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WO2024235915A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
WO2024235915A1
WO2024235915A1 PCT/EP2024/063105 EP2024063105W WO2024235915A1 WO 2024235915 A1 WO2024235915 A1 WO 2024235915A1 EP 2024063105 W EP2024063105 W EP 2024063105W WO 2024235915 A1 WO2024235915 A1 WO 2024235915A1
Authority
WO
WIPO (PCT)
Prior art keywords
inlet
vacuum pump
chamber
pump according
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/EP2024/063105
Other languages
English (en)
Inventor
Christian MOULIN
Augustin GOURE
Frederic Piu
Mickael SERAYET
Christophe DESPESSE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold France SAS
Original Assignee
Leybold France SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold France SAS filed Critical Leybold France SAS
Priority to CN202480029310.8A priority Critical patent/CN121057893A/zh
Publication of WO2024235915A1 publication Critical patent/WO2024235915A1/fr
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/85—Methods for improvement by repair or exchange of parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/101—Geometry of the inlet or outlet of the inlet

Definitions

  • the field of the invention relates to a rotary vane vacuum pump.
  • Rotary vane vacuum pumps typically comprise: a stator defining a chamber having an inlet and an outlet; and a rotor housed within the chamber and configured to cooperate with the stator to pump fluid from the inlet to the outlet.
  • Known stators are made from a single metal structure which can be heavy, expensive, and difficult to form.
  • Some vacuum pumps comprise inlet valves configured to inhibit fluid back flow towards the enclosure to be evacuated when the pump is not active.
  • the inlet valve is integrally formed with the stator which can increase the complexity of the stator. As a result, the stator can be difficult to make and, in particular, difficult to cast from metal.
  • a rotary vane vacuum pump comprising: a stator and an inlet portion together defining an outer surface of a chamber, said outer surface of said chamber comprising an inlet for admitting gas to be pumped and an outlet for exhausting gas; and a rotor housed within the chamber and configured to cooperate with the stator and the inlet portion during operation of the vacuum pump to pump gas from the inlet to the outlet, wherein the inlet portion is mounted within an inlet channel of the vacuum pump and defines at least a portion of the inlet, and wherein a surface of the inlet portion facing the chamber forms a portion of the outer surface of the chamber.
  • the chamber is formed by a separate stator and inlet portion.
  • the chamber may be made in parts which are later assembled to form the chamber. Manufacturing these components separately may facilitate manufacture of the chamber, particularly where complex structures are required such as an integrated inlet valve. It may further allow the inlet portion to be made from a different material to the stator.
  • the inlet portion may be formed from a material that is more workable than the stator material to facilitate manufacture of an inlet valve.
  • the inlet portion can be formed by a material that is lighter and/or cheaper to provide a weight and/or cost saving. Note that the chamber is still required to withstand the stresses exerted by the rotor during operation of the pump and so only a portion of the chamber adjacent the inlet is formed separately to the rest of the stator.
  • the inlet portion is made from a plastics material.
  • the inlet portion comprises a valve support and the vacuum pump comprises a valve member supported by the valve support, the valve member being movable between an open position permitting gas flow through the inlet channel and a closed position inhibiting gas flow through the inlet channel.
  • Manufacture of a conventional stator with integrated inlet valve is more complex than without an inlet valve because the stator may need to be formed with a valve support configured to support a valve member and, in some embodiments, a gas channel for conveying gas to selectively activate the valve member. Forming these structures via metal casting can be difficult if an additional core is required during the casting process.
  • the inlet portion is separate to the stator and therefore could be made from a more workable material to facilitate manufacture of the components of the inlet valve.
  • the inlet portion can be formed from plastic which can simplify the manufacture of the valve support because plastic is more versatile than metal and can be used to form complex structures more readily. This can lead to a cost saving.
  • the vacuum pump comprises an inlet cover at least partly defining the inlet channel, wherein the inlet cover comprises a valve seat, wherein the valve member, in the closed position, is configured to seal against the valve seat. Forming the valve seat using the inlet cover can obviate the need for additional components to make the inlet valve.
  • the inlet cover is formed from metal. In this way, the inlet cover can withstand stress that may be transferred from the pumping mechanism during operation of the vacuum pump.
  • the inlet cover comprises: an upstream portion configured for coupling to an enclosure to be evacuated; and a downstream portion for connection to the stator; wherein a portion of the inlet channel defined by the upstream portion and a portion of the inlet channel defined by the downstream portion are offset with respect to each other to form a kinked inlet channel; wherein the inlet cover further comprises a protrusion extending into the inlet channel and configured to impede fluid from travelling from the chamber through the inlet channel towards the upstream portion of the inlet cover.
  • the kinked inlet channel and the protrusion cooperate to impede liquid, for example, lubricant oil, that can be projected up the inlet channel by the rotor during operation of the vacuum pump. In this way, liquid flowing up the inlet channel that might contaminate the enclosure being evacuated can be obstructed. Accordingly, contamination by the vacuum pump of the enclosure being evacuated can be reduced or eliminated.
  • the protrusion is arranged to deflect liquid travelling towards the valve member back towards the chamber. In this way, the protrusion may impede the flow of liquid, such as lubricating oil, expelled from the chamber by the rotor vanes and protect the inlet valve from liquid which could damage the inlet valve or reduce its effectiveness.
  • liquid such as lubricating oil
  • the valve member comprises an 0-ring for sealing against the valve seat.
  • An O-ring provides a simple, cost effective and reliable seal that may effectively inhibit fluid backflow through the valve.
  • the valve member is formed from a plastics material. Providing a plastic valve member can provide additional cost and weight savings compared to a metal inlet valve member.
  • the inlet portion comprises a gas channel for conveying gas to selectively actuate the valve member from the open position to the closed position.
  • the valve is one configured to be actuated by gas flow in a gas channel
  • such an arrangement may be particularly complex to form in metal.
  • casting such a gas channel in metal is both difficult and expensive because an additional core is required for the casting process.
  • the manufacture of the gas channel is simplified because the inlet portion can be made separately to the stator and later assembled. Forming the gas channel can be particularly easy if the inlet portion is formed from plastic.
  • the inlet cover and the inlet portion are arranged such that, during operation of the vacuum pump, gas flows through the inlet channel, around the inlet portion and into the chamber.
  • the portion of the outer surface of the chamber defined by the stator is made of metal. In this way, the stator can withstand the forces experienced during operation of the vacuum pump.
  • the surface of the inlet portion facing the chamber is curved.
  • the surface of the chamber is curved and the ends of the rotor blades or vanes follow a curved trajectory. Therefore, providing the inlet portion with a curved surface may allow the inlet portion to have a minimal or at least reduced effect on the pumping action.
  • a curvature of the surface matches a curvature of the portion of the outer surface of the chamber defined by the stator. In this way, the inlet portion and the stator substantially replicate the chambers of conventional rotary vane vacuum pumps formed by a single metal stator element.
  • the inlet portion is mounted such that the rotor does not contact the surface of the inlet portion facing the chamber during operation of the vacuum pump.
  • Rotor vanes of conventional rotor-vane vacuum pumps may not be configured to contact a portion of the stator immediately adjacent to the inlet of the chamber that is after the exhaust but before the rotor vanes pass the inlet.
  • Some rotary vane vacuum pumps are configured like this to increase the size of the pumped volumes defined between the rotor vanes and the stator and conveying from the inlet to the outlet during operation of the vacuum pump.
  • the inlet portion is arranged to replace the section of such a conventional stator which would not be contacted by the rotor during operation of the pump.
  • the inlet portion experiences reduced stress during operation of the pump compared to the rest of the chamber which is formed by the stator. This may allow the inlet portion to be made of lighter and cheaper materials, such as plastic, which might be less robust than typical metals used for conventional stators, whilst maintaining sufficient structural integrity for the vacuum pump to operate.
  • the surface of the inlet portion defines at least 5%, preferably at least 10%, of a circumference of a cross-section of the outer surface of the chamber. In some embodiments, the surface if the inlet portion extends at least 35 degrees, preferably about 40 degrees, of a circumference of a crosssection of the outer surface of the chamber. The larger the proportion of the chamber defined by the inlet portion the larger the potential cost and weight savings.
  • the vacuum pump comprises an oil-sealed vacuum pump.
  • a method of replacing an inlet valve of a rotary vane vacuum pump comprising at least one of the following: removing an inlet portion from the rotary vane vacuum pump and inserting a replacement inlet portion; and removing a valve member from the rotary vane vacuum pump of the first aspect and inserting a replacement valve member.
  • inlet portion which may comprise an inlet valve as a separate component to the stator allows it to be replaced.
  • making them as separate components allows them to be formed of a different material to the stator which may be less robust, such that they may wear out before the stator does.
  • a valve has a movable part and as such may be prone to wear. Thus, being able to replace such parts can be advantageous. Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate, and in combinations other than those explicitly set out in the claims.
  • Figure 1 shows a section through a vacuum pump according to an embodiment
  • Figure 2 shows an exploded view of the embodiment of Figure 1 ;
  • Figure 3 shows a section through an inlet portion of a vacuum pump according to another embodiment
  • Figure 4 shows a flow chart illustrating steps in a method according to an embodiment.
  • Embodiments relate to a rotary vane vacuum pump comprising a chamber defined by a stator and an inlet portion.
  • the chamber comprises an inlet and an outlet and houses a rotor configured to cooperate with the stator and inlet portion to pump fluid from the inlet to the outlet.
  • the inlet portion forms at least a part of the inlet and may form a portion of a surface of the chamber adjacent to and upstream of the inlet. It is acceptable and indeed may be advantageous here, for the rotor blades not to contact the chamber surface and as such this portion of the chamber surface may be formed from a lighter, cheaper and more workable material than the metals used for conventional stators.
  • the inlet portion may be made from a plastics material.
  • forming the inlet portion from plastic can facilitate the manufacture of more intricate structures such as a valve support and a gas channel for an inlet valve. Accordingly, embodiments can provide a rotary vane vacuum pump that is lighter and easier to manufacture than some conventional vacuum pumps.
  • Figure 1 shows a portion of a vacuum pump 10 comprising a stator 12 which, together with an inlet portion 20, defines a chamber 14.
  • the outer surface 15 of the chamber 14 comprises a surface 22 of the inlet portion 20 which faces the chamber 14.
  • the remainder of the outer surface 15 is provided by the stator 12.
  • a rotor 16 is housed within the chamber 14 and is configured to cooperate with the stator 12 and inlet portion 20 to pump fluid from an inlet 18 of the chamber 14 to an outlet (not shown) of the chamber 14.
  • the pumping mechanism is a rotary vane pumping mechanism as known in the art.
  • the inlet 18 of the chamber 14 is at least partly formed by the inlet portion 20.
  • the inlet portion 20 and the rotor 16 are configured such that the rotor 16 does not contact the inlet portion 20 during operation of the vacuum pump 10.
  • the vacuum pump 10 further comprises an inlet cover 30 which at least partly defines an inlet channel 19 for introducing gas into the chamber 14 via the inlet 18.
  • the inlet cover 30 is configured to connect to an enclosure to be evacuated.
  • the flow of fluid through the inlet channel 30 during operation of the vacuum pump 10 is shown by the arrows in Figure 1. Fluid is drawn by the pumping mechanism through the inlet channel 19, around the inlet portion 20 and into the chamber 14.
  • An inlet valve is positioned within the inlet channel 19 for selectively inhibiting fluid flow through the inlet channel 19.
  • the inlet valve comprises a valve member 26 supported by a valve support 21 (see Figure 2) defined by the inlet portion 20.
  • the valve member 26 is moveable between an open position (shown in Figure 1 ) for permitting fluid flow through the inlet channel 19 and a closed position (not shown) for inhibiting fluid flow up through the inlet channel 19.
  • the valve member 19 is actuated by gas that can be selectively introduced via gas channel 24 defined in the inlet portion 20.
  • the valve member 26 In the closed position, the valve member 26 is configured to seal against a valve seat 32 defined by the inlet cover 30.
  • the valve member 26 supports an 0-ring 27 to provide the seal. It will be appreciated that other types of inlet valves may be used to inhibit undesirable backflow such as an electric actuated valve.
  • the inlet portion 20 is formed from plastic.
  • the stator 12 which forms the remainder of the outer surface 15 is made from metal.
  • the inlet portion 20 and the rotor 16 are arranged such that the surface 22 forming a portion of the outer surface 15 of the chamber 14 is not contacted by the rotor 16 during operation of the vacuum pump 10. This reduces the likelihood of damaging the plastic inlet portion 20 which might be less robust that the metal stator 12.
  • embodiments can provide a cost and weight saving compared to conventional metal stators.
  • manufacturing of the vacuum pump may be simplified because components, such as the valve support 21 and gas channel 24, may require an additional core if made by casting metal. Such components can readily be formed from plastic.
  • Figure 2 shows an exploded view of the inlet portion 20 including the valve support 21 , the inlet cover 30, and the valve member 26 including the O-ring 27.
  • FIG 3 shows another embodiment which is substantially the same as the embodiment shown in Figure 1 with the exception that the inlet cover comprises a protrusion 40.
  • the inlet cover 30 comprises an upstream portion 31a configured for coupling to an enclosure to be evacuated and a downstream portion for connection to the stator (the stator has been omitted from Figure 3 for simplicity but is similar to the stator shown in Figure 1 ).
  • a portion of the inlet channel 19 defined by the upstream portion 31a and a portion of the inlet channel 19 defined by the downstream portion 31 b are offset with respect to each other to form a kinked inlet channel.
  • the rotor may fling liquid, such as lubricating oil, out of the chamber and up the inlet channel.
  • the kink in the inlet channel impedes liquid flowing from the pumping mechanism up the inlet channel 19 towards the upstream portion 31a because there is no straight path for the liquid to follow.
  • the protrusion 40 extends from the inlet cover 30 and into the inlet channel 19 such that it can impede liquid travelling towards the upstream portion 31a towards the inlet valve from the chamber. This can reduce or eliminate contamination of the enclosure being evacuated by the vacuum pump by such liquid.
  • the protrusion 40 extends from a portion of the inlet cover 30 between the upstream portion 31a and the downstream portion 31b.
  • the protrusion 40 is arranged to deflect liquid travelling towards the valve member back towards the chamber. In this way, any liquid such as oil that is projected from the chamber by the rotor can be impeded from contacting the valve member, thereby reducing the chances of such liquid damaging the valve member or reducing its effectiveness.
  • Figure 4 shows a flowchart of a method according to an embodiment.
  • the method comprises replacing an inlet valve of a rotary vane vacuum pump according to an embodiment.
  • Step 101 includes removing an inlet portion from the rotary vane vacuum pump and/or removing a valve member from the rotary vane vacuum pump.
  • Step 102 includes inserting a replacement inlet portion and/or inserting a replacement valve member, respectively.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

La demande concerne une pompe à vide à palettes rotatives (10), comprenant un stator (12) et une partie d'admission (20) délimitant conjointement une surface externe (15) d'une chambre (14), la surface externe de la chambre comprenant un orifice d'admission pour l'admission d'un gaz à pomper et un orifice de sortie pour l'évacuation du gaz. La pompe à vide comprend en outre un rotor (14) logé à l'intérieur de la chambre et conçu pour coopérer avec le stator et la partie d'admission pendant le fonctionnement de la pompe à vide à des fins de pompage du gaz de l'orifice d'admission jusqu'à l'orifice de sortie. La partie d'admission est montée à l'intérieur d'un conduit d'admission (19) de la pompe à vide et délimite au moins une partie de l'orifice d'admission. Une surface de la partie d'admission faisant face à la chambre (14) forme une partie de la surface externe (15) de la chambre (14).
PCT/EP2024/063105 2023-05-15 2024-05-13 Pompe à vide Pending WO2024235915A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202480029310.8A CN121057893A (zh) 2023-05-15 2024-05-13 真空泵

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23305763.7 2023-05-15
EP23305763 2023-05-15

Publications (1)

Publication Number Publication Date
WO2024235915A1 true WO2024235915A1 (fr) 2024-11-21

Family

ID=86604844

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2024/063105 Pending WO2024235915A1 (fr) 2023-05-15 2024-05-13 Pompe à vide

Country Status (2)

Country Link
CN (1) CN121057893A (fr)
WO (1) WO2024235915A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683692U (fr) * 1979-11-29 1981-07-06
JP2000130373A (ja) * 1998-10-23 2000-05-12 Sanwa Seiki Co Ltd 真空ポンプ
JP2005226536A (ja) * 2004-02-12 2005-08-25 Toyota Motor Corp 真空ポンプ
DE102014105684A1 (de) * 2013-04-29 2014-10-30 Ford Global Technologies, Llc Rückschlagventil für eine vakuumpumpe eines motors
EP2602487B1 (fr) * 2010-04-27 2018-07-04 Taiho Kogyo Co., Ltd Pompe à palettes
US20180266419A1 (en) * 2017-03-20 2018-09-20 Lg Electronics Inc. Hermetic compressor
JP2020076336A (ja) * 2018-11-06 2020-05-21 株式会社ミクニ バキュームポンプ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683692U (fr) * 1979-11-29 1981-07-06
JP2000130373A (ja) * 1998-10-23 2000-05-12 Sanwa Seiki Co Ltd 真空ポンプ
JP2005226536A (ja) * 2004-02-12 2005-08-25 Toyota Motor Corp 真空ポンプ
EP2602487B1 (fr) * 2010-04-27 2018-07-04 Taiho Kogyo Co., Ltd Pompe à palettes
DE102014105684A1 (de) * 2013-04-29 2014-10-30 Ford Global Technologies, Llc Rückschlagventil für eine vakuumpumpe eines motors
US20180266419A1 (en) * 2017-03-20 2018-09-20 Lg Electronics Inc. Hermetic compressor
JP2020076336A (ja) * 2018-11-06 2020-05-21 株式会社ミクニ バキュームポンプ

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