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WO2025052627A1 - Capteur de force - Google Patents

Capteur de force Download PDF

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Publication number
WO2025052627A1
WO2025052627A1 PCT/JP2023/032688 JP2023032688W WO2025052627A1 WO 2025052627 A1 WO2025052627 A1 WO 2025052627A1 JP 2023032688 W JP2023032688 W JP 2023032688W WO 2025052627 A1 WO2025052627 A1 WO 2025052627A1
Authority
WO
WIPO (PCT)
Prior art keywords
displacement
axis direction
force
flexure
electrode substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2023/032688
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English (en)
Japanese (ja)
Inventor
弘尚 佐野
和廣 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tri Force Management Corp
Original Assignee
Tri Force Management Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tri Force Management Corp filed Critical Tri Force Management Corp
Priority to PCT/JP2023/032688 priority Critical patent/WO2025052627A1/fr
Priority to JP2023570314A priority patent/JP7421255B1/ja
Publication of WO2025052627A1 publication Critical patent/WO2025052627A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance

Definitions

  • the present invention relates to a force sensor.
  • Force sensors are known that output the force acting in a specific axial direction and the moment (torque) acting around a specific rotation axis as an electrical signal. Force sensors are widely used for force control in various robots, including industrial robots, collaborative robots, life support robots, medical robots, and service robots.
  • the force sensor is placed between the robot arm and the end effector (gripper, etc.) and detects the force acting on the workpiece.
  • the detected force is used to control the robot. For example, if the robot arm comes into contact with a person, the force sensor detects the contact. This makes it possible to emergency stop the operation of the robot arm.
  • the present invention was made with these points in mind, and aims to provide a force sensor that can improve detection sensitivity.
  • the present disclosure relates to a first sensor body that receives the force or moment to be detected; a second sensor body disposed at a position different from the first sensor body in a first direction; a strain generating body that connects the first sensor body and the second sensor body and is elastically deformed by the action of a force or moment applied to the first sensor body; A detection element for detecting a displacement caused by elastic deformation of the strain body; a detection circuit that outputs an electrical signal indicative of a force or moment acting on the first sensor body based on a detection result of the detection element; Equipped with a direction perpendicular to the first direction is a second direction, and a direction perpendicular to the first direction and perpendicular to the second direction is a third direction; the strain body includes a first connection portion extending in the first direction from a first end connected to the first sensor body to a second end located on the opposite side to the first end, and a second sensor body side connection portion connecting the second end of the first connection portion to the second sensor body, the
  • the present disclosure relates to the strain body includes a first sensor body side connection portion that connects the first end of the first connection portion to the first sensor body, the first sensor body side connection portion includes a thin-walled portion formed along the second direction and the third direction and connected to the first end of the first connection portion,
  • the force sensor may be the force sensor described in [1].
  • the present disclosure relates to
  • the detection element includes a fixed electrode substrate provided on the second sensor body, and a displacement electrode substrate provided on a tip end of the displacement portion and facing the fixed electrode substrate.
  • the force sensor may be as described in [1] or [2].
  • the present disclosure relates to the fixed electrode substrate includes a first fixed electrode substrate located on one side of the pedestal with respect to a central axis of the flexure body, and a second fixed electrode substrate located on the other side of the pedestal with respect to the central axis of the flexure body.
  • the force sensor may be the force sensor described in [3].
  • the present disclosure relates to
  • the displacement electrode substrate includes a first displacement electrode substrate located on one side of the base with respect to a central axis of the strain body, and a second displacement electrode substrate located on the other side of the base with respect to the central axis of the strain body.
  • the force sensor may be as described in [3] or [4].
  • the present disclosure relates to The displacement portion extends from the second end of the first connection portion in the third direction.
  • the force sensor may be any one of those described in [1] to [5].
  • the present disclosure relates to When viewed in the first direction, the second sensor body side connection portion is formed linearly along the second direction.
  • the force sensor may be any one of those described in [1] to [6].
  • the present disclosure relates to When viewed in the first direction, the first sensor body and the second sensor body are formed in a circular shape, When viewed in the first direction, the second sensor body side connection portion is formed in an arc shape so as to follow at least one of a periphery of the first sensor body and a periphery of the second sensor body.
  • the force sensor may be any one of those described in [1] to [7].
  • the present disclosure relates to The displacement portion extends from the second end of the corresponding first connection portion toward the center of the first sensor body.
  • the force sensor may be as described in [9].
  • the present invention can improve detection sensitivity.
  • FIG. 8 is a front view showing a schematic deformation state of the first flexure body in FIG. 4 when the first flexure body is subjected to a force in the X-axis direction positive side.
  • FIG. 9A is a side view that illustrates a deformation state of the first flexure body in FIG. 4 when the first flexure body is subjected to a force in the Y-axis direction positive side.
  • FIG. 9B is a side view that illustrates a deformation state of the first flexure body in FIG. 4 when the first flexure body is subjected to a force in the negative Y-axis direction.
  • FIG. 10A is a front view that illustrates a deformation state of the first flexure body in FIG.
  • FIG. 10B is a front view that illustrates a deformation state of the first flexure body in FIG. 4 when the first flexure body is subjected to a force in the positive Z-axis direction.
  • FIG. 10B is a front view that illustrates a deformation state of the first flexure body in FIG. 4 when the first flexure body is subjected to a force in the negative Z-axis direction.
  • FIG. 11 is a table showing the change in the capacitance value of each capacitance element in the strain body of FIG.
  • FIG. 12 is a table showing changes in the capacitance value of each capacitance element in the force sensor of FIG.
  • FIG. 13 is a front view of a first strain generating body showing a modified example of the detection element in FIG.
  • FIG. 14 is a plan view showing the force sensor according to the second embodiment with the force receiving body omitted.
  • FIG. 11 is a table showing the change in the capacitance value of each capacitance element in the strain body of
  • geometric conditions, physical characteristics, terms specifying the degree of a geometric condition or physical characteristic, and numerical values indicating a geometric condition or physical characteristic used in this specification may be interpreted without being bound by their strict meaning. These geometric conditions, physical characteristics, terms, and numerical values may be interpreted to include the range in which similar functions can be expected. Examples of terms specifying geometric conditions include “length,” “angle,” “shape,” “parallel,” “orthogonal,” and “same.”
  • FIG. 1 A force sensor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 13.
  • FIG. 1 A force sensor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 13.
  • FIG. 1 A force sensor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 13.
  • FIG. 1 A force sensor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 13.
  • FIG. 1 is a perspective view showing an example of the robot 1 according to the present embodiment.
  • a force sensor 10 according to the present embodiment is attached to the robot 1.
  • the robot 1 include various robots such as industrial robots, collaborative robots, life support robots, medical robots, and service robots. For convenience, the following description will be given taking an industrial robot to which the force sensor 10 is attached as an example.
  • the industrial robot 1 includes a robot body 2, a tool 3, a force sensor 10, and a controller 5.
  • the robot body 2 includes a robot arm 4.
  • the robot arm 4 has a multi-joint arm structure.
  • a force sensor 10 is attached to the tip of the robot arm 4. More specifically, the force sensor 10 is attached between the robot arm 4 and the tool 3.
  • the force sensor 10 is electrically connected to the controller 5 via an electrical cable (not shown).
  • Examples of the tool 3 include an end effector (gripper, etc.) and a tool changer (neither shown).
  • Fig. 2 is a cross-sectional view of the force sensor according to this embodiment, which corresponds to the cross section taken along line A-A in Fig. 3.
  • Fig. 3 is a plan view of the force sensor in Fig. 2 with the force receiving body omitted.
  • Fig. 4 is a front view of the first flexure body in Fig. 2.
  • Fig. 5 is a plan view of the first flexure body in Fig. 4
  • Fig. 6 is a side view of the first flexure body in Fig. 4.
  • Fig. 7 is a planar development of each flexure body of the force sensor shown in Fig. 3.
  • an XYZ three-dimensional coordinate system is defined, the Z-axis direction (first direction) is the up-down direction, and the force sensor 10 is arranged so that the force receiving body 20 is arranged on the upper side and the fixed body 25 is arranged on the lower side.
  • the force sensor 10 according to this embodiment is not limited to being used in a position in which the Z-axis direction is the up-down direction.
  • the force sensor 10 has the function of outputting a force acting in a specific axial direction and a moment acting around a specific rotation axis as an electrical signal. However, this is not limited to this, and the force sensor 10 may be configured to output only one of the force and the moment as an electrical signal, or may be configured to output at least one axial component of the force or moment as an electrical signal.
  • the force sensor 10 comprises a force receiving body 20, a fixed body 25, strain bodies 30A to 30D, a detection element 70, a detection circuit 75, and an exterior body 80.
  • a force receiving body 20 As shown in Figures 2 and 3, the force sensor 10 comprises a force receiving body 20, a fixed body 25, strain bodies 30A to 30D, a detection element 70, a detection circuit 75, and an exterior body 80.
  • Each component will be described in more detail below.
  • Figure 2 is a cross-sectional view taken along line A-A in Figure 3, but for convenience, an outline of the second strain body 30B and the fourth strain body 30D is shown.
  • the force receiving body 20 is an example of a first sensor body.
  • the force receiving body 20 is acted upon by the force or moment to be detected. This action causes the force receiving body 20 to move relative to the fixed body 25.
  • the force receiving body 20 is fixed to the tool 3 with a bolt or the like, and receives a force or moment from the tool 3.
  • the strain generating bodies 30A to 30D are connected to the force receiving body 20.
  • the planar shape of the force receiving body 20 is circular.
  • the planar shape of the force receiving body 20 is not limited to a circular shape, and may be rectangular or any other shape.
  • the force receiving body 20 may be formed in a flat plate shape.
  • the fixed body 25 is an example of a second sensor body.
  • the fixed body 25 supports the force receiving body 20.
  • the fixed body 25 is disposed at a different position from the force receiving body 20 in the Z-axis direction. More specifically, the fixed body 25 is disposed on the negative side of the force receiving body 20 in the Z-axis direction.
  • the force receiving body 20 and the fixed body 25 are disposed at different positions from each other in the Z-axis direction, and the fixed body 25 is spaced apart from the force receiving body 20.
  • the fixed body 25 is fixed to the tip of the robot arm 4 with a bolt or the like, and is supported by the robot main body 2.
  • the strain bodies 30A to 30D are connected to the fixed body 25.
  • the strain bodies 30A to 30D connect the force receiving body 20 and the fixed body 25. More specifically, the strain bodies 30A to 30D are disposed between the force receiving body 20 and the fixed body 25, and the strain bodies 30A to 30D are connected to the force receiving body 20 and to the fixed body 25. The force receiving body 20 is supported by the fixed body 25 via these strain bodies 30A to 30D.
  • the force receiving body 20 and the fixed body 25 may be connected by four flexure bodies 30A to 30D.
  • the four flexure bodies 30A to 30D may include a first flexure body 30A, a second flexure body 30B, a third flexure body 30C, and a fourth flexure body 30D.
  • the center O of the force receiving body 20 is disposed between the first flexure body 30A and the third flexure body 30C, and the center O of the force receiving body 20 is disposed between the second flexure body 30B and the fourth flexure body 30D.
  • the number of strain bodies connecting the force receiving body 20 and the fixed body 25 is not limited to four, and may be two, three, five or more, and is arbitrary.
  • the force receiving body 20 and the fixed body 25 may be connected by only one strain body.
  • the detection element 70 is configured with two capacitive elements as shown in FIG. 4, it is possible to detect two-axis components of the force, as described below.
  • the detection element 70 may also be configured with only one capacitive element to detect one-axis component of the force.
  • the four flexure bodies 30A to 30D are arranged in a ring shape. That is, as described above, the force receiving body 20 and the fixed body 25 are formed in a circular shape when viewed in the Z-axis direction, and the four flexure bodies 30A to 30D are arranged to form a rectangular ring shape.
  • Each of the flexure bodies 30A to 30D is formed linearly along the second direction when viewed in the Z-axis direction. That is, the second direction of the first flexure body 30A and the second direction of the third flexure body 30C correspond to the X-axis direction.
  • the first flexure body 30A and the third flexure body 30C are formed linearly along the X-axis direction.
  • the second direction of the second flexure body 30B and the second direction of the fourth flexure body 30D correspond to the Y-axis direction.
  • the second flexure body 30B and the fourth flexure body 30D are formed linearly along the Y-axis direction.
  • the second direction of each of the flexure bodies 30A to 30D is not limited to the example shown in FIG. 3, but may be any direction.
  • the second direction of each of the flexure bodies 30A to 30D does not have to be along either the X-axis or the Y-axis.
  • the arrangement of the four flexure bodies 30A to 30D is not limited to a ring-shaped arrangement, and each of them may be irregularly arranged at any position.
  • strain bodies 30A to 30D according to this embodiment.
  • the flexure bodies 30A-30D are configured to elastically deform, generate distortion, and displace when a force or moment is applied to the force receiving body 20.
  • the first flexure body 30A whose second direction is the X-axis direction
  • the Y-axis direction corresponds to the third direction.
  • the third direction is perpendicular to the first direction and perpendicular to the second direction.
  • the second flexure body 30B, the third flexure body 30C, and the fourth flexure body 30D have the same configuration, so a detailed description of the common configuration will be omitted.
  • the first connection portion 31 includes a first end 31a connected to the force receiving body 20 and a second end 31b located on the opposite side to the first end 31a.
  • the first connection portion 31 extends in the Z-axis direction from the first end 31a to the second end 31b.
  • the first end 31a is connected to the surface (the lower surface in FIG. 4) of the thin-walled portion 40 on the side of the fixed body 25 described later.
  • the second end 31b is connected to the displacement portion 36 described later and is located between the second connection portion 34 and the third connection portion 35.
  • the first connection portion 31 may be formed in a straight line along each of the Y-axis direction and the Z-axis direction. As shown in FIG.
  • the fixed body side connection part 32 is an example of a second sensor body side connection part.
  • the fixed body side connection part 32 connects the second end part 31b of the first connection part 31 to the fixed body 25.
  • the fixed body side connection part 32 includes a pair of fixed body side bases 33, a second connection part 34, a third connection part 35, and a displacement part 36.
  • the fixed body side base 33 in this embodiment may be connected to the fixed body 25.
  • the fixed body side base 33 extends in the Z-axis direction from the fixed body 25 toward the force receiving body 20.
  • the fixed body side base 33 is located on both sides of the second end 31b of the first connection portion 31 in the X-axis direction, and on both sides of the central axis CL.
  • One fixed body side base 33 is located on the positive side of the X-axis direction relative to the second end 31b.
  • the other fixed body side base 33 is located on the negative side of the X-axis direction relative to the second end 31b.
  • the fixed body side base 33 abuts against the fixed body 25 and is attached to the fixed body 25 using bolts or the like (not shown).
  • a screw hole (not shown) may be formed in the surface of the fixed body side base 33 facing the fixed body 25 (the lower surface in FIG. 4).
  • the fixed body side base 33 may have one screw hole or multiple screw holes formed.
  • the third connection portion 35 extends in the X-axis direction.
  • the third connection portion 35 may be formed in a flat plate shape along the X-axis direction and the Y-axis direction. When viewed in the Y-axis direction, the third connection portion 35 extends in a straight line from the second end 31b of the first connection portion 31 to the other fixed body side base 33. In the example shown in FIG. 4, the third connection portion 35 is connected to and supported by the fixed body side base 33 located on the negative side of the X-axis direction relative to the second end 31b.
  • the third connection portion 35 may be elastically deformable by the action of forces in the X-axis direction, the Y-axis direction, and the Z-axis direction.
  • the displacement portion 36 of the first flexure body 30A extends from the second end 31b of the first connection portion 31 of the first flexure body 30A toward the center O of the force receiving body 20 when viewed in the Z-axis direction.
  • the displacement portion 36 of the first flexure body 30A extends from the second end 31b to the negative side in the Y-axis direction.
  • the displacement portion 36 of the first flexure body 30A may be located at the center of the first flexure body 30A in the X-axis direction, or may overlap with the central axis CL (see FIG. 4 and FIG. 7) of the first flexure body 30A when viewed in the Y-axis direction.
  • the displacement portion 36 of the second flexure body 30B extends from the second end 31b of the first connection portion 31 of the second flexure body 30B toward the center O of the force receiving body 20 when viewed in the Z-axis direction.
  • the displacement portion 36 of the second flexure body 30B extends from the second end 31b to the positive side in the X-axis direction.
  • the displacement portion 36 of the second flexure body 30B may be located at the center of the second flexure body 30B in the Y-axis direction, or may overlap with the central axis CL (see FIG. 4 and FIG. 7) of the second flexure body 30B when viewed in the X-axis direction.
  • the displacement portion 36 of the third flexure body 30C extends from the second end 31b of the first connection portion 31 of the third flexure body 30C toward the center O of the force receiving body 20 when viewed in the Z-axis direction.
  • the displacement portion 36 of the third flexure body 30C extends from the second end 31b to the positive side in the Y-axis direction.
  • the displacement portion 36 of the third flexure body 30C may be located at the center of the third flexure body 30C in the X-axis direction, or may overlap with the central axis CL (see FIG. 4 and FIG. 7) of the third flexure body 30C when viewed in the Y-axis direction.
  • the force receiving body side pedestal 39 may be connected to the force receiving body 20.
  • the force receiving body side pedestal 39 extends in the Z-axis direction from the force receiving body 20 toward the fixed body 25.
  • the force receiving body side pedestals 39 are located on both sides of the first end 31a of the first connection portion 31 in the X-axis direction, and on both sides of the central axis CL.
  • One force receiving body side pedestal 39 is located on the positive side of the X-axis direction relative to the first end 31a.
  • the other force receiving body side pedestal 39 is located on the negative side of the X-axis direction relative to the first end 31a.
  • the force receiving body side base 39 abuts against the force receiving body 20 and is attached to the force receiving body 20 using bolts or the like (not shown). As shown in Figures 3 and 5, a screw hole 41 may be formed in the surface of the force receiving body side base 39 facing the force receiving body 20 (the upper surface in Figure 4). Each force receiving body side base 39 may have one screw hole 41 formed therein, or may have multiple screw holes 41 formed therein.
  • the thin-walled portion 40 is located between a pair of force receiving body side pedestals 39 and is connected to each of the force receiving body side pedestals 39.
  • the thin-walled portion 40 connects the force receiving body side pedestals 39 and the first connection portion 31.
  • the first end portion 31a of the first connection portion 31 is connected to the surface of the thin-walled portion 40 on the side of the fixed body 25 (the lower surface in FIG. 4).
  • the thin-walled portion 40 extends in the X-axis direction.
  • the thin-walled portion 40 may be formed in a flat plate shape along the X-axis direction and the Y-axis direction. As shown in FIG.
  • the thin-walled portion 40 is connected to the portion of the force receiving body side base 39 on the fixed body 25 side. This forms a first recess 42 on the force receiving body 20 side of the thin-walled portion 40. As shown in FIG. 4, the first recess 42 may be formed in a rectangular shape when viewed in the Y-axis direction. If the thin-walled portion 40 and the first connection portion 31 are formed separately, the head of a bolt (not shown) for fixing the thin-walled portion 40 and the first connection portion 31 can be placed in the first recess 42. This prevents the head of the bolt from protruding from the force receiving body side connection portion 38, allowing the height of the force sensor 10 to be reduced.
  • the fixed body side connection part 32 described above may be formed linearly along the X-axis direction when viewed in the Z-axis direction.
  • the force receiving body side connection part 38 described above may also be formed linearly along the X-axis direction. When viewed in the Z-axis direction, the force receiving body side connection part 38 may overlap the fixed body side connection part 32 as shown in Figure 5.
  • the detection element 70 is configured to detect the displacement caused by the elastic deformation of the first strain body 30A described above.
  • the detection element 70 according to this embodiment is configured as an element that detects the change in capacitance value due to the displacement of the tip 36a of the displacement portion 36 described above.
  • the detection element 70 includes a first capacitance element C1 and a second capacitance element C2.
  • the first capacitance element C1 and the second capacitance element C2 each detect a change in capacitance value due to the displacement of the tip portion 36a of the displacement portion 36 of the first strain body 30A.
  • the first capacitance element C1 and the second capacitance element C2 are capacitance elements for the first strain body 30A shown in Fig. 4.
  • the first fixed electrode substrate Ef1 is located on one side of the fixed body side base 33 with respect to the central axis CL of the first flexure body 30A. More specifically, the first fixed electrode substrate Ef1 is located on the positive side of the X-axis direction with respect to the central axis CL of the first flexure body 30A.
  • the second fixed electrode substrate Ef2 is located on the other side of the fixed body side base 33 with respect to the central axis CL of the first flexure body 30A.
  • the second fixed electrode substrate Ef2 is located on the negative side of the X-axis direction with respect to the central axis CL of the first flexure body 30A.
  • the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 may be integrated. More specifically, the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 each include a fixed electrode Ef (see Fig. 13) and an insulator. The insulator is interposed between the fixed electrode Ef and the fixed body 25. The fixed electrode Ef of the first fixed electrode substrate Ef1 and the fixed electrode Ef of the second fixed electrode substrate Ef2 are integrated to form a common fixed electrode Efc. The insulator of the first fixed electrode substrate Ef1 and the insulator of the second fixed electrode substrate Ef2 are integrated to form a common insulator IBfc. The common insulator IBfc may be joined to the fixed body 25 with an adhesive or the like, or may be fixed with a bolt or the like. The entire common insulator IBfc may be joined to the fixed body 25.
  • the first displacement electrode substrate Ed1 is located on one side of the fixed body side base 33 with respect to the central axis CL of the first flexure body 30A. More specifically, the first displacement electrode substrate Ed1 is located on the positive side of the X-axis direction with respect to the central axis CL of the first flexure body 30A, and faces the above-mentioned first fixed electrode substrate Ef1.
  • the second displacement electrode substrate Ed2 is located on the other side of the fixed body side base 33. More specifically, the second displacement electrode substrate Ed2 is located on the negative side of the X-axis direction with respect to the central axis CL of the first flexure body 30A, and faces the above-mentioned second fixed electrode substrate Ef2.
  • the planar shape of the common fixed electrode Efc formed by integrating the fixed electrodes Ef of the fixed electrode substrates Ef1 and Ef2 is rectangular.
  • the planar shape of the displacement electrodes Ed of the displacement electrode substrates Ed1 and Ed2 is also rectangular.
  • the planar shapes of the common fixed electrode Efc and the displacement electrodes Ed are not limited to rectangular, and may be other shapes such as circular, polygonal, or elliptical.
  • the planar shape of the displacement electrode Ed of the first displacement electrode substrate Ed1 may be smaller than the planar shape of the common fixed electrode Efc.
  • the size of the displacement electrode Ed and the size of the common fixed electrode Efc may be set so that the displacement electrode Ed of the first displacement electrode substrate Ed1 overlaps the common fixed electrode Efc as a whole when viewed in the Z-axis direction, even if the force receiving body 20 receives a force or moment and the first displacement electrode substrate Ed1 is displaced. This makes it possible to prevent the opposing area of the displacement electrode Ed and the common fixed electrode Efc from changing, and to prevent the change in the opposing area from affecting the change in the capacitance value.
  • the capacitance value can be changed according to the change in the distance between the displacement electrode Ed and the common fixed electrode Efc.
  • the opposing area refers to the area where the displacement electrode Ed and the common fixed electrode Efc overlap when viewed in the Z-axis direction.
  • the displacement electrode Ed which is smaller than the common fixed electrode Efc, may tilt and the opposing area may change, but in this case the tilt angle of the displacement electrode Ed is small.
  • the distance between the displacement electrode Ed and the common fixed electrode Efc is dominant in the change in the capacitance value.
  • the planar shape of the displacement electrode Ed of the second displacement electrode substrate Ed2 may be smaller than the common fixed electrode Efc.
  • the planar shape of the displacement electrode Ed of the second displacement electrode substrate Ed2 may be the same as the planar shape of the displacement electrode Ed of the first displacement electrode substrate Ed1.
  • the planar shape of the common fixed electrode Efc of the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 may be the same size as the planar shape of the common insulator IBfc of the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2. However, the planar shape of the common fixed electrode Efc may be smaller than the planar shape of the common insulator IBfc.
  • the planar shapes of the displacement electrode Ed of the first displacement electrode substrate Ed1 and the displacement electrode Ed of the second displacement electrode substrate Ed2 may each be smaller than the planar shape of the common insulator IBdc of the first displacement electrode substrate Ed1 and the second displacement electrode substrate Ed2.
  • the configuration of the first flexure body 30A and the corresponding detection element 70 described above can be similarly applied to the second flexure body 30B, the third flexure body 30C, and the fourth flexure body 30D.
  • the detection element 70 further includes a third capacitance element C3 and a fourth capacitance element C4.
  • the third capacitance element C3 and the fourth capacitance element C4 each detect a change in capacitance value due to the displacement of the tip portion 36a of the displacement portion 36 of the second strain body 30B.
  • the third capacitance element C3 and the fourth capacitance element C4 are capacitance elements for the second strain body 30B.
  • the third capacitance element C3 includes a third fixed electrode substrate Ef3 provided on the fixed body 25 and a third displacement electrode substrate Ed3 provided on the tip 36a of the displacement portion 36.
  • the fourth capacitance element C4 includes a fourth fixed electrode substrate Ef4 provided on the fixed body 25 and a fourth displacement electrode substrate Ed4 provided on the tip 36a of the displacement portion 36.
  • the third fixed electrode substrate Ef3 is located on the positive side of the Y axis direction relative to the central axis CL of the second flexure body 30B.
  • the fourth fixed electrode substrate Ef4 is located on the negative side of the Y axis direction relative to the central axis CL of the second flexure body 30B.
  • the third fixed electrode substrate Ef3 and the fourth fixed electrode substrate Ef4 are integrated and are configured in the same manner as the fixed electrode substrates Ef1 and Ef2 described above.
  • the third displacement electrode substrate Ed3 is located on the positive side of the Y axis direction with respect to the central axis CL of the second flexure body 30B.
  • the third displacement electrode substrate Ed3 faces the third fixed electrode substrate Ef3 described above.
  • the fourth displacement electrode substrate Ed4 is located on the negative side of the Y axis direction with respect to the central axis CL of the second flexure body 30B.
  • the fourth displacement electrode substrate Ed4 faces the fourth fixed electrode substrate Ef4 described above.
  • the displacement electrode substrates Ed3 and Ed4 are configured in the same manner as the displacement electrode substrates Ed1 and Ed2 described above.
  • the detection element 70 further includes a fifth capacitance element C5 and a sixth capacitance element C6.
  • the fifth capacitance element C5 and the sixth capacitance element C6 each detect a change in capacitance value due to the displacement of the tip portion 36a of the displacement portion 36 of the third strain body 30C.
  • the fifth capacitance element C5 and the sixth capacitance element C6 are capacitance elements for the third strain body 30C.
  • the fifth fixed electrode substrate Ef5 is located on the negative side of the X-axis direction relative to the central axis CL of the third flexure body 30C.
  • the sixth fixed electrode substrate Ef6 is located on the positive side of the X-axis direction relative to the central axis CL of the third flexure body 30C.
  • the fifth fixed electrode substrate Ef5 and the sixth fixed electrode substrate Ef6 are integrated and are configured in the same manner as the fixed electrode substrates Ef1 and Ef2 described above.
  • the fifth displacement electrode substrate Ed5 is located on the negative side of the X-axis direction with respect to the central axis CL of the third flexure body 30C.
  • the fifth displacement electrode substrate Ed5 faces the fifth fixed electrode substrate Ef5 described above.
  • the sixth displacement electrode substrate Ed6 is located on the positive side of the X-axis direction with respect to the central axis CL of the third flexure body 30C.
  • the sixth displacement electrode substrate Ed6 faces the sixth fixed electrode substrate Ef6 described above.
  • the displacement electrode substrates Ed5 and Ed6 are configured in the same manner as the displacement electrode substrates Ed1 and Ed2 described above.
  • the fifth capacitance element C5 and the sixth capacitance element C6 are disposed at the same position in the Y-axis direction. That is, as shown in FIG. 3, the displacement electrode Ed of the fifth displacement electrode substrate Ed5 and the displacement electrode Ed of the sixth displacement electrode substrate Ed6 are disposed at the same position in the Y-axis direction.
  • the fifth capacitance element C5 and the sixth capacitance element C6 are disposed on the positive side in the Y-axis direction with respect to the first connection portion 31.
  • the seventh capacitance element C7 includes a seventh fixed electrode substrate Ef7 provided on the fixed body 25 and a seventh displacement electrode substrate Ed7 provided on the tip 36a of the displacement portion 36.
  • the eighth capacitance element C8 includes an eighth fixed electrode substrate Ef8 provided on the fixed body 25 and an eighth displacement electrode substrate Ed8 provided on the tip 36a of the displacement portion 36.
  • the seventh fixed electrode substrate Ef7 is located on the negative side of the Y axis direction relative to the central axis CL of the fourth flexure body 30D.
  • the eighth fixed electrode substrate Ef8 is located on the positive side of the Y axis direction relative to the central axis CL of the fourth flexure body 30D.
  • the seventh fixed electrode substrate Ef7 and the eighth fixed electrode substrate Ef8 are integrated and are configured in the same manner as the fixed electrode substrates Ef1 and Ef2 described above.
  • the seventh displacement electrode substrate Ed7 is located on the negative side of the Y-axis direction with respect to the central axis CL of the fourth flexure body 30D.
  • the seventh displacement electrode substrate Ed7 faces the seventh fixed electrode substrate Ef7 described above.
  • the eighth displacement electrode substrate Ed8 is located on the positive side of the Y-axis direction with respect to the central axis CL of the fourth flexure body 30D.
  • the eighth displacement electrode substrate Ed8 faces the eighth fixed electrode substrate Ef8 described above.
  • the displacement electrode substrates Ed7, Ed8 are configured in the same manner as the displacement electrode substrates Ed1, Ed2 described above.
  • the detection circuit 75 outputs an electrical signal indicative of the force or moment acting on the strain bodies 30A-30D based on the detection results of the detection element 70.
  • This detection circuit 75 may have a calculation function implemented, for example, by a microprocessor.
  • the detection circuit 75 may also have an A/D conversion function for converting the analog signal received from the detection element 70 described above into a digital signal, and a signal amplification function.
  • the detection circuit 75 may include a terminal for outputting an electrical signal, and the electrical signal is transmitted from this terminal to the controller 5 described above via an electrical cable (not shown).
  • the exterior body 80 is configured to cover the four strain bodies 30A to 30D from the outside when viewed in the Z-axis direction.
  • the exterior body 80 is a cylindrical housing that constitutes the force sensor 10.
  • the strain bodies 30A to 30D are housed in the exterior body 80.
  • the planar cross-sectional shape (shape in a cross section along the XY plane) of the exterior body 80 is a circular frame shape.
  • a buffer member 81 may be interposed in the gap between the force receiving body 20 and the exterior body 80.
  • the buffer member 81 may be formed of a flexible material that is elastically deformable, such as rubber or sponge.
  • Figure 8 is a front view showing a schematic representation of the deformation state of the first flexure body 30A when the first flexure body in Figure 4 receives a force Fx in the positive X-axis direction
  • Figure 9A is a side view showing a schematic representation of the deformation state of the first flexure body 30A when the first flexure body in Figure 4 receives a force Fy in the positive Y-axis direction.
  • Figure 9B is a side view showing a schematic representation of the deformation state of the first flexure body 30A when the first flexure body in Figure 4 receives a force Fy in the negative Y-axis direction.
  • Figure 10A is a front view showing a schematic representation of the deformation state of the first flexure body 30A when the first flexure body in Figure 4 receives a force Fz in the positive Z-axis direction.
  • FIG. 10B is a front view that shows a schematic representation of the deformation state of the first flexure body 30A in FIG. 4 when the first flexure body 30A is subjected to a negative force in the Z-axis direction.
  • the force or moment is transmitted to the first flexure body 30A to the fourth flexure body 30D. More specifically, the force or moment is transmitted to the thin-walled portion 40, the first connection portion 31, the second connection portion 34, and the third connection portion 35, causing elastic deformation in the thin-walled portion 40 and each connection portion 31, 34, and 35. This causes a displacement in the displacement portion 36. As a result, the distance between each of the fixed electrode substrates Ef1 to Ef8 of the detection element 70 and the corresponding displacement electrode substrates Ed1 to Ed8 changes, causing a change in the capacitance value of each of the capacitance elements C1 to C8.
  • This change in capacitance value is detected by the detection element 70 as a displacement occurring in the flexure bodies 30A to 30D.
  • the change in capacitance value of each of the capacitance elements C1 to C8 may differ. Therefore, the detection circuit 75 can detect the direction and magnitude of the force or moment acting on the force receiving body 20 based on the change in the capacitance value of each capacitance element C1 to C8 detected by the detection element 70.
  • the first displacement electrode substrate Ed1 approaches the first fixed electrode substrate Ef1, and the inter-electrode distance (distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 decreases. This causes the capacitance value of the first capacitance element C1 to increase.
  • the second displacement electrode substrate Ed2 moves away from the second fixed electrode substrate Ef2, and the inter-electrode distance (distance in the Z-axis direction) between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 increases. This causes the capacitance value of the second capacitance element C2 to decrease.
  • the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1, and the inter-electrode distance (distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 increases. This causes the capacitance value of the first capacitance element C1 to decrease.
  • the second displacement electrode substrate Ed2 moves away from the second fixed electrode substrate Ef2, and the inter-electrode distance (distance in the Z-axis direction) between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 increases. This causes the capacitance value of the second capacitance element C2 to decrease.
  • the thin-walled portion 40, the first connection portion 31, the second connection portion 34, and the third connection portion 35 elastically deform, while the first end portion 31a of the first connection portion 31 is displaced in the negative Y-axis direction.
  • the first connection portion 31 rotates clockwise when viewed toward the positive X-axis direction (when viewed toward the paper surface of FIG. 9B).
  • the displacement portion 36 rotates clockwise and tilts. In this case, the tip portion 36a of the displacement portion 36 is displaced in a direction approaching the fixed body 25.
  • the first displacement electrode substrate Ed1 approaches the first fixed electrode substrate Ef1, and the inter-electrode distance (distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 decreases. This causes the capacitance value of the first capacitance element C1 to increase.
  • the second displacement electrode substrate Ed2 approaches the second fixed electrode substrate Ef2, and the inter-electrode distance (distance in the Z-axis direction) between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 decreases. This causes the capacitance value of the second capacitance element C2 to increase.
  • the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1, and the inter-electrode distance (distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 increases. This causes the capacitance value of the first capacitance element C1 to decrease.
  • the second displacement electrode substrate Ed2 moves away from the second fixed electrode substrate Ef2, and the inter-electrode distance (distance in the Z-axis direction) between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 increases. This causes the capacitance value of the second capacitance element C2 to decrease.
  • the first displacement electrode substrate Ed1 approaches the first fixed electrode substrate Ef1, and the inter-electrode distance (distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 decreases. This causes the capacitance value of the first capacitance element C1 to increase.
  • the second displacement electrode substrate Ed2 approaches the second fixed electrode substrate Ef2, and the inter-electrode distance (distance in the Z-axis direction) between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 decreases. This causes the capacitance value of the second capacitance element C2 to increase.
  • FIG. 11 shows the change in the capacitance value of each of the capacitance elements C1 and C2 provided in the first strain body 30A shown in FIG. 4.
  • FIG. 11 is a table showing the change in the capacitance value of each of the capacitance elements C1 and C2 in the first strain body 30A shown in FIG. 4.
  • FIG. 11 shows the change in capacitance value of the capacitance elements C1 and C2 with respect to a force Fx in the X-axis direction, a force Fy in the Y-axis direction, and a force Fz in the Z-axis direction.
  • a decrease in capacitance value is indicated by "- (minus)” and an increase in capacitance value is indicated by "+ (plus)”.
  • a "+” is shown for C1 in the row of Fx in the table shown in FIG. 11, which indicates that the capacitance value of the first capacitance element C1 increases when a force of +Fx is applied as described above.
  • a "-" is shown for C2 in the row of Fx in the table shown in FIG.
  • the forces Fx, Fy, and Fz acting on the force receiving body 20 can be calculated by the following formulas.
  • the force or moment and the capacitance value are different physical quantities, the force is actually calculated by converting the change in capacitance value.
  • C1 and C2 indicate the change in capacitance value in each capacitance element.
  • the force Fx in the X-axis direction can be detected by the difference between the capacitance value of the first capacitance element C1 and the capacitance value of the second capacitance element C2. That is, as shown in the above formula (1), the output value of the force Fx can be calculated by the difference between the amount of change in the capacitance value of the first capacitance element C1 and the amount of change in the capacitance value of the second capacitance element C2.
  • the effect can be offset by the difference in the above formula (1). Therefore, the output value of the force Fx can be prevented from being affected by disturbances, and the force sensor 10 can have high performance.
  • the formulas for Fy and Fz are the same, making it difficult to distinguish whether the detected force is Fy or Fz. For this reason, a force sensor 10 using only one first strain body 30A can be used when either force Fy or force Fz, and force Fx act.
  • the force sensor 10 is a force sensor capable of detecting two-axis components.
  • the displacement portion 36 of the first strain generating body 30A shown in FIG. 4 extends from the second end 31b of the first connection portion 31 to the negative side in the Y-axis direction.
  • the first displacement electrode substrate Ed1 and the second displacement electrode substrate Ed2 are located at the tip portion 36a of the displacement portion 36. This makes it possible to increase the displacement of the tip portion 36a of the displacement portion 36 when a force Fy is applied, and to increase the change in the capacitance value.
  • the detection sensitivity of the force Fy can be adjusted by adjusting the length of the displacement portion 36.
  • the detection sensitivity of the force Fy may be made higher than the detection sensitivity of the force Fx and the detection sensitivity of the force Fz.
  • the center positions in the Y-axis direction (PY shown in Figures 5 and 6) of the displacement electrode Ed of the first displacement electrode substrate Ed1 and the displacement electrode Ed of the second displacement electrode substrate Ed2 may be located on the negative side in the Y-axis direction relative to the second connection portion 34 and the third connection portion 35.
  • a portion of the first displacement electrode substrate Ed1 may overlap the second connection portion 34
  • a portion of the second displacement electrode substrate Ed2 may overlap the third connection portion 35.
  • the displacement electrode Ed of the first displacement electrode substrate Ed1 and the displacement electrode Ed of the second displacement electrode substrate Ed2 may be spaced apart from the second connection portion 34 and the third connection portion 35 in the Y-axis direction. This allows the capacitance values of the first capacitance element C1 and the second capacitance element C2 to be changed even more when a force Fy is applied.
  • the length of the displacement section 36 of the displacement electrode substrates Ed1 and Ed2 may be set so as not to interfere with the other displacement electrode substrates Ed3 to Ed8.
  • FIG. 12 is a table showing the change in the capacitance value of each capacitance element in the force sensor of FIG. 7.
  • the third flexure body 30C elastically deforms in the same manner as the first flexure body 30A shown in FIG. 9B, and the capacitance value of the fifth capacitance element C5 increases as well as the capacitance value of the sixth capacitance element C6. Because the displacement portion 36 of the third flexure body 30C extends from the second end 31b of the first connection portion 31 to the positive side in the Y-axis direction, the increase in the capacitance value of the fifth capacitance element C5 is relatively large. For this reason, C5 in the row of Fy in the table shown in FIG. 12 is marked "++". The increase in the capacitance value of the sixth capacitance element C6 is also relatively large, so C6 in the row of Fy in the table shown in FIG. 12 is marked "++".
  • the first strain body 30A elastically deforms in the same manner as the first strain body 30A shown in FIG. 10A, and the capacitance value of the first capacitance element C1 decreases, and the capacitance value of the second capacitance element C2 decreases. Similarly, the third capacitance element C3 to the eighth capacitance element C8 also decrease.
  • the fourth flexure body 30D elastically deforms in the opposite direction to the first flexure body 30A shown in FIG. 8, decreasing the capacitance value of the seventh capacitance element C7 and increasing the capacitance value of the eighth capacitance element C8.
  • the displacement portion 36 of each of the strain generating bodies 30A to 30D extends in the X-axis direction or the Y-axis direction from the second end 31b of the corresponding first connection portion 31.
  • Each of the displacement electrode substrates Ed1 to Ed8 is located at the tip 36a of the corresponding displacement portion 36. This makes it possible to increase the displacement of the tip 36a of the displacement portion 36 in the Z-axis direction when a force or moment acts on the force receiving body 20. This makes it possible to increase the change in capacitance value and improve the detection sensitivity. In particular, as shown in FIG.
  • the displacement electrode substrates Ed1 and Ed2 include the first displacement electrode substrate Ed1 located on one side of the fixed body side base 33 with respect to the central axis CL of the first flexure body 30A, and the second displacement electrode substrate Ed2 located on the other side of the fixed body side base 33 with respect to the central axis CL of the first flexure body 30A.
  • the displacement portion 36 of the first strain body 30A extends in the Y-axis direction from the second end 31b of the first connection portion 31 of the first strain body 30A. This makes it possible to further increase the displacement of the tip end 36a of the displacement portion 36 in the Z-axis direction when a force Fy in the Y-axis direction acts on the force receiving body 20. This makes it possible to further improve the detection sensitivity of the force Fy, and further improve the detection sensitivity of the force sensor 10.
  • the displacement portion 36 of the first flexure body 30A extends in the Y-axis direction from the second end 31b of the first connection portion 31 of the first flexure body 30A.
  • the embodiment is not limited to this.
  • the displacement portion 36 may extend in a direction other than the Y-axis direction perpendicular to the X-axis direction, as long as the direction intersects the X-axis direction.
  • the displacement portion 36 may extend in a direction inclined to the X-axis direction when viewed in the Z-axis direction. Even in this case, when the force Fy is applied, the displacement of the tip portion 36a of the displacement portion 36 in the Z-axis direction can be increased.
  • the insulator of the first fixed electrode substrate Ef1 and the insulator of the second fixed electrode substrate Ef2 may be integrated to form a common insulator IBfc.
  • the insulator of the first fixed electrode substrate Ef1 and the insulator of the second fixed electrode substrate Ef2 may be formed separately and spaced apart from each other. The same applies to the third fixed electrode substrate Ef3 to the eighth fixed electrode substrate Ef8.
  • the second embodiment shown in Figs. 14 to 18 differs mainly in that the fixed body side connection portion is formed in an arc shape when viewed in the Z-axis direction.
  • the other configuration is substantially the same as the first embodiment shown in Figs. 1 to 13.
  • Figs. 14 to 18 the same parts as those in the first embodiment shown in Figs. 1 to 13 are given the same reference numerals and detailed description is omitted.
  • Fig. 14 is a plan view showing a force sensor according to the second embodiment with the force receiving body omitted.
  • Fig. 15 is a front view showing the first flexure body shown in Fig. 14.
  • Fig. 16 is a plan view showing the first flexure body of Fig. 15.
  • Fig. 17 is a side view showing the first flexure body of Fig. 15.
  • Fig. 18 is a plan view of the first flexure body showing a modified example of the detection element of Fig. 15.
  • the first strain body 30A is formed in an arc shape when viewed in the Z-axis direction.
  • the displacement portion 36 extends from the second end 31b of the first connection portion 31 toward the inside of the second connection portion 34 and the third connection portion 35, i.e., toward the inside in the radial direction.
  • the planar shape of the force receiving body 20 shown in FIG. 14 is also circular.
  • the planar shape of the fixed body 25 is also circular.
  • the fixed body side connection part 32 of the first strain body 30A may be formed in an arc shape so as to follow at least one of the periphery of the force receiving body 20 and the periphery of the fixed body 25 when viewed in the Z-axis direction.
  • the fixed body side base 33, the second connection part 34 and the third connection part 35 are formed in an arc shape so as to follow both the periphery of the force receiving body 20 and the periphery of the fixed body 25.
  • the fixed body side connection part 32 of the first strain body 30A is formed concentrically with the outer edge of the force receiving body 20.
  • the force receiving body side connection portion 38 of the first strain generating body 30A is also formed in an arc shape when viewed in the Z-axis direction.
  • the force receiving body side connection portion 38 may overlap the second connection portion 34 and the third connection portion 35 when viewed in the Z-axis direction.
  • the force receiving body side base 39 and the thin-walled portion 40 may also be formed in an arc shape so as to follow at least one of the periphery of the force receiving body 20 and the periphery of the fixed body 25.
  • the force receiving body side pedestal 39 of the force receiving body side connection portion 38 of the first strain generating body 30A may be located closer to the central axis line CL than the fixed body side pedestal 33. More specifically, as shown in FIG. 15, the force receiving body side pedestal 39 located on the positive side in the X-axis direction is located on the negative side in the X-axis direction than the fixed body side pedestal 33 located on the positive side in the X-axis direction. The force receiving body side pedestal 39 located on the negative side in the X-axis direction is located on the positive side in the X-axis direction than the fixed body side pedestal 33 located on the negative side in the X-axis direction.
  • a second recess 43 may be formed in the thin-walled portion 40 of the force receiving body side connection portion 38.
  • the second recess 43 may be formed on the surface of the thin-walled portion 40 on the side of the fixed body 25.
  • the second recess 43 may be formed in an arc shape when viewed in the Y-axis direction.
  • the thin-walled portion 40 can be more elastically deformed when a force or moment is applied to the force receiving body 20. This allows the displacement of the tip 36a of the displacement portion 36 in the Z-axis direction to be even greater.
  • the insulator of the first displacement electrode substrate Ed1 and the insulator of the second displacement electrode substrate Ed2 are integrated to form a common insulator IBdc.
  • the planar shape of the common insulator IBdc is circular.
  • the displacement electrodes Ed of the first displacement electrode substrate Ed1 and the displacement electrodes Ed of the second displacement electrode substrate Ed2 are formed separately and spaced apart from each other.
  • the planar shapes of the displacement electrodes Ed may each be formed in an approximately semicircular shape. When viewed in the Z-axis direction, the arc-shaped outer edge of the displacement electrode Ed may be formed concentrically with the outer edge of the common insulator IBdc.
  • the planar shapes of the common insulator IBdc and the displacement electrodes Ed are arbitrary.
  • the planar shape of the common insulator IBfc (see FIG. 17) formed by integrating the insulators of the fixed electrode substrates Ef1, Ef2 may be circular, similar to the planar shape of the common insulator IBdc of the displacement electrode substrates Ed1, Ed2.
  • the planar shape of the common fixed electrode Efc (see FIG. 17) formed by integrating the fixed electrodes Ef of the fixed electrode substrates Ef1, Ef2 may also be circular.
  • the planar shapes of the common insulator IBfc and the common fixed electrode Efc are arbitrary.
  • the change in the capacitance value of each of the capacitance elements C1 to C8 is the same as the change shown in FIG. 12. For this reason, a detailed description is omitted.
  • the displacement portion 36 of the first strain body 30A extends from the second end 31b of the first connection portion 31 in a direction intersecting the X-axis direction when viewed in the Z-axis direction. This makes it possible to increase the displacement of the tip portion 36a of the displacement portion 36 in the Z-axis direction when force Fy is applied, even if the second connection portion 34 and the third connection portion 35 are formed in an arc shape when viewed in the Z-axis direction. This makes it possible to increase the change in capacitance value, thereby improving the detection sensitivity of the force sensor 10.
  • the first end 31a of the first connection portion 31 is connected to the force receiving body 20 via the thin-walled portion 40.
  • the force receiving body 20 and the fixed body 25 are formed in a circular shape, and the second connection portion 34 and the third connection portion 35 are formed in an arc shape so as to follow at least one of the periphery of the force receiving body 20 and the periphery of the fixed body 25.
  • This improves the space efficiency of each of the strain bodies 30A-30D, and enables the force sensor 10 to be made more compact.
  • the load capacity of the force sensor 10 can be improved, and the reliability of the force sensor 10 can be improved.
  • the displacement electrode Ed of the first displacement electrode substrate Ed1 and the displacement electrode Ed of the second displacement electrode substrate Ed2 are formed separately and spaced apart from each other.
  • the embodiment is not limited to this.
  • the displacement electrode Ed of the first displacement electrode substrate Ed1 and the displacement electrode Ed of the second displacement electrode substrate Ed2 may be integrated to form a common displacement electrode Edc.
  • the planar shape of the common displacement electrode Edc may be circular.
  • the fixed electrodes Ef of the fixed electrode substrates Ef1 and Ef2 may be formed separately. In this case, the fixed electrodes may have a planar shape similar to that of the displacement electrode Ed shown in FIG. 16.
  • FIG. 18 is a plan view of a first strain body 30A showing a modified example of the detection element 70 of FIG. 15.
  • the present invention is not limited to the above-described embodiment and modifications, and can be embodied in the implementation stage by modifying the components without departing from the gist of the invention.
  • various inventions can be formed by appropriately combining the multiple components disclosed in the above-described embodiment and modifications. Some components may be deleted from all of the components shown in the embodiment and modifications. Furthermore, components from different embodiments and modifications may be appropriately combined.

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Un corps de génération de contrainte selon la présente invention comprend des première et deuxième parties de connexion côté corps de capteur. La deuxième partie de connexion côté corps de capteur comprend : une paire de socles reliée à un second corps de capteur et située de part et d'autre d'une seconde section d'extrémité dans une deuxième direction ; une deuxième partie de connexion s'étendant dans la deuxième direction à partir de la seconde section d'extrémité jusqu'à l'un des socles lorsqu'elle est vue dans une troisième direction ; et une troisième partie de connexion s'étendant dans la deuxième direction à partir de la deuxième section d'extrémité jusqu'à l'autre socle lorsqu'elle est vue dans la troisième direction. Une partie de déplacement s'étend à partir de la deuxième section d'extrémité dans une direction croisant la deuxième direction lorsqu'elle est vue dans une première direction. Un élément de détection détecte, en fonction du déplacement de la section d'extrémité avant de la partie de déplacement, un changement de valeur de capacité.
PCT/JP2023/032688 2023-09-07 2023-09-07 Capteur de force Pending WO2025052627A1 (fr)

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PCT/JP2023/032688 WO2025052627A1 (fr) 2023-09-07 2023-09-07 Capteur de force
JP2023570314A JP7421255B1 (ja) 2023-09-07 2023-09-07 力覚センサ

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PCT/JP2023/032688 WO2025052627A1 (fr) 2023-09-07 2023-09-07 Capteur de force

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312659A (ja) * 1992-05-14 1993-11-22 Nitta Ind Corp 力及びモーメント検出用の起歪体
US20140331787A1 (en) * 2012-01-12 2014-11-13 Stichting Voor De Technische Wetenschappen Six-axis force-torque sensor
JP2016050883A (ja) * 2014-09-01 2016-04-11 日本リニアックス株式会社 多軸センサおよび多軸センサの製造方法
WO2018029866A1 (fr) * 2016-08-09 2018-02-15 株式会社 トライフォース・マネジメント Capteur de force
JP2021135104A (ja) * 2020-02-25 2021-09-13 株式会社トライフォース・マネジメント 力覚センサ
JP2021135103A (ja) * 2020-02-25 2021-09-13 株式会社トライフォース・マネジメント 力覚センサ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312659A (ja) * 1992-05-14 1993-11-22 Nitta Ind Corp 力及びモーメント検出用の起歪体
US20140331787A1 (en) * 2012-01-12 2014-11-13 Stichting Voor De Technische Wetenschappen Six-axis force-torque sensor
JP2016050883A (ja) * 2014-09-01 2016-04-11 日本リニアックス株式会社 多軸センサおよび多軸センサの製造方法
WO2018029866A1 (fr) * 2016-08-09 2018-02-15 株式会社 トライフォース・マネジメント Capteur de force
JP2021135104A (ja) * 2020-02-25 2021-09-13 株式会社トライフォース・マネジメント 力覚センサ
JP2021135103A (ja) * 2020-02-25 2021-09-13 株式会社トライフォース・マネジメント 力覚センサ

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