WO2025041409A1 - Surface-treated aluminum material, method for producing same, and compressor wheel - Google Patents
Surface-treated aluminum material, method for producing same, and compressor wheel Download PDFInfo
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- WO2025041409A1 WO2025041409A1 PCT/JP2024/020700 JP2024020700W WO2025041409A1 WO 2025041409 A1 WO2025041409 A1 WO 2025041409A1 JP 2024020700 W JP2024020700 W JP 2024020700W WO 2025041409 A1 WO2025041409 A1 WO 2025041409A1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/16—Pretreatment, e.g. desmutting
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/04—Etching of light metals
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
- C25F3/18—Polishing of light metals
- C25F3/20—Polishing of light metals of aluminium
Definitions
- the present invention relates to a surface-treated aluminum material, its manufacturing method, and a compressor wheel.
- the 2000 series aluminum alloys are widely used in applications such as turbocharger compressor wheels, taking advantage of their relatively high strength at high temperatures among aluminum alloys. 2000 series aluminum alloys are also sometimes used for parts placed inside the vacuum chambers of semiconductor manufacturing equipment.
- Patent Document 1 describes a component for a substrate processing apparatus that performs plasma processing on a substrate, characterized in that the component is connected to the anode of a DC power source and has a film formed on the surface of the component by anodizing, in which the component is immersed in a solution mainly composed of an organic acid, and the film is subjected to a semi-sealing treatment using boiling water.
- Patent Document 1 has the problem that the pores in the anodized film are not completely blocked, making them less durable against corrosive gases and plasma.
- the present invention was made in consideration of this background, and aims to provide a surface-treated aluminum material that has excellent corrosion resistance against corrosive gases and plasma and can suppress the occurrence of cracks even when the temperature rises, as well as a manufacturing method and a compressor wheel for the same.
- One aspect of the present invention is a surface-treated aluminum material having a base material made of an aluminum alloy having a Cu (copper) content of more than 1.8 mass% and not more than 6.8 mass%, and a protective coating film formed on the base material,
- the protective coating is made of an oxide of aluminum, and has an oxide layer covering the base material; a hydrated oxide layer comprising a hydrated oxide of aluminum and covering the oxide layer;
- Another aspect of the present invention is a compressor wheel made of the surface-treated aluminum material of the above-mentioned aspect.
- Yet another aspect of the present invention is a method for producing a surface-treated aluminum material of the above aspect, forming the oxide layer having pores on the base material by subjecting the base material to anodizing treatment; Thereafter, the base material and the oxide layer are heated at a temperature of 50° C. or more and 350° C. or less, Thereafter, the oxide layer is brought into contact with a sealing agent to form the hydrated oxide layer on the oxide layer and seal the pores.
- the surface-treated aluminum material (hereinafter referred to as "aluminum material”) has a protective coating comprising the oxide layer and the hydrated oxide layer on the surface of a base material.
- aluminum material has a protective coating comprising the oxide layer and the hydrated oxide layer on the surface of a base material.
- the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 x 10-5 or less.
- An aluminum material having such characteristics has excellent corrosion resistance against corrosive gases and plasma, as well as excellent heat resistance, and can suppress the occurrence of cracks even when the temperature rises.
- the compressor wheel is made of the aluminum material, the occurrence of cracks in the protective coating is suppressed even when the temperature becomes high during use, and the healthy state of the protective coating can be maintained for a long period of time. And, because cracks are thus less likely to occur in the protective coating, wear of the protective coating can be suppressed for a long period of time.
- a surface-treated aluminum material that has excellent corrosion resistance against corrosive gases and plasma, as well as excellent heat resistance, and is capable of suppressing the occurrence of cracks even when the temperature rises, a manufacturing method thereof, and a compressor wheel.
- FIG. 1 is a cross-sectional view of a surface-treated aluminum material in an embodiment.
- FIG. 2 is a cross-sectional view of a base material on which an oxide layer is formed in the process for producing a surface-treated aluminum material according to an embodiment of the present invention.
- FIG. 3 is an explanatory diagram showing an example of a cathodic polarization curve of a base material.
- FIG. 4 is an enlarged view of a step portion in the cathodic polarization curve of the base material.
- FIG. 5 is an explanatory diagram showing a method for measuring the amount of strain of a surface-treated aluminum material in a reference example.
- FIG. 6 is an explanatory diagram showing the measurement results of the amount of strain of the surface-treated aluminum material in the reference example.
- the base material of the aluminum material is made of an aluminum alloy having a Cu content of more than 1.8 mass% and not more than 6.8 mass%.
- the shape of the base material is not particularly limited, and may take various shapes depending on the application of the aluminum material.
- examples of 2000 series aluminum alloys that can be used include aluminum alloys having chemical components represented by alloy numbers AA2011, AA2014, AA2014A, AA2017, AA2017A, AA2218, AA2219, AA2018, AA2025, AA2319, AA2124, AA2036, AA2117, AA2618, and AA2024.
- the thickness of the protective film is preferably 2 ⁇ m or more. This can further improve the corrosion resistance of the aluminum material. From the viewpoint of corrosion resistance, there is no particular upper limit to the thickness of the protective film, and the thicker the protective film, the more the corrosion resistance of the aluminum material can be improved. From this viewpoint, the thickness of the protective film is more preferably 5 ⁇ m or more, and even more preferably 10 ⁇ m or more. The upper manufacturing limit for the thickness of the protective film is, for example, 200 ⁇ m. From the viewpoint of suppressing the occurrence of cracks in the protective film, the thickness of the protective film is preferably 100 ⁇ m or less.
- the mass loss per unit area of the aluminum material is preferably 0.3 g/ dm2 or less.
- the pores in the oxide layer are sufficiently sealed by the hydrated oxide layer, so that the corrosion resistance of the aluminum material can be more reliably improved.
- the specific method for the pore sealing test is as follows. First, 35 mL of phosphoric acid and 20 g of chromic anhydride are dissolved in water to prepare 1 L of test liquid. Next, a test piece including a protective film is taken from the aluminum material, and the area of the protective film on the test piece is measured. After removing any dirt from the surface of this test piece, the mass of the test piece is measured. After that, the test piece is immersed in the test liquid maintained at a temperature of 38°C ⁇ 1°C for 15 minutes ⁇ 5 seconds.
- the mass loss per unit area ⁇ A (unit: g/ dm2 )/A (1)
- the aluminum material has excellent corrosion resistance against corrosive gases and plasma, and can suppress the occurrence of cracks in the protective film even when the temperature rises. Therefore, the aluminum material is suitable for applications such as cover members provided around the fans of cooking appliances and components for semiconductor manufacturing equipment. In addition, the aluminum material has properties such that cracks are unlikely to occur in the protective film, and it is resistant to wear even at high temperatures. Therefore, the aluminum material is also suitable for applications such as compressor wheels incorporated in turbochargers.
- an oxide layer can be formed on the surface of the base material by passing a direct current between the base material and the counter electrode while the base material and the counter electrode are immersed in an electrolyte.
- the oxide layer thus formed is composed of an oxide of aluminum, such as alumina, and has a large number of pores.
- the electrolyte used in the anodizing treatment may be, for example, an acid electrolyte containing an electrolyte such as sulfuric acid or phosphoric acid, or an alkaline electrolyte containing an electrolyte such as sodium metaborate.
- the electrolyte used in the anodizing treatment preferably contains an inorganic electrolyte consisting of an inorganic cation and one or more anions selected from the group consisting of sulfate ions, phosphate ions, ammonium ions, and borate ions.
- the current density of the direct current in the anodizing treatment can be appropriately set, for example, in the range of 1 mA/ cm2 to 100 mA/ cm2 .
- the temperature of the electrolyte in the anodizing treatment can be appropriately set, for example, in the range of 0°C to 40°C.
- the thickness of the oxide layer formed in the anodizing process is preferably 2 ⁇ m or more.
- the thickness of the protective film obtained after sealing can be made sufficiently thick, making it easier to obtain an aluminum material with excellent corrosion resistance and heat resistance.
- the base material and the oxide layer are heated at a temperature of 50°C to 350°C.
- the oxide layer is heated at a temperature within the specific range before sealing the pores in the oxide layer, thereby alleviating the internal stress in the oxide layer.
- the internal stress in the protective film after sealing can be reduced. As a result, the occurrence of cracks in the protective film when heated can be suppressed, and an aluminum material with excellent heat resistance can be obtained.
- the heating temperature of the oxide layer is less than 50°C, the internal stress of the oxide layer will not be sufficiently alleviated, and cracks may easily occur in the protective film when the temperature of the aluminum material rises.
- the heating temperature of the oxide layer exceeds 350°C, the oxide layer will not be able to follow the thermal expansion of the base material, and cracks may occur in the oxide film.
- the heating may be terminated immediately after the temperature of the oxide layer reaches the desired temperature, or the desired temperature may be maintained for a certain period of time after the desired temperature is reached. From the viewpoint of sufficiently alleviating the internal stress of the oxide layer and more reliably increasing the heat resistance of the aluminum material, it is preferable that the heating time from the start of heating the oxide layer to the end of heating is 1 minute or more and less than 12 hours.
- the oxide layer After heating the oxide layer, the oxide layer is brought into contact with a sealing agent. This forms the hydrated oxide layer on the oxide layer, and the pores are sealed by the hydrated oxide layer.
- a sealing agent for example, a substance capable of reacting with an oxide of aluminum to form a hydrated oxide, such as hot water, can be used.
- hot water When hot water is used for the sealing process, a hydrated oxide layer made of a hydrated oxide of aluminum can be formed on the oxide layer.
- a sealing agent a substance capable of reacting with an oxide of aluminum to form a hydrated oxide and a metal salt, such as an aqueous solution of nickel acetate, an aqueous solution of cobalt acetate, an aqueous solution of chromate, or an aqueous solution of silicate, can be used.
- a hydrated oxide layer containing a hydrated oxide of aluminum and a metal salt can be formed on the oxide layer.
- the sealing agent is hot water.
- a hydrated oxide layer that does not contain metal salts can be formed on the oxide layer.
- hot water it is more preferable to seal the pores in the oxide layer by contacting the oxide layer with hot water of 95°C or higher as the sealing agent for 10 minutes or more and less than 120 minutes.
- the surface-treated aluminum material 1 of this embodiment has a base material 2 made of an aluminum alloy with an aluminum or Cu content of more than 1.8 mass% and not more than 6.8 mass%, and a protective coating 3 formed on the base material.
- the protective coating 3 has an oxide layer 31 made of an oxide of aluminum that covers the base material 2, and a hydrated oxide layer 32 that contains a hydrated oxide of aluminum and covers the oxide layer 31.
- the base material 2 is anodized to form an oxide layer 31 having pores 311 on the base material 2 as shown in FIG. 2.
- the base material 2 and the oxide layer 31 are then heated at a temperature of 50°C to 350°C to relieve the internal stress of the oxide layer 31.
- the oxide layer 31 is then brought into contact with a sealing agent to form a hydrated oxide layer 32 on the oxide layer 31 and seal the pores 311, thereby obtaining the aluminum material 1.
- Table 1 shows specific examples of aluminum material 1 (test materials A1 to A3).
- the manufacturing method of test materials A1 to A3 is, for example, as follows. First, an aluminum plate having a thickness of 1.1 mm and a chemical composition represented by one of the alloy numbers shown in Table 1 is prepared as base material 2. This base material 2 is subjected to pretreatment for anodizing. Specifically, as pretreatment, an alkali etching treatment is performed by immersing the base material 2 in an aqueous sodium hydroxide solution with a concentration of 5 mass% and a temperature of 55°C. Then, the base material 2 is immersed in nitric acid with a concentration of 30 mass% to perform a desmutting treatment.
- a desmutting treatment is performed again under the same conditions as those described above.
- the base material 2 is anodized to form an oxide layer 31 on the surface of the base material 2.
- the electrolytic solution used in the anodizing process is an aqueous sulfuric acid solution with a concentration of 15% by mass, and the temperature of the electrolytic solution is 5° C.
- the current density in the anodizing process is 10 mA/cm 2 , and the process time is 60 minutes.
- the oxide layer 31 thus formed is a so-called porous type anodized aluminum film, and has a large number of pores 311 as shown in FIG. 2.
- the thickness of the oxide layer 31 formed by anodizing process under the above-mentioned conditions is approximately 15 ⁇ m.
- the base material 2 is heated in a heating furnace to relieve the internal stress of the oxide layer 31.
- the set temperature of the heating furnace is the value shown in the "Heating temperature” column of Table 1
- the residence time of the base material in the furnace that is, the time from the start of heating to the end of heating, is the value shown in the "Heating time” column of Table 1.
- the base material 2 with the oxide layer 31 is immersed in hot water having a temperature of 100° C. as a sealant for 60 minutes to form a hydrated oxide layer 32 made of a hydrated oxide of aluminum on the oxide layer 31, and the pores 311 in the oxide layer 31 are sealed by the hydrated oxide layer 32.
- the test materials A1 to A3 shown in Table 1 can be obtained.
- the mass loss per unit area of the aluminum material 1 is 0.3 g/ dm2 or less when a sealing test is performed by the method specified in JIS H8683-2:2013.
- test materials B1 to B2 shown in Table 1 are test materials for comparison with test materials A1 to A3.
- the manufacturing method of test materials B1 to B2 is the same as the manufacturing method of test materials A1 to A3, except that after oxide layer 31 is formed on base material 2, oxide layer 31 is brought into contact with the sealing agent without being heated.
- the cathodic polarization measurements are performed on the base material and the test material heated at 200° C. for 4 hours by the following method, and the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is calculated based on these cathodic polarization curves.
- the test material is heated for 4 hours in an oven set at 200° C.
- the test material is removed from the oven and cooled to room temperature, after which an evaluation area is set on the protective coating, and the surface of the test material other than the evaluation area is covered with silicone resin.
- a voltage is applied between the test piece and the counter electrode using a potentiostat, and the potential of the measurement section is swept at a sweep rate of 20 mV/min until the potential of the measurement section reaches -2000 mV relative to the reference electrode.
- the current density flowing through the measurement section at this time is measured to obtain a cathodic polarization curve of the test material after heating.
- a similar measurement is performed using the base material after pretreatment for anodizing using the method described above to obtain a cathodic polarization curve of the base material. Note that the cathodic polarization measurements of the test material and base material are both performed in the air, with the temperature of the measurement solution maintained at 25°C. In addition, the cathodic polarization measurements of the test material and base material are performed without stirring the measurement solution, and with the measurement solution substantially not flowing.
- Fig. 3 shows an example of the cathodic polarization curve of a base material, which is an aluminum material having no protective coating and made of an aluminum alloy having a chemical component represented by alloy number A6016.
- the vertical axis of Fig. 3 shows the potential (unit: V) of the measurement part, and the horizontal axis shows the current density (unit: ⁇ A/ cm2 ).
- the horizontal axis of Fig. 3 is scaled logarithmically.
- the cathodic polarization curve of the aluminum material having no protective coating shows a step-like shape.
- Figure 4 shows an enlarged view of the step portion of the cathodic polarization curve in Figure 3.
- the cathodic polarization curve of the base material also shows a step-like shape like Figure 3. Therefore, based on the shape of the step portion of the cathodic polarization curve shown in Figure 4, the center of the potential region showing the diffusion limit current of hydrogen ions can be determined.
- the method for determining the potential region showing the diffusion limit current of hydrogen ions in the cathodic polarization curve of the base material is as follows. First, a tangent line L with the largest absolute value of the slope is drawn in the step portion of the cathodic polarization curve as shown in Figure 4.
- the region R where this tangent line L and the cathodic polarization curve overlap is set as the potential region showing the diffusion limit current of hydrogen ions.
- the current density J2 in the center of the region R determined in this way is calculated.
- the current density J1 at the same potential as the potential at the center of the above-mentioned potential region in the cathodic polarization curve of the base material is calculated.
- the current density J1 calculated based on the cathodic polarization curve of the test material after heating can be used as an index of the contact area between the base material and the measurement solution in the test material after heating, and a larger current density value indicates a larger contact area between the base material and the measurement solution. Therefore, the ratio J1/J2 of the current density J1 calculated using the test piece after heating to the current density J2 calculated using the base material can be used as an index of the increase rate of the exposed area of the base material due to heating. More specifically, for example, if defects such as cracks are formed in the protective film of the test material after heating, the base material may be exposed by the cracks. Therefore, in this case, the current density ratio J1/J2 becomes large. Table 1 shows the current density ratio J1/J2 of each test material.
- test materials A1 to A3 As shown in Table 1, when preparing test materials A1 to A3, an oxide layer is formed on the base material, and then the oxide layer is heated at a temperature within the specific range before the pores in the oxide layer are sealed. As a result, these test materials have a current density ratio J1/J2 within the specific range, and are able to suppress the occurrence of cracks in the protective film even when the temperature rises. In addition, the oxide layer of the protective film of these test materials is sealed with a hydrated oxide layer, and therefore has excellent corrosion resistance against corrosive gases, plasma, etc.
- test materials B1 and B2 when preparing test materials B1 and B2, an oxide layer is formed on the base material, and then the pores are sealed without heating the oxide layer.
- the current density ratio J1/J2 of these test materials is higher than the specific range, and cracks are likely to occur when the temperature rises.
- the method for preparing the test material used in this example is as follows. First, an aluminum plate having a thickness of 1.1 mm and a chemical composition represented by alloy number AA6016 is prepared as the base material 2. This base material 2 is pretreated for anodizing in the same manner as in the example, and then anodized. After anodizing, the base material 2 is heated in a heating furnace to relieve the internal stress of the oxide layer 31.
- the set temperature of the heating furnace is the value shown in the "Heating temperature” column in Table 2, and the residence time of the base material in the furnace, that is, the time from the start of heating to the end of heating, is the value shown in the "Heating time” column in Table 2.
- the base material 2 with the oxide layer 31 is immersed in hot water at a temperature of 100°C as a sealing agent for 60 minutes to form a hydrated oxide layer 32 on the oxide layer 31 and seal the pores 311 in the oxide layer 31 with the hydrated oxide layer 32.
- the test materials C1 to C2 shown in Table 1 can be obtained.
- test material D1 and test material E1 shown in Table 1 are test materials for comparison with test materials C1 to C2.
- the manufacturing method of test material D1 is the same as that of test materials C1 to C2, except that after forming an oxide layer 31 on base material 2, the oxide layer 31 is brought into contact with the sealing agent without heating.
- Test material E1 is a plate material made of an aluminum alloy having a chemical composition represented by alloy number AA6016.
- Test material E1 is obtained by performing a pretreatment of anodizing treatment by the above-mentioned method on a plate material made of an aluminum alloy having a chemical composition represented by alloy number AA6016.
- the base material 2 When measuring the amount of strain in test materials C1-C2 and D1, as shown in Figure 5, the base material 2 is exposed on the back side of the surface of the aluminum material 1 that has the protective coating 3. A strain gauge 4 is then attached to the exposed base material 2. By heating the aluminum material 1 with the strain gauge 4 attached in this way, it is possible to measure the strain caused by thermal expansion of the base material 2 and protective coating 3. Note that for convenience, the structure of the protective coating 3 is shown in a simplified form in Figure 5.
- a strain gauge is attached to one side of the test material E1 in the thickness direction, and then the test material E1 is heated.
- Figure 6 shows the change in strain when test materials C1-C2, D1, and E1 are heated for 30 minutes in a heating furnace set at 200°C.
- the vertical axis in Figure 6 represents the strain, and the horizontal axis represents the time elapsed from the start of heating.
- the test materials thermally expand as the temperature rises, so as shown in Figure 6, the strain increases rapidly for several minutes after the test begins. After that, when the temperature of the test materials reaches an approximately constant temperature, the strain of the test materials becomes approximately constant.
- Table 2 shows the maximum strain values while the test materials were being heated. Table 2 also shows the maximum strain values of test materials C1-C2 and D1, which have a protective coating, minus the maximum strain value of test material E1, which does not have a protective coating.
- the difference between the strain values of test materials C1-C2 and D1 and the strain value of test material D indicates the magnitude of the internal stress of the protective coating that was released by heating during the test; the smaller the difference between the two strain values, the smaller the internal stress of the protective coating.
- the strain amount of test materials C1 and C2, which form a hydrated oxide layer after heating the oxide layer during the manufacturing process of the test materials is smaller than the strain amount of test material D1, which forms a hydrated oxide layer without heating the oxide layer. Therefore, from these results, it can be understood that by forming a hydrated oxide layer after heating the oxide layer during the manufacturing process of the aluminum material, it is possible to reduce the internal stress of the protective film and improve the heat resistance of the aluminum material.
- the surface-treated aluminum material according to the present invention can take the following forms [1] to [3].
- the compressor wheel according to the present invention may have the following configuration [3]. [3] A compressor wheel made of the surface-treated aluminum material according to [1] or [2].
- the method for manufacturing surface-treated aluminum material according to the present invention can take the following forms [4] to [8].
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Abstract
Description
本発明は、表面処理アルミニウム材、その製造方法及びコンプレッサーホイールに関する。 The present invention relates to a surface-treated aluminum material, its manufacturing method, and a compressor wheel.
2000系アルミニウム合金は、アルミニウム合金の中でも高温における強度が比較的高いという特性を活かし、ターボチャージャーのコンプレッサーホイール等の用途に多用されている。また、2000系アルミニウム合金は、半導体製造装置の真空チャンバー内に配置される部品に用いられることもある。 The 2000 series aluminum alloys are widely used in applications such as turbocharger compressor wheels, taking advantage of their relatively high strength at high temperatures among aluminum alloys. 2000 series aluminum alloys are also sometimes used for parts placed inside the vacuum chambers of semiconductor manufacturing equipment.
ところで、アルミニウム材の表面には、表面の保護などの目的で陽極酸化皮膜が設けられることがある。例えば特許文献1には、基板にプラズマ処理を施す基板処理装置用の部品において、前記部品を直流電源の陽極に接続し且つ有機酸を主成分とする溶液中に浸漬する陽極酸化処理によって前記部品の表面に形成された皮膜を備え、前記皮膜には沸騰水を用いた半封孔処理が施されることを特徴とする基板処理装置用の部品が記載されている。
Incidentally, an anodized film may be provided on the surface of aluminum material for purposes such as surface protection. For example,
しかし、特許文献1の部品は、陽極酸化皮膜の細孔が完全に閉塞されていないため、腐食性ガスやプラズマに対する耐久性が低いという問題がある。
However, the parts in
一方、特許文献1の部品において、腐食性ガスやプラズマに対する耐久性を高めるためには陽極酸化皮膜の細孔を完全に閉塞する方法が考えられる。しかし、この場合には、温度が上昇した際に陽極酸化皮膜にクラックが発生しやすくなり、陽極酸化皮膜の小片からなる異物が発生するおそれがある。
On the other hand, in order to increase the durability of the parts in
また、例えばコンプレッサーホイールのような、高温環境で使用され、かつ摺動性が求められる用途において、陽極酸化皮膜にクラックが発生すると、耐食性や耐摩耗性の低下を招くおそれがある。このような異物やクラックの発生を抑制するため、表面に陽極酸化皮膜を有するアルミニウム材の耐熱性をより高めることが望まれている。 Furthermore, in applications such as compressor wheels that are used in high-temperature environments and require sliding properties, if cracks occur in the anodized film, this can lead to a decrease in corrosion resistance and wear resistance. In order to prevent the occurrence of such foreign matter and cracks, it is desirable to further improve the heat resistance of aluminum materials that have an anodized film on their surface.
本発明は、かかる背景に鑑みてなされたものであり、腐食性ガスやプラズマに対する耐食性に優れるとともに、温度が上昇した場合においてもクラックの発生を抑制することができる表面処理アルミニウム材、その製造方法及びコンプレッサーホイールを提供しようとするものである。 The present invention was made in consideration of this background, and aims to provide a surface-treated aluminum material that has excellent corrosion resistance against corrosive gases and plasma and can suppress the occurrence of cracks even when the temperature rises, as well as a manufacturing method and a compressor wheel for the same.
本発明の一態様は、Cu(銅)の含有量が1.8質量%超え6.8質量%以下であるアルミニウム合金からなる母材と、前記母材上に形成された保護皮膜と、を有する表面処理アルミニウム材であって、
前記保護皮膜は、アルミニウムの酸化物からなり、前記母材を覆う酸化物層と、
アルミニウムの水和酸化物を含み、前記酸化物層を覆う水和酸化物層と、を有し、
濃度5質量%のNaCl溶液と濃度99.7質量%の酢酸とを前記NaCl溶液:前記酢酸=1000:1の体積比で混合してなる測定溶液を用いて前記母材及び200℃の温度で4時間加熱した後の前記表面処理アルミニウム材のカソード分極測定を行い、前記母材の水素イオンの拡散限界電流を示す電位領域の中央の電位における電流密度を測定した場合に、前記母材の電流密度J2に対する前記表面処理アルミニウム材の電流密度J1の比J1/J2が7000×10-5以下である、表面処理アルミニウム材にある。
One aspect of the present invention is a surface-treated aluminum material having a base material made of an aluminum alloy having a Cu (copper) content of more than 1.8 mass% and not more than 6.8 mass%, and a protective coating film formed on the base material,
The protective coating is made of an oxide of aluminum, and has an oxide layer covering the base material;
a hydrated oxide layer comprising a hydrated oxide of aluminum and covering the oxide layer;
The surface-treated aluminum material is characterized in that, when cathodic polarization measurements are performed on the base material and the surface-treated aluminum material after heating at a temperature of 200°C for 4 hours using a measurement solution obtained by mixing a NaCl solution with a concentration of 5% by mass and acetic acid with a concentration of 99.7% by mass in a volume ratio of NaCl solution:acetic acid = 1000:1, and the current density is measured at the central potential in the potential region showing the diffusion limiting current of the hydrogen ions of the base material, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 x 10-5 or less.
本発明の他の態様は、前記の態様の表面処理アルミニウム材からなるコンプレッサーホイールにある。 Another aspect of the present invention is a compressor wheel made of the surface-treated aluminum material of the above-mentioned aspect.
本発明のさらに他の態様は、前記の態様の表面処理アルミニウム材の製造方法であって、
前記母材に陽極酸化処理を施すことにより前記母材上に細孔を備えた前記酸化物層を形成し、
その後、前記母材及び前記酸化物層を50℃以上350℃以下の温度で加熱し、
その後、前記酸化物層を封孔剤に接触させて前記酸化物層上に前記水和酸化物層を形成するとともに前記細孔を封孔する、表面処理アルミニウム材の製造方法にある。
Yet another aspect of the present invention is a method for producing a surface-treated aluminum material of the above aspect,
forming the oxide layer having pores on the base material by subjecting the base material to anodizing treatment;
Thereafter, the base material and the oxide layer are heated at a temperature of 50° C. or more and 350° C. or less,
Thereafter, the oxide layer is brought into contact with a sealing agent to form the hydrated oxide layer on the oxide layer and seal the pores.
前記表面処理アルミニウム材(以下、「アルミニウム材」という。)は、母材の表面に、前記酸化物層と前記水和酸化物層とを備えた保護皮膜を有している。また、前記特定の方法で200℃の温度で4時間加熱した後の前記表面処理アルミニウム材及び前記母材のカソード分極測定を行った場合における、前記母材の電流密度J2に対する前記表面処理アルミニウム材の電流密度J1の比J1/J2が7000×10-5以下である。かかる特性を有するアルミニウム材は、腐食性ガスやプラズマに対する耐食性に優れているとともに、優れた耐熱性を有しており、温度が上昇した場合においてもクラックの発生を抑制することができる。 The surface-treated aluminum material (hereinafter referred to as "aluminum material") has a protective coating comprising the oxide layer and the hydrated oxide layer on the surface of a base material. In addition, when the surface-treated aluminum material and the base material are subjected to cathodic polarization measurement after being heated at a temperature of 200°C for 4 hours by the specific method, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 x 10-5 or less. An aluminum material having such characteristics has excellent corrosion resistance against corrosive gases and plasma, as well as excellent heat resistance, and can suppress the occurrence of cracks even when the temperature rises.
また、前記コンプレッサーホイールは、前記アルミニウム材から構成されているため、使用中に高温となった場合においても保護皮膜におけるクラックの発生を抑制し、保護皮膜の健全な状態を長期間にわたって維持することができる。そして、このように保護皮膜にクラックが発生しにくくなることにより、長期間にわたって保護皮膜の摩耗を抑制することができる。 In addition, because the compressor wheel is made of the aluminum material, the occurrence of cracks in the protective coating is suppressed even when the temperature becomes high during use, and the healthy state of the protective coating can be maintained for a long period of time. And, because cracks are thus less likely to occur in the protective coating, wear of the protective coating can be suppressed for a long period of time.
また、前記アルミニウム材の製造方法においては、母材に陽極酸化処理を施した後に、陽極酸化処理によって形成された酸化物層を前記特定の範囲内の温度で加熱する。このように、酸化物層の細孔を封孔する前に酸化物層を加熱することにより、酸化物層の形成時に生じた内部応力を緩和することができる。そして、酸化物層の内部応力を緩和した後に酸化物層と封孔剤とを接触させ、酸化物層上に水和酸化物層を形成すると共に細孔を封孔することにより、腐食性ガスやプラズマに対する耐食性を高めるとともに、耐熱性を向上させ、温度が上昇した場合においてもクラックの発生を抑制することができる。 In addition, in the manufacturing method of the aluminum material, the base material is anodized, and then the oxide layer formed by the anodization is heated at a temperature within the specific range. In this way, by heating the oxide layer before sealing the pores in the oxide layer, the internal stress generated during the formation of the oxide layer can be alleviated. Then, after the internal stress of the oxide layer is alleviated, the oxide layer is brought into contact with a sealant to form a hydrated oxide layer on the oxide layer and seal the pores, thereby increasing corrosion resistance against corrosive gases and plasma, improving heat resistance, and suppressing the occurrence of cracks even when the temperature rises.
以上のように、前記の態様によれば、腐食性ガスやプラズマに対する耐食性に優れているとともに、優れた耐熱性を有しており、温度が上昇した場合においてもクラックの発生を抑制することができる表面処理アルミニウム材、その製造方法及びコンプレッサーホイールを提供することができる。 As described above, according to the above-mentioned aspect, it is possible to provide a surface-treated aluminum material that has excellent corrosion resistance against corrosive gases and plasma, as well as excellent heat resistance, and is capable of suppressing the occurrence of cracks even when the temperature rises, a manufacturing method thereof, and a compressor wheel.
(アルミニウム材)
前記アルミニウム材の母材は、Cuの含有量が1.8質量%を超え6.8質量%以下であるアルミニウム合金から構成されている。母材の形状は特に限定されることはなく、アルミニウム材の用途に応じて種々の形状をとり得る。
(Aluminum material)
The base material of the aluminum material is made of an aluminum alloy having a Cu content of more than 1.8 mass% and not more than 6.8 mass%. The shape of the base material is not particularly limited, and may take various shapes depending on the application of the aluminum material.
前記アルミニウム材の母材を構成するアルミニウム合金は、例えば、2000系アルミニウム合金であってもよい。前記アルミニウム材の母材を構成する2000系アルミニウム合金としては、例えば、Cu(銅):1.8質量%を超え6.8質量%以下を含むとともに、Si(シリコン)、Fe(鉄)、Mn(マンガン)、Mg(マグネシウム)、Cr(クロム)、Zn(亜鉛)及びTi(チタン)からなる群より選択される1種または2種以上の元素を任意成分として含み、残部がAl及び不可避的不純物からなる化学成分を有するアルミニウム合金を使用することができる。 The aluminum alloy constituting the base material of the aluminum material may be, for example, a 2000 series aluminum alloy. As the 2000 series aluminum alloy constituting the base material of the aluminum material, for example, an aluminum alloy having a chemical composition containing more than 1.8 mass% and not more than 6.8 mass% Cu (copper), one or more elements selected from the group consisting of Si (silicon), Fe (iron), Mn (manganese), Mg (magnesium), Cr (chromium), Zn (zinc) and Ti (titanium) as optional components, with the remainder being Al and unavoidable impurities, can be used.
より具体的には、2000系アルミニウム合金としては、例えば、合金番号AA2011、AA2014、AA2014A、AA2017、AA2017A、AA2218、AA2219、AA2018、AA2025、AA2319、AA2124、AA2036、AA2117、AA2618またはAA2024で表される化学成分を有するアルミニウム合金等を用いることができる。 More specifically, examples of 2000 series aluminum alloys that can be used include aluminum alloys having chemical components represented by alloy numbers AA2011, AA2014, AA2014A, AA2017, AA2017A, AA2218, AA2219, AA2018, AA2025, AA2319, AA2124, AA2036, AA2117, AA2618, and AA2024.
前記母材上には、アルミニウムの酸化物からなり、母材上に積層された酸化物層と、アルミニウムの水和酸化物を含み、酸化物層に積層された水和酸化物層とを含む保護皮膜が設けられている。より具体的には、水和酸化物層は、アルミニウムの水和酸化物から構成されていてもよい。また、水和酸化物層は、水和酸化物と、金属塩とを含んでいてもよい。保護皮膜は、例えば、母材に陽極酸化処理を施し、母材の表面に多数の細孔を備えた酸化物層を形成した後、封孔処理を行い、酸化物層の細孔を水和酸化物層で閉塞することにより得られる。このような保護皮膜は、腐食性ガスやプラズマ等に対する耐食性に優れている。それ故、母材上に前記保護皮膜を形成することにより、前記アルミニウム材の耐食性を高めることができる。 A protective coating is provided on the base material, the protective coating including an oxide layer made of an oxide of aluminum and laminated on the base material, and a hydrated oxide layer containing a hydrated oxide of aluminum and laminated on the oxide layer. More specifically, the hydrated oxide layer may be made of a hydrated oxide of aluminum. The hydrated oxide layer may also contain a hydrated oxide and a metal salt. The protective coating is obtained, for example, by subjecting the base material to an anodizing treatment to form an oxide layer with a large number of pores on the surface of the base material, and then performing a sealing treatment to block the pores in the oxide layer with the hydrated oxide layer. Such a protective coating has excellent corrosion resistance against corrosive gases, plasma, and the like. Therefore, by forming the protective coating on the base material, the corrosion resistance of the aluminum material can be increased.
保護皮膜の厚みは2μm以上であることが好ましい。これにより、アルミニウム材の耐食性をより向上させることができる。耐食性の観点からは保護皮膜の厚みの上限は特に限定されることはなく、保護皮膜の厚みを厚くするほどアルミニウム材の耐食性を向上させることができる。かかる観点からは、保護皮膜の厚みは、5μm以上であることがより好ましく、10μm以上であることがさらに好ましい。なお、保護皮膜の厚みの製造上の上限は、例えば200μmである。保護皮膜におけるクラックの発生を抑制する観点からは、保護皮膜の厚みは100μm以下であることが好ましい。 The thickness of the protective film is preferably 2 μm or more. This can further improve the corrosion resistance of the aluminum material. From the viewpoint of corrosion resistance, there is no particular upper limit to the thickness of the protective film, and the thicker the protective film, the more the corrosion resistance of the aluminum material can be improved. From this viewpoint, the thickness of the protective film is more preferably 5 μm or more, and even more preferably 10 μm or more. The upper manufacturing limit for the thickness of the protective film is, for example, 200 μm. From the viewpoint of suppressing the occurrence of cracks in the protective film, the thickness of the protective film is preferably 100 μm or less.
JIS H8683-2:2013に規定された方法により封孔度試験を行った場合における、前記アルミニウム材の単位面積当たりの質量減少量は0.3g/dm2以下であることが好ましい。かかるアルミニウム材は、酸化物層の細孔が水和酸化物層によって十分に封孔されているため、アルミニウム材の耐食性をより確実に高めることができる。 When a sealing test is performed by the method specified in JIS H8683-2: 2013, the mass loss per unit area of the aluminum material is preferably 0.3 g/ dm2 or less. In such an aluminum material, the pores in the oxide layer are sufficiently sealed by the hydrated oxide layer, so that the corrosion resistance of the aluminum material can be more reliably improved.
なお、封孔度試験の具体的な方法は以下の通りである。まず、リン酸35mL及び無水クロム酸20gを水に溶解させ、1Lの試験液を準備する。次に、アルミニウム材から保護皮膜を含む試験片を採取し、試験片における保護皮膜の面積を測定する。この試験片の表面の汚れを除去した後、試験片の質量を測定する。その後、試験片を38℃±1℃の温度に保持された試験液中に15分±5秒間浸漬する。 The specific method for the pore sealing test is as follows. First, 35 mL of phosphoric acid and 20 g of chromic anhydride are dissolved in water to prepare 1 L of test liquid. Next, a test piece including a protective film is taken from the aluminum material, and the area of the protective film on the test piece is measured. After removing any dirt from the surface of this test piece, the mass of the test piece is measured. After that, the test piece is immersed in the test liquid maintained at a temperature of 38°C ± 1°C for 15 minutes ± 5 seconds.
試験液への試験片の浸漬が完了した後、試験片を流水で洗浄し、さらに脱イオン水または蒸留水で洗浄する。洗浄後の試験片を十分に乾燥させた後、試験片の質量を測定する。 After the test specimen has been immersed in the test liquid, it is washed with running water and then with deionized or distilled water. After washing, the test specimen is thoroughly dried and its mass is measured.
以上により得られる、試験片の保護皮膜の面積A(単位:dm2)、試験液への浸漬前の試験片の質量m1(単位:g)及び試験液への浸漬後の試験片の質量m2(単位:g)を用い、下記式(1)に基づいて単位面積当たりの質量減少量δA(単位:g/dm2)を算出することができる。
δA=(m1-m2)/A ・・・(1)
Using the area A (unit: dm2 ) of the protective film of the test piece obtained above, the mass m1 (unit: g) of the test piece before immersion in the test liquid, and the mass m2 (unit: g) of the test piece after immersion in the test liquid, the mass loss per unit area δA (unit: g/ dm2 ) can be calculated based on the following formula (1).
δ A = (m 1 - m 2 )/A (1)
前記表面処理アルミニウム材は、濃度5質量%のNaCl溶液と濃度99.7質量%の酢酸とを前記NaCl溶液:前記酢酸=1000:1の体積比で混合してなる測定溶液を用いて前記母材及び200℃の温度で4時間加熱した後の前記表面処理アルミニウム材のカソード分極測定を行い、前記母材の水素イオンの拡散限界電流を示す電位領域の中央の電位における電流密度を測定した場合に、前記母材の電流密度J2に対する前記表面処理アルミニウム材の電流密度J1の比J1/J2が7000×10-5以下となる特性を有している。電流密度の比J1/J2が前記特定の範囲内であるアルミニウム材は、温度が上昇した際にクラックが発生しにくい性質を有している。それ故、前記保護皮膜を備え、電流密度の比J1/J2が前記特定の範囲内であるアルミニウム材は、耐食性及び耐熱性の両方に優れている。前記アルミニウム材の耐熱性を向上させる観点からは、電流密度の比J1/J2に下限はないが、電流密度の比J1/J2は、その定義上、必ず0より大きい値となる。 The surface-treated aluminum material has a characteristic that, when a cathodic polarization measurement is performed on the base material and the surface-treated aluminum material after heating at a temperature of 200 ° C. for 4 hours using a measurement solution obtained by mixing a NaCl solution with a concentration of 5 mass % and an acetic acid with a concentration of 99.7 mass % in a volume ratio of the NaCl solution: the acetic acid = 1000: 1, and the current density at the central potential of the potential region showing the diffusion limit current of the hydrogen ion of the base material is measured, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 × 10 -5 or less. An aluminum material having a current density ratio J1/J2 within the specific range has a property of being less likely to crack when the temperature rises. Therefore, an aluminum material having the protective film and a current density ratio J1/J2 within the specific range has excellent both corrosion resistance and heat resistance. From the viewpoint of improving the heat resistance of the aluminum material, there is no lower limit to the current density ratio J1/J2, but the current density ratio J1/J2 is always greater than 0 by definition.
前記アルミニウム材は、前述したように、腐食性ガスやプラズマ等に対する耐食性に優れており、温度が上昇した場合においても保護皮膜へのクラックの発生を抑制することができる。それ故、前記アルミニウム材は、加熱調理器具のファンの周囲に設けられるカバー用部材や半導体製造装置用部材等の用途に好適である。また、前記アルミニウム材は、保護皮膜にクラックが発生しにくく、高温においても摩耗しにくいという特性を有する。そのため、前記アルミニウム材は、ターボチャージャーに組み込まれるコンプレッサーホイール等の用途にも好適である。 As mentioned above, the aluminum material has excellent corrosion resistance against corrosive gases and plasma, and can suppress the occurrence of cracks in the protective film even when the temperature rises. Therefore, the aluminum material is suitable for applications such as cover members provided around the fans of cooking appliances and components for semiconductor manufacturing equipment. In addition, the aluminum material has properties such that cracks are unlikely to occur in the protective film, and it is resistant to wear even at high temperatures. Therefore, the aluminum material is also suitable for applications such as compressor wheels incorporated in turbochargers.
(アルミニウム材の製造方法)
前記表面処理アルミニウム材を製造するに当たっては、まず、Cuの含有量が1.8質量%超え6.8質量%以下であるアルミニウム合金からなる母材を準備する。母材の製造方法は特に限定されることはなく、公知の方法を採用することができる。例えば、母材は、鋳造、圧延及び熱処理を適宜組み合わせた方法により製造されていてもよい。また、母材を製造した後、陽極酸化処理を施すまでの間に、必要に応じて脱脂、酸洗浄及び研磨などの陽極酸化処理の前処理を施してもよい。次に、前記母材に陽極酸化処理を施すことにより前記母材上に細孔を備えた前記酸化物層を形成する。陽極酸化処理においては、母材と対極とを電解液に浸漬した状態で、母材と対極との間に直流電流を流すことにより母材の表面に酸化物層を形成することができる。このようにして形成される酸化物層は、アルミナなどのアルミニウムの酸化物から構成されており、多数の細孔を有している。
(Method of manufacturing aluminum material)
In producing the surface-treated aluminum material, first, a base material made of an aluminum alloy having a Cu content of more than 1.8% by mass and not more than 6.8% by mass is prepared. The method for producing the base material is not particularly limited, and a known method can be adopted. For example, the base material may be produced by a method in which casting, rolling, and heat treatment are appropriately combined. In addition, after the base material is produced, pretreatment for the anodizing treatment, such as degreasing, acid washing, and polishing, may be performed as necessary before the anodizing treatment is performed. Next, the base material is anodized to form the oxide layer having pores on the base material. In the anodizing treatment, an oxide layer can be formed on the surface of the base material by passing a direct current between the base material and the counter electrode while the base material and the counter electrode are immersed in an electrolyte. The oxide layer thus formed is composed of an oxide of aluminum, such as alumina, and has a large number of pores.
陽極酸化処理において用いる電解液は、例えば、硫酸やリン酸などの電解質を含む酸性電解液であってもよく、メタホウ酸ナトリウムなどの電解質を含むアルカリ性電解液であってもよい。陽極酸化処理において用いる電解液は、無機陽イオンと、硫酸イオン、リン酸イオン、アンモニウムイオン及びホウ酸イオンからなる群より選択される1種または2種以上の陰イオンとからなる無機電解質を含むことが好ましい。無機電解質を含む電解液を用いて陽極酸化処理を行うことにより、所望の構造を有する酸化物層をより容易に形成することができる。 The electrolyte used in the anodizing treatment may be, for example, an acid electrolyte containing an electrolyte such as sulfuric acid or phosphoric acid, or an alkaline electrolyte containing an electrolyte such as sodium metaborate. The electrolyte used in the anodizing treatment preferably contains an inorganic electrolyte consisting of an inorganic cation and one or more anions selected from the group consisting of sulfate ions, phosphate ions, ammonium ions, and borate ions. By performing the anodizing treatment using an electrolyte containing an inorganic electrolyte, it is possible to more easily form an oxide layer having a desired structure.
陽極酸化処理における直流電流の電流密度は、例えば、1mA/cm2以上100mA/cm2以下の範囲から適宜設定することができる。また、陽極酸化処理における電解液の温度は、例えば、0℃以上40℃以下の範囲から適宜設定することができる。 The current density of the direct current in the anodizing treatment can be appropriately set, for example, in the range of 1 mA/ cm2 to 100 mA/ cm2 . The temperature of the electrolyte in the anodizing treatment can be appropriately set, for example, in the range of 0°C to 40°C.
陽極酸化処理において形成される酸化物層の厚みは、2μm以上であることが好ましい。酸化物層の厚みを2μm以上とすることにより、封孔後に得られる保護皮膜の厚みを十分に厚くし、耐食性及び耐熱性に優れたアルミニウム材をより容易に得ることができる。
The thickness of the oxide layer formed in the anodizing process is preferably 2 μm or more. By making the
前記製造方法においては、陽極酸化処理を行った後、前記母材及び前記酸化物層を50℃以上350℃以下の温度で加熱する。陽極酸化処理を行った後、酸化物層の細孔を封孔する前に前記特定の範囲内の温度で酸化物層を加熱することにより、酸化物層の内部応力を緩和することができる。そして、酸化物層の内部応力を緩和した後に細孔を封孔することにより、封孔後の保護皮膜における内部応力を低減することができる。その結果、加熱された際の保護皮膜のクラックの発生を抑制でき、耐熱性に優れたアルミニウム材を得ることができる。 In the manufacturing method, after anodizing, the base material and the oxide layer are heated at a temperature of 50°C to 350°C. After anodizing, the oxide layer is heated at a temperature within the specific range before sealing the pores in the oxide layer, thereby alleviating the internal stress in the oxide layer. Then, by sealing the pores after alleviating the internal stress in the oxide layer, the internal stress in the protective film after sealing can be reduced. As a result, the occurrence of cracks in the protective film when heated can be suppressed, and an aluminum material with excellent heat resistance can be obtained.
酸化物層の加熱温度が50℃未満の場合には、酸化物層の内部応力の緩和が不十分となり、前記アルミニウム材の温度が上昇した際に保護皮膜にクラックが発生しやすくなるおそれがある。一方、酸化物層の加熱温度が350℃を超える場合には、母材の熱膨張に酸化物層が追従できず、酸化皮膜にクラックが発生するおそれがある。酸化物層の加熱においては、酸化物層の温度が所望の温度に到達した直後に加熱を終了してもよく、所望の温度に到達した後に、当該温度をある程度の時間保持してもよい。酸化物層の内部応力を十分に緩和し、アルミニウム材の耐熱性をより確実に高める観点からは、酸化物層の加熱を開始してから加熱を終了するまでの加熱時間は1分以上12時間未満であることが好ましい。 If the heating temperature of the oxide layer is less than 50°C, the internal stress of the oxide layer will not be sufficiently alleviated, and cracks may easily occur in the protective film when the temperature of the aluminum material rises. On the other hand, if the heating temperature of the oxide layer exceeds 350°C, the oxide layer will not be able to follow the thermal expansion of the base material, and cracks may occur in the oxide film. When heating the oxide layer, the heating may be terminated immediately after the temperature of the oxide layer reaches the desired temperature, or the desired temperature may be maintained for a certain period of time after the desired temperature is reached. From the viewpoint of sufficiently alleviating the internal stress of the oxide layer and more reliably increasing the heat resistance of the aluminum material, it is preferable that the heating time from the start of heating the oxide layer to the end of heating is 1 minute or more and less than 12 hours.
酸化物層を加熱した後に、酸化物層を封孔剤に接触させる。これにより、前記酸化物層上に前記水和酸化物層を形成するとともに、水和酸化物層によって前記細孔を封孔する。封孔剤としては、例えば、温水等の、アルミニウムの酸化物と反応して水和酸化物を形成可能な物質を使用することができる。温水を用いて封孔処理を行う場合には、酸化物層上に、アルミニウムの水和酸化物からなる水和酸化物層を形成することができる。 After heating the oxide layer, the oxide layer is brought into contact with a sealing agent. This forms the hydrated oxide layer on the oxide layer, and the pores are sealed by the hydrated oxide layer. As the sealing agent, for example, a substance capable of reacting with an oxide of aluminum to form a hydrated oxide, such as hot water, can be used. When hot water is used for the sealing process, a hydrated oxide layer made of a hydrated oxide of aluminum can be formed on the oxide layer.
また、封孔剤として、例えば、酢酸ニッケル水溶液、酢酸コバルト水溶液、クロム酸塩水溶液及びケイ酸塩水溶液などの、アルミニウムの酸化物と反応して水和酸化物と金属塩とを形成可能な物質を使用することもできる。このような封孔剤を用いて封孔を行う場合には、酸化物層上に、アルミニウムの水和酸化物と金属塩とを含む水和酸化物層を形成することができる。 Also, as a sealing agent, a substance capable of reacting with an oxide of aluminum to form a hydrated oxide and a metal salt, such as an aqueous solution of nickel acetate, an aqueous solution of cobalt acetate, an aqueous solution of chromate, or an aqueous solution of silicate, can be used. When sealing is performed using such a sealing agent, a hydrated oxide layer containing a hydrated oxide of aluminum and a metal salt can be formed on the oxide layer.
耐食性及び耐熱性に優れたアルミニウム材をより容易に得る観点からは、封孔剤が温水であることが好ましい。また、温水を用いて酸化物層の細孔を封孔することにより、酸化物層上に金属塩を含まない水和酸化物層を形成することができる。封孔剤として温水を用いる場合には、酸化物層を、封孔剤としての95℃以上の温水に10分以上120分未満接触させることにより酸化物層の細孔を封孔することがより好ましい。 From the viewpoint of more easily obtaining an aluminum material having excellent corrosion resistance and heat resistance, it is preferable that the sealing agent is hot water. In addition, by sealing the pores in the oxide layer with hot water, a hydrated oxide layer that does not contain metal salts can be formed on the oxide layer. When hot water is used as the sealing agent, it is more preferable to seal the pores in the oxide layer by contacting the oxide layer with hot water of 95°C or higher as the sealing agent for 10 minutes or more and less than 120 minutes.
(実施例)
前記表面処理アルミニウム材及びその製造方法の実施例を、図1~図2を参照しつつ説明する。本例の表面処理アルミニウム材1は、図1に示すように、アルミニウムまたはCuの含有量が1.8質量%超え6.8質量%以下であるアルミニウム合金からなる母材2と、母材上に形成された保護皮膜3と、を有している。保護皮膜3は、アルミニウムの酸化物からなり、母材2を覆う酸化物層31と、アルミニウムの水和酸化物を含み、酸化物層31を覆う水和酸化物層32と、を有している。濃度5質量%のNaCl溶液と濃度99.7質量%の酢酸とを前記NaCl溶液:前記酢酸=1000:1の体積比で混合してなる測定溶液を用いて母材2及び200℃の温度で4時間加熱した後の表面処理アルミニウム材1のカソード分極測定を行い、母材2の水素イオンの拡散限界電流を示す電位領域の中央の電位における電流密度を測定した場合に、母材2の電流密度J2に対する表面処理アルミニウム材1の電流密度J1の比J1/J2が7000×10-5以下である。
(Example)
An embodiment of the surface-treated aluminum material and its manufacturing method will be described with reference to Figures 1 and 2. As shown in Figure 1, the surface-treated
本例のアルミニウム材1を作製するに当たっては、まず、母材2に陽極酸化処理を施すことにより、図2に示すように母材2上に細孔311を備えた酸化物層31を形成する。その後、母材2及び酸化物層31を50℃以上350℃以下の温度で加熱して酸化物層31の内部応力を緩和する。その後、酸化物層31を封孔剤に接触させ、酸化物層31上に水和酸化物層32を形成するとともに細孔311を封孔することにより、アルミニウム材1を得ることができる。
In producing the
表1に、アルミニウム材1の具体例(試験材A1~A3)を示す。試験材A1~A3の製造方法は、例えば以下の通りである。まず、母材2として、表1に示すいずれかの合金番号で表される化学成分を有し、厚みが1.1mmであるアルミニウム板を準備する。この母材2に陽極酸化処理の前処理を施す。具体的には、前処理として、まず母材2を濃度5質量%、温度55℃の水酸化ナトリウム水溶液に浸漬するアルカリエッチング処理を行う。その後、母材2を濃度30質量%の硝酸に浸漬してデスマット処理を行う。その後、リン酸と硫酸とが体積比でリン酸:硫酸=7:3の比率で混合された、温度85℃の混合溶液に母材2を浸漬して化学研磨処理を行う。化学研磨処理の後、前述した条件と同様の条件で再びデスマット処理を行う。
Table 1 shows specific examples of aluminum material 1 (test materials A1 to A3). The manufacturing method of test materials A1 to A3 is, for example, as follows. First, an aluminum plate having a thickness of 1.1 mm and a chemical composition represented by one of the alloy numbers shown in Table 1 is prepared as
以上のようにして母材2に前処理を行った後、母材2に陽極酸化処理を行い、母材2の表面に酸化物層31を形成する。陽極酸化処理において用いる電解液は濃度15質量%の硫酸水溶液とし、電解液の温度は5℃とする。また、陽極酸化処理における電流密度は10mA/cm2とし、処理時間は60分とする。このようにして形成される酸化物層31は、いわゆるポーラス型のアルマイト皮膜であり、図2に示すように、多数の細孔311を有している。なお、前述した条件で陽極酸化処理を行うことにより形成される酸化物層31の厚みはおよそ15μmである。
After the
陽極酸化処理を行った後、母材2を加熱炉内で加熱し、酸化物層31の内部応力を緩和する。加熱炉の設定温度は表1の「加熱温度」欄に示した値とし、炉内における母材の滞在時間、つまり、加熱開始から加熱終了までの時間は表1の「加熱時間」欄に示した値とする。
After anodizing, the
その後、酸化物層31を備えた母材2を、封孔剤としての温度100℃の温水に60分間浸漬することにより、酸化物層31上にアルミニウムの水和酸化物からなる水和酸化物層32を形成するとともに、水和酸化物層32によって酸化物層31の細孔311を封孔する。以上により、表1に示す試験材A1~A3を得ることができる。なお、このような条件で酸化物層31の細孔311を封孔する場合、JIS H8683-2:2013に規定された方法により封孔度試験を行った場合における、アルミニウム材1の単位面積当たりの質量減少量は0.3g/dm2以下となる。
Thereafter, the
なお、表1に示す試験材B1~B2は、試験材A1~A3との比較のための試験材である。試験材B1~B2の製造方法は、母材2上に酸化物層31を形成した後に、酸化物層31を加熱せずに封孔剤と接触させる点以外は試験材A1~A3の製造方法と同様である。
Note that test materials B1 to B2 shown in Table 1 are test materials for comparison with test materials A1 to A3. The manufacturing method of test materials B1 to B2 is the same as the manufacturing method of test materials A1 to A3, except that after
次に、試験材A1~A3及び試験材B1~B2のカソード分極測定の方法を説明する。 Next, we will explain the method for measuring the cathodic polarization of test materials A1 to A3 and test materials B1 to B2.
〔カソード分極測定〕
以下の方法により母材及び200℃の温度で4時間加熱した試験材のカソード分極測定を行い、これらのカソード分極曲線に基づいて母材の電流密度J2に対する表面処理アルミニウム材の電流密度J1の比J1/J2を算出する。まず、試験材を温度200℃に設定したオーブンで4時間加熱する。オーブンから取り出した試験材を室温まで冷却した後、保護皮膜上に評価領域を設定し、試験材の表面における評価領域以外の部分をシリコーン樹脂で被覆する。
[Cathode polarization measurement]
The cathodic polarization measurements are performed on the base material and the test material heated at 200° C. for 4 hours by the following method, and the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is calculated based on these cathodic polarization curves. First, the test material is heated for 4 hours in an oven set at 200° C. The test material is removed from the oven and cooled to room temperature, after which an evaluation area is set on the protective coating, and the surface of the test material other than the evaluation area is covered with silicone resin.
次に、濃度5質量%のNaCl水溶液と濃度99.7%の酢酸とを準備し、NaCl水溶液と酢酸との体積比がNaCl水溶液:酢酸=1000:1となるようにしてNaCl水溶液に酢酸を添加することにより測定溶液を作製する。この溶液中に、ポテンショスタットと電気的に接続した試験片、対極及び参照電極を浸漬し、30分間静置して測定部の電位を安定させる。なお、測定溶液の脱気は行わない。また、参照電極としては、例えば、Ag/AgCl電極を使用することができる。 Next, prepare a 5% by mass NaCl aqueous solution and a 99.7% by mass acetic acid, and add acetic acid to the NaCl aqueous solution so that the volume ratio of the NaCl aqueous solution to the acetic acid is NaCl aqueous solution:acetic acid = 1000:1 to prepare a measurement solution. Immerse the test piece, counter electrode, and reference electrode electrically connected to the potentiostat in this solution and leave it for 30 minutes to stabilize the potential of the measurement section. Do not degas the measurement solution. Also, an Ag/AgCl electrode, for example, can be used as the reference electrode.
測定部の電位が安定した後、ポテンショスタットを用いて試験片と対極との間に電圧を印加し、測定部の電位が参照電極に対して-2000mVに達するまで、20mV/分の掃引速度で測定部の電位を掃引する。この時に測定部に流れる電流密度を測定することにより、加熱後の試験材のカソード分極曲線を取得する。また、前述した方法で陽極酸化処理の前処理を行った後の母材を用いて同様の測定を行うことにより、母材のカソード分極曲線を取得する。なお、試験材及び母材のカソード分極測定は、いずれも大気雰囲気中において、測定溶液の温度を25℃に維持した状態で実施される。また、試験材及び母材のカソード分極測定は、測定溶液の攪拌を行わず、測定溶液が実質的に流動していない状態で実施される。 After the potential of the measurement section has stabilized, a voltage is applied between the test piece and the counter electrode using a potentiostat, and the potential of the measurement section is swept at a sweep rate of 20 mV/min until the potential of the measurement section reaches -2000 mV relative to the reference electrode. The current density flowing through the measurement section at this time is measured to obtain a cathodic polarization curve of the test material after heating. In addition, a similar measurement is performed using the base material after pretreatment for anodizing using the method described above to obtain a cathodic polarization curve of the base material. Note that the cathodic polarization measurements of the test material and base material are both performed in the air, with the temperature of the measurement solution maintained at 25°C. In addition, the cathodic polarization measurements of the test material and base material are performed without stirring the measurement solution, and with the measurement solution substantially not flowing.
図3に、母材のカソード分極曲線の一例として、合金番号A6016で表される化学成分を有するアルミニウム合金からなり、保護皮膜を有しないアルミニウム材のカソード分極曲線を示す。図3の縦軸は測定部の電位(単位:V)であり、横軸は電流密度(単位:μA/cm2)である。また、図3の横軸の目盛りは対数目盛である。図3に示すように、保護皮膜を有しないアルミニウム材のカソード分極曲線は階段状の形状を示す。 Fig. 3 shows an example of the cathodic polarization curve of a base material, which is an aluminum material having no protective coating and made of an aluminum alloy having a chemical component represented by alloy number A6016. The vertical axis of Fig. 3 shows the potential (unit: V) of the measurement part, and the horizontal axis shows the current density (unit: μA/ cm2 ). The horizontal axis of Fig. 3 is scaled logarithmically. As shown in Fig. 3, the cathodic polarization curve of the aluminum material having no protective coating shows a step-like shape.
カソード分極測定において、電流が水素イオンの拡散によって律速される状態に近づくと、測定部の電位の変化に対して電流の変化が小さくなる。従って、図3に示すように電位を縦軸に表し、電流密度を横軸に表したカソード分極曲線においては、水素イオンの拡散限界電流を示す電位領域が、カソード分極曲線の段差部における曲線の傾きが急峻な部分に含まれる。 In cathodic polarization measurements, when the current approaches a state where it is rate-limited by the diffusion of hydrogen ions, the change in current becomes smaller relative to the change in potential at the measurement point. Therefore, in a cathodic polarization curve, as shown in Figure 3, where the vertical axis represents potential and the horizontal axis represents current density, the potential region showing the limiting current for hydrogen ion diffusion is included in the steep part of the curve at the step in the cathodic polarization curve.
図4に、図3におけるカソード分極曲線の段差部の拡大図を示す。図には示さないが、母材のカソード分極曲線も、図3と同様に階段状の形状を示す。それ故、図4に示すカソード分極曲線の段差部の形状に基づいて、水素イオンの拡散限界電流を示す電位領域の中央を決定することができる。母材のカソード分極曲線における水素イオンの拡散限界電流を示す電位領域の決定方法は以下の通りである。まず、図4に示すようにカソード分極曲線の段差部に傾きの絶対値が最も大きくなる接線Lを引く。そして、この接線Lとカソード分極曲線とが重なる領域Rを水素イオンの拡散限界電流を示す電位領域とする。このようにして決定された領域Rの中央における電流密度J2を算出する。また、加熱後の試験材のカソード分極曲線において、母材のカソード分極曲線における前述した電位領域の中央の電位と同一の電位における電流密度J1を算出する。 Figure 4 shows an enlarged view of the step portion of the cathodic polarization curve in Figure 3. Although not shown in the figure, the cathodic polarization curve of the base material also shows a step-like shape like Figure 3. Therefore, based on the shape of the step portion of the cathodic polarization curve shown in Figure 4, the center of the potential region showing the diffusion limit current of hydrogen ions can be determined. The method for determining the potential region showing the diffusion limit current of hydrogen ions in the cathodic polarization curve of the base material is as follows. First, a tangent line L with the largest absolute value of the slope is drawn in the step portion of the cathodic polarization curve as shown in Figure 4. Then, the region R where this tangent line L and the cathodic polarization curve overlap is set as the potential region showing the diffusion limit current of hydrogen ions. The current density J2 in the center of the region R determined in this way is calculated. In addition, in the cathodic polarization curve of the test material after heating, the current density J1 at the same potential as the potential at the center of the above-mentioned potential region in the cathodic polarization curve of the base material is calculated.
加熱後の試験材のカソード分極曲線に基づいて算出される電流密度J1は、加熱後の試験材における母材と測定溶液との接触面積の指標として用いることができ、電流密度の値が大きいほど母材と測定溶液との接触面積が広いことを示す。従って、母材を用いて算出した電流密度J2に対する、加熱後の試験片を用いて算出した電流密度J1の比率J1/J2を、加熱による母材の露出面積の増加率の指標として用いることができる。より具体的には、例えば、加熱後の試験材における保護皮膜にクラックなどの欠陥が形成される場合には、クラックによって母材が露出することがある。従って、この場合には、前記電流密度比J1/J2が大きくなる。表1に、各試験材の電流密度比J1/J2を示す。 The current density J1 calculated based on the cathodic polarization curve of the test material after heating can be used as an index of the contact area between the base material and the measurement solution in the test material after heating, and a larger current density value indicates a larger contact area between the base material and the measurement solution. Therefore, the ratio J1/J2 of the current density J1 calculated using the test piece after heating to the current density J2 calculated using the base material can be used as an index of the increase rate of the exposed area of the base material due to heating. More specifically, for example, if defects such as cracks are formed in the protective film of the test material after heating, the base material may be exposed by the cracks. Therefore, in this case, the current density ratio J1/J2 becomes large. Table 1 shows the current density ratio J1/J2 of each test material.
表1に示すように、試験材A1~A3を作製する際には、母材上に酸化物層を形成した後、酸化物層の細孔を封孔する前に酸化物層を前記特定の範囲内の温度で加熱している。そのため、これらの試験材は、前記特定の範囲内の電流密度比J1/J2を有しており、温度が上昇した場合においても保護皮膜へのクラックの発生を抑制することができる。また、これらの試験材の保護皮膜の酸化物層は水和酸化物層によって封孔されているため、腐食性ガスやプラズマ等に対する耐食性に優れている。 As shown in Table 1, when preparing test materials A1 to A3, an oxide layer is formed on the base material, and then the oxide layer is heated at a temperature within the specific range before the pores in the oxide layer are sealed. As a result, these test materials have a current density ratio J1/J2 within the specific range, and are able to suppress the occurrence of cracks in the protective film even when the temperature rises. In addition, the oxide layer of the protective film of these test materials is sealed with a hydrated oxide layer, and therefore has excellent corrosion resistance against corrosive gases, plasma, etc.
一方、試験材B1~B2を作製する際には、母材上に酸化物層を形成した後、酸化物層を加熱することなく細孔を封孔している。そのため、これらの試験材の電流密度比J1/J2は前記特定の範囲よりも高くなり、温度が上昇した場合にクラックが発生しやすい。 On the other hand, when preparing test materials B1 and B2, an oxide layer is formed on the base material, and then the pores are sealed without heating the oxide layer. As a result, the current density ratio J1/J2 of these test materials is higher than the specific range, and cracks are likely to occur when the temperature rises.
(参考例)
本例においては、母材上に保護皮膜を有するアルミニウム材のひずみ量計測の例を説明する。なお、本例において用いる符号のうち、既出の例において用いた符号と同一の符号は、特に説明のない限り既出の例における構成要素等と同様の構成要素等を表す。
(Reference example)
In this example, an example of measuring the amount of strain in an aluminum material having a protective film on the base material will be described. Note that, among the symbols used in this example, the same symbols as those used in the previous examples represent the same components as those in the previous examples unless otherwise specified.
本例において用いる試験材の作製方法は以下の通りである。まず、母材2として、合金番号AA6016で表される化学成分を有し、厚みが1.1mmであるアルミニウム板を準備する。この母材2に、実施例と同様の方法により陽極酸化処理の前処理を施し、次いで陽極酸化処理を施す。陽極酸化処理を行った後、母材2を加熱炉内で加熱し、酸化物層31の内部応力を緩和する。加熱炉の設定温度は表2の「加熱温度」欄に示した値とし、炉内における母材の滞在時間、つまり、加熱開始から加熱終了までの時間は表2の「加熱時間」欄に示した値とする。
The method for preparing the test material used in this example is as follows. First, an aluminum plate having a thickness of 1.1 mm and a chemical composition represented by alloy number AA6016 is prepared as the
その後、酸化物層31を備えた母材2を、封孔剤としての温度100℃の温水に60分間浸漬することにより、酸化物層31上に水和酸化物層32を形成とともに、水和酸化物層32によって酸化物層31の細孔311を封孔する。以上により、表1に示す試験材C1~C2を得ることができる。
Then, the
なお、表1に示す試験材D1及び試験材E1は、試験材C1~C2との比較のための試験材である。試験材D1の製造方法は、母材2上に酸化物層31を形成した後に、酸化物層31を加熱せずに封孔剤と接触させる点以外は試験材C1~C2の製造方法と同様である。また、試験材E1は、合金番号AA6016で表される化学成分を有するアルミニウム合金からなる板材である。試験材E1は、合金番号AA6016で表される化学成分を有するアルミニウム合金からなる板材に、前述した方法により陽極酸化処理の前処理を施すことにより得られる。
Note that test material D1 and test material E1 shown in Table 1 are test materials for comparison with test materials C1 to C2. The manufacturing method of test material D1 is the same as that of test materials C1 to C2, except that after forming an
試験材C1~C2及び試験材D1のひずみ量を計測するに当たっては、図5に示すように、アルミニウム材1における保護皮膜3を有する面の背面に母材2を露出させる。そして、露出した母材2にひずみゲージ4を取り付ける。このようにしてひずみゲージ4を取り付けたアルミニウム材1を加熱することにより、母材2及び保護皮膜3の熱膨張によるひずみを計測することができる。なお、図5においては、便宜上、保護皮膜3の構造を簡略化して記載した。
When measuring the amount of strain in test materials C1-C2 and D1, as shown in Figure 5, the
図には示さないが、試験材E1のひずみ量を計測するに当たっては、試験材E1の厚み方向における一方の面にひずみゲージを取り付けた後、試験材E1を加熱すればよい。 Although not shown in the figure, to measure the amount of strain in the test material E1, a strain gauge is attached to one side of the test material E1 in the thickness direction, and then the test material E1 is heated.
図6に、試験材C1~C2、試験材D1及び試験材E1を200℃の温度に設定した加熱炉を用いて30分間加熱した場合のひずみ量の変化を示す。図6における縦軸はひずみ量であり、横軸は加熱開始からの経過時間である。加熱を開始した直後の試験材は温度上昇に伴って熱膨張するため、図6に示すように、試験を開始した時点から数分が経過するまでの間は急激にひずみ量が増大する。その後、試験材の温度が概ね一定の温度に到達すると、試験材のひずみ量が概ね一定の値となる。 Figure 6 shows the change in strain when test materials C1-C2, D1, and E1 are heated for 30 minutes in a heating furnace set at 200°C. The vertical axis in Figure 6 represents the strain, and the horizontal axis represents the time elapsed from the start of heating. Immediately after heating begins, the test materials thermally expand as the temperature rises, so as shown in Figure 6, the strain increases rapidly for several minutes after the test begins. After that, when the temperature of the test materials reaches an approximately constant temperature, the strain of the test materials becomes approximately constant.
表2に、試験材を加熱している間のひずみ量の最大値を示す。また、表2に、保護皮膜を有する試験材C1~C2及び試験材D1のひずみ量の最大値から、保護皮膜を有しない試験材E1のひずみ量の最大値を差し引いた値を示す。試験材C1~C2及び試験材D1のひずみ量と試験材Dのひずみ量との差は、試験中の加熱によって解放された保護皮膜の内部応力の大きさを示しており、両者のひずみ量との差が小さいほど保護皮膜の内部応力が小さいことを意味する。 Table 2 shows the maximum strain values while the test materials were being heated. Table 2 also shows the maximum strain values of test materials C1-C2 and D1, which have a protective coating, minus the maximum strain value of test material E1, which does not have a protective coating. The difference between the strain values of test materials C1-C2 and D1 and the strain value of test material D indicates the magnitude of the internal stress of the protective coating that was released by heating during the test; the smaller the difference between the two strain values, the smaller the internal stress of the protective coating.
表2に示すように、試験材の製造過程において、酸化物層の加熱を行った後に水和酸化物層を形成する試験材C1及び試験材C2のひずみ量は、酸化物層の加熱を行わずに水和酸化物層を形成する試験材D1のひずみ量よりも小さくなる。従って、これらの結果から、アルミニウム材の製造過程において、酸化物層を加熱した後に水和酸化物層を形成することにより、保護皮膜の内部応力を緩和し、アルミニウム材の耐熱性を向上可能であることが理解できる。 As shown in Table 2, the strain amount of test materials C1 and C2, which form a hydrated oxide layer after heating the oxide layer during the manufacturing process of the test materials, is smaller than the strain amount of test material D1, which forms a hydrated oxide layer without heating the oxide layer. Therefore, from these results, it can be understood that by forming a hydrated oxide layer after heating the oxide layer during the manufacturing process of the aluminum material, it is possible to reduce the internal stress of the protective film and improve the heat resistance of the aluminum material.
以上、実施例に基づいて本発明に係る表面処理アルミニウム材及びその製造方法の態様を説明したが、本発明に係る表面処理アルミニウム材及びその製造方法の具体的な態様は、実施例の態様に限定されるものではなく、本発明の趣旨を損なわない範囲で適宜構成を変更することができる。 Although the above describes aspects of the surface-treated aluminum material and its manufacturing method according to the present invention based on the examples, the specific aspects of the surface-treated aluminum material and its manufacturing method according to the present invention are not limited to the aspects of the examples, and the configurations can be changed as appropriate within the scope of the spirit of the present invention.
例えば、本発明に係る表面処理アルミニウム材は、以下の〔1〕~〔3〕に係る態様を取り得る。 For example, the surface-treated aluminum material according to the present invention can take the following forms [1] to [3].
〔1〕アルミニウムまたはCuの含有量が1.8質量%超え6.8質量%以下であるアルミニウム合金からなる母材と、前記母材上に形成された保護皮膜と、を有する表面処理アルミニウム材であって、
前記保護皮膜は、アルミニウムの酸化物からなり、前記母材を覆う酸化物層と、
アルミニウムの水和酸化物を含み、前記酸化物層を覆う水和酸化物層と、を有し、
濃度5質量%のNaCl溶液と濃度99.7質量%の酢酸とを前記NaCl溶液:前記酢酸=1000:1の体積比で混合してなる測定溶液を用いて前記母材及び200℃の温度で4時間加熱した後の前記表面処理アルミニウム材のカソード分極測定を行い、前記母材の水素イオンの拡散限界電流を示す電位領域の中央の電位における電流密度を測定した場合に、前記母材の電流密度J2に対する前記表面処理アルミニウム材の電流密度J1の比J1/J2が7000×10-5以下である、表面処理アルミニウム材。
[1] A surface-treated aluminum material having a base material made of an aluminum alloy having an aluminum or Cu content of more than 1.8 mass% and not more than 6.8 mass%, and a protective coating film formed on the base material,
The protective coating is made of an oxide of aluminum, and has an oxide layer covering the base material;
a hydrated oxide layer comprising a hydrated oxide of aluminum and covering the oxide layer;
A surface-treated aluminum material, in which a cathodic polarization measurement is performed on the base material and the surface-treated aluminum material after heating at a temperature of 200°C for 4 hours using a measurement solution obtained by mixing a NaCl solution with a concentration of 5% by mass and acetic acid with a concentration of 99.7% by mass in a volume ratio of NaCl solution:acetic acid = 1000:1, and when the current density at the central potential in the potential region showing the diffusion limiting current of the hydrogen ions of the base material is measured, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 x 10-5 or less.
〔2〕JIS H8683-2:2013に規定された方法により封孔度試験を行った場合における、単位面積当たりの質量減少量が0.3g/dm2以下である、〔1〕に記載の表面処理アルミニウム材。 [2] The surface-treated aluminum material according to [1], in which the mass loss per unit area is 0.3 g / dm 2 or less when a sealing test is performed by the method specified in JIS H8683-2:2013.
また、本発明に係るコンプレッサーホイールは、以下の〔3〕に係る態様を取り得る。
〔3〕〔1〕または〔2〕に記載の表面処理アルミニウム材からなるコンプレッサーホイール。
The compressor wheel according to the present invention may have the following configuration [3].
[3] A compressor wheel made of the surface-treated aluminum material according to [1] or [2].
また、本発明に係る表面処理アルミニウム材の製造方法は、以下の〔4〕~〔8〕に示す態様を採り得る。 The method for manufacturing surface-treated aluminum material according to the present invention can take the following forms [4] to [8].
〔4〕〔1〕または〔2〕に記載の表面処理アルミニウム材の製造方法であって、
前記母材に陽極酸化処理を施すことにより前記母材上に細孔を備えた前記酸化物層を形成し、
その後、前記母材及び前記酸化物層を50℃以上350℃以下の温度で加熱し、
その後、前記酸化物層を封孔剤に接触させて前記酸化物層上に前記水和酸化物層を形成するとともに前記細孔を封孔する、表面処理アルミニウム材の製造方法。
[4] A method for producing a surface-treated aluminum material according to [1] or [2],
forming the oxide layer having pores on the base material by subjecting the base material to anodizing treatment;
Thereafter, the base material and the oxide layer are heated at a temperature of 50° C. or more and 350° C. or less,
and then contacting the oxide layer with a sealing agent to form the hydrated oxide layer on the oxide layer and seal the pores.
〔5〕前記加熱における、前記酸化物層の加熱を開始してから加熱を終了するまでの加熱時間が1分以上12時間未満である、〔4〕に記載の表面処理アルミニウム材の製造方法。
〔6〕前記封孔剤が温水である、〔4〕または〔5〕に記載の表面処理アルミニウム材の製造方法。
[5] The method for producing a surface-treated aluminum material according to [4], wherein the heating time from the start of heating the oxide layer to the end of heating is 1 minute or more and less than 12 hours.
[6] The method for producing a surface-treated aluminum material according to [4] or [5], wherein the sealing agent is hot water.
〔7〕前記封孔において、前記酸化物層を、前記封孔剤としての100℃以上の温水に10分以上120分未満接触させる、〔4〕~〔6〕のいずれか1つに記載の表面処理アルミニウム材の製造方法。
〔8〕前記陽極酸化処理において用いる電解液が、無機陽イオンと、硫酸イオン、リン酸イオン、アンモニウムイオン及びホウ酸イオンからなる群より選択される1種または2種以上の陰イオンとからなる無機電解質を含む、〔4〕~〔7〕のいずれか1つに記載の表面処理アルミニウム材の製造方法。
[7] The method for producing a surface-treated aluminum material according to any one of [4] to [6], wherein, in the sealing, the oxide layer is contacted with hot water of 100°C or higher as the sealing agent for 10 minutes or more and less than 120 minutes.
[8] The method for producing a surface-treated aluminum material according to any one of [4] to [7], wherein the electrolytic solution used in the anodizing treatment contains an inorganic electrolyte consisting of an inorganic cation and one or more anions selected from the group consisting of sulfate ions, phosphate ions, ammonium ions, and borate ions.
Claims (8)
前記保護皮膜は、アルミニウムの酸化物からなり、前記母材を覆う酸化物層と、
アルミニウムの水和酸化物を含み、前記酸化物層を覆う水和酸化物層と、を有し、
濃度5質量%のNaCl溶液と濃度99.7質量%の酢酸とを前記NaCl溶液:前記酢酸=1000:1の体積比で混合してなる測定溶液を用いて前記母材及び200℃の温度で4時間加熱した後の前記表面処理アルミニウム材のカソード分極測定を行い、前記母材の水素イオンの拡散限界電流を示す電位領域の中央の電位における電流密度を測定した場合に、前記母材の電流密度J2に対する前記表面処理アルミニウム材の電流密度J1の比J1/J2が7000×10-5以下である、表面処理アルミニウム材。 A surface-treated aluminum material having a base material made of an aluminum alloy having a Cu content of more than 1.8 mass% and not more than 6.8 mass%, and a protective coating film formed on the base material,
The protective coating is made of an oxide of aluminum, and has an oxide layer covering the base material;
a hydrated oxide layer comprising a hydrated oxide of aluminum and covering the oxide layer;
A surface-treated aluminum material, in which a cathodic polarization measurement is performed on the base material and the surface-treated aluminum material after heating at a temperature of 200°C for 4 hours using a measurement solution obtained by mixing a NaCl solution with a concentration of 5% by mass and acetic acid with a concentration of 99.7% by mass in a volume ratio of NaCl solution:acetic acid = 1000:1, and when the current density at the central potential in the potential region showing the diffusion limiting current of the hydrogen ions of the base material is measured, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material to the current density J2 of the base material is 7000 x 10-5 or less.
前記母材に陽極酸化処理を施すことにより前記母材上に細孔を備えた前記酸化物層を形成し、
その後、前記母材及び前記酸化物層を50℃以上350℃以下の温度で加熱し、
その後、前記酸化物層を封孔剤に接触させて前記酸化物層上に前記水和酸化物層を形成するとともに前記細孔を封孔する、表面処理アルミニウム材の製造方法。 A method for producing a surface-treated aluminum material according to claim 1 or 2,
forming the oxide layer having pores on the base material by subjecting the base material to anodizing treatment;
Thereafter, the base material and the oxide layer are heated at a temperature of 50° C. or more and 350° C. or less,
and then contacting the oxide layer with a sealing agent to form the hydrated oxide layer on the oxide layer and seal the pores.
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| WO2015091932A1 (en) * | 2013-12-20 | 2015-06-25 | Dublin Institute Of Technology | Method for forming a multi-layer anodic coating |
| US20210262107A1 (en) * | 2018-06-14 | 2021-08-26 | Liebhrr-Aerospace Toulouse Sas | Process for treating the surface of a part made of aluminium or aluminium alloy or of magnesium or magnesium alloy |
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| JPS5836076B2 (en) * | 1980-09-19 | 1983-08-06 | 株式会社フジクラ | Manufacturing method of anodized electric wire |
| JPH10130883A (en) * | 1996-10-23 | 1998-05-19 | Daido Steel Co Ltd | Heat and wear resistant member and method of manufacturing the same |
| JP2000212797A (en) * | 1999-01-25 | 2000-08-02 | Hitachi Ltd | High Corrosion Resistant Aluminum Die Casting Material and Its Anodizing Method |
| JP2001335989A (en) * | 2000-05-31 | 2001-12-07 | Kobe Steel Ltd | Anodic oxidized al material having excellent corrosion resistance, method for manufacturing the same and al parts for plasma atmosphere same |
| JP4217042B2 (en) * | 2002-09-19 | 2009-01-28 | 株式会社アルミ表面技術研究所 | Metal substrate provided with surface layer of heat-resistant porous alumina film, and method for producing the same |
| JP4980455B2 (en) * | 2010-02-08 | 2012-07-18 | 富士フイルム株式会社 | Method for manufacturing metal substrate with insulating layer, method for manufacturing semiconductor device, method for manufacturing solar cell, method for manufacturing electronic circuit, and method for manufacturing light emitting element |
| JP2012040864A (en) * | 2010-07-23 | 2012-03-01 | Fujifilm Corp | Method for manufacturing lithographic printing plate support, lithographic printing plate support, and lithographic printing plate |
| JP6256906B2 (en) * | 2013-06-19 | 2018-01-10 | 奥野製薬工業株式会社 | Sealing solution for anodized film of aluminum alloy |
| US20180080138A1 (en) * | 2016-09-22 | 2018-03-22 | Apple Inc. | Processes for reducing surface concentration of dyes in anodic oxides |
| JP6669375B2 (en) * | 2017-12-20 | 2020-03-18 | 株式会社名光精機 | Compressor impeller for turbocharger and method of manufacturing the same |
| CN117431602A (en) * | 2023-09-28 | 2024-01-23 | 泉州职业技术大学 | Method for improving fluorine corrosion resistance of aluminum anodic oxide film |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2008530361A (en) * | 2005-02-15 | 2008-08-07 | ユナイテッド ステイツ オブ アメリカ アズ レプレゼンテッド バイ ザ セクレタリー オブ ザ ネイビー エト アル. | Composition for coating chromium-zirconium on metal substrate and preparation method thereof |
| WO2015091932A1 (en) * | 2013-12-20 | 2015-06-25 | Dublin Institute Of Technology | Method for forming a multi-layer anodic coating |
| US20210262107A1 (en) * | 2018-06-14 | 2021-08-26 | Liebhrr-Aerospace Toulouse Sas | Process for treating the surface of a part made of aluminium or aluminium alloy or of magnesium or magnesium alloy |
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| JPWO2025041409A1 (en) | 2025-02-27 |
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