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WO2025049385A1 - Capteurs potentiométriques flexibles adressables de lumière - Google Patents

Capteurs potentiométriques flexibles adressables de lumière Download PDF

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Publication number
WO2025049385A1
WO2025049385A1 PCT/US2024/043847 US2024043847W WO2025049385A1 WO 2025049385 A1 WO2025049385 A1 WO 2025049385A1 US 2024043847 W US2024043847 W US 2024043847W WO 2025049385 A1 WO2025049385 A1 WO 2025049385A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
addressable potentiometric
potentiometric sensor
sensor
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/US2024/043847
Other languages
English (en)
Inventor
Jinghua Li
Tzu-Li Liu
Shulin Chen
Yizhen JIA
Qi Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohio State Innovation Foundation
Original Assignee
Ohio State Innovation Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohio State Innovation Foundation filed Critical Ohio State Innovation Foundation
Publication of WO2025049385A1 publication Critical patent/WO2025049385A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316—Modalities, i.e. specific diagnostic methods
    • A61B5/369—Electroencephalography [EEG]
    • A61B5/37—Intracranial electroencephalography [IC-EEG], e.g. electrocorticography [ECoG]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25—Bioelectric electrodes therefor
    • A61B5/263—Bioelectric electrodes therefor characterised by the electrode materials
    • A61B5/266—Bioelectric electrodes therefor characterised by the electrode materials containing electrolytes, conductive gels or pastes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/72—Signal processing specially adapted for physiological signals or for diagnostic purposes
    • A61B5/7225—Details of analogue processing, e.g. isolation amplifier, gain or sensitivity adjustment, filtering, baseline or drift compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/305—Electrodes, e.g. test electrodes; Half-cells optically transparent or photoresponsive electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1468—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25—Bioelectric electrodes therefor
    • A61B5/279—Bioelectric electrodes therefor specially adapted for particular uses
    • A61B5/291—Bioelectric electrodes therefor specially adapted for particular uses for electroencephalography [EEG]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/333—Ion-selective electrodes or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/4035—Combination of a single ion-sensing electrode and a single reference electrode

Definitions

  • the flexible, light- addressable potentiometric sensor leverages a focused light beam to pinpoint an exact sensing location. By controlling this light beam, the flexible, light-addressable potentiometric sensor can provide high precision light resolution mapping, ensuring accuracy and detail in its operations.
  • the design of the disclosed flexible, light-addressable potentiometric sensor simplifies the manufacturing process, eliminating the need for advanced lithography and thereby increasing the practicality and efficiency of device fabrication for real world applications.
  • the present disclosure is directed to a light-addressable potentiometric sensor that includes a base substrate formed of a flexible material, a semiconductor layer formed on the base substrate, an electrical contact disposed between the base substrate and the semiconductor layer, and an insulating layer formed on the semiconductor layer.
  • the semiconductor layer may be a photoresponsive material for signal transduction responsive to application of a beam of light.
  • the electrical contact may be formed as an electrical connection between the semiconductor layer and a reference electrode.
  • a method of fabricating a light-addressable potentiometric sensor may include providing a silicon-on-insulator (SOI) substrate comprising a base layer, an insulating layer, and a semiconductor layer; depositing an electrical contact on the semiconductor layer; depositing a flexible polymer on the electrical contact; and removing the base layer via reactive etching.
  • SOI silicon-on-insulator
  • FIGS. 1A-1E illustrate example working principles of the light-addressable potentiometric sensor in accordance with aspects of the disclosure
  • FIGS. 2A-2B illustrate example schematic diagrams light-addressable potentiometric sensors (LAPS) in accordance with aspects of the disclosure
  • FIG. 3 illustrates an alternate configuration of a light-addressable potentiometric sensor in accordance with aspects of the disclosure
  • FIGS. 4A-4D illustrate an example method of fabricating the light-addressable potentiometric sensors in accordance with aspects of the disclosure
  • FIG. 5 illustrates and example setup wherein the light source is generally a controllable a laser, LED array, or the like;
  • FIGS. 6A, 6B, 7A and 7B illustrate various graphs illustrating test results for an experimental light-addressable potentiometric sensor
  • FIG. 8 shows the use of the light-addressable potentiometric sensor to record sine waves.
  • the disclosed flexible, light-addressable potentiometric sensor can be fabricated using a thin-film manufacturing technique that streamlines the sensor’s form, resulting in a flexible and adaptable design for various applications.
  • the disclosed flexible, light- addressable potentiometric sensor leverages a focused light beam to pinpoint an exact sensing location. By controlling this light beam, the disclosed flexible, light-addressable potentiometric sensor can provide high precision light resolution mapping, ensuring accuracy and detail in its operations.
  • the design of the disclosed flexible, light-addressable potentiometric sensor simplifies the manufacturing process, eliminating the need for advanced lithography and thereby increasing the practicality and efficiency of device fabrication for real world applications.
  • FIGS. 1A-1E there are illustrated various diagrams showing working principles of the disclosed light-addressable potentiometric sensor, which is also referred to herein as a light-addressable potentiometric sensor (LAPS), are shown.
  • a LAPS system includes an unstructured insulator-semiconductor interface 102 (see, FIGS. IB and ID). Applying a DC voltage biases the LAPS system towards depletion (see, FIGS. 1A, 1C, ID and IE).
  • a modification in surface potential can be quantified by measuring change in the photocurrent when the semiconductor is illuminated with a pulsed, focused laser beam, as shown in FIG. IE.
  • a solidliquid interface is formed on the surface of the sensitive film which is potentially proportional to the concentration of the measured species in the solution. This potential is superimposed on the external bias voltage, which changes the thickness of the space charge region between the LAPS insulating layer and the silicon substrate.
  • FIGS. 2A-2B there is illustrated schematic diagrams of example light-addressable potentiometric sensors (LAPS).
  • LAPS light-addressable potentiometric sensors
  • a light-addressable potentiometric sensor is configured to be activated using light, offering potential improvements in spatial resolution and/or selective sensing over existing electrode arrays.
  • the light- addressable potentiometric sensor(s) 200 disclosed herein includes a four-layer structure defined by a flexible substrate 202, a conductive layer 205 or conductive contact, a semiconductor layer 204, and an insulating layer 206. Additional or fewer layers may be used.
  • the flexible substrate 202 provides a backing layer for supporting the semiconductor layer 204, as well as the conductive layer 205 and insulating layer 206.
  • the flexible substrate 202 is formed of a polymer, such as PDMS, PMMA, or Polyimide; however, the present disclosure is not intended to be limiting in this regard.
  • a flexible substrate e.g., a polymer substrate
  • the sensor can be placed on curved or irregular surfaces (e.g., the brain), making it more versatile than sensors built on rigid substrates.
  • the flexible substrate is generally formed of a transparent or at least partially transparent material (e.g., a transparent polymer) to allow light to pass through, e.g., to the semiconductor layer.
  • the conductive layer 205 or “contact” provides an electrical interface for the semiconductor nanomembrane.
  • the conductive layer or conductive contact is formed of Cr or indium-tin-oxide (ITO); however, the present disclosure is not intended to be limiting in this regard.
  • the conductive layer may, more generally, be any conductive material (e.g., a suitable metal or alloy, such as copper, gold, aluminum, etc.).
  • the conductive layer or conductive contact is highly conductive and durable.
  • the conductive layer or conductive contact is transparent or at least partially transparent to allow light to pass through, e.g., to the semiconductor layer.
  • the semiconductor layer 204 serves as the photoresponsive material for signal transduction.
  • the semiconductor layer 204 is a thin-film inorganic or organic semiconductor. More specifically, this may be a semiconductive nanomembrane that in some implementations is formed of silicon (Si), gallium arsenide (GaAs), gallium nitride (GaN), polysilicon, or the like; however, the present disclosure is not intended to be limiting in this regard.
  • the semiconductor layer is ultrathin and flexible.
  • the insulating layer 206 serves as the biofluid barrier and a dielectric.
  • the insulating layer is formed of silicon nitride (Si3N4), silicon dioxide (SiO2), aluminum oxide (A12O3), and/or hafnium oxide (HfO2); however, the present disclosure is not intended to be limiting in this regard.
  • the insulating layer 206 is selected to have a high sensitivity (e.g., high k) and stability (e.g., low defect).
  • the flexible substrate 202 ranges from 10 to 200 pm in thickness; the conductive layer 205 or contact ranges from 10 to 300 nm in thickness; the semiconductor layer 204 ranges from 50 nm to 2 pm in thickness; and/or the insulating layer 206 ranges from 50 to 200 nm in thickness.
  • the flexible substrate 202 is 20 pm thick; the conductive layer 205 or contact is less than 1 pm thick; the semiconductor layer 206 is 1 to 2 pm thick; and/or the insulating layer is 100 nm thick.
  • FIG. 3 is a diagram of an alternate configuration of a light-addressable potentiometric sensor 300, as described herein, that includes an ion-sensing membrane (ISM) 302 disposed on the insulator 304.
  • ISM ion-sensing membrane
  • An ISM is a membrane that can detect or interact with specific ions.
  • the ISM 302 may be selective to certain ions, such as potassium, sodium, hydrogen ions (e g., for pH sensing), or others. When these ions interact with the ISM 302, they can change its surface potential, which can then be detected by the underlying layers of the sensor.
  • the ISM 302 serves as a sensing target for specific materials, which transfers biomarkers concentrations into an electrical surface potential.
  • the disclosed light-addressable potentiometric sensor may include an interface material other than ISM, such as aptamers, antibody, molecularly imprinted polymers (MIPs), etc.
  • the light-addressable potentiometric sensor can, in some implementations, further include an encapsulation layer 306 that at least partially encapsulates one of more layers of the sensor.
  • Encapsulation can serve as a protective layer that isolates the sensor (or its components) from the environment, thereby protecting sensitive parts of the sensor from contamination, physical damage, or unwanted chemical reactions.
  • the encapsulation layer is formed of a material that is inert and chemically stable.
  • a light- addressable potentiometric sensor starts as a silicon-on-insulator (SOI) substrate that includes a “handling” or base substrate - shown as a silicon wafer - on which a thermal SiO? layer (e.g., the insulating layer) and a device Si layer (e.g., the semiconductor layer) are disposed (FIG. 4A).
  • SOI silicon-on-insulator
  • An electrical contact e.g., the conductive layer
  • the electrical contact is then formed on the semiconductor layer (FIG. 4B).
  • the electrical contact is transparent (e.g., ITO).
  • PECVD plasma-enhanced chemical vapor deposition
  • SiCh layer FOG. 4D
  • PECVD plasma-enhanced chemical vapor deposition
  • SOI Silicon-On-Insulator
  • FIG. 5 shows an example experimental setup for the light-addressable potentiometric sensor(s) described herein.
  • a light-addressable potentiometric sensor 502 is positioned on a biological tissue 504 (e.g., the surface of the brain) to monitor neural activity or other biochemical processes occurring on the contact surface.
  • the platform can be used for sparse sampling across large areas to identify focal point of interest, and dense sampling with high spatial resolution in local areas.
  • the sensor can be used to scan or sample a single point (focal points) of interest. This can be likened to a high temporal monitoring.
  • the light source 506 is generally a controllable a laser, LED array, or the like.
  • the light source may be configured to be modulated (adjusted in intensity, on-off frequency, or position) to target specific regions of the sensor.
  • a transient photocurrent is generated at a specific location on the sensor.
  • the photocurrent properties are altered correspondingly.
  • an output signal from the sensor is transmitted to or otherwise obtained by a process device that can interpret the signal.
  • the processing device may be, for example, a microcontroller, a digital signal processor (DSP), an amplifier, a lock-in amplifier, a data acquisition system, a general-purpose computer, or the like.
  • DSP digital signal processor
  • the sensor may be calibrated before beginning measurements.
  • a baseline may be established by measuring a “dark” current (i.e., the nonilluminated condition). The output in this state would represent baseline or zero point.
  • a calibration curve surface potential vs photocurrent
  • response to reference modulated light is determined by exposing the sensor to a modulated light and recording the sensor’s output. In this manner, the sensor’s signal can be sperate form noise, e.g., using a lock- in amplifier.
  • FIGS. 6A, 6B, 7A and 7B include various graphs illustrating test results for an experimental light-addressable potentiometric sensor.
  • FIGS. 6A and 6B show results of raw data and light stimulation, as well as bias sweeping and photocurrent correlation. Illuminating the sensor at a frequency of 100Hz resulted in a “transient spike.” As shown, a distinct response both when the light is turned on and when the light turned off indicates that the sensor can rapidly detect changes in illumination.
  • the output of the sensor can be connected to a lock-in amplifier for extracting signals from noisy backgrounds. By locking onto a specific reference frequency (in this case, twice the illumination frequency at 200Hz), the sensor’s true response can be distinguished from background noise or interference.
  • the internal electric field is effectively modulated. This can impact charge separation and hence the photocurrent.
  • the results shown indicate a direct relationship between the photocurrent observed when the light is on, and the potential applied to the sensor. This suggests that the sensor’s response can be modulated and controlled, which can be useful for calibration or tuning the sensor for specific applications.
  • FIGS. 7A-7B shows testing results for a light-addressable potentiometric sensor configured with an ISM for sodium specificity.
  • the results in FIGS. 7A-7B were obtained by integrating an ISM tailored to be sensitive to sodium ions. This specificity is important, as it allows the sensor to target sodium concentrations while possibly ignoring or minimizing responses to other ions.
  • a surface potential or voltage
  • a calibration curve is shown that illustrates the relationship between the observed photocurrent (output of the sensor) and the known sodium ion concentrations (input). If the photocurrent is directly tuned or influenced by the sodium ion concentration in the solution, the calibration curve will show a clear trend (either linear or non-linear) indicating this relationship.
  • FIG. 8 shows the use of the SiO2-Si nanomembranes to record sine waves, which can be up to 100 Hz at an amplitude of 0.2 V. This gives the light-addressable sensor(s) of the present disclosure the ability to record electrophysiological signals. This system can reach an amplitude of several millivolts and 250 Hz, which is the scale of common ECG and Ecog.
  • Rapid Responsiveness The sensor’s ability to quickly generate a transient response to light changes indicates that it has a fast response time, which can be crucial for real-time monitoring or high-frequency applications.
  • Noise Reduction Capabilities The successful use of a lock-in amplifier to extract the desired signal underscores the sensor’s potential to operate in noisy environments or situations with a lot of background interference.
  • Tunability The direct correlation between the applied potential and the light-on photocurrent signifies the tunability of the sensor.
  • the sensor By adjusting the bias, the sensor’s response may be optimized for specific applications or conditions.
  • Quantitative Analysis With a clear calibration curve, the sensor not only detects the presence of sodium ions but also quantifies their concentration. This ability transforms the sensor into a precise analytical tool.
  • this sodium-specific configuration might be suitable for real-time monitoring of sodium ion fluctuations in various environments.
  • the present disclosure contemplates methods, systems, and program products on any machine-readable media for accomplishing various operations.
  • the implementations of the present disclosure may be implemented using existing computer processors, or by a special purpose computer processor for an appropriate system, incorporated for this or another purpose, or by a hardwired system.
  • Implementations within the scope of the present disclosure include program products including machine-readable media for carrying or having machine-executable instructions or data structures stored thereon.
  • Such machine-readable media can be any available media that can be accessed by a general purpose or special purpose computer or other machine with a processor.
  • machine-readable media can comprise RAM, ROM, EPROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to carry or store desired program code in the form of machine-executable instructions or data structures, and which can be accessed by a general purpose or special purpose computer or other machine with a processor.
  • Machine-executable instructions include, for example, instructions and data which cause a general-purpose computer, special purpose computer, or special purpose processing machines to perform a certain function or group of functions.

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Abstract

L'invention concerne un capteur potentiométrique flexible adressable de lumière et des techniques de fabrication associées utilisant une technique de fabrication de film mince qui permet d'épurer la forme du capteur, ce qui permet d'obtenir une conception flexible et adaptable pour diverses applications. Le capteur potentiométrique flexible adressable de lumière exploite un faisceau lumineux focalisé afin d'identifier un emplacement de détection exact. En commandant ledit faisceau lumineux, le capteur potentiométrique flexible adressable de lumière peut fournir un mappage de résolution de lumière de haute précision, garantissant ainsi la précision et le détail de ses opérations. La conception du capteur potentiométrique flexible adressable de lumière divulguée simplifie le processus de fabrication, ce qui permet de supprimer le besoin de lithographie avancée et d'augmenter la praticité et l'efficacité de la fabrication du dispositif pour des applications du monde réel.
PCT/US2024/043847 2023-08-31 2024-08-26 Capteurs potentiométriques flexibles adressables de lumière Pending WO2025049385A1 (fr)

Applications Claiming Priority (2)

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US202363535751P 2023-08-31 2023-08-31
US63/535,751 2023-08-31

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WO2025049385A1 true WO2025049385A1 (fr) 2025-03-06

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020031854A1 (en) * 1999-02-26 2002-03-14 Howard W. Walker Silicon-on-insulator sensor having silicon oxide sensing surface, and manufacturing method therefor
US20040014240A1 (en) * 2000-07-06 2004-01-22 Keigo Takeguchi Molecule detecting sensor
CN102288655B (zh) * 2011-05-13 2013-07-24 浙江大学 一种阵列式光寻址电位传感器及其制作方法
US8519447B2 (en) * 2009-08-12 2013-08-27 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Ion sensitive sensor with multilayer construction in the sensor region
WO2018098417A1 (fr) * 2016-11-28 2018-05-31 Elwha Llc Surveillance et traitement de la douleur avec l'électronique épidermique
WO2024010976A1 (fr) * 2022-07-08 2024-01-11 Ohio State Innovation Foundation Biocapteur souple pour la détection et/ou la cartographie 2d/3d de la concentration d'un biomarqueur

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020031854A1 (en) * 1999-02-26 2002-03-14 Howard W. Walker Silicon-on-insulator sensor having silicon oxide sensing surface, and manufacturing method therefor
US20040014240A1 (en) * 2000-07-06 2004-01-22 Keigo Takeguchi Molecule detecting sensor
US8519447B2 (en) * 2009-08-12 2013-08-27 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Ion sensitive sensor with multilayer construction in the sensor region
CN102288655B (zh) * 2011-05-13 2013-07-24 浙江大学 一种阵列式光寻址电位传感器及其制作方法
WO2018098417A1 (fr) * 2016-11-28 2018-05-31 Elwha Llc Surveillance et traitement de la douleur avec l'électronique épidermique
WO2024010976A1 (fr) * 2022-07-08 2024-01-11 Ohio State Innovation Foundation Biocapteur souple pour la détection et/ou la cartographie 2d/3d de la concentration d'un biomarqueur

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GUO, Y. ET AL.: "Miniature multiplexed label-free pH probe in vivo", BIOSENSORS AND BIOELECTRONICS, 2020, pages 2 - 4, XP086427879, DOI: 10.1016/j.bios.2020.112870 *
YANG CHIA-MING; ZENG WEI-YIN; CHEN CHUN-HUI; CHEN YU-PING; CHEN TSUNG-CHENG: "Spatial resolution and 2D chemical image of light-addressable potentiometric sensor improved by inductively coupled-plasma reactive-ion etching", SENSORS AND ACTUATORS B: CHEMICAL, vol. 258, 25 December 2017 (2017-12-25), NL , pages 1295 - 1301, XP085338556, ISSN: 0925-4005, DOI: 10.1016/j.snb.2017.12.151 *

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