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WO2025056119A1 - Fabrication par usinage laser de disques à buses améliorés - Google Patents

Fabrication par usinage laser de disques à buses améliorés Download PDF

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Publication number
WO2025056119A1
WO2025056119A1 PCT/DE2024/100806 DE2024100806W WO2025056119A1 WO 2025056119 A1 WO2025056119 A1 WO 2025056119A1 DE 2024100806 W DE2024100806 W DE 2024100806W WO 2025056119 A1 WO2025056119 A1 WO 2025056119A1
Authority
WO
WIPO (PCT)
Prior art keywords
nozzle
laser
arrangement
openings
nozzle openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/DE2024/100806
Other languages
German (de)
English (en)
Inventor
Joachim Kern
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nebu Tec Med Produkte Eike Kern GmbH
Original Assignee
Nebu Tec Med Produkte Eike Kern GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nebu Tec Med Produkte Eike Kern GmbH filed Critical Nebu Tec Med Produkte Eike Kern GmbH
Publication of WO2025056119A1 publication Critical patent/WO2025056119A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M11/00—Sprayers or atomisers specially adapted for therapeutic purposes
    • A61M11/005—Sprayers or atomisers specially adapted for therapeutic purposes using ultrasonics
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M15/00—Inhalators
    • A61M15/0085—Inhalators using ultrasonics
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2207/00—Methods of manufacture, assembly or production
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/40—Filters located upstream of the spraying outlets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys
    • B23K2103/05—Stainless steel

Definitions

  • the present invention relates to a device and a method for producing improved nozzle discs comprising a plurality of nozzle openings by means of laser processing, wherein the nozzle openings have a desired nozzle geometry which is optimized for the delivery of aerosols with an advantageous droplet size distribution.
  • nebulizers for generating a fine-droplet medication mist from a medication liquid are known in the art.
  • One type operates according to the principle that the medication liquid applied to a nozzle disc with a plurality of outlet holes is released as a fine-droplet mist through vibrations of the membrane on an outlet side opposite the medication side.
  • the outlet holes, or nozzle holes/openings, or simply nozzles typically have a cross-section that varies along their shape to achieve specific fluid transport properties through the nozzle.
  • Such nozzle discs are used not only in nebulizers but also in other fluid transfer devices, such as pumps or filters.
  • a pump effective fluid transport is to be achieved by means of the diaphragm.
  • the diaphragm is usually moved back and forth periodically, or in pumps with a static diaphragm, the fluid is passed over the diaphragm by means of a piston that moves back and forth periodically.
  • a piston that moves back and forth periodically.
  • fluid is pushed through the diaphragm nozzles, and when moving in the opposite direction, it is pushed back again.
  • nozzles with a diameter that is not symmetrical to the diaphragm plane are used.
  • metric cross-section profile In particular, nozzles in which the cross-section widens from one side to the opposite side facing in the desired transport direction.
  • Such pumps which are based on a back-and-forth moving diaphragm, have the advantage of being mechanically simpler than rotary pumps. Miniaturization is also easier. This is offset by the disadvantage of higher power consumption per volume transported, i.e., lower energy efficiency. Optimizing the nozzle cross-sections and cross-sectional shapes is important here to minimize power consumption as much as possible.
  • the goal of filters is to recover particles suspended in a fluid.
  • the nozzles must have a diameter that is smaller than all linear dimensions of the particles to be retained.
  • Perforated membranes in the form of nozzle discs of the type described above are also used in nebulizers, where they are also known as mesh membranes.
  • the goal here is to deliver a droplet mist with droplet sizes of 5 pm or less, provided that respirable droplets are desired.
  • a mesh membrane is used in the aerosol generator of a nebulizer in such a way that the medication fluid is applied to one side of the supply line. If the membrane is then periodically oscillated in the direction perpendicular to the surface, this causes pressure fluctuations in the fluid applied to the supply line. This is then forced through the nozzles and released as a fine mist droplet on the opposite outlet side.
  • European Patent Application EP 1295647 A1 discloses a nozzle disk in which the nozzles have two distinctly different sections along their path: a roughly cylindrical nozzle throat with a smaller diameter and a continuous region adjoining the nozzle throat. According to this document, the transition between the nozzle throat and the widening region should not be continuous, but rather have a bend, as this would advantageously prevent any liquid remaining in the nozzle after droplet ejection from being completely ejected from the nozzle, which would result in the nozzle being completely filled with liquid again when the membrane springs back.
  • the nozzles have a monotonically tapered geometry with a taper factor, i.e. a ratio of nozzle inlet area to nozzle outlet area, of significantly greater than one, more precisely in the range between 10 and 50.
  • This document also discloses a manufacturing method for such nozzle discs using laser drilling.
  • This method requires a A two-step process is used, whereby the expanding area of the nozzle is formed in a first step and, after changing the laser focus, the neck area of the nozzle is formed in a second step.
  • an electropolishing step is then recommended to remove sharp surface structures.
  • the disadvantage here is that the method thus represents a three-step process in which the parameters of the position of the laser focus and the applied laser energy must be controlled very precisely, especially during laser drilling.
  • this method is not suitable for cutting out or forming the contour of the membrane.
  • the applicant's patent application DE 10 2020 110 404.9 proposes a simplified and improved manufacturing process in which the nozzles of the nozzle disks are manufactured by laser drilling, but the contour, i.e., the outline, is formed by etching.
  • etching a photosensitive material is applied to a membrane surface in a known manner and then exposed to light of a wavelength to which this material is sensitive via a mask. The exposed area is then removed by a chemical bath, and the actual etching fluid is then applied to create the nozzle contour.
  • the patent specification DE 10 2014 200 633 B3 discloses a laser processing device for processing the surface of a workpiece, in which a laser beam bundle can be displaced in parallel by means of a rotation unit around an optical axis, wherein the displaced laser beam bundle is divided into a plurality of partial Beams can be fanned out, the partial beams are each focused, some partial beams are removed, the angles of the rays of the partial beams to each other are reduced, the remaining partial beams can be deflected in a time-dependent manner and can each be focused.
  • the published patent application DE 10 2004 043 895 A1 shows a system and a method for delivering (laser) energy to a substrate, in which a main beam is split into a plurality of partial beams, which are then directed to selectable locations on the substrate by means of independently positionable beam control elements in order to produce desired structures there.
  • the control of the laser beam source is to be regulated based on the signal from an analyzer, which is arranged on the back of the raw material and adjusts this to the openings of the individual Holes are monitored.
  • the laser beam is switched off individually for each opening as soon as the detected brightness exceeds a threshold.
  • control system used there is that it does not monitor the nozzle shape, i.e., the cross-sectional profile, because the light intensity passing through it only allows limited conclusions about this. Likewise, this document is silent regarding the definition of the nozzle disk contours.
  • the present invention has set itself the task of finding improved nozzle discs with nozzle geometries which, when used in a nebulizer, lead to an advantageous droplet size distribution, whereby they can be manufactured quickly and economically by means of laser processing methods.
  • a device according to claim 1, an arrangement comprising at least one such device according to claim 9, a manufacturing method using the device and/or arrangement according to claim 15 and a nozzle disc according to claim 20.
  • the device comprises a laser beam source for emitting a laser beam to a first laser optics with a beam input for receiving the laser beam and a beam output, wherein the laser beam can be divided into a plurality of partial beams arranged in a grid by means of a beam-shaping element of the laser optics, a control of the arrangement with a control unit for controlling of laser beam source and laser optics.
  • control unit is configured to control the laser beam source and/or the laser optics in such a way that the partial beams generated by the laser optics simultaneously drill a first plurality of nozzle openings in a desired grid arrangement into the raw material strip within a region of a nozzle disk to be produced, wherein each of the nozzle openings has a desired geometry with a taper factor, i.e., a ratio of nozzle inlet to nozzle outlet area, of greater than one.
  • the nozzle geometry can have a taper factor of 50 or more, especially 100 or more. Since the size of the nozzle inlet area is limited by the distance between adjacent nozzle openings, the key to this is
  • the nozzle geometry can have a monotonically tapered shape.
  • the control system guides the multiple partial jets in multiple layers across the surface of the raw material strip, so that a desired geometry of the nozzle openings is created layer by layer, or more precisely, horizontally.
  • Layer by layer means that the desired nozzle geometry is first completed to a first depth of, for example, 1/10 of the total depth, which also corresponds to the thickness of the machined nozzle disc blank, within the achievable manufacturing tolerance, before drilling deeper, for example, a second layer is completed to a second depth of 2/10 or 3/10 of the total depth. This continues layer by layer until the nozzle opening is completed.
  • the individual removed layers can be of the same or different thicknesses.
  • some or all of the nozzle openings can be drilled in layers, not just horizontally, but in other ways, either layer by layer or not layer by layer.
  • the laser ablation of the blank material to be removed can, for example, be performed in layers that are adapted to the contour of the inner surface of the desired nozzle geometry.
  • a central cylindrical channel i.e., one containing the nozzle axis, can be drilled first, and then the inner surface of this channel can be ablated layer by layer until the desired nozzle geometry is achieved.
  • the vertical extension of the layers decreases with increasing distance from the nozzle axis.
  • the above-described removal process of vertical or at least non-horizontal layers can also be performed from the outside inward, i.e., working from the edge of the nozzle inlet opening inward.
  • each of the partial beams of the laser beam is guided over the surface of the blank in discrete concentric circles or, alternatively, in a spiral pattern in the area of the nozzle opening to be drilled by the respective partial beam.
  • the laser beam should be briefly switched off or the beam power significantly reduced when switching from one to the next to avoid deviations from the desired geometry.
  • the partial beams can be moved at a constant or variable speed.
  • the number of nozzles that can be drilled simultaneously corresponds to the number of partial beams determined by the diffractive element of the laser optics. This can be designed in such a way that a large number of partial beams can be generated, for example, several hundred or thousand partial beams. In some embodiments, for example, 140 or more partial beams can be generated.
  • a structured quartz glass disc, for example, can be used as the diffractive element.
  • the arrangement according to the invention comprises one or more laser processing devices (laser drills) according to the invention, which are combined with a belt conveyor system which can transport a raw material belt provided on a roll in a conveying direction past the beam output of the laser optics of the laser drill(s).
  • laser processing devices laser drills
  • belt conveyor system which can transport a raw material belt provided on a roll in a conveying direction past the beam output of the laser optics of the laser drill(s).
  • the laser optics can be focused on a point in another area of the metal strip serving as the blank after drilling all of the nozzle openings of a nozzle disk in order to drill the nozzles of another nozzle disk.
  • the sheet metal is preferably moved past the stationary optics, either in a stop-and-go process or continuously. With a continuous movement, there is no need for frequent starting and stopping of the material strip and the associated waiting times until vibrations subside. This benefits the manufacturing speed. If the highest possible precision is desired, a stop-and-go process is preferred.
  • the material strip such as sheet metal, in particular stainless steel sheet
  • the material strip can be unwound from a reel on which it is wound.
  • the sheet metal provided with the drilled holes can be rewound onto a second reel for further processing at a different location or at a different time, or further processing can take place directly, for example in an arrangement further developed according to the subclaims or the embodiments below.
  • the first laser optics of the laser drill can also be designed in such a way that it is capable of flexibly splitting one or more contour beams from the input laser beam using a bypass, which serve to shape the outlines of the nozzle disks. This can be done, for example, by moving a single laser beam in the desired contour over the surface of the material to be processed.
  • the laser beam can also be imprinted with any desired shape, such as a circular ring, by the optics.
  • a dedicated device for completely or partially separating the nozzle disks is preferably provided, which device is arranged before or after the laser drill, as seen in the direction of travel of the belt.
  • the separation device can orient itself to the already existing nozzle hole areas when positioning the contour to be created, i.e. the area of the drilled nozzle holes is detected and the contour which completely or partially separates the nozzle disk is introduced in such a way that it has a desired position relative to the respective detected nozzle hole area.
  • the nozzle hole area is located centrally, in particular concentrically, in the nozzle disk.
  • connection between the nozzle disc and the rest of the material strip is not completely severed, but only along a portion of the contour.
  • one, two, three, or more webs can initially be left standing and only then be removed in a subsequent contouring step by a device following the separation device in the direction of travel of the strip, for example, a pressing tool comprising a punch and a die.
  • This separation device is preferably a laser cutter/laser separator with its own laser optics and laser beam source.
  • this fundamentally reduces the Production speed, on the other hand, this also enables the use of devices optimized for the respective purpose: on the one hand, a laser drill that can drill as many nozzle openings as possible simultaneously, whereby high accuracy is important, and on the other hand, the laser cutter, which can work out the linear contour of the nozzle discs as quickly as possible, whereby the accuracy requirements are lower than for the nozzle openings, whose size is in the micrometer range.
  • the arrangement can further comprise a shaping device by means of which a desired three-dimensional shape can be imprinted on the nozzle disks.
  • a shaping device by means of which a desired three-dimensional shape can be imprinted on the nozzle disks.
  • the flat and planar material of the strip or nozzle disk is plastically deformed in the direction perpendicular to the surface of the strip before or after contouring.
  • the shaping device serves to form a dome-shaped or cupola-shaped region in which the nozzle holes are located, in particular centrally or even concentrically.
  • the shaping device can be a pressing tool such as the one used to create the contour of the nozzle disk or to completely separate the pre-contoured nozzle disks (preferably by means of a laser separator) from the rest of the strip.
  • the shaping device can also be a separate device and be arranged before or after the separation device or even the laser drill.
  • the method according to the invention for producing a nozzle disc comprises that the raw material strip is moved past the beam exit of the first laser optics, the surface of the material, for example a metal sheet, is exposed to the plurality of partial beams arranged in a grid shape and thereby in the A first plurality of nozzle openings arranged in a grid-like manner are drilled simultaneously in the area of the nozzle discs to be produced, wherein during drilling the plurality of partial jets are guided in several layers over the surface of the raw material strip and thereby a desired geometry of the nozzle openings is produced layer by layer.
  • the contour of the nozzle discs is machined from the raw material. This can generally be done before, during, or after drilling the nozzle openings. In the former case, the correct positioning of the numerous nozzle openings relative to the contour would have to be ensured during the subsequent drilling of the holes; in the latter case, the same applies in reverse for the positioning of the contour relative to the nozzle openings. In both cases, this can be achieved using a camera system, for example, which recognizes the respective existing structure and transmits its position to the subsequent processing device in the conveying direction of the belt - in the former case the laser drill, in the latter case the laser separator. In simple test systems, manual adjustment of the blank to be machined by an operator is another possible solution. However, this is no longer economical or even practical for larger batch sizes or parallel processing of multiple blanks or multiple nozzle discs to be formed.
  • the optics of the laser drill can include the option of emitting a contour laser beam that can be moved separately or shaped according to the contour. This is achieved via a bypass.
  • these two processing modes can be flexibly combined via The control system can be selected and switched, for example by means of suitable software, which has been prepared accordingly.
  • the nozzle disk according to the invention is characterized by the high taper factor of 50 or more, preferably 100 or more, of its nozzle openings.
  • the nozzle inlet and outlet openings can be circular and have a diameter of 20 micrometers or more, preferably 25 micrometers or more, particularly preferably 50 micrometers or more in the case of the inlet opening and 3 micrometers or less, in particular 2.5 micrometers or less in the case of the outlet opening.
  • the large taper factor results in high flow acceleration and thus flow velocity at the outlet opening, which leads to rapid separation of the liquid emerging from the outlet opening and thus to advantageously small droplet sizes.
  • unwanted wetting of the nozzle disk outlet side is reduced. It has been found that the precise shape of the nozzle inner surface does not have a very significant influence on these properties. In particular, a simple cone shape or bell or trumpet shapes that are close to the cone shape produce equally good results.
  • all nozzle holes of a nozzle disk are drilled simultaneously. If the number of partial jets is insufficient for this, alternatively, only one part is drilled simultaneously, each corresponding to an arrangement of the multiple partial jets generated by the diffractive element. This partial jet arrangement is then laterally offset to drill the next plurality of nozzle openings, and so on.
  • the total number of nozzle openings corresponds to an integer multiple of the number of partial jets. For example, with 140 partial jets, 980 nozzle holes can be drilled in 7 steps.
  • the first laser optics comprises a multi-beam laser scanner, by means of which the plurality of grid-like partial beams generated by the diffractive element can be moved in two directions perpendicular to each other and to a beam axis. This allows the partial beam arrangement to be moved freely over the surface of the workpiece.
  • This offset or offset vector particularly preferably originates from the unit cell of the partial beam grid, i.e., is a weighted sum of the basis vectors of the partial beam grid with weighting factors less than 1.0.
  • an associated nozzle opening of the second plurality lies within the unit cell spanned by the basis vectors.
  • More than one offset vector can also occur.
  • the number of offset vectors, including the zero vector corresponds to the number of steps required to drill all nozzle openings.
  • the offset vectors can be randomly selected within the unit cell, but care must be taken to ensure that the edges of the individual nozzles do not come too close to each other.
  • the offset vectors should preferably also be arranged in a grid. This type of grid arrangement can, but does not have to, correspond to that of the partial jets.
  • the grid-like arrangement of the partial beams, as well as the offset vectors preferably forms a hexagonal grid.
  • other grid arrangements of the partial beams and/or offset vectors are also possible, such as triangular, rectangular, or square grids, and different grid types can also be combined.
  • the beam-shaping element is reconfigurable by corresponding control signals from the process control system, allowing various grating-shaped arrangements of partial beams to be generated.
  • the grating geometry triangle, square, hexagon, regular, compressed, grating constant(s), etc.
  • the outline or layout of the generated partial beam rectangular, hexagonal, cross-shaped, star-shaped, hollow, filled, etc.
  • the beam-shaping element preferably comprises an electro-optical element and variable apertures.
  • the beam-shaping element is a diffractive element, such as a diffraction grating, and the splitting into partial beams occurs by diffraction of the first laser beam at this grating.
  • the zeroth diffraction order which corresponds to direct transmission, is omitted, and only the first diffraction order is used.
  • a reconfiguration of the jet-shaping element can take place, so that first a first plurality of nozzle holes with a first configuration, such as a hollow square grid arrangement with a square floor plan, are drilled, and then a second plurality of nozzle openings with a different configuration, such as a cross-shaped square grid arrangement, which can have the same or a different grid constant, are drilled.
  • a first configuration such as a hollow square grid arrangement with a square floor plan
  • a reconfiguration of the jet-shaping element and thus of the grid-like arrangement of partial jets takes place even before the first or one of the further plurality of nozzle openings has been completely drilled.
  • drilling can begin with a first grid arrangement having a first outline and a first hole shape and be carried out to a certain depth, which can correspond to or be smaller than the thickness of the raw material.
  • a first reconfiguration of the jet-shaping element then takes place into a second grid arrangement and a second outline, which only includes a first part of the hole positions of the first grid arrangement, and the partially completed nozzle openings drilled at these positions are further drilled or completed with a second nozzle shape.
  • nozzle openings can also be started at new positions extending beyond the first grid arrangement. Subsequently, a second, third, etc. reconfiguration can take place, in which further partially completed nozzle openings are further drilled and/or finished according to a third, fourth, etc. nozzle shape, or new nozzle openings are started at further positions until finally all nozzle openings are finished drilled with a desired nozzle shape.
  • a first partial jet arrangement can be started with a hexagonal grid with an outline in the shape of a regular hexagon and, by means of layer-by-layer removal according to the invention in several passes down to a first depth, a first nozzle shape, i.e. a first nozzle cross-sectional profile, can be drilled.
  • the jet-shaping element is then reconfigured, in which the hexagonal grid arrangement is retained but the outline is changed to a regular triangle.
  • the central nozzle openings are then finished drilling according to a second nozzle shape, i.e. a second nozzle cross-sectional profile.
  • the remaining, not yet completed nozzle openings of the first partial jet arrangement are finished drilling with as few reconfigurations as the outlines possible using the jet-shaping element allow, ideally with a single reconfiguration.
  • further nozzle openings extending beyond the first partial jet arrangement can also be started.
  • a reconfiguration can be carried out to form a partial jet arrangement corresponding to the hexagonal grid of the first partial jet arrangement, but with a triangular outline in which the hexagonal outline of the first partial jet arrangement is inscribed, but the outline of the second arrangement is left out.
  • the outer nozzle openings of the first arrangement begun in the first step but not yet completed in the second step are then finished drilling according to a third desired nozzle shape, and additionally, new nozzle openings extending beyond this first arrangement are started with the third nozzle shape.
  • the nozzle openings newly begun in the third step are then finished drilling according to the third or another nozzle shape, again by removal according to the invention in horizontal, vertical or other layers.
  • the result in this example is a nozzle opening arrangement with an outline in the form of an equilateral triangle, in which the nozzle openings of the points of the triangle extending beyond an inscribed area with the outline of a regular hexagon are drilled according to the third, possibly in conjunction with further nozzle shape, the nozzle openings of the inscribed hexagonal area, with the exception of a central area inscribed therein with an outline of an equilateral triangle, with a nozzle shape which represents a combination of the first and third nozzle shapes, and the nozzle openings of the central triangular area are drilled with a nozzle shape which represents a combination of the first and second nozzle shapes.
  • nozzle drilling i.e. the previously described method with intermediate reconfiguration (reconfiguration before completion of all nozzle openings at the positions exposed to the respective partial beam arrangement) as well as the drilling of the nozzle openings by ablation of horizontal, vertical or inclined layers described at the beginning, can be realized particularly easily in conjunction with a pulsed laser beam source.
  • a reconfiguration of the beam-shaping element can also take place between two pulses, so that a first pulse or a first series of pulses with a first configuration, a second pulse or a second series of pulses with a second configuration, etc., are emitted until all desired nozzle openings with the respective desired nozzle shape have been machined.
  • the arrangement according to the invention preferably comprises a laser cutting device or a laser separator for cutting out and shaping the contour of the nozzle disks.
  • This laser separator has its own laser optics, which creates a cutting laser beam or contour beam from an input laser beam.
  • This can be a focused Gaussian-shaped It can be a single beam that is moved across the surface to create the contour. Alternatively, it can be a fanned-out beam or a bundle of rays whose shape corresponds to the desired contour.
  • the cutting laser beam is preferably provided by a separate laser beam source for the laser separator.
  • the contour is preferably created using the laser separator after the nozzle openings have been drilled.
  • a camera takes images of the material surface, in which the areas with the drilled nozzle holes are identified using image recognition. The coordinates of these identified areas are then passed on to the laser separator's control system, allowing it to cut out the desired nozzle disk contour, usually preferably a circular contour, at the corresponding locations around the nozzle opening arrangements.
  • other geometries can be incorporated, such as hole circles with a desired diameter.
  • the laser beam sources of the laser drill and/or the laser separator/laser cutter are preferably operated in pulsed mode, whereby laser pulses of varying durations can be used.
  • the first laser beam source which provides at least the laser beams for drilling the nozzle openings
  • a laser beam source in the femtosecond range is preferred, allowing for greater precision.
  • the pulse duration is preferably in the range of 10 fs to 50 ps. This range is optimal for avoiding heat accumulation and results in a reduced occurrence of material melting and associated resolidification artifacts, which may require complex post-treatment removal when using longer pulses.
  • a second laser beam source is preferably used to provide the contour beams. This particularly preferably operates with laser pulses in the picosecond range, with a pulse duration of up to 50 ps. Furthermore, it preferably has a higher power than the first laser beam source, which is preferably used exclusively for generating the drilling beams.
  • a sheet metal blank is subjected to drilling beams generated by the first laser beam source and the first laser optics, and the nozzles of the nozzle disks are drilled.
  • second laser optics preferably as part of a separate laser cutting device with its own laser beam source, one or more contour beams are generated, and the contours of the nozzle disks are formed.
  • the nozzle disk can be separated immediately from the surrounding material, or merely a predetermined breaking point is created, and the nozzle disk is released mechanically in a later or subsequent step.
  • a pressing tool with a punch and a die can be provided.
  • More than one laser drill and/or multiple laser separators can be present, such as two, three, four, etc., so that multiple nozzle disks can be processed in parallel.
  • the number of laser drills does not have to correspond to the number of laser separators.
  • multiple laser drills are available, they can be arranged one behind the other in the conveying direction of the material belt.
  • the belt is preferably periodically started to transport semi-finished nozzle discs and remove unprocessed material areas, and then stopped for precise laser drilling of the nozzle openings.
  • a sequential arrangement of several laser drills can be combined with stepwise drilling of the nozzle openings if the number of partial beams is smaller than the desired number of nozzle openings.
  • a first laser drill in the conveying direction would drill a first plurality of nozzle openings, a second laser drill a second plurality offset from the first by an offset vector, and so on, until all desired nozzle openings have been drilled after the last laser drill has passed.
  • all of the laser drills arranged one behind the other have a similar reconfigurable beam-shaping element, so that they can also generate a similar grid-like arrangement of partial beams.
  • a diffractive element is used as the beam-shaping element, which enables the beam from the first laser beam source to be split into the plurality of partial beams by means of diffraction.
  • one or more of the laser drills arranged one behind the other can have a different diffractive element, so that the partial beam arrangement generated by it differs from the others.
  • nozzle disks with a round contour are common, and it is usually desired to make the outline of the nozzle opening arrangement as close as possible to a circular shape.
  • all holes are drilled using partial beams generated by the same diffractive element, this is only possible to a limited extent. For example, a hexagonal arrangement of the partial beams already deviates significantly from a circular shape.
  • TI shaped sections For example, a circular nozzle arrangement could be approximated from three rectangular and four triangular sections, one square and four triangular sections, or seven hexagonal and six triangular sections.
  • correct positioning of the additional plurality of nozzle openings relative to those already drilled must be ensured.
  • This can be achieved by using a camera system, in particular one camera per laser drill, in conjunction with image recognition.
  • This system detects the position of the drilled holes and transmits this information to the respective laser drill, so that the nozzle openings to be drilled are correctly positioned relative to the existing ones.
  • several laser drills are arranged next to one another in a transverse direction.
  • the material strip can be moved either in stop-and-go mode, as described above, to increase manufacturing precision, or at a continuous speed for a higher production rate. In either case, a number of nozzle discs corresponding to the number of laser drills will be drilled simultaneously.
  • the strip material is cleaned after laser drilling to remove contaminants created during laser drilling, particularly at the nozzle opening edges.
  • An ultrasonic bath for example, is suitable for this purpose.
  • this cleaning step preferably takes place after drilling but before cutting out the nozzle disk contour.
  • the arrangement according to the invention has a cleaning section downstream of the laser drill in the conveying direction of the material strip, which is particularly preferably used for An ultrasonic bath is provided for cleaning. Furthermore, this cleaning section is preferably arranged between the laser drill and the laser separator/cutting device.
  • particulate ablation residues can also be removed by laser cleaning.
  • the laser drill(s) themselves are suitable for this purpose.
  • the laser separator(s) can also be used.
  • Suitable raw materials for use in the arrangement and method according to the invention are any that can be formed into a thin layer and rolled up.
  • Stainless steel or nickel sheet are particularly interesting for nozzle discs.
  • Fig. 1 A schematic perspective view of an embodiment of the device according to the invention.
  • Fig. 2A A schematic section through a blank in which a desired nozzle geometry is machined in horizontal layers.
  • Fig. 2B A schematic section through a blank in which a desired nozzle geometry is machined in vertical layers.
  • Fig. 2C A schematic section through a blank in which a desired nozzle geometry is machined in inclined layers.
  • Fig. 3 A schematic view from an elevated perspective of a nozzle disc blank during a drilling process in which the material is removed in vertical layers.
  • Fig. 4 A schematic side view of an embodiment of the arrangement according to the invention.
  • Figure 1 shows a schematic perspective view of an embodiment of a laser processing device according to the invention for producing nozzle disks.
  • the laser drill 1 comprises a laser beam source 2, which emits a laser beam 21, which is fed to a laser optics 3.
  • the laser beam 21 first passes through a diffractive beam splitter 310 of the beam-shaping element 31 and is thereby split into a plurality of partial beams.
  • the desired grating arrangement of partial beams is predetermined by a mask 312, which is arranged in the propagation direction of the laser beam or laser (partial) beams between a first imaging optics 311 and a second imaging optics 313.
  • the partial beam emerging from the second imaging optics 313 in the desired grid arrangement strikes a mirror 332 in the scanner head 33, also referred to as a galvano scanner, which can be pivoted in two axes, and is then focused in the form of the plurality of partial beams 32, which have the desired grid arrangement, by the focusing optics 331 onto the area 51 within the blank 5 intended for the nozzle disk to be produced, shown here as a circle.
  • the control unit 41 of the controller 4- By controlled pivoting of the galvano scanner 332, the partial beams can be moved together over the surface of the blank 5, for example in order to drill the nozzle openings layer by layer with the respective desired geometry in accordance with the invention.
  • Detailed view B shows a top view of the nozzle disk area 51.
  • Figures 2A to 2C illustrate different possibilities for layer-by-layer drilling of nozzle openings of different geometries provided within the scope of the present invention.
  • Figure 2A illustrates horizontal layer-by-layer ablation.
  • a nozzle opening 52 with the monotonically tapering (truncated) conical geometry G1 is drilled by successively ablating horizontal layers 522, i.e., layers parallel to the surface of the blank 5, starting from the entry surface 521.
  • the laser (partial) beam is guided in concentric circles or spirally over each layer such that the product of beam width and travel speed is proportional to the (time-averaged, in particular period-averaged) beam power, with the proportionality constant depending on the material of the blank and the thickness or strength of the respective layer 522.
  • the layers 522, 528 can all have the same thickness.
  • the layer thickness can also be adjusted during the drilling process, for example, thicker layers can be ablated with increasing depth.
  • the nozzle opening 52 with the desired geometry G1 is completed except for any necessary post-treatment.
  • Figure 2B illustrates vertical layer-by-layer ablation.
  • the nozzle opening 52 with a monotonically tapering bell-shaped geometry G2 is drilled by ablating vertical layers 525, i.e., layers perpendicular to the surface of the blank 5, starting from the axis of symmetry S of the nozzle opening 52.
  • the laser (partial) beam is guided outward over each layer in concentric circles or spirals, starting from the axis of symmetry S, such that the product of beam width, travel speed, and desired drilling depth D(R) for the current distance R of the beam center from the axis of symmetry is proportional to the (time-averaged, in particular period-averaged) beam power, whereby the proportionality constant depends on the material of the blank.
  • the layers 522, 528 can all have the same thickness. Alternatively, the layer thickness can also be adjusted during the drilling process by changing the beam width and adjusting the distance between adjacent concentric circles or spiral arcs of the path on which the laser beam is guided over the surface of the blank.
  • the figure shows the process at the time when a cylindrical central channel 520 has already been created by the layer-by-layer removal described.
  • the ablation can also start at the outer edge of the entrance opening 521 and the laser beam can be guided inwards in concentric circles or spirally.
  • the layers 525 may not run exactly vertically, but rather form a small angle of between 0 and 10 degrees with the vertical. However, within the scope of the invention, this is considered vertical layer removal.
  • Figure 2C shows a mixed form in which the layer-by-layer removal takes place along inclined layers, which also can be adapted to the nozzle geometry to be created.
  • the nozzle opening 52 is intended to have a trumpet-shaped geometry G3.
  • inclined and increasingly trumpet-shaped layers 527 that slowly approach this desired geometry are removed in a similar manner to that described above in connection with Figures 2A and 2B.
  • FIG. 2A-20 The combinations of geometries and layerings illustrated in Figures 2A-20 are merely examples.
  • the illustrated geometries G1-G3 can also be produced with the other illustrated or other conceivable layer removals.
  • nozzle disks according to the invention are not limited to the illustrated nozzle geometries G1-G3, but can also have others.
  • Figure 3 shows a perspective view of a nozzle disk blank during a drilling process in which the material is removed in vertical layers.
  • the partial laser beam 32 is guided at a speed u along a spiral path SB, shown here as an example, over the surface of the blank 5.
  • the laser ablation has already ablated a portion of the material to be removed, thereby creating the curved groove 52'.
  • the traversing speed u, the average beam power, and the beam width w can be varied during drilling, for example, to meet accuracy requirements in certain parts of the nozzle opening. For example, there are no special requirements for areas of the material to be removed that are not close (measured relative to the beam width) to the future nozzle inner surface. The goal here is to remove the material as quickly as possible.
  • the desired nozzle geometry should be implemented as precisely as possible, or at least precisely enough. Accordingly, beam power P, beam width w and travel speed For locations near the inner surface of the nozzle, for example, the jet power P may be reduced, which may require a corresponding adjustment of the other parameters.
  • Figure 4 shows schematically an embodiment of an arrangement according to the invention.
  • the arrangement 100 comprised a belt conveyor system 9 which transports a raw material strip 95 unwound from a roll 90 by means of a plurality of deflection rollers 92 in a conveying direction V through a plurality of successive processing areas.
  • the raw material strip is guided over a support 934, where the laser drilling of the nozzle openings takes place using laser drills 1a, 1b.
  • a support 934 As shown, several of these can be arranged one behind the other in the conveying direction V, but additionally several can be arranged side by side (not shown) transversely to the conveying direction V.
  • a side-by-side arrangement enables the simultaneous processing of several adjacent nozzle disks.
  • the laser drills 1a, 1b each comprise a laser beam source which, by means of a reconfigurable beam-shaping element, preferably in the form of a controllable diffraction grating with a downstream aperture arrangement, each feeds a laser beam to a laser optics 3a, 3b, which splits the beam into a bundle of partial beams 32.
  • the partial beam bundles 32 have a different two-dimensional grid-like arrangement of the partial beams and a different outline, created, for example, by means of apertures.
  • Possible grating geometries are, for example, a triangular, quadrangular, or hexagonal grating with different grating constants in both spatial directions transverse to the beam direction.
  • Possible outlines are triangular, rectangular or square, hexagonal, cross-shaped, or star-shaped. Within an outer outline, Shapes are cut out so that (initially) areas without holes remain within the outline.
  • the partial beam bundles 32 are guided over the surface of the raw material strip 95 in multiple passes, so that nozzle openings with a desired nozzle shape are drilled at the desired positions by layer-by-layer material removal.
  • a reconfiguration of the beam-shaping element of the respective laser optics 3a, 3b can be performed for one or all of the laser drills 1a, 1b during processing.
  • a second plurality can be drilled.
  • the nozzle openings or nozzle opening positions of this second plurality can all be different from those of the first.
  • the grid geometry and outline of the second plurality can be identical to those of the first, but offset from it by a specific vector.
  • the first and second plurality of nozzle openings (positions) can overlap, i.e. have common nozzle openings (positions).
  • the nozzle openings (positions) of the second plurality of nozzle openings (positions) can also be a subset of those of the first plurality of nozzle openings (positions). For example, after reconfiguration to form a partial jet arrangement with an identical grid geometry but a different outline, some of the unfinished nozzle openings of the first plurality of nozzle openings can be finished with a different nozzle shape.
  • the laser drills are controlled by a process control system 104 comprising a control unit 41 that sends commands to the controlled devices via control lines 43 and in which a control program is stored, as well as an input unit 42 that provides a user interface for writing and modifying the control program.
  • Control unit 41 and input unit 42 are shown as separate devices in Figure 1. can, however, also be combined in a single device.
  • the control unit 41 is not necessarily responsible for the fine control of all degrees of freedom of the laser drills 1a, 1b or other devices controlled by them, such as the laser separator 96 and/or the punch 93. This is possible, but inefficient.
  • the control unit preferably sends commands from a higher hierarchical level to the controlled devices 1a, 1b, 96, 93 and thus ensures the implementation of the program-compliant nozzle disk production.
  • the controlled devices 1a, 1b, 96, 93 preferably each have their own control or regulating units (not shown), which convert the commands from the central control unit 41 into targeted movements of their degrees of freedom or actions of their respective actuators.
  • the laser beam sources are ultrashort pulse laser sources that emit pulses with a fluence of up to 5 J and a duration of between 1 fs and 50 ps, particularly preferably between 350 and 1000 fs.
  • the pulse frequency is preferably between 10 kHz and 1000 kHz.
  • the material strip 95 passes through a cleaning section 94, in which any artifacts of melted and resolidified material are removed in an ultrasonic bath.
  • a finishing section 107 the nozzle disks are contoured, i.e., cut out along a desired contour.
  • This usually has the basic shape of a circle.
  • further structures deviating from this basic shape can be formed or cut out. In the preferred embodiment of the arrangement according to the invention shown in Figure 1, this is done by a laser separator 96.
  • several laser separators arranged side by side transversely to the conveying direction V can also be present here.
  • the laser separator 96 comprises its own laser beam source 961 and laser optics 962, which focus the laser beam generated by the laser beam source in the form of the cutting laser beam 963 onto the surface of the material strip 95 supported by the base 964 and, using a laser scanner, guide it along the desired nozzle disk contour.
  • the laser separator is controlled according to the program by the central control unit 41.
  • a camera system with image analysis can enable the laser separator 96 to detect the areas with nozzle openings and to correctly align the cutting beam 963 relative to them.
  • the nozzle discs are not completely separated from the rest of the material of the strip 95 by the laser separator 96, but rather, only a predetermined breaking point is created and/or one, two, or more, preferably regularly arranged, material bridges or webs remain.
  • the separation then takes place in a punch 93 comprising a punch 931 and a die 932.
  • a robot arm 99 then lifts the finished punched nozzle discs from the strip 95 into a container (not shown). The remnants of the raw material strip are subsequently shredded by a shredder 91.
  • the punch 93 or a similar pressing tool arranged upstream or downstream of it in the strip's travel direction V can also perform the additional function of imprinting a dome-shaped or cupola-shaped area on the nozzle discs, in which the nozzle holes are arranged centrally or, preferably, concentrically.
  • the curvature of this area is oriented such that the tapering direction of the nozzle openings coincides with the direction of the curvature.
  • the nozzle discs When used in nebulizers, the nozzle discs can be bonded to a vibration generator using an adhesive. This bond is advantageously improved if bonding openings are provided in the areas of the nozzle discs to be bonded, usually in the outer edge area. Depending on their size and number, these bonding openings can be created in the nozzle discs either by the laser drills 1a, 1b or the laser separator(s) 96.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un disque à buses amélioré destiné à être utilisé dans un appareil de transfert de fluide, en particulier un nébuliseur, et un dispositif d'usinage laser ainsi qu'un agencement et un procédé de fabrication d'un tel disque à buses par usinage laser. Le disque à buses présente une géométrie de buses ayant un facteur de rétrécissement, c'est-à-dire le rapport entre la surface d'une ouverture d'entrée de buse et la surface d'une ouverture de sortie de buse, de 10 ou plus, en particulier de 20 ou plus, de manière particulièrement préférée de 100 ou plus. Le dispositif comprend une source de faisceau laser destinée à délivrer un faisceau laser à une optique laser, le faisceau laser pouvant être divisé en une pluralité de faisceaux partiels agencés sous forme réticulaire au moyen d'un élément de formation de faisceau, et le dispositif comprend également une commande présentant une unité de commande pour assurer la commande de la source de faisceau laser et de l'optique laser, l'unité de commande assurant la commande de la source de faisceau laser et/ou de l'optique laser, de telle sorte que les faisceaux partiels générés par l'optique laser percent simultanément une pluralité d'ouvertures de buse dans un premier agencement réticulaire souhaité et chacune des ouvertures de buse avec une géométrie de buse souhaitée en totalité ou en partie dans l'ébauche.
PCT/DE2024/100806 2023-09-13 2024-09-12 Fabrication par usinage laser de disques à buses améliorés Pending WO2025056119A1 (fr)

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PCT/DE2023/100683 WO2025056103A1 (fr) 2023-09-13 2023-09-13 Production de disques à buses améliorés par usinage laser
DEPCT/DE2023/100683 2023-09-13

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PCT/DE2024/100806 Pending WO2025056119A1 (fr) 2023-09-13 2024-09-12 Fabrication par usinage laser de disques à buses améliorés

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1295647A1 (fr) 2001-09-24 2003-03-26 The Technology Partnership Public Limited Company Buses dans des membranes perforées et méthode de fabrication
DE102004043895A1 (de) 2003-09-12 2005-06-02 Orbotech Ltd. Mehrstrahliges Mikro-Bearbeitungssystem und Verfahren
WO2007041460A2 (fr) 2005-10-03 2007-04-12 Aradigm Corporation Procede et systeme d'usinage laser
US20130334339A1 (en) * 2010-12-28 2013-12-19 Stamford Devices Ltd. Photodefined aperture plate and method for producing the same
DE102014200633B3 (de) 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
DE102020110404A1 (de) 2020-04-16 2021-10-21 NEBU-TEC International med. Produkte Eike Kern GmbH Verbessertes Verfahren zur Herstellung einer perforierten Membran
DE102021124004A1 (de) * 2021-09-16 2023-03-16 Joachim Kern Vorrichtung und Verfahren zur Herstellung von Düsenscheiben für Vernebler

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1295647A1 (fr) 2001-09-24 2003-03-26 The Technology Partnership Public Limited Company Buses dans des membranes perforées et méthode de fabrication
DE102004043895A1 (de) 2003-09-12 2005-06-02 Orbotech Ltd. Mehrstrahliges Mikro-Bearbeitungssystem und Verfahren
WO2007041460A2 (fr) 2005-10-03 2007-04-12 Aradigm Corporation Procede et systeme d'usinage laser
US20130334339A1 (en) * 2010-12-28 2013-12-19 Stamford Devices Ltd. Photodefined aperture plate and method for producing the same
DE102014200633B3 (de) 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
DE102020110404A1 (de) 2020-04-16 2021-10-21 NEBU-TEC International med. Produkte Eike Kern GmbH Verbessertes Verfahren zur Herstellung einer perforierten Membran
DE102021124004A1 (de) * 2021-09-16 2023-03-16 Joachim Kern Vorrichtung und Verfahren zur Herstellung von Düsenscheiben für Vernebler

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