of the second measuring camera 62, that is, the measuring direction is the negative direction of the Y axis (horizontal longitudinal direction), and is used to determine whether the probe is tilted or deflected on one side of the Y axis direction.

The three cameras work together to ensure that comprehensive 3D measurements of the probe can be completed accurately and without error.

In some embodiments, the magnifications of the first measurement camera 61 , the second measurement camera 62 , and the third measurement camera 63 are 10-40 times (10X-40X), which are selected and determined according to different probe tip parameters.

The present invention also proposes a probe omnidirectional measurement method, which can be implemented based on the above-mentioned probe omnidirectional measurement device.

FIG4 discloses a flow chart of a probe omnidirectional measurement method according to an embodiment of the present invention. As shown in FIG4 , a probe omnidirectional measurement method proposed by the present invention includes the following steps:

Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe;

Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is identified, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe.

These steps will be described in detail below. It should be understood that within the scope of the present invention, the above-mentioned technical features of the present invention and the technical features specifically described below (such as embodiments) can be combined with each other and interrelated to form a preferred technical solution.

Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe;

Most existing 3D scanning devices can perform precise scanning on the measurement plane, but cannot achieve measurement and morphological judgment in more directions.

At the same time, due to the diversity of probe types and sizes, when using a camera with the same frame to measure a long needle, there may be a problem that part of it is beyond the visual screen, resulting in certain measurement blind spots.

In this embodiment, in step S1, during the scanning phase, a 3D scanning device is used to perform scanning and measurement of the flatness of the probe.

This step is mainly to coordinate the probe measurement work with the measuring camera in the camera recognition stage to ensure the accuracy of the entire measurement process.

Furthermore, after the scanning is completed, the probe is kept in a vertical state and moved to a measuring position.

Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is identified, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe;

More specifically, by installing a number of measuring cameras in the functional area corresponding to the measuring position, the probe is identified, measured and judged in multiple spatial dimensions from different measuring directions, thereby obtaining all-round shape and size data of the probe.

In some embodiments, three measuring cameras are set in corresponding functional areas of the measuring position, and three mutually perpendicular three-dimensional coordinate directions are used as measuring directions to identify, measure and judge different faces of the probe in the three-dimensional space, so as to obtain all-round shape and size data of the probe;

Furthermore, the probe tip is measured and screened at a fixed point through a measuring camera to determine whether the tip meets the requirements and whether it is consistent, thereby increasing the stability and reliability of the probe card.

In this embodiment, the tip of the probe is measured and screened at a fixed point by a measuring camera fixed above the probe.

Although the above methods are illustrated and described as a series of actions for simplicity of explanation, it should be understood and appreciated that these methods are not limited by the order of the actions, because according to one or more embodiments, some actions may occur in a different order and/or concurrently with other actions from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art.

In combination with the probe omnidirectional measurement device of FIG. 1 to FIG. 3 , a probe omnidirectional measurement method proposed by the present invention as shown in FIG. 4 is further described below. A probe omnidirectional measurement method proposed by the present invention comprises the following steps:

Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe;

More specifically, in the probe omni-directional measurement device shown in FIGS. 1 and 2 , the probe is placed flat on the carrier plate 3 ;

The probe is scanned by a 3D scanning device 1 to obtain the overall height change of the probe and the preliminary shape trend of the probe;

The software of the 3D scanning device 1 is used to judge and screen the flatness of the probe measurement plane;

The 3D scanning equipment has the function of outputting measurement data. After subsequent measurement data integration, the data can be output to trace the problem of the probe, making it convenient to trace back and find the cause of the problem.

After the scanning is completed and the size measurement is correct, the probe is sucked by the suction probe structure 2, and the suction nozzle 21 is leveled by the rotating shaft 24 connected to the mechanical swing arm 22 to keep the probe in a vertical state.

In this embodiment, the 3D scanning device 1 has a scanning format of 4 mm×4 mm, and can measure the probes in batches with a scanning accuracy within 2 microns.

In this embodiment, the diameter of the nozzle 21 is slightly smaller than the width of the probe. For example, the diameter of the nozzle 21 may be 0.2 mm.

Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is identified, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe;

More specifically, in the probe omnidirectional measuring device shown in Figures 1 and 3, the probe on the suction nozzle 21 is clamped by a probe clamping structure 5. When clamping, the probe is sucked by the suction nozzle 21. Before moving the probe, the suction of the suction nozzle 21 needs to be closed to achieve the position movement of the probe.

The clamping probe structure 5 moves the probe to the measuring position, and the first measuring camera 61, the second measuring camera 62 and the third measuring camera 63 used simultaneously at the measuring position 7 identify, measure and judge the probe in three directions, and judge the shape, straightness and position of the probe in various directions in the three-dimensional space to confirm that the probe is not tilted or deflected in this direction.

The first measuring camera 61 is fixed above the probe, and measures from directly above to determine whether the beam is bent and whether the probe is tilted or deflected in the vertical direction;

The second measuring camera 62 is fixed on one side of the probe, and is used to determine whether the probe is tilted or deflected on one side of the X-axis direction;

The third measuring camera 63 is fixed on the other side of the probe and is used to determine whether the probe is in the Y-axis direction. Check whether there is any tilt or deflection on the side.

After all measurements are completed, the warpage and deflection measurements of the probes can be completed to ensure the consistency of the probes on the probe card.

In addition to ensuring that there is no warping or bending on the needle body, specific requirements are also placed on the tip of the probe.

Furthermore, step S2 also includes performing fixed-point measurement and screening on the tip of the probe by using the first measuring camera 61 to obtain a probe whose tip meets the requirements.

For example, some needle tips must have a regular circular shape with dimensions of 10 microns by 10 microns, while some needle tips are required to be square with dimensions of 15 microns by 15 microns.

Therefore, the selection of the camera needs to be determined according to the different requirements of the probe tip to ensure effective control of the tip. The size of the tip is an important consideration when choosing a camera model. For some larger tips, 10X and 20X lenses can clearly reflect light, while for some smaller tips, the lens needs to be changed, such as using a 40X lens.

Therefore, the determination of camera selection is crucial for effective probe control.

The present invention proposes an innovative probe all-round measurement device and method. First, a 3D scanning device is used to scan the probe on the measurement plane to obtain its flatness data, revealing the morphological trend of the probe. Next, three-directional measurement cameras are used to view the situation of the probe in different planes in 3D space, which can capture the shape and size data of the needle in all directions. It is worth mentioning that through the precise coordination of the 3D scanning device and multiple measurement cameras, the positioning accuracy of the probe can be controlled within 0.01 mm, thereby ensuring the high accuracy of the measurement.

The present invention provides a probe omnidirectional measurement device and method, which specifically have the following beneficial effects:

1) Ability to measure all aspects of the probe, including warpage, deflection, and size, to ensure consistency of the probes on the probe card;

2) Ability to control and screen probe tips, thereby improving the reliability and stability of the probe card;

3) Ensure that the needles flowing to the next process are basically usable, thereby avoiding large quantities of NG (non-conforming products) and discarded materials due to problems with the probe itself, and reducing raw material consumption;

4) It can quantify the parameters of the needle, provide reliable measurement data and traceable data, and facilitate the establishment of Establish a database to provide a front-end basis for subsequent operations of the probe and facilitate traceability;

5) Optimizing the inspection steps and details can save work costs and improve the work efficiency of the overall process.

As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and/or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the connection between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

The above embodiments are provided for persons familiar with the art to implement or use the present invention. Persons familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims (15)

A probe omnidirectional measurement device, characterized in that it includes a 3D scanning device, a suction probe structure, a carrier, a clamping probe structure and a plurality of measurement cameras: The carrier plate is used to place the probes required for measurement; The 3D scanning device is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe; The probe suction structure is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction; The probe clamping structure is used to clamp the probe from the probe suction structure and move it to the measurement position; The several measuring cameras are installed in several functional areas corresponding to the measuring positions, and identify, measure and judge the probe in multiple spatial dimensions from different measuring directions, and finally obtain all-round shape and size data of the probe. The probe omni-directional measurement device according to claim 1, characterized in that the scanning format of the 3D scanning device is 1 mm×1 mm to 6 mm×6 mm; The scanning accuracy of the 3D scanning device is within 2 microns. The probe omni-directional measuring device according to claim 1 is characterized in that the suction probe structure includes a suction nozzle, a mechanical swing arm, a suction probe camera, a rotating axis and a first base: The suction nozzle is installed at one end of the mechanical swing arm and is used to suck the probe; The rotating shaft is mounted on the other end of the mechanical swing arm; The mechanical swing arm is mounted on the first base and rotates around the rotation axis to adjust the direction of the nozzle and the probe; The suction probe camera is installed on the first base, located on one side of the mechanical swing arm, and measures the relative positions of the suction nozzle and the probe. The probe omnidirectional measuring device according to claim 3 is characterized in that the suction nozzle The diameter is smaller than the probe width. The probe omnidirectional measurement device according to claim 1 is characterized in that it also includes a plurality of motion axes for providing axial movement: The carrier plate is mounted on the moving shaft for axial movement. The probe omni-directional measuring device according to claim 1 is characterized in that the clamping probe structure comprises a clamping claw, a clamping probe camera and a second base: The clamping claw is installed at the bottom of the second base and is used to clamp the probe; The clamping probe camera is installed on the side of the second base to measure the relative positions of the clamping claw and the probe. The probe omnidirectional measurement device according to claim 1 is characterized in that the plurality of measurement cameras include a first measurement camera, a second measurement camera and a third measurement camera: The first measuring camera is fixed above the measuring position, and the measuring direction is the vertical direction, and is used to determine whether the probe is tilted or deflected in the vertical direction; The second measuring camera is fixed on one side of the probe, and the measuring direction is horizontal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal direction; The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first measuring camera and the second measuring camera, and the measuring direction is horizontal and longitudinal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction. The probe omnidirectional measurement device according to claim 7 is characterized in that the first measurement camera is used to determine whether the probe beam is bent, and to perform fixed-point measurement and screening on the probe tip. The probe omnidirectional measurement device according to claim 1 is characterized in that the magnification of the measurement camera is 10-40 times, which is selected and determined according to different probe tip parameters. A probe omnidirectional measurement method, characterized in that it comprises the following steps: Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe; Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is recognized, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe. The probe omnidirectional measurement method according to claim 10 is characterized in that the step S1 further comprises: after the scanning is completed, the probe is kept in a vertical state and moved to a measurement position. The probe omnidirectional measurement method according to claim 10, characterized in that the step S2 further comprises: The three measuring cameras are set in the corresponding functional areas of the measuring position to identify, measure and judge the different surfaces of the probe in the three-dimensional space from three different measuring directions. The probe omnidirectional measurement method according to claim 12, characterized in that the step S2 further comprises: Fixing the first measuring camera above the measuring position, with the measuring direction being the vertical direction, and measuring to determine whether the probe is tilted or deflected in the vertical direction; The second measuring camera is fixed on one side of the probe, with the measuring direction being horizontal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal direction; The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first measuring camera and the second measuring camera, and the measuring direction is horizontal and longitudinal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction. The probe omnidirectional measurement method according to claim 13, characterized in that the step S2 further comprises: The first measuring camera is used to perform fixed-point measurement and screening on the tip of the probe. The probe omnidirectional measurement method according to claim 13, characterized in that the step S2 further comprises: The selection of the measuring camera is determined according to different probe tip parameters.